CN115876750A - LIBS detection system and spectrum quality online calibration method - Google Patents
LIBS detection system and spectrum quality online calibration method Download PDFInfo
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Abstract
The invention discloses a LIBS detection system and a spectral quality online calibration method, wherein the system comprises: the device comprises a laser ablation component, an optical transmission component, a calibration component, a spectrometer and an upper computer; the laser ablation assembly is used for emitting laser to ablate the sample; the optical transmission component is used for transmitting an optical signal generated by the sample to the spectrometer; the calibration component is used for measuring the actual laser energy of the laser and providing preset light, and the optical transmission component is also used for transmitting an optical signal corresponding to the preset light to the spectrometer; the spectrometer is used for collecting actual spectral data of the optical signal transmitted by the optical transmission component; and the upper computer is respectively connected with the laser ablation assembly, the spectrometer and the calibration assembly and is used for calibrating the laser ablation assembly and calibrating actual spectral data corresponding to the sample. The system can realize automatic calibration of spectrum quality, reduce the replacement frequency of a quantitative analysis model, improve the industrial field application applicability of the LIBS technology, and intelligently control the power-assisted process flow.
Description
Technical Field
The invention relates to the technical field of laser detection and analysis, in particular to a LIBS detection system and a spectral quality online calibration method.
Background
The industrial material components are indispensable key parameters for process industrial process control, and especially the melt components are sensed on line, so that the method plays an important role in realizing the intellectualization of the smelting process. The industrial field application of the LIBS (Laser-induced breakdown spectroscopy) technology successfully solves the problem.
However, due to the harsh environment of the smelting site, the performance of the laser and the spectrometer, which are key core devices in the LIBS detection system, is reduced with the increase of the service time. The prior quantitative analysis model is no longer suitable for the current hardware facilities, the prior quantitative analysis model is used for predicting the occurrence of larger errors of the current samples, and the high-frequency replacement model not only consumes excessive energy, but also is not beneficial to industrial process control.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the technical problems in the related art. Therefore, the invention aims to provide an LIBS detection system and an online spectrum quality calibration method to realize automatic spectrum quality calibration, reduce the replacement frequency of a quantitative analysis model, improve the industrial field application applicability of the LIBS technology and intelligently control a power-assisted process flow.
In order to achieve the above object, an embodiment of a first aspect of the present invention provides a LIBS detection system, which includes: the device comprises a laser ablation component, an optical transmission component, a calibration component, a spectrometer and an upper computer; the laser ablation assembly is used for emitting laser to ablate the sample; the optical transmission component is used for transmitting an optical signal generated by the sample to the spectrometer; the calibration component is used for measuring the actual laser energy of the laser and providing preset light, wherein the light transmission component is also used for transmitting a light signal corresponding to the preset light to the spectrometer; the spectrometer is used for collecting actual spectrum data of the optical signal transmitted by the optical transmission component; and the upper computer is respectively connected with the laser ablation assembly, the spectrometer and the calibration assembly and is used for obtaining a laser energy calibration coefficient according to the actual laser energy and the preset laser energy so as to calibrate the laser ablation assembly, and obtaining a spectrum calibration coefficient of the spectrometer according to actual spectrum data corresponding to the preset light and the preset spectrum data so as to calibrate the actual spectrum data corresponding to the sample.
In addition, the LIBS detection system according to the above embodiment of the present invention may further have the following additional technical features:
according to one embodiment of the invention, the laser ablation assembly comprises: a laser emission mechanism, a dichroic mirror and a reflecting mirror mechanism; wherein the laser emitting mechanism is used for emitting the laser to the dichroic mirror; the dichroic mirror for form first light path and second light path, wherein, laser passes through in proper order first light path with the speculum mechanism focuses on the sample surface, the light signal that the sample produced passes through in proper order the speculum mechanism first light path with the second light path transmits extremely the light transmission subassembly.
