CN115595443A - Recycling method for bell jar coating of reduction furnace, auxiliary device for recycling, and solution circulation system for recycling - Google Patents

Abstract

The invention discloses a method for recovering a coating of a reducing furnace bell jar, an auxiliary device for recycling and a recycling system for a solution solution, and relates to the field of polysilicon production, specifically comprising the following steps: transporting the dissolved inner wall of the reducing furnace bell jar The solution of the coating, the solution dissolves the coating on the inner wall of the bell jar of the reduction furnace, and the coating metal salt solution, gas and H ₂ O generated after the dissolution are sent out to the bell jar of the reduction furnace; the resulting coating metal salt solution is heated solution, the coating metal salt solution pyrolyzes to generate metal and gas. The dissolving solution of the present invention dissolves the coating on the inner wall of the bell jar of the reduction furnace, finally generates coating metal salt solution, gas and _H2O , and pyrolyzes the generated coating metal salt solution to obtain metal and gas, namely Realize the recycling of coating materials, avoid the waste of metal materials, and reduce the production cost of enterprises.

Description

A kind of recovery furnace bell jar coating recovery method, recovery auxiliary device and recovery solvent solution circulatory system

technical field

The invention relates to the field of polysilicon production, in particular to a method for recovering the bell jar coating of a reduction furnace, an auxiliary device for recovery, and a solution circulation system for recovery.

Background technique

Polysilicon is the basic material for the photovoltaic industry and microelectronics industry, and the modified Siemens method is currently the mainstream method for preparing polysilicon. The characteristic of the improved Siemens method is: in a bell-type chemical vapor deposition (CVD) reactor (the industry term is a polysilicon reduction furnace), the fine silicon core that is self-heated to a temperature of 950°C-1150°C is used as a deposition carrier. The trichlorosilane and hydrogen gas entering the polysilicon reduction furnace undergo a hydrogen reduction reaction on the surface of the hot silicon core, and the reduced silicon is deposited on the surface of the silicon core. With the progress of the hydrogen reduction reaction, the diameter of the silicon core gradually increases until it reaches the specified The size is finally mined in the form of polysilicon rods.

The main material of the polysilicon reduction furnace is stainless steel. In order to avoid the problem of creep failure of the stainless steel material due to the high temperature of the inner wall during the operation of the polysilicon reduction furnace, it is usually passed through the jacket between the outer wall of the polysilicon reduction furnace and the inner wall of the polysilicon reduction furnace. Enter low-temperature water for cooling, so that the temperature of the inner wall of the polysilicon reduction furnace is kept below 300°C. During the operation of the polysilicon reduction furnace, a large number of near-infrared electromagnetic waves are emitted from the surface of the silicon rod, and most of the near-infrared electromagnetic waves reaching the inner wall surface are absorbed by the stainless steel inner wall with low reflectivity, and converted into internal heat energy of the inner wall of the polysilicon reduction furnace, and then Conduction to low temperature cooling water with high heat capacity. According to statistics, the heat taken away by the jacket cooling water accounts for more than 60% of the total input energy of the polysilicon reduction furnace.

In order to reduce the loss of heat energy taken away by the bell jar water of the reduction furnace and the precipitation of stainless steel impurities on the inner wall of the polysilicon reduction furnace, a layer of high near-infrared electromagnetic wave reflective coating is usually provided on the inner wall of the reduction furnace to achieve the purpose of energy saving and antifouling in the production process, such as gold, Silver, copper, etc., the coating has a certain service life. When the service life is reached, the old coating needs to be removed to prepare a new coating, while gold, silver, copper and other metals are expensive.

Therefore, there is an urgent need to develop a recovery furnace bell jar coating recovery method, an auxiliary device for recovery and a solution circulation system for recovery.

Contents of the invention

The object of the present invention is to provide an auxiliary device for recovery of the bell jar coating of the reduction furnace, a recovery system and a solution circulation system for recovery, which can effectively realize the recovery of the coating material on the inner wall of the bell jar of the reduction furnace.

For realizing the object of the present invention, the technical scheme that adopts is:

A method for recovering the coating of a reduction furnace bell jar, specifically comprising the steps of:

Transport the solution to dissolve the coating on the inner wall of the bell jar of the reduction furnace to the bell jar of the reduction furnace. The solution dissolves the coating on the inner wall of the bell jar of the reduction furnace, and the resulting coating metal salt solution, gas and H ₂ O are sent out of the reduction furnace bell jar;

Evaporate and crystallize the resulting coating metal salt solution, pyrolyze after crystallization, and generate metal and gas after pyrolysis of the coating metal salt.

Further, the gas generated by pyrolysis is recovered and dissolved in water to prepare a solution.

Further, the pyrolysis temperature of the coating metal salt is 400°C-1200°C.

Furthermore, the reduction furnace bell jar can be placed according to the requirements of the recovery method, such as horizontal placement or vertical placement.

Further, when the dissolving solution dissolves the coating on the inner wall of the reduction furnace bell, the reduction furnace bell rotates synchronously.

Further, the dissolving solution is one or more of hydrochloric acid and nitric acid.

Further, the concentration of the solution is 1wt%-70wt%.

Further, the volume of the solution sent into the bell jar of the reduction furnace is no more than half of the internal volume of the bell jar of the reduction furnace.

Further, the volume of the solution sent into the bell jar of the reduction furnace is 1/4 to 1/2 of the internal volume of the bell jar of the reduction furnace.

Further, the solution heats the inside of the reduction furnace bell during the process of dissolving the coating on the inner wall of the reduction furnace bell.

Further, the heating temperature inside the bell jar of the reduction furnace is 30° C. to 200° C., and the pressure of nitrogen inside the bell jar of the reduction furnace is maintained at 0.1 MPa to 1 MPa.

An auxiliary device for recovering the bell jar coating of a reduction furnace, including a horizontal frame and a drive mechanism for driving the horizontal frame to rotate, and the horizontal frame includes a rotating base for fixing the bell jar flange and a ring for fixing the bell jar A ring connector, a plurality of support rods are supported between the rotating base and the ring connecting member, a through hole is opened on the rotating base, and a feeding pipe is also arranged on the rotating base.

Further, a heater is provided on the feed pipe.

Further, the driving mechanism includes a driving driving structure and a driven driving structure, and the driving driving structure and the driven driving structure are respectively located at two ends of the horizontal frame.

Further, the rotating base is circular, and the active driving structure includes a fixing part and a driving part, and there are two driving parts, both of which are rotatably supported on the fixing part, and the rotating base is jointly supported on the two driving parts , and a drive motor with adjustable speed and capable of driving the drive to rotate is installed on the fixed part.

Further, the driving part and the rotating base are both provided with engaging teeth, and the engaging teeth on the driving part and the engaging teeth on the rotating base mesh with each other.

Further, the support rod is a telescopic structure.

Further, the lifting ring connector is ring-shaped, and the driven driving structure includes a moving part that can reciprocate along the length direction of the support rod. The moving part supports a rotatable driven wheel. There are two driven wheels, and the lifting ring connecting part supports together on the two driven wheels.

Further, the driven driving structure further includes a guide rail, and the moving part is a slider reciprocatingly sliding on the guide rail.

