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CN115726018A - Electrodeposition system - Google Patents

Electrodeposition system Download PDF

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Publication number
CN115726018A
CN115726018A CN202211511230.5A CN202211511230A CN115726018A CN 115726018 A CN115726018 A CN 115726018A CN 202211511230 A CN202211511230 A CN 202211511230A CN 115726018 A CN115726018 A CN 115726018A
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electrodeposition
cathode
container
support
electrodeposition liquid
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沈亦佳
罗志福
梁积新
吴宇轩
于宁文
葛丁
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China Institute of Atomic of Energy
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China Institute of Atomic of Energy
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Abstract

Embodiments of the present invention provide an electrodeposition system. The electrodeposition system includes: the electrodeposition liquid container is provided with an upper opening and is used for containing electrodeposition liquid; the heating container is arranged in the heating container, a heating medium is contained in the heating container, and the heating container is arranged to heat the heating medium so as to heat the electrodeposition liquid; the anode support is arranged on the electrodeposition liquid container and partially covers the opening of the electrodeposition liquid container, and is used for supporting an anode of the electrodeposition system; at least one cathode supporting device is arranged above the electrodeposition liquid container and used for supporting the cathodes, and the cathode supporting device is arranged to control the cathodes to rotate. According to the electrodeposition system provided by the embodiment of the invention, the cathode supporting device is used for controlling the plurality of cathodes to rotate, and the plurality of cathodes rotate to increase the disturbance of the electrodeposition liquid, so that the concentration distribution in the electrodeposition liquid is more uniform.

Description

电沉积系统Electrodeposition system

技术领域technical field

本发明的实施例涉及电沉积技术领域,具体涉及一种电沉积系统。Embodiments of the present invention relate to the technical field of electrodeposition, and in particular to an electrodeposition system.

背景技术Background technique

钼-99(Mo-99)是我国临床上使用最广泛的医用放射性同位素。相关技术中,在获取钼-99时,可以先通过电沉积技术,在合金管表面电沉积二氧化铀镀层,表面覆盖有二氧化铀镀层的合金管可以作为被辐照的靶件,靶件在辐照作用下,靶件的二氧化铀镀层中的铀裂变生成钼-99,后续再通过溶解靶件、化学分离等程序最终得到钼-99。Molybdenum-99 (Mo-99) is the most widely used medical radioisotope clinically in my country. In related technologies, when molybdenum-99 is obtained, uranium dioxide coating can be electrodeposited on the surface of the alloy tube through electrodeposition technology, and the alloy tube covered with uranium dioxide coating can be used as an irradiated target. Under the action of irradiation, the uranium in the uranium dioxide coating of the target is fissioned to form molybdenum-99, and then the molybdenum-99 is finally obtained through procedures such as dissolving the target and chemical separation.

但是,在合金管表面电沉积二氧化铀镀层时,在合金管-溶液界面处消耗沉积离子,使得电沉积液可能会浓度不均匀,导致出现浓差极化现象,影响电沉积的效率。However, when the uranium dioxide coating is electrodeposited on the surface of the alloy tube, the deposition ions are consumed at the interface of the alloy tube and the solution, so that the concentration of the electrodeposition solution may be uneven, resulting in concentration polarization and affecting the efficiency of electrodeposition.

发明内容Contents of the invention

鉴于上述问题,本发明的实施例提供一种电沉积系统。电沉积系统包括:电沉积液容器,电沉积液容器的上部开口,电沉积容器用于盛放电沉积液;加热容器,电沉积容器设置于加热容器内,加热容器内盛放有加热介质,加热容器被设置成加热该加热介质以加热电沉积液;阳极支撑件,设置于电沉积液容器上并部分覆盖电沉积液容器的开口,阳极支撑件用于支撑电沉积系统的阳极;至少一个阴极支撑装置,设置于电沉积液容器的上方,用于支撑多个阴极,阴极支撑装置被设置成控制多个阴极旋转。In view of the above problems, an embodiment of the present invention provides an electrodeposition system. The electrodeposition system includes: an electrodeposition liquid container, an upper opening of the electrodeposition liquid container, and the electrodeposition container is used to hold the electrodeposition liquid; The container is set to heat the heating medium to heat the electrodeposition liquid; the anode support is arranged on the electrodeposition liquid container and partially covers the opening of the electrodeposition liquid container, and the anode support is used to support the anode of the electrodeposition system; at least one cathode The supporting device is arranged above the electrodeposition liquid container and is used to support multiple cathodes, and the cathode supporting device is configured to control the rotation of the multiple cathodes.

本发明实施例提供的电沉积系统,通过阴极支撑装置控制多个阴极旋转,而阴极位于电沉积液中,多个阴极旋转能够搅拌电沉积液,增加电沉积液的扰动,使电沉积液中的浓度分布更加均匀,从而防止出现浓差极化现象。In the electrodeposition system provided by the embodiment of the present invention, the rotation of multiple cathodes is controlled by the cathode support device, and the cathodes are located in the electrodeposition solution. The rotation of multiple cathodes can stir the electrodeposition solution, increase the disturbance of the electrodeposition solution, and make the electrodeposition solution The concentration distribution is more uniform, thereby preventing the phenomenon of concentration polarization.

附图说明Description of drawings

本发明的上述和/或附加的方面和优点从结合下面附图对实施方式的描述中将变得明显和容易理解。The above and/or additional aspects and advantages of the present invention will become apparent and comprehensible from the description of the embodiments in conjunction with the following drawings.

图1为根据本发明一个实施例的电沉积系统的结构示意图。FIG. 1 is a schematic structural view of an electrodeposition system according to an embodiment of the present invention.

图2为根据本发明另一个实施例的电沉积系统的结构示意图。Fig. 2 is a schematic structural diagram of an electrodeposition system according to another embodiment of the present invention.

图3为根据本发明一个实施例的电沉积系统中电沉积液容器的结构示意图。Fig. 3 is a schematic structural diagram of an electrodeposition liquid container in an electrodeposition system according to an embodiment of the present invention.

图4为根据本发明一个实施例的电沉积系统的阴极支撑装置的结构示意图。Fig. 4 is a schematic structural diagram of a cathode supporting device of an electrodeposition system according to an embodiment of the present invention.

图5为根据本发明一个实施例的阴极支撑装置中支撑管的结构示意图。Fig. 5 is a schematic structural view of a support tube in a cathode support device according to an embodiment of the present invention.

图6为图5中支撑管的另一个角度的结构示意图。FIG. 6 is a structural schematic diagram of another angle of the support tube in FIG. 5 .

图7为图6中支撑管的另一个角度的结构示意图。FIG. 7 is a structural schematic diagram of another angle of the support tube in FIG. 6 .

图8为图5中支撑管的剖面图。FIG. 8 is a cross-sectional view of the support tube in FIG. 5 .

图9为根据本发明一个实施例的阴极支撑装置中旋转组件的爆炸图。Fig. 9 is an exploded view of a rotating assembly in a cathode support device according to an embodiment of the present invention.

图10为图4中阴极支撑装置的另一个角度的结构示意图。FIG. 10 is a structural schematic diagram of another angle of the cathode supporting device in FIG. 4 .

图11为根据本发明又一个实施例的电沉积系统的结构示意图。Fig. 11 is a schematic structural diagram of an electrodeposition system according to yet another embodiment of the present invention.

图12为根据本发明一个实施例的电沉积系统中电沉积液调节组件的结构框图。Fig. 12 is a structural block diagram of an electrodeposition liquid regulating component in an electrodeposition system according to an embodiment of the present invention.

图13为根据本发明一个实施例的设置有循环容器和电沉积液输送装置的电沉积系统的结构示意图。Fig. 13 is a schematic structural diagram of an electrodeposition system provided with a circulation container and an electrodeposition liquid delivery device according to an embodiment of the present invention.

图14为根据本发明一个实施例的设置有外壳体的电沉积系统的结构示意图。FIG. 14 is a schematic structural view of an electrodeposition system provided with an outer casing according to an embodiment of the present invention.

图15为根据本发明一个实施例的电沉积系统中外壳体的结构示意图。Fig. 15 is a schematic structural view of an outer casing in an electrodeposition system according to an embodiment of the present invention.

图16为图15中外壳体的另一个角度的结构示意图。FIG. 16 is a structural schematic diagram of another angle of the outer casing in FIG. 15 .

图17为图16中外壳体的另一个角度的示意图。FIG. 17 is a schematic diagram of another angle of the outer casing in FIG. 16 .

需要说明的是,附图不一定按比例绘制,其仅以不影响本领域技术人员理解的示意性方式示出。It should be noted that the drawings are not necessarily drawn to scale, and are only shown in a schematic manner that does not affect the understanding of those skilled in the art.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

需要说明的是,除非另外定义,本申请使用的技术术语或者科学术语应当为本申请所属领域内具有一般技能的人士所理解的通常意义。若全文中涉及“第一”、“第二”等描述,则该“第一”、“第二”等描述仅用于区别类似的对象,而不能理解为指示或暗示其相对重要性、先后次序或者隐含指明所指示的技术特征的数量,应该理解为“第一”、“第二”等描述的数据在适当情况下可以互换。若全文中出现“和/或”,其含义为包括三个并列方案,以“A和/或B”为例,包括A方案,或B方案,或A和B同时满足的方案。此外,为了便于描述,在这里可以使用空间相对术语,如“上方”“下方”“顶部”“底部”等,仅用来描述如图中所示的一个器件或特征与其他器件或特征的空间位置关系,应当理解为也包含除了图中所示的方位之外的在使用或操作中的不同方位。It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the application shall have the usual meanings understood by those skilled in the art to which the application belongs. If the descriptions such as "first" and "second" are involved in the whole text, the descriptions such as "first" and "second" are only used to distinguish similar objects, and cannot be understood as indicating or implying their relative importance, sequence, etc. The order or the number of technical features indicated by implicit indication should be understood as "first", "second" and other described data can be interchanged under appropriate circumstances. If "and/or" appears throughout the text, it means to include three parallel plans, taking "A and/or B" as an example, including plan A, or plan B, or a plan that satisfies both A and B. In addition, for the convenience of description, spatially relative terms such as "above", "below", "top" and "bottom" may be used here, only to describe the space between one device or feature and other devices or features as shown in the figure. The positional relationship should be understood to also include different orientations in use or operation other than the orientation shown in the drawings.

