CN115930821B - Patch-type mode-switching microsphere multi-mode control device and method based on standing waves - Google Patents
Patch-type mode-switching microsphere multi-mode control device and method based on standing waves Download PDFInfo
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Abstract
本发明公开了一种基于驻波的贴片式模态切换型微球多模式操控装置及方法，装置包括底座、振动体、第一固定座、第二固定座、第一固定螺母、第二固定螺母、PDMS模块、分选铜片和压电驱动模块；压电驱动模块包含五个迁移压电陶瓷片、以及分选压电陶瓷片。本发明通过激励五个迁移压电陶瓷片实现模态切换来使微球进行长距离迁移，并在此过程中通过显微镜对微球形貌进行检测，根据检测结果通过分选压电陶瓷片对微球进行分选。本发明设备简单、价格便宜，能够无损、非接触式操控微球，避免了硬接触方式下对微球进行定位、移动和分类时的二次损伤。
The present invention discloses a patch-type mode-switching microsphere multi-mode control device and method based on standing waves, the device includes a base, a vibrating body, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric drive module; the piezoelectric drive module includes five migrating piezoelectric ceramic sheets and a sorting piezoelectric ceramic sheet. The present invention enables the microspheres to migrate over long distances by stimulating the five migrating piezoelectric ceramic sheets to achieve mode switching, and in the process, the morphology of the microspheres is detected by a microscope, and the microspheres are sorted by the sorting piezoelectric ceramic sheets according to the detection results. The device of the present invention is simple and inexpensive, and can control the microspheres in a non-destructive and non-contact manner, avoiding secondary damage to the microspheres when positioning, moving and classifying them in a hard contact manner.
Description
Technical Field
The invention relates to the field of micro-control and micro-particle rapid screening, in particular to a patch mode switching microsphere multimode control device and method based on standing waves.
Background
The laser-constrained nuclear fusion ICF takes high-power and high-energy density laser as a driving source, and adopts a spherical implosion pressurizing technology to lead nuclear fuel in spherical target pellets to reach an ignition condition, thereby forming self-sustaining thermonuclear reaction. ICF is expected to provide clean and pollution-free energy for human beings. The ICF experiment has strict requirements on the quality of hollow microspheres (target pellets) serving as nuclear fuel containers in terms of geometric parameters, surface defects and the like, and the quality of the target pellets directly influences the success and failure of the ICF targeting experiment. The target pill has the characteristics of small size (diameter of 100-1000 mu m), fragile structure, strong viscosity and the like, and the detection of the target pill brings about a small challenge. Currently, as detection equipment used for measuring geometrical parameters of microspheres, there are an X-ray apparatus, a white light interferometer, an atomic force microscope, and the like. The measurement accuracy of these instruments is very high (can reach micro-scale or even nano-scale). Because the target pellet is spherical, multiple movements and flipping of the target pellet are required to achieve complete characterization of the morphology of the target pellet. However, in all the detection devices, the movement of the target pill is controlled through the multi-degree-of-freedom moving platform, and the hard contact mode is very easy to cause secondary damage to the surface of the target pill when the gesture of the target pill is adjusted, so that the detection efficiency and the qualification rate of the target pill are lower. The micro-control technology adopting the sound wave as the driving source has the advantages of high biocompatibility, stable micro-scale control and the like, and means that the micro-control technology can be applied to nondestructive detection and screening of microspheres, complete morphology characterization of the target pellets is realized through repeated positioning, and the target pellets with different quality are gathered in different areas through matching and switching of different vibration modes, so that the requirements of nondestructive and high-precision control in the target pellet detection process are met.
Disclosure of Invention
The invention aims to overcome the defects in the background art and provides a patch mode switching microsphere multimode control device and method based on standing waves.
