CN115725242A - High-efficiency low-damage diamond grinding fluid and preparation method thereof - Google Patents
High-efficiency low-damage diamond grinding fluid and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a high-efficiency low-damage diamond grinding fluid which is prepared from the following raw materials in parts by weight: 0.5-15 parts of diamond micro powder; 1-10 parts of a reactive thickener; 0.1-5 parts of viscosity-reducing leveling agent; 1-20 parts of a lubricant; 0.001-0.1 part of defoaming agent; water: 10-90 parts. When the diamond grinding fluid is used for double-sided grinding, the diamond grinding fluid can be uniformly distributed on a hard grinding disc surface, the problems of back thinning or distribution loss are avoided, the scratch can be reduced, and the out-of-control geometric parameters caused by over-high local temperature can be avoided; meanwhile, due to the thickening and viscosity reducing characteristics of the polishing slurry, the polishing slurry can be timely updated while the soft buffer layer is formed to guarantee efficiency and inhibit scratches, and the polishing processability is stabilized.
Description
Technical Field
The invention belongs to the technical field of ultra-precision grinding and polishing, and particularly relates to a high-efficiency low-damage diamond grinding fluid and a preparation method thereof.
Background
The double-side grinding is widely applied to the rough grinding processing of workpieces made of various materials such as sapphire and the like due to the characteristics of high efficiency, good geometric parameters of wafers, suitability for batch production and the like; after the rough grinding process, single-side grinding is often needed to further remove the damaged layer.
The double-sided grinding is usually realized by matching grinding fluid products such as boron carbide, silicon carbide and the like with large granularity and high content with a cast iron disc with relatively hard material; for single-side grinding, diamond grinding fluid is usually used to match with a copper disc or a tin disc which is relatively soft in material to realize processing.
With the gradual maturity of the application of the third-generation semiconductor materials such as SiC and GaN, the grinding process is continuously upgraded, the diamond grinding fluid is matched with a cast iron disc to realize double-sided grinding, coarse grinding and fine grinding can be combined into a whole, the process steps are simplified, the production efficiency is improved, quality indexes such as geometric parameters and surface roughness of wafers can be effectively controlled, and the quality of power-assisted batch production is improved.
Compared with single-side grinding, the double-side grinding requires that the grinding fluid can be matched with a cast iron disc with higher hardness for use, the renewal path of the grinding fluid is longer, and the requirement on the anti-extrusion grinding capability of the grinding fluid is higher. The conventional grinding fluid products such as boron carbide, silicon carbide and the like mostly overcome the working conditions of hard discs, long paths and high extrusion by large particle size and high concentration. The diamond grinding fluid is generally characterized by small particle size and low concentration, and the application of the conventional diamond grinding fluid to double-sided grinding is accompanied by the following problems:
1) The grinding fluid is unevenly distributed on the grinding disc, the grinding fluid is locally lost, local dry grinding of the workpiece and the grinding disc is caused, serious scratch is caused, the friction resistance is suddenly increased due to the local dry grinding, the temperature of the grinding disc is suddenly increased, and finally the geometric parameters such as TTV (time to live) are out of control;
2) The grinding fluid has the phenomena of chain scission and thinning, a grinding fluid supporting system is damaged, serious scratch and out-of-control geometric parameters are caused, and the processing cannot be normally carried out by serious people;
3) The viscosity of the grinding fluid is too high, and the grinding fluid is excessively accumulated on the surface of a grinding disc, so that the problems of slipping, burning, efficiency reduction and the like are caused;
there is a need for more thorough research and improvement of the grinding fluid system, such as: the uniform distribution performance, the pressure-resistant grinding capacity, the friction lubricating capacity, the flow renewal capacity and the like of the grinding fluid are enhanced, so that the processing target of high efficiency and low damage is realized.
