CN115774365A - Demodulation system and demodulation method for monitoring high-speed fiber bragg grating - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及用于高速的光纤光栅信号解调,具体的涉及一种基于电光布拉格偏转调制器的高速光纤光栅监测用解调系统和调解方法,属于单片光电集成传感技术领域。The invention relates to high-speed optical fiber grating signal demodulation, in particular to a demodulation system and method for high-speed optical fiber grating monitoring based on an electro-optical Bragg deflection modulator, and belongs to the technical field of single-chip photoelectric integrated sensing.
背景技术Background technique
先进的基础设施系统是一个国家社会、政治和经济福祉不可或缺的组成部分。基础设施系统的各个方面影响着建筑物和构筑物的质量、我们呼吸的空气和饮用的水、我们获得能源(如电、石油和天然气)、通信、多式联运系统以及废物处理。由于这些系统是如此普遍、复杂和与我们的生活息息相关,它们需要得到更好的保护和智能化运行。近年来,光纤布拉格光栅(FBG)传感器技术已被公认为一种新型的侵入性极小的传感元件,用于结构健康监测(SHM),可用于航空、航天系统、海军和海事、民用建筑、石油化工行业。光纤光栅传感器具有低生产成本、高质量光纤光栅解调系统的可用性、实用的传感器嵌入和封装技术,使得其在基础设施系统实时监测中得到广泛推广。Advanced infrastructure systems are integral to the social, political and economic well-being of a nation. All aspects of infrastructure systems affect the quality of buildings and structures, the air we breathe and the water we drink, our access to energy (such as electricity, oil and gas), communications, intermodal transportation systems, and waste disposal. Because these systems are so pervasive, complex, and pervasive to our lives, they need to be better protected and function smarter. In recent years, fiber Bragg grating (FBG) sensor technology has been recognized as a new type of minimally invasive sensing element for structural health monitoring (SHM), which can be used in aviation, aerospace systems, naval and maritime, civil buildings , Petrochemical industry. The low production cost, availability of high-quality FBG demodulation systems, and practical sensor embedding and packaging techniques make FBG sensors widely popularized in real-time monitoring of infrastructure systems.
光纤布拉格光栅(FBG)传感器由于其轻便、微米尺寸的传感器和抗电磁干扰能力,它可以很容易地铸造、嵌入或表面安装在结构上。此外,它还可以在单个光纤束上分布多个传感器。基于光纤光栅的声发射技术是一种新的和先进的结构健康声发射传感技术,在这种技术中,传感器元件无需预处理设备,而是使用EMI不敏感的接线无干扰地安装到结构上。各国已将光纤布拉格光栅传感器确定为一种潜在技术,以解决传统PZT声发射传感器的一些缺点和局限性。然而,商用FBG传感器询问系统的成本、尺寸、重量和复杂性仍是全球商用和军用FBG状态监测系统实施的主要负担。Fiber Bragg Grating (FBG) sensors can be easily cast, embedded, or surface-mounted on structures due to their lightweight, micron-sized sensors and immunity to electromagnetic interference. In addition, it is possible to distribute multiple sensors on a single fiber optic bundle. Fiber Bragg grating-based acoustic emission technology is a new and advanced acoustic emission sensing technology for structural health, in which the sensor element is mounted to the structure without interference using EMI-insensitive wiring without the need for pre-processing equipment superior. Various countries have identified fiber Bragg grating sensors as a potential technology to address some of the shortcomings and limitations of traditional PZT acoustic emission sensors. However, the cost, size, weight, and complexity of commercial FBG sensor interrogation systems remain a major burden for the implementation of commercial and military FBG condition monitoring systems worldwide.