Further, multiple mounting hole groups are provided on the rotating base and the suspension ring connector, and the multiple mounting hole groups are arranged at intervals along the radial direction of the rotating base, and each mounting hole group includes a center circumference of the rotating base. Mounting holes arranged at intervals.

A solution circulation system for recycling bell jar coatings of a reduction furnace, comprising any one of the auxiliary devices described above, a solution container connected to a feed pipe, and a coating metal salt collector connected to a through hole.

Further, the outlet end of the coating metal salt collector is also connected to a pyrolysis reactor, and the outlet end of the pyrolysis reactor is also connected to a gas collector for collecting pyrolysis gas.

Further, the gas collector is also connected with a first delivery pipeline for delivering the gas into the solution container.

Further, a second delivery pipeline for delivering the gas generated during the coating dissolution process is also connected between the coating metal salt collector and the gas collector.

Further, the dissolving solution container is also connected with a replacement gas container for replacing the gas inside it.

The beneficial effect of the present invention is,

In the present invention, the coating on the inner wall of the bell jar of the reduction furnace is dissolved by the solution by delivering the solution to the bell jar of the reduction furnace, and finally a coating metal salt solution, gas and _H2O are generated, and the resulting coating metal salt The coating metal salt obtained after the solution is evaporated and crystallized is pyrolyzed to obtain metal and gas, which realizes the recovery of the coating material, avoids the waste of metal materials, and reduces the production cost of the enterprise.

In the present invention, a gas collector is provided, and the gas collector is connected to a solution container, so that a new solution can be obtained after dissolving the gas and water, and the whole-process recovery and reuse of the solution is realized.

In the present invention, by providing an auxiliary device, when the coated metal on the inner wall of the bell jar needs to be recycled, not only the bell jar can be installed horizontally, but also the bell jar can be rotated after the horizontal installation, so that the bell jar is completely intact. The safety is guaranteed, so that the bell jar itself does not need to be disassembled and assembled when the coated metal is recycled, so that the recycling efficiency is higher.

Description of drawings

The accompanying drawings illustrate exemplary embodiments of the invention and, together with the description, serve to explain the principles of the invention, are included to provide a further understanding of the invention, and are incorporated in and constitute the present specification. part of the manual.

Fig. 1 is the structural representation of the auxiliary device for recovery of the reduction furnace bell jar coating provided by the embodiment of the present invention 3;

Fig. 2 is the structural representation of reduction furnace bell jar among Fig. 1;

Fig. 3 is the structural representation of horizontal frame among Fig. 1;

Fig. 4 is a structural schematic diagram of the cooperation between the rotating base and the driving member;

Fig. 5 is a schematic diagram of the structure of the cooperation of the bell ring and the driven wheel;

Fig. 6 is a schematic structural diagram of a solution circulation system for recovering the bell jar coating of the reduction furnace provided in Example 4 of the present invention.

Marks and corresponding component names in the attached drawings:

1. Reduction furnace bell jar, 2. Horizontal rack, 3. Driving mechanism, 4. Solution container, 5. Coating metal salt collector, 6. Pyrolysis reactor, 7. Gas collector, 8. Replacement gas container;

101, bell jar flange, 102, bell jar suspension ring;

201, rotating base, 202, support rod, 203, ring connector, 204, meshing teeth, 205, through hole, 206, feed pipe, 207, heater, 208, mounting hole;

301, fixed part, 302, driving part, 303, guide rail, 304, moving part, 305, driven wheel.

detailed description

The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It can be understood that the specific implementation manners described here are only used to explain relevant content, rather than to limit the present invention. In addition, it should be noted that, for the convenience of description, only the parts related to the present invention are shown in the drawings.

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the drawings and in combination with embodiments.

Example 1

A kind of reduction furnace bell jar coating recovery method provided by the invention specifically comprises the following steps:

The reduction furnace bell 1 is sealed to form an airtight space inside the reduction furnace bell 1, and the solution for dissolving the coating on the inner wall of the reduction furnace bell 1 is transported to the reduction furnace bell 1, and the solution is guaranteed to be effective against the reduction furnace. Under the situation that bell jar 1 inner wall coating dissolves, because reduction furnace bell jar 1 inner wall coating has metals such as gold, silver, copper, therefore, according to the material difference of reduction furnace inner wall coating, dissolving liquid also can select different materials for use, dissolves The principle is as follows:

Coating metal + solution → coating metal salt solution + gas + H ₂ O

That is, the solution dissolves the coating on the inner wall of the reduction furnace bell jar 1 to obtain a coating metal salt solution, gas and H ₂ O. It should be noted that the coating metal salt solution here means that the obtained metal salt solution is Contain the salt solution of coating metal ion, if the inner wall coating of reduction furnace bell jar 1 has high near-infrared electromagnetic wave reflection coatings such as gold, silver, copper, then the coating metal salt solution that forms is the salt solution containing gold ion, Salt solutions containing silver ions, salt solutions containing copper ions, etc.

The coating metal salt solution, gas and H ₂ O generated after dissolution are sent out from the bell jar 1 of the reduction furnace, and the obtained coating metal salt solution is evaporated and crystallized to carry out a pyrolysis reaction. The principle of the pyrolysis reaction is as follows:

Coating Metal Salt → Metal + Gas

That is, metal and gas are obtained after pyrolysis of the coating metal salt, and the metal here is the coating metal material, which realizes the recovery of the coating material, avoids the waste of the metal material, and reduces the production cost of the enterprise.

As a further improvement of this embodiment, after the coating metal salt is pyrolyzed, the obtained gas is collected, and the collected gas is dissolved in water, and a new solution is obtained after the gas and water are dissolved. After the solution is collected, The solution that can be used to dissolve the coating on the inner wall of the bell jar 1 of the reduction furnace realizes the recovery and closed-loop utilization of the solution, and greatly reduces the recovery cost of the coated metal.

As a further improvement of this embodiment, the pyrolysis temperature of the coating metal salt is 400°C to 1200°C, so that the pyrolysis efficiency of the coating metal salt is higher, and the optimal pyrolysis temperature of the coating metal salt can be determined according to the actual situation. situation to choose.

As a further improvement of this embodiment, the reduction furnace bell jar 1 is placed horizontally, so that the solution can dissolve the entire height of the inner wall coating of the reduction furnace bell jar 1 at one time, so that the contact area between the solution and the coating is smaller. Large, not only facilitates the dissolution of the coating, but also can greatly reduce the amount of solution used, so that the dissolution efficiency of the coating is greatly improved.

As a further improvement of this embodiment, in the process of dissolving the coating on the inner wall of the reduction furnace bell jar 1 by the solution, in order to ensure that all the coatings on the inner wall of the reduction furnace bell jar 1 can be processed under the condition of using a small amount of solution Dissolving, the reduction furnace bell jar 1 can be rotated, the rotation speed of the reduction furnace bell jar 1 is between 1r/h and 1r/s, and the reduction furnace bell jar 1 is sent into the reduction furnace bell jar 1 when rotating The dissolving solution dissolves all coatings on the inner wall of the reduction furnace bell jar 1 along with the rotation of the reduction furnace bell jar 1, so that the coatings on the inner wall of the reduction furnace bell jar 1 can all be recovered.

As a further improvement of this embodiment, the dissolving liquid is one or more of hydrochloric acid and nitric acid. When the dissolving liquid is hydrochloric acid and nitrate, the hydrochloric acid and nitrate can be mixed according to a certain proportion. During the operation, the specific type of dissolving solution can be selected according to the type of coating material, so as to ensure the dissolution efficiency of the coating without damaging the essence of the coating.

