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CN115684011A - Nanowire imaging device and group refractive index measuring method - Google Patents

Nanowire imaging device and group refractive index measuring method Download PDF

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CN115684011A
CN115684011A CN202211236686.5A CN202211236686A CN115684011A CN 115684011 A CN115684011 A CN 115684011A CN 202211236686 A CN202211236686 A CN 202211236686A CN 115684011 A CN115684011 A CN 115684011A
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nanowire
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sample
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CN115684011B (en
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刘新风
吴宪欣
张帅
杜文娜
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National Center for Nanosccience and Technology China
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Abstract

The invention provides a nanowire imaging device and a group refractive index measuring method. In the device, a femtosecond laser light source is in optical path connection with a microscope objective so that the microscope objective focuses exciting light of the femtosecond laser light source on a nanowire sample on a sample stage to be used as pump light to excite the nanowire sample, and the nanowire sample generates lasing to radiate emergent light with coherence; and the first beam splitting piece is in optical path connection with the microobjective so as to divide emergent light collected by the microobjective into first light and second light, and the second reflecting mirror used for reflecting the second light is arranged on the sliding component, so that the second reflecting mirror can move along the direction far away from or close to the first beam splitting piece, and further the optical path difference control of the first light and the second light is realized, so that the first imaging device obtains overlapped imaging with different delay times, the signal resolution on a time scale is realized, the detection requirements of optical pulse generation and transmission process are met, and the support is provided for the measurement of the group refractive index.

Description

纳米线成像装置及群折射率测量方法Nanowire imaging device and method for measuring group refractive index

技术领域technical field

本发明涉及光学测量技术领域,尤其涉及一种纳米线成像装置、群折射率测量方法、群折射率测量装置、电子设备和存储介质。The invention relates to the technical field of optical measurement, in particular to a nanowire imaging device, a group refractive index measurement method, a group refractive index measurement device, electronic equipment and a storage medium.

背景技术Background technique

随着信息技术的快速发展,光纤通信与光计算等领域也迅速发展。而在光纤通信与光计算等光电领域中,改变介质的群折射率,控制慢光产生是极其重要的。其中,慢光是指光波在介质中传播时群速度减慢并小于真空光速的物理现象。因此,为了更好地产生所需的慢光,需要对介质的群折射率进行测量。With the rapid development of information technology, fields such as optical fiber communication and optical computing are also developing rapidly. In optoelectronic fields such as optical fiber communication and optical computing, it is extremely important to change the group refractive index of the medium and control the generation of slow light. Among them, slow light refers to the physical phenomenon that the group velocity of light waves slows down and is smaller than the speed of light in vacuum when the light wave propagates in the medium. Therefore, in order to better produce the required slow light, it is necessary to measure the group refractive index of the medium.

目前,通过探测光在经过介质后到达探测器的时间延迟来计算得到群折射率的大小,然而,受限于使用光的脉冲宽度和探测器的时间分辨极限,这种测量方式只能应用于宏观体系的测量,难以测量微纳尺度以下介质的群折射率。而针对纳米线体系,利用一束光子能量高于材料带隙的激光照射纳米线样品的一端将其激发产生辐射,在纳米线的另一端收集光谱信号,从而提取纳米线腔模式震荡信息测量群折射率大小,然而,纳米线成像装置采用的是连续光作为激发光源,无法实现时间尺度上的信号分辨,从而无法满足光脉冲产生和传输过程的探测需求,进而无法测量群折射率。At present, the group refractive index is calculated by detecting the time delay of light reaching the detector after passing through the medium. However, limited by the pulse width of the used light and the time resolution limit of the detector, this measurement method can only be applied to For the measurement of macroscopic systems, it is difficult to measure the group refractive index of media below the micro-nano scale. For the nanowire system, one end of the nanowire sample is irradiated with a laser beam whose photon energy is higher than the band gap of the material to excite it to generate radiation, and the spectral signal is collected at the other end of the nanowire to extract the measurement group of the cavity mode oscillation information of the nanowire. However, the nanowire imaging device uses continuous light as the excitation light source, which cannot achieve signal resolution on the time scale, so it cannot meet the detection requirements of the optical pulse generation and transmission process, and cannot measure the group refractive index.

发明内容Contents of the invention

本发明提供一种纳米线成像装置、群折射率测量方法、群折射率测量装置、电子设备和存储介质,用以解决上述现有技术中的缺陷,实现纳米线的群折射率测量。The present invention provides a nanowire imaging device, a group refractive index measurement method, a group refractive index measurement device, electronic equipment and a storage medium to solve the above-mentioned defects in the prior art and realize group refractive index measurement of nanowires.

本发明提供一种纳米线成像装置,包括:样品台、飞秒激光光源、显微物镜、干涉仪和第一成像装置,所述干涉仪包括第一分束片、第一反射镜、滑动组件和第二反射镜;The invention provides a nanowire imaging device, comprising: a sample stage, a femtosecond laser light source, a microscope objective lens, an interferometer, and a first imaging device, wherein the interferometer includes a first beam splitter, a first reflector, and a sliding assembly and a second mirror;

所述样品台用于放置待测量的纳米线样品;The sample stage is used to place the nanowire sample to be measured;

所述飞秒激光光源与所述显微物镜进行光路连接,所述显微物镜用于将所述飞秒激光光源的激发光聚焦于所述纳米线样品,所述显微物镜还用于收集所述纳米线样品的出射光,所述出射光为所述激发光使所述纳米线样品产生激射后发出的具有相干性的光;The femtosecond laser light source is optically connected to the microscopic objective lens, the microscopic objective lens is used to focus the excitation light of the femtosecond laser light source on the nanowire sample, and the microscopic objective lens is also used to collect The outgoing light of the nanowire sample, the outgoing light is coherent light emitted after the excitation light causes the nanowire sample to generate lasing;

所述第一分束片与所述显微物镜进行光路连接,所述第一分束片用于将所述出射光划分为第一束光和第二束光;The first beam splitter is optically connected to the microscope objective lens, and the first beam splitter is used to divide the outgoing light into a first beam of light and a second beam of light;

所述第一反射镜与所述第一分束片进行光路连接,所述第一反射镜用于将所述第一束光反射至所述第一分束片;The first mirror is optically connected to the first beam splitter, and the first mirror is used to reflect the first beam of light to the first beam splitter;

所述第二反射镜与所述第一分束片进行光路连接,所述第二反射镜用于将所述第二束光反射至所述第一分束片,所述第二反射镜设于所述滑动组件,所述滑动组件用于使所述第二反射镜沿远离或接近所述第一分束片的方向移动;The second reflector is optically connected to the first beam splitter, the second reflector is used to reflect the second beam of light to the first beam splitter, and the second reflector is set In the sliding assembly, the sliding assembly is used to move the second mirror in a direction away from or close to the first beam splitter;

所述第一成像装置与所述第一分束片进行光路连接,以使反射的第一束光传输至所述第一成像装置,反射的第二束光传输至所述第一成像装置,以供所述第一成像装置获得所述纳米线样品的重叠成像。The first imaging device is optically connected to the first beam splitter, so that the reflected first beam of light is transmitted to the first imaging device, and the reflected second beam of light is transmitted to the first imaging device, for the first imaging device to obtain superimposed imaging of the nanowire sample.

根据本发明提供的一种纳米线成像装置,还包括:滤光片;A nanowire imaging device provided according to the present invention further includes: a filter;

所述第一分束片通过所述滤光片与所述显微物镜进行光路连接;The first beam splitter is optically connected to the microscope objective lens through the filter;

所述显微物镜还用于收集被所述纳米线样品反射的反射光,所述滤光片用于阻挡所述反射光,并传输所述出射光。The microscope objective lens is also used to collect reflected light reflected by the nanowire sample, and the optical filter is used to block the reflected light and transmit the outgoing light.

根据本发明提供的一种纳米线成像装置,还包括:光谱仪、可翻折镜和控制器;A nanowire imaging device provided according to the present invention further includes: a spectrometer, a foldable mirror and a controller;

所述控制器用于控制可翻折镜,以使所述滤光片与所述第一分束片进行光路连接,或者使所述滤光片与所述光谱仪进行光路连接;The controller is used to control the foldable mirror, so that the optical filter is connected to the first beam splitter, or the optical filter is connected to the spectrometer;

在所述滤光片与所述光谱仪进行光路连接的情况下,所述光谱仪用于检测信号光的波长信息,所述信号光为所述滤光片过滤后的光;When the optical filter is connected to the spectrometer in an optical path, the spectrometer is used to detect wavelength information of signal light, and the signal light is light filtered by the optical filter;

所述控制器用于基于所述波长信息调整所述滤光片的通过波长。The controller is used for adjusting the passing wavelength of the optical filter based on the wavelength information.

根据本发明提供的一种纳米线成像装置,所述干涉仪还包括:长焦透镜;According to a nanowire imaging device provided by the present invention, the interferometer further includes: a telephoto lens;

所述第一成像装置通过所述长焦透镜与所述第一分束片进行光路连接;The first imaging device is optically connected to the first beam splitter through the telephoto lens;

所述长焦透镜用于将反射的第一束光和反射的第二束光汇聚于所述第一成像装置。The telephoto lens is used for converging the reflected first beam of light and the reflected second beam of light on the first imaging device.

根据本发明提供的一种纳米线成像装置,所述第二反射镜为中空镜,所述中空镜包括第一镜子和第二镜子,所述第一镜子与所述第二镜子的镜面夹角为90度;According to a nanowire imaging device provided by the present invention, the second reflecting mirror is a hollow mirror, the hollow mirror includes a first mirror and a second mirror, and the included angle between the first mirror and the second mirror is is 90 degrees;

所述第一镜子用于将所述第二束光反射至所述第二镜子,所述第二镜子用于将经过所述第一镜子反射的第二束光反射至所述第一分束片。The first mirror is used to reflect the second beam of light to the second mirror, and the second mirror is used to reflect the second beam of light reflected by the first mirror to the first split beam piece.

根据本发明提供的一种纳米线成像装置,还包括:第二分束片;A nanowire imaging device provided according to the present invention further includes: a second beam splitter;

所述飞秒激光光源通过所述第二分束片与所述显微物镜进行光路连接,以使所述激发光传输至所述显微物镜;The femtosecond laser light source is optically connected to the microscopic objective lens through the second beam splitter, so that the excitation light is transmitted to the microscopic objective lens;

所述第一分束片通过所述第二分束片与所述显微物镜进行光路连接,以使所述出射光传输至所述第一分束片。The first beam splitter is optically connected to the microscope objective lens through the second beam splitter, so that the outgoing light is transmitted to the first beam splitter.

根据本发明提供的一种纳米线成像装置,还包括:照明光源和第三分束片;A nanowire imaging device provided according to the present invention further includes: an illumination light source and a third beam splitter;

所述照明光源通过所述第三分束片与所述显微物镜进行光路连接,以使所述照明光源的照明光传输至所述显微物镜,所述显微物镜还用于将所述照明光聚焦于所述纳米线样品;The illumination light source is optically connected to the microscopic objective lens through the third beam splitter, so that the illumination light of the illumination light source is transmitted to the microscopic objective lens, and the microscopic objective lens is also used to illuminating light is focused on the nanowire sample;

所述第一分束片通过所述第三分束片与所述显微物镜进行光路连接,以使所述出射光传输至所述第一分束片。The first beam splitter is optically connected to the microscope objective lens through the third beam splitter, so that the outgoing light is transmitted to the first beam splitter.

根据本发明提供的一种纳米线成像装置,还包括:第二成像装置和控制器;A nanowire imaging device provided according to the present invention further includes: a second imaging device and a controller;

所述第二成像装置与所述显微物镜进行光路连接,以使所述出射光传输至所述第二成像装置,以供所述第二成像装置获得所述纳米线样品的样品成像;The second imaging device is optically connected to the microscope objective lens, so that the outgoing light is transmitted to the second imaging device, so that the second imaging device can obtain sample imaging of the nanowire sample;

所述样品台为可三维位移的移动台,所述控制器用于基于所述样品成像,控制所述样品台移动,以对所述纳米线样品进行成像聚焦。The sample stage is a movable stage capable of three-dimensional displacement, and the controller is used to control the movement of the sample stage based on the imaging of the sample, so as to focus on the imaging of the nanowire sample.

