CN115890473A - Polishing equipment and polishing pad detection method - Google Patents

Abstract

The embodiment of the invention provides polishing equipment and a polishing pad detection method, and relates to the technical field of polishing, wherein the polishing equipment comprises: a polishing pad; the polishing pad is arranged on the bearing disc; and the image acquisition device is used for acquiring the surface image of the polishing pad during the operation of the polishing equipment. The polishing equipment is additionally provided with the image acquisition device, and the surface image of the polishing pad is acquired in the operation process of the polishing equipment, so that on one hand, the surface image of the polishing pad can be automatically acquired through the image acquisition device, and whether the surface of the polishing pad is glazed is judged based on the surface image, so that labor is saved compared with the conventional mode, the automatic detection can ensure that the surface condition of the polishing pad is monitored in real time, whether the surface is glazed can be found in time, and the effective maintenance of the polishing pad is realized; on the other hand, automatic detection and production are carried out synchronously, production does not need to be interrupted, and productivity can be effectively protected.

Description

Polishing equipment and polishing pad testing method

5 technical fields

Embodiments of the present invention relate to the technical field of polishing, and in particular, to a polishing device and a polishing pad detection method.

Background technique

During the polishing process, as the chemical mechanical polishing process continues, residual substances are produced on the surface of the polishing pad, the volume and number of micropores on the surface are reduced, the roughness is reduced, and molecular recombination occurs on the surface, forming a certain thickness of glaze. The layer, that is, the surface of the polishing pad, is glazed, resulting in a decrease in polishing efficiency and polishing quality, resulting in abnormal fluctuations in flatness and scratch defects.

Existing detection methods for glazing on the surface of polishing pads mainly rely on manual detection, that is, after the polishing equipment is turned off, workers use observation equipment to observe the polishing pad to determine whether there is glazing;

The existing manual detection methods have the following defects: (1) Manual detection can only be carried out regularly, which not only consumes manpower, but also makes it difficult to find that the surface of the polishing pad is glazed in time, resulting in products that cannot be produced when the polishing pad has been glazed. Qualification requirements (2) Manual inspection requires the shutdown of polishing equipment, that is, it needs to be carried out in a state of shutdown, which will reduce production capacity.

Contents of the invention

Embodiments of the present invention provide a cleaning system and method to solve the problem of wasting manpower and material resources in existing methods for detecting polishing pad glazing.

According to the first aspect of the embodiments of the present invention, a polishing device is provided, including: 5 polishing pads;

a carrying plate, the polishing pad is arranged on the carrying plate;

The image acquisition device is used to acquire the surface image of the polishing pad during the operation of the polishing equipment.

Optionally, the polishing equipment further includes: a cleaning device for cleaning the polishing pad;

The image acquisition device is installed on the cleaning device;

Wherein, the image acquisition device acquires the surface image of the polishing pad synchronously when the cleaning device moves to clean the polishing pad.

Optionally, the polishing pad includes: a first polishing pad and a second polishing pad, the carrier plate includes: a first carrier plate and a second carrier plate, and the image acquisition device includes: a first image acquisition device and a second image acquisition device Two image acquisition devices;

The first polishing pad is arranged on the first carrier plate, the second polishing pad is arranged on the second carrier plate, and the first polishing pad is opposite to the second polishing pad;

The cleaning device is located between the first polishing pad and the second polishing pad;

The first image acquisition device is arranged on a side of the cleaning device close to the first polishing pad, and is used to simultaneously acquire images of the first polishing pad when the cleaning device moves to clean the first polishing pad. surface image;

The second image acquisition device is arranged on a side of the cleaning device close to the second polishing pad, and is used to simultaneously acquire images of the second polishing pad when the cleaning device moves to clean the second polishing pad. surface image.

Optionally, both the first image acquisition device and the second image acquisition are camera equipment with a microscope lens;

The microscope lens of the first image acquisition device is vertically facing the first polishing pad;

The microscope lens of the second image acquisition device is perpendicular to the second polishing pad.

According to the second aspect of the embodiments of the present invention, a polishing pad detection method is provided, which is applied to the polishing equipment as described in the first aspect, and the method includes:

Turn on the polishing equipment;

During the operation of the polishing equipment, controlling the image acquisition device to acquire the surface image of the polishing pad;

According to the surface image, it is judged whether the surface of the polishing pad is glazed.