目前,现有较成熟的光纤布拉格光栅解调方法是光电集成阵列波导光栅解调技术,具有尺寸小、精度高、解调速度快等特点,主要通过对阵列波导光栅解调系统的光源、光波导耦合器、阵列波导光栅、光探测器(或光电二极管)进行一体化集成设计和封装来实现,具有结构紧凑、成本低,稳定性和可靠性好等优点,然而此技术依赖于大容量光探测器阵列和复杂数据采集系统。另外,美国西北大学Shridar Krishnaswamy教授团队研发一种基于二波混频干涉法的自适应FBG传感器解调技术,可以为可靠的裂纹检测提供增强的声发射灵敏度,他们通过将所有传感器系统的无源和有源光电元件单片集成在磷化铟(InP)光芯片内实现了微型化,但是技术的复杂性限制了它的商业应用。At present, the existing relatively mature fiber Bragg grating demodulation method is optoelectronic integrated arrayed waveguide grating demodulation technology, which has the characteristics of small size, high precision and fast demodulation speed. Waveguide couplers, arrayed waveguide gratings, and photodetectors (or photodiodes) are designed and packaged in an integrated manner, which has the advantages of compact structure, low cost, good stability and reliability, etc. However, this technology relies on large-capacity light Detector arrays and complex data acquisition systems. In addition, the team of Professor Shridar Krishnaswamy of Northwestern University developed an adaptive FBG sensor demodulation technology based on two-wave mixing interferometry, which can provide enhanced acoustic emission sensitivity for reliable crack detection. Monolithic integration with active optoelectronic components in indium phosphide (InP) optical chips has enabled miniaturization, but the complexity of the technology has limited its commercial application.
在光电芯片制造方面,基于InP的四元合金在光纤系统至关重要的1.1-1.6μm光谱窗口中发挥了推动作用。InGaAsP四元合金在高质量、低缺陷密度InP衬底上实现的工程带隙和折射率范围方面具有相当大的灵活性。在同一衬底上包括具有不同直接带隙的各种光波导器件的能力导致了一类功能强大的InP集成光子回路,该回路具有无源组件(如光分束器、滤波器、多路复用器和合束器)和有源组件(如光放大器、激光器、调制器和光探测器)。集成回路技术通过消除装配复杂性和可变性来提高回路级性能。随着技术的成熟,越来越多的元件级互连在晶圆规模上进行,这使得回路的功能、性能和可靠性持续提高,同时减小了回路的尺寸、功耗和成本。In optoelectronic chip fabrication, InP-based quaternary alloys play a role in the critical 1.1-1.6 μm spectral window for fiber optic systems. InGaAsP quaternary alloys offer considerable flexibility in engineered bandgap and refractive index ranges realized on high-quality, low-defect-density InP substrates. The ability to include various optical waveguide devices with different direct bandgaps on the same substrate has led to a powerful class of InP integrated photonic circuits with passive components such as optical beam splitters, filters, multiplexers, and beam combiners) and active components such as optical amplifiers, lasers, modulators, and photodetectors. Integrated loop technology improves loop-level performance by eliminating assembly complexity and variability. As the technology matures, more and more component-level interconnections are made at the wafer scale, which enables continued improvements in loop functionality, performance, and reliability while reducing loop size, power consumption, and cost.
发明内容Contents of the invention
针对现有技术存在的上述不足,本发明的目的在于提出一种基于电光布拉格偏转调制器的高速光纤光栅监测用解调系统和调解方法,本调解系统稳定可靠,体积小、功耗低,封装独立。In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to propose a demodulation system and a mediation method for high-speed fiber grating monitoring based on electro-optic deflection modulators. The mediation system is stable and reliable, small in size, low in power consumption, and packaged independent.