本发明的实施例提供一种电沉积系统。电沉积系统包括:电沉积液容器,电沉积液容器的上部开口,电沉积容器用于盛放电沉积液;加热容器,电沉积容器设置于加热容器内,加热容器内盛放有加热介质,加热容器被设置成加热该加热介质以加热电沉积液;阳极支撑件,设置于电沉积液容器上并部分覆盖电沉积液容器的开口,阳极支撑件用于支撑电沉积系统的阳极;至少一个阴极支撑装置,设置于电沉积液容器的上方,用于支撑多个阴极,阴极支撑装置被设置成控制多个阴极旋转。其中,多个阴极作为电沉积系统的阴极,电沉积液中的离子可以沉积在阴极表面。Embodiments of the present invention provide an electrodeposition system. The electrodeposition system includes: an electrodeposition liquid container, an upper opening of the electrodeposition liquid container, and the electrodeposition container is used to hold the electrodeposition liquid; The container is set to heat the heating medium to heat the electrodeposition liquid; the anode support is arranged on the electrodeposition liquid container and partially covers the opening of the electrodeposition liquid container, and the anode support is used to support the anode of the electrodeposition system; at least one cathode The supporting device is arranged above the electrodeposition liquid container and is used to support multiple cathodes, and the cathode supporting device is configured to control the rotation of the multiple cathodes. Among them, multiple cathodes are used as cathodes of the electrodeposition system, and ions in the electrodeposition solution can be deposited on the surface of the cathodes.

本发明的实施例提供的电沉积系统,通过阴极支撑装置控制多个阴极旋转,而阴极位于电沉积液中,多个阴极旋转能够搅拌电沉积液,增加电沉积液的扰动,使电沉积液中的浓度分布更加均匀,组分均一,从而防止出现浓差极化现象。In the electrodeposition system provided by the embodiments of the present invention, the rotation of multiple cathodes is controlled by the cathode support device, and the cathodes are located in the electrodeposition solution. The rotation of multiple cathodes can stir the electrodeposition solution, increase the disturbance of the electrodeposition solution, and make the electrodeposition solution The concentration distribution in the medium is more uniform, and the components are uniform, thereby preventing the phenomenon of concentration polarization.

下面对本发明的实施例提供的电沉积系统进行更为详细的描述。The electrodeposition system provided by the embodiments of the present invention will be described in more detail below.

如图1和图2所示,电沉积系统可以包括:电沉积液容器100、加热容器200、阳极支撑件300、阴极支撑装置400等结构。As shown in FIG. 1 and FIG. 2 , the electrodeposition system may include: an electrodeposition solution container 100 , a heating container 200 , an anode support 300 , a cathode support device 400 and other structures.

电沉积液容器100用于盛放电沉积液。电沉积液容器100的上部可以设置有开口,也就是说,电沉积液容器100为敞口容器,开口可以用于阴极500和阳极的放入与取出。在一些实施例中,电沉积液容器100可以池式结构,以容纳电沉积液。在一些实施例中,电沉积液容器100可以为方形,以最大化利用空间。The electrodeposition solution container 100 is used for containing the electrodeposition solution. The upper part of the electrodeposition solution container 100 can be provided with an opening, that is, the electrodeposition solution container 100 is an open container, and the opening can be used for putting in and taking out the cathode 500 and the anode. In some embodiments, the electrodeposition solution container 100 may be in a pool structure to accommodate the electrodeposition solution. In some embodiments, the electrodeposition solution container 100 may be in a square shape to maximize space utilization.

在一些实施例中,电沉积系统可以应用于制备辐照靶件,即,将合金管作为阴极,利用本发明实施例中的电沉积系统在合金管表面电沉积二氧化铀,从而得到辐照靶件,该辐照靶件经过辐照可使铀裂变生成钼-99。其中,在进行二氧化铀的电沉积时,电沉积液内含有硝酸,同时电沉积的温度达到90℃,因此,电沉积液容器100可以为耐酸耐高温材料,例如,玻璃钢槽材质、化工陶瓷、化工搪瓷、石英玻璃等材质。In some embodiments, the electrodeposition system can be applied to the preparation of irradiation targets, that is, the alloy tube is used as the cathode, and the electrodeposition system in the embodiment of the present invention is used to electrodeposit uranium dioxide on the surface of the alloy tube to obtain irradiation The target is irradiated to produce molybdenum-99 by fission of uranium. Wherein, during the electrodeposition of uranium dioxide, the electrodeposition solution contains nitric acid, and the electrodeposition temperature reaches 90° C. Therefore, the electrodeposition solution container 100 can be made of acid-resistant and high-temperature-resistant materials, such as glass fiber reinforced plastic tank material, chemical ceramics , chemical enamel, quartz glass and other materials.

在一些实施例中,电沉积液容器100可以为聚四氟乙烯材质,玻璃钢槽材质、化工陶瓷、化工搪瓷、石英玻璃等材质较脆,不耐冲击和振动,相比之下,聚四氟乙烯可以耐酸耐高温,便于加工并且能够耐冲击和振动。另外,聚四氟乙烯还有良好的绝缘性能,进一步提高了电沉积系统的安全性。本实施例中采用聚四氟乙烯材料制成电沉积液容器,可以满足电沉积液容器耐高温、耐酸碱以及绝缘等要求。In some embodiments, the electrodeposition liquid container 100 can be made of polytetrafluoroethylene, and materials such as glass fiber reinforced plastic tanks, chemical ceramics, chemical enamel, and quartz glass are relatively brittle and not resistant to shock and vibration. In contrast, polytetrafluoroethylene Ethylene is resistant to acids and temperatures, is easy to process and is resistant to shock and vibration. In addition, PTFE also has good insulating properties, which further improves the safety of the electrodeposition system. In this embodiment, the electrodeposition liquid container is made of polytetrafluoroethylene material, which can meet the requirements of high temperature resistance, acid and alkali resistance, and insulation of the electrodeposition liquid container.

加热容器200用于对电沉积液容器100中的电沉积液进行加热。电沉积液容器100可以设置在加热容器200内,加热容器200形成有容纳电沉积液容器100的空间。加热容器200内盛放有加热介质,加热容器200可以对加热介质进行加热,进而利用加热介质间接加热电沉积液容器100中的电沉积液。The heating container 200 is used for heating the electrodeposition liquid in the electrodeposition liquid container 100 . The electrodeposition liquid container 100 may be disposed in a heating container 200 formed with a space for accommodating the electrodeposition liquid container 100 . A heating medium is contained in the heating container 200 , and the heating container 200 can heat the heating medium, and then use the heating medium to indirectly heat the electrodeposition liquid in the electrodeposition liquid container 100 .

在本实施例中,加热容器200通过加热介质对电沉积液容器100中的电沉积液进行加热,以对电沉积液容器100的不同位置提供更均匀的加热温度。加热介质可以为流体介质,例如,水、油等。在一些实施例中,加热介质可以为油,油具有高于水的沸点,可以提供更高的加热温度。In this embodiment, the heating container 200 heats the electrodeposition liquid in the electrodeposition liquid container 100 through a heating medium, so as to provide more uniform heating temperature for different positions of the electrodeposition liquid container 100 . The heating medium may be a fluid medium, such as water, oil, and the like. In some embodiments, the heating medium can be oil, which has a higher boiling point than water, and can provide a higher heating temperature.

在一些实施例中,加热容器200需要提供预定范围的加热温度,例如,当制备覆盖有二氧化铀镀层的辐照靶件时,电沉积液的加热温度可以为90℃左右。因此,在一些实施例中,电沉积系统可以包括温度测量装置和加热控制器。温度测量装置设置于加热容器200上,用于测量加热容器200的温度,加热控制器与加热容器200和温度测量装置连接,用于根据温度测量装置测量到的温度控制加热容器200的加热。通过设置温度测量装置和加热控制器,可以将加热容器200的温度控制在预定范围,以此来控制电沉积液的温度保持在预定范围,确保电沉积的正常进行。In some embodiments, the heating container 200 needs to provide a heating temperature within a predetermined range. For example, when preparing an irradiation target covered with uranium dioxide coating, the heating temperature of the electrodeposition solution may be about 90° C. Accordingly, in some embodiments, an electrodeposition system may include a temperature measurement device and a heating controller. The temperature measuring device is arranged on the heating container 200 for measuring the temperature of the heating container 200, and the heating controller is connected with the heating container 200 and the temperature measuring device for controlling the heating of the heating container 200 according to the temperature measured by the temperature measuring device. By setting a temperature measuring device and a heating controller, the temperature of the heating container 200 can be controlled within a predetermined range, so as to control the temperature of the electrodeposition solution to be kept within a predetermined range, so as to ensure normal progress of electrodeposition.

电沉积系统具有阳极和阴极,电沉积系统的阳极和阴极插入电沉积液中,以在电沉积液中形成电位差,实现电沉积。在本实施例中,阳极支撑件300用于支撑电沉积系统的阳极。阳极支撑件300设置于电沉积液容器100上并部分覆盖电沉积液容器100的开口,以使电沉积系统的阳极能够通过开口插入电沉积液中。阳极支撑件300可以设置在电沉积液容器100的中部,以将阳极设置在电沉积液容器100的中部。电沉积系统的阴极可以有多个,多个阴极可以划分成多组并分别设置在阳极的两侧,以对多个阴极同时进行电沉积,提高了电沉积的效率。The electrodeposition system has an anode and a cathode, and the anode and cathode of the electrodeposition system are inserted into the electrodeposition liquid to form a potential difference in the electrodeposition liquid to realize electrodeposition. In this embodiment, the anode support 300 is used to support the anode of the electrodeposition system. The anode support 300 is disposed on the electrodeposition liquid container 100 and partially covers the opening of the electrodeposition liquid container 100 , so that the anode of the electrodeposition system can be inserted into the electrodeposition liquid through the opening. The anode supporter 300 may be disposed in the middle of the electrodeposition liquid container 100 to place the anode in the middle of the electrodeposition liquid container 100 . There can be multiple cathodes in the electrodeposition system, and the multiple cathodes can be divided into multiple groups and arranged on both sides of the anode, so as to conduct electrodeposition on multiple cathodes at the same time, which improves the efficiency of electrodeposition.

具体地,阳极支撑件300可以为设置于电沉积液容器100上的盖板,其覆盖电沉积液容器100的部分开口,盖板上可以设置有插孔,阳极可以插入该插孔中,进而插入电沉积液中进行工作。Specifically, the anode support member 300 can be a cover plate arranged on the electrodeposition liquid container 100, which covers a part of the opening of the electrodeposition liquid container 100, and a socket can be provided on the cover plate, and the anode can be inserted into the socket, and then Insert into the electrodeposition solution for work.

