CN115914784A

CN115914784A - Driver, manufacturing method thereof, driving device, camera module and electronic equipment

Info

Publication number: CN115914784A
Application number: CN202111165760.4A
Authority: CN
Inventors: 李飞; 刘金凤; 何雨航; 高翔宇; 郭靖余; 任凯乐; 夏颂; 徐卓; 陈伟
Original assignee: Guangdong Oppo Mobile Telecommunications Corp Ltd
Current assignee: Guangdong Oppo Mobile Telecommunications Corp Ltd
Priority date: 2021-09-30
Filing date: 2021-09-30
Publication date: 2023-04-04
Also published as: WO2023051118A1

Abstract

The application provides a driver, a manufacturing method of the driver, a driving device, a camera module and electronic equipment, wherein the driver comprises a plurality of stacked piezoelectric bodies and a jacking piece arranged on one side of each piezoelectric body; each piezoelectric body comprises a first electrode layer and a second electrode layer which are oppositely arranged; the two adjacent piezoelectric bodies are bonded through the first electrode layers on the two piezoelectric bodies, and/or the two adjacent piezoelectric bodies are bonded through the second electrode layers on the two piezoelectric bodies. The driver, the manufacturing method of the driver, the driving device, the camera module and the electronic equipment can improve the input power of the driver through the stacking structure with the plurality of piezoelectric bodies, and therefore larger driving force can be obtained. The first electrode layer and/or the second electrode layer are/is directly bonded with the two adjacent piezoelectric bodies, so that the overall thickness of the driver can be further reduced, larger driving force can be obtained, and large-stroke driving can be realized.

Description

Driver, manufacturing method thereof, driving device, camera module and electronic equipment

Technical Field

The application relates to the technical field of electronic equipment structures, in particular to a driver, a manufacturing method of the driver, a driving device, a camera module and electronic equipment.

Background

With the development of portable electronic devices such as smart phones and tablet computers and smart wearable devices, the user's demand for the image quality of terminal devices is increasing day by day. The motor is an important component of the image module, and plays an important role in the performance of Auto Focus (AF) and Optical Image Stabilization (OIS).

At present, most of motors adopted in mobile terminals such as mobile phones have the defects of complex structure, short driving stroke, low driving efficiency and the like.

Disclosure of Invention

One aspect of the embodiments of the present application provides a driver, where the driver includes a plurality of stacked piezoelectric bodies and a supporting member disposed on one side of the piezoelectric bodies; each piezoelectric body comprises a first electrode layer and a second electrode layer which are oppositely arranged; the two adjacent piezoelectric bodies are bonded through the first electrode layers on the two piezoelectric bodies, and/or the two adjacent piezoelectric bodies are bonded through the second electrode layers on the two piezoelectric bodies.

In another aspect, the present invention provides a method for manufacturing an actuator, where the actuator includes a plurality of piezoelectric bodies, each of the piezoelectric bodies includes a first surface and a second surface that are disposed opposite to each other, and the method includes: acquiring the simulation size of the piezoelectric bodies, and acquiring a plurality of piezoelectric bodies according to the simulation size; forming a first electrode layer on a first surface of each of the piezoelectric bodies, and forming a second electrode layer on a second surface of each of the piezoelectric bodies; stacking a plurality of the piezoelectric bodies in such a manner that directions of polarization directions of adjacent two of the piezoelectric bodies are opposite to each other; curing the stacked plurality of piezoelectric bodies; the two adjacent piezoelectric bodies are bonded through the first electrode layers on the two piezoelectric bodies, and/or the two adjacent piezoelectric bodies are bonded through the second electrode layers on the two piezoelectric bodies.

Yet another aspect of the embodiments of the present application further provides a driving apparatus, which includes a moving body and a driver; the driver comprises a plurality of piezoelectric bodies which are arranged in a stacked mode and a jacking piece arranged on one side of each piezoelectric body, and the jacking piece abuts against the moving body so as to be used for driving the moving body to move; each piezoelectric body comprises a first electrode layer and a second electrode layer which are oppositely arranged; two adjacent piezoelectric bodies are bonded through the first electrode layers on the two piezoelectric bodies, and/or two adjacent piezoelectric bodies are bonded through the second electrode layers on the two piezoelectric bodies.

In another aspect, an embodiment of the present application further provides a camera module, where the camera module includes a lens and the driving device in the foregoing embodiment; the lens is connected to the moving body of the driving device.

In another aspect, an embodiment of the present application further provides an electronic device, where the electronic device includes a display screen, a housing, a circuit board, and the camera module in the foregoing embodiment, and the camera module is connected to the housing or the display screen; the casing with the display screen cooperation forms accommodation space, the circuit board is located in the accommodation space and with the camera module with the display screen electricity is connected.

According to the driver, the manufacturing method of the driver, the driving device, the camera module and the electronic equipment, the input power of the driver can be improved through the stacked structure with the plurality of piezoelectric bodies, and therefore larger driving force can be obtained. In addition, under the condition that the total thickness of the driver is not changed, the multi-layer piezoelectric body stacking structure can effectively reduce the driving voltage of the driver. In addition, this embodiment is through relative first electrode layer and the second electrode layer that sets up so that the piezoelectric body can realize corresponding vibration mode, and two adjacent piezoelectric bodies of direct bonding through first electrode layer and/or second electrode layer simultaneously can further reduce the whole thickness of driver to obtain bigger drive power and realize the drive of big stroke.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a schematic diagram of a front side structure of an electronic device in some embodiments of the present application;

FIG. 2 is a schematic diagram of a back structure of the electronic device in the embodiment of FIG. 1;

FIG. 3 is a schematic view of a camera module according to some embodiments of the present disclosure;

FIG. 4 is a schematic, broken away view of a drive arrangement according to some embodiments of the present application;

FIG. 5 is a schematic view of the configuration of the embodiment of FIG. 4 showing the engagement of the driver and the clamp;

FIG. 6 is a schematic view of a clamp according to some embodiments of the present application;

FIG. 7 is a schematic view of a clamp according to further embodiments of the present application;

FIG. 8 is a schematic view of the structure of a drive unit according to another embodiment of the present application;

FIG. 9 isbase:Sub>A schematic sectional view along A-A of the driving device in the embodiment of FIG. 8;

FIG. 10 is a schematic cross-sectional view of a drive assembly according to further embodiments of the present application;

FIG. 11 is a schematic view of a portion of a drive assembly according to further embodiments of the present application;

FIG. 12 is a schematic top view of a drive assembly according to some embodiments of the present application;

FIG. 13 is a schematic sectional view of the driving device of FIG. 12 along the direction B-B;

FIG. 14 is a schematic view of a driver configuration in some embodiments of the present application;

FIG. 15 is a schematic structural view of the piezoelectric body in the embodiment of FIG. 14;

FIG. 16 is a schematic view of the structure of a driver according to further embodiments of the present application;

FIG. 17 is a schematic view of the structure of a driver according to further embodiments of the present application;

FIG. 18 is a schematic view of the structure of a driver according to further embodiments of the present application;

FIG. 19 is a schematic structural diagram of the piezoelectric body in the embodiment of FIG. 18;

FIG. 20 is a schematic view of the structure of a driver according to further embodiments of the present application;

FIG. 21 is a schematic view of the structure of a driver according to further embodiments of the present application;

FIG. 22 is a schematic diagram of the displacement output of the actuator in the X direction in some embodiments of the present application;

FIG. 23 is a schematic diagram of the displacement output of the actuator in the Y direction in some embodiments of the present application;

FIG. 24 is a flow chart illustrating a method of fabricating a driver according to some embodiments of the present application;

FIG. 25 is a schematic diagram of driver simulation versus test results in some embodiments of the present application;

FIG. 26 is a schematic view of a stacked apparatus according to some embodiments of the present application;

FIG. 27 is a schematic, exploded view of the stacking device of the embodiment of FIG. 26;

FIG. 28 is a graphical representation of the output speed of a drive device versus drive voltage in some embodiments of the present application.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be noted that the following examples are only illustrative of the present application, and do not limit the scope of the present application. Likewise, the following examples are only some examples and not all examples of the present application, and all other examples obtained by a person of ordinary skill in the art without any inventive work are within the scope of the present application.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.

As used herein, an "electronic device" (or simply "terminal") includes, but is not limited to, an apparatus that is configured to receive/transmit communication signals via a wireline connection, such as via a Public Switched Telephone Network (PSTN), a Digital Subscriber Line (DSL), a digital cable, a direct cable connection, and/or another data connection/network, and/or via a wireless interface (e.g., for a cellular network, a Wireless Local Area Network (WLAN), a digital television network such as a DVB-H network, a satellite network, an AM-FM broadcast transmitter, and/or another communication terminal).

A communication terminal arranged to communicate over a wireless interface may be referred to as a "wireless communication terminal", "wireless terminal" or "mobile terminal". Examples of mobile terminals include, but are not limited to, satellite or cellular telephones; a Personal Communications System (PCS) terminal that may combine a cellular radiotelephone with data processing, facsimile and data communications capabilities; PDAs that may include radiotelephones, pagers, internet/intranet access, web browsers, notepads, calendars, and/or Global Positioning System (GPS) receivers; and conventional laptop and/or palmtop receivers or other electronic devices that include a radiotelephone transceiver.

As used herein, the term "electronic device" may further include, but is not limited to, a lens driven by a piezoelectric driver to focus, so as to realize an image function of the electronic device, and may realize optical anti-shake during the focusing process, so as to improve the image effect of the electronic device.

For example, the piezoelectric actuator may be an electromagnetic motor, which is driven primarily by lorentz force. However, the driving force of the electromagnetic motor is low, and the driving requirements of the heavy lens set and the long stroke cannot be met. In addition, the use of magnets can lead to potential magnetic interference risks, and the risks are increased with the increase of cameras, which is not favorable for the use of multi-camera scenes.

Based on this, embodiments of the present application are directed to provide an electronic device, which may be based on a piezoelectric actuator lens or lens group driving scheme to meet AF and OIS functional requirements of heavy lens/lens group and long stroke driving requirements. It is understood that the piezoelectric actuator refers to a device that converts electric energy into mechanical energy or mechanical motion using the inverse piezoelectric effect (length expansion and contraction, thickness expansion and contraction, etc.) of a piezoelectric material (lead zirconate titanate, etc.).

Referring to fig. 1 and fig. 2, fig. 1 is a schematic front structure diagram of an electronic device 1000 according to some embodiments of the present disclosure, and fig. 2 is a schematic back structure diagram of the electronic device 1000 according to fig. 1, where the electronic device 1000 may include a mobile phone, a tablet computer, a notebook computer, a wearable device, and the like. In the embodiment of the present application, the electronic device 1000 is exemplified by a mobile phone.

The electronic device 1000 may generally include the following structure: camera module 100, display screen 200, casing 300 and circuit board 400. The electronic device in this embodiment may include a plurality of camera modules 100. The camera module 100 can be connected to the display 200 or the housing 300 (forming a front and a rear camera structure). The display screen 200 and the housing 300 cooperate to form an accommodating space, the circuit board 400 is disposed in the accommodating space, and the circuit board 400 is electrically connected to the camera module 100 and the display screen 200. The circuit board 400 is used for controlling the operating states of the camera module 100 and the display screen 200. The detailed technical features of the other parts of the electronic device are within the understanding of those skilled in the art, and therefore, the detailed description of the present application is omitted.

Referring to fig. 3, fig. 3 is a schematic diagram illustrating a camera module 100 according to some embodiments of the present disclosure, where the camera module 100 generally includes a driving device 10 and a lens 20. The driving device 10 is disposed in the accommodating space for positioning and installing the camera module 100. The lens 20 can move under the driving of the driving device 10 to realize the focusing function of the camera module 100. The lens 20 may be a structural form including a plurality of lens groups, and the detailed structural features of the lens 20 are within the understanding range of those skilled in the art, so that the detailed description is omitted herein.

It is understood that the camera module 100 may further include an image sensor (not shown), which is disposed corresponding to the light-emitting surface of the lens 20 and electrically connected to the circuit board 400. The imaging effect can be adjusted by adjusting the distance between the lens 20 and the image sensor, i.e. focusing, wherein the lens 20 can be driven by the driving device 10 to approach or move away from the image sensor.

Referring to fig. 4 and 5, fig. 4 is a schematic exploded view of a driving device 10 according to some embodiments of the present disclosure, and fig. 5 is a schematic view of a structure of a driver 13 and a clamping member 14 in the embodiment of fig. 4. The driving device 10 may generally include a base 11, a support 12, an actuator 13, and a clamping member 14, wherein the actuator 13 may include a piezoelectric body 131 and a supporting member 132 disposed at one side of the piezoelectric body 131. The driver 13 can drive the bracket 12 to move under the control of the circuit board 400, and the base 11 is disposed in the accommodating space for positioning and installing the driving device 10, i.e. the base 11 can be connected with the display screen 200 or the housing 300. For example, the base 11 may be fixed to the housing 300 by screwing, plugging, snapping, adhering, welding, or the like.

The base 11 has a receiving cavity 110, the rack 12 and the driver 13 are received in the receiving cavity 110, and the rack 12 can move relative to the receiving cavity 110, i.e. the base 11, under the driving of the driver 13. The bracket 12 is used for mounting the lens 20 and can drive the lens 20 to move, thereby realizing the focusing effect. In one embodiment, the holder 12 is provided with a mounting hole 120 penetrating through the holder 12 along an optical axis direction of the lens 20, and the lens 20 is disposed corresponding to the mounting hole 120, so that light passing through the lens 20 can be transmitted to the image sensor through the mounting hole 120. For example, the lens 20 is installed in the installation hole 120, and can be fixedly connected to the bracket 12 by screwing, plugging, snapping, bonding, welding, and the like, so that light passing through the lens 20 can be transmitted to the image sensor. Of course, the lens 20 and the holder 12 may be assembled in other ways, which are not listed.

In an embodiment, the bottom wall of the accommodating groove 110 is provided with a light through hole 111 corresponding to the mounting hole 120, and the image sensor is disposed on a side of the accommodating groove 110 away from the bracket 12. The light-passing hole 111 is disposed corresponding to the lens 20, so that light passing through the lens 20 can be transmitted to the image sensor.

The driver 13 is disposed between the support 12 and the base 11, and is connected to the support 12 and the base 11, respectively. The clamping member 14 is disposed on a side of the piezoelectric body 131 facing away from the supporting member 132, for clamping and positioning the piezoelectric body 131. The piezoelectric body 131 is configured to generate vibration for moving the supporting member 132. One end of the supporting member 132 departing from the piezoelectric body 131 abuts against the bracket 12, so that the supporting member 132 can drive the bracket 12 to move.

In one embodiment, the piezoelectric body 131 is spaced apart from the support 12, and the supporting member 132 is disposed on a side of the piezoelectric body 131 close to the support 12 and abuts against the support 12. The piezoelectric body 131 can be made of a piezoelectric material and can be deformed under the driving of a voltage, so as to drive the supporting member 132 to move, and further drive the support 12 to move to realize focusing.

In an embodiment, the supporting member 132 may be in the shape of a cylinder, a sphere, a cone, a rectangle, etc., which will not be described herein. The top holding member 132 may be made of, for example, alumina (Al) ₂ O ₃ ) Silicon oxide (SiO) ₂ ) Zirconium oxide (ZrO) ₂ ) Carbon fiber, polyester fiber and other wear-resistant materials, and can ensure the piezoelectric body131 is well transmitted to the bracket 12 while preventing the holder 132 from being worn out over a long period of time to maintain the fitting accuracy.

The supporting member 132 can be adhered to the piezoelectric body 131 through epoxy resin, and in other embodiments, the supporting member 132 can be connected and fixed to the piezoelectric body 131 through a screw connection, an insertion connection, a buckle connection, a welding connection, and the like, which is not described in detail.

In an embodiment, a sliding member 121 is disposed on a side of the bracket 12 close to the driver 13, i.e., the supporting member 132, and the sliding member 121 is disposed corresponding to the supporting member 132 and abuts against the supporting member 132, so as to drive the bracket 12 to move by a frictional force between the supporting member 132 and the sliding member 121. In one embodiment, the slider 121 may be bonded to the bracket 12 by epoxy. Of course, in other embodiments, the sliding member 121 may also be fixed to the bracket 12 by screwing, plugging, snapping, welding, or the like.

The slider 121 is a substantially sheet-like or plate-like structure and is provided on the outer surface of the bracket 12. Of course, the sliding member 121 may have other shapes, which will not be described in detail. The sliding member 121 may be made of, for example, alumina (Al) ₂ O ₃ ) Silicon oxide (SiO) ₂ ) Zirconium oxide (ZrO) ₂ ) Or made of wear-resistant materials such as carbon fiber and polyester fiber, the deformation driving force of the piezoelectric body 131 can be well transmitted to the bracket 12 through the supporting member 132 and the sliding member 121, and meanwhile, the supporting member 132 and the sliding member 121 can be prevented from being worn in long-time operation, so that the matching precision can be maintained.

It is understood that the supporting member 132 and the sliding member 121 may form a point-surface contact, a line-surface contact or a surface-surface contact therebetween, so as to drive the bracket 12 to move under the driving of the piezoelectric body 131. For example, the supporting member 132 may be a cone whose cone angle abuts against the sliding member 121 to form a point-surface contact. In some embodiments, there may be a plurality of supporting members 132, the supporting members 132 are disposed on the same side of the piezoelectric body 131, and the supporting members 132 abut against the sliding member 121 respectively. Of course, in other embodiments, there may be a plurality of the supporting members 132, a plurality of the sliding members 121, and a plurality of the supporting members 132 are abutted against the plurality of the sliding members 121 respectively. It should be understood that the supporting member 132 and the sliding member 121 may also have other corresponding relationships, which are not described in detail.

Wherein the top holder 132 and the slider 121 may be polished at the contact surfaces so that the contact surface roughness of the top holder 132 and the slider 121 is suitable for torque transmission between the piezoelectric body 131 and the holder 12. In addition, the top holder 132 and the sliding member 121 are made of wear-resistant materials with high hardness, so that the smoothness of the contact surface can be ensured under a long-time working state. In addition, since the sliding member 121 is in contact with the supporting member 132, the sliding member 121 and the supporting member 132 can transmit the movement to the bracket 12 through friction, so that the bracket 12 drives the lens to generate the movement in the focusing direction.

Referring to fig. 6, fig. 6 is a schematic structural view of the clamping member 14 according to some embodiments of the present disclosure, and the clamping member 14 generally includes a first sidewall 141, a second sidewall 142, and a bottom wall 143. The bottom wall 143 is disposed on a side of the piezoelectric body 131 away from the supporting member 132, and the first side wall 141 and the second side wall 142 are respectively connected to the bottom wall 143 in a bending manner and disposed on the same side of the bottom wall 143 near the piezoelectric body 131. In an embodiment, the first sidewall 141 and the second sidewall 142 respectively extend from two opposite ends of the bottom wall 143 in the optical axis direction of the lens 20 toward a direction away from the bottom wall 143, and the first sidewall 141 and the second sidewall 142 are respectively connected to the bottom wall 143 in a vertically bent manner. The first sidewall 141, the second sidewall 142 and the bottom wall 143 cooperate to form a clamping groove 140 for clamping the piezoelectric body 131, so as to ensure a stable working state of the piezoelectric body 131.

The inner sidewall of the clamping member 14 is convexly provided with a protrusion 144 abutting against the piezoelectric body 131, that is, the protrusion 144 is convexly provided on the inner sidewall of the clamping groove 140, so that the piezoelectric body 131 and the inner sidewall of the clamping groove 140 are arranged at an interval, and the degree of freedom of the piezoelectric body 131 is further limited without affecting the deformation and vibration of the piezoelectric body 131. It can be understood that the piezoelectric body 131 can generate longitudinal and tangential deformation during operation, and the connection manner of the contact between the protrusion 144 and the side portion of the piezoelectric body 131 is arranged to limit the degree of freedom of the piezoelectric body 131 without affecting the vibration of the piezoelectric body 131, thereby ensuring a stable operating state of the piezoelectric body 131.

The surface of the protrusion 144 close to the piezoelectric body 131 may be an arc surface or a plane surface.

In an embodiment, a surface of the first sidewall 141 close to the piezoelectric body 131 is convexly provided with a first protrusion 144a, and the surface of the first protrusion 144a close to the piezoelectric body 131 is substantially arc-shaped, so that the first protrusion 144a and the piezoelectric body 131 form a line-surface contact. The first protrusion 144a abuts against the piezoelectric body 131, so that the piezoelectric body 131 and the first sidewall 141 are spaced apart from each other. The first protrusion 144a may be a cylinder, a semi-cylinder, a sphere, a semi-sphere, etc.

The first protrusion 144a may abut against a surface centerline of the piezoelectric body 131 near the first sidewall 141. Of course, in another embodiment, a plurality of first protrusions 144a may be provided, and the plurality of first protrusions 144a may abut against the piezoelectric body 131 at a position symmetrical to a centerline of the surface of the piezoelectric body 131 close to the first sidewall 141.

In an embodiment, a surface of the second sidewall 142 close to the piezoelectric body 131 is convexly provided with a second protrusion 144b, and the surface of the second protrusion 144b close to the piezoelectric body 131 is substantially arc-shaped, so that the second protrusion 144b and the piezoelectric body 131 form a line-surface contact. The second protrusion 144b abuts against the piezoelectric body 131, so that the piezoelectric body 131 and the second sidewall 142 are spaced apart. The second protrusion 144b may be a cylinder, a semi-cylinder, a sphere, a semi-sphere, etc.

The second protrusion 144b may abut against a surface centerline of the piezoelectric body 131 near the second sidewall 142. Of course, in another embodiment, a plurality of second protrusions 144b may be provided, and the plurality of second protrusions 144b may abut against the piezoelectric body 131 at a position symmetrical to a centerline of the surface of the piezoelectric body 131 close to the second sidewall 142.

In one embodiment, the bottom wall 143 is provided with a third protrusion 144c protruding from a surface of the bottom wall 143 close to the piezoelectric body 131, and the surface of the third protrusion 144c close to the piezoelectric body 131 is substantially arc-shaped, so that the third protrusion 144c and the piezoelectric body 131 form a line-surface contact. The third protrusion 144c abuts against the piezoelectric body 131, so that the piezoelectric body 131 and the bottom wall 143 are spaced apart. The third protrusion 144c may be a cylinder, a semi-cylinder, a sphere, a semi-sphere, etc.

The third protrusion 144c can abut against a surface centerline of the piezoelectric body 131 near the bottom wall 143. Of course, in another embodiment, a plurality of third protrusions 144c may be provided, and the plurality of third protrusions 144c may abut against the piezoelectric body 131 at symmetrical positions along the center line of the surface of the piezoelectric body 131 close to the bottom wall 143.

It is understood that the surfaces of the first, second and

third protrusions

144a, 144b and 144c close to the piezoelectric body 131 may also be flat, i.e. the first, second and

third protrusions

144a, 144b and 144c are in surface-to-surface contact with partial surfaces of the piezoelectric body 131.

In one embodiment, the clamping member 14 may be provided with clamping portions 145, and the clamping portions 145 clamp opposite ends of the piezoelectric body 131 to ensure a stable working state of the piezoelectric body 131.

Specifically, the clamping portion 145 may include a first clamping portion 145a and a second clamping portion 145b that are oppositely disposed. The first clamping portion 145a extends from the first sidewall 141 toward a direction close to the piezoelectric body 131, and forms a first clamping groove 140a in cooperation with the first sidewall 141. That is, the first sidewall 141 is provided with a first clamping portion 145a on a side close to the piezoelectric body 131. The second clamping portion 145b extends from the second sidewall 142 toward the direction close to the piezoelectric body 131, and forms a second clamping groove 140b by cooperating with the second sidewall 142. That is, a side of the second sidewall 142 close to the piezoelectric body 131 is provided with a second clamping portion 145b. The first holding groove 140a and the second holding groove 140b hold both ends of the piezoelectric body 131 oppositely disposed along the optical axis direction of the lens 20, respectively. That is, the first clamping portion 145a and the second clamping portion 145b are oppositely disposed along the optical axis direction of the camera module 100, and respectively clamp opposite ends of the piezoelectric body 131. The first protrusion 144a is received in the first clamping portion 145a, and the second protrusion 144b is received in the second clamping groove 140b.

In one embodiment, the clip 14 may be made of plastic material, and the clip 14 having the above structure is formed by an integral molding process. For example, the clip 14 may be formed by injection molding.

The clamping piece that this application embodiment provided is through setting up bellying butt in piezoelectricity body for piezoelectricity body and clamping piece interval set up, and through setting up clamping part centre gripping piezoelectricity body, with carry on spacingly to piezoelectricity body, restrict the vibration degree of freedom of piezoelectricity body in the clamping piece under the condition that does not influence the vibration of piezoelectricity body, and then can convert the vibration maximize of piezoelectricity body into the removal that the piece was held on the top, thereby improve drive power. In addition, the convex portions are respectively arranged corresponding to the surface center line of the piezoelectric body or the symmetrical positions of the surface center line so as to limit the degree of freedom of the piezoelectric body without affecting the deformation vibration of the piezoelectric body. In addition, the piezoelectric body generates micro-amplitude vibration through voltage driving, so that the driving device can stop working immediately under the condition of power failure, and power failure self-locking and noise-free are realized. It should be noted that the terms "first", "second" and "third" in the present invention are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of the feature.

Referring to fig. 7, fig. 7 is a schematic structural diagram of the clamping member 14 according to another embodiment of the present application, the clamping member 14 generally includes a first sidewall 141, a second sidewall 142, and a bottom wall 143, and the matching relationship between the first sidewall 141, the second sidewall 142, and the bottom wall 143 can refer to the foregoing embodiments. The first sidewall 141, the second sidewall 142 and the bottom wall 143 cooperate to form a clamping groove 140 for clamping the piezoelectric body 131, so as to ensure a stable working state of the piezoelectric body 131.

The inner sidewall of the clamping member 14 is convexly provided with a protruding portion 144 abutting against the piezoelectric body 131, that is, the protruding portion 144 is convexly provided on the inner sidewall of the clamping groove 140, so that the piezoelectric body 131 and the inner sidewall of the clamping groove 140 are arranged at intervals, and the degree of freedom of the piezoelectric body 131 is further limited without affecting the deformation and vibration of the piezoelectric body 131. It can be understood that the piezoelectric body 131 can generate longitudinal and tangential deformation during operation, and the connection manner of the contact between the protrusion 144 and the side portion of the piezoelectric body 131 is arranged to limit the degree of freedom of the piezoelectric body 131 without affecting the vibration of the piezoelectric body 131, thereby ensuring a stable operating state of the piezoelectric body 131.

In an embodiment, a surface of the first sidewall 141 close to the piezoelectric body 131 is convexly provided with a first protrusion 144a, and the surface of the first protrusion 144a close to the piezoelectric body 131 is substantially planar, so that the first protrusion 144a and a part of the surface of the piezoelectric body 131 form a surface-to-surface contact. The first protrusion 144a abuts against the piezoelectric body 131, so that the piezoelectric body 131 and the first sidewall 141 are spaced apart from each other. The first protrusion 144a may be a rectangular body, a trapezoidal body, or the like.

In an embodiment, a surface of the second sidewall 142 close to the piezoelectric body 131 is convexly provided with a second protrusion 144b, and the surface of the second protrusion 144b close to the piezoelectric body 131 is substantially planar, so that the second protrusion 144b and a part of the surface of the piezoelectric body 131 form a surface-to-surface contact. The second protrusion 144b abuts against the piezoelectric body 131, so that the piezoelectric body 131 and the second sidewall 142 are spaced apart from each other. The second protrusion 144b may be a rectangular body, a trapezoid body, or the like.

In one embodiment, the bottom wall 143 is curved to form a convex curved surface 143a near the surface of the piezoelectric body 131, and the convex curved surface 143a is in line-surface contact with the piezoelectric body 131, so that the piezoelectric body 131 is spaced apart from the non-contact area of the convex curved surface 143 a.

The convex curved surface 143a can abut against a surface centerline of the piezoelectric body 131 near the bottom wall 143. Of course, in another embodiment, a plurality of contact areas are formed between the convex curved surface 143a and the piezoelectric body 131, and the contact areas can abut against the piezoelectric body 131 at symmetrical positions along the centerline of the surface of the piezoelectric body 131 close to the bottom wall 143.

It can be understood that, with respect to the technical features of the clamping member 14, the first protruding portion 144a and the second protruding portion 144b, which are not described in detail, reference may be made to the foregoing embodiments, and the description of the present embodiment is not repeated.

Specifically, the clamping portion 145 may include a first clamping portion 145a and a second clamping portion 145b that are oppositely disposed. The first clamping portion 145a extends from the first protrusion 144a toward a direction close to the second sidewall 142, and forms a first clamping groove 140a by cooperating with the first protrusion 144 a. That is, a side of the first protrusion 144a close to the piezoelectric body 131 is provided with a first clamping portion 145a. The second clipping portion 145b extends from the second protrusion portion 144b toward a direction close to the first sidewall 141, and forms a second clipping groove 140b by cooperating with the second protrusion portion 144 b. That is, a side of the second protrusion 144b close to the piezoelectric body 131 is provided with a second clamping portion 145b. The first holding groove 140a and the second holding groove 140b hold both ends of the piezoelectric body 131, respectively, which are oppositely disposed along the optical axis direction of the lens 20. That is, the first clamping portion 145a and the second clamping portion 145b are oppositely disposed along the optical axis direction of the camera module 100, and respectively clamp opposite ends of the piezoelectric body 131.

In one embodiment, the first clamping portion 145a and the second clamping portion 145b are oppositely disposed along the optical axis direction of the camera module 100, and respectively clamp the opposite ends of the piezoelectric body 131.

The clamping piece provided by the embodiment of the application is abutted to the piezoelectric body through the lug boss, so that the piezoelectric body and the clamping piece are arranged at intervals, and the piezoelectric body is clamped through the lug boss, so that the piezoelectric body is limited, and the vibration freedom of the piezoelectric body is limited under the condition that the piezoelectric body does not vibrate. In addition, the convex portions are respectively arranged corresponding to the surface center line of the piezoelectric body or the symmetrical positions of the surface center line so as to limit the degree of freedom of the piezoelectric body without affecting the deformation vibration of the piezoelectric body.

It is understood that vibrational freedom means that the movement of the molecule is composed of three parts, translation, rotation and vibration. The translation can be regarded as the position change of the centroid of the molecule in the space, the rotation can be regarded as the change of the orientation of the molecule in the space, and the vibration can be regarded as the change of the relative position of atoms in the molecule when the centroid and the orientation of the molecule are not changed. In the embodiments of the present application, the degree of freedom of vibration of the piezoelectric body can be regarded as a change in the relative positions of atoms in a molecule when the molecule in the piezoelectric body is unchanged in its centroid and spatial orientation.

Referring to fig. 8 and 9, fig. 8 isbase:Sub>A schematic structural diagram ofbase:Sub>A driving device 10 in another embodiment of the present application, fig. 9 isbase:Sub>A schematic structural diagram ofbase:Sub>A cross section of the driving device 10 alongbase:Sub>A-base:Sub>A direction in the embodiment of fig. 8, and the driving device 10 may further includebase:Sub>A pre-tightening assembly 15, where the pre-tightening assembly 15 is disposed through the base 11 and abuts against the clamping member 14, so as to adjustbase:Sub>A force applied to the driver 13.

Wherein, the base 11 is provided with a mounting groove 112 communicated with the receiving groove 110, and the clamping member 14 is mounted in the mounting groove 112. The pre-tightening assembly 15 is disposed through the base 11 and abuts against the clamping member 14, so as to cooperate with the sliding member 121 to adjust the acting force applied on the abutting member 132. That is, the pre-tightening assembly 15 is used to adjust the friction force between the supporting member 132 and the sliding member 121, which can make the bracket 12 move along the optical axis direction of the camera module 100. It will be appreciated that the clamping member 14 can be used as a pushing plate for pushing the piezoelectric body 131, and the friction force between the propping member 132 and the sliding member 121 can be adjusted by adjusting the pressure applied to the clamping member 14 by the pre-tightening assembly 15.

In an embodiment, the pre-tightening assembly 15 may include a pressing member 151, and the pressing member 151 is disposed through the mounting groove 112 and abuts against a side of the clamping member 14 facing away from the piezoelectric body 131, so as to adjust a pressure applied to the clamping member 14 by the pressing member 151. The base 11 is formed with a through hole 113 communicating with the mounting groove 112, and the pressing member 151 is inserted through the through hole 113. The pressing member 151 may be a nut and bolt fitting structure, that is, a bolt is inserted through the through hole 113 and is screwed with the nut, and the bolt is screwed to adjust the pressure applied to the clamping member 14. Of course, in some embodiments, the pressing member 151 may be a bolt or a screw, and the through hole 113 is provided with an internal thread, i.e., the pressing member 151 is matched with the through hole 113 for adjusting the pressure applied to the clamping member 14.

In an embodiment, the pretensioning assembly 15 may further include an elastic member 152, and the elastic member 152 is disposed between the pressing member 151 and the clamping member 14 to adjust the pretensioning force between the supporting member and the sliding member. The elastic member 152 may be a structural member having elasticity, such as a spring or foam.

The embodiment adjusts the acting force applied to the driver by arranging the pre-tightening assembly, and avoids the phenomenon of structure locking or no load caused by the fact that the contact force of the jacking piece is not matched with that of the sliding piece. In other words, the pretightening force between the jacking piece and the sliding piece is adjusted through the pretightening assembly, so that the structural stability of the driving device and the smoothness during driving are ensured.

Referring to fig. 10, fig. 10 is a schematic cross-sectional structure diagram of a driving device 10 in another embodiment of the present application, wherein the driving device 10 in this embodiment is different from the driving device 10 in the previous embodiment in that: the pretensioning assembly 15 is structurally different.

In this embodiment, the pretensioning assembly 15 can generally comprise a first suction member 153 and a second suction member 154 which are correspondingly arranged. The pressure applied to the holder 14 is adjusted by a magnetic force between the first suction member 153 and the second suction member 154. Wherein, the first suction member 153 is disposed on the sidewall of the mounting groove 112, and the second suction member 154 is disposed on the clamping member 14. For example, the first and

second attraction members

153 and 154 may be magnets, and the pressure applied to the holder 14 is adjusted by the magnetic repulsive force. For another example, one of the first suction member 153 and the second suction member 154 is a magnet, and the other is an energizing coil, and the pressure applied to the holding member 14 can be adjusted by controlling the on/off state and the current of the energizing coil, so as to realize automatic adjustment control.

The embodiment adjusts the acting force applied to the driver by arranging the pre-tightening assembly, and avoids the phenomenon of structure locking or no load caused by the fact that the contact force of the jacking piece is not matched with that of the sliding piece. This embodiment adjusts the pretightning force between top holding member and the slider through the pretensioning subassembly promptly, guarantees drive arrangement's structural stability and the smoothness nature when driving. In addition, the pressure applied to the clamping piece is adjusted by arranging the first adsorption piece and the second adsorption piece, the structure is simple, and the control is convenient and fast.

Referring to fig. 11, fig. 11 is a schematic partial structure diagram of a driving device 10 in another embodiment of the present application, wherein the driving device 10 in this embodiment is different from the driving device 10 in the previous embodiment in that: the drive device 10 may also include a damping assembly 16.

The base 11 is formed with a buffer groove 114 communicating with the mounting groove 112, and the buffer member 16 is housed in the buffer groove 114. The opposite ends of the buffer assembly 16 are connected to the inner walls of the clamping member 14 and the buffer groove 114, respectively, so as to ensure that the stability can be ensured even if the camera module 100 vibrates greatly during use, and the optical anti-shake function can be enhanced to a certain extent.

The pretensioning element 15 abuts against the bottom wall 143 of the clamping member 14, and the buffer slot 114 is disposed corresponding to the first sidewall 141 or the second sidewall 142 of the clamping member 14, that is, the buffer element 16 abuts against the first sidewall 141 or the second sidewall 142 of the clamping member 14.

In one embodiment, the damping assembly 16 may generally include a damping member 161 and a guide member 162 disposed through the damping member 161. The extending direction of the guide 162 is substantially parallel to the optical axis direction of the camera module 100, and opposite ends of the guide 162 are connected to the clamping member 14 and the inner wall of the buffer groove 114, respectively. The buffer 161 is sleeved on the guide 162 and connected to the clamping member 14 and the inner wall of the buffer groove 114, respectively, so that the buffer 161 can extend and contract under the guidance of the guide 162. The buffer 161 may be a structure having elasticity, such as a spring or foam.

This embodiment realizes the anti-shake function of camera module through setting up buffering subassembly.

In an embodiment, the support 12 is slidably connected to the base 11, i.e. the driving device 10 may further comprise a guiding assembly 17 for guiding the movement of the support 12. Referring to fig. 12 and 13, fig. 12 is a schematic top view of a driving device 10 according to some embodiments of the present disclosure, and fig. 13 is a schematic cross-sectional view of the driving device 10 along the direction B-B in fig. 12.

The guide assembly 17 may generally include a plurality of balls 170, an upper roller groove 171 provided on the base 11, and a lower roller groove 172 provided on the bracket 12. The upper and

lower raceways

171 and 172 cooperate to receive the balls 170. The bracket 12 is held in a relative position within the base 11 by the actuator 13 and the ball 170, and is movable relative to the base 11 under the drive of the actuator 13 and the guidance of the guide assembly 17. It is understood that the meaning of "a plurality" is at least two, e.g., two, three, etc., unless specifically limited otherwise. It should be noted that all the directional indicators (such as up, down, left, right, front, back, 8230; \8230;) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the figure), and if the specific posture is changed, the directional indicator is changed accordingly.

The plurality of balls 170 may include at least a first set of balls 1701 and a second set of balls 1702. The upper roller grooves 171 may include at least first and second

upper roller grooves

1711 and 1712 corresponding to the first and second sets of

balls

1701 and 1702, respectively. The lower grooves 172 may include at least first and second

lower grooves

1721 and 1722 corresponding to the first and second sets of

balls

1701 and 1702, respectively. The first upper and

lower grooves

1711 and 1721 cooperate to receive the first set of balls 1701 and the second upper and

lower grooves

1712 and 1722 cooperate to receive the second set of balls 1702.

In one embodiment, the first group of balls 1701 may include an upper ball 1701a, a middle ball 1702b, and a lower ball 1701c that are stacked in the optical axis direction. Alternatively, the diameter of the middle ball 1701b may be smaller than the diameters of the upper ball 1701a and the lower ball 1701c, and the diameters of the upper ball 1701a and the lower ball 1701c may be the same. Similarly, the second set of balls 1702 may be arranged in the same manner as the first set of balls 1701, and will not be described further.

Wherein, the upper ball, the middle ball and the lower ball of the two groups of balls are respectively in rolling contact with the upper rolling groove and the lower rolling groove.

This application can prevent the camera lens slope through setting up the direction subassembly, and can avoid the camera lens to deflect through setting up a plurality of balls along the optical axis direction. In addition, the diameter of the middle ball of the stacked balls is smaller than that of the upper ball and that of the lower ball, so that the friction force of the support 12 in the moving process can be reduced, and the matching precision and the moving stability of the support, the guide assembly and the base are guaranteed.

In one embodiment, the balls in the first group of balls 1701 are in one point contact or two point contact with the first upper roll groove 1711, and the balls in the first group of balls 1701 are disposed with a gap from the second lower roll groove 1722. In yet another embodiment, the balls in the first set of balls 1701 are spaced from the first upper raceway 1711 and the balls in the first set of balls 1701 are in one-point contact or two-point contact with the second lower raceway 1722. The balls of the second set of balls 1702 make two-point contact with the second upper raceway 1712 and the balls of the second set of balls 1702 make two-point contact with the second lower raceway 1722.

According to the driving device in the implementation, the guide assembly is arranged to guide the support to move, and the diameter of the middle ball of the plurality of stacked balls is smaller than that of the upper ball and that of the lower ball, so that the friction force in the moving process of the support can be reduced, and the matching precision and the moving stability of the support, the guide assembly and the base are ensured; the reliability of the structure can be increased by arranging the ball and one rolling groove in a clearance mode, and mismatching caused by machining errors can be avoided in the assembling process. The clearance fit of the ball and the rolling groove on one side is adopted, and the normal work and assembly of the mechanism can be still ensured when machining errors occur.

It will be appreciated that in some embodiments, the guide assembly may also adopt a structure of a slide rail and a slide block to realize the sliding connection between the bracket and the base. Of course, the sliding connection between the bracket and the base can also adopt other matching modes, which is not described in detail.

The drive arrangement that this application embodiment provided deviates from one side of holding piece through locating the piezoelectric body of driver with the holder to set up the bellying that supports in the piezoelectric body at the inside wall of holder, realize the fixed to the piezoelectric body, and do not influence the vibration mode of piezoelectric body as far as possible, and then can convert the vibration maximize of piezoelectric body into the removal of holding piece, thereby improve drive power, in order to support the drive of big stroke. In addition, the driving device utilizes the clamping piece to clamp the driver, the whole structure is simple and small, and the miniaturization requirement of the driving device is favorably realized. In addition, the piezoelectric body generates micro-amplitude vibration through voltage driving, so that the driving device can stop working immediately under the condition of power failure, and power failure self-locking is realized without noise. In addition, compared with the electromagnetic driving device, the driving device provided by the embodiment eliminates the risk of electromagnetic interference.

In some embodiments, in order to further control the moving stroke of the support or the lens, a position sensor such as a grating scale, a capacitance scale, a hall sensor, or the like may be provided in the driving device, so as to obtain the moving position of the support or the lens through the position sensor, thereby realizing closed-loop control.

As described above, the piezoelectric actuator is a device that converts electric energy into mechanical energy or mechanical motion by utilizing the inverse piezoelectric effect (length expansion and contraction, thickness expansion and contraction, etc.) of a piezoelectric material (lead zirconate titanate, etc.). In other words, the piezoelectric actuator utilizes the inverse piezoelectric effect of the piezoelectric material to excite the micro-amplitude vibration of the piezoelectric actuator within a certain frequency, and converts the micro-amplitude vibration into macroscopic linear or rotary motion through the friction effect. That is, in the above embodiment, the driver may excite the driver to vibrate slightly within a certain frequency by applying a voltage with a certain frequency, and convert the vibration of the driver into the macroscopic linear motion of the moving body through the friction action between the driver and the moving body.

In research, the applicant finds that a piezoelectric body based on a working mode in which a first-order extension (L1) vibration mode and a second-order bending vibration mode (B2) are coupled can generate a motion similar to an elliptical track on a contact surface of a driver and a moving body after a voltage is applied at a certain frequency, and then the moving body is pushed to move linearly through friction. The piezoelectric body is a core component in the driver and is mainly formed by a bulk or a thin film of piezoelectric material, so that the piezoelectric performance (mainly the piezoelectric constant d 33) of the piezoelectric material is closely related to the performance (such as driving force, speed, driving voltage, etc.) of the driver. The d33 of conventional piezoelectric materials is usually around 100-600pC/N, and the d33 of small portions of single crystal materials can reach 2000-4000pC/N. However, the driving voltage of a general driver is hundreds of kilovolts, so that the main application scene of the general driver is in large piezoelectric body equipment, such as an industrial robot, a high-precision translation stage and the like.

In other words, the existing driver using L1-B2 dual-vibration mode coupling generally has the disadvantages of high driving voltage, complex structure, or difficulty in manufacturing, and the piezoelectric body is generally made of piezoelectric ceramics, so that the energy density is lower than that of piezoelectric single crystal, the micro-nano precision control is not easy to achieve, and the miniaturization is not easy to achieve. The existing piezoelectric body made of piezoelectric single crystal material has small volume and high output performance, but the required driving voltage is still large (> 100V).

In order to solve the above technical problems, the applicant has developed a driver and a driving apparatus, which can effectively overcome the disadvantages of complicated structure, difficult manufacturing, high driving voltage, and the like of the driver, can ensure performance output on the premise of miniaturization, and can be applied to driving of a camera module.

Referring to fig. 14 and 15, fig. 14 is a schematic structural diagram of a driver 30 in some embodiments of the present application, and fig. 15 is a schematic structural diagram of a piezoelectric body 31 in the embodiment of fig. 14.

The actuator 30 may generally include a plurality of piezoelectric bodies 31 stacked and disposed, and a supporting member 32 disposed at a specific position of the piezoelectric bodies 31, that is, the supporting member 32 is disposed at a side of the piezoelectric bodies 31 where no driving electrode is disposed. The supporting member 32 may be bonded to the surface of the piezoelectric body 31 at a central position or at an axisymmetric position along the longitudinal direction or the width direction of the piezoelectric body 31. The piezoelectric body 31 can drive the supporting member 32 to move when moving, so that the moving body can be driven to move by the friction contact between the supporting member 32 and the moving body (the bracket/sliding member in the foregoing embodiment). The supporting member 32 can be the supporting member 132 in the previous embodiment, which is not described in detail.

The piezoelectric body 31 has a substantially rectangular plate shape or a rectangular body structure, and may be made of a material such as piezoelectric ceramic, piezoelectric single crystal, textured ceramic, or the like. Preferably, the piezoelectric body 31 may be made of a lead indium niobate-lead magnesium niobate-lead titanate relaxor ferroelectric single crystal (PIN-PMN-PT single crystal). Of course, the piezoelectric body 31 may have other shapes, which will not be described in detail.

One or more holding members 32 may be provided. When the number of the supporting members 32 is 1, 1 supporting member 32 may be provided at the center of the surface of the piezoelectric body 31 in the length direction or the width direction of the piezoelectric body 31. When the supporting member 32 is plural, the plural supporting members 32 may be provided at positions axially symmetrical to the surface of the piezoelectric body 31 in the longitudinal direction or the width direction of the piezoelectric body 31.

In fig. 14, three directions of X, Y, and Z of the driver 30 are shown for convenience of corresponding description hereinafter, where the Z direction may be a thickness direction of the piezoelectric body 31, the X direction and the Y direction may be extension directions of the piezoelectric body 31 projected on two adjacent edges of the XY plane, respectively, or the X direction and the Y direction may be a length direction and a width direction of the piezoelectric body 31, respectively. It is understood that in some embodiments, the X direction may be a first direction and the Y direction may be a second direction; in other embodiments, the X direction may be the second direction and the Y direction may be the first direction.

In an embodiment, a plurality of piezoelectric bodies 31 are stacked along the Z direction and in a manner that the directions of polarization of two adjacent piezoelectric bodies 31 are opposite, and the polarization direction may be the P direction as shown in fig. 15. It will be appreciated that the poling direction of each piezoelectric body 31 is substantially the same, with the poling directions of adjacent piezoelectric bodies 31 pointing in opposite directions when stacked.

The piezoelectric body 31 may include a first surface 311 and a second surface 312 oppositely disposed in the Z direction, the first surface 311 being provided with a first electrode layer 3101, the second surface 312 being provided with a second electrode layer 3102. The holder 32 is provided on a side surface of the plurality of piezoelectric bodies 31, which is provided between the first surface 311 and the second surface 312 and connects the first surface 311 and the second surface 312, respectively. Here, the first electrode layer 3101 may be divided into a plurality of electrodes, and the second electrode layer 3102 may be an integral electrode, that is, the electrode of the second electrode layer 3102 is an integral structure. In other words, the piezoelectric body 31 may include a first electrode layer 3101 and a second electrode layer 3102 disposed opposite in the Z direction; wherein two adjacent piezoelectric bodies 31 are bonded by the first electrode layers 3101 on the two piezoelectric bodies 31, and/or two adjacent piezoelectric bodies 31 are bonded by the second electrode layers 3102 on the two piezoelectric bodies 31. For example, in an embodiment, the first surfaces 311 of two adjacent piezoelectric bodies 31 may be directly bonded by the first electrode layer 3101, and/or the second surfaces 312 of two adjacent piezoelectric bodies 31 may be directly bonded by the second electrode layer 3102, as will be described in turn below with respect to this portion of the embodiment.

The first electrode layer 3101 may be formed on the first surface 311 by silk-screening conductive silver paste or conductive adhesive, and the second electrode layer 3102 may be formed on the second surface 312 by silk-screening conductive silver paste or conductive adhesive. As shown in fig. 14, the actuator 30 includes two piezoelectric bodies 31 stacked in the Z direction, and the second surfaces 312 of the two piezoelectric bodies 31 are directly bonded and connected by a second electrode layer 3102 formed of conductive silver paste or conductive adhesive. It can be understood that the conductive silver paste or conductive adhesive silk-screened on the second surface 312 is not only used for forming the second electrode layer 3102 to realize the electrical function, but also used for the bonding medium between the two piezoelectric bodies 31 to realize the direct bonding connection of the two piezoelectric bodies 31. In other words, the first electrode layer 3101 and the second electrode layer 3102 may be made of conductive silver paste or conductive adhesive, which can perform an adhesive function under certain conditions (e.g., heat or pressure, which will be further described below).

Of course, in other embodiments, the first surfaces 311 of the two piezoelectric bodies 31 may be directly bonded and connected by the first electrode layer 3101 formed by conductive silver paste or conductive adhesive. That is, the conductive silver paste or conductive paste silk-screened on the first surface 311 is not only used for forming the first electrode layer 3101 to realize the electrical function, but also used as a bonding medium between the two piezoelectric bodies 31 to realize the bonding connection of the two piezoelectric bodies 31.

The conductive adhesive generally bonds conductive particles together through the adhesive effect of the matrix resin to form a conductive path, so as to realize the conductive connection of the adhered materials. The matrix resin is an adhesive, and the curing temperature can be selected to be proper for bonding.

The conductive silver paste mainly comprises resin, a solvent, an auxiliary agent, silver powder and the like, has the characteristics of low curing temperature and high bonding strength, and can realize conductive connection of bonded materials.

In an embodiment, the first electrode layer 3101 is spaced apart from the edge of the first surface 311 extending along the X direction and covers the edge of the first surface 311 extending along the Y direction. The second electrode layer 3102 is spaced from the edge of the second surface 312 extending along the Y direction, and covers the edge of the second surface 312 extending along the X direction. Among them, the first electrode layer 3101 may be divided into a first electrode 3101a and a second electrode 3101b arranged at an interval in the X direction. The first electrode 3101a covers one edge of the first surface 311 extending in the Y direction, and the second electrode 3101b covers the other edge of the first surface 311 extending in the Y direction.

It is to be understood that the first electrode layer 3101 may be disposed spaced apart from one edge of the first surface 311 extending in the X direction, or the first electrode layer 3101 may be disposed spaced apart from both of two oppositely disposed edges of the first surface 311 extending in the X direction. The second electrode layer 3102 may be disposed spaced apart from both of two oppositely disposed edges of the second surface 312 extending in the Y direction. The second electrode layer 3102 may cover one edge of the second surface 312 extending in the X direction, or the second electrode layer 3102 may cover two oppositely disposed edges of the second surface 312 extending in the X direction.

In this embodiment, preset driving voltages are applied to the first electrode 3101a and the second electrode 3101B, respectively, so as to excite the piezoelectric body 31 to generate two vibration modes L1-B2, so that the contact surface between the supporting member 32 and the moving body can generate an elliptical motion, and further, the moving body is pushed to perform a macroscopic linear motion through a friction action between the supporting member 32 and the moving body. Here, the first electrode 3101a and the second electrode 3101b may be applied with sine or cosine ac voltages having a phase difference of ± k (pi/2) (k is an integer), respectively, and the second electrode layer 3102 may be used as a ground terminal.

The driver 30 may further include first, second, and third

outer electrodes

301, 302, and 303 provided at sides of the plurality of piezoelectric bodies 31. The first external electrode 301 is electrically connected to the first electrode 3101a on each piezoelectric body 31, so that the first electrode 3101a on each piezoelectric body 31 is electrically connected in parallel. The second external electrode 302 is electrically connected to the second electrodes 3101b on the respective piezoelectric bodies 31, so that the second electrodes 3101b on the respective piezoelectric bodies 31 are electrically connected in parallel. The third external electrode 303 is electrically connected to the second electrode layer 3102 on each piezoelectric body 31, so that the second electrode layer 3102 on each piezoelectric body 31 is electrically connected in parallel.

The first external electrode 301 at least partially covers one side of the piezoelectric bodies 31 substantially parallel to the YZ plane, so that the first external electrode 301 can be electrically connected to the first electrodes 3101a of the two piezoelectric bodies 31. The second external electrode 302 at least partially covers the other side surface of the piezoelectric body 31 substantially parallel to the YZ plane, so that the second external electrode 302 can be electrically connected to the second electrodes 3101b of the two piezoelectric bodies 31, respectively. The third external electrode 303 at least partially covers the side surfaces of the piezoelectric bodies 31 substantially parallel to the XZ plane, so that the third external electrode 303 can be electrically connected to the second electrode layers 3102 of the two piezoelectric bodies 31, respectively.

The driver 30 in the present embodiment can be applied to the driving device in the foregoing embodiments, and reference may be made to the driver in the foregoing embodiments for technical features of the driver 30 that are not described in detail.

The driver provided by this embodiment is provided with a plurality of stacked piezoelectric bodies, and an outer electrode electrically connected to the corresponding electrode of each piezoelectric body, so that the corresponding electrode of each piezoelectric body forms a parallel structure on a circuit, and each piezoelectric body can generate L1-B2 dual vibration modes under the same preset voltage drive, and the whole driver can realize a corresponding motion state through the L1-B2 dual vibration modes of the plurality of piezoelectric bodies. In addition, the input power of the driver can be improved through the multilayer piezoelectric body stacking structure, so that a larger driving force can be obtained. In addition, under the condition that the total thickness of the driver is not changed, the multi-layer piezoelectric body stacking structure can effectively reduce the driving voltage (< 100V) of the driver. This embodiment further forms the electrode layer through conducting resin or electrically conductive silver thick liquid in order to realize the electrical property function to form the electrode layer and directly bond two adjacent piezoelectricity bodies through the electrode layer on piezoelectricity body surface, can reduce the whole thickness of driver. The external electrodes may be connected to a circuit board of the electronic device, and a predetermined driving voltage may be applied to the piezoelectric body under the control of a driving circuit on the circuit board or a related control device, such as a chip.

It can be understood that the driver provided by the embodiment of the application is based on the coupling between the two vibration modes of L1-B2 to realize the corresponding motion state. Of course, in other embodiments, other vibration mode coupling modes can be adopted to realize the elliptical motion track of the supporting member.

Referring to fig. 16 and 17, fig. 16 is a schematic structural diagram of a driver 30 in another embodiment of the present application, and fig. 17 is a schematic structural diagram of the driver 30 in another embodiment of the present application. Among them, the difference between the driver 30 in the embodiment of fig. 16 and 17 and the driver 30 in the embodiment of fig. 14 is that: the number of stacked piezoelectric bodies 31 is different.

As shown in fig. 16, the actuator 30 includes three piezoelectric bodies 31 arranged in a stacked manner and a holder 32 provided on the side of the three piezoelectric bodies 31. As shown in fig. 17, the actuator 30 includes four piezoelectric bodies 31 arranged in a stacked manner and a holder 32 provided on the side of the four piezoelectric bodies 31. It is understood that the number of the piezoelectric bodies 31 may be other plural, and reference may be made to the piezoelectric bodies and the lifters in the foregoing embodiments with respect to the technical features of the piezoelectric bodies 31 and the lifters 32.

Wherein a plurality of piezoelectric bodies 31 are stacked in the Z direction and in a manner that the directions of polarization of two adjacent piezoelectric bodies 31 are opposite, the polarization direction may be the P direction as shown in the figure. It is to be understood that the polarization direction of each piezoelectric body 31 itself is substantially identical, i.e. the polarization direction of each piezoelectric body 31 may be directed from the first surface to the second surface, or the polarization direction of each piezoelectric body 31 may be directed from the second surface to the first surface. The directions in which the polarization directions of adjacent two piezoelectric bodies 31 point when stacked are opposite, i.e. when stacked, the first surfaces of adjacent two piezoelectric bodies 31 are close to each other, or the second surfaces of adjacent two piezoelectric bodies 31 are close to each other.

As shown in fig. 16, the three piezoelectric bodies are a first piezoelectric body 31a, a second piezoelectric body 31b, and a third piezoelectric body 31c in this order from top to bottom. The second surface of the first piezoelectric body 31a and the second surface of the second piezoelectric body 31b are in contact, and the first surface of the second piezoelectric body 31b and the first surface of the third piezoelectric body 31c are in contact. That is, the first piezoelectric body 31a and the second piezoelectric body 31b can be bonded by the second electrode layer formed by conductive silver paste or conductive paste, and the second piezoelectric body 31b and the third piezoelectric body 31c can be bonded by the first electrode layer formed by conductive silver paste or conductive paste.

As shown in fig. 17, the four piezoelectric bodies are a first piezoelectric body 31a, a second piezoelectric body 31b, a third piezoelectric body 31c, and a fourth piezoelectric body 31d in this order from top to bottom. The second surface of the first piezoelectric body 31a is in contact with the second surface of the second piezoelectric body 31b, the first surface of the second piezoelectric body 31b is in contact with the first surface of the third piezoelectric body 31c, and the second surface of the third piezoelectric body 31c is in contact with the second surface of the fourth piezoelectric body 31d. That is, the second electrode layers of the first piezoelectric body 31a and the second piezoelectric body 31b formed by conductive silver paste or conductive adhesive are directly bonded, the first electrode layers of the second piezoelectric body 31b and the third piezoelectric body 31c formed by conductive silver paste or conductive adhesive are directly bonded, and the second electrode layers of the third piezoelectric body 31c and the fourth piezoelectric body 31d formed by conductive silver paste or conductive adhesive are directly bonded.

The driver provided by this embodiment is provided with a plurality of stacked piezoelectric bodies, and an outer electrode electrically connected to the corresponding electrode of each piezoelectric body, so that the corresponding electrode of each piezoelectric body forms a parallel structure on a circuit, and each piezoelectric body can generate L1-B2 dual vibration modes under the same preset voltage drive, and the whole driver can realize a corresponding motion state through the L1-B2 dual vibration modes of the plurality of piezoelectric bodies. In addition, the embodiment can improve the input power of the driver through the stacked structure of the multi-layer piezoelectric bodies, so as to obtain larger driving force. In addition, under the condition that the total thickness of the driver is not changed, the multi-layer piezoelectric body stacking structure can effectively reduce the driving voltage (< 100V) of the driver. This embodiment further forms the electrode layer through conducting resin or electrically conductive silver thick liquid in order to realize the electric property function to realize the direct bonding connection between two piezoelectricity bodies through conducting resin or electrically conductive silver thick liquid, can reduce the whole thickness of driver.

Referring to fig. 18 and 19, fig. 18 is a schematic structural diagram of an actuator 40 in another embodiment of the present application, and fig. 19 is a schematic structural diagram of a piezoelectric body 41 in the embodiment of fig. 18.

The actuator 40 may generally include a plurality of piezoelectric bodies 41 stacked and disposed, and a supporting member 42 disposed at a specific position of the piezoelectric bodies 41, that is, the supporting member 42 is disposed at a side of the piezoelectric bodies 41 where no driving electrode is disposed. The holder 42 may be bonded to the center of the surface of the piezoelectric body 41 or to the surface at an axisymmetric position in the longitudinal direction or the width direction of the piezoelectric body 41. The piezoelectric body 41 can drive the supporting member 42 to move when moving, so that the moving body can be driven to move by the friction contact between the supporting member 42 and the moving body (the bracket/sliding member in the foregoing embodiment). The supporting member 42 may be the supporting member in the previous embodiment, which is not described in detail.

In an embodiment, a plurality of piezoelectric bodies 41 are stacked in the Z direction and in a manner that the directions of polarization of two adjacent piezoelectric bodies 41 are opposite, and the polarization direction may be the P direction as shown in fig. 17. It will be appreciated that the poling direction of each piezoelectric body 41 is substantially the same, with the poling directions of adjacent piezoelectric bodies 41 pointing in opposite directions when stacked.

The piezoelectric body 41 may include a first surface 411 and a second surface 412 oppositely disposed in the Z direction, the first surface 411 being provided with a first electrode layer 3101, and the second surface 312 being provided with a second electrode layer 4102. Here, the first electrode layer 4101 may be divided into a plurality of electrodes, and the second electrode layer 4102 may be an integrated electrode, that is, the electrodes of the second electrode layer 4102 are integrated.

The first electrode layer 4101 may be formed on the first surface 411 by silk-screening conductive silver paste or conductive adhesive, and the second electrode layer 4102 may be formed on the second surface 412 by silk-screening conductive silver paste or conductive adhesive. As shown in fig. 16, the actuator 30 includes two piezoelectric bodies 41 stacked in the Z direction, and the second surfaces 412 of the two piezoelectric bodies 41 are directly bonded and connected by a second electrode layer 4102 formed of conductive silver paste or conductive adhesive. It can be understood that the conductive silver paste or conductive adhesive printed on the second surface 412 is not only used to form the second electrode layer 4102 for electrical function, but also used as a bonding medium between the two piezoelectric bodies 41 for direct bonding connection of the two piezoelectric bodies 41.

In one embodiment, the first electrode layer 4101 is spaced apart from the edge of the first surface 411 extending along the Y direction and covers the edge of the first surface 411 extending along the X direction. The second electrode layer 4102 is disposed at an interval from the edge of the second surface 412 extending in the X direction, and covers the edge of the second surface 412 extending in the Y direction. It is understood that the first electrode layer 4101 may be spaced apart from one edge of the first surface 411 extending along the Y direction or both of the two oppositely disposed edges, and the first electrode layer 4101 may cover the two oppositely disposed edges of the first surface 411 extending along the X direction. The second electrode layer 4102 may be spaced apart from two opposite edges of the second surface 412 extending along the X direction, and the second electrode layer 4102 may cover one edge or two opposite edges of the second surface 412 extending along the Y direction.

Among them, the first electrode layer 4101 may be divided into a first electrode 4101a, a second electrode 4101b, a third electrode 4101c, and a fourth electrode 4101d arranged substantially in an array.

The first electrode 4101a and the third electrode 4101c are diagonally arranged and divided into a group, i.e., a group a of electrodes, and the same driving voltage can be applied. The second electrode 4101B and the fourth electrode 4101d are diagonally arranged and divided into a group, i.e., B groups of electrodes, and the same driving voltage can be applied.

In this embodiment, preset driving voltages may be applied to the group a electrodes and the group B electrodes, so as to excite the piezoelectric body 41 to generate two vibration modes L1-B2 as a whole, so that the contact surface between the supporting member 42 and the moving body may generate an elliptical motion, and further, the moving body may be pushed to perform a macroscopic linear motion through a friction effect between the supporting member 42 and the moving body. Among them, the group a and the group B electrodes can apply sine or cosine ac voltages having a phase difference of ± k (pi/2) (k is an integer) respectively, and the second electrode layer 4102 can be used as a ground terminal.

The driver 40 may further include a first external electrode 401, a second external electrode 402, a third external electrode 403, a fourth external electrode 404, and a fifth external electrode 405 provided at sides of the plurality of piezoelectric bodies 41. The first external electrodes 401 are electrically connected to the first electrodes 4101a of the piezoelectric bodies 41, so that the first electrodes 4101a of the piezoelectric bodies 41 are electrically connected in parallel. The second external electrode 402 is electrically connected to the second electrodes 4101b of the piezoelectric bodies 41, so that the second electrodes 4101b of the piezoelectric bodies 41 are electrically connected in parallel. The third external electrode 403 is electrically connected to the third electrodes 4101c on each piezoelectric body 41, so that the third electrodes 4101c on each piezoelectric body 41 are electrically connected in parallel. The fourth outer electrode 404 is electrically connected to the fourth electrodes 4101d on the piezoelectric bodies 41, so that the fourth electrodes 4101d on the piezoelectric bodies 41 are electrically connected in parallel. The fifth external electrode 405 is electrically connected to the second electrode layers 4102 on the piezoelectric bodies 41, so that the second electrode layers 4102 on the piezoelectric bodies 41 are electrically connected in parallel.

In one embodiment, the first external electrode 401 at least partially covers a side of the piezoelectric body 41 substantially parallel to the XZ plane, so that the first external electrode 401 can be electrically connected to the first electrodes 4101a of the two piezoelectric bodies 41 respectively. The second external electrode 402 at least partially covers the other side surface of the piezoelectric body 41 substantially parallel to the XZ plane, so that the second external electrode 402 can be electrically connected to the second electrodes 4101b of the two piezoelectric bodies 41 respectively. The third external electrode 403 and the second external electrode 402 are disposed on the same side of the piezoelectric bodies 41, and can be electrically connected to the third electrodes 4101c on the two piezoelectric bodies 41, respectively. The fourth outer electrode 404 and the first outer electrode 401 are disposed on the same side of the piezoelectric bodies 41, and can be electrically connected to the fourth electrodes 4101d on the two piezoelectric bodies 41, respectively. The fifth external electrode 405 at least partially covers a side surface substantially parallel to the YZ plane with the piezoelectric body 41, so that the fifth external electrode 405 can be electrically connected to the second electrode layers 4102 of the two piezoelectric bodies 41, respectively.

The driver 40 in the present embodiment can be applied to the driving device in the foregoing embodiments, and reference may be made to the driver in the foregoing embodiments for technical features of the driver 40 that are not described in detail.

The driver provided by this embodiment is provided with a plurality of stacked piezoelectric bodies, and an outer electrode electrically connected to the corresponding electrode of each piezoelectric body, so that the corresponding electrode of each piezoelectric body forms a parallel structure on a circuit, and each piezoelectric body can generate L1-B2 dual vibration modes under the same preset voltage drive, and the whole driver can realize a corresponding motion state through the L1-B2 dual vibration modes of the plurality of piezoelectric bodies. In addition, the input power of the driver can be improved through the multilayer piezoelectric body stacking structure, so that a larger driving force can be obtained. In addition, under the condition that the total thickness of the driver is not changed, the multi-layer piezoelectric body stacking structure can effectively reduce the driving voltage (< 100V) of the driver. This embodiment further forms the electrode layer through conducting resin or electrically conductive silver thick liquid in order to realize the electric property function to realize the direct bonding connection between two piezoelectricity bodies through conducting resin or electrically conductive silver thick liquid, can reduce the whole thickness of driver.

Referring to fig. 20 and 21, fig. 20 is a schematic structural diagram of an actuator 40 in another embodiment of the present application, and fig. 21 is a schematic structural diagram of the actuator 40 in another embodiment of the present application.

As shown in fig. 20, the actuator 40 includes three piezoelectric bodies 41 arranged in a stacked manner and holding pieces 42 arranged on the sides of the three piezoelectric bodies 31. As shown in fig. 21, the actuator 40 includes four piezoelectric bodies 41 arranged in a stacked manner and a holder 42 provided on the side of the four piezoelectric bodies 41. It is understood that the number of the piezoelectric bodies 41 may be other plural, and reference may be made to the piezoelectric bodies and the lifters in the foregoing embodiments with respect to the technical features of the piezoelectric bodies 41 and the lifters 42.

Wherein a plurality of piezoelectric bodies 41 are stacked in the Z direction and in a manner that the directions of polarization of two adjacent piezoelectric bodies 41 are opposite, the polarization direction may be the P direction as shown in the figure. It is to be understood that the polarization direction of each piezoelectric body 41 itself is substantially identical, i.e. the polarization direction of each piezoelectric body 41 may be directed from the first surface to the second surface, or the polarization direction of each piezoelectric body 41 may be directed from the second surface to the first surface. The directions in which the polarization directions of adjacent two piezoelectric bodies 31 point when stacked are opposite, i.e. when stacked, the first surfaces of adjacent two piezoelectric bodies 41 are close to each other, or the second surfaces of adjacent two piezoelectric bodies 41 are close to each other.

As shown in fig. 20, the three piezoelectric bodies are a first piezoelectric body 41a, a second piezoelectric body 41b, and a third piezoelectric body 41c in this order from the top. The second surface of the first piezoelectric body 41a and the second surface of the second piezoelectric body 41b are in contact, and the first surface of the second piezoelectric body 41b and the first surface of the third piezoelectric body 41c are in contact. That is, the first piezoelectric body 41a and the second piezoelectric body 41b can be directly bonded and connected through the second electrode layer formed by conductive silver paste or conductive paste, and the second piezoelectric body 41b and the third piezoelectric body 41c can be directly bonded and connected through the first electrode layer formed by conductive silver paste or conductive paste.

As shown in fig. 21, the four piezoelectric bodies are a first piezoelectric body 41a, a second piezoelectric body 41b, a third piezoelectric body 41c, and a fourth piezoelectric body 41d in this order from top to bottom. The second surface of the first piezoelectric body 41a is in contact with the second surface of the second piezoelectric body 41b, the first surface of the second piezoelectric body 41b is in contact with the first surface of the third piezoelectric body 41c, and the second surface of the third piezoelectric body 41c is in contact with the second surface of the fourth piezoelectric body 41d. That is, the first piezoelectric body 41a and the second piezoelectric body 41b can be directly bonded and connected by the second electrode layer formed by the conductive silver paste or the conductive adhesive, the second piezoelectric body 41b and the third piezoelectric body 41c can be directly bonded and connected by the first electrode layer formed by the conductive silver paste or the conductive adhesive, and the third piezoelectric body 41c and the fourth piezoelectric body 41d can be directly bonded and connected by the second electrode layer formed by the conductive silver paste or the conductive adhesive.

The driver provided by this embodiment is provided with a plurality of stacked piezoelectric bodies, and an outer electrode electrically connected to the corresponding electrode of each piezoelectric body, so that the corresponding electrode of each piezoelectric body forms a parallel structure on a circuit, and each piezoelectric body can generate L1-B2 dual vibration modes under the same preset voltage drive, and the whole driver can realize a corresponding motion state through the L1-B2 dual vibration modes of the plurality of piezoelectric bodies. In addition, the input power of the driver can be improved through the multilayer piezoelectric body stacking structure, so that a larger driving force can be obtained. In addition, under the condition that the total thickness of the driver is not changed, the multi-layer piezoelectric body stacking structure can effectively reduce the driving voltage (< 100V) of the driver. This embodiment further forms the electrode layer through conducting resin or electrically conductive silver thick liquid in order to realize the electric property function to realize the direct bonding connection between two piezoelectricity bodies through conducting resin or electrically conductive silver thick liquid, can reduce the whole thickness of driver. The first electrode layer and the second electrode layer which are oppositely arranged enable the piezoelectric bodies to realize corresponding vibration modes, and meanwhile, the first electrode layer and/or the second electrode layer are directly bonded with the two adjacent piezoelectric bodies, so that the overall thickness of the driver can be reduced, larger driving force can be obtained, and large-stroke driving can be realized.

It can be understood that, in the foregoing embodiments, the drivers formed by stacking 2, 3, and 4 piezoelectric bodies are exemplarily illustrated, and the first electrode layer is illustrated to be divided into two electrodes and four electrodes, a person skilled in the art can directly obtain the drivers formed by stacking 5, 6, and other multiple piezoelectric bodies as needed, and the implementation manner that the first electrode layer is divided into other multiple electrodes is not described in detail.

Referring to fig. 22 and 23, fig. 22 is a schematic diagram illustrating an X-direction displacement output of a driver when the driver is unloaded at a preset voltage according to some embodiments of the present disclosure, and fig. 23 is a schematic diagram illustrating a Y-direction displacement output of the driver when the driver is unloaded at the preset voltage according to some embodiments of the present disclosure. In the present embodiment, the preset voltage is a sinusoidal voltage with a peak value of 10 Vpp.

As shown in fig. 22, the X-a curve represents the X-direction output displacement when the driver is unloaded when a preset voltage is applied to the first electrode (e.g., the embodiment corresponding to fig. 14-17) or the group a electrodes (e.g., the embodiment corresponding to fig. 18-21). The X-B curve represents the X-direction output displacement when the driver is unloaded when a preset voltage is applied to the second electrode (e.g., the embodiment corresponding to fig. 14-17) or the group B electrodes (e.g., the embodiment corresponding to fig. 18-21).

As shown in fig. 23, the Y-a curve represents the Y-direction output displacement when the driver is unloaded when a preset voltage is applied to the first electrode (e.g., the embodiment corresponding to fig. 14-17) or the group a electrodes (e.g., the embodiment corresponding to fig. 18-21). The Y-B curve represents the Y-direction output displacement when the driver is unloaded when a preset voltage is applied to the second electrode (e.g., the embodiment corresponding to fig. 14-17) or the B-group of electrodes (e.g., the embodiment corresponding to fig. 18-21).

As can be seen from fig. 22 and 23, the symmetric resonance frequencies of the first electrode and the second electrode almost coincide with each other, or the symmetric resonance frequencies of the group a electrode and the group B electrode almost coincide with each other.

It can be understood that, through the coupling of the L1-B2 modes at the resonant frequency, a displacement component in the X direction and a displacement component in the Y direction are generated on the supporting member at the same time, and due to the phase difference of the voltages on the two sets of driving electrodes (the first electrode and the second electrode; or the set a electrode and the set B electrode), the resultant displacement becomes an oblique ellipse, and then the moving body is pushed to generate macroscopic displacement through the friction effect between the supporting member and the moving body. As can be seen from fig. 22 and 23, the driver in this embodiment can achieve moving accuracy of the moving body at a nanometer level, and further achieve a better focusing effect.

Based on this, the embodiment of the present application further provides a manufacturing method of the driver, and the driver may be the driver in the foregoing embodiment. Referring to fig. 24, fig. 24 is a flow chart illustrating a method for manufacturing a driver according to some embodiments of the present application, the method generally including the steps of:

s2401, acquiring the simulation size of the piezoelectric body. Referring to fig. 25, fig. 25 is a graph illustrating comparison of impedance spectrum simulation and test results of driver coupling frequencies according to some embodiments of the present application. And performing modal analysis on the driver through simulation, so that the L1-B2 modes are coupled, and finding out corresponding resonant frequency. And simultaneously carrying out size optimization to obtain the simulation size of the piezoelectric body.

It will be appreciated that the resonant frequency is obtained by simulation such that application of a drive voltage at the resonant frequency excites the L1-B2 modes, causing the piezoelectric body to vibrate in a slight amplitude within a certain frequency.

As can be seen from fig. 25, the drivers L1 and B2 are successfully coupled while obtaining the simulated dimensions by optimizing the dimensions of the piezoelectric body.

