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CN115939919B - Solid laser based on Kerr lens mode locking - Google Patents

Solid laser based on Kerr lens mode locking Download PDF

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CN115939919B
CN115939919B CN202310045559.5A CN202310045559A CN115939919B CN 115939919 B CN115939919 B CN 115939919B CN 202310045559 A CN202310045559 A CN 202310045559A CN 115939919 B CN115939919 B CN 115939919B
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laser
mirror
resonant cavity
concave mirror
external cavity
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CN115939919A (en
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张金伟
杨婷婷
武帆
刘贺言
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Huazhong University of Science and Technology
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Abstract

The invention discloses a solid laser based on Kerr lens mode locking, which is used for outputting high-stability femtosecond laser pulse capable of automatically starting Kerr lens mode locking, and belongs to the technical field of solid laser, and comprises the following steps: the laser comprises a pumping source, a laser crystal, a resonant cavity and an external cavity reflector; the pump laser output by the pump source is focused on the laser crystal through the pump light path; the laser generated by the laser crystal oscillates back and forth in the round-trip light path provided by the resonant cavity; the external cavity reflector is used for reflecting laser transmitted by the resonant cavity back to the resonant cavity, so that mode locking of the Kerr lens is started in a light disturbance mode. The invention solves the problem that the traditional Kerr lens mode locking requires a mode of applying mechanical disturbance by a worker to start mode locking, has higher stability, avoids the problem of light path deviation caused by long-term use and pushing of the resonant cavity mirror, and further can realize the high-stability and narrow-pulse-width femtosecond laser which has simple structure, easy operation and repeatable assembly.

Description

一种基于克尔透镜锁模的固体激光器A solid-state laser based on Kerr lens mode locking

技术领域Technical Field

本发明属于固体激光技术领域,更具体地,涉及一种基于克尔透镜锁模的固体激光器。The present invention belongs to the technical field of solid lasers, and more specifically, relates to a solid laser based on Kerr lens mode locking.

背景技术Background technique

超快激光由于具有高峰值功率和窄脉宽的特性成为激光技术领域一个重要的研究方向,在基础科研、生物医疗、工业加工以及国防军事等领域都有着十分广泛且重要的应用。产生超快激光的方式主要有主动锁模和被动锁模,其中主动锁模技术产生的脉冲宽度一般为皮秒量级,为获得飞秒量级的超短脉冲,则通常采用被动锁模技术。被动锁模的锁模机制是可饱和吸收效应,这种效应既可以通过真实的可饱和吸收体来实现,如半导体可饱和吸收镜(SESAM)、碳纳米管、或者石墨烯,也可以通过虚拟的可饱和吸收体来产生,如克尔透镜锁模。被动锁模激光器具有结构紧凑、性能稳定、成本低的优势,可以产生皮秒乃至飞秒量级的超短脉冲,可以广泛地应用在科研、医疗以及工业生产等领域。Ultrafast lasers have become an important research direction in the field of laser technology due to their high peak power and narrow pulse width. They have very extensive and important applications in basic scientific research, biomedicine, industrial processing, national defense and military fields. There are two main ways to generate ultrafast lasers: active mode locking and passive mode locking. The pulse width generated by active mode locking technology is generally in the order of picoseconds. To obtain ultrashort pulses in the order of femtoseconds, passive mode locking technology is usually used. The mode locking mechanism of passive mode locking is the saturable absorption effect, which can be achieved through real saturable absorbers, such as semiconductor saturable absorber mirrors (SESAM), carbon nanotubes, or graphene, or through virtual saturable absorbers, such as Kerr lens mode locking. Passively mode-locked lasers have the advantages of compact structure, stable performance and low cost. They can generate ultrashort pulses in the order of picoseconds or even femtoseconds, and can be widely used in scientific research, medical treatment and industrial production.

目前产生超短脉冲的主要方式以半导体可饱和吸收镜(SESAM)锁模和克尔透镜锁模的发展较为成熟。SESAM锁模需要制备一种将半导体可饱和吸收体和反射镜结合在一起的锁模器件,对激光波长有严格的选择,且在产生高功率激光时容易损伤,成本高;而克尔透镜锁模等效于形成了虚拟的可饱和吸收体,那么则不需要专门地生长和制造锁模器件,仅需要具有非线性效应的克尔介质并结合谐振腔的设计即可实现锁模,因此克尔透镜锁模的抗损伤阈值更高,价格更便宜,同时克尔透镜锁模的调制深度更大,这有利于产生脉冲宽度更短的超快激光。因此克尔透镜锁模是一种适合产生高功率、窄脉宽超快激光的锁模方式。At present, the main methods of generating ultrashort pulses are semiconductor saturable absorber mirror (SESAM) mode locking and Kerr lens mode locking, which are relatively mature. SESAM mode locking requires the preparation of a mode locking device that combines a semiconductor saturable absorber and a reflector. It has strict selection of laser wavelength, is easily damaged when generating high-power lasers, and has high cost. Kerr lens mode locking is equivalent to forming a virtual saturable absorber, so there is no need to grow and manufacture mode locking devices specifically. Only a Kerr medium with nonlinear effects and a resonant cavity design are required to achieve mode locking. Therefore, Kerr lens mode locking has a higher damage threshold and is cheaper. At the same time, the modulation depth of Kerr lens mode locking is greater, which is conducive to the generation of ultrafast lasers with shorter pulse widths. Therefore, Kerr lens mode locking is a mode locking method suitable for generating high-power, narrow pulse width ultrafast lasers.

然而,克尔透镜锁模需要精细的设计谐振腔的结构并仔细调节,且克尔透镜锁模通常不能自启动,实验中一般需要工作人员施加一个机械扰动以启动锁模状态,操作较为复杂,且长期使用对谐振腔镜进行机械振动的方式,容易导致光路偏移,稳定性较差,这在实际的工业应用中无疑是限制克尔透镜锁模超快激光发展的一个重要问题。However, Kerr lens mode locking requires sophisticated design of the resonant cavity structure and careful adjustment, and Kerr lens mode locking usually cannot start by itself. In the experiment, the staff usually needs to apply a mechanical disturbance to start the mode locking state. The operation is relatively complicated, and the long-term use of mechanical vibration of the resonant cavity mirror can easily lead to optical path deviation and poor stability. This is undoubtedly an important issue limiting the development of Kerr lens mode-locked ultrafast lasers in actual industrial applications.

发明内容Summary of the invention

针对现有技术的以上缺陷或改进需求,本发明提供了一种基于克尔透镜锁模的固体激光器,用以解决现有的基于克尔透镜锁模的激光器无法自启动的技术问题。In view of the above defects or improvement needs of the prior art, the present invention provides a solid laser based on Kerr lens mode locking, so as to solve the technical problem that the existing laser based on Kerr lens mode locking cannot self-start.

为了实现上述目的,本发明提供了一种基于克尔透镜锁模的固体激光器,包括:泵浦源、激光晶体、谐振腔和外腔反射镜;In order to achieve the above object, the present invention provides a solid laser based on Kerr lens mode locking, comprising: a pump source, a laser crystal, a resonant cavity and an external cavity reflector;

其中,泵浦源输出的泵浦激光经泵浦光路聚焦到激光晶体上;激光晶体产生的激光在谐振腔所提供的往返光路中来回振荡;Among them, the pump laser output by the pump source is focused onto the laser crystal through the pump optical path; the laser generated by the laser crystal oscillates back and forth in the round-trip optical path provided by the resonant cavity;

外腔反射镜用于将谐振腔透射出的激光反射回谐振腔,从而以光扰动的形式启动克尔透镜锁模。The external cavity mirror is used to reflect the laser transmitted from the resonant cavity back into the resonant cavity, thereby initiating Kerr lens mode locking in the form of optical perturbations.

进一步优选地,当固体激光器为除碟片激光器之外的固体激光器时,上述谐振腔包括:Further preferably, when the solid-state laser is a solid-state laser other than a disk laser, the resonant cavity comprises:

设置在谐振腔两个端部的第一端镜和第二端镜,用于反射谐振腔内的振荡激光,为振荡激光提供往返光路;其中,第一端镜为平面高反镜;第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; wherein the first end mirror is a plane high-reflection mirror; and the second end mirror is an output mirror;

设置在往返光路上的第一凹面镜和第二凹面镜,第一凹面镜和第二凹面镜构成紧聚焦结构,用于将谐振腔内的振荡激光聚焦到激光晶体上,以实现克尔透镜锁模;其中,激光晶体位于第一凹面镜与第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on the round-trip optical path, and the first concave mirror and the second concave mirror form a tight focusing structure, which is used to focus the oscillating laser in the resonant cavity onto the laser crystal to achieve Kerr lens mode locking; wherein the laser crystal is located between the first concave mirror and the second concave mirror;

设置在往返光路上的高色散镜,用于补偿激光晶体和构成谐振腔的各光学元件引入的色散。The high-dispersion mirror arranged on the round-trip optical path is used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity.

进一步优选地,当固体激光器为碟片激光器时,上述谐振腔包括:Further preferably, when the solid-state laser is a disk laser, the resonant cavity comprises:

设置在谐振腔两个端部的第一端镜和第二端镜,用于反射谐振腔内的振荡激光,为振荡激光提供往返光路;其中,第一端镜为平面高反镜;第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; wherein the first end mirror is a plane high-reflection mirror; and the second end mirror is an output mirror;

设置在往返光路上的第一凹面镜和第二凹面镜,第一凹面镜和第二凹面镜构成紧聚焦结构,用于将谐振腔内的振荡激光聚焦到克尔介质上,以实现克尔透镜锁模;其中,克尔介质位于第一凹面镜与第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, and the first concave mirror and the second concave mirror form a tight focusing structure, which is used to focus the oscillating laser in the resonant cavity onto the Kerr medium to achieve Kerr lens mode locking; wherein the Kerr medium is located between the first concave mirror and the second concave mirror;

设置在往返光路上的高色散镜,用于补偿激光晶体和构成谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path is used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity;

上述激光晶体为碟片状激光晶体,除了用于作为增益介质产生激光,还用作折返镜反射振荡激光。The above-mentioned laser crystal is a disk-shaped laser crystal, which is used not only as a gain medium to generate laser light, but also as a reflecting mirror to reflect the oscillated laser light.

进一步优选地,上述谐振腔还包括:设置在往返光路上的一个光阑,用于提高谐振腔内的衍射损耗。Further preferably, the above-mentioned resonant cavity further includes: an aperture arranged on the round-trip optical path, for increasing the diffraction loss in the resonant cavity.

在一种优选方式一下:外腔反射镜设置在谐振腔之外,且位于第一端镜背向谐振腔的一侧;第一端镜用于部分透射和部分反射谐振腔内的振荡激光;外腔反射镜用于对第一端镜透射出的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;In a preferred embodiment, the external cavity reflector is arranged outside the resonant cavity and is located on the side of the first end mirror facing away from the resonant cavity; the first end mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser transmitted by the first end mirror and return the laser to the resonant cavity along the original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

外腔反射镜为平面镜或凹面镜;外腔反射镜靠近第一端镜的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a plane mirror or a concave mirror; a side of the external cavity reflector close to the first end mirror is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%。The first concave mirror and the second concave mirror are both coated with a high-reflection film for oscillating lasers on one side facing the resonant cavity, and the reflectivity is greater than 99.9%.

进一步优选地,外腔反射镜与第一端镜构成外腔,外腔长度为外腔反射镜与第一端镜之间的距离;当外腔反射镜为平面镜时,外腔长度与谐振腔的长度呈整数倍关系;当外腔反射镜为凹面镜时,外腔长度与外腔反射镜的焦距相等。Further preferably, the external cavity reflector and the first end mirror form an external cavity, and the external cavity length is the distance between the external cavity reflector and the first end mirror; when the external cavity reflector is a plane mirror, the external cavity length is an integer multiple of the length of the resonant cavity; when the external cavity reflector is a concave mirror, the external cavity length is equal to the focal length of the external cavity reflector.

进一步优选地,第一端镜远离外腔反射镜的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~20%;第一端镜靠近外腔反射镜的一侧镀有对振荡激光的增透膜,透过率大于99.5%。Further preferably, the side of the first end mirror away from the external cavity reflector is coated with a partially reflective and partially transparent film for the oscillating laser, and the transmittance range is 0.5% to 20%; the side of the first end mirror close to the external cavity reflector is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.5%.