The invention adopts the following technical scheme for solving the technical problems:
The patch mode switching microsphere multimode control device based on standing waves comprises a base, a vibrator, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric driving module;
The first fixing seat and the second fixing seat are arranged on the base and have the same structure and comprise a base and a stud, wherein the base is a column, and the lower end face of the base is fixedly connected with the base;
the vibrating body is a cuboid, and a first lug and a second lug are respectively arranged at two ends of the vibrating body; the centers of the first lug and the second lug are respectively provided with a first through hole and a second through hole which are matched with the studs of the first fixing seat and the second fixing seat, and the vibrating body is symmetrical about the connecting line of the centers of the first through hole and the second through hole;
The studs of the first fixing seat and the second fixing seat respectively penetrate through the first through hole and the second through hole and are correspondingly connected with the first fixing nut and the second fixing nut through threads, so that the vibrating body is fixed on the bases of the first fixing seat and the second fixing seat;
The base is fixed on the air floating platform, so that the vibrator is horizontal;
The mounting groove comprises two rectangular step grooves with different depths, the two step grooves have the same width and are connected in the length direction, the depth of the step groove positioned at the upstream is larger than that of the step groove positioned at the downstream, and the mounting groove is symmetrical about the connecting line of the centers of the first through hole and the second through hole;
The PDMS module and the mounting groove are the same in shape and made of PDMS material, and are fixed in the mounting groove through PDMS glue;
the upper surface of the PDMS is provided with a migration runner and a second outlet runner on a connecting line of the centers of the first through hole and the second through hole, and a separation runner is arranged between the migration runner and the second outlet runner; the upper surface of the PDMS is also symmetrically provided with a first outlet runner and a third outlet runner at two sides of the second outlet runner, and the first outlet runner and the third outlet runner are respectively communicated with two ends of the sorting runner;
the lower surface of the vibrator is sequentially provided with first to fifth piezoelectric grooves from upstream to downstream along the length direction of the vibrator, and the first to fifth piezoelectric grooves are perpendicular to the migration flow passage and are symmetrical about the straight line where the migration flow passage is located;
The piezoelectric driving module comprises first to fifth migration piezoelectric ceramic plates and sorting piezoelectric ceramic plates;
The first to fifth migration piezoelectric ceramic plates have the same structure, are correspondingly arranged in the first to fifth piezoelectric grooves one by one and are polarized along the thickness direction, the polarization directions of the first, second and fifth migration piezoelectric ceramic plates are the same, the polarization directions of the third and fourth migration piezoelectric ceramic plates are the same, and the polarization directions of the first and third migration piezoelectric ceramic plates are opposite;
The second migration piezoelectric ceramic piece and the fourth migration piezoelectric ceramic piece are used for being matched with the second-order out-of-plane bending vibration mode for exciting the distortion of the vibration body in the length direction, the third migration piezoelectric ceramic piece is simultaneously positioned at an antinode of the first-order out-of-plane bending vibration mode of the vibration body and an antinode of the third-order out-of-plane bending vibration mode of the vibration body, the second migration piezoelectric ceramic piece and the fourth migration piezoelectric ceramic piece are both positioned at an antinode of the second-order out-of-plane bending vibration mode of the vibration body, and the first piezoelectric ceramic piece and the fifth piezoelectric ceramic piece are both positioned at an antinode of the third-order out-of-plane bending vibration mode of the vibration body;
The vibration body is provided with a rectangular through groove with the same width as the mounting groove below the separation flow channel, and the separation copper sheet is stuck on the lower end surface of the PDMS module in the rectangular through groove;
The sorting piezoelectric ceramic plates are stuck on the lower end face of the sorting copper sheet and are symmetrical about the connecting line of the centers of the first through hole and the second through hole, and the sorting piezoelectric ceramic plates are polarized along the thickness direction of the sorting piezoelectric ceramic plates and are used for exciting a first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrator.
As a further optimization scheme of the patch mode switching microsphere multimode control device based on standing waves, the base adopts a rectangular plate, and through holes for fixing the air floatation platform are formed in four corners of the rectangular plate.
As a further optimization scheme of the patch mode switching microsphere multimode control device based on standing waves, the first to fifth piezoelectric grooves have the same structure and the depth is smaller than the thickness of the first migration piezoelectric ceramic sheet.