阴极支撑装置400用于支撑阴极500,阴极500的数量可以为一个,也可以为多个,例如,阴极支撑装置400可以支撑16个阴极500,本发明对此不做限定。当阴极支撑装置400支撑有多个阴极500时,可以同时在多个阴极500上进行电沉积,以提高电沉积的效率。阴极500可以为导电材质,例如,阴极500可以为金属材质,当在阴极500上电沉积二氧化铀镀层来制备辐照靶件时,阴极500可以为合金材质,例如锆合金材质。阴极500的形状可以管状,管状的阴极500可以具有中空的管腔,当然,阴极500也可以是其他形状,本发明对此不做限定。The cathode supporting device 400 is used to support the cathode 500, and the number of the cathode 500 may be one or multiple, for example, the cathode supporting device 400 may support 16 cathodes 500, which is not limited in the present invention. When the cathode supporting device 400 supports multiple cathodes 500, electrodeposition can be performed on the multiple cathodes 500 at the same time, so as to improve the efficiency of electrodeposition. The cathode 500 can be made of conductive material. For example, the cathode 500 can be made of metal. When the cathode 500 is electrodeposited with uranium dioxide coating to prepare the irradiation target, the cathode 500 can be made of alloy, such as zirconium alloy. The shape of the cathode 500 can be tubular, and the tubular cathode 500 can have a hollow cavity. Of course, the cathode 500 can also be in other shapes, which is not limited in the present invention.

需要说明的是,本发明的实施例中描述的阴极支撑装置400,在电沉积二氧化铀的电沉积系统中被描述成支撑阴极,但可以理解,本发明的实施例中描述的阴极支撑装置400的结构,并不受电极极性的限制,当阴极支撑装置400的结构用于其他的电沉积系统时,阴极支撑装置400也可以用于对阳极的支撑。也就是说,阴极支撑装置400既可以对电沉积系统的阴极进行支撑,也可以对电沉积系统的阳极进行支撑。It should be noted that the cathode support device 400 described in the embodiment of the present invention is described as supporting the cathode in the electrodeposition system for electrodepositing uranium dioxide, but it can be understood that the cathode support device described in the embodiment of the present invention The structure of 400 is not limited by the polarity of the electrodes. When the structure of the cathode support device 400 is used in other electrodeposition systems, the cathode support device 400 can also be used to support the anode. That is to say, the cathode supporting device 400 can not only support the cathode of the electrodeposition system, but also support the anode of the electrodeposition system.

阴极支撑装置400的数量可以为一个,也可以为多个,例如,可以设置4个阴极支撑装置400,本发明对此不做限定。当设置有多个阴极支撑装置400时,可以同时对更多的阴极500进行电沉积,进一步提高电沉积的效率。The number of cathode supporting devices 400 may be one or multiple, for example, four cathode supporting devices 400 may be provided, which is not limited in the present invention. When multiple cathode supporting devices 400 are provided, more cathodes 500 can be electrodeposited at the same time, further improving the efficiency of electrodeposition.

在一些实施例中,阴极支撑装置400被设置成控制多个阴极500旋转,即,当阴极500被支撑在阴极支撑装置400上时,阴极500在阴极支撑装置400的作用下,能够围绕阴极500外的轴线旋转。阴极500可以部分或全部浸入电沉积液中。在本实施例中,通过阴极支撑装置400控制多个阴极500旋转,而阴极500位于电沉积液中,多个阴极500旋转能够增加电沉积液的扰动,使电沉积液中的浓度分布更加均匀,组分均一,从而防止出现浓差极化现象,确保电沉积的正常进行。In some embodiments, the cathode supporting device 400 is configured to control the rotation of a plurality of cathodes 500, that is, when the cathode 500 is supported on the cathode supporting device 400, the cathode 500 can surround the cathode 500 under the action of the cathode supporting device 400 Outer axis rotation. The cathode 500 may be partially or fully immersed in the electrodeposition solution. In this embodiment, the rotation of multiple cathodes 500 is controlled by the cathode supporting device 400, and the cathodes 500 are located in the electrodeposition solution. The rotation of multiple cathodes 500 can increase the disturbance of the electrodeposition solution and make the concentration distribution in the electrodeposition solution more uniform. , The composition is uniform, so as to prevent the phenomenon of concentration polarization and ensure the normal progress of electrodeposition.

如图3所示,在一些实施例中,为进一步防止出现浓差极化现象,电沉积液容器100内可以设置有磁力搅拌部110,加热容器200的底部设置有磁力驱动部,磁力驱动部被设置成通过磁力带动磁力搅拌部110旋转。通过设置磁力搅拌部110,并通过磁力驱动部带动磁力搅拌部110旋转,以搅拌电沉积液,可以进一步加强电沉积液容器100中的电沉积液的扰动,使电沉积液容器100中的电沉积液浓度分布均匀,组分均一,起到消除浓差极化的作用,确保电沉积的正常进行。此外,磁力驱动部被设置成通过磁力带动磁力搅拌部110旋转,可以避免在电沉积液容器100底部开孔,从而增加电沉积液容器100底部的密封性,防止电沉积液泄漏。As shown in FIG. 3 , in some embodiments, in order to further prevent concentration polarization, a magnetic stirring part 110 may be provided in the electrodeposition solution container 100, and a magnetic driving part may be provided at the bottom of the heating container 200. The magnetic driving part It is set to drive the magnetic stirring part 110 to rotate by magnetic force. By setting the magnetic stirring part 110 and driving the magnetic stirring part 110 to rotate through the magnetic drive part to stir the electrodeposition liquid, the disturbance of the electrodeposition liquid in the electrodeposition liquid container 100 can be further strengthened, so that the electrodeposition liquid in the electrodeposition liquid container 100 The concentration distribution of the deposition solution is uniform and the components are uniform, which can eliminate the concentration polarization and ensure the normal progress of electrodeposition. In addition, the magnetic driving part is set to drive the magnetic stirring part 110 to rotate through magnetic force, which can avoid opening holes in the bottom of the electrodeposition liquid container 100, thereby increasing the sealing performance of the bottom of the electrodeposition liquid container 100 and preventing leakage of the electrodeposition liquid.

如图3所示,在一些实施例中,磁力搅拌部110可以为圆形,磁力搅拌部110的周向可以设置有多个桨叶,以增加磁力搅拌部110的搅拌性能,多个桨叶可以在磁力搅拌部110的周向均匀分布,以确保磁力搅拌部110旋转的平稳性。在一些实施例中,磁力搅拌部110为聚四氟乙烯材质,可以耐高温、耐酸碱腐蚀。As shown in Figure 3, in some embodiments, the magnetic stirring part 110 can be circular, and the circumferential direction of the magnetic stirring part 110 can be provided with a plurality of paddles, to increase the stirring performance of the magnetic stirring part 110, a plurality of paddles It can be uniformly distributed in the circumferential direction of the magnetic stirring part 110 to ensure the stability of the rotation of the magnetic stirring part 110 . In some embodiments, the magnetic stirring part 110 is made of polytetrafluoroethylene, which can resist high temperature and acid and alkali corrosion.

如图4所示,在一些实施例中,阴极支撑装置400可以包括连接件410和旋转组件420。其中,多个阴极500连接于连接件410上,连接件410用于与电源连接以为阴极500供电;旋转组件420与连接件410连接,旋转组件420用于驱动连接件410旋转以带动阴极500在电沉积液中旋转。As shown in FIG. 4 , in some embodiments, the cathode support device 400 may include a connecting member 410 and a rotating assembly 420 . Among them, a plurality of cathodes 500 are connected to the connector 410, and the connector 410 is used to connect with a power source to supply power to the cathode 500; the rotating assembly 420 is connected to the connecting member 410, and the rotating assembly 420 is used to drive the connecting member 410 to rotate to drive the cathode 500 in the Rotate in the electrodeposition solution.

具体地,旋转组件420可以与连接件410驱动连接并带动连接件410旋转。连接件410可以为圆盘形,连接件410在旋转组件420的驱动下能够绕自身的轴线旋转。在本实施例中,连接件410使多个阴极500之间保持相对静止地连接在一起,并且连接件410能够带动多个阴极500随连接件410的旋转而旋转,即,多个阴极500围绕连接件410的轴线进行旋转。连接件410可以为导体,例如,连接件410的材质可以为金属,连接件410还可以与电源直接或者间接电连接,以使电源的电能通过连接件410传递至阴极500。Specifically, the rotating assembly 420 can be drivingly connected with the connecting member 410 and drive the connecting member 410 to rotate. The connecting piece 410 may be in the shape of a disk, and the connecting piece 410 can rotate around its own axis driven by the rotating component 420 . In this embodiment, the connector 410 keeps the plurality of cathodes 500 connected together in a relatively static manner, and the connector 410 can drive the plurality of cathodes 500 to rotate with the rotation of the connector 410, that is, the plurality of cathodes 500 surround The axis of the link 410 rotates. The connecting piece 410 can be a conductor, for example, the material of the connecting piece 410 can be metal, and the connecting piece 410 can also be directly or indirectly electrically connected to the power supply, so that the power of the power supply can be transferred to the cathode 500 through the connecting piece 410 .

在一些实施例中,阴极支撑装置400还包括支撑管430,支撑管430用于支撑阴极500,支撑管430固定连接于连接件410,使得阴极500可以连接于连接件410。支撑管430的数量可以与阴极500的数量相同,支撑管430的数量可以为多个,多个支撑管430可以沿连接件410的周向方向均匀分布,从而实现在多个阴极500上的均匀电沉积。In some embodiments, the cathode support device 400 further includes a support tube 430 for supporting the cathode 500 , and the support tube 430 is fixedly connected to the connector 410 so that the cathode 500 can be connected to the connector 410 . The number of support tubes 430 can be the same as the number of cathodes 500, and the number of support tubes 430 can be multiple, and the plurality of support tubes 430 can be evenly distributed along the circumferential direction of the connector 410, so as to achieve uniformity on multiple cathodes 500. Electrodeposition.

如图5和图6所示,在一些实施例中,阴极500为管状,支撑管430具有弹性,支撑管430被设置成可沿径向向内收缩以伸入阴极500内,并且在阴极500内依靠沿径向向外的恢复力支撑阴极500。本实施例提供的阴极支撑装置400,通过支撑管430径向向外的张力在管状的阴极500内部对阴极500进行支撑,使得支撑管430从管内撑住阴极500,从而在电沉积时可以使阴极500的外表面镀满镀层,提高了阴极500的利用率。As shown in FIGS. 5 and 6 , in some embodiments, the cathode 500 is tubular, the support tube 430 is elastic, and the support tube 430 is configured to shrink radially inward to extend into the cathode 500 , and the cathode 500 The inner supports the cathode 500 by virtue of the radially outward restoring force. The cathode support device 400 provided in this embodiment supports the cathode 500 inside the tubular cathode 500 through the radially outward tension of the support tube 430, so that the support tube 430 supports the cathode 500 from the inside of the tube, so that the cathode 500 can be used during electrodeposition. The outer surface of the cathode 500 is fully plated, which improves the utilization rate of the cathode 500 .

