CN115849724A - Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser - Google Patents

Abstract

The invention provides a novel process method for manufacturing a micro-channel on glass by using infrared nanosecond laser, which comprises the following steps: step 1: placing the target on a horizontal workbench, and covering a transparent glass sheet to be processed above the target to ensure that a certain gap is reserved between the target and the transparent glass sheet; step 2: irradiating the target material by adopting proper laser processing parameters, and preparing a metal deposition layer on the lower surface of the glass sheet; and step 3: turning the glass sheet, enabling the surface with the deposition layer to face upwards, and ablating the deposition layer on the surface of the glass by adopting proper laser parameters to prepare a micro-channel; and 4, step 4: dropping proper amount of acid onto the deposited layer on the glass surface, washing with clear water after several minutes, washing in anhydrous alcohol and drying. The novel process method for preparing the micro-channel on the surface of the glass by using the infrared nanosecond laser has the advantages of high processing efficiency, simple equipment and low cost.

Description

A Method of Fabricating Microchannels on Glass Surface Using Infrared Nanosecond Laser

technical field

The invention relates to the technical field of preparation of microfluidic channels, and more specifically relates to a method for manufacturing microchannels on glass surfaces by using infrared nanosecond lasers.

Background technique

Due to its light transmission, corrosion resistance, chemical stability, insulation, and high temperature and thermal shock resistance, glass is very important in applications such as micro-nano manufacturing, microelectronic chips, biochips, biological channels, microfluidics, and optoelectronic devices. important material. Microfluidics can be applied in fields ranging from biology and chemistry to information technology and optics. The preparation of highly efficient microchannels on transparent materials can just meet the requirements of the development of microfluidic technology, and its applications involve the fields of chemistry, biology, medicine, detection and analysis.

Traditional microfluidic channels are prepared by photolithography and femtosecond laser direct ablation. These technologies require precise and expensive equipment, and the time cost and economic cost of manufacturing are high. Infrared nanosecond laser is one of the most widely used laser types at present, but the absorption rate of quartz glass to 1064nm infrared nanosecond laser is very low, and material removal cannot be achieved.

Patent CN111548023B discloses a method of using red nanosecond laser to finely process the glass surface. In this method, a layer of metal auxiliary material is coated on the surface of the glass material, and the laser is focused inside the coating layer by using the characteristic of high light absorption rate of the auxiliary material. , which effectively overcomes the disadvantage that the laser cannot be focused on the surface due to the high light transmittance of the glass itself during the processing of the red nanosecond laser. However, the patented auxiliary material needs to be left to stand for 48 to 60 hours after coating, and the processing takes a long time, and the production cycle is long, so it is difficult to meet the requirements of mass production. Patent CN110642524B discloses a method for preparing microstructures on the glass surface assisted by titanium dioxide nanoparticles with infrared nanosecond laser. However, the method of filling titanium dioxide nanoparticle hydrogel between two glass sheets and then processing them separately makes the surface of the glass sheets The titanium dioxide layer is not uniform enough, and the bonding force between the titanium dioxide layer and the surface of the glass sheet is not enough, which is not conducive to the formation of uniform and deep microgrooves. In addition, the preparation of nanoparticles and hydrogels is relatively complicated, the process requirements are high, and the cost is high, so they are not suitable for mass production.

Contents of the invention

The purpose of the present invention is to overcome the shortcomings and deficiencies in the prior art, and provide a method for manufacturing microchannels on the glass surface by using infrared nanosecond laser. In order to achieve the above object, the present invention is achieved through the following technical solutions:

A kind of method utilizing infrared nanosecond laser to make microchannel on glass, it is characterized in that, comprises the following steps:

Step 1: Cover the transparent glass sheet to be processed on the metal target to ensure that there is a certain gap between the glass sheet and the target;

Step 2: The laser is irradiated on the metal target to form a metal deposition layer on the lower surface of the glass sheet;

Step 3: Turn the glass sheet over, with the side with the deposition layer facing up, and use a laser to ablate the deposition layer on the glass surface to prepare microchannels;

Step 4: Soak the deposited layer on the glass surface in acid solution, then wash and dry it.

Preferably, in step 1, the gap between the glass sheet and the metal target is 20-100 μm.

