CN115818573A - Hydrogen recovery and purification system and hydrogen recovery and purification method - Google Patents

Abstract

A hydrogen recovery and purification system comprising: a pretreatment device; a polymer membrane purification device in fluid connection with the pretreatment device; a second gas compression device in fluid connection with the polymeric membrane purification device; and a palladium membrane purification device fluidly connected to the second gas compression device. And a hydrogen recovery and purification method using the hydrogen recovery and purification system.

Description

Hydrogen recovery and purification system and hydrogen recovery and purification method

technical field

The invention relates to a hydrogen recovery and purification system, in particular to a hydrogen recovery and purification system comprising a polymer membrane purification device and a palladium membrane purification device. The present invention also relates to a hydrogen recovery and purification method using the above-mentioned hydrogen recovery and purification system.

Background technique

For the exhaust gas generated in the Metal organic chemical vapor deposition (MOCVD) process, the existing technology uses a local wet scrubber (local wet scrubber) to treat it first, and then uses a central wet scrubber (central wet scrubber) Dispose of, dilute with air, and release into the atmosphere.

The disadvantage of the above method is that all the hydrogen (H ₂ ) used in the MOCVD process will be discharged with the waste gas and cannot be reused by recovery and purification. Whereas the production of hydrogen is mainly based on the steam-methane reforming process, which requires the use of natural gas and thus leads to the release of CO and the greenhouse gas CO ₂ .

As mentioned above, the hydrogen production process is not environmentally friendly, therefore, it is necessary to provide a hydrogen recovery and purification system and a hydrogen recovery and purification method, by recovering and purifying hydrogen, to reduce the demand for hydrogen production, to reduce impact on the environment.

Contents of the invention

In view of the above-mentioned deficiencies in the prior art, in order to reduce the demand for hydrogen production, the main purpose of the present invention is to provide a novel hydrogen recovery and purification system and a hydrogen recovery and purification method, reclaim hydrogen from the waste gas stream, and perform Purified so that it can be reused in processes such as MOCVD procedures. If 50% (or more) of hydrogen can be maintained in the input waste gas stream, the system and method of the present invention can purify the hydrogen to 99.999%, and the recovery rate can reach 70%.

The main technical means adopted to achieve the above purpose is to make the aforementioned hydrogen recovery and purification system, including:

pretreatment device;

A polymeric membrane purification unit fluidly connected to the pretreatment unit;

a second gas compression device fluidly connected to the polymer membrane purification device; and

A palladium membrane purification device is fluidly connected to the second gas compression device.

Another main technical means adopted to achieve the above purpose is to make the aforementioned hydrogen recovery and purification method, including:

(a) compressing the gas by the first gas compression device;

(b) removing water and ammonia in the gas compressed through step (a) by a pretreatment device;

(c) removing nitrogen in the gas treated in step (b) by a polymer membrane purification device;

(d) compressing the gas treated in step (c) by a second gas compression device; and

(e) further removing nitrogen in the gas treated in step (d) by a palladium membrane purification device to obtain purified hydrogen.

The hydrogen recovery and purification system and the hydrogen recovery and purification method of the present invention can recover hydrogen from the exhaust gas flow, effectively reduce the demand for hydrogen production, and reduce the impact on the environment.

Description of drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only of the present invention. For some embodiments, those of ordinary skill in the art can also obtain other drawings based on these drawings without paying creative efforts.

1 is a schematic diagram of the hydrogen recovery and purification system of Example 1.

FIG. 2 is a schematic diagram of another perspective of the hydrogen recovery and purification system in Embodiment 1. FIG.

FIG. 3 is a schematic diagram of another perspective of the hydrogen recovery and purification system in Embodiment 1. FIG.