According to an embodiment of the present invention, the preset light includes a preset intensity of light and a plurality of specific wavelengths of light, and the calibration assembly includes: the device comprises a moving assembly, and a laser energy meter, a standard light source and a mercury lamp which are arranged on the moving assembly; the laser energy meter is used for measuring laser energy; the standard light source is used for providing light with the preset intensity; the mercury lamp for supplying the plurality of specific wavelengths of light; the upper computer is respectively connected with the moving component, the laser energy meter, the standard light source and the mercury lamp and is used for controlling the moving component to place the laser energy meter on the first light path to measure the actual laser energy of the laser, controlling the mercury lamp to be placed on the second light path and opened to provide light with the multiple specific wavelengths along the second light path, and controlling the standard light source to be placed on the second light path and opened to provide light with the preset intensity along the second light path.
According to an embodiment of the present invention, the laser emitting mechanism includes: a laser for emitting laser light; and the beam expander is used for performing beam expanding treatment on the laser.
According to an embodiment of the present invention, the mirror mechanism includes: convex surface speculum and concave surface speculum, wherein, laser passes through in proper order first light path with concave surface speculum transmits extremely convex surface speculum, and the warp convex surface speculum reflects to focus behind the concave surface speculum the sample surface, the light signal that the sample produced passes through convex surface speculum with pass through in proper order behind the concave surface speculum first light path with the second light path transmits extremely on the light transmission subassembly.
According to one embodiment of the present invention, the optical transmission assembly includes: the optical fiber coupling device is connected with the spectrometer through the optical fiber, and optical signals on the second optical path are focused by the focusing lens and then transmitted to the spectrometer through the optical fiber coupling device and the optical fiber.
In order to achieve the above object, an embodiment of the second aspect of the present invention provides an online calibration method for spectrum quality, the method is used in a LIBS detection system, the LIBS detection system includes a laser ablation component, an optical transmission component, a calibration component, and a spectrometer, the laser ablation component is used for emitting laser to ablate a sample, the optical transmission component is used for transmitting an optical signal generated by the sample to the spectrometer, the method includes: opening the laser ablation assembly to emit laser, and controlling the calibration assembly to measure the actual laser energy of the laser; obtaining a laser energy calibration coefficient according to the actual laser energy and preset laser energy so as to calibrate the laser ablation assembly; after the laser ablation assembly is calibrated, the laser ablation assembly is closed, the calibration assembly is controlled to provide preset light, and actual spectrum data corresponding to the preset light is collected through the spectrometer, wherein optical signals corresponding to the preset light are transmitted to the spectrometer through the optical transmission assembly; and obtaining a spectrum calibration coefficient of the spectrometer according to the actual spectrum data corresponding to the preset light and the preset spectrum data so as to calibrate the actual spectrum data corresponding to the sample.
In addition, the online calibration method for spectrum quality in the above embodiment of the present invention may further have the following additional technical features:
according to an embodiment of the present invention, the obtaining a laser energy calibration coefficient according to the actual laser energy and the preset laser energy includes: and calculating a first difference value between the actual laser energy and the preset laser energy, and taking the first difference value as the laser energy calibration coefficient.
According to an embodiment of the present invention, the preset light includes light with a preset intensity and light with a plurality of specific wavelengths, and the controlling the calibration component to provide the preset light and collect actual spectral data corresponding to the preset light through the spectrometer includes: controlling the calibration component to provide the light with the plurality of specific wavelengths, and acquiring first actual spectral data corresponding to the light with the plurality of specific wavelengths through the spectrometer; and controlling the calibration component to provide the light with the multiple specific wavelengths and the light with the preset intensity, and acquiring second actual spectral data corresponding to the light with the multiple specific wavelengths and the light with the preset intensity through the spectrometer.
