CN115826185A - Automatic adjustment method for laser resonance ring-down cavity - Google Patents
Automatic adjustment method for laser resonance ring-down cavity Download PDFInfo
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Abstract
The invention discloses an automatic adjusting device for a laser resonance ring-down cavity, which comprises a laser source (1), a target plate (2), a first plano-concave laser resonant cavity mirror (4) and a second plano-concave laser resonant cavity mirror (5) which are coaxially arranged from front to back, wherein the center of the target plate (2) is provided with a hole, the concave surfaces of the first plano-concave laser resonant cavity mirror (4) and the second plano-concave laser resonant cavity mirror (5) are opposite, a CCD (3) is obliquely arranged at the rear side of the target plate (2) and is not on the axial line, an image acquisition and processing unit (6) is connected with the CCD (3) and an information processing control unit (7), and the information processing control unit (7) is connected with driving motors on the first plano-concave laser resonant cavity mirror (4) and the second plano-concave laser resonant cavity mirror (5) to control the automatic adjustment of the two cavity mirrors. The invention has the characteristics of high precision, simple operation, convenience and intuition, and solves the difficult problem of adjusting the laser resonance ring-down cavity light path.
Description
Technical Field
The invention belongs to the technical field of optical metering test, mainly relates to a light path debugging method of a laser resonance ring-down cavity, and particularly relates to an automatic light path adjusting method of a laser resonance ring-down cavity for measuring an ultrahigh-reflectivity optical element by an optical ring-down method.
Background
The laser resonance ring-down cavity is an important part for generating a laser ring-down signal, and a laser beam can form ring-down signal output after multiple back-and-forth oscillation in the resonance ring-down cavity and is collected by a high-speed photoelectric detector, so that the ring-down time is analyzed and calculated, the ring-down time is obtained, and the reflectivity value of the optical element to be detected is further obtained.
In order to obtain laser ring-down signal output, a laser resonance ring-down cavity must be accurately adjusted, and at present, two adjusting modes, namely manual adjustment and automatic adjustment, are mainly adopted. The manual adjustment is slow, and the regulation error is big, and different operating personnel can produce great difference because of reasons such as debugging experience, visual error. The automatic adjustment is fast, and the adjustment accuracy is high, can effectively avoid the influence of artificial debugging error to system test accuracy.
Fu Saihua, and the like, in the text of the 2010 patent of automatic cavity adjusting system and method for laser resonant cavity based on interference fringe pattern skeleton line processing, a method for automatically adjusting a concave-convex resonant cavity by acquiring interference fringes of an endoscope to incident laser by using a camera is provided. The method only relates to the problem of cavity adjustment of the laser resonant cavity, but does not consider that the cavity mirror has two reflecting surfaces, so that the method has certain influence on the actual debugging of the system resonant cavity.
Disclosure of Invention
Objects of the invention
The purpose of the invention is: the invention provides a light path debugging method of a laser resonant ring-down cavity, and particularly relates to an optical ring-down cavity light path automatic adjusting method for measuring the reflectivity of an optical element by an optical ring-down method.
(II) technical scheme
In order to solve the technical problem, the invention provides an automatic adjustment device for a laser resonant ring-down cavity, which comprises a laser light source 1, a target plate 2, a first plano-concave laser resonant cavity mirror 4 and a second plano-concave laser resonant cavity mirror 5 which are coaxially arranged from front to back, wherein a hole is formed in the center of the target plate 2, the concave surfaces of the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 are opposite, a CCD3 is obliquely arranged at the back side of the target plate 2 and is not on the axial line, an image acquisition and processing unit 6 is connected with the CCD3 and an information processing control unit 7, and the information processing control unit 7 is connected with driving motors on the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 to control the automatic adjustment of the two plano-concave laser resonant cavity mirrors.
The laser light source 1 is a continuous semiconductor laser with the wavelength of 633nm, the spatial distribution of light spots is Gaussian distribution, the mass M2 of light beams is less than or equal to 1.3, and the pointing stability of the light beams is less than or equal to 1 mu rad.
Wherein, the diameter of the central small hole of the target plate 2 is larger than the diameter of the light spot.
Wherein, the surface of the target plate 2 is sprayed with white paint.
The laser beam emitted by the laser source 1 vertically penetrates through a small central hole of the target plate 2, the laser beam irradiates on the laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5, reflected light is reflected to the target plate 2, the CCD3 captures spot information of the reflected light on the target plate 2, the image acquisition and processing unit 6 transmits image information to the information processing control unit 7, the information processing control unit 7 drives the driving motors on the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 in real time according to the spot information to adjust the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 in four directions of up-down, left-right, pitching and direction, and finally the laser beam emitted by the laser source 1 forms standing waves in a laser resonant cavity formed by the laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 to realize oscillation in the cavity.