As a further improvement of this embodiment, the concentration of the solution is 1wt% to 70wt%. The specific choice of the concentration of the solution can be determined according to the material type of the coating, the thickness of the coating, etc. In the case of ensuring the dissolution efficiency , the concentration of the solution can be chosen arbitrarily.

As a further improvement of this embodiment, in order to facilitate the dissolving solution to discharge the reduction furnace bell jar 1 after dissolving the coating, the reduction furnace bell jar 1 must have a through hole 205 for discharging the coating metal salt solution. The solution leaks from the through hole 205 during the process of dissolving the coating. Therefore, the volume of the solution sent into the reduction furnace bell jar 1 is not more than half of the internal volume of the reduction furnace bell jar 1, so that the coating once dissolved by the solution The layer area is no more than half of the inner wall of the bell jar 1 of the reduction furnace. Under the condition of avoiding the leakage of the solution from the bell jar 1 of the reduction furnace, the area of the coating once dissolved by the solution is maximized. In the present invention, without considering the amount of the solution and the leakage of the solution, the reduction furnace bell jar 1 can be placed vertically at this time, the reduction furnace bell jar 1 does not need to rotate, and the volume of the solution can also be larger than the reduction furnace bell jar. Half of the internal volume of the furnace bell jar 1, even the volume of the lysate can directly be the internal volume of the reduction furnace bell 1; meanwhile, when the reduction furnace bell 1 is vertically placed, in order to reduce the consumption of the lysate, the lysate The method of spraying can also be used to act on the inner wall of the bell jar 1 of the reduction furnace, so that the solution can contact and dissolve the metal coating on the inner wall of the bell jar 1 of the reduction furnace.

As a further improvement of this embodiment, the volume of the solution sent into the bell jar 1 of the reduction furnace is 1/4 to 1/2 of the internal volume of the bell jar 1 of the reduction furnace, so as to prevent the solution from flowing from the solution while ensuring the dissolution efficiency. The reduction furnace bell jar 1 leaks, and the volume of the dissolving solution can be selected arbitrarily.

As a further improvement of this embodiment, the dissolution solution heats the interior of the reduction furnace bell jar 1 during the process of dissolving the coating on the inner wall of the reduction furnace bell jar 1 to increase the temperature of the solution solution, thereby greatly improving the dissolution efficiency of the solution solution.

As a further improvement of this embodiment, the heating temperature inside the reduction furnace bell jar 1 is 30° C. to 200° C., and the heating temperature inside the reduction furnace bell jar 1 can be selected at will without destroying the dissolution quality of the solution; at the same time, To prevent the solution from entering the reduction furnace bell jar 1 during the process of dissolving the coating, other gases will affect the dissolution. The inside of the reduction furnace bell jar 1 is also filled with nitrogen to maintain the pressure, so that the pressure inside the reduction furnace bell jar 1 is maintained at 0.1MPa～1MPa.

Example 2

The inner wall coating of the bell jar of the reduction furnace is silver, and the method for recovering the bell jar coating of the reduction furnace specifically includes the following steps:

The reduction furnace bell 1 is sealed to form an airtight space inside the reduction furnace bell 1, and the solution HNO ₃ for dissolving the silver coating on the inner wall of the reduction furnace bell 1 is delivered to the reduction furnace bell 1, and the solution HNO ₃ is paired The dissolution principle of the silver coating dissolution on the inner wall of the reduction furnace bell jar 1 is as follows:

Ag+HNO ₃ →AgNO ₃ +NO _x +H ₂ O

That is, the AgNO ₃ solution, gas NO _x and H ₂ O are obtained after the solution dissolves the coating on the inner wall of the reduction furnace bell jar 1 .

_The dissolved AgNO3 solution, gas _NOx and _H2O are sent out from the bell jar ₁ of the reduction furnace, and the obtained AgNO3 solution is evaporated and crystallized for pyrolysis reaction. The principle of the pyrolysis reaction is as follows:

2AgNO ₃ →2Ag+2NO ₂ +O ₂

That is, Ag and gas NO ₂ are obtained after AgNO ₃ is pyrolyzed, which realizes the recovery of coating materials, avoids the waste of silver materials, and reduces the production cost of enterprises.

As a further improvement _of this embodiment, after AgNO3 is pyrolyzed, the obtained gas _NO2 and gas _NOx obtained by dissolving Ag are collected, and the collected gas _NOx is dissolved in water, and the reaction is:

NO _X +O ₂ +H ₂ O→HNO ₃

After NO _X is dissolved with water, a new solution HNO ₃ is obtained. After the solution HNO ₃ is collected, it can be used to dissolve the silver coating on the inner wall of the reduction furnace bell jar 1, realizing the recovery and closed-loop utilization of the solution HNO ₃ , greatly reducing the Recycling cost of silver coating.

As a further improvement of this embodiment, the pyrolysis temperature of AgNO ₃ is 400° C. to 1200° C., so that the pyrolysis efficiency of AgNO ₃ is higher, and the optimal pyrolysis temperature of AgNO ₃ can be selected according to the actual situation.

As a further improvement of this embodiment, the reduction furnace bell jar 1 is placed horizontally, so that the solution HNO ₃ can dissolve the silver coating on the entire height of the reduction furnace bell jar 1 at one time, so that the solution HNO ₃ can be mixed with the silver coating. The contact area of the coating is larger, which not only facilitates the dissolution of silver, but also can greatly reduce the amount of the dissolving solution HNO ₃ , so that the dissolution efficiency of the silver coating is greatly improved.

As a further improvement of this embodiment, in the process of dissolving the silver coating on the inner wall of the reduction furnace bell jar 1 with the solution HNO ₃ , in order to ensure that the reduction furnace bell jar 1 can be treated with a small amount of solution HNO ₃ All the silver coatings on the inner wall are dissolved, so that the reduction furnace bell jar 1 can be rotated. The rotation speed of the reduction furnace bell jar 1 is between 1r/h and 1r/s, and when the reduction furnace bell jar 1 is rotating, the The solution _HNO3 in the reduction furnace bell jar 1 dissolves all the silver coatings on the inner wall of the reduction furnace bell jar 1 along with the rotation of the reduction furnace bell jar 1, so that the silver coating on the inner wall of the reduction furnace bell jar 1 can be completely removed. Recycle.

As a further improvement of this embodiment, the _HNO3 concentration of the dissolving solution is 1wt% to 70wt%, and the specific selection of the _HNO3 concentration of the dissolving solution can be determined according to the thickness of the silver coating. In the case of ensuring the dissolution efficiency, The concentration of the dissolving solution HNO ₃ can be chosen arbitrarily.