Fig. 4 is the flowchart of the hydrogen recovery and purification method of embodiment 2.

reference sign

10 Hydrogen recovery and purification system

11 First gas compression device

12 Pretreatment device

13 Polymer membrane purification device

14 Second gas compression device

15 Palladium membrane purification device

16 Third gas compression device

S101 step

Step S102

Step S103

S104 step

S105 step

Detailed ways

The implementation of the present invention will be described below through specific examples, and those skilled in the art can understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

Example 1

As shown in Figures 1 to 3, the hydrogen recovery and purification system 10 of Embodiment 1 comprises: a first gas compression device 11; a pretreatment device 12, which is fluidly connected to the first gas compression device 11; a polymer membrane purification device 13, which is fluidly connected with the pretreatment device 12; a second gas compression device 14, which is fluidly connected with the polymer membrane purification device 13; palladium membrane purification device 15, which is fluidly connected with the second gas compression device 14; and The third gas compression device 16 is in fluid connection with the palladium membrane purification device 15 .

Wherein, the first gas compression device 11 is suitable for compressing the gas collected from the waste gas flow to 4-7 barg, and leading the compressed gas into the pretreatment device 12 . In a preferred embodiment, the waste gas flow is a waste gas flow generated in a metal organic chemical vapor deposition (MOCVD) process, and the waste gas flow includes water, ammonia, nitrogen, hydrogen and other components. In a preferred embodiment, the hydrogen recovery and purification system of the present invention does not include the first gas compression device 11 and receives compressed gas from the outside.

Wherein, the pretreatment device 12 is suitable for removing water and ammonia in the compressed gas, and the gas after removing water and ammonia is introduced into the polymer membrane purification device 13 . In a preferred embodiment, the pretreatment device 12 is a pressure swing adsorption (PSA) device, which removes water and ammonia from the compressed gas by a pressure swing adsorption method. In another preferred embodiment, the pretreatment device 12 is an ammonia reformer (Ammonia reformer), which can remove water and ammonia in the compressed gas through an ammonia reforming process, and generate additional hydrogen from the ammonia to Further increase the recovery rate of hydrogen.

Wherein, the polymer membrane purification device 13 can remove nitrogen from the gas after removal of water and ammonia through the polymer membrane, and introduce the gas after removal of nitrogen into the second gas compression device 14 .

Wherein, the second gas compression device 14 is suitable for compressing the gas after nitrogen removal to 4-7 barg, and leading the compressed gas into the palladium membrane purification device 15 .

Wherein, the palladium membrane purification device 15 can further remove the nitrogen in the compressed gas through the palladium membrane to obtain purified hydrogen, and introduce the hydrogen into the third gas compression device 16 .

Wherein, the third gas compression device 16 is suitable for compressing the purified hydrogen gas so as to store and/or transport the hydrogen gas to the client.

In a preferred embodiment, the first gas compression device, the second gas compression device and the third gas compression device use a pneumatic piston pump to compress the gas, thereby safely compressing the gas containing hydrogen or the purified hydrogen, avoiding the risk of explosion risk.

The hydrogen recovery and purification system 10 of Embodiment 1 includes the third gas compression device 16, but the present invention is not limited thereto. In another embodiment, the hydrogen recovery and purification system of the present invention omits the third gas compression device, and The purified hydrogen is directly introduced into the process for utilization, for example, the purified hydrogen can be directly recycled for metal-organic chemical vapor deposition without further compression of the purified hydrogen.

It should be understood that the number of each element in FIG. 1 to FIG. 3 is only an example, and those skilled in the art of the present invention can adjust as needed.

Example 2

As shown in Figure 4, the hydrogen recovery and purification method in Example 2 includes: (a) compressing the gas through the first gas compression device S101; (b) removing the water in the gas compressed in step (a) through the pretreatment device and ammonia S102; (c) removing nitrogen S103 from the gas treated in step (b) through a polymer membrane purification device; (d) compressing the gas treated in step (c) through a second gas compression device S104; and (e) further removing nitrogen in the gas treated in step (d) by using a palladium membrane purification device to obtain purified hydrogen S105.

The first gas compression device, pretreatment device, polymer membrane purification device, second gas compression device and palladium membrane purification device used in the hydrogen recovery and purification method of Example 2 are as described in Example 1.

In another embodiment, the hydrogen recovery and purification method of Example 2 further comprises: (a-0) collecting gas from the waste gas stream; and (f) compressing the gas obtained in step (e) by a third gas compression device Purified hydrogen, the third gas compression device is as described in Example 1, wherein step (a) is to compress the gas collected in step (a-0).