本实施例中,支撑管430可以沿支撑管430的径向方向产生弹性形变,具体地,当需要将管状的阴极500安装在支撑管430上时,可以使支撑管430沿支撑管430的径向向内产生弹性形变,支撑管430的管径变小,此时支撑的管径可以小于管状的阴极500的内径,支撑管430可以进入阴极500的管腔。当支撑管430进入阴极500的管腔之后,支撑管430可以沿支撑管430的径向向外产生恢复力,此时支撑管430可以对阴极500的内壁施加沿径向向外的弹性恢复力,以支撑阴极500,使阴极500固定在支撑管430上。In this embodiment, the support tube 430 can be elastically deformed along the radial direction of the support tube 430. Specifically, when the tubular cathode 500 needs to be installed on the support tube 430, the support tube 430 can be made to deform along the radial direction of the support tube 430. Elastic deformation occurs inward, and the diameter of the support tube 430 becomes smaller. At this time, the diameter of the support tube can be smaller than the inner diameter of the tubular cathode 500 , and the support tube 430 can enter the lumen of the cathode 500 . After the support tube 430 enters the lumen of the cathode 500, the support tube 430 can generate a restoring force radially outward along the support tube 430, and at this time, the support tube 430 can exert an elastic restoring force radially outward on the inner wall of the cathode 500 , to support the cathode 500 , so that the cathode 500 is fixed on the support tube 430 .

另外,需要说明的是,本发明的实施例中的支撑管430可以为导体,例如,支撑管430可以为不锈钢材质,在其他实施例中,支撑管430的材质可以为其他金属或者合金。电源的电能可以通过连接件410传导至支撑管430,并通过支撑管430传导到阴极500,以实现电源对阴极500的供电。在一些实施例中,阴极支撑装置400可以对其他电沉积工艺中涉及的管状的阴极500进行支撑,本发明对此不做限定。In addition, it should be noted that the support tube 430 in the embodiment of the present invention can be a conductor, for example, the support tube 430 can be made of stainless steel, and in other embodiments, the material of the support tube 430 can be other metals or alloys. The electric energy of the power supply can be conducted to the support tube 430 through the connecting piece 410 , and then to the cathode 500 through the support tube 430 , so as to realize the power supply of the power supply to the cathode 500 . In some embodiments, the cathode supporting device 400 can support the tubular cathode 500 involved in other electrodeposition processes, which is not limited in the present invention.

在一些实施例中,支撑管430上设置有多个线性缺口431,线性缺口431沿支撑管430的轴向方向延伸至支撑管430的一端。多个线性缺口431可以从支撑管430的中部沿支撑管430的轴向方向延伸至支撑管430的一端,线性缺口431将支撑管430的管壁分割成多个子管壁432,子管壁432可以沿支撑管430的径向向外张开一定角度,多个子管壁432的一端均与支撑管430未被线性缺口431分割的部分连接,子管壁432的另一端形成自由端,子管壁432的自由端可以沿支撑管430的径向产生弹性形变,以使支撑管430能够在管内支撑住阴极500。In some embodiments, the support tube 430 is provided with a plurality of linear notches 431 , and the linear notches 431 extend to one end of the support tube 430 along the axial direction of the support tube 430 . A plurality of linear gaps 431 can extend from the middle of the support tube 430 to one end of the support tube 430 in the axial direction of the support tube 430. The linear gaps 431 divide the tube wall of the support tube 430 into a plurality of sub-tube walls 432. The sub-tube walls 432 A certain angle can be opened outward along the radial direction of the support tube 430, and one end of the plurality of sub-tube walls 432 is connected to the part of the support tube 430 that is not divided by the linear gap 431, and the other end of the sub-tube wall 432 forms a free end. The free end of the wall 432 can be elastically deformed in the radial direction of the support tube 430 so that the support tube 430 can support the cathode 500 inside the tube.

如图7所示,在一些实施例中,多个线性缺口431沿支撑管430的周向方向均匀分布。多个线性缺口431的宽度可以相同,多个线性缺口431沿支撑管430的周向方向均匀分布,可以分割出多个宽度均匀的子管壁432,宽度均匀的子管壁432在形变量相同的情况下,能够产生几乎相同的弹性恢复力,从而使阴极500受到力更加均匀,防止阴极500损坏,还可以使支撑管430和阴极500内壁之间的摩擦力更为均匀,使支撑管430对阴极500的固定效果更好。As shown in FIG. 7 , in some embodiments, a plurality of linear notches 431 are evenly distributed along the circumferential direction of the support tube 430 . The widths of the plurality of linear notches 431 can be the same, and the plurality of linear notches 431 are evenly distributed along the circumferential direction of the support tube 430, so that a plurality of sub-tube walls 432 with uniform width can be divided, and the sub-tube walls 432 with uniform width have the same deformation amount. In the case of , almost the same elastic recovery force can be generated, so that the cathode 500 is subjected to a more uniform force, preventing damage to the cathode 500, and can also make the friction between the support tube 430 and the inner wall of the cathode 500 more uniform, so that the support tube 430 The fixing effect on the cathode 500 is better.

在一些实施例中,支撑管430设置有凸起部433,凸起部433突出于支撑管430的外表面,用于增加支撑管430与阴极500之间的摩擦力。凸起部433可以设置在支撑管430能够与阴极500的内壁接触的部分,例如,凸起部433可以设置在子管壁432上。通过设置凸起部433,可以增大支撑管430与阴极500内壁之间的摩擦力,从而使支撑管430与阴极500之间的固定更加稳定;同时凸起部433还可以使摩擦力不至于过紧,影响阴极500的插拔。In some embodiments, the support tube 430 is provided with a protrusion 433 protruding from the outer surface of the support tube 430 for increasing the friction between the support tube 430 and the cathode 500 . The raised portion 433 may be disposed on a portion of the support tube 430 capable of contacting the inner wall of the cathode 500 , for example, the raised portion 433 may be disposed on the sub-tube wall 432 . By providing the raised portion 433, the friction force between the support tube 430 and the inner wall of the cathode 500 can be increased, so that the fixing between the support tube 430 and the cathode 500 is more stable; at the same time, the raised portion 433 can also prevent the friction force from If it is too tight, the insertion and removal of the cathode 500 will be affected.

在一些实施例中,凸起部433为环形凸起,线性缺口431穿过环形凸起。环形凸起可以与支撑管430共轴设置,由于线性缺口431穿过环形凸起,一个完整的环形凸起可以被多个线性缺口431分割成多个子凸起,由同一个环形凸起分割成的多个子凸起,分别设置在不同的子管壁432上。通过设置环形凸起,可以使阴极500受到的弹力恢复力在周向上分布更加均匀。In some embodiments, the protrusion 433 is an annular protrusion, and the linear notch 431 passes through the annular protrusion. The annular protrusion can be arranged coaxially with the support tube 430. Since the linear notch 431 passes through the annular protrusion, a complete annular protrusion can be divided into multiple sub-protrusions by multiple linear notches 431, and the same annular protrusion can be divided into sub-protrusions. A plurality of sub-protrusions are arranged on different sub-pipe walls 432 respectively. By arranging the annular protrusion, the elastic restoring force on the cathode 500 can be distributed more uniformly in the circumferential direction.

在一些实施例中,凸起部433为多个,多个凸起部433沿支撑管430的轴向方向均匀布置。通过使多个凸起部433沿支撑管430的轴向方向均匀布置,可以使阴极500受到的弹力恢复力在轴向上分布更加均匀,同时可以增大支撑管430与阴极500内壁之间的摩擦力,从而使支撑管430与阴极500之间的连接更加稳定。In some embodiments, there are multiple protrusions 433 , and the plurality of protrusions 433 are uniformly arranged along the axial direction of the support tube 430 . By arranging a plurality of protrusions 433 evenly along the axial direction of the support tube 430, the elastic restoring force received by the cathode 500 can be distributed more uniformly in the axial direction, and at the same time, the distance between the support tube 430 and the inner wall of the cathode 500 can be increased. Friction, so that the connection between the support tube 430 and the cathode 500 is more stable.

在一些实施例中,支撑管430上还设置有定位部434,凸起部433位于支撑管430远离连接件410的端部和定位部434之间,定位部434突出于支撑管430的外表面,且定位部434的外径大于阴极500的内径,用于限定阴极500的安装位置。本实施例中的定位部434位于连接件与凸起部433之间,且定位部434的外径大于阴极500的内径,当支撑管430插入阴极500达到一定深度时,可以使阴极500的管口抵触到定位部434,定位部434对支撑管430沿阴极500的轴向运动进行限位,使支撑管430不能再继续插入阴极500,以此可以控制支撑管430插入阴极500的深度,进而可以通过控制支撑管430的高度来控制阴极500在电沉积液内的深度。In some embodiments, the support tube 430 is further provided with a positioning portion 434, the raised portion 433 is located between the end of the support tube 430 away from the connecting piece 410 and the positioning portion 434, and the positioning portion 434 protrudes from the outer surface of the support tube 430 , and the outer diameter of the positioning portion 434 is larger than the inner diameter of the cathode 500 , which is used to define the installation position of the cathode 500 . The positioning part 434 in this embodiment is located between the connector and the raised part 433, and the outer diameter of the positioning part 434 is larger than the inner diameter of the cathode 500. When the support tube 430 is inserted into the cathode 500 to a certain depth, the tube of the cathode 500 can The opening interferes with the positioning part 434, and the positioning part 434 limits the axial movement of the support tube 430 along the cathode 500, so that the support tube 430 can no longer be inserted into the cathode 500, so that the depth of the support tube 430 inserted into the cathode 500 can be controlled, and then The depth of the cathode 500 in the electrodeposition solution can be controlled by controlling the height of the support tube 430 .

如图8所示,在一些实施例中,线性缺口431穿过定位部434并延伸至定位部434远离凸起部433的一侧。线性缺口431穿过定位部434,可以将定位部434分割成多个子定位部,定位部434分割形成的子定位部可以分别设置在不同的子管壁432上,使得定位部434也具有弹性。当需要将阴极500从支撑管430上拆下时,可以通过按压具有弹性的定位部434,以使阴极500易于从支撑管430上拔下。同时,线性缺口431穿过定位部434并延伸至定位部434远离凸起部433的一侧,有利于调整支撑管430的弹性,使支撑管430和阴极500之间产生更大的摩擦力。As shown in FIG. 8 , in some embodiments, the linear notch 431 passes through the positioning portion 434 and extends to a side of the positioning portion 434 away from the raised portion 433 . The linear gap 431 passes through the positioning part 434, and the positioning part 434 can be divided into multiple sub-positioning parts. The sub-positioning parts formed by the division of the positioning part 434 can be respectively arranged on different sub-tube walls 432, so that the positioning part 434 is also elastic. When the cathode 500 needs to be detached from the support tube 430 , the elastic positioning portion 434 can be pressed to make the cathode 500 easy to pull out from the support tube 430 . At the same time, the linear notch 431 passes through the positioning portion 434 and extends to the side of the positioning portion 434 away from the raised portion 433 , which is beneficial to adjust the elasticity of the support tube 430 and generate greater friction between the support tube 430 and the cathode 500 .