本发明还提供一种利用上述任一项所述的纳米线成像装置实现的群折射率测量方法,包括:The present invention also provides a group refractive index measurement method realized by using the nanowire imaging device described in any one of the above, including:

在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间;Under the current imaging round, acquire the position information of the sliding assembly, and determine the delay time of the current imaging round based on the position information;

获取所述第一成像装置在所述当前成像轮次下获得的重叠成像;Acquiring overlapping imaging obtained by the first imaging device under the current imaging round;

在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像;When the current imaging round is not the last imaging round, control the movement of the sliding assembly to move the sliding assembly to the position of the next imaging round, and use the next imaging round as In the current imaging round, a plurality of overlapping imaging with different delay times is obtained;

基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息;Determining interference fringe intensity distribution information based on the plurality of overlapping imaging with different delay times;

基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。Determining a group velocity based on the interference fringe intensity distribution information, the delay times of the overlapping imaging of the plurality of different delay times and the length of the nanowire sample, and determining the group refraction of the nanowire sample based on the group velocity Rate.

根据本发明提供的一种群折射率测量方法,在所述纳米线成像装置包括滤光片、光谱仪和可翻折镜的情况下,在所述获取所述第一成像装置在所述当前成像轮次下获得的重叠成像,之前还包括:According to a group refractive index measurement method provided by the present invention, in the case that the nanowire imaging device includes a filter, a spectrometer and a foldable mirror, when the first imaging device is acquired in the current imaging wheel Overlap image acquired next time, previously also included:

控制所述可翻折镜,以使所述滤光片与所述光谱仪进行光路连接;controlling the foldable mirror so that the optical filter is connected to the spectrometer;

基于所述光谱仪检测的波长信息调整所述滤光片的通过波长;adjusting the pass wavelength of the filter based on the wavelength information detected by the spectrometer;

控制所述可翻折镜,以使所述滤光片与所述第一分束片进行光路连接。The foldable mirror is controlled so that the optical filter is connected with the first beam splitter.

根据本发明提供的一种群折射率测量方法,在所述纳米线成像装置包括第二成像装置的情况下,在所述获取所述第一成像装置在所述当前成像轮次下获得的重叠成像,之前还包括:According to a group refractive index measurement method provided by the present invention, in the case where the nanowire imaging device includes a second imaging device, in the acquisition of the overlapping imaging obtained by the first imaging device in the current imaging round , which previously also included:

获取所述第二成像装置获得的样品成像;acquiring the image of the sample obtained by the second imaging device;

基于所述样品成像,确定移动方式;determining a movement pattern based on said imaging of the sample;

基于所述移动方式,控制所述样品台移动。Based on the movement pattern, the movement of the sample stage is controlled.

本发明还提供一种利用上述任一项所述的纳米线成像装置实现的群折射率测量装置,包括:The present invention also provides a group refractive index measurement device realized by using the nanowire imaging device described in any one of the above, including:

信息获取模块,用于在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间;An information acquisition module, configured to acquire the position information of the sliding assembly under the current imaging round, and determine the delay time of the current imaging round based on the position information;

成像获取模块,用于获取所述第一成像装置在所述当前成像轮次下获取的重叠成像;an imaging acquisition module, configured to acquire overlapping imaging acquired by the first imaging device in the current imaging round;

组件控制模块,用于在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像;An assembly control module, configured to control the movement of the sliding assembly when the current imaging round is not the last imaging round, so as to move the sliding assembly to the position of the next imaging round, and place the The next imaging round is used as the current imaging round, and multiple overlapping imaging with different delay times are obtained;

信息确定模块,用于基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息;An information determination module, configured to determine the intensity distribution information of interference fringes based on the overlapping imaging of the plurality of different delay times;

群折射率确定模块,用于基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。A group refractive index determination module, configured to determine a group velocity based on the intensity distribution information of the interference fringes, the delay time of the overlapping imaging of the plurality of different delay times, and the length of the nanowire sample, and determine the group velocity based on the group velocity The group refractive index of the nanowire sample.

本发明还提供一种电子设备,包括存储器、处理器及存储在存储器上并可在处理器上运行的计算机程序,所述处理器执行所述程序时实现如上述任一种所述群折射率测量方法。The present invention also provides an electronic device, including a memory, a processor, and a computer program stored on the memory and operable on the processor. When the processor executes the program, it realizes the group refractive index as described above. Measurement methods.

本发明还提供一种非暂态计算机可读存储介质,其上存储有计算机程序,该计算机程序被处理器执行时实现如上述任一种所述群折射率测量方法。The present invention also provides a non-transitory computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the method for measuring group refractive index as described in any one of the above-mentioned methods is realized.

本发明提供的纳米线成像装置、群折射率测量方法、群折射率测量装置、电子设备和存储介质,飞秒激光光源与显微物镜进行光路连接,以使显微物镜将飞秒激光光源的激发光聚焦于样品台上的纳米线样品,即激发光经过显微物镜聚焦到纳米线样品的表面,以作为泵浦光将纳米线样品激发,从而使纳米线样品产生激射,辐射出具有相干性的出射光;且第一分束片与显微物镜进行光路连接,以将显微物镜收集的出射光划分为第一束光和第二束光,而用于反射第二束光的第二反射镜设于滑动组件,从而使第二反射镜可以沿远离或接近第一分束片的方向移动,进而实现第一束光和第二束光的光程差控制,以使第一成像装置获得不同延迟时间的重叠成像,且由于出射光为具有相干性的激光,因此,基于多个不同延迟时间的重叠成像可以确定干涉条纹强度分布信息,实现在时间尺度上探测光脉冲信号变化,即实现时间尺度上的信号分辨,满足光脉冲产生和传输过程的探测需求,从而为群折射率测量提供支持。In the nanowire imaging device, group refractive index measurement method, group refractive index measurement device, electronic equipment, and storage medium provided by the present invention, the femtosecond laser light source is connected to the microscopic objective lens in an optical path, so that the microscopic objective lens integrates the femtosecond laser light source. The excitation light is focused on the nanowire sample on the sample stage, that is, the excitation light is focused on the surface of the nanowire sample through the microscope objective lens, and used as pump light to excite the nanowire sample, so that the nanowire sample generates lasing and radiates coherent outgoing light; and the first beam splitter is connected to the optical path of the microscopic objective lens to divide the outgoing light collected by the microscopic objective lens into the first light beam and the second light beam, and the light used to reflect the second light beam The second reflection mirror is arranged on the sliding assembly, so that the second reflection mirror can move away from or approach the first beam splitter, thereby realizing the control of the optical path difference between the first beam of light and the second beam of light, so that the first The imaging device obtains overlapping imaging with different delay times, and since the emitted light is a coherent laser, the intensity distribution information of interference fringes can be determined based on multiple overlapping imaging with different delay times, and the detection of optical pulse signal changes on the time scale can be realized , that is, to achieve signal resolution on the time scale and meet the detection requirements of the optical pulse generation and transmission process, thereby providing support for group refractive index measurement.

附图说明Description of drawings

为了更清楚地说明本发明或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the present invention or the technical solutions in the prior art, the accompanying drawings that need to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the accompanying drawings in the following description are the present invention. For some embodiments of the invention, those skilled in the art can also obtain other drawings based on these drawings without creative effort.

图1为本发明提供的纳米线成像装置的结构示意图之一;Fig. 1 is one of the structural schematic diagrams of the nanowire imaging device provided by the present invention;

图2为本发明提供的纳米线成像装置的结构示意图之二;Fig. 2 is the second structural schematic diagram of the nanowire imaging device provided by the present invention;

图3为本发明提供的群折射率测量方法的流程示意图;Fig. 3 is a schematic flow chart of the group refractive index measurement method provided by the present invention;

图4为本发明提供的群折射率测量装置的结构示意图;Fig. 4 is the structural representation of the group refractive index measuring device provided by the present invention;

图5为本发明提供的电子设备的结构示意图。FIG. 5 is a schematic structural diagram of an electronic device provided by the present invention.

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚,下面将结合本发明中的附图,对本发明中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. Obviously, the described embodiments are part of the embodiments of the present invention , but not all examples. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

在本发明实施例的描述中,需要说明的是,术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明实施例和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明实施例的限制。此外,术语“第一”、“第二”、“第三”仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right" , "vertical", "horizontal", "top", "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing this The embodiments and simplified descriptions of the invention do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

在本发明实施例的描述中,需要说明的是,除非另有明确的规定和限定,术语“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明实施例中的具体含义。In the description of the embodiments of the present invention, it should be noted that unless otherwise specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, Or integrated connection; it can be mechanical connection or electrical connection; it can be direct connection or indirect connection through an intermediary. Those of ordinary skill in the art can understand the specific meanings of the above terms in the embodiments of the present invention in specific situations.

在本发明实施例中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。In the embodiments of the present invention, unless otherwise specified and limited, the first feature may be in direct contact with the first feature or the first feature and the second feature may pass through the middle of the second feature. Media indirect contact. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明实施例的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外,在不相互矛盾的情况下,本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or feature is included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

随着信息技术的快速发展,光纤通信与光计算等领域也迅速发展。而在光纤通信与光计算等光电领域中,改变介质的群折射率,控制慢光产生是极其重要的,即光速控制技术已经成为光电领域的研究热电。具体的,控制群速度减慢,有利于提高全光通信中光缓冲器的信号延迟量调节效率,实现可控缓存;改变介质的群折射率,控制慢光产生也可以提高光传感器(诸如干涉仪、光学陀螺仪等)的探测灵敏度,因此慢光技术在光电领域中具有重要的应用价值。其中,慢光是指光波在介质中传播时群速度减慢并小于真空光速的物理现象。因此,为了更好地产生所需的慢光,需要对介质的群折射率进行测量。With the rapid development of information technology, fields such as optical fiber communication and optical computing are also developing rapidly. In the field of optoelectronics such as optical fiber communication and optical computing, it is extremely important to change the group refractive index of the medium and control the generation of slow light, that is, the speed of light control technology has become a research thermoelectric in the field of optoelectronics. Specifically, slowing down the control group speed is conducive to improving the signal delay adjustment efficiency of the optical buffer in all-optical communication and realizing controllable buffering; changing the group refractive index of the medium and controlling the generation of slow light can also improve the optical sensor (such as interference instrument, optical gyroscope, etc.), so slow light technology has important application value in the field of optoelectronics. Among them, slow light refers to the physical phenomenon that the group velocity of light waves slows down and is smaller than the speed of light in vacuum when the light wave propagates in the medium. Therefore, in order to better produce the required slow light, it is necessary to measure the group refractive index of the medium.

目前,通过探测光在经过介质后到达探测器的时间延迟来计算得到群折射率的大小,然而,受限于使用光的脉冲宽度和探测器的时间分辨极限,这种测量方式只能应用于宏观体系的测量,难以测量微纳尺度以下介质的群折射率。而针对纳米线体系,利用一束光子能量高于材料带隙的激光照射纳米线样品的一端将其激发产生辐射,在纳米线的另一端收集光谱信号,从而提取纳米线腔模式震荡信息测量群折射率大小,然而,纳米线成像装置采用的是连续光作为激发光源,无法实现时间尺度上的信号分辨,从而无法满足光脉冲产生和传输过程的探测需求,进而无法测量群折射率。因此,如何对纳米线样品进行群折射率测量是目前亟需解决的问题。At present, the group refractive index is calculated by detecting the time delay of light reaching the detector after passing through the medium. However, limited by the pulse width of the used light and the time resolution limit of the detector, this measurement method can only be applied to For the measurement of macroscopic systems, it is difficult to measure the group refractive index of media below the micro-nano scale. For the nanowire system, one end of the nanowire sample is irradiated with a laser beam whose photon energy is higher than the band gap of the material to excite it to generate radiation, and the spectral signal is collected at the other end of the nanowire to extract the measurement group of the cavity mode oscillation information of the nanowire. However, the nanowire imaging device uses continuous light as the excitation light source, which cannot achieve signal resolution on the time scale, so it cannot meet the detection requirements of the optical pulse generation and transmission process, and cannot measure the group refractive index. Therefore, how to measure the group refractive index of nanowire samples is an urgent problem to be solved.

针对上述问题,本发明提出以下各实施例。为了测量纳米线样品的群折射率,需要将纳米线样品的出射光显示在成像平面,进而对纳米线样品进行成像。而为了直接对纳米线样品中光脉冲传输进行时间尺度观测,本发明第一方面的实施例提出一种纳米线成像装置,其通过激光相干解析的手段来探测纳米线样品中的光脉冲传播,从而直观地观察脉冲的时间尺度过程,以为纳米线样品的群折射率测量提供支持。In view of the above problems, the present invention proposes the following embodiments. In order to measure the group refractive index of the nanowire sample, it is necessary to display the emitted light of the nanowire sample on the imaging plane, and then image the nanowire sample. In order to directly observe the light pulse transmission in the nanowire sample on a time scale, the embodiment of the first aspect of the present invention proposes a nanowire imaging device, which detects the light pulse propagation in the nanowire sample by means of laser coherence analysis, Therefore, the time-scale process of the pulse can be observed intuitively to provide support for the measurement of the group refractive index of the nanowire sample.

