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CN115939704A - Millimeter wave cavity filter - Google Patents

Millimeter wave cavity filter Download PDF

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CN115939704A
CN115939704A CN202211590996.7A CN202211590996A CN115939704A CN 115939704 A CN115939704 A CN 115939704A CN 202211590996 A CN202211590996 A CN 202211590996A CN 115939704 A CN115939704 A CN 115939704A
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cavity
metal
metal outer
shaped
filter
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许进
计淞耀
段宇文
周国庆
韩滨酝
杜祎晴
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Northwestern Polytechnical University
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Abstract

本发明公开了一种毫米波腔体滤波器,涉及滤波器技术领域,包括金属外腔、金属内芯和介质支撑条。其中,金属外腔内部设置有若干个谐振器,所有谐振器内均加载有蘑菇型的寄生金属柱,谐振器之间的电耦合由一对相互倒置的伞形销钉构成,谐振器之间的磁耦合通过耦合窗实现,金属内芯与金属外腔共同构成微同轴结构,金属外壁上有周期性的开窗结构。本发明在不增大滤波器尺寸的前提下显著降低了谐振器的谐振频率,还提出了微同轴线‑共面波导的转接结构和微同轴线‑准平面腔体的馈电结构,使本发明具有更广的应用范围。

Figure 202211590996

The invention discloses a millimeter wave cavity filter, relates to the technical field of filters, and comprises a metal outer cavity, a metal inner core and a dielectric support bar. Among them, there are several resonators inside the metal outer cavity, all of which are loaded with mushroom-shaped parasitic metal columns, and the electrical coupling between the resonators is formed by a pair of inverted umbrella-shaped pins. The magnetic coupling is realized through the coupling window. The metal inner core and the metal outer cavity together form a micro-coaxial structure, and there are periodic window structures on the metal outer wall. The invention significantly reduces the resonant frequency of the resonator without increasing the size of the filter, and also proposes a micro-coaxial-coplanar waveguide transition structure and a micro-coaxial-quasi-planar cavity feeding structure , so that the present invention has a wider range of applications.

Figure 202211590996

Description

一种毫米波腔体滤波器A millimeter wave cavity filter

技术领域technical field

本发明涉及滤波器技术领域,尤其涉及一种毫米波腔体滤波器。The present invention relates to the technical field of filters, in particular to a millimeter wave cavity filter.

背景技术Background technique

滤波器是通信系统中的重要组成部分,它的主要作用是提取感兴趣频率的信号并抑制其他不需要的信号。腔体滤波器的Q值高,功率容量大,频带选择性好,在各类制式的通信系统中有着极为广泛的应用。Filters are an important part of communication systems, and their main role is to extract signals at frequencies of interest and suppress other unwanted signals. The cavity filter has high Q value, large power capacity, and good frequency band selectivity, and is widely used in communication systems of various standards.

腔体滤波器的尺寸与其谐振单元的谐振频率有关,在工作频率较低时腔体滤波器的体积一般较大,不利于系统的小型化,在使用时较为不便,且通信系统中的滤波器均需要与其他电路协同工作,这使得腔体滤波器必须具备电路级别的连接能力,因此设计合理的腔体到微带等电路的转接结构是十分必要的。The size of the cavity filter is related to the resonant frequency of its resonant unit. When the operating frequency is low, the volume of the cavity filter is generally large, which is not conducive to the miniaturization of the system, and it is inconvenient to use, and the filter in the communication system Both need to work with other circuits, which makes the cavity filter must have circuit-level connection capabilities, so it is very necessary to design a reasonable transition structure from the cavity to the microstrip and other circuits.

腔体滤波器内使用不同的结构来产生电耦合或者磁耦合,合理的耦合路径可以产生传输零点,进而提升滤波器的频带选择性。在严格的尺寸要求下,设计腔体内谐振器的耦合结构的方法显得十分重要,这是达成滤波器良好电学性能的关键一步。Different structures are used in the cavity filter to generate electrical coupling or magnetic coupling, and a reasonable coupling path can generate transmission zeros, thereby improving the band selectivity of the filter. Under strict size requirements, it is very important to design the coupling structure of the resonator in the cavity, which is a key step to achieve good electrical performance of the filter.

