CN115524053A - Gas foil radial bearing for directly detecting gas film pressure - Google Patents
Gas foil radial bearing for directly detecting gas film pressure Download PDFInfo
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- CN115524053A CN115524053A CN202211217431.4A CN202211217431A CN115524053A CN 115524053 A CN115524053 A CN 115524053A CN 202211217431 A CN202211217431 A CN 202211217431A CN 115524053 A CN115524053 A CN 115524053A
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- 239000011888 foil Substances 0.000 title claims abstract description 83
- 238000001514 detection method Methods 0.000 claims 7
- 238000000034 method Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 32
- 238000010586 diagram Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/08—Means for indicating or recording, e.g. for remote indication
- G01L19/083—Means for indicating or recording, e.g. for remote indication electrical
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Support Of The Bearing (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
本发明公开一种直接检测气膜压力的气体箔片径向轴承。基于压电薄膜传感器受到气体压力变化的信息反映气体箔片径向轴承内的气膜压力,将压电薄膜传感器内嵌至气体箔片轴承的顶箔,实现对气体箔片径向轴承的气膜压力直接检测,同时在压电薄膜传感器上涂抹一层保护材料,减少气体箔片轴承在起飞之前转子与压电薄膜传感器的干摩擦损伤。该气体箔片径向轴承内嵌压电薄膜传感器的方法在不改变轴承结构情况下直接检测气膜压力。
The invention discloses a gas foil radial bearing which directly detects gas film pressure. Based on the information that the piezoelectric film sensor is subjected to the change of gas pressure to reflect the gas film pressure in the gas foil radial bearing, the piezoelectric film sensor is embedded in the top foil of the gas foil bearing to realize the air pressure of the gas foil radial bearing. The film pressure is directly detected, and at the same time, a layer of protective material is applied on the piezoelectric film sensor to reduce the dry friction damage between the rotor and the piezoelectric film sensor of the gas foil bearing before take-off. The method of embedding a piezoelectric film sensor in the gas foil radial bearing directly detects the gas film pressure without changing the bearing structure.
Description
技术领域technical field
本发明涉及一种气体轴承,具体涉及一种直接检测气膜压力的气体箔片径向轴承。The invention relates to a gas bearing, in particular to a gas foil radial bearing which directly detects gas film pressure.
背景技术Background technique
气体箔片轴承具有气体润滑介质粘度小,摩擦力小,回转精度高,功耗低等优点,在高精度领域、精密仪器、透平机械有着广泛的工程运用前景。目前,对于气体箔片径向轴承的气膜压力研究多以理论仿真为主,国内外已有较多的理论模型用于分析该气体箔片径向轴承在实际运行工况下的气膜压力,并获得了非常有趣的结果。但气体箔片径向轴承通常运用在精密的设备中,工作环境复杂,此外理论的研究通常存在一些假设条件并对实际环境做了部分简化,无疑会引入偏差。因此,发明一种直接检测气膜压力的气体箔片径向轴承,运用压电薄膜传感器的工作机理,实时检测气膜压力的变化,其意义是十分明显的。Gas foil bearings have the advantages of low viscosity of gas lubricating medium, small friction, high rotation accuracy, low power consumption, etc., and have broad engineering application prospects in high-precision fields, precision instruments, and turbomachinery. At present, the research on the gas film pressure of the gas foil radial bearing is mostly based on theoretical simulation. There are many theoretical models at home and abroad to analyze the gas film pressure of the gas foil radial bearing under actual operating conditions. , and obtained very interesting results. However, gas foil radial bearings are usually used in precision equipment, and the working environment is complex. In addition, there are usually some assumptions in theoretical research and some simplifications are made to the actual environment, which will undoubtedly introduce deviations. Therefore, the significance of inventing a gas foil radial bearing that directly detects the gas film pressure and using the working mechanism of the piezoelectric film sensor to detect the change of the gas film pressure in real time is very obvious.
发明内容Contents of the invention
本发明为解决在实际复杂的工作环境中,气体箔片径向轴承的气膜压力不能实时检测,而提供一种直接检测气膜压力的气体箔片径向轴承,保障设备的安全可靠运行。In order to solve the problem that the gas film pressure of the gas foil radial bearing cannot be detected in real time in an actual complex working environment, the present invention provides a gas foil radial bearing that directly detects the gas film pressure to ensure safe and reliable operation of the equipment.