图1为本发明提供的纳米线成像装置的结构示意图之一,如图1所示,该纳米线成像装置包括:样品台、飞秒激光光源、显微物镜、干涉仪和第一成像装置,所述干涉仪包括第一分束片、第一反射镜、滑动组件和第二反射镜。Figure 1 is one of the structural schematic diagrams of the nanowire imaging device provided by the present invention. As shown in Figure 1, the nanowire imaging device includes: a sample stage, a femtosecond laser light source, a microscopic objective lens, an interferometer and a first imaging device, The interferometer includes a first beam splitter, a first mirror, a sliding assembly and a second mirror.

所述样品台用于放置待测量的纳米线样品。The sample stage is used to place the nanowire sample to be measured.

其中,纳米线样品为待进行群折射率测量的介质。该纳米线样品为半导体纳米线,从而可以使半导体纳米线中实现激射,辐射出具有相干性的激光。Wherein, the nanowire sample is the medium to be measured for the group refractive index. The nanowire sample is a semiconductor nanowire, so that lasing can be realized in the semiconductor nanowire to radiate coherent laser light.

在一实施例中,样品台为可三维位移的移动台,以供纳米线样品可以在三维空间中移动,进而可以完成纳米线样品的成像聚焦。In one embodiment, the sample stage is a movable stage capable of three-dimensional displacement, so that the nanowire sample can move in three-dimensional space, and then the imaging focus of the nanowire sample can be completed.

所述飞秒激光光源与所述显微物镜进行光路连接,所述显微物镜用于将所述飞秒激光光源的激发光聚焦于所述纳米线样品,所述显微物镜还用于收集所述纳米线样品的出射光,所述显微物镜还用于收集所述纳米线样品的出射光,所述出射光为所述激发光使所述纳米线样品产生激射后发出的具有相干性的光。The femtosecond laser light source is optically connected to the microscopic objective lens, the microscopic objective lens is used to focus the excitation light of the femtosecond laser light source on the nanowire sample, and the microscopic objective lens is also used to collect The outgoing light of the nanowire sample, the microscope objective lens is also used to collect the outgoing light of the nanowire sample, the outgoing light is emitted after the excitation light causes the nanowire sample to generate lasing sexual light.

其中,飞秒激光光源用于产生飞秒激光,其发出的激发光被用作泵浦光来激发纳米线样品。Wherein, the femtosecond laser light source is used to generate femtosecond laser, and the excitation light emitted by it is used as pump light to excite the nanowire sample.

需要说明的是,纳米线样品的群折射率测量方式是使用其本身形成的腔模式分布进行计算。具体的,纳米线样品的两端面延轴向形成法布里-珀罗腔,辐射光在纳米线样品中来回传播,在传播到端面时透过端面向外辐射,由于谐振腔的选模作用从端面出射的光在波长范围上具有震荡特征,通过计算其中震荡模式的间隔,结合纳米线长度计算得到其对应的群折射率。考虑到纳米线样品的径向长度接近波长范围时,纳米线样品中震荡模式有限,使得这种测量方式很难准确地测量其群折射率。基于此,激发光的光源为飞秒激光光源。且通过飞秒激光激发纳米线样品产生激射脉冲,可以实现飞秒尺度的时间精度探测,即可以实现纳米尺度的空间精度探测。It should be noted that the measurement method of the group refractive index of the nanowire sample is calculated using the cavity mode distribution formed by itself. Specifically, the two ends of the nanowire sample form a Fabry-Perot cavity along the axial direction, and the radiated light propagates back and forth in the nanowire sample, and radiates outward through the end surface when it propagates to the end surface. Due to the mode selection effect of the resonant cavity The light emitted from the end face has oscillation characteristics in the wavelength range, and the corresponding group refractive index is obtained by calculating the interval of the oscillation mode in combination with the length of the nanowire. Considering that the radial length of the nanowire sample is close to the wavelength range, the oscillation modes in the nanowire sample are limited, making it difficult to accurately measure the group refractive index by this measurement method. Based on this, the light source of the excitation light is a femtosecond laser light source. Moreover, by exciting the nanowire sample with a femtosecond laser to generate a laser pulse, femtosecond-scale temporal precision detection can be realized, that is, nanoscale spatial precision detection can be realized.

其中,出射光为激发光经过显微物镜聚焦到纳米线样品表面,将纳米线样品激发,即在功率密度达到激射阈值后,纳米线样品中实现激射,辐射出的具有相干性的激光。该出射光被显微物镜收集进入纳米线成像装置的光路中。Among them, the outgoing light is the excitation light focused on the surface of the nanowire sample through the microscope objective lens, and the nanowire sample is excited, that is, after the power density reaches the lasing threshold, the nanowire sample realizes lasing and radiates coherent laser light. . The outgoing light is collected by the microscope objective lens and enters the optical path of the nanowire imaging device.

所述第一分束片与所述显微物镜进行光路连接,所述第一分束片用于将所述出射光划分为第一束光和第二束光。The first beam splitter is optically connected to the microscope objective lens, and the first beam splitter is used to divide the outgoing light into a first beam of light and a second beam of light.

其中,第一分束片可以对出射光进行反射和透射。在一实施例中,第一束光可以为透射的出射光,第二束光可以为反射的出射光。在另一实施例中,第一束光可以为反射的出射光,第二束光可以为透射的出射光。Wherein, the first beam splitter can reflect and transmit the outgoing light. In an embodiment, the first light beam may be transmitted outgoing light, and the second light beam may be reflected outgoing light. In another embodiment, the first light beam may be reflected outgoing light, and the second light beam may be transmitted outgoing light.

所述第一反射镜与所述第一分束片进行光路连接,所述第一反射镜用于将所述第一束光反射至所述第一分束片。The first reflector is optically connected to the first beam splitter, and the first reflector is used to reflect the first beam of light to the first beam splitter.

具体的,第一束光经过第一反射镜沿原路返回至第一分束片。Specifically, the first beam of light returns to the first beam splitter along the original path through the first reflector.

所述第二反射镜与所述第一分束片进行光路连接,所述第二反射镜用于将所述第二束光反射至所述第一分束片,所述第二反射镜设于所述滑动组件,所述滑动组件用于使所述第二反射镜沿远离或接近所述第一分束片的方向移动。The second reflector is optically connected to the first beam splitter, the second reflector is used to reflect the second beam of light to the first beam splitter, and the second reflector is set In the sliding assembly, the sliding assembly is used to move the second reflector in a direction away from or close to the first beam splitter.

具体的,第二束光经过第二反射镜沿原路返回至第一分束片。Specifically, the second beam of light returns to the first beam splitter along the original path through the second reflector.

可以理解的是,通过滑动组件实现第一束光和第二束光的光程差控制,从而在时间尺度上探测光脉冲信号变化,即实现时间尺度上的信号分辨,从而满足光脉冲产生和传输过程的探测需求。且通过飞秒激光激发纳米线样品产生激射脉冲,结合滑动组件调控延迟时间,可以实现飞秒尺度的时间精度探测,即可以实现纳米尺度的空间精度探测。It can be understood that the control of the optical path difference between the first light beam and the second light beam is realized through the sliding component, so as to detect the change of the optical pulse signal on the time scale, that is, to realize the signal resolution on the time scale, so as to meet the needs of optical pulse generation and Probing requirements during transmission. Moreover, the nanowire sample is excited by a femtosecond laser to generate a laser pulse, combined with the sliding component to adjust the delay time, the femtosecond-scale time precision detection can be realized, that is, the nanoscale space precision detection can be realized.

在一实施例中,滑动组件可以为电控位移台(时间延迟线)。具体的,滑动组件为精密的压电位移台,其每次移动的步长可以根据实际需要进行设定,例如,最小步长为50nm,从而可以实现最小0.33fs的时间延迟。基于此,满足干涉条纹探测需要对时间延迟进行精密的调控的需求。In one embodiment, the sliding assembly may be an electrically controlled translation stage (time delay line). Specifically, the sliding component is a precision piezoelectric stage, and the step size of each movement can be set according to actual needs, for example, the minimum step size is 50nm, so that a minimum time delay of 0.33fs can be achieved. Based on this, it satisfies the requirement that the interference fringe detection requires precise control of the time delay.

所述第一成像装置与所述第一分束片进行光路连接,以使反射的第一束光传输至所述第一成像装置,反射的第二束光传输至所述第一成像装置,以供所述第一成像装置获得所述纳米线样品的重叠成像。The first imaging device is optically connected to the first beam splitter, so that the reflected first beam of light is transmitted to the first imaging device, and the reflected second beam of light is transmitted to the first imaging device, for the first imaging device to obtain superimposed imaging of the nanowire sample.

其中,第一成像装置用于接收光路中的光信号进行空间成像。具体的,将第一束光和第二束光汇聚在第一成像装置的感光平面上,实现出射光的成像的重叠。第一成像装置可以为CMOS(Complementary Metal Oxide Semiconductor,互补金属氧化物半导体)相机,本发明实施例对第一成像装置并不做具体限定。Wherein, the first imaging device is used for receiving the optical signal in the optical path to perform spatial imaging. Specifically, the first beam of light and the second beam of light are converged on the photosensitive plane of the first imaging device, so as to realize overlapping of imaging of outgoing light. The first imaging device may be a CMOS (Complementary Metal Oxide Semiconductor, Complementary Metal Oxide Semiconductor) camera, and the embodiment of the present invention does not specifically limit the first imaging device.

其中,重叠成像可以为纳米线样品的左端与左端重叠,也可以为纳米线样品的右端与右端重叠。可以通过调整第一束光和第二束光在第一成像装置上的成像位置,实现不同的重叠方式,本发明实施例对此不作限定。由于纳米线样品的出射光通过第一束光和第二束光同时到达第一成像装置的感光平面,因此该重叠成像中出现明暗相间的相干条纹。Wherein, the overlapping imaging may be that the left end of the nanowire sample overlaps with the left end, or that the right end of the nanowire sample overlaps with the right end. Different overlapping manners can be realized by adjusting the imaging positions of the first beam of light and the second beam of light on the first imaging device, which is not limited in this embodiment of the present invention. Since the outgoing light of the nanowire sample reaches the photosensitive plane of the first imaging device through the first beam of light and the second beam of light simultaneously, coherent fringes with alternating light and dark appear in the overlapping imaging.

此外,通过控制滑动组件的位置,第一成像装置可以获得不同延迟时间的重叠成像。In addition, by controlling the position of the sliding assembly, the first imaging device can obtain overlapping imaging with different delay times.

在一实施例中,若第一束光为透射的出射光,第二束光为反射的出射光,则反射的第一束光通过第一分束片反射传输至第一成像装置,反射的第二束光通过第一分束片透射传输至第一成像装置。In one embodiment, if the first beam of light is the transmitted outgoing light, and the second beam of light is the reflected outgoing light, then the reflected first beam of light is reflected and transmitted to the first imaging device through the first beam splitter, and the reflected light is transmitted to the first imaging device. The second beam of light is transmitted to the first imaging device through the first beam splitter.

在另一实施例中,若第一束光为反射的出射光,第二束光为透射的出射光,则反射的第一束光通过第一分束片透射传输至第一成像装置,反射的第二束光通过第一分束片反射传输至第一成像装置。In another embodiment, if the first beam of light is reflected outgoing light, and the second beam of light is transmitted outgoing light, then the reflected first beam of light is transmitted to the first imaging device through the first beam splitter, and the reflected light The second beam of light is reflected by the first beam splitter and transmitted to the first imaging device.