The invention also discloses a control method of the patch mode switching microsphere multimode control device based on standing waves, which comprises the following steps:
Step 1), injecting a bearing fluid and releasing microspheres in the upstream of the migration flow channel;
Step 2), applying a preset third simple harmonic voltage signal to the first, third and fifth migration pressure ceramic plates, exciting a third-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator, enabling the microsphere to advance along the linear migration flow channel along with the fluid until the microsphere moves to a first node of the distorted third-order bending vibration, positioning the microsphere on the node under the action of acoustic radiation force and drag force generated by acoustic flow, and performing first morphology detection on the microsphere through a microscope;
Step 3), the first, third and fifth migration piezoelectric ceramic plates are powered off, a preset second simple harmonic voltage signal is applied to the second and fourth migration piezoelectric ceramic plates, a second-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator is excited, the microsphere advances to a first node of the distorted second-order bending vibration along with the fluid in a linear migration flow channel, the microsphere is positioned on the node under the action of acoustic radiation force and drag force generated by acoustic flow, and at the moment, the microsphere is subjected to second appearance detection through a microscope;
step 4), powering off the second and fourth migration piezoelectric ceramic plates, applying a preset first simple harmonic voltage signal to the third migration piezoelectric ceramic plate, exciting a first-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator, powering off the third migration piezoelectric ceramic plate when the microsphere moves to the central position of the sorting flow channel along with the fluid in the linear migration flow channel, so that the microsphere is positioned, and performing third appearance detection on the microsphere through a microscope;
Step 5), judging the surface quality of the microparticles according to the three detection result judgment, and sorting the microparticles according to the quality condition;
Step 5.1), if the microspheres are inferior microspheres, applying a preset fourth simple harmonic voltage signal to the sorting piezoelectric ceramic plates to excite a first-order out-of-plane bending vibration mode of the sorting copper plates in the width direction of the vibrator, so that the microspheres move to the inlet of the first outlet flow channel;
Step 5.2), if the microsphere is a medium-quality microsphere, applying a preset fifth simple harmonic voltage signal to the sorting piezoelectric ceramic plate to excite a first-order out-of-plane bending vibration mode of the sorting copper plate in the width direction of the vibrator, so that the microsphere moves to the inlet of the third outlet flow channel;
Step 5.3), if the microspheres are high-quality microspheres, not driving the sorting piezoelectric ceramic plates, wherein the microspheres are positioned at the inlet of the second outlet flow channel;
and 6) applying a preset first simple harmonic voltage signal to the third migration piezoelectric ceramic wafer, so that the microspheres continue to advance into the corresponding outlet flow channels after sorting.
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
1. the equipment is simple and low in price, and the cost of a common screening system can be reduced;
2. the micro-control device excited by piezoelectricity can realize nondestructive and non-contact control on the microspheres, and the control means comprise positioning control, migration control and sorting control;
3. the microspheres are controlled to realize different motions, and simultaneously, the microscope is adopted to analyze the advantages and disadvantages of parameters such as the size, the surface morphology and the like, so that the microspheres with different surface quality are controlled to be gathered in different areas, and the microspheres are screened efficiently and precisely.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the structure of the base, the first fixing base and the second fixing base of the present invention;
FIG. 3 is a top view of a PDMS module according to the present invention;
FIG. 4 is a schematic view of the structure of a vibrator according to the present invention;
FIG. 5 is a bottom view of the vibrator of the present invention;
FIG. 6 is a schematic view showing the polarization directions of the first to fifth piezoelectric ceramic wafers according to the present invention;
FIG. 7 is a schematic diagram of the mode of vibration and the mode of electric signal application of the first-order out-of-plane bending vibration of the distortion of the variable groove depth asymmetric vibrator excited by the third migration piezoelectric ceramic plate in the present invention;
FIG. 8 is a schematic diagram of the mode of vibration and the mode of applying an electrical signal of the second-order out-of-plane flexural vibration of the second and fourth-order piezoelectric ceramic plates exciting the distortion of the vibrator according to the present invention;
FIG. 9 is a schematic diagram of the mode of vibration and the mode of electric signal application of the third-order out-of-plane flexural vibration of the first, third and fifth-order piezoelectric ceramic plate excited vibration body in accordance with the present invention;
FIG. 10 is a schematic diagram of the mode of vibration of the first-order out-of-plane bending vibration and the mode of applying an electrical signal of a sorted piezoelectric ceramic sheet excited and sorted copper sheet;
FIG. 11 is a schematic diagram of the particle motion location after even and odd modes switch under standard flexural vibration modes;
FIG. 12 is a schematic diagram of the position of the particles after switching between even-order and odd-order modes in a distorted bending vibration mode according to the present invention;
FIG. 13 is a schematic diagram of the present invention for achieving multiple positioning, migration and classification of microspheres.