Aiming at the problems, the invention develops a high-efficiency low-damage diamond grinding fluid which has the characteristics of thickening, viscosity reduction, buffering and lubrication, and can effectively solve the problems that the diamond grinding fluid is difficult to stably and uniformly distribute on a cast iron disc and is often accompanied by chain scission and thinning, distribution loss and the like; meanwhile, the soft buffer has reasonable thickness of the elastic liquid layer and appropriate updating capability, soft buffer on the hard disk surface is realized, effective action of diamond abrasive particles can be guaranteed, and higher grinding efficiency is obtained; in addition, the good lubricating property can effectively control the grinding temperature, reduce the disc consumption, avoid the out-of-control of geometrical parameters such as TTV and the like, and integrally realize high-efficiency and low-damage processing.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the high-efficiency low-damage diamond grinding fluid which can be uniformly distributed on the surface of a hard grinding disc when being used for double-sided grinding, has no problems of back thinning or distribution loss, can reduce the generation of scratches and avoid the out-of-control geometric parameters caused by overhigh local temperature; meanwhile, due to the thickening and viscosity reducing characteristics of the polishing slurry, the polishing slurry can be timely updated while the soft buffer layer is formed to guarantee efficiency and inhibit scratches, and the polishing processability is stabilized.
The invention also provides a preparation method of the high-efficiency low-damage diamond grinding fluid.
In order to achieve the purpose, the invention adopts the following technical scheme:
a high-efficiency low-damage diamond grinding fluid is composed of the following raw materials in parts by weight:
0.5-15 parts of diamond micro powder; 1-10 parts of a reactive thickener; 0.1-5 parts of viscosity-reducing leveling agent; 1-20 parts of a lubricant; 0.001-0.1 part of defoaming agent; water: 10-90 parts.
Specifically, the diamond micro powder is one or a mixture of more of single crystal diamond micro powder, polycrystal-like diamond micro powder or polycrystal diamond micro powder, and the granularity of the diamond micro powder is 10nm-40um.
Further, the reactive thickener is obtained by reacting a hydroxyl thickener, a carboxyl thickener, a functional assistant and water; the preparation process comprises the following steps: dissolving a hydroxyl thickener in hot water in a water bath at 50-100 ℃ to obtain a hydroxyl thickener solution with the concentration of not more than 10%, then adding the carboxyl thickener, uniformly dissolving, adding the functional auxiliary agent, stirring until the mixture is uniformly foamed, finally keeping the temperature in the water bath, reacting for 1-12h, taking out, and cooling to room temperature to obtain the product.
According to the invention, the hydroxyl thickener and the carboxyl thickener both use low-viscosity micromolecule substances, form a stable chemical structure through chemical reaction, inhibit chain scission and thinning, and avoid the problems of local unevenness, unstable efficiency and the like. Specifically, the hydroxyl thickener may be one or a mixture of two or more of polyvinyl alcohol, hydroxyethyl cellulose, carboxymethyl cellulose, hydroxypropyl methyl cellulose, hydroxypropyl cellulose, and ethyl hydroxyethyl cellulose.
Further, the carboxyl-type thickener may be one or a mixture of two or more of alginate and polyacrylic acid (e.g., polyacrylic acid PAA, sodium polyacrylate PAAS, etc.); the mass ratio of the hydroxyl thickener to the carboxyl thickener is 10:1-1:10. the hydroxyl thickening agent and the carboxyl thickening agent react under specific conditions to form a spongy porous structure, so that the water absorption thickening capability of the porous structure is enhanced, a film layer formed by grinding fluid on a grinding disc is improved, the soft buffer processing and uniform processing capability of the porous structure are improved, the problems of scratching, temperature rise, TTV high deviation and the like are avoided, and high-efficiency and low-damage processing is realized.
Further, the functional assistant comprises salts and inorganic acid, wherein the salts are carbonate and/or bicarbonate, and the inorganic acid is one or a mixture of more than two of sulfuric acid, nitric acid and phosphoric acid. The mass ratio of the salts to the inorganic acid in the functional auxiliary agent is 1:5-5:1, through the foaming effect of the functional auxiliary agent, the thickening agent can be in a spongy interpenetrating network porous structure, and the water absorption thickening capability and the stability of extrusion grinding resistance of the thickening agent are enhanced. The mass ratio of the sum of the mass of the hydroxyl thickening agent and the mass of the carboxyl thickening agent to the mass of the functional auxiliary agent is 1:10-10:1.