本发明实施例提供的纳米线成像装置,飞秒激光光源与显微物镜进行光路连接,以使显微物镜将飞秒激光光源的激发光聚焦于样品台上的纳米线样品,即激发光经过显微物镜聚焦到纳米线样品的表面,以作为泵浦光将纳米线样品激发,从而使纳米线样品产生激射,辐射出具有相干性的出射光;且第一分束片与显微物镜进行光路连接,以将显微物镜收集的出射光划分为第一束光和第二束光,而用于反射第二束光的第二反射镜设于滑动组件,从而使第二反射镜可以沿远离或接近第一分束片的方向移动,进而实现第一束光和第二束光的光程差控制,以使第一成像装置获得不同延迟时间的重叠成像,且由于出射光为具有相干性的激光,因此,基于多个不同延迟时间的重叠成像可以确定干涉条纹强度分布信息,实现在时间尺度上探测光脉冲信号变化,即实现时间尺度上的信号分辨,满足光脉冲产生和传输过程的探测需求,从而为群折射率测量提供支持。In the nanowire imaging device provided by the embodiment of the present invention, the femtosecond laser light source is connected to the microscopic objective lens in an optical path, so that the microscopic objective lens focuses the excitation light of the femtosecond laser light source on the nanowire sample on the sample stage, that is, the excitation light passes through The microscopic objective lens is focused on the surface of the nanowire sample to excite the nanowire sample as pump light, so that the nanowire sample generates lasing and radiates coherent outgoing light; and the first beam splitter and the microscopic objective lens The optical path is connected to divide the outgoing light collected by the microscope objective lens into the first beam and the second beam, and the second reflector for reflecting the second beam of light is arranged on the sliding assembly, so that the second reflector can Move in a direction away from or close to the first beam splitter, and then realize the control of the optical path difference between the first beam of light and the second beam of light, so that the first imaging device can obtain overlapping imaging with different delay times, and because the outgoing light has Coherent laser, therefore, based on the overlapping imaging of multiple different delay times, the intensity distribution information of interference fringes can be determined, and the detection of optical pulse signal changes on the time scale can be realized, that is, the signal resolution on the time scale can be realized, and the generation and transmission of optical pulses can be satisfied. The probing needs of the process, thus providing support for group refractive index measurements.

基于上述实施例,该纳米线成像装置还包括:滤光片。Based on the above embodiments, the nanowire imaging device further includes: a filter.

所述第一分束片通过所述滤光片与所述显微物镜进行光路连接。The first beam splitter is optically connected to the microscope objective lens through the optical filter.

其中,滤光片用于实现纳米线样品的出射光的波长选择,即用于过滤光信号。具体的,滤光片具备通过波长参数,只有光信号的波长在滤光片的通过波长内,才允许该光信号通过滤光片,否者将光信号阻挡。基于此,可以将除了纳米线样品的出射光以外的光信号阻挡,仅允许出射光通过,进而确保重叠成像的准确性。进一步地,滤光片的通过波长是可以更新的,从而可以根据实际需求选择所需探测的波长。Wherein, the optical filter is used to realize the wavelength selection of the emitted light of the nanowire sample, that is, to filter the optical signal. Specifically, the optical filter has a pass wavelength parameter, and only when the wavelength of the optical signal is within the pass wavelength of the filter, the optical signal is allowed to pass through the filter, otherwise the optical signal is blocked. Based on this, the light signals other than the outgoing light of the nanowire sample can be blocked, and only the outgoing light is allowed to pass through, thereby ensuring the accuracy of overlapping imaging. Furthermore, the pass wavelength of the optical filter can be updated, so that the wavelength to be detected can be selected according to actual needs.

在一实施例中,滤光片为带通滤光片。在另一实施例中,滤光片由低通滤光片和高通滤光片组合构成。In one embodiment, the filter is a bandpass filter. In another embodiment, the optical filter is composed of a combination of a low-pass filter and a high-pass filter.

具体的,滤光片的一端与第一分束片光路连接,滤光片的另一端与显微物镜光路连接。Specifically, one end of the optical filter is connected to the optical path of the first beam splitter, and the other end of the optical filter is connected to the optical path of the microscope objective lens.

所述显微物镜还用于收集被所述纳米线样品反射的反射光,所述滤光片用于阻挡所述反射光,并传输所述出射光。The microscope objective lens is also used to collect reflected light reflected by the nanowire sample, and the optical filter is used to block the reflected light and transmit the outgoing light.

其中,被纳米线样品反射的反射光为激发光聚焦在纳米线样品所反射的光。Wherein, the reflected light reflected by the nanowire sample is the light reflected by the excitation light focused on the nanowire sample.

在一实施例中,显微物镜还用于收集被样品台(例如衬底)反射的反射光,滤光片还用于阻挡被样品台反射的反射光。在一实施例中,滤光片还用于阻挡激发光经过第二分束片后划分的光。在一实施例中,滤光片还用于阻挡照明光源的照明光经过第三分束片后划分的光。In one embodiment, the microscope objective lens is also used to collect the reflected light reflected by the sample stage (such as the substrate), and the optical filter is also used to block the reflected light reflected by the sample stage. In an embodiment, the filter is also used to block the light split by the excitation light after passing through the second beam splitter. In an embodiment, the filter is also used to block the light divided by the illumination light of the illumination source after passing through the third beam splitter.

在一实施例中,滤光片通过第二分束片与显微物镜进行光路连接。在一实施例中,滤光片通过第三分束片与显微物镜进行光路连接。在一实施例中,滤光片通过可翻折镜与第一分束片进行光路连接。In one embodiment, the optical filter is connected to the microscope objective lens through the second beam splitter. In one embodiment, the optical filter is connected to the microscope objective lens through the third beam splitter. In one embodiment, the filter is optically connected to the first beam splitter through a foldable mirror.

本发明实施例提供的纳米线成像装置,通过在第一分束片与显微物镜的光路中间设置滤光片,可以确保除了出射光以外的其他光信号被阻挡,仅允许出射光通过,进而确保重叠成像的准确性,最终提高群折射率测量的准确性。In the nanowire imaging device provided by the embodiment of the present invention, by setting a filter between the first beam splitter and the optical path of the microscope objective lens, it can ensure that other optical signals except the outgoing light are blocked, and only the outgoing light is allowed to pass through. Ensures accurate overlay imaging, ultimately improving the accuracy of group refractive index measurements.

基于上述任一实施例,该纳米线成像装置还包括:光谱仪、可翻折镜和控制器。Based on any of the above embodiments, the nanowire imaging device further includes: a spectrometer, a foldable mirror and a controller.

所述控制器用于控制可翻折镜,以使所述滤光片与所述第一分束片进行光路连接,或者使所述滤光片与所述光谱仪进行光路连接。The controller is used to control the foldable mirror, so that the optical filter is connected to the first beam splitter, or the optical filter is connected to the spectrometer.

其中,光谱仪用于确定采集到的光信号的光谱信息。具体的,光信号进入光谱仪进行谱学探测确定波长信息。Wherein, the spectrometer is used to determine the spectral information of the collected optical signal. Specifically, the optical signal enters the spectrometer for spectral detection to determine the wavelength information.

其中,可翻折镜可以被控制处于两种状态。第一种状态:滤光片与第一分束片光路连接,滤光片与光谱仪的光路断开。第二种状态:滤光片与第一分束片的光路断开,滤光片与光谱仪光路连接。Wherein, the foldable mirror can be controlled to be in two states. The first state: the optical filter is connected to the optical path of the first beam splitter, and the optical filter is disconnected from the optical path of the spectrometer. The second state: the optical filter is disconnected from the optical path of the first beam splitter, and the optical filter is connected to the optical path of the spectrometer.

在所述滤光片与所述光谱仪进行光路连接的情况下,所述光谱仪用于检测信号光的波长信息,所述信号光为所述滤光片过滤后的光。When the optical filter is connected to the spectrometer by an optical path, the spectrometer is used to detect wavelength information of signal light, and the signal light is light filtered by the optical filter.

所述控制器用于基于所述波长信息调整所述滤光片的通过波长。The controller is used for adjusting the passing wavelength of the optical filter based on the wavelength information.

具体的,基于波长信息,不断改变滤光片的通过波长,直至波长信息符合需求,停止改变滤光片的通过波长,进而使滤光片尽可能只通过出射光。进一步地,在确定滤光片的通过波长后,控制可翻折镜使滤光片与第一分束片进行光路连接,从而使出射光进入干涉仪。Specifically, based on the wavelength information, the passing wavelength of the optical filter is continuously changed until the wavelength information meets the requirements, and the changing of the passing wavelength of the optical filter is stopped, so that the optical filter only passes the outgoing light as much as possible. Further, after the pass wavelength of the optical filter is determined, the foldable mirror is controlled to connect the optical filter with the first beam splitter, so that the outgoing light enters the interferometer.

在一实施例中,可翻折镜通过第四分束片与光谱仪进行光路连接。In one embodiment, the foldable mirror is optically connected to the spectrometer through the fourth beam splitter.

本发明实施例提供的纳米线成像装置,在需要更新滤光片的通过波长时,可以控制可翻折镜,以使滤光片与光谱仪光路连接,从而通过光谱仪检测滤光片过滤后的信号光的波长信息,进而基于波长信息调整滤光片的通过波长,从而可以选择所需探测的波长,进而可以确保除了出射光以外的其他光信号被阻挡,仅允许出射光通过,进而确保重叠成像的准确性,最终提高群折射率测量的准确性。In the nanowire imaging device provided by the embodiment of the present invention, when the pass wavelength of the optical filter needs to be updated, the foldable mirror can be controlled so that the optical filter is connected to the optical path of the spectrometer, so that the signal filtered by the optical filter can be detected by the spectrometer The wavelength information of the light, and then adjust the pass wavelength of the filter based on the wavelength information, so that the wavelength to be detected can be selected, and then it can ensure that other optical signals except the outgoing light are blocked, and only the outgoing light is allowed to pass, thus ensuring overlapping imaging accuracy, and ultimately improve the accuracy of group refractive index measurements.

基于上述任一实施例,该干涉仪还包括:长焦透镜。Based on any of the above embodiments, the interferometer further includes: a telephoto lens.

所述第一成像装置通过所述长焦透镜与所述第一分束片进行光路连接。The first imaging device is optically connected to the first beam splitter through the telephoto lens.

其中,长焦透镜用于汇聚输入的光信号。具体的,长焦透镜可以实现物相在实空间相与傅里叶相之间的倒易转换。Wherein, the telephoto lens is used for converging the input optical signal. Specifically, the telephoto lens can realize the reciprocal transformation of the object phase between the real space phase and the Fourier phase.

所述长焦透镜用于将反射的第一束光和反射的第二束光汇聚于所述第一成像装置。The telephoto lens is used for converging the reflected first beam of light and the reflected second beam of light on the first imaging device.

具体的,分别被第一分束片反射和透过的两束光,通过长焦透镜汇聚在第一成像装置的感光平面上,实现出射光的成像的重叠。Specifically, the two beams of light respectively reflected and transmitted by the first beam splitter are converged on the photosensitive plane of the first imaging device through the telephoto lens, so as to realize the overlapping of imaging of the outgoing light.

本发明实施例提供的纳米线成像装置,通过在第一成像装置和第一分束片的光路中间设置长焦透镜,从而将反射的第一束光和反射的第二束光汇聚于第一成像装置,进而更好地实现出射光的成像的重叠,进一步提高重叠成像的准确性,最终进一步提高群折射率测量的准确性。In the nanowire imaging device provided in the embodiment of the present invention, a telephoto lens is arranged in the middle of the optical path between the first imaging device and the first beam splitter, so as to converge the reflected first beam of light and the reflected second beam of light on the first The imaging device can better realize the overlapping of imaging of outgoing light, further improve the accuracy of overlapping imaging, and finally further improve the accuracy of group refractive index measurement.

基于上述任一实施例,所述第二反射镜为中空镜,所述中空镜包括第一镜子和第二镜子,所述第一镜子与所述第二镜子的镜面夹角为90度;所述第一镜子用于将所述第二束光反射至所述第二镜子,所述第二镜子用于将经过所述第一镜子反射的第二束光反射至所述第一分束片。Based on any of the above embodiments, the second reflecting mirror is a hollow mirror, the hollow mirror includes a first mirror and a second mirror, and the angle between the first mirror and the second mirror is 90 degrees; The first mirror is used to reflect the second beam of light to the second mirror, and the second mirror is used to reflect the second beam of light reflected by the first mirror to the first beam splitter .

其中,第一镜子为反射镜,第一镜子的镜面面向第二束光,用于反射第二束光。第二镜子为反射镜,第二镜子的镜面面向第二束光,用于反射第二束光。Wherein, the first mirror is a reflecting mirror, and the mirror surface of the first mirror faces the second beam of light for reflecting the second beam of light. The second mirror is a reflecting mirror, and the mirror surface of the second mirror faces the second beam of light for reflecting the second beam of light.

在一具体实施例中,第二束光与第一镜子的镜面的入射夹角为45度,以使经过中空镜反射的第二束光反射回第一分束片。In a specific embodiment, the incident angle between the second light beam and the mirror surface of the first mirror is 45 degrees, so that the second light beam reflected by the hollow mirror is reflected back to the first beam splitter.

本发明实施例提供的纳米线成像装置,第二反射镜为中空镜,且第一镜子与第二镜子的镜面夹角为90度,确保经过第一镜子反射的第二束光与入射至第一镜子的第二束光的光路平行,进而确保光信号位置不会发生晃动,即仅产生时间上的延迟,提高重叠成像的准确性,最终进一步提高群折射率测量的准确性。In the nanowire imaging device provided by the embodiment of the present invention, the second reflector is a hollow mirror, and the angle between the first mirror and the second mirror is 90 degrees, so as to ensure that the second beam of light reflected by the first mirror is consistent with the incident light on the first mirror. The optical path of the second beam of light from a mirror is parallel, so as to ensure that the position of the optical signal does not shake, that is, only a time delay is generated, which improves the accuracy of overlapping imaging, and finally further improves the accuracy of group refractive index measurement.