S2402, obtaining a plurality of piezoelectric bodies according to the simulation size of the piezoelectric bodies. Wherein, the polarization direction of each piezoelectric body is consistent. It will be appreciated that the piezoelectric sheet may be cut by mechanical cutting according to the simulated dimensions of the piezoelectric body to obtain a plurality of desired piezoelectric bodies.

S2403, forming a first electrode layer and a second electrode layer on the first surface and the second surface of each piezoelectric body, respectively. The first electrode layer can be formed on the first surface of each piezoelectric body in a silk-screen printing mode, and the second electrode layer can be formed on the second surface of each piezoelectric body.

It is understood that, with regard to technical features of the first electrode layer and the second electrode layer, reference may be made to the description in the foregoing embodiments, and thus, no further description is provided herein.

S2404, sequentially stacking the plurality of piezoelectric bodies along the Z direction, and stacking the piezoelectric bodies in a manner that the directions of polarization directions of two adjacent piezoelectric bodies are opposite.

Referring to fig. 26 and 27, fig. 26 is a schematic structural diagram of a stacking apparatus 50 for stacking piezoelectric bodies according to some embodiments of the present application, and fig. 27 is a schematic structural diagram of the stacking apparatus 50 according to fig. 26. The stacking apparatus 50 may generally include a base 51, a spacer 52, a cover plate 53, and a support 54. The base 51 has a card slot 511 and a stacking slot 512 formed therein that intersect. The partition plate 52 is detachably mounted to the card slot 511, and is movable in a depth direction of the card slot 511. Among them, the partition plate 52 roughly includes a moving part 521 and a stacking part 522 which intersect. The moving portion 521 is disposed through the card slot 511, and the stacking portion 522 is received in the stacking slot 512.

The cover plate 53 covers the base 51 and is formed with a through hole 530 corresponding to the stacking slot 512. The supporting member 54 generally includes a supporting plate 541 and a supporting shaft 542, the supporting plate 541 is disposed on a side of the cover plate 53 away from the base 51, the supporting shaft 542 penetrates through the through hole 530 for abutting against the stacking portion 522, that is, the supporting shaft 542 can move in the stacking slot 512, and the supporting plate 541 can be used for limiting a maximum movement displacement of the supporting shaft 542 in the stacking slot 512.

In one embodiment, the partition plates 52 may be provided in plurality, and the plurality of partition plates 52 are sequentially arranged along the depth direction of the card slot 511. Two adjacent spacers 52 can be used to hold a plurality of piezoelectric bodies corresponding to one actuator. In the process of actually stacking the piezoelectric bodies, the piezoelectric bodies of each actuator are stacked in the stacking slot 512 and between two adjacent spacers 52 in the manner of step S2404, and after the stacking is completed, the supporting shaft 542 is moved to make the supporting shaft 542 abut against the uppermost spacer 52, and a certain pressure can be applied through the supporting plate 541 to make the piezoelectric bodies be better bonded to each other. It can be understood that, by stacking the piezoelectric body in the stacking groove 512, the stacking and aligning precision of the piezoelectric body can be improved, and the stacking and dislocation phenomenon can be avoided.

The stacking apparatus 50 may be manufactured by a process such as 3D printing, injection molding, or machining.

It can be understood that, in the present embodiment, the stacking device 50 stacks a plurality of piezoelectric bodies, so as to improve the stacking efficiency, the stacking alignment precision, and the stacking flatness.

S2405, solidifying the stacked piezoelectric bodies. Specifically, the plurality of piezoelectric bodies may be press-cured by applying an external force to the support member 54 or by the self-weight of the support member 54. Of course, for the electrode layer formed by conductive silver paste or conductive adhesive, the curing and bonding can be performed by applying pressure to the support 54 and/or heating the plurality of piezoelectric bodies.

S2406, forming a plurality of external electrodes on the side surfaces of the plurality of piezoelectric bodies. Specifically, the external electrodes may be formed on the side surfaces of the piezoelectric bodies by screen printing, spraying, or the like. It can be understood that, with respect to the arrangement manner of the external electrodes, reference may be made to the foregoing embodiments, and details are not described herein.

S2407, arranging a jacking piece on the side faces of the piezoelectric bodies to form a driver. That is, the holder may be bonded to the side surfaces of the plurality of piezoelectric bodies with an adhesive such as epoxy resin. For technical features of the top holder, reference may be made to the foregoing embodiments, which are not repeated herein.

According to the manufacturing method provided by the embodiment, the plurality of piezoelectric bodies are stacked through the stacking device to form the driver, so that the manufacturing difficulty of the driver can be reduced, the manufacturing efficiency and the stacking precision are improved, and the stacking flatness can be ensured.

Referring to fig. 28, fig. 28 is a graph illustrating a relationship between an output speed and a driving voltage of a driving device according to some embodiments of the present application. By adjusting the pre-tightening force, the optimal contact state between the jacking piece and the moving body is kept, and the output speed of the driving device and the driving voltage are approximately in a linear relation under the resonance frequency. When the peak value of the driving voltage is 60Vpp, the output speed of the driving device may exceed 20mm/s. Wherein the specific features of the drive device refer to the previous embodiments.

The applicant finds that the driving performance of the driver can be greatly improved by reducing the thickness of the single-layer piezoelectric body, and the driving voltage of the driver can be greatly reduced on the premise of keeping the driving performance unchanged. Through verification, the driving voltage can be reduced to about 2.8V.

The driver and the driving device provided by the embodiment utilize the inverse piezoelectric effect of the piezoelectric material, obtain the coupling of the L1-B2 modes and the optimized size of the driver through simulation, and reduce the driving voltage of the driver in a manner of stacking the multilayer piezoelectric bodies, so that the driver can convert the microscopic elliptical motion generated by the driver into the macroscopic linear motion of the moving body through friction by using a lower driving voltage under the coupling frequency.

It is noted that the terms "comprises" and "comprising," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements but may alternatively include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

The above description is only a part of the embodiments of the present application, and not intended to limit the scope of the present application, and all equivalent devices or equivalent processes performed by the contents of the specification and the drawings, or applied directly or indirectly to other related technical fields, are all included in the scope of the present application.

Claims

1. The driver is characterized by comprising a plurality of piezoelectric bodies which are arranged in a stacked mode and a jacking piece arranged on one side of each piezoelectric body; each piezoelectric body comprises a first electrode layer and a second electrode layer which are oppositely arranged;

the two adjacent piezoelectric bodies are bonded through the first electrode layers on the two piezoelectric bodies, and/or the two adjacent piezoelectric bodies are bonded through the second electrode layers on the two piezoelectric bodies.

2. The actuator of claim 1, wherein the polarization direction of each of the piezoelectric bodies is the same; the polarization direction is a direction in which the first electrode layer points to the second electrode layer, or the polarization direction is a direction in which the second electrode layer points to the first electrode layer.

3. The driver of claim 1, wherein the first electrode layer and the second electrode layer are made of conductive silver paste or conductive adhesive.

4. The actuator of claim 1, wherein each of the piezoelectric bodies includes a first surface and a second surface disposed opposite to each other, the first electrode layer being formed on the first surface, the second electrode layer being formed on the second surface; wherein,

the extending directions of two adjacent edges of the first surface or the second surface are respectively a first direction and a second direction, the first electrode layer covers the edge of the first surface extending along the second direction, and the second electrode layer covers the edge of the second surface extending along the first direction.

5. The driver of claim 4, wherein the first electrode layer is divided into first and second electrodes disposed at intervals in a first direction, and first, second and third outer electrodes are disposed at sides of the plurality of piezoelectric bodies; the first electrodes on each piezoelectric body are connected in parallel through the first outer electrodes, the second electrodes on each piezoelectric body are connected in parallel through the second outer electrodes, and the second electrode layers on each piezoelectric body are connected in parallel through the third outer electrodes.

6. The driver of claim 4, wherein the first electrode layer is divided into a first electrode, a second electrode, a third electrode and a fourth electrode arranged in an array, the first electrode and the third electrode are arranged diagonally, and the second electrode and the fourth electrode are arranged diagonally; wherein the driving voltages applied to the first electrode and the third electrode are the same, and the driving voltages applied to the second electrode and the fourth electrode are the same.

7. The actuator according to claim 6, wherein the plurality of piezoelectric bodies are provided at side surfaces thereof with a first external electrode, a second external electrode, a third external electrode, a fourth external electrode and a fifth external electrode, the first electrodes of each of the piezoelectric bodies are connected in parallel through the first external electrode, the second electrodes of each of the piezoelectric bodies are connected in parallel through the second external electrode, the third electrodes of each of the piezoelectric bodies are connected in parallel through the third external electrode, the fourth electrodes of each of the piezoelectric bodies are connected in parallel through the fourth external electrode, and the second electrode layers of each of the piezoelectric bodies are connected in parallel through the fifth external electrode.

8. A method of making an actuator comprising a plurality of piezoelectric bodies, each of the piezoelectric bodies comprising a first surface and a second surface disposed opposite each other, the method comprising:

acquiring the simulation size of the piezoelectric body, and acquiring a plurality of piezoelectric bodies according to the simulation size;

forming a first electrode layer on a first surface of each of the piezoelectric bodies, and forming a second electrode layer on a second surface of each of the piezoelectric bodies;

stacking a plurality of the piezoelectric bodies in such a manner that directions of polarization of adjacent two of the piezoelectric bodies are opposite to each other;

curing the stacked plurality of piezoelectric bodies;

9. The method of claim 8, wherein the step of stacking a plurality of the piezoelectric bodies comprises:

providing a stacking device, wherein the stacking device comprises a base and a partition plate, a stacking groove is formed in the base, and the partition plate comprises a stacking part; the stacking part can be accommodated in the stacking groove and can move along the depth direction of the stacking groove;

and stacking the piezoelectric bodies of each driver in the stacking grooves and between two adjacent stacking parts.

10. A drive device, characterized in that the drive device comprises:

a moving body;

the driver comprises a plurality of piezoelectric bodies which are arranged in a stacked mode and a jacking piece arranged on one side of each piezoelectric body, wherein the jacking piece abuts against the moving body so as to drive the moving body to move;

each piezoelectric body comprises a first electrode layer and a second electrode layer which are oppositely arranged; two adjacent piezoelectric bodies are bonded through the first electrode layers on the two piezoelectric bodies, and/or two adjacent piezoelectric bodies are bonded through the second electrode layers on the two piezoelectric bodies.

11. A camera module, its characterized in that includes: a lens and the driving device according to claim 10; the lens is connected to the moving body of the driving device.

12. An electronic device, comprising a display screen, a housing, a circuit board, and the camera module of claim 11, wherein the camera module is connected to the housing or the display screen; the casing with the display screen cooperation forms accommodation space, the circuit board is located in the accommodation space and with camera module with the display screen electricity is connected.