CN115533776B - Fixing device and method of use - Google Patents
Fixing device and method of use Download PDFInfo
- Publication number
- CN115533776B CN115533776B CN202110745312.5A CN202110745312A CN115533776B CN 115533776 B CN115533776 B CN 115533776B CN 202110745312 A CN202110745312 A CN 202110745312A CN 115533776 B CN115533776 B CN 115533776B
- Authority
- CN
- China
- Prior art keywords
- air
- main
- sucker
- main air
- cavities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
Abstract
本发明公开一种固定装置及使用方法，所述固定装置包括吸盘和泄气通道；所述吸盘设有多个主气腔，所述多个主气腔通过所述泄气通道泄气；所述吸盘设有多组注气孔，每个所述主气腔各自与一组注气孔孔连通，所述注气孔连通供气设备，通过供气设备向所述主气腔供气，根据待测物的尺寸选择向不同的主气腔供气。采用本方案，固定状态下，待测物背面不会被固定装置大面积地接触到，并且一套固定装置可以固定不同尺寸的待测物，且可以灵活选择给全部主气腔充气或者仅给部分主气腔充气，避免了小尺寸的待测物受到外围主气腔的气流干扰而出现固定不稳的情况。
The present invention discloses a fixing device and a method of using the fixing device, the fixing device comprising a suction cup and an air release channel; the suction cup is provided with a plurality of main air cavities, the plurality of main air cavities are released through the air release channel; the suction cup is provided with a plurality of groups of air injection holes, each of the main air cavities is connected to a group of air injection holes, the air injection holes are connected to an air supply device, and air is supplied to the main air cavities through the air supply device, and air is supplied to different main air cavities according to the size of the object to be tested. With this solution, in a fixed state, the back of the object to be tested will not be contacted by a large area of the fixing device, and a set of fixing devices can fix objects to be tested of different sizes, and can flexibly choose to inflate all the main air cavities or only part of the main air cavities, thereby avoiding the situation where small-sized objects to be tested are disturbed by the airflow of the peripheral main air cavities and become unstable.
Description
Technical Field
The invention relates to the technical field of detection, in particular to a fixing device and a using method thereof
Background
When the object to be detected is processed and detected, the object to be detected is fixed by the fixing device. Some objects to be measured are affected by the material and structure of the object to be measured, the back of the object to be measured is expected to be in contact with the fixing device as little as possible when the object to be measured is fixed, and stable fixing can be achieved.
Disclosure of Invention
The invention provides a fixing device which comprises a sucker and an air leakage channel, wherein the sucker is provided with a plurality of main air cavities, the main air cavities are used for air leakage through the air leakage channel, the sucker is provided with a plurality of groups of air injection holes, each main air cavity is respectively communicated with one group of air injection holes, the air injection holes are communicated with an air supply device, and air is supplied to the main air cavities through the air supply device.
In one embodiment, the suction cup is provided with a plurality of groups of supporting components, each group of supporting components is respectively arranged at different positions of the suction cup and respectively supports edge areas of substances to be adsorbed of different sizes or different areas of the same substance to be adsorbed.
In one embodiment, the air leakage channel is a gap L formed between the sucker and the object to be tested and/or an air leakage hole provided in the sucker.
In one embodiment, the sucker is provided with a bottom wall part and a plurality of main wall parts protruding from the top surface of the bottom wall part, the main air cavity is formed by enclosing the top surface of the bottom wall part and the side wall surface of the main wall part, and the main wall parts isolate adjacent main air cavities.
In one embodiment, the air inlet of the air injection hole is arranged on the inner side wall surface of the main wall part or the top surface of the bottom wall part, and the air outlet of the air injection hole is arranged on the outer side surface of the main wall part or the bottom surface of the bottom wall part.
In one embodiment, the included angle between the air outlet direction of the air injection hole and the inner circumferential tangent of the main wall part is zero or an acute angle.
In one embodiment, the plurality of main air chambers encircle the center of the sucker and are sequentially sleeved from inside to outside.
In one embodiment, each set of said support assemblies is located on one of said main wall portions or said bottom wall portion in one of said main air cavities, respectively.
In one embodiment, the top surfaces of the plurality of main wall portions are all on the same plane.
In one embodiment, the sucker is provided with a central air cavity and a central wall part, the center of the sucker is located in the central air cavity, the central wall part protrudes from the top surface of the bottom wall part, the central air cavity is formed by enclosing the top surface of the bottom wall part and the side wall surface of the central wall part, and the sucker is provided with a group of additional air injection holes which are communicated with the central air cavity.