基于上述任一实施例,该纳米线成像装置还包括:第二分束片。Based on any of the above embodiments, the nanowire imaging device further includes: a second beam splitter.

所述飞秒激光光源通过所述第二分束片与所述显微物镜进行光路连接,以使所述激发光传输至所述显微物镜。The femtosecond laser light source is optically connected to the microscopic objective lens through the second beam splitter, so that the excitation light is transmitted to the microscopic objective lens.

所述第一分束片通过所述第二分束片与所述显微物镜进行光路连接,以使所述出射光传输至所述第一分束片。The first beam splitter is optically connected to the microscope objective lens through the second beam splitter, so that the outgoing light is transmitted to the first beam splitter.

其中,第二分束片可以对飞秒激光光源的激发光进行反射和透射。在一实施例中,第二分束片将激发光反射至显微物镜,将出射光进行透射。在另一实施例中,第二分束片将激发光透射至显微物镜,将出射光进行反射。Wherein, the second beam splitter can reflect and transmit the excitation light of the femtosecond laser light source. In one embodiment, the second beam splitter reflects the excitation light to the microscope objective lens and transmits the outgoing light. In another embodiment, the second beam splitter transmits the excitation light to the microscope objective lens and reflects the outgoing light.

第二分束片的一端与显微物镜光路连接,第二分束片的另一端与第一分束片光路连接,该第二分束片与第一分束片进行光路连接。在一实施例中,第二分束片通过滤光片与第一分束片进行光路连接,基于此,滤光片可以阻挡通过第二分束片的激发光。在一实施例中,第二分束片通过第三分束片与第一分束片进行光路连接。One end of the second beam splitter is connected to the optical path of the microscope objective lens, the other end of the second beam splitter is connected to the optical path of the first beam splitter, and the second beam splitter is connected to the optical path of the first beam splitter. In an embodiment, the second beam splitter is optically connected to the first beam splitter through an optical filter, and based on this, the optical filter can block the excitation light passing through the second beam splitter. In an embodiment, the second beam splitter is optically connected to the first beam splitter through the third beam splitter.

本发明实施例提供的纳米线成像装置,在飞秒激光光源与显微物镜的光路中间设置第二分束片,可以将激发光传输至显微物镜,并将出射光传输至第一分束片,从而可以更好地进行光路管理,确保重叠成像的准确性,最终进一步提高群折射率测量的准确性。In the nanowire imaging device provided by the embodiment of the present invention, a second beam splitter is arranged between the optical path between the femtosecond laser light source and the microscopic objective lens, so that the excitation light can be transmitted to the microscopic objective lens, and the outgoing light can be transmitted to the first beam splitter. In order to better manage the optical path, ensure the accuracy of overlapping imaging, and finally further improve the accuracy of group refractive index measurement.

基于上述任一实施例,该纳米线成像装置还包括:照明光源和第三分束片。Based on any of the above embodiments, the nanowire imaging device further includes: an illumination light source and a third beam splitter.

所述照明光源通过所述第三分束片与所述显微物镜进行光路连接,以使所述照明光源的照明光传输至所述显微物镜,所述显微物镜还用于将所述照明光聚焦于所述纳米线样品。The illumination light source is optically connected to the microscopic objective lens through the third beam splitter, so that the illumination light of the illumination light source is transmitted to the microscopic objective lens, and the microscopic objective lens is also used to Illumination light is focused on the nanowire sample.

所述第一分束片通过所述第三分束片与所述显微物镜进行光路连接,以使所述出射光传输至所述第一分束片。The first beam splitter is optically connected to the microscope objective lens through the third beam splitter, so that the outgoing light is transmitted to the first beam splitter.

其中,照明光源用于给纳米线样品提供照明。该照明光源优选为白光光源,当然也可以为其他颜色的光源。Wherein, the illumination light source is used to provide illumination for the nanowire sample. The illumination light source is preferably a white light source, and of course it can also be a light source of other colors.

其中,第三分束片可以对照明光源的照明光进行反射和透射。在一实施例中,第三分束片将照明光反射至显微物镜,将出射光进行透射。在另一实施例中,第三分束片将照明光透射至显微物镜,将出射光进行反射。Wherein, the third beam splitter can reflect and transmit the illumination light of the illumination source. In one embodiment, the third beam splitter reflects the illumination light to the microscope objective lens and transmits the outgoing light. In another embodiment, the third beam splitter transmits the illumination light to the microscope objective lens and reflects the outgoing light.

第三分束片的一端与显微物镜光路连接,第三分束片的另一端与第一分束片光路连接,该第三分束片与第一分束片进行光路连接。在一实施例中,第三分束片通过滤光片与第一分束片进行光路连接,基于此,滤光片可以阻挡通过第三分束片的照明光。在一实施例中,第三分束片通过第二分束片与显微物镜进行光路连接。在一实施例中,第三分束片通过第二分束片与第一分束片进行光路连接。One end of the third beam splitter is connected to the optical path of the microscope objective lens, the other end of the third beam splitter is connected to the optical path of the first beam splitter, and the third beam splitter is connected to the first beam splitter in the optical path. In an embodiment, the third beam splitter is optically connected to the first beam splitter through a filter, and based on this, the filter can block the illumination light passing through the third beam splitter. In an embodiment, the third beam splitter is optically connected to the microscope objective lens through the second beam splitter. In an embodiment, the third beam splitter is optically connected to the first beam splitter through the second beam splitter.

本发明实施例提供的纳米线成像装置,设置照明光源,以为纳米线样品提供照明,进而确保重叠成像的清晰度,最终进一步提高群折射率测量的准确性;且在照明光源与显微物镜的光路中间设置第三分束片,可以将照明光传输至显微物镜,并将出射光传输至第一分束片,从而可以更好地进行光路管理,确保重叠成像的准确性,最终进一步提高群折射率测量的准确性。The nanowire imaging device provided by the embodiment of the present invention is provided with an illumination source to provide illumination for the nanowire sample, thereby ensuring the definition of overlapping imaging, and finally further improving the accuracy of group refractive index measurement; and in the relationship between the illumination source and the microscope objective The third beam splitter is set in the middle of the optical path, which can transmit the illumination light to the microscope objective lens and the outgoing light to the first beam splitter, so as to better manage the optical path, ensure the accuracy of overlapping imaging, and ultimately further improve Accuracy of group index measurements.

基于上述任一实施例,该纳米线成像装置还包括:第二成像装置和控制器。Based on any of the above embodiments, the nanowire imaging device further includes: a second imaging device and a controller.

所述第二成像装置与所述显微物镜进行光路连接,以使所述出射光传输至所述第二成像装置,以供所述第二成像装置获得所述纳米线样品的样品成像。The second imaging device is optically connected to the microscope objective lens, so that the emitted light is transmitted to the second imaging device, so that the second imaging device can obtain a sample image of the nanowire sample.

所述样品台为可三维位移的移动台,所述控制器用于基于所述样品成像,控制所述样品台移动,以对所述纳米线样品进行成像聚焦。The sample stage is a movable stage capable of three-dimensional displacement, and the controller is used to control the movement of the sample stage based on the imaging of the sample, so as to focus on the imaging of the nanowire sample.

其中,第二成像装置用于接收光路中的光信号进行空间成像。具体的,将出射光汇聚在第二成像装置的感光平面上,实现出射光的成像。第二成像装置可以为CMOS相机,本发明实施例对第二成像装置并不做具体限定。Wherein, the second imaging device is used for receiving the optical signal in the optical path to perform spatial imaging. Specifically, the outgoing light is collected on the photosensitive plane of the second imaging device to realize imaging of the outgoing light. The second imaging device may be a CMOS camera, and the embodiment of the present invention does not specifically limit the second imaging device.

在一实施例中,第二成像装置通过滤光片与显微物镜进行光路连接。在一实施例中,第二成像装置通过第二分束片与显微物镜进行光路连接。在一实施例中,第二成像装置通过第三分束片与显微物镜进行光路连接。在一实施例中,第二成像装置通过可翻折镜与显微物镜进行光路连接。In one embodiment, the second imaging device is optically connected to the microscope objective lens through a filter. In one embodiment, the second imaging device is optically connected to the microscope objective lens through the second beam splitter. In an embodiment, the second imaging device is optically connected with the microscope objective lens through the third beam splitter. In one embodiment, the second imaging device is optically connected to the microscope objective lens through a foldable mirror.

在一实施例中,该纳米线成像装置还包括:第四分束片和光谱仪。第二成像装置通过第四分束片与显微物镜进行光路连接,以使出射光传输至第二成像装置,光谱仪通过第四分束片与显微物镜进行光路连接,以使出射光传输至光谱仪。In an embodiment, the nanowire imaging device further includes: a fourth beam splitter and a spectrometer. The second imaging device is optically connected with the microscopic objective lens through the fourth beam splitter, so that the outgoing light is transmitted to the second imaging device, and the spectrometer is connected with the optical path through the fourth beam splitter with the microscopic objective lens, so that the outgoing light is transmitted to the second imaging device. spectrometer.

第四分束片可以对出射光进行反射和透射。在一实施例中,第四分束片将出射光反射至第二成像装置,将出射光透射至光谱仪。在另一实施例中,第四分束片将出射光透射至第二成像装置,将出射光反射至光谱仪。The fourth beam splitter can reflect and transmit the outgoing light. In an embodiment, the fourth beam splitter reflects the outgoing light to the second imaging device, and transmits the outgoing light to the spectrometer. In another embodiment, the fourth beam splitter transmits the outgoing light to the second imaging device, and reflects the outgoing light to the spectrometer.

第四分束片的一端与显微物镜光路连接,第四分束片的另一端与第二成像装置光路连接,第四分束片的第三端与光谱仪光路连接。在一实施例中,第四分束片通过滤光片与显微物镜进行光路连接。在一实施例中,第四分束片通过第二分束片与显微物镜进行光路连接。在一实施例中,第四分束片通过第三分束片与显微物镜进行光路连接。在一实施例中,第四分束片通过可翻折镜与显微物镜进行光路连接。One end of the fourth beam splitter is connected to the optical path of the microscope objective lens, the other end of the fourth beam splitter is connected to the optical path of the second imaging device, and the third end of the fourth beam splitter is connected to the optical path of the spectrometer. In an embodiment, the fourth beam splitter is optically connected to the microscope objective lens through a filter. In an embodiment, the fourth beam splitter is optically connected to the microscope objective lens through the second beam splitter. In one embodiment, the fourth beam splitter is optically connected to the microscope objective lens through the third beam splitter. In one embodiment, the fourth beam splitter is optically connected to the microscope objective lens through a foldable mirror.

可以理解的是,设置第四分束片,可以更好地进行光路管理,确保重叠成像的准确性,最终进一步提高群折射率测量的准确性。It can be understood that setting the fourth beam splitter can better manage the optical path, ensure the accuracy of overlapping imaging, and finally further improve the accuracy of group refractive index measurement.

本发明实施例提供的纳米线成像装置,通过设置第二成像装置,将纳米线样品的出射光进行成像,从而基于样品成像控制样品台进行三维空间移动,以实现纳米线样品的成像聚焦,确保重叠成像的清晰度和准确性,最终进一步提高群折射率测量的准确性。In the nanowire imaging device provided by the embodiment of the present invention, by setting the second imaging device, the emitted light of the nanowire sample is imaged, thereby controlling the sample stage to move in three-dimensional space based on the sample imaging, so as to realize the imaging focus of the nanowire sample, ensuring The clarity and accuracy of overlay imaging ultimately further improves the accuracy of group refractive index measurements.

