CN115452902B - A sensor with detection function - Google Patents
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- CN115452902B CN115452902B CN202211122072.4A CN202211122072A CN115452902B CN 115452902 B CN115452902 B CN 115452902B CN 202211122072 A CN202211122072 A CN 202211122072A CN 115452902 B CN115452902 B CN 115452902B
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Abstract
The invention belongs to the technical field of MEMS biosensing detection, and particularly relates to a sensor with a detection function, which comprises a substrate, a detection unit and a reference unit, wherein the detection unit and the reference unit are arranged on the substrate, the mass load change of the detection unit occurs in the vertical direction of the plane of the detection unit, the mass load change of the detection unit causes the capacitance change in the detection unit, and the concentration of an object to be detected is obtained through calculation according to the capacitance change. The molecular layer film is assembled on the surface of the sensor sensitive unit to be used for specifically binding the detected substance, and the signal change before and after the specific binding is converted into an electric signal to be output, so that the real-time, label-free and high-sensitivity detection function of the substance to be detected is realized, meanwhile, the reference detection unit is designed to remove the influence of noise signals, and the design of the reference unit improves the detection accuracy.
Description
Technical Field
The invention relates to the technical field of MEMS biosensing detection, in particular to an array sensor with a detection function.
Background
At present, the traditional means such as PCR, ELISA, kit and the like are mainly adopted to detect the substances such as biomolecules. The rapid detection kit disclosed in patent application CN 114778838A is based on pathogen detection of near infrared fluorescent nanoparticles, and needs to observe the morphology and combination condition of bacteria captured by near infrared fluorescent nanospheres and superparamagnetic nanospheres through a transmission electron microscope or a fluorescence microscope to obtain a detection result, and the detection process has more interference factors and higher cost.
The existing sensor detection means still need fluorescent labeling, and have long detection time, complex operation and low sensitivity.
Thus, there is a need for a solution to the problems of the prior art.
Disclosure of Invention
In order to solve the technical problems, according to one aspect of the invention, the invention provides a technical scheme, and aims to provide a novel array sensor for realizing specific detection of a substance to be detected by using a shearing mode of a material in a liquid phase or gas phase environment based on MEMS process.
The sensor with the detection function comprises a substrate, a detection unit and a reference unit, wherein the detection unit and the reference unit are arranged on the substrate, the mass load change of the detection unit occurs in the vertical direction of the plane of the detection unit, the mass load change of the detection unit causes the capacitance change inside the detection unit, and the concentration of an object to be detected is obtained through calculation according to the capacitance change.
The sensor with the detection function is characterized in that the detection unit comprises an upper electrode, a piezoelectric crystal and a lower electrode which are sequentially arranged from top to bottom, wherein the piezoelectric crystal is arranged between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are respectively connected to a substrate through a supporting structure, so that the detection unit is in a suspended state.
As a preferable scheme of the sensor with the detection function, the upper electrode and the lower electrode are parallel to each other and are arranged at intervals.
As a preferable scheme of the sensor with the detection function, the reference unit comprises an upper electrode, a piezoelectric crystal and a lower electrode which are sequentially arranged from top to bottom, wherein the piezoelectric crystal is arranged between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are respectively connected to a substrate through a supporting component, so that the reference unit is in a suspended state.
The optimal scheme of the sensor with the detection function is that an aptamer molecular layer film is arranged on the surface of an upper electrode of the detection unit, and an antifouling molecular layer film is arranged on the surface of an upper electrode of the reference unit.
As a preferable scheme of the sensor with the detection function, the support assembly comprises a first support structure and a second support structure, wherein the first support structure and the second support structure are oppositely arranged on the surface of the substrate, the first support structure is connected with the upper electrode, and the second support structure is connected with the lower electrode.
The sensor with the detection function is characterized in that the first supporting structure comprises a first vertical section and a first horizontal section, the first vertical section and the first horizontal section are perpendicular to each other, the bottom surface of the first horizontal section is abutted with the top surface of the upper electrode, and the first vertical section is arranged on the surface of the substrate.
The sensor with the detection function is characterized in that the second supporting structure comprises a second vertical section and a second horizontal section, the second vertical section and the second horizontal section are perpendicular to each other, the top surface of the second horizontal section is abutted to the bottom surface of the lower electrode, and the second vertical section is arranged on the surface of the substrate.
As a preferable mode of the sensor with the detection function, the projection areas of the upper electrode and the lower electrode on the piezoelectric crystal are at least partially overlapped.
As a preferable scheme of the sensor with the detection function, the surface of the upper electrode is provided with a sensitive film.
The sensor with the detection function is characterized in that the detection unit and the reference unit are adjacently arranged on the substrate to form the sensor unit, and the sensor unit is distributed on the substrate along the axis of the substrate in an array mode.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
(1) According to the sensor with the detection function, after the mass load of the upper electrode and the lower electrode is changed, the relative area of the upper electrode and the lower electrode is changed, so that the capacitance value between the upper electrode and the lower electrode is changed, and the capacitance value is converted into an electric signal to be output, and further real-time and label-free detection of a substance to be detected is realized.
(2) According to the sensor with the detection function, the material to be detected is sheared by utilizing the shearing mode of the material, so that the detection sensitivity is improved, and the detection of the material to be detected is realized by realizing the specific detection and horizontal shearing to realize the minimum attenuation of signal energy.
(3) The sensor with the detection function can be used for subtracting the signal detected by the designed reference unit from the signal detected by the detection unit as the noise signal, so that an accurate detection signal is obtained, and the accuracy of detection is improved by the design of the reference unit.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a sensor with detection function according to the present invention;
FIG. 2 is a schematic diagram of a sensor detecting unit with detecting function according to the present invention;
Fig. 3 is a schematic diagram of a detection unit with detection function of the sensor according to the present invention.
Reference numerals illustrate:
1-a detection unit, 2-a reference unit, 3-a piezoelectric crystal and 4-a substrate;
11-upper electrode, 12-aptamer molecular layer membrane, 13-specific conjugate, 14-support assembly, 15-lower electrode.
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description will be made clearly and fully with reference to the technical solutions in the embodiments, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and rear are referred to in the embodiments of the present invention), the directional indications are merely used to explain the relative positional relationship, movement conditions, and the like between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are correspondingly changed.
In addition, if there is a description of "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.
The invention aims to provide a novel array sensor for realizing specific detection of a substance to be detected by using a shearing mode of a material in a liquid phase or gas phase environment based on MEMS process processing.
In order to achieve the above functions, a technical solution of a detection sensor is provided, which comprises a substrate 4, a detection unit 1 and a reference unit 2, wherein the detection unit 1 and the reference unit 2 are arranged on the substrate 4, and the detection unit 1 is configured to detect a substance to be detected by using a shearing mode of a material.
Example 1
The sensor with the detection function comprises a substrate 4, a detection unit 1 and a reference unit 2, wherein the detection unit 1 and the reference unit 2 are arranged on the substrate 4, the mass load change of the detection unit 1 occurs in the vertical direction of the plane of the detection unit 1, the mass load change of the detection unit 1 causes the capacitance change inside the detection unit 1, and the concentration of an object to be detected is obtained through calculation according to the capacitance change.
The detection unit 1 comprises an upper electrode 11, a piezoelectric crystal 3 and a lower electrode 15 which are sequentially arranged from top to bottom, wherein the piezoelectric crystal 3 is arranged between the upper electrode 11 and the lower electrode 15, and the upper electrode 11 and the lower electrode 15 are respectively connected to the substrate 4 through a supporting component 14, so that the detection unit 1 is in a suspended state.
The reference unit 2 comprises an upper electrode 11, a piezoelectric crystal 3 and a lower electrode 15 which are sequentially arranged from top to bottom, the piezoelectric crystal 3 is arranged between the upper electrode 11 and the lower electrode 15, and the upper electrode 11 and the lower electrode 15 are respectively connected to the substrate 4 through a supporting component 14, so that the reference unit 2 is in a suspended state.