在一些实施例中,支撑管430上设置有安装部435,安装部435设置于支撑管430远离线性缺口431的另一端。并且,连接件410上设置有安装孔,安装部435插入并固定于安装孔内,以使支撑管430可以通过安装部435与连接件410可拆卸地连接。安装部435可以为支撑管430的一端形成的圆柱体,圆柱体的直径与安装孔的直径相匹配,以便于支撑管430安装于连接件410。In some embodiments, the support tube 430 is provided with a mounting portion 435 , and the mounting portion 435 is disposed at the other end of the support tube 430 away from the linear notch 431 . Moreover, the connecting piece 410 is provided with a mounting hole, and the mounting portion 435 is inserted into and fixed in the mounting hole, so that the support tube 430 can be detachably connected to the connecting piece 410 through the mounting portion 435 . The installation part 435 may be a cylinder formed at one end of the support tube 430 , and the diameter of the cylinder matches the diameter of the installation hole, so that the support tube 430 is mounted on the connecting piece 410 .

如图9所示,连接件410上设置有多个安装孔,用于连接多个支撑管430。示例地,连接件410上可以连接16个支撑管430。通过这种设置方式,可以在一个连接件410上安装多个阴极500,以同时使用多个阴极500进行电沉积,以提高电沉积效率;同时,在一个连接件410上安装多个阴极500,可以提高阴极500对电沉积液的搅拌效果。在一些实施例中,多个安装孔可以设置于连接件410上靠近边缘的位置,多个安装孔沿连接件410的周向方向均匀分布。As shown in FIG. 9 , multiple mounting holes are provided on the connecting piece 410 for connecting multiple support tubes 430 . For example, 16 support tubes 430 may be connected to the connecting member 410 . Through this arrangement, multiple cathodes 500 can be installed on one connector 410 to simultaneously use multiple cathodes 500 for electrodeposition to improve electrodeposition efficiency; at the same time, multiple cathodes 500 can be installed on one connector 410, The stirring effect of the cathode 500 on the electrodeposition liquid can be improved. In some embodiments, a plurality of installation holes may be provided on the connecting member 410 near the edge, and the plurality of installation holes are evenly distributed along the circumferential direction of the connecting member 410 .

如图9和图10所示,在一些实施例中,阴极支撑装置400还包括安装板440。安装板440部分覆盖电沉积液容器100的开口,从而与阳极支撑件共同覆盖电沉积液容器100的开口,避免电沉积液溅出。至少一个旋转组件420安装于安装板440上,安装在安装板440上的旋转组件420可以驱动连接件410旋转。As shown in FIGS. 9 and 10 , in some embodiments, the cathode support device 400 further includes a mounting plate 440 . The mounting plate 440 partially covers the opening of the electrodeposition liquid container 100 , so as to cover the opening of the electrodeposition liquid container 100 together with the anode support to prevent the electrodeposition liquid from splashing out. At least one rotating component 420 is mounted on the mounting plate 440 , and the rotating component 420 mounted on the mounting plate 440 can drive the connecting member 410 to rotate.

在一些实施例中,旋转组件420包括驱动电机421和转轴422。驱动电机421设置于安装板440上,安装板440上设置有轴孔,转轴422穿过轴孔并且可旋转地连接于轴孔内,转轴422的一端与连接件410固定连接,另一端与驱动电机421连接,驱动电机421用于驱动转轴422旋转以带动连接件410旋转。如图11所示,在一些实施例中,安装板440上安装有多个旋转组件420,通过在一个安装板440上安装多个旋转组件420,可以进一步安装多组阴极500,例如,每个安装板440上可以安装2个旋转组件,以提高电沉积效率。In some embodiments, the rotating assembly 420 includes a drive motor 421 and a rotating shaft 422 . The driving motor 421 is arranged on the mounting plate 440, the mounting plate 440 is provided with a shaft hole, the rotating shaft 422 passes through the shaft hole and is rotatably connected in the shaft hole, one end of the rotating shaft 422 is fixedly connected with the connector 410, and the other end is connected with the driving The motor 421 is connected, and the driving motor 421 is used to drive the rotating shaft 422 to rotate to drive the connecting member 410 to rotate. As shown in FIG. 11 , in some embodiments, a plurality of rotating assemblies 420 are installed on a mounting plate 440. By installing a plurality of rotating assemblies 420 on one mounting plate 440, multiple sets of cathodes 500 can be further installed, for example, each Two rotating assemblies can be installed on the mounting plate 440 to improve the efficiency of electrodeposition.

在一些实施例中,旋转组件420还包括电机支架423和联轴器424。驱动电机421设置于电机支架423上,电机支架423固定连接于安装板440上,且电机支架423与安装板440之间形成有容纳空间;联轴器424设置于容纳空间中,联轴器424连接于驱动电机421的输出轴与转轴422之间。电机支架423用于支撑驱动电机421,同时在驱动电机421和安装板440之间形成用于容纳联轴器424的容纳空间。可以理解,由于电沉积液容器100内具有较高的温度,而转轴422邻近电沉积液容器100,也同样具有较高的温度,因此转轴422可能会由于热膨胀产生变形,从而与驱动电机421的输出轴之间产生位移差,通过在驱动电机421的输出轴与转轴422之间设置联轴器424,可以补偿驱动电机421和转轴422之间的位移差,缓解位移差造成的驱动电机421和输出轴之间的附加载荷,同时也能够补偿两轴之间由于制造安装不精确而导致的偏移。In some embodiments, the rotating assembly 420 further includes a motor bracket 423 and a coupling 424 . The drive motor 421 is arranged on the motor bracket 423, and the motor bracket 423 is fixedly connected on the mounting plate 440, and an accommodation space is formed between the motor bracket 423 and the installation plate 440; the shaft coupling 424 is arranged in the accommodation space, and the shaft coupling 424 It is connected between the output shaft of the driving motor 421 and the rotating shaft 422 . The motor bracket 423 is used to support the driving motor 421 , and at the same time, an accommodating space for accommodating the coupling 424 is formed between the driving motor 421 and the mounting plate 440 . It can be understood that since the electrodeposition liquid container 100 has a relatively high temperature, and the rotating shaft 422 adjacent to the electrodeposition liquid container 100 also has a relatively high temperature, the rotating shaft 422 may be deformed due to thermal expansion, thereby being inconsistent with the driving motor 421 A displacement difference is generated between the output shafts. By setting a coupling 424 between the output shaft of the driving motor 421 and the rotating shaft 422, the displacement difference between the driving motor 421 and the rotating shaft 422 can be compensated, and the driving motor 421 and the driving motor 421 caused by the displacement difference can be alleviated. The additional load between the output shafts can also compensate for the offset between the two shafts due to inaccurate manufacturing and installation.

在一些实施例中,旋转组件420还包括轴承座425和轴承426。轴承座425固定连接于安装板440上的轴孔内,轴承426安装于轴承座425内,转轴422连接于轴承426内。通过设置轴承426,减小转轴422在安装座的轴孔内旋转时的阻力,轴承座425用于将轴承426固定在轴孔内。In some embodiments, the rotating assembly 420 further includes a bearing seat 425 and a bearing 426 . The bearing seat 425 is fixedly connected in the shaft hole on the mounting plate 440 , the bearing 426 is installed in the bearing seat 425 , and the rotating shaft 422 is connected in the bearing 426 . By arranging the bearing 426, the resistance when the rotating shaft 422 rotates in the shaft hole of the installation seat is reduced, and the bearing seat 425 is used to fix the bearing 426 in the shaft hole.

在一些实施例中,旋转组件420还包括轴承座盖427,轴承座盖427与轴承座425固定连接,轴承座盖427和轴承座425之间形成容纳轴承426的空间。轴承座425的一端沿径向向外凸出有环形固定板,轴承座盖427和环形固定板的直径可以大于轴孔的直径,以实现轴承座425在安装板440上的限位。具体地,轴承座盖427和环形固定板的对应位置上设置有通孔,可以使用紧固件将轴承座盖427以及轴承座425固定在安装板440上,轴承座盖427与环形固定板分别位于安装板440的两侧。In some embodiments, the rotating assembly 420 further includes a bearing seat cover 427 , which is fixedly connected to the bearing seat 425 , and a space for accommodating the bearing 426 is formed between the bearing seat cover 427 and the bearing seat 425 . An annular fixing plate protrudes radially outward from one end of the bearing seat 425 . The diameters of the bearing seat cover 427 and the annular fixing plate can be larger than the diameter of the shaft hole, so as to realize the limit of the bearing seat 425 on the mounting plate 440 . Specifically, the corresponding positions of the bearing seat cover 427 and the annular fixing plate are provided with through holes, and fasteners can be used to fix the bearing seat cover 427 and the bearing seat 425 on the mounting plate 440, and the bearing seat cover 427 and the annular fixing plate are respectively Located on both sides of the mounting plate 440 .

在一些实施例中,转轴422的一端形成有凸起,连接件410可以支撑在凸起上,以实现连接件410与转轴422之间的定位。转轴422依次穿过连接件410、轴承座425、轴承426、轴承座盖427、螺母428,并通过螺母428将转轴422的另一端固定于联轴器424。转轴422的一端通过螺母428固定后,具有伸出螺母428的部分,转轴422伸出螺母428的部分与联轴器424连接。In some embodiments, a protrusion is formed at one end of the rotating shaft 422 , and the connecting member 410 can be supported on the protrusion to realize the positioning between the connecting member 410 and the rotating shaft 422 . The rotating shaft 422 passes through the connecting piece 410 , the bearing seat 425 , the bearing 426 , the bearing seat cover 427 , and the nut 428 sequentially, and the other end of the rotating shaft 422 is fixed to the coupling 424 through the nut 428 . After one end of the rotating shaft 422 is fixed by the nut 428 , there is a part protruding from the nut 428 , and the part of the rotating shaft 422 protruding from the nut 428 is connected with the coupling 424 .

