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CN115613128A - An Intelligent Control System for Crystal Growth - Google Patents

An Intelligent Control System for Crystal Growth Download PDF

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Publication number
CN115613128A
CN115613128A CN202211358023.0A CN202211358023A CN115613128A CN 115613128 A CN115613128 A CN 115613128A CN 202211358023 A CN202211358023 A CN 202211358023A CN 115613128 A CN115613128 A CN 115613128A
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crystal growth
growth
data
crystal
model
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罗毅
龚瑞
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Anhui Kerui Sichuang Crystal Material Co ltd
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Anhui Kerui Sichuang Crystal Material Co ltd
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating

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  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention discloses an intelligent control system for crystal growth, relates to the technical field of crystal growth, and solves the technical problems that the crystal growth process cannot be accurately controlled and the crystal growth quality and efficiency are influenced in the prior art; the central control module is connected with the data acquisition module and the growth control module; the data acquisition module is connected with a plurality of types of data sensors, and the growth control module is connected with the crystal growth equipment; the method comprises the steps of acquiring video data of the whole crystal growth process, and constructing or timely updating a crystal growth model based on the video data; comparing the crystal growth model with the constructed standard crystal model, determining control parameters according to the difference between the crystal growth model and the constructed standard crystal model, and controlling crystal growth equipment through a growth control module; the invention realizes monitoring through the crystal growth model, thereby reducing the cost and labor intensity; the adjustment range of the crystal growth equipment is determined by comparing the model with a standard crystal model, and high-precision automatic adjustment is realized.

Description

一种晶体生长用智能控制系统An Intelligent Control System for Crystal Growth

技术领域technical field

本发明属于晶体生长领域,涉及晶体生长的智能控制技术,具体是一种晶体生长用智能控制系统。The invention belongs to the field of crystal growth, and relates to an intelligent control technology for crystal growth, in particular to an intelligent control system for crystal growth.

背景技术Background technique

随着晶体生长技术的不断发展,技术人员对晶体生长的可操作性需求不断提高。目前的晶体生长方法有很多,但很少能够实现晶体生长的自动化控制,多数还需要技术人员对各环节进行监控和操作,耗时耗力,而且操作误差还会影响晶体生长质量。With the continuous development of crystal growth technology, the operability requirements of technicians for crystal growth continue to increase. There are many crystal growth methods at present, but few of them can achieve automatic control of crystal growth. Most of them require technicians to monitor and operate each link, which is time-consuming and labor-intensive, and operation errors will also affect the quality of crystal growth.

现有技术(公开号CN106400107A的发明专利申请)公开了一种晶体生长远程控制系统,通过控制与晶体生长各控制模块相连接的晶体生长控制器实现对晶体生长各环节的管理、协调和控制,提高安全性和可靠性,降低了成本和劳动强度。现有技术在进行晶体生长控制时,仅能够根据既定流程以及技术人员经验来调节各功能模块,无法对晶体生长过程进行精确控制,影响晶体生长质量和效率;因此,亟须一种晶体生长用智能控制系统。The prior art (invention patent application with publication number CN106400107A) discloses a crystal growth remote control system, which realizes the management, coordination and control of each link of crystal growth by controlling the crystal growth controller connected to each control module of crystal growth, Improve safety and reliability, reduce cost and labor intensity. When controlling crystal growth in the prior art, each functional module can only be adjusted according to the established process and the experience of technicians, and the crystal growth process cannot be precisely controlled, which affects the quality and efficiency of crystal growth; therefore, there is an urgent need for a method for crystal growth. Intelligent control system.

发明内容Contents of the invention

本发明旨在至少解决现有技术中存在的技术问题之一;为此,本发明提出了一种晶体生长用智能控制系统,用于解决现有技术无法对晶体生长过程进行精确控制,影响晶体生长质量和效率的技术问题。The present invention aims to solve at least one of the technical problems existing in the prior art; for this reason, the present invention proposes an intelligent control system for crystal growth, which is used to solve the problem that the prior art cannot precisely control the crystal growth process and affect the crystal growth process. Technical issues of growth quality and efficiency.

为实现上述目的,本发明的第一方面提供了一种晶体生长用智能控制系统,包括中枢控制模块,以及与之相连接的数据采集模块和生长控制模块;数据采集模块与若干类型数据传感器相连接,生长控制模块与晶体生长设备相连接;To achieve the above object, the first aspect of the present invention provides an intelligent control system for crystal growth, including a central control module, and a data acquisition module and a growth control module connected thereto; the data acquisition module is connected to several types of data sensors Connection, the growth control module is connected with the crystal growth equipment;

在晶体生长监控时,通过若干类型数据传感器获取晶体生长的视频数据和环境数据,并通过数据采集模块转发至中枢控制模块;During crystal growth monitoring, the video data and environmental data of crystal growth are obtained through several types of data sensors, and forwarded to the central control module through the data acquisition module;

中枢控制模块基于视频数据构建或者更新晶体生长模型;将晶体生长模型与标准晶体模型进行比较,将比较结果发送至生长控制模块;The central control module constructs or updates the crystal growth model based on the video data; compares the crystal growth model with the standard crystal model, and sends the comparison result to the growth control module;

生长控制模块识别接收的比较结果,结合既定流程设置或者调整控制参数,并基于控制参数调节晶体生长设备;其中,控制参数包括pH、温度和二氧化碳。The growth control module identifies the received comparison results, sets or adjusts control parameters in combination with the established process, and adjusts the crystal growth equipment based on the control parameters; wherein the control parameters include pH, temperature and carbon dioxide.

优选的,所述中枢控制模块分别与数据采集模块和生长控制模块通信和/或电气连接;且所述生长控制模块与晶体生长设备通信和/或电气连接;Preferably, the central control module communicates and/or electrically connects with the data acquisition module and the growth control module respectively; and the growth control module communicates and/or electrically connects with the crystal growth equipment;

所述数据采集模块分别与摄像头和若干类型数据传感器通信和/或电气连接;其中,数据传感器包括pH传感器、温度传感器和二氧化碳传感器。The data acquisition module is respectively in communication and/or electrically connected with the camera and several types of data sensors; wherein, the data sensors include pH sensors, temperature sensors and carbon dioxide sensors.

优选的,开始晶体生长监控时,中枢控制模块根据既定流程确定数据采集周期,基于数据采集周期生成数据采集信号,并发送数据采集信号至数据采集模块;Preferably, when starting crystal growth monitoring, the central control module determines the data acquisition period according to a predetermined process, generates a data acquisition signal based on the data acquisition period, and sends the data acquisition signal to the data acquisition module;

所述数据采集模块根据数据采集信号采集视频数据和环境数据;以及对视频数据和环境数据进行处理后转发至中枢控制模块。The data acquisition module collects video data and environmental data according to the data acquisition signal; and forwards the video data and environmental data to the central control module after processing.

优选的,所述中枢控制模块根据既定流程确定数据采集周期,包括:Preferably, the central control module determines the data collection period according to a predetermined process, including:

获取晶体生长的既定流程,结合介质属性测算既定流程中各环节的持续时间CS;其中,既定流程包括过饱和环节、过冷却环节、成核环节和生长环节;Obtain the established process of crystal growth, and calculate the duration CS of each link in the established process in combination with the properties of the medium; wherein, the established process includes supersaturation, supercooling, nucleation and growth;

根据公式SCZ=α×CS/DS计算数据采集周期SCZ;其中,α为大于0的比例系数,DS为单位时长,且DS为固定值。The data collection period SCZ is calculated according to the formula SCZ=α×CS/DS; wherein, α is a proportional coefficient greater than 0, DS is a unit duration, and DS is a fixed value.

优选的,所述中枢控制模块基于接收的视频数据生成晶体生长模型,包括:Preferably, the central control module generates a crystal growth model based on received video data, including:

对视频数据进行图像预处理,获取若干图像数据;其中,图像预处理包括视频分帧、图像校正和灰度变换;Perform image preprocessing on video data to obtain several image data; wherein, image preprocessing includes video framing, image correction and gray scale transformation;

通过若干图像数据识别晶体状态,结合三维建模平台建立晶体的三维模型,标记为晶体生长模型;其中,晶体生长模型包括三维坐标系。The crystal state is identified through several image data, and a three-dimensional model of the crystal is established in combination with a three-dimensional modeling platform, which is marked as a crystal growth model; wherein, the crystal growth model includes a three-dimensional coordinate system.

优选的,所述中枢控制模块将晶体生长模型与标准晶体模型进行比较,包括:Preferably, the central control module compares the crystal growth model with the standard crystal model, including:

确定晶体生长模型当前在既定流程中对应的生长环节;Determine the current growth link of the crystal growth model in the established process;

将该生长环节中对应的晶体生长内容与标准晶体模型进行匹配比较,分析比较结果确定差异数据,将差异数据发送至生长识别模块。Match and compare the corresponding crystal growth content in the growth link with the standard crystal model, analyze and compare the results to determine the difference data, and send the difference data to the growth identification module.

优选的,技术人员通过所述中枢控制模块建立标准晶体模型,包括:Preferably, the technician establishes a standard crystal model through the central control module, including:

技术人员将预设晶体信息输入至中枢控制模块;The technician inputs the preset crystal information to the central control module;

中枢控制模块通过三维建模平台选择基点,结合预设晶体信息构建并渲染获取标准晶体模型;其中,标准晶体模型中的三维坐标系的原点为基点。The central control module selects the base point through the three-dimensional modeling platform, constructs and renders the standard crystal model in combination with the preset crystal information; wherein, the origin of the three-dimensional coordinate system in the standard crystal model is the base point.

优选的,所述生长识别模块根据差异数据来确定控制参数,包括:Preferably, the growth identification module determines control parameters according to difference data, including:

获取当前生长环节的预设剩余时长;Obtain the preset remaining duration of the current growth link;

将剩余时长、环境数据以及差异数据联合起来,确定控制参数;并基于控制参数调节晶体生长设备;其中,控制参数与环境数据内容属性一致。Combining the remaining time, environmental data, and difference data to determine control parameters; and adjusting the crystal growth equipment based on the control parameters; wherein, the control parameters are consistent with the content attributes of the environmental data.

与现有技术相比,本发明的有益效果是:本发明获取晶体生长整个过程的视频数据,基于视频数据构建或者及时更新晶体生长模型;将晶体生长模型与构建的标准晶体模型进行比较,根据二者差异确定控制参数,通过生长控制模块对晶体生长设备进行控制;本发明通过晶体生长模型来实现监控,降低了成本和劳动强度;通过与标准晶体模型进行比较来确定晶体生长设备的调整幅度,实现高精度的自动化调节。Compared with the prior art, the beneficial effect of the present invention is: the present invention obtains the video data of the whole process of crystal growth, builds or updates the crystal growth model based on the video data; compares the crystal growth model with the standard crystal model constructed, according to The difference between the two determines the control parameters, and controls the crystal growth equipment through the growth control module; the present invention realizes monitoring through the crystal growth model, which reduces the cost and labor intensity; and determines the adjustment range of the crystal growth equipment by comparing with the standard crystal model , to achieve high-precision automatic adjustment.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.

图1为本发明的工作步骤示意图。Fig. 1 is a schematic diagram of working steps of the present invention.

具体实施方式detailed description

下面将结合实施例对本发明的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

请参阅图1,本发明第一方面实施例提供了一种晶体生长用智能控制系统,包括中枢控制模块,以及与之相连接的数据采集模块和生长控制模块;数据采集模块与若干类型数据传感器相连接,生长控制模块与晶体生长设备相连接;在晶体生长监控时,通过若干类型数据传感器获取晶体生长的视频数据和环境数据,并通过数据采集模块转发至中枢控制模块;中枢控制模块基于视频数据构建或者更新晶体生长模型;将晶体生长模型与标准晶体模型进行比较,将比较结果发送至生长控制模块;生长控制模块识别接收的比较结果,结合既定流程设置或者调整控制参数,并基于控制参数调节晶体生长设备。Please refer to Fig. 1, the embodiment of the first aspect of the present invention provides a kind of intelligent control system for crystal growth, including a central control module, and a data acquisition module and a growth control module connected thereto; the data acquisition module and several types of data sensors The growth control module is connected with the crystal growth equipment; during crystal growth monitoring, the video data and environmental data of crystal growth are obtained through several types of data sensors, and forwarded to the central control module through the data acquisition module; the central control module is based on video Build or update the crystal growth model based on the data; compare the crystal growth model with the standard crystal model, and send the comparison result to the growth control module; the growth control module identifies the received comparison result, sets or adjusts the control parameters in combination with the established process, and based on the control parameters Adjust the crystal growth equipment.

现有技术在进行晶体生长控制时,一般是将既定流程与技术人员的经验结合起来调节晶体生长设备的各功能模块,根据经验来进行参数调节存在一定的误差和时延,无法对晶体生长过程进行精确控制,影响晶体的生长质量和效率。When controlling crystal growth in the prior art, the established process is generally combined with the experience of technicians to adjust each functional module of the crystal growth equipment. There are certain errors and time delays in parameter adjustment based on experience, and it is impossible to control the crystal growth process. Precise control affects the quality and efficiency of crystal growth.

本发明获取晶体生长整个过程的视频数据,基于视频数据构建或者及时更新晶体生长模型;将晶体生长模型与构建的标准晶体模型进行比较,根据二者差异确定控制参数,通过生长控制模块对晶体生长设备进行控制。本发明通过晶体生长模型来实现监控,降低了成本和劳动强度;通过与标准晶体模型进行比较来确定晶体生长设备的调整幅度,实现高精度的自动化调节。The present invention obtains video data of the whole process of crystal growth, constructs or updates the crystal growth model in time based on the video data; compares the crystal growth model with the constructed standard crystal model, determines the control parameters according to the difference between the two, and controls the crystal growth through the growth control module. The device is controlled. The invention realizes monitoring through the crystal growth model, reduces cost and labor intensity; determines the adjustment range of the crystal growth equipment by comparing with the standard crystal model, and realizes high-precision automatic adjustment.

本发明中中枢控制模块分别与数据采集模块和生长控制模块通信和/或电气连接;且生长控制模块与晶体生长设备通信和/或电气连接;数据采集模块分别与摄像头和若干类型数据传感器通信和/或电气连接。The central control module of the present invention communicates and/or electrically connects with the data acquisition module and the growth control module respectively; and the growth control module communicates and/or electrically connects with the crystal growth equipment; the data acquisition module communicates with the camera and several types of data sensors respectively and /or electrical connections.

中枢控制模块主要负责进行数据处理和决策,通过数据采集模块获取相关数据,分析之后将决策信息发送至生长控制模块。数据采集模块通过摄像头(或者其他视频/图像采集设备)采集晶体生长过程的视频;且数据采集模块还与各种类型数据传感器连接,如数据传感器包括pH传感器、温度传感器和二氧化碳传感器等,用于采集晶体生长设备中的环境数据。生长控制模块主要根据中枢控制模块的控制信号调节晶体生长设备内部的环境,达到引导晶体生长的目的。The central control module is mainly responsible for data processing and decision-making, obtains relevant data through the data acquisition module, and sends the decision-making information to the growth control module after analysis. The data acquisition module collects the video of the crystal growth process through the camera (or other video/image acquisition equipment); and the data acquisition module is also connected with various types of data sensors, such as data sensors including pH sensors, temperature sensors and carbon dioxide sensors, etc. Acquisition of environmental data in crystal growth equipment. The growth control module mainly adjusts the environment inside the crystal growth equipment according to the control signal of the central control module, so as to achieve the purpose of guiding crystal growth.

需要说明的是,控制参数与环境数据的内容属性是一致的,在本发明中均包括pH、温度和二氧化碳,通过调节晶体生长设备中的环境来控制晶体生长的方向和速度。It should be noted that the control parameters are consistent with the content attributes of the environmental data, which include pH, temperature and carbon dioxide in the present invention, and the direction and speed of crystal growth are controlled by adjusting the environment in the crystal growth equipment.

在一个优选的实施例中,开始晶体生长监控时,中枢控制模块根据既定流程确定数据采集周期,基于数据采集周期生成数据采集信号,并发送数据采集信号至数据采集模块;数据采集模块根据数据采集信号采集视频数据和环境数据;以及对视频数据和环境数据进行处理后转发至中枢控制模块。In a preferred embodiment, when crystal growth monitoring starts, the central control module determines the data acquisition period according to a predetermined process, generates a data acquisition signal based on the data acquisition period, and sends the data acquisition signal to the data acquisition module; The signal collects video data and environmental data; and forwards the video data and environmental data to the central control module after processing.

中枢控制模块确定数据采集周期之后,基于数据采集周期来生成数据采集信号,此刻数据采集模块可以进行数据采集和传输。需要说明的是,在生成数据采集信号时,并不一定是数据采集模块刚开始工作,而有可能数据采集模块在持续进行数据采集,只是在接收到数据采集信号时将对应的视频数据和环境数据发送至中枢控制模块。After the central control module determines the data collection period, it generates a data collection signal based on the data collection period. At this moment, the data collection module can perform data collection and transmission. It should be noted that when the data acquisition signal is generated, it does not necessarily mean that the data acquisition module has just started working, but the data acquisition module may continue to collect data, but when receiving the data acquisition signal, the corresponding video data and the environment The data is sent to the central control module.

在一个可选的实施例中,中枢控制模块根据既定流程确定数据采集周期,包括:获取晶体生长的既定流程,结合介质属性测算既定流程中各环节的持续时间CS;根据公式SCZ=α×CS/DS计算数据采集周期SCZ;其中,α为大于0的比例系数,DS为单位时长,且DS为固定值。In an optional embodiment, the central control module determines the data collection period according to the established process, including: obtaining the established process of crystal growth, and calculating the duration CS of each link in the predetermined process in combination with the properties of the medium; according to the formula SCZ=α×CS /DS calculates the data collection period SCZ; where, α is a proportional coefficient greater than 0, DS is a unit duration, and DS is a fixed value.

在晶体生长之前,技术人员根据既定流程以及其他条件测算各环节的持续时间,根据持续时间来确定数据采集周期。数据采集周期的确定原理是若某环节持续时间较长,晶体生长状态变化缓慢时,则适当延长数据采集周期;某环节持续时间较短,晶体生长状态变化迅速时,则适当缩短数据采集周期。需要说明的时,本发明中的既定流程包括过饱和环节、过冷却环节、成核环节和生长环节;当然,在另外一些优选的实施例中可以根据晶体生长状态的变化速度自定义各环节。Before crystal growth, technicians measure the duration of each link according to the established process and other conditions, and determine the data collection period according to the duration. The principle of determining the data acquisition period is that if a certain link lasts for a long time and the crystal growth state changes slowly, the data acquisition period should be appropriately extended; if a certain link lasts for a short time and the crystal growth state changes rapidly, the data acquisition period should be appropriately shortened. When it needs to be explained, the established process in the present invention includes supersaturation, supercooling, nucleation and growth; of course, in some other preferred embodiments, each link can be customized according to the change speed of the crystal growth state.

在一个优选的实施例中,中枢控制模块基于接收的视频数据生成晶体生长模型,包括:对视频数据进行图像预处理,获取若干图像数据;通过若干图像数据识别晶体状态,结合三维建模平台建立晶体的三维模型,标记为晶体生长模型。In a preferred embodiment, the central control module generates a crystal growth model based on the received video data, including: performing image preprocessing on the video data to obtain a number of image data; identifying the crystal state through a number of image data, and establishing a crystal growth model in conjunction with a three-dimensional modeling platform A 3D model of a crystal, labeled Crystal Growth Model.

中枢控制模块接收到视频图像之后,在晶体生长开始之前,则需要构建三维模型,根据后续的视频图像来不断更新三维模型,也就是通过三维模型实时更新晶体生长的状态。在晶体生长模型中设置有三维坐标系,在三维坐标系下能够精准计算晶体尺寸以及延伸角度等,有利于分析与标准晶体模型的差异。After the central control module receives the video image, before the crystal growth starts, it needs to build a 3D model, and continuously update the 3D model according to the subsequent video images, that is, update the crystal growth status in real time through the 3D model. A three-dimensional coordinate system is set in the crystal growth model, and the crystal size and extension angle can be accurately calculated in the three-dimensional coordinate system, which is beneficial to analyze the difference from the standard crystal model.

在一个优选的实施例中,优选的,中枢控制模块将晶体生长模型与标准晶体模型进行比较,包括:确定晶体生长模型当前在既定流程中对应的生长环节;将该生长环节中对应的晶体生长内容与标准晶体模型进行匹配比较,分析比较结果确定差异数据,将差异数据发送至生长识别模块。In a preferred embodiment, preferably, the central control module compares the crystal growth model with the standard crystal model, including: determining the current corresponding growth link of the crystal growth model in the established process; growing the corresponding crystal in the growth link Match and compare the content with the standard crystal model, analyze and compare the results to determine the difference data, and send the difference data to the growth identification module.

将晶体生长模型与标准晶体模型进行比较,将二者的三维坐标系匹配对齐,然后在三维坐标系下来计算出二者之间的差异,也就是获取差异数据。在具体计算时,有些生长部分不是技术人员想要的,可以忽略不计,着重关注技术人员需要的部分。不想要的生长部分实际是前期晶体生长设备中环境没有精准控制引起的,因此通过本发明技术方案实现精准控制之后,不想要的部分会显著减少。Compare the crystal growth model with the standard crystal model, match and align the three-dimensional coordinate systems of the two, and then calculate the difference between the two in the three-dimensional coordinate system, that is, obtain the difference data. In the specific calculation, some growth parts are not what the technicians want, so they can be ignored, and the parts that the technicians need should be focused on. The undesired growth part is actually caused by the lack of precise control of the environment in the crystal growth equipment in the early stage. Therefore, after the precise control is realized through the technical solution of the present invention, the undesired part will be significantly reduced.

在一个可选的实施例中,技术人员通过中枢控制模块建立标准晶体模型,包括:技术人员将预设晶体信息输入至中枢控制模块;中枢控制模块通过三维建模平台选择基点,结合预设晶体信息构建并渲染获取标准晶体模型;其中,标准晶体模型中的三维坐标系的原点为基点。In an optional embodiment, the technician establishes a standard crystal model through the central control module, including: the technician inputs preset crystal information into the central control module; the central control module selects a base point through a three-dimensional modeling platform, and combines the preset crystal The information is constructed and rendered to obtain a standard crystal model; wherein, the origin of the three-dimensional coordinate system in the standard crystal model is the base point.

标准晶体模型是根据技术人员的设想数据构建的,也内置有三维坐标系,方便与晶体生长模型进行匹配对齐,最终晶体生长模型会非常接近标准晶体模型。The standard crystal model is constructed according to the technician's envisioned data. It also has a built-in three-dimensional coordinate system to facilitate matching and alignment with the crystal growth model. The final crystal growth model will be very close to the standard crystal model.

在一个优选的实施例中,生长识别模块根据差异数据来确定控制参数,包括:获取当前生长环节的预设剩余时长;将剩余时长、环境数据以及差异数据联合起来,确定控制参数;并基于控制参数调节晶体生长设备;其中,控制参数与环境数据内容属性一致。In a preferred embodiment, the growth identification module determines the control parameters according to the difference data, including: obtaining the preset remaining duration of the current growth link; combining the remaining duration, environmental data and difference data to determine the control parameters; and based on the control The parameters adjust the crystal growth equipment; wherein, the control parameters are consistent with the content attributes of the environment data.

根据控制参数调节晶体生长设备实质就是调节内部的pH、温度、二氧化碳等,在进行调节时,需要考虑温度、pH以及二氧化碳的扩散效应,才能够实现精准控制。The essence of adjusting the crystal growth equipment according to the control parameters is to adjust the internal pH, temperature, carbon dioxide, etc. When adjusting, it is necessary to consider the diffusion effect of temperature, pH, and carbon dioxide to achieve precise control.

上述公式中的部分数据均是去除量纲取其数值计算,公式是由采集的大量数据经过软件模拟得到最接近真实情况的一个公式;公式中的预设参数和预设阈值由本领域的技术人员根据实际情况设定或者通过大量数据模拟获得。Part of the data in the above formula is calculated by removing the dimension and taking its numerical value. The formula is a formula that is closest to the real situation through software simulation of a large amount of collected data; the preset parameters and preset thresholds in the formula are determined by those skilled in the art. It is set according to the actual situation or obtained through a large amount of data simulation.

本发明的工作原理:Working principle of the present invention:

在晶体生长监控时,通过若干类型数据传感器获取晶体生长的视频数据和环境数据,并通过数据采集模块转发至中枢控制模块。During crystal growth monitoring, video data and environmental data of crystal growth are acquired through several types of data sensors, and forwarded to the central control module through the data acquisition module.

中枢控制模块基于视频数据构建或者更新晶体生长模型;将晶体生长模型与标准晶体模型进行比较,将比较结果发送至生长控制模块。The central control module constructs or updates the crystal growth model based on the video data; compares the crystal growth model with the standard crystal model, and sends the comparison result to the growth control module.

生长控制模块识别接收的比较结果,结合既定流程设置或者调整控制参数,并基于控制参数调节晶体生长设备。The growth control module identifies the received comparison result, sets or adjusts control parameters in combination with the established process, and adjusts the crystal growth equipment based on the control parameters.

以上实施例仅用以说明本发明的技术方法而非限制,尽管参照较佳实施例对本发明进行了详细说明,本领域的普通技术人员应当理解,可以对本发明的技术方法进行修改或等同替换,而不脱离本发明技术方法的精神和范围。The above embodiments are only used to illustrate the technical method of the present invention without limitation. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical method of the present invention can be modified or equivalently replaced. Without departing from the spirit and scope of the technical method of the present invention.

Claims (8)

1. An intelligent control system for crystal growth comprises a central control module, a data acquisition module and a growth control module, wherein the data acquisition module and the growth control module are connected with the central control module; the data acquisition module is connected with a plurality of types of data sensors, and the growth control module is connected with crystal growth equipment, its characterized in that:
when the crystal growth is monitored, video data and environmental data of the crystal growth are acquired through a plurality of types of data sensors and are forwarded to a central control module through a data acquisition module;
the central control module builds or updates a crystal growth model based on the video data; comparing the crystal growth model with a standard crystal model, and sending a comparison result to a growth control module;
the growth control module identifies the received comparison result, combines the set flow setting or adjusts the control parameters, and adjusts the crystal growth equipment based on the control parameters; wherein the control parameters include pH, temperature, and carbon dioxide.
2. An intelligent control system for crystal growth as claimed in claim 1, wherein the central control module is in communication and/or electrical connection with the data acquisition module and the growth control module, respectively; and the growth control module is in communication and/or electrical connection with the crystal growing apparatus;
the data acquisition module is respectively in communication and/or electrical connection with the camera and the data sensors of a plurality of types; wherein the data sensor comprises a pH sensor, a temperature sensor and a carbon dioxide sensor.
3. The intelligent control system for crystal growth according to claim 2, wherein when crystal growth monitoring is started, the central control module determines a data acquisition period according to a predetermined flow, generates a data acquisition signal based on the data acquisition period, and sends the data acquisition signal to the data acquisition module;
the data acquisition module acquires video data and environmental data according to the data acquisition signal; and processing the video data and the environmental data and then forwarding the processed video data and the environmental data to the central control module.
4. An intelligent control system for crystal growth as claimed in claim 3, wherein the central control module determines the data collection period according to a predetermined process, comprising:
obtaining a set flow of crystal growth, and measuring and calculating the duration CS of each link in the set flow by combining medium attributes; wherein the established process comprises a supersaturation link, a supercooling link, a nucleation link and a growth link;
calculating a data acquisition period SCZ according to a formula SCZ = alpha multiplied by CS/DS; wherein alpha is a proportionality coefficient greater than 0, DS is a unit duration, and DS is a fixed value.
5. The intelligent control system for crystal growth of any one of claims 1 to 4, wherein the hub control module generates a crystal growth model based on the received video data, comprising:
carrying out image preprocessing on the video data to obtain a plurality of image data; the image preprocessing comprises video framing, image correction and gray level conversion;
identifying the state of the crystal through a plurality of image data, establishing a three-dimensional model of the crystal by combining a three-dimensional modeling platform, and marking the model as a crystal growth model; wherein the crystal growth model includes a three-dimensional coordinate system.
6. An intelligent control system for crystal growth as defined in claim 5, wherein the hub control module compares the crystal growth model to a standard crystal model, comprising:
determining a growth link corresponding to the crystal growth model in the established flow at present;
and matching and comparing the corresponding crystal growth content in the growth link with the standard crystal model, analyzing the comparison result to determine difference data, and sending the difference data to the growth identification module.
7. An intelligent control system for crystal growth as claimed in claim 6, wherein a technician establishes a standard crystal model through the central control module, comprising:
the technical personnel input the preset crystal information into the central control module;
the central control module selects a base point through a three-dimensional modeling platform, and combines preset crystal information to construct and render to obtain a standard crystal model; wherein, the origin of the three-dimensional coordinate system in the standard crystal model is a base point.
8. An intelligent control system for crystal growth as defined in claim 7, wherein the growth identification module determines control parameters based on the difference data, comprising:
acquiring preset residual time of a current growth link;
combining the residual duration, the environmental data and the difference data to determine a control parameter; and adjusting the crystal growth apparatus based on the control parameters; wherein the control parameter is consistent with the environment data content attribute.
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