为了达到上述目的,本发明采取的技术方案是:In order to achieve the above object, the technical scheme that the present invention takes is:
一种直接检测气膜压力的气体箔片径向轴承,包括圆筒状的波形箔片、圆筒状的顶箔片、轴承套、压电薄膜传感器、内嵌槽和导线孔。所述顶箔片、所述波形箔片和轴承套由内向外依次布置,并且相邻者相贴,所述顶箔片和所述波形箔片分别固定在轴承套上,所述顶箔片上设有内嵌槽,用来放置压电薄膜传感器,压电薄膜传感器的导线从所述顶箔片、所述波形箔片和所述轴承套上开设的同轴心导线孔穿出。A gas foil radial bearing that directly detects gas film pressure includes a cylindrical corrugated foil, a cylindrical top foil, a bearing sleeve, a piezoelectric film sensor, an embedded groove and a wire hole. The top foil, the corrugated foil and the bearing sleeve are arranged sequentially from the inside to the outside, and the adjacent ones are attached to each other. The top foil and the corrugated foil are respectively fixed on the bearing sleeve, and the top foil is fixed on the bearing sleeve. An embedded groove is provided for placing the piezoelectric film sensor, and the wires of the piezoelectric film sensor pass through the coaxial wire holes provided on the top foil, the corrugated foil and the bearing sleeve.
优选地,所述顶箔片上开设有内嵌压电薄膜传感器的内嵌槽。Preferably, the top foil is provided with an embedding groove for embedding the piezoelectric film sensor.
优选地,所述顶箔片上开设的内嵌槽数量为3个,且在所述顶箔片上均匀分布。Preferably, the number of inlaid grooves opened on the top foil is three, and are evenly distributed on the top foil.
优选地,所述压电薄膜传感器的数量为3个。Preferably, the number of the piezoelectric film sensors is three.
优选地,所述压电薄膜传感器的厚度与所述顶箔片上开设的内嵌槽厚度保持一致,不改变气体箔片径向轴承的初始配合间隙。Preferably, the thickness of the piezoelectric film sensor is consistent with the thickness of the embedded groove opened on the top foil, without changing the initial fit clearance of the radial bearing of the gas foil.
优选地,所述的压电薄膜传感的连接导线从所述导线孔穿出向外连接电源采集设备。Preferably, the connecting wires of the piezoelectric film sensor pass through the wire hole to connect to the power collection device.
优选地,所述导线孔为在所述波形箔片和轴承套上开设的平面展开图形为矩形的同轴心空孔。Preferably, the wire hole is a concentric hollow hole with a rectangular planar development pattern opened on the corrugated foil and the bearing sleeve.
优选低,所述波形箔片的平面展开波形为呈一定间距的圆弧形波形,且圆弧形波形的朝向相同。Preferably, the planar unfolded waveforms of the corrugated foil are arc-shaped waves with a certain interval, and the orientation of the arc-shaped waves is the same.
优选地,相邻的圆弧波形的间距大于2倍圆弧直径。Preferably, the distance between adjacent arc waveforms is greater than twice the arc diameter.
优选地,所述波形箔片的波形均向内鼓起。Preferably, the corrugations of the corrugated foil all bulge inward.
优选地,所述压电薄膜传感器的表面涂抹一层保护材料,保护材料的厚度相较于顶箔的厚度可以忽略不计。Preferably, a layer of protective material is coated on the surface of the piezoelectric film sensor, and the thickness of the protective material is negligible compared with the thickness of the top foil.
优选地,所述压电薄膜传感器的传感元件采用稀疏相间排列,压电薄膜传感的边缘不用放置传感元件。Preferably, the sensing elements of the piezoelectric film sensor are arranged sparsely and alternately, and no sensing elements are placed on the sensing edge of the piezoelectric film.
本发明与现有技术相比具有一下有益效果:Compared with the prior art, the present invention has following beneficial effects:
本发明实现将压电薄膜传感器的工作机理与气体箔片径向轴承结合在一起,从而在不改变气体箔片径向轴承各项参数下,直接检测气体箔片径向轴承在实际工作环境中的气膜压力,弥补了在气体箔片径向轴承动态理论研究中因简化一些假设条件而导致的计算偏差,为气体箔片轴承的良好设计以及设备可靠运行提供方法。The invention realizes the combination of the working mechanism of the piezoelectric thin film sensor and the radial bearing of the gas foil, thereby directly detecting the radial bearing of the gas foil in the actual working environment without changing the parameters of the radial bearing of the gas foil The gas film pressure of the gas foil radial bearing makes up for the calculation deviation caused by simplifying some assumptions in the dynamic theoretical research of the gas foil radial bearing, and provides a method for the good design of the gas foil bearing and the reliable operation of the equipment.
本发明巧妙地利用气膜压力实时变化的信息和压电薄膜传感器的因受压变化而不断反馈电信号的工作机理,实时直接监测气体箔片径向轴承的气膜压力。The invention skillfully utilizes the real-time change information of the gas film pressure and the working mechanism of the piezoelectric film sensor continuously feeding back the electric signal due to the pressure change to directly monitor the gas film pressure of the radial bearing of the gas foil in real time.
附图说明Description of drawings
图1是本发明的一种爆炸图。Figure 1 is an exploded view of the present invention.
图2是图1的装配图。FIG. 2 is an assembly diagram of FIG. 1 .