发明内容Contents of the invention

本发明所要解决的问题是:使用微纳加工工艺设计并制造一种准平面腔体滤波器,该滤波器具有低损耗、高选择性等优点,并配套设计出一种全新的微同轴线-准平面腔体馈电结构与微同轴线-共面波导转接结构,使滤波器具有板级互联集成能力。The problem to be solved by the present invention is to design and manufacture a quasi-planar cavity filter using micro-nano processing technology, which has the advantages of low loss and high selectivity, and a brand-new micro-coaxial -The quasi-planar cavity feeding structure and micro-coaxial line-coplanar waveguide transition structure enable the filter to have board-level interconnection and integration capabilities.

本发明提供如下技术方案:一种毫米波腔体滤波器,包括:The present invention provides the following technical solutions: a millimeter wave cavity filter, comprising:

金属外腔,其内部由环状设置的若干个谐振器组成,每个叔叔谐振器内中心位置均加载有蘑菇型的寄生金属柱;The metal outer cavity is composed of several resonators arranged in a ring shape, and the center of each uncle resonator is loaded with a mushroom-shaped parasitic metal column;

若干个第一释放孔,开设在所述金属外腔的表面上,用于释放光刻胶;Several first release holes are opened on the surface of the metal outer cavity for releasing photoresist;

两个外延腔体,由两个对称的所述谐振器处的金属外腔分别向外延伸构成,其内分别设置有:The two epitaxial cavities are composed of two symmetrical metal outer cavities at the resonators extending outward respectively, and are respectively provided with:

金属内芯,设置在外延腔体内,且一端向上延伸与所述外延腔体上的开口平齐,作为微同轴线-共面波导的转接结构,另一端向上折叠并延伸至金属外腔内,与金属外腔的上表面连接,构成微同轴线-准平面腔体的馈电结构;The metal inner core is set in the epitaxial cavity, and one end extends upward to be flush with the opening of the epitaxial cavity, as a transition structure between the micro-coaxial line and the coplanar waveguide, and the other end is folded upward and extends to the metal external cavity Inside, it is connected with the upper surface of the metal outer cavity to form a micro-coaxial-quasi-planar cavity feeding structure;

四个介质支撑条,用于固定连接所述金属内芯与外延腔体。Four dielectric support strips are used for fixedly connecting the metal inner core and the epitaxial cavity.

优选的,所述蘑菇型的寄生金属柱包括:Preferably, the mushroom-shaped parasitic metal pillars include:

空心圆柱,由所述金属外腔内的下壁向上延伸设置;a hollow cylinder extending upward from the lower wall in the metal outer cavity;

实心圆柱,由所述金属外腔内的上壁向下延伸设置,其半径小于所述空心圆柱,且所述实心圆柱与空心圆柱同轴设置,且所述实心圆柱伸入空心圆柱中。A solid cylinder extends downward from the upper wall of the metal outer cavity, the radius of which is smaller than that of the hollow cylinder, and the solid cylinder and the hollow cylinder are coaxially arranged, and the solid cylinder extends into the hollow cylinder.

优选的,所述的所有谐振器组成一个环形的耦合路径,其耦合方式为:环形耦合路径上首尾相接谐振器之间形成的耦合方式为交叉耦合,其余所述谐振器之间的耦合为主耦合,所有所述谐振器通过交叉耦合与主耦合方式形成一个完整的金属外腔。Preferably, all the resonators form a ring-shaped coupling path, and the coupling mode is: the coupling mode formed between the end-to-end resonators on the ring-shaped coupling path is cross-coupling, and the coupling between the remaining resonators is Main coupling, all the resonators form a complete metal external cavity through cross coupling and main coupling.

优选的,两个所述谐振器之间的耦合方式包括:Preferably, the coupling mode between the two resonators includes:

两个谐振器之间的磁耦合,为两个所述谐振器侧壁挖去部分后形成的耦合窗口形成;The magnetic coupling between the two resonators is formed by the coupling window formed by digging out the side walls of the two resonators;

两个谐振器之间的电耦合,由两个所述谐振器之间放置两个倒置的伞形销钉形成。The electrical coupling between the two resonators is formed by placing two inverted umbrella pins between the two said resonators.