Preferably, the metal target is one or more of copper, titanium and titanium alloy.

Preferably, in step 1, the transparent glass sheet is a glass sheet or a quartz glass sheet whose composition is a silicate double salt.

Preferably, in step 2, the wavelength of the laser is 1064nm, the pulse width is 7ns, the scanning speed is 50-300mm/s, the average power is 16-20w, the frequency is 20-50kHz, and the scanning line spacing is 0.005-0.05mm, The number of scans is 1, and the laser focus position is controlled on the upper surface of the metal target.

Preferably, the metal deposition layer obtained in step 2 has a thickness of 5-8 μm.

Preferably, in step 3, the scanning speed of the laser is 0.5-20mm/s, the average power is 16-20w, the frequency is 20-50kHz, the number of scans is 1, and the laser focus position is controlled on the surface of the deposited layer obtained in step 2 .

Preferably, in step 4, the acid solution is hydrofluoric acid solution or nitric acid solution, the mass fraction of the acid solution is 5%-20%, and the soaking time is 1-10min.

Preferably, in step 4, the mass fraction of the acid solution is 10%, and the soaking time is 2-3min.

Preferably, in step 4, the cleaning step is cleaning in absolute ethanol after rinsing with water.

The principle of the method provided by the present invention is: (1) Laser-induced plasma-assisted ablation to realize glass surface metallization: when the laser is irradiated on the target, the target will absorb the energy of the laser, thereby melting, gasifying and generating plasma On the one hand, the plasma plume induced by the laser will ablate the glass substrate, thereby roughening the glass surface and facilitating the attachment of metal particles. On the other hand, during the ablation process of the target, metal particles will be sputtered and deposited on the glass surface, and a deposited layer can be obtained on the glass surface by selecting appropriate laser processing parameters. (2) Direct laser ablation and indirect glass processing: the high-energy-intensity laser beam is used to directly irradiate the surface of the target, and the laser energy is absorbed by the target and converted into heat energy, thereby directly realizing the melting and gasification of the target to achieve removal purpose of the material. Since the transparent glass material does not absorb nanosecond pulsed laser light, the deposited layer is directly ablated by laser, and the deposited layer is melted and gasified, and the glass is ablated and removed, thereby indirectly processing the glass. (3) Chemical cleaning to remove the deposit layer: use the chemical solution to chemically react with the deposit layer material, the higher the concentration of the chemical solution, the faster the reaction speed, the excess deposit layer can be effectively removed in a short period of time and there is almost no damage to the glass substrate.

Compared with the prior art, the present invention has the following advantages and beneficial effects:

(1) The processing method is short in time, low in cost, high in dimensional accuracy, and controllable in parameters, and design iterative changes do not require mold making, which can save a lot of design costs and meet the modern requirements of low production cycle, low production cost and mass production Requirements, at the same time meet the development needs of microfluidic technology, has broad application prospects.

(2) The metal deposition layer prepared by the method of laser-induced deposition in the present invention is thin and uniform, has a certain bonding force with the glass sheet, and can process uniform and deep microchannels, and the depth of the microchannels can reach 20 μm.

(3) The present invention adopts laser ablation of thinner metal deposition layer to process glass indirectly, which can effectively avoid the negative influence of plasma shielding effect on processing, so that the uniformity of processed microchannels is better.

Description of drawings

Fig. 1 is the schematic diagram of the step of preparing microchannel of the present invention, wherein, 1 is target material, 2 is glass, 3 is laser beam, 4 is the scanning path of step 2, 5 is deposition layer, 6 is the scanning path of step 3, 7 8 is a microchannel, and 8 is a hydrofluoric acid solution.

Fig. 2 is a schematic diagram of the prepared microchannel, 2 is glass, and 7 is a microchannel.

Figure 3 is a partial topography of the prepared microchannel.

Fig. 4 is a local three-dimensional topography diagram of the prepared microchannel.

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

Example

As shown in Figure 1, the present invention proposes a kind of new process method of making microchannel on glass surface, comprises the following steps:

Step 1: Place the target on the horizontal workbench, cover the target with the transparent glass sheet to be processed, and ensure that there is a certain gap (50 μm) between the target and the target. The target material is made of titanium and its alloys, and the glass is made of quartz glass.