In a preferred embodiment, in the hydrogen recovery and purification method of Example 2, the first gas compression device, the second gas compression device and the third gas compression device use a pneumatic piston pump to compress the gas to 4-7 barg.

test case

In order to understand the recovery and purification efficiency of the hydrogen recovery and purification system and the hydrogen recovery and purification method of the present invention, the nitrogen gas containing 100 standard liters per minute (standard liter per minute, SLPM), the hydrogen gas of 100 SLPM, the ammonia gas of 1000 ppm and the relative humidity The 100% waste gas flow was introduced into the hydrogen recovery and purification system of Example 1, and the content of each component in the gas after each processing step was measured. The working temperature of this test example is between 30°C and 45°C, and the pressure is less than 10 barg.

After testing, taking the pressure swing adsorption device as the pretreatment device as an example, the ammonia and water in the gas pretreated by the pretreatment device have been fully removed, and only contain 100 SLPM of nitrogen and 100 SLPM of hydrogen. In addition, if the ammonia recombiner is used as the pretreatment device, the hydrogen in the ammonia can be converted into hydrogen, which can further increase the recovery rate of hydrogen.

After testing, the purification treatment of the polymer membrane purification device removed most of the nitrogen (99SLPM), and also removed a small part of hydrogen (30SLPM), so that the gas after the purification treatment of the polymer membrane purification device contained 1SLPM nitrogen and hydrogen at 70 SLPM.

After testing, the purification treatment of the palladium membrane purification device removes residual nitrogen (1 SLPM), so that the gas after the purification treatment of the palladium membrane purification device contains 70 SLPM of hydrogen.

After testing, the purity of hydrogen recovered and purified by the hydrogen recovery and purification system and hydrogen recovery and purification method of the present invention can reach 99.999% (5N), and the recovery rate can reach 70%.

The above-mentioned embodiments are only illustrative of the present invention, not intended to limit the present invention. Anyone skilled in the art can modify and change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be as stated in the claims.

Claims (10)

1. A hydrogen recovery and purification system, comprising:

a pretreatment device;

a polymer membrane purification device in fluid connection with the pretreatment device;

a second gas compression device fluidly connected to the polymeric membrane purification device; and

a palladium membrane purification device fluidly connected to the second gas compression device.

2. The hydrogen recovery and purification system of claim 1, further comprising:

a first gas compression device in fluid connection with the pre-treatment device; and

a third gas compression device in fluid connection with the palladium membrane purification device.

3. The hydrogen recovery and purification system of claim 2, wherein the first gas compressing device, the second gas compressing device and the third gas compressing device compress the gas using a pneumatic piston pump.

4. The hydrogen recovery and purification system of claim 1, wherein the pretreatment device is a pressure swing adsorption device.

5. The hydrogen recovery and purification system of claim 1, wherein the pretreatment device is an ammonia reformer.

6. A hydrogen recovery and purification process, comprising:

(a) Compressing the gas by a first gas compression device;

(b) Removing water and ammonia from the gas compressed in step (a) by a pretreatment device;

(c) Removing nitrogen from the gas treated in step (b) by a polymer membrane purification device;

(d) Compressing the gas treated in step (c) by a second gas compression device; and

(e) Further removing nitrogen from the gas treated in step (d) by a palladium membrane purification device to obtain purified hydrogen.

7. The hydrogen recovery and purification process of claim 6, further comprising:

(a-0) collecting gas from the exhaust stream; and

(f) Compressing the purified hydrogen obtained in step (e) by a third gas compression means,

wherein step (a) compresses the gas collected in step (a-0).

8. The hydrogen recovery and purification process of claim 7, wherein the first gas compression unit, second gas compression unit and third gas compression unit employ pneumatic piston pumps to compress the gases to 4-7 barg.

9. The hydrogen recovery and purification process of claim 6, wherein the pretreatment device is a pressure swing adsorption device.

10. The hydrogen recovery and purification process of claim 6, wherein the pretreatment device is an ammonia reformer.

Images