在一种优选方式二下:外腔反射镜设置在谐振腔之外,且位于第二端镜背向谐振腔的一侧;此时,上述固体激光器还包括位于第二端镜与外腔反射镜之间的分光镜,用于将第二端镜透射出的激光部分透射出去,以及部分反射到外腔反射镜上,还用于将外腔反射镜反射回来的激光部分透射出去,以及部分反射回第二端镜;In a preferred embodiment 2, the external cavity reflector is arranged outside the resonant cavity and is located on the side of the second end mirror facing away from the resonant cavity; in this case, the solid-state laser further comprises a beam splitter located between the second end mirror and the external cavity reflector, which is used to transmit part of the laser light transmitted by the second end mirror and reflect part of the laser light onto the external cavity reflector, and to transmit part of the laser light reflected back by the external cavity reflector and reflect part of the laser light back to the second end mirror;

第二端镜用于部分透射和部分反射谐振腔内的振荡激光;外腔反射镜用于对分光镜反射过来的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模。The second end mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser reflected by the beam splitter and return it to the resonant cavity along the original path, thereby starting the Kerr lens mode locking in the form of light disturbance.

其中,外腔反射镜为平面镜;外腔反射镜靠近第二端镜的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a plane mirror; a side of the external cavity reflector close to the second end mirror is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%。The first concave mirror and the second concave mirror are both coated with a high-reflection film for oscillating lasers on one side facing the resonant cavity, and the reflectivity is greater than 99.9%.

进一步优选地,外腔反射镜与第二端镜构成外腔,外腔长度为外腔反射镜与第二端镜之间的距离;外腔长度与谐振腔的长度呈整数倍关系。Further preferably, the external cavity reflector and the second end mirror form an external cavity, and the length of the external cavity is the distance between the external cavity reflector and the second end mirror; the length of the external cavity is an integer multiple of the length of the resonant cavity.

在一种优选方式三下:外腔反射镜设置在谐振腔之外,且位于所选凹面镜背向谐振腔的一侧;In a third preferred embodiment: the external cavity reflector is arranged outside the resonant cavity and is located on a side of the selected concave mirror facing away from the resonant cavity;

所选凹面镜用于部分透射和部分反射谐振腔内的振荡激光;外腔反射镜用于对所选凹面镜透射出的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;The selected concave mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser transmitted by the selected concave mirror and return it to the resonant cavity along its original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

其中,所选凹面镜为第一凹面镜或第二凹面镜;Wherein, the selected concave mirror is the first concave mirror or the second concave mirror;

外腔反射镜为凹面镜,外腔反射镜靠近所选凹面镜的一侧对镀有对振荡激光的高反膜,且反射率大于99.9%;外腔反射镜的焦距大于所选凹面镜的焦距;The external cavity reflector is a concave mirror, and a high-reflection film for oscillating laser is coated on one side of the external cavity reflector close to the selected concave mirror, and the reflectivity is greater than 99.9%; the focal length of the external cavity reflector is greater than the focal length of the selected concave mirror;

第一端镜面向谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.

进一步优选地,所选凹面镜面向谐振腔的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~5%;所选凹面镜背向谐振腔的一侧镀有对振荡激光的增透膜,透过率大于99.5%。Further preferably, the side of the selected concave mirror facing the resonant cavity is coated with a partially reflective and partially transparent film for the oscillating laser, and the transmittance range is 0.5% to 5%; the side of the selected concave mirror facing away from the resonant cavity is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.5%.

进一步优选地,外腔反射镜与所选凹面镜构成外腔,外腔长度为外腔反射镜与所选凹面镜间的距离;外腔长度为外腔反射镜的焦距与所选凹面镜焦距之差。Further preferably, the external cavity reflector and the selected concave mirror form an external cavity, and the external cavity length is the distance between the external cavity reflector and the selected concave mirror; the external cavity length is the difference between the focal length of the external cavity reflector and the focal length of the selected concave mirror.

在一种优选方式四下:当固体激光器为除碟片激光器之外的固体激光器时,外腔反射镜设置在谐振腔之外,且位于激光晶体背向谐振腔的一侧;激光晶体与谐振腔呈布儒斯特角放置,用于将部分振荡激光反射到外腔反射镜上;外腔反射镜用于对激光晶体反射的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;In a preferred embodiment, when the solid-state laser is a solid-state laser other than a disk laser, the external cavity reflector is arranged outside the resonant cavity and is located on the side of the laser crystal facing away from the resonant cavity; the laser crystal and the resonant cavity are placed at a Brewster angle to reflect part of the oscillating laser onto the external cavity reflector; the external cavity reflector is used to reflect the laser reflected by the laser crystal and return it to the resonant cavity along its original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

其中,外腔反射镜为凹面镜;外腔反射镜靠近激光晶体的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a concave mirror; the side of the external cavity reflector close to the laser crystal is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;The first concave mirror and the second concave mirror are both coated with a high-reflection film for the oscillating laser on the side facing the resonant cavity, and the reflectivity is greater than 99.9%;

第一端镜面向谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.

进一步优选地,外腔反射镜与激光晶体构成外腔,外腔长度为外腔反射镜与激光晶体之间的距离;外腔长度与外腔反射镜的焦距相等。Further preferably, the external cavity reflector and the laser crystal form an external cavity, and the external cavity length is the distance between the external cavity reflector and the laser crystal; the external cavity length is equal to the focal length of the external cavity reflector.

在一种优选方式五下:当固体激光器为碟片激光器时,外腔反射镜设置在谐振腔之外,且位于克尔介质背向谐振腔的一侧;克尔介质与谐振腔呈布儒斯特角放置,用于将部分振荡激光反射到外腔反射镜上;外腔反射镜用于对克尔介质反射的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;In a preferred embodiment 5: when the solid-state laser is a disk laser, the external cavity reflector is arranged outside the resonant cavity and is located on the side of the Kerr medium facing away from the resonant cavity; the Kerr medium and the resonant cavity are placed at a Brewster angle to reflect part of the oscillating laser onto the external cavity reflector; the external cavity reflector is used to reflect the laser reflected by the Kerr medium and return it to the resonant cavity along its original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

其中,外腔反射镜为凹面镜;外腔反射镜靠近激光晶体的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a concave mirror; the side of the external cavity reflector close to the laser crystal is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;The first concave mirror and the second concave mirror are both coated with a high-reflection film for the oscillating laser on the side facing the resonant cavity, and the reflectivity is greater than 99.9%;

第一端镜面向谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.

进一步优选地,外腔反射镜与克尔介质构成外腔,外腔长度为外腔反射镜与克尔介质之间的距离;外腔长度与外腔反射镜的焦距相等。Further preferably, the external cavity reflector and the Kerr medium form an external cavity, and the external cavity length is the distance between the external cavity reflector and the Kerr medium; the external cavity length is equal to the focal length of the external cavity reflector.

总体而言,通过本发明所构思的以上技术方案,能够取得以下有益效果:In general, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

1、本发明提供了一种基于克尔透镜锁模的固体激光器,通过在谐振腔外设置外腔反射镜,将谐振腔透射出的激光反射回谐振腔,从而以光扰动的形式启动克尔透镜锁模,实现了克尔透镜锁模的自启动,避免了常规的机械振动方式启动锁模,同时也避免了在长期使用过程中由于需要对谐振腔进行的机械振动所导致的光路偏移问题,具有较高的稳定性。1. The present invention provides a solid laser based on Kerr lens mode locking. An external cavity reflector is arranged outside the resonant cavity to reflect the laser transmitted from the resonant cavity back into the resonant cavity, thereby starting the Kerr lens mode locking in the form of light disturbance, thereby realizing the self-starting of the Kerr lens mode locking, avoiding the conventional mechanical vibration mode locking, and also avoiding the optical path deviation problem caused by the mechanical vibration of the resonant cavity during long-term use, and having high stability.

2、本发明所提供的基于克尔透镜锁模的固体激光器,一方面,成本低、价格便宜,适合工业加工、生产等大规模工业器件领域,另一方面,克尔透镜锁模调制深度大,可以实现脉冲宽度较窄的激光脉冲。因此,本发明所提供的克尔透镜锁模固体激光器具有窄脉宽、易工业化的优势,可以实现结构简单、易操作、可重复组装的高稳定性、窄脉宽的飞秒激光器。2. The solid laser based on Kerr lens mode locking provided by the present invention has low cost and low price, and is suitable for large-scale industrial device fields such as industrial processing and production. On the other hand, the Kerr lens mode locking modulation depth is large, and laser pulses with narrow pulse width can be achieved. Therefore, the Kerr lens mode locking solid laser provided by the present invention has the advantages of narrow pulse width and easy industrialization, and can realize a femtosecond laser with high stability and narrow pulse width that is simple in structure, easy to operate, and can be repeatedly assembled.

3、本发明所提出的基于克尔透镜锁模的固体激光器包括但不限于块状固体激光器、碟片激光器,适用于各种形状的激光晶体。可以满足不用的使用需求,如块状固体激光器适用于结构紧凑、小型化的工业需求,碟片激光器适用于高功率、高光束质量的工业需求。3. The solid laser based on Kerr lens mode locking proposed in the present invention includes but is not limited to bulk solid lasers and disk lasers, and is applicable to laser crystals of various shapes. It can meet different usage requirements, such as bulk solid lasers are suitable for compact and miniaturized industrial needs, and disk lasers are suitable for high power and high beam quality industrial needs.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明实施例提供的当外腔置于第一端镜外,且外腔反射镜为平面镜时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;1 is a schematic diagram of the optical path structure of a Kerr lens locked modular solid laser when the external cavity is placed outside the first end mirror and the external cavity reflector is a plane mirror, provided by an embodiment of the present invention;

图2为本发明实施例提供的当外腔置于第一端镜外,且外腔反射镜为凹面镜时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;2 is a schematic diagram of the optical path structure of a Kerr lens-locked modular solid laser when the external cavity is placed outside the first end mirror and the external cavity reflector is a concave mirror, provided by an embodiment of the present invention;

图3为本发明实施例提供的当外腔置于第一端镜外,且外腔反射镜为平面镜时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;3 is a schematic diagram of the optical path structure of a Kerr lens mode-locked disk laser started by light disturbance when the external cavity is placed outside the first end mirror and the external cavity reflector is a plane mirror, provided by an embodiment of the present invention;

图4为本发明实施例提供的当外腔置于第一端镜外,且外腔反射镜为凹面镜时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;4 is a schematic diagram of the optical path structure of a Kerr lens mode-locked disk laser started by light disturbance when the external cavity is placed outside the first end mirror and the external cavity reflector is a concave mirror, provided by an embodiment of the present invention;

图5为本发明实施例提供的当外腔置于凹面镜外时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;FIG5 is a schematic diagram of the optical path structure of a Kerr lens-locked modular solid laser started by light disturbance when the external cavity is placed outside the concave mirror provided in an embodiment of the present invention;

图6为本发明实施例提供的当外腔置于凹面镜外时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;FIG6 is a schematic diagram of the optical path structure of a Kerr lens mode-locked disk laser started by light disturbance when the external cavity is placed outside the concave mirror provided in an embodiment of the present invention;

图7为本发明实施例提供的当外腔置于第二端镜外时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;7 is a schematic diagram of the optical path structure of a Kerr lens locked modular solid laser started by light disturbance when the external cavity is placed outside the second end mirror provided in an embodiment of the present invention;

图8为本发明实施例提供的当外腔置于第二端镜外时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;FIG8 is a schematic diagram of the optical path structure of a Kerr lens mode-locked disk laser started by light disturbance when the external cavity is placed outside the second end mirror provided in an embodiment of the present invention;

图9为本发明实施例提供的当外腔置于激光晶体外时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;FIG9 is a schematic diagram of the optical path structure of a Kerr lens-locked modular solid laser started by light disturbance when the external cavity is placed outside the laser crystal according to an embodiment of the present invention;

图10为本发明实施例提供的当外腔置于克尔介质外时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图。FIG10 is a schematic diagram of the optical path structure of a Kerr lens mode-locked disk laser started by light disturbance when the external cavity is placed outside the Kerr medium provided by an embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

为了实现上述目的,本发明提供了一种基于克尔透镜锁模的固体激光器,用于实现稳定的自启动克尔透镜锁模飞秒脉冲输出,包括:泵浦源、激光晶体、谐振腔和外腔反射镜;In order to achieve the above-mentioned object, the present invention provides a solid laser based on Kerr lens mode locking, which is used to achieve stable self-starting Kerr lens mode locking femtosecond pulse output, comprising: a pump source, a laser crystal, a resonant cavity and an external cavity reflector;

泵浦源将其产生的泵浦激光经过泵浦光路聚焦到激光晶体上,激光晶体用作增益介质以产生激光,同时利用晶体的克尔效应结合谐振腔的设计形成克尔透镜锁模的激光脉冲。外腔反射镜将谐振腔透射出的激光反射回谐振腔内以光扰动的形式启动克尔透镜锁模。The pump source focuses the pump laser it generates onto the laser crystal through the pump optical path. The laser crystal is used as a gain medium to generate laser light. At the same time, the Kerr effect of the crystal is combined with the design of the resonant cavity to form a laser pulse for Kerr lens mode locking. The external cavity reflector reflects the laser transmitted from the resonant cavity back into the resonant cavity to start the Kerr lens mode locking in the form of optical disturbance.