图3是图1中的轴承套示意图。Fig. 3 is a schematic diagram of the bearing sleeve in Fig. 1 .
图4是波形箔片的示意图Figure 4 is a schematic diagram of a corrugated foil
图5是顶箔片的示意图Figure 5 is a schematic diagram of the top foil
图6是图2的Ⅰ处局部放大图Figure 6 is a partial enlarged view of I in Figure 2
图7是压电薄膜传感器的传感器元件排布示意图Figure 7 is a schematic diagram of the sensor element arrangement of the piezoelectric film sensor
具体实施方式detailed description
下面结合附图对本发明做进一步的详细说明:本实施例在以本发明技术方案的前提下进行实施,给出了详细的实施方式,但本发明的保护范围不限于一下叙述实施例。Below in conjunction with accompanying drawing, the present invention is described in further detail: the present embodiment implements under the premise of the technical solution of the present invention, has provided detailed implementation, but protection scope of the present invention is not limited to following narration embodiment.
实施例1:结合图1,图2和图3来说明本实施例,本实施例设计一种直接检测气膜压力的气体箔片径向轴承,包括圆筒状的波形箔片,圆筒状的顶箔片,轴承套、压电薄膜传感器,内嵌槽和导线孔,所述顶箔片,所述波形箔片和所述轴承套由内向外依次设置,并且相邻两者相贴,所述顶箔片和所述波形箔片分别固定在轴承套上,所述顶箔片上设有内嵌槽,压电薄膜传感器放置在内嵌槽中,且密封固定。Embodiment 1: This embodiment is described in conjunction with Fig. 1, Fig. 2 and Fig. 3. This embodiment designs a gas foil radial bearing that directly detects the gas film pressure, including a cylindrical corrugated foil, a cylindrical The top foil, the bearing sleeve, the piezoelectric film sensor, the embedded groove and the wire hole, the top foil, the corrugated foil and the bearing sleeve are arranged in sequence from the inside to the outside, and the adjacent two are in contact with each other, The top foil and the corrugated foil are respectively fixed on the bearing sleeve, the top foil is provided with an embedded groove, and the piezoelectric film sensor is placed in the embedded groove, and sealed and fixed.
所述顶箔片、所述波形箔片和所述轴承套上开设的导线孔同轴心对应。The top foil, the corrugated foil and the wire hole opened on the bearing sleeve correspond to the same axis.
优选地,所述压电薄膜传感器的厚度与顶箔片上内嵌槽厚度保持一致。Preferably, the thickness of the piezoelectric film sensor is consistent with the thickness of the embedded groove on the top foil.
优选地,如图7所述,所述压电薄膜传感器的传感元件的布置采用稀疏相间排列。Preferably, as shown in FIG. 7 , the sensing elements of the piezoelectric film sensor are arranged sparsely and alternately.
可选地,如图4所示,所述波形箔片的平面展开的波形为呈一定间距的圆弧波形,且圆弧波形的朝向相同。Optionally, as shown in FIG. 4 , the waveforms in the plane of the corrugated foil are circular arc waveforms with a certain interval, and the directions of the circular arc waveforms are the same.
可选地,如图所示,相邻两个圆弧波形的间距大于2倍圆弧直径。Optionally, as shown in the figure, the distance between two adjacent arc waveforms is greater than twice the arc diameter.
可选地,如图所示,波形箔片的波形均向内鼓起。Optionally, as shown in the figure, the corrugations of the corrugated foil all bulge inwards.
本实例的装配过程:如图1、图2、图3、图4、图5和图6所示,先在顶箔片、波形箔片和轴承套上开设对应的导线孔,然后在顶箔片上开设3个均匀分布的内嵌槽,3个压电薄膜传感器的连接导线从顶箔片的三个导线孔穿出,再将压电薄膜传感器密封固定在顶箔片的内嵌槽上,再将3个压电薄膜传感器的导线从波形箔片和轴承套上的导线孔穿出,最后将波形箔片和轴承套依次设在顶箔片上。The assembly process of this example: as shown in Figure 1, Figure 2, Figure 3, Figure 4, Figure 5 and Figure 6, first open the corresponding wire holes on the top foil, corrugated foil and bearing sleeve, and then open the corresponding wire holes on the top foil There are 3 evenly distributed embedded grooves on the chip, and the connecting wires of the 3 piezoelectric film sensors pass through the three wire holes of the top foil, and then the piezoelectric film sensors are sealed and fixed on the embedded grooves of the top foil. Then the wires of the three piezoelectric film sensors are passed through the wire holes on the corrugated foil and the bearing sleeve, and finally the corrugated foil and the bearing sleeve are arranged on the top foil in sequence.
Claims (7)
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CN119423942A (en) * | 2024-11-22 | 2025-02-14 | 斯泰博(上海)医疗器械有限公司 | Intelligent sensing module, joint axis adjustment device, joint axis adjustment method and axis adjustment method of rotating equipment |
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