specifically, the viscosity-reducing and leveling agent is one or a mixture of alkanolamides (such as diethanolamide, stearoyl diethanolamide, PEG-3 lauramide, PEG-4 oleamide and the like), alkylphenol ethoxylates (such as nonylphenol polyoxyethylene ether and octylphenol polyoxyethylene ether), polyether modified siloxane. The viscosity-reducing leveling agent has good wettability of the cast iron disc, can effectively reduce the interfacial tension between the cast iron disc and the grinding fluid, enables the grinding fluid to be uniformly distributed on the whole grinding disc in a leveling manner, and avoids the out-of-control of geometric parameters such as dry grinding scratch caused by local deletion and TTV caused by local temperature rise; meanwhile, the lubricant has good viscosity-reducing and lubricating effects, can improve the fluidity of the grinding fluid, is beneficial to timely updating of the grinding fluid, and avoids the change of the grinding performance caused by excessive accumulation.
Specifically, the lubricant is one or a mixture of more than two of diethylene glycol, isopropanol, allyl glycol and the like. The defoaming agent is polyether modified organic silicon defoaming agent.
The invention provides a preparation method of the high-efficiency low-damage diamond grinding fluid, which is characterized by comprising the following steps:
1) Uniformly mixing water and the viscosity-reducing leveling agent to form dispersion liquid;
2) Adding diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic-assisted dispersion for 10-120min by using 400-600W to form diamond micro powder dispersion liquid;
3) Adding a lubricant and a defoaming agent, and uniformly stirring by ultrasonic;
4) Adding the reactive thickener, and stirring uniformly.
When the diamond grinding fluid is used for double-sided grinding and polishing, the diamond grinding fluid has the characteristics of thickening, viscosity reduction, buffering and lubrication, can realize uniform distribution and timely updating of the grinding fluid on a cast iron disc, can form effective soft film layer buffering on a hard cast iron disc by using a sponge-like porous thickening agent, and can reduce the generation of unnecessary defects integrally by matching with the strong lubrication effect of a lubricant.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a high-efficiency low-damage diamond grinding fluid and a preparation method thereof, wherein a reactive thickener is introduced into the grinding fluid, a stable porous chemical structure is formed through a chemical reaction between a low-viscosity micromolecule hydroxyl thickener and a carboxyl thickener, and the problem of chain scission and thinning during the processes of ultrasound, stirring, extrusion and grinding of a macromolecular thickener is solved; meanwhile, the viscosity-reducing leveling agent is added, so that the liquidity of the liquid is comprehensively regulated and controlled, the accumulation of the disc surface is reduced, and the grinding fluid is timely updated; the lubricity is enhanced by increasing the addition amount of the low-molecular alcohol, the problem of large resistance of the aqueous grinding fluid during double-sided grinding is integrally solved, and the measures in the aspects are integrated, so that high-efficiency and low-damage processing is integrally realized.
Drawings
FIG. 1 is a graph comparing the diamond slurry products of example 1 before (left) and after (right) thinning;
FIG. 2 is a graph showing a comparison of the diamond slurry of comparative example 2 before (left) and after (right) thinning-back during polishing.
Detailed Description
The technical solution of the present invention is further described in detail with reference to the following examples, but the scope of the present invention is not limited thereto.
In the following examples, the starting materials used were all common commercial products which were directly available or were prepared according to the conventional methods in the art. Room temperature refers to 25 ± 5 ℃.
Example 1
A high-efficiency low-damage diamond grinding fluid is composed of the following raw materials in parts by weight:
2 parts of diamond micro powder; 10 parts of a reactive thickener; 0.2 part of viscosity-reducing leveling agent; 8 parts of a lubricant; 0.1 part of defoaming agent; 80 parts of water. The preparation method of the high-efficiency low-damage diamond grinding fluid can be referred to as follows:
s1, preparing a reactive thickening agent: in a water bath at 90 ℃, 8g of polyvinyl alcohol is weighed and added into 200g of hot water at 90 ℃, and the mixture is stirred and dissolved uniformly to prepare a polyvinyl alcohol solution; weighing 2g of sodium alginate, adding the sodium alginate into a polyvinyl alcohol solution, and stirring and dissolving the sodium alginate uniformly to form a composite thickening agent solution; weighing 3g of sodium bicarbonate, adding into the composite thickening agent solution, stirring and dissolving uniformly; then 7g of 50 percent sulfuric acid with concentration is weighed and added into the solution, and the solution is quickly stirred and foamed until the foaming is uniform; keeping the temperature in the water bath for 4 hours, taking out the mixture, and cooling the mixture to room temperature for later use;
s2, uniformly mixing 400g of water with 1g of diethanolamide serving as a viscosity-reducing leveling agent to form a dispersion liquid;
s3, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic wave auxiliary dispersion for 60min at 500W to form diamond micro powder dispersion liquid;
s4, sequentially adding 40g of lubricant diethylene glycol and 0.5g of the Federal B-0626 type polyether modified organic silicon defoaming agent, and uniformly stirring by ultrasonic;
and S5, adding 50g of the reactive thickening agent prepared in the S1, and uniformly stirring.