当固体激光器为除碟片激光器之外的固体激光器时,上述谐振腔包括:When the solid-state laser is a solid-state laser other than a disk laser, the resonant cavity comprises:

设置在谐振腔两个端部的第一端镜和第二端镜,用于反射谐振腔内的振荡激光,为振荡激光提供往返光路;其中,第一端镜为平面高反镜;第二端镜为输出镜;具体地,第二端镜为平面镜,两侧镀有不同的介质膜;第二端镜面向谐振腔的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~20%(优选为1%~20%)。第二端镜背向谐振腔的一侧镀有对振荡激光的增透膜,透过率大于99.9%;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; wherein the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; specifically, the second end mirror is a plane mirror, with different dielectric films coated on both sides; the side of the second end mirror facing the resonant cavity is coated with a partial reflection and partial transmission film for the oscillating laser, and the transmittance range is 0.5% to 20% (preferably 1% to 20%). The side of the second end mirror facing away from the resonant cavity is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.9%;

设置在往返光路上第一凹面镜和第二凹面镜,第一凹面镜和第二凹面镜构成紧聚焦结构,用于将谐振腔内的振荡激光聚焦到激光晶体上,以实现克尔透镜锁模;其中,激光晶体位于第一凹面镜与第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, and the first concave mirror and the second concave mirror form a tight focusing structure, which is used to focus the oscillating laser in the resonant cavity onto the laser crystal to achieve Kerr lens mode locking; wherein the laser crystal is located between the first concave mirror and the second concave mirror;

设置在往返光路上的高色散镜,用于补偿激光晶体和构成谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path is used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity;

其中,当激光晶体端面垂直于谐振腔摆放时,两侧镀有对振荡激光的增透膜;当激光晶体端面与谐振腔成布儒斯特角摆放时,两侧不镀膜;激光晶体包括但不限于Yb:KYW、Yb:KGW、Yb:CALGO、Yb:Lu2O3、Yb:YAG、Yb:YGG、Ho:YAG、Cr:ZnS、Cr:ZnSe、Ti:sapphire等晶体。泵浦源包括但不限定输出波长为300nm~5μm区间的半导体激光器、光纤激光器和固体激光器等。When the end face of the laser crystal is placed perpendicular to the resonant cavity, both sides are coated with anti-reflection films for the oscillating laser; when the end face of the laser crystal is placed at a Brewster angle with the resonant cavity, both sides are not coated; laser crystals include but are not limited to Yb:KYW, Yb:KGW, Yb:CALGO, Yb:Lu 2 O 3 , Yb:YAG, Yb:YGG, Ho:YAG, Cr:ZnS, Cr:ZnSe, Ti:sapphire and other crystals. Pump sources include but are not limited to semiconductor lasers, fiber lasers and solid-state lasers with output wavelengths in the range of 300nm to 5μm.

当固体激光器为碟片激光器时,上述谐振腔包括:When the solid-state laser is a disk laser, the resonant cavity includes:

设置在谐振腔两个端部的第一端镜和第二端镜,用于反射谐振腔内的振荡激光,为振荡激光提供往返光路;其中,第一端镜为平面高反镜;第二端镜为输出镜;具体地,第二端镜为平面镜,两侧镀有不同的介质膜;第二端镜面向谐振腔的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~20%(优选为1%~20%)。第二端镜背向谐振腔的一侧镀有对振荡激光的增透膜,透过率大于99.9%;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; wherein the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; specifically, the second end mirror is a plane mirror, and different dielectric films are coated on both sides; the side of the second end mirror facing the resonant cavity is coated with a partial reflection and partial transmission film for the oscillating laser, and the transmittance range is 0.5% to 20% (preferably 1% to 20%). The side of the second end mirror facing away from the resonant cavity is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.9%;

设置在往返光路上第一凹面镜和第二凹面镜,第一凹面镜和第二凹面镜构成紧聚焦结构,用于将谐振腔内的振荡激光聚焦到克尔介质上,以实现克尔透镜锁模;其中,克尔介质位于第一凹面镜与第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, and the first concave mirror and the second concave mirror form a tight focusing structure, which is used to focus the oscillating laser in the resonant cavity onto the Kerr medium to achieve Kerr lens mode locking; wherein the Kerr medium is located between the first concave mirror and the second concave mirror;

设置在往返光路上的高色散镜,用于补偿谐振腔内各个光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path is used to compensate for the dispersion introduced by each optical element in the resonant cavity;

上述激光晶体为碟片状激光晶体,除了用于作为增益介质产生激光,还用作折返镜反射振荡激光;碟片状激光晶体面向谐振腔的一侧镀有泵浦激光和振荡激光的增透膜,碟片状激光晶体背向谐振腔的一侧镀有泵浦激光和振荡激光的高反膜;在一种可选实施方式下,碟片状激光晶体呈圆盘状或椭圆盘状,厚度为10μm~1mm,直径为3~30mm;碟片状激光晶体的材料包括但不限定Yb:YAG、Ho:YAG、Tm:YAG、Ho:KYW、Yb:CALGO,Cr:ZnSe、Yb:LuScO3、Yb:Lu2O3等适合加工成碟片状的激光晶体。The above-mentioned laser crystal is a disk-shaped laser crystal, which is used not only as a gain medium to generate laser, but also as a folding mirror to reflect the oscillating laser; the side of the disk-shaped laser crystal facing the resonant cavity is coated with an anti-reflection film for the pump laser and the oscillating laser, and the side of the disk-shaped laser crystal facing away from the resonant cavity is coated with a high-reflection film for the pump laser and the oscillating laser; in an optional implementation manner, the disk-shaped laser crystal is disk-shaped or elliptical disk-shaped, with a thickness of 10μm to 1mm and a diameter of 3 to 30mm; the material of the disk-shaped laser crystal includes but is not limited to Yb:YAG, Ho:YAG, Tm:YAG, Ho:KYW, Yb: CALGO , Cr:ZnSe, Yb: LuScO3 , Yb: Lu2O3 and the like suitable for processing into a disk-shaped laser crystal.

克尔介质与谐振腔呈布儒斯特角放置。在一种可选实施方式下,克尔介质为厚度0.1mm~10mm的蓝宝石或熔融石英等具有非线性克尔效应的材料。优选地,克尔介质为1mm~3mm厚的蓝宝石薄片。The Kerr medium is placed at a Brewster angle with the resonant cavity. In an optional embodiment, the Kerr medium is a material having a nonlinear Kerr effect such as sapphire or fused quartz with a thickness of 0.1 mm to 10 mm. Preferably, the Kerr medium is a sapphire sheet with a thickness of 1 mm to 3 mm.

优选地,上述谐振腔还包括:设置在往返光路上的一个光阑,用于提高谐振腔内的衍射损耗。具体地,根据谐振腔内的模式分布,可以采用不同大小的光阑设置在腔内不同的位置,用于提高腔内的衍射损耗,以辅助克尔透镜锁模。在一种可选实施方式下,光阑孔径为0.5mm~5mm。Preferably, the resonant cavity further comprises: an aperture arranged on the round-trip optical path, for increasing the diffraction loss in the resonant cavity. Specifically, according to the mode distribution in the resonant cavity, apertures of different sizes can be arranged at different positions in the cavity, for increasing the diffraction loss in the cavity, so as to assist the Kerr lens mode locking. In an optional embodiment, the aperture of the aperture is 0.5 mm to 5 mm.

具体地,在一种可选实施方式一中:Specifically, in an optional implementation mode 1:

外腔反射镜设置在谐振腔之外,且位于第一端镜背向谐振腔的一侧;第一端镜用于部分透射和部分反射谐振腔内的振荡激光;外腔反射镜用于对第一端镜透射出的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the first end mirror facing away from the resonant cavity; the first end mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser transmitted by the first end mirror and return the laser to the resonant cavity along the original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

外腔反射镜为平面镜或凹面镜;外腔反射镜靠近第一端镜的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a plane mirror or a concave mirror; a side of the external cavity reflector close to the first end mirror is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;The first concave mirror and the second concave mirror are both coated with a high-reflection film for the oscillating laser on the side facing the resonant cavity, and the reflectivity is greater than 99.9%;

进一步优选地,外腔反射镜与第一端镜构成外腔,外腔长度为外腔反射镜与第一端镜之间的距离;当外腔反射镜为平面镜时,外腔长度与谐振腔的长度呈整数倍关系;此时,谐振腔内的连续光所形成的随机脉冲在外部同步脉冲的叠加下强度增强,在这些随机脉冲中,可以达到锁模阈值的几率增加,进而提高启动锁模的能力;Further preferably, the external cavity reflector and the first end mirror form an external cavity, and the length of the external cavity is the distance between the external cavity reflector and the first end mirror; when the external cavity reflector is a plane mirror, the length of the external cavity is an integer multiple of the length of the resonant cavity; at this time, the random pulses formed by the continuous light in the resonant cavity are enhanced in intensity under the superposition of the external synchronization pulses, and the probability of reaching the mode locking threshold among these random pulses is increased, thereby improving the ability to start mode locking;

当外腔反射镜为凹面镜时,外腔长度与外腔反射镜的焦距相等,此时,扰动光在第一端镜处为束腰位置,进而使扰动光与谐振腔内的激光横模模式匹配,提高启动锁模的能力;其中,扰动光为外腔反射镜反射回谐振腔的激光。When the external cavity reflector is a concave mirror, the length of the external cavity is equal to the focal length of the external cavity reflector. At this time, the disturbed light is at the beam waist position at the first end mirror, thereby matching the disturbed light with the laser transverse mode in the resonant cavity, thereby improving the ability to start mode locking; wherein the disturbed light is the laser reflected back to the resonant cavity by the external cavity reflector.

优选地,第一端镜远离外腔反射镜的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~20%;第一端镜靠近外腔反射镜的一侧镀有对振荡激光的增透膜,透过率大于99.5%。Preferably, the side of the first end mirror away from the external cavity reflector is coated with a partially reflective and partially transparent film for the oscillating laser, and the transmittance range is 0.5% to 20%; the side of the first end mirror close to the external cavity reflector is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.5%.

在一种可选实施方式二中:In an optional implementation mode 2:

外腔反射镜设置在谐振腔之外,且位于第二端镜背向谐振腔的一侧;此时,上述固体激光器还包括位于第二端镜与外腔反射镜之间的分光镜,用于将第二端镜透射出的激光部分透射出去,以及部分反射到外腔反射镜上,还用于将外腔反射镜反射回来的激光部分透射出去,以及部分反射回第二端镜;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the second end mirror facing away from the resonant cavity; in this case, the solid-state laser further comprises a beam splitter located between the second end mirror and the external cavity reflector, which is used to transmit part of the laser light transmitted by the second end mirror and reflect part of it onto the external cavity reflector, and to transmit part of the laser light reflected back by the external cavity reflector and reflect part of it back onto the second end mirror;

第二端镜用于部分透射和部分反射谐振腔内的振荡激光;外腔反射镜用于对分光镜反射过来的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模。The second end mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser reflected by the beam splitter and return it to the resonant cavity along the original path, thereby starting the Kerr lens mode locking in the form of light disturbance.

其中,外腔反射镜为平面镜;外腔反射镜靠近第二端镜的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a plane mirror; a side of the external cavity reflector close to the second end mirror is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%。The first concave mirror and the second concave mirror are both coated with a high-reflection film for oscillating lasers on one side facing the resonant cavity, and the reflectivity is greater than 99.9%.

