CN115608713A - Cover plate bearing table, cover plate cleaning device and cover plate cleaning method - Google Patents
Cover plate bearing table, cover plate cleaning device and cover plate cleaning method Download PDFInfo
- Publication number
- CN115608713A CN115608713A CN202110794874.9A CN202110794874A CN115608713A CN 115608713 A CN115608713 A CN 115608713A CN 202110794874 A CN202110794874 A CN 202110794874A CN 115608713 A CN115608713 A CN 115608713A
- Authority
- CN
- China
- Prior art keywords
- cover plate
- gas
- gas channel
- carrier
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a cover plate bearing table, a cover plate cleaning device and a cover plate cleaning method, wherein the cover plate bearing table comprises a bearing table body and an airflow extraction module, and the bearing table body is provided with a bearing surface for supporting a cover plate; the airflow extraction module is arranged on at least one side of the plummer body in a preset horizontal direction, an extraction gas channel is arranged on the airflow extraction module, the extraction gas channel is provided with an inlet end and an outlet end which are opposite to each other in the extending direction of the extraction gas channel, and the inlet end of the extraction gas channel is arranged on the upper end surface of the airflow extraction module. The cover plate cleaning device provided by the embodiment of the invention has the advantages of good quality of the cleaned cover plate and the like.
Description
Technical Field
The invention relates to the technical field of cover plate cleaning, in particular to a cover plate bearing table, a cover plate cleaning device and a cover plate cleaning method.
Background
In the process of attaching the 3D Cover plate of the flexible AMOLED (active matrix organic light emitting diode) module, in order to improve the bonding force between the OCA (transparent optical adhesive) and Cover Glass (Cover plate), the Cover plate cleaning device is generally used for cleaning the bonding surface of the Cover plate. In the related art, an AF Coating (anti-fingerprint Coating) is generally applied to the non-adhesive surface of the cover plate to improve the touch feeling and anti-fingerprint effect of the non-adhesive surface of the cover plate.
As shown in fig. 1 and 2, in the related art, a cover cleaning apparatus includes a plasma emission device 20 and a cover carrier 10, a cover 30 to be cleaned is placed on the cover carrier 10, and a high-speed plasma gas flow 2001 is emitted to an adhesive surface 3001 of the cover 30 by the plasma emission device 20, thereby cleaning the adhesive surface 3001. In the process of cleaning the cover plate 30 using the cover plate cleaning apparatus, the fingerprint-resistant coating on the surface of the cover plate 30 is easily lost, resulting in poor quality of the cover plate 30.
Disclosure of Invention
The present invention is based on the discovery and recognition by the inventors of the following facts and problems:
as shown in fig. 2, during the cleaning process of the cover plate 30, under the condition of disturbance of the external environment, a part of plasma enters the gap between the cover plate carrier 10 and the non-adhesive surface 3001 of the cover plate 30 and bombards the non-adhesive surface 3001 of the cover plate 30. The active oxygen and nitrogen ions in the plasma gas flow 2001 react with organic matters in the anti-fingerprint coating of the cover plate 30, and finally the anti-fingerprint coating on the surface of the cover plate 30 is lost, so that the quality of the cover plate 30 is poor. Especially, when there is a non-parallel gap 3003 between the non-adhesive surface 3001 of the cover sheet 30 and the cover sheet carrier 10, the phenomenon of the fingerprint-proof coating on the surface of the cover sheet 30 being missing is more obvious under the condition of disturbance of the external environment.
The present invention is directed to solving, at least to some extent, one of the technical problems in the related art.
Therefore, the embodiment of the invention provides a cover plate bearing table to solve the problem that the anti-fingerprint coating on the surface of the cover plate is lost.
The embodiment of the invention provides a cover plate cleaning device, which aims to solve the problem that an anti-fingerprint coating on the surface of a cover plate is lost.
The embodiment of the invention provides a cover plate cleaning method, which aims to solve the problem that an anti-fingerprint coating on the surface of a cover plate is lost.
The cover plate bearing table according to the embodiment of the invention comprises:
the bearing platform comprises a bearing platform body, a bearing plate and a cover plate, wherein the bearing platform body is provided with a bearing surface for supporting the cover plate; and
the bearing table comprises a bearing table body, and is characterized in that an airflow extraction module is arranged on at least one side of the bearing table body in a preset horizontal direction, an extraction gas channel is arranged on the airflow extraction module, the extraction gas channel is provided with an inlet end and an outlet end which are opposite to each other in the extending direction of the extraction gas channel, and the inlet end of the extraction gas channel is arranged on the upper end face of the airflow extraction module.
