CN115452771A - Quick transflective measuring instrument - Google Patents
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- CN115452771A CN115452771A CN202110638955.XA CN202110638955A CN115452771A CN 115452771 A CN115452771 A CN 115452771A CN 202110638955 A CN202110638955 A CN 202110638955A CN 115452771 A CN115452771 A CN 115452771A
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- 238000002310 reflectometry Methods 0.000 claims abstract description 92
- 238000001228 spectrum Methods 0.000 claims abstract description 39
- 238000005259 measurement Methods 0.000 claims abstract description 32
- 239000000835 fiber Substances 0.000 claims abstract description 23
- 239000013307 optical fiber Substances 0.000 claims abstract description 13
- 238000002834 transmittance Methods 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims description 80
- 239000011521 glass Substances 0.000 claims description 42
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 229910052724 xenon Inorganic materials 0.000 claims description 8
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 3
- 229910052805 deuterium Inorganic materials 0.000 claims description 3
- 239000005357 flat glass Substances 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000011000 absolute method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N2021/558—Measuring reflectivity and transmission
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- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a rapid transflective measuring instrument which comprises a base, an emitting mechanism, a receiving mechanism and a measured sample assembly, wherein the emitting mechanism and the receiving mechanism can rotate relative to the measured sample assembly and are used for adjusting an included angle between the emitting mechanism and the receiving mechanism, the included angle is 0-180 degrees, and the transmittance and/or the reflectivity of a measured sample of the measured sample assembly are rapidly and accurately measured after the included angle is symmetrical relative to the measured sample assembly. In addition, the invention also comprises a wide-spectrum light source and a fiber optic spectrometer. The optical fiber spectrometer adopts a linear array photoelectric detector to ensure that the detected spectrum is rapidly imaged to the linear array photoelectric detector at one time. The transmitting mechanism and the receiving mechanism are respectively connected with the optical fiber spectrometer through the optical fiber and the wide-spectrum light source, so that the measurement of the transmissivity or the reflectivity of a measured sample can be quickly and accurately realized.
Description
Technical Field
The invention relates to an optical measuring instrument, in particular to a rapid transflective measuring instrument.
Background
The conventional transflective measuring instrument mostly adopts a rotating grating method to realize light splitting measurement, and the method has the obvious defect that the speed is too low and the method is not suitable for the application occasions of quick measurement. Secondly, the combination of a deuterium lamp and a tungsten lamp is used as a light source for the transflective measuring instrument, and the fluctuation of the spectrum is large. The construction for mounting two light sources is relatively complicated and time consuming. In addition, the measurement of such a transflective measuring instrument needs to switch the detector, and the jitter of the measured spectrum usually occurs, which affects the measurement accuracy, especially after the transflective measuring instrument is worn after several years of use. Finally, in the conventional transflective measuring apparatus, when the reflectivity is measured, the reflectivity of the element is measured by basically using a standard block (such as teflon) for relative calibration, and the obtained reflectivity is not the absolute reflectivity of the element but the relative reflectivity. This is inconvenient for applications where the absolute reflectivity of the element needs to be measured.
Disclosure of Invention
In order to solve the above problems, the present invention provides a rapid transreflection measuring apparatus, which can rapidly and accurately measure the transmittance or reflectance of an optical measurement sample.
The utility model provides a quick transflective measurement appearance, includes base, emission mechanism, receiving mechanism and surveyed sample subassembly, surveyed sample subassembly emission mechanism and receiving mechanism install in on the base, and it is relative the base can rotate, is used for adjusting contained angle between emission mechanism and the receiving mechanism, the contained angle is 0-180, for quick accurate measurement behind the surveyed sample subassembly symmetry surveyed sample transmissivity and/or the reflectivity of surveyed sample subassembly.
Preferably, the launching mechanism comprises a first rotary fixing component and a launching component, and the first rotary fixing component is connected with the launching component and can be used for rotationally adjusting the rotation angle of the launching component. The first rotary fixing component comprises a first rotary table fixing support, a first rotary table switching support and a transmitting optical head support, the first rotary table fixing support is fixed on the base, the inner side of the first rotary table fixing support is sequentially connected with the first rotary table and the first rotary table switching support, the transmitting optical head support is of an L-shaped structure, one end of the transmitting optical head support is connected with the side edge of the first rotary table, and the other end of the transmitting optical head support is connected with the transmitting component and used for driving the transmitting optical head support to rotate when the first rotary table is rotated so as to adjust the angle between the transmitting component and the tested sample.