优选地,外腔反射镜与第二端镜构成外腔,外腔长度为外腔反射镜与第二端镜之间的距离;外腔长度与谐振腔的长度呈整数倍关系,此时,谐振腔内的连续光所形成的随机脉冲在外部同步脉冲的叠加下强度增强,在这些随机脉冲中,可以达到锁模阈值的几率增加,进而提高启动锁模的能力;扰动光为外腔反射镜反射回谐振腔的激光。Preferably, the external cavity reflector and the second end mirror constitute an external cavity, and the length of the external cavity is the distance between the external cavity reflector and the second end mirror; the length of the external cavity is an integer multiple of the length of the resonant cavity. At this time, the random pulses formed by the continuous light in the resonant cavity are enhanced in intensity under the superposition of the external synchronization pulses, and the probability of reaching the mode locking threshold among these random pulses increases, thereby improving the ability to start the mode locking; the disturbing light is the laser reflected back to the resonant cavity by the external cavity reflector.

在一种可选实施方式三中:In an optional implementation mode three:

外腔反射镜设置在谐振腔之外,且位于所选凹面镜背向谐振腔的一侧;所选凹面镜用于部分透射和部分反射谐振腔内的振荡激光;外腔反射镜用于对所选凹面镜透射出的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the selected concave mirror facing away from the resonant cavity; the selected concave mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser transmitted by the selected concave mirror and return the laser to the resonant cavity along the original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

其中,所选凹面镜为第一凹面镜或第二凹面镜;Wherein, the selected concave mirror is the first concave mirror or the second concave mirror;

外腔反射镜为凹面镜,外腔反射镜靠近所选凹面镜的一侧对镀有对振荡激光的高反膜,且反射率大于99.9%;外腔反射镜的焦距大于所选凹面镜的焦距;The external cavity reflector is a concave mirror, and a side of the external cavity reflector close to the selected concave mirror is coated with a high reflection film for oscillating laser, and the reflectivity is greater than 99.9%; the focal length of the external cavity reflector is greater than the focal length of the selected concave mirror;

第一端镜面向谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.

优选地,所选凹面镜面向谐振腔的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~5%;所选凹面镜背向谐振腔的一侧镀有对振荡激光的增透膜,透过率大于99.5%。Preferably, the side of the selected concave mirror facing the resonant cavity is coated with a partially reflective and partially transparent film for the oscillating laser, and the transmittance range is 0.5% to 5%; the side of the selected concave mirror facing away from the resonant cavity is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.5%.

优选地,外腔反射镜与所选凹面镜构成外腔,外腔长度为外腔反射镜与所选凹面镜间的距离;外腔长度为外腔反射镜的焦距与所选凹面镜焦距之差;此时,扰动光在激光晶体(克尔介质)处为束腰位置,进而使扰动光与谐振腔内的激光横模模式匹配,提高启动锁模的能力;其中,扰动光为外腔反射镜反射回谐振腔的激光。Preferably, the external cavity reflector and the selected concave mirror constitute an external cavity, and the external cavity length is the distance between the external cavity reflector and the selected concave mirror; the external cavity length is the difference between the focal length of the external cavity reflector and the focal length of the selected concave mirror; at this time, the disturbed light is at the beam waist position at the laser crystal (Kerr medium), thereby matching the disturbed light with the laser transverse mode in the resonant cavity, thereby improving the ability to start mode locking; wherein, the disturbed light is the laser reflected back to the resonant cavity by the external cavity reflector.

在一种可选实施方式四中:In an optional implementation mode 4:

当固体激光器为除碟片激光器之外的固体激光器时,外腔反射镜设置在谐振腔之外,且位于激光晶体背向谐振腔的一侧;激光晶体与谐振腔呈布儒斯特角放置,用于将部分振荡激光反射到外腔反射镜上;外腔反射镜用于对激光晶体反射的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;When the solid-state laser is a solid-state laser other than a disk laser, the external cavity reflector is arranged outside the resonant cavity and is located on the side of the laser crystal facing away from the resonant cavity; the laser crystal is placed at a Brewster angle with the resonant cavity to reflect part of the oscillating laser onto the external cavity reflector; the external cavity reflector is used to reflect the laser reflected by the laser crystal and return it to the resonant cavity along its original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

其中,外腔反射镜为凹面镜;外腔反射镜靠近激光晶体的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a concave mirror; the side of the external cavity reflector close to the laser crystal is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;The first concave mirror and the second concave mirror are both coated with a high-reflection film for the oscillating laser on the side facing the resonant cavity, and the reflectivity is greater than 99.9%;

第一端镜面向谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.

优选地,外腔反射镜与激光晶体构成外腔,外腔长度为外腔反射镜与激光晶体之间的距离;外腔长度与外腔反射镜的焦距相等;此时,扰动光在激光晶体处为束腰位置,进而使扰动光与谐振腔内的激光横模模式匹配,提高启动锁模的能力;其中,扰动光为外腔反射镜反射回谐振腔的激光。Preferably, the external cavity reflector and the laser crystal form an external cavity, and the external cavity length is the distance between the external cavity reflector and the laser crystal; the external cavity length is equal to the focal length of the external cavity reflector; at this time, the disturbed light is at the beam waist position at the laser crystal, thereby matching the disturbed light with the laser transverse mode in the resonant cavity, thereby improving the ability to start mode locking; wherein the disturbed light is the laser reflected back to the resonant cavity by the external cavity reflector.

在一种可选实施方式五中:In an optional implementation mode five:

当固体激光器为碟片激光器时,外腔反射镜设置在谐振腔之外,且位于克尔介质背向谐振腔的一侧;克尔介质与谐振腔呈布儒斯特角放置,用于将部分振荡激光反射到外腔反射镜上;外腔反射镜用于对克尔介质反射的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;When the solid-state laser is a disk laser, the external cavity reflector is arranged outside the resonant cavity and is located on the side of the Kerr medium facing away from the resonant cavity; the Kerr medium and the resonant cavity are placed at a Brewster angle to reflect part of the oscillating laser onto the external cavity reflector; the external cavity reflector is used to reflect the laser reflected by the Kerr medium and return it to the resonant cavity along the original path, thereby starting the Kerr lens mode locking in the form of optical disturbance;

其中,外腔反射镜为凹面镜;外腔反射镜靠近激光晶体的一侧镀有对振荡激光的高反膜,反射率大于99.9%;The external cavity reflector is a concave mirror; the side of the external cavity reflector close to the laser crystal is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%;

第一凹面镜和第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;The first concave mirror and the second concave mirror are both coated with a high-reflection film for the oscillating laser on the side facing the resonant cavity, and the reflectivity is greater than 99.9%;

第一端镜面向谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.

优选地,外腔反射镜与克尔介质构成外腔,外腔长度为外腔反射镜与克尔介质之间的距离;外腔长度与外腔反射镜的焦距相等;此时,扰动光在克尔介质处为束腰位置,进而使扰动光与谐振腔内的激光横模模式匹配,提高启动锁模的能力;其中,扰动光为外腔反射镜反射回谐振腔的激光。Preferably, the external cavity reflector and the Kerr medium constitute an external cavity, and the external cavity length is the distance between the external cavity reflector and the Kerr medium; the external cavity length is equal to the focal length of the external cavity reflector; at this time, the disturbed light is at the beam waist position at the Kerr medium, thereby matching the disturbed light with the laser transverse mode in the resonant cavity, thereby improving the ability to start mode locking; wherein the disturbed light is the laser reflected back to the resonant cavity by the external cavity reflector.

为了进一步说明本发明所提供的固体激光器,下面基于四种光扰动启动克尔透镜锁模固体激光器的具体实施例进行详述,需要说明的是,本发明将固体激光器分为碟片激光器和除碟片激光器之外的固体激光器;除碟片激光器之外的固体激光器包括:块状固体激光器、半导体激光器等。In order to further illustrate the solid-state laser provided by the present invention, specific embodiments of the Kerr lens mode-locked solid-state laser started by four optical disturbances are described in detail below. It should be noted that the present invention divides solid-state lasers into disk lasers and solid-state lasers other than disk lasers; solid-state lasers other than disk lasers include: bulk solid-state lasers, semiconductor lasers, etc.

本发明所提供的除碟片激光器之外的固体激光器均以块状固体激光器为例进行说明,本实施例中的块状固体激光器的激光晶体为边长为1mm~20mm的块状固体形状。具体地,图1~图10分别为外腔在不同位置时的光扰动启动克尔透镜锁模块状固体激光器及碟片激光器的光路图。其中,图1为当外腔置于第一端镜外,且外腔反射镜为平面镜时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;图2为当外腔置于第一端镜外,且外腔反射镜为凹面镜时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;图3为当外腔置于第一端镜外,且外腔反射镜为平面镜时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;图4为当外腔置于第一端镜外,且外腔反射镜为凹面镜时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;图5为当外腔置于凹面镜外时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;图6为当外腔置于凹面镜外时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;The solid lasers provided by the present invention, except for the disk laser, are all described by taking the block solid laser as an example. The laser crystal of the block solid laser in this embodiment is a block solid shape with a side length of 1 mm to 20 mm. Specifically, Figures 1 to 10 are optical path diagrams of the Kerr lens locked module solid laser and the disk laser when the external cavity is at different positions. Among them, Figure 1 is a schematic diagram of the optical path structure of the Kerr lens locked module-shaped solid laser started by light perturbation when the external cavity is placed outside the first end mirror and the external cavity reflector is a plane mirror; Figure 2 is a schematic diagram of the optical path structure of the Kerr lens locked module-shaped solid laser started by light perturbation when the external cavity is placed outside the first end mirror and the external cavity reflector is a concave mirror; Figure 3 is a schematic diagram of the optical path structure of the Kerr lens mode-locked disk laser started by light perturbation when the external cavity is placed outside the first end mirror and the external cavity reflector is a plane mirror; Figure 4 is a schematic diagram of the optical path structure of the Kerr lens mode-locked disk laser started by light perturbation when the external cavity is placed outside the first end mirror and the external cavity reflector is a concave mirror; Figure 5 is a schematic diagram of the optical path structure of the Kerr lens locked module-shaped solid laser started by light perturbation when the external cavity is placed outside the concave mirror; Figure 6 is a schematic diagram of the optical path structure of the Kerr lens mode-locked disk laser started by light perturbation when the external cavity is placed outside the concave mirror;

图7为当外腔置于第二端镜外时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;图8为当外腔置于第二端镜外时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图;图9为当外腔置于激光晶体外时的光扰动启动克尔透镜锁模块状固体激光器的光路结构示意图;图10为当外腔置于克尔介质外时的光扰动启动克尔透镜锁模碟片激光器的光路结构示意图。Figure 7 is a schematic diagram of the optical path structure of the Kerr lens locked modular solid laser started by light perturbations when the external cavity is placed outside the second end mirror; Figure 8 is a schematic diagram of the optical path structure of the Kerr lens mode-locked disk laser started by light perturbations when the external cavity is placed outside the second end mirror; Figure 9 is a schematic diagram of the optical path structure of the Kerr lens locked modular solid laser started by light perturbations when the external cavity is placed outside the laser crystal; Figure 10 is a schematic diagram of the optical path structure of the Kerr lens mode-locked disk laser started by light perturbations when the external cavity is placed outside the Kerr medium.

从图1、图2、图5、图7和图9可以看出,光扰动启动克尔透镜锁模块状固体激光器主要包括给激光晶体提供泵浦激光的泵浦源1、用于将泵浦激光聚焦到激光晶体上的泵浦光路2、用作增益介质的激光晶体3、由各个光学元件限定的谐振腔11,用于提供往返的振荡激光,及提供光扰动的外腔13。As can be seen from Figures 1, 2, 5, 7 and 9, the optical perturbation started Kerr lens locked modular solid laser mainly includes a pump source 1 for providing pump laser to the laser crystal, a pump optical path 2 for focusing the pump laser onto the laser crystal, a laser crystal 3 used as a gain medium, a resonant cavity 11 defined by various optical elements for providing reciprocating oscillating laser, and an external cavity 13 for providing optical perturbations.