优选的,一对电耦合谐振器之间的两个伞形销钉相互倒置,两个伞形销钉分别为第一伞形销钉与第二伞形销钉,其中所述第一伞形销钉的宽面朝上,且窄面与金属外腔内部的下壁接触,所述第二伞形销钉的窄面朝上,且所述第二销钉的窄面与金属外腔内部的上壁接触。Preferably, the two umbrella-shaped pins between a pair of electrically coupled resonators are inverted to each other, and the two umbrella-shaped pins are respectively a first umbrella-shaped pin and a second umbrella-shaped pin, wherein the wide surface of the first umbrella-shaped pin upwards, and the narrow surface is in contact with the lower wall inside the metal outer cavity; the narrow surface of the second umbrella-shaped pin is upwards, and the narrow surface of the second pin is in contact with the upper wall inside the metal outer cavity.

优选的,由两个交叉耦合的谐振器外部分别向外延伸出相同的外延腔体作为滤波器的输入输出端口,所述外延腔体包括第一腔体和第二腔体,在第一腔体和第二腔体均上开设有开口,用于实现转接结构。Preferably, the same epitaxial cavities are respectively extended outward from the two cross-coupled resonators as the input and output ports of the filter, and the epitaxial cavities include a first cavity and a second cavity, and in the first cavity Both the body and the second cavity are provided with openings for realizing the transfer structure.

优选的,在所述馈电结构处,所述金属外腔开设有钳型的第二释放孔。Preferably, at the feed structure, the metal outer cavity is provided with a pincer-shaped second release hole.

优选的,若干个所述第一释放孔尺寸完全相同。Preferably, the dimensions of the several first release holes are exactly the same.

本发明与现有技术相比具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

1、本发明在每个谐振器内设置蘑菇型的寄生金属柱,通过蘑菇形的寄生金属柱加载显著降低了谐振器的谐振频率,同时确保谐振器的体积不显著增大,有利于系统小型化与集成度的提高。1. In the present invention, a mushroom-shaped parasitic metal column is arranged in each resonator, and the resonant frequency of the resonator is significantly reduced through the loading of the mushroom-shaped parasitic metal column, while ensuring that the volume of the resonator does not increase significantly, which is beneficial to the miniaturization of the system Improvement in integration and integration.

2、本发明通过在与谐振器连接的金属外腔外延两个外延腔体,并通过金属内芯一端与外延腔体上的开口平齐,构成微同轴线-共面波导的转接结构,同时通过金属内芯另一端向上折叠并延伸至金属外腔内,与金属外腔的上表面连接,构成微同轴线-准平面腔体的馈电结构,有利于腔体滤波器与其他器件进行板级集成,拓宽了腔体滤波器的应用范围。2. In the present invention, two epitaxial cavities are extended on the metal external cavity connected to the resonator, and one end of the metal inner core is flush with the opening on the epitaxial cavity to form a micro-coaxial-coplanar waveguide transition structure At the same time, the other end of the metal inner core is folded up and extended into the metal outer cavity, and connected with the upper surface of the metal outer cavity to form a micro-coaxial-quasi-planar cavity feeding structure, which is beneficial to the cavity filter and other The board-level integration of the device broadens the application range of the cavity filter.

附图说明Description of drawings

图1为本发明提供的准平面腔体谐振器毫米波滤波器的俯视图和侧视图;FIG. 1 is a top view and a side view of a quasi-planar cavity resonator millimeter wave filter provided by the present invention;

图2为本发明提供的蘑菇型寄生金属柱结构的示意图;FIG. 2 is a schematic diagram of a mushroom-shaped parasitic metal post structure provided by the present invention;

图3为本发明提供的谐振器之间磁耦合的示意图;3 is a schematic diagram of magnetic coupling between resonators provided by the present invention;

图4为本发明提供的谐振器之间电耦合的示意图;4 is a schematic diagram of the electrical coupling between resonators provided by the present invention;

图5为本发明提供的本发明中微同轴线-共面波导转接结构、微同轴线-准平面腔体馈电的示意图;Fig. 5 is a schematic diagram of the micro-coaxial line-coplanar waveguide transition structure and the micro-coaxial line-quasiplanar cavity feeding provided by the present invention;

图6为本发明提供的滤波器的S参数仿真结果图。FIG. 6 is a diagram of the S-parameter simulation results of the filter provided by the present invention.