The cover plate cleaning device utilizing the cover plate bearing table provided by the embodiment of the invention has the advantages of good quality of the cleaned cover plate and the like.
In some embodiments, the airflow extraction modules are provided in plurality, a part of the airflow extraction modules is disposed on one side of the susceptor body in the preset horizontal direction, and another part of the airflow extraction modules is disposed on the other side of the susceptor body in the preset horizontal direction.
In some embodiments, the extraction gas channel extends through the gas flow extraction module in a vertical direction, and the outlet end of the extraction gas channel is disposed on a lower end face of the gas flow extraction module.
In some embodiments, the extracted gas channel includes a flared portion having a large mouth end forming the inlet end of the extracted gas channel and a small mouth end disposed below the large mouth end.
In some embodiments, a plurality of body gas channels are disposed on the carrier body, each of the body gas channels has an inlet end and an outlet end opposite to each other in the extending direction of the body gas channel, the inlet end of each of the body gas channels is disposed on the carrier surface, so that a negative pressure is formed in the body gas channel to make the cover plate placed on the carrier surface adsorbed by the carrier surface, the number of the body gas channels is determined according to the requirement of the cover plate placed on the carrier surface to be stably adsorbed by the carrier surface, and the distance between two adjacent body gas channels is determined according to the requirement of the processing technology of the body gas channels. In some embodiments, the susceptor body has a first side and a second side opposite to each other in the predetermined horizontal direction, one of the plurality of body gas channels is a first edge gas channel, one of the plurality of body gas channels is a second edge gas channel, the first edge gas channel is closer to the first side than the other body gas channels in the predetermined horizontal direction, the second edge gas channel is closer to the second side than the other body gas channels in the predetermined horizontal direction, a first predetermined distance is provided between the first edge gas channel and the first side, the first predetermined distance is a first minimum value satisfying a process requirement of the first edge gas channel, a second predetermined distance is provided between the second edge gas channel and the second side, and the second predetermined distance is a second minimum value satisfying a process requirement of the second edge gas channel.
In some embodiments, the size of the carrier body in the predetermined horizontal direction is 80mm to 90mm.
In some embodiments, the inlet end of the airflow extraction module is disposed below the load-bearing surface.
In some embodiments, the inlet end of the airflow extraction module is vertically spaced from the load-bearing surface by a predetermined vertical distance.
In some embodiments, the carrier body and the airflow extraction module are a unitary structure.
The cover plate cleaning device according to the embodiment of the invention comprises:
the cover plate bearing table is the cover plate bearing table according to the embodiment of the invention;
a plasma emission device for emitting a plasma gas flow towards the cover plate; and
and the gas pumping equipment is matched with the pumping gas channel of the cover plate bearing table.
The cover plate cleaning device provided by the embodiment of the invention has the advantages of good quality of the cleaned cover plate and the like.
The cover plate cleaning method provided by the embodiment of the invention comprises the following steps:
bearing the cover plate by using the bearing table body;
emitting a plasma gas flow with the plasma emission device;
and blowing or pumping the pumped gas channel by using gas pumping equipment so as to form negative pressure in the pumped gas channel.
The cover plate cleaning method provided by the embodiment of the invention has the advantages of good quality of the cleaned cover plate and the like.
Drawings
Fig. 1 is a diagram showing a state of use of a related art cover cleaning apparatus (no disturbance of an external environment).
Fig. 2 is a diagram showing a state of use (disturbance of the external environment) of the cover cleaning apparatus in the related art.
Fig. 3 is a view showing a state of use of the cover cleaning apparatus according to one embodiment of the present invention.
Reference numerals:
a cover plate carrier 10;
the plasma emission device 20; plasma gas flow 2001;
a cover plate 30; an adhesive surface 3001; a non-adhesive face 3002; a non-parallel gap 3003;
a cover plate cleaning device 100;
a cover plate bearing table 1; a stage body 101; a bearing surface 1011; a body gas passage 1012; an inlet end 10121; an outlet end 10122; the first edge gas passage 10123; a second rim gas passage 10124; an airflow extraction module 102; a pumping gas channel 1021; an inlet end 10211; an outlet end 10212; a flared portion 10213; a straight bore portion 10214; a first side 103; a second side 104;
a plasma emission device 2; a plasma gas flow 201;
a cover plate 3; an adhesive surface 301; a non-adhesive side 302.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
As shown in fig. 3, the cover cleaning apparatus 100 according to the embodiment of the present invention includes a cover carrier 1, a plasma emission device 2, and a gas pumping device (not shown).
The plasma emission device 2 is used to emit a plasma gas flow 201 towards the cover 3, and the gas extraction device cooperates with an extraction gas channel 1021 of the cover carrier 1.