In one embodiment, the support assembly comprises a support member, and the fixing device further comprises a driving member, wherein the driving member drives the support member and the sucker to relatively move along a direction perpendicular to the suction surface.
In one embodiment, the driving member is provided with an inner cavity and an air hole communicated with the inner cavity, the air hole is communicated with the air supply device and the air extraction device, the pressure of the inner cavity is changed through the air supply device and the air extraction device, and the supporting member is driven to move along the direction perpendicular to the adsorption surface by utilizing the pressure change of the inner cavity.
In one embodiment, the sucker is provided with a plurality of groups of pressure detection holes, and each main air cavity is respectively communicated with one group of pressure detection holes. .
In addition, the invention also provides a use method based on the fixing device, which comprises the following steps:
S1, placing an object to be detected on a sucker of a fixing device;
S2, selecting to supply air to different main air cavities of the sucker according to the size of the object to be detected.
In one embodiment, the plurality of main air cavities of the sucker of the fixing device encircle the center of the sucker and are sequentially sleeved from inside to outside, and S2 is specifically that the air is selectively supplied to all the main air cavities within the area range of the object to be detected according to the size of the object to be detected.
In one embodiment, the suction cup is provided with a plurality of groups of pressure detection holes, each main air cavity is respectively communicated with one group of pressure detection holes, and the using method further comprises the following steps:
s3, communicating pressure detecting equipment at the pressure detecting hole of the sucker, and detecting the internal pressure of the main air cavity through the pressure detecting equipment;
And S4, adjusting the air supply pressure and/or the distance between the object to be detected and the sucker according to the detected internal pressure.
By adopting the proposal, the back side of the object to be detected can not be contacted with the fixing device in a large area under the state of fixing the object to be detected by the fixing device, and the whole main air cavity of the fixing device can be flexibly selected to be inflated or only part of the main air cavity can be inflated, thereby avoiding the condition that the object to be detected with small size is unstable due to the air flow interference of the peripheral main air cavity, and a set of fixing device can fix the objects to be detected with different sizes,
Drawings
FIG. 1 is a schematic view of an embodiment of a fixing device according to the present invention;
FIG. 2 is a perspective view of the suction cup, support and drive in an assembled state;
FIG. 3 is a view in the A-A direction of FIG. 2;
Fig. 4 is a top view of fig. 2.
The reference numerals are explained as follows:
01 to-be-measured object, 011A to-be-measured object contour line and 012B to-be-measured object contour line
1 Sucker, 11 main air cavity, 11a central air cavity, 12 pressure detecting hole, 13 air injecting hole, 13a with filling air holes, 14 bottom wall parts, 15 main wall parts, 15a central wall parts;
2 supporting pieces, 3 driving pieces, 4 pressure detecting devices, 5 air supply devices and 6 air extraction devices;
L gap.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the following description is provided with reference to the accompanying drawings and the specific embodiments.
As shown, the fixture comprises a suction cup 1 and a plurality of sets of support members. In the illustrated scheme, two groups of support assemblies are arranged, one group of support assemblies is in contact with and supports the edge area of the object to be measured with the size A, the other group of support assemblies is in contact with and supports the edge area of the object to be measured with the size B and the middle area of the object to be measured with the size A01, and the middle area refers to an area between the central area and the edge area. In the illustrated embodiment, each group of support assemblies includes three support members 2, and of course, the number of support members 2 of each group of support assemblies is not limited to three, and may be flexibly set according to actual needs.
The support piece 2 is arranged on the sucker 1, and the object 01 to be measured is contacted and supported on the support piece 2 under the adsorption action of the sucker 1. The supporting piece 2 at least partially protrudes out of the top surface of the sucker 1, so that when the object 01 to be detected is supported on the supporting component in a contact manner, a gap L is formed between the supporting piece and the top surface of the sucker 1, and the back surface of the object 01 to be detected is prevented from being contacted in a large area.