An aptamer molecular layer film is arranged on the surface of the upper electrode 11 of the detection unit 1, and an antifouling molecular layer film is arranged on the surface of the upper electrode 11 of the reference unit 2.
As shown in the structure schematic diagram of FIG. 1, the detection unit 1 and the reference unit 2 are adjacently arranged, the surface of the detection unit 1 is assembled to be capable of specifically combining with a substance to be detected to form a specific combination 13, and the surface of the reference unit 2 is provided with an antifouling molecular layer, so that non-specific combination can be effectively blocked, and interference of impurities on the surface can be avoided. The upper electrode 11 and the lower electrode 15 are processed by adopting conductive materials, and the shearing vibration of the piezoelectric crystal 3 with special cutting can be caused by applying an alternating electric field, so that the whole cell array can realize real-time detection under the condition of liquid phase, and the sound wave energy is ensured not to be attenuated into the liquid.
As shown in fig. 2-3, the supporting component 14 is adopted on the surface of the detecting unit 1 to enable the detecting unit 1 to be in a suspended state, after the substance to be detected is combined with the aptamer molecular layer membrane, the surface quality load of the detecting unit 1 is changed, and under a shearing state, the relative area of the upper electrode 11 and the lower electrode 15 is changed, so that the capacitance is changed, as shown in fig. 3, and finally the detection is realized.
The structure of the reference unit 2 is the same as that of the detection unit 1, and the difference is that the surface of the reference unit 2 is provided with an antifouling molecular layer film, so that the nonspecific combination of a substance to be detected and the unit structure can be effectively prevented, and the signal detected by the reference unit 2 can be used as a noise signal to be subtracted from the signal of the detection unit 1, thereby obtaining an accurate detection signal.
The shearing mode of the material is utilized to realize the specific detection of the substances to be detected, the horizontal shearing is realized to realize the minimum attenuation of signal energy, the high-sensitivity detection of the substances to be detected is realized, and the detection sensitivity is improved. After the mass load of the upper electrode 11 and the lower electrode 15 is changed, the relative area of the upper electrode and the lower electrode is changed, so that the capacitance value between the upper electrode and the lower electrode is changed, and the capacitance value is converted into an electric signal to be output, thereby realizing real-time and label-free detection of the substance to be detected. The design of the reference cell 2 improves the accuracy of the detection.
Example 2
The sensor with the detection function comprises a substrate 4, a detection unit 1 and a reference unit 2, wherein the detection unit 1 and the reference unit 2 are arranged on the substrate 4, the mass load change of the detection unit 1 occurs in the vertical direction of the plane of the detection unit 1, the mass load change of the detection unit 1 causes the capacitance change inside the detection unit 1, and the concentration of an object to be detected is obtained through calculation according to the capacitance change.
The detection unit 1 and the reference unit 2 are adjacently arranged on the substrate 4 to form sensor units, and the sensor units are distributed on the substrate 4 along the axis of the substrate 4 in an array manner.
As shown in fig. 1, each detection unit 1 of the whole array has alternating voltages applied to the surfaces of the upper and lower electrodes 15, and under the action of the alternating electric field, when the frequency of the alternating electric field is equal to the fundamental frequency of the crystal, the crystal resonates.
As shown in FIG. 2, the surface of the upper electrode 11 is made into a sensitive film, the surface of which can be modified with an aptamer molecular film 12 specifically binding to a substance to be detected, and after the binding, the surface quality load of the detection unit 1 is changed, and the lower electrode 15 is an excitation electrode, so that the high cleanness is maintained.
It should be noted that, the material of the sensitive film on the surface of the upper electrode 11 may be gold, graphene, molybdenum disulfide, etc., so as to increase the sensitivity of detection.
In summary, compared with the prior art, the present disclosure provides a novel sensor and an array for realizing specific detection of a substance to be detected in a liquid phase or gas phase environment by using a shearing mode of a material based on MEMS processing. The piezoelectric crystal 3 is processed by adopting a special cut piezoelectric material, so that vibration of a shearing mode can be realized, and the sound wave energy excited under the liquid phase condition is ensured not to be attenuated. After the mass load of the surface of the upper electrode 11 changes, the vibration frequency of the piezoelectric crystal 3 changes and is converted into an electric signal to be output, so that real-time, label-free and high-sensitivity detection of a substance to be detected is realized. Meanwhile, the whole array comprises a detection unit 1 and a reference unit 2, and the signal of the detection unit 1 can be accurately read by subtracting the noise signal of the reference unit 2.