本发明的技术方案是这样实现的:Technical scheme of the present invention is realized like this:
一种高速光纤光栅监测用解调系统,包括两个光波导,在其中一个光波导上设有半导体光放大器A和热光相移器,在另一个光波导上设有半导体光放大器B和双螺旋形波导,两个光波导靠近半导体光放大器一端与1×2光耦合器连接,1×2光耦合器合束再经第一波导耦合连接外部传输单元,外部传输单元与光纤光栅传感器耦合连接;两个光波导另一端输出至电光布拉格偏转调制器,电光布拉格偏转调制器输出接光电二极管以将电光布拉格偏转调制器输出的光信号转换为电信号;光电二极管输出的电信号依次接跨阻放大器、数据处理器和网络通讯模块,信号读取单元与网络通讯模块连接以读取网络通讯模块输出的信号。A demodulation system for high-speed fiber grating monitoring, including two optical waveguides, one of which is provided with a semiconductor optical amplifier A and a thermo-optic phase shifter, and the other optical waveguide is provided with a semiconductor optical amplifier B and a dual Spiral waveguide, two optical waveguides close to the end of the semiconductor optical amplifier are connected with 1×2 optical coupler, the 1×2 optical coupler is combined and then coupled to the external transmission unit through the first waveguide, and the external transmission unit is coupled with the fiber grating sensor ; The other ends of the two optical waveguides are output to the electro-optical Bragg deflection modulator, and the output of the electro-optic Bragg deflection modulator is connected to a photodiode to convert the optical signal output by the electro-optic Bragg deflection modulator into an electrical signal; the electrical signal output by the photodiode is connected to the transimpedance in turn The amplifier, the data processor and the network communication module, the signal reading unit is connected with the network communication module to read the signal output by the network communication module.
进一步地,在电光布拉格偏转调制器上设置有交错的梳状电极,在梳状电极上施加有电压V1使该电极下面的光波导折射率受到扰动,从而在光波导内形成一个布拉格光栅。Furthermore, interleaved comb electrodes are arranged on the electro-optical Bragg deflection modulator, and a voltage V1 is applied to the comb electrodes to disturb the refractive index of the optical waveguide below the electrodes, thereby forming a Bragg grating in the optical waveguide.
进一步地,所述跨阻放大器、数据处理器和网络通讯模块集成在同一PCB印制板模组上。Further, the transimpedance amplifier, data processor and network communication module are integrated on the same PCB printed board module.
进一步地,两个光波导、1×2光耦合器、两个半导体光放大器、热光相移器、双螺旋形波导、电光布拉格偏转调制器、光电二极管共同构成一个光纤通道并集成在磷化铟基衬底上,每个光纤通道用于解调一路光纤上的光纤光栅传感器,光纤通道和磷化铟基衬底一起构成光电芯片。Furthermore, two optical waveguides, 1×2 optical couplers, two semiconductor optical amplifiers, thermo-optic phase shifters, double helical waveguides, electro-optic Bragg deflection modulators, and photodiodes together constitute a fiber channel and are integrated in the phosphating On the indium-based substrate, each fiber channel is used to demodulate a fiber grating sensor on one fiber, and the fiber channel and the indium-phosphide-based substrate together constitute an optoelectronic chip.
更进一步地,本发明在光电芯片的磷化铟基衬底上集成有至少两个光纤通道,每个光纤通道的光电二极管的输出接同一PCB印制板模组上的跨阻放大器;所有光电二极管按阵列排布形成光电二极管阵列。Furthermore, the present invention integrates at least two optical fiber channels on the indium phosphide-based substrate of the optoelectronic chip, and the output of the photodiode of each optical fiber channel is connected to the transimpedance amplifier on the same PCB printed board module; all optoelectronic The diodes are arranged in an array to form a photodiode array.