Preferably, the receiving mechanism comprises a second rotary fixing component and a receiving component, and the second rotary fixing component is connected with the receiving component and can be used for rotationally adjusting the rotation angle of the transmitting component. The second rotary fixing component comprises a second rotary table fixing support, a second rotary table switching support and an optical head receiving support, the second rotary table fixing support is fixed on the base, the inner side of the second rotary table fixing support is sequentially connected with the second rotary table and the second rotary table switching support, the optical head receiving support is of an L-shaped structure, one end of the optical head receiving support is connected with the side edge of the second rotary table switching support, and the other end of the optical head receiving support is connected with the receiving component and used for driving the optical head receiving support to rotate when the second rotary table is rotated so as to adjust the angle between the receiving component and the tested sample.
Preferably, the tested sample is arranged between the transmitting assembly and the receiving assembly, the angle between the transmitting assembly and the receiving assembly is adjusted, and the transmittance and/or the reflectivity of the tested sample are/is measured. The tested sample assembly comprises a tested sample and a sample support, the sample support is fixed on the base and used for placing the tested sample, and the tested sample comprises a transmission sample and a reflection sample and is respectively used for measuring transmissivity and reflectivity.
Preferably, the emission assembly comprises an emission head and an emission head optical fiber, the emission head optical fiber is arranged on one side of the emission head and is used for guiding the measurement light into the emission head, and the bottom of the emission head is connected with one end of the emission head support and is used for guiding the measurement light of the emission head optical fiber into the emission head to be emitted onto the measured sample.
Preferably, the receiving assembly comprises a receiving optical head and a receiving optical head fiber, the receiving optical head fiber is arranged at one side of the receiving optical head, the measuring light transmitted and/or reflected by the measured sample is guided into the fiber optic spectrometer to complete corresponding measurement, and the bottom of the receiving optical head is connected with one end of the receiving optical head bracket and is used for receiving the measuring light emitted by the emitting assembly or the measuring light transmitted or reflected by the measured sample.
Preferably, the emission assembly is a wide-spectrum light source, one end of the wide-spectrum light source is connected with one end of the emission optical head support, and the wide-spectrum light source is used for emitting measurement light to the measured sample and comprises any one of a xenon lamp, a tungsten lamp, a deuterium tungsten lamp combination and an LED and LED combination.
Preferably, the receiving component is the fiber optic spectrometer and is used for receiving the measuring light emitted by the emitting component or the light emitted by the wide-spectrum light source transmitted or reflected by the measured sample so as to measure the transmittance or reflectance of the measured sample; the optical fiber spectrometer adopts a linear array photoelectric detector which rapidly and once images the spectrum transmitted or reflected by the tested sample.
Preferably, when the transmitting assembly and the receiving assembly are rotationally adjusted and adjusted to be in a state of being opposite to each other, and the included angle between the transmitting assembly and the receiving assembly is 0 degrees, the measured spectrum is used as a reference spectrum; adjusting the first rotary table and the second rotary table to enable the transmitting optical head and the receiving optical head to be in a symmetrical state at a certain angle, and measuring the spectrum of the reflection sample; and comparing the measured spectrum of the reflection sample with a reference spectrum to obtain the absolute reflectivity of the reflection sample.
Preferably, when a single piece of the glass is used as a calibration sample plate, the reflectivity of the single piece of the glass is relatively low, and for the reflection sample with weak reflection at certain wavelengths and poor signal-to-noise ratio, two or more glass plates can be assembled together in parallel to be used as a calibration sample plate so as to improve the reflectivity and the signal-to-noise ratio for measuring the relative reflectivity.