The invention also provides a method for adjusting the laser resonance ring-down cavity optical path, which comprises the following steps:
firstly, building a laser resonance ring-down cavity light path to form the adjusting device of any one of claims 1-5;
secondly, turning on the laser light source 1, and adjusting the upper, lower, left and right positions of the target plate 2 to enable the laser beam to pass through a small central hole of the target plate 2;
thirdly, electrifying the CCD3, and adjusting the position, the angle and the lens focal length of the CCD3 to obtain clear imaging of the target plate 2;
fourthly, when the optical axis of the laser light source 1 incident to the first plano-concave laser resonant cavity mirror 4 is deviated from the upper position, when the plane of the laser resonant cavity mirror 4 reflects the reflected light back to the small hole, the light spot deviates from the small hole, at the moment, the direction, the pitching and the height of the first plano-concave laser resonant cavity mirror 4 are adjusted, the light spots reflected by the front plane and the rear plane of the first plano-concave laser resonant cavity mirror 4 are concentric, then the pitching of the first plano-concave laser resonant cavity mirror 4 is adjusted, the center of the reflected light spot is reflected back to the center of the small hole of the target plate 2, and at the moment, the laser beam emitted by the laser light source 1 is represented to coincide with the optical axis of the first plano-concave laser resonant cavity mirror 4.
In the first step, the distance between the target plate 2 and the first plano-concave laser resonant cavity mirror 4 is more than 1 m.
And in the third step, on the premise of satisfying clear imaging, the included angle between the central line of the field of view of the CCD3 and the laser beam emitted by the laser source 1 is minimum.
In the fourth step, in the debugging process, the laser resonant cavity mirror far away from the laser light source 1 is debugged firstly, namely the second plano-concave laser resonant cavity mirror 5 is debugged firstly, and then the first plano-concave laser resonant cavity mirror 4 is debugged.
(III) advantageous effects
According to the automatic adjustment method for the laser resonance ring-down cavity, the target plate with the small holes, the CCD camera, the image acquisition and processing unit and the information processing control unit are adopted to realize automatic adjustment of the light path of the laser resonance ring-down cavity, the automatic adjustment method has the advantages of being high in precision, simple to operate, convenient to use and visual, the difficult problem of adjustment of the light path of the laser resonance ring-down cavity is solved, the method can also be adopted to adjust the laser resonant cavity, and the distance between the target plate and the plano-concave laser resonant cavity mirror is more than 1 m.
Drawings
FIG. 1 is a schematic diagram showing the components of the method for automatically tuning the optical path of the laser resonant ring-down cavity according to the present invention.
Fig. 2 and 3 are schematic diagrams of a preferred embodiment, wherein the selected laser resonator cavity mirror is a plano-concave lens.
Fig. 4, 5 and 6 are reflected light spots of the cavity mirror on the target plate captured by the CCD.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
As shown in fig. 1, for the laser resonant ring-down cavity to be debugged, the automatic adjustment device for the laser resonant ring-down cavity in this embodiment includes a laser light source 1, a target plate 2, a CCD3, a first plano-concave laser resonator cavity mirror 4, a second plano-concave laser resonator cavity mirror 5, an image acquisition and processing unit 6, and an information processing control unit 7.
In this embodiment, the laser light source 1 is a continuous semiconductor laser with a wavelength of 633nm, the size of the light spot is about 1mm, the spatial distribution of the light spot is gaussian, the mass M2 of the light beam is less than or equal to 1.3, the pointing stability of the light beam is less than or equal to 1 μ rad, and the power stability is 2%.
A small hole with the diameter of about 1.5mm is formed in the center of the target plate 2, white paint is sprayed on the surface of the whole target plate, so that the CCD3 can conveniently observe, and a laser beam emitted by the laser source 1 is vertical to the target plate 2 and penetrates through the small hole in the center of the target plate 2; the CCD3 can clearly shoot light spot image information on the target plate 2, the image information is collected by the image collecting and processing unit 6 and is transmitted to the information processing control unit 7, and the driving motors on the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 are driven to realize automatic adjustment of the two mirror mirrors.
The working principle of the adjusting device of the embodiment is as follows: the laser beam emitted by the laser source 1 vertically penetrates through a small central hole of the target plate 2, the laser beam irradiates on the laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5, reflected light is reflected to the target plate 2, the CCD3 captures spot information of the reflected light on the target plate 2, the image acquisition and processing unit 6 transmits image information to the information processing control unit 7, the information processing control unit 7 drives the driving motors on the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 in real time according to the spot information to adjust the first plano-concave laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 in the up-down direction, the left-right direction, the pitching direction and the direction, and finally the laser beam emitted by the laser source 1 can form standing waves in the laser resonant cavity formed by the laser resonant cavity mirror 4 and the second plano-concave laser resonant cavity mirror 5 to realize oscillation in the cavity.