从图3、图4、图6、图8和图10可以看出,光扰动启动克尔透镜锁模碟片激光器主要包括给碟片状激光晶体提供泵浦激光的泵浦源1、将泵浦激光聚焦到碟片状激光晶体上的泵浦光路2、用作增益介质的碟片状激光晶体7、用于克尔透镜锁模且与振荡激光呈布儒斯特角放置的克尔介质3、由各个光学元件所限定的谐振腔11,用于提供往返的振荡激光,及提供光扰动的外腔13。As can be seen from Figures 3, 4, 6, 8 and 10, the optical perturbation started Kerr lens mode-locked disk laser mainly includes a pump source 1 for providing pump laser to the disk-shaped laser crystal, a pump optical path 2 for focusing the pump laser onto the disk-shaped laser crystal, a disk-shaped laser crystal 7 used as a gain medium, a Kerr medium 3 used for Kerr lens mode locking and placed at a Brewster angle with the oscillating laser, a resonant cavity 11 defined by various optical elements for providing a reciprocating oscillating laser, and an external cavity 13 for providing optical perturbations.

从图1~图10可以看出,谐振腔11大致相同,注意区别在于外腔13的设计。在本发明所提供的实施例中,谐振腔11包括:第一端镜9、第二端镜6、用于提供色散的高色散镜8、用于将振荡激光聚焦到激光晶体(克尔介质)上的第一凹面镜4和第二凹面镜5以及用于提高腔内衍射损耗的光阑10。对于块状固体激光器,As can be seen from Figures 1 to 10, the resonant cavity 11 is substantially the same, and the difference lies in the design of the external cavity 13. In the embodiment provided by the present invention, the resonant cavity 11 includes: a first end mirror 9, a second end mirror 6, a high dispersion mirror 8 for providing dispersion, a first concave mirror 4 and a second concave mirror 5 for focusing the oscillating laser onto a laser crystal (Kerr medium), and an aperture 10 for increasing the diffraction loss in the cavity. For a bulk solid laser,

谐振腔11还包括高反镜7;且第一凹面镜4面向谐振腔的一侧镀有对振荡激光的高反膜,对泵浦激光的增透膜;第一凹面镜4面向泵浦光路的一侧镀有对泵浦激光的增透膜。The resonant cavity 11 also includes a high-reflection mirror 7; and the side of the first concave mirror 4 facing the resonant cavity is coated with a high-reflection film for the oscillating laser and an anti-reflection film for the pump laser; the side of the first concave mirror 4 facing the pump light path is coated with an anti-reflection film for the pump laser.

对于碟片激光器,谐振腔11还包括同时用作增益介质和折返镜的碟片状激光晶体7;且碟片状激光晶体面向谐振腔的一侧镀有对振荡激光和泵浦激光的高透膜,背向谐振腔的一侧镀有对振荡激光和泵浦激光的高反膜。For the disk laser, the resonant cavity 11 also includes a disk-shaped laser crystal 7 that serves as both a gain medium and a reflecting mirror; and the side of the disk-shaped laser crystal facing the resonant cavity is coated with a high-transmittance film for the oscillating laser and the pumping laser, and the side facing away from the resonant cavity is coated with a high-reflection film for the oscillating laser and the pumping laser.

图1和图3中,外腔13由第一端镜9和外腔平面反射镜12组成。In FIG. 1 and FIG. 3 , the external cavity 13 is composed of a first end mirror 9 and an external cavity plane reflecting mirror 12 .

图2和图4中,外腔13由第一端镜9和外腔凹面反射镜12组成。In FIG. 2 and FIG. 4 , the external cavity 13 is composed of a first end mirror 9 and an external cavity concave reflecting mirror 12 .

图5和图6中,外腔13由第二凹面镜5和外腔凹面反射镜12组成。In FIG. 5 and FIG. 6 , the external cavity 13 is composed of a second concave mirror 5 and an external cavity concave reflecting mirror 12 .

图7和图8中,外腔13由第二端镜6、分光镜14和外腔平面反射镜12组成。In FIG. 7 and FIG. 8 , the external cavity 13 is composed of a second end mirror 6 , a beam splitter 14 and an external cavity plane reflecting mirror 12 .

图9和图10中,外腔13由激光晶体(克尔介质)3和外腔凹面反射镜12组成。In FIG. 9 and FIG. 10 , the external cavity 13 is composed of a laser crystal (Kerr medium) 3 and an external cavity concave reflecting mirror 12 .

具体地,光扰动启动克尔透镜锁模块状固体激光器及碟片激光器的光路主要分为谐振腔11和外腔13。谐振腔11包括第一端镜9、第二端镜6、高色散镜8、第一凹面镜4、第二凹面镜5、高反镜(碟片激光晶体)7、激光晶体(克尔介质)3以及光阑10。其中第一端镜9和第二端镜6作为谐振腔11的两个端镜为振荡激光提供往返光路。高色散镜8用作补偿腔内各个光学元件引入的色散。第一凹面镜4和第二凹面镜5构成紧聚焦结构,使腔内的振荡激光聚焦在激光晶体(克尔介质)3上。光阑10通过提高腔内的衍射损耗以辅助克尔透镜锁模,摆放位置不受限制。对于块状固体激光器,激光晶体3端面与谐振腔11垂直放置时,两侧镀有对振荡激光的增透膜,激光晶体3端面与谐振腔11以布儒斯特角放置时,两侧不镀膜。高反镜7用作折返镜反射振荡激光。对于碟片激光器,克尔介质3以布儒斯特角放置在第一凹面镜4和第二凹面镜5的焦点附近处。碟片状激光晶体7既可以作增益介质以产生激光又作为谐振腔的折返镜用于反射振荡激光。Specifically, the optical path of the optical perturbation-activated Kerr lens-locked modular solid laser and disk laser is mainly divided into a resonant cavity 11 and an external cavity 13. The resonant cavity 11 includes a first end mirror 9, a second end mirror 6, a high dispersion mirror 8, a first concave mirror 4, a second concave mirror 5, a high reflection mirror (disk laser crystal) 7, a laser crystal (Kerr medium) 3, and an aperture 10. The first end mirror 9 and the second end mirror 6 are two end mirrors of the resonant cavity 11 to provide a round-trip optical path for the oscillating laser. The high dispersion mirror 8 is used to compensate for the dispersion introduced by each optical element in the cavity. The first concave mirror 4 and the second concave mirror 5 form a tight focusing structure to focus the oscillating laser in the cavity on the laser crystal (Kerr medium) 3. The aperture 10 assists the Kerr lens locking by increasing the diffraction loss in the cavity, and the placement position is not restricted. For a block solid laser, when the end face of the laser crystal 3 is placed vertically to the resonant cavity 11, both sides are coated with an anti-reflection film for the oscillating laser. When the end face of the laser crystal 3 is placed at a Brewster angle to the resonant cavity 11, both sides are not coated. The high reflective mirror 7 is used as a folding mirror to reflect the oscillated laser. For the disk laser, the Kerr medium 3 is placed near the focus of the first concave mirror 4 and the second concave mirror 5 at the Brewster angle. The disk-shaped laser crystal 7 can be used as a gain medium to generate laser light and as a folding mirror of the resonant cavity to reflect the oscillated laser light.

外腔13根据摆放的位置可以分为四种情况:The outer cavity 13 can be divided into four situations according to the placement position:

(一)当外腔置于第一端镜外时(如图1~4),外腔13包括第一端镜9和外腔反射镜12,第一端镜9面向谐振腔11的一侧镀有对振荡激光的部分透过和部分反射膜,第一端镜9面向外腔13的一侧镀有对振荡激光的增透膜。外腔反射镜12面向外腔13的一侧镀有对振荡激光的高反膜。外腔的长度不受限制,当外腔反射镜12为平面镜时,优选地,外腔长度与谐振腔长度为整数倍关系;当外腔反射镜12为凹面镜时,优选地,外腔长度与凹面镜焦距一致。(i) When the external cavity is placed outside the first end mirror (as shown in Figures 1 to 4), the external cavity 13 includes the first end mirror 9 and the external cavity reflector 12. The side of the first end mirror 9 facing the resonant cavity 11 is coated with a partially transparent and partially reflective film for the oscillating laser, and the side of the first end mirror 9 facing the external cavity 13 is coated with an anti-reflection film for the oscillating laser. The side of the external cavity reflector 12 facing the external cavity 13 is coated with a high-reflection film for the oscillating laser. The length of the external cavity is not limited. When the external cavity reflector 12 is a plane mirror, preferably, the length of the external cavity is an integer multiple of the length of the resonant cavity; when the external cavity reflector 12 is a concave mirror, preferably, the length of the external cavity is consistent with the focal length of the concave mirror.

(二)当外腔置于凹面镜外时(如图5~6),外腔13包括第二凹面镜5(或第一凹面镜4)和外腔反射镜12,第二凹面镜5面向谐振腔11的一侧镀有对振荡激光的部分透过和部分反射膜,第二凹面镜5面向外腔13的一侧镀有对振荡激光的增透膜。外腔反射镜12面向外腔13的一侧镀有对振荡激光的高反膜。外腔反射镜12为凹面镜,且焦距大于第二凹面镜5的焦距。外腔13的长度为外腔凹面反射镜12的焦距与第二凹面镜5的焦距之差。(ii) When the external cavity is placed outside the concave mirror (as shown in FIGS. 5 and 6), the external cavity 13 includes a second concave mirror 5 (or a first concave mirror 4) and an external cavity reflector 12. The side of the second concave mirror 5 facing the resonant cavity 11 is coated with a partially transparent and partially reflective film for the oscillating laser, and the side of the second concave mirror 5 facing the external cavity 13 is coated with an anti-reflective film for the oscillating laser. The side of the external cavity reflector 12 facing the external cavity 13 is coated with a high-reflective film for the oscillating laser. The external cavity reflector 12 is a concave mirror, and its focal length is greater than that of the second concave mirror 5. The length of the external cavity 13 is the difference between the focal length of the external cavity concave reflector 12 and the focal length of the second concave mirror 5.

(三)当外腔置于第二端镜外时(如图7~8),外腔13包括第二端镜6、分光镜14以及外腔反射镜12,第二端镜6面向谐振腔11的一侧镀有对振荡激光的部分反射和部分透过膜,第二端镜6面向外腔13的一侧镀有对振荡激光的增透膜。外腔反射镜12面向外腔13的一侧镀有对振荡激光的高反膜,且外腔反射镜为平面镜。外腔长度不受限制,优选地,外腔长度与谐振腔长度为整数倍关系。(III) When the external cavity is placed outside the second end mirror (as shown in FIGS. 7-8), the external cavity 13 includes the second end mirror 6, the beam splitter 14 and the external cavity reflector 12. The side of the second end mirror 6 facing the resonant cavity 11 is coated with a film that partially reflects and partially transmits the oscillating laser, and the side of the second end mirror 6 facing the external cavity 13 is coated with an anti-reflection film for the oscillating laser. The side of the external cavity reflector 12 facing the external cavity 13 is coated with a high-reflection film for the oscillating laser, and the external cavity reflector is a plane mirror. The length of the external cavity is not limited. Preferably, the length of the external cavity is an integer multiple of the length of the resonant cavity.

(四)当外腔置于激光晶体(克尔介质)外时(如图9~10),外腔13包括激光晶体(克尔介质)3和外腔反射镜12,激光晶体(克尔介质)3以布儒斯特角放置在谐振腔11内,将部分腔内振荡激光反射到外腔反射镜12上,外腔反射镜12面向外腔13的一侧镀有对振荡激光的高反膜,且外腔反射镜为凹面镜,外腔的长度与外腔凹面反射镜12的焦距一致。(iv) When the external cavity is placed outside the laser crystal (Kerr medium) (as shown in FIGS. 9-10 ), the external cavity 13 includes a laser crystal (Kerr medium) 3 and an external cavity reflector 12. The laser crystal (Kerr medium) 3 is placed in the resonant cavity 11 at the Brewster angle to reflect part of the oscillating laser in the cavity onto the external cavity reflector 12. The side of the external cavity reflector 12 facing the external cavity 13 is coated with a high-reflection film for the oscillating laser, and the external cavity reflector is a concave mirror. The length of the external cavity is consistent with the focal length of the external cavity concave reflector 12.

在上述四种光扰动启动克尔透镜锁模固体激光器的实施例中,谐振腔11部分的设计基本一致,主要不同之处在于外腔13的设计,因此下面结合图1~图10的具体实例先介绍谐振腔11的振荡过程,再分别介绍外腔13的光扰动启动锁模过程。In the above four embodiments of the light perturbation started Kerr lens mode-locked solid-state laser, the design of the resonant cavity 11 is basically the same, and the main difference lies in the design of the external cavity 13. Therefore, the oscillation process of the resonant cavity 11 is first introduced in conjunction with the specific examples of Figures 1 to 10, and then the light perturbation started mode locking process of the external cavity 13 is introduced respectively.

首先结合图1~图10的具体实例来说明光扰动启动克尔透镜锁模块状固体激光器及碟片激光器的振荡过程。First, the oscillation process of the Kerr lens locked modular solid laser and the disk laser started by light disturbance is explained with reference to the specific examples of FIGS. 1 to 10 .

对于固体激光器,本发明选用光纤耦合输出的半导体激光器作为泵浦源1,泵浦波长为940nm,经泵浦光路2聚焦到激光晶体3上,激光晶体为5×5×5mm的Yb:KGW晶体。Yb:KGW产生的1030nm激光入射到第二凹面镜5上,经第二凹面镜5反射到高反镜7,高反镜7将激光反射到高色散镜8上,经高色散镜8反射到第一端镜9上,第一端镜9将激光原路返回,再次到达激光晶体3上并透过激光晶体3入射第一凹面镜4上,最终被反射到第二端镜6上,其中部分激光被第二端镜6原路返回并在谐振腔11内形成振荡,部分激光透过第二端镜6并输出稳定的锁模脉冲激光。For the solid laser, the present invention uses a semiconductor laser with fiber coupling output as the pump source 1, the pump wavelength is 940nm, and is focused on the laser crystal 3 through the pump optical path 2. The laser crystal is a 5×5×5mm Yb:KGW crystal. The 1030nm laser generated by Yb:KGW is incident on the second concave mirror 5, and is reflected to the high reflection mirror 7 through the second concave mirror 5. The high reflection mirror 7 reflects the laser to the high dispersion mirror 8, and is reflected to the first end mirror 9 through the high dispersion mirror 8. The first end mirror 9 returns the laser along the original path, reaches the laser crystal 3 again, and is incident on the first concave mirror 4 through the laser crystal 3, and is finally reflected to the second end mirror 6, wherein part of the laser is returned by the second end mirror 6 along the original path and forms oscillation in the resonant cavity 11, and part of the laser passes through the second end mirror 6 and outputs a stable mode-locked pulse laser.

对于碟片激光器,本发明选用光纤耦合输出的半导体激光器作为泵浦源1,泵浦波长为940nm,经泵浦光路2聚焦到碟片状激光晶体7上,碟片晶体为直径10mm、厚度220μm的圆盘形Yb:YAG(掺杂浓度为7%)激光晶体。碟片状激光晶体背向谐振腔的一侧固定在热沉上,产生的热量通过水冷冲击的方式被带走。Yb:YAG激光晶体产生的1030nm激光入射到高色散镜8上,经高色散镜8反射到第一端镜9上,第一端镜9将激光原路返回,再次到达碟片激光晶体2上并被反射到第二凹面镜5上,第二凹面镜5将激光反射后透过克尔介质3入射到第一凹面镜4上,最终被第一凹面镜4反射到第二端镜6上,其中部分激光被第二端镜6反射并原路返回在谐振腔11内形成振荡,部分激光透过第二端镜6输出稳定的高功率锁模脉冲激光。For the disk laser, the present invention uses a semiconductor laser with fiber-coupled output as the pump source 1, with a pump wavelength of 940nm, which is focused on the disk-shaped laser crystal 7 through the pump optical path 2. The disk crystal is a disk-shaped Yb:YAG (doping concentration is 7%) laser crystal with a diameter of 10mm and a thickness of 220μm. The side of the disk-shaped laser crystal facing away from the resonant cavity is fixed on the heat sink, and the heat generated is taken away by water cooling shock. The 1030nm laser generated by the Yb:YAG laser crystal is incident on the high dispersion mirror 8, and is reflected by the high dispersion mirror 8 to the first end mirror 9. The first end mirror 9 returns the laser along the original path, reaches the disk laser crystal 2 again and is reflected to the second concave mirror 5. The second concave mirror 5 reflects the laser and transmits it through the Kerr medium 3 to the first concave mirror 4, and is finally reflected by the first concave mirror 4 to the second end mirror 6, wherein part of the laser is reflected by the second end mirror 6 and returns along the original path to form oscillation in the resonant cavity 11, and part of the laser transmits through the second end mirror 6 to output stable high-power mode-locked pulse laser.

然后分别对图1~图10的外腔13部分介绍光扰动启动锁模的光路。Then, the optical path of the optical perturbation-initiated mode locking is introduced for the outer cavity 13 in FIGS. 1 to 10 respectively.

在图1~图4中,反射到第一端镜9的激光分为两部分,一部分被原路返回并在谐振腔11内振荡,一部分透过第一端镜9并到达外腔反射镜12上,被外腔反射镜12反射并原路返回到谐振腔11内,以光扰动的形式启动克尔透镜锁模。In Figures 1 to 4, the laser reflected by the first end mirror 9 is divided into two parts. One part is returned by the original path and oscillates in the resonant cavity 11, and the other part passes through the first end mirror 9 and reaches the external cavity reflector 12, is reflected by the external cavity reflector 12 and returns to the resonant cavity 11 by the original path, starting the Kerr lens locking in the form of optical disturbance.

在图5~图6中,反射到第二凹面镜5上的激光被分为两部分,一部分被反射到激光晶体(克尔介质)3上,一部分透过第二凹面镜5并到达外腔反射镜12上,被外腔反射镜12反射并原路返回到谐振腔11内,以光扰动的形式启动克尔透镜锁模。In Figures 5 and 6, the laser reflected on the second concave mirror 5 is divided into two parts. One part is reflected on the laser crystal (Kerr medium) 3, and the other part passes through the second concave mirror 5 and reaches the external cavity reflector 12, is reflected by the external cavity reflector 12 and returns to the resonant cavity 11 along the original path, starting the Kerr lens mode locking in the form of optical disturbance.

在图7~图8中,透过第二端镜6的激光入射到分光镜14上,达到分光镜14的激光被分为两部分,一部分透过分光镜14并用于输出,一部分被反射达到外腔反射镜12上,被外腔反射镜12反射并原路返回到谐振腔11内,以光扰动的形式启动克尔透镜锁模。In Figures 7 and 8, the laser light passing through the second end mirror 6 is incident on the beam splitter 14. The laser light reaching the beam splitter 14 is divided into two parts. One part passes through the beam splitter 14 and is used for output, and the other part is reflected and reaches the external cavity reflector 12. The laser light is reflected by the external cavity reflector 12 and returns to the resonant cavity 11 along the original path, thereby starting the Kerr lens mode locking in the form of optical disturbance.

在图9~图10中,经第二凹面镜5反射并到达激光晶体(克尔介质)3上的激光分为两部分,一部分透过激光晶体(克尔介质)3并入射到第一凹面镜4上,在谐振腔11内振荡,一部分被激光晶体(克尔介质)3反射到外腔反射镜12上,被外腔反射镜12反射并原路返回到谐振腔11内,以光扰动的形式启动克尔透镜锁模。In Figures 9 and 10, the laser light reflected by the second concave mirror 5 and reaching the laser crystal (Kerr medium) 3 is divided into two parts. One part passes through the laser crystal (Kerr medium) 3 and is incident on the first concave mirror 4, oscillating in the resonant cavity 11; the other part is reflected by the laser crystal (Kerr medium) 3 onto the external cavity reflector 12, reflected by the external cavity reflector 12 and returned to the resonant cavity 11 along the original path, starting the Kerr lens mode locking in the form of optical disturbance.

本发明提出的光扰动启动克尔透镜锁模固体激光器目的在于实现光扰动启动克尔透镜锁模,谐振腔的设计不受限制,腔内具体光学元件的参数根据谐振腔的设计选取。在此,仅以重复频率为100MHz的碟片激光器为具体实施例,详细介绍谐振腔和外腔的关系。按照同样的方法,可对任意具体腔型设计出相应的外腔结构以实现光扰动启动克尔透镜锁模并获得稳定的飞秒脉冲输出。The purpose of the optical perturbation-initiated Kerr lens mode-locked solid laser proposed in the present invention is to realize optical perturbation-initiated Kerr lens mode-locking. The design of the resonant cavity is not restricted, and the parameters of the specific optical elements in the cavity are selected according to the design of the resonant cavity. Here, only a disk laser with a repetition frequency of 100MHz is used as a specific embodiment to introduce the relationship between the resonant cavity and the external cavity in detail. According to the same method, the corresponding external cavity structure can be designed for any specific cavity type to realize optical perturbation-initiated Kerr lens mode-locking and obtain stable femtosecond pulse output.

按照上述实施例,对于重复频率为100MHz的碟片激光器,谐振腔腔长即第一端镜9和第二端镜6间的距离为1.5m,第一凹面镜4和第二凹面镜5的曲率半径均为150mm,第一凹面镜4和第一端镜9的距离为谐振腔的长臂端,第二凹面镜5和第二端镜6的距离为短臂端,长臂端与短臂端长度之比约为3.3:1。第一凹面镜4和第二凹面镜5间的距离在150mm~156mm之间时,谐振腔处于第一稳区,第一凹面镜4和第二凹面镜5间的距离在175mm~181mm之间时,谐振腔处于第二稳区。当第一凹面镜4和第二凹面镜5间的距离在150.5mm、155.5mm、175.5mm和180.5mm这四个位置附近处可实现克尔透镜锁模。优选地,第一凹面镜4和第二凹面镜5间的距离为155.5mm附近处最易实现克尔透镜锁模。克尔介质3优选为2mm厚度的蓝宝石片,谐振腔11内的总负色散量优选为-14000fs2。第二端镜6面向谐振腔11的一侧镀有对振荡激光的部分透过膜,透过率范围1%~20%,优选地,透过率为8%~10%,第二端镜6背向谐振腔11的一侧镀有增透膜,透过率大于99.9%。According to the above embodiment, for a disk laser with a repetition frequency of 100MHz, the length of the resonant cavity, i.e., the distance between the first end mirror 9 and the second end mirror 6, is 1.5m, the curvature radius of the first concave mirror 4 and the second concave mirror 5 are both 150mm, the distance between the first concave mirror 4 and the first end mirror 9 is the long arm end of the resonant cavity, the distance between the second concave mirror 5 and the second end mirror 6 is the short arm end, and the ratio of the length of the long arm end to the short arm end is about 3.3:1. When the distance between the first concave mirror 4 and the second concave mirror 5 is between 150mm and 156mm, the resonant cavity is in the first stable zone, and when the distance between the first concave mirror 4 and the second concave mirror 5 is between 175mm and 181mm, the resonant cavity is in the second stable zone. Kerr lens mode locking can be achieved when the distance between the first concave mirror 4 and the second concave mirror 5 is near the four positions of 150.5mm, 155.5mm, 175.5mm and 180.5mm. Preferably, the distance between the first concave mirror 4 and the second concave mirror 5 is 155.5 mm, and Kerr lens locking is most easily achieved. The Kerr medium 3 is preferably a sapphire sheet with a thickness of 2 mm, and the total negative dispersion in the resonant cavity 11 is preferably -14000 fs2. The side of the second end mirror 6 facing the resonant cavity 11 is coated with a partially transparent film for the oscillating laser, and the transmittance ranges from 1% to 20%, preferably, the transmittance is 8% to 10%, and the side of the second end mirror 6 facing away from the resonant cavity 11 is coated with an anti-reflection film, and the transmittance is greater than 99.9%.