一种高速光纤光栅解调方法,先获取前述的一种高速光纤光栅监测用解调系统,然后再进行调解;具体调解过程如下,A high-speed fiber grating demodulation method, which first obtains the aforementioned demodulation system for high-speed fiber grating monitoring, and then performs mediation; the specific mediation process is as follows,
从两个半导体光放大器发出的宽谱光经1×2光耦合器耦合到光纤光栅传感器,光纤光栅传感器反射的窄带光再由1×2光耦合器一分为二,经过两个半导体光放大器单程放大,在两光波导中分别形成信号光束和泵浦光束,泵浦光束对应的光波导上的热光相移器用于微调马赫-曾德尔结构的相位差,信号光束对应的光波导上设置的双螺旋形波导用于引入一个固定相位差;信号光束和泵浦光束以布拉格角±θB进入电光布拉格偏转调制器,施加在梳状电极上的电压V1使该电极下面的光波导折射率受到扰动,于是在光波导内形成一布拉格光栅,此光栅改变泵浦光束的传输方向,光沿着与泵浦光束成2倍布拉格角2θB的方向衍射出来,泵浦光束的衍射光恰好能进入信号光束对应的光波导,并与透射的信号光束重合而相互干涉;光电二极管检测相互干涉的光线并转换为电信号,数据处理器测量电信号变化并通过网络通讯模块传输出去,从而确定光纤光栅反射光的波长移动,实现光纤光栅传感器的解调。The wide-spectrum light emitted from the two semiconductor optical amplifiers is coupled to the fiber grating sensor through the 1×2 optical coupler, and the narrow-band light reflected by the fiber grating sensor is divided into two by the 1×2 optical coupler and passed through the two semiconductor optical amplifier One-way amplification, the signal beam and the pump beam are respectively formed in the two optical waveguides, the thermo-optic phase shifter on the optical waveguide corresponding to the pump beam is used to fine-tune the phase difference of the Mach-Zehnder structure, and the optical waveguide corresponding to the signal beam is set The double helical waveguide is used to introduce a fixed phase difference; the signal beam and the pump beam enter the electro-optic Bragg deflection modulator at the Bragg angle ± θ B , and the voltage V 1 applied to the comb electrode makes the optical waveguide below the electrode refracted The rate is disturbed, so a Bragg grating is formed in the optical waveguide. This grating changes the transmission direction of the pump beam, and the light is diffracted along the direction that is twice the Bragg angle 2θ B with the pump beam. It can enter the optical waveguide corresponding to the signal beam and overlap with the transmitted signal beam to interfere with each other; the photodiode detects the interfering light and converts it into an electrical signal, and the data processor measures the change of the electrical signal and transmits it through the network communication module to determine The wavelength shift of the light reflected by the FBG realizes the demodulation of the FBG sensor.
相比现有技术,本发明具有如下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
1、本发明利用电光布拉格偏转调制器对FBG传感器动态信号进行自适应光谱解调,避免了使用无法高速解调的扫描光源或对光折变效应要求高的双波混频干涉仪,有利于降低成本和提高稳定性。1. The present invention utilizes the electro-optical Bragg deflection modulator to perform adaptive spectral demodulation on the dynamic signal of the FBG sensor, avoiding the use of a scanning light source that cannot be demodulated at high speed or a dual-wave mixing interferometer that requires high photorefractive effects, which is beneficial to Reduce costs and increase stability.
2、本发明将所有传感器系统的无源和有源光电元件单片集成在微型半导体InP集成光学芯片内,能实现微型化封装。集成的解调系统具有结构紧凑、一体化封装、高度集成、系统稳定性和可靠性高的特点。2. The present invention monolithically integrates the passive and active photoelectric elements of all sensor systems in the micro-semiconductor InP integrated optical chip, which can realize miniaturized packaging. The integrated demodulation system has the characteristics of compact structure, integrated packaging, high integration, high system stability and reliability.
3、本发明在同一个InP基衬底上制造多个光子集成非平衡M-Z结构并匹配相应读取信号的印制板模组可以实现多通道同步测量,且体积基本不增加。3. The present invention manufactures a plurality of photon-integrated unbalanced M-Z structures on the same InP base substrate and matches the printed board module of the corresponding reading signal, which can realize multi-channel synchronous measurement, and the volume basically does not increase.
本发明是一种基于电光布拉格偏转调制器和磷化铟(InP)光电芯片的多通道高速光纤光栅解调系统,实现小尺寸、低功耗操作和独立封装,能够有效的解调对应变、振动和声发射敏感的光纤布拉格光栅(FBG)传感器的高频动态信号。本发明有助于推动光纤超声探测、光纤声发射检测等结构健康监测市场的发展。The invention is a multi-channel high-speed fiber grating demodulation system based on an electro-optical Bragg deflection modulator and an indium phosphide (InP) photoelectric chip, which realizes small size, low power consumption operation and independent packaging, and can effectively demodulate the strain, High-frequency dynamic signals from fiber Bragg grating (FBG) sensors sensitive to vibration and acoustic emission. The invention helps to promote the development of optical fiber ultrasonic detection, optical fiber acoustic emission detection and other structural health monitoring markets.