In this embodiment, the laser light source 1 may be replaced with an indicator light.
Based on the above adjusting device, this embodiment provides a method for adjusting a laser resonant ring-down cavity optical path, including the following steps:
firstly, a laser resonance ring-down cavity light path is built, a laser light source 1, a target plate 2, a CCD3, a first plano-concave laser resonant cavity mirror 4, a second plano-concave laser resonant cavity mirror 5, an image acquisition and processing unit 6 and an information processing control unit 7 are installed at corresponding positions according to the drawing of figure 1 and connected with corresponding cables, wherein the distance between the target plate 2 and the first plano-concave laser resonant cavity mirror 4 is more than 1 m.
And secondly, starting the laser light source 1, and adjusting the upper, lower, left and right positions of the target plate 2 to enable the laser beam to pass through the small central hole of the target plate 2.
And thirdly, electrifying the CCD3, and adjusting the position, the angle and the lens focal length of the CCD3 to enable the target plate 2 to be capable of imaging clearly, wherein the included angle between the central line of the field of view of the CCD3 and the laser beam emitted by the laser source 1 is the smallest.
The laser beam emitted by the laser source 1 irradiates on the first plano-concave laser resonant cavity mirror 4, and under an ideal condition, the laser source 1 should coincide with the optical axis of the laser resonant cavity mirror 4. In actual conditions, the optical axis of the laser resonant cavity mirror 4 is invisible, so that the laser and the optical axis are adjusted together through careful debugging, and certain errors inevitably exist in the debugging result. In the preferred embodiment, it is assumed that the laser beam emitted from the laser light source 1 enters the part on the upper part of the optical axis of the laser resonator cavity mirror 4 (as shown in fig. 2), and when the planar part of the laser resonator cavity mirror 4 reflects the light directly to the small hole of the target plate 2, the other surface of the laser resonator cavity mirror 4 reflects the laser beam to the upper part of the small hole of the target plate 2 (in practice, due to the surface shape of the selected mirror surface of the cavity mirror and the deviation between the laser spot and the optical axis position, the position of the reflected spot and the small hole of the target plate 2 have a large difference, and needs to be determined according to the surface shape of the cavity mirror (for example, as shown in fig. 3)).
Fourthly, as shown in fig. 2, when the optical axis of the laser source 1 incident on the first plano-concave laser resonator cavity mirror 4 is deviated from the upper position, and the plane of the laser resonator cavity mirror 4 reflects the reflected light back to the small hole, a light spot similar to that shown in fig. 4 usually appears on the target plate 2, at this time, the direction, pitch and height of the first plano-concave laser resonator cavity mirror 4 should be adjusted to make the light spots reflected by the front and rear surfaces of the first plano-concave laser resonator cavity mirror 4 concentric as shown in fig. 5, and then the pitch of the first plano-concave laser resonator cavity mirror 4 is adjusted to make the center of the reflected light spot reflect back to the center of the small hole of the target plate 2 as shown in fig. 6, which means that the laser beam emitted by the laser source 1 coincides with the optical axis of the first plano-concave laser resonator cavity mirror 4.
Note that: in the debugging process, the laser resonant cavity mirror far away from the laser light source 1 should be debugged first, and in this embodiment, the second plano-concave laser resonant cavity mirror 5 should be debugged first, and then the first plano-concave laser resonant cavity mirror 4 should be debugged.
After the two cavity mirrors of the laser resonance ring-down cavity are adjusted according to the method, the adjustment of the light path of the laser resonance ring-down cavity is completed.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. The utility model provides a laser resonance declines and swings automatic adjusting device in chamber, a serial communication port, including by laser source (1) of preceding to back coaxial arrangement, target plate (2), first plano-concave laser resonator chamber mirror (4), second plano-concave laser resonator chamber mirror (5), the center trompil of target plate (2), the concave surface of first plano-concave laser resonator chamber mirror (4) and second plano-concave laser resonator chamber mirror (5) is just right, CCD (3) slope is arranged at target plate (2) rear side and not on the axis, image acquisition and processing unit (6) are connected CCD (3) and information processing control unit (7), information processing control unit (7) are connected the driving motor on first plano-concave laser resonator chamber mirror (4) and second plano-concave laser resonator chamber mirror (5), the automatic regulation to two chamber mirrors of control.
2. The automatic tuning device of the laser resonance ring-down cavity as claimed in claim 1, characterized in that the laser source (1) is a continuous semiconductor laser with 633nm wavelength, the spatial distribution of the light spot is gaussian, the beam quality M2 is less than or equal to 1.3, and the beam pointing stability is less than or equal to 1 μ rad.
3. The automatic tuning device of laser resonance ring down cavity as claimed in claim 2, characterized in that the diameter of the central aperture of the target plate (2) is larger than the diameter of the spot.
4. The automatic tuning device of laser resonant ring down cavity as claimed in claim 3, characterized in that the surface of the target plate (2) is painted with white paint.
5. The automatic adjustment device for the laser resonant cavity ring-down cavity according to claim 4, wherein the laser beam emitted from the laser source (1) vertically passes through the central small hole of the target plate (2), the laser beam irradiates the laser resonant cavity mirror (4) and the second plano-concave laser resonant cavity mirror (5), the reflected light is reflected to the target plate (2), the CCD (3) captures the spot information of the reflected light on the target plate (2), the image acquisition and processing unit (6) transmits the image information to the information processing control unit (7), the information processing control unit (7) drives the driving motors on the first plano-concave laser resonant cavity mirror (4) and the second plano-concave laser resonant cavity mirror (5) in real time according to the spot information, and the first plano-concave laser resonant cavity mirror (4) and the second plano-concave laser resonant cavity mirror (5) are adjusted in four directions of up and down, left and right, pitching and orientation, so that the laser beam emitted from the laser source (1) forms a standing wave in the laser resonant cavity ring-down cavity, and oscillation is realized.
6. A method for adjusting a laser resonance ring-down cavity light path is characterized by comprising the following steps:
firstly, building a laser resonance ring-down cavity light path to form the adjusting device of any one of claims 1-5;
secondly, turning on the laser light source (1), and adjusting the upper, lower, left and right positions of the target plate (2) to enable the laser beam to pass through a small central hole of the target plate (2);
thirdly, electrifying the CCD (3), and adjusting the position, the angle and the lens focal length of the CCD (3) to obtain clear imaging of the target plate (2);
fourthly, when the laser source (1) enters the optical axis of the first plano-concave laser resonant cavity mirror (4) to be deviated from the upper position, when the plane of the laser resonant cavity mirror (4) reflects the reflected light back to the small hole, the light spot deviates from the small hole, the direction, the pitching and the height of the first plano-concave laser resonant cavity mirror (4) are adjusted at the moment, the light spots reflected by the front surface and the rear surface of the first plano-concave laser resonant cavity mirror (4) are concentric, then the pitching of the first plano-concave laser resonant cavity mirror (4) is adjusted, the center of the reflected light spot is reflected back to the center of the small hole of the target plate (2), and the representative laser beam emitted by the laser source (1) coincides with the optical axis of the first plano-concave laser resonant cavity mirror (4).
7. The method for automatically tuning a laser resonant ring down cavity according to claim 6, wherein in the first step, the distance between the target plate (2) and the cavity mirror (4) of the first piano concave laser resonant cavity is 1m or more.
8. The automatic tuning method of the laser resonance ring-down cavity according to claim 7, characterized in that in the third step, the included angle between the center line of the field of view of the CCD (3) and the laser beam emitted from the laser source (1) is the smallest on the premise of satisfying the clear imaging.
9. The method for automatically tuning a laser resonant ring down cavity according to claim 8, wherein in the fourth step, the laser resonator cavity mirror farther from the laser light source (1) is tuned first, that is, the second plano-concave laser resonator cavity mirror (5) is tuned first, and then the first plano-concave laser resonator cavity mirror (4) is tuned in the tuning process.
10. The application of the automatic tuning method of the laser resonance ring-down cavity based on any one of claims 6 to 9 in the technical field of optical metrology testing.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118961587A (en) * | 2024-08-28 | 2024-11-15 | 西安电子科技大学杭州研究院 | A cavity ring-down cavity mode adjustment method based on plano-convex lens and infrared photosensitive film |
| CN119182036A (en) * | 2024-11-15 | 2024-12-24 | 武汉鑫岳光电科技有限公司 | Laser optical axis debugging device and debugging method |
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| CN110011172A (en) * | 2019-04-26 | 2019-07-12 | 中国科学院长春光学精密机械与物理研究所 | A two-dimensional angle adjustment mechanism of a laser resonator mirror |
| CN110190499A (en) * | 2019-06-21 | 2019-08-30 | 苏州英谷激光有限公司 | A method of it effectively prevent resonant cavity detuning |
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2022
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| US5311527A (en) * | 1991-04-16 | 1994-05-10 | Ushio Denki Kabushiki Kaisha | Method for automatically adjusting the optical axis of a laser resonator |
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| CN118961587A (en) * | 2024-08-28 | 2024-11-15 | 西安电子科技大学杭州研究院 | A cavity ring-down cavity mode adjustment method based on plano-convex lens and infrared photosensitive film |
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| CN119182036A (en) * | 2024-11-15 | 2024-12-24 | 武汉鑫岳光电科技有限公司 | Laser optical axis debugging device and debugging method |
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