如图10所示,在一些实施例中,阴极支撑装置400还包括升降组件450。升降组件450与安装板440连接,用于驱动安装板440并带动连接件410沿转轴422的轴向方向移动。其中,当升降组件450控制安装板440向下移动至安装板440覆盖于电沉积液容器100的部分开口上时,阴极500浸泡于电沉积液中。升降组件450能够带动阴极500上下运动,从而便于阴极500的安装和拆卸。As shown in FIG. 10 , in some embodiments, the cathode support device 400 further includes a lifting assembly 450 . The lifting assembly 450 is connected with the mounting plate 440 for driving the mounting plate 440 and driving the connecting member 410 to move along the axial direction of the rotating shaft 422 . Wherein, when the lifting assembly 450 controls the mounting plate 440 to move downward until the mounting plate 440 covers a part of the opening of the electrodeposition liquid container 100 , the cathode 500 is immersed in the electrodeposition liquid. The lifting assembly 450 can drive the cathode 500 to move up and down, so as to facilitate the installation and disassembly of the cathode 500 .

升降组件450与安装板440之间固定连接,升降组件450可以带动安装板440沿转轴422的轴向方向移动,安装板440沿转轴422的轴向方向移动进一步地带动连接件410和安装于连接件410上的阴极500沿转轴422的轴向方向移动。当安装板440覆盖于电沉积液容器100的部分开口上时,阴极500浸泡于电沉积液中,从而实现在阴极500上的电沉积。另外,由于本发明的实施例中,阴极500旋转搅动电沉积液,电沉积液可能会溅出至电沉积液容器100外,因此,安装板440覆盖于电沉积液容器100的部分开口上,可以防止电沉积液溅出。The lifting assembly 450 is fixedly connected to the mounting plate 440, the lifting assembly 450 can drive the mounting plate 440 to move along the axial direction of the rotating shaft 422, and the mounting plate 440 moves along the axial direction of the rotating shaft 422 to further drive the connecting member 410 and the mounting plate 410 to be installed on the connecting member. The cathode 500 on the component 410 moves along the axial direction of the rotating shaft 422 . When the mounting plate 440 covers a part of the opening of the electrodeposition liquid container 100 , the cathode 500 is soaked in the electrodeposition liquid, thereby realizing electrodeposition on the cathode 500 . In addition, because in the embodiment of the present invention, the cathode 500 rotates and stirs the electrodeposition liquid, the electrodeposition liquid may splash out of the electrodeposition liquid container 100, therefore, the mounting plate 440 covers part of the opening of the electrodeposition liquid container 100, Electrodeposition liquid can be prevented from splashing out.

如图4所示,在一些实施例中,升降组件450包括支撑板451、升降驱动件452和滑动件453。支撑板451的数量可以为两个,升降驱动件452固定于两个支撑板451之间,滑动件453与安装板440固定连接,升降驱动件452与滑动件453驱动连接,升降驱动件452用于驱动滑动件453在升降驱动件452上移动,以带动安装板440沿转轴422的轴向方向移动。支撑板451用于升降驱动件452的安装并且可以将升降组件450安装于电沉积系统的承载装置上,两个支撑板451可以对升降驱动件452实现更好地固定作用。升降组件450的滑动件453与安装板440固定连接,升降驱动件452驱动滑动件453在升降驱动件452上移动,进而通过滑动件453带动安装板440移动。具体地,在本实施例中升降驱动件452可以为汽缸。As shown in FIG. 4 , in some embodiments, the lifting assembly 450 includes a support plate 451 , a lifting driving member 452 and a sliding member 453 . The quantity of supporting plate 451 can be two, and lifting driving part 452 is fixed between two supporting plates 451, and sliding part 453 is fixedly connected with mounting plate 440, and lifting driving part 452 is driven and connected with sliding part 453, and lifting driving part 452 uses The sliding member 453 is driven to move on the lifting driving member 452 to drive the mounting plate 440 to move along the axial direction of the rotating shaft 422 . The supporting plate 451 is used for installing the lifting driving member 452 and can install the lifting assembly 450 on the carrying device of the electrodeposition system. The two supporting plates 451 can better fix the lifting driving member 452 . The sliding part 453 of the lifting assembly 450 is fixedly connected with the mounting plate 440 , and the lifting driving part 452 drives the sliding part 453 to move on the lifting driving part 452 , and then drives the mounting plate 440 to move through the sliding part 453 . Specifically, in this embodiment, the lifting driving member 452 may be a cylinder.

在一些实施例中,升降组件450还包括:至少两个导向杆454,固定连接于两个支撑板451之间;其中,导向杆454穿过滑动件453,升降驱动件452用于驱动滑动件453沿导向杆454移动。导向杆454用于为滑动件453在升降驱动件452上的移动进行导向。通过设置两个导向杆454,并使两个导向杆454穿过滑动件453,可以防止滑动件453绕导向杆454的轴旋转。升降驱动件452可以设置在两个导向杆454之间,以使滑动件453在升降驱动件452上移动时,保持滑动件453两侧的平衡。In some embodiments, the lifting assembly 450 further includes: at least two guide rods 454 fixedly connected between the two support plates 451; wherein the guide rods 454 pass through the slider 453, and the lifting driver 452 is used to drive the slider 453 moves along guide bar 454. The guide rod 454 is used for guiding the movement of the sliding member 453 on the lifting driving member 452 . By providing two guide rods 454 and passing the two guide rods 454 through the slider 453 , the slider 453 can be prevented from rotating about the axis of the guide rod 454 . The lifting driving part 452 can be arranged between the two guide rods 454, so that when the sliding part 453 moves on the lifting driving part 452, the balance on both sides of the sliding part 453 can be maintained.

在升降组件450的另一个实施例中,升降组件450包括:两个支撑板451;至少两个导向杆454,固定连接于两个支撑板451之间,导向杆454与转轴422平行设置;滑动件453,可滑动地连接于至少两个导向杆454上,滑动件453与安装板440固定连接,滑动件453被设置成在导向杆454上可滑动以带动安装板440沿转轴422的轴向方向移动;传动件,传动件的两端可转动地连接于两个支撑板451上,滑动件453上具有与传动件相配合的传动配合部,转动传动件并通过传动件与传动配合部的配合带动滑动件453沿连接杆移动;升降驱动件,安装于支撑板451上,升降驱动件与传动件驱动连接,升降驱动件用于驱动传动件转动。具体地,传动件可以为螺杆或者丝杠,传动配合部为设置于滑动件453上的螺孔。In another embodiment of the lifting assembly 450, the lifting assembly 450 includes: two support plates 451; at least two guide rods 454, fixedly connected between the two support plates 451, the guide rods 454 are arranged parallel to the rotating shaft 422; A member 453 is slidably connected to at least two guide rods 454. The slider 453 is fixedly connected to the mounting plate 440. The sliding member 453 is configured to slide on the guide rods 454 to drive the mounting plate 440 along the axial direction of the rotating shaft 422. direction movement; the transmission part, the two ends of the transmission part are rotatably connected to the two support plates 451, the sliding part 453 has a transmission matching part that matches the transmission part, and the rotation of the transmission part passes through the connection between the transmission part and the transmission part. Cooperate to drive the sliding part 453 to move along the connecting rod; the lifting driving part is installed on the support plate 451, and the lifting driving part is drivingly connected with the transmission part, and the lifting driving part is used to drive the transmission part to rotate. Specifically, the transmission member may be a screw or lead screw, and the transmission matching portion is a screw hole provided on the sliding member 453 .

如图12所示,在一些实施例中,电沉积系统还包括电源和电沉积液调节组件。电源与阳极和阴极500连接,用于为阳极和阴极500供电。电沉积液调节组件与电沉积液容器100连接,用于监测并调节电沉积液的酸性。As shown in FIG. 12 , in some embodiments, the electrodeposition system further includes a power supply and an electrodeposition liquid regulating assembly. The power supply is connected to the anode and the cathode 500 for powering the anode and the cathode 500 . The electrodeposition liquid regulating component is connected with the electrodeposition liquid container 100, and is used for monitoring and adjusting the acidity of the electrodeposition liquid.

在电沉积的过程中,电沉积系统的阴极会大量析氢,并产生大量OH-,溶液中的阳离子,如U离子,会与溶液中的OH-结合,形成氢氧化物,氢氧化物最终以氧化物的形式沉积在阴极上,影响电沉积的正常进行。因此,在电沉积的过程中,需要对电沉积液的pH值进行检测并调节。本发明的实施例提供的电沉积系统,具有电沉积液调节组件,电沉积液调节组件能够对电沉积液的pH值进行检测并调节,从而使得电沉积液的pH值保持稳定。In the process of electrodeposition, the cathode of the electrodeposition system will generate a large amount of hydrogen and produce a large amount of OH - , and the cations in the solution, such as U ions, will combine with the OH - in the solution to form hydroxide, and the hydroxide will eventually be The form of oxide is deposited on the cathode, which affects the normal progress of electrodeposition. Therefore, in the process of electrodeposition, it is necessary to detect and adjust the pH value of the electrodeposition solution. The electrodeposition system provided by the embodiment of the present invention has an electrodeposition liquid adjustment component, which can detect and adjust the pH value of the electrodeposition liquid, so as to keep the pH value of the electrodeposition liquid stable.

在一些实施例中,电沉积液调节组件包括酸性监测部610和酸性控制器620。酸性监测部610连接于电沉积液容器100,被设置成实时监测电沉积液的酸性。酸性控制器620与酸性监测部610连接,酸性控制器620被设置成实时采集酸性监测部610监测到的酸性数据并根据酸性数据来控制电沉积液的酸性。本实施例中,通过酸性监测部610来实时监测电沉积液的酸性并生成电沉积液的酸性数据,酸性控制器620采集电沉积液的酸性数据,并基于电沉积液的酸性数据对电沉积液的酸性进行控制。酸性控制器620可以预置控制程序,以将电沉积液的酸性控制在预定范围,酸性的控制可以通过酸性控制器620自动进行。In some embodiments, the electrodeposition solution regulation assembly includes an acidity monitoring unit 610 and an acidity controller 620 . The acidity monitoring unit 610 is connected to the electrodeposition liquid container 100 and configured to monitor the acidity of the electrodeposition liquid in real time. The acidity controller 620 is connected with the acidity monitoring part 610, and the acidity controller 620 is set to collect the acidity data monitored by the acidity monitoring part 610 in real time and control the acidity of the electrodeposition solution according to the acidity data. In this embodiment, the acidity monitoring part 610 is used to monitor the acidity of the electrodeposition solution in real time and generate the acidity data of the electrodeposition solution. The acidity controller 620 collects the acidity data of the electrodeposition solution, and based on the acidity data of the electrodeposition solution The acidity of the liquid is controlled. The acidity controller 620 can preset a control program to control the acidity of the electrodeposition solution within a predetermined range, and the acidity control can be automatically performed by the acidity controller 620 .