为便于理解上述各实施例,需要说明的是,光脉冲的传播及其相干条纹探测需要纳米线样品能实现具有相干性的激光发射。纳米线样品结构端面与外介质(一般为空气)形成法布里-珀罗谐振腔,为轴向模式提供有效增益介质、低损耗波导及强的侧向光学限制。使用飞秒激光脉冲作为激发光,在激发功率达到纳米线样品的激射阈值后,纳米线样品中产生相干的激射光脉冲。激射光脉冲在到达纳米线端面时,一部分透过端面向外发射,发射信号经过纳米线成像装置被第一成像装置收集;另一部分被端面反射后在纳米线样品内向反方向传播,到达另一端面继续发生透射和反射,直到脉冲强度完全衰减。To facilitate the understanding of the above embodiments, it should be noted that the propagation of light pulses and the detection of coherent fringes require the nanowire sample to be able to emit coherent laser light. The end face of the nanowire sample structure and the external medium (usually air) form a Fabry-Perot resonant cavity, which provides an effective gain medium, low-loss waveguide and strong lateral optical confinement for the axial mode. Using femtosecond laser pulses as excitation light, coherent lasing light pulses are generated in the nanowire sample after the excitation power reaches the lasing threshold of the nanowire sample. When the laser light pulse reaches the end face of the nanowire, part of it is emitted through the end face, and the transmitted signal is collected by the first imaging device through the nanowire imaging device; the other part is reflected by the end face and propagates in the opposite direction in the nanowire sample, reaching the other end. Transmission and reflection continue to occur at the end face until the pulse intensity is completely decayed.

为便于理解上述各实施例,此处以一特定实施例进行说明。参照图2,图2为本发明提供的纳米线成像装置的结构示意图之二,如图2所示,纳米线成像装置包括飞秒激光器(飞秒激光光源)、显微物镜、干涉仪、相机2(第一成像装置)、滤光片、光谱仪、可翻折镜、透镜(长焦透镜)、分束片1(第二分束片)、白光光源(照明光源)、分束片2(第三分束片)、相机1(第二成像装置)、分束片3(第四分束片),干涉仪包括分束片4(第一分束片)、反射镜(第一反射镜)、电控位移台(滑动组件)和中空镜(第二反射镜)。显微物镜用于将飞秒激光器的激发光聚焦于纳米线样品,显微物镜还用于收集纳米线样品的出射光。白光光源的照明光通过光纤传输至分束片2。电控位移台可以左右移动,从而使中空镜沿远离或接近分束片4的方向移动。控制器可以为计算机,以通过计算机分析相机2探测到的干涉强度信号,进而结合电控位移台所对应的光程,获得含有时间信息的干涉强度信号。In order to facilitate understanding of the above-mentioned embodiments, a specific embodiment is used for description here. With reference to Fig. 2, Fig. 2 is the second structural representation of the nanowire imaging device provided by the present invention, as shown in Fig. 2, the nanowire imaging device comprises a femtosecond laser (femtosecond laser light source), a microscopic objective lens, an interferometer, a camera 2 (first imaging device), filter, spectrometer, foldable mirror, lens (telephoto lens), beam splitter 1 (second beam splitter), white light source (illumination light source), beam splitter 2 ( The third beam splitter), camera 1 (second imaging device), beam splitter 3 (fourth beam splitter), the interferometer includes beam splitter 4 (first beam splitter), mirror (first mirror ), an electronically controlled stage (slide assembly) and a hollow mirror (second mirror). The microscopic objective lens is used to focus the excitation light of the femtosecond laser on the nanowire sample, and the microscopic objective lens is also used to collect the outgoing light of the nanowire sample. The illumination light of the white light source is transmitted to the beam splitter 2 through the optical fiber. The electronically controlled displacement stage can move left and right, so that the hollow mirror moves away from or close to the beam splitter 4 . The controller can be a computer, so that the interference intensity signal detected by the camera 2 is analyzed by the computer, and then combined with the optical path corresponding to the electronically controlled displacement stage, the interference intensity signal containing time information is obtained.

基于以上纳米线成像装置,本发明还提出群折射率测量方法,该方法是利用上述纳米线成像装置实现的。群折射率测量方法的执行主体可以是纳米线成像装置的控制器,也可以是另一终端设备,例如,笔记本电脑、台式电脑、平板电脑、智能手机、嵌入式系统、服务器等等,本发明实施例对此不作限定。Based on the above nanowire imaging device, the present invention also proposes a group refractive index measurement method, which is realized by using the above nanowire imaging device. The execution subject of the group refractive index measurement method may be the controller of the nanowire imaging device, or another terminal device, such as a notebook computer, a desktop computer, a tablet computer, a smart phone, an embedded system, a server, etc., the present invention The embodiment does not limit this.

图3为本发明提供的群折射率测量方法的流程示意图,如图3所示,该群折射率测量方法包括:Fig. 3 is a schematic flow chart of the method for measuring the group refractive index provided by the present invention. As shown in Fig. 3, the method for measuring the group refractive index includes:

步骤310,在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间。Step 310, under the current imaging round, acquire the position information of the sliding assembly, and determine the delay time of the current imaging round based on the position information.

需要说明的是,为了得到不同延迟时间的重叠成像,需要执行多个成像轮次,每个成像轮次下的滑动组件的位置不同,基于此,每个成像轮次下的延迟时间不同,因此,需要获取每个成像轮次的延迟时间。It should be noted that, in order to obtain overlapping imaging with different delay times, multiple imaging rounds need to be performed, and the positions of the sliding components under each imaging round are different. Based on this, the delay times under each imaging round are different, so , the delay time of each imaging round needs to be obtained.

具体的,可以基于位置-时间映射关系,确定位置信息对应的延迟时间。也可以基于位置信息,通过公式计算得到对应的延迟时间。本发明实施例对此不作限定。Specifically, the delay time corresponding to the location information may be determined based on the location-time mapping relationship. The corresponding delay time may also be obtained through formula calculation based on the location information. This embodiment of the present invention does not limit it.

步骤320,获取所述第一成像装置在所述当前成像轮次下获得的重叠成像。Step 320, acquiring overlapping imaging obtained by the first imaging device in the current imaging round.

可以通过上述任一实施例的纳米线成像装置获得重叠成像,获得重叠成像的具体过程可以参考上述实施例,此处不再一一赘述。The superimposed imaging can be obtained by the nanowire imaging device of any of the above embodiments, and the specific process of obtaining the superimposed imaging can refer to the above embodiments, and will not be repeated here.

步骤330,在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像。Step 330, in the case that the current imaging round is not the last imaging round, control the movement of the sliding assembly to move the sliding assembly to the position of the next imaging round, and place the next imaging round A round is used as the current imaging round, and a plurality of overlapping imaging with different delay times is obtained.

可以理解的是,在每个成像轮次结束后,控制滑动组件移动,以使各成像轮次的滑动组件的位置不同,进而获得不同成像轮次的重叠成像,即获得不同延迟时间的重叠成像。It can be understood that, after each imaging round, the movement of the sliding assembly is controlled so that the positions of the sliding assembly in each imaging round are different, thereby obtaining overlapping imaging of different imaging rounds, that is, overlapping imaging of different delay times .

步骤340,基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息。Step 340, based on the multiple overlapping images with different delay times, determine interference fringe intensity distribution information.

具体的,从多个不同延迟时间的重叠成像中提取得到干涉条纹强度分布信息。Specifically, the interference fringe intensity distribution information is extracted from multiple overlapping images with different delay times.

步骤350,基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。Step 350, determine the group velocity based on the intensity distribution information of the interference fringes, the delay times of the overlapping imaging of the plurality of different delay times, and the length of the nanowire sample, and determine the nanowire sample based on the group velocity The group refractive index of .

具体的,基于干涉条纹强度分布信息,通过傅里叶变换的方法获得干涉条纹对应的振幅,代表了此时两束光脉冲的相干强度。由于纳米线样品激射的光脉冲在纳米线本身形成的反射腔中来回多次反射,在时间尺度上表现为多个光脉冲的出射,从延迟时间尺度可以观察到对称分布的多个脉冲信号峰,对应零时刻相干光脉冲与任意时刻脉冲的相干强度分布。通过拟合脉冲峰的峰值和强度分布,可以得到激射脉冲在纳米线样品中运动的动态过程,进而结合纳米线长度计算得到飞秒激光激发产生的激光脉冲在纳米线样品中的传播速度,即群速度,进而基于群速度和光速确定纳米线样品的群折射率。Specifically, based on the intensity distribution information of the interference fringes, the amplitude corresponding to the interference fringes is obtained by means of Fourier transform, which represents the coherence intensity of the two light pulses at this time. Since the light pulse emitted by the nanowire sample is reflected back and forth multiple times in the reflective cavity formed by the nanowire itself, it appears as the emission of multiple light pulses on the time scale, and multiple pulse signals with symmetrical distribution can be observed from the delay time scale The peak corresponds to the coherent intensity distribution of the coherent optical pulse at zero time and the pulse at any time. By fitting the peak value and intensity distribution of the pulse peak, the dynamic process of the laser pulse moving in the nanowire sample can be obtained, and then combined with the length of the nanowire to calculate the propagation speed of the laser pulse generated by the femtosecond laser excitation in the nanowire sample, That is, the group velocity, and then determine the group refractive index of the nanowire sample based on the group velocity and the speed of light.

需要说明的是,利用纳米线样品中激射光脉冲的实空间成像探测,在成像装置探测平面上空间交叠。通过调控滑动组件移动控制干涉仪中两路光的光程差,采集光脉冲的相干性变化获得干涉信号在时间尺度上的分布。通过傅里叶变换操作从图像中提取出在对应延迟时间(即某个光程差位置处)的相干条纹的强度。对相干强度的时间分布提取并拟合出多个脉冲峰的强度和时间分布,获得激光脉冲在纳米线中多次传播过程中到达端点的时间。It should be noted that, using the real-space imaging detection of laser light pulses in the nanowire sample, the spatial overlaps on the detection plane of the imaging device. The optical path difference between the two paths of light in the interferometer is controlled by adjusting the movement of the sliding component, and the coherence change of the light pulse is collected to obtain the distribution of the interference signal on the time scale. The intensity of the coherent fringe at the corresponding delay time (that is, at a certain optical path difference position) is extracted from the image by Fourier transform operation. The intensity and time distribution of multiple pulse peaks are extracted and fitted to the time distribution of coherent intensity, and the time when the laser pulse reaches the endpoint during multiple propagations in the nanowire is obtained.

本发明实施例提供的群折射率测量方法,飞秒激光光源与显微物镜进行光路连接,以使显微物镜将飞秒激光光源的激发光聚焦于样品台上的纳米线样品,即激发光经过显微物镜聚焦到纳米线样品的表面,以作为泵浦光将纳米线样品激发,从而使纳米线样品产生激射,辐射出与具有相干性的出射光;且第一分束片与显微物镜进行光路连接,以将显微物镜收集的出射光划分为第一束光和第二束光,而用于反射第二束光的第二反射镜设于滑动组件,从而使第二反射镜可以沿远离或接近第一分束片的方向移动,进而实现第一束光和第二束光的光程差控制,即可以通过在当前成像轮次下,获取滑动组件的位置信息,并基于位置信息确定当前成像轮次的延迟时间,获取第一成像装置在当前成像轮次下获得的重叠成像,在当前成像轮次不为最后一个成像轮次的情况下,控制滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将下一成像轮次作为当前成像轮次,获得多个不同延迟时间的重叠成像,且由于出射光为具有相干性的激光,因此,基于多个不同延迟时间的重叠成像可以确定干涉条纹强度分布信息,实现在时间尺度上探测光脉冲信号变化,即实现时间尺度上的信号分辨,满足光脉冲产生和传输过程的探测需求,即可以基于干涉条纹强度分布信息、多个不同延迟时间的重叠成像的延迟时间和纳米线样品的长度,确定群速度,并基于群速度确定纳米线样品的群折射率,最终实现纳米线样品的群折射率测量。In the group refractive index measurement method provided by the embodiment of the present invention, the femtosecond laser light source is connected to the microscopic objective lens in an optical path, so that the microscopic objective lens focuses the excitation light of the femtosecond laser light source on the nanowire sample on the sample stage, that is, the excitation light The nanowire sample is focused on the surface of the nanowire sample by the microscope objective lens to excite the nanowire sample as pump light, so that the nanowire sample generates lasing and radiates coherent outgoing light; and the first beam splitter and the display The micro-objective lens is connected to the optical path to divide the outgoing light collected by the micro-objective lens into a first beam of light and a second beam of light, and a second reflector for reflecting the second beam of light is arranged on the sliding assembly, so that the second reflection The mirror can move in a direction away from or close to the first beam splitter, thereby realizing the control of the optical path difference between the first beam and the second beam, that is, the position information of the sliding component can be acquired under the current imaging round, and Determining the delay time of the current imaging round based on the position information, acquiring the overlapping imaging obtained by the first imaging device under the current imaging round, and controlling the movement of the sliding assembly when the current imaging round is not the last imaging round, so as to Move the sliding assembly to the position of the next imaging round, and use the next imaging round as the current imaging round to obtain multiple overlapping imaging with different delay times, and since the outgoing light is a coherent laser, therefore, Based on the overlapping imaging of multiple different delay times, the intensity distribution information of interference fringes can be determined, and the detection of optical pulse signal changes on the time scale can be realized, that is, the signal resolution on the time scale can be realized, and the detection requirements of the optical pulse generation and transmission process can be met. Based on the intensity distribution information of interference fringes, the delay time of multiple overlapping imaging with different delay times and the length of the nanowire sample, determine the group velocity, and determine the group refractive index of the nanowire sample based on the group velocity, and finally realize the group refraction of the nanowire sample rate measurement.

基于上述任一实施例,在所述纳米线成像装置包括滤光片、光谱仪和可翻折镜的情况下,在上述步骤320之前,该方法还包括:Based on any of the above embodiments, when the nanowire imaging device includes a filter, a spectrometer and a foldable mirror, before the above step 320, the method further includes:

控制所述可翻折镜,以使所述滤光片与所述光谱仪进行光路连接;controlling the foldable mirror so that the optical filter is connected to the spectrometer;

基于所述光谱仪检测的波长信息调整所述滤光片的通过波长;adjusting the pass wavelength of the filter based on the wavelength information detected by the spectrometer;

控制所述可翻折镜,以使所述滤光片与所述第一分束片进行光路连接。The foldable mirror is controlled so that the optical filter is connected with the first beam splitter.

具体的,基于波长信息,不断改变滤光片的通过波长,直至波长信息符合需求,停止改变滤光片的通过波长,进而使滤光片尽可能只通过出射光。在确定滤光片的通过波长后,控制可翻折镜使滤光片与第一分束片进行光路连接,从而使出射光进入干涉仪。Specifically, based on the wavelength information, the passing wavelength of the optical filter is continuously changed until the wavelength information meets the requirements, and the changing of the passing wavelength of the optical filter is stopped, so that the optical filter only passes the outgoing light as much as possible. After the pass wavelength of the optical filter is determined, the foldable mirror is controlled to connect the optical filter with the first beam splitter, so that the outgoing light enters the interferometer.

本发明实施例提供的群折射率测量方法,在需要更新滤光片的通过波长时,可以控制可翻折镜,以使滤光片与光谱仪光路连接,从而通过光谱仪检测滤光片过滤后的信号光的波长信息,进而基于波长信息调整滤光片的通过波长,从而可以选择所需探测的波长,进而可以确保除了出射光以外的其他光信号被阻挡,仅允许出射光通过,进而确保重叠成像的准确性,最终提高群折射率测量的准确性。In the group refractive index measurement method provided by the embodiment of the present invention, when the pass wavelength of the filter needs to be updated, the foldable mirror can be controlled so that the filter is connected to the optical path of the spectrometer, so that the spectrometer can detect the The wavelength information of the signal light, and then adjust the pass wavelength of the filter based on the wavelength information, so that the wavelength to be detected can be selected, and then it can ensure that other optical signals except the outgoing light are blocked, and only the outgoing light is allowed to pass, thereby ensuring overlap Imaging accuracy, ultimately improving the accuracy of group refractive index measurements.

基于上述任一实施例,在所述纳米线成像装置包括第二成像装置的情况下,在上述步骤320之前,该方法还包括:Based on any of the above embodiments, when the nanowire imaging device includes a second imaging device, before the above step 320, the method further includes:

获取所述第二成像装置获得的样品成像;acquiring the image of the sample obtained by the second imaging device;

基于所述样品成像,确定移动方式;determining a movement pattern based on said imaging of the sample;

基于所述移动方式,控制所述样品台移动。Based on the movement pattern, the movement of the sample stage is controlled.

可以通过上述任一实施例的纳米线成像装置获得样品成像,获得样品成像的具体过程可以参考上述实施例,此处不再一一赘述。The sample imaging can be obtained by the nanowire imaging device of any of the above embodiments, and the specific process of obtaining the sample imaging can refer to the above embodiments, and will not be repeated here.

具体地,确定样品成像的清晰度,进而基于清晰度确定移动方式,从而基于移动方式,控制样品台进行三维空间移动,以对纳米线样品进行成像聚焦。Specifically, the resolution of the sample imaging is determined, and then the movement mode is determined based on the resolution, so that based on the movement mode, the sample stage is controlled to move in three-dimensional space to focus the imaging of the nanowire sample.

本发明实施例提供的纳米线成像装置,通过设置第二成像装置,将纳米线样品的出射光进行成像,从而基于样品成像控制样品台进行三维空间移动,以实现纳米线样品的成像聚焦,确保重叠成像的清晰度和准确性,最终进一步提高群折射率测量的准确性。In the nanowire imaging device provided by the embodiment of the present invention, by setting the second imaging device, the emitted light of the nanowire sample is imaged, thereby controlling the sample stage to move in three-dimensional space based on the sample imaging, so as to realize the imaging focus of the nanowire sample, ensuring The clarity and accuracy of overlay imaging ultimately further improves the accuracy of group refractive index measurements.

在实际应用过程中,通过光激发及成像装置收集信号实现纯光学无损探测,避免纳米线样品所处介质环境的制约,适用于片上集成器件的实时探测。In the actual application process, pure optical non-destructive detection is realized by collecting signals through optical excitation and imaging devices, avoiding the restriction of the medium environment in which the nanowire sample is located, and is suitable for real-time detection of on-chip integrated devices.

下面对本发明提供的群折射率测量装置进行描述,下文描述的群折射率测量装置与上文描述的群折射率测量方法可相互对应参照。The group refractive index measurement device provided by the present invention is described below, and the group refractive index measurement device described below and the group refractive index measurement method described above can be referred to in correspondence.

图4为本发明提供的群折射率测量装置的结构示意图,如图4所示,该群折射率测量装置,包括:Fig. 4 is a schematic structural diagram of a group refractive index measuring device provided by the present invention, as shown in Fig. 4, the group refractive index measuring device includes:

信息获取模块410,用于在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间;An information acquisition module 410, configured to acquire the position information of the sliding assembly under the current imaging round, and determine the delay time of the current imaging round based on the position information;

成像获取模块420,用于获取所述第一成像装置在所述当前成像轮次下获取的重叠成像;An imaging acquisition module 420, configured to acquire overlapping imaging acquired by the first imaging device in the current imaging round;

组件控制模块430,用于在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像;The component control module 430 is configured to control the movement of the sliding component when the current imaging round is not the last imaging round, so as to move the sliding component to the position of the next imaging round, and set the The next imaging round is used as the current imaging round, and a plurality of overlapping imaging with different delay times is obtained;

信息确定模块440,用于基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息;An information determination module 440, configured to determine the interference fringe intensity distribution information based on the overlapping imaging of the plurality of different delay times;

群折射率确定模块450,用于基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。A group refractive index determination module 450, configured to determine a group velocity based on the intensity distribution information of the interference fringes, the delay time of the overlapping imaging of the plurality of different delay times, and the length of the nanowire sample, and based on the group velocity Determining the group refractive index of the nanowire sample.

本发明实施例提供的群折射率测量装置,飞秒激光光源与显微物镜进行光路连接,以使显微物镜将飞秒激光光源的激发光聚焦于样品台上的纳米线样品,即激发光经过显微物镜聚焦到纳米线样品的表面,以作为泵浦光将纳米线样品激发,从而使纳米线样品产生激射,辐射出具有相干性的出射光;且第一分束片与显微物镜进行光路连接,以将显微物镜收集的出射光划分为第一束光和第二束光,而用于反射第二束光的第二反射镜设于滑动组件,从而使第二反射镜可以沿远离或接近第一分束片的方向移动,进而实现第一束光和第二束光的光程差控制,即可以通过在当前成像轮次下,获取滑动组件的位置信息,并基于位置信息确定当前成像轮次的延迟时间,获取第一成像装置在当前成像轮次下获得的重叠成像,在当前成像轮次不为最后一个成像轮次的情况下,控制滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将下一成像轮次作为当前成像轮次,获得多个不同延迟时间的重叠成像,且由于出射光为具有相干性的激光,因此,基于多个不同延迟时间的重叠成像可以确定干涉条纹强度分布信息,实现在时间尺度上探测光脉冲信号变化,即实现时间尺度上的信号分辨,满足光脉冲产生和传输过程的探测需求,即可以基于干涉条纹强度分布信息、多个不同延迟时间的重叠成像的延迟时间和纳米线样品的长度,确定群速度,并基于群速度确定纳米线样品的群折射率,最终实现纳米线样品的群折射率测量。In the group refractive index measurement device provided by the embodiment of the present invention, the femtosecond laser light source is connected to the microscopic objective lens in an optical path, so that the microscopic objective lens focuses the excitation light of the femtosecond laser light source on the nanowire sample on the sample stage, that is, the excitation light Focusing on the surface of the nanowire sample through the microscope objective lens, it is used as pump light to excite the nanowire sample, so that the nanowire sample generates lasing and radiates coherent outgoing light; and the first beam splitter and the microscope The objective lens is connected on the optical path to divide the outgoing light collected by the microscopic objective lens into a first beam of light and a second beam of light, and a second reflector for reflecting the second beam of light is arranged on the sliding assembly, so that the second reflector It can move in the direction away from or close to the first beam splitter, and then realize the control of the optical path difference between the first beam and the second beam, that is, the position information of the sliding component can be acquired under the current imaging round, and based on The position information determines the delay time of the current imaging round, obtains the overlapping imaging obtained by the first imaging device under the current imaging round, and controls the movement of the sliding assembly when the current imaging round is not the last imaging round to move The sliding assembly is moved to the position of the next imaging round, and the next imaging round is used as the current imaging round to obtain multiple overlapping imaging with different delay times, and since the outgoing light is a coherent laser, based on The overlapping imaging of multiple different delay times can determine the intensity distribution information of interference fringes, realize the detection of optical pulse signal changes on the time scale, that is, realize the signal resolution on the time scale, and meet the detection requirements of the optical pulse generation and transmission process, that is, it can be based on Interference fringe intensity distribution information, delay time of overlapping imaging with different delay times and the length of the nanowire sample, determine the group velocity, and determine the group refractive index of the nanowire sample based on the group velocity, and finally realize the group refractive index of the nanowire sample Measurement.

基于上述任一实施例,在所述纳米线成像装置包括滤光片、光谱仪和可翻折镜的情况下,该群折射率测量装置还包括:Based on any of the above embodiments, when the nanowire imaging device includes a filter, a spectrometer and a foldable mirror, the group of refractive index measurement devices further includes:

可翻折镜控制模块,用于控制所述可翻折镜,以使所述滤光片与所述光谱仪进行光路连接;The foldable mirror control module is used to control the foldable mirror so that the optical filter is connected to the spectrometer;

波长调整模块,用于基于所述光谱仪检测的波长信息调整所述滤光片的通过波长;a wavelength adjustment module, configured to adjust the passing wavelength of the filter based on the wavelength information detected by the spectrometer;

可翻折镜控制模块,用于控制所述可翻折镜,以使所述滤光片与所述第一分束片进行光路连接。The foldable mirror control module is used to control the foldable mirror so that the optical filter is connected to the first beam splitter.

基于上述任一实施例,在所述纳米线成像装置包括第二成像装置的情况下,该群折射率测量装置还包括:Based on any of the above embodiments, when the nanowire imaging device includes a second imaging device, the group of refractive index measurement devices further includes:

样品获取模块,用于获取所述第二成像装置获得的样品成像;a sample acquisition module, configured to acquire the image of the sample obtained by the second imaging device;

方式确定模块,用于基于所述样品成像,确定移动方式;a mode determination module, configured to determine a movement mode based on the sample imaging;

样品台控制模块,用于基于所述移动方式,控制所述样品台移动。The sample stage control module is used to control the movement of the sample stage based on the moving manner.

图5示例了一种电子设备的实体结构示意图,如图5所示,该电子设备可以包括:处理器(processor)510、通信接口(Communications Interface)520、存储器(memory)530和通信总线540,其中,处理器510,通信接口520,存储器530通过通信总线540完成相互间的通信。处理器510可以调用存储器530中的逻辑指令,以执行群折射率测量方法,该方法包括:在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间;获取所述第一成像装置在所述当前成像轮次下获得的重叠成像;在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像;基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息;基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。FIG. 5 illustrates a schematic diagram of the physical structure of an electronic device. As shown in FIG. 5, the electronic device may include: a processor (processor) 510, a communication interface (Communications Interface) 520, a memory (memory) 530 and a communication bus 540, Wherein, the processor 510 , the communication interface 520 , and the memory 530 communicate with each other through the communication bus 540 . The processor 510 may call the logic instructions in the memory 530 to execute the method for measuring the group refractive index, the method comprising: obtaining the position information of the sliding assembly in the current imaging round, and determining the current position information based on the position information. The delay time of an imaging round; acquiring the overlapping imaging obtained by the first imaging device under the current imaging round; in the case that the current imaging round is not the last imaging round, controlling the sliding assembly move to move the sliding assembly to the position of the next imaging round, and use the next imaging round as the current imaging round to obtain multiple overlapping imaging with different delay times; based on the multiple different Delay time overlapping imaging, determine interference fringe intensity distribution information; based on the interference fringe intensity distribution information, the delay time of the overlapping imaging of multiple different delay times and the length of the nanowire sample, determine the group velocity, and based on The group velocity determines the group refractive index of the nanowire sample.