According to an embodiment of the present invention, the obtaining of the spectrum calibration coefficient of the spectrometer according to the actual spectrum data and the preset spectrum data corresponding to the preset light includes: determining a first target wavelength from the first preset spectral data, and determining an actual wavelength corresponding to the first target wavelength from the first actual spectral data; calculating a second difference value between the actual wavelength and the first target wavelength, and taking the second difference value as the wavelength deviation calibration coefficient; after the wavelength shift calibration of the spectrometer is completed, determining target spectrum intensity corresponding to a second target wavelength from the second preset spectrum data, and determining actual spectrum intensity corresponding to the second target wavelength from the second actual spectrum data; and calculating the ratio of the target spectral intensity to the actual spectral intensity, and taking the ratio as the spectral intensity calibration coefficient.
The LIBS detection system and the spectrum quality online calibration method provided by the embodiment of the invention can realize automatic calibration of spectrum quality, reduce the replacement frequency of a quantitative analysis model, improve the industrial field application applicability of the LIBS technology and assist in intelligent control of the process flow.
Drawings
FIG. 1 is a block diagram of the LIBS detection system according to one embodiment of the invention;
FIG. 2 is a block diagram of a LIBS detection system in accordance with one embodiment of the invention;
FIG. 3 is a flow chart of a method for on-line calibration of spectral quality according to one embodiment of the present invention;
FIG. 4 is a flow chart of a method for on-line calibration of spectral quality according to another embodiment of the present invention;
FIG. 5 is a graph comparing the effects of wavelength shift calibration according to one embodiment of the present invention;
FIG. 6 is a comparison graph of the effect of spectral intensity calibration according to one embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are illustrative and intended to explain the present invention and should not be construed as limiting the present invention.
The LIBS detection system and the spectral quality online calibration method according to the embodiments of the present invention are described below with reference to the accompanying drawings.
Fig. 1 is a block diagram of a LIBS detection system according to an embodiment of the present invention.
As shown in fig. 1, the LIBS detection system 100 includes: the laser ablation assembly 10, the optical transmission assembly 11, the calibration assembly 12, the spectrometer 13 and the upper computer 14. Wherein the dashed line connecting the laser ablation assembly 10 and the optical transmission assembly 11 is the optical path.
Referring to FIG. 1, a laser ablation assembly 10 for emitting laser light to ablate a sample; an optical transmission assembly 11 for transmitting an optical signal generated by the sample to a spectrometer 13; the calibration component 12 is used for measuring the actual laser energy of the laser and providing preset light, wherein the light transmission component 11 is also used for transmitting a light signal corresponding to the preset light to the spectrometer 13; the spectrometer 13 is used for converting the optical signal transmitted by the optical transmission component 11 into spectral data to obtain actual spectral data; and the upper computer 14 is connected with the laser ablation assembly 10, the spectrometer 13 and the calibration assembly 12 respectively and is used for obtaining a laser energy calibration coefficient according to actual laser energy and preset laser energy so as to calibrate the laser ablation assembly 10, and obtaining a spectrum calibration coefficient of the spectrometer 13 according to actual spectral data corresponding to preset light and preset spectral data so as to calibrate actual spectral data corresponding to a sample.
The LIBS detection system provided by the embodiment of the invention can realize automatic calibration of spectral quality, reduce the replacement frequency of a quantitative analysis model, improve the industrial field application applicability of the LIBS technology, and assist in intelligent control of a process flow.
In some embodiments, as shown in fig. 2, laser ablation assembly 10 includes: a laser emitting mechanism 20, a dichroic mirror 21, and a reflecting mirror mechanism 22; wherein, the laser emission mechanism 20 is used for emitting laser to the dichroic mirror 21; and a dichroic mirror 21 for forming a first optical path and a second optical path, wherein the laser light is focused on the surface of the sample through the first optical path and the reflecting mirror mechanism 22 in sequence, and the optical signal generated by the sample is transmitted to the optical transmission component 11 through the reflecting mirror mechanism 22, the first optical path and the second optical path in sequence.
In some embodiments, as shown in fig. 2, the laser emitting mechanism 20 includes: a laser 23 and a beam expander 24. The laser 23 is configured to emit laser, the beam expander 24 is configured to perform beam expansion processing on the laser, and the beam expander 24 may expand a diameter of the laser beam and reduce a divergence angle of the laser beam.
In some embodiments, as shown in FIG. 2, the mirror mechanism 22 includes: convex reflector 25 and concave reflector 26, wherein, laser transmits to convex reflector 25 through first light path and concave reflector 26 in proper order to focus on the sample surface behind concave reflector 26 is reflected to convex reflector 25, and the light signal that the sample produced passes through behind convex reflector 25 and the concave reflector 26 and transmits to light transmission assembly 11 on through first light path and second light path in proper order.
In some embodiments, as shown in fig. 1 and 2, the predetermined light includes a predetermined intensity of light and a plurality of specific wavelengths of light, and the calibration assembly 12 includes: a moving assembly 27 and a laser energy meter 28, a standard light source 29 and a mercury lamp 30 provided on the moving assembly 27; a laser energy meter 28 for measuring laser energy; a standard light source 29 for providing light of a preset intensity; a mercury lamp 30 for providing light of a plurality of specific wavelengths. Wherein, the upper computer 14 is respectively connected with the moving component 27, the laser energy meter 28, the standard light source 29 and the mercury lamp 30, and is used for controlling the moving component 27 to place the laser energy meter 28 on the first light path to measure the actual laser energy of the laser, controlling the mercury lamp 30 to be placed on the second light path and to be turned on to provide light with a plurality of specific wavelengths along the second light path, and controlling the standard light source 29 to be placed on the second light path and to be turned on to provide light with preset intensity along the second light path.
Specifically, the laser energy meter 28 is used for measuring the laser energy, so that the upper computer 14 determines whether the laser energy is attenuated or not, and determines whether to adjust the laser energy according to the determination result; the standard light source 29 can provide light intensity with stable intensity, and the stable light source is used for calibrating the intensity of the spectrometer; the mercury lamp 30 can provide a variety of specific wavelengths of light, wavelength stabilized, and multi-wavelength stabilized light to calibrate the wavelength shift of the spectrometer.
Alternatively, referring to fig. 2, the moving assembly 27 may include a fixed member, and a guide rail, a first moving member, a first telescopic member and a second telescopic member provided on the fixed member. The first moving part can drive the laser energy meter 28 to move up and down along the guide rail, the laser energy meter 28 can be arranged on the first light path, and in order to ensure movement control, a limiter can be arranged on the first moving part to stop moving when the laser energy meter 28 is arranged on the first light path. The first telescopic component can drive the standard light source 29 to be telescopic left and right, and the standard light source 29 can be arranged on the second light path; the second telescopic component can drive the mercury lamp 30 to extend and retract left and right, and the mercury lamp 30 can be placed on the second light path.
In some embodiments, as shown in fig. 1 and 2, the optical transmission assembly 11 includes: the focusing lens 31, the optical fiber coupling device 32 and the optical fiber 33, the optical fiber coupling device 32 is connected with the spectrometer 13 through the optical fiber 33, wherein the optical signal on the second optical path is focused by the focusing lens 31 and then transmitted to the spectrometer 13 through the optical fiber coupling device 32 and the optical fiber 33.
In summary, the LIBS detection system of the embodiment of the present invention measures the laser energy in the system through the laser energy meter, the upper computer corrects the laser excitation energy, ensures the energy consistency of the ablated sample of the LIBS system, and calibrates the spectrometer through the mercury lamp and the standard light source, thereby effectively enhancing the stability of the LIBS light collection system and improving the quantitative analysis effect of the system.
FIG. 3 is a flow chart of a spectral quality online calibration method according to an embodiment of the present invention. The method is used for an LIBS detection system, the LIBS detection system comprises a laser ablation component, an optical transmission component, a calibration component and a spectrometer, the laser ablation component is used for emitting laser to ablate a sample, and the optical transmission component is used for transmitting an optical signal generated by the sample to the spectrometer. Alternatively, the online calibration method of the spectral quality can be realized by an upper computer or other control equipment.