The gas extraction device may be a vacuum generator, an exhaust fan or an exhaust fan.
A cover carrier 1 according to an embodiment of the invention is described below with reference to the drawings.
As shown in fig. 3, the cover carrier 1 includes a carrier body 101 and a gas flow extraction module 102. The susceptor body 101 has a bearing surface 1011 for supporting the cover plate 3. The gas flow exhausting module 102 is disposed on at least one side of the carrier body 101 in a predetermined horizontal direction, the gas flow exhausting module 102 has an exhausting gas passage 1021, the exhausting gas passage 1021 has an inlet port 10211 and an outlet port 10212 opposite to each other in an extending direction thereof, and the inlet port 10211 of the exhausting gas passage 1021 is disposed on an upper end surface of the gas flow exhausting module 102.
It can be understood by those skilled in the art that if only one side of the susceptor body 101 is prone to external environmental disturbance in the predetermined horizontal direction, the airflow extraction module 102 may be disposed on only the one side of the susceptor body 101. If the two sides of the carrier body 101 are easy to generate disturbance of the external environment in the predetermined horizontal direction, the airflow extraction module 102 is preferably disposed on the two sides of the carrier body 101.
When the gas pumping device is a vacuum generator or an exhaust fan, a gas inlet of the vacuum generator or the exhaust fan is connected to the outlet port 10212 of the pumping gas passage 1021, and the pumping gas passage 1021 is pumped by the vacuum generator or the exhaust fan, so that a negative pressure is formed in the pumping gas passage 1021. When the gas exhausting apparatus is an exhaust fan, the gas inlet of the exhaust fan is connected to the inlet port 10211 of the exhausting gas passage 1021, and the exhaust fan is used to exhaust the exhausting gas passage 1021, so that a negative pressure is formed in the exhausting gas passage 1021.
When the cover plate cleaning device 100 according to the embodiment of the present invention is used to clean the cover plate 3, the non-adhesive surface 302 of the cover plate 3 faces the bearing surface 1011 of the bearing table body 101, and the cover plate 3 is placed on the bearing table body 101, so that the bearing table body 101 is used to bear the cover plate 3; a plasma gas flow 201 is emitted toward the cover plate 3 by the plasma emission device 2 so that the bonding face 301 of the cover plate 3 is cleaned by the plasma gas flow 201.
During the cleaning process, a negative pressure is formed in the pumping gas passage 1021 by the gas pumping device. The plasma gas flow 201 located at the corresponding side of the susceptor body 101 in the predetermined horizontal direction flows to the pumping gas passage 1021 at a larger flow velocity V under the negative pressure formed in the pumping gas passage 1021, and the plasma gas flow 201 enters through the inlet port 10211 of the pumping gas passage 1021 and flows out from the outlet port 10212 of the pumping gas passage 1021.
The pressure in the space above the inlet port 10211 of the pumping gas channel 1021 is P0, and the pressure in the space below the lid 3 and between the edge of the susceptor body 101 and the pumping gas channel 1021 is P1. After the plasma gas flow 201 on the corresponding side of the susceptor body 101 in the predetermined horizontal direction flows toward the pumping gas channel 1021 at a higher flow velocity V, the pressure P0 at the space above the inlet port 10211 of the pumping gas channel 1021 is reduced according to the bernoulli effect, such that P0 is smaller than P1, and thus the plasma gas flow 201 on the corresponding side of the susceptor body 101 in the predetermined horizontal direction flows toward the pumping gas channel 1021 more easily.
Therefore, even under the condition of external environment turbulence, the risk that the plasma airflow 201 on the corresponding side of the bearing table body 101 escapes and contacts with the non-adhesive surface 302 of the cover plate 3 can be reduced or even avoided, so that the phenomenon of missing of the fingerprint-proof coating of the cover plate 3 is reduced or even avoided, and the quality of the cover plate 3 can be improved.
Therefore, the cover cleaning device 100 according to the embodiment of the present invention has the advantages of good quality of the cleaned cover 3, and the like.
Optionally, a plurality of airflow extraction modules 102 are provided, a part of the airflow extraction modules 102 is disposed on one side of the susceptor body 101 in the preset horizontal direction, and another part of the airflow extraction modules 102 is disposed on the other side of the susceptor body 101 in the preset horizontal direction.
For example, as shown in fig. 3, two airflow extraction modules 102 are provided, one of the two airflow extraction modules 102 is disposed on one side of the susceptor body 101 in the preset horizontal direction, and the other of the two airflow extraction modules 102 is disposed on the other side of the susceptor body 101 in the preset horizontal direction.
Therefore, under the condition of external environment turbulence, the risk that the plasma airflow 201 positioned at two sides of the bearing table body 101 in the preset horizontal direction is contacted with the non-adhesive surface 302 of the cover plate 3 can be reduced or even avoided, and the quality of the cover plate 3 is further improved.
In order to make the technical solution of the present application more easily understood, the technical solution of the present application is described below by taking as an example that the preset horizontal direction coincides with the left-right direction.
As shown in fig. 3, two airflow extraction modules 102 are respectively disposed on the left and right sides of the susceptor body 101. Alternatively, the two airflow extraction modules 102 are symmetrically arranged in the left-right direction.
Optionally, the carrier body 101 and the airflow extraction module 102 are of a unitary structure.
Therefore, the relative positions of the bearing table body 101 and the airflow extraction module 102 are determined, and when the cover plate cleaning device 100 is assembled, after the relative positions of the bearing table body 101 and the plasma emission device 2 are determined, the relative positions of the plasma emission device 2 and the plasma emission device 2 are also determined, so that the cover plate cleaning device 100 is convenient to assemble.
In some embodiments, the pumping gas channel 1021 passes through the gas flow pumping module 102 in a vertical direction, and the outlet end 10212 of the pumping gas channel 1021 is disposed on a lower end face of the gas flow pumping module 102.
That is, the pumping gas channel 1021 extends in the vertical direction, the upper end of the pumping gas channel 1021 passes through the upper end surface of the gas flow pumping module 102, and the lower end of the pumping gas channel 1021 passes through the lower end surface of the gas flow pumping module 102.
Therefore, when the extracted gas channel 1021 is processed, only one through hole needs to be processed on the gas flow extraction module 102 along the vertical direction, and the through hole can be used as the extracted gas channel 1021. Compared with the way of extracting gas with a corner, the way of extracting gas 1021 is convenient to design and process, thereby facilitating the design and process of the cover bearing table 1.
In some embodiments, the purge gas passage 1021 includes a flared portion 10213, the flared portion 10213 having a large mouth end forming an inlet end 10211 of the purge gas passage 1021, and a small mouth end disposed below the large mouth end.
For example, as shown in FIG. 3, a large mouth end of the flared portion 10213 is disposed on an upper end face of the gas flow extraction module 102 to form an inlet end 10211, and a lower mouth end is located below the large mouth end.
Thus, when the gas extraction device is used to extract or blow gas from the gas channel 1021, the plasma gas flow 201 on the side corresponding to the susceptor body 101 in the predetermined horizontal direction can more easily enter the gas extraction channel 1021 through the large-opening end (inlet end 10211) and flow out from the outlet end 10212 of the gas extraction channel 1021.
In some embodiments, the evacuated gas passage 1021 further includes a straight portion 10214, one end of the straight portion 10214 being connected to the small end, the other end of the straight portion 10214 forming an outlet port 10212 of the evacuated gas passage 1021.
Therefore, the whole structure of the pumping gas channel 1021 is simple, and the design and the processing of the pumping gas channel 1021 are more convenient.
In the related art, when the AMOLED (active matrix organic light emitting diode) is a mobile phone screen, the width of the carrier body is generally 148 mm.
In some embodiments, a plurality of body gas channels 1012 are disposed on the carrier body 101, each of the plurality of body gas channels 1012 has an inlet end 10121 and an outlet end 10122 opposite to each other in the extending direction thereof, and the inlet end 10121 of each of the plurality of body gas channels 1012 is disposed on the bearing surface 1011, so that a negative pressure is formed in the body gas channels 1012 to make the cover plate 3 placed on the bearing surface 1011 be adsorbed by the bearing surface 1011. The number of the body gas channels 1012 is determined according to the process requirements of the body gas channels 1012, and the gap between two adjacent body gas channels 1012 is determined according to the number of the body gas channels 1012, so that the lid plate 3 placed on the bearing surface 1011 can be stably adsorbed by the bearing surface 1011.
The number of the body gas channels 1012 is determined according to the fact that the cover plate 3 placed on the bearing surface 1011 can be stably adsorbed by the bearing surface 1011: the number of body gas passages 1012 on each susceptor body 101 may or may not be equal. In particular. The number of the body gas channels 1012 on each susceptor body 101 may be determined according to the size of the cover plate 3, the shape of the cover plate 3, the weight of the cover plate 3, etc., so that the cover plate 3 placed on the supporting surface 1011 may be stably adsorbed by the supporting surface 1011.
The spacing between two adjacent body gas channels 1012 is determined according to the process requirements of the body gas channels 1012 and can be understood as follows: the spacing between two adjacent body gas channels 1012 has a minimum spacing that can meet the process requirements of the body gas channels 1012, and the spacing between two adjacent body gas channels 1012 can be equal to or greater than the minimum spacing. For example, the minimum distance is 3mm, and the distance between two adjacent body gas channels 1012 may be equal to 3mm or greater than 3mm, so as to meet the requirements of the process for manufacturing the body gas channels 1012. The processing requirement specifically means that when any one of the body gas channels 1012 is processed, the any one of the body gas channels 1012 does not communicate with the adjacent body gas channel 1012 that has already been processed.
In the cleaning process, after the cover plate 3 is placed on the bearing surface 1011 of the carrier body 101, the vacuum generator or the exhaust fan is connected to the outlet end 10122 of the gas passage 1012, and the gas passage 1012 is exhausted by the vacuum generator or the exhaust fan, so that a negative pressure is formed in the gas passage 1012, and the non-adhesive surface 302 of the cover plate 3 is adsorbed by the bearing surface 1011 of the carrier body 101 under the action of the negative pressure and attached to the bearing surface 1011.
Therefore, when the cover plate 3 is cleaned by the cover plate cleaning device 100, the cover plate 3 can be prevented from moving relative to the bearing surface 1011 in the preset horizontal direction, so as to further reduce or even prevent the risk that the plasma gas flow 201 on the corresponding side of the bearing table body 101 escapes and contacts with the non-adhesive surface 302 of the cover plate 3, and further improve the quality of the cover plate 3.
In some embodiments, the susceptor body 101 has a first side and a second side opposite to each other in a predetermined horizontal direction, one of the plurality of body gas passages 1012 is a first edge gas passage 10123, and one of the plurality of body gas passages 1012 is a second edge gas passage 10124. The first edge gas passage 10123 is closer to the first side 103 than the other body gas passages in the predetermined horizontal direction, and the second edge gas passage 10124 is closer to the second side 104 than the other body gas passages in the predetermined horizontal direction. The first edge gas passage 10123 and the first side 103 have a first predetermined distance therebetween, and the first predetermined distance is a first minimum value that satisfies the processing requirements of the first edge gas passage 10123. The second edge gas passage 10124 is spaced a second predetermined distance from the second side 104, where the second predetermined distance is a second minimum value that meets the process requirements of the second edge gas passage 10124.
The processing requirements of the first edge gas passage 10123 mean that the first edge gas passage 10123 does not penetrate the first side 103 when processing of the first edge gas passage 10123 is performed. For example, the first minimum value is 1.5mm, and the spacing between the first edge gas channel 10123 and the first side 103 is equal to 1.5mm.
The process requirements of the second edge gas passage 10124 mean that the second edge gas passage 10124 does not penetrate the second side 104 when the second edge gas passage 10124 is machined. For example, the second minimum is 1.5mm, and the spacing between the second edge gas channel 10124 and the second side 104 is equal to 1.5mm.
For example, as shown in FIG. 3, a first predetermined distance is provided between the first edge gas passage 10123 (the leftmost body gas passage) and the first side 103 (the left side), and a second predetermined distance is provided between the second edge gas passage 10124 (the rightmost body gas passage) and the second side 104 (the right side). It will be understood by those skilled in the art that the first predetermined distance and the second predetermined distance may be equal or unequal.
Thus, the distance between the first edge gas channel 10123 and the first side 103 and the distance between the second edge gas channel 10124 and the second side 104 are both small, so that after the cover plate 3 is placed on the susceptor body 101, the distance d between the left edge of the cover plate 3 and the left edge of the susceptor body 101 is large, and the distance between the right edge of the cover plate 3 and the right edge of the susceptor body 101 is also large. Thus, the space between the left edge of the cover plate 3, the left edge of the susceptor body 101, and the right edge of the corresponding side of the pumping gas passage 1021 is large, and the space between the right edge of the cover plate 3, the right edge of the susceptor body 101, and the left edge of the corresponding side of the pumping gas passage 1021 is large. Further, under the disturbance of the external environment, the pressure p1 at the space between the left edge of the cover plate 3, the left edge of the susceptor body 101, and the right edge of the pumping gas channel 1021 on the corresponding side, and the pressure at the space between the right edge of the cover plate 3, the right edge of the susceptor body 101, and the left edge of the pumping gas channel 1021 on the corresponding side are more stable. The risk that the plasma airflow 201 on the corresponding side of the plummer body 101 escapes and contacts with the non-adhesive surface 302 of the cover plate 3 can be further reduced or even avoided, so that the phenomenon that the fingerprint-proof coating of the cover plate 3 is lost is further reduced or even avoided, and the quality of the cover plate 3 can be further improved.
Optionally, the body gas passage 1012 penetrates the susceptor body 101 in a vertical direction, and an outlet end 10122 of the body gas passage 1012 is disposed on a lower end surface of the susceptor body 101.
Therefore, the design and processing of the body gas channel 1012 are convenient, thereby facilitating the design and processing of the cover plate bearing table 1.
The dimension of the susceptor body 101 in the predetermined horizontal direction may be determined according to the minimum space required for the body gas passage 1012.
In some embodiments, the size of the carrier body 101 in the predetermined horizontal direction is 80mm to 90mm.
For example, as shown in fig. 3, the size of the stage body 101 in the left-right direction is 80mm to 90mm.
Therefore, after the cover plate 3 is placed on the bearing table body 101, the distance d between the left edge of the cover plate 3 and the left edge of the bearing table body 101 is larger, and the distance between the right edge of the cover plate 3 and the right edge of the bearing table body 101 is also larger. The risk that the plasma airflow 201 on the corresponding side of the plummer body 101 escapes and contacts with the non-adhesive surface 302 of the cover plate 3 can be further reduced or even avoided, so that the phenomenon of missing of the fingerprint-proof coating of the cover plate 3 is further reduced or even avoided, and the quality of the cover plate 3 can be further improved.
Optionally, the size of the plummer body 101 in the preset horizontal direction is 85mm.
Of course, in other embodiments, the width of the carrier body may be determined by the size of the cover plate to be cleaned. Specifically, the width of the plummer body can be correspondingly reduced when the size of the cover plate is smaller than that of the cover plate when the AMOLED is a mobile phone screen, which is determined according to the size of the cover plate in the preset horizontal direction; when the cover plate size is greater than the cover plate size when AMOLED is the cell-phone screen, can be corresponding increase the width of plummer body.
In some embodiments, the inlet end 10211 of the airflow extraction module 102 is disposed below the bearing surface 1011. In other words, the upper end surface of the airflow exhausting module 102 is disposed below the bearing surface 1011.
Therefore, on one hand, the plasma airflow 201 which is positioned right above the cover plate 3 and used for cleaning the adhesive surface 201 of the cover plate 3 can be prevented from flowing to the airflow extraction module 102, and the cleaning effect of the cover plate 3 can be prevented from being influenced. On the other hand, after the cover plate 3 is placed on the bearing surface 1011, the cover plate 3 is located above the airflow extraction module 102 on the whole, even if the edge of the cover plate 3 in the preset horizontal direction exceeds the edge of the airflow extraction module 102, the cover plate 3 cannot be placed on the bearing surface 1011 due to interference with the airflow extraction module 102, so that the cover plate bearing table 1 can be suitable for cleaning cover plates 3 with different sizes in the preset horizontal direction, and the universality of the cover plate bearing table 1 is good.
Optionally, the inlet end 10211 of the air flow extraction module 102 is vertically spaced from the bearing surface 1011.
As shown in fig. 3, a space between the left edge of the cover plate 3, the left edge of the susceptor body 101, and the right edge of the pumping gas passage 1021 on the corresponding side is larger, and a space between the right edge of the cover plate 3, the right edge of the susceptor body 101, and the left edge of the pumping gas passage 1021 on the corresponding side is larger.
Thus, under the external environment turbulence condition, the pressure p1 at the space between the left edge of the cover plate 3, the left edge of the susceptor body 101, and the right edge of the pumping gas channel 1021 on the corresponding side, and the pressure at the space between the right edge of the cover plate 3, the right edge of the susceptor body 101, and the left edge of the pumping gas channel 1021 on the corresponding side are more stable. The risk that the plasma gas flow 201 on the corresponding side of the susceptor body 101 escapes and contacts the non-adhesive surface 302 of the cover plate 3 can be further reduced or even avoided, and the quality of the cover plate 3 can be further improved.
The cover plate cleaning method provided by the embodiment of the invention comprises the following steps:
the cover plate 3 is carried by the carrying platform body 101;
emitting a plasma gas flow 201 with the plasma emission device 2;
the extracted gas channel 1021 is blown or evacuated by means of a gas extraction device, so that a negative pressure is formed in the extracted gas channel 1021.
Therefore, the cover plate cleaning method according to the embodiment of the present invention has the advantages that the quality of the cleaned cover plate 3 is good, and the like.
The cover plate cleaning device 100 according to the embodiment of the invention can effectively improve the abnormal phenomenon of the square fingerprint coating loss of the cover plate in the cover plate cleaning process, and improve the quality of the cover plate 3.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the present disclosure, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" and the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (12)
1. A cover plate carrier, comprising:
the bearing table comprises a bearing table body, a bearing plate and a cover plate, wherein the bearing table body is provided with a bearing surface for supporting the cover plate; and
the air flow extracting module is arranged on at least one side of the plummer body in a preset horizontal direction, an extracting air channel is arranged on the air flow extracting module, the extracting air channel is provided with an inlet end and an outlet end which are opposite to each other in the extending direction of the extracting air channel, and the inlet end of the extracting air channel is arranged on the upper end face of the air flow extracting module.
2. The lid plate carrier according to claim 1, wherein the airflow extraction module is provided in plurality, a part of the airflow extraction module is provided on one side of the carrier body in the predetermined horizontal direction, and another part of the airflow extraction module is provided on the other side of the carrier body in the predetermined horizontal direction.
3. The lid carrier of claim 1, wherein the extraction gas channel extends vertically through the gas extraction module, and the outlet end of the extraction gas channel is disposed on a lower end face of the gas extraction module.
4. The cover plummer of claim 1, wherein the extracted gas channel includes a flared portion having a large mouth end forming the inlet end of the extracted gas channel and a small mouth end disposed below the large mouth end.
5. The lid platen according to any one of claims 1-4, wherein a plurality of body gas channels are provided on the platen body, each of the plurality of body gas channels has an inlet end and an outlet end opposite to each other in the extending direction thereof, the inlet end of each of the plurality of body gas channels is provided on the load-supporting surface so as to form a negative pressure in the body gas channel to allow the lid plate placed on the load-supporting surface to be adsorbed by the load-supporting surface, the number of body gas channels is determined according to the requirement of the process for the body gas channels to be stably adsorbed by the load-supporting surface, and the distance between two adjacent body gas channels is determined according to the requirement of the process for the body gas channels.
6. The lid platen of claim 5, wherein the platen body has a first side and a second side opposite in the predetermined horizontal direction, one of the plurality of body gas channels is a first edge gas channel, one of the plurality of body gas channels is a second edge gas channel, the first edge gas channel is closer to the first side than the other body gas channels in the predetermined horizontal direction, the second edge gas channel is closer to the second side than the other body gas channels in the predetermined horizontal direction, a first predetermined distance is between the first edge gas channel and the first side, the first predetermined distance is a first minimum value that meets a process requirement of the first edge gas channel, a second predetermined distance is between the second edge gas channel and the second side, and the second predetermined distance is a second minimum value that meets a process requirement of the second edge gas channel.
7. The cover carrier of claim 6, wherein the carrier body has a dimension in the predetermined horizontal direction of 80mm to 90mm.
8. The cover carrier of any of claims 1-4, wherein the inlet end of the gas flow extraction module is disposed below the load-supporting surface.
9. The cover carrier of claim 8, wherein the inlet end of the airflow extraction module is vertically spaced from the carrier surface by a predetermined vertical distance.
10. The cover carrier of any of claims 1 to 4, wherein the carrier body and the gas flow extraction module are of unitary construction.
11. A cover cleaning apparatus, comprising:
a cover carrier according to any one of claims 1-10;
a plasma emission device for emitting a plasma gas flow towards the cover plate; and
and the gas pumping equipment is matched with the pumping gas channel of the cover plate bearing table.
12. A cover cleaning method implemented by the cover cleaning apparatus of claim 11, comprising the steps of:
bearing the cover plate by using the bearing table body;
emitting a plasma gas flow with the plasma emission device;
and blowing or pumping the pumped gas channel by using gas pumping equipment so as to form negative pressure in the pumped gas channel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110794874.9A CN115608713A (en) | 2021-07-14 | 2021-07-14 | Cover plate bearing table, cover plate cleaning device and cover plate cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110794874.9A CN115608713A (en) | 2021-07-14 | 2021-07-14 | Cover plate bearing table, cover plate cleaning device and cover plate cleaning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115608713A true CN115608713A (en) | 2023-01-17 |
Family
ID=84855475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110794874.9A Pending CN115608713A (en) | 2021-07-14 | 2021-07-14 | Cover plate bearing table, cover plate cleaning device and cover plate cleaning method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115608713A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2014365A2 (en) * | 2007-06-01 | 2009-01-14 | Institute of Occupational Safety and Health, Council of Labor Affairs | Air curtain-isolated biosafety cabinet |
| CN104813460A (en) * | 2012-11-27 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Substrate supporting apparatus |
| CN109283797A (en) * | 2017-07-21 | 2019-01-29 | 上海微电子装备（集团）股份有限公司 | Object lens protective device, objective system and lithographic equipment |
| CN209452455U (en) * | 2019-01-17 | 2019-10-01 | 京东方科技集团股份有限公司 | A kind of plummer and base plate cleaning device |
| CN211170468U (en) * | 2019-11-29 | 2020-08-04 | 湖北仁齐科技有限公司 | Coating film adsorption clamp |
| KR20210000712A (en) * | 2020-12-24 | 2021-01-05 | (주)벡터에스 | Purification fume apparatus for semiconductor manufacturing equipment |
| CN112420474A (en) * | 2020-11-10 | 2021-02-26 | 华虹半导体(无锡)有限公司 | Plasma apparatus and method of manufacturing semiconductor device |
| CN112620254A (en) * | 2020-12-15 | 2021-04-09 | 霸州市云谷电子科技有限公司 | Cover plate bearing device, cover plate cleaning device and cover plate cleaning method |
| CN112748641A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Air curtain protection device at bottom of lens |
-
2021
- 2021-07-14 CN CN202110794874.9A patent/CN115608713A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2014365A2 (en) * | 2007-06-01 | 2009-01-14 | Institute of Occupational Safety and Health, Council of Labor Affairs | Air curtain-isolated biosafety cabinet |
| CN104813460A (en) * | 2012-11-27 | 2015-07-29 | 盛美半导体设备（上海）有限公司 | Substrate supporting apparatus |
| CN109283797A (en) * | 2017-07-21 | 2019-01-29 | 上海微电子装备（集团）股份有限公司 | Object lens protective device, objective system and lithographic equipment |
| CN209452455U (en) * | 2019-01-17 | 2019-10-01 | 京东方科技集团股份有限公司 | A kind of plummer and base plate cleaning device |
| CN112748641A (en) * | 2019-10-31 | 2021-05-04 | 上海微电子装备（集团）股份有限公司 | Air curtain protection device at bottom of lens |
| CN211170468U (en) * | 2019-11-29 | 2020-08-04 | 湖北仁齐科技有限公司 | Coating film adsorption clamp |
| CN112420474A (en) * | 2020-11-10 | 2021-02-26 | 华虹半导体(无锡)有限公司 | Plasma apparatus and method of manufacturing semiconductor device |
| CN112620254A (en) * | 2020-12-15 | 2021-04-09 | 霸州市云谷电子科技有限公司 | Cover plate bearing device, cover plate cleaning device and cover plate cleaning method |
| KR20210000712A (en) * | 2020-12-24 | 2021-01-05 | (주)벡터에스 | Purification fume apparatus for semiconductor manufacturing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5998086B2 (en) | Air plate for levitation | |
| US10632595B2 (en) | Bearing flatform, bearing device and laser cutting apparatus | |
| TWI466225B (en) | Suspended air float working platform | |
| KR101588440B1 (en) | Swirl flow forming body and non-contact conveying device | |
| WO2009119377A1 (en) | Non-contact carrier device | |
| WO2022127271A1 (en) | Cover plate bearing device, cover plate cleaning device, and cover plate cleaning method | |
| JP5205214B2 (en) | Device and method for supporting plate member | |
| KR20110139461A (en) | Vacuum adsorption device | |
| CN204957799U (en) | Transport carrier for transporting plate members | |
| WO2012066613A1 (en) | Gas-permeable conveyance table | |
| CN115608713A (en) | Cover plate bearing table, cover plate cleaning device and cover plate cleaning method | |
| JP5740394B2 (en) | Swirl flow forming body and non-contact transfer device | |
| CN219116699U (en) | Multi-diaphragm adsorption head | |
| JP2014118221A (en) | Substrate flotation device | |
| JP4171293B2 (en) | Method and apparatus for conveying thin plate material | |
| CN212431391U (en) | Organic solvent waste gas condensing device | |
| KR20140098130A (en) | Fan and pcb mounting in fuel cell stack assemblies | |
| JP2022123271A (en) | Sheet conveyance device | |
| US20140048994A1 (en) | Non-Contact Substrate Chuck and Vertical Type Substrate Supporting Apparatus Using the Same | |
| JP5536516B2 (en) | Non-contact transfer device | |
| JP2009202240A (en) | Vacuum tweezers and substrate conveying device and substrate handling device using the vacuum tweezers | |
| KR20120045758A (en) | Non contact transport apparatus | |
| CN221596401U (en) | Boat sheet, boat structure and reaction furnace | |
| KR20250027889A (en) | Non-contact transfer device | |
| CN220093375U (en) | Dust collecting device and laser drilling equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |