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CN115635091A - a plasma torch - Google Patents

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Publication number
CN115635091A
CN115635091A CN202211349960.XA CN202211349960A CN115635091A CN 115635091 A CN115635091 A CN 115635091A CN 202211349960 A CN202211349960 A CN 202211349960A CN 115635091 A CN115635091 A CN 115635091A
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plasma
seat
columnar
reaction chamber
gas distribution
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余珍胜
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Hunan Tongchuang Plasma Technology Co.,Ltd.
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Suzhou Fuxin Technology Co ltd
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Abstract

本发明涉及一种等离子体炬,涉及射频等离子加工设备的技术领域,包括用于连接反应室的反应室连接座,反应室连接座上开设有连接口;反应室连接座上设置有柱状包套,柱状包套上开设有与连接口连通的进粉通道,反应室连接座上设置有用于固定柱状包套的固定组件;柱状包套内设置有感应线圈,感应线圈成螺旋状排布;柱状包套上设置有等离子气体分配座,等离子气体分配座内开设有与进粉通道连通的进气道;等离子气体分配座上设置有等离子石英约束管;等离子气体分配座上设置有等离子气进孔和翘气进孔;等离子气体分配座一端插设有送粉喷枪,送粉喷枪一端伸入进粉通道内。本发明具有提高生产效率、增长使用寿命的优点。

Figure 202211349960

The invention relates to a plasma torch, which relates to the technical field of radio frequency plasma processing equipment, including a reaction chamber connection seat for connecting reaction chambers, a connection port is opened on the reaction chamber connection seat; a columnar sheath is arranged on the reaction chamber connection seat , the columnar cover is provided with a powder inlet channel connected to the connection port, and the connection seat of the reaction chamber is provided with a fixing component for fixing the columnar cover; the columnar cover is provided with induction coils, and the induction coils are arranged in a spiral shape; columnar There is a plasma gas distribution seat on the cover, and an air inlet connected to the powder inlet channel is opened in the plasma gas distribution seat; a plasma quartz confinement tube is arranged on the plasma gas distribution seat; a plasma gas inlet hole is arranged on the plasma gas distribution seat And warped air inlet hole; one end of the plasma gas distribution seat is inserted with a powder feeding spray gun, and one end of the powder feeding spray gun extends into the powder inlet channel. The invention has the advantages of improving production efficiency and increasing service life.

Figure 202211349960

Description

一种等离子体炬a plasma torch

技术领域technical field

本发明涉及射频等离子加工设备的技术领域,尤其是涉及一种等离子体炬。The invention relates to the technical field of radio frequency plasma processing equipment, in particular to a plasma torch.

背景技术Background technique

目前较为成熟的球形化粉末的制备方法包括气雾化法、旋转电极法等,其他技术只能把棒料或金属丝放到反应室的高温区内,容易导致材料粉碎不均匀等缺陷。At present, the more mature preparation methods of spheroidized powder include gas atomization method, rotating electrode method, etc. Other technologies can only put the bar or wire in the high temperature zone of the reaction chamber, which may easily lead to defects such as uneven material crushing.

用射频等离子体做热源在纳米粉末材料的制备与微米亚微米粉末材料的球化处理等方面具有较大的技术优势。射频等离子体具有高温、高焓、高活性和温度梯度大的特性,由于其不带入任何杂质、运行持续稳定、材料处理产能高和设备造价适中等优点,便于广泛推广。Using radio-frequency plasma as a heat source has great technical advantages in the preparation of nano-powder materials and the spheroidization of micron and sub-micron powder materials. RF plasma has the characteristics of high temperature, high enthalpy, high activity and large temperature gradient. It is easy to be widely promoted due to its advantages of not bringing in any impurities, continuous and stable operation, high material processing capacity and moderate equipment cost.

但在现有的加工过程中,容易出现粉粒球形不够规则的问题,在加工时存在椭球形、卫星球、空心球等缺陷,导致球形粉末生产效率较低的问题,不易于实现大规模生产。However, in the existing processing process, it is prone to the problem that the spherical shape of the powder is not regular enough, and there are defects such as ellipsoid, satellite sphere, and hollow sphere during processing, which leads to the problem of low production efficiency of spherical powder, and it is not easy to realize large-scale production. .

发明内容Contents of the invention

针对现有技术存在的不足,本发明的目的是提供一种等离子体炬,其具有提高生产效率的优点。Aiming at the deficiencies in the prior art, the object of the present invention is to provide a plasma torch which has the advantage of improving production efficiency.

本发明的上述目的是通过以下技术方案得以实现的:Above-mentioned purpose of the present invention is achieved through the following technical solutions:

一种等离子体炬,包括用于连接反应室的反应室连接座,所述反应室连接座上开设有连接口;A plasma torch, comprising a reaction chamber connection seat for connecting a reaction chamber, and a connection port is opened on the reaction chamber connection seat;

所述反应室连接座上设置有柱状包套,所述柱状包套上沿轴向贯穿开设有进粉通道,所述进粉通道与连接口连通,所述反应室连接座上设置有用于固定柱状包套的固定组件;The connecting seat of the reaction chamber is provided with a columnar sheath, and a powder inlet channel is penetrating through the columnar sheath in the axial direction. The powder inlet channel communicates with the connection port, and the connecting seat of the reaction chamber is provided with Fixing components for the column sheath;

所述柱状包套内设置有感应线圈,所述感应线圈位于柱状包套接近反应室连接座的一端,所述感应线圈沿柱状包套轴向成螺旋状排布,所述感应线圈与柱状包套同轴设置,感应线圈两端均暴露在柱状包套外;An induction coil is arranged inside the columnar envelope, the induction coil is located at one end of the columnar envelope close to the connection seat of the reaction chamber, the induction coil is arranged in a spiral shape along the axis of the columnar envelope, and the induction coil is connected The sleeve is set coaxially, and both ends of the induction coil are exposed outside the cylindrical sleeve;

所述柱状包套远离连接反应室的一端设置有等离子气体分配座,所述等离子气体分配座朝向柱状包套的一端开设有与进粉通道连通的进气道,所述进气道与进粉通道同轴设置且所述进气道的径长小于所述进粉通道的径长;A plasma gas distribution seat is provided at the end of the columnar envelope far away from the reaction chamber, and an air inlet connected to the powder inlet channel is provided at the end of the plasma gas distribution seat facing the columnar envelope, and the air inlet is connected with the powder inlet channel. The channels are arranged coaxially and the diameter length of the inlet channel is smaller than the diameter length of the powder inlet channel;

所述等离子气体分配座上设置有等离子石英约束管,所述等离子石英约束管一端插入进气道内,另一端插入进粉通道内;The plasma gas distribution seat is provided with a plasma quartz confinement tube, one end of the plasma quartz confinement tube is inserted into the air inlet channel, and the other end is inserted into the powder inlet channel;

所述等离子气体分配座上设置有等离子气进孔和翘气进孔,所述等离子气进孔沿等离子气体分配座径向倾斜设置,所述等离子气进孔一端连接有等离子气进气管,另一端与进气道连通,所述翘气进孔沿等离子气体分配座轴向设置,所述翘气进孔一端连接有翘气进气管,另一端与进粉通道连通;The plasma gas distribution seat is provided with a plasma gas inlet hole and a warped gas inlet hole. The plasma gas inlet hole is arranged obliquely along the radial direction of the plasma gas distribution seat. One end of the plasma gas inlet hole is connected with a plasma gas inlet pipe, and the other is One end communicates with the air inlet, the air inlet hole is arranged axially along the plasma gas distribution seat, one end of the air inlet hole is connected with an air inlet pipe, and the other end communicates with the powder inlet channel;

所述等离子气体分配座远离柱状包套的一端插设有送粉喷枪,所述送粉喷枪一端贯穿等离子石英约束管伸入进粉通道内,另一端暴露在外。A powder feeding spray gun is inserted at the end of the plasma gas distribution seat away from the cylindrical sheath, one end of the powder feeding spray gun penetrates the plasma quartz confinement tube and extends into the powder inlet channel, and the other end is exposed outside.

通过采用上述技术方案,在进行球形粉末制备前,通过等离子气进气管向等离子体炬内通入惰性气体,惰性气体通过等离子气进孔经进气道流入等离子石英约束管内部腔体,再经等离子石英约束管流入进粉通道内,进粉通道内的惰性气体经过感应线圈时惰性气体被电离,形成稳定的高温惰性等离子体;在通入惰性气体的同时,通过翘气进气管向等离子体炬内通入翘气,翘气经翘气进孔流入进粉通道内,在流动到感应线圈处后,将形成的高温惰性等离子体维持在感应线圈中心,在进行球形粉末制备时,形状不规则的原料粉末用运载气体经过送粉喷枪喷入感应等离子体炬中,粉末颗粒在高温等离子体中吸收大量的热,表面迅速熔化,并以极高速度进入反应室,然后在反应室内快速冷却,在表面张力的作用下,冷却凝固成球型粉末。本申请通过在反应室外增加等离子体炬,使得粉末原料送入反应室前即处于熔融状态,熔融状态的粉末原料进入反应室后快速冷却,在表面张力的作用下,冷却凝固成球型粉末,减小加工过程中出现椭球形、卫星球、空心球等等残次品的可能,从而提高了加工效率。By adopting the above technical scheme, before preparing the spherical powder, the inert gas is introduced into the plasma torch through the plasma gas inlet pipe, and the inert gas flows into the inner cavity of the plasma quartz confinement tube through the plasma gas inlet hole and the inlet channel, and then passes through the The plasma quartz confinement tube flows into the powder inlet channel. When the inert gas in the powder inlet channel passes through the induction coil, the inert gas is ionized to form a stable high-temperature inert plasma; The torch is fed with warped gas, and the warped gas flows into the powder inlet channel through the warped gas inlet hole. After flowing to the induction coil, the formed high-temperature inert plasma is maintained at the center of the induction coil. When preparing spherical powder, the shape is not stable. The regular raw material powder is sprayed into the induction plasma torch through the powder feeding spray gun with the carrier gas. The powder particles absorb a large amount of heat in the high-temperature plasma, the surface melts rapidly, and enter the reaction chamber at a very high speed, and then cool rapidly in the reaction chamber , under the action of surface tension, cooling and solidification into spherical powder. In this application, by adding a plasma torch outside the reaction chamber, the powder raw material is in a molten state before being sent into the reaction chamber, and the molten powder raw material enters the reaction chamber and is rapidly cooled, and is cooled and solidified into a spherical powder under the action of surface tension. Reduce the possibility of defective products such as ellipsoids, satellite balls, hollow balls, etc. during processing, thereby improving processing efficiency.

本发明进一步设置为:所述固定组件包括设置在反应室连接座上的下固定盘、设置在柱状包套远离反应室连接座一端的上固定盘,所述下固定盘朝向反应室连接座的一侧面上固定连接有连接圆盘,所述等离子气体分配座固定连接在升固定盘背离柱状包套的一侧面上。The present invention is further configured as follows: the fixing assembly includes a lower fixing plate arranged on the connecting seat of the reaction chamber, an upper fixing plate arranged on the end of the cylindrical envelope away from the connecting seat of the reaction chamber, and the lower fixing plate faces the side of the connecting seat of the reaction chamber. A connection disk is fixedly connected to one side surface, and the plasma gas distribution seat is fixedly connected to the side surface of the lifting fixed disk away from the cylindrical sheath.

本发明进一步设置为:所述柱状包套接近反应室连接座的一端设置有喷嘴,所述喷嘴与下固定盘相连,所述喷嘴上设置有等离子陶瓷约束管,所述等离子陶瓷约束管插入进粉通道内,所述等离子陶瓷约束管的径向小于进粉通道的径长,所述等离子陶瓷约束管远离喷嘴的一端与等离子气体分配座抵接。The present invention is further configured as follows: a nozzle is provided at the end of the columnar envelope close to the connection seat of the reaction chamber, the nozzle is connected to the lower fixed plate, a plasma ceramic confinement tube is provided on the nozzle, and the plasma ceramic confinement tube is inserted into In the powder channel, the radial direction of the plasma ceramic confinement tube is smaller than the diameter of the powder inlet channel, and the end of the plasma ceramic confinement tube away from the nozzle is in contact with the plasma gas distribution seat.

本发明进一步设置为:所述等离子陶瓷约束管内壁与等离子石英约束管外壁之间形成有翘气进气道,所述翘气进孔与翘气进气道连通。The present invention is further configured as follows: a warped gas inlet is formed between the inner wall of the plasma ceramic confinement tube and the outer wall of the plasma quartz confinement tube, and the warped gas inlet communicates with the warped gas inlet.