在此仅介绍当谐振腔11处于以上实施例时的外腔设计。当外腔设计图3所示时,第一端镜9面向谐振腔11的一侧镀有对振荡激光的部分透过膜,透过率范围0.5%~5%,优选地,透过率为0.5%~1.5%,第一端镜9面向外腔13的一侧镀有增透膜,透过率大于99.9%。外腔长度不受限制,优选为与1.5mm成整数倍关系的数值;当外腔设计如图4所示时,第一端镜9面向谐振腔11的一侧镀有对振荡激光的部分透过膜,透过率范围0.5%~5%,优选地,透过率为0.5%~1.5%,第一端镜9面向外腔13的一侧镀有增透膜,透过率大于99.9%。外腔长度不受限制,外腔凹面反射镜12的曲率半径不受限制,优选地,当外腔反射镜12曲率半径为300mm时,外腔长度为150mm;当外腔设计如图6所示时,第二凹面镜5面向谐振腔11的一侧镀有对振荡激光的部分透过膜,透过率范围0.5%~5%,优选地,透过率为0.5%~1.5%,第二凹面镜5面向外腔13的一侧镀有增透膜,透过率大于99.9%。外腔凹面反射镜12曲率半径大于第二凹面镜5的曲率半径,外腔长度为外腔凹面反射镜焦距与第二凹面镜焦距之差,优选地,当外腔凹面反射镜12的曲率半径为300mm时,外腔长度为75mm;当外腔设计如图8所示时,外腔长度不受限制,优选地,外腔长度为与1.5m成整数倍关系。当外腔设计如图10所示时,外腔长度和外腔凹面反射镜曲率半径不受限制,优选地,当外腔反射镜12的曲率半径为300mm时,外腔长度为150mm。Here, only the design of the external cavity when the resonant cavity 11 is in the above embodiment is introduced. When the external cavity design is shown in Figure 3, the side of the first end mirror 9 facing the resonant cavity 11 is coated with a partially transparent film for the oscillating laser, and the transmittance range is 0.5% to 5%, preferably, the transmittance is 0.5% to 1.5%, and the side of the first end mirror 9 facing the external cavity 13 is coated with an anti-reflection film, and the transmittance is greater than 99.9%. The length of the external cavity is not limited, and is preferably a value that is an integer multiple of 1.5mm; when the external cavity design is shown in Figure 4, the side of the first end mirror 9 facing the resonant cavity 11 is coated with a partially transparent film for the oscillating laser, and the transmittance range is 0.5% to 5%, preferably, the transmittance is 0.5% to 1.5%, and the side of the first end mirror 9 facing the external cavity 13 is coated with an anti-reflection film, and the transmittance is greater than 99.9%. The length of the external cavity is not limited, and the radius of curvature of the external cavity concave reflector 12 is not limited. Preferably, when the radius of curvature of the external cavity reflector 12 is 300 mm, the length of the external cavity is 150 mm. When the external cavity is designed as shown in FIG6 , the side of the second concave mirror 5 facing the resonant cavity 11 is coated with a partially transparent film for the oscillation laser, and the transmittance range is 0.5% to 5%, preferably, the transmittance is 0.5% to 1.5%, and the side of the second concave mirror 5 facing the external cavity 13 is coated with an anti-reflection film, and the transmittance is greater than 99.9%. The radius of curvature of the external cavity concave reflector 12 is greater than the radius of curvature of the second concave mirror 5, and the length of the external cavity is the difference between the focal length of the external cavity concave reflector and the focal length of the second concave mirror. Preferably, when the radius of curvature of the external cavity concave reflector 12 is 300 mm, the length of the external cavity is 75 mm. When the external cavity is designed as shown in FIG8 , the length of the external cavity is not limited. Preferably, the length of the external cavity is an integer multiple of 1.5 m. When the external cavity is designed as shown in FIG10 , the length of the external cavity and the radius of curvature of the external cavity concave reflector are not limited. Preferably, when the radius of curvature of the external cavity reflector 12 is 300 mm, the length of the external cavity is 150 mm.

本发明解决了传统克尔透镜锁模需要工作人员施加机械扰动的方式启动锁模的问题,这种光扰动启动克尔透镜锁模的方法具有较高的稳定性,避免了因长期使用需推动谐振腔镜所导致的光路偏移问题,可以获得光扰动启动克尔透镜锁模的高稳定性飞秒激光脉冲,进而可以实现结构简单、易操作、可重复组装的高稳定性、窄脉宽的飞秒激光器。本发明所提出的光扰动启动克尔透镜锁模固体激光器具有结构简单、较好的实用性和可操作性、可批量化生产、可重复组装等优势,可广泛应用于科学研究、工业生产以及生物医学等领域。The present invention solves the problem that traditional Kerr lens mode locking requires workers to apply mechanical disturbance to start mode locking. This method of starting Kerr lens mode locking by light disturbance has high stability, avoids the problem of optical path deviation caused by pushing the resonant cavity mirror due to long-term use, and can obtain high-stability femtosecond laser pulses for starting Kerr lens mode locking by light disturbance, thereby realizing a high-stability, narrow-pulse-width femtosecond laser with simple structure, easy operation, and repeatable assembly. The light disturbance-started Kerr lens mode locking solid laser proposed by the present invention has the advantages of simple structure, good practicality and operability, batch production, repeatable assembly, etc., and can be widely used in scientific research, industrial production, biomedicine and other fields.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims (14)

1.一种基于克尔透镜锁模的固体激光器,其特征在于,包括:泵浦源、激光晶体、谐振腔和外腔反射镜;1. A solid laser based on Kerr lens mode locking, characterized in that it comprises: a pump source, a laser crystal, a resonant cavity and an external cavity reflector; 其中,所述泵浦源输出的泵浦激光经泵浦光路聚焦到所述激光晶体上;所述激光晶体产生的激光在所述谐振腔提供的往返光路中来回振荡;The pump laser output by the pump source is focused onto the laser crystal via the pump optical path; the laser generated by the laser crystal oscillates back and forth in the round-trip optical path provided by the resonant cavity; 所述外腔反射镜用于将所述谐振腔透射出的激光反射回所述谐振腔,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is used to reflect the laser transmitted from the resonant cavity back to the resonant cavity, thereby starting the Kerr lens mode locking in the form of light disturbance; 当所述固体激光器为除碟片激光器之外的固体激光器时,所述谐振腔包括:When the solid-state laser is a solid-state laser other than a disk laser, the resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到所述激光晶体上,以实现克尔透镜锁模;所述激光晶体位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto the laser crystal to achieve Kerr lens mode locking; the laser crystal is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 当所述固体激光器为碟片激光器时,所述谐振腔包括:When the solid-state laser is a disk laser, the resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到克尔介质上,以实现克尔透镜锁模;所述克尔介质位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto a Kerr medium to achieve Kerr lens mode locking; the Kerr medium is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 此时,所述激光晶体为碟片状激光晶体,还用作折返镜反射振荡激光;At this time, the laser crystal is a disk-shaped laser crystal, which is also used as a folding mirror to reflect the oscillated laser; 所述外腔反射镜设置在所述谐振腔之外,且位于所述第一端镜背向所述谐振腔的一侧;所述第一端镜用于部分透射和部分反射所述谐振腔内的振荡激光;所述外腔反射镜用于对所述第一端镜透射出的激光进行反射,使其原路返回到所述谐振腔中,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the first end mirror facing away from the resonant cavity; the first end mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser transmitted by the first end mirror and return the laser to the resonant cavity along its original path, thereby starting Kerr lens mode locking in the form of optical disturbance; 所述外腔反射镜为平面镜或凹面镜;The external cavity reflector is a plane mirror or a concave mirror; 当所述外腔反射镜为平面镜时,外腔长度与谐振腔的长度呈整数倍关系;当所述外腔反射镜为凹面镜时,外腔长度与所述外腔反射镜的焦距相等;其中,所述外腔长度为所述外腔反射镜与所述第一端镜之间的距离。When the external cavity reflector is a plane mirror, the external cavity length is an integer multiple of the length of the resonant cavity; when the external cavity reflector is a concave mirror, the external cavity length is equal to the focal length of the external cavity reflector; wherein the external cavity length is the distance between the external cavity reflector and the first end mirror. 2.根据权利要求1所述的固体激光器,其特征在于,所述谐振腔还包括:设置在往返光路上的一个光阑,用于提高所述谐振腔内的衍射损耗。2. The solid-state laser according to claim 1 is characterized in that the resonant cavity further comprises: an aperture arranged on the round-trip optical path to increase the diffraction loss in the resonant cavity. 3.根据权利要求1或2所述的固体激光器,其特征在于,所述外腔反射镜靠近所述第一端镜的一侧镀有对振荡激光的高反膜,反射率大于99.9%;3. The solid-state laser according to claim 1 or 2, characterized in that the side of the external cavity reflector close to the first end mirror is coated with a high-reflection film for oscillating laser, and the reflectivity is greater than 99.9%; 所述第一凹面镜和所述第二凹面镜面向谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%。The first concave mirror and the second concave mirror are both coated with a high-reflection film for oscillating lasers on one side facing the resonant cavity, and the reflectivity is greater than 99.9%. 4.根据权利要求1或2所述的固体激光器,其特征在于,所述第一端镜远离所述外腔反射镜的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~20%;所述第一端镜靠近所述外腔反射镜的一侧镀有对振荡激光的增透膜,透过率大于99.5%。4. The solid-state laser according to claim 1 or 2 is characterized in that the side of the first end mirror away from the external cavity reflector is coated with a partial reflection and partial transmission film for the oscillating laser, and the transmittance range is 0.5% to 20%; the side of the first end mirror close to the external cavity reflector is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.5%. 5.一种基于克尔透镜锁模的固体激光器,其特征在于,包括:泵浦源、激光晶体、谐振腔和外腔反射镜;5. A solid laser based on Kerr lens mode locking, characterized in that it comprises: a pump source, a laser crystal, a resonant cavity and an external cavity reflector; 其中,所述泵浦源输出的泵浦激光经泵浦光路聚焦到所述激光晶体上;所述激光晶体产生的激光在所述谐振腔提供的往返光路中来回振荡;The pump laser output by the pump source is focused onto the laser crystal via the pump optical path; the laser generated by the laser crystal oscillates back and forth in the round-trip optical path provided by the resonant cavity; 所述外腔反射镜用于将所述谐振腔透射出的激光反射回所述谐振腔,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is used to reflect the laser transmitted from the resonant cavity back to the resonant cavity, thereby starting the Kerr lens mode locking in the form of light disturbance; 当所述固体激光器为除碟片激光器之外的固体激光器时,所述谐振腔包括:When the solid-state laser is a solid-state laser other than a disk laser, the resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到所述激光晶体上,以实现克尔透镜锁模;所述激光晶体位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto the laser crystal to achieve Kerr lens mode locking; the laser crystal is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 当所述固体激光器为碟片激光器时,所述谐振腔包括:When the solid-state laser is a disk laser, the resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到克尔介质上,以实现克尔透镜锁模;所述克尔介质位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto a Kerr medium to achieve Kerr lens mode locking; the Kerr medium is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 此时,所述激光晶体为碟片状激光晶体,还用作折返镜反射振荡激光;At this time, the laser crystal is a disk-shaped laser crystal, which is also used as a folding mirror to reflect the oscillated laser; 所述外腔反射镜设置在所述谐振腔之外,且位于所述第二端镜背向所述谐振腔的一侧;此时,所述固体激光器还包括位于所述第二端镜与所述外腔反射镜之间的分光镜,用于将所述第二端镜透射出的激光部分透射出去,以及部分反射到所述外腔反射镜上,还用于将所述外腔反射镜反射回来的激光部分透射出去,以及部分反射回所述第二端镜;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the second end mirror facing away from the resonant cavity; in this case, the solid-state laser further comprises a beam splitter located between the second end mirror and the external cavity reflector, which is used to transmit part of the laser light transmitted by the second end mirror and reflect part of it onto the external cavity reflector, and to transmit part of the laser light reflected back by the external cavity reflector and reflect part of it back onto the second end mirror; 所述第二端镜用于部分透射和部分反射所述谐振腔内的振荡激光;所述外腔反射镜用于对所述分光镜反射过来的激光进行反射,使其原路返回到谐振腔中,从而以光扰动的形式启动克尔透镜锁模;The second end mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser reflected by the beam splitter and return it to the resonant cavity along its original path, thereby starting the Kerr lens mode locking in the form of optical disturbance; 其中,所述外腔反射镜为平面镜;Wherein, the external cavity reflector is a plane mirror; 外腔长度与所述谐振腔的长度呈整数倍关系;其中,所述外腔长度为所述外腔反射镜与所述第二端镜之间的距离。The length of the external cavity is an integer multiple of the length of the resonant cavity; wherein the length of the external cavity is the distance between the external cavity reflector and the second end mirror. 6.根据权利要求5所述的固体激光器,其特征在于,所述谐振腔还包括:设置在往返光路上的一个光阑,用于提高所述谐振腔内的衍射损耗。6. The solid-state laser according to claim 5, characterized in that the resonant cavity further comprises: an aperture arranged on the round-trip optical path for increasing the diffraction loss in the resonant cavity. 7.根据权利要求5或6所述的固体激光器,其特征在于,所述外腔反射镜靠近所述第二端镜的一侧镀有对振荡激光的高反膜,反射率大于99.9%;7. The solid-state laser according to claim 5 or 6, characterized in that the side of the external cavity reflector close to the second end mirror is coated with a high-reflection film for oscillating laser, and the reflectivity is greater than 99.9%; 所述第一凹面镜和所述第二凹面镜面向所述谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%。The first concave mirror and the second concave mirror are both coated with a high-reflection film for oscillating laser light on one side facing the resonant cavity, and the reflectivity is greater than 99.9%. 8.一种基于克尔透镜锁模的固体激光器,其特征在于,包括:泵浦源、激光晶体、谐振腔和外腔反射镜;8. A solid laser based on Kerr lens mode locking, characterized by comprising: a pump source, a laser crystal, a resonant cavity and an external cavity reflector; 其中,所述泵浦源输出的泵浦激光经泵浦光路聚焦到所述激光晶体上;所述激光晶体产生的激光在所述谐振腔提供的往返光路中来回振荡;The pump laser output by the pump source is focused onto the laser crystal via the pump optical path; the laser generated by the laser crystal oscillates back and forth in the round-trip optical path provided by the resonant cavity; 所述外腔反射镜用于将所述谐振腔透射出的激光反射回所述谐振腔,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is used to reflect the laser transmitted from the resonant cavity back to the resonant cavity, thereby starting the Kerr lens mode locking in the form of light disturbance; 当所述固体激光器为除碟片激光器之外的固体激光器时,所述谐振腔包括:When the solid-state laser is a solid-state laser other than a disk laser, the resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到所述激光晶体上,以实现克尔透镜锁模;所述激光晶体位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto the laser crystal to achieve Kerr lens mode locking; the laser crystal is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 当所述固体激光器为碟片激光器时,所述谐振腔包括:When the solid-state laser is a disk laser, the resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到克尔介质上,以实现克尔透镜锁模;所述克尔介质位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto a Kerr medium to achieve Kerr lens mode locking; the Kerr medium is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 此时,所述激光晶体为碟片状激光晶体,还用作折返镜反射振荡激光;At this time, the laser crystal is a disk-shaped laser crystal, which is also used as a folding mirror to reflect the oscillated laser; 所述外腔反射镜设置在所述谐振腔之外,且位于所选凹面镜背向所述谐振腔的一侧;The external cavity reflector is arranged outside the resonant cavity and is located on a side of the selected concave mirror facing away from the resonant cavity; 所选凹面镜用于部分透射和部分反射所述谐振腔内的振荡激光;所述外腔反射镜用于对所选凹面镜透射出的激光进行反射,使其原路返回到所述谐振腔中,从而以光扰动的形式启动克尔透镜锁模;The selected concave mirror is used to partially transmit and partially reflect the oscillating laser in the resonant cavity; the external cavity reflector is used to reflect the laser transmitted by the selected concave mirror and return it to the resonant cavity along its original path, thereby starting Kerr lens mode locking in the form of optical disturbance; 其中,所选凹面镜为所述第一凹面镜或所述第二凹面镜;Wherein, the selected concave mirror is the first concave mirror or the second concave mirror; 所述外腔反射镜为凹面镜;所述外腔反射镜的焦距大于所选凹面镜的焦距;The external cavity reflector is a concave mirror; the focal length of the external cavity reflector is greater than the focal length of the selected concave mirror; 外腔长度为所述外腔反射镜的焦距与所选凹面镜焦距之差;其中,所述外腔长度为所述外腔反射镜与所选凹面镜间的距离。The external cavity length is the difference between the focal length of the external cavity reflector and the focal length of the selected concave mirror; wherein, the external cavity length is the distance between the external cavity reflector and the selected concave mirror. 9.根据权利要求8所述的固体激光器,其特征在于,所述谐振腔还包括:设置在往返光路上的一个光阑,用于提高所述谐振腔内的衍射损耗。9. The solid-state laser according to claim 8, characterized in that the resonant cavity further comprises: an aperture arranged on the round-trip optical path for increasing the diffraction loss in the resonant cavity. 10.根据权利要求8或9所述的固体激光器,其特征在于,所述外腔反射镜靠近所选凹面镜的一侧对镀有对振荡激光的高反膜,且反射率大于99.9%;10. The solid-state laser according to claim 8 or 9, characterized in that the side of the external cavity reflector close to the selected concave mirror is coated with a high-reflection film for oscillating laser, and the reflectivity is greater than 99.9%; 所述第一端镜面向所述谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。The side of the first end mirror facing the resonant cavity is coated with a high-reflection film for oscillating laser light, and the reflectivity thereof is greater than 99.9%. 11.根据权利要求8或9所述的固体激光器,其特征在于,所选凹面镜面向所述谐振腔的一侧镀有对振荡激光的部分反射和部分透过膜,透过率范围为0.5%~5%;所选凹面镜背向所述谐振腔的一侧镀有对振荡激光的增透膜,透过率大于99.5%。11. The solid-state laser according to claim 8 or 9 is characterized in that the side of the selected concave mirror facing the resonant cavity is coated with a partial reflection and partial transmission film for the oscillating laser, and the transmittance range is 0.5% to 5%; the side of the selected concave mirror facing away from the resonant cavity is coated with an anti-reflection film for the oscillating laser, and the transmittance is greater than 99.5%. 12.一种基于克尔透镜锁模的固体激光器,其特征在于,包括:泵浦源、激光晶体、谐振腔和外腔反射镜;12. A solid laser based on Kerr lens mode locking, characterized in that it comprises: a pump source, a laser crystal, a resonant cavity and an external cavity reflector; 其中,所述泵浦源输出的泵浦激光经泵浦光路聚焦到所述激光晶体上;所述激光晶体产生的激光在所述谐振腔提供的往返光路中来回振荡;The pump laser output by the pump source is focused onto the laser crystal via the pump optical path; the laser generated by the laser crystal oscillates back and forth in the round-trip optical path provided by the resonant cavity; 所述外腔反射镜用于将所述谐振腔透射出的激光反射回所述谐振腔,从而以光扰动的形式启动克尔透镜锁模;The external cavity reflector is used to reflect the laser transmitted from the resonant cavity back to the resonant cavity, thereby starting the Kerr lens mode locking in the form of light disturbance; 当所述固体激光器为除碟片激光器之外的固体激光器时:When the solid-state laser is a solid-state laser other than a disk laser: 所述谐振腔包括:The resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到所述激光晶体上,以实现克尔透镜锁模;所述激光晶体位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto the laser crystal to achieve Kerr lens mode locking; the laser crystal is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 所述外腔反射镜设置在所述谐振腔之外,且位于所述激光晶体背向所述谐振腔的一侧;所述激光晶体与所述谐振腔呈布儒斯特角放置,用于将部分振荡激光反射到所述外腔反射镜上;所述外腔反射镜用于对所述激光晶体反射的激光进行反射,使其原路返回到所述谐振腔中,从而以光扰动的形式启动克尔透镜锁模;此时,所述外腔反射镜为凹面镜;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the laser crystal facing away from the resonant cavity; the laser crystal and the resonant cavity are placed at a Brewster angle, and are used to reflect part of the oscillating laser onto the external cavity reflector; the external cavity reflector is used to reflect the laser reflected by the laser crystal and return it to the resonant cavity along its original path, thereby starting Kerr lens mode locking in the form of light disturbance; at this time, the external cavity reflector is a concave mirror; 外腔长度与所述外腔反射镜的焦距相等;所述外腔长度为所述外腔反射镜与所述激光晶体之间的距离;The external cavity length is equal to the focal length of the external cavity reflector; the external cavity length is the distance between the external cavity reflector and the laser crystal; 当所述固体激光器为碟片激光器时:When the solid-state laser is a disk laser: 所述谐振腔包括:The resonant cavity comprises: 设置在所述谐振腔两个端部的第一端镜和第二端镜,用于反射所述谐振腔内的振荡激光,为振荡激光提供往返光路;所述第一端镜为平面高反镜;所述第二端镜为输出镜;The first end mirror and the second end mirror arranged at the two ends of the resonant cavity are used to reflect the oscillating laser in the resonant cavity and provide a round-trip optical path for the oscillating laser; the first end mirror is a plane high-reflection mirror; the second end mirror is an output mirror; 设置在往返光路上的第一凹面镜和第二凹面镜,所述第一凹面镜和所述第二凹面镜构成紧聚焦结构,用于将所述谐振腔内的振荡激光聚焦到克尔介质上,以实现克尔透镜锁模;所述克尔介质位于所述第一凹面镜与所述第二凹面镜之间;A first concave mirror and a second concave mirror are arranged on a round-trip optical path, wherein the first concave mirror and the second concave mirror form a tight focusing structure for focusing the oscillating laser in the resonant cavity onto a Kerr medium to achieve Kerr lens mode locking; the Kerr medium is located between the first concave mirror and the second concave mirror; 设置在往返光路上的高色散镜,用于补偿所述激光晶体和构成所述谐振腔的各光学元件引入的色散;A high dispersion mirror arranged on the round-trip optical path, used to compensate for the dispersion introduced by the laser crystal and the optical elements constituting the resonant cavity; 此时,所述激光晶体为碟片状激光晶体,还用作折返镜反射振荡激光;At this time, the laser crystal is a disk-shaped laser crystal, which is also used as a folding mirror to reflect the oscillated laser; 所述外腔反射镜设置在所述谐振腔之外,且位于所述克尔介质背向所述谐振腔的一侧;所述克尔介质与所述谐振腔呈布儒斯特角放置,用于将部分振荡激光反射到所述外腔反射镜上;所述外腔反射镜用于对所述克尔介质反射的激光进行反射,使其原路返回到所述谐振腔中,从而以光扰动的形式启动克尔透镜锁模;此时,所述外腔反射镜为凹面镜;The external cavity reflector is arranged outside the resonant cavity and is located on the side of the Kerr medium facing away from the resonant cavity; the Kerr medium and the resonant cavity are placed at a Brewster angle, and are used to reflect part of the oscillating laser onto the external cavity reflector; the external cavity reflector is used to reflect the laser reflected by the Kerr medium and return it to the resonant cavity along its original path, thereby starting the Kerr lens mode locking in the form of light disturbance; at this time, the external cavity reflector is a concave mirror; 外腔长度与所述外腔反射镜的焦距相等;所述外腔长度为所述外腔反射镜与所述克尔介质之间的距离。The external cavity length is equal to the focal length of the external cavity reflector; the external cavity length is the distance between the external cavity reflector and the Kerr medium. 13.根据权利要求12所述的固体激光器,其特征在于,所述谐振腔还包括:设置在往返光路上的一个光阑,用于提高所述谐振腔内的衍射损耗。13. The solid-state laser according to claim 12, characterized in that the resonant cavity further comprises: an aperture arranged on the round-trip optical path for increasing the diffraction loss in the resonant cavity. 14.根据权利要求12或13所述的固体激光器,其特征在于,当所述固体激光器为除碟片激光器之外的固体激光器时,所述外腔反射镜靠近所述激光晶体的一侧镀有对振荡激光的高反膜,反射率大于99.9%;所述第一凹面镜和所述第二凹面镜面向所述谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;所述第一端镜面向所述谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%;14. The solid-state laser according to claim 12 or 13, characterized in that, when the solid-state laser is a solid-state laser other than a disk laser, the side of the external cavity reflector close to the laser crystal is coated with a high-reflection film for the oscillation laser, and the reflectivity is greater than 99.9%; the sides of the first concave mirror and the second concave mirror facing the resonant cavity are both coated with a high-reflection film for the oscillation laser, and the reflectivity is greater than 99.9%; the side of the first end mirror facing the resonant cavity is coated with a high-reflection film for the oscillation laser, and the reflectivity is greater than 99.9%; 当所述固体激光器为碟片激光器时,所述外腔反射镜靠近激光晶体的一侧镀有对振荡激光的高反膜,反射率大于99.9%;所述第一凹面镜和所述第二凹面镜面向所述谐振腔的一侧均镀有对振荡激光的高反膜,且反射率大于99.9%;所述第一端镜面向所述谐振腔的一侧镀有对振荡激光的高反膜,反射率大于99.9%。When the solid-state laser is a disk laser, the side of the external cavity reflector close to the laser crystal is coated with a high-reflection film for the oscillating laser, and the reflectivity is greater than 99.9%; the sides of the first concave mirror and the second concave mirror facing the resonant cavity are both coated with a high-reflection film for the oscillating laser, and the reflectivity is greater than 99.9%; the side of the first end mirror facing the resonant cavity is coated with a high-reflection film for the oscillating laser, and the reflectivity is greater than 99.9%.
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