附图说明Description of drawings
图1是本发明高速光纤光栅监测用解调系统示意图。Fig. 1 is a schematic diagram of a demodulation system for high-speed fiber grating monitoring of the present invention.
图2是本发明电光布拉格偏转调制器结构示意图。Fig. 2 is a schematic diagram of the structure of the electro-optical Bragg deflection modulator of the present invention.
具体实施方式Detailed ways
下面结合附图和具体实施方式对本发明进行详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
参见图1,本发明一种高速光纤光栅监测用解调系统,包括两个光波导9,在其中一个光波导上设有半导体光放大器(SOA)A2和热光相移器(TOM)4,在另一个光波导9上设有半导体光放大器B3和双螺旋形波导5两个光波导靠近半导体光放大器一端与1×2光耦合器1连接,1×2光耦合器1合束再经第一波导耦合连接外部传输单元,外部传输单元与光纤光栅传感器耦合连接;两个波导另一端输出至电光布拉格偏转调制器6,电光布拉格偏转调制器6输出接光电二极管11以将电光布拉格偏转调制器输出的光信号转换为电信号;光电二极管11输出的电信号依次接跨阻放大器(TIA)、数据处理器和网络通讯模块,信号读取单元与网络通讯模块连接以读取网络通讯模块输出的信号。Referring to Fig. 1, a kind of demodulation system for high-speed fiber grating monitoring of the present invention comprises two
在电光布拉格偏转调制器6上设置有交错的梳状电极7,在梳状电极7上施加有电压V1使该电极下面的光波导折射率受到扰动,从而在光波导内形成一个布拉格光栅。Interleaved
所述系统包括InP光电芯片10、PCB印制板模组8、光纤光栅(FBG)传感器。所述光电芯片10采用InP基通用集成技术制造,在掺铁磷化铟基衬底上集成了光波导9、1×2MMI型光耦合器1、两个半导体光放大器(SOA)2、3,热光相移器(TOM)4、电光布拉格偏转调制器6、多个光电二极管11构成的PIN光电二极管阵列等光子器件。所述跨阻放大器(TIA)、数据处理器、网络通讯模块集成在印制板模组8上,用于信号读出和显示。所述光电芯片10与所述印制板模组8相电性连接。1×2MMI型光耦合器合束再经第一波导耦合到外部传输单元,如光适配器或光纤光栅传感器。通过光适配器连接光纤光栅传感器,或者直接耦合连接光纤光栅传感器。所述系统适用于光纤光栅动态应变、动态压力、振动加速度、超声和声发射等多种类型的光纤光栅传感器信号解调和传感数据采集,可以实现多通道同步测量。The system includes an InP
本发明是一种基于电光布拉格偏转调制器和磷化铟(InP)光电芯片的高速光纤光栅解调系统,技术方案包括:1)对应变、振动和声发射敏感的光纤布拉格光栅(FBG)传感器;2)利用电光布拉格偏转调制器对FBG传感器动态信号进行自适应光谱解调技术;以及3)将所有传感器系统的无源和有源光电元件单片集成在微型半导体InP集成光学芯片内。本发明有助于推动光纤布拉格光栅传感解调领域的发展,并进一步拓展光纤布拉格光栅传感技术在海军、海事和航空航天上的应用。The present invention is a high-speed fiber grating demodulation system based on an electro-optical Bragg deflection modulator and an indium phosphide (InP) photoelectric chip. The technical solution includes: 1) a fiber Bragg grating (FBG) sensor sensitive to strain, vibration and acoustic emission ; 2) Adaptive spectrum demodulation technology for FBG sensor dynamic signal by using electro-optical Bragg deflection modulator; and 3) Monolithic integration of passive and active optoelectronic components of all sensor systems in a micro-semiconductor InP integrated optical chip. The invention helps to promote the development of the field of optical fiber Bragg grating sensing and demodulation, and further expands the application of the optical fiber Bragg grating sensing technology in navy, maritime affairs and aerospace.
下面介绍本发明光电芯片调解系统的工作原理和相关技术。The working principle and related technologies of the optoelectronic chip mediation system of the present invention are introduced below.