Example 2
A high-efficiency low-damage diamond grinding fluid is composed of the following raw materials in parts by weight:
1.6 parts of diamond micro powder; 10 parts of a reactive thickener; 2 parts of a viscosity-reducing leveling agent; 4 parts of a lubricant; 0.06 part of defoaming agent; and 82.4 parts of water. The preparation method of the high-efficiency low-damage diamond grinding fluid can be referred to as follows:
s1, preparing a reactive thickening agent: in a water bath at 90 ℃, 10g of hydroxyethyl cellulose is weighed and added into 200g of hot water at 90 ℃, and the mixture is stirred and dissolved uniformly to prepare a hydroxyethyl cellulose solution; weighing 2.5g of sodium alginate, adding the sodium alginate into the hydroxyethyl cellulose solution, stirring and dissolving uniformly to form a composite thickening agent solution; weighing 5g of sodium bicarbonate, adding into the composite thickening agent solution, stirring and dissolving uniformly; weighing 10g of concentrated phosphoric acid, adding into the solution, and rapidly stirring and foaming until the mixture is uniformly foamed; keeping the temperature in the water bath for 4 hours, taking out the mixture, and cooling the mixture to room temperature for later use;
s2, taking 412g of water and 10g of diethanolamide as a viscosity-reducing leveling agent, and uniformly mixing to form a dispersion liquid;
s3, slowly adding 8g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic-assisted dispersion for 60min by using 500W to form diamond micro powder dispersion liquid;
s4, sequentially adding 20g of lubricant allyl glycol and 0.3g of the Federal B-0626 type polyether modified organic silicon defoaming agent, and uniformly stirring by ultrasonic;
and S5, adding 50g of the reactive thickening agent prepared in the S1, and uniformly stirring.
Example 3
A high-efficiency low-damage diamond grinding fluid is composed of the following raw materials in parts by weight:
2 parts of diamond micro powder; 6 parts of a reactive thickener; 0.16 part of viscosity-reducing leveling agent; 16 parts of a lubricant; 0.01 part of defoaming agent; 76 parts of water. The preparation method of the high-efficiency low-damage diamond grinding fluid can be specifically referred to as follows:
s1, preparing a reactive thickener: in a water bath at 80 ℃, 5g of polyvinyl alcohol is weighed and added into 200g of hot water at 80 ℃, stirred and dissolved uniformly to prepare a polyvinyl alcohol solution; weighing 5g of sodium alginate, adding the sodium alginate into a polyvinyl alcohol solution, stirring and dissolving uniformly to form a composite thickening agent solution; weighing 1g of sodium bicarbonate, adding into the composite thickening agent solution, stirring and dissolving uniformly; weighing 3g of 50% sulfuric acid, adding into the solution, and rapidly stirring and foaming until the solution is uniformly foamed; keeping the temperature in the water bath for 4 hours, taking out the mixture, and cooling the mixture to room temperature for later use;
s2, uniformly mixing 380g of water and 0.8g of a viscosity-reducing leveling agent, namely nonylphenol polyoxyethylene ether to form a dispersion liquid;
s3, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic-assisted dispersion for 60min at 500W to form diamond micro powder dispersion liquid;
s4, sequentially adding 80g of diethylene glycol lubricant and 0.05g of the Federal B-0626 type polyether modified organic silicon defoaming agent, and uniformly stirring by ultrasonic;
and S5, adding 30g of the reactive thickening agent prepared in the S1, and uniformly stirring.