Optionally, during the operation of the polishing equipment, controlling the image acquisition device to acquire the surface image of the polishing pad includes:

During the process of cleaning the polishing pad by the cleaning device, controlling the image acquisition device to acquire images of multiple positions of the polishing pad to obtain multiple surface images;

Wherein, the plurality of positions correspond to the cleaning movement path of the cleaning device.

Optionally, during the process of cleaning the polishing pad by the cleaning device, controlling the image acquisition device to acquire images of multiple positions of the polishing pad to obtain multiple surface images, including:

During the process of the cleaning device moving and cleaning the first polishing pad on the first carrier plate, controlling the first image acquisition device to acquire images of multiple positions of the first polishing pad to obtain a first group of surface images;

When the cleaning device moves to clean the second polishing pad on the second carrier plate, the second image acquisition device is controlled to acquire images of multiple positions of the second polishing pad to obtain a second group of surface images.

Optionally, the determining whether the surface of the polishing pad is glazed according to the surface image includes:

comparing the surface image with a pre-stored sample image;

According to the comparison result, it is judged whether the surface of the polishing pad is glazed;

Wherein, the pre-stored sample image is a pre-stored surface image of the polishing pad without glazing.

Optionally, the comparing the surface image with a pre-stored sample image includes:

calculating the matching degree between the surface image and the pre-stored sample image;

When the matching degree is greater than or equal to a preset threshold value, it is determined that no glazing occurs on the surface of the polishing pad;

If the matching degree is less than the preset threshold value, it is determined that the surface of the polishing pad is glazed.

In the embodiment of the present invention, an image acquisition device is installed on the polishing equipment, and the surface image of the polishing pad is acquired during the operation of the polishing equipment. On the one hand, the image acquisition device can be used to automatically acquire the surface image of the polishing pad. Whether the surface of the polishing pad is glazed, saves manpower compared with the existing method, and the automatic detection can ensure real-time monitoring of the surface condition of the polishing pad, and can find out whether the surface is glazed in time to achieve effective maintenance of the polishing pad; on the other hand , automatic detection and production are carried out simultaneously, without interrupting production, and can effectively protect production capacity.

Description of drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments of the present invention. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can also be obtained based on these drawings without creative effort.

FIG. 1 is a schematic structural view of a polishing device provided by an embodiment of the present invention;

FIG. 2 is a schematic diagram of an application scenario provided by an embodiment of the present invention.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Referring to Figure 1, an embodiment of the present application provides a polishing device, including:

Polishing pad 1; the polishing pad is mainly used for polishing silicon wafers;

The carrying plate 2, the polishing pad 1 is arranged on the carrying plate 2; the function of the carrying plate is mainly to carry the polishing pad;

The image acquisition device 3 is used to acquire the surface image of the polishing pad 1 during the operation of the polishing equipment.

In the embodiment of the present invention, an image acquisition device is installed on the polishing equipment, and the surface image of the polishing pad is acquired during the operation of the polishing equipment. On the one hand, the image acquisition device can be used to automatically acquire the surface image of the polishing pad. Whether the surface of the polishing pad is glazed, saves manpower compared with the existing method, and the automatic detection can ensure real-time monitoring of the surface condition of the polishing pad, and can find out whether the surface is glazed in time to achieve effective maintenance of the polishing pad; on the other hand , automatic detection and production are carried out simultaneously, without interrupting production, and can effectively protect production capacity.

Continuing to refer to FIG. 1, in a possible implementation manner, the polishing equipment further includes: a cleaning device 4 for cleaning the polishing pad 1;

The image acquisition device 3 is installed on the cleaning device 4;

As shown in FIG. 2 , the image acquiring device 3 acquires the surface image of the polishing pad 1 synchronously when the cleaning device 4 moves to clean the polishing pad 1 .