The sucker 1 is provided with a plurality of main air cavities 11 and air leakage channels, two main air cavities 11 are arranged in the scheme, the main air cavities 11 are used for air leakage through the air leakage channels, the air leakage channels are arranged on the back side of the object 01 to be tested, when the main air cavities 11 are used for air leakage through the air leakage channels, the back side of the object 01 to be tested can form flowing air flow, so that Bernoulli effect is generated on the back side and the front side of the object 01 to be tested, the air pressure on the back side of the object 01 to be tested is smaller than the air pressure on the front side of the object 01 to be tested, and accordingly the sucker 1 can absorb the object 01 to be tested. In the illustrated embodiment, the top side of the main air chamber 11 is communicated with the gap L, and the air in the main air chamber 11 is discharged through the gap L, and the gap L forms the air discharge passage. Of course, the air release passage may be formed by providing an air release hole in the suction cup 1.
In the illustrated solution, as shown in fig. 4, for an a-size object to be tested (the dotted line indicated by 011 in the figure is the outline of the a-size object to be tested), two main air cavities 11 are corresponding to each other, that is, the two main air cavities 11 are both in the area range of the a-size object to be tested, the a-size object to be tested is fixed to supply air to the two main air cavities 11 at the same time, and for a B-size object to be tested (the dotted line indicated by 012 in the figure is the outline of the B-size object to be tested), only the inner main air cavity 11 corresponds to the same, that is, only the inner main air cavity 11 supplies air to the inner main air cavity 11 when the B-size object to be tested is fixed in the area range of the B-size object to be tested.
The sucker 1 is provided with a plurality of groups of pressure detection holes 12 and a plurality of groups of air injection holes 13.
The air injection holes 13 are communicated with the air supply device 5, the air supply device 5 supplies air to the inside of the main air cavities 11, each main air cavity 11 is respectively communicated with one group of air injection holes 13, so that the air supply to each main air cavity 11 can be cut off independently, the condition that the small-size object to be detected is unstable due to the air flow interference of the peripheral main air cavities is avoided, and the pressure of each main air cavity 11 can be adjusted independently, so that the adsorption forces borne by different areas of the object to be detected 01 tend to be consistent, and the bending deformation of the object to be detected 01 is avoided.
For example, in the illustrated embodiment, when the B-size object is to be measured, the gas supply to the outermost main gas chamber may be cut off, and if the outermost main gas chamber maintains the gas supply, the gas in the outermost main gas chamber may flow to the front side of the B-size object at a high flow rate, resulting in a small pressure difference between the front side and the back side of the B-size object, and thus there may be a case where the fixation is unstable.
The pressure detection holes 12 are communicated with the pressure detection device 4, and each main air cavity 11 is respectively communicated with one group of pressure detection holes 12, so that the internal pressure of each main air cavity 11 can be detected independently, and the basis is provided for the pressure adjustment of each main air cavity 11. The adsorption force of the sucker 1 to the object 01 to be detected can be accurately judged according to the internal pressure of the main air cavity 11, so that corresponding adjustment (such as adjustment of the air supply pressure of the air supply equipment or adjustment of the gap L between the object to be detected and the sucker) can be made accordingly, the moderate adsorption force is ensured, and stable fixation is realized without damaging the object 01 to be detected due to overlarge adsorption force.
The group of pressure detecting holes 12 can be one pressure detecting hole 12 or a plurality of pressure detecting holes 12, and the pressure detecting holes 12 in the same group are preferably uniformly distributed around the center of the sucker. The group of gas injection holes 13 may be a single gas injection hole 13 or a plurality of gas injection holes 13, and the gas injection holes 13 in the same group are preferably uniformly distributed around the center of the sucker.
The suction cup 1 is provided with a bottom wall portion 14 and a plurality of main wall portions 15 (in the illustrated embodiment, three main wall portions 15 are provided). The bottom wall portion 14 has a top surface 14a and a bottom surface 14b. The main wall portion 15 protrudes upward from the top surface 14a of the bottom wall portion 14. The main wall portion 15 has side wall surfaces including an outer side wall surface 15c and an inner side wall surface 15d. The plurality of main air chambers 11 are defined by side wall surfaces of the plurality of main wall portions 15 and top surfaces of the bottom wall portion 14. The main wall portion 15 isolates adjacent main air chambers 11.
The main wall portions 15 are looped in sequence from inside to outside, and the main air chambers 11 are looped in sequence from inside to outside. By the design, the formed main air cavity 11 surrounds the center of the sucker 1, and can generate uniform adsorption force on the whole circumference of the object 01 to be tested, so that the fixing stability is improved. The main wall portion is not limited to an annular shape, and may be, for example, an elliptical shape, a square shape, or the like.