A reflectivity measuring method of a rapid transflective measuring instrument, comprising any one of the above-mentioned rapid transflective measuring instruments, comprising the steps of:
s1: horizontally placing the reflection sample on the sample support, and adjusting an included angle between the transmitting mechanism and the receiving mechanism to be 90 degrees, wherein the included angle is symmetrical relative to the sample support;
s2: measuring the reflectivity of the relative calibration sample plate;
s3: measuring the reflectance of the reflective sample;
s4: setting the reflectivity of the reflection sample as X, the measured reflectivity of the relative calibration sample plate as B, the measured reflectivity of the reflection sample as Y, and the standard reflectivity of the relative calibration sample plate as R n0 The reflectance of the reflective sample 412 is calculated by the following formula:
according to S4, when the relative calibration sample plate is glass, the standard reflectivity R of the relative calibration sample plate is n0 The Fresnel formula is calculated by a Fresnel formula:
when the relative calibration template glass has two reflective surfaces with a thickness that results in an error in the measured reflectivity of the relative calibration template glass that is not twice that of a simple single-sided relative calibration template glass, an error correction is required. The reflectivity of a certain reflection sample measured by a rotating grating transflective measuring instrument and the reflectivity of the same reflection sample measured by the invention are obtained by taking the reflectivity data of the reflection samples with a plurality of wavelengths, taking the average value to correct the reflectivity of the measured sample by error, and calculating the reflectivity by the following formula:
Compared with the prior art, the transmitting mechanism and the receiving mechanism are respectively connected with the wide-spectrum light source and the optical fiber spectrometer through the optical fibers, so that the measurement of the transmissivity and/or the reflectivity of a measured sample can be quickly and accurately realized.
Drawings
FIG. 1 is a schematic diagram of a transmission measurement according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram of a reflectance measurement according to a first embodiment of the present invention;
FIG. 3 is a schematic diagram of a transflective measurement according to a second embodiment of the present invention:
FIG. 4 is a schematic diagram of a calibration block of the present invention;
FIG. 5 is a graph of the aluminum reflective film measurement of the present invention;
FIG. 6 is a spectrum of a xenon lamp according to an embodiment of the present invention;
FIG. 7 is a schematic view of two calibration blocks of K9 glass plates according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows:
as shown in fig. 1 and fig. 2, the present invention provides a fast transflective measuring instrument, which includes a base 1, an emitting mechanism 2, a receiving mechanism 3, and a measured sample assembly 4, wherein the measured sample assembly 4, the emitting mechanism 2, and the receiving mechanism 3 are mounted on the base 1, the emitting mechanism 2 and the receiving mechanism 3 can rotate relative to the measured sample assembly 4, and the included angle between the emitting mechanism 2 and the receiving mechanism 3 is adjusted by rotation, so as to measure the transmission or reflection of a measured sample 41;
in the first embodiment, the transmitting mechanism 2, the receiving mechanism 3 and the measured sample assembly 4 are all disposed on the base 1;
wherein:
a transmitting mechanism 2 comprising a first rotary fixing assembly 21 and a transmitting assembly 22, wherein the first rotary fixing assembly 21 comprises a first rotary table fixing support 211, a first rotary table 212, a first rotary table switching support 213 and a transmitting head support 214;
a receiving mechanism 3 including a second rotation fixing assembly 31 and a receiving assembly 32, wherein the second rotation fixing assembly 31 includes a second turntable fixing support 311, a second turntable 312, a second turntable switching support 313 and a receiving optical head support 314;
a tested sample assembly 4 comprising a tested sample 41 and a sample support 42;
the measured sample 41 includes a transmissive sample 411 and a reflective sample 412 for measuring transmittance and reflectance, respectively.
As shown in fig. 1, when the sample 41 to be measured is the transmission sample 411, the transmission sample 411 is stood on the sample holder 42;
as shown in fig. 2, when the measured sample 41 is the reflection sample 412, the reflection sample 412 is flatly placed on the upper surface of the sample holder 42.
When the device is installed, the sample support 42 is fixed on the base 1 and used for placing the tested sample 41;
the first turntable fixing support 211 is fixed on the base 1, the inner side surface of the first turntable fixing support 211 is sequentially connected with the first turntable 212 and the first turntable switching support 213, the emitting optical head support 214 is of an 'L' -shaped structure, one end of the emitting optical head support 214 is connected with the side edge of the first turntable 212, and the other end of the emitting optical head support 214 is connected with the emitting assembly 22;
when the first turntable 212 is rotated, the head holder 214 is rotated, thereby adjusting the rotation angle of the radiation module 22.
A second turntable fixing support 311 is adjacent to the first turntable fixing support 211 and is also fixed on the other side of the base 1, the other side of the second turntable fixing support 311 is sequentially connected with a second turntable 312 and a second turntable switching support 313, a receiving optical head support 314 is of an 'L' -shaped structure, one end of the receiving optical head support 314 is connected with the side edge of the second turntable switching support 313, and the other end of the receiving optical head support 314 is connected with the receiving assembly 32;
when the second turntable 312 is rotated, the receiving head holder 314 is rotated, thereby adjusting the rotation angle of the receiving unit 32.
The first turntable fixing support 211 and the second turntable fixing support 311 are independently arranged on the base 1, and the central line of the first turntable fixing support 211 and the central line of the second turntable fixing support 311 are superposed with the central line of the base 1;
the included angle between the transmitting mechanism 2 and the receiving mechanism 3 is 0-180 degrees; the rotation angle of the transmitting assembly 22 and the receiving assembly 32 is between 0 degree and 180 degrees, the tested sample assembly 4 is positioned between the transmitting assembly 22 and the receiving assembly 32, and the transmittance or the reflectance of the tested sample 41 can be correctly measured after the transmitting assembly 22 and the receiving assembly 32 are symmetrical relative to the adjusting angle of the tested sample assembly 4;
when the measured sample 41 is the transmission sample 411, the rotation angle between the emission component 22 and the receiving component 32 is 0 °, and the included angle between the emission mechanism 2 and the receiving mechanism 3 is 180 °; when the measured sample 41 is the reflection sample 412, the rotation angle between the emission assembly 22 and the receiving assembly 32 is 45 °, and the included angle between the emission mechanism 2 and the receiving mechanism 3 is 90 °.
The emission assembly 22 includes an emission optical head 221 and an emission optical head fiber 222, the emission optical head fiber 222 is disposed on one side of the emission optical head 221, the emission optical head fiber 222 guides the measurement light into the emission optical head 221, the bottom of the emission optical head 221 is connected with one end of the emission optical head support 214, and the emission optical head 211 emits the broad spectrum measurement light guided by the emission optical head fiber 222 to the measured sample 41.
The receiving assembly 32 includes a receiving optical head 321 and a receiving optical head fiber 322, the bottom of the receiving optical head 321 is connected to one end of the receiving optical head support 214, the receiving optical head 321 receives the measuring light emitted by the emitting assembly 22 or the measuring light transmitted or reflected by the measured sample 41, the receiving optical head fiber 322 is disposed at one side of the receiving optical head 321, and the receiving optical head fiber 322 is used for guiding the measuring light received by the receiving optical head 321 into the fiber spectrometer 5 to complete the corresponding transmission or reflection measurement.
The optical fiber spectrometer 5 adopts a linear array photoelectric detector which rapidly images the spectrum of the introduced measuring light at one time, so as to achieve the effect of rapid measurement.
As shown in fig. 2, in the first embodiment, an absolute measurement of the reflectance is performed on the reflective sample 412.
Compared with the conventional transflective measuring instrument which adopts a standard block (such as a Teflon standard plate and a standard reflector plate) for relative calibration, the rapid transflective measuring instrument provided by the invention can also obtain the absolute reflectivity of a reflective sample 422;
when the transmitting assembly 22 and the receiving assembly 32 are adjusted to be in a state of being opposite to each other and the included angle between the two is 0 degrees by rotating, the measured spectrum is used as a reference spectrum;
adjusting the first turntable 212 and the second turntable 312 to make the emitting optical head 221 and the receiving optical head 321 in a symmetrical state at a certain angle, and measuring the spectrum of the reflection sample 422;
the absolute reflectance of the reflective sample 422 can then be obtained by comparing the measured spectrum of the reflective sample 422 to a reference spectrum.
The above method is an absolute method for measuring reflectivity, and besides, the present invention can also provide a relative method for measuring reflectivity.
As shown in fig. 2, in the first embodiment, when performing reflection measurement, the steps are as follows:
the first step is as follows: placing the reflective sample 422 on the sample holder 41, and rotating the first turntable 212 and the second turntable 312 to rotate the emitting head holder 214 and the receiving head holder 314, respectively, so that the emitting head 221 and the receiving head 321 are in an angle symmetry state;
secondly, using the relative calibration sample plate shown in fig. 4 as a K9 glass plate, and measuring to obtain the reflectivity of the relative calibration sample plate K9 glass plate;
thirdly, taking the aluminum-plated reflecting sheet as the reflecting sample 412, and measuring the reflectivity of the reflecting sample 412 when the aluminum-plated reflecting sheet is used as the reflecting sample 412;
fourthly, setting the reflectivity of the reflection sample 412 as X when the aluminum-plated reflection sheet is adopted, setting the reflectivity of the reflection sample 412 as B when the relative calibration sample plate is K9 glass plate, and setting the reflection sample 412 as platedThe measured reflectivity of the aluminum reflector plate is Y, and the standard reflectivity of the glass plate is R according to a relative calibration sample plate K9 n0 The reflectivity of the aluminum-coated reflective sheet of the reflective sample 412 is calculated by the following formula:
standard reflectivity R of relative calibration sample plate K9 glass plate n0 The Fresnel formula is calculated by the Fresnel formula:
where n is the refractive index of the glass plate relative to the calibration template K9.
The refractive index n of the glass plate relative to the calibration sample plate K9 is calculated by the following formula:
where λ is the wavelength of light.
Because the standard reflectivity of the relative calibration sample plate K9 glass plate obtained by calculation is the single-side reflectivity of the K9 glass plate, the K9 glass plate for practical test has two reflecting surfaces: the a-side and B-side, the two reflective surfaces have a thickness that results in an error in the measured reflectance of the K9 glass sheet (not twice the reflectance of a simple single-sided K9 glass sheet), and therefore error correction is required.
The average value is taken for error correction, and the reflectivity of the measured sample is calculated by the following formula:
The reflectivity data of 5 wavelengths of the reflectivity of the aluminized reflector measured by the rotating grating transflective measuring instrument and the reflectivity of the aluminized reflector measured by the transflective measuring instrument are as follows.
The average of 5 phase difference multiples was calculated as the error correction factor, which was about 1.7.
The K9 standard reflectivity is obtained by the fresnel formula (2), and then the actual reflectivity of the aluminized reflector can be obtained by calculation according to the formula (3), as shown in fig. 5, the reflectivity (only one section from 400nm to 700 nm) of the known aluminized reflector is a relatively smooth curve (only one section from 400nm to 700 nm) 501, which is the reflectivity of the aluminized reflector measured by using a rotating grating transflective measuring instrument; 502 is a curve with a slight burr, which shows that the reflectivity of the aluminized reflector measured by the invention is basically consistent with that of the aluminized reflector, and in conclusion, the measurement accuracy of the rapid transflective measuring instrument provided by the invention is excellent.
Example two:
as shown in fig. 3, the second embodiment of the present invention is different from the first embodiment in that: the emission component 22 is replaced by a wide-spectrum light source 6, the xenon lamp 61 is selected as the wide-spectrum light source in the second embodiment, and the optical fiber spectrometer 5 is replaced by the receiving component 32; one end of the transmitting optical head support 214 is connected with the xenon lamp 61, and one end of the receiving optical head support 314 is connected with the fiber spectrometer 5; the first turntable 212 controls the rotation angle of the xenon lamp 61 and the second turntable 312 controls the rotation angle of the fiber spectrometer 5, thereby measuring the transmittance and reflectance of the measurement sample 41.
As shown in fig. 6, the spectrum of the xenon lamp 61 using the wide-spectrum light source 6 of the second embodiment of the present invention is in the range of 185nm to 840nm, and can cover most of the spectrum of the ultraviolet light and the infrared light in the range of 185nm to 1000 nm;
as shown in fig. 3, the optical fiber spectrometer 5 used in the second embodiment of the present invention is similar to the first embodiment of the present invention, and a linear array photodetector is adopted, which can ensure that a spectrum related to a sample 41 to be measured is imaged rapidly and at one time.
As shown in fig. 2, in the second embodiment, when performing reflection measurement, the steps are as follows:
the first step is as follows: placing the reflection sample 422 on the sample support 41, and then rotating the first turntable 212 and the second turntable 312 to drive the transmission optical head support 214 and the reception optical head support 314 to rotate, respectively, so that the xenon lamp 61 and the fiber spectrometer 5 are opposite to each other;
secondly, using the relative calibration sample plate shown in FIG. 4 as a K9 glass plate, and measuring to obtain the reflectivity of the relative calibration sample plate K9 glass plate;
thirdly, taking aluminum as a reflection sample 422, and measuring the reflectivity when the reflection sample 422 is aluminum;
fourthly, setting the reflectivity of the reflection sample 422 as X when the reflection sample is aluminum, setting the reflectivity of the relative calibration sample plate as B when the relative calibration sample plate is K9 glass plate, setting the reflectivity of the reflection sample 422 as Y, and setting the standard reflectivity of the relative calibration sample plate K9 glass plate as R n0 The reflectance of the aluminum of the reflective sample 422 was calculated from the following equation:
standard reflectivity R of relative calibration sample plate K9 glass plate n0 The Fresnel formula is calculated by the Fresnel formula:
wherein n is the refractive index of the glass plate relative to the calibration sample plate K9.
The refractive index n of the glass plate relative to the calibration sample plate K9 is calculated by the following formula:
where λ is the wavelength of light.
Because the standard reflectivity of the relative calibration sample plate K9 glass plate obtained by calculation is the single-side reflectivity of the K9 glass plate, the K9 glass plate for practical test has two reflecting surfaces: the reflective surfaces a and B have a thickness that results in an error in the measured reflectance of the K9 glass sheet (not twice the reflectance of a simple single-sided K9 glass sheet), and therefore error correction is required.
The average value is taken for error correction, and the reflectivity of the measured sample is calculated by the following formula:
The reflectivity data of 5 wavelengths of the reflectivity of the aluminized reflector measured by the rotating grating transflective measuring instrument and the reflectivity of the aluminized reflector measured by the transflective measuring instrument are as follows.
The average of 5 phase difference multiples was calculated as the error correction factor, which was about 1.7.
The K9 standard reflectivity is obtained by fresnel formula (2), and then the actual reflectivity of the aluminized reflector sheet can be obtained by calculation of formula (3), as shown in fig. 5, the reflectivity (only one section from 400nm to 700 nm) of the known aluminized reflector sheet is a relatively smooth curve (only one section from 400nm to 700 nm), which is the reflectivity of the aluminized reflector sheet measured by using a rotating grating transflective measuring instrument; 502 is a curve with a slight burr, and the reflectivity of the aluminized reflector measured by using the method is basically consistent with that of the aluminized reflector, and in conclusion, the measurement accuracy of the quick transflective measuring instrument provided by the invention is excellent.
In the first embodiment and the second embodiment of the present invention, when a single piece of K9 glass is used as the calibration template, the reflectivity of the single piece of K9 glass is relatively low, and for the reflection sample 412 with weak reflection at certain wavelengths and poor signal-to-noise ratio, two or more K9 glass plates may be assembled in parallel to be used as the calibration template block, so as to improve the reflectivity and the signal-to-noise ratio for measuring the relative reflectivity.
As shown in FIG. 7, two K9 glass plates are assembled in parallel to form a calibration sample plate, wherein 701 is a bracket, 702 is a first K9 glass plate, 703 is a spacer ring, and 704 is a second K9 glass plate. In use, the same steps as those of the reflectivity measuring method of the rapid transflective measuring instrument are performed, and finally the reflectivity of the reflective sample 422 is obtained by correcting the reflectivity formula (3) of the measured sample.
The foregoing is a more detailed description of the present invention with reference to specific embodiments thereof, and it is not intended to limit the invention to the specific embodiments thereof. For those skilled in the art to which the invention pertains, numerous simple deductions or substitutions may be made without departing from the spirit of the invention, which shall be deemed to belong to the scope of the invention.
Claims (11)
1. The utility model provides a quick transflective measurement appearance, its characterized in that, includes base (1), emission mechanism (2), receiving mechanism (3) and surveyed sample subassembly (4), surveyed sample subassembly (4) set up in on base (1), emission mechanism (2) and receiving mechanism (3) install in on base (1), and relative surveyed sample subassembly (4) can rotate, be used for adjusting contained angle between emission mechanism (2) and receiving mechanism (3), the contained angle is 0-180, for quick accurate measurement after being surveyed sample subassembly (4) symmetry the surveyed sample (41) transmissivity and/or the reflectivity of surveyed sample subassembly (4).
2. The apparatus according to claim 1, wherein the transmitting mechanism (2) comprises a first rotating and fixing component (21) and a transmitting component (22), the first rotating and fixing component (21) is connected with the transmitting component (22) and is used for rotatably adjusting the rotation angle of the transmitting component (22); the first rotary fixing assembly (21) comprises a first rotary table fixing support (211), a first rotary table (212), a first rotary table switching support (213) and a transmitting optical head support (214), wherein the first rotary table fixing support (211) is fixed on the base (1), the inner side of the first rotary table fixing support (211) is sequentially connected with the first rotary table (212) and the first rotary table switching support (213), the transmitting optical head support (214) is of an L-shaped structure, one end of the transmitting optical head support is connected with the side edge of the first rotary table (212), and the other end of the transmitting optical head support (214) is connected with the transmitting assembly (22) and used for driving the transmitting optical head support (214) to rotate when the first rotary table (212) is rotated so as to adjust the angle between the transmitting assembly (22) and the sample (41) to be measured.
3. A rapid transflectance measuring instrument according to claim 1, wherein the receiving mechanism (3) comprises a second rotating fixed component (31) and a receiving component (32), the second rotating fixed component (31) is connected with the receiving component (32) and rotatably adjusts the rotation angle of the transmitting component (32); the second rotary fixing component (31) comprises a second rotary table fixing support (311), a second rotary table (312), a second rotary table switching support (313) and an optical head receiving support (314), wherein the second rotary table fixing support (311) is fixed on the base (1), the inner side of the second rotary table fixing support (311) is sequentially connected with the second rotary table (312) and the second rotary table switching support (313), the optical head receiving support (314) is of an L-shaped structure, one end of the optical head receiving support (314) is connected with the side edge of the second rotary table switching support (313), the other end of the optical head receiving support (314) is connected with the receiving component (32), and the optical head receiving support (314) is driven to rotate when the second rotary table (312) is rotated so as to adjust the angle between the receiving component (32) and the sample (41) to be measured.
4. A rapid transreflective measuring instrument according to any one of claims 2 or 3, wherein the sample (41) to be measured is disposed between the transmitting assembly (22) and the receiving assembly (32), the angle between the transmitting assembly (22) and the receiving assembly (32) is adjusted, and the transmittance and/or reflectance of the sample (41) to be measured is measured; the tested sample assembly (4) comprises a tested sample (41) and a sample support (42), the sample support (42) is fixed on the base (1) and used for placing the tested sample (41), and the tested sample (41) comprises a transmission sample (411) and a reflection sample (412) which are respectively used for measuring the transmissivity and the reflectivity.
5. A rapid transreflective measuring instrument according to claim 2, wherein said transmitting assembly (22) comprises a transmitting optical head (221) and a transmitting optical head fiber (222), said transmitting optical head fiber (222) being disposed on one side of said transmitting optical head (221) for guiding the measuring light into said transmitting optical head (221), the bottom of said transmitting optical head (221) being connected to one end of said transmitting optical head holder (214) for guiding the measuring light guided by said transmitting optical head fiber (222) into said transmitting optical head (221) to be emitted onto said sample (41).
6. The apparatus according to claim 4, wherein the receiving assembly (32) comprises a receiving optical head (321) and a receiving optical head fiber (322), the receiving optical head fiber (322) is disposed at one side of the receiving optical head (321) to guide the measuring light emitted from the emitting assembly (22) or the measuring light transmitted and/or reflected by the sample (41) to the fiber spectrometer (5) for performing corresponding measurement, and the bottom of the receiving optical head (321) is connected to one end of the receiving optical head bracket (214) for receiving the measuring light emitted from the emitting assembly (22).
7. The apparatus according to claim 4, wherein the emission assembly (22) is a wide-spectrum light source (6), one end of the wide-spectrum light source (6) is connected to one end of the emission head holder (214) for emitting the measurement light from the wide-spectrum light source (6) to the sample (41) to be measured, and the wide-spectrum light source (6) comprises any one of a xenon lamp (61), a tungsten lamp, a deuterium tungsten lamp combination, an LED and an LED combination.
8. The apparatus according to claim 6, wherein the receiving component (32) is the fiber optic spectrometer (5) for receiving the measuring light emitted from the emitting component (22) or transmitting or reflecting the light emitted from the broad spectrum light source (6) through the measured sample (41) to achieve the measurement of the transmittance or reflectance of the measured sample (41); the optical fiber spectrometer (5) adopts a linear array photoelectric detector which rapidly and once images the transmitted or reflected spectrum of the tested sample (41).
9. A rapid transreflective measuring instrument according to claim 8, characterized in that when said transmitting assembly (22) and receiving assembly (32) are rotationally adjusted to be opposite to each other with said angle therebetween being 0 °, the measured spectrum is used as a reference spectrum; -measuring the spectrum of said reflected sample (422) by adjusting said first (212) and second (312) turntable, adjusting said optical head (221) to be in angular symmetry and said optical head (321); the absolute reflectance of the reflective sample (422) can be obtained by comparing the measured spectrum of the reflective sample (422) with a reference spectrum.
10. The apparatus according to claim 9, wherein a single glass is used as the calibration template, the single glass has a relatively low reflectivity, and for the reflection sample (412) with relatively weak reflection and poor signal-to-noise ratio at certain wavelengths, two or more glass plates can be assembled in parallel to be used as the calibration template block, so as to improve the reflectivity and the signal-to-noise ratio for measuring the relative reflectivity.
11. A reflectivity measuring method of a rapid transreflective measuring instrument, comprising the rapid transreflective measuring instrument of any one of claims 1 to 10, comprising the steps of:
s1: horizontally placing the reflection sample (412) on the sample support (42), and adjusting an included angle between the emission mechanism (2) and the receiving mechanism (3) to be 90 degrees and be symmetrical relative to the sample support (42);
s2: measuring the reflectivity of the relative calibration sample plate;
s3: measuring the reflectance of the reflective sample (412);
s4: setting the reflectivity of the reflection sample (412) as X, the measured reflectivity of the relative calibration sample plate as B, the measured reflectivity of the reflection sample (412) as Y, and the standard reflectivity of the relative calibration sample plate as R n0 The reflectance of the reflective sample (412) is calculated by the following formula:
according to S4, when the relative calibration sample plate is glass, the standard reflectivity R of the relative calibration sample plate is n0 The Fresnel formula is calculated by a Fresnel formula which is as follows:
wherein n is the refractive index of the relative calibration sample plate;
when the relative calibration sample plate glass is provided with two reflecting surfaces which have certain thicknesses and cause errors in the measured reflectivity of the relative calibration sample plate glass, error correction is needed, the reflectivity of one reflecting sample (412) measured by a rotating grating transflective measuring instrument and the reflectivity of the same reflecting sample (412) measured by the invention are taken, the reflectivity data of the reflecting sample (412) with multiple wavelengths are taken, and the average value is taken to correct the reflectivity of the measured sample by the following formula:
wherein P is an average value.
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| US5798837A (en) * | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
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| CN206235560U (en) * | 2016-09-29 | 2017-06-09 | 宏明科技有限公司 | Reflection and transmission dual-mode optical measuring instrument |
| CN216594769U (en) * | 2021-06-08 | 2022-05-24 | 高利通科技（深圳）有限公司 | Quick transflective measuring instrument |
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2021
- 2021-06-08 CN CN202110638955.XA patent/CN115452771A/en active Pending
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|---|---|---|---|---|
| US5798837A (en) * | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
| CN103698275A (en) * | 2013-12-12 | 2014-04-02 | 北京理工大学 | Light measuring device capable of switching between transmission and reflection measurement |
| CN105527252A (en) * | 2016-01-13 | 2016-04-27 | 中国工程物理研究院激光聚变研究中心 | Optical element reflectivity measurement instrument |
| CN206235560U (en) * | 2016-09-29 | 2017-06-09 | 宏明科技有限公司 | Reflection and transmission dual-mode optical measuring instrument |
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