具体实施方式Detailed ways

下面结合附图,对本发明的具体实施方式作进一步描述。以下实施例仅用于更加清楚地说明本发明的技术方案,而不能以此来限制本发明的保护范围。The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.

在本发明的描述中需要理解的是,术语“中心”、“上”、“下”、“前”、“后”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In describing the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", " The orientation or positional relationship indicated by "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, are constructed and operate in a particular orientation and therefore are not to be construed as limiting the invention.

术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征;在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。The terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of these features; in the description of the present invention, unless otherwise specified, the meaning of "plurality" is two or more.

为了理解和说明,下面详细说明本发明实施例的一种毫米波腔体滤波器。For understanding and description, a millimeter wave cavity filter according to an embodiment of the present invention is described in detail below.

如图1-6所示,本发明为一种毫米波腔体滤波器10,包括金属外腔11、金属内芯12、13和介质支撑条14、15、16、17。该滤波器使用了电化学增材制造技术进行加工,金属外腔11和金属内芯的材料均为铜,介质支撑条的介电常数为2.85,其中金属外腔11在竖直方向的厚度为15um,水平方向的厚度为100um。As shown in FIGS. 1-6 , the present invention is a millimeter-wave cavity filter 10 , which includes a metal outer cavity 11 , metal inner cores 12 , 13 and dielectric support bars 14 , 15 , 16 , and 17 . The filter is processed by electrochemical additive manufacturing technology. The metal outer cavity 11 and the metal inner core are made of copper, and the dielectric constant of the dielectric support bar is 2.85. The thickness of the metal outer cavity 11 in the vertical direction is 15um, the thickness in the horizontal direction is 100um.

其中,金属外腔11内部分为四个谐振器18、19、20、21,金属外腔11的表面上开有尺寸完全相同的若干个第一释放孔22以释放光刻胶,第一释放孔22的尺寸为200um×200um×100um。四个谐振器18、19、20、21内中心位置均加载有蘑菇型的寄生金属柱,其中谐振器18与谐振器21处的金属外腔11向外延伸出一块T形外延腔体,且谐振器18与谐振器21之间由一对相互倒置的伞形销钉34、35构成电耦合结构,其余谐振器19、20之间通过耦合窗31、32、33实现磁耦合。金属内芯12、13设置在T形外延腔体内,T形腔体内部的金属内芯13通过介质支撑条14、15、16、17连接T形外延腔体,金属内芯12、13与金属外腔11共同构成微同轴结构,在金属外壁其上设置有周期性的开窗结构。Among them, the interior of the metal outer cavity 11 is divided into four resonators 18, 19, 20, 21. There are several first release holes 22 with the same size on the surface of the metal outer cavity 11 to release the photoresist. The size of the hole 22 is 200um×200um×100um. The central positions of the four resonators 18, 19, 20, and 21 are all loaded with mushroom-shaped parasitic metal columns, wherein the metal outer cavity 11 at the resonator 18 and the resonator 21 extends outwards to form a T-shaped epitaxial cavity, and A pair of inverted umbrella-shaped pins 34 and 35 form an electrical coupling structure between the resonator 18 and the resonator 21 , and the other resonators 19 and 20 are magnetically coupled through coupling windows 31 , 32 and 33 . Metal inner cores 12, 13 are arranged in the T-shaped epitaxial cavity, and the metal inner core 13 inside the T-shaped cavity is connected to the T-shaped epitaxial cavity through dielectric support bars 14, 15, 16, 17, and the metal inner cores 12, 13 are connected with the metal The outer cavity 11 together constitutes a micro-coaxial structure, and periodic window structures are arranged on the metal outer wall.