Example 4
A high-efficiency low-damage diamond grinding fluid is composed of the following raw materials in parts by weight:
2 parts of diamond micro powder; 10 parts of a reactive thickener; 0.1 part of viscosity-reducing leveling agent; 10 parts of a lubricant; 0.01 part of defoaming agent; 78 parts of water. The preparation method of the high-efficiency low-damage diamond grinding fluid can be specifically referred to as follows:
s1, preparing a reactive thickening agent: in a water bath at 95 ℃, 4g of polyvinyl alcohol is weighed and added into 200g of hot water at 95 ℃, stirred and dissolved uniformly to prepare a polyvinyl alcohol solution; weighing 6g of sodium alginate, adding the sodium alginate into a polyvinyl alcohol solution, stirring and dissolving uniformly to form a composite thickening agent solution; weighing 0.8g of sodium bicarbonate, adding into the composite thickening agent solution, stirring and dissolving uniformly; weighing 2g of 50% sulfuric acid, adding into the solution, and rapidly stirring and foaming until the solution is uniformly foamed; keeping the temperature in the water bath for 4 hours, taking out the mixture, and cooling the mixture to room temperature for later use;
s2, taking 390g of water and 0.5g of diethanolamide as a viscosity-reducing leveling agent, and uniformly mixing to form a dispersion liquid;
s3, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic wave auxiliary dispersion for 60min at 500W to form diamond micro powder dispersion liquid;
s4, adding 50g of isopropanol lubricant and 0.05g of the Federal B-0626 type polyether modified organic silicon defoaming agent in sequence, and stirring uniformly by ultrasonic.
And S5, adding 50g of the reactive thickening agent prepared in the S1, and uniformly stirring.
Example 5
A high-efficiency low-damage diamond grinding fluid is different from the diamond grinding fluid in the embodiment 1 in that: replacing the hydroxy thickener polyvinyl alcohol with carboxymethyl cellulose; replacing sodium alginate which is a carboxyl thickener with polyacrylic acid PAA; other methods and preparations are referred to in example 1.
Example 6
A high-efficiency low-damage diamond grinding fluid is different from the diamond grinding fluid in the embodiment 1 in that: replacing the hydroxy thickener polyvinyl alcohol with hydroxypropyl methyl cellulose; replacing sodium alginate serving as a carboxyl thickener with sodium polyacrylate PAAS; other and preparative methods are described in example 1.
Example 7
A high-efficiency low-damage diamond grinding fluid is different from the diamond grinding fluid in the embodiment 1 in that: replacing the viscosity-reducing leveling agent with stearyl diethanolamine; other and preparative methods are described in example 1.
Example 8
A high-efficiency low-damage diamond grinding fluid is different from the diamond grinding fluid in the embodiment 1 in that: replacing the viscosity-reducing leveling agent with PEG-3 lauramide; other methods and preparations are referred to in example 2.
Example 9
A high-efficiency low-damage diamond grinding fluid is different from the diamond grinding fluid in the embodiment 2 in that: replacing the viscosity-reducing leveling agent with PEG-4 oleamide; other and preparative methods are described in example 2.
Comparative example 1
The diamond grinding fluid is composed of the following raw materials in parts by weight:
2 parts of diamond micro powder; 0 part of reactive thickener; 0.2 part of diethanolamide as a viscosity-reducing leveling agent; 8 parts of a lubricant; 0.1 part of defoaming agent; and 90 parts of water. The difference from example 1 is that: the reactive thickener is omitted.
The preparation method of the diamond grinding fluid comprises the following steps:
s1, uniformly mixing 450g of water and 1g of diethanolamide to form a dispersion liquid;
s2, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic wave auxiliary dispersion for 60min at 500W to form diamond micro powder dispersion liquid;
and S3, sequentially adding 40g of diethylene glycol lubricant and 0.5g of federal B-0626 type polyether modified organic silicon defoamer, and uniformly stirring by ultrasonic.
Comparative example 2
The diamond grinding fluid is composed of the following raw materials in parts by weight:
2 parts of diamond micro powder; 10 parts of bentonite thickener; 0.2 part of diethanolamide as a viscosity-reducing leveling agent; 8 parts of a lubricant; 0.1 part of defoaming agent; 80 parts of water. The difference from example 1 is that: the reactive thickener was replaced with a bentonite thickener.
The preparation method of the diamond grinding fluid comprises the following steps:
s1, uniformly mixing 400g of water and 1g of diethanolamide to form a dispersion liquid;
s2, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic wave auxiliary dispersion for 60min at 500W to form diamond micro powder dispersion liquid;
s3, sequentially adding 40g of diethylene glycol lubricant and 0.5g of federal B-0626 type polyether modified organic silicon defoamer, and uniformly stirring by ultrasonic;
and S4, adding 50g of bentonite thickener, and uniformly stirring.
Comparative example 3
The diamond grinding fluid consists of the following raw materials in parts by weight:
2 parts of diamond micro powder; 12 parts of bentonite thickener; 0.2 part of diethanolamide as a viscosity-reducing leveling agent; 8 parts of a lubricant; 0.1 part of defoaming agent; 78 parts of water. The comparative example is based on comparative example 2, and the amount of the bentonite thickener is further increased.
The preparation method of the diamond grinding fluid comprises the following steps:
s1, 390g of water and 1g of diethanolamide are uniformly mixed to form a dispersion liquid.
And S2, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic-assisted dispersion for 60min at 400-600W to form the diamond micro powder dispersion liquid.
And S3, sequentially adding 40g of diethylene glycol lubricant and 0.5g of federal B-0626 type polyether modified organic silicon defoaming agent, and uniformly stirring by ultrasonic.
And S4, adding 60g of bentonite thickener, and uniformly stirring.
Comparative example 4
The diamond grinding fluid is composed of the following raw materials in parts by weight:
2 parts of diamond micro powder; 12 parts of a crosslinked polyacrylic resin thickener; 0.2 part of viscosity-reducing leveling agent; 8 parts of a lubricant; 0.1 part of defoaming agent; 78 parts of water. The difference from example 1 is that: the reactive thickener was replaced with a crosslinked polyacrylic resin thickener.
S1, 390g of water and 1g of diethanolamide are uniformly mixed to form a dispersion liquid.
And S2, slowly adding 10g of 3um single-crystal diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic-assisted dispersion for 60min at 400-600W to form the diamond micro powder dispersion liquid.
And S3, sequentially adding 40g of diethylene glycol lubricant and 0.5g of federal B-0626 type polyether modified organic silicon defoaming agent, and uniformly stirring by ultrasonic.
And S4, adding 60g of American Lubomoisten Carbopol 940 type crosslinked polyacrylic resin thickener, and uniformly stirring.
Effect test
Invasive 13B double-sided grinder, cast iron disc, pressure 200g/cm 2 The rotating speed is 35rpm, the diamond grinding fluid flow is 20ml/min, and the grinding time is 60min. The viscosity was measured using a Brookfield LVDV-I rotary viscometer, the efficiency was calculated by measuring the thickness change before and after grinding using a ten-thousandth meter, and the scratch was detected visually under a highlight lamp. The specific test results are shown in the following table:
TABLE 1 comparison of grinding application Properties
As can be seen from the comparative examples in table 1: the diamond grinding fluid of comparative example 1, which is not added with any thickener, has extremely poor compressive grinding capacity, severe vibration and sound, severe scratch and failure of normal test. The diamond grinding fluid added with the bentonite suspending agent has certain anti-pressure grinding capacity, but the grinding fluid has the problem of pressurization and thinning, and the grinding fluid after thinning can bring vibration and sound, namely local dry grinding is generated, the temperature rises suddenly, and the scratch is serious; and the viscosity and the consistency of the diamond grinding fluid prepared by adding the bentonite suspending agent are simultaneously increased, and the processing efficiency of the diamond grinding fluid with the viscosity of 2460cp is 0.69 mu m/min, which is only 56% of that of the diamond grinding fluid of the example 1. To solve the problems of vibration, noise and back-thinning, the efficiency of comparative example 3, in which the addition amount of bentonite is increased, is reduced to 0.48 μm/min, which is only 39% of that of example 1. Other solutions such as acrylic thickeners were also tested as in comparative example 4, but all had the problems of vibration, sound, thinning, elevated temperature, low processing efficiency, severe scratching, and even failure to perform normal testing. The diamond grinding fluid of the examples 5 to 9 has the grinding effect which is equivalent to that of the grinding fluid of the example 2.
Fig. 1 and 2 show the back-dilution of the slurry products of example 1 and comparative example 2 before and after grinding, respectively. As can be seen from the figure: the diamond slurry product of example 1 showed no significant back-thinning before and after polishing, while comparative example 2 showed significant back-thinning after polishing.
As can be seen from Table 1: after the reactive thickener is used, the problems of back dilution, vibration, sound, temperature rise, serious scratch and the like can be effectively solved, and the high-efficiency removal of more than 1.10 mu m/min can be realized.
Although the present invention has been described in terms of preferred embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the present invention, which is intended to be covered by the claims.
Claims (9)
1. The high-efficiency low-damage diamond grinding fluid is characterized by comprising the following raw materials in parts by weight:
0.5-15 parts of diamond micro powder; 1-10 parts of a reactive thickener; 0.1-5 parts of viscosity-reducing leveling agent; 1-20 parts of a lubricant; 0.001-0.1 part of defoaming agent; water: 10-90 parts.
2. The high-efficiency low-damage diamond grinding fluid according to claim 1, wherein the diamond micropowder is one or a mixture of single-crystal diamond micropowder, polycrystalline-like diamond micropowder or polycrystalline diamond micropowder, and the diamond micropowder has a particle size of 10nm-40um.
3. The high efficiency and low damage diamond grinding fluid according to claim 1, wherein the reactive thickener is obtained by reacting a hydroxyl-based thickener, a carboxyl-based thickener, a functional assistant, and water; the preparation process comprises the following steps: dissolving a hydroxyl thickener in water in a water bath at 50-100 ℃ to obtain a hydroxyl thickener solution, then adding the carboxyl thickener, uniformly dissolving, adding the functional auxiliary agent, stirring until the foaming is uniform, finally carrying out heat preservation reaction in the water bath for 1-12h, taking out, and cooling to room temperature to obtain the product.
4. The high efficiency and low damage diamond grinding fluid according to claim 3, wherein the hydroxyl-based thickener is one or a mixture of two or more of polyvinyl alcohol, hydroxyethyl cellulose, carboxymethyl cellulose, hydroxypropyl methyl cellulose, hydroxypropyl cellulose, and ethyl hydroxyethyl cellulose.
5. The high efficiency and low damage diamond grinding fluid according to claim 3, wherein the carboxyl-type thickener is one or a mixture of two or more of alginate and polyacrylic acid; the mass ratio of the hydroxyl thickener to the carboxyl thickener is 10:1-1:10.
6. the high-efficiency low-damage diamond grinding fluid according to claim 3, wherein the functional auxiliary agent comprises salts and inorganic acid, the salts are carbonate and/or bicarbonate, and the inorganic acid is one or a mixture of more than two of sulfuric acid, nitric acid and phosphoric acid; the mass ratio of the salts to the inorganic acid in the functional auxiliary agent is 1:5-5:1; the mass ratio of the sum of the mass of the hydroxyl thickening agent and the mass of the carboxyl thickening agent to the mass of the functional auxiliary agent is 1:10-10:1.
7. the high efficiency and low damage diamond grinding fluid according to claim 1, wherein the viscosity-reducing and leveling agent is one of alkanolamides, alkylphenol ethoxylates, polyether modified siloxane or a mixture thereof.
8. The high efficiency low damage diamond abrasive fluid according to claim 1 wherein the lubricant is one or a mixture of two or more of diethylene glycol, isopropyl alcohol, and allyl glycol.
9. The method for preparing the high-efficiency low-damage diamond grinding fluid as claimed in any one of claims 1 to 8, characterized by comprising the following steps:
1) Uniformly mixing water and the viscosity-reducing leveling agent to form dispersion liquid;
2) Adding diamond micro powder into the dispersion liquid under the stirring condition, and performing ultrasonic-assisted dispersion for 10-120min by using 400-600W to form diamond micro powder dispersion liquid;
3) Adding a lubricant and a defoaming agent, and uniformly stirring by ultrasonic;
4) Adding the reactive thickener, and stirring uniformly.
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