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CN115575720A - Coupling complementary type spiral resonance sensor - Google Patents

Coupling complementary type spiral resonance sensor Download PDF

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CN115575720A
CN115575720A CN202211188017.5A CN202211188017A CN115575720A CN 115575720 A CN115575720 A CN 115575720A CN 202211188017 A CN202211188017 A CN 202211188017A CN 115575720 A CN115575720 A CN 115575720A
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material sample
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thickness
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邓晖
孙昊宁
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Beihang University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2688Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators

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Abstract

本发明涉及一种耦合补型螺旋谐振传感器。该传感器包括:由上至下依次叠放的微带线、介质基底以及金属接地板;所述金属接地板上刻蚀两个互相耦合的圆形互补旋转谐振器;所述金属接地板的底部放置待测材料样品,且所述待测材料样品设于两个所述圆形互补旋转谐振器的下方;当所述待测材料样品与电场能量相互作用扰乱场分布时,获取两个所述圆形互补旋转谐振器的谐振频率,并根据两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数。本发明能够同时测量待测材料样品的厚度和介电常数,提高了传感器的灵敏度。

Figure 202211188017

The invention relates to a coupled complementary spiral resonance sensor. The sensor includes: a microstrip line, a dielectric substrate, and a metal ground plate stacked in sequence from top to bottom; two mutually coupled circular complementary rotating resonators are etched on the metal ground plate; the bottom of the metal ground plate placing the material sample to be tested, and the material sample to be tested is set under the two circular complementary rotating resonators; when the material sample to be tested interacts with the electric field energy to disturb the field distribution, the two described The resonant frequency of the circular complementary rotating resonator is measured simultaneously to obtain the thickness and the dielectric constant of the material sample to be tested according to the two resonant frequencies. The invention can simultaneously measure the thickness and dielectric constant of the material sample to be tested, and improves the sensitivity of the sensor.

Figure 202211188017

Description

一种耦合补型螺旋谐振传感器A Coupled Complementary Helical Resonant Sensor

技术领域technical field

本发明涉及微波传感器技术领域,特别是涉及一种耦合补型螺旋谐振传感器。The invention relates to the technical field of microwave sensors, in particular to a coupled complementary spiral resonance sensor.

背景技术Background technique

准确测量介质材料的特性在许多领域中都有着重要应用,例如医药、电子信息、航空航天、国防等。目前应用的主要测量方法有反射法、传输线法以及谐振腔法等。反射法一般通过发射天线回波的相位和幅度,在较宽的频段内实现厚度和介电常数测量,但这种方法一般成本较高且精度较低;传输线法一般是将待测介质放置在传输线(例如波导等)内部,通过测量传输参数获得厚度和介电常数信息;谐振腔法一般是将待测材料样品放置在谐振腔内部,通过测量谐振频率和品质因数的变化得到厚度和介电常数信息;这两种方法对样品制备的要求较高,因为要放入体积受限的腔体内,也不容易实现无损测量。Accurately measuring the properties of dielectric materials has important applications in many fields, such as medicine, electronic information, aerospace, national defense, etc. The main measurement methods currently used are reflection method, transmission line method and resonant cavity method. The reflection method generally realizes the thickness and dielectric constant measurement in a wide frequency band by transmitting the phase and amplitude of the antenna echo, but this method generally has high cost and low precision; the transmission line method generally places the medium to be measured in the Inside the transmission line (such as waveguide, etc.), the thickness and dielectric constant information are obtained by measuring the transmission parameters; the resonant cavity method generally places the sample of the material to be tested inside the resonant cavity, and obtains the thickness and dielectric constant by measuring the change of the resonant frequency and quality factor. Constant information; these two methods have higher requirements for sample preparation, because it is not easy to achieve non-destructive measurement because it needs to be placed in a cavity with limited volume.

为了解决上述问题,近年来,随着超材料技术的发展,亚波长平面微波传感器得到了广泛的应用,为介质材料的电磁特性测量提供了可选的方法,常见的单谐振器传感器无法同时测量待测材料样品介电常数以及厚度,且单谐振器传感器的灵敏度较低。In order to solve the above problems, in recent years, with the development of metamaterial technology, subwavelength planar microwave sensors have been widely used, providing an optional method for the measurement of electromagnetic properties of dielectric materials, which cannot be measured simultaneously by common single-resonator sensors The dielectric constant and thickness of the material sample to be tested, and the sensitivity of the single resonator sensor is low.

发明内容Contents of the invention

本发明的目的是提供一种耦合补型螺旋谐振传感器,以解决单谐振器传感器无法同时测量待测材料样品介电常数以及厚度,灵敏度低的问题。The purpose of the present invention is to provide a coupled complementary spiral resonant sensor to solve the problem that the single resonator sensor cannot simultaneously measure the dielectric constant and thickness of the material sample to be tested and has low sensitivity.

为实现上述目的,本发明提供了如下方案:To achieve the above object, the present invention provides the following scheme:

一种耦合补型螺旋谐振传感器,包括:由上至下依次叠放的微带线、介质基底以及金属接地板;A coupled complementary helical resonance sensor, comprising: a microstrip line, a dielectric substrate, and a metal grounding plate stacked sequentially from top to bottom;

所述金属接地板上刻蚀两个互相耦合的圆形互补旋转谐振器;所述金属接地板的底部放置待测材料样品,且所述待测材料样品设于两个所述圆形互补旋转谐振器的下方;Two mutually coupled circular complementary rotating resonators are etched on the metal grounding plate; the material sample to be tested is placed on the bottom of the metal grounding plate, and the material sample to be tested is arranged on the two circular complementary rotating resonators. below the resonator;

当所述待测材料样品与电场能量相互作用扰乱场分布时,获取两个所述圆形互补旋转谐振器的谐振频率,并根据两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数。When the material sample to be tested interacts with the electric field energy to disturb the field distribution, obtain the resonant frequencies of the two circular complementary rotating resonators, and simultaneously measure the two resonant frequencies to obtain the resonant frequency of the material sample to be tested thickness and dielectric constant.

可选的,所述圆形互补旋转谐振器由一条金属线螺旋而成。Optionally, the circular complementary rotating resonator is helically formed by a metal wire.

可选的,通过改变所述圆形互补旋转谐振器的外直径、相邻的金属线之间的间距、金属线宽以及两个所述圆形互补旋转谐振器之间的间隙,调整耦合补型螺旋谐振传感器的品质因数Q值以及测试频率。Optionally, by changing the outer diameter of the circular complementary rotating resonator, the distance between adjacent metal lines, the width of the metal line, and the gap between the two circular complementary rotating resonators, the coupling compensation The quality factor Q value of the type spiral resonant sensor and the test frequency.

可选的,所述电场集中于两个所述圆形互补旋转谐振器之间的间隙。Optionally, the electric field is concentrated in the gap between the two circular complementary rotating resonators.

可选的,所述谐振频率测量与所述待测材料样品的厚度和介电常数的关系式为:Optionally, the relationship between the resonance frequency measurement and the thickness and dielectric constant of the material sample to be tested is:

fLd,t)=3.086-0.2836εd+0.0155εd 2+(0.2836εd-0.0155εd 2)e-t/0.1483 f Ld ,t)=3.086-0.2836ε d +0.0155ε d 2 +(0.2836ε d -0.0155ε d 2 )e -t/0.1483

fHd,t)=3.248-0.317εd+0.0181εd 2+(0.317εd-0.0181εd 2)e-t/0.1353 f Hd ,t)=3.248-0.317ε d +0.0181ε d 2 +(0.317ε d -0.0181ε d 2 )e -t/0.1353

其中,fL为两个谐振频率中较低的频率值;fH为两个谐振频率中较高的频率值;,fLd,t)为两个谐振频率中较低的频率值关于εd和t的函数;fHd,t)为两个谐振频率中较高的频率值关于εd和t的函数;εd为待测材料样品的介电常数与空气的介电常数之差;t为待测材料样品的厚度。Among them, f L is the lower frequency value of the two resonance frequencies; f H is the higher frequency value of the two resonance frequencies; f Ld , t) is the lower frequency value of the two resonance frequencies The function of ε d and t; f Hd , t) is the function of the higher frequency value of the two resonance frequencies about ε d and t; ε d is the dielectric constant of the material sample to be tested and the dielectric constant of air The difference in electric constant; t is the thickness of the material sample to be tested.

