CN115570219A - A method and device for laser etching composite electrolytic machining of ice mask - Google Patents
A method and device for laser etching composite electrolytic machining of ice mask Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及电解加工技术领域,具体为一种冰掩膜激光刻蚀复合电解加工方法与装置。The invention relates to the technical field of electrolytic processing, in particular to an ice mask laser etching composite electrolytic processing method and device.
背景技术Background technique
随着科技的不断发展,微槽类结构出现越来越多,被大量应用于军工、医疗、传热、燃料电池等领域关键设备的生产与制造当中。例如燃料电池中重要的组件双极板,两侧具有沟槽结构,以保证反应气体的均匀分布以及及时散出热量,因此对沟槽截面形貌及沿程的均匀性有较高要求。在生物医学领域,研究者通过在钛类植入物的表面加工微细阵列沟槽,可以用于存储抗菌肽,从而提高植入体的抗菌性和细胞相容性。根据仿生学研究,V型微槽阵列结构可以降低流体在材料表面的粘滞阻力,获得显著的减阻效果,除此之外,微槽在例如材料等领域也有重要应用价值,因此,对阵列微槽结构的精确、高质量加工具有重要意义(王国乾.金属阵列结构模板电解加工关键技术研究.南京航空航天大学,2018)。With the continuous development of science and technology, more and more micro-groove structures appear, and are widely used in the production and manufacture of key equipment in military, medical, heat transfer, fuel cell and other fields. For example, bipolar plates, an important component in fuel cells, have groove structures on both sides to ensure uniform distribution of reaction gases and timely heat dissipation. Therefore, there are high requirements for groove cross-sectional morphology and uniformity along the process. In the field of biomedicine, researchers can process micro-array grooves on the surface of titanium implants, which can be used to store antimicrobial peptides, thereby improving the antibacterial and cytocompatibility of implants. According to bionics research, the V-shaped microgroove array structure can reduce the viscous resistance of the fluid on the surface of the material and obtain a significant drag reduction effect. In addition, microgrooves also have important application values in fields such as materials. Therefore, the array Accurate and high-quality processing of microgroove structures is of great significance (Wang Guoqian. Research on key technologies of electrolytic machining of metal array structure templates. Nanjing University of Aeronautics and Astronautics, 2018).
近年来国内外学者针对为槽结构开展了激光加工、磨料气射流加工、电火花加工、射流电解加工以及掩膜电解加工等加工方法的研究。其中射流电解加工和掩膜电解加工是基于阳极电化学溶解的微槽制造方法,该方法有着加工效率高、表面质量好、无刀具损耗、无加工残余应力等诸多优点,在微槽的生产制造当中具有独特的加工优势。In recent years, scholars at home and abroad have carried out research on laser machining, abrasive gas jet machining, electric discharge machining, jet electrolytic machining, and mask electrolytic machining for groove structures. Among them, jet electrolytic machining and mask electrolytic machining are microgroove manufacturing methods based on anode electrochemical dissolution. This method has many advantages such as high processing efficiency, good surface quality, no tool loss, and no machining residual stress. It is used in the production and manufacture of microgrooves. Which has unique processing advantages.
然而射流电解加工和掩膜电解加工在进行微槽加工时也有着难以解决的问题。在射流电解加工中,管电极相对工件做平移移动,其扫略的部位将会加工出沟槽形状,加工时高速的射流还可以快速带走产物、热量,保障了加工部位的加工质量,但由于电场的连续性以及杂散电流的存在,射流电解加工加工的槽口部位往往呈现喇叭口,很难获得锐利的边缘;其次,在其扫略过后,已加工表面会被暴露在电场环境中,杂散电流会将已加工沟槽表面破坏,降低表面质量,尤其是在进行钛合金等材料加工时该现象尤为明显。而掩膜电解加工使用中通过使用掩膜覆盖工件表面,保护非加工部位,而仅对掩膜开口缝隙部位进行腐蚀加工,通过制作不同形状的掩膜开口缝隙,可以对不同形状缝隙进行加工,通过使用柔性材料掩膜,还可以对复杂曲面进行掩膜电解刻蚀(陈晓磊.基于厚层模板的微坑阵列微细电解加工技术研究.南京航空航天大学,2016.)。然而,掩膜电解加工也存在一定问题。首先,掩膜存在一定厚度,电解液不易对开口缝隙内进行冲刷,这对产物的排除非常不利,这使得各部位加工尺寸难以保证一致,也难以保证加工质量;其次,掩膜并不灵活,只适合固定尺寸形状沟槽加工,对于小批量产品并不友好。However, jet electrolytic machining and mask electrolytic machining also have difficult problems in microgroove machining. In jet electrolytic machining, the tube electrode moves in translation relative to the workpiece, and the swept part will be processed into a groove shape. During processing, the high-speed jet can quickly take away the product and heat, ensuring the processing quality of the processed part, but Due to the continuity of the electric field and the existence of stray currents, the notch part processed by jet electrolytic machining often presents a bell mouth, and it is difficult to obtain a sharp edge; secondly, after its sweeping, the processed surface will be exposed to the electric field environment , Stray current will damage the surface of the processed groove and reduce the surface quality, especially when processing titanium alloy and other materials. In the use of mask electrolytic machining, the mask is used to cover the surface of the workpiece to protect the non-processed parts, and only the opening and gap parts of the mask are corroded. By making different shapes of mask opening and gaps, different shapes of gaps can be processed. By using flexible material masks, mask electrolytic etching can also be performed on complex curved surfaces (Chen Xiaolei. Research on micro-electrolytic machining technology of micro-pit arrays based on thick-layer templates. Nanjing University of Aeronautics and Astronautics, 2016.). However, mask electrolytic machining also has certain problems. First of all, the mask has a certain thickness, and the electrolyte is not easy to wash the opening gap, which is very unfavorable to the exclusion of products, which makes it difficult to ensure consistent processing dimensions of various parts, and it is also difficult to guarantee the processing quality; secondly, the mask is not flexible. It is only suitable for groove processing of fixed size and shape, and is not friendly to small batch products.
上述因素限制了电解加工在沟槽类零件的生产与制造,基于此,本发明设计了一种冰掩膜激光刻蚀复合电解加工方法与装置以解决上述问题。The above factors limit the production and manufacture of grooved parts by electrolytic machining. Based on this, the present invention designs a method and device of ice mask laser etching composite electrolytic machining to solve the above problems.
发明内容Contents of the invention
本发明的目的在于提供一种冰掩膜激光刻蚀复合电解加工方法与装置,以解决上述背景技术中提出的问题。The object of the present invention is to provide a laser etching composite electrolytic machining method and device for an ice mask, so as to solve the problems raised in the above-mentioned background technology.
为实现上述目的,本发明提供如下技术方案:一种冰掩膜激光刻蚀复合电解加工装置,包括管电极射流装置、激光器、低温装置、去离子水喷淋装置;In order to achieve the above object, the present invention provides the following technical solutions: an ice mask laser etching composite electrolytic processing device, including a tube electrode jet device, a laser, a low temperature device, and a deionized water spray device;
管电极射流装置由管电极夹持主体、管电极、密封垫、激光透镜与引电块共同组成。The tube electrode jet device is composed of a tube electrode clamping body, a tube electrode, a gasket, a laser lens and a lead block.
优选的,其中管电极夹持主体呈“T”型结构,“T”型两侧为对称进液口,保证电解液流场的均匀性;中间上方部位有开口,该部位安装激光透镜,二者之间由密封垫保证电解液不外泄;在管电极夹持主体下方中间部位为管电极夹持结构,对管电极进行夹持,管电极夹持后的安装精度以及电解液进行密封。Preferably, the clamping body of the tube electrode has a "T"-shaped structure, and the two sides of the "T" shape are symmetrical liquid inlets to ensure the uniformity of the electrolyte flow field; there is an opening at the upper part of the middle, and a laser lens is installed at this part. The gasket between them ensures that the electrolyte does not leak out; the middle part under the tube electrode clamping body is a tube electrode clamping structure, which clamps the tube electrode, and seals the installation accuracy and electrolyte after the tube electrode is clamped.
优选的,管电极夹持主体外壁安装有引电块,用于将电流引入,将管电极和电源负极联通。Preferably, the outer wall of the clamping body of the tube electrode is equipped with a lead block for introducing current and connecting the tube electrode with the negative pole of the power supply.
优选的,激光器固定于管电极射流装置上方,激光束正对于激光透镜,需保证激光束在透过激光透镜后能顺利进入管电极并进入加工区;设置激光器功率,需满足快速融化冰层而又不能过高,避免融化范围过大或烧伤工件。Preferably, the laser is fixed above the tube electrode jet device, and the laser beam is facing the laser lens. It is necessary to ensure that the laser beam can smoothly enter the tube electrode and enter the processing area after passing through the laser lens; the power of the laser needs to be set to meet the requirements of rapidly melting the ice layer. It should not be too high to avoid excessive melting range or burn the workpiece.
优选的,低温装置持续产生恒定温度的低温气体,生成的气体在泵和管路的作用下按照一定速率通到工件正下方,使得工件本体保持一个相对恒定的低温,该温度需保证在工件表面能快速结冰。Preferably, the low-temperature device continuously generates low-temperature gas at a constant temperature, and the generated gas passes directly under the workpiece at a certain rate under the action of the pump and pipeline, so that the workpiece body maintains a relatively constant low temperature, and the temperature needs to be guaranteed on the surface of the workpiece Freezes quickly.
优选的,去离子水喷淋装置需保证可对工件表面均匀喷淋去离子水,确保工件表面在加工前结出均匀厚度的冰。Preferably, the deionized water spraying device needs to ensure that the deionized water can be evenly sprayed on the surface of the workpiece to ensure that ice of uniform thickness is formed on the surface of the workpiece before processing.
一种冰掩膜激光刻蚀复合电解加工方法,包括以下步骤:An ice mask laser etching composite electrolytic processing method, comprising the following steps:
步骤1、设置安装管电极射流装置,以保证电流顺利从引电结构流入加工区;
步骤2、安装激光器,快速融化冰层而又不能过高,避免融化范围过大或烧伤工件;
步骤3、设置安装低温装置,保证在工件表面能快速结冰;
步骤4、设置去离子水喷淋装置,在加工前结出均匀厚度的冰层;
步骤5、接通加工电流,保护住非加工区域材料表面,避免了杂散腐蚀的发生;
步骤6、管电极与工件做相对运动,使得已加工表面得到保护,避免的二次腐蚀,为获得高质量表面提供了保障;
步骤7、结束加工,最终获得理想形状的沟槽结构。In
与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:
1、通过使用冰掩膜,保护了非加工表面,避免了杂散电流的发生,提高了工件加工表面质量。1. By using the ice mask, the non-processing surface is protected, the occurrence of stray current is avoided, and the surface quality of the workpiece is improved.
2、冰层的存在提升了沟槽结构开口部位加工控制能力,抑制了喇叭口的产生。2. The existence of the ice layer improves the processing and control ability of the opening part of the groove structure, and suppresses the generation of the bell mouth.
3、通过控制冰层厚度,可以调控沟槽内电场分布,从而调解沟槽结构,提升了加工的灵活性。3. By controlling the thickness of the ice layer, the distribution of the electric field in the groove can be adjusted, thereby adjusting the structure of the groove and improving the flexibility of processing.
4、冰掩膜相较于传统掩膜加工更适合流水线,同时其成本以及后期处理也更为容易,具有极高的研究价值。4. Compared with traditional mask processing, ice mask is more suitable for assembly line, and its cost and post-processing are also easier, which has extremely high research value.
当然,实施本发明的任一产品并不一定需要同时达到以上所述的所有优点。Of course, any product implementing the present invention does not necessarily need to achieve all the above-mentioned advantages at the same time.
附图说明Description of drawings
为了更清楚地说明本发明实施例的技术方案,下面将对实施例描述所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the accompanying drawings that are required for the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. Those of ordinary skill in the art can also obtain other drawings based on these drawings without any creative effort.
图1是冰掩膜激光刻蚀复合电解加工装置系统图;Figure 1 is a system diagram of an ice mask laser etching composite electrolytic processing device;
图2是管电极射流装置结构图;Fig. 2 is a structural diagram of a tube electrode jet device;
图3是冰掩膜激光刻蚀复合电解加工流程图。Fig. 3 is a flow chart of ice mask laser etching composite electrolytic machining.
附图中,各标号所代表的部件列表如下:In the accompanying drawings, the list of parts represented by each label is as follows:
1、电源;2、低温装置;3、激光器;4、管电极射流装置;5、去离子水喷淋装置;6、工件;7、引电块;8、密封垫;9、激光透镜;10、管电极夹持主体;11、管电极。1. Power supply; 2. Low temperature device; 3. Laser; 4. Tube electrode jet device; 5. Deionized water spray device; 6. Work piece; 7. Lead block; 8. Gasket; 9. Laser lens; 10 1. The clamping body of the tube electrode; 11. The tube electrode.
具体实施方式detailed description
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
请参阅图1至图3,本发明提供一种冰掩膜激光刻蚀复合电解加工方法与装置技术方案:参考图2设置安装管电极射流装置4,该装置管电极夹持主体10、管电极11、密封垫8、激光透镜9、引电块7共同组成;其中管电极夹持主体10呈“T”型结构,“T”型两侧为对称进液口,保证电解液流场的均匀性;中间上方部位有开口,该部位安装激光透镜9,二者之间由密封垫8保证电解液不外泄;在管电极夹持主体10下方中间部位为管电极夹持结构,可对管电极11进行夹持,需保证管电极11夹持后的安装精度以及电解液的良好密封;在管电极夹持主体10外壁安装有引电块7,用于将电流引入,将管电极11和电源1负极联通;管电极11为中空管状结构,材料为金属材料,其外表面涂有绝缘层抑制杂散电流的形成,在管电极11的加工端面和引电部位需保证无绝缘层,以保证电流顺利从引电结构流入加工区。Please refer to Fig. 1 to Fig. 3, the present invention provides a kind of ice mask laser etching composite electrolytic processing method and device technical scheme: refer to Fig. 2 to install the tube
参考图2安装激光器3,将激光器3固定于管电极射流装置4上方,激光束正对于激光透镜9,需保证激光束在透过激光透镜9后能顺利进入管电极11并进入加工区;设置激光器3功率,需满足快速融化冰层而又不能过高,避免融化范围过大或烧伤工件。Refer to Figure 2 to install the
参考图2设置安装低温装置2,通过该装置持续产生恒定温度的低温气体,生成的气体在泵和管路的作用下按照一定速率通到工件正下方,使得工件本体保持一个相对恒定的低温,该温度需保证在工件表面能快速结冰。Refer to Figure 2 to set up and install the low-
参考图2设置去离子水喷淋装置5,需保证可对工件表面均匀喷淋去离子水,确保工件表面在加工前结出均匀厚度的冰层。Referring to Figure 2 to set up the deionized
参考图3接通加工电流,其中管电极射流装置4接电源1负极,而工件6接电源正极;管电极射流装置4进液口接通电解液循环系统,引入高压电解液,通过管电极11射向工件;同时启动激光器3,激光束通过激光透镜9进入管电极11,并经电解液射流引导射向工件6加工部位,在激光束的作用下将所需加工部位冰层溶解去除;去除部位被暴露出来,电解液射在暴露部位,导通电流,使得该部位材料在电化学作用下发生氧化反应,材料被去除,而而非加工部位由于冰层的存在,阻断了电流,从而保护住非加工区域材料表面,避免了杂散腐蚀的发生。Turn on the machining current with reference to Figure 3, wherein the tube
参考图3管电极11与工件6做相对运动,在新的加工部位重复发生步骤5的内容,持续去除材料,并形成沟槽结构;同时,已加工表面随着相对运动的进行,离开了激光束的照射,薄面残留的溶液在低温的作用下再次结冰,使得已加工表面得到保护,避免的二次腐蚀,为获得高质量表面提供了保障。Referring to Figure 3, the
步骤7、结束加工,最终获得理想形状的沟槽结构。In
本发明所提供的产品型号只是为本技术方案依据产品的结构特征进行的使用,其产品会在购买后进行调整与改造,使之更加匹配和符合本发明所属技术方案,其为本技术方案一个最佳应用的技术方案,其产品的型号可以依据其需要的技术参数进行替换和改造,其为本领域所属技术人员所熟知的,因此,本领域所属技术人员可以清楚的通过本发明所提供的技术方案得到对应的使用效果。The product model provided by the present invention is only for the use of this technical solution based on the structural characteristics of the product, and its product will be adjusted and transformed after purchase to make it more matching and in line with the technical solution of the present invention, which is one of the technical solutions The technical solution for the best application, the model of its product can be replaced and transformed according to its required technical parameters, which is well known to those skilled in the art, therefore, those skilled in the art can clearly pass through the provided by the present invention The technical solution obtains the corresponding use effect.
在本说明书的描述中,参考术语“一个实施例”、“示例”、“具体示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, descriptions with reference to the terms "one embodiment", "example", "specific example" and the like mean that specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment of the present invention. In an embodiment or example. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
以上公开的本发明优选实施例只是用于帮助阐述本发明。优选实施例并没有详尽叙述所有的细节,也不限制该发明仅为所述的具体实施方式。显然,根据本说明书的内容,可作很多的修改和变化。本说明书选取并具体描述这些实施例,是为了更好地解释本发明的原理和实际应用,从而使所属技术领域技术人员能很好地理解和利用本发明。本发明仅受权利要求书及其全部范围和等效物的限制。The preferred embodiments of the invention disclosed above are only to help illustrate the invention. The preferred embodiments are not exhaustive in all detail, nor are the inventions limited to specific embodiments described. Obviously, many modifications and variations can be made based on the contents of this specification. This description selects and specifically describes these embodiments in order to better explain the principle and practical application of the present invention, so that those skilled in the art can well understand and utilize the present invention. The invention is to be limited only by the claims, along with their full scope and equivalents.
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