此外,上述的存储器530中的逻辑指令可以通过软件功能单元的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读取存储介质中。基于这样的理解,本发明的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质中,包括若干指令用以使得一台计算机设备(可以是个人计算机,服务器,或者网络设备等)执行本发明各个实施例所述方法的全部或部分步骤。而前述的存储介质包括:U盘、移动硬盘、只读存储器(ROM,Read-Only Memory)、随机存取存储器(RAM,Random Access Memory)、磁碟或者光盘等各种可以存储程序代码的介质。In addition, the above logic instructions in the memory 530 may be implemented in the form of software function units and be stored in a computer-readable storage medium when sold or used as an independent product. Based on this understanding, the essence of the technical solution of the present invention or the part that contributes to the prior art or the part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including Several instructions are used to make a computer device (which may be a personal computer, a server, or a network device, etc.) execute all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program codes. .

另一方面,本发明还提供一种计算机程序产品,所述计算机程序产品包括计算机程序,计算机程序可存储在非暂态计算机可读存储介质上,所述计算机程序被处理器执行时,计算机能够执行上述各方法所提供的群折射率测量方法,该方法包括:在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间;获取所述第一成像装置在所述当前成像轮次下获得的重叠成像;在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像;基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息;基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。On the other hand, the present invention also provides a computer program product. The computer program product includes a computer program that can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can Executing the group refractive index measurement method provided by the above methods, the method includes: under the current imaging round, acquiring the position information of the sliding assembly, and determining the delay time of the current imaging round based on the position information; Acquiring overlapping imaging obtained by the first imaging device under the current imaging round; if the current imaging round is not the last imaging round, controlling the movement of the sliding assembly to move the sliding component to the position of the next imaging round, and use the next imaging round as the current imaging round to obtain multiple overlapping imaging with different delay times; based on the multiple overlapping imaging with different delay times, determine Interference fringe intensity distribution information; based on the interference fringe intensity distribution information, the delay time of the overlapping imaging of the plurality of different delay times and the length of the nanowire sample, determine the group velocity, and determine the group velocity based on the group velocity Group refractive index of nanowire samples.

又一方面,本发明还提供一种非暂态计算机可读存储介质,其上存储有计算机程序,该计算机程序被处理器执行时实现以执行上述各方法提供的群折射率测量方法,该方法包括:在当前成像轮次下,获取所述滑动组件的位置信息,并基于所述位置信息确定所述当前成像轮次的延迟时间;获取所述第一成像装置在所述当前成像轮次下获得的重叠成像;在所述当前成像轮次不为最后一个成像轮次的情况下,控制所述滑动组件移动,以移动所述滑动组件至下一成像轮次的位置,并将所述下一成像轮次作为所述当前成像轮次,获得多个不同延迟时间的重叠成像;基于所述多个不同延迟时间的重叠成像,确定干涉条纹强度分布信息;基于所述干涉条纹强度分布信息、所述多个不同延迟时间的重叠成像的延迟时间和所述纳米线样品的长度,确定群速度,并基于所述群速度确定所述纳米线样品的群折射率。In yet another aspect, the present invention also provides a non-transitory computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, it is implemented to perform the method for measuring the group refractive index provided by the above-mentioned methods, the method The method includes: obtaining the position information of the sliding assembly under the current imaging round, and determining the delay time of the current imaging round based on the position information; obtaining the first imaging device under the current imaging round Obtained overlapping imaging; in the case that the current imaging round is not the last imaging round, control the movement of the sliding assembly to move the sliding assembly to the position of the next imaging round, and place the next imaging round An imaging round is used as the current imaging round, and multiple overlapping imaging with different delay times is obtained; based on the multiple overlapping imaging with different delay times, interference fringe intensity distribution information is determined; based on the interference fringe intensity distribution information, The delay times of the overlapping imaging of the plurality of different delay times and the length of the nanowire sample determine a group velocity, and determine a group refractive index of the nanowire sample based on the group velocity.

以上所描述的装置实施例仅仅是示意性的,其中所述作为分离部件说明的单元可以是或者也可以不是物理上分开的,作为单元显示的部件可以是或者也可以不是物理单元,即可以位于一个地方,或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部模块来实现本实施例方案的目的。本领域普通技术人员在不付出创造性的劳动的情况下,即可以理解并实施。The device embodiments described above are only illustrative, and the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in One place, or it can be distributed to multiple network elements. Part or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. It can be understood and implemented by those skilled in the art without any creative efforts.

通过以上的实施方式的描述,本领域的技术人员可以清楚地了解到各实施方式可借助软件加必需的通用硬件平台的方式来实现,当然也可以通过硬件。基于这样的理解,上述技术方案本质上或者说对现有技术做出贡献的部分可以以软件产品的形式体现出来,该计算机软件产品可以存储在计算机可读存储介质中,如ROM/RAM、磁碟、光盘等,包括若干指令用以使得一台计算机设备(可以是个人计算机,服务器,或者网络设备等)执行各个实施例或者实施例的某些部分所述的方法。Through the above description of the implementations, those skilled in the art can clearly understand that each implementation can be implemented by means of software plus a necessary general hardware platform, and of course also by hardware. Based on this understanding, the essence of the above technical solution or the part that contributes to the prior art can be embodied in the form of software products, and the computer software products can be stored in computer-readable storage media, such as ROM/RAM, magnetic discs, optical discs, etc., including several instructions to make a computer device (which may be a personal computer, server, or network device, etc.) execute the methods described in various embodiments or some parts of the embodiments.

最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still be Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent replacements are made to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims (14)

1. A nanowire imaging device, comprising: the interferometer comprises a first beam splitting sheet, a first reflecting mirror, a sliding assembly and a second reflecting mirror;
the sample table is used for placing a nanowire sample to be measured;
the femtosecond laser light source is in optical path connection with the microscope objective, the microscope objective is used for focusing exciting light of the femtosecond laser light source on the nanowire sample, the microscope objective is also used for collecting emergent light of the nanowire sample, and the emergent light is coherent light emitted after the exciting light enables the nanowire sample to generate radiation;
the first beam splitting sheet is in optical path connection with the microscope objective and is used for dividing the emergent light into a first beam of light and a second beam of light;
the first reflector is in optical path connection with the first beam splitting sheet, and the first reflector is used for reflecting the first beam of light to the first beam splitting sheet;
the second reflector is in optical path connection with the first beam splitting sheet, the second reflector is used for reflecting the second beam of light to the first beam splitting sheet, the second reflector is arranged on the sliding assembly, and the sliding assembly is used for enabling the second reflector to move along the direction far away from or close to the first beam splitting sheet;
the first imaging device is in optical path connection with the first beam splitting sheet, so that the reflected first beam of light is transmitted to the first imaging device, and the reflected second beam of light is transmitted to the first imaging device, so that the first imaging device can obtain overlapped imaging of the nanowire sample.
2. The nanowire imaging device of claim 1, further comprising: an optical filter;
the first beam splitting sheet is in optical path connection with the microscope objective through the optical filter;
the micro objective is also used for collecting reflected light reflected by the nanowire sample, and the optical filter is used for blocking the reflected light and transmitting the emergent light.
3. The nanowire imaging device of claim 2, further comprising: the spectrometer, the turnover mirror and the controller;
the controller is used for controlling the foldable mirror so that the optical filter is in optical path connection with the first beam splitting sheet or the optical filter is in optical path connection with the spectrometer;
under the condition that the optical filter is in optical path connection with the spectrometer, the spectrometer is used for detecting wavelength information of signal light, and the signal light is light filtered by the optical filter;
the controller is used for adjusting the passing wavelength of the optical filter based on the wavelength information.
4. The nanowire imaging device of claim 1, wherein the interferometer further comprises: a telephoto lens;
the first imaging device is in optical path connection with the first beam splitting sheet through the long-focus lens;
the telephoto lens is used for converging the reflected first beam of light and the reflected second beam of light to the first imaging device.
5. The nanowire imaging device of claim 1, wherein the second mirror is a hollow mirror comprising a first mirror and a second mirror, the first mirror having a mirror surface angle of 90 degrees with respect to the second mirror;
the first mirror is configured to reflect the second beam of light to the second mirror, and the second mirror is configured to reflect the second beam of light reflected by the first mirror to the first beam splitting sheet.
6. The nanowire imaging device of claim 1, further comprising: a second beam splitting sheet;
the femtosecond laser light source is in optical path connection with the microscope objective through the second beam splitting sheet so as to transmit the exciting light to the microscope objective;
the first beam splitting sheet is in optical path connection with the microscope objective through the second beam splitting sheet so that the emergent light is transmitted to the first beam splitting sheet.
7. The nanowire imaging device of claim 1, further comprising: an illumination light source and a third beam splitter;
the illumination light source is in optical path connection with the microscope objective through the third beam splitting sheet so that illumination light of the illumination light source is transmitted to the microscope objective, and the microscope objective is further used for focusing the illumination light on the nanowire sample;
the first beam splitting sheet is in optical path connection with the microscope objective through the third beam splitting sheet so that the emergent light is transmitted to the first beam splitting sheet.
8. The nanowire imaging device of claim 1, further comprising: a second imaging device and a controller;
the second imaging device is in optical path connection with the microscope objective so that the emergent light is transmitted to the second imaging device to enable the second imaging device to obtain sample imaging of the nanowire sample;
the sample stage is a three-dimensional displaceable moving stage, and the controller is used for controlling the sample stage to move based on the sample imaging so as to perform imaging focusing on the nanowire sample.
9. A method of group refractive index measurement using the nanowire imaging device of any one of claims 1-8, comprising:
acquiring position information of the sliding assembly in a current imaging round, and determining delay time of the current imaging round based on the position information;
acquiring overlapped imaging obtained by the first imaging device under the current imaging round;
under the condition that the current imaging round is not the last imaging round, controlling the sliding assembly to move so as to move the sliding assembly to the position of the next imaging round, and taking the next imaging round as the current imaging round to obtain a plurality of overlapped images with different delay times;
determining interference fringe intensity distribution information based on the plurality of overlapping images of different delay times;
determining a group velocity based on the interference fringe intensity distribution information, the delay time for overlay imaging of the plurality of different delay times, and the length of the nanowire sample, and determining a group refractive index of the nanowire sample based on the group velocity.
10. The group refractive index measurement method according to claim 9, wherein in a case where the nanowire imaging device includes a filter, a spectrometer, and a tiltable mirror, before the acquiring the overlay images obtained by the first imaging device in the current imaging round, further comprises:
controlling the foldable mirror to enable the optical filter to be in optical path connection with the spectrometer;
adjusting the passing wavelength of the optical filter based on the wavelength information detected by the spectrometer;
and controlling the foldable mirror to enable the optical filter and the first beam splitting sheet to be in optical path connection.
11. The method of claim 9, wherein, when the nanowire imaging device comprises a second imaging device, before the obtaining the overlay image obtained by the first imaging device in the current imaging round, further comprising:
obtaining an image of the sample obtained by the second imaging device;
determining a movement pattern based on the imaging of the sample;
and controlling the sample stage to move based on the moving mode.
12. A group refractive index measurement device implemented using the nanowire imaging device of any one of claims 1-8, comprising:
the information acquisition module is used for acquiring the position information of the sliding assembly under the current imaging round and determining the delay time of the current imaging round based on the position information;
an imaging acquisition module for acquiring overlapping images acquired by the first imaging device in the current imaging round;
the component control module is used for controlling the sliding component to move under the condition that the current imaging round is not the last imaging round so as to move the sliding component to the position of the next imaging round, and the next imaging round is taken as the current imaging round to obtain a plurality of overlapped images with different delay times;
an information determination module for determining interference fringe intensity distribution information based on the plurality of overlapping images of different delay times;
a group refractive index determination module for determining a group velocity based on the interference fringe intensity distribution information, the delay time of the overlay imaging of the plurality of different delay times, and the length of the nanowire sample, and determining a group refractive index of the nanowire sample based on the group velocity.
13. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, wherein the processor when executing the program implements a group refractive index measurement method according to any one of claims 9 to 11.
14. A non-transitory computer readable storage medium having stored thereon a computer program, wherein the computer program when executed by a processor implements the group refractive index measurement method according to any one of claims 9 to 11.
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