In the figure, a 1-base, a 2-vibrator, a 3-PDSM module, a 4-first fixing seat, a 5-second fixing seat, a 6-first fixing nut, a 7-second fixing nut, an 8-migration runner, a 9-sorting runner, a 10-first outlet runner, a 11-second outlet runner, a 13-third outlet runner, a 14-sorting copper sheet and a 15-sorting piezoelectric ceramic sheet.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the accompanying drawings:
this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the components are exaggerated for clarity.
It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components and/or sections, these elements, components and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, and/or section from another. Accordingly, a first element, component, and/or section discussed below could be termed a second element, component, or section without departing from the teachings of the present invention.
As shown in fig. 1, the invention discloses a patch mode switching microsphere multimode control device based on standing waves, which comprises a base, a vibrator, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric driving module;
As shown in fig. 2, the first fixing seat and the second fixing seat are both arranged on the base, have the same structure and comprise a base and a stud, wherein the base is a column, and the lower end face of the base is fixedly connected with the base;
the vibrating body is a cuboid, and a first lug and a second lug are respectively arranged at two ends of the vibrating body; the centers of the first lug and the second lug are respectively provided with a first through hole and a second through hole which are matched with the studs of the first fixing seat and the second fixing seat, and the vibrating body is symmetrical about the connecting line of the centers of the first through hole and the second through hole;
The studs of the first fixing seat and the second fixing seat respectively penetrate through the first through hole and the second through hole and are correspondingly connected with the first fixing nut and the second fixing nut through threads, so that the vibrating body is fixed on the bases of the first fixing seat and the second fixing seat;
The base is fixed on the air floating platform, so that the vibrator is horizontal;
The mounting groove comprises two rectangular step grooves with different depths, wherein the two rectangular step grooves have the same width and are connected in the length direction, the depth of the step groove positioned at the upstream is larger than that of the step groove positioned at the downstream, and the mounting groove is symmetrical about the connecting line of the centers of the first through hole and the second through hole;
The PDMS module and the mounting groove are the same in shape and made of PDMS material, and are fixed in the mounting groove through PDMS glue;
As shown in fig. 3, the upper surface of the PDMS is provided with a migration runner and a second outlet runner on the connecting line of the centers of the first through hole and the second through hole, and a sorting runner is arranged between the migration runner and the second outlet runner, wherein the migration runner is positioned at the upstream of the second outlet runner;
As shown in fig. 5, the lower surface of the vibrator is provided with first to fifth piezoelectric grooves in sequence from upstream to downstream along the length direction thereof, wherein the first to fifth piezoelectric grooves are perpendicular to the migration flow channel and are symmetrical about the straight line where the migration flow channel is located;
The piezoelectric driving module comprises first to fifth migration piezoelectric ceramic plates and sorting piezoelectric ceramic plates;
As shown in fig. 6, the first to fifth migration piezoelectric ceramic plates have the same structure, are arranged in the first to fifth piezoelectric grooves in a one-to-one correspondence manner, are polarized along the thickness direction, have the same polarization directions, and have opposite polarization directions;
The third migration piezoelectric ceramic piece is used for exciting a first-order out-of-plane bending vibration mode of the vibration body in the length direction (shown in fig. 7) or exciting a third-order out-of-plane bending vibration mode of the vibration body in the length direction (shown in fig. 9) in cooperation with the first migration piezoelectric ceramic piece and the fifth migration piezoelectric ceramic piece, the second migration piezoelectric ceramic piece and the fourth migration piezoelectric ceramic piece are used for exciting a second-order out-of-plane bending vibration mode of the vibration body in the length direction (shown in fig. 8), the third migration piezoelectric ceramic piece is simultaneously positioned at an antinode of the first-order out-of-plane bending vibration mode of the vibration body and an antinode of the third-order out-of-plane bending vibration mode of the vibration body, the second migration piezoelectric ceramic piece and the fourth migration piezoelectric ceramic piece are both positioned at an antinode of the third-order out-of-plane bending vibration mode of the vibration body;
As shown in fig. 4 and 5, a rectangular through groove with the same width as the mounting groove is arranged below the sorting flow channel of the vibrator, and the sorting copper sheet is adhered to the lower end surface of the PDMS module in the rectangular through groove;
The sorting piezoelectric ceramic plates are stuck on the lower end face of the sorting copper sheet and are symmetrical about the connecting line of the centers of the first through hole and the second through hole, and the sorting piezoelectric ceramic plates are polarized along the thickness direction of the sorting piezoelectric ceramic plates and are used for exciting a first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrator, as shown in fig. 10.