The top surfaces of the plurality of main wall portions 15 form an adsorption surface, and the top surfaces of the plurality of main wall portions 15 are all located on the same plane, that is, the top surfaces of the main wall portions 15 are coplanar, so that the adsorption force of the suction cup 1 can act on the object 01 to be detected more uniformly.
Each set of support members may be located on one of the main wall portions 15 or on the bottom wall portion in one of the main air chambers.
The pressure detecting hole 12 may be provided in the bottom wall portion 14 so that the detected pressure is more accurate.
The air inlet opening of the air injection hole 13 may be provided on the inner side wall surface 15c of the main wall portion 15 or the top surface 14a of the bottom wall portion 14. The gas outlet port of the gas injection hole 13 may be provided on the outer side wall surface 15d of the main wall portion 15 or the bottom surface 14b of the bottom wall portion 14.
The gas outlet direction of the gas injection holes 13 is preferably at zero or acute angle to the inner side wall surface 15c of the main wall portion 15, so that the gas can enter the main gas chamber 11 along or substantially along the inner side tangential line of the main wall portion 15 (as shown in fig. 2 and 3, the arrow lines indicate the flow direction of the gas flow). In this way, a swirling air flow can be generated in the main air chamber 11, and the adsorption force can be more uniformly applied to the object 01 to be measured.
The suction cup 1 is further provided with a central air cavity 11a and a central wall portion 15a. The center of the suction cup 1 is located in the center air chamber 11a, and the center air chamber 11a is located inside the main air chamber 11 inside. The central wall portion (15 a) protrudes from the top surface of the bottom wall portion 1, and the central air chamber 11a is defined by the top surface of the bottom wall portion 14 and the inner side wall surface of the central wall portion 15a. The suction cup 1 is provided with a group of additional air injection holes 13a, and the additional air injection holes 13a are communicated with the central air cavity 11a. Specifically, the additional gas injection hole 13a may be provided on the central wall portion 13a, and may communicate the central gas chamber 11a with the main gas chamber 11 adjacent thereto.
The support member 2 and the suction cup 1 can relatively move along the direction vertical to the suction surface, the fixing device further comprises a driving member 3 for driving the support member 2 and the suction cup 1 to relatively move along the direction vertical to the suction surface, and the driving member 3 is fixed with the suction cup 1. Therefore, the distance between the object to be detected 01 and the adsorption surface can be flexibly adjusted, so that the adsorption force can be conveniently adjusted, and the object to be detected can be conveniently loaded and unloaded.
The driving member 3 may be an air pressure driving member, or an electric driving member, a mechanical driving member, or the like.
Specifically, the pneumatic driving piece is provided with an inner cavity and an air hole, and the air hole is communicated with the air supply equipment and the air extraction equipment 6. The cavity of the driving member 3 is supplied with air by the air supply device, which may be the same as the air supply device for supplying air to the main air chamber 11 described above, so that the cavity of the driving member 3 is at a positive pressure. The inner cavity of the driving piece 3 is subjected to negative pressure by pumping the air from the inner cavity of the driving piece 3 through the air pumping equipment 6. The support member 2 extends at least partially into the interior cavity of the driver member 3 so as to be movable in response to pressure changes in the interior cavity of the driver member 3.
The fixing device and the using method provided by the invention are described in detail. The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present invention and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.
Claims (13)
1. The fixing device is characterized by comprising a sucker (1) and an air leakage channel, wherein the sucker (1) is provided with a plurality of main air cavities (11), the main air cavities (11) are used for air leakage through the air leakage channel, the sucker (1) is provided with a plurality of groups of air injection holes (13), each main air cavity (11) is respectively communicated with one group of air injection holes (13), the air injection holes (13) are communicated with an air supply device (5), and air is supplied to the main air cavities (11) through the air supply device (5);
The plurality of main air cavities (11) encircle the center of the sucker (1) and are sequentially sleeved from inside to outside, and all the main air cavities (11) of the fixing device are inflated or only part of the main air cavities (11) are inflated;
The sucker (1) is provided with a bottom wall part (14) and a plurality of main wall parts (15) protruding from the top surface of the bottom wall part (14), wherein the main air cavity (11) is formed by enclosing the top surface of the bottom wall part (14) and the side wall surface of the main wall part (15), and the main wall parts (15) isolate adjacent main air cavities (11);
The included angle between the air outlet direction of the air injection hole (13) and the tangent line of the inner side wall surface of the main wall part (15) is zero or an acute angle.
2. The fixing device according to claim 1, characterized in that the suction cup (1) is provided with a plurality of groups of support assemblies, each group of support assemblies being mounted at a different position of the suction cup (1) respectively, supporting respectively edge areas of different sizes of substances to be adsorbed (01) or different areas of the same substance to be adsorbed (01).
3. A fixture according to claim 1, characterized in that the venting channel is formed by a gap (L) between the suction cup (1) and the object to be tested and/or a venting hole provided in the suction cup (1).
4. The fixing device according to claim 1, wherein the air inlet of the air injection hole (13) is provided on the inner side wall surface of the main wall portion (15) or the top surface of the bottom wall portion (14), and the air outlet of the air injection hole (13) is provided on the outer side wall surface of the main wall portion (15) or the bottom surface of the bottom wall portion (14).
5. A fixture according to claim 2, wherein each set of said support members is located on one of said main wall portions (15) or said bottom wall portion (14) in one of said main air chambers (11), respectively.
6. The fixing device according to claim 1, characterized in that the top surfaces of the plurality of main wall portions (15) all lie on the same plane.
7. The fixing device according to claim 1, wherein the sucker (1) is provided with a central air cavity (11 a) and a central wall portion (15 a), the center of the sucker (1) is located in the central air cavity (11 a), the central wall portion (15 a) protrudes from the top surface of the bottom wall portion (14), the central air cavity (11 a) is formed by enclosing the top surface of the bottom wall portion (14) and the side wall surface of the central wall portion (15 a), the sucker (1) is provided with a group of additional air injection holes (13 a), and the additional air injection holes (13 a) are communicated with the central air cavity (11 a).
8. A fixture according to claim 2, wherein the support assembly comprises a support member (2), the fixture further comprising a driving member (3), the driving member (3) driving the support member (2) and the suction cup (1) to move relatively in a direction perpendicular to the suction surface.
9. The fixing device according to claim 8, wherein the driving member (3) is provided with an inner cavity and an air hole communicated with the inner cavity, the air hole is communicated with the air supply device (5) and the air extraction device (6), the pressure of the inner cavity is changed through the air supply device (5) and the air extraction device (6), and the pressure change of the inner cavity is utilized to drive the supporting member (2) to move along the direction perpendicular to the adsorption surface.
10. A fixture according to any one of claims 1-9, wherein the suction cup (1) is provided with a plurality of sets of pressure sensing holes (12), each of the main air chambers (11) being in communication with a respective set of the pressure sensing holes (12).
11. The method of use of a fixation device according to any one of claims 1-10, characterized in that the method of use comprises the steps of:
S1, placing an object to be detected on a sucker of a fixing device;
S2, selecting to supply air to different main air cavities of the sucker according to the size of the object to be detected.
12. The method according to claim 11, wherein the plurality of main air cavities of the sucker encircle the center of the sucker and are sequentially sleeved from inside to outside, and S2 is specifically that the air is selectively supplied to all the main air cavities within the area range of the object to be detected according to the size of the object to be detected.
13. The method of claim 11, wherein the suction cup is provided with a plurality of sets of pressure sensing holes, each main air chamber being in communication with a respective set of pressure sensing holes, the method further comprising the steps of:
s3, communicating pressure detecting equipment at the pressure detecting hole of the sucker, and detecting the internal pressure of the main air cavity through the pressure detecting equipment;
And S4, adjusting the air supply pressure and/or the distance between the object to be detected and the sucker according to the detected internal pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110745312.5A CN115533776B (en) | 2021-06-30 | 2021-06-30 | Fixing device and method of use |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110745312.5A CN115533776B (en) | 2021-06-30 | 2021-06-30 | Fixing device and method of use |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115533776A CN115533776A (en) | 2022-12-30 |