As a further improvement of this embodiment, in order to make it easier for the solution HNO to discharge the reduction furnace bell jar ₁ after dissolving the silver coating, the reduction furnace bell jar ₁ must have a through hole 205 for discharging the AgNO solution. Avoid dissolving solution HNO ₃ leak from this through hole 205 in the silver coating dissolving process, therefore, the volume of dissolving solution that is sent into reducing furnace bell jar 1 is not greater than half of reducing furnace bell jar 1 inner volume, makes dissolving solution The once-dissolved silver coating area is not greater than half of the inner wall of the reduction furnace bell jar 1, and the coating area of the first-time dissolved solution _HNO3 is guaranteed to be maximized under the condition that the solution _HNO3 is prevented from leaking from the reduction furnace bell jar 1 . In the present invention, without considering the amount of the solution _HNO3 and the leakage of the solution _HNO3 , the reduction furnace bell jar 1 can be placed vertically at this time, and the reduction furnace bell jar 1 does not need to rotate, and the volume of the solution It can also be larger than half of the internal volume of the reduction furnace bell jar 1, and even the volume of the solution can directly be the internal volume of the reduction furnace bell jar 1; meanwhile, when the reduction furnace bell jar 1 is placed vertically, in order to reduce the use of the solution amount, the solution can also be applied to the inner wall of the reduction furnace bell jar 1 by spraying, and the solution can also be contacted and dissolved with the metal coating on the inner wall of the reduction furnace bell jar 1 .

As a further improvement of this embodiment, the volume of the solution _HNO3 that is sent into the reduction furnace bell jar 1 is 1/4 to 1/2 of the internal volume of the reduction furnace bell jar 1, so as to avoid dissolution while ensuring the dissolution efficiency. The liquid HNO ₃ leaks from the bell jar 1 of the reduction furnace, and the volume of the dissolving liquid HNO ₃ can be selected arbitrarily.

As a further improvement of this embodiment, the dissolution solution heats the interior of the reduction furnace bell jar 1 during the process of dissolving the coating on the inner wall of the reduction furnace bell jar 1 to increase the temperature of the solution solution, thereby greatly improving the dissolution efficiency of the solution solution.

As a further improvement of this embodiment, the heating temperature inside the bell jar 1 of the reduction furnace is 30° C. to 200° C., and the heating temperature inside the bell jar 1 of the reduction furnace can be selected at will without destroying the dissolved quality of the solution HNO ₃ ; Simultaneously, avoid dissolving solution HNO ₃ other gas enters in the reduction furnace bell jar 1 and influence on dissolution during the process of dissolving the silver coating. The internal pressure is kept at 0.1MPa～1MPa.

Example 3

In this embodiment, in order to implement the recovery method in Example 1, an auxiliary device for recovering the coating of the reduction furnace bell jar is also provided in this embodiment 3, and the auxiliary device is used for fixed installation of the reduction furnace bell jar 1 Specifically, the auxiliary device includes a horizontal frame 2 and a drive mechanism 3, the horizontal frame 2 is a frame placed horizontally, the axial direction of the frame extends horizontally, and the drive mechanism 3 can drive the horizontal frame 2 to rotate; the horizontal frame 2 includes a rotating base 201 and a ring connector 203. There is a certain distance between the rotating base 201 and the ring connecting frame. Since the lower end of the reduction furnace bell 1 has a bell flange 101, the reduction furnace The upper end of the bell jar 1 has a bell jar hanging ring 102, and the bell jar flange 101 is annular, and there are multiple bell jar hanging rings 102, and the plurality of bell jar hanging rings 102 are evenly spaced along the circumference of the outer wall of the reducing furnace bell jar 1. The rotating base 201 on the frame 2 is used to fix the bell jar flange 101, and the ring connector 203 is used to fix the bell ring 102; in order to ensure the connection between the ring connector 203 and the rotating base 201, the rotating base 201 and the ring Support rods 202 are also supported between the connectors 203. At the same time, in order to maintain the stability between the rotating base 201 and the ring connector 203, there are at least two support rods 202, and a plurality of support rods 202 are arranged along the center of the ring connector 203. They are evenly spaced around the circumference.

In the actual use process, the bell jar flange 101 at the lower end of the reduction furnace bell jar 1 is fixed on the rotating base 201. At this time, the rotating base 201 seals the lower end of the reducing furnace bell jar 1, so that the inside of the reducing furnace bell jar 1 forms a seal. chamber, in order to send the solution into or out of the reduction furnace bell jar 1, the rotating base 201 is also provided with a through hole 205 for the solution to be sent out of the reduction furnace bell jar 1, in order to prevent the solution solution in the reduction furnace bell jar 1 from being insufficient. The solution overflows from the through-hole 205 in the case of half of the cover, and the through-hole 205 can be preferentially arranged at the center of the rotating base 201, so that the maximum liquid level of the solution in the reduction furnace bell jar 1 can reach the reduction furnace bell jar 1 The difference between the inner radius minus the radius of the through hole 205; meanwhile, the rotating base 201 is also provided with a feed pipe 206 extending into the bell jar 1 of the reduction furnace, so that the solution can be added to the bell jar of the reduction furnace through the feed pipe 206 within 1.

In the present invention, in order to avoid that the pipe connecting the feed pipe 206 of the reduction furnace bell jar 1 is shaken during the rotation process due to the eccentric installation of the feed pipe 206 on the rotating base 201, the aperture of the through hole 205 can also be enlarged, and the Feed pipe 206 is installed in the through hole 205, and in order to avoid feed pipe 206 to through hole 205 blocking, the outer wall diameter of feed pipe 206 is less than through hole 205 apertures, makes feed pipe 206 outer wall and through hole 205 hole walls There is a gap between them, so that the solution in the bell jar 1 of the reduction furnace can be discharged out of the bell jar 1 of the reduction furnace through the gap. In the present invention, since the feed pipe 206 is installed in the through hole 205, the through hole 205 cannot be blocked. Therefore, when the feed pipe 206 is installed, a plurality of feed pipes 205 can be fixed in the through hole 205. The reinforcing rod in the center fixes the feeding pipe 206 on multiple reinforcing rods, thereby realizing the fixed installation of the feeding pipe 206 .

When it is necessary to reclaim the coating on the inner wall of the reduction furnace bell 1, the horizontal frame 2 can be placed vertically first, and the reduction furnace bell 1 can be vertically hoisted by hoisting equipment. The bell jar flange 101 at the lower end of the cover 1 passes through the suspension ring connector 203, so that the reduction furnace bell jar 1 is placed on the rotating base 201, the bell jar suspension ring 102 is supported on the suspension ring connector 203, and the reduction furnace bell jar 1 is placed on the rotating base. The feed pipe 206 on the base 201 extends into the reduction furnace bell jar 1, and finally the bell jar flange 101 is fixed on the rotating base 201 with screws, and the bell jar ring 102 is fixed on the ring connector 203 with screws , the reduction furnace bell jar 1 is fixed on the horizontal frame 2.

Hoist the horizontal frame 2 with the reduction furnace bell 1 installed, so that the horizontal frame 2 with the reduction furnace bell 1 installed is horizontally placed and transmitted with the drive mechanism 3, not only realizing the reduction furnace bell 1 Horizontal installation, and realize the driving of the reduction furnace bell 1, so that the reduction furnace bell 1 can rotate when it is in the horizontal state, so that it can be used when the inner wall coating of the reduction furnace bell 1 is recovered.

As a further improvement of this embodiment, the feed pipe 206 is provided with a heater 207, the heater 207 can be an electric heater 207, the heater 207 can not only conduct the dissolving solution sent in through the feed pipe 206 Heating can also heat the internal environment of the bell jar 1 of the reduction furnace, so that the dissolution efficiency of the solution when dissolving the coating material is higher.

As a further improvement of this embodiment, the driving mechanism 3 includes an active driving structure and a driven driving structure, the active driving structure is a driving structure that actively drives the horizontal frame 2, and the driven driving structure is driven by the active driving structure. And make the drive structure of horizontal frame 2 driven drive, and active drive structure and driven drive structure are respectively positioned at the two ends of horizontal frame 2, make one end of horizontal frame 2 drive by active drive structure, horizontal The other end of the frame 2 is driven to rotate with the driving of the active drive structure, so that the rotation of the horizontal frame 2 is more stable. It should be noted here that, in this embodiment, there may be multiple driven driving structures. At this time, the multiple driven driving structures and the active driving structure are arranged at regular intervals along the axial direction of the horizontal frame 2. , not only enables the horizontal frame 2 to be sufficiently supported, but also ensures that the horizontal frame 2 is more stable when rotating.

As a further improvement of this embodiment, the rotating base 201 is circular, and the through hole 205 is located at the center of the rotating base 201, so that after the reduction furnace bell 1 is installed, at most the solution can be injected into the reduction furnace bell 1 The height of the liquid level is the radius of the inner wall of the reduction furnace bell jar 1 minus the radius of the through hole 205, so that the solution injected into the reduction furnace bell jar 1 can reach the maximum amount, so that the selection range of the amount of solution injected into the reduction furnace bell jar 1 Larger, it can use the least dissolving solution while ensuring the dissolving efficiency. The active driving structure includes a fixing part 301 and a driving part 302, the fixing frame can be directly fixed on the ground or on the base, the axis of the driving part 302 extends along the horizontal direction, and there are two driving parts 302, and the two driving parts 302 There is a certain distance between them. When the horizontal frame 2 is placed in a horizontal state, the outer circular surface of the rotating base 201 is jointly supported on the two driving parts 302. The rotation of the rotating base 201 and the driving member 302 is not affected while supporting the rotating base 201 .

In order to drive the rotating base 201 to rotate, a driving motor (not shown) for driving the driving member 302 to rotate is also installed on the fixing member 301. There is one driving motor, and the driving motor can drive any driving member 302 to rotate. Yes; at the same time, the output end of the driving motor can be directly connected to the wheel shaft of the driving part 302 through a coupling, and in order to reduce the rotating speed of the driving part 302, a speed reducer can also be provided so that the output end of the driving motor can be connected with the input end of the speed reducer to reduce the speed. The output end of the drive unit is connected to the wheel shaft of the drive part 302; of course, in the absence of a reducer, the drive motor can also be a variable frequency motor, and the speed of the drive motor can be adjusted by adjusting the frequency of the drive motor, thereby adjusting the speed of the drive part 302 .

As a further improvement of this embodiment, the driving part 302 and the rotating base 201 are provided with meshing teeth 204, that is, the driving part 302 is a small gear, the rotating base 201 is a large gear, and the meshing teeth 204 on the driving part 302 Mesh with the meshing teeth 204 on the rotating base 201, effectively avoid slipping between the driving member 302 and the rotating base 201, make the mutual rotation between the driving member 302 and the rotating base 201 more stable, and avoid installation on the horizontal frame 2 The reduction furnace bell jar 1 vibrates during the coating recovery process, so that the dissolution of the coating by the solution is guaranteed.

As a further improvement of this embodiment, the support rod 202 is a telescopic structure, and the support rod 202 can directly adopt automatic telescopic elements such as hydraulic rods, cylinders or electronic telescopic parts. The distance between the ring connectors 203 can be adjusted, so as to satisfy the installation of reduction furnace bell jars 1 of different heights, so that the auxiliary device can be used in a wider range.

As a further improvement of this embodiment, the ring connector 203 is ring-shaped, and the inner diameter of the ring connector 203 is larger than the diameter of the bell flange 101 on the reduction furnace bell 1 to ensure that the reduction furnace bell 1 is installed on the horizontal machine. The clock cover flange 101 on the frame 2 can pass through the ring connector 203 and close to the rotating base 201; meanwhile, because the inner diameter of the ring connector 203 is greater than the diameter of the bell flange 101, the bell ring on the reduction furnace bell 1 The length of 102 needs to be greater than the width of the bell jar flange 101 . Preferably, the extension end of the bell jar suspension ring 102 is flush with the outer circular surface of the suspension ring connector 203 . The driven drive structure includes a moving part 304 that can reciprocate along the length direction of the support rod 202. The moving direction of the moving part 304 is consistent with the telescopic direction of the supporting rod 202. When the reduction furnace bell 1 is installed, the movement of the moving part 304 The direction and moving distance are the same as the telescopic direction and telescopic distance of the support rod 202; two driven wheels 305 are also supported on the moving part 304, and the center of the circle of the ring connector 203 is the center of the circle, and the two driven wheels 305 are located at the center of the circle. on the ring formed by the center of the circle, so that the wheel surfaces of the two driven wheels 305 all cooperate with the outer circular surface of the ring connector 203, so that when the horizontal frame 2 is placed in a horizontal state, the outer circle of the ring connector 203 The surfaces are jointly supported on the two driven wheels 305, and through the cooperation of the outer surface of the driven wheel 305 and the outer surface of the ring connector 203, the support of the ring connector 203 is realized without affecting the connection between the driven wheel 305 and the ring connector 203. turn.

The driving part 302 is driven to rotate by the driving motor, and the outer surface of the driving part 302 is engaged with the rotating base 201, so that the driving part 302 drives the rotating base 201 to rotate while rotating, and because the ring connecting part 203 and the rotating base 201 pass through the support rod 202 connection, the ring connector 203 cooperates with the driven wheel 305, so that the rotating base 201 rotates while the ring connector 203 and the driving member 302 rotate relatively, so that the horizontal frame 2 and the reduction furnace installed on the horizontal frame 2 The bell jar 1 rotates synchronously, so that the solution injected into the reduction furnace bell jar 1 dissolves the coating.

As a further improvement of this embodiment, the driven driving structure further includes a guide rail 303, the length direction of the guide rail 303 is consistent with the axial direction of the support rod 202, and there is a slide groove on the guide rail 303, and the cross section of the slide groove is rectangular or ┻ type, the moving part 304 is a slider that can slide back and forth in the chute, the cross section of the moving part 304 is T-shaped, the moving part 304 can slide back and forth along the chute, in order to make the moving part 304 slide to the fixed position of the chute Can not continue to slide afterward, can also set screw on the movable part 304, after the movable part 304 slides to the fixed position, tighten the screw, make the screw against the guide rail 303, and when the movable part 304 needs to slide, loosen the screw Can. In this embodiment, the cross section of the guide rail 303 can also be "I" type. At this time, a T-shaped slot can be opened on the lower surface of the moving part 304, and the moving part 304 can be slid on the guide rail 303 through the T-shaped slot. At the same time, in order to prevent the moving part 304 from falling off from the guide rail 303, stoppers for restricting the moving part 304 can also be provided at both ends of the guide rail 303.

As a further improvement of this embodiment, the rotating base 201 and the ring connector 203 are also provided with multiple mounting hole groups, and the multiple mounting hole groups on the rotating base 201 are arranged at intervals along the radial direction of the rotating base 201, Each mounting hole group on the rotating base 201 includes mounting holes 208 arranged at intervals around the center circumference of the rotating base 201 , while multiple mounting hole groups on the ring connector 203 are arranged at intervals along the radial direction of the ring connector 203 Each installation hole group on the ring connector 203 includes installation holes 208 arranged at intervals along the central circumference of the ring connector 203 in the circumferential direction. Through the cooperation of the installation holes 208 provided on the rotating base 201 and the installation holes 208 provided on the suspension ring connector 203 , the reduction furnace bell jars 1 of different sizes can be installed on the horizontal frame 2 .

In order to avoid the large-size reduction furnace bell 1 being installed on the auxiliary device, the diameter of the bell flange 101 on the reduction furnace bell 1 is greater than the diameter of the circle formed by the mounting hole group near the center of the rotating base 201, resulting in reduction After the furnace bell 1 is installed on the auxiliary device, the solution sent into the reduction furnace bell 1 will directly flow out through the installation hole group near the center of the rotating base 201. Therefore, when the reduction furnace bell 1 is installed on the auxiliary device After installation, the rest of the mounting holes 208 on the rotating base 201 can be blocked with a wooden plugging head or a rubber plugging head; The mounting holes 208 are all sealed with wooden plugging heads or rubber plugging heads. When the reduction furnace bell 1 needs to be installed, the wooden plugging heads Or the rubber plugging head can be taken out. Therefore, a plurality of installation hole groups are provided on the rotating base 201, and the plurality of installation hole groups are arranged at intervals along the radial direction of the rotating base, so that the reduction furnace bell jars 1 of different sizes can be installed without affecting the solution solution. The dissolution of the metal coating on the inner wall of the bell jar 1 of the reduction furnace.

When the coating on the inner wall of the reduction furnace bell jar 1 needs to be rotated while being in a horizontal state before recovery, the reduction furnace bell jar 1 can be installed on an auxiliary device to make the reduction furnace bell jar 1 Rotate in the horizontal state, as follows:

The horizontal frame 2 is hoisted by the hoisting tool, so that the horizontal frame 2 is separated from the driving mechanism 3 and placed vertically. Then, the telescopic rod shrinks, and the telescopic rod drives the ring connector 203 to approach the rotating base 201, and the hoisting tool is used. The reduction furnace bell 1 is hoisted. During the hoisting process, the bell flange 101 at the lower end of the hoisted reduction furnace bell 1 passes through the lifting ring connector 203 and is placed downward on the rotating base 201, and the The central axis of the reduction furnace bell 1 is on the same line as the center of the rotating base 201, and when the reduction furnace bell 1 is placed on the rotating base 201, the feed pipe 206 installed in the through hole 205 extends into the reduction furnace bell Inside the cover 1, then, the bell flange 101 and the rotating base 201 are fixed with screws, the telescopic rod is extended, and the telescopic rod drives the ring connector 203 close to the bell ring 102, and the ring connector 203 is close to the bell ring 102 , the telescopic rod stops extending, and the bell jar suspension ring 102 and the suspension ring connector 203 are fixed with screws, so that the reduction furnace bell jar 1 is fixed on the horizontal frame 2.

Loosen the moving part 304, manually push the moving part 304 to slide along the track, when the distance between the driven wheel 305 on the moving part 304 and the driving part 302 on the fixed part 301 is equal to the distance between the rotating base 201 and the ring connecting part 203 , the moving part 304 and the guide rail 303 are fixed; the horizontal frame 2 on which the reduction furnace bell jar 1 is installed is laid down horizontally by the hoisting tool, and the horizontal frame 2 put down is hoisted by the hoisting tool, During the hoisting process, the rotating base 201 is placed on the two driving parts 302 together, the ring connector 203 is placed on the two driven wheels 305 together, so that the horizontal frame 2 fixed with the bell jar 1 of the reduction furnace is placed on the On the drive mechanism 3.

The solution is sent into the reduction furnace bell jar 1 through the feed pipe 206. After the solution solution for dissolving the coating is sent into the reduction furnace bell jar 1 through the feed pipe 206, the drive motor is started, and the drive motor drives the A driving member 302 rotates, and the driving member 302 engages with the rotating base 201, so that the driving member 302 drives the rotating base 201 to rotate when rotating, and cooperates with the driven wheel 305 through the ring connector 203, so that the horizontal frame 2 and the The reduction furnace bell jar 1 installed on the horizontal frame 2 rotates synchronously, so that the reduction furnace bell jar 1 rotates in a horizontal state. Through the rotation of the reduction furnace bell jar 1, the solution contacts the coating, and the solution is The coating is dissolved to realize the recovery of the coating; and during the process of transporting the solution and dissolving the coating with the solution, the heater 207 heats the solution and the internal environment of the bell jar 1 of the reduction furnace.

When the solution needs to be discharged from the reduction furnace bell jar 1 after the coating is dissolved, the hoisting tool lifts the horizontal frame 2 to make it in a vertical state. At this time, the generated coating in the reduction furnace bell jar 1 The metal salt solution can be discharged through the gap between the hole wall of the through hole 205 and the feed pipe 206, and the heater 207 stops heating.

In this embodiment, in order to make the operation easier, a flip frame can also be set, and the fixing member 301 and the track are all installed on the flip frame, and in order to avoid the horizontal frame 2 from rotating the base during the flipping process by the flip frame 201 is disengaged from the driving part 302, the suspension ring connector 203 is disengaged from the driven wheel 305, and a binding structure that is used to fasten and untie the horizontal frame 2 is fixed on the flip frame, so that the flip frame is in the opposite horizontal position. The binding structure can bind the horizontal frame 2 to the overturning frame during the overturning process of the frame 2, so that the reduction furnace bell 1 needs to be installed on the horizontal frame 2 or the reduction furnace bell 1 needs to be removed from the horizontal frame 2. When the horizontal frame 2 is removed or the coating metal salt solution in the reduction furnace bell 1 needs to be discharged, the turning frame can turn the horizontal frame 2 to make it in an upright state, so that the reduction furnace bell 1 It is not necessary to hoist the horizontal frame 2 from the driving mechanism 3 during the installation or removal process, which makes the installation and removal of the reduction furnace bell 1 more convenient.

Example 4

On the basis of the recovery method in embodiment 1 and the auxiliary device in embodiment 2, in order to enable the solution sent into the reduction furnace bell jar 1 to be recycled, this embodiment 3 also provides a reduction furnace Bell jar coating reclaims solution circulation system, except including as described in embodiment 2 auxiliary equipment, also comprises solution container 4 and coating metal salt collector 5, and solution container 4 is used for dissolving coating The solution is stored, and the coating metal salt collector 5 is used to collect the coating metal salt solution formed after the coating is dissolved. Specifically, the outlet of the solution container 4 is connected to the inlet of the feed pipe 206. Due to the reduction The furnace bell 1 needs to be rotated after being installed on the horizontal frame 2. Therefore, in order to prevent the horizontal frame 2 from being entangled with the pipeline connecting the feed pipe 206 and the solution container 4 during the rotation of the reduction furnace bell 1 driven by the horizontal frame 2, The outlet end of the pipeline is connected to the inlet end of the feed pipe 206 through a rotary joint; similarly, in order to prevent the horizontal frame 2 from connecting the through hole 205 and the coating metal salt collector 5 during the rotation of the reduction furnace bell 1 The pipeline is wound, and the inlet end of the pipeline is also connected with the through hole 205 through a rotary joint.

When the reduction furnace bell jar 1 is installed on the horizontal frame 2 and the coating needs to be dissolved, the solution in the solution container 4 is sent into the reduction furnace bell jar 1 through the feed pipe 206. When the amount of the lysate in the reducing furnace bell jar 1 reaches the requirement, stop delivering the lysate to the reducing furnace bell jar 1; start the driving motor, and the driving motor drives one of the driving parts 302 to rotate, and the rotating base 201 and the driving part 302 Engage, so that the driving member 302 drives the rotating base 201 to rotate when rotating, and through the cooperation of the suspension ring connector 203 and the driven wheel 305, the horizontal frame 2 and the reduction furnace bell 1 installed on the horizontal frame 2 The synchronous rotation makes the reduction furnace bell jar 1 rotate in a horizontal state, through the rotation of the reduction furnace bell jar 1, the solution contacts the coating, and the solution dissolves the coating.

When the solution and the coating are completely dissolved to generate a coating metal salt solution, the hoisting tool lifts the horizontal frame 2 to make it in a vertical state. At this time, the generated coating metal in the reduction furnace bell jar 1 The salt solution can be discharged into the coating metal salt collector 5 through the gap between the hole wall of the through hole 205 and the feed pipe 206, completing the recovery of the coating.

As a further improvement of this embodiment, the outlet end of the coating metal salt collector 5 is also connected to a pyrolysis reactor 6, and the pyrolysis reactor 6 is used to evaporate and crystallize the collected coating metal salt solution and After crystallization, a pyrolysis reaction is carried out to obtain metals and gases. The outlet end of the pyrolysis reactor 6 is also connected to a gas collector 7, which is used to collect the gas generated during the pyrolysis reaction. By collecting the gas and the metal separately, the gas can be recycled later, and the metal can continue to prepare the coating on the inner wall of the bell jar 1 of the polysilicon reduction furnace, thereby realizing the recovery and closed-loop utilization of the coating.

As a further improvement of this embodiment, the gas collector 7 is also connected to the first delivery pipeline that transports the gas generated by pyrolysis to the solution container 4, so that the gas obtained later can be dissolved in the solution It continues to be used for coating recovery, realizing the recovery and closed-loop utilization of the solution.

As a further improvement of this embodiment, since the coating and the solution react in addition to generating the coating metal salt solution, gas will also be generated, therefore, the coating metal salt collector 5 and the gas collector 7 are also connected There is a second delivery pipeline (not shown in the figure), which can directly deliver the gas generated during the coating dissolution process from the coating metal salt collector 5 to the gas collector 7 .

As a further improvement of this embodiment, since the solution and the coating metal need to maintain the pressure in the reduction furnace bell jar 1 during the reaction process, the solution container 4 is also connected with a replacement gas container 8, and the replacement gas container 8 is filled with nitrogen gas used to maintain the pressure in the reduction furnace bell jar 1, and by connecting it in parallel to the outlet end of the solution container 4, the nitrogen gas in the replacement gas container 8 is sent into the reduction furnace bell jar 1 through the feed pipe 206 In the reduction furnace bell jar 1, the gas generated during the reaction process between the solution and the coating metal in the reduction furnace bell jar 1 is sequentially sent into the metal salt collector 5 and the gas collector 7 through the through hole 205, and finally replaced into the gas collector 7 .

When the system is used in conjunction with auxiliary devices, the specific working principle is as follows:

When the coating on the inner wall of the reduction furnace bell jar 1 needs to be recovered, the reduction furnace bell jar 1 is installed first, and the installation method of the reduction furnace bell jar 1 is as follows:

The horizontal frame 2 is hoisted by the hoisting tool, so that the horizontal frame 2 is separated from the driving mechanism 3 and placed vertically. Then, the telescopic rod shrinks, and the telescopic rod drives the ring connector 203 to approach the rotating base 201, and the hoisting tool is used. The reduction furnace bell 1 is hoisted. During the hoisting process, the bell flange 101 at the lower end of the hoisted reduction furnace bell 1 passes through the lifting ring connector 203 and is placed downward on the rotating base 201, and the The central axis of the reduction furnace bell 1 is on the same line as the center of the rotating base 201, and when the reduction furnace bell 1 is placed on the rotating base 201, the feed pipe 206 installed in the through hole 205 extends into the reduction furnace bell Inside the cover 1, then, the bell flange 101 and the rotating base 201 are fixed with screws, the telescopic rod is extended, and the telescopic rod drives the ring connector 203 close to the bell ring 102, and the ring connector 203 is close to the bell ring 102 , the telescopic rod stops extending, and the bell jar suspension ring 102 and the suspension ring connector 203 are fixed with screws, so that the reduction furnace bell jar 1 is fixed on the horizontal frame 2.

Loosen the moving part 304, manually push the moving part 304 to slide along the track, when the distance between the driven wheel 305 on the moving part 304 and the driving part 302 on the fixed part 301 is equal to the distance between the rotating base 201 and the ring connecting part 203 , the moving part 304 and the guide rail 303 are fixed; the horizontal frame 2 on which the reduction furnace bell jar 1 is installed is laid down horizontally by the hoisting tool, and the horizontal frame 2 put down is hoisted by the hoisting tool, During the hoisting process, the rotating base 201 is placed on the two driving parts 302 together, the ring connector 203 is placed on the two driven wheels 305 together, so that the horizontal frame 2 fixed with the bell jar 1 of the reduction furnace is placed on the On the drive mechanism 3.

Then, the coating on the inner wall of the bell jar of the former furnace is dissolved and recovered, and the dissolution and recovery methods are as follows:

The outlet end of the solution container 4 is connected with the inlet end of the feed pipe 206 by a rotary joint and the pipeline, and the through hole 205 is connected with the coating metal salt collector 5 inlet end by a rotary joint and the pipeline, so that the liquid in the solution container 4 The solution is sent into the reduction furnace bell jar 1 through the feed pipe 206, and when the amount of the solution sent into the reduction furnace bell jar 1 reaches the requirement, the delivery of the solution to the reduction furnace bell jar 1 is stopped; Motor, the driving motor drives one of the driving parts 302 to rotate, and the driving part 302 is engaged with the rotating base 201, so that the driving part 302 drives the rotating base 201 to rotate when rotating, and through the cooperation of the ring connector 203 and the driven wheel 305, so that The horizontal frame 2 and the reduction furnace bell 1 installed on the horizontal frame 2 rotate synchronously, so that the reduction furnace bell 1 rotates in a horizontal state, and through the rotation of the reduction furnace bell 1, the solution and the coating The layers are in contact, and the solution dissolves the coating.

Then, the replacement gas container 8 is opened, and the nitrogen in the replacement gas container 8 is sent into the reduction furnace bell jar 1 through the feed pipe 206, so that the gas generated by the solution in the process of dissolving the coating metal is discharged through the through hole 205 and enters In the coating metal salt collector 5, the gas entering the coating metal salt collector 5 is sent into the gas collector 7 through the second delivery pipeline, and finally the gas generated by the solution in the process of dissolving the coating metal Displaced to gas collector 7.

When the solution and the coating are completely dissolved to generate a coating metal salt solution, the hoisting tool lifts the horizontal frame 2 so that the horizontal frame 2 is in a vertical state. The coating metal salt solution and gas can be discharged through the gap between the hole wall of the through hole 205 and the feed pipe 206 and sent into the coating metal salt collector 5, and the gas entering the coating metal salt collector 5 passes through The delivery pipeline is directly sent into the gas collector 7, and the coating metal salt solution entering the coating metal salt collector 5 is sent into the pyrolysis reactor 6 for pyrolysis, and the coating metal salt solution is pyrolyzed to generate metal And gas, the metal that produces directly sends pyrolysis reactor 6, and the gas that generates is sent in the gas collector 7, and the gas that is collected in the gas collector 7 is sent in the solution container 4, and the gas in the solution container 4 The dissolved liquid absorbs the gas to obtain a new dissolved liquid, which is used for the next coating recovery.

In the description of this specification, descriptions referring to the terms "one embodiment/mode", "some embodiments/modes", "examples", "specific examples", or "some examples" mean that the embodiments/modes are combined The specific features, structures, materials or characteristics described in or examples are included in at least one embodiment/mode or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment/mode or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments/modes or examples in an appropriate manner. In addition, those skilled in the art may combine and combine different embodiments/modes or examples and features of different embodiments/modes or examples described in this specification without conflicting with each other.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present application, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

It should be understood by those skilled in the art that the above embodiments are only for clearly illustrating the present invention, rather than limiting the scope of the present invention. For those skilled in the art, other changes or modifications can be made on the basis of the above disclosure, and these changes or modifications are still within the scope of the present invention.

Claims (17)

1. The method for recovering the coating of the reduction furnace bell jar is characterized by comprising the following steps:

delivering a dissolving solution for dissolving the inner wall coating of the reduction furnace bell jar (1) into the reduction furnace bell jar (1), dissolving the inner wall coating of the reduction furnace bell jar (1) by the dissolving solution, and generating a coating metal salt solution, gas and H after dissolving ₂ O is sent out of a bell jar (1) of the reduction furnace;

and (3) carrying out evaporative crystallization on the generated coating metal salt solution, pyrolyzing the crystallized coating metal salt solution, and generating metal and gas after the coating metal salt is pyrolyzed.

2. The method for recovering a bell jar coating of a reducing furnace according to claim 1, wherein the gas generated by pyrolysis is recovered and dissolved in water to prepare a solution.

3. The method for recovering a bell jar coating of a reduction furnace according to claim 1, wherein a pyrolysis temperature of the coating metal salt is 400 to 1200 ℃.

4. A method for recovering a coating on a reduction furnace bell jar according to claim 1, wherein the reduction furnace bell jar (1) is horizontally placed; preferably, the reduction furnace bell jar (1) rotates synchronously during the dissolving process of the solution on the inner wall coating of the reduction furnace bell jar (1).

5. The method for recovering the bell jar coating of the reducing furnace according to claim 1, wherein the dissolving solution is one or more of hydrochloric acid and nitric acid; preferably, the concentration of the dissolving solution is 1wt% -70 wt%; preferably, the volume of the solution fed into the reduction furnace bell jar (1) is not more than half of the internal volume of the reduction furnace bell jar (1); preferably, the volume of the solution to be charged into the reduction furnace bell jar (1) is 1/4 to 1/2 of the internal volume of the reduction furnace bell jar (1).

6. The method for recycling the coating on the bell jar of the reduction furnace according to claim 1, wherein the dissolving solution heats the interior of the bell jar (1) of the reduction furnace in the process of dissolving the coating on the inner wall of the bell jar (1) of the reduction furnace; preferably, the heating temperature in the reduction furnace bell jar (1) is 30 to 200 ℃, and the nitrogen pressure in the reduction furnace bell jar (1) is maintained at 0.1 to 1MPa.

7. The utility model provides a reduction furnace bell jar auxiliary device for coating recovery, includes horizontal frame (2) and drive horizontal frame (2) rotatory actuating mechanism (3), horizontal frame (2) are including rotating base (201) and the rings connecting piece (203) of fixed bell jar rings (102) that are used for fixed bell jar flange (101), and support between rotating base (201) and rings connecting piece (203) have a plurality of bracing pieces (202), through-hole (205) have still been seted up on rotating base (201), and still be provided with inlet pipe (206) on rotating base (201).

8. The auxiliary device for recovering a bell jar coating of a reduction furnace according to claim 12, wherein a heater (207) is provided on the feed pipe (206).

9. The auxiliary device for recovering a coating on a reduction furnace bell jar according to claim 12, characterized in that the driving mechanism (3) comprises a driving structure and a driven driving structure, and the driving structure and the driven driving structure are respectively positioned at two ends of the horizontal frame (2).

10. The auxiliary device for recovering the bell jar coating of the reducing furnace of claim 14, wherein the rotating base (201) is circular, the active driving structure comprises two driving members (302) and a fixing member (301), the two driving members (302) are rotatably supported on the fixing member (301), the rotating base (201) is commonly supported on the two driving members (302), and the fixing member (301) is further provided with a driving motor for driving any driving member (302) to rotate.

11. The auxiliary device for recovering a coating of a reduction furnace bell jar according to claim 14, wherein the support rod (202) has a telescopic structure.

12. The auxiliary device for recovering the coating of the reduction furnace bell jar as claimed in claim 17, wherein the lifting ring connecting piece (203) is annular, the driven driving structure comprises a moving piece (304) capable of reciprocating along the length direction of the supporting rod (202), the moving piece (304) is supported with a rotatable driven wheel (305), the number of the driven wheels (305) is two, and the lifting ring connecting piece (203) is supported on the two driven wheels (305) together; preferably, the driven driving structure further comprises a guide rail (303), and the moving member (304) is a sliding block which slides on the guide rail (303) in a reciprocating manner.

13. The auxiliary device for recovering the coating of the reduction furnace bell jar according to claim 1, wherein a plurality of mounting hole groups are further formed on the rotating base (201) and the hanging ring connecting piece (203), the plurality of mounting hole groups are arranged at intervals along the radial direction of the rotating base (201), and each mounting hole group comprises mounting holes (208) which are arranged at intervals along the circumferential direction of the center circumference of the rotating base (201).

14. A dissolution liquid circulation system for recovering a bell jar coating of a reduction furnace, comprising the auxiliary apparatus as claimed in any one of claims 12 to 20, further comprising a dissolution liquid container (4) connected to the feed pipe (206), and a coating metal salt collector (5) connected to the through hole (205).

15. The dissolving solution circulating system for recovering the bell jar coating of the reducing furnace as set forth in claim 21, wherein the outlet end of the coating metal salt collector (5) is further connected with a pyrolysis reactor (6), and the outlet end of the pyrolysis reactor (6) is further connected with a gas collector (7) for collecting gas generated by pyrolysis.

16. The dissolution liquid circulation system for recovering a bell jar coating of a reduction furnace according to claim 22, wherein a first delivery pipe for delivering gas generated by pyrolysis into the dissolution liquid container (4) is further connected to the gas collector (7); preferably, a second conveying pipeline for conveying gas generated in the coating dissolving process is further connected between the coating metal salt collector (5) and the gas collector (7).

17. The dissolution liquid circulation system for recovering a bell jar coating of a reduction furnace according to claim 21, wherein a replacement gas container (8) for replacing gas therein is further connected to the dissolution liquid container (4).

Images