In this embodiment, the quartz glass sheet and the titanium target need to be pretreated: firstly, the target is polished to make its surface relatively smooth. Then rinse the quartz glass plate and target with deionized water, and then dry it naturally.

Step 2: irradiate the target with appropriate laser processing parameters, and prepare a metal compound deposition layer on the lower surface of the glass sheet;

In step 2, the laser used is a fiber laser with a wavelength of 1064nm and a pulse width of 7ns; the laser scanning speed of the laser is 200mm/s, the average power is 20w, the frequency is 20kHz, the scanning line spacing is 0.01mm, and the scanning times 1 time; the laser focus position of the laser is controlled on the upper surface of the target. The method for preparing the deposition layer by laser induction is simple, efficient and low in cost. The deposition layer has a high degree of bonding with the glass, is firm and uniform, and the thickness of the deposition layer is 6 μm.

Step 3: Turn the glass sheet over, with the side with the deposition layer facing up, and use appropriate laser parameters to ablate the deposition layer on the glass surface to prepare microchannels;

In step 3, the laser scanning speed of the laser is 1mm/s, the average power is 20w, the frequency is 20kHz, and the number of scans is 1; the laser focus position of the laser is controlled on the surface of the deposited layer obtained in step 2.

Step 4: Drop an appropriate amount of hydrofluoric acid solution on the deposition layer on the glass surface, rinse it with water after a few minutes, then clean it in absolute ethanol, and dry it.

In step 4, the mass fraction of hydrofluoric acid is 10%, and the soaking time is 3 minutes, which is used to remove the deposited layer on the glass surface.

Fig. 4 is a partial three-dimensional view of the prepared microchannel, the sampling area is 2mm long and 1.2mm wide, and the prepared microchannel has a depth of up to 22 μm.

The above-mentioned embodiment is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above-mentioned embodiment, and any other changes, modifications, substitutions, combinations, Simplifications should be equivalent replacement methods, and all are included in the protection scope of the present invention.

Claims (10)

1. A method of fabricating a microchannel in glass using an infrared nanosecond laser, comprising the steps of:

step 1: covering a transparent glass sheet to be processed above the metal target material, and ensuring that a certain gap is formed between the glass sheet and the target material;

step 2: laser is irradiated on the metal target material, and a metal deposition layer is formed on the lower surface of the glass sheet;

and step 3: turning the glass sheet, enabling the surface with the deposition layer to face upwards, and ablating the deposition layer on the surface of the glass by using laser to prepare a micro-channel;

and 4, step 4: the deposited layer on the surface of the glass is soaked in acid liquor, and then is washed and dried.

2. The method according to claim 1, wherein in step 1, the gap between the glass sheet and the metal target is 20 to 100 μm.

3. The method of claim 1, wherein the metal target is one or more of copper, titanium, and titanium alloy.

4. The method according to claim 1, wherein in step 1, the transparent glass sheet is a glass sheet or a quartz glass sheet having a composition of a silicate double salt.

5. The method of claim 1, wherein in step 2, the laser wavelength is 1064nm, the pulse width is 7ns, the scanning speed is 50-300 mm/s, the average power is 16-20 w, the frequency is 20-50 kHz, the scanning line spacing is 0.005-0.05mm, the scanning times are 1, and the laser focal point position is controlled on the upper surface of the metal target.

6. The method of claim 1, wherein the thickness of the metal deposition layer obtained in step 2 is 5 to 8 μm.

7. The method according to claim 1, wherein in step 3, the laser scanning speed is 0.5-20 mm/s, the average power is 16-20 w, the frequency is 20-50 kHz, the scanning times are 1 time, and the laser focus position is controlled on the surface of the deposition layer obtained in step 2.

8. The method as claimed in claim 1, wherein in the step 4, the acid solution is hydrofluoric acid solution or nitric acid solution, the mass fraction of the acid solution is 5% -20%, and the soaking time is 1-10min.

9. The method as claimed in claim 8, wherein in the step 4, the acid liquor is 10% by mass, and the soaking time is 2-3min.

10. The method as claimed in claim 1, wherein in step 4, the washing step is carried out by washing with clean water and then washing in absolute ethanol.

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