Furthermore, the detection unit 1 may be an optical and/or piezoresistive detection unit 1 and/or a surface stress detection unit 1 to realize a detection function, and the present application is not limited to the structure thereof. Those skilled in the art will appreciate that any known detection technique may be used. The basic technique in MEMS fabrication involves depositing a thin film of material onto a substrate, applying a pattern to the film by photolithographic imaging, and any type of known material may be used to construct a MEMS device.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the content of the present invention or direct/indirect application in other related technical fields are included in the scope of the present invention.
Claims (9)
1. The sensor with the detection function is characterized by comprising a substrate, a detection unit and a reference unit, wherein the detection unit and the reference unit are arranged on the substrate, the mass load change of the detection unit occurs in the vertical direction of the plane of the detection unit, the mass load change of the detection unit causes the capacitance change in the detection unit, and the concentration of an object to be detected is obtained through calculation according to the capacitance change;
The detection unit comprises an upper electrode, a piezoelectric crystal and a lower electrode which are sequentially arranged from top to bottom, the piezoelectric crystal is arranged between the upper electrode and the lower electrode, the upper electrode and the lower electrode are respectively connected to the substrate through a supporting structure, the detection unit is in a suspended state, and the upper electrode and the lower electrode are mutually parallel and are arranged at intervals.
2. The sensor with the detection function of claim 1, wherein the reference unit comprises an upper electrode, a piezoelectric crystal and a lower electrode which are sequentially arranged from top to bottom, the piezoelectric crystal is arranged between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are respectively connected to the substrate through a supporting structure, so that the reference unit is in a suspended state.
3. The sensor with the detection function according to claim 2, wherein an aptamer molecular layer film is arranged on the surface of the upper electrode of the detection unit, and an antifouling molecular layer film is arranged on the surface of the upper electrode of the reference unit.
4. A sensor with detection function according to claim 3, wherein the support structure comprises a first support structure and a second support structure, the first support structure and the second support structure are oppositely arranged on the surface of the substrate, the first support structure is connected with the upper electrode, and the second support structure is connected with the lower electrode.
5. The sensor with detection function according to claim 4, wherein the first support structure comprises a first vertical section and a first horizontal section, the first vertical section and the first horizontal section are perpendicular to each other, the bottom surface of the first horizontal section is abutted to the top surface of the upper electrode, and the first vertical section is arranged on the surface of the substrate.
6. The sensor with detection function according to claim 4, wherein the second support structure comprises a second vertical section and a second horizontal section, the second vertical section and the second horizontal section are perpendicular to each other, the top surface of the second horizontal section is abutted to the bottom surface of the lower electrode, and the second vertical section is arranged on the surface of the substrate.
7. A sensor with detection function according to claim 4, wherein the projected areas of the upper electrode and the lower electrode on the piezoelectric crystal are at least partially coincident.
8. A sensor with detection function according to claim 3, wherein the upper electrode surface is provided with a sensitive film.
9. A sensor with detection function according to claim 1, wherein the detection unit and the reference unit are arranged adjacently on the substrate to form a sensor unit, and the sensor unit is arranged in an array along the substrate axis on the substrate.
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| KR100849466B1 (en) * | 2007-01-31 | 2008-07-30 | 포항공과대학교 산학협력단 | Micro piezoelectric cantilever sensor and oscillation circuit for it |
| US8236569B2 (en) * | 2007-08-07 | 2012-08-07 | University Of South Carolina | Multi-dimensional integrated detection and analysis system (MIDAS) based on microcantilvers |
| KR101053655B1 (en) * | 2008-11-11 | 2011-08-03 | 한국과학기술연구원 | Cantilever sensor and manufacturing method thereof, biomaterial sensing device using same and manufacturing method thereof |
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