As shown in fig. 3, the online calibration method for spectral quality includes:
and S31, opening the laser ablation assembly to emit laser, and controlling the calibration assembly to measure the actual laser energy of the laser.
Specifically, when the LIBS detection system is normally used, the laser energy meter is placed on the first light path through the moving assembly, a laser in the laser ablation assembly is turned on, the spectrometer is turned off, laser energy is tested, and laser energy data are stored, wherein the laser energy is actual laser energy.
And S32, obtaining a laser energy calibration coefficient according to the actual laser energy and the preset laser energy so as to calibrate the laser ablation assembly.
Specifically, during first-time on-site calibration, the laser energy meter is placed on a first light path through the moving assembly, the laser is turned on, the spectrometer is turned off, laser energy is tested, and laser energy data are stored, wherein the laser energy is preset laser energy. And calculating a first difference value between the actual laser energy and the preset laser energy, and taking the first difference value as a laser energy calibration coefficient. And the upper computer adjusts the laser emitted by the laser according to the laser energy calibration coefficient, so that the actual laser energy reaches the preset laser energy.
And S33, after the laser ablation assembly is calibrated, closing the laser ablation assembly, controlling the calibration assembly to provide preset light, and collecting actual spectrum data corresponding to the preset light through the spectrometer, wherein optical signals corresponding to the preset light are transmitted to the spectrometer through the optical transmission assembly.
And S34, obtaining a spectrum calibration coefficient of the spectrometer according to the actual spectrum data corresponding to the preset light and the preset spectrum data so as to calibrate the actual spectrum data corresponding to the sample.
In some embodiments, the preset light includes light of a preset intensity and light of a plurality of specific wavelengths, and the controlling the calibration component to provide the preset light and collect actual spectral data corresponding to the preset light by the spectrometer includes: controlling the calibration component to provide light with various specific wavelengths, and acquiring first actual spectral data corresponding to the light with various specific wavelengths through a spectrometer; and controlling the calibration component to provide light with various specific wavelengths and light with preset intensity, and acquiring second actual spectral data corresponding to the light with various specific wavelengths and the light with the preset intensity through the spectrometer.
Specifically, when calibrating the spectrometer of the LIBS detection system, the laser is turned off, the mercury lamp is moved to the second optical path by the moving assembly, referring to fig. 2, the spectrometer is turned on, and the stored spectral data, which is the first actual spectral data, is collected. And moving the mercury lamp and the standard light source to a second light path through the moving assembly, turning on the spectrometer, and collecting and storing spectral data, wherein the spectral data is second actual spectral data. And when the first on-site calibration is carried out, obtaining first preset spectrum data corresponding to the first actual spectrum data and second preset spectrum data corresponding to the second actual spectrum data in the manner of obtaining the first actual spectrum data and the second actual spectrum data.
In some embodiments, the spectral calibration coefficients include a wavelength shift calibration coefficient and a spectral intensity calibration coefficient, and the preset spectral data corresponding to the first actual spectral data is regarded as the first preset spectral data, and the preset spectral data corresponding to the second actual spectral data is regarded as the second preset spectral data. As shown in fig. 4, obtaining the spectrum calibration coefficient of the spectrometer according to the actual spectrum data corresponding to the preset light and the preset spectrum data includes:
s41, a first target wavelength is determined from the first preset spectrum data, and an actual wavelength corresponding to the first target wavelength is determined from the first actual spectrum data.
And S42, calculating a second difference value between the actual wavelength and the first target wavelength, and taking the second difference value as a wavelength offset calibration coefficient.
And S43, after the wavelength offset calibration of the spectrometer is completed, determining the target spectrum intensity corresponding to the second target wavelength from the second preset spectrum data, and determining the actual spectrum intensity corresponding to the second target wavelength from the second actual spectrum data.
And S44, calculating the ratio of the target spectrum intensity to the actual spectrum intensity, and taking the ratio as a spectrum intensity calibration coefficient.
In this embodiment, the upper computer corrects the spectrometer according to the wavelength shift calibration coefficient and the spectral intensity calibration coefficient, the wavelength shift calibration effect is shown in fig. 5, and the spectral intensity calibration effect is shown in fig. 6. After calibration is completed, when a sample is detected normally, the laser energy meter is moved out of the first light path through the moving assembly, and the standard light source and the mercury lamp are moved out of the second light path.
The spectrum quality online calibration method provided by the embodiment of the invention can realize automatic calibration of spectrum quality, reduce the replacement frequency of a quantitative analysis model, improve the applicability of LIBS technology in industrial field application, and assist in intelligent control of process flow. According to the method, laser energy in the system is measured through a laser energy meter, the upper computer corrects the excitation energy of the laser, the energy consistency of an ablation sample of the LIBS system is guaranteed, the calibration of a spectrometer is achieved through a mercury lamp and a standard light source, the stability of the LIBS light collecting system is effectively enhanced, and the quantitative analysis effect of the system is improved.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (10)
1. A LIBS detection system, the system comprising: the device comprises a laser ablation component, an optical transmission component, a calibration component, a spectrometer and an upper computer;
the laser ablation assembly is used for emitting laser to ablate the sample;
the optical transmission component is used for transmitting an optical signal generated by the sample to the spectrometer;
the calibration component is used for measuring the actual laser energy of the laser and providing preset light, wherein the light transmission component is also used for transmitting a light signal corresponding to the preset light to the spectrometer;
the spectrometer is used for collecting actual spectrum data of the optical signal transmitted by the optical transmission component;
and the upper computer is respectively connected with the laser ablation assembly, the spectrometer and the calibration assembly and is used for obtaining a laser energy calibration coefficient according to the actual laser energy and the preset laser energy so as to calibrate the laser ablation assembly, and obtaining a spectrum calibration coefficient of the spectrometer according to actual spectrum data corresponding to the preset light and the preset spectrum data so as to calibrate the actual spectrum data corresponding to the sample.
2. The LIBS detection system according to claim 1, wherein the laser ablation assembly comprises: a laser emission mechanism, a dichroic mirror and a reflecting mirror mechanism; wherein,
the laser emission mechanism is used for emitting the laser to the dichroic mirror;
the dichroic mirror for form first light path and second light path, wherein, laser passes through in proper order first light path with the speculum mechanism focuses on the sample surface, the light signal that the sample produced passes through in proper order the speculum mechanism first light path with the second light path transmits extremely the light transmission subassembly.
3. The LIBS detection system according to claim 2, wherein the predetermined light comprises a predetermined intensity of light and a plurality of specific wavelengths of light, and the calibration assembly comprises: the device comprises a moving assembly, and a laser energy meter, a standard light source and a mercury lamp which are arranged on the moving assembly;
the laser energy meter is used for measuring laser energy;
the standard light source is used for providing light with the preset intensity;
the mercury lamp for supplying the plurality of specific wavelengths of light;
the upper computer is respectively connected with the moving component, the laser energy meter, the standard light source and the mercury lamp and is used for controlling the moving component to place the laser energy meter on the first light path to measure the actual laser energy of the laser, controlling the mercury lamp to be placed on the second light path and opened to provide light with the multiple specific wavelengths along the second light path, and controlling the standard light source to be placed on the second light path and opened to provide light with the preset intensity along the second light path.
4. The LIBS detection system according to claim 2, wherein the laser emission mechanism comprises:
a laser for emitting laser light;
and the beam expander is used for performing beam expanding treatment on the laser.
5. The LIBS detection system according to claim 2, wherein the mirror mechanism comprises: convex surface speculum and concave surface speculum, wherein, laser passes through in proper order first light path with concave surface speculum transmits extremely convex surface speculum, and the warp convex surface speculum reflects to focus behind the concave surface speculum the sample surface, the light signal that the sample produced passes through convex surface speculum with pass through in proper order behind the concave surface speculum first light path with the second light path transmits extremely on the light transmission subassembly.
6. The LIBS detection system according to claim 2, wherein the optical transmission assembly comprises: the optical fiber coupling device is connected with the spectrometer through the optical fiber, and optical signals on the second optical path are focused by the focusing lens and then transmitted to the spectrometer through the optical fiber coupling device and the optical fiber.
7. An on-line calibration method for spectrum quality, which is used for a LIBS detection system, the LIBS detection system comprises a laser ablation component, an optical transmission component, a calibration component and a spectrometer, the laser ablation component is used for emitting laser to ablate a sample, the optical transmission component is used for transmitting an optical signal generated by the sample to the spectrometer, the method comprises the following steps:
opening the laser ablation assembly to emit laser, and controlling the calibration assembly to measure the actual laser energy of the laser;
obtaining a laser energy calibration coefficient according to the actual laser energy and preset laser energy so as to calibrate the laser ablation assembly;
after the laser ablation assembly is calibrated, the laser ablation assembly is closed, the calibration assembly is controlled to provide preset light, actual spectrum data corresponding to the preset light are collected through the spectrometer, and optical signals corresponding to the preset light are transmitted to the spectrometer through the optical transmission assembly;
and obtaining a spectrum calibration coefficient of the spectrometer according to the actual spectrum data corresponding to the preset light and the preset spectrum data so as to calibrate the actual spectrum data corresponding to the sample.
8. The method for calibrating spectral quality on-line according to claim 7, wherein the obtaining a laser energy calibration coefficient according to the actual laser energy and a preset laser energy comprises:
and calculating a first difference value between the actual laser energy and the preset laser energy, and taking the first difference value as the laser energy calibration coefficient.
9. The on-line spectral quality calibration method according to claim 7, wherein the predetermined light comprises a predetermined intensity of light and a plurality of wavelengths of light, and the controlling the calibration module to provide the predetermined light and collect actual spectral data corresponding to the predetermined light via the spectrometer comprises:
controlling the calibration component to provide the light with the plurality of specific wavelengths, and acquiring first actual spectral data corresponding to the light with the plurality of specific wavelengths through the spectrometer;
and controlling the calibration component to provide the light with the multiple specific wavelengths and the light with the preset intensity, and acquiring second actual spectral data corresponding to the light with the multiple specific wavelengths and the light with the preset intensity through the spectrometer.
10. The online spectrum quality calibration method according to claim 9, wherein the spectrum calibration coefficient includes a wavelength shift calibration coefficient and a spectrum intensity calibration coefficient, the preset spectrum data corresponding to the first actual spectrum data is recorded as first preset spectrum data, the preset spectrum data corresponding to the second actual spectrum data is recorded as second preset spectrum data, and the obtaining of the spectrum calibration coefficient of the spectrometer according to the actual spectrum data and the preset spectrum data corresponding to the preset light includes:
determining a first target wavelength from the first preset spectral data, and determining an actual wavelength corresponding to the first target wavelength from the first actual spectral data;
calculating a second difference value between the actual wavelength and the first target wavelength, and taking the second difference value as the wavelength shift calibration coefficient;
after the wavelength shift calibration of the spectrometer is completed, determining target spectrum intensity corresponding to a second target wavelength from the second preset spectrum data, and determining actual spectrum intensity corresponding to the second target wavelength from the second actual spectrum data;
and calculating the ratio of the target spectral intensity to the actual spectral intensity, and taking the ratio as the spectral intensity calibration coefficient.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN119290810A (en) * | 2024-12-10 | 2025-01-10 | 广东省特种设备检测研究院顺德检测院 | An adaptive calibration method and device for environmental impact correction of coal quality detection |
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| CN220671275U (en) | 2024-03-26 |
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