可选的,所述微带线的两端连接SMA连接器,在测量时,所述微带线通过所述SMA连接器与矢量网络分析仪相连接;所述矢量网络分析仪用于分析两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数。Optionally, both ends of the microstrip line are connected to SMA connectors, and during measurement, the microstrip line is connected to a vector network analyzer through the SMA connector; the vector network analyzer is used to analyze the two The thickness and the dielectric constant of the material sample to be tested are obtained by simultaneously measuring each of the resonant frequencies.

可选的,所述微带线的特征阻抗为50欧姆。Optionally, the characteristic impedance of the microstrip line is 50 ohms.

可选的,所述介质基底的材料为特氟龙。Optionally, the material of the dielectric substrate is Teflon.

根据本发明提供的具体实施例,本发明公开了以下技术效果:本发明提供了一种耦合补型螺旋谐振传感器,采用两个圆形互补螺旋谐振器相互耦合,其电磁耦合可以等效为互电容以及互感,这样可以使传感器具有两个谐振频率。当加载待测样品时,两个谐振频率同时发生变化,以此进行厚度和介电常数的同时测量。另外,与单谐振器情况相比,加入耦合后传感器的谐振频率偏移增大,从而进一步提高了传感器的灵敏度。According to the specific embodiments provided by the present invention, the present invention discloses the following technical effects: The present invention provides a coupled complementary spiral resonator sensor, which uses two circular complementary spiral resonators to couple with each other, and its electromagnetic coupling can be equivalent to mutual Capacitance and mutual inductance, which allow the sensor to have two resonant frequencies. When the sample to be tested is loaded, the two resonant frequencies change simultaneously, so that the thickness and the dielectric constant can be measured simultaneously. In addition, compared with the case of a single resonator, the resonant frequency shift of the sensor increases after adding the coupling, thereby further improving the sensitivity of the sensor.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some of the present invention. Embodiments, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

图1为本发明所提供的耦合补型螺旋谐振器传感器的侧视结构示意图;Fig. 1 is the schematic diagram of the side view structure of the coupled complementary spiral resonator sensor provided by the present invention;

图2为本发明所提供的耦合补型螺旋谐振器传感器俯视图;Fig. 2 is the top view of the coupled complementary spiral resonator sensor provided by the present invention;

图3为本发明所提供的圆形互补螺旋谐振器示意图;3 is a schematic diagram of a circular complementary spiral resonator provided by the present invention;

图4为本发明所提供的圆形互补螺旋谐振器传感器对应的等效电路图;Fig. 4 is the equivalent circuit diagram corresponding to the circular complementary spiral resonator sensor provided by the present invention;

图5为本发明建模仿真得到的不同介电常数下的传输参数S21仿真图;Fig. 5 is the transmission parameter S21 emulation diagram under the different dielectric constants that the modeling simulation of the present invention obtains;

图6为本发明建模仿真得到的不同厚度下的传输参数S21仿真图;Fig. 6 is the simulation diagram of the transmission parameter S21 under different thicknesses that the modeling and simulation of the present invention obtains;

图7为本发明建模仿真得到的fL与介电常数和厚度的关系图;Fig. 7 is the relationship diagram of f L obtained by modeling simulation of the present invention and dielectric constant and thickness;

图8为本发明建模仿真得到的fH与介电常数和厚度的关系图。Fig. 8 is a graph showing the relationship between f H and the dielectric constant and thickness obtained from the modeling and simulation of the present invention.

具体实施方式detailed description

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

本发明的目的是提供一种耦合补型螺旋谐振传感器,能够同时测量待测材料样品的厚度和介电常数,还进一步提高了传感器的灵敏度。The purpose of the present invention is to provide a coupled complementary spiral resonance sensor, which can simultaneously measure the thickness and dielectric constant of the material sample to be tested, and further improve the sensitivity of the sensor.

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

图1为本发明所提供的耦合补型螺旋谐振器传感器的侧视结构示意图,图2为本发明所提供的耦合补型螺旋谐振器传感器俯视图,如图1-图2所示,一种耦合补型螺旋谐振传感器,包括:由上至下依次叠放的微带线1、介质基底2以及金属接地板3;所述金属接地板3上刻蚀两个互相耦合的圆形互补螺旋谐振器4;所述金属接地板3的底部放置待测材料样品,且所述待测材料样品设于两个所述圆形互补螺旋谐振器4的下方;当所述待测材料样品与电场能量相互作用扰乱场分布时,获取两个所述圆形互补螺旋谐振器4的谐振频率,并根据两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数。Fig. 1 is a schematic side view structural diagram of a coupled complementary spiral resonator sensor provided by the present invention, and Fig. 2 is a top view of a coupled complementary spiral resonator sensor provided by the present invention, as shown in Fig. 1-Fig. 2, a coupling Complementary spiral resonant sensor, including: a microstrip line 1, a dielectric substrate 2, and a metal ground plate 3 stacked in sequence from top to bottom; two mutually coupled circular complementary spiral resonators are etched on the metal ground plate 3 4; the bottom of the metal grounding plate 3 places the material sample to be tested, and the material sample to be tested is arranged under the two circular complementary spiral resonators 4; when the material sample to be tested interacts with the electric field energy When disturbing the field distribution, the resonant frequencies of the two circular complementary helical resonators 4 are obtained, and the thickness and the dielectric constant of the material sample to be tested are obtained by simultaneous measurement according to the two resonant frequencies.

在实际应用中,微带线1设置在介质基底2的正上方中间位置,金属接地板3设置在介质基底2的正下方;两个圆形互补螺旋谐振器4刻蚀在金属接地板3的中央,且通过微带线1下方;微带线两端放置SMA连接器,在测量时与矢量网络分析仪相连,所述矢量网络分析仪用于分析两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数,图2中微带线1的宽度为W;微带线1和金属接地板3的厚度选取市场上常用的厚度。In practical applications, the microstrip line 1 is set in the middle position directly above the dielectric substrate 2, and the metal ground plate 3 is set directly below the dielectric substrate 2; two circular complementary spiral resonators 4 are etched on the metal ground plate 3 center, and pass below the microstrip line 1; SMA connectors are placed at both ends of the microstrip line, and are connected to a vector network analyzer during measurement, and the vector network analyzer is used to analyze two resonant frequencies and measure simultaneously to obtain the For the thickness and dielectric constant of the material sample to be tested, the width of the microstrip line 1 in FIG. 2 is W; the thickness of the microstrip line 1 and the metal ground plate 3 is selected from the thickness commonly used in the market.

图3为本发明所提供的圆形互补螺旋谐振器示意图,如图3所示,所述圆形互补螺旋谐振器4的由一条金属线螺旋而成。FIG. 3 is a schematic diagram of a circular complementary spiral resonator provided by the present invention. As shown in FIG. 3 , the circular complementary spiral resonator 4 is spirally formed by a metal wire.

在实际应用中,圆形互补螺旋谐振器4的尺寸参数通过仿真优化并考虑制造时的精度确定,螺旋谐振器的上下两部分各由一组同心的半圆金属线组成,两部分圆心不同,金属线在左端相连。In practical applications, the size parameters of the circular complementary spiral resonator 4 are determined through simulation optimization and considering the manufacturing accuracy. The upper and lower parts of the spiral resonator are each composed of a group of concentric semicircular metal wires. The lines connect at the left end.

通过改变所述圆形互补螺旋谐振器4的外直径LR、相邻的金属线之间的间距s、金属线宽w以及两个所述圆形互补螺旋谐振器4之间的间隙d,结合加工时的精度,调整耦合补型螺旋谐振传感器的品质因数Q值以及测试频率。By changing the outer diameter L R of the circular complementary spiral resonator 4 , the spacing s between adjacent metal lines, the metal line width w and the gap d between two circular complementary spiral resonators 4 , Combined with the processing accuracy, adjust the quality factor Q value and test frequency of the coupled complementary spiral resonant sensor.

本发明利用平面传感器结构表征待测样品厚度,这种测量方法基于场的微扰,当待测材料与存储的磁场和电场能量相互作用从而扰乱场分布时,谐振结构的谐振频率将会改变。本发明所用的圆形互补螺旋谐振器4可以在金属线的间隙之间提供较强的电场,从而产生更大的灵敏度。本发明通过矢量网络分析仪测量传感器加在待测样品后的谐振频率变化值,进而确定待测介质的介电常数和厚度。The invention uses a planar sensor structure to characterize the thickness of the sample to be tested. This measurement method is based on field perturbation. When the material to be tested interacts with the stored magnetic field and electric field energy to disturb the field distribution, the resonant frequency of the resonant structure will change. The circular complementary spiral resonator 4 used in the present invention can provide a stronger electric field between the gaps of the metal wires, resulting in greater sensitivity. The invention uses a vector network analyzer to measure the change value of the resonant frequency after the sensor is added to the sample to be tested, and then determines the dielectric constant and thickness of the medium to be tested.

在实际应用中,所述电场集中于两个所述圆形互补螺旋谐振器4之间的间隙。In practical application, the electric field is concentrated in the gap between the two circular complementary spiral resonators 4 .

在实际应用中,经过优化,介质基底2的厚度综合测量灵敏度与制造成本决定,材料为特氟龙。微带线1的特征阻抗为50欧姆,以达到匹配。In practical applications, after optimization, the thickness of the dielectric substrate 2 is determined by comprehensive measurement sensitivity and manufacturing cost, and the material is Teflon. The characteristic impedance of the microstrip line 1 is 50 ohms to achieve matching.

图4为本发明的传感器对应的等效电路图。当谐振器的电尺寸足够小时,即可用集总电路模型描述其电磁相应。Cc1和Cc2分别表示微带线1与两个谐振器之间的耦合电容;Lr和Cr是螺旋谐振器自身的等效电感和电容;两个谐振器之间存在的电耦合以及磁耦合分别由等效电路中的互电容CM以及互感M表示;P1为等效电路的第一端口;R1为微带线的等效电阻;P2为等效电路的第二端口;Rr为谐振器的等效电阻。Fig. 4 is an equivalent circuit diagram corresponding to the sensor of the present invention. When the electrical size of the resonator is sufficiently small, its electromagnetic response can be described by a lumped circuit model. C c1 and C c2 represent the coupling capacitance between the microstrip line 1 and the two resonators, respectively; L r and C r are the equivalent inductance and capacitance of the spiral resonator itself; the electrical coupling between the two resonators and The magnetic coupling is represented by mutual capacitance C M and mutual inductance M in the equivalent circuit; P1 is the first port of the equivalent circuit; R1 is the equivalent resistance of the microstrip line; P2 is the second port of the equivalent circuit; Rr is The equivalent resistance of the resonator.

如此,两个谐振支路就可以产生两个谐振点。随着两个谐振器之间距离的增大,互电容和互感将会减小。当无耦合时与单个谐振器情况相同。互电容可以等效为两支路间的Π形电路。当传感器上放置待测样品时,待测样品会使电容Cr发生变化。此时谐振频率f对电容Cr的导数大于无耦合情况,因此传感器的灵敏度会提高。In this way, two resonance branches can generate two resonance points. As the distance between the two resonators increases, the mutual capacitance and mutual inductance will decrease. Same as the single resonator case when there is no coupling. Mutual capacitance can be equivalent to a Π-shaped circuit between two branches. When the sample to be tested is placed on the sensor, the sample to be tested will change the capacitance Cr. At this time, the derivative of the resonant frequency f to the capacitance C r is greater than that without coupling, so the sensitivity of the sensor will be improved.

本发明采用的圆形互补螺旋谐振器4,与通常使用的CSRR(互补开口谐振环)相比,可以使电场更加集中于谐振器的间隙之中,当待测样品对谐振器的电场造成微小扰动时,可以获得更高的灵敏度。另外,相比其他形状,圆形谐振器可以得到更高的等效电容,而等效电感的值相对变化较小,从而得到较高的品质因数Q值,由此可以使得测量的精度更高。The circular complementary spiral resonator 4 that the present invention adopts can make the electric field more concentrated in the gap of the resonator compared with the commonly used CSRR (complementary split resonator). When disturbed, higher sensitivity can be obtained. In addition, compared with other shapes, the circular resonator can obtain a higher equivalent capacitance, and the value of the equivalent inductance is relatively small, thereby obtaining a higher quality factor Q value, which can make the measurement accuracy higher .

本发明通过全波仿真软件的建模仿真,对上述确定尺寸的传感器进行建模仿真。如图5所示,其中,εr为待测材料样品的介电常数,待测样品厚度1mm时,本发明得到不同介电常数下的传输参数S21仿真图。当介电常数保持不变时,fL和fH都会随着厚度的增大而下降。当厚度达到1mm后,谐振频率的变化较小。待测样品的相对介电常数较大时,对厚度测量的灵敏度也会上升。另外,保持厚度不变的情况下,fL和fH也会随着介电常数的增大而下降。当待测样品的厚度较大时,谐振频率关于介电常数的灵敏度也较大。从中可以得到,当待测样品的厚度为1mm时,介电常数由1变化至10时,两个谐振频率的偏移量可达1.406GHz和1.516GHz,介电常数每变化1的平均偏移量为156MHz和168MHz,灵敏度较高。The present invention carries out modeling and simulation on the above-mentioned sensor with a certain size through the modeling and simulation of the full-wave simulation software. As shown in Figure 5, where εr is the dielectric constant of the material sample to be tested, when the thickness of the sample to be tested is 1mm, the present invention obtains the simulation diagram of the transmission parameter S21 under different dielectric constants. When the dielectric constant remains constant, both f L and f H decrease with increasing thickness. When the thickness reaches 1mm, the change of resonance frequency is small. When the relative dielectric constant of the sample to be tested is large, the sensitivity to thickness measurement will also increase. In addition, when the thickness remains constant, f L and f H will also decrease with the increase of dielectric constant. When the thickness of the sample to be measured is larger, the sensitivity of the resonance frequency with respect to the dielectric constant is also larger. It can be obtained from it that when the thickness of the sample to be tested is 1mm, when the dielectric constant changes from 1 to 10, the offsets of the two resonance frequencies can reach 1.406GHz and 1.516GHz, and the average offset of each 1 change in the dielectric constant The frequency is 156MHz and 168MHz, and the sensitivity is high.

如图6所示,待测样品为FR4介质(相对介电常数4.5)时,本发明得到不同厚度下的传输参数S21仿真图。当厚度从0.1mm变化至1mm时,两个谐振频率的偏移量为372MHz和404MHz,每0.1mm厚度导致的平均偏移量为41.3MHz和44.9MHz,灵敏度较高。As shown in Fig. 6, when the sample to be tested is FR4 medium (relative permittivity 4.5), the present invention obtains simulation diagrams of transmission parameters S21 under different thicknesses. When the thickness changes from 0.1mm to 1mm, the offsets of the two resonant frequencies are 372MHz and 404MHz, and the average offsets caused by each 0.1mm thickness are 41.3MHz and 44.9MHz, and the sensitivity is high.

图7和图8为本发明的两个谐振频点关于介电常数和厚度的关系图。为了从谐振频率值得到待测样品的厚度和介电常数,需要建立数学模型找到他们的关系。本发明中,谐振频率与待测介质介电常数之间的关系可以用二次函数表示,与厚度之间的关系可以用指数函数表示。并且当待测样品的相对介电常数为1或厚度为0时,谐振频率应当等于空载谐振频率。基于数据拟合,可以得到谐振频率与厚度和介电常数的关系式为:Fig. 7 and Fig. 8 are diagrams of relationship between two resonant frequency points with respect to permittivity and thickness in the present invention. In order to obtain the thickness and dielectric constant of the sample to be tested from the resonant frequency value, it is necessary to establish a mathematical model to find their relationship. In the present invention, the relationship between the resonance frequency and the dielectric constant of the medium to be measured can be expressed by a quadratic function, and the relationship between the resonant frequency and the thickness can be expressed by an exponential function. And when the relative permittivity of the sample to be tested is 1 or the thickness is 0, the resonant frequency should be equal to the no-load resonant frequency. Based on the data fitting, the relationship between the resonance frequency and the thickness and permittivity can be obtained as:

fLd,t)=3.086-0.2836εd+0.0155εd 2+(0.2836εd-0.0155εd 2)e-t/0.1483 f Ld ,t)=3.086-0.2836ε d +0.0155ε d 2 +(0.2836ε d -0.0155ε d 2 )e -t/0.1483

fHd,t)=3.248-0.317εd+0.0181εd 2+(0.317εd-0.0181εd 2)e-t/0.1353 f Hd ,t)=3.248-0.317ε d +0.0181ε d 2 +(0.317ε d -0.0181ε d 2 )e -t/0.1353

其中,fL为两个谐振频率中较低的频率值;fH为两个谐振频率中较高的频率值;,fLd,t)为两个谐振频率中较低的频率值关于εd和t的函数;fHd,t)为两个谐振频率中较高的频率值关于εd和t的函数;为待测材料样品的介电常数与空气的介电常数之差;t为待测材料样品的厚度。Among them, f L is the lower frequency value of the two resonance frequencies; f H is the higher frequency value of the two resonance frequencies; f Ld , t) is the lower frequency value of the two resonance frequencies The function of ε d and t; f Hd , t) is the function of the higher frequency value of the two resonance frequencies about ε d and t; it is the dielectric constant of the material sample to be tested and the dielectric constant of air The difference; t is the thickness of the material sample to be tested.

基于上述公式,当使用本发明进行相对介电常数和厚度测量时,可以将待测样品放置在两个螺旋谐振器下方,并将它们全部覆盖;通过传感器的两个谐振频率偏移,计算出待测材料样品的介电常数和厚度。Based on the above formula, when using the present invention to measure the relative permittivity and thickness, the sample to be tested can be placed under the two spiral resonators and cover them all; through the two resonance frequency shifts of the sensor, the calculated The dielectric constant and thickness of the material sample to be tested.

本发明的实验过程简单、样品制备要求较低、测试容易。The invention has the advantages of simple experimental process, low sample preparation requirements and easy testing.

本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分互相参见即可。Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.

本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的一般技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处。综上所述,本说明书内容不应理解为对本发明的限制。In this paper, specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; meanwhile, for those of ordinary skill in the art, according to the present invention Thoughts, there will be changes in specific implementation methods and application ranges. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims (8)

1.一种耦合补型螺旋谐振传感器,其特征在于,包括:由上至下依次叠放的微带线、介质基底以及金属接地板;1. A coupled complementary spiral resonant sensor, characterized in that it comprises: a microstrip line, a dielectric substrate and a metal grounding plate stacked sequentially from top to bottom; 所述金属接地板上刻蚀两个互相耦合的圆形互补旋转谐振器;所述金属接地板的底部放置待测材料样品,且所述待测材料样品设于两个所述圆形互补旋转谐振器的下方;Two mutually coupled circular complementary rotating resonators are etched on the metal grounding plate; the material sample to be tested is placed on the bottom of the metal grounding plate, and the material sample to be tested is arranged on the two circular complementary rotating resonators. below the resonator; 当所述待测材料样品与电场能量相互作用扰乱场分布时,获取两个所述圆形互补旋转谐振器的谐振频率,并根据两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数。When the material sample to be tested interacts with the electric field energy to disturb the field distribution, obtain the resonant frequencies of the two circular complementary rotating resonators, and simultaneously measure the two resonant frequencies to obtain the resonant frequency of the material sample to be tested thickness and dielectric constant. 2.根据权利要求1所述的耦合补型螺旋谐振传感器,其特征在于,所述圆形互补旋转谐振器由一条金属线螺旋而成。2 . The coupled complementary spiral resonant sensor according to claim 1 , wherein the circular complementary rotating resonator is helically formed by a metal wire. 3.根据权利要求2所述的耦合补型螺旋谐振传感器,其特征在于,通过改变所述圆形互补旋转谐振器的外直径、相邻的金属线之间的间距、金属线宽以及两个所述圆形互补旋转谐振器之间的间隙,调整耦合补型螺旋谐振传感器的品质因数Q值以及测试频率。3. The coupled complementary spiral resonant sensor according to claim 2, characterized in that, by changing the outer diameter of the circular complementary rotating resonator, the spacing between adjacent metal wires, the metal wire width and two The gap between the circular complementary rotating resonators adjusts the quality factor Q value and test frequency of the coupled complementary spiral resonant sensor. 4.根据权利要求2所述的耦合补型螺旋谐振传感器,其特征在于,所述电场集中于两个所述圆形互补旋转谐振器之间的间隙。4. The coupled complementary spiral resonant sensor according to claim 2, wherein the electric field is concentrated in the gap between the two circular complementary rotating resonators. 5.根据权利要求1所述的耦合补型螺旋谐振传感器,其特征在于,所述谐振频率测量与所述待测材料样品的厚度和介电常数的关系式为:5. coupling complementary type spiral resonance sensor according to claim 1, is characterized in that, the relational expression of described resonant frequency measurement and the thickness of described material sample to be measured and dielectric constant is: fLd,t)=3.086-0.2836εd+0.0155εd 2+(0.2836εd-0.0155εd 2)e-t/0.1483 f Ld ,t)=3.086-0.2836ε d +0.0155ε d 2 +(0.2836ε d -0.0155ε d 2 )e -t/0.1483 fHd,t)=3.248-0.317εd+0.0181εd 2+(0.317εd-0.0181εd 2)e-t/0.1353 f Hd ,t)=3.248-0.317ε d +0.0181ε d 2 +(0.317ε d -0.0181ε d 2 )e -t/0.1353 其中,fL为两个谐振频率中较低的频率值;fH为两个谐振频率中较高的频率值;,fLd,t)为两个谐振频率中较低的频率值关于δd和t的函数;fHd,t)为两个谐振频率中较高的频率值关于εd和t的函数;为待测材料样品的介电常数与空气的介电常数之差;t为待测材料样品的厚度。Among them, f L is the lower frequency value of the two resonance frequencies; f H is the higher frequency value of the two resonance frequencies; f Ld , t) is the lower frequency value of the two resonance frequencies The function of δ d and t; f Hd , t) is the function of the higher frequency value of the two resonance frequencies about ε d and t; it is the dielectric constant of the material sample to be tested and the dielectric constant of air The difference; t is the thickness of the material sample to be tested. 6.根据权利要求1所述的耦合补型螺旋谐振传感器,其特征在于,所述微带线的两端连接SMA连接器,在测量时,所述微带线通过所述SMA连接器与矢量网络分析仪相连接;所述矢量网络分析仪用于分析两个所述谐振频率同时测量得到所述待测材料样品的厚度和介电常数。6. coupling complementary type spiral resonant sensor according to claim 1, is characterized in that, the two ends of described microstrip line connect SMA connector, when measuring, described microstrip line passes through described SMA connector and vector The network analyzer is connected; the vector network analyzer is used to analyze the two resonant frequencies and measure simultaneously to obtain the thickness and dielectric constant of the material sample to be tested. 7.根据权利要求1所述的耦合补型螺旋谐振传感器,其特征在于,所述微带线的特征阻抗为50欧姆。7. The coupled complementary spiral resonance sensor according to claim 1, wherein the characteristic impedance of the microstrip line is 50 ohms. 8.根据权利要求1所述的耦合补型螺旋谐振传感器,其特征在于,所述介质基底的材料为特氟龙。8. The coupled complementary spiral resonance sensor according to claim 1, wherein the material of the dielectric substrate is Teflon.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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