CN115576121A - Thermo-optic phase shifter, Marzeng interferometer and optical computing network - Google Patents

Abstract

The invention discloses a thermo-optic phase shifter, a Mazeng interferometer and an optical computing network. The thermo-optic phase shifter includes a lithium niobate waveguide layer, a cladding layer, a heating element and a thermal insulation tank; the cladding layer covers the periphery of the lithium niobate waveguide layer, and the refractive index of the cladding layer is smaller than that of the lithium niobate waveguide layer. rate; the heating element is arranged on the cladding layer; the heat insulation groove is arranged on the cladding layer, and the heat insulation groove is located on the side of the heating element and the lithium niobate waveguide layer. By using the heating element to heat the lithium niobate waveguide layer, the temperature of the lithium niobate waveguide layer can be increased, and then the refractive index of the lithium niobate waveguide layer can be adjusted to realize the adjustment of the phase of the light wave transmitted in the thermo-optic phase shifter. By arranging the heat insulation groove on the cladding layer, and setting the heat insulation groove on the side of the heating element and the lithium niobate waveguide layer, the heat passing through the heating element and the lithium niobate waveguide layer heat insulation groove can be effectively reduced, and the The ability to bind heat can reduce thermal crosstalk to other components.

Description

Thermo-optic phase shifter, Marzeng interferometer and optical computing network

technical field

The invention relates to the field of integrated photons, in particular to a thermo-optic phase shifter, a Mazeng interferometer and an optical computing network.

Background technique

A Mach–Zehnder interferometer (MZI or Mazeng interferometer for short) is a commonly used interferometer that can be used to observe the light wave emitted from a single light source after it is split into two waveguides, passing through different paths and media. The resulting relative phase shift changes.

In the Mazeng interferometer, after the input light wave passes through a section of optical path, it is first divided into two light waves at a Y branch, and the two light waves are respectively transmitted through two waveguides, and then the two light waves reach the second Y branch, and the two light waves will synthesize a light wave.

In view of the manufacturing process of the two waveguides, errors will inevitably occur after the light waves propagate through the two waveguides of the Mazeng interferometer, resulting in an unexpected phase difference between the two light waves reaching the second Y branch.

Contents of the invention

The technical problem to be solved by the present invention is to provide a thermal-optic phase shifter, Mazeng Interferometers and Optical Computing Networks.

The present invention solves the above technical problems through the following technical solutions:

A thermo-optic phase shifter, the thermo-optic phase shifter includes: a lithium niobate waveguide layer, a cladding layer, a heating element and a heat insulation groove, the lithium niobate waveguide layer is used to transmit light waves; the cladding A layer covers the periphery of the lithium niobate waveguide layer, and the refractive index of the cladding layer is smaller than that of the lithium niobate waveguide layer; the heating element is arranged on the cladding layer, and the heating element is It is set to heat the lithium niobate waveguide layer, so that the lithium niobate waveguide layer adjusts the phase of the light wave; the heat insulation groove is arranged on the cladding layer, and the heat insulation groove is located on the heating element and the sides of the lithium niobate waveguide layer.

In this solution, by adopting the above structure, by using the heating element to heat the lithium niobate waveguide layer, the temperature of the lithium niobate waveguide layer can be increased, and then the refractive index of the lithium niobate waveguide layer can be adjusted to realize the thermal-optic phase shift. The adjustment of the phase of the light wave transmitted in the device. By arranging the heat insulation groove on the cladding layer, and setting the heat insulation groove on the side of the heating element and the lithium niobate waveguide layer, the heat passing through the heating element and the lithium niobate waveguide layer heat insulation groove can be effectively reduced, and the The ability to bind heat can reduce thermal crosstalk to other components. The Mazeng interferometer using the thermo-optic phase shifter can effectively avoid the unexpected phase difference when the light wave reaches the second Y branch.

Preferably, the thermal insulation groove includes a left groove and a right groove oppositely arranged, and the left groove and the right groove are respectively arranged on both sides of the lithium niobate waveguide layer.

In this scheme, by adopting the above structure, the left Cao and the right groove are respectively arranged on both sides of the lithium niobate waveguide layer, so that the heat of the lithium niobate waveguide layer is bound between the left Cao and the right groove, It can improve the heat binding capacity, reduce heat loss, and reduce thermal crosstalk to other components.

Preferably, the heat insulation groove also includes several bottom grooves arranged at intervals, the bottom grooves communicate with the left side groove and the right side groove respectively, and the bottom grooves are connected with the lithium niobate waveguide layer The sides away from the heating element are spaced apart.

In this solution, by adopting the above structure, the bottom groove is connected with the left groove and the right groove respectively, so as to surround the three sides of the lithium niobate waveguide layer, which can further improve the heat binding ability and further reduce the heat The loss can further reduce the thermal crosstalk caused by other components.

Preferably, the cladding layer includes an upper cladding layer and a lower cladding layer, the lithium niobate waveguide layer is arranged between the upper cladding layer and the lower cladding layer, and the heating element is provided On the side of the upper cladding layer away from the lithium niobate waveguide layer, the left groove and the right groove penetrate the upper cladding layer and extend downward to the lower cladding layer, the The bottom groove is arranged on the lower cladding layer.

In this solution, by adopting the above structure, the cladding layer includes an upper cladding layer and a lower cladding layer, which facilitates the manufacture of thermo-optical phase shifters, and can better surround the lithium niobate waveguide layer, and better integrate Light waves are confined to the lithium niobate waveguide layer.

Preferably, the heating element is arranged between the left slot and the right slot.

In this solution, by adopting the above structure, the heat generated by the heating element can be limited between the left groove and the right groove, thereby reducing heat loss.

Preferably, the lithium niobate waveguide layer includes a base layer and a raised layer, the raised layer is arranged on the side of the base layer, and the heat-affected zone of the heating element covers the raised layer.

In this solution, by adopting the above structure, the lithium niobate waveguide layer is set to include the base layer and the raised layer, which can effectively reduce the loss in the process of light wave propagation. The heat-affected zone of the heating element covers the raised layer, so that the heat generated by the heating element can be transmitted to the raised layer faster, thereby adjusting the light wave faster.

Preferably, the lithium niobate waveguide layer is arranged along a straight line or a curve.

In this solution, by adopting the above structure, the lithium niobate waveguide layer arranged along the straight line is easy to manufacture, and can reduce the loss of light waves during propagation.

The lithium niobate waveguide layer arranged along the curve can increase the length of the lithium niobate waveguide layer, thereby reducing the requirement on the heating element.

Preferably, the lithium niobate waveguide layer includes several linear waveguide sections and curved waveguide sections connected in sequence, one of the linear waveguide sections and one of the curved waveguide sections constitutes a basic section, and several of the basic sections are reciprocally arranged at intervals .

In this scheme, by adopting the above structure, several basic sections are reciprocated and spaced, which can effectively increase the length of the lithium niobate waveguide layer and limit the lithium niobate waveguide layer to a smaller area, thereby facilitating the heating of the niobate Heating the lithium-acid waveguide layer can reduce the phase shift power, and can also achieve stable output of light wave signals with a small phase shift power.

A Marzeng interferometer, comprising the thermo-optic phase shifter as described above.

In this solution, by adopting the above structure, the Mazeng interferometer can use the thermo-optic phase shifter to adjust the phase of the internal light wave, so that the light wave does not produce a phase difference or a preset phase when it reaches the second Y branch Poor, can improve the accuracy of the Marzeng interferometer, and can also reduce the thermal crosstalk between different waveguides in the Marzeng interferometer.

On the basis of conforming to common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain preferred examples of the present invention.

The positive progress effect of the present invention is:

In the invention, the temperature of the lithium niobate waveguide layer can be increased by using the heating element to heat the lithium niobate waveguide layer, and then the refractive index of the lithium niobate waveguide layer can be adjusted to realize the adjustment of the phase of the light wave transmitted in the thermo-optic phase shifter . By arranging the heat insulation groove on the cladding layer, and setting the heat insulation groove on the side of the heating element and the lithium niobate waveguide layer, the heat passing through the heating element and the lithium niobate waveguide layer heat insulation groove can be effectively reduced, and the The ability to bind heat can reduce thermal crosstalk to other components. The Mazeng interferometer using the thermo-optic phase shifter can effectively avoid the unexpected phase difference when the light wave reaches the second Y branch.

Description of drawings

FIG. 1 is a schematic diagram of the first Marzeng interferometer in Embodiment 1 of the present invention.

FIG. 2 is a schematic diagram of a thermo-optic phase shifter in the Marzen interferometer in FIG. 1 .

Fig. 3 is a schematic cross-sectional view of the thermo-optic phase shifter in the Marzen interferometer of Fig. 1 .

FIG. 4 is a schematic diagram of the second Marzeng interferometer in Embodiment 1 of the present invention.

FIG. 5 is a schematic cross-sectional view of the thermo-optic phase shifter in the Marzen interferometer in FIG. 4 .

FIG. 6 is a schematic cross-sectional view of another thermo-optic phase shifter in the Marzen interferometer of FIG. 4 .

Fig. 7 is a schematic diagram of the third Mazeng interferometer in Embodiment 1 of the present invention.

FIG. 8 is a schematic diagram of the thermo-optic phase shifter in the Mazeng interferometer in FIG. 7 .

FIG. 9 is a schematic cross-sectional view of the thermo-optic phase shifter in the Mazeng interferometer in FIG. 7 .

FIG. 10 is a schematic diagram of the fourth Mazeng interferometer in Embodiment 1 of the present invention.

Fig. 11 is a schematic diagram of the fifth Mazeng interferometer in Embodiment 1 of the present invention.

FIG. 12 is a structural schematic diagram of a cross-section of a waveguide joint in Embodiment 2 of the present invention.

FIG. 13 is a structural schematic diagram of a cross-section of the thermo-optic phase shifter in the waveguide joint of FIG. 12 .

FIG. 14 is a structural schematic diagram of another cross-section of the thermo-optic phase shifter in FIG. 13 .

FIG. 15 is a schematic diagram of the variation of Ppi of the thermo-optic phase shifter in FIG. 13 with the thickness of amorphous silicon.

Explanation of reference signs:

Marzen Interferometer 900

Beam splitter 91

Combiner 92

Insulation tank 80

left slot 81

Right slot 82

Bottom trough 83

Straight waveguide section 71

Curved waveguide section 72

First rotation segment 73

Second rotation segment 74

Grassroots 75

raised layer 76

Waveguide Connector 100

Waveguide section 11

Transition 12

Transition Compression Layer 121

Thermo-optic phase shifter 200

waveguide layer 21

Lithium niobate waveguide layer 211

Compression layer 22

Amorphous silicon layer 221

Heating element 23

cladding 24

Upper cladding 241

Lower cladding 242

Substrate 25

Additional layer 26

detailed description

In the following, the present invention will be more clearly and completely described by means of embodiments in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the embodiments.

Example 1

As shown in FIGS. 1-11 , this embodiment includes a thermo-optic phase shifter 200 , a Marzent interferometer 900 and an optical computing network. The Marzen interferometer 900 may include one or two thermo-optic phase shifters 200 , and the optical computing network may include multiple Marzen interferometers 900 .

The optical computing network includes a Marzen interferometer 900 as described below. The optical computing network may specifically include an MZI (Mazeng interferometer 900 ) basic unit composed of a thermo-optical phase shifter 200 as follows. Specifically, the optical computing network may further include: an optical input unit, an MZI unit for phase modulation and intensity modulation based on the thermo-optical phase shifter 200, and an optical receiving and detecting unit. The output light of the optical input unit is injected into the optical computing network, and the light wave passes through the thermo-optic phase shifter 200 to form an additional phase difference, and then interferes with another light wave of the MZI, thereby forming the intensity modulation of the light wave, which passes through the optical network step by step to realize vector Matrix multiplication, and to achieve the purpose of calculation.

In FIGS. 1-3 , a specific Mazeng interferometer 900 and a thermo-optic phase shifter 200 are shown in the figure, and the Mazeng interferometer 900 includes the thermo-optic phase shifter 200 as follows. The Mazeng interferometer 900 can use the thermo-optic phase shifter 200 to adjust the phase of the internal light wave, so that the light wave does not generate a phase difference or a preset phase difference when it reaches the second Y branch, which can improve the Mazeng interferometer. 900 accuracy.

In FIG. 1 , the first Y branch can also be called a beam splitter 91 , and the second Y branch can also be called a beam combiner 92 . After passing through the beam splitter 91, the light waves become two beams of light waves, and the two beams of light waves respectively enter the beam combiner 92 along different optical paths to be output. In two different optical paths, a thermo-optic phase shifter 200 can be installed in one or both of them, and the thermo-optic phase shifter 200 can adjust the phase of the light waves so that the phases of the two light waves are the same or produce a desired phase Difference.

As shown in Figures 2-3, a thermo-optic phase shifter 200 is shown in the figure, and the thermo-optic phase shifter 200 includes: a lithium niobate waveguide layer 211, a heating element 23, and the lithium niobate waveguide layer 211 is used for transmission Light wave; the heating element 23 is set to heat the lithium niobate waveguide layer 211 so that the lithium niobate waveguide layer 211 adjusts the phase of the light wave. By using the heating element 23 to heat the lithium niobate waveguide layer 211, the temperature of the lithium niobate waveguide layer 211 can be increased, and then the refractive index of the lithium niobate waveguide layer 211 can be adjusted to realize the transmission of light waves in the thermo-optic phase shifter 200. phase adjustment. The Mazeng interferometer 900 using the thermo-optic phase shifter 200 can effectively avoid unexpected phase difference when the light wave reaches the second Y branch.

The lithium niobate waveguide layer 211 includes a base layer 75 and a raised layer 76 , and the raised layer 76 is disposed on a side of the base layer 75 . Setting the lithium niobate waveguide layer 211 to include the base layer 75 and the raised layer 76 can effectively reduce the loss during the propagation of light waves.

The heat-affected zone of the heating element 23 covers the raised layer 76 . The heat generated by the heating element 23 can be conducted to the raised layer 76 more quickly, so that the light wave can be adjusted more quickly.

The heating element 23 is arranged along the extending direction of the lithium niobate waveguide layer 211 , and the heating element 23 is arranged symmetrically with respect to the center line of the lithium niobate waveguide layer 211 . The heat-affected zone formed by the heating element 23 can better heat the lithium niobate waveguide layer 211, so as to adjust the light wave faster.

In FIG. 2 , the lithium niobate waveguide layer 211 is arranged along a straight line. The lithium niobate waveguide layer 211 arranged along a straight line is easy to manufacture and can reduce the loss of light waves during propagation.

In other embodiments, the lithium niobate waveguide layer 211 may be arranged along a curve. The lithium niobate waveguide layer 211 arranged along the curve can increase the length of the lithium niobate waveguide layer 211 , thereby reducing the power demand for the heating element 23 .

The thermo-optic phase shifter 200 further includes a cladding layer 24 covering the periphery of the lithium niobate waveguide layer 211 , and the refractive index of the cladding layer 24 is smaller than that of the lithium niobate waveguide layer 211 . The lithium niobate waveguide layer 211 is surrounded by the cladding layer 24 with a smaller refractive index, which can better confine light waves to the lithium niobate waveguide layer 211 , prevent light waves from escaping, and reduce light wave loss.

The cladding layer 24 includes an upper cladding layer 241 and a lower cladding layer 242, the lithium niobate waveguide layer 211 is arranged between the upper cladding layer 241 and the lower cladding layer 242, and the heating element 23 is arranged on the upper cladding layer 241 away from The side surface of the lithium niobate waveguide layer 211 . The cladding layer 24 includes an upper cladding layer 241 and a lower cladding layer 242, which is convenient for the manufacture of the thermo-optic phase shifter 200, and can better surround the lithium niobate waveguide layer 211, and better confine the light wave to the niobate Lithium waveguide layer 211 .

In this embodiment, the cladding layer 24 may specifically include an upper cladding layer 241 and a lower cladding layer 242, a cavity is formed between the upper cladding layer 241 and the lower cladding layer 242, and the lithium niobate waveguide layer 211 is disposed on inside the cavity.

The cladding layer 24 of the thermo-optic phase shifter 200 includes one of silicon dioxide and silicon oxynitride, or other polymer optical cladding materials. The cladding layer 24 in this embodiment is PECVD silicon dioxide (that is, silicon dioxide produced by plasma enhanced chemical vapor deposition), with a thickness of about 1 μm. In other embodiments, the material of the cladding layer 24 may be other materials.

The heating element 23 is disposed on the outer surface of the cladding layer 24 , and the heating element 23 heats the lithium niobate waveguide layer 211 through the cladding layer 24 . The heating element 23 is arranged on the outer surface of the cladding layer 24 , which can avoid the escape of light waves caused by the heating element 23 and facilitate the manufacture of the thermo-optic phase shifter 200 . The closer the heating element 23 is, the greater its absorption of light waves is, so the heating element 23 should not be laid directly on the compression layer 22. The cladding layer 24 increases the distance between the heating element 23 and the compression layer 22, which can prevent light waves from being The heating element 23 absorbs.

The thermo-optic phase shifter 200 further includes a substrate 25 , the cladding layer 24 is disposed on the substrate 25 , and the heating element 23 is disposed on a side of the cladding layer 24 away from the substrate 25 . The heating element 23 is disposed on the side of the cladding layer 24 away from the substrate 25 to facilitate the manufacture of the thermo-optic phase shifter 200 .

As an implementation manner, the substrate 25 may specifically be made of materials such as silicon and quartz. In this embodiment, the substrate 25 is silicon.

In other embodiments, an additional layer may be provided above the heating element 23, and the additional layer may be provided according to actual needs, such as optical cladding materials such as silicon dioxide, silicon oxynitride, polymer, and air.

As an implementation manner, the heating element 23 can be understood as a component capable of increasing the temperature of the lithium niobate waveguide layer 211 . The heating element 23 can receive external energy and generate heat, which can be directly or indirectly transferred to the compressive layer 22 , thereby increasing the temperature of the compressive layer 22 , and then adjusting the refractive index of the compressive layer 22 .

The heat-affected zone of the heating element 23 can be understood as the range of heat transfer generated by the heating element 23 . In the heat-affected zone, the heat is transferred to the lithium niobate waveguide layer 211 to realize the adjustment of the refractive index of the lithium niobate waveguide layer 211 .

The projection of the heating element 23 on the upper side of the compressive layer 22 covers the upper side of the compressive layer 22 . The heat generated by the heating element 23 can be conducted to the compressive layer 22 more quickly, so that the light wave can be adjusted more quickly.

The heating element 23 may specifically include but not limited to metals such as titanium nitride and aluminum; the length of the heating element 23 may range from tens to hundreds of microns according to actual needs; the width of the heating element 23 may be greater than that of the lithium niobate waveguide layer 211 .

As a specific implementation, a voltage can be applied to the heating element 23 made of titanium nitride, so that the titanium nitride generates heat, and the heat is transferred to the compression layer 22, thereby increasing the temperature of the compression layer 22, thereby realizing the compression layer 22. Adjustment of the refractive index.

Referring to FIG. 2 and FIG. 3 , the overall heating element 23 may be in a rectangular shape, and the heating element 23 is disposed above the lithium niobate waveguide layer 211 . In FIG. 2 , the length of the heating element 23 may be consistent with the length of the lithium niobate waveguide layer 211 . The width of the heating element 23 may also be greater than the width of the lithium niobate waveguide layer 211 . In other embodiments, the width of the heating element 23 may not be greater than the width of the compression layer 22 .

The thermo-optic phase shifter 200 of this embodiment has a stable phase, small size, and easy integration. The thermo-optic phase shifter 200 has a compact structure, simple manufacturing process, and can effectively suppress the problem of DC drift.

The thermo-optic phase shifter 200 includes a lithium niobate waveguide layer 211. The loss of the lithium niobate waveguide layer 211 is small, which can well solve the problem of phase drift of the electro-optic phase shifter. The thermo-optic phase shifter 200 can ensure the stability of information transmission.

Thermo-optic phase shifter 200 can be fabricated in large quantities in optical computing networks. The thermo-optic phase shifter 200 can be used to modulate the output corresponding to the relevant input, realize the orientation and quantitative adjustment of the light wave signal, and can also realize accurate and stable output, which can greatly improve the efficiency of light wave transmission.

In FIG. 1, the Mazeng interferometer 900 can apply a voltage to the heating element 23, and the heating element 23 generates heat and transfers the heat to the lower lithium niobate waveguide layer 211, thereby realizing the adjustment of the refractive index of the lithium niobate waveguide layer 211, Then realize the adjustment of the light wave phase. The two beams with different phases are combined by a beam combiner 92 . Mazeng interferometer 900 can realize controllable light wave signal output in the 750-1560nm communication band, which can reduce Pπ to 32mW.

In Figure 1, Pin can be understood as input power, and Pout can be understood as output power. Specifically, a light wave is input at the Pin, and a modulated light wave is output at the Pout.

In conjunction with Fig. 4-Fig. 6, Mazeng interferometer 900 and thermo-optic phase shifter 200 are shown in the figure, Mazeng interferometer 900 and thermo-optic phase shifter 200 in Fig. 4-Fig. 6 are the same as Fig. 1-Fig. 3 The Mazeng interferometer 900 and the thermo-optic phase shifter 200 are basically the same, the difference is that the thermo-optic phase shifter 200 in FIGS.

The thermo-optic phase shifter 200 includes: a lithium niobate waveguide layer 211, a cladding layer 24, a heating element 23 and a thermal insulation groove 80, the lithium niobate waveguide layer 211 is used to transmit light waves; the cladding layer 24 covers the lithium niobate waveguide In the periphery of the layer 211, the refractive index of the cladding layer 24 is smaller than the refractive index of the lithium niobate waveguide layer 211; the heating element 23 is arranged on the cladding layer 24, and the heating element 23 is set to heat the lithium niobate waveguide layer 211, so that the niobate The lithium niobate waveguide layer 211 adjusts the phase of the light wave; the heat insulation groove 80 is arranged on the cladding layer 24 , and the heat insulation groove 80 is located on the side of the heating element 23 and the lithium niobate waveguide layer 211 . By using the heating element 23 to heat the lithium niobate waveguide layer 211, the temperature of the lithium niobate waveguide layer 211 can be increased, and then the refractive index of the lithium niobate waveguide layer 211 can be adjusted to realize the transmission of light waves in the thermo-optic phase shifter 200. phase adjustment. By arranging the thermal insulation groove 80 on the cladding layer 24, and arranging the thermal insulation groove 80 on the sides of the heating element 23 and the lithium niobate waveguide layer 211, it can effectively reduce the penetration of the heating element 23 and the lithium niobate waveguide layer 211. The heat of the heat sink 80 can improve the heat binding capacity and reduce the thermal crosstalk caused to other components.

The thermal insulation slot 80 can be understood as a notch that blocks or reduces heat transfer. Air may be inside the notch. In other embodiments, the notches may also be filled with materials with better heat insulation effects.

As shown in FIG. 5 , the thermal insulation groove 80 includes a left groove 81 and a right groove 82 oppositely arranged, and the left groove 81 and the right groove 82 are respectively arranged on two sides of the lithium niobate waveguide layer 211 . The left groove 81 and the right groove 82 are respectively arranged on both sides of the lithium niobate waveguide layer 211, so that the heat of the lithium niobate waveguide layer 211 is bound between the left groove 81 and the right groove 82, which can improve the heat dissipation. The binding ability can reduce heat loss, avoid heat transfer to both sides, reduce thermal crosstalk caused to other components, and reduce Pπ of the bottom thermal-optical phase shifter 200 .

As shown in Figure 6, the heat insulation groove 80 also includes a number of bottom grooves 83 arranged at intervals, the bottom grooves 83 communicate with the left groove 81 and the right groove 82 respectively, and the bottom groove 83 and the lithium niobate waveguide layer 211 are far away from the heating element The sides of 23 are spaced apart. The bottom groove 83 communicates with the left groove 81 and the right groove 82 respectively, so as to surround the three sides of the lithium niobate waveguide layer 211, which can further improve the heat binding ability, and can avoid heat transfer to the two sides and the bottom. Heat loss can be further reduced, thermal crosstalk to other components can be further reduced, and Pπ of the bottom thermal optical phase shifter 200 can be further reduced.

In other embodiments, the left groove 81 , the right groove 82 and the bottom groove 83 can be set independently, or two or more of them can be selected.

The heating element 23 is disposed between the left slot 81 and the right slot 82 . The heat generated by the heating element 23 can be limited between the left slot 81 and the right slot 82, thereby reducing heat loss. In other embodiments, the heating element 23 can also be arranged at other positions.

As shown in FIG. 4 , a Mazeng interferometer 900 is shown in the figure, and the Mazeng interferometer 900 includes two thermo-optic phase shifters 200 as shown in FIG. 6 . The Mazeng interferometer 900 can better isolate the heat from the heating element 23 and the lithium niobate waveguide layer 211, confine the heat in the lithium niobate waveguide layer 211, and prevent heat from flowing between different thermo-optic phase shifters 200, Avoid thermal crosstalk. The distance between different thermo-optic phase shifters 200 can also be made closer by arranging the heat-insulating groove 80 , which can increase the arrangement density of the thermo-optic phase shifters 200 and facilitate integrated manufacturing.

In conjunction with Fig. 7-Fig. 11, Mazeng interferometer 900 and thermo-optic phase shifter 200 are shown in the figure, Mazeng interferometer 900 and thermo-optic phase shifter 200 in Fig. 7-Fig. 9 are the same as Fig. 1-Fig. 3 The Mazeng interferometer 900 and the thermo-optic phase shifter 200 are basically the same, the difference is that the lithium niobate waveguide layer 211 of the thermo-optic phase shifter 200 in FIGS.

The thermo-optic phase shifter 200 includes: a lithium niobate waveguide layer 211, a cladding layer 24, and a heating element 23. The lithium niobate waveguide layer 211 is used to transmit light waves; the cladding layer 24 covers the periphery of the lithium niobate waveguide layer 211, The refractive index of the cladding layer 24 is smaller than the refractive index of the lithium niobate waveguide layer 211; the heating element 23 is arranged on the cladding layer 24, and the heating element 23 is set to heat the lithium niobate waveguide layer 211, so that the lithium niobate waveguide layer 211 The phase of the light wave is adjusted; the lithium niobate waveguide layer 211 is arranged on the heat-affected zone of the heating element 23 . By using the heating element 23 to heat the lithium niobate waveguide layer 211, the temperature of the lithium niobate waveguide layer 211 can be increased, and then the refractive index of the lithium niobate waveguide layer 211 can be adjusted to realize the transmission of light waves in the thermo-optic phase shifter 200. phase adjustment. By setting the waveguide layer 21 in the heating area of the heating element 23, the length of the lithium niobate waveguide layer 211 can be effectively improved, and the lithium niobate waveguide layer 211 is limited in a smaller area, thereby facilitating the heating element 23 to Heating the lithium niobate waveguide layer 211 can reduce the phase shift power, and can also achieve stable output of light wave signals with a small phase shift power.

The disk design can be understood as that the lithium niobate waveguide layer 211 has a disk shape as a whole, and the same lithium niobate waveguide layer 211 twists and turns to form a disk shape. The specific shape of the disk can also be circular, oblong, rectangular, etc., which can effectively increase the arrangement density of the lithium niobate waveguide layer 211, thereby increasing the length of the lithium niobate waveguide layer 211 per unit area, and then heating the element 23 can transfer heat to the lithium niobate waveguide layer 211 to realize the adjustment of the refractive index of the lithium niobate waveguide layer 211 .

The lithium niobate waveguide layer 211 is arranged along one or both of straight line and curved line. The lithium niobate waveguide layer 211 arranged along the straight line is easy to manufacture and can reduce the loss of light waves during propagation. The lithium niobate waveguide layer 211 arranged along the curve can increase the length of the lithium niobate waveguide layer 211 , thereby reducing the requirement on the heating element 23 . In FIG. 7 and FIG. 11 , the lithium niobate waveguide layer 211 is arranged along a straight line and a curve. In FIG. 10 , the lithium niobate waveguide layer 211 is arranged along a curve.

The lithium niobate waveguide layer 211 includes several straight waveguide sections 71 and curved waveguide sections 72 connected in sequence, one straight waveguide section 71 and one curved waveguide section 72 form a basic section, and several basic sections are reciprocated and spaced apart. Several basic sections are reciprocated at intervals, which can effectively increase the length of the lithium niobate waveguide layer 211, and limit the lithium niobate waveguide layer 211 to a smaller area, thereby facilitating the heating of the lithium niobate waveguide layer 211 by the heating element 23, The phase shift power can be reduced, and the stable output of the light wave signal can be achieved with a small phase shift power.

The lithium niobate waveguide layer 211 is arranged in a "zigzag" shape as a whole, and curved waveguide sections 72 are arranged between the straight waveguide sections 71 forming the "zigzag". Curved waveguide sections 72 are arranged between the straight waveguide sections 71 to form a "zigzag" shape, which can simplify the layout of the lithium niobate waveguide layer 211 and increase the arrangement density of the lithium niobate waveguide layer 211 . In FIG. 7 and FIG. 11 , it can be understood that the lithium niobate waveguide layer 211 is arranged in a zigzag shape.

In Fig. 7, a lithium niobate waveguide layer 211 of Marzeng interferometer 900 includes 3 straight waveguide sections 71 and 2 curved waveguide sections 72, and the heating element 23 can control the 3 straight waveguide sections 71 and 2 curved waveguide sections at the same time. When the section 72 is heated, the length of the lithium niobate waveguide layer 211 is greatly increased, and the Pπ of the thermo-optic phase shifter 200 is greatly reduced. By folding and heating the lithium niobate waveguide layer 211 , stable output of light wave signals can be realized.

As shown in FIG. 10 , the lithium niobate waveguide layer 211 of the Mazeng interferometer 900 includes a first helical segment 73 and a second helical segment 74 connected in sequence, the first helical segment 73 is arranged along the first directional disk, and the second helical segment The radius of curvature of the first helical segment 73 gradually increases from the light wave input end to the light wave output end, and the curvature radius of the second helical segment 74 gradually decreases from the light wave input end to the light wave output end. The second helical segment 74 is located at the first within the interval of a helical segment 73. The lithium niobate waveguide layer 211 is set to include the first helical segment 73 and the second helical segment 74 connected in sequence, so that the light wave travels in a detour in the lithium niobate waveguide layer 211, which can effectively extend the lithium niobate waveguide layer 211 The length is also convenient for the first helical segment 73 and the second helical segment 74 to be arranged at intervals, and the density of the lithium niobate waveguide layer 211 is increased.

In FIG. 10 , the first helical section 73 of the lithium niobate waveguide layer 211 is spirally arranged counterclockwise, and the radius of curvature of the first helical section 73 gradually increases. The second helical segment 74 communicates with the first helical segment 73 , and the second helical segment 74 is helically arranged in a clockwise direction, and the radius of curvature of the second helical segment 74 gradually becomes smaller. The second helical segment 74 is arranged in the interval space of the first helical segment 73 .

The lithium niobate waveguide layer 211 is in the shape of a ring as a whole, and the first helical segment 73 and the second helical segment 74 are spirally arranged. The ring-shaped lithium niobate waveguide layer 211 can further increase the arrangement density, which is convenient for heating and adjusting the lithium niobate waveguide layer 211 .

The heating element 23 is generally arc-shaped, and the arc-shaped heating element 23 is correspondingly disposed above the first helical segment 73 and the second helical segment 74 . The arc-shaped heating element 23 is arranged corresponding to the lithium niobate waveguide layer 211 to facilitate better heating of the lithium niobate waveguide layer 211 . In FIG. 10 , the heating element 23 is in the shape of an arc as a whole, and in other embodiments, the heating element 23 can also be in a U shape, a "one" shape, a "ten" shape, etc.

As an implementation, the thermal insulation groove 80 in the thermo-optic phase shifter 200 in Fig. 4-Fig. 6 can also be set to the thermo-optic phase shifter 200 in Fig. 8-Fig. middle. In FIG. 7 , a left groove 81 and a right groove 82 are provided in the thermo-optic phase shifter 200 . In FIG. 11 , the thermo-optic phase shifter 200 is provided with a left groove 81 , a right groove 82 and a bottom groove 83 .

Example 2

As shown in FIGS. 12 to 15 , this embodiment discloses a thermo-optic phase shifter 200 , a waveguide joint 100 and an optical computing network. Embodiment 2 is basically the same as Embodiment 1, except that the thermo-optic phase shifter 200 of this embodiment is provided with a compressive layer 22 , as detailed below.

In Fig. 12, a kind of waveguide joint 100 is shown in the figure, and waveguide joint 100 comprises the waveguide section 11, transition section 12 and thermo-optic phase shifter 200 as following that are connected in sequence, and transition section 12 is arranged at waveguide section 11 and waveguide section 11 and Between the thermo-optic phase shifters 200, the waveguide layer of the waveguide section 11, the waveguide layer of the transition section 12 and the waveguide layer 21 of the thermo-optic phase shifter 200 are connected, and the transition section 12 is also provided with a transition compression layer 121, the transition compression layer 121 is attached to the waveguide layer of the transition section 12, the transition compression layer 121 communicates with the compression layer 22 of the thermo-optic phase shifter 200, and the cross section of the transition compression layer 121 is along the direction from the thermo-optic phase shifter 200 to the waveguide section 11 get smaller. Using the transition section 12 to connect the waveguide section 11 and the thermo-optic phase shifter 200 can effectively avoid the extra loss caused by the mode mutation, and can make the light wave propagate in the waveguide joint 100 more smoothly.

As an implementation manner, the transition compression layer 121 has a triangular shape as a whole, the corners of the triangular transition compression layer 121 face the waveguide section 11 , and the bottom of the triangular transition compression layer 121 faces the thermo-optic phase shifter 200 . The use of the triangular-shaped transitional compression layer 121 can effectively prevent additional losses caused by mode mutations. The transitional compressive layer 121 in Fig. 12 can specifically be in the shape of an isosceles triangle. In other embodiments, the transitional compressive layer 121 can also be in other shapes. It can be part of a hyperbola, arc, or ellipse. The transition compression layer 121 can also be a quadrangle, the length of the side of the quadrangle close to the waveguide section 11 can be shorter than the length of the side of the quadrilateral close to the thermo-optic phase shifter 200, specifically it can be a trapezoid, and the upper bottom of the trapezoid transition compression layer 121 faces the waveguide In section 11 , the bottom of the trapezoidal transitional compression layer 121 faces the thermo-optic phase shifter 200 , and the transitional compression layer 121 may specifically be an isosceles trapezoid.

In Fig. 12, the figure is a cross-sectional view of the waveguide joint 100, and the angle of view is a top view. The dotted line in the figure only schematically indicates the boundary between the waveguide section 11, the transition section 12, and the thermo-optic phase shifter 200. The actual waveguide joint The dotted line does not exist in 100. In this embodiment, the transition compression layer 121 and the compression layer 22 may be an integral structure. The waveguide layer of the waveguide section 11 , the waveguide layer of the transition section 12 and the waveguide layer 21 of the thermo-optic phase shifter 200 can also be an integral structure.

Light waves can enter the waveguide joint 100 from one end of the thermo-optic phase shifter 200 . The light wave is firstly compressed into the compression layer 22 , and then transmitted to the waveguide section 11 through the transition compression layer 121 .

As an implementation manner, the waveguide segment 11 can be understood as a waveguide in a general sense, and can be used to guide light waves. The transition section 12 can be understood as a transition between the thermo-optic phase shifter 200 and the waveguide section 11 . As a result, the transition section 12 is provided with a transition compression layer 121 on the waveguide layer 21 of the waveguide section 11 . The transition compressive layer 121 can guide the optical wave in the compressive layer 22 of the thermo-optic phase shifter 200 to the waveguide layer 21 of the waveguide section 11 .

This embodiment also discloses an optical computing network, which includes a thermo-optic phase shifter 200 as follows.

The optical computing network may specifically include an MZI (Mazeng Interferometer) basic unit composed of a thermo-optical phase shifter 200 as follows. Specifically, the optical computing network may further include: an optical input unit, a phase modulation and intensity modulation MZI unit based on the thermo-optic phase shifter 200, and a light receiving detection unit. The output light of the optical input unit is injected into the optical computing network, and the light wave passes through the thermo-optic phase shifter 200 to form an additional phase difference, and then interferes with another light wave of the MZI, thereby forming the intensity modulation of the light wave, which passes through the optical network step by step to realize vector Matrix multiplication, and to achieve the purpose of calculation.

This embodiment also discloses a laser radar, which includes one or all of the following thermo-optic phase shifter 200 or the above waveguide joint 100 .

Specifically, the lidar may further include: an optical sending unit, an optical antenna, an optical heterodyne receiver, and a signal processing unit. The light transmission unit outputs transmission light and local oscillation light which is continuous oscillation light. The optical antenna radiates the transmitted light output from the optical transmitting unit into space, and receives backscattered light related to the transmitted light as received light. The optical heterodyne receiver uses the local oscillating light output by the optical sending unit and the received light received by the optical antenna to perform optical heterodyne detection; and the signal processing unit performs frequency analysis on the detection result of the optical heterodyne receiver. Wherein, the optical sending unit specifically includes a thermo-optic phase shifter 200 or a waveguide joint 100, and the thermo-optic phase shifter 200 or the waveguide joint 100 performs phase modulation on the continuous oscillating light. The light sending unit may further include a light intensity modulator, which pulse-modulates the light phase-modulated by the thermo-optic phase shifter 200 or the waveguide joint 100, and then uses it as sending light.

As shown in Figures 13 to 14, the thermo-optic phase shifter 200 mentioned above is shown in the figure, and the thermo-optic phase shifter 200 includes: a waveguide layer 21, a compression layer 22 and a heating element 23, and the waveguide layer 21 is used for incident light wave; the compression layer 22 is attached to the waveguide layer 21, the refractive index of the compression layer 22 is greater than the refractive index of the waveguide layer 21, and the thermo-optic coefficient of the compression layer 22 is greater than the thermo-optic coefficient of the waveguide layer 21; the heating element 23 is set to heat The layer 22 is compressed such that the layer 22 adjusts the phase of the light waves. By arranging the waveguide layer 21 and the compressive layer 22 in close contact, and setting the refractive index of the compressive layer 22 to be greater than that of the waveguide layer 21 , the light waves entering the waveguide layer 21 can be compressed to the compressive layer 22 . At the same time, the thermo-optic coefficient of the compression layer 22 is set to be greater than the thermo-optic coefficient of the waveguide layer 21, and the heating element 23 is used to heat the compression layer 22, so that the temperature of the compression layer 22 can be increased, and then the refractive index of the compression layer 22 can be adjusted. Then realize the adjustment of the light wave phase. The compression layer 22 with a large thermo-optic coefficient can effectively reduce the Ppi of the thermo-optic phase shifter 200 and reduce the power consumption of the optical circuit.

Compression layer 22 can be understood as confinement of light waves. When the light wave is transmitted through the waveguide layer 21 and the compression layer 22 with different refractive indices, since the refractive index of the compression layer 22 is greater than that of the waveguide layer 21, the light wave is confined to the compression layer 22 with a higher refractive index, forming a compression of the light wave. It should be pointed out that the compression layer 22 can compress all the light waves entering the waveguide layer 21 , and the compression layer 22 can also compress part of the light waves entering the waveguide layer 21 .

As an implementation manner, the compressive layer 22 may include an amorphous silicon layer 221 , and the amorphous silicon layer 221 is attached to the waveguide layer 21 . The amorphous silicon layer 221 has a relatively large refractive index, which facilitates the compression of light waves. The amorphous silicon layer 221 also has a relatively large thermo-optic coefficient, which is convenient for adjusting the refractive index of the amorphous silicon layer 221 through the heating element 23 to realize the adjustment of the light wave phase.

The width of the amorphous silicon layer 221 is adapted to the width of the waveguide layer 21 . The width of the amorphous silicon layer 221 is adapted to the width of the waveguide layer 21, which can prevent light waves from the waveguide layer 21 from escaping, reduce light wave loss, and better compress light waves. Specifically, the width of the amorphous silicon layer 221 is not smaller than the width of the waveguide layer 21 . As shown in FIG. 14 , the width of the amorphous silicon layer 221 is equal to the width of the waveguide layer 21 , and the width here may be the size of the adjacent surface of the amorphous silicon layer 221 and the waveguide layer 21 in FIG. 14 .

As an implementation manner, the length of the amorphous silicon layer 221 may be between tens to hundreds of microns. In this embodiment, the amorphous silicon layer 221 is specifically in the shape of a rectangular thin film, and in other embodiments, the amorphous silicon layer 221 may also be in other shapes.

Specifically, the amorphous silicon layer 221 may be hydrogenated amorphous silicon. Hydrogenated amorphous silicon contains a large number of Si:H chains, and the presence of Si:H chains can reduce optical loss. In other embodiments, the amorphous silicon layer 221 may also be other forms of amorphous silicon.

The thickness of the amorphous silicon layer 221 is in the range of 40-350 nm. The thickness range of the amorphous silicon layer 221 is set to 40-350nm, which can effectively reduce the Ppi of the thermo-optical phase shifter 200, and can also avoid the excessive thickness of the amorphous silicon layer 221, which will cause the transition section 12 to be too long, and easily cause light waves. Mutations occur during conduction, enhancing loss. In other words, if the thickness of the amorphous silicon layer 221 is less than 40nm, the Ppi of the thermo-optic phase shifter 200 will not decrease significantly, and the power consumption of the thermo-optic phase shifter 200 will be too large. In addition, if the thickness of the amorphous silicon layer 221 is too thin, it will It is difficult to effectively compress the light wave, and it is impossible to form an effective constraint on the light wave.

It can be seen from FIG. 15 that, as the thickness of the amorphous silicon layer 221 increases, the Ppi of the thermo-optic phase shifter 200 decreases gradually. Specifically, the thickness of the amorphous silicon layer 221 may be an integer value between 40-350 nm or an integer value ending with 5 or 0, preferably 50 nm, 100 nm, 150 nm, 200 nm, 250 nm or 300 nm. Those skilled in the art should know that the thickness of the amorphous silicon layer 221 is set to be verified through a large number of experiments, which can produce better technical effects. However, it is not used to limit the thickness of the amorphous silicon layer 221 , and data changes of other practicable thicknesses are also within the protection scope of this embodiment.

As shown in FIG. 15 , by disposing an amorphous silicon layer 221 with a thickness of 50 nm on the lithium niobate waveguide layer 211 , the Ppi of the thermo-optic phase shifter 200 can be reduced by about 33%. When the thickness of the amorphous silicon layer 221 is increased to 200 nm, the Ppi of the thermo-optic phase shifter 200 can be reduced from 64 mW to 12.4 mW; the Ppi drop is very obvious. In the above numerical calculation conditions, the length of the thermo-optic phase shifter 200 is 200 μm. It can be seen that this embodiment avoids the problem that the thermo-optic phase shifter 200Ppi is relatively large.

The waveguide layer 21 can be understood as a dielectric layer for transmitting light waves. As an implementation manner, the waveguide layer 21 includes a lithium niobate waveguide layer 211 , and the compression layer 22 is attached to the lithium niobate waveguide layer 211 . As shown in FIG. 14 , the cross section of the lithium niobate waveguide layer 211 may be trapezoidal, and in other embodiments, the cross section of the lithium niobate waveguide layer 211 may also have other shapes.

In this embodiment, the compression layer 22 may specifically be an amorphous silicon layer 221, and the waveguide layer 21 may specifically be a lithium niobate waveguide layer 211, the refractive index of the amorphous silicon layer 221 is approximately 3.6, and the lithium niobate waveguide layer 211 The refractive index is about 2.2, and the light waves will be compressed in the amorphous silicon layer 221 . At the same time, the thermo-optic coefficient of the amorphous silicon layer 221 is about 2.2×10-4, the thermo-optic coefficient of the lithium niobate waveguide layer 211 is about 10-5, and the thermo-optic coefficient of the amorphous silicon layer 221 is much larger than that of the lithium niobate waveguide layer The thermo-optic coefficient of 211 can effectively reduce the Ppi of the thermo-optic phase shifter 200 .

As an implementation manner, the waveguide layer 21 is selected as a lithium niobate waveguide layer 211, and the lithium niobate waveguide layer 211 may be a lithium niobate thin film. The compression layer 22 is selected as the amorphous silicon layer 221, and the heating element 23 can heat the amorphous silicon layer 221 and the lithium niobate waveguide layer 211 simultaneously, so that the temperature of the amorphous silicon layer 221 and the lithium niobate waveguide layer 211 can be increased, and then The refractive index of the amorphous silicon layer 221 and the lithium niobate waveguide layer 211 can be adjusted, thereby realizing the adjustment of the light wave phase.

As an implementation manner, an amorphous silicon layer 221 may be grown on the lithium niobate waveguide layer 211, and the amorphous silicon layer 221 may be etched into the shapes shown in FIG. 12 , FIG. 13 , and FIG. 14 .

In other embodiments, according to the material of the waveguide layer 21, the material of the compressive layer 22 can also be selected as other materials, such as: the waveguide layer 21 is selected from silicon nitride (SixNy), tantalum pentoxide (Ta2O5), aluminum nitride The (AlN) compressive layer 22 can be made of silicon (Si), germanium (Ge), gallium arsenide (GaAs), etc. in different combinations, all of which can satisfy the conditions of refractive index and thermo-optic coefficient.

As an implementation manner, the heating element 23 can be understood as a component capable of increasing the temperature of the compressive layer 22 . The heating element 23 can receive external energy and generate heat, which can be directly or indirectly transferred to the compressive layer 22 , thereby increasing the temperature of the compressive layer 22 , and then adjusting the refractive index of the compressive layer 22 .

The projection of the heating element 23 on the upper side of the compressive layer 22 covers the upper side of the compressive layer 22 . The heat generated by the heating element 23 can be conducted to the compressive layer 22 more quickly, so that the light wave can be adjusted more quickly. As shown in Figure 14, the projection of the upper side of the heating element 23 is larger than the upper side of the compressive layer 22, and the heating element 23 can completely cover the compressive layer 22, so that the effective heat-affected zone of the heating element 23 can fully heat the compressive layer 22 , can improve the light wave adjustment efficiency. In other embodiments, the projection of the heating element 23 on the upper side of the compressive layer 22 may also cover part of the upper side of the compressive layer 22 .

The heating element 23 may specifically include but not limited to metals such as titanium nitride and aluminum; the length of the heating element 23 may range from tens to hundreds of microns according to actual needs; the width of the heating element 23 may be greater than that of the compressive layer 22 . In this embodiment, the heating element 23 is titanium nitride, with a length of 200 μm, a width of 3 μm, and a thickness of 100 nm.

As a specific embodiment, a voltage can be applied to the heating element 23 made of titanium nitride, so that the titanium nitride generates heat, and the heat is transferred to the compression layer 22, which can increase the temperature of the compression layer 22, thereby realizing the compression layer 22. Adjustment of the refractive index.

Referring to FIG. 13 and FIG. 14 , the heating element 23 may be rectangular in shape as a whole, and the heating element 23 is arranged above the compression layer 22 . In FIG. 13 , the length of the heating element 23 may be consistent with the length of the compressive layer 22 . In FIG. 14 , the width of the heating element 23 may be greater than that of the compressive layer 22 . In other embodiments, the width of the heating element 23 may not be greater than the width of the compressive layer 22 .

The thermo-optic phase shifter 200 further includes a cladding layer 24 covering the periphery of the waveguide layer 21 and the compression layer 22 , and the refractive index of the cladding layer 24 is smaller than that of the waveguide layer 21 . The waveguide layer 21 and the compression layer 22 are surrounded by the cladding layer 24 with a smaller refractive index, which can better confine the light waves to the waveguide layer 21 and the compression layer 22, avoid light waves from escaping, and reduce light wave loss.

In this embodiment, the cladding layer 24 may specifically include an upper cladding layer 241 and a lower cladding layer 242, a cavity is formed between the upper cladding layer 241 and the lower cladding layer 242, and the waveguide layer 21 and the compression layer 22 are set in the cavity.

The cladding layer 24 of the thermo-optic phase shifter 200 includes one of silicon dioxide and silicon oxynitride, or other polymer optical cladding materials. The cladding layer 24 in this embodiment is PECVD silicon dioxide (that is, silicon dioxide produced by plasma enhanced chemical vapor deposition), with a thickness of about 1 μm. In other embodiments, the material of the cladding layer 24 may be other materials.

The heating element 23 is disposed on the outer surface of the cladding layer 24 , and the heating element 23 heats the compression layer 22 through the cladding layer 24 . The heating element 23 is arranged on the outer surface of the cladding layer 24 , which can avoid the escape of light waves caused by the heating element 23 being close to the compressive layer 22 , and also facilitates the manufacture of the thermo-optic phase shifter 200 . The closer the heating element 23 is to the compression layer 22, the greater its absorption of light waves. The heating element 23 should not be directly laid on the compression layer 22. The cladding layer 24 increases the distance between the heating element 23 and the compression layer 22, which can Avoid light waves being absorbed by the heating element 23 .

The thermo-optic phase shifter 200 further includes a substrate 25 , the cladding layer 24 is disposed on the substrate 25 , and the heating element 23 is disposed on a side of the cladding layer 24 away from the substrate 25 . The heating element 23 is disposed on the side of the cladding layer 24 away from the substrate 25 to facilitate the manufacture of the thermo-optic phase shifter 200 . In this embodiment, the heating element 23 is arranged on the top of the cladding layer 24. In other embodiments, the heating element 23 can also be arranged on other areas of the cladding layer 24, for example, the heating element 23 is arranged on the top of the cladding layer 24. Left side, right side.

As an implementation manner, the substrate 25 may specifically be made of materials such as silicon and quartz. In this embodiment, the substrate 25 is silicon.

In Fig. 13 and Fig. 14, an additional layer 26 is provided above the heating element 23, and the additional layer 26 can be set according to actual needs, such as optical cladding materials such as silicon dioxide, silicon oxynitride, polymer, air, etc. ; In this embodiment, the additional layer 26 is air.

As an implementation mode, the thermo-optic phase shifter 200 in Embodiment 2 can also refer to the thermo-optic phase shifter 200 in Embodiment 1 to set the heat-insulating groove 80, arrange the lithium niobate waveguide layer 211, etc., and no longer repeat. Embodiment 2 also discloses a Mazeng interferometer, and the specific settings can refer to Embodiment 1, and will not be described again.

Although the specific implementation of the present invention has been described above, those skilled in the art should understand that this is only an example, and the protection scope of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principle and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims (10)

1. A thermo-optic phase shifter, characterized in that the thermo-optic phase shifter comprises: A lithium niobate waveguide layer, the lithium niobate waveguide layer is used to transmit light waves; A cladding layer, the cladding layer covers the periphery of the lithium niobate waveguide layer, and the refractive index of the cladding layer is smaller than the refractive index of the lithium niobate waveguide layer; A heating element, the heating element is arranged on the cladding layer, and the heating element is configured to heat the lithium niobate waveguide layer, so that the lithium niobate waveguide layer adjusts the phase of the light wave; A heat insulation groove, the heat insulation groove is arranged on the cladding layer, and the heat insulation groove is located on the side of the heating element and the lithium niobate waveguide layer. 2. thermo-optic phase shifter as claimed in claim 1, is characterized in that, described thermal insulation groove comprises the left side groove and the right side groove that are arranged oppositely, and described left side groove and described right side groove are respectively arranged on the Both sides of the lithium niobate waveguide layer. 3. The thermo-optic phase shifter according to claim 2, wherein the heat insulation groove also includes a plurality of bottom grooves arranged at intervals, and the bottom grooves are respectively connected with the left side groove and the right side groove In general, the bottom groove is spaced apart from the side of the lithium niobate waveguide layer away from the heating element. 4. thermo-optic phase shifter as claimed in claim 3, is characterized in that, described cladding layer comprises upper cladding layer and lower cladding layer, and described lithium niobate waveguide layer is arranged on described upper cladding layer and lower cladding layer. Between the lower cladding layers, the heating element is arranged on the side of the upper cladding layer away from the lithium niobate waveguide layer, and the left groove and the right groove run through the upper cladding layer And extend downwards to the lower cladding layer, the bottom groove is arranged on the lower cladding layer. 5. The thermo-optic phase shifter according to claim 2, wherein the heating element is arranged between the left groove and the right groove. 6. thermo-optic phase shifter as claimed in claim 1, is characterized in that, described lithium niobate waveguide layer comprises base layer and raised layer, and described raised layer is arranged on the side of described base layer, and the side of described heating element A heat-affected zone covers the raised layer. 7. The thermo-optic phase shifter according to any one of claims 1-6, wherein the lithium niobate waveguide layer is arranged along a straight line or a curve. 8. thermo-optic phase shifter as claimed in claim 7, is characterized in that, described lithium niobate waveguide layer comprises several linear waveguide segments and curved waveguide segments connected in succession, a described linear waveguide segment and a described curve The waveguide sections form a basic section, and several basic sections are reciprocally arranged at intervals. 9. A Mazent interferometer, characterized in that the Mazeng interferometer comprises the thermo-optic phase shifter according to any one of claims 1-8. 10. An optical computing network, characterized in that the optical computing network comprises the Marzeng interferometer according to claim 9.

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