CN115561177B - Design, preparation method and circular dichroism spectrum test system of optical metasurface - Google Patents
Design, preparation method and circular dichroism spectrum test system of optical metasurface Download PDFInfo
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/19—Dichroism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
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Abstract
本发明公开了一种光学超构表面的设计、制备方法和圆二色性光谱测试系统，涉及光学活性物质的光谱分析领域。本发明中的圆二色性光谱测试系统包括宽带光源、光学超构表面、物镜、透镜和光谱仪，采用光学超构表面对入射光中左旋圆偏振和右旋圆偏振光成分实现分束聚焦，经过被测样品后两束光同时进入光谱仪的狭缝，出来的信号进行简单地运算后可直接得到微区样品的圆二色光谱。本发明可以同时记录光线的左旋偏振光和右偏振光对应的光谱信号，实现快速地测量样本的圆二色性光谱。
The present invention discloses a design and preparation method of an optical metasurface and a circular dichroism spectrum test system, and relates to the field of spectral analysis of optically active substances. The circular dichroism spectrum test system in the present invention includes a broadband light source, an optical metasurface, an objective lens, a lens, and a spectrometer. The optical metasurface is used to realize beam splitting and focusing of the left-handed circularly polarized light components and the right-handed circularly polarized light components in the incident light. After passing through the sample to be tested, the two beams of light simultaneously enter the slit of the spectrometer, and the circular dichroism spectrum of the micro-area sample can be directly obtained after a simple calculation of the output signal. The present invention can simultaneously record the spectral signals corresponding to the left-handed polarized light and the right-handed polarized light of the light, and realize rapid measurement of the circular dichroism spectrum of the sample.
Description
Technical Field
The invention relates to the field of spectrum analysis of optical active substances, in particular to a design and preparation method of an optical super-structured surface and a circular dichroism spectrum test system.
Background
When light passes through an optically active substance, the substance has different absorption rates for left circularly polarized Light (LCP) and right circularly polarized light (RCP), and the difference between the two is called circular dichroism (Circular Dichroism, abbreviated as CD). Circular dichroism Spectroscopy (CD Spectroscopy) is a spectroscopic technique that is widely used to study various types of chiral molecules, particularly large biological molecules. For example, the secondary structure of a protein is sensitive to the environment, temperature, or pH, and CD spectra can be used to observe changes in the secondary structure of a protein as the environment changes or interacts with other molecules.
In the traditional circular dichroism spectrum testing system, left-handed circularly polarized light and right-handed circularly polarized light are alternately generated by utilizing a photoelastic modulator under the drive of alternating voltage of about 50 kHz. After passing through the sample to be tested, the modulated left circularly polarized light and right circularly polarized light are detected by a detector and then input into an amplifier and a phase-sensitive detector, and the detected signals are calculated to obtain CD. Thus, the equipment tends to be complex and the results of the test are not real-time. Therefore, the prior art cannot realize beam splitting focusing of left and right circularly polarized light and simultaneous incidence of the light into the spectrometer, and the test system is complex and has low detection efficiency.
Disclosure of Invention
The invention mainly aims to provide a design and preparation method of an optical super-structured surface and a circular dichroism spectrum testing system, which can solve the problems that the beam splitting focusing of left and right circularly polarized light and the simultaneous incidence of the light into a spectrometer cannot be realized simultaneously in the related art, and the testing system is complex and has low detection efficiency.
The optical super-structure surface has beam-splitting focusing function for left and right circularly polarized light, wherein the basic phase distribution required by the focusing function is thatWherein f represents the focal length of the optical super-structure surface, lambda represents the central wavelength of incident light when the optical super-structure surface works normally, x, y represents the coordinate position of a coordinate system established by taking the geometric central point of the optical super-structure surface as the origin, and the basic phase distribution required by beam splitting deflection is as followsWherein, theta i and theta t respectively represent the incident angle and the transmission angle of the incident light, the y direction is consistent with the slit direction of the spectrometer, deltay represents the distance of the focus deflected along the y direction,Is a constant phase factor. When the incident light is incident perpendicular to the optical super-structure surface, Δy=f·sin θ t,Thus, the optical super-structured surface needs to introduce a phase distributionThe focusing and deflection functions along the y direction of the incident light can be realized at the same time. To realize beam-splitting focusing of left-handed and right-handed circularly polarized light, the transmission angle θ t,LCP of left-handed circularly polarized light is opposite to the transmission angle θ t,RCP of right-handed circularly polarized light, satisfying θ t,LCP＝-θt,RCP.