The base preferably adopts the rectangular plate, all is equipped with the through-hole that is used for the air supporting platform to fix on its four angles.
The first to fifth piezoelectric grooves have the same structure and the depth is smaller than the thickness of the first migration piezoelectric ceramic piece. The piezoelectric ceramic plate can be positioned when being adhered, and the deformation effect of the piezoelectric ceramic plate when vibrating in the d 31 mode can be amplified through the constraint action of the groove on the piezoelectric ceramic plate, so that the effect of amplifying the amplitude is achieved.
Through set up migration runner, separation runner and first through third outlet runner at PDSM module upper surface, realized the planning of microparticle motion route promptly, also avoided directly planning the problem that the required vibration mode that the runner led to on the vibrator can't be stimulated, simultaneously, the box body bottom surface is enclosed construction, prevents to lead to the fact the seepage that the microparticle bears liquid because of the design separation runner.
The invention also discloses a control method of the patch mode switching microsphere multimode control device based on standing waves, which comprises the following steps:
Step 1), injecting a bearing fluid and releasing microspheres in the upstream of the migration flow channel;
Step 2), applying a preset third simple harmonic voltage signal to the first, third and fifth migration pressure ceramic plates, exciting a third-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator, enabling the microsphere to advance along the linear migration flow channel along with the fluid until the microsphere moves to a first node of the distorted third-order bending vibration, positioning the microsphere on the node under the action of acoustic radiation force and drag force generated by acoustic flow, and performing first morphology detection on the microsphere through a microscope;
Step 3), the first, third and fifth migration piezoelectric ceramic plates are powered off, a preset second simple harmonic voltage signal is applied to the second and fourth migration piezoelectric ceramic plates, a second-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator is excited, the microsphere advances to a first node of the distorted second-order bending vibration along with the fluid in a linear migration flow channel, the microsphere is positioned on the node under the action of acoustic radiation force and drag force generated by acoustic flow, and at the moment, the microsphere is subjected to second appearance detection through a microscope;
step 4), powering off the second and fourth migration piezoelectric ceramic plates, applying a preset first simple harmonic voltage signal to the third migration piezoelectric ceramic plate, exciting a first-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator, powering off the third migration piezoelectric ceramic plate when the microsphere moves to the central position of the sorting flow channel along with the fluid in the linear migration flow channel, so that the microsphere is positioned, and performing third appearance detection on the microsphere through a microscope;
Step 5), judging the surface quality of the microparticles according to the three detection result judgment, and sorting the microparticles according to the quality condition;
Step 5.1), if the microspheres are inferior microspheres, applying a preset fourth simple harmonic voltage signal to the sorting piezoelectric ceramic plates to excite a first-order out-of-plane bending vibration mode of the sorting copper plates in the width direction of the vibrator, so that the microspheres move to the inlet of the first outlet flow channel;
Step 5.2), if the microsphere is a medium-quality microsphere, applying a preset fifth simple harmonic voltage signal to the sorting piezoelectric ceramic plate to excite a first-order out-of-plane bending vibration mode of the sorting copper plate in the width direction of the vibrator, so that the microsphere moves to the inlet of the third outlet flow channel;
Step 5.3), if the microspheres are high-quality microspheres, not driving the sorting piezoelectric ceramic plates, wherein the microspheres are positioned at the inlet of the second outlet flow channel;
and 6) applying a preset first simple harmonic voltage signal to the third migration piezoelectric ceramic wafer, so that the microspheres continue to advance into the corresponding outlet flow channels after sorting.
The movement position of the particles after the even-order and odd-order modes are switched under the standard bending vibration mode is shown in fig. 11, while the mounting groove of the vibrator comprises two step grooves, and the asymmetric structure can adjust the standard bending vibration mode of the vibrator to be a distorted bending vibration mode, so that the dislocation of antinodes and node positions among the vibration modes with different orders is realized, as shown in fig. 12.
According to the invention, the microspheres with the control size ranging from micron level to millimeter level are positioned in the PDMS flow channel for multiple times, long-distance migration and classification, the microspheres are detected under the observation of a microscope after each time of positioning, the microspheres are further moved to the outlet of the flow channel through mode switching after detection, and after the microspheres reach the last positioning node, the high-quality microspheres and the low-quality microspheres are classified according to the detection result of the microscope, so that the microspheres with different qualities are gathered at different outlets, as shown in figure 13.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.
Claims (4)
1. The patch mode switching microsphere multimode control device based on standing waves is characterized by comprising a base, a vibrator, a first fixing seat, a second fixing seat, a first fixing nut, a second fixing nut, a PDMS module, a sorting copper sheet and a piezoelectric driving module;
The first fixing seat and the second fixing seat are arranged on the base and have the same structure and comprise a base and a stud, wherein the base is a column, and the lower end face of the base is fixedly connected with the base;
the vibrating body is a cuboid, and a first lug and a second lug are respectively arranged at two ends of the vibrating body; the centers of the first lug and the second lug are respectively provided with a first through hole and a second through hole which are matched with the studs of the first fixing seat and the second fixing seat, and the vibrating body is symmetrical about the connecting line of the centers of the first through hole and the second through hole;
The studs of the first fixing seat and the second fixing seat respectively penetrate through the first through hole and the second through hole and are correspondingly connected with the first fixing nut and the second fixing nut through threads, so that the vibrating body is fixed on the bases of the first fixing seat and the second fixing seat;
The base is fixed on the air floating platform, so that the vibrator is horizontal;
The mounting groove comprises two rectangular step grooves with different depths, the two step grooves have the same width and are connected in the length direction, the depth of the step groove positioned at the upstream is larger than that of the step groove positioned at the downstream, and the mounting groove is symmetrical about the connecting line of the centers of the first through hole and the second through hole;
The PDMS module and the mounting groove are the same in shape and made of PDMS material, and are fixed in the mounting groove through PDMS glue;
The upper surface of the PDMS module is provided with a migration runner and a second outlet runner on a connecting line of the centers of the first through hole and the second through hole, and a separation runner is arranged between the migration runner and the second outlet runner; the upper surface of the PDMS module is also symmetrically provided with a first outlet runner and a third outlet runner at two sides of the second outlet runner, and the first outlet runner and the third outlet runner are respectively communicated with two ends of the sorting runner;
the lower surface of the vibrator is sequentially provided with first to fifth piezoelectric grooves from upstream to downstream along the length direction of the vibrator, and the first to fifth piezoelectric grooves are perpendicular to the migration flow passage and are symmetrical about the straight line where the migration flow passage is located;
The piezoelectric driving module comprises first to fifth migration piezoelectric ceramic plates and sorting piezoelectric ceramic plates;
The first to fifth migration piezoelectric ceramic plates have the same structure, are correspondingly arranged in the first to fifth piezoelectric grooves one by one and are polarized along the thickness direction, the polarization directions of the first, second and fifth migration piezoelectric ceramic plates are the same, the polarization directions of the third and fourth migration piezoelectric ceramic plates are the same, and the polarization directions of the first and third migration piezoelectric ceramic plates are opposite;
The second migration piezoelectric ceramic piece and the fourth migration piezoelectric ceramic piece are used for being matched with the second-order out-of-plane bending vibration mode for exciting the distortion of the vibration body in the length direction, the third migration piezoelectric ceramic piece is simultaneously positioned at an antinode of the first-order out-of-plane bending vibration mode of the vibration body and an antinode of the third-order out-of-plane bending vibration mode of the vibration body, the second migration piezoelectric ceramic piece and the fourth migration piezoelectric ceramic piece are both positioned at an antinode of the second-order out-of-plane bending vibration mode of the vibration body, and the first piezoelectric ceramic piece and the fifth piezoelectric ceramic piece are both positioned at an antinode of the third-order out-of-plane bending vibration mode of the vibration body;
The vibration body is provided with a rectangular through groove with the same width as the mounting groove below the separation flow channel, and the separation copper sheet is stuck on the lower end surface of the PDMS module in the rectangular through groove;
The sorting piezoelectric ceramic plates are stuck on the lower end face of the sorting copper sheet and are symmetrical about the connecting line of the centers of the first through hole and the second through hole, and the sorting piezoelectric ceramic plates are polarized along the thickness direction of the sorting piezoelectric ceramic plates and are used for exciting a first-order out-of-plane bending vibration mode of the sorting copper sheet in the width direction of the vibrator.
2. The standing wave-based patch-type modal switching microsphere multimode control device according to claim 1, wherein the base is a rectangular plate, and through holes for fixing the air floating platform are formed in four corners of the rectangular plate.
3. The standing wave-based patch mode switching microsphere multimode manipulation device of claim 1, wherein the first to fifth piezoelectric grooves have the same structure and a depth less than the thickness of the first migration piezoelectric ceramic sheet.
4. The method for controlling the surface-mounted mode switching microsphere multimode control device based on the standing wave according to claim 1, which is characterized by comprising the following steps:
Step 1), injecting a bearing fluid and releasing microspheres in the upstream of the migration flow channel;
Step 2), applying a preset third simple harmonic voltage signal to the first, third and fifth migration piezoelectric ceramic plates to excite a third-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator, enabling the microsphere to advance along the linear migration flow channel along with the fluid until the microsphere moves to a first node of the distorted third-order bending vibration, positioning the microsphere on the node under the action of acoustic radiation force and drag force generated by acoustic flow, and performing first morphology detection on the microsphere through a microscope;
Step 3), the first, third and fifth migration piezoelectric ceramic plates are powered off, a preset second simple harmonic voltage signal is applied to the second and fourth migration piezoelectric ceramic plates, a second-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator is excited, the microsphere advances to a first node of the distorted second-order bending vibration along with the fluid in a linear migration flow channel, the microsphere is positioned on the node under the action of acoustic radiation force and drag force generated by acoustic flow, and at the moment, the microsphere is subjected to second appearance detection through a microscope;
step 4), powering off the second and fourth migration piezoelectric ceramic plates, applying a preset first simple harmonic voltage signal to the third migration piezoelectric ceramic plate, exciting a first-order out-of-plane bending vibration mode of the vibrator distorted in the length direction of the vibrator, powering off the third migration piezoelectric ceramic plate when the microsphere moves to the central position of the sorting flow channel along with the fluid in the linear migration flow channel, so that the microsphere is positioned, and performing third appearance detection on the microsphere through a microscope;
Step 5), judging the quality of the surface of the microsphere according to the judgment of the three detection results, and sorting the microsphere according to the quality condition;
Step 5.1), if the microspheres are inferior microspheres, applying a preset fourth simple harmonic voltage signal to the sorting piezoelectric ceramic plates to excite a first-order out-of-plane bending vibration mode of the sorting copper plates in the width direction of the vibrator, so that the microspheres move to the inlet of the first outlet flow channel;
Step 5.2), if the microsphere is a medium-quality microsphere, applying a preset fifth simple harmonic voltage signal to the sorting piezoelectric ceramic plate to excite a first-order out-of-plane bending vibration mode of the sorting copper plate in the width direction of the vibrator, so that the microsphere moves to the inlet of the third outlet flow channel;
Step 5.3), if the microspheres are high-quality microspheres, not driving the sorting piezoelectric ceramic plates, wherein the microspheres are positioned at the inlet of the second outlet flow channel;
and 6) applying a preset first simple harmonic voltage signal to the third migration piezoelectric ceramic wafer, so that the microspheres continue to advance into the corresponding outlet flow channels after sorting.
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| CN112870854B (en) * | 2021-01-18 | 2022-04-08 | 南京航空航天大学 | Standing wave switching type acoustic flow micro-control screening device and working method thereof |
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