四个谐振器18、19、20、21尺寸与工作频率相近,其中,蘑菇形寄生金属柱由大半径空心圆柱23、24、25、26和小半径实心圆柱27、28、29、30构成,两圆柱的底面圆心相同。谐振器18与谐振器21内加载的空心圆柱外径为797.5um,内径为597.5um,实心圆柱半径为297.5um,谐振器19与谐振器20内加载的空心圆柱外径为735um,内径为535um,实心圆柱半径为235um。空心圆柱由金属外腔11内的下壁向上延伸,高度为460um,实心圆柱由金属外腔11内部的上壁向下延伸,高度为460um,两圆柱在竖直方向上存在交叠,即实心圆柱会有一部分伸入空心圆柱中。The size of the four resonators 18, 19, 20, 21 is similar to the operating frequency, wherein the mushroom-shaped parasitic metal pillars are composed of large-radius hollow cylinders 23, 24, 25, 26 and small-radius solid cylinders 27, 28, 29, 30, The centers of the bases of the two cylinders are the same. The outer diameter of the hollow cylinder loaded in resonator 18 and resonator 21 is 797.5um, the inner diameter is 597.5um, the radius of the solid cylinder is 297.5um, the outer diameter of the hollow cylinder loaded in resonator 19 and resonator 20 is 735um, the inner diameter is 535um , The radius of the solid cylinder is 235um. The hollow cylinder extends upward from the lower wall of the metal outer cavity 11 with a height of 460um. The solid cylinder extends downward from the upper wall of the metal outer cavity 11 with a height of 460um. The two cylinders overlap in the vertical direction, that is, the solid cylinder The cylinder will have a part protruding into the hollow cylinder.

谐振器18与谐振器19之间的耦合是窄边开窗的磁耦合,将谐振器的壁挖去一部分后构成了耦合窗31,窗口的宽度为1520um,所有膜片的厚度均为150um,同理,谐振器19与谐振器20、谐振器20与谐振器21之间也使用了耦合窗32、33来实现磁耦合,其中,谐振器19与谐振器20的耦合窗32宽度为1395um,谐振器20与谐振器21的耦合窗33宽度为1520um;谐振器18与谐振器21之间由一对相互倒置的伞形销钉34、35构成电耦合结构。销钉由宽面和窄面构成,宽面的尺寸为1225um×1225um×100um,窄面的尺寸为200um×200um×460um。第一伞形销钉34和第二伞形销钉35在竖直方向上放置方向相反,第一伞形销钉34的窄边与金属外腔11内部的下壁连接,第二伞形销钉35的窄边与金属外腔11内部的上壁连接,该结构实现了谐振器18与谐振器21之间的电耦合。The coupling between the resonator 18 and the resonator 19 is a magnetic coupling with narrow side windows. The coupling window 31 is formed after a part of the wall of the resonator is dug out. The width of the window is 1520um, and the thickness of all diaphragms is 150um. Similarly, the coupling windows 32 and 33 are also used between the resonator 19 and the resonator 20, and between the resonator 20 and the resonator 21 to achieve magnetic coupling, wherein the width of the coupling window 32 between the resonator 19 and the resonator 20 is 1395um, The width of the coupling window 33 between the resonator 20 and the resonator 21 is 1520 um; between the resonator 18 and the resonator 21 a pair of inverted umbrella pins 34 and 35 form an electrical coupling structure. The pin is composed of a wide surface and a narrow surface, the size of the wide surface is 1225um×1225um×100um, and the size of the narrow surface is 200um×200um×460um. The first umbrella pin 34 and the second umbrella pin 35 are placed in the opposite direction in the vertical direction, the narrow side of the first umbrella pin 34 is connected with the lower wall inside the metal outer cavity 11, and the narrow side of the second umbrella pin 35 The side is connected to the upper wall inside the metal outer cavity 11 , and this structure realizes the electrical coupling between the resonator 18 and the resonator 21 .

谐振器18与谐振器21的外部存在滤波器的馈电与转接结构,谐振器18和谐振器21处的金属外腔11向外延伸出一块T形外延腔体,该T形外延腔体由第一腔体36和第二腔体37组成,其中第二腔体比第一腔体在竖直方向上低200um,第一腔体和第二腔体的侧面开有尺寸为200um×200um×100um的第一释放孔22以释放光刻胶,第二腔体的上表面开了表面尺寸为380um×677um的开口38以实现转接结构。第一腔体36的尺寸为500um×977um×860um,第二腔体37的尺寸为530um×1577um×660um,在T形外延腔体的内部有金属内芯13,该金属内芯可以分为四段,第一段39的尺寸为200um×145um×260um,上表面与第二腔体37的开口平齐,作为微同轴线转接共面波导的结构;第二段40为阻抗变换结构40,其厚度为160um,宽度由145um渐变到277um,长度为90um,第三段41为50欧姆传输线部分,宽度为277um,长度为1070um,厚度为260um,第四端42为微同轴线向腔体馈电的结构,其在第三部分传输线的上表面向上延伸了200um,长度和宽度与50欧姆传输线相同。谐振器21处的馈电与转接结构与谐振器18处的完全相同,且在馈电结构处,金属外腔11开有钳型的第二释放孔43。There is a feeding and switching structure of the filter outside the resonator 18 and the resonator 21, and the metal outer cavity 11 at the resonator 18 and the resonator 21 extends outward a T-shaped epitaxial cavity, and the T-shaped epitaxial cavity It consists of a first cavity 36 and a second cavity 37, wherein the second cavity is 200um lower than the first cavity in the vertical direction, and the side of the first cavity and the second cavity has a size of 200um×200um The first release hole 22 of ×100um is used to release the photoresist, and the upper surface of the second cavity is opened with an opening 38 with a surface size of 380um×677um to realize the transfer structure. The size of the first cavity 36 is 500um×977um×860um, the size of the second cavity 37 is 530um×1577um×660um, there is a metal inner core 13 inside the T-shaped epitaxial cavity, and the metal inner core can be divided into four parts. section, the size of the first section 39 is 200um×145um×260um, the upper surface is flush with the opening of the second cavity 37, and serves as a structure for connecting the micro-coaxial line to the coplanar waveguide; the second section 40 is an impedance transformation structure 40 , the thickness is 160um, the width gradually changes from 145um to 277um, the length is 90um, the third section 41 is a 50 ohm transmission line part, the width is 277um, the length is 1070um, the thickness is 260um, and the fourth end 42 is a micro-coaxial axial cavity The body-fed structure extends upward by 200um on the upper surface of the third part of the transmission line, and has the same length and width as the 50 ohm transmission line. The feeding and switching structure at the resonator 21 is exactly the same as that at the resonator 18 , and at the feeding structure, the metal outer cavity 11 has a pincer-shaped second release hole 43 .

T形外延腔体内部的金属内芯13通过介质支撑条14、15、16、17与T形外延腔体连接,其中有三根介质支撑条14、15、16与金属内芯13垂直,一根介质支撑条17与金属内芯平行。介质支撑条的形状为H形14、15、16,两头较窄部分的尺寸为160um×30um×18um,中间较宽部分的尺寸为737um×100um×18um;与金属内芯平行的介质支撑条17中间较宽部分的尺寸为120um×100um×18um,较窄部分与H形支撑条两端较窄部分的尺寸相同。The metal inner core 13 inside the T-shaped epitaxial cavity is connected to the T-shaped epitaxial cavity through dielectric support bars 14, 15, 16, 17, wherein three dielectric support bars 14, 15, 16 are perpendicular to the metal inner core 13, one The dielectric support strips 17 are parallel to the metal inner core. The shape of the dielectric support bar is H-shaped 14, 15, 16, the size of the narrower part at both ends is 160um×30um×18um, and the size of the wider part in the middle is 737um×100um×18um; the dielectric support bar 17 parallel to the metal inner core The size of the wider part in the middle is 120um×100um×18um, and the size of the narrower part is the same as that of the narrower parts at both ends of the H-shaped support bar.

该具体实施方式中的滤波器的3dB通带范围是34.3GHz-35.6GHz,带内最小插入损耗为0.61dB,且在33.9GHz处和36.4GHz处各有一个零点,提高了滤波器的频带选择性。The 3dB passband range of the filter in this embodiment is 34.3GHz-35.6GHz, the minimum insertion loss in the band is 0.61dB, and there is a zero at 33.9GHz and 36.4GHz, which improves the frequency band selection of the filter sex.

综上所述,本实施例中的准平面腔体谐振器毫米波滤波器10使用交叉耦合滤波器的基本设计方法,使用微纳工艺加工,涉及到的具体技术为电化学增材制造,利用电化学增材制造技术进行加工得到了低损耗、高选择性的准平面毫米波滤波器,这种工艺精度高,使得该滤波器能够进行一体化设计与大批量生产,同时能够保证滤波器的性能;所设计的微同轴对准平面腔体进行馈电的结构较为简单,便于实现;所设计的微同轴转接共面波导的结构使本发明中的滤波器具备了板级电路的互联能力,拓宽了本滤波器的使用范围。In summary, the quasi-planar cavity resonator millimeter-wave filter 10 in this embodiment uses the basic design method of a cross-coupled filter and is processed by a micro-nano process. The specific technology involved is electrochemical additive manufacturing. Electrochemical additive manufacturing technology has been processed to obtain a low-loss, high-selectivity quasi-planar millimeter-wave filter. The high precision of this process enables the filter to be designed in an integrated manner and mass-produced, while ensuring the filter’s performance; the designed micro-coaxial alignment planar cavity feed structure is relatively simple, easy to realize; the designed micro-coaxial transfer coplanar waveguide structure makes the filter in the present invention have the board-level circuit The interconnection capability broadens the scope of use of the filter.

以上所述实施例仅为本发明较佳的具体实施方式,本发明的保护范围不限于此,任何熟悉本领域的技术人员在本发明披露的技术范围内,可显而易见地得到的技术方案的简单变化或等效替换,均属于本发明的保护范围。The above-described embodiments are only preferred specific implementations of the present invention, and the protection scope of the present invention is not limited thereto. Any person skilled in the art can clearly obtain the simplicity of the technical solution within the technical scope disclosed in the present invention. Changes or equivalent replacements all belong to the protection scope of the present invention.

Claims (8)

1.一种毫米波腔体滤波器,其特征在于,包括:1. A millimeter-wave cavity filter, characterized in that, comprising: 金属外腔(11);Metal outer cavity (11); 若干谐振器(18),沿环状设置在所述金属外腔(11)内部,每个所述谐振器(18)内中心位置均加载有蘑菇型的寄生金属柱;A plurality of resonators (18) are annularly arranged inside the metal outer cavity (11), and each of the resonators (18) is loaded with a mushroom-shaped parasitic metal column at the center; 其中一组相邻的谐振器之间由一对相互倒置的伞形销钉构成电耦合结构,且该组谐振器相对的金属外腔(11)均向外延伸出一块T形外延腔体;其余谐振器两两之间通过开设耦合窗构成磁耦合结构;A pair of inverted umbrella-shaped pins form an electrical coupling structure between a group of adjacent resonators, and a T-shaped epitaxial cavity is extended outward from the opposite metal outer cavities (11) of the group of resonators; A magnetic coupling structure is formed by opening a coupling window between the resonators; 每个所述T形外延腔体内均设置有金属内芯(13),所述金属内芯(13)一端为微同轴线-共面波导的转接结构,另一端延伸至金属外腔(11)内并与金属外腔(11)的上表面连接,构成微同轴线-准平面腔体的馈电结构,两个所述所述T形外延腔体分别为滤波器的输入输和出端口。Each T-shaped epitaxial cavity is provided with a metal inner core (13), one end of the metal inner core (13) is a micro-coaxial-coplanar waveguide transition structure, and the other end extends to the metal outer cavity ( 11) inside and connected with the upper surface of the metal outer cavity (11) to form a micro-coaxial-quasi-planar cavity feeding structure, and the two T-shaped epitaxial cavities are respectively the input and output of the filter out port. 2.如权利要求1所述的一种毫米波腔体滤波器,其特征在于,所述金属外腔(11)表面开设有若干个第一释放孔(22),所述第一释放孔(22)用于释放光刻胶。2. A millimeter-wave cavity filter according to claim 1, characterized in that, the surface of the metal outer cavity (11) is provided with several first release holes (22), and the first release holes ( 22) Used to release photoresist. 3.如权利要求1所述的一种毫米波腔体滤波器,其特征在于,每个所述蘑菇型的寄生金属柱均包括:3. A millimeter-wave cavity filter according to claim 1, wherein each of the mushroom-shaped parasitic metal posts comprises: 空心圆柱(23),由所述金属外腔(11)内的下壁向上延伸设置;a hollow cylinder (23) extending upward from the lower wall in the metal outer cavity (11); 实心圆柱(27),由所述金属外腔(11)内的上壁向下延伸设置,其半径小于所述空心圆柱(23),所述实心圆柱(27)位于所述空心圆柱(23)内部且二者同轴设置。A solid cylinder (27), which extends downwards from the upper wall in the metal outer cavity (11), has a radius smaller than that of the hollow cylinder (23), and the solid cylinder (27) is located in the hollow cylinder (23) Internal and the two coaxial settings. 4.如权利要求2所述的一种毫米波腔体滤波器,其特征在于,所述T形外延腔体包括垂直所述金属外腔(11)的第一腔体(36)和与第一腔体(36)端部垂直的第二腔体(37);所述第一腔体(36)和第二腔体(37)的侧面均开有第一释放孔(22)以释放光刻胶,所述第二腔体(37)的上表面开设有开口(38)以实现转接结构。4. A kind of millimeter-wave cavity filter as claimed in claim 2, is characterized in that, described T-shaped epitaxial cavity comprises the first cavity (36) of perpendicular described metal outer cavity (11) and the first cavity with the second A second cavity (37) with a vertical end of the cavity (36); the sides of the first cavity (36) and the second cavity (37) are all provided with first release holes (22) to release light Resist, the upper surface of the second cavity (37) is provided with an opening (38) to realize the transfer structure. 5.如权利要求4所述的一种毫米波腔体滤波器,其特征在于,所述金属内芯(13)分为四段,第一段(39)的上表面与第二腔体(37)的开口(38)平齐,作为微同轴线转接共面波导的结构;第二段(40)为阻抗变换结构,第三段(41)为50欧姆传输线部分,第四段(42)为微同轴线向腔体馈电的结构。5. A kind of millimeter-wave cavity filter as claimed in claim 4, is characterized in that, described metal inner core (13) is divided into four sections, the upper surface of first section (39) and the second cavity ( The opening (38) of 37) is flush, as the structure of coplanar waveguide transfer of micro-coaxial line; 42) A structure for feeding the micro-coax to the cavity. 6.如权利要求4所述的一种毫米波腔体滤波器,其特征在于,所述金属内芯(13)通过四个介质支撑条(14)与所述T形腔体连接,其中有三根介质支撑条(14)与金属内芯(13)垂直,一根介质支撑条(14)与金属内芯(13)平行。6. A millimeter-wave cavity filter according to claim 4, wherein the metal inner core (13) is connected to the T-shaped cavity through four dielectric support bars (14), wherein Three medium support bars (14) are perpendicular to the metal inner core (13), and one medium support bar (14) is parallel to the metal inner core (13). 7.如权利要求1所述的一种毫米波腔体滤波器,其特征在于,一个所述伞形销钉的宽面朝上,且窄面与金属外腔(11)内部的下壁接触;另一个所述伞形销钉的窄面朝上,且其窄面与金属外腔(11)内部的上壁接触。7. A kind of millimeter-wave cavity filter as claimed in claim 1, is characterized in that, the broad side of a described umbrella-shaped pin faces upwards, and the narrow side is in contact with the lower wall inside the metal outer cavity (11); The narrow side of the other umbrella-shaped pin faces upwards, and its narrow side is in contact with the upper wall inside the metal outer cavity (11). 8.如权利要求1所述的一种毫米波腔体滤波器,其特征在于,在所述馈电结构处,两个所述所述T形外延腔体对应的所述金属外腔(11)处开设有钳型的第二释放孔(43)。8. A kind of millimeter-wave cavity filter as claimed in claim 1, is characterized in that, at described feeding structure place, the metal outer cavity (11 of two described T-shaped epitaxial cavities corresponding ) is provided with a clamp-type second release hole (43).
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