The optical super-structure surface is composed of a transparent substrate and a nanoscale anisotropic sub-wavelength structure in a working band, when the incident light interacts with the anisotropic sub-wavelength structure, the circular polarization state of the incident light can be inverted and a geometric phase factor e 2iσα is generated, wherein sigma = ±1 represents the circular polarization state of the incident light, -1 represents left-handed circularly polarized light, +1 represents right-handed circularly polarized light, and alpha represents the azimuth angle of the anisotropic sub-wavelength structure on a plane. Therefore, the directional angular distribution of the nano-scale anisotropic structure is as followsWherein the method comprises the steps ofRepresenting the phase distribution of the optically super-structured surface, α (x, y) represents the direction angle of the anisotropic sub-wavelength structure. Then, the continuous regulation and control of the phase of the incident light from 0 pi to 2 pi can be realized by designing the direction angle of the anisotropic wavelength structure, and the phase change signs caused by the incident light in the left and right circular polarization states are opposite.
In order to achieve the above object, an aspect of the present invention provides a method for designing a super-structured surface in a circular dichroism spectrum testing system, comprising the steps of:
Acquiring a focal length f of an optical super-structured surface and a central wavelength lambda of incident light;
Respectively determining phase distribution required by a circular polarization focusing function and a circular polarization deflection function, and obtaining phase distribution required to be introduced into the optical super-structure surface;
Based on the phase distribution required to be introduced by the optical super-structured surface, respectively acquiring the directional angle distribution of a structural unit working for left-handed circularly polarized light and the directional angle distribution of a structural unit working for right-handed circularly polarized light by utilizing an optical geometric phase principle;
And designing corresponding specific implementation structures according to the directional angle distribution of each structural unit, and finally forming the optical super-structure surface.
Further, the phase distribution required by the circular polarization focusing function is as follows:
Where x, y represents the coordinate position.
Further, the phase distribution required by the circular polarization deflection function is as follows:
Where x, y represent coordinate positions, θ i and θ t represent an incident angle and a transmission angle, respectively, Is a constant phase factor.
The super-structured surface designed through the five steps can realize beam-splitting focusing on the left circularly polarized light and right circularly polarized light components in the incident light.
In an exemplary embodiment, the method for designing the super-structured surface is implemented by dividing two macroscopic regions, which are respectively directed to left-handed circularly polarized light and right-handed circularly polarized light.
In an exemplary embodiment, the method for designing the super-structured surface is implemented in a spatial multiplexing manner, and each structural unit in the space contains structural units working for left-handed circularly polarized light and right-handed circularly polarized light at the same time.
In another aspect of the invention, an optical super-structured surface is provided, the super-structured surface being designed according to the design method described above. The super-structured surface comprises a transparent substrate and a dielectric nano-pillar.
In an exemplary embodiment, the dielectric nanopillar material is silicon, titanium dioxide, or silicon nitride.
In another aspect, the present invention provides a method for preparing the optical super-structured surface, which includes the following steps:
preparing a dielectric layer on a transparent glass substrate;
Spin-coating electron beam photoresist on the dielectric layer, and then inscribing and developing the designed pattern;
preparing a metal protection layer on the dielectric layer and the electron beam photoresist by utilizing an electron beam evaporation technology;
Removing the electron beam photoresist and the metal protective layer on the electron beam photoresist, and reserving the metal protective layer on the dielectric layer;
etching the super-structured surface pattern in the dielectric layer by adopting a plasma etching process;
and removing the metal protection layer on the dielectric layer.