本发明进一步设置为:所述上固定盘上设置有中空的等离子体水气路分配矩座,所述等离子气体分配座同轴设置在等离子体水气路分配矩座内,所述翘气进气管和等离子气进气管均插设在等离子体水气路分配矩座上。The present invention is further configured as follows: the upper fixed plate is provided with a hollow plasma water-gas distribution seat, the plasma gas distribution seat is coaxially arranged in the plasma water-gas distribution seat, and the air inlet Both the gas pipe and the plasma gas inlet pipe are inserted on the plasma water gas distribution box.

本发明进一步设置为:所述等离子体水气路分配矩座远离上固定盘的一端同轴设置有密封压板,所述等离子气体分配座与密封压板相连。The present invention is further configured as follows: the end of the plasma water gas channel distribution moment seat away from the upper fixed plate is coaxially provided with a sealing pressure plate, and the plasma gas distribution seat is connected to the sealing pressure plate.

本发明进一步设置为:所述送粉喷枪上同轴套设有固定螺纹轴套,所述固定螺纹轴套与密封压板螺纹连接。The present invention is further configured as follows: the coaxial sleeve on the powder feeding spray gun is provided with a fixed threaded sleeve, and the fixed threaded sleeve is threadedly connected with the sealing pressure plate.

本发明进一步设置为:所述等离子体水气路分配矩座上插设有进水管和出水管,所述柱状包套上设置有通水孔,所述通水孔沿轴向贯穿柱状包套设置,所述等离子陶瓷约束管与柱状包套内壁之间形成有回水道,所述进水管与通水孔连通,所述出水管与回水道连通管,所述喷嘴上开设有连通通水孔和回水道的环槽。The present invention is further configured as follows: a water inlet pipe and a water outlet pipe are inserted into the plasma water and gas channel distribution frame, and a water hole is provided on the columnar jacket, and the water outlet hole penetrates the cylindrical jacket along the axial direction Setting, a return channel is formed between the plasma ceramic confinement tube and the inner wall of the cylindrical sheath, the water inlet pipe communicates with the water passage hole, the water outlet pipe communicates with the return water passage, and the nozzle is provided with a communication water passage hole And the ring groove of the return channel.

本发明进一步设置为:所述感应线圈为内部中空的铜管。The present invention is further provided that: the induction coil is a hollow copper tube.

本发明进一步设置为:所述等离子气进孔位于等离子气体分配座远离上固定盘的一端,所述等离子气进孔沿等离子气体分配座周向间隔均匀设置有多个,所述翘气进孔位于等离子气体分配座接近上固定盘的一端,所述翘气进孔沿等离子气体分配座周向间隔均匀设置有多个。The present invention is further configured as follows: the plasma gas inlet hole is located at the end of the plasma gas distribution seat away from the upper fixed plate, and a plurality of plasma gas inlet holes are evenly spaced along the circumferential direction of the plasma gas distribution seat, and the warped gas inlet hole Located at one end of the plasma gas distribution seat close to the upper fixed plate, a plurality of warped gas inlet holes are evenly spaced along the circumference of the plasma gas distribution seat.

综上所述,本发明的有益技术效果为:In summary, the beneficial technical effects of the present invention are:

1.通过在反应室外增加等离子体炬,使得粉末原料送入反应室前即处于熔融状态,熔融状态的粉末原料进入反应室后快速冷却,在表面张力的作用下,冷却凝固成球型粉末,减小加工过程中出现椭球形、卫星球、空心球等等残次品的可能,从而提高了加工效率;1. By adding a plasma torch outside the reaction chamber, the powder raw material is in a molten state before being sent into the reaction chamber, and the molten powder raw material enters the reaction chamber and is cooled rapidly, and under the action of surface tension, it is cooled and solidified into a spherical powder. Reduce the possibility of defective products such as ellipsoids, satellite balls, hollow balls, etc. during processing, thereby improving processing efficiency;

2.借助流动的冷却水对等离子体炬整体降温,降低在使用过程中因高温导致设备损坏的可能性,提高等离子体炬的耐用性。2. With the help of flowing cooling water to cool down the overall temperature of the plasma torch, reduce the possibility of equipment damage due to high temperature during use, and improve the durability of the plasma torch.

附图说明Description of drawings

图1是等离子体炬的整体结构示意图;Fig. 1 is the overall structure schematic diagram of plasma torch;

图2是等离子体炬工作状态下的剖视图;Fig. 2 is a sectional view of the working state of the plasma torch;

图3是等离子气体分配座的剖视图;Fig. 3 is a sectional view of the plasma gas distribution seat;

图4是等离子气进孔的结构示意图;Fig. 4 is the structural representation of plasma gas inlet hole;

图5是柱状包套的结构示意图;Fig. 5 is a schematic structural view of a columnar envelope;

图6是等离子体炬工作状态下另一视角的剖视图;Fig. 6 is a cross-sectional view of another viewing angle under the working state of the plasma torch;

图7是图6中A部分的放大图;Fig. 7 is an enlarged view of part A in Fig. 6;

图8是图6中B部分的放大图。Fig. 8 is an enlarged view of part B in Fig. 6 .

图中,1、反应室连接座;11、连接口;2、柱状包套;21、进粉通道;22、通水孔;3、固定组件;31、下固定盘;311、连接圆盘;32、上固定盘;4、感应线圈;5、等离子气体分配座;51、进气道;52、等离子石英约束管;53、等离子气进孔;54、翘气进孔;6、送粉喷枪;61、固定螺纹轴套;7、喷嘴;71、等离子陶瓷约束管;72、翘气进气道;73、环槽;74、回水道;8、等离子体水气路分配矩座;81、等离子气进气管;82、翘气进气管;83、进水管;84、出水管;9、密封压板。In the figure, 1. Reaction chamber connection seat; 11. Connection port; 2. Columnar sheath; 21. Powder inlet channel; 22. Water hole; 3. Fixing component; 31. Lower fixing plate; 311. Connecting disc; 32. Upper fixed plate; 4. Induction coil; 5. Plasma gas distribution seat; 51. Air inlet; 52. Plasma quartz confinement tube; 53. Plasma gas inlet hole; 54. Air inlet hole; 6. Powder feeding spray gun ; 61, fixed threaded shaft sleeve; 7, nozzle; 71, plasma ceramic restraint tube; 72, warped gas inlet; 73, ring groove; 74, return water channel; Plasma gas inlet pipe; 82, warped air inlet pipe; 83, water inlet pipe; 84, water outlet pipe; 9, sealing pressure plate.

具体实施方式Detailed ways

以下结合附图1-8对本发明作进一步详细说明。The present invention will be described in further detail below in conjunction with accompanying drawings 1-8.

本发明公开了一种等离子体炬,包括内部中空的反应室连接座1,反应室连接座1成圆柱状,在安装等离子体炬时,将反应室连接座1与反应室同轴设置,然后在反应室连接座1周缘间隔固定多个螺栓,从而将反应室连接座1固定在反应室的开口处。反应室连接座1远离反应室的一端开设有连接口11,连接口11沿反应室连接座1轴向贯穿设置。The invention discloses a plasma torch, which comprises a hollow reaction chamber connection seat 1, the reaction chamber connection seat 1 is cylindrical, when the plasma torch is installed, the reaction chamber connection seat 1 is coaxially arranged with the reaction chamber, and then A plurality of bolts are fixed at intervals around the periphery of the reaction chamber connecting seat 1 , so that the reaction chamber connecting seat 1 is fixed at the opening of the reaction chamber. The end of the reaction chamber connection seat 1 away from the reaction chamber is provided with a connection port 11 , and the connection port 11 is arranged axially through the reaction chamber connection seat 1 .

反应室连接座1的上端面通过螺栓固定连接有连接圆盘311,连接圆盘311与反应室连接座1同轴设置,连接圆盘311背离反应室连接座1的一侧面上通过螺栓固定连接有下固定盘31。下固定盘31的上端面上同轴固定连接有柱状包套2,柱状包套2沿竖直方向设置,柱状包套2内开设有进粉通道21,进粉通道21沿柱状包套2轴向贯穿设置,使得进粉通道21与连接口11连通,且进粉通道21与连接口11同轴。The upper end surface of the reaction chamber connection seat 1 is fixedly connected with a connection disc 311 by bolts, the connection disc 311 is arranged coaxially with the reaction chamber connection seat 1, and the side surface of the connection disc 311 away from the reaction chamber connection seat 1 is fixedly connected by bolts There is lower fixed disk 31. The upper end surface of the lower fixed plate 31 is coaxially fixedly connected with a columnar sheath 2, and the columnar sheath 2 is arranged along the vertical direction, and a powder inlet channel 21 is opened in the columnar sheath 2, and the powder inlet channel 21 is arranged along the axis of the columnar sheath 2. It is arranged to pass through, so that the powder inlet channel 21 communicates with the connection port 11 , and the powder inlet channel 21 is coaxial with the connection port 11 .

柱状包套2接近下固定盘31的一端设置有感应线圈4,感应线圈4成中空状,感应线圈4埋设在柱状包套2内且两端均暴露在外,感应线圈4暴露在外的两端长度相等且在竖直方向上间隔设置,感应线圈4沿柱状包套2轴向成螺旋状排布,感应线圈4与柱状包套2同轴设置。在加工柱状包套2时,感应线圈4通过模具直接埋入柱形包套内,柱形包套采用高导热性和高电阻率的聚丙烯材料;感应线圈4采用具备优良导热性、延展性和耐蚀性的紫铜材料。One end of the columnar envelope 2 close to the lower fixed plate 31 is provided with an induction coil 4, the induction coil 4 is hollow, the induction coil 4 is buried in the columnar envelope 2 and both ends are exposed, and the length of the two ends of the induction coil 4 exposed is They are equal and arranged at intervals in the vertical direction. The induction coils 4 are arranged in a helical shape along the axial direction of the cylindrical sheath 2 , and the induction coils 4 and the cylindrical sheath 2 are arranged coaxially. When processing the cylindrical sheath 2, the induction coil 4 is directly embedded in the cylindrical sheath through the mold, and the cylindrical sheath is made of polypropylene material with high thermal conductivity and high resistivity; the induction coil 4 is made of a material with excellent thermal conductivity and ductility and corrosion-resistant copper material.

柱状包套2远离下固定盘31的一端通过螺钉固定连接有上固定盘32,上固定盘32与柱状包套2同轴设置,上固定盘32和下固定盘31均成环状,上固定盘32、下固定盘31和连接圆盘311均为黄铜材质,上固定盘32和下固定盘31共同构成了用于固定柱状包套2的固定组件3,使得柱状包套2在使用过程中处于稳定状态。The end of the columnar cover 2 away from the lower fixed plate 31 is fixedly connected with an upper fixed plate 32 by screws, the upper fixed plate 32 is coaxially arranged with the columnar cover 2, the upper fixed plate 32 and the lower fixed plate 31 are ring-shaped, and the upper fixed plate 32 and the lower fixed plate 31 are annular. The plate 32, the lower fixed plate 31 and the connecting disc 311 are all made of brass, and the upper fixed plate 32 and the lower fixed plate 31 together constitute the fixing assembly 3 for fixing the columnar sheath 2, so that the columnar sheath 2 can in a stable state.

上固定盘32背离柱状包套2的一侧面上通过螺栓固定连接有等离子气体分配座5,等离子气体分配座5为316L不锈钢材质,等离子气体分配座5与柱状包套2同轴设置。等离子气体分配座5内开设有进气道51,进气道51与进粉通道21连通且进气道51与进粉通道21同轴设置,进气道51的径长小于进粉通道21的径长。等离子气体分配座5远离上固定盘32的一端同轴插设有送粉喷枪6,送粉喷枪6沿等离子气体分配座5轴心设置,送粉喷枪6一端暴露在外,另一端贯穿进气道51插入进粉通道21内,送粉喷枪6插入进粉通道21的一端在竖直方向上高于感应线圈4。On the side of the upper fixed plate 32 away from the cylindrical sheath 2, a plasma gas distribution seat 5 is fixedly connected by bolts. The plasma gas distribution seat 5 is made of 316L stainless steel, and the plasma gas distribution seat 5 and the columnar sheath 2 are arranged coaxially. In the plasma gas distribution seat 5, an air inlet 51 is provided, the air inlet 51 communicates with the powder inlet passage 21 and the air inlet 51 is coaxially arranged with the powder inlet passage 21, and the diameter length of the air inlet 51 is smaller than that of the powder inlet passage 21. diameter length. The end of the plasma gas distribution seat 5 away from the upper fixed plate 32 is coaxially inserted with a powder feeding spray gun 6, which is arranged along the axis of the plasma gas distribution seat 5, one end of the powder feeding spray gun 6 is exposed outside, and the other end runs through the air inlet 51 is inserted into the powder inlet channel 21, and one end of the powder feeding spray gun 6 inserted into the powder inlet channel 21 is higher than the induction coil 4 in the vertical direction.

等离子气体分配座5远离上固定盘32的一端开设有等离子气进孔53,等离子气进孔53沿径向贯穿等离子气体分配座5与进气道51连通,等离子气进孔53的轴向沿等离子气体分配座5径向倾斜设置。等离子气进孔53沿等离子气体分配座5周向间隔设置有多个,多个等离子气进孔53沿等离子气体分配座5周向均匀排布,在本实施例中,等离子气进孔53的数量设置为六。等离子气体分配座5接近上固定盘32的一端开设有翘气进孔54,翘气进孔54的轴向沿竖直方向设置,翘气进孔54贯穿等离子气体分配座5与进粉通道21连通,翘气进孔54沿等离子气体分配座5周向间隔设置有多个,多个翘气进孔54沿等离子气体分配座5周向均匀排布,在本实施例中,翘气进孔54的数量设置为六。One end of the plasma gas distribution seat 5 away from the upper fixed plate 32 is provided with a plasma gas inlet hole 53, the plasma gas inlet hole 53 penetrates the plasma gas distribution seat 5 in the radial direction and communicates with the air inlet 51, and the axial direction of the plasma gas inlet hole 53 is along the The plasma gas distribution seat 5 is arranged obliquely in the radial direction. A plurality of plasma gas inlet holes 53 are arranged at intervals along the circumferential direction of the plasma gas distribution seat 5, and a plurality of plasma gas inlet holes 53 are evenly arranged along the circumferential direction of the plasma gas distribution seat 5. In this embodiment, the plasma gas inlet holes 53 The quantity is set to six. The end of the plasma gas distribution seat 5 close to the upper fixed plate 32 is provided with a warped gas inlet hole 54, the axial direction of the warped gas inlet hole 54 is set along the vertical direction, and the warped gas inlet hole 54 runs through the plasma gas distribution seat 5 and the powder inlet channel 21 Connected, a plurality of warped gas inlet holes 54 are arranged at intervals along the circumferential direction of the plasma gas distribution seat 5, and a plurality of warped gas inlet holes 54 are evenly arranged along the circumferential direction of the plasma gas distribution seat 5. In this embodiment, the warped gas inlet holes The number of 54 is set to six.

上固定盘32背离柱状包套2的一侧面上通过螺栓固定连接有等离子体水气路分配矩座8,等离子体水气路分配矩座8为黄铜材质,等离子体水气路分配矩座8成中空状,等离子气体分配座5位于离子体水气路分配矩座内,等离子体水气路分配矩座8与柱状包套2同轴设置。等离子体水气路分配矩座8上固定连接有等离子气进气管81和翘气进气管82,等离子体水气路分配矩座8内设置有等离子气进气通道和翘气进气通道,等离子气进气通道一端与等离子气进气管81连通,另一端与等离子气进孔53相通,翘气进气通道一端与翘气进气管82连通,另一端与翘气进孔54相通。On the side of the upper fixed plate 32 away from the cylindrical sheath 2, there is a plasma water-gas path distribution moment seat 8 fixedly connected with bolts. The plasma water-gas path distribution moment seat 8 is made of brass, and the plasma water-gas path distribution moment seat 8 is made of brass. 8 is hollow, and the plasma gas distribution seat 5 is located in the plasma water gas path distribution moment seat, and the plasma water gas path distribution moment seat 8 is coaxially arranged with the columnar envelope 2. Plasma gas inlet pipe 81 and warped air inlet pipe 82 are fixedly connected to plasma water gas path distribution matrix 8, and plasma gas inlet channel and warped gas inlet channel are arranged in plasma water gas path distribution matrix 8, and plasma gas path One end of the gas inlet channel is communicated with the plasma gas inlet pipe 81, and the other end is communicated with the plasma gas inlet hole 53.

等离子体水气路分配矩座8远离上固定盘32的一端通过螺栓固定连接有密封压板9,密封压板9为316L不锈钢材料,密封压板9与等离子体水气路分配矩座8同轴设置,等离子气体分配座5的上端插入密封压板9内。送粉喷枪6上同轴套设有固定螺纹轴套61,固定螺纹轴套61上设置有外螺纹,密封压板9和等离子气体分配座5内设置有与外螺纹吻合的内螺纹,固定螺纹轴套61贯穿密封压板9插入等离子气体分配座5内,从而将送粉喷枪6固定。The end of the plasma water-gas path distribution moment seat 8 away from the upper fixed plate 32 is fixedly connected with a sealing pressure plate 9 by bolts, the sealing pressure plate 9 is made of 316L stainless steel, and the sealing pressure plate 9 and the plasma water-gas path distribution moment seat 8 are arranged coaxially. The upper end of the plasma gas distribution seat 5 is inserted into the sealing pressure plate 9 . The coaxial sleeve on the powder feeding spray gun 6 is provided with a fixed thread shaft sleeve 61, and the fixed thread shaft sleeve 61 is provided with an external thread, and the sealing pressure plate 9 and the plasma gas distribution seat 5 are provided with an internal thread matching the external thread, and the fixed thread shaft The sleeve 61 penetrates through the sealing platen 9 and is inserted into the plasma gas distribution seat 5 , thereby fixing the powder feeding spray gun 6 .

柱状包套2接近反应室连接座1的一端设置有喷嘴7,喷嘴7为黄铜材质,喷嘴7卡嵌在下固定盘31和连接圆盘311之间,并通过螺栓固定。喷嘴7朝向柱状包套2的一端固定连接有等离子陶瓷约束管71,等离子陶瓷约束管71一端插入进粉通道21内,等离子陶瓷约束管71的径向小于进粉通道21的径长,使得等离子陶瓷约束管71外壁与柱状包套2内壁之间留有空隙,等离子陶瓷约束管71远离喷嘴7的一端与等离子气体分配座5的下端面抵接。等离子气体分配座5朝向上固定板的一端插设有等离子石英约束管52,等离子石英约束管52一端插入进气道51内,另一端插入进粉通道21内。等离子石英约束管52的外径长等于进气道51的内径长,使得等离子石英约束管52插入进气道51的一端与进气道51内壁贴合。等离子陶瓷约束管71内壁与等离子石英约束管52外壁之间形成有翘气进气道72,翘气进孔54与翘气进气道72连通,通过翘气进气管82通入等离子体炬内的翘气,在经过等离子气体分配座5上的翘气进孔54后,流入翘气进气道72内。A nozzle 7 is provided at the end of the columnar envelope 2 close to the connecting seat 1 of the reaction chamber. The nozzle 7 is made of brass. The nozzle 7 is inserted between the lower fixed plate 31 and the connecting disc 311 and fixed by bolts. One end of the nozzle 7 facing the cylindrical sheath 2 is fixedly connected with a plasma ceramic confinement tube 71, one end of the plasma ceramic confinement tube 71 is inserted into the powder inlet channel 21, and the radial direction of the plasma ceramic confinement tube 71 is smaller than the diameter length of the powder inlet channel 21, so that the plasma ceramic confinement tube 71 There is a gap between the outer wall of the ceramic confinement tube 71 and the inner wall of the cylindrical sheath 2 , and the end of the plasma ceramic confinement tube 71 away from the nozzle 7 abuts against the lower end surface of the plasma gas distribution seat 5 . A plasma quartz confinement tube 52 is inserted into one end of the plasma gas distribution seat 5 facing the upper fixing plate. One end of the plasma quartz confinement tube 52 is inserted into the air inlet channel 51 , and the other end is inserted into the powder inlet channel 21 . The outer diameter of the plasma quartz confinement tube 52 is equal to the inner diameter of the air inlet 51 , so that the end of the plasma quartz confinement tube 52 inserted into the air inlet 51 is attached to the inner wall of the air inlet 51 . A warped gas inlet 72 is formed between the inner wall of the plasma ceramic confinement tube 71 and the outer wall of the plasma quartz confinement tube 52, and the warped gas inlet 54 communicates with the warped gas inlet 72, and is passed into the plasma torch through the warped gas inlet pipe 82 The warping gas flows into the warping gas inlet channel 72 after passing through the warping gas inlet hole 54 on the plasma gas distribution seat 5 .

等离子体水气路分配矩座8上还插设进水管83和出水管84,柱状包套2内开设有多个通水孔22,通水孔22沿轴向贯穿柱状包套2设置,在实施例中,通水孔22数量设置为八,八个通水孔22沿柱状包套2周向间隔均匀设置,等离子体水气路分配矩座8内开设有连通通水孔22与进水管83的进水通路。等离子陶瓷约束管71外壁与柱状包套2内壁之间形成有回水道74,等离子体水气路分配矩座8内开设有连通回水道74与出水管84的出水通路。喷嘴7上开设有环槽73,下固定盘31上分别开设有环状的进水连接槽和环状的出水连接槽,进水连接槽连通环槽73和通水孔22,出水连接槽连通环槽73和回水道74。A water inlet pipe 83 and a water outlet pipe 84 are also inserted on the plasma water and gas channel distribution block 8, and a plurality of water passage holes 22 are opened in the columnar jacket 2, and the water passage holes 22 are arranged through the cylindrical jacket 2 along the axial direction. In the embodiment, the number of water passage holes 22 is set to eight, and the eight water passage holes 22 are evenly spaced along the circumferential direction of the columnar jacket 2, and the plasma water and gas channel distribution matrix 8 is provided with a communication water passage hole 22 and a water inlet pipe. 83 water inlet channels. A water return channel 74 is formed between the outer wall of the plasma ceramic confinement tube 71 and the inner wall of the cylindrical sheath 2 , and a water outlet passage connecting the return water channel 74 and the water outlet pipe 84 is provided in the plasma water and gas distribution box 8 . The nozzle 7 is provided with an annular groove 73, and the lower fixed plate 31 is respectively provided with an annular water inlet connection groove and an annular water outlet connection groove, the water inlet connection groove is connected to the ring groove 73 and the water hole 22, and the water outlet connection groove is connected Ring groove 73 and return channel 74.

本实施例的实施原理为:在进行球形粉末制备前,通过等离子气进气管81向等离子体炬内通入惰性气体,惰性气体通过等离子气进孔53经进气道51流入等离子石英约束管52内部腔体,再经等离子石英约束管52流入进粉通道21内,进粉通道21内的惰性气体经过感应线圈4时惰性气体被电离,形成稳定的高温惰性等离子体;在通入惰性气体的同时,通过翘气进气管82向等离子体炬内通入翘气,翘气经翘气进孔54流入进粉通道21内,在流动到感应线圈4处后,将形成的高温惰性等离子体维持在感应线圈4中心,在进行球形粉末制备时,形状不规则的原料粉末用运载气体经过送粉喷枪6喷入感应等离子体炬中,粉末颗粒在高温等离子体中吸收大量的热,表面迅速熔化,并以极高速度进入反应室,然后在反应室内快速冷却,在表面张力的作用下,冷却凝固成球型粉末。本申请通过在反应室外增加等离子体炬,使得粉末原料送入反应室前即处于熔融状态,熔融状态的粉末原料进入反应室后快速冷却,在表面张力的作用下,冷却凝固成球型粉末,减小加工过程中出现椭球形、卫星球、空心球等等残次品的可能,从而提高了加工效率。The implementation principle of this embodiment is: before the spherical powder is prepared, the inert gas is introduced into the plasma torch through the plasma gas inlet pipe 81, and the inert gas flows into the plasma quartz confinement tube 52 through the plasma gas inlet hole 53 through the inlet channel 51 The inner cavity flows into the powder inlet channel 21 through the plasma quartz confinement tube 52. When the inert gas in the powder inlet channel 21 passes through the induction coil 4, the inert gas is ionized to form a stable high-temperature inert plasma; At the same time, the gas is introduced into the plasma torch through the gas inlet pipe 82, and the gas flows into the powder inlet channel 21 through the gas inlet hole 54. After flowing to the induction coil 4, the formed high-temperature inert plasma is maintained. In the center of the induction coil 4, when the spherical powder is prepared, the carrier gas for the irregularly shaped raw material powder is sprayed into the induction plasma torch through the powder feeding spray gun 6, and the powder particles absorb a large amount of heat in the high-temperature plasma, and the surface melts rapidly , and enter the reaction chamber at a very high speed, and then rapidly cool in the reaction chamber, and under the action of surface tension, it is cooled and solidified into a spherical powder. In this application, by adding a plasma torch outside the reaction chamber, the powder raw material is in a molten state before being sent into the reaction chamber, and the molten powder raw material enters the reaction chamber and is rapidly cooled, and is cooled and solidified into a spherical powder under the action of surface tension. Reduce the possibility of defective products such as ellipsoids, satellite balls, hollow balls, etc. during processing, thereby improving processing efficiency.

本具体实施方式的实施例均为本发明的较佳实施例,并非依此限制本发明的保护范围,故:凡依本发明的结构、形状、原理所做的等效变化,均应涵盖于本发明的保护范围之内。The embodiments of this specific implementation mode are all preferred embodiments of the present invention, and do not limit the scope of protection of the present invention accordingly. Therefore: all equivalent changes made according to the structure, shape and principle of the present invention should be covered by the present invention. within the protection scope of the present invention.

Claims (10)

1.一种等离子体炬,其特征在于:包括用于连接反应室的反应室连接座(1),所述反应室连接座(1)上开设有连接口(11);1. A plasma torch, characterized in that: comprising a reaction chamber connection seat (1) for connecting the reaction chamber, the reaction chamber connection seat (1) is provided with a connection port (11); 所述反应室连接座(1)上设置有柱状包套(2),所述柱状包套(2)上沿轴向贯穿开设有进粉通道(21),所述进粉通道(21)与连接口(11)连通,所述反应室连接座(1)上设置有用于固定柱状包套(2)的固定组件(3);The connecting seat (1) of the reaction chamber is provided with a columnar sheath (2), and a powder inlet channel (21) is penetrating through the columnar sheath (2) in the axial direction, and the powder inlet channel (21) is connected with the The connection port (11) is connected, and the reaction chamber connection seat (1) is provided with a fixing component (3) for fixing the columnar sheath (2); 所述柱状包套(2)内设置有感应线圈(4),所述感应线圈(4)位于柱状包套(2)接近反应室连接座(1)的一端,所述感应线圈(4)沿柱状包套(2)轴向成螺旋状排布,所述感应线圈(4)与柱状包套(2)同轴设置,感应线圈(4)两端均暴露在柱状包套(2)外;An induction coil (4) is arranged inside the columnar envelope (2), and the induction coil (4) is located at one end of the columnar envelope (2) close to the connection seat (1) of the reaction chamber, and the induction coil (4) is along the The columnar sheath (2) is axially arranged in a spiral shape, the induction coil (4) is arranged coaxially with the columnar sheath (2), and both ends of the induction coil (4) are exposed outside the columnar sheath (2); 所述柱状包套(2)远离连接反应室的一端设置有等离子气体分配座(5),所述等离子气体分配座(5)朝向柱状包套(2)的一端开设有与进粉通道(21)连通的进气道(51),所述进气道(51)与进粉通道(21)同轴设置且所述进气道(51)的径长小于所述进粉通道(21)的径长;A plasma gas distribution seat (5) is provided at the end of the columnar envelope (2) away from the reaction chamber, and a powder inlet channel (21) is provided at the end of the plasma gas distribution seat (5) facing the columnar envelope (2). ) communicated with the inlet passage (51), the inlet passage (51) is coaxially arranged with the powder inlet passage (21) and the diameter length of the inlet passage (51) is smaller than that of the powder inlet passage (21) diameter length; 所述等离子气体分配座(5)上设置有等离子石英约束管(52),所述等离子石英约束管(52)一端插入进气道(51)内,另一端插入进粉通道(21)内;The plasma gas distribution seat (5) is provided with a plasma quartz confinement tube (52), one end of the plasma quartz confinement tube (52) is inserted into the air inlet channel (51), and the other end is inserted into the powder inlet channel (21); 所述等离子气体分配座(5)上设置有等离子气进孔(53)和翘气进孔(54),所述等离子气进孔(53)沿等离子气体分配座(5)径向倾斜设置,所述等离子气进孔(53)一端连接有等离子气进气管(81),另一端与进气道(51)连通,所述翘气进孔(54)沿等离子气体分配座(5)轴向设置,所述翘气进孔(54)一端连接有翘气进气管(82),另一端与进粉通道(21)连通;The plasma gas distribution seat (5) is provided with a plasma gas inlet hole (53) and a warped gas inlet hole (54), and the plasma gas inlet hole (53) is arranged obliquely along the radial direction of the plasma gas distribution seat (5), One end of the plasma gas inlet hole (53) is connected with a plasma gas inlet pipe (81), and the other end communicates with the inlet channel (51). Set, one end of the warped gas inlet hole (54) is connected with a warped gas inlet pipe (82), and the other end is communicated with the powder inlet channel (21); 所述等离子气体分配座(5)远离柱状包套(2)的一端插设有送粉喷枪(6),所述送粉喷枪(6)一端贯穿等离子石英约束管(52)伸入进粉通道(21)内,另一端暴露在外。The end of the plasma gas distribution seat (5) far away from the cylindrical sheath (2) is inserted with a powder feeding spray gun (6), and one end of the powder feeding spray gun (6) penetrates the plasma quartz confinement tube (52) and extends into the powder feeding channel (21), the other end is exposed outside. 2.根据权利要求1所述的一种等离子体炬,其特征在于:所述固定组件(3)包括设置在反应室连接座(1)上的下固定盘(31)、设置在柱状包套(2)远离反应室连接座(1)一端的上固定盘(32),所述下固定盘(31)朝向反应室连接座(1)的一侧面上固定连接有连接圆盘(311),所述等离子气体分配座(5)固定连接在升固定盘背离柱状包套(2)的一侧面上。2. A plasma torch according to claim 1, characterized in that: the fixing assembly (3) includes a lower fixing plate (31) arranged on the reaction chamber connecting seat (1), (2) the upper fixed plate (32) away from the end of the reaction chamber connection seat (1), the lower fixed plate (31) is fixedly connected with a connection disc (311) on the side facing the reaction chamber connection seat (1), The plasma gas distribution seat (5) is fixedly connected to the side surface of the lifting fixed plate away from the columnar envelope (2). 3.根据权利要求2所述的一种等离子体炬,其特征在于:所述柱状包套(2)接近反应室连接座(1)的一端设置有喷嘴(7),所述喷嘴(7)与下固定盘(31)相连,所述喷嘴(7)上设置有等离子陶瓷约束管(71),所述等离子陶瓷约束管(71)插入进粉通道(21)内,所述等离子陶瓷约束管(71)的径向小于进粉通道(21)的径长,所述等离子陶瓷约束管(71)远离喷嘴(7)的一端与等离子气体分配座(5)抵接。3. A plasma torch according to claim 2, characterized in that: a nozzle (7) is provided at the end of the columnar envelope (2) close to the reaction chamber connection seat (1), and the nozzle (7) Connected with the lower fixed plate (31), the nozzle (7) is provided with a plasma ceramic confinement tube (71), the plasma ceramic confinement tube (71) is inserted into the powder inlet passage (21), and the plasma ceramic confinement tube The radial direction of (71) is smaller than the diameter of the powder inlet channel (21), and the end of the plasma ceramic confinement tube (71) away from the nozzle (7) abuts against the plasma gas distribution seat (5). 4.根据权利要求3所述的一种等离子体炬,其特征在于:所述等离子陶瓷约束管(71)内壁与等离子石英约束管(52)外壁之间形成有翘气进气道(72),所述翘气进孔(54)与翘气进气道(72)连通。4. A plasma torch according to claim 3, characterized in that: a warped air inlet (72) is formed between the inner wall of the plasma ceramic confinement tube (71) and the outer wall of the plasma quartz confinement tube (52) , the warping gas inlet hole (54) communicates with the warping gas inlet channel (72). 5.根据权利要求3所述的一种等离子体炬,其特征在于:所述上固定盘(32)上设置有中空的等离子体水气路分配矩座(8),所述等离子气体分配座(5)同轴设置在等离子体水气路分配矩座(8)内,所述翘气进气管(82)和等离子气进气管(81)均插设在等离子体水气路分配矩座(8)上。5. A plasma torch according to claim 3, characterized in that: the upper fixed plate (32) is provided with a hollow plasma water gas path distribution seat (8), and the plasma gas distribution seat (5) coaxially arranged in the distribution moment seat (8) of the plasma water gas path, the air intake pipe (82) and the plasma gas inlet pipe (81) are all inserted in the distribution moment seat (8) of the plasma water gas path ( 8) on. 6.根据权利要求5所述的一种等离子体炬,其特征在于:所述等离子体水气路分配矩座(8)远离上固定盘(32)的一端同轴设置有密封压板(9),所述等离子气体分配座(5)与密封压板(9)相连。6. A plasma torch according to claim 5, characterized in that: a sealing plate (9) is coaxially arranged at the end of the plasma water gas distribution moment seat (8) away from the upper fixed plate (32) , the plasma gas distribution seat (5) is connected with the sealing pressure plate (9). 7.根据权利要求6所述的一种等离子体炬,其特征在于:所述送粉喷枪(6)上同轴套设有固定螺纹轴套(61),所述固定螺纹轴套(61)与密封压板(9)螺纹连接。7. A kind of plasma torch according to claim 6, characterized in that: the coaxial sleeve on the powder feeding spray gun (6) is provided with a fixed threaded bushing (61), and the fixed threaded bushing (61) It is threadedly connected with the sealing pressure plate (9). 8.根据权利要求5所述的一种等离子体炬,其特征在于:所述等离子体水气路分配矩座(8)上插设有进水管(83)和出水管(84),所述柱状包套(2)上设置有通水孔(22),所述通水孔(22)沿轴向贯穿柱状包套(2)设置,所述等离子陶瓷约束管(71)与柱状包套(2)内壁之间形成有回水道(74),所述进水管(83)与通水孔(22)连通,所述出水管(84)与回水道(74)连通管,所述喷嘴(7)上开设有连通通水孔(22)和回水道(74)的环槽(73)。8. A kind of plasma torch according to claim 5, characterized in that: a water inlet pipe (83) and a water outlet pipe (84) are inserted on the plasma water and gas distribution moment seat (8), and the The columnar jacket (2) is provided with a water hole (22), and the water hole (22) is arranged through the columnar jacket (2) in the axial direction, and the plasma ceramic confinement tube (71) and the columnar jacket ( 2) A water return channel (74) is formed between the inner walls, the water inlet pipe (83) communicates with the water passage hole (22), the water outlet pipe (84) communicates with the water return channel (74), and the nozzle (7 ) is provided with an annular groove (73) communicating with the water passage (22) and the return channel (74). 9.根据权利要求8所述的一种等离子体炬,其特征在于:所述感应线圈(4)为内部中空的紫铜管。9. A plasma torch according to claim 8, characterized in that: the induction coil (4) is a hollow copper tube. 10.根据权利要求1所述的一种等离子体炬,其特征在于:所述等离子气进孔(53)位于等离子气体分配座(5)远离上固定盘(32)的一端,所述等离子气进孔(53)沿等离子气体分配座(5)周向间隔均匀设置有多个,所述翘气进孔(54)位于等离子气体分配座(5)接近上固定盘(32)的一端,所述翘气进孔(54)沿等离子气体分配座(5)周向间隔均匀设置有多个。10. A plasma torch according to claim 1, characterized in that: the plasma gas inlet hole (53) is located at the end of the plasma gas distribution seat (5) away from the upper fixed plate (32), the plasma gas A plurality of inlet holes (53) are uniformly arranged along the circumferential direction of the plasma gas distribution seat (5). There are a plurality of warped gas inlet holes (54) evenly spaced along the circumferential direction of the plasma gas distribution seat (5).
CN202211349960.XA 2022-10-31 2022-10-31 a plasma torch Pending CN115635091A (en)

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CN212486860U (en) * 2020-06-17 2021-02-05 河南能微新材料科技股份有限公司 Alternating current induction plasma torch for manufacturing nano powder
CN113134618A (en) * 2021-04-19 2021-07-20 山东理工大学 Metal-based ceramic 3D printing composite powder plasma preparation device
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1288914A (en) * 1969-10-22 1972-09-13
CN1068697A (en) * 1991-04-12 1993-02-03 舍布鲁克大学 High performance induction plasma torch with water-cooled ceramic confinement tube
US20030080097A1 (en) * 2001-10-05 2003-05-01 Maher Boulos Multi-coil induction plasma torch for solid state power supply
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CN113134618A (en) * 2021-04-19 2021-07-20 山东理工大学 Metal-based ceramic 3D printing composite powder plasma preparation device
CN216930387U (en) * 2022-03-29 2022-07-08 电子科技大学 Long-life plasma spheroidizing radio frequency torch device for preparing metal powder

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