作为示意性表达,图1只示出了两个光纤通道构成的高速光纤光栅解调系统,三个或者更多个光纤通道结构类似。这是一种InP基光子集成的非平衡马赫-曾德尔(M-Z)结构。对于单个光子集成的非平衡M-Z结构,两个半导体光放大器分别部署在非平衡M-Z结构的两个臂上,从两个半导体光放大器发出的宽谱光经1×2MMI型光耦合器耦合到FBG传感器(中心波长为λB)。FBG反射的窄带光再由1×2MMI型光耦合器一分为二,经过两个半导体光放大器单程放大,在光波导中分别形成信号光束和泵浦光束。泵浦光波导上设置一个热光相移器,通过施加电压V0用于微调M-Z结构的相位差,信号光波导上设置一个双螺旋形波导,用于引入一个固定相位差。此信号光束和泵浦光束(此时两者振幅分别为Es0和Ep0)以布拉格角±θB进入X交叉通道波导调制器,此X交叉通道波导调制器即是布拉格衍射型电光调制器,并结合交错的梳状电极组成。施加在梳状电极上的电压V1使该电极下面的折射率受到扰动,于是在光波导内形成一个有效光栅,此光栅是一布拉格光栅(光栅间距为Λ)。此光栅改变泵浦光束的传输方向,光沿着与泵浦光束成2倍布拉格角(2θB)的方向衍射出来,泵浦光束的衍射光恰好能进入信号光波导,并与透射的信号光束重合而相互干涉。然后,集成PIN光电二极管阵列检测两者干涉的光线。印制板模组测量二极管的光电流变化,并用于确定光纤光栅反射光的波长移动。在同一个InP基衬底上制造多个光子集成非平衡M-Z结构并匹配相应读取信号的印制板模组可以实现多通道同步测量。As a schematic representation, FIG. 1 only shows a high-speed fiber grating demodulation system composed of two fiber channels, and three or more fiber channels have a similar structure. This is a non-equilibrium Mach-Zehnder (MZ) structure for InP-based photonic integration. For the unbalanced MZ structure with single photon integration, two semiconductor optical amplifiers are deployed on the two arms of the unbalanced MZ structure respectively, and the broadband light emitted from the two semiconductor optical amplifiers is coupled to the FBG through a 1×2 MMI optical coupler Sensor (central wavelength λ B ). The narrow-band light reflected by the FBG is split into two by a 1×2 MMI optical coupler, amplified by two semiconductor optical amplifiers in one pass, and forms a signal beam and a pump beam in the optical waveguide respectively. A thermo-optic phase shifter is set on the pump optical waveguide, which is used to fine-tune the phase difference of the MZ structure by applying a voltage V 0 , and a double helical waveguide is set on the signal optical waveguide to introduce a fixed phase difference. The signal beam and the pump beam (the amplitudes of which are E s0 and E p0 respectively) enter the X cross-channel waveguide modulator at the Bragg angle ±θ B. This X cross-channel waveguide modulator is a Bragg diffraction electro-optic modulator , combined with interlaced comb electrodes. A voltage V1 applied to the comb electrode perturbs the refractive index beneath the electrode, thereby forming an effective grating in the optical waveguide, which is a Bragg grating (grating pitch Λ). This grating changes the transmission direction of the pump beam, and the light is diffracted along the direction that is twice the Bragg angle (2θ B ) with the pump beam. overlap and interfere with each other. An integrated PIN photodiode array then detects the light that interferes with the two. The printed board module measures the change in photocurrent of the diode and is used to determine the wavelength shift of the light reflected from the fiber grating. A printed board module that manufactures multiple photon-integrated unbalanced MZ structures on the same InP-based substrate and matches the corresponding read signals can realize multi-channel simultaneous measurement.
进入X交叉通道波导调制器的布拉格角θB由下式确定:The Bragg angle θ B entering the X-cross channel waveguide modulator is determined by:
式中,Λ是调制器中光栅间距,λB是FBG中心波长,neff=β/k是波导有效折射率(β、k分别表示波导传播常数和真空波数),上式成立需要满足条件:2πλBl>>Λ2(l为光栅厚度)。λB的微小变化会导致泵浦光束与光栅的夹角不等于布拉格角,但是在ΔθB=2Λ/l范围内仍然可以发生衍射,只是效率降低了(不超过50%)。泵浦光束的衍射光强与施加的电场强度E1有关,表示为:In the formula, Λ is the grating spacing in the modulator, λ B is the central wavelength of the FBG, n eff = β/k is the effective refractive index of the waveguide (β, k represent the waveguide propagation constant and the vacuum wavenumber respectively), and the above formula needs to satisfy the following conditions: 2πλ B l>>Λ 2 (l is the grating thickness). Small changes in λ B will cause the angle between the pump beam and the grating to be different from the Bragg angle, but diffraction can still occur within the range of Δθ B = 2Λ/l, but the efficiency is reduced (not more than 50%). The diffracted light intensity of the pump beam is related to the applied electric field intensity E1 , expressed as:
式中,E1是施加电场强度(可通过V1调节),Idp是的衍射泵浦光强,Ip0是没有施加电场时的透射光强,neff是波导有效折射率,reff是电光系数。In the formula, E 1 is the applied electric field intensity (can be adjusted by V 1 ), I dp is the diffracted pump light intensity, I p0 is the transmitted light intensity when no electric field is applied, n eff is the effective refractive index of the waveguide, and r eff is the electro-optical coefficient.
所述信号光束和泵浦光束的光谱偏移ΔλB(t)有效地转换为光束之间的相对相移(由于通过不平衡光路传播),并由下式给出The spectral shift Δλ B (t) of the signal and pump beams effectively translates into a relative phase shift between the beams (due to propagation through the unbalanced optical path) and is given by
式中,ΔL是不平衡光路光波导的物理长度差。正是衍射泵浦光复振幅Edp和透射信号光束Es之间的干涉解调了光谱偏移ΔλB(t)。在小动态相移的限制下(该限制通常对声发射或冲击引起的动态应变有效),光电二极管处的干涉信号可以写为In the formula, ΔL is the physical length difference of the unbalanced optical path optical waveguide. It is the interference between the diffracted pump light complex amplitude E dp and the transmitted signal beam E s that demodulates the spectral shift Δλ B (t). Under the limit of small dynamic phase shift (which is usually valid for dynamic strain induced by acoustic emission or shock), the interference signal at the photodiode can be written as
从公式(4)可以清楚地看出,最大信号出现在kl接近π/4时,也就是说,此时处于正交点。通过向梳状电极施加电压V1,并适当调整布拉格衍射型电光调制器参数,很容易地达到这一条件。It can be clearly seen from formula (4) that the maximum signal appears when kl is close to π/4, that is to say, it is at the quadrature point at this time. This condition is easily achieved by applying a voltage V 1 to the comb electrodes and adjusting the Bragg diffractive EO modulator parameters appropriately.
在光子学中,具有控制光的基本特性(振幅、相位和偏振)的搭积木式集成过程可以支持广泛的功能。通过良好的波导结构,可以实现互连,也可以制作无源组件,如耦合器、滤波器和多路分解器。通过光放大器(SOA)、相位调制器和偏振转换器,用于控制光的振幅、相位和偏振,该技术可以支持广泛的功能。通常InP光电芯片制备过程包括:外延生长、波导刻蚀、表面平整化和金属互联。In photonics, building-block integration processes with control over the fundamental properties of light (amplitude, phase, and polarization) can support a wide range of functions. With a good waveguide structure, interconnections can be realized and passive components such as couplers, filters and demultiplexers can be made. With optical amplifiers (SOAs), phase modulators, and polarization converters for controlling the amplitude, phase, and polarization of light, this technology can support a wide range of functions. Usually InP optoelectronic chip preparation process includes: epitaxial growth, waveguide etching, surface planarization and metal interconnection.
InP光电芯片采用通用集成技术制造,即使用浅蚀刻的波导(用于低损耗互连和高效放大器)、深蚀刻的波导(用于较小弯曲半径和高效相移器部分)来构建基本的有源和无源组件。500nm厚的波导层由带隙波长为1.25μm(Q1.25)的InGaAsP四元层组成。该层对于波长大于1.25μm的光子是透明的,因此这些波导被称为无源波导。有源波导在波导层内具有块体Q1.55、多量子阱(MQW)或量子点(QD)层。该有源层将吸收或放大波长约为1.55微米的光子(取决于所施加的电流)。波导顶部的高掺杂InGaAs接触层允许在有源元件(SOA)中有效地注入电流,并且还用于操作反向偏置相移元件。构成本发明InP光电芯片的基本单元包括无源器件与有源器件,主要包括:InP optoelectronic chips are fabricated using common integration techniques, that is, using shallowly etched waveguides (for low-loss interconnects and high-efficiency amplifiers), deep-etched waveguides (for small bend radii and high-efficiency phase shifter parts) to build basic active components. source and passive components. The 500nm thick waveguide layer consists of a quaternary layer of InGaAsP with a bandgap wavelength of 1.25μm (Q1.25). This layer is transparent to photons with wavelengths greater than 1.25 μm, so these waveguides are called passive waveguides. Active waveguides have bulk Q1.55, multiple quantum well (MQW) or quantum dot (QD) layers within the waveguide layer. This active layer will either absorb or amplify photons with a wavelength of approximately 1.55 microns (depending on the applied current). A highly doped InGaAs contact layer on top of the waveguide allows efficient current injection in the active element (SOA) and is also used to operate the reverse-biased phase-shift element. The basic unit constituting the InP optoelectronic chip of the present invention includes passive devices and active devices, mainly including:
1)波导。浅刻蚀波导的弯曲半径为500μm,深刻蚀波导的弯曲半径可以降至10μm左右。包括弯曲波导、MMI耦合器、双螺旋形波导等无源器件。1) Waveguide. The bending radius of the shallow etched waveguide is 500 μm, and the bending radius of the deeply etched waveguide can be reduced to about 10 μm. Including passive components such as curved waveguides, MMI couplers, and double helix waveguides.
2)光放大器、光探测器2) Optical amplifiers, optical detectors
光放大器和光探测器的结构非常相似,区别在于波导刻蚀的深度和PN结所施加电压的方向。光探测器需工作在反偏状态。The structure of optical amplifier and optical detector is very similar, the difference lies in the depth of waveguide etching and the direction of voltage applied by PN junction. The photodetector needs to work in the reverse bias state.
3)热光相移器(TOM)。热光相移器是无源透明波导部分,通过在波导顶部使用加热器电极对其进行加热,可以改变其相位转移,调制速度在毫秒范围内。3) Thermo-optic phase shifter (TOM). Thermo-optic phase shifters are passive transparent waveguide sections whose phase shift can be altered by heating them with heater electrodes on top of the waveguide, with modulation speeds in the millisecond range.
4)布拉格衍射型电光调制器:这是一种X交叉通道波导调制器,并结合交错的梳状电极组成。施加在梳状电极上的电压使该电极下面的折射率受到周期性的扰动,于是在波导内形成一个有效光栅,此光栅是一布拉格光栅。此光栅改变入射光束的传输方向(见图2)。4) Bragg diffraction electro-optic modulator: This is an X-cross channel waveguide modulator combined with interleaved comb electrodes. A voltage applied to the comb electrode periodically perturbs the index of refraction beneath the electrode, thereby forming an effective grating within the waveguide, which is a Bragg grating. This grating changes the direction of propagation of the incident beam (see Figure 2).
最后需要说明的是,以上实施例仅用以说明本发明的技术方案而非限制,尽管申请人参照较佳实施例对本发明进行了详细说明,本领域的普通技术人员应当理解,对本发明的技术方案进行修改或者等同替换,而不脱离本技术方案的宗旨和范围,均应涵盖在本发明的权利要求范围当中。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention without limitation. Although the applicant has described the present invention in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technology of the present invention Any modification or equivalent replacement of the technical solution without departing from the spirit and scope of the technical solution shall be covered by the scope of the claims of the present invention.
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