In an exemplary embodiment, the circular dichroism spectrum testing system employs a super-structured surface designed by the design method described above. The circular dichroism spectrum testing system comprises a broadband light source, a first lens, the super-structured surface, an objective lens, a second lens and a spectrometer;
the method comprises the steps that incident light emitted by a broadband light source passes through a first lens and the super-structured surface to realize circular polarization beam splitting focusing, left-handed circularly polarized light and right-handed circularly polarized light after beam splitting focusing are irradiated onto a sample to be tested, an objective lens and a second lens are matched to collect light beams after the sample to be tested is irradiated, the light beams enter a slit of a spectrometer, the spectrometer simultaneously records absorption spectrum information A (lambda) LCP and A (lambda) RCP of the sample to be tested on the left-handed circularly polarized light and the right-handed circularly polarized light, and the spectrometer is controlled by programming to calculate CD=A (lambda) LCP-A(λ)RCP to measure circular dichroism spectrum of the sample to be tested in real time.
Compared with the prior art, in the circular dichroism spectrum testing system, light emitted by the light source can realize beam splitting focusing of left-handed circularly polarized light and right-handed circularly polarized light through a single optical super-structured surface, namely, left-handed circularly polarized light and right-handed circularly polarized light are generated simultaneously. The two circularly polarized lights can pass through the sample to be tested at the same time and simultaneously enter the spectrometer, so that the rapid real-time test is realized. Thereby solving the problem of alternately generating left-handed polarized light and right-handed polarized light in the prior art. In addition, because the photoelastic modulator is omitted, the circular dichroism spectrum test system with the super-structured surface is more integrated than the traditional circular dichroism spectrum test system, and the rapid real-time test can be realized.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that are required to be used in the description of the embodiments of the present invention will be briefly described below.
Fig. 1 is a schematic structural diagram of a super-structure surface structure unit according to an embodiment of the present invention, wherein fig. 1a is a three-dimensional schematic diagram of a super-structure surface structure unit according to an embodiment of the present invention, and fig. 1b is a top view of a super-structure surface structure unit according to an embodiment of the present invention;
FIG. 2 is a top view of a super-structured surface according to an embodiment of the present invention;
FIG. 3 is a top view of another super-structured surface provided in an embodiment of the present invention;
FIG. 4 is a schematic diagram of a method for preparing a super-structured surface according to an embodiment of the present invention, wherein FIGS. 4 a-4 g correspond to steps 210-260;
Fig. 5 is a schematic diagram of a circular dichroism spectrum testing system based on a super-structured surface according to an embodiment of the present invention.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application.
As shown in fig. 1a, a three-dimensional schematic of a super-structured surface structure unit according to an embodiment is shown. As shown in fig. 1a, is the most basic building block in a super-structured surface, which comprises an anisotropic sub-wavelength structure 1 and a transparent substrate 2. Wherein the transparent substrate 2 has a length of P x and a width of P y. The anisotropic sub-wavelength structure 1 has a length L, a width W and a height H.
As shown in fig. 1b, a top view of a super-structured surface structure unit of an embodiment is shown. The direction angle of the anisotropic sub-wavelength structure of the super-structured surface on the plane is alpha.
In one embodiment, a method for designing a super-structured surface is provided, in which the direction angle of the anisotropic sub-wavelength structure distributed on the transparent substrate is designed, and the method for designing the super-structured surface includes the following five steps:
In step 110, design parameters f and λ of the optical super-structure surface are determined, where f represents a focal length of the optical super-structure surface and λ represents a center wavelength of incident light when the optical super-structure surface is operating normally.
Step 120, using the design parameters f and λ to calculate the phase distribution required for the focusing function
Wherein x and y represent coordinate positions of a coordinate system established by taking the geometric center point of the optical super-structured surface as an origin.
Step 130, using the design parameter λ to calculate the phase distribution required for the deflection function
Where θ t denotes a transmission angle of incident light.