In the embodiment of the present application, the image acquisition device is installed in the cleaning device of the polishing equipment. During the operation of the polishing equipment, especially in the process of cleaning the polishing pad by the cleaning device, the image acquisition device synchronously acquires the polishing pad. Surface image, the benefits of this design are: (1) The cleaning device is a process in the operation of the polishing equipment. The image acquisition device is installed on the cleaning device to obtain the surface image of the polishing pad synchronously, so as to realize the surface condition of the polishing pad. Real-time monitoring, so that if there is glazing on the surface of the polishing pad, the corresponding image can be captured by the image acquisition device in time. Based on the image, the production personnel can be informed of the situation in time, and the polishing pad can be repaired in time to avoid accidental damage. Glazing on the surface of the polishing pad was not found in time to affect the production quality, prevent the polished silicon wafer from not meeting the process requirements, and ensure the product qualification rate (2) Considering that the cleaning device uses mobile cleaning during the cleaning process of the polishing pad , its moving path can basically pass most of the area on the surface of the polishing pad, so the image acquisition device is installed on the cleaning device, and the surface image of most of the area on the surface of the polishing pad can be obtained along with the moving path of the cleaning device. Most areas of the pad surface are imaged to accurately monitor whether glazing has occurred on the overall polishing pad surface.

Continue referring to FIG. 1 , in a possible implementation manner, the polishing pad 1 includes: a first polishing pad 11 and a second polishing pad 12, and the carrier disc 2 includes: a first carrier disc 21 and a second carrier disc 22, image acquisition The device 3 includes: a first image acquisition device 31 and a second image acquisition device 32;

Considering that silicon wafer polishing generally adopts double-sided polishing, so specifically, the polishing pad is divided into a first polishing pad and a second polishing pad, which respectively polish the upper and lower sides of the silicon wafer. Correspondingly, two polishing pads for The carrier plates carrying the polishing pads, i.e. the first carrier plate and the second carrier plate, need to monitor in real time whether the surfaces of the two polishing pads are glazed or not, so two image acquisition devices also need to be set, namely the second An image acquisition device and a second image acquisition device.

The first polishing pad 11 is arranged on the first carrier disc 21, the second polishing pad 12 is arranged on the second carrier disc 22, the first polishing pad 11 is opposite to the second polishing pad 12; the two polishing pads are arranged oppositely to realize Polish the upper and lower sides of the silicon wafer.

The cleaning device 4 is located between the first polishing pad 11 and the second polishing pad 12; in this way, the cleaning device can clean the upper and lower polishing pads.

The first image acquisition device 31 is arranged on the side of the cleaning device 4 close to the first polishing pad 11, and is used to acquire the surface image of the first polishing pad 11 synchronously when the cleaning device 4 moves to clean the first polishing pad 11;

The second image acquisition device 32 is arranged on the side of the cleaning device 4 close to the second polishing pad 12 , and is used to acquire the surface image of the second polishing pad 12 synchronously when the cleaning device 4 moves to clean the second polishing pad 12 .

Corresponding to the installation positions of the first polishing pad and the second polishing pad, two image acquisition devices are respectively arranged on the upper and lower sides of the cleaning device to respectively acquire surface images of the first polishing pad and the second polishing pad.

In a possible implementation manner, both the first image acquisition device and the second image acquisition device are photographing equipment with a microscope lens;

The microscope lens of the first image acquisition device is vertically facing the first polishing pad;

The microscope lens of the second image acquisition device is vertically facing the second polishing pad.

In the embodiment of the present application, the image acquisition device specifically adopts a photographing device with a microscope lens. This is because the phenomenon of glazing is a microscopic phenomenon, which is mainly reflected in the molecular recombination on the surface of the polishing pad, so the image acquisition device is required to be able to realize To obtain images at the microscopic level, it is necessary to use a camera with a microscope lens.

In the embodiment of the present application, a polishing pad detection method is provided, which is applied to the polishing equipment shown in Figure 1, and the method includes:

(1) Turn on the polishing equipment;

(2) During the operation of the polishing equipment, control the image acquisition device to acquire the surface image of the polishing pad;

(3) According to the surface image, it is judged whether the surface of the polishing pad is glazed.

The surface image above is used to determine whether glazing occurs on the surface of the polishing pad. Since the surface glazing of the polishing pad is reflected in surface microscopic changes, it can be determined based on the surface image of the polishing pad whether there is glazing phenomenon. In this way, based on the surface image of the polishing pad obtained in real time during the production process, it is possible to detect the glazing on the surface of the polishing pad in time, so that the production personnel can repair the polishing pad in time to avoid producing unqualified products.

In a possible implementation manner, during the operation of the polishing equipment, controlling the image acquisition device to acquire the surface image of the polishing pad includes:

In the process of cleaning the polishing pad by the cleaning device, controlling the image acquisition device to acquire images of multiple positions of the polishing pad to obtain multiple surface images;

Wherein, a plurality of positions correspond to the cleaning moving path of the cleaning device.

In the embodiment of the present application, the image acquisition device moves together with the cleaning device, and acquires images of multiple positions of the polishing pad during the movement process to obtain multiple surface images. Through the surface images of multiple positions of the polishing pad, the Evaluate the overall polishing pad surface for glazing.

In a possible implementation manner, during the process of cleaning the polishing pad by the cleaning device, the image acquisition device is controlled to acquire images of multiple positions of the polishing pad to obtain multiple surface images, including:

(1) During the process of the cleaning device moving and cleaning the first polishing pad on the first carrier plate, the first image acquisition device is controlled to perform image acquisition on multiple positions of the first polishing pad to obtain a first group of surface images;

(2) During the process of the cleaning device moving to clean the second polishing pad on the second carrier plate, the second image acquisition device is controlled to acquire images of multiple positions of the second polishing pad to obtain a second group of surface images.

In the embodiment of the present application, for the specific acquisition of surface images, two image acquisition devices are used to acquire images of the upper and lower polishing pads respectively, and two sets of surface images are obtained, so as to realize real-time monitoring of whether the surface of the upper and lower polishing pads has Glazing; It can be appreciated that the above-mentioned (1) and (2) steps can be carried out simultaneously, that is, for the situation that the cleaning device cleans two polishing pads at the same time, or the above-mentioned (1) and (2) steps can be Performing them separately refers to the case where the cleaning device cleans the two polishing pads separately, which is not specifically limited in this embodiment of the present application.

In a possible implementation manner, according to the surface image, judging whether the surface of the polishing pad is glazed includes:

(1) Compare the surface image with the pre-stored sample image;

(2) According to the comparison result, it is judged whether the surface of the polishing pad is glazed;

Wherein, the pre-stored sample image is a pre-stored surface image of the polishing pad without glazing.

In the embodiment of the present application, the specific method for judging whether glazing occurs on the surface of the polishing pad is: comparing the acquired surface image of the polishing pad with the pre-stored sample image, and the sample image is the surface of the polishing pad without glazing Image, sample image can be obtained by photographing the polishing pad surface with good quality.

If the comparison result of the surface image and the sample image is consistent or relatively close, it can be considered that the surface of the polishing pad is not glazed. If there is a certain difference in the comparison result between the surface image and the sample image, it can be considered that the surface of the polishing pad is glazed.

The above-mentioned comparison process can be carried out by manual comparison, that is, the image acquisition device can output the acquired surface image of the polishing pad to the operation screen of the production worker, and the production worker compares the surface image with the sample image; or, the above-mentioned comparison process can be performed through software Performed automatically, such as by image analysis software, comparing the surface image with the sample image and outputting a comparison indicating whether glazing has occurred on the surface of the polishing pad.

Further, compare the surface image with the pre-stored sample image, including:

(1) Calculate the matching degree between the surface image and the pre-stored sample image;

(2) When the matching degree is greater than or equal to the preset threshold value, it is determined that the surface of the polishing pad is not glazed;

(3) When the matching degree is less than the preset threshold value, it is determined that the surface of the polishing pad is glazed.

In the embodiment of the present application, a method for automatically judging whether the surface of the polishing pad is glazed based on image analysis software is provided. Specifically, the surface image and the sample image are measured by calculating the matching degree between the surface image and the pre-stored sample image. The difference between the images, the specific calculation of the matching degree can be realized through the existing image analysis software, the above-mentioned preset threshold value can only be a numerical value set artificially, for example: 90%, that is, when the surface image and the sample image If the matching degree reaches 90%, it can be considered that the surface of the polishing pad reflected by the surface image has not been glazed. When the matching degree between the surface image and the sample image is less than 90%, it can be considered that the polishing pad reflected by the surface image When the surface is glazed, an alarm can be automatically sent to the production personnel to remind the production personnel that the surface of the polishing pad is glazed at this time, and the polishing pad needs to be repaired.

Embodiments of the present invention have been described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementations, and the above-mentioned specific implementations are only illustrative, rather than restrictive, and those of ordinary skill in the art will Under the enlightenment of the present invention, without departing from the gist of the present invention and the protection scope of the claims, many forms can also be made, all of which belong to the protection of the present invention.

Claims (9)

1. A polishing apparatus characterized by comprising:

a polishing pad;

a carrier plate on which the polishing pad is disposed;

and the image acquisition device is used for acquiring the surface image of the polishing pad during the operation of the polishing equipment.

2. The apparatus of claim 1, wherein the polishing apparatus further comprises: a cleaning device for cleaning the polishing pad;

the image acquisition device is arranged on the cleaning device;

the image acquisition device acquires the surface image of the polishing pad synchronously when the cleaning device moves to clean the polishing pad.

3. The apparatus of claim 2, wherein the polishing pad comprises: a first polishing pad and a second polishing pad, the carrier tray comprising: first bear the dish and the second bears the dish, image acquisition device includes: a first image acquisition device and a second image acquisition device;

the first polishing pad is arranged on the first bearing disc, the second polishing pad is arranged on the second bearing disc, and the first polishing pad and the second polishing pad are arranged oppositely;

the cleaning device is positioned between the first polishing pad and the second polishing pad;

the first image acquisition device is arranged on one side of the cleaning device close to the first polishing pad and used for synchronously acquiring a surface image of the first polishing pad when the cleaning device moves to clean the first polishing pad;

the second image acquisition device is arranged on one side of the cleaning device close to the second polishing pad and used for synchronously acquiring the surface image of the second polishing pad when the cleaning device moves to clean the second polishing pad.

4. The apparatus according to claim 3, characterized in that said first image acquisition means and said second image acquisition are both photographing apparatuses with microscope lenses;

the microscope lens of the first image acquisition device is vertically oriented towards the first polishing pad;

the microscope lens of the second image capturing device is vertically oriented toward the second polishing pad.

5. A polishing pad inspection method applied to the polishing apparatus according to any one of claims 1 to 4, comprising:

starting the polishing equipment;

controlling an image acquisition device to acquire a surface image of the polishing pad during operation of the polishing apparatus;

and judging whether the surface of the polishing pad is glazed or not according to the surface image.

6. The method of claim 5, wherein controlling the image capture device to capture the surface image of the polishing pad during operation of the polishing apparatus comprises:

controlling the image acquisition device to acquire images of a plurality of positions of the polishing pad to obtain a plurality of surface images in the process of moving and cleaning the polishing pad by the cleaning device;

wherein the plurality of positions correspond to a cleaning movement path of the cleaning device.

7. The method of claim 6, wherein controlling the image capture device to capture images of the polishing pad at a plurality of locations during the moving of the cleaning device to clean the polishing pad to obtain a plurality of surface images comprises:

in the process of moving and cleaning a first polishing pad on a first bearing disc by a cleaning device, controlling a first image acquisition device to acquire images of a plurality of positions of the first polishing pad to obtain a first group of surface images;

and in the process of moving and cleaning the second polishing pad on the second bearing plate by the cleaning device, controlling the second image acquisition device to acquire images of a plurality of positions of the second polishing pad to obtain a second group of surface images.

8. The method of claim 5, wherein determining whether the surface of the polishing pad is glazed based on the surface image comprises:

comparing the surface image with a pre-stored sample image;

judging whether the surface of the polishing pad is glazed or not according to the comparison result;

wherein the pre-stored sample image is a pre-stored surface image of a non-glazed polishing pad.

9. The method of claim 8, wherein comparing the surface image to a pre-stored sample image comprises:

calculating the matching degree between the surface image and a pre-stored sample image;

determining that the surface of the polishing pad is not glazed when the matching degree is greater than or equal to a preset threshold value;

and determining that the surface of the polishing pad is glazed under the condition that the matching degree is smaller than a preset threshold value.

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