在一些实施例中,电沉积液调节组件还包括酸液储存容器640、碱液储存容器650和酸碱液输送装置630。酸液储存容器640用于储存酸液,碱液储存容器650用于储存碱液,酸碱液输送装置630连接于电沉积液容器100,并与酸液储存容器640和碱液储存容器650连接,酸碱液输送装置630可以选择性地向电沉积液容器100输送碱液或者酸液。其中,酸碱液输送装置630还与酸性控制器620连接,酸性控制器620用于根据酸性数据控制酸碱液输送装置630向电沉积液容器100输送酸液或碱液。在本实施例中,酸碱液输送装置630可以为蠕动泵。In some embodiments, the electrodeposition liquid regulating assembly further includes an acid liquid storage container 640 , an alkali liquid storage container 650 and an acid and alkali liquid delivery device 630 . The acid solution storage container 640 is used for storing acid solution, the lye solution storage container 650 is used for storing lye solution, the acid solution delivery device 630 is connected to the electrodeposition solution container 100, and is connected with the acid solution storage container 640 and the lye solution storage container 650 , the acid and alkali solution delivery device 630 can selectively deliver the alkaline solution or the acid solution to the electrodeposition solution container 100 . Wherein, the acid-base solution delivery device 630 is also connected to the acid controller 620 , and the acid controller 620 is used to control the acid-base solution delivery device 630 to deliver acid solution or lye solution to the electrodeposition solution container 100 according to the acidity data. In this embodiment, the acid and alkali solution delivery device 630 may be a peristaltic pump.

酸碱液输送装置630连接于电沉积液容器100,并与酸液储存容器640和碱液储存容器650连接,酸碱液输送装置630与酸液储存容器640和碱液储存容器650之间的管路上可以设置有控制阀,酸碱液输送装置630可以选择性地并定量地将酸液储存容器640中的酸液或碱液储存容器650中的碱液输送到电沉积液容器100中,以调节电沉积液的酸性。酸性控制器620可以基于酸性检测器采集的酸性数据,控制酸碱液输送装置630以及控制阀的工作状态。The acid-base solution delivery device 630 is connected to the electrodeposition solution container 100, and is connected with the acid solution storage container 640 and the lye solution storage container 650, the acid-base solution delivery device 630 and the acid solution storage container 640 and the lye solution storage container 650 A control valve may be provided on the pipeline, and the acid-alkali delivery device 630 may selectively and quantitatively deliver the acid solution in the acid solution storage container 640 or the lye solution in the lye solution storage container 650 to the electrodeposition solution container 100, To adjust the acidity of the electrodeposition solution. The acidity controller 620 can control the working state of the acid-base liquid delivery device 630 and the control valve based on the acidity data collected by the acidity detector.

在一些实施例中,酸性控制器620还被设置成:比较电沉积液的预设酸性值与酸性监测部610监测到的电沉积液的当前酸性。在本实施例中,预设酸性值可以为预设pH值,酸性监测部610可以监测电沉积液的pH值。当电沉积液的酸性低于预设酸性值时,即当电沉积液的pH值大于预设pH值时,控制酸碱液输送装置630向电沉积液容器100内输送酸液。当电沉积液的酸性高于预设酸性值时,即当电沉积液的pH值小于预设pH值时,控制酸碱液输送装置630向电沉积液容器100内输送碱液。In some embodiments, the acidity controller 620 is further configured to: compare the preset acidity value of the electrodeposition solution with the current acidity of the electrodeposition solution monitored by the acidity monitoring unit 610 . In this embodiment, the preset acidity value may be a preset pH value, and the acidity monitoring unit 610 may monitor the pH value of the electrodeposition solution. When the acidity of the electrodeposition solution is lower than the predetermined acidity value, that is, when the pH value of the electrodeposition solution is greater than the preset pH value, the acid-base solution delivery device 630 is controlled to deliver the acid solution into the electrodeposition solution container 100 . When the acidity of the electrodeposition solution is higher than the preset acidity value, that is, when the pH value of the electrodeposition solution is lower than the preset pH value, the acid-base solution delivery device 630 is controlled to deliver the alkali solution into the electrodeposition solution container 100 .

具体地,当酸性控制器620基于酸性数据和预设酸性值判断电沉积液的酸性过低时,可以控制酸碱液输送装置630和控制阀,实现酸液储存容器640与电沉积液容器100的连通,并使酸液储存容器640中的酸液能够进入电沉积液容器100,以提高电沉积液的酸性;当酸性控制器620基于酸性数据和预设酸性值判断电沉积液的酸性过高时,可以控制酸碱液输送装置630和控制阀,实现碱液储存容器650与电沉积液容器100的连通,并使碱液储存容器650中的碱液能够进入电沉积液容器100,以提高电沉积液的碱性。Specifically, when the acidity controller 620 judges that the acidity of the electrodeposition solution is too low based on the acidity data and the preset acidity value, it can control the acid-base solution delivery device 630 and the control valve to realize the acid solution storage container 640 and the electrodeposition solution container 100 and make the acid solution in the acid solution storage container 640 enter the electrodeposition solution container 100 to improve the acidity of the electrodeposition solution; When it is high, the acid-base liquid conveying device 630 and the control valve can be controlled to realize the communication between the lye storage container 650 and the electrodeposition liquid container 100, and the lye in the lye liquid storage container 650 can enter the electrodeposition liquid container 100, so as to Increase the alkalinity of the electrodeposition solution.

在一些实施例中,开始向电沉积液容器100输送酸液或碱液后,酸性控制器620还被设置成:确定电沉积液的酸性是否达到预设酸性值,当电沉积液的酸性达到预设酸性值时,控制酸碱液输送装置630停止输送酸液或碱液。酸性监测部610实时监测电沉积液的酸性,因此,可以获得电沉积液的酸性的实时变化。为防止酸液或碱液输送过多,当酸性监测部610实时监测的电沉积液的酸性数据达到预设酸性值时,控制酸碱液输送装置630停止输送酸液或碱液。In some embodiments, after starting to deliver acid or alkali to the electrodeposition solution container 100, the acidity controller 620 is further configured to: determine whether the acidity of the electrodeposition solution reaches a preset acid value, and when the acidity of the electrodeposition solution reaches When the acidity value is preset, the acid-alkali delivery device 630 is controlled to stop delivering acid or lye. The acidity monitoring unit 610 monitors the acidity of the electrodeposition solution in real time, and therefore, real-time changes in the acidity of the electrodeposition solution can be obtained. To prevent excessive delivery of acid or lye, when the acidity data of the electrodeposition solution monitored in real time by the acidity monitoring unit 610 reaches a preset acid value, the acid and lye delivery device 630 is controlled to stop delivering acid or lye.

如图12和图13所示,在一些实施例中,电沉积系统还包括循环容器660和电沉积液输送装置670。循环容器660用于储存电沉积液;电沉积液输送装置670连接于循环容器660和电沉积液容器100之间,用于驱动电沉积液在电沉积液容器100和循环容器660之间循环流动。通过驱动电沉积液在电沉积液容器100和循环容器660之间循环流动,可以使电沉积液的组分更加均匀,进一步提高电沉积效率。As shown in FIG. 12 and FIG. 13 , in some embodiments, the electrodeposition system further includes a circulation container 660 and an electrodeposition liquid delivery device 670 . The circulation container 660 is used to store the electrodeposition liquid; the electrodeposition liquid delivery device 670 is connected between the circulation container 660 and the electrodeposition liquid container 100, and is used to drive the electrodeposition liquid to circulate between the electrodeposition liquid container 100 and the circulation container 660 . By driving the electrodeposition liquid to circulate and flow between the electrodeposition liquid container 100 and the circulation container 660, the composition of the electrodeposition liquid can be made more uniform, and the electrodeposition efficiency can be further improved.

在一些实施例中,循环容器660设置于电沉积液容器100的上方,循环容器660内的电沉积液依靠自身重力流动至电沉积液容器100;电沉积液输送装置670被设置成将电沉积液容器100内的电沉积液输送至循环容器660。通过这种设置方式,仅需要将电沉积液容器100内的电沉积液输送至循环容器660,循环容器660中的电沉积液就可以自然流回电沉积液容器100。在本实施例中,电沉积液输送装置670可以为蠕动泵。In some embodiments, the circulation container 660 is arranged above the electrodeposition liquid container 100, and the electrodeposition liquid in the circulation container 660 flows to the electrodeposition liquid container 100 by its own gravity; The electrodeposition liquid in the liquid container 100 is sent to the circulation container 660 . With this arrangement, it is only necessary to transport the electrodeposition liquid in the electrodeposition liquid container 100 to the circulation container 660 , and the electrodeposition liquid in the circulation container 660 can naturally flow back to the electrodeposition liquid container 100 . In this embodiment, the electrodeposition liquid delivery device 670 may be a peristaltic pump.

如图12所示,在一些实施例中,电沉积液容器100与循环容器660之间还设置有过滤装置680,用于过滤电沉积液中的固体沉淀。在电沉积过程中,可能会在电沉积液中生成固体沉淀,通过设置过滤装置680,可以滤除电沉积液中的固体沉淀,防止固体沉淀影响电沉积过程。As shown in FIG. 12 , in some embodiments, a filter device 680 is provided between the electrodeposition solution container 100 and the circulation container 660 for filtering solid precipitation in the electrodeposition solution. During the electrodeposition process, solid precipitation may be generated in the electrodeposition solution. By setting the filter device 680, the solid precipitation in the electrodeposition solution can be filtered out to prevent the solid precipitation from affecting the electrodeposition process.

在一些实施例中,电沉积液容器100和循环容器660之间设置有循环管路,电沉积液输送装置670设置于循环管路上;过滤装置680可拆卸地设置于循环管路上。过滤装置680在使用一段时间后,过滤性能会降低,因此,本实施例中,过滤装置680可拆卸地设置于循环管路,可以便于过滤装置680的更换。In some embodiments, a circulation pipeline is provided between the electrodeposition liquid container 100 and the circulation container 660, the electrodeposition liquid delivery device 670 is disposed on the circulation pipeline; the filter device 680 is detachably disposed on the circulation pipeline. After the filter device 680 is used for a period of time, the filter performance will decrease. Therefore, in this embodiment, the filter device 680 is detachably arranged in the circulation pipeline, which can facilitate the replacement of the filter device 680 .

如图14所示,在一些实施例中,电沉积系统还包括外壳体700。外壳体700形成密闭的腔室。其中,电沉积液容器100、阳极支撑件300以及阴极支撑装置400设置于腔室内,电源设置于腔室外。在一些实施例中,电沉积系统还包括外壳体支架800,外壳体700设置在外壳体支架800上,外壳体支架800用于支撑外壳体700。As shown in FIG. 14 , in some embodiments, the electrodeposition system further includes an outer housing 700 . The outer casing 700 forms a closed chamber. Wherein, the electrodeposition liquid container 100, the anode support 300 and the cathode support device 400 are arranged inside the chamber, and the power supply is arranged outside the chamber. In some embodiments, the electrodeposition system further includes an outer shell support 800 on which the outer shell 700 is disposed, and the outer shell support 800 is used to support the outer shell 700 .

在进行二氧化铀的电沉积时,电沉积液的主要成分为硝酸铀酰,硝酸铀酰对眼睛、皮肤和粘膜具腐蚀性和刺激性;此外,铀具有放射性,可能会对电沉积系统的操作人员造成辐射损伤。因此,本实施例中,电沉积系统还包括外壳体700,外壳体700形成密闭的腔室,并且将电沉积液容器100、阳极支撑件300以及阴极支撑装置400设置在外壳体700内,以防止电沉积液对操作人员造成的损害。During the electrodeposition of uranium dioxide, the main component of the electrodeposition solution is uranyl nitrate, which is corrosive and irritating to the eyes, skin and mucous membranes; in addition, uranium is radioactive and may affect the electrodeposition system. Radiation injury to the operator. Therefore, in this embodiment, the electrodeposition system further includes an outer casing 700, which forms a closed chamber, and the electrodeposition solution container 100, the anode support 300 and the cathode support device 400 are arranged in the outer casing 700 to Prevent the damage caused by the electrodeposition liquid to the operator.

可以理解,外壳体700的腔室具有有限的空间并且腔室内存在放射性污染,因此,仅把必要的结构设置在腔室内,而把电源等结构设置在腔室外,以节省腔室内的空间,并防止电源等结构受到污染,也便于对电源等结构的控制和操作。It can be understood that the chamber of the outer casing 700 has limited space and there is radioactive contamination in the chamber. Therefore, only necessary structures are arranged in the chamber, and structures such as a power supply are arranged outside the chamber to save space in the chamber, and Prevent the power supply and other structures from being polluted, and also facilitate the control and operation of the power supply and other structures.

在一些实施例中,为便于对电沉积液容器100内的电沉积液进行加热,加热容器200可以设置于腔室内。在一些实施例中,加热控制器、酸性控制器620和电沉积液输送装置670中的一个或多个设置于腔室外,以便于操作,并且可以防止受到放射性污染。In some embodiments, in order to heat the electrodeposition liquid in the electrodeposition liquid container 100 , the heating container 200 may be arranged in the chamber. In some embodiments, one or more of the heating controller, the acid controller 620 and the electrodeposition liquid delivery device 670 are located outside the chamber to facilitate operation and prevent radioactive contamination.

在一些实施例中,电源可以为可编程电源,可编程电源的电流可以精密调节,例如,可编程电源的电流分辨率可以为1mA,通过对可编程电源进行编程,可以控制电沉积时电源的电流输出,并实现随时间自动调节电流,以改善电沉积质量。In some embodiments, the power supply can be a programmable power supply, and the current of the programmable power supply can be precisely adjusted. For example, the current resolution of the programmable power supply can be 1mA. By programming the programmable power supply, the current of the power supply during electrodeposition can be controlled. Current output, and automatically adjust the current over time to improve the quality of electrodeposition.

如图15和图16所示,在一些实施例中,外壳体700上设置有接口710,操作手套密封连接于接口710,操作手套用于供操作者在外壳体700内进行操作;外壳体700上设置有观察窗720,用于观察操作以及电沉积液在阴极500上的电沉积反应。外壳体700上设置的接口710数量可以为两个,两个接口710分别密封连接有操作手套,操作者通过操作手套对外壳体700内的结构进行操作。外壳体700上设置的观察窗720可以倾斜设置,便于操作者在操作的同时进行观察。在一些实施例中,观察窗720可以为玻璃材质。As shown in Figure 15 and Figure 16, in some embodiments, the outer shell 700 is provided with an interface 710, and the operating gloves are sealed and connected to the interface 710, and the operating gloves are used for the operator to operate in the outer shell 700; the outer shell 700 An observation window 720 is provided on the cathode 500 for observing the operation and the electrodeposition reaction of the electrodeposition solution on the cathode 500 . The number of interfaces 710 provided on the outer casing 700 may be two, and the two interfaces 710 are respectively sealed and connected with operating gloves, through which the operator operates the structure inside the outer casing 700 . The observation window 720 provided on the outer casing 700 can be inclined, which is convenient for the operator to observe while operating. In some embodiments, the observation window 720 may be made of glass.

如图17所示,外壳体700还可以设置有门730,门730可以设置在外壳体700的侧方,门730可以与外壳体700可转动地连接,从而打开或者关闭外壳体700,以便于外壳体700内的部件的安装和拆卸,便于阴极500在电沉积前后的放入和取出。As shown in Figure 17, the outer casing 700 can also be provided with a door 730, the door 730 can be arranged on the side of the outer casing 700, the door 730 can be rotatably connected with the outer casing 700, so as to open or close the outer casing 700, so that The assembly and disassembly of components inside the outer housing 700 facilitates the insertion and removal of the cathode 500 before and after electrodeposition.

对于本申请的实施例,还需要说明的是,在不冲突的情况下,本申请的实施例及实施例中的特征可以相互组合以得到新的实施例。Regarding the embodiments of the present application, it should also be noted that, under the condition of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other to obtain new embodiments.

以上所述仅为本发明的实施例,并非因此限制本发明的专利范围,凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本发明的专利保护范围内。The above is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the description of the present invention and the contents of the accompanying drawings, or directly or indirectly used in other related technologies fields, all of which are equally included in the scope of patent protection of the present invention.

Claims (12)

1. An electrodeposition system, comprising:
the upper part of the electrodeposition liquid container is provided with an opening, and the electrodeposition liquid container is used for containing electrodeposition liquid;
a heating container, wherein the electrodeposition container is arranged in the heating container, a heating medium is contained in the heating container, and the heating container is arranged to heat the heating medium so as to heat the electrodeposition liquid;
an anode support disposed on the bath container and partially covering an opening of the bath container, the anode support for supporting an anode of the electrodeposition system;
at least one cathode support device disposed above the bath container for supporting a plurality of cathodes, the cathode support device configured to control rotation of the plurality of cathodes.
2. The system of claim 1,
a magnetic stirring part is arranged in the electrodeposition container;
the bottom of the heating container is provided with a magnetic driving part which is arranged to drive the magnetic stirring piece to rotate.
3. The system of claim 1, wherein the cathode support apparatus comprises:
the cathodes are connected to the connecting piece, and the connecting piece is used for being connected with a power supply to supply power to the cathodes;
and the rotating assembly is connected with the connecting piece and is used for driving the connecting piece to rotate.
4. The system of claim 3, wherein the cathode support apparatus further comprises:
a plurality of support tubes fixedly connected to the connecting member and uniformly distributed along an axial direction of the connecting member, the support tubes being used for supporting the cathode.
5. The system of claim 4, wherein the cathode is a tubular electrodeposition cathode;
the support tube has elasticity, is arranged to be contracted radially inward to protrude into the cathode, and supports the cathode in the cathode by means of a restoring force radially outward.
6. The system of claim 3, wherein the cathode support apparatus further comprises:
a mounting plate on which at least one of the rotating assemblies is mounted.
7. The system of claim 6, wherein the rotating assembly comprises:
the driving motor is arranged on the mounting plate;
the pivot, be provided with the shaft hole on the mounting panel, the pivot passes the shaft hole and rotatably connect in the shaft hole, the one end of pivot with connecting piece fixed connection, the other end with the driving motor drive is connected, driving motor is used for the drive the pivot is rotatory.
8. The system of claim 7, wherein the rotating assembly further comprises:
the driving motor is arranged on the motor support, the motor support is fixedly connected to the mounting plate, and an accommodating space is formed between the motor support and the mounting plate;
and the coupler is arranged in the accommodating space and connected between the output shaft of the driving motor and the rotating shaft.
9. The system of claim 7, wherein the rotating assembly further comprises:
the bearing block is fixedly connected in the shaft hole;
the bearing is installed in the bearing seat, and the rotating shaft is connected in the bearing.
10. The system of claim 7, wherein the cathode support apparatus further comprises:
the lifting assembly is connected with the mounting plate and used for driving the mounting plate and driving the connecting piece to move along the axial direction of the rotating shaft; wherein,
when the lifting component controls the mounting plate to move downwards to cover the mounting plate on part of the opening of the electrodeposition liquid container, the cathode is soaked in the electrodeposition liquid.
11. The system of claim 10, wherein the lift assembly further comprises:
two support plates;
the lifting driving piece is fixed between the two supporting plates;
the slider, the slider with mounting panel fixed connection, the lift driving piece with the slider drive is connected, the lift driving piece is used for the drive the slider is in move on the lift driving piece, in order to drive the mounting panel is followed the axial direction of pivot removes.
12. The system of claim 11, wherein the lift assembly further comprises: at least two guide rods fixedly connected between the two support plates; wherein,
the guide rod penetrates through the sliding piece, and the lifting driving piece is used for driving the sliding piece to move along the guide rod.
CN202211511230.5A 2022-11-29 2022-11-29 Electrodeposition system Pending CN115726018A (en)

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Application Number Priority Date Filing Date Title
CN202211511230.5A CN115726018A (en) 2022-11-29 2022-11-29 Electrodeposition system

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Application Number Priority Date Filing Date Title
CN202211511230.5A CN115726018A (en) 2022-11-29 2022-11-29 Electrodeposition system

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4102770A (en) * 1977-07-18 1978-07-25 American Chemical And Refining Company Incorporated Electroplating test cell
CN205115657U (en) * 2015-11-30 2016-03-30 滨州学院 Rotatory device of electroplating of negative pole
CN107974704A (en) * 2017-12-14 2018-05-01 中国工程物理研究院激光聚变研究中心 A kind of electroplating bath cathode moving device rotated and move back and forth

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4102770A (en) * 1977-07-18 1978-07-25 American Chemical And Refining Company Incorporated Electroplating test cell
CN205115657U (en) * 2015-11-30 2016-03-30 滨州学院 Rotatory device of electroplating of negative pole
CN107974704A (en) * 2017-12-14 2018-05-01 中国工程物理研究院激光聚变研究中心 A kind of electroplating bath cathode moving device rotated and move back and forth

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