Step 140, using the design parameters f and λ to calculate the phase distribution of the hypersurface
Step 150, using the design parameters f and λ to calculate the directional angular distribution of the anisotropic sub-wavelength structure operating with left-handed circularly polarized lightAnd a directional angle distribution of anisotropic sub-wavelength structures operating for right-handed circularly polarized light
As shown in FIG. 2, a top view of another embodiment of a super-structured surface is shown. The super-structured surface in the embodiment adopts the design of deflection focusing function for left-handed circularly polarized light and right-handed circularly polarized light by dividing two macroscopic areas. In the embodiment shown in fig. 2, the optical super-structured surface is divided into upper and lower areas of equal area, the upper one being for left-circularly polarized light and the lower one for right-circularly polarized light. Since the deflection functions of the left and right circularly polarized light have been divided by the macroscopic region, only the phase distribution required for the focusing function is considered in the design process of the super-structured surfaceIrrespective of the phase distribution required for the deflection function
It will be appreciated by those skilled in the art that the specific division of the regions is not limited to dividing into upper and lower portions, but may be divided into left and right halves, or any other manner of dividing equally into two regions, the purpose of the division being to spatially separate the working regions for the left and right turns so as to deflect the desired basic phase distribution
Specifically, the super-structured surface has a size of 2mm×2mm, the center wavelength λ=550 nm of the incident light when the optical super-structured surface is operating normally, and the focal length f=5 mm of the optical super-structured surface. The anisotropic sub-wavelength structure of the optical super-structured surface is made of silicon nitride nano-pillars, P x＝Py = 400nm, h = 300nm, w = 100nm, h = 1400nm, and the substrate is transparent glass.
The super-structured surface is divided into two parts with the same area, namely a first area and a second area, which respectively work corresponding to left-handed circularly polarized light and right-handed circularly polarized light. The phase distribution required for focusing is: The angular distribution of the anisotropic sub-wavelength structures in the first region is: The coordinate system (x 1,y1) is a coordinate system established by taking the central position of the first area as an origin, the y 1 direction is parallel to the slit direction of the spectrometer, the x 1 direction is perpendicular to the y 1 direction, and the angular distribution of the anisotropic sub-wavelength structure in the second area is as follows: wherein the coordinate system (x 2,y2) is a coordinate system established by taking the central position of the second area as an origin, the y 2 direction is parallel to the slit direction of the spectrometer, and the x 2 direction is perpendicular to the y 2 direction.
As shown in fig. 3, a top view of another super-structured surface of an embodiment. The super-structured surface in this embodiment adopts a spatial multiplexing method, and each structural unit cell contains structural units working for left-handed and right-handed circularly polarized light at the same time.
Specifically, the super-structured surface has a size of 2mm×2mm, the center wavelength λ=550 nm of the incident light when the optical super-structured surface is in normal operation, the focal length f=10 mm, and the lateral deflection Δy=0.5 mm. The anisotropic sub-wavelength structure of the optical super-structured surface is made of silicon nitride nano-pillars, P x＝Py = 400nm, H = 300nm, W = 100nm, H = 1400nm, and the substrate is transparent glass.
The basic phase distribution required for the focusing function is: Wherein x and y represent coordinate positions of a coordinate system established by taking the geometric center point of the optical super-structured surface as an origin, and basic phase distribution required by beam splitting deflection is as follows Where θ i and θ t represent the incident angle and the transmission angle of the incident light, respectively, Δy represents the deflection angle of the incident light along the y-direction (where the y-direction coincides with the slit direction of the spectrometer),Is a constant phase factor. When the incident light is incident perpendicular to the optical super-structure surface, Δy=f·sin θ t,Thus, the optical super-structured surface needs to introduce a phase distributionThe focusing and deflection functions along the y direction of the incident light can be realized at the same time.
The above phase distribution is now satisfied for the left-circularly polarized Light (LCP) and right-circularly polarized light (RCP) designs, respectivelyAndTo realize a focusing beam splitting function, wherein the deflection amount for the left circularly polarized light and the right circularly polarized light is delta y LCP＝-ΔyRCP.
And constructing 2 multiplied by 2 cells by adopting a space multiplexing method, wherein structural units working for left-handed and right-handed circularly polarized light are simultaneously contained in the cells to realize the phase distribution required by focusing deflection. Wherein the structural unit direction angle distribution working for left-handed circularly polarized light is: The structural unit direction angle distribution working for right-handed circularly polarized light is The coordinate system (x, y) is a coordinate system established by taking the geometric center point of the optical super-structured surface as an origin, the y direction is parallel to the slit direction of the spectrometer, and the x direction is perpendicular to the y direction.
Therefore, the super-structured surface designed by the super-structured surface design method provided by the application can realize the circular deflection beam splitting focusing function on incident light.
In one embodiment, as shown in fig. 4, the preparation process of the super-structured surface includes the following steps (in the figure, 51 is a transparent substrate, 52 is a medium, 53 is an electronic photoresist/photoresist, and 54 is an anti-etching metal):
at step 210, a dielectric layer is prepared on a transparent glass substrate (FIG. 4 a).
Preferably, the dielectric layer is made of silicon nitride, and the thickness of the dielectric layer is 1400nm.
Preferably, the method for preparing the dielectric layer is a chemical vapor deposition method, a magnetron sputtering method, a thermal evaporation method and the like.
Step 220, spin-coating an electron beam photoresist on the dielectric layer (fig. 4 b), and then writing and developing the designed pattern (fig. 4 c).
In step 230, a metal protection layer is prepared on the dielectric layer and the e-beam photoresist by using an e-beam evaporation technique (fig. 4 d).
Preferably, the metal protective layer material is chromium.
And 240, removing the electron beam photoresist and the metal protection layer on the electron beam photoresist, and retaining the metal protection layer on the dielectric layer (fig. 4 e).
At step 250, the super-structured surface pattern is written in the dielectric layer using a plasma etching process (fig. 4 f).
Step 260, removing the metal protection layer on the dielectric layer (fig. 4 g).
In some embodiments, the optical super-structure surface may not only be a single-layer transmissive type, but also be designed as a double-layer reflective optical super-structure surface to achieve the same function, wherein the reflective super-structure surface may utilize a metal-medium-metal three-layer reflective structure. In addition, through selecting different materials, the technical scheme can be expanded to other wave bands by designing and optimizing the super-structure functional unit. For the super-structured surface of the medium, materials such as silicon, titanium dioxide, silicon nitride and the like can be selected in a visible light wave band, silicon can be selected in an infrared wave band, gold (or silver and aluminum) and silicon dioxide media can be selected in a visible near infrared wave band, gold (or silver and aluminum) and media such as CaF 2、MgF2, ge and polytetrafluoroethylene can be selected in an infrared wave band, and gold (or silver and aluminum) and transparent ceramics can be selected in a microwave wave band. Different wave bands can be selected in the preparation method, such as multi-purpose electron beam lithography in the visible light wave band, ultraviolet lithography in the infrared wave band, and printed circuit board technology in the microwave wave band.
FIG. 5 is a schematic diagram of a circular dichroism spectrum testing system based on a super-structured surface according to one embodiment.
A circular dichroism spectrum testing system in this embodiment includes a broadband light source 601, a first lens 602, a super-structured surface 603, an objective lens 604, a second lens 605, and a spectrometer 606.
Specifically, the broadband light source 601 emits a stable light beam with a broadband, the light beam passes through the first lens 602 and the super-configured surface 603 to realize beam splitting focusing of left circularly polarized light and right circularly polarized light, the separated left circularly polarized light and right circularly polarized light are simultaneously irradiated onto the sample 607 to be detected, the objective lens 604 and the second lens 605 cooperate to collect the light beam after irradiating the sample 607 to be detected, the light beam enters a slit of the spectrometer 606, the spectrometer 606 simultaneously records absorption spectrum information a (λ) LCP and a (λ) RCP of the sample 607 to be detected on the left circularly polarized light and the right circularly polarized light, and the circular dichroism spectrum of the sample 607 to be detected is measured in real time through calculating cd=a (λ) LCP-A(λ)RCP.
The foregoing is only a partial embodiment of the present application, and it should be noted that it will be apparent to those skilled in the art that modifications and adaptations can be made without departing from the principles of the present application, and such modifications and adaptations are intended to be comprehended within the scope of the present application.
Claims (7)
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| CN108983337A (en) * | 2018-07-23 | 2018-12-11 | 南方科技大学 | Main mirror and auxiliary mirror with super-structure surface, preparation method of main mirror and auxiliary mirror and optical system |
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