| CN115533776B true CN115533776B (en) | 2025-06-03 |
Family
ID=84722945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110745312.5A Active CN115533776B (en) | 2021-06-30 | 2021-06-30 | Fixing device and method of use |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115533776B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117162631A (en) * | 2023-08-23 | 2023-12-05 | 赣州科翔电子科技二厂有限公司 | Pressing mechanism and method for aluminum substrate production |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03228348A (en) * | 1990-02-02 | 1991-10-09 | Toshiba Ceramics Co Ltd | Vacuum chuck for semiconductor wafer |
| CN213583733U (en) * | 2020-12-11 | 2021-06-29 | 上海隐冠半导体技术有限公司 | Vacuum adsorption device |
| CN216869594U (en) * | 2021-06-30 | 2022-07-01 | 深圳中科飞测科技股份有限公司 | Fixing device |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10261276A (en) * | 1997-03-18 | 1998-09-29 | Sony Corp | Magnetic disk medium and magnetic disk device |
| TWI230110B (en) * | 2004-01-19 | 2005-04-01 | Ji-Wang Liang | Suction device |
| JP4359885B2 (en) * | 2004-05-27 | 2009-11-11 | 信越半導体株式会社 | Bernoulli Chuck |
| US8528886B2 (en) * | 2009-02-02 | 2013-09-10 | Corning Incorporated | Material sheet handling system and processing methods |
| KR102124417B1 (en) * | 2012-11-27 | 2020-06-24 | 에이씨엠 리서치 (상하이) 인코포레이티드 | Substrate supporting apparatus |
| CN104637854B (en) * | 2013-11-13 | 2018-12-07 | 沈阳新松机器人自动化股份有限公司 | It is a kind of for adsorbing the sucker of silicon wafer |
| CN105792998A (en) * | 2013-12-03 | 2016-07-20 | 哈莫技术股份有限公司 | Holding device, holding system, control method, and conveyance device |
| CN107585671A (en) * | 2017-11-02 | 2018-01-16 | 李威 | A kind of sucker of fast fraction injection machine tool |
| CN110238000B (en) * | 2019-06-28 | 2020-10-16 | 北京理工大学 | Glue machine suction cup |
| CN112635388B (en) * | 2020-11-20 | 2025-09-12 | 深圳中科飞测科技股份有限公司 | Carrying device, semiconductor processing equipment, and method for fixing workpiece |
| CN117373988B (en) * | 2023-11-27 | 2024-04-16 | 苏州恩腾半导体科技有限公司 | Wafer holding device based on Bernoulli chuck |
-
2021
- 2021-06-30 CN CN202110745312.5A patent/CN115533776B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03228348A (en) * | 1990-02-02 | 1991-10-09 | Toshiba Ceramics Co Ltd | Vacuum chuck for semiconductor wafer |
| CN213583733U (en) * | 2020-12-11 | 2021-06-29 | 上海隐冠半导体技术有限公司 | Vacuum adsorption device |
| CN216869594U (en) * | 2021-06-30 | 2022-07-01 | 深圳中科飞测科技股份有限公司 | Fixing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115533776A (en) | 2022-12-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105332992B (en) | Vacuum suction cup | |
| JP4146086B2 (en) | Vacuum ejector pump | |
| US20150069723A1 (en) | Vacuum chuck | |
| JP2016503894A5 (en) | System and method for handling parts | |
| CN115533776B (en) | Fixing device and method of use | |
| CN101632165B (en) | Picker for transfer tool and transfer tool having the same | |
| US20160300749A1 (en) | Holding equipment, holding system, control method, and conveyance equipment | |
| TW201411717A (en) | Proportional and uniform control of airflow for dry plasma etching equipment | |
| EP2672283B1 (en) | Test device, test system, method and carrier for testing electronic components under variable pressure conditions | |
| WO2014130230A1 (en) | Tunable gas delivery assembly with internal diffuser and angular injection | |
| CN112065858B (en) | Qi foot | |
| CN108010876A (en) | Devices and methods therefor for picks up semiconductor devices | |
| TW201603171A (en) | Tray stand for supporting a semiconductor package | |
| US9927039B2 (en) | Check-valve assembly for vacuum system | |
| JPWO2019065355A1 (en) | Adsorption stage | |
| US20140116550A1 (en) | Rotation joint and multiple air channel workstation using the same | |
| KR101597975B1 (en) | Multi-disc for vacuum sucking and Vacuum gripper using the same | |
| WO2003006230A1 (en) | Method and apparatus for underfilling electronic components using vacuum assist | |
| CN216869594U (en) | Fixing device | |
| JP6778330B2 (en) | Vacuum pump with hollow extrusion profile | |
| KR101684803B1 (en) | Vacuum table for vacuum-adsorbing semiconductor packages | |
| CN114267624A (en) | Bearing device and detection equipment | |
| KR102537065B1 (en) | Air pump with external pressure relief valve | |
| KR101059434B1 (en) | voccum chuck | |
| KR20190061880A (en) | Vacuum chuck and substrate processing apparatus having the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |