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CN115753751A - A solar cell substrate inspection method and inspection device - Google Patents

A solar cell substrate inspection method and inspection device Download PDF

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CN115753751A
CN115753751A CN202211528038.7A CN202211528038A CN115753751A CN 115753751 A CN115753751 A CN 115753751A CN 202211528038 A CN202211528038 A CN 202211528038A CN 115753751 A CN115753751 A CN 115753751A
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solar cell
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cell substrate
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周守亮
高永强
苏世杰
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Tongwei Solar Chengdu Co Ltd
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Tongwei Solar Chengdu Co Ltd
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Abstract

一种太阳电池基片的检验方法及其检验装置,属于光伏电池领域。利用检验液均匀的接触太阳电池基片的第一区域,在检验液的作用下,第一区域没有被残胶覆盖的金属铜能够与检验液发生化学反应,呈现出与铜金属的第一颜色不同的第二颜色。因此,可以通过观察第一区域的颜色判断是否有残胶的存在。通过观察经过检验液处理后的第一区域的颜色,可以快速的判断第一区域是否有残胶存在,且检验过程可以不依靠复杂和昂贵的检验设备,操作简单。

Figure 202211528038

A solar cell substrate inspection method and an inspection device thereof belong to the field of photovoltaic cells. Use the test solution to uniformly contact the first area of the solar cell substrate. Under the action of the test solution, the metal copper in the first area not covered by the residual glue can chemically react with the test solution, showing the first color with copper metal A different second color. Therefore, it can be judged whether there is residual glue by observing the color of the first area. By observing the color of the first area treated with the test liquid, it is possible to quickly judge whether there is residual glue in the first area, and the test process does not rely on complex and expensive test equipment, and the operation is simple.

Figure 202211528038

Description

一种太阳电池基片的检验方法及其检验装置A solar cell substrate inspection method and inspection device

技术领域technical field

本申请涉及光伏电池技术领域,具体而言,涉及一种太阳电池基片的检验方法及其检验装置。The present application relates to the technical field of photovoltaic cells, in particular, to a method for inspecting solar cell substrates and an inspection device thereof.

背景技术Background technique

当前,前沿的太阳能光伏技术之一是采用铜互联技术替代传统银浆印刷。铜互联技术之于传统银浆印刷技术除了成本外的另一个最大的优势就是铜互联可以做到细线化。细线化的核心技术之一就是湿膜感光胶的图形转移技术。铜互联电池技术中使用湿膜感光胶打印、显影、电镀制作电池片的铜栅线,取代传统的银浆印刷技术。Currently, one of the cutting-edge solar photovoltaic technologies is the use of copper interconnection technology to replace traditional silver paste printing. The other biggest advantage of copper interconnection technology over traditional silver paste printing technology is that copper interconnection can be thinned. One of the core technologies of line thinning is the graphic transfer technology of wet film photosensitive adhesive. Copper interconnection battery technology uses wet film photosensitive adhesive printing, development, and electroplating to make copper grid lines of battery sheets, replacing traditional silver paste printing technology.

但是,该技术采用湿膜感光胶显影后会出现一定比例的残胶,导致显影不净。有别于传统行业,该感光胶为无色透明的有机高分子材料,发生显影残留时,无法观察到。残胶显影不净会引起断栅缺陷,因此给生产实际带来极大的困扰。However, after this technology adopts wet film photoresist for development, a certain proportion of residual glue will appear, resulting in unclean development. Different from traditional industries, this photosensitive adhesive is a colorless and transparent organic polymer material, and it cannot be observed when developing residue occurs. Unclear development of residual glue will cause broken gate defects, which brings great troubles to actual production.

发明内容Contents of the invention

本申请的目的在于提供一种太阳电池基片的检验方法及其检验装置,以部分或全部地改善相关技术中太阳电池基片显影不净的检验问题。The purpose of this application is to provide a solar cell substrate inspection method and its inspection device, so as to partially or completely improve the inspection problem of solar cell substrates not being cleanly developed in the related art.

第一方面,本申请实施例提供一种太阳电池基片的检验方法,太阳电池基片包括叠层设置的铜种子层和感光胶层;对太阳电池基片的部分区域进行去除感光胶层处理,形成第一区域;检验方法用于检验第一区域是否存在透明的残胶。检验方法包括:In the first aspect, the embodiment of the present application provides an inspection method for a solar cell substrate, the solar cell substrate includes a copper seed layer and a photosensitive adhesive layer stacked; , forming the first area; the inspection method is used to inspect whether there is transparent residual glue in the first area. Inspection methods include:

使检验液覆盖于第一区域,观察第一区域的颜色;其中,检验液含有能够与铜反应并使铜的颜色变成第二颜色的物质;检验液覆盖于第一区域之前,第一区域为第一颜色;根据第一区域的颜色是否全部变化判断在第一区域是否存在残胶:若第一区域保留有第一颜色,表示第一区域有残胶。Make the test solution cover the first area, and observe the color of the first area; wherein, the test solution contains substances that can react with copper and change the color of copper into a second color; before the test solution covers the first area, the first area It is the first color; judge whether there is residual glue in the first area according to whether the color of the first area changes completely: if the first color remains in the first area, it means that there is residual glue in the first area.

太阳电池基片经过去除部分感光胶层操作后,形成的第一区域处有可能残留有残胶。残胶残留于部分的铜种子层的表面,使得该部分铜种子层不能暴露于第一区域。由于残胶具有透明性,所以当第一区域处即使覆盖有残胶,观察到的第一区域的颜色仍然为铜种子层的颜色,即第一颜色。在上述实现过程中,利用检验液均匀的接触第一区域,使得太阳电池基片在经过去除感光胶层操作后形成的第一区域处,没有被残胶覆盖的铜金属能够直接接触检验液并与检验液发生化学反应,呈现出与铜金属的第一颜色不同的第二颜色,因此可以通过观察第一区域的颜色判断是否有残胶的存在。After the solar cell substrate is removed part of the photosensitive adhesive layer, there may be residual adhesive in the formed first region. The adhesive residue remains on the surface of a part of the copper seed layer, so that the part of the copper seed layer cannot be exposed to the first region. Since the residual glue is transparent, even if the first region is covered with the residual glue, the observed color of the first region is still the color of the copper seed layer, that is, the first color. In the above implementation process, the test solution is used to uniformly contact the first region, so that the copper metal not covered by the residual glue can directly contact the test solution and It reacts chemically with the test liquid and presents a second color different from the first color of copper metal. Therefore, it can be judged whether there is residual glue by observing the color of the first area.

即,在检验液处理后,如果第一区域仍然保留有第一颜色,说明保留有第一颜色的部分没有与检验液发生反应,进而表明在保留有第一颜色的位置处覆盖有残胶。That is, after the test liquid treatment, if the first area still retains the first color, it means that the portion retaining the first color has not reacted with the test liquid, which further indicates that the position retaining the first color is covered with residual glue.

结合第一方面,本申请可选的实施方式中,第一区域用于电镀加厚形成电镀铜栅线。With reference to the first aspect, in an optional implementation manner of the present application, the first region is used for electroplating thickening to form electroplated copper grid lines.

在太阳电池基片的制备过程中,需要在铜种子层上覆盖一层感光胶层,然后去除部分感光胶层,在太阳电池基片的表面形成露铜的第一区域,以便于后续在露铜的第一区域上电镀形成电镀铜栅线。在上述实现过程中,利用检验液检验用来电镀形成电镀铜栅线的第一区域,可以及时检测出第一区域是否存在残胶,进而减少后续在第一区域形成电镀铜栅线时出现栅线不良的几率。In the preparation process of the solar cell substrate, it is necessary to cover a layer of photosensitive adhesive layer on the copper seed layer, and then remove part of the photosensitive adhesive layer to form the first area of exposed copper on the surface of the solar cell substrate, so as to facilitate subsequent exposure. Electroplated copper grid lines are formed on the first area of copper. In the above implementation process, using the inspection solution to inspect the first area used for electroplating to form the electroplated copper grid line can detect whether there is residual glue in the first area in time, thereby reducing the occurrence of grid lines when the electroplated copper grid line is formed in the first area. Chances of a bad line.

结合第一方面,本申请可选的实施方式中,若第一区域的全部颜色为第二颜色,表示第一区域没有残胶;若第一区域的全部颜色为第一颜色,表示第一区域全覆盖有残胶;若第一区域的颜色包括第一颜色和第二颜色,表示第一区域的部分覆盖有残胶。In combination with the first aspect, in an optional embodiment of the present application, if all the colors of the first area are the second color, it means that there is no glue residue in the first area; if all the colors of the first area are the first color, it means that the first area It is fully covered with residual glue; if the color of the first area includes the first color and the second color, it means that the first area is partially covered with residual glue.

若第一区域没有残胶,则在检验液覆盖第一区域后,检验液会与第一区域处的铜发生反应,使第一区域处的铜的颜色全部变成第二颜色。此时,观察到的第一区域的颜色全部为第二颜色。If there is no adhesive residue in the first area, after the test liquid covers the first area, the test liquid will react with the copper in the first area, so that the copper in the first area will all change to the second color. At this time, the observed colors of the first region are all the second colors.

若第一区域处全部覆盖一层残胶,则在检验液覆盖第一区域后,检验液不能使第一区域的颜色变为第二颜色。此时,观察到的第一区域的全部颜色仍然为第一颜色。If the first area is completely covered with a layer of residual glue, the test liquid cannot change the color of the first area to the second color after the test liquid covers the first area. At this time, all the observed colors of the first region are still the first color.

若第一区域的部分位置处覆盖有残胶,则在检验液覆盖第一区域后,检验液只能使第一区域的另一部分没有残胶覆盖的位置处的铜发生变成第二颜色,而被残胶覆盖的部分仍然保留第一颜色。此时,观察到的第一区域的颜色即有第一颜色又有第二颜色。If part of the first area is covered with residual glue, after the test liquid covers the first area, the test liquid can only make the copper at the other part of the first area not covered by the residual glue change into a second color, And the part covered by the residual glue still retains the first color. At this time, the observed color of the first region has both the first color and the second color.

结合第一方面,本申请可选的实施方式中,检验液包括亚锡盐和铜离子络合剂,检验液的pH不大于1;In combination with the first aspect, in an optional embodiment of the present application, the test solution includes a stannous salt and a copper ion complexing agent, and the pH of the test solution is not greater than 1;

可选的,铜离子络合剂选自硫脲和柠檬酸中的至少一者。Optionally, the copper ion complexing agent is selected from at least one of thiourea and citric acid.

利用检验液检测第一区域是否存在残胶,可以避免后续电镀铜制备栅线时出现断栅。并且,在将本示例提供的包括亚锡盐和铜离子络合剂,且pH不大于1的检验液,均匀的涂抹于第一区域时,检验液中的亚锡盐的亚锡离子在强酸性环境下,以及铜离子络合剂的作用,能够与第一区域中未被残胶覆盖的铜发生置换反应,在该部分的铜层的表面析出金属锡,呈现金属锡的乳白色的第二颜色。Using the inspection solution to detect whether there is residual glue in the first area can avoid grid breakage during subsequent electroplating of copper to prepare grid lines. And, when the test solution provided by this example that includes stannous salt and copper ion complexing agent, and pH is not greater than 1, is evenly applied to the first area, the stannous ion of the stannous salt in the test solution is strong Under the acidic environment and the action of copper ion complexing agent, it can have a substitution reaction with the copper not covered by the residual glue in the first area, and metal tin is precipitated on the surface of the copper layer in this part, showing the milky white color of metal tin in the second area. color.

通过观察经过本示例提供的检验液处理后的第一区域的颜色是否出现与第一颜色不同的第二颜色,进而判断第一区域是否有残胶。By observing whether the color of the first area treated with the test solution provided in this example shows a second color different from the first color, it is judged whether there is any adhesive residue in the first area.

结合第一方面,本申请可选的实施方式中,铜离子络合剂为硫脲,亚锡盐为(CH3SO3)2Sn。With reference to the first aspect, in an optional embodiment of the present application, the copper ion complexing agent is thiourea, and the stannous salt is (CH 3 SO 3 ) 2 Sn.

加入硫脲或柠檬酸,能够与Cu2+、Cu+形成稳定的络离子。例如,加入硫脲后,在强酸性环境下,能够形成[Cu(NH2CSNH2)4]2+、[Cu(NH2CSNH2)4]+等络离子。在检验液中加入铜离子络合剂,可以调整电极电位,使得Sn2+能够与接触到的Cu发生置换反应,析出金属锡。Adding thiourea or citric acid can form stable complex ions with Cu 2+ and Cu + . For example, after adding thiourea, complex ions such as [Cu(NH 2 CSNH 2 ) 4 ] 2+ , [Cu(NH 2 CSNH 2 ) 4 ] + can be formed in a strongly acidic environment. Adding a copper ion complexing agent in the test solution can adjust the electrode potential, so that Sn 2+ can undergo a displacement reaction with the contacted Cu and precipitate metallic tin.

结合第一方面,本申请可选的实施方式中,铜离子络合剂和亚锡盐的质量比为2-4:1-2;In combination with the first aspect, in an optional embodiment of the present application, the mass ratio of the copper ion complexing agent to the stannous salt is 2-4:1-2;

可选的,检验液包括10-20g/L的硫脲和5-10g/L的(CH3SO3)2Sn。Optionally, the test solution includes 10-20 g/L thiourea and 5-10 g/L (CH 3 SO 3 ) 2 Sn.

亚锡离子和铜离子的电位随着络合剂的添加量的改变而改变。在检验液中加入质量比为2-4:1-2的铜离子络合剂和亚锡盐,可以提高Sn2+离子与Cu发生置换反应的速率,快速析出金属锡。The potentials of stannous ions and copper ions change with the addition of complexing agent. Adding copper ion complexing agent and stannous salt with a mass ratio of 2-4:1-2 in the test solution can increase the rate of substitution reaction between Sn 2+ ions and Cu, and rapidly precipitate metallic tin.

利用包括10-20g/L的硫脲和5-10g/L的(CH3SO3)2Sn的检验液,检测太阳电池基片的第一区域是否存在残胶,在没有被残胶覆盖的区域可以快速的观察到金属锡的析出,进而快速判断太阳电池基片是否存在显影不净,以便于根据检验结果及时调整太阳电池的电镀铜工艺前段的曝光显影等工序,进而避免在电镀工艺后出现大量的不良铜栅线。Utilize 10-20g/L of thiourea and 5-10g/L of (CH 3 SO 3 ) 2 Sn test solution to detect whether there is glue residue in the first area of the solar cell substrate. The area can quickly observe the precipitation of metal tin, and then quickly judge whether the solar cell substrate is not clean, so as to adjust the exposure and development processes in the front stage of the copper electroplating process of the solar cell in time according to the inspection results, thereby avoiding the risk of contamination after the electroplating process. A large number of bad copper grid lines appear.

结合第一方面,本申请可选的实施方式中,使检验液覆盖第一区域的方法,包括:将太阳电池基片浸泡于检验液中预设时间;In combination with the first aspect, in an optional implementation manner of the present application, the method for covering the first area with the test solution includes: soaking the solar cell substrate in the test solution for a preset time;

可选的,同时将3-5片太阳电池基片浸泡于检验液中;Optionally, soak 3-5 solar cell substrates in the test solution at the same time;

可选的,预设时间为5-15s;Optional, the preset time is 5-15s;

和/或,观察第一区域的颜色的方法,包括:And/or, a method of observing the color of the first zone, comprising:

利用显微镜,观察第一区域的颜色。Using a microscope, observe the color of the first zone.

将去除部分感光胶层后的太阳电池基片浸泡于检验液中5-15s,能够在保证使第一区域处未被残胶覆盖的铜金属层均匀的接触检验液的同时,还能够避免由于浸泡时间过长而降低检验效率。并且,将去除部分感光胶层后的多片太阳电池基片同时浸泡于检验液中,可以在减少检验误差的同时还能提高检验效率,操作简单便捷。Soak the solar cell substrate after part of the photosensitive adhesive layer has been removed in the test solution for 5-15 seconds, while ensuring that the copper metal layer not covered by the residual glue at the first area is in uniform contact with the test solution, it can also avoid the If the soaking time is too long, the inspection efficiency will be reduced. In addition, soaking the plurality of solar cell substrates after part of the photosensitive adhesive layer is removed in the test solution at the same time can reduce test errors and improve test efficiency, and the operation is simple and convenient.

第二方面,本申请实施例提供一种用于第一方面提供的检验方法的检验装置,包括:In the second aspect, the embodiment of the present application provides an inspection device for the inspection method provided in the first aspect, including:

花篮,花篮的内部沿花篮的长度方向间隔设置多个限位夹,相邻两个限位夹之间的距离为0.4-0.6cm,以使插入花篮内的相邻两个太阳电池基片间隔0.4-0.6cm;花篮包括底板和围绕底板四周的侧板,底板和侧板均为镂空结构;用于存放检测液的槽体;花篮可选择的进出槽体。Flower basket, the inside of the flower basket is provided with a plurality of limit clips at intervals along the length of the flower basket, and the distance between two adjacent limit clips is 0.4-0.6cm, so that the space between two adjacent solar cell substrates inserted into the flower basket 0.4-0.6cm; the flower basket includes a bottom plate and side plates around the bottom plate, both the bottom plate and the side plates are hollowed out; the tank for storing the detection liquid; the flower basket can be selected to enter and exit the tank.

在检验装置中设置有用于存放检验液的槽体,可以使待检测的太阳电池基片通过花篮进出槽体内,然后浸入槽体内的检验液的液面下一定时间后,再通过花篮与检验液分离,以便于操作人员进行后续的检测操作。The test device is provided with a tank for storing the test liquid, so that the solar cell substrate to be tested can enter and exit the tank through the flower basket, and then be immersed in the liquid surface of the test liquid in the tank for a certain period of time, and then pass through the flower basket and the test liquid. Separation, so that the operator can perform subsequent detection operations.

花篮的底板和侧板均为镂空结构,且花篮中用于固定太阳电池基片的相邻两个限位夹之间的距离为0.4-0.6cm,可以使多个太阳电池基片在通过花篮进入槽体内的检验液的液面以下时,每个太阳电池基片的表面均能够与检验液均匀的接触,提高检验效率和检验质量。The bottom plate and side plates of the flower basket are both hollowed out, and the distance between two adjacent limiting clips used to fix the solar cell substrate in the flower basket is 0.4-0.6cm, so that multiple solar cell substrates can pass through the flower basket When the test liquid entering the tank is below the liquid level, the surface of each solar cell substrate can be in uniform contact with the test liquid, thereby improving the test efficiency and test quality.

结合第二方面,本申请可选的实施方式中,花篮的至少一侧设置有凸出花篮的远离底板的顶部一定高度的提手,用于提拉花篮进出槽体。In conjunction with the second aspect, in an optional embodiment of the present application, at least one side of the flower basket is provided with a handle protruding from the top of the flower basket at a certain height away from the bottom plate, for pulling the flower basket into and out of the tank.

在花篮的一侧设置有提手,以便于操作人员通过提手操作花篮进出槽体内,避免操作人员接触到槽体内的检验液,进而提高检测安全性。A handle is provided on one side of the flower basket, so that the operator can operate the flower basket into and out of the tank through the handle, so as to prevent the operator from contacting the test liquid in the tank, thereby improving the detection safety.

结合第二方面,本申请可选的实施方式中,侧板包括沿花篮的长度方向设置的第一侧板;限位夹包括设置于底板内壁的第一齿条,和设置于第一侧板的第二齿条;第一齿条和第二齿条用于一一对应的限制电池片相邻的两边。In conjunction with the second aspect, in an optional embodiment of the present application, the side plate includes a first side plate arranged along the length direction of the flower basket; The second rack; the first rack and the second rack are used to limit the two adjacent sides of the battery sheet in one-to-one correspondence.

在花篮的底板和侧板处分别设置有齿条,可以将电池片放置在两个齿条相对应的卡齿之间,防止花篮内的多个太阳电池基片相互堆叠。The bottom plate and the side plate of the flower basket are respectively provided with racks, and the cells can be placed between the corresponding teeth of the two racks, so as to prevent multiple solar cell substrates in the flower basket from stacking each other.

附图说明Description of drawings

为了更清楚地说明本申请实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本申请的某些实施例,因此不应被看作是对范围的限定,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他相关的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the accompanying drawings used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, so It should be regarded as a limitation on the scope, and those skilled in the art can also obtain other related drawings based on these drawings without creative work.

图1为太阳电池的结构示意图;Fig. 1 is a structural schematic diagram of a solar cell;

图2A为铜互联技术显影工艺后的太阳电池基片中残胶的第一种分布示意图;2A is a schematic diagram of the first distribution of residual glue in the solar cell substrate after the development process of copper interconnection technology;

图2B为铜互联技术显影工艺后的太阳电池基片中残胶的第二种分布示意图;Fig. 2B is a schematic diagram of the second distribution of residual glue in the solar cell substrate after the development process of copper interconnection technology;

图3为利用本申请提供的检验方法均匀接触检验液后太阳电池基片的第一平面示意图;Fig. 3 is the first schematic plan view of the solar cell substrate after being uniformly contacted with the test liquid by the test method provided by the present application;

图4为本申请示例提供的检验装置的结构示意图;Fig. 4 is a schematic structural view of the inspection device provided by the example of the present application;

图5为本申请实施例1检测后的光学图像。FIG. 5 is an optical image after detection of Example 1 of the present application.

图标:10-检验装置;11-花篮;111-底板;112-侧板;113-限位夹;1131-第一齿条;1132-第二齿条;114-提手;12-槽体;Icons: 10-inspection device; 11-flower basket; 111-bottom plate; 112-side plate; 113-limit clip; 1131-first rack; 1132-second rack; 114-handle;

2-太阳电池;20-太阳电池基片;21-铜种子层;22-感光胶层;23-第一区域;24-第二区域;25-残胶;30-电镀铜栅线。2-solar cell; 20-solar cell substrate; 21-copper seed layer; 22-photosensitive adhesive layer; 23-first area; 24-second area; 25-residual glue; 30-electroplated copper grid line.

具体实施方式Detailed ways

下面将结合附图对本申请技术方案的实施例进行详细的描述。以下实施例仅用于更加清楚地说明本申请的技术方案,因此只作为示例,而不能以此来限制本申请的保护范围。Embodiments of the technical solutions of the present application will be described in detail below in conjunction with the accompanying drawings. The following examples are only used to illustrate the technical solution of the present application more clearly, and therefore are only examples, rather than limiting the protection scope of the present application.

除非另有定义,本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同;本文中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本申请;本申请的说明书及上述附图说明中的术语“包括”和“具有”以及它们的任何变形,意图在于覆盖不排他的包含。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the application; the terms used herein are only for the purpose of describing specific embodiments, and are not intended to To limit the present application; the terms "comprising" and "having" and any variations thereof in the description of the present application and the above descriptions of the drawings are intended to cover a non-exclusive inclusion.

在本申请实施例的描述中,技术术语“第一”“第二”等仅用于区别不同对象,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量、特定顺序或主次关系。在本申请实施例的描述中,“多个”的含义是两个以上,除非另有明确具体的限定。In the description of the embodiments of the present application, technical terms such as "first" and "second" are only used to distinguish different objects, and should not be understood as indicating or implying relative importance or implicitly indicating the number, specificity, or specificity of the indicated technical features. Sequence or primary-secondary relationship. In the description of the embodiments of the present application, "plurality" means two or more, unless otherwise specifically defined.

在本文中提及“实施例”意味着,结合实施例描述的特定特征、结构或特性可以包含在本申请的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例,也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是,本文所描述的实施例可以与其它实施例相结合。Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The occurrences of this phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is understood explicitly and implicitly by those skilled in the art that the embodiments described herein can be combined with other embodiments.

在本申请实施例的描述中,术语“多个”指的是两个以上(包括两个),同理,“多片”指的是两片以上(包括两片)。In the description of the embodiments of the present application, the term "plurality" refers to more than two (including two), and similarly, "multi-piece" refers to more than two (including two).

在本申请实施例的描述中,技术术语“中部”“长度”“宽度”“厚度”“上”“下”“底”“内”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请实施例和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请实施例的限制。In the description of the embodiments of the present application, the orientation or positional relationship indicated by the technical terms "middle", "length", "width", "thickness", "upper", "lower", "bottom" and "inner" are based on the orientation shown in the drawings Or positional relationship is only for the convenience of describing the embodiment of the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a reference to the embodiment of the present application. limits.

在本申请实施例的描述中,除非另有明确的规定和限定,技术术语“连接”“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;也可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本申请实施例中的具体含义。In the description of the embodiments of this application, unless otherwise clearly specified and limited, technical terms such as "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated ; It can also be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal communication of two components or the interaction relationship between two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the embodiments of the present application according to specific situations.

太阳能电池技术中,与传统的P型单晶/多晶太阳能电池相比,硅基异质结太阳能电池因其具有高的转换效率、简单的工艺流程和较低的温度系数而最引人注目。当前,前沿的太阳能光伏技术之一是采用铜互联技术替代传统银浆印刷。In solar cell technology, compared with traditional P-type monocrystalline/polycrystalline solar cells, silicon-based heterojunction solar cells are the most attractive due to their high conversion efficiency, simple process flow and low temperature coefficient . Currently, one of the cutting-edge solar photovoltaic technologies is the use of copper interconnection technology to replace traditional silver paste printing.

铜互联技术之于传统银浆印刷技术除了成本外的另一个最大的优势就是铜互联可以做到细线化。细线化的核心技术之一就是湿膜感光胶的图形转移技术。在铜互联电池技术中,使用湿膜感光胶打印、显影、电镀制作电池片的铜栅线,取代传统的银浆印刷技术。The other biggest advantage of copper interconnection technology over traditional silver paste printing technology is that copper interconnection can be thinned. One of the core technologies of line thinning is the graphic transfer technology of wet film photosensitive adhesive. In the copper interconnection battery technology, wet film photosensitive adhesive printing, development, and electroplating are used to make the copper grid lines of the battery sheet, replacing the traditional silver paste printing technology.

在一些异质结电池的铜互联栅线的制备工艺中:In the preparation process of copper interconnection gate lines of some heterojunction cells:

(1)、在硅基层(硅基层包括:硅层(N型硅衬底正面沉积本征非晶硅层及P型非晶硅薄膜层,反面沉积本征非晶硅层及N型非晶硅薄膜层)和透明导电氧化物薄膜层)的表面沉积形成一层铜种子层21,然后在铜种子层21上形成感光胶层22覆盖铜种子层21。以下,将铜种子层21的颜色命名为第一颜色。(1), on the silicon base layer (the silicon base layer includes: a silicon layer (N-type silicon substrate) deposits an intrinsic amorphous silicon layer and a P-type amorphous silicon film layer on the front side, and deposits an intrinsic amorphous silicon layer and an N-type amorphous silicon layer on the reverse side. Silicon thin film layer) and transparent conductive oxide thin film layer) are deposited on the surface to form a copper seed layer 21, and then a photosensitive adhesive layer 22 is formed on the copper seed layer 21 to cover the copper seed layer 21. Hereinafter, the color of the copper seed layer 21 is named as the first color.

(2)、然后对步骤(1)中的感光胶层22进行曝光、显影,去除不需要的感光胶,形成第一区域23。图3中,为了便于展示,将非第一区域23的部分,命名为第二区域24。然后在第一区域23进行铜电镀,形成电镀铜栅线30。(2), then exposing and developing the photosensitive adhesive layer 22 in step (1), removing unnecessary photosensitive adhesive, and forming the first region 23 . In FIG. 3 , for the sake of illustration, the part that is not the first area 23 is named as the second area 24 . Copper electroplating is then performed on the first region 23 to form electroplated copper grid lines 30 .

太阳电池2的结构示意图如图1所示。太阳电池2包括太阳电池基片20和电镀铜栅线30。A schematic structural diagram of the solar cell 2 is shown in FIG. 1 . The solar cell 2 includes a solar cell substrate 20 and an electroplated copper grid wire 30 .

正常情况下,经过曝光和显影后,会形成槽结构并使第一区域23处的铜种子层22露出来,以便于在铜种子层22上电镀使该区域的铜层加厚形成栅线。但是,在曝光显影后,往往会出现由于显影不净在太阳电池基片20的第一区域23处形成残胶25的情况。显影不净形成残胶25的太阳电池基片20的分布示意图如图2A和图2B所示。其中,第二区域24为未去除的感光胶层22的区域,第一区域23为去除部分感光胶层22后形成的区域。Normally, after exposure and development, a groove structure will be formed and the copper seed layer 22 at the first region 23 will be exposed, so that electroplating on the copper seed layer 22 will thicken the copper layer in this region to form a gate line. However, after the exposure and development, the residual glue 25 will often be formed on the first region 23 of the solar cell substrate 20 due to unclean development. The schematic diagrams of the distribution of the solar cell substrate 20 where the residual glue 25 is formed due to dirty development are shown in FIG. 2A and FIG. 2B . Wherein, the second area 24 is an area where the photosensitive adhesive layer 22 has not been removed, and the first area 23 is an area formed after removing part of the photosensitive adhesive layer 22 .

其中,图2A表示在第一区域23处全覆盖一层残胶25;图2B表示在第一区域23处部分覆盖一层残胶25。Wherein, FIG. 2A shows that the first region 23 is fully covered with a layer of residual glue 25 ; FIG. 2B shows that the first region 23 is partially covered with a layer of residual glue 25 .

残胶25为无色透明的有机高分子材料,发生显影残留时,无法通过肉眼观察到。利用肉眼直接观察第一区域23时,会透过残胶25看到残胶25之下的铜种子层21。残胶25的存在会导致后续电镀获得的电镀铜栅线30发生断栅等缺陷,严重影响太阳电池2的使用。The residual glue 25 is a colorless and transparent organic polymer material, and it cannot be observed by the naked eye when a developing residue occurs. When the first region 23 is directly observed with the naked eye, the copper seed layer 21 under the residual glue 25 can be seen through the residual glue 25 . The existence of the residual glue 25 will cause defects such as broken grids in the electroplated copper grid lines 30 obtained by subsequent electroplating, which will seriously affect the use of the solar cell 2 .

因此,在利用铜互联技术制备太阳电池2时,往往会对太阳电池基片20进行检验。Therefore, the solar cell substrate 20 is often inspected when the solar cell 2 is prepared using the copper interconnection technology.

在现有技术中,检验方式通常包括两种:In the prior art, inspection methods generally include two types:

一是,在电镀形成铜栅线之后,对电镀后的铜栅线进行检查,看是否发生断栅等情况。但是在电镀完成后查看栅线是否发生断栅的情况,存在严重的滞后性,不能及时反映曝光显影工序是否会发生显影不净。One is, after the copper grid lines are formed by electroplating, the electroplated copper grid lines are inspected to see whether there is a broken grid or the like. However, after the electroplating is completed, there is a serious hysteresis to check whether the grid line is broken, and it cannot reflect in time whether the exposure and development process will be dirty.

二是,为了解决检验的及时性,定期在显影后取片,然后借助EDX(EnergyDispersive X-Ray Spectroscopy,能量色散X射线光谱仪)对显影后的黄色区域进行面扫描。如果能扫描到C元素,则证明存在显影不净,以反馈显影工序对显影参数进行调整,进而避免显影不净的产生。但是,利用EDX进行元素扫描,需要切片制样,制样要求高、时间长,并且EDX设备费用高,需要专业的操作人员进行检验。Second, in order to solve the timeliness of inspection, take the film regularly after development, and then use EDX (Energy Dispersive X-Ray Spectroscopy, energy dispersive X-ray spectrometer) to scan the yellow area after development. If the C element can be scanned, it proves that the development is not clean, and the development parameters are adjusted by feedback to the development process, so as to avoid the development of the unclean. However, using EDX for elemental scanning requires sliced samples, which requires high requirements and a long time for sample preparation, and the cost of EDX equipment is high, requiring professional operators for inspection.

基于此,本申请提供一种太阳电池基片20的检验方法,利用检验液均匀的接触太阳电池基片20经过曝光显影后形成的第一区域23。在检验液的作用下,第一区域23没有被残胶25覆盖的部分位置处的金属铜能够与检验液发生化学反应,呈现出与铜金属的第一颜色不同的第二颜色。因此,可以通过观察第一区域23的颜色判断是否有残胶25的存在。Based on this, the present application provides a method for inspecting the solar cell substrate 20 , using the inspection solution to uniformly contact the first region 23 formed after exposure and development of the solar cell substrate 20 . Under the action of the test liquid, the metal copper in the part of the first region 23 not covered by the residual glue 25 can chemically react with the test liquid to present a second color different from the first color of the copper metal. Therefore, it can be judged whether there is residual glue 25 by observing the color of the first region 23 .

若第一区域23的部分位置处附着有残胶25,则被残胶25覆盖的部分铜金属由于残胶25的阻挡作用不会与检验液发生反应,使得该部分铜金属被保留。由于残胶25具有透明性,在经过检验药水的处理后,被残胶25覆盖的部分继续呈现铜金属的第一颜色,没有被残胶25覆盖的部分呈现出与第一颜色不同的第二颜色。If the adhesive residue 25 adheres to some positions of the first region 23 , the part of the copper metal covered by the adhesive residue 25 will not react with the test solution due to the blocking effect of the adhesive residue 25 , so that this part of the copper metal will be retained. Due to the transparency of the residual glue 25, after being treated with the inspection potion, the part covered by the residual glue 25 continues to present the first color of copper metal, and the part not covered by the residual glue 25 presents a second color different from the first color. color.

太阳电池基片20的检验方法包括:The inspection method of solar cell substrate 20 comprises:

S1、使检验液覆盖于第一区域23。S1. Cover the first region 23 with the test solution.

请继续参阅图3,当第一区域23没有残胶25时,将检验液均匀的覆盖于第一区域23之后,第一区域23处的铜金属直接与检验液接触,并与检验液发生反应,第一区域23全部呈现出与铜金属的第一颜色不同的第二颜色。Please continue to refer to Fig. 3, when the first area 23 has no residual glue 25, after the test liquid is evenly covered on the first area 23, the copper metal at the first area 23 is directly in contact with the test liquid and reacts with the test liquid , the first region 23 entirely exhibits a second color different from the first color of the copper metal.

图3中,为了便于展示,白色条纹为第一颜色,黑色条纹为第二颜色。In FIG. 3 , for ease of presentation, the white stripes are the first color, and the black stripes are the second color.

当第一区域23的部分位置覆盖有残胶25时,将检验液均匀覆盖于第一区域23之后,由于残胶25的阻挡作用,检验液不能直接与被残胶25覆盖的部分铜金属接触,导致位于残胶25之下的部分铜金属不能与检验液反应,而继续呈现出第一颜色。而未被残胶25覆盖的部分铜金属在检验液的直接接触下,会与检验液发生反应,呈现与铜金属的第一颜色不同的第二颜色。即,第一区域23同时出现第一颜色和第二颜色。When part of the first area 23 is covered with residual glue 25, after the test liquid is uniformly covered on the first area 23, due to the blocking effect of the residual glue 25, the test liquid cannot directly contact the copper metal covered by the residual glue 25 , resulting in a part of the copper metal located under the residual glue 25 not being able to react with the test solution, and continuing to present the first color. The part of the copper metal that is not covered by the residual glue 25 will react with the test liquid under direct contact with the test liquid, showing a second color different from the first color of the copper metal. That is, the first region 23 simultaneously appears in the first color and the second color.

当第一区域23全覆盖有残胶25时,将检验液均匀覆盖于第一区域23之后,由于残胶25的阻挡作用,检验液不能直接与铜金属接触,第一区域23仍然呈现出第一颜色。When the first area 23 is fully covered with the residual glue 25, after the test solution is uniformly covered on the first area 23, due to the blocking effect of the residual glue 25, the test solution cannot directly contact the copper metal, and the first area 23 still presents the first area 23. one color.

本申请不限制检验液的具体类型,相关人员可以在保证检验液能够与接触到的铜金属反应呈现出与铜金属不同颜色的第二颜色,且不与接触到的残胶25发生反应的情况下,根据需要进行相应的选择。This application does not limit the specific type of the test solution, and relevant personnel can ensure that the test solution can react with the copper metal in contact to present a second color different from the copper metal, and does not react with the residual glue 25 in contact. Next, make corresponding selections as required.

在一个可能的实施例中,检验液包括亚锡盐和铜离子络合剂,且检验液的pH不大于1。In a possible embodiment, the test solution includes stannous salt and copper ion complexing agent, and the pH of the test solution is not greater than 1.

亚锡盐中的亚锡离子同时在强酸性环境下和铜离子络合剂的作用,能够与未被残胶25覆盖的铜金属发生置换反应,在该部分的铜金属的表面析出金属锡,呈现金属锡的乳白色。即,利用本示例提供的检验液检验是否存在显影不净时,第二颜色为金属锡的乳白色。The stannous ions in the stannous salt can react with the copper metal that is not covered by the residual glue 25 under the action of the copper ion complexing agent in a strongly acidic environment at the same time, and metal tin is precipitated on the surface of the copper metal of this part, It has the milky white color of metallic tin. That is, when using the test solution provided in this example to test whether there is a development defect, the second color is the milky white color of metallic tin.

由于锡的金属活动顺序位于铜的金属活动顺序之前,在常规的热力学条件下,金属活动性较强的锡可以将金属活动性较弱的铜从其盐溶液中置换出来,而金属活动性较弱的铜则不可以将金属活动性较强的锡从其盐溶液中置换出来。但是,本示例提供的检验液为强酸性溶液,且检验液中包括铜离子的络合剂。铜离子络合剂能够与其接触到的第一区域23处的Cu2+、Cu+形成稳定的络离子,改变反应的电极电位,进而使亚锡离子能够发生还原反应而析出金属锡。Since the metal activity sequence of tin is located before that of copper, under conventional thermodynamic conditions, tin with stronger metal activity can displace copper with weaker metal activity from its salt solution, while the metal with less activity Weak copper cannot displace the more reactive tin from its salt solution. However, the test solution provided in this example is a strongly acidic solution, and the test solution includes a copper ion complexing agent. The copper ion complexing agent can form stable complex ions with the Cu 2+ and Cu + in the first region 23 that it contacts, and change the electrode potential of the reaction, thereby allowing stannous ions to undergo a reduction reaction to precipitate metallic tin.

总反应式如下所示:The overall reaction formula is as follows:

2Cu+Sn2+→2Cu++Sn2Cu+Sn 2+ → 2Cu + +Sn

本申请不限制铜离子络合剂的具体类型,在一些可能的实施方式中,铜离子络合剂选自硫脲或柠檬酸中的至少一种。The present application does not limit the specific type of the copper ion complexing agent. In some possible implementations, the copper ion complexing agent is selected from at least one of thiourea or citric acid.

示例性的,铜离子络合剂为硫脲(CH4N2S)。加入硫脲后,能够形成[Cu(NH2CSNH2)4]2+、[Cu(NH2CSNH2)4]+等络离子,改变反应的电极电位。Exemplarily, the copper ion complexing agent is thiourea (CH 4 N 2 S). After adding thiourea, complex ions such as [Cu(NH 2 CSNH 2 ) 4 ] 2+ , [Cu(NH 2 CSNH 2 ) 4 ] + can be formed to change the electrode potential of the reaction.

进一步的,亚锡盐可以为(CH3SO3)2Sn。Further, the stannous salt may be (CH 3 SO 3 ) 2 Sn.

或者,亚锡盐可以为卤化亚锡盐或者甲基磺酸亚锡盐。Alternatively, the stannous salt may be a stannous halide or stannous methanesulfonate.

进一步的,本申请不限制检验液中铜离子络合剂和亚锡盐的质量比,在一些可能的实施方式中,硫脲与(CH3SO3)2Sn的质量比为2-4:1-2。Further, this application does not limit the mass ratio of copper ion complexing agent and stannous salt in the test solution. In some possible implementations, the mass ratio of thiourea to (CH 3 SO 3 ) 2 Sn is 2-4: 1-2.

示例性的,检验液包括10-20g/L的硫脲和5-10g/L的(CH3SO3)2Sn。Exemplarily, the test solution includes 10-20 g/L thiourea and 5-10 g/L (CH 3 SO3 ) 2 Sn.

示例性的,检验液包括10g/L的硫脲和5g/L的(CH3SO3)2Sn。Exemplarily, the test solution includes 10 g/L of thiourea and 5 g/L of (CH 3 SO 3 ) 2 Sn.

示例性的,检验液包括20g/L的硫脲和5g/L的(CH3SO3)2Sn。Exemplarily, the test solution includes 20g/L thiourea and 5g/L (CH 3 SO3 ) 2 Sn.

或者,检验液可以包括强酸性溶液,如浓硫酸、浓盐酸或浓硝酸,以腐蚀或者氧化未被残胶25覆盖的铜金属,呈现出与金属铜不同的第二颜色。但是强酸溶液的腐蚀过程较慢,检测效率较低。Alternatively, the testing solution may include a strong acidic solution, such as concentrated sulfuric acid, concentrated hydrochloric acid or concentrated nitric acid, to corrode or oxidize the copper metal not covered by the residual glue 25 to present a second color different from that of copper. However, the corrosion process of strong acid solution is slow and the detection efficiency is low.

或者,可以根据金属活动性的强弱,在检验液中加入比铜的金属活动性更弱的金属离子盐,例如检验液可以包括银离子盐溶液或铂离子盐溶液。Or, according to the activity of the metal, a metal ion salt with a lower metal activity than copper can be added to the test solution. For example, the test solution can include a silver ion salt solution or a platinum ion salt solution.

进一步的,本申请不限制如何使检验液覆盖于第一区域23,在一些可能的实施方式中,使检验液覆盖于第一区域23的方法,包括:Further, the present application does not limit how to make the test liquid cover the first area 23. In some possible implementations, the method for making the test liquid cover the first area 23 includes:

将太阳电池基片20浸泡于检验液中预设时间。Soak the solar cell substrate 20 in the test solution for a preset time.

进一步的,可以同时将3-5片太阳电池基片20浸泡于检验液中,对多片太阳电池基片20进行检验,可以减小检验的误差。Further, 3-5 pieces of solar cell substrates 20 can be soaked in the inspection solution at the same time, and multiple solar cell substrates 20 can be inspected, which can reduce inspection errors.

可选的,可以同时将多片太阳电池基片20同时浸泡于利用本示例提供的含有铜离子络合剂和亚锡盐的酸性的检验液中5-10s。Optionally, multiple pieces of solar cell substrates 20 may be simultaneously immersed in the acidic test solution provided in this example containing copper ion complexing agent and stannous salt for 5-10 s.

或者,可以利用滴管等化学试管,将足量的检验液滴入太阳电池基片20的第一区域23处,使检验液完全覆盖第一区域23。然后,一定时间后利用吸管或者洗吸水棉等将第一区域23处的检验液吸走,并进行快速吹干,然后进行后续观察。Alternatively, a chemical test tube such as a dropper can be used to drop a sufficient amount of test liquid into the first region 23 of the solar cell substrate 20 so that the test liquid completely covers the first region 23 . Then, after a certain period of time, the test solution in the first area 23 is sucked away with a straw or absorbent cotton, etc., and dried quickly, and then followed up for observation.

进一步的,为了便于同时对多片太阳电池基片20进行检验,本申请的示例还提供一种检验装置10。Further, in order to facilitate simultaneous inspection of multiple solar cell substrates 20 , examples of the present application also provide an inspection device 10 .

请参阅图4,检验装置10包括:Referring to Fig. 4, the testing device 10 includes:

花篮11,花篮11的内部沿花篮11的长度方向间隔设置多个限位夹113,相邻两个限位夹之间的距离为0.4-0.6cm,以使插入花篮11内的相邻两个太阳电池基片20间隔0.4-0.6cm;花篮11包括底板111和围绕底板四周的侧板112,底板111和侧板112均为镂空结构。The flower basket 11, the inside of the flower basket 11 is provided with a plurality of limit clamps 113 at intervals along the length direction of the flower basket 11, and the distance between two adjacent limit clamps is 0.4-0.6cm, so that two adjacent limit clamps inserted into the flower basket 11 The solar cell substrates 20 are separated by 0.4-0.6 cm; the flower basket 11 includes a bottom plate 111 and side plates 112 surrounding the bottom plate, both of which are hollow structures.

用于存放检验液的槽体12;花篮11可选择的进出槽体12。The tank body 12 for storing the test liquid; the flower basket 11 can optionally enter and exit the tank body 12 .

由于花篮11的底板111和侧板112均为镂空结构,槽体12内的检验液能够流进花篮11的内部。并且,设置于花篮11内部的相邻两个限位夹113之间的间隔距离为0.4-0.6cm,则在将多个太阳电池基片20放置于花篮11内时,相邻两个太阳电池基片20能够间隔0.4-0.6cm,使得多个太阳电池基片20能够均匀的接触检验液。Since the bottom plate 111 and the side plate 112 of the flower basket 11 are both hollow structures, the test liquid in the tank body 12 can flow into the inside of the flower basket 11 . Moreover, the distance between two adjacent limiting clips 113 arranged inside the flower basket 11 is 0.4-0.6 cm, so when a plurality of solar cell substrates 20 are placed in the flower basket 11, two adjacent solar cells The substrates 20 can be separated by 0.4-0.6 cm, so that multiple solar cell substrates 20 can evenly contact the test solution.

本申请不限制花篮11的具体设置形式,相关人员可以根据需要进行相应的调整。The present application does not limit the specific setting form of the flower basket 11, and relevant personnel can make corresponding adjustments as required.

示例性的,花篮11内部的腔室为立方形,以适应矩形的太阳电池基片20的放置。Exemplarily, the cavity inside the flower basket 11 is in the shape of a cube, so as to accommodate the placement of the rectangular solar cell substrate 20 .

进一步的,花篮11包括矩形的底板111,以及围绕底板111的四个矩形的侧板112。底板111和侧板112均间隔设置有多个通孔,以增加检验液的流动性。或者,可以在底板111和侧板112的中部开设一个矩形的通孔,进一步增加检验液流进花篮11内的流动性。Further, the flower basket 11 includes a rectangular bottom plate 111 and four rectangular side plates 112 surrounding the bottom plate 111 . Both the bottom plate 111 and the side plate 112 are provided with a plurality of through holes at intervals to increase the fluidity of the test liquid. Alternatively, a rectangular through hole can be opened in the middle of the bottom plate 111 and the side plate 112 to further increase the fluidity of the test liquid flowing into the flower basket 11 .

本申请不限制限位夹113的具体设置形式,在一些可能的实施方式中,限位夹113包括设置于底板111内壁的第一齿条1131,和设置于其中一个侧板112的第二齿条1132;第一齿条1131和第二齿条1132用于一一对应的限制太阳电池基片20相邻的两边。The present application does not limit the specific arrangement of the limiting clip 113. In some possible implementations, the limiting clip 113 includes a first rack 1131 disposed on the inner wall of the bottom plate 111, and a second tooth disposed on one of the side plates 112. The bar 1132 ; the first rack 1131 and the second rack 1132 are used to limit the two adjacent sides of the solar cell substrate 20 in one-to-one correspondence.

进一步的,可以在与设置有第二齿条1132的其中一个侧板112相对的另一个侧板112处设置第三齿条。三个齿条中的相互对应的卡齿用于共同限制太阳电池基片20的三条边部。Further, a third rack can be provided on another side plate 112 opposite to one of the side plates 112 provided with the second rack 1132 . The corresponding teeth of the three racks are used to jointly limit the three sides of the solar cell substrate 20 .

进一步的,为了便于操作人员提拉花篮11,避免操作人员接触到槽体12内的检验液,在一种可能的实施方式中,可以在花篮11的其中一个或多个侧板112处设置支出侧板的提手114。Further, in order to facilitate the operator to lift the flower basket 11 and prevent the operator from coming into contact with the test liquid in the tank body 12, in a possible implementation manner, one or more side plates 112 of the flower basket 11 can be provided with expenditure The handle 114 of the side panel.

本申请不限制槽体12的具体设置形式,相关人员可以根据需要进行相应的调整。The present application does not limit the specific arrangement form of the tank body 12, and relevant personnel can make corresponding adjustments as required.

在一些可能的实施方式中,可以在槽体12内设置搅拌件,可以对检验液进行适当搅拌,分散均匀。In some possible implementations, a stirring member may be provided in the tank body 12 to properly stir the test solution and disperse it evenly.

进一步的,可以在槽体12处设置加热件,可以对槽体12内的检验液进行适当加热,提高检验液与金属铜的反应速率。Further, a heating element can be provided at the tank body 12 to properly heat the testing liquid in the tank body 12 and increase the reaction rate between the testing liquid and metallic copper.

进一步的,为了便于后续观察,本示例提供的检验装置10还包括烘干件和显微镜。烘干件用于将浸泡后的电池片烘干。Further, for the convenience of subsequent observation, the inspection device 10 provided in this example also includes a drying element and a microscope. The drying part is used for drying the soaked battery slices.

S2、观察铜第一区域23的颜色,根据第一区域23的颜色是否变化,判断在第一区域23是否存在残胶。S2. Observe the color of the first area 23 of copper, and judge whether there is glue residue in the first area 23 according to whether the color of the first area 23 changes.

若第一区域23的全部颜色为第二颜色,表示第一区域23没有残胶25;若第一区域23保留有第一颜色,表示第一区域23有残胶25。If the entire color of the first area 23 is the second color, it means that the first area 23 has no residual glue 25 ; if the first color remains in the first area 23 , it means that the first area 23 has residual glue 25 .

其中,若第一区域23的全部颜色为第二颜色是指,涂布有检验液的待检测区域的颜色全部为第二颜色。例如,待检测区域为四边形,在检验时,将检验液完全覆盖该四边形。然后,观察该四边形区域内的颜色。若该四边形区域内全部为第二颜色,表明该四边形的待检测区域内没有残胶25。Wherein, if all the colors of the first region 23 are the second color, it means that all the colors of the region to be detected coated with the test liquid are the second color. For example, the region to be detected is a quadrangle, and the test liquid completely covers the quadrangle during the test. Then, observe the colors within the area of the quadrilateral. If all of the quadrangular area is the second color, it means that there is no residual glue 25 in the quadrangular area to be detected.

同样,若第一区域23的部分位置为第二颜色,是指,待检测的四边形区域内出现第二颜色。该四边形区域内的同时出现第一颜色和第二颜色,表明有残胶25。Similarly, if part of the first area 23 is the second color, it means that the second color appears in the quadrilateral area to be detected. The simultaneous appearance of the first color and the second color in the quadrangular area indicates that there is residual glue 25 .

若观察到的第一区域23全部为金属铜的第一颜色,表明在第一区域23全覆盖有一层残胶25。If the observed first region 23 is entirely of the first color of metallic copper, it indicates that the first region 23 is completely covered with a layer of residual glue 25 .

若观察到第一区域23全部为第二颜色,例如全部为金属锡的乳白色,表明在第一区域23没有残胶25。If it is observed that the first area 23 is all of the second color, for example, all of it is milky white of metal tin, it means that there is no glue residue 25 in the first area 23 .

若观察到第一区域23既有金属铜的第一颜色又有金属锡的第二颜色,表明在第一区域23的部分位置有残胶25存在。If it is observed that the first region 23 has both the first color of metallic copper and the second color of metallic tin, it indicates that there is adhesive residue 25 in part of the first region 23 .

进一步的,本申请不限制如何观察第一区域23的颜色,在一些可能的实施方式中,观察第一区域23的颜色的方法,包括:Further, the present application does not limit how to observe the color of the first region 23. In some possible implementations, the method of observing the color of the first region 23 includes:

利用工业显微镜或者放大镜,观察第一区域23的颜色。Use an industrial microscope or a magnifying glass to observe the color of the first region 23 .

或者,操作操作人员可以直接对进行肉眼观察。Alternatively, the operating operator can perform direct visual inspections.

为使本申请实施例的目的、技术方案和优点更加清楚,下面将对本申请实施例中的技术方案进行清楚、完整地描述。实施例中未注明具体条件者,按照常规条件或制造商建议的条件进行。所用试剂或仪器未注明生产厂商者,均为可以通过市售购买获得的常规产品。In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below. Those who do not indicate the specific conditions in the examples are carried out according to the conventional conditions or the conditions suggested by the manufacturer. The reagents or instruments used were not indicated by the manufacturer, and they were all conventional products that could be purchased from the market.

实施例1Example 1

实施例1提供一种太阳电池基片20的检验方法,包括:Embodiment 1 provides a kind of inspection method of solar cell substrate 20, comprising:

(1)将曝光显影后的太阳电池基片20浸泡于检验液中5s,然后取出太阳电池基片20,吹干;其中,检验液为10g/L的(CH3SO3)2Sn和5g/L的CH4N2S,检验液的pH为1。(1) Soak the exposed and developed solar cell substrate 20 in the test solution for 5 seconds, then take out the solar cell substrate 20 and dry it; wherein, the test solution is 10 g/L (CH 3 SO 3 ) 2 Sn and 5 g /L of CH 4 N 2 S, the pH of the test solution is 1.

(2)将步骤(1)处理后的太阳电池基片20放置于光学显微镜的载物台上,观察太阳电池基片20的第一区域23的颜色。太阳电池基片20的光学图像如图5所示,其中,光学图像从上之下可以分为三层,上下层为第二区域24,中间层为第一区域23。(2) Place the solar cell substrate 20 treated in step (1) on the stage of an optical microscope, and observe the color of the first region 23 of the solar cell substrate 20 . The optical image of the solar cell substrate 20 is shown in FIG. 5 , wherein the optical image can be divided into three layers from top to bottom, the upper and lower layers are the second region 24 , and the middle layer is the first region 23 .

图5中,黑色线框内附着有残胶25表现出铜种子层21的第一颜色(由于透明的残胶25的存在,所以拍摄到的光学图像相比于生长锡金属的表面而言较模糊),表明在检测区域处部分有残胶25。In Fig. 5, the first color of the copper seed layer 21 is shown in the black line frame with residual glue 25 attached (due to the existence of the transparent residual glue 25, the optical image taken is relatively darker than the surface of the growth tin metal. blurred), indicating that there is partially residual glue 25 at the detection area.

以上所述仅为本申请的优选实施例而已,并不用于限制本申请,对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的保护范围之内。The above descriptions are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, there may be various modifications and changes in the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included within the protection scope of this application.

Claims (10)

1.一种太阳电池基片的检验方法,所述太阳电池基片包括叠层设置的铜种子层和感光胶层;对所述太阳电池基片的部分区域进行去除所述感光胶层处理,形成第一区域;所述检验方法用于检验所述第一区域是否存在透明的残胶;其特征在于,所述检验方法包括:1. An inspection method for a solar cell substrate, the solar cell substrate comprising a copper seed layer and a photosensitive adhesive layer laminated; the partial region of the solar cell substrate is processed to remove the photosensitive adhesive layer, Forming a first area; the inspection method is used to inspect whether there is transparent residual glue in the first area; it is characterized in that the inspection method includes: 使检验液覆盖于所述第一区域,观察所述第一区域的颜色;其中,所述检验液含有能够与铜反应并使所述铜的颜色变成第二颜色的物质;所述检验液覆盖于所述第一区域之前,所述第一区域为第一颜色;Cover the first region with the test solution, and observe the color of the first region; wherein, the test solution contains a substance that can react with copper and change the color of the copper into a second color; the test solution Covering before the first area, the first area is a first color; 根据所述第一区域的颜色是否全部变化判断在所述第一区域是否存在所述残胶:若所述第一区域保留有所述第一颜色,表示所述第一区域有所述残胶。Judging whether there is the residual glue in the first region according to whether the color of the first region changes completely: if the first color remains in the first region, it means that the first region has the residual glue . 2.根据权利要求1所述的太阳电池基片的检验方法,其特征在于,所述第一区域用于电镀加厚形成电镀铜栅线。2 . The inspection method of a solar cell substrate according to claim 1 , wherein the first region is used for electroplating and thickening to form electroplated copper grid lines. 3 . 3.根据权利要求1所述的太阳电池基片的检验方法,其特征在于,若所述第一区域的全部颜色为第二颜色,表示所述第一区域没有所述残胶;若所述第一区域的全部颜色为所述第一颜色,表示所述第一区域全覆盖有所述残胶;若所述第一区域的颜色包括所述第一颜色和所述第二颜色,表示所述第一区域的部分覆盖有所述残胶。3. The inspection method of a solar cell substrate according to claim 1, wherein if all the colors of the first region are the second color, it means that the first region does not have the residual glue; All the colors of the first area are the first color, which means that the first area is completely covered with the residual glue; if the color of the first area includes the first color and the second color, it means that the first area is completely covered with the residual glue; Part of the first region is covered with the residual glue. 4.根据权利要求1所述的太阳电池基片的检验方法,其特征在于,所述检验液包括亚锡盐和铜离子络合剂,所述检验液的pH不大于1;4. The inspection method of a solar cell substrate according to claim 1, wherein the inspection solution comprises a stannous salt and a copper ion complexing agent, and the pH of the inspection solution is not more than 1; 可选的,所述铜离子络合剂选自硫脲和柠檬酸中的至少一者。Optionally, the copper ion complexing agent is selected from at least one of thiourea and citric acid. 5.根据权利要求4所述的太阳电池基片的检验方法,其特征在于,所述铜离子络合剂为所述硫脲,所述亚锡盐为(CH3SO3)2Sn。5 . The inspection method for solar cell substrates according to claim 4 , wherein the copper ion complexing agent is the thiourea, and the stannous salt is (CH 3 SO 3 ) 2 Sn. 6.根据权利要求5所述的太阳电池基片的检验方法,其特征在于,所述铜离子络合剂和所述亚锡盐的质量比为2-4:1-2;6. the inspection method of solar cell substrate according to claim 5, is characterized in that, the mass ratio of described copper ion complexing agent and described stannous salt is 2-4:1-2; 可选的,所述检验液包括10-20g/L的所述硫脲和5-10g/L的所述(CH3SO3)2Sn。Optionally, the test solution includes 10-20 g/L of the thiourea and 5-10 g/L of the (CH 3 SO 3 ) 2 Sn. 7.根据权利要求1-6任一项所述的太阳电池基片的检验方法,其特征在于,所述使检验液覆盖所述第一区域的方法,包括:7. The inspection method for a solar cell substrate according to any one of claims 1-6, wherein the method for covering the first region with the inspection liquid comprises: 将所述太阳电池基片浸泡于所述检验液中预设时间;soaking the solar cell substrate in the test solution for a preset time; 可选的,同时将3-5片所述太阳电池基片浸泡于所述检验液中;Optionally, soak 3-5 pieces of the solar cell substrate in the test solution at the same time; 可选的,所述预设时间为5-15s;Optionally, the preset time is 5-15s; 和/或,所述观察所述第一区域的颜色的方法,包括:And/or, the method for observing the color of the first region includes: 利用显微镜,观察所述第一区域的颜色。Using a microscope, observe the color of the first region. 8.一种用于权利要求1-7任一项所述的太阳电池基片的检验方法的检验装置,其特征在于,所述检验装置包括:8. An inspection device for the inspection method of a solar cell substrate according to any one of claims 1-7, wherein the inspection device comprises: 花篮,所述花篮的内部沿所述花篮的长度方向间隔设置多个限位夹,相邻两个所述限位夹之间的距离为0.4-0.6cm,以使插入所述花篮内的相邻两个太阳电池基片间隔0.4-0.6cm;所述花篮包括底板和围绕所述底板四周的侧板,所述底板和所述侧板均为镂空结构;A flower basket, the inside of the flower basket is provided with a plurality of limit clips at intervals along the length direction of the flower basket, and the distance between two adjacent limit clips is 0.4-0.6cm, so that the corresponding ones inserted into the flower basket The distance between two solar cell substrates is 0.4-0.6cm; the flower basket includes a bottom plate and side plates surrounding the bottom plate, and the bottom plate and the side plates are hollow structures; 用于存放所述检验液的槽体;所述花篮可选择的进出所述槽体。A trough for storing the test solution; the flower basket can optionally enter and exit the trough. 9.根据权利要求8所述的检验装置,其特征在于,所述花篮的至少一侧设置有凸出所述花篮的远离所述底板的顶部预设高度的提手,用于提拉所述花篮进出所述槽体。9. The inspection device according to claim 8, characterized in that, at least one side of the flower basket is provided with a handle protruding from the top of the flower basket at a predetermined height away from the bottom plate for pulling the flower basket. The flower basket enters and exits the tank body. 10.根据权利要求8所述的检验装置,其特征在于,所述侧板包括沿所述花篮的长度方向设置的第一侧板;所述限位夹包括设置于所述底板内壁的第一齿条,和设置于所述第一侧板的第二齿条;所述第一齿条和所述第二齿条用于一一对应的限制所述太阳电池基片相邻的两边。10. The inspection device according to claim 8, wherein the side plate includes a first side plate arranged along the length direction of the flower basket; the limit clip includes a first side plate arranged on the inner wall of the bottom plate A rack, and a second rack arranged on the first side plate; the first rack and the second rack are used to limit adjacent two sides of the solar cell substrate in one-to-one correspondence.
CN202211528038.7A 2022-11-30 2022-11-30 A solar cell substrate inspection method and inspection device Pending CN115753751A (en)

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