CN115449746B - Coating device with fixture tool for realizing batch coating - Google Patents

Abstract

The invention discloses a coating device with a fixture tool for realizing batch coating, which comprises a base, a molybdenum sheet, a cover plate, a horizontal adjustment assembly and a plurality of positioning assemblies, wherein the upper surface of the base is used for placing a sensor substrate; the molybdenum sheet is arranged on the base and is used for being attached to the top end of the sensor substrate on the base, and a gap is formed in the area of the molybdenum sheet covering the sensor substrate; the cover plate is attached to the upper surface of the molybdenum sheet and provided with a through groove in the area right above the sensor substrate; the horizontal adjustment assembly can adjust the position of the molybdenum sheet at the top end of the base through a plurality of positioning assemblies; the mode of connecting the molybdenum sheets is set to be a mode of positioning and pressing, the positions of the molybdenum sheets can be adjusted by controlling the plurality of positioning pieces to move synchronously, and the molybdenum sheets are not contacted with the sensor substrate when not pressed, so that the positions of the molybdenum sheets can be finely adjusted.

Description

Coating device with fixture and tooling for batch coating

Technical field

The invention relates to the field of coating technology, and in particular to a coating device having a fixture and tooling for batch coating.

Background technique

The mask method was developed from the electrolytic machining technology in macro-machining and has a long history. The main point of this method is to use an insulating mask to shield the parts of the material being processed that do not need to be etched and then perform anode dissolution, thereby Allow the metal film to be plated only where it is not covered by the shield.

Mask sheets usually use molybdenum sheets, which can be processed by wire cutting to obtain molybdenum sheets of different shapes, lengths and widths, and by cutting slits of any shape on the processed molybdenum sheets, so that subsequent metal films can only pass through the slits , thereby plating a metal film with a corresponding shape of the gap under the molybdenum sheet.

In the existing technology, different slits are generally cut on different molybdenum sheets. When coating, the substrate to be coated is first placed on the coating machine, and the corresponding molybdenum sheet is taken out and placed manually on top of the substrate for fixation. The coating machine is used to coat a metal film of the desired shape on the substrate. The above method can only be used for coating a small number of substrates. When large quantities of coatings are required, it is difficult to ensure the consistency of the coatings on multiple substrates.

In addition, when the molybdenum sheet is placed on the base, it is generally necessary to adjust the position of the molybdenum sheet to ensure that the gap on the molybdenum sheet is located in the corresponding area on the base. However, adjusting the position of the molybdenum sheet when the molybdenum sheet is attached to the base may cause The substrate is scratched by the molybdenum sheet, thereby reducing the yield of the finished product.

Contents of the invention

The purpose of the present invention is to provide a coating device with a fixture for batch coating, so as to solve the problems in the prior art that it is not suitable for coating substrates in large batches, and that adjusting the position of the molybdenum sheet may scratch the molybdenum sheet.

In order to solve the above technical problems, the present invention specifically provides the following technical solutions:

A coating device with a fixture and tooling for batch coating, which has:

a base, the upper surface of which is used to place the sensor substrate;

A molybdenum sheet, which is arranged on the base and used to fit the top of the sensor base on the base, and a gap is opened in the area where the molybdenum sheet covers the sensor base;

A cover plate, which is attached to the upper surface of the molybdenum sheet and has a through-slot in the area directly above the sensor base;

A horizontal adjustment component, which is arranged inside the base and capable of adjusting the horizontal position inside the base;

A plurality of positioning components, all of which are fixedly connected to the horizontal adjustment component, and are connected to the cover plate through the base and the molybdenum piece in turn;

The horizontal adjustment component can adjust the position of the molybdenum piece on the top of the base through a plurality of positioning components.

As a preferred solution of the present invention, the base includes an upper base and a lower base, and four supports are provided between the upper base and the lower base;

The upper base is located directly above the lower base, and the four support members are respectively located at the four corners of the upper base and the lower base. The upper base and the lower base pass through the four support members. Connected into an integrated structure;

Wherein, an activity space for connecting the level adjustment assembly is formed between any two adjacent support members.

As a preferred solution of the present invention, the upper base is provided with a plurality of strip grooves for placing the sensor substrate, and the upper base is provided with a plurality of circular grooves for the positioning assembly to pass through. hole;

The inner diameter of the circular hole is larger than the diameter of the positioning component, and a plurality of the circular holes are evenly distributed outside the plurality of strip grooves.

The depth of the strip groove is less than the thickness of the sensor substrate.

As a preferred solution of the present invention, the lower base is provided with two first slide rails and two second slide rails, and the two first slide rails are respectively located on the left and right sides of the lower base. space, and the two ends of the first slide rail are respectively facing the two adjacent supports, the two second slide rails are respectively located in the activity space on the front and rear sides of the lower base, and the third The two ends of the two slide rails face the two adjacent supporting members respectively.

As a preferred solution of the present invention, the molybdenum sheet is provided with a plurality of positioning holes for the positioning assembly to pass through, and a plurality of positioning holes are provided on the molybdenum sheet in the area directly above the strip groove. coating seams;

Wherein, a plurality of positioning holes correspond to a plurality of positioning components, and the inner diameter of the positioning holes is equal to the diameter of the positioning component.

As a preferred solution of the present invention, the cover plate is provided with a plurality of positioning members for connecting the positioning components, and a coating groove is provided on the cover plate directly above the strip groove;

The interior of the positioning member is provided with an inner cavity for the positioning component to extend into, and a bolt hole is provided at the center of the top of the positioning member. The interior of the bolt hole is provided with an inner cavity capable of connecting with the top of the positioning component. Threaded fixing bolts.

As a preferred solution of the present invention, the horizontal adjustment assembly includes a movable connecting plate disposed between the upper base and the lower base. The movable connecting plate is provided with transversely distributed left and right adjustment members and front and rear adjustment members. parts, the left and right adjusting parts and the front and rear adjusting parts are vertically distributed with each other on the movable connecting plate, and the left and right adjusting parts are located above the front and rear adjusting parts in the movable connecting plate;

The left and right adjusting parts can control the movable connecting plate and the left and right adjusting parts to move left and right synchronously, and the front and rear adjusting parts can control the movable connecting plate and the left and right adjusting parts to move forward and backward synchronously.

As a preferred solution of the present invention, the left and right adjustment members include left and right screw rods that pass transversely through the movable connecting plate and are threadedly connected thereto. The two ends of the left and right screw rods are respectively located on the movable connecting plate. A first slide block is rotatably connected to the left and right sides, and a first knob is rotatably connected to the outside of the first slide block. The first knob is connected to one end of the left and right screw rods to control the left and right screw rods. The rod rotates;

The bottom ends of the two first slide blocks are provided with slide grooves, and the two first slide blocks are each slidably connected to the two first slide rails through the slide grooves;

The front and rear adjustment members include front and rear screw rods that pass through the movable connecting plate transversely and are threadedly connected to the movable connecting plate. The two ends of the front and rear screw rods are respectively located at the front and rear sides of the movable connecting plate and are rotationally connected with a second screw rod. The slider is rotatably connected to a second knob on the outside of the second slider. The second knob is connected to one end of the front and rear screw rods to control the rotation of the front and rear screw rods;

The bottom ends of the two second slide blocks are each provided with slide grooves, and the two second slide blocks are each slidably connected to the two second slide rails through the slide grooves.

As a preferred solution of the present invention, the positioning assembly includes a positioning post fixed on the movable connecting plate, a sliding sleeve is set on the outside of the positioning post, and a wave spring is set on the outside of the sliding sleeve. ;

The sliding sleeve is used to support the molybdenum piece on the outside of the positioning post, and multiple sliding sleeves are supported together so that the molybdenum piece does not contact the sensor base on the base when placed;

Wherein, a threaded hole is provided at the center of the top of the positioning post.

As a preferred solution of the present invention, the sliding sleeve can slide longitudinally on the positioning post, a concave structure is provided on the outside of the positioning post, and a convex structure is provided on the inside of the sliding sleeve. The convex structure always moves up and down in the recessed structure of the positioning post. When the convex structure of the sliding sleeve and the top of the recessed structure of the positioning post collide, the sliding sleeve is located at the highest point on the positioning post. Location;

Wherein, the bottom end of the wave spring is in contact with the movable connecting plate to elastically support the sliding sleeve, and the wave spring is elastically supported so that the sliding sleeve is in the highest position on the positioning post.

Compared with the prior art, the present invention has the following beneficial effects:

(1) The coating fixture of the present invention can position and fix the substrate, obtain effective platinum film coating by using the mask method, and can simultaneously produce multiple different measuring points and different types of sensors, while ensuring the coating of multiple substrates. Consistency also improves development efficiency.

(2) The present invention connects the molybdenum pieces by positioning them first and then pressing them, and can jointly adjust the position of the molybdenum pieces by controlling the synchronous movement of multiple positioning parts, and the molybdenum pieces are not connected to each other when they are not pressed. The sensor base is in contact, making it easy to fine-tune the position of the molybdenum piece to ensure that the slit area on the molybdenum piece accurately fits the sensor base below.

Description of the drawings

In order to more clearly explain the embodiments of the present invention or the technical solutions in the prior art, the drawings that need to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only exemplary. For those of ordinary skill in the art, other implementation drawings can be obtained based on the extension of the provided drawings without exerting creative efforts.

Figure 1 is a schematic diagram of the entire device provided by the present invention.

Figure 2 is a schematic structural diagram of the molybdenum sheet provided by the present invention.

Figure 3 is a schematic structural diagram of the base provided by the present invention.

Figure 4 is a schematic diagram of the installation of the left and right, front and rear adjustment components provided by the present invention.

Figure 5 is a schematic structural diagram of the movable connecting plate provided by the present invention.

Figure 6 is a cross-sectional view of the connection of the positioning assembly provided by the present invention.

The labels in the figure are as follows:

1-base; 2-molybdenum plate; 3-cover plate; 4-level adjustment component; 5-positioning component;

11-Upper base; 12-Lower base; 13-Support;

111-strip groove; 112-round hole; 121-first slide rail; 122-second slide rail;

21-Positioning hole; 22-Coating seam;

31-positioning piece; 32-coating tank;

311-inner cavity; 312-bolt hole; 313-fixing bolt;

41-movable connecting plate; 42-left and right adjustment parts; 43-front and rear adjustment parts;

421-left and right screw rods; 422-first slider; 423-first knob; 431-front and rear screw rods; 432-second slider; 433-second knob;

51-positioning column; 52-sliding sleeve; 53-wave spring.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

As shown in Figures 1 to 6, the present invention provides a coating device with a fixture and tooling for batch coating, which is provided with:

Base 1, the upper surface of which is used to place the sensor substrate;

The molybdenum sheet 2 is arranged on the base 1 and is used to fit the top of the sensor base on the base 1, and a gap is opened in the area where the molybdenum sheet 2 covers the sensor base;

The cover plate 3 is attached to the upper surface of the molybdenum sheet 2 and has a slot in the area directly above the sensor base;

The horizontal adjustment component 4 is arranged inside the base 1 and can adjust the horizontal position inside the base 1;

A plurality of positioning components 5 are all fixedly connected to the horizontal adjustment component 4, and are connected to the cover plate 3 through the base 1 and the molybdenum piece 2 in turn;

The horizontal adjustment component 4 can adjust the position of the molybdenum sheet 2 on the top of the base 1 through a plurality of positioning components 5 .

In the prior art, different slits are generally cut on different molybdenum sheets 2. When coating, the substrate to be coated is first placed on the coating machine, and the corresponding molybdenum sheet 2 is taken out and manually placed on top of the substrate. Fixed, so that the coating machine can plate a metal film of the required shape on the substrate. The above method can only be used for coating a small number of substrates. It is difficult to ensure the consistency of the coatings on multiple substrates when large batches of coatings are required.

The coating fixture of the present invention can position and fix the substrate, obtain effective platinum film coating by using the mask method, and can simultaneously produce multiple different measuring points and different types of sensors, while ensuring the consistency of multiple substrate coatings. Improved development efficiency.

When the molybdenum sheet 2 is placed on the base, it is generally necessary to adjust the position covered by the molybdenum sheet 2 to ensure that the gap on the molybdenum sheet 2 is located in the corresponding area on the base. However, the molybdenum sheet 2 must be adjusted when it is attached to the base. The position may cause the substrate to be scratched by the molybdenum sheet 2, thereby reducing the yield rate of the processed products.

In the present invention, the molybdenum sheet 2 is connected by positioning first and then pressing, and can jointly adjust the position of the molybdenum sheet 2 by controlling multiple positioning parts to move synchronously, and the molybdenum sheet 2 does not interact with the molybdenum sheet 2 when it is not pressed. The sensor base is in contact, thereby making it easy to fine-tune the position of the molybdenum piece 2 to ensure that the slit area on the molybdenum piece 2 accurately fits the sensor base below.

The base 1 includes an upper base 11 and a lower base 12, and four supports 13 are provided between the upper base 11 and the lower base 12;

The upper base 11 is located directly above the lower base 12, and four support members 13 are located at the four corners of the upper base 11 and the lower base 12. The upper base 11 and the lower base 12 are connected into an integrated structure by the four support members 13;

An activity space for connecting the level adjustment assembly 4 is formed between any two adjacent supports 13 .

The upper base 11 is provided with a plurality of strip grooves 111 for placing the sensor substrate. The upper base 11 is provided with a plurality of round holes 112 for the positioning assembly 5 to pass through. The coating fixture tooling is used for film The platinum film resistance heat flow sensor can be designed as a strip groove 111 according to the use requirements of the sensor type, or a cylindrical groove for plating the cylindrical sensor substrate.

The inner diameter of the circular holes 112 is larger than the diameter of the positioning component 5 , and the plurality of circular holes 112 are evenly distributed outside the plurality of strip grooves 111 .

The depth of the strip groove 111 is smaller than the thickness of the sensor substrate.

The lower base 12 is provided with two first slide rails 121 and two second slide rails 122. The two first slide rails 121 are respectively located in the activity spaces on the left and right sides of the lower base 12, and both sides of the first slide rail 121 The two second slide rails 122 are respectively located in the activity spaces on the front and rear sides of the lower base 12, and the two ends of the second slide rail 122 are respectively facing the two adjacent support members. 13.

A plurality of positioning holes 21 are opened on the molybdenum sheet 2 for the positioning components 5 to pass through. A plurality of coating slits 22 are opened on the molybdenum sheet 2 in the area directly above the strip groove 111. The seam is actually the shape of the plated film (it can be a straight line or an "S" shape or a "W" shape). Because platinum is sputtered to the base 1 after being ionized, platinum can only be sputtered on the unobstructed position of the sensor substrate placed on the base 1 by the molybdenum sheet 2.

The plurality of positioning holes 21 correspond to the plurality of positioning components 5 one-to-one, and the inner diameter of the positioning holes 21 is equal to the diameter of the positioning components 5 .

The cover plate 3 is provided with a plurality of positioning pieces 31 for connecting the positioning components 5, and a coating groove 32 is provided on the cover plate 3 directly above the strip groove 111;

The interior of the positioning member 31 is provided with an inner cavity 311 for the positioning component 5 to extend into, and a bolt hole 312 is provided at the center of the top of the positioning member 31. The interior of the bolt hole 312 is provided with an inner cavity 311 that can be threadedly connected to the top of the positioning component 5. of fixing bolts 313.

Generally, dozens of sheet sensor substrates can be placed on the strip groove 111 of the upper base 11 at one time, and the molybdenum sheet 2 only needs to be processed with corresponding seams at corresponding positions.

Place the glass substrate in the strip groove 111 of the base 1, and pass the multiple positioning holes 21 of the molybdenum sheet 2 through each positioning component 5 until the molybdenum sheet covers the sensor base below, and then put the multiple positioning holes 21 of the cover plate 3 The positioning parts 31 are placed on each positioning component 5, and then a plurality of fixing bolts 313 are tightened so that the cover plate 3 fully presses the molybdenum sheet 2 to the sensor base on the upper base 11.

Then put the fixture into the coating machine, seal it, evacuate it, fill it with argon gas, adjust the high-voltage discharge current (or voltage) to ionize the platinum target, generate an ion beam, control the coating time according to the voltage, and close it after completion High voltage power supply, just deflate it.

The strip groove 111 on the upper base 11 is for placing the glass sheet substrate. The thickness of the glass sheet substrate is only 1mm. The molybdenum sheet 2 is flat and only 0.09mm thick. The sensor substrate is installed in the strip groove 111 of the upper base 11. Here, the surface of the base is slightly higher than the surface of the upper base 11 by 0.1mm, and is covered with molybdenum sheet 2. When the molybdenum sheet 2 is pressed, it will be in preferential contact with the sensor base, so that the molybdenum sheet 2 is closely attached to the base surface, and the platinum passes through the molybdenum sheet. 2 on the gap sputtered sensor substrate.

Among them, the positioning assembly 5 includes a positioning post 51 fixed on the movable connecting plate 41, a sliding sleeve 52 is set on the outside of the positioning post 51, and a wave spring 53 is set on the outside of the sliding sleeve 52;

The sliding sleeve 52 is used to support the molybdenum piece 2 on the outside of the positioning column 51. Multiple sliding sleeves 52 are supported together so that the molybdenum piece 2 does not contact the sensor base on the base 1 when placed;

A threaded hole is provided at the center of the top of the positioning post 51 .

The sliding sleeve 52 can slide longitudinally on the positioning post 51. The outside of the positioning post 51 is provided with a recessed structure, and the inside of the sliding sleeve 52 is provided with a convex structure. The convex structure of the sliding sleeve 52 is always up and down within the recessed structure of the positioning post 51. Displacement, when the convex structure of the sliding sleeve 52 and the top of the concave structure of the positioning column 51 are pushed together, the sliding sleeve 52 is located at the highest position on the positioning column 51;

The bottom end of the wave spring 53 is in contact with the movable connecting plate 41 to elastically support the sliding sleeve 52 , and the wave spring 53 is elastically supported so that the sliding sleeve 52 is at the highest position on the positioning post 51 .

When the molybdenum sheet 2 is placed on the multiple positioning assemblies 5, it is movable on the multiple positioning posts 51 through the multiple positioning holes 21 until the bottom end of the molybdenum sheet contacts the sliding sleeve 52, and the wave spring 53 provides elastic force, so that The bottom end of the molybdenum piece 2 is elastically supported by a sliding sleeve 52, so that after the molybdenum piece 2 is placed, its bottom end does not contact the sensor base below, which facilitates the subsequent use of the horizontal adjustment component to fine-tune the position of the molybdenum piece 2.

After the position of the molybdenum sheet 2 is determined, during the installation of the cover plate 3, the plurality of positioning posts 51 extend into the inner cavities 311 of the plurality of positioning parts 31, and the fixing bolts 313 are used to continuously screw into the positioning posts, so that the cover plate 3 Press the molybdenum piece 2 evenly, and press the plurality of sliding sleeves 52 and wave springs 53 by continuously lowering the molybdenum piece 2 until the molybdenum piece 2 contacts the sensor base.

Among them, the horizontal adjustment assembly 4 includes a movable connecting plate 41 arranged between the upper base 11 and the lower base 12. The movable connecting plate 41 is provided with horizontally distributed left and right adjustment members 42 and front and rear adjustment members 43. The adjusting parts 43 are vertically distributed with each other on the movable connecting plate 41, and the left and right adjusting parts 42 are located above the front and rear adjusting parts 43 in the movable connecting plate 41;

The left and right adjusting members 42 can control the movable connecting plate 41 and the front and rear adjusting members 43 to move left and right synchronously, and the front and rear adjusting members 43 can control the movable connecting plate 41 and the left and right adjusting members 42 to move forward and backward synchronously.

The left and right adjusting members 42 include left and right screw rods 421 that pass transversely through the movable connecting plate 41 and are threadedly connected to the movable connecting plate 41. The two ends of the left and right screw rods 421 are respectively located on the left and right sides of the movable connecting plate 41 and are rotationally connected with a first slider 422. , a first knob 423 is rotatably connected to the outside of a first slider 422, and the first knob 423 is connected to one end of the left and right screw rods 421 to control the rotation of the left and right screw rods 421;

The bottom ends of the two first slide blocks 422 are both provided with slide grooves, and the two first slide blocks 422 are each slidably connected to the two first slide rails 121 through the slide grooves;

The front and rear adjustment members 43 include front and rear screw rods 431 that pass transversely through the movable connecting plate 41 and are threadedly connected thereto. Both ends of the front and rear screw rods 431 are respectively located at the front and rear sides of the movable connecting plate 41 and are rotationally connected with a second slide block 432. , a second knob 433 is rotatably connected to the outside of a second slider 432, and the second knob 433 is connected to one end of the front and rear screw rods 431 to control the rotation of the front and rear screw rods 431;

The bottom ends of the two second slide blocks 432 are each provided with slide grooves, and the two second slide blocks 432 are each slidably connected to the two second slide rails 122 through the slide grooves.

After placing the molybdenum piece 2, the molybdenum piece 2 is in contact with the sensor base. If you need to adjust the position of the molybdenum piece 2 covering the sensor base, you can rotate the first knob 423, and the first knob 423 together with the left and right screw rods 421 move between the two sides. The first slide blocks 422 rotate between each other, and the movable connecting plate 41 will move left and right through the action of the thread. The movable connecting plate 41 will move in the circular hole together with the multiple positioning components 5, thereby positioning on the multiple positioning components 5. When the molybdenum piece 2 moves left and right, and the movable connecting plate 41 moves left and right, the two second slide blocks 432 of the front and rear adjustment members 43 slide on each second slide rail 122 to ensure that the movable connecting plate 41 can always reciprocate in a specific direction. slide.

By turning the second knob 433, the second knob 433 together with the front and rear screw rods 431 rotate between the two second slide blocks 432. Through the action of the threads, the movable connecting plate 41 will move forward and backward, and the movable connecting plate 41 will move together with the multiple Each positioning component 5 moves within the circular hole, thereby causing the molybdenum sheets 2 positioned on the multiple positioning components 5 to move forward and backward. When the movable connecting plate 41 moves forward and backward, the two first slide blocks 422 of the left and right adjustment members 42 move in each direction. The first slide rail 121 slides upward to ensure that the movable connecting plate 41 can always slide back and forth in a specific direction.

The above embodiments are only exemplary embodiments of the present application and are not used to limit the present application. The protection scope of the present application is defined by the claims. Those skilled in the art can make various modifications or equivalent substitutions to this application within the essence and protection scope of this application, and such modifications or equivalent substitutions should also be deemed to fall within the protection scope of this application.

Claims (8)

1. A coating device with a fixture and tooling for batch coating, characterized in that it has: Base (1), the upper surface of which is used to place the sensor substrate; A molybdenum sheet (2), which is arranged on the base (1) and used to fit the top of the sensor base on the base (1), and a gap is opened in the area where the molybdenum sheet (2) covers the sensor base; The cover plate (3) is attached to the upper surface of the molybdenum sheet (2) and has a through-slot in the area directly above the sensor base; A horizontal adjustment component (4), which is arranged inside the base (1) and can adjust the horizontal position inside the base (1); A plurality of positioning components (5) are all fixedly connected to the horizontal adjustment component (4), and are connected to the cover plate (3) through the base (1) and the molybdenum piece (2) in turn. ; The horizontal adjustment component (4) can adjust the position of the molybdenum sheet (2) on the top of the base (1) through a plurality of the positioning components (5); The base (1) includes an upper base (11) and a lower base (12), and four supports (13) are provided between the upper base (11) and the lower base (12); The upper base (11) is located directly above the lower base (12), and the four support members (13) are respectively located at the four corners of the upper base (11) and the lower base (12). The upper base (11) and the lower base (12) are connected into an integrated structure through four support members (13); Wherein, an activity space for connecting the horizontal adjustment assembly (4) is formed between any two adjacent supports (13); The upper base (11) is provided with a plurality of strip grooves (111) for placing the sensor base, and the upper base (11) is provided with a plurality of strip grooves (111) for the positioning assembly (5) to pass through. passed round hole(112); The inner diameter of the circular hole (112) is larger than the diameter of the positioning component (5), and a plurality of the circular holes (112) are evenly distributed outside the plurality of strip grooves (111); The depth of the strip groove (111) is smaller than the thickness of the sensor substrate. 2. A coating device with a fixture tooling for batch coating according to claim 1, characterized in that, The lower base (12) is provided with two first slide rails (121) and two second slide rails (122). The two first slide rails (121) are respectively located on the lower base (12). The activity spaces on the left and right sides of the first slide rail (121) are respectively facing the two adjacent supports (13), and the two second slide rails (122) are respectively located at the two adjacent supports (13). The activity spaces on the front and rear sides of the lower base (12) are provided, and the two ends of the second slide rail (122) face the two adjacent support members (13) respectively. 3. A coating device with a fixture for batch coating according to claim 1, characterized in that: The molybdenum sheet (2) is provided with a plurality of positioning holes (21) for the positioning component (5) to pass through, and the strip groove (111) is located on the molybdenum sheet (2). There are multiple coating slits (22) in the area directly above; Wherein, the plurality of positioning holes (21) correspond to the plurality of positioning components (5) one-to-one, and the inner diameter of the positioning holes (21) is equal to the diameter of the positioning component (5). 4. A coating device with a fixture tooling for batch coating according to claim 1, characterized in that: The cover plate (3) is provided with a plurality of positioning pieces (31) for connecting the positioning assembly (5), which are located in the center of the strip groove (111). A coating tank (32) is provided above; The interior of the positioning member (31) is provided with an inner cavity (311) for the positioning component (5) to extend into, and a bolt hole (312) is provided at the top center of the positioning member (31). A fixing bolt (313) that can be threadedly connected to the top end of the positioning component (5) is provided inside the bolt hole (312). 5. A coating device with a fixture for batch coating according to claim 1, characterized in that: The horizontal adjustment assembly (4) includes a movable connecting plate (41) disposed between the upper base (11) and the lower base (12). The movable connecting plate (41) is provided with transversely distributed The left and right adjustment parts (42) and the front and rear adjustment parts (43) are vertically distributed with each other on the movable connecting plate (41), and the left and right adjustment parts (42) Located above the front and rear adjustment parts (43) in the movable connecting plate (41); The left and right adjustment parts (42) can control the movable connecting plate (41) and the front and rear adjusting parts (43) to move left and right synchronously, and the front and rear adjusting parts (43) can control the movable connecting plate (41) and the front and rear adjusting parts (43). The left and right adjustment members (42) move forward and backward synchronously. 6. A coating device with a fixture tooling for batch coating according to claim 5, characterized in that: The left and right adjustment members (42) include left and right screw rods (421) that pass transversely through the movable connecting plate (41) and are threadedly connected thereto. The two ends of the left and right screw rods (421) are respectively located on the movable connecting plate (41). A first slide block (422) is rotatably connected to the left and right sides of the connecting plate (41), and a first knob (423) is rotatably connected to the outside of the first slide block (422). The first knob (423) is rotatably connected to the left and right sides of the connecting plate (41). 423) Control the rotation of the left and right screw rods (421) by connecting with one end of the left and right screw rods (421); The bottom ends of the two first slide blocks (422) are provided with slide grooves, and the two first slide blocks (422) are each slidably connected to the two first slide rails ( 121) on; The front and rear adjustment members (43) include front and rear screw rods (431) that pass transversely through the movable connecting plate (41) and are threadedly connected thereto. The two ends of the front and rear screw rods (431) are respectively located on the movable connecting plate (41). A second slide block (432) is rotatably connected to the front and rear sides of the connecting plate (41), and a second knob (433) is rotatably connected to the outside of the second slide block (432). The second knob (433) is rotatably connected to the front and rear sides of the connecting plate (41). 433) Control the rotation of the front and rear screw rods (431) by connecting with one end of the front and rear screw rods (431); The bottom ends of the two second slide blocks (432) are each provided with slide grooves, and the two second slide blocks (432) are each slidably connected to the two second slide rails ( 122) on. 7. A coating device with a fixture tooling for batch coating according to claim 5, characterized in that: The positioning assembly (5) includes a positioning post (51) fixed on the movable connecting plate (41), and a sliding sleeve (52) is set on the outside of the positioning column (51). The outer side of 52) is equipped with a wave spring (53); The sliding sleeve (52) is used to support the molybdenum sheet (2) outside the positioning post (51), and multiple sliding sleeves (52) are supported together to ensure that the molybdenum sheet (2) is placed when not in contact with the sensor base on the base (1); Wherein, a threaded hole is provided at the center of the top of the positioning post (51). 8. A coating device with a fixture tooling for batch coating according to claim 7, characterized in that: The sliding sleeve (52) can slide longitudinally on the positioning post (51). A concave structure is provided on the outside of the positioning post (51), and a convex structure is provided on the inside of the sliding sleeve (52). The convex structure of the sliding sleeve (52) always moves up and down within the concave structure of the positioning post (51). Between the convex structure of the sliding sleeve (52) and the concave structure of the positioning post (51), the top When pushing, the sliding sleeve (52) is located at the highest position on the positioning post (51); Wherein, the bottom end of the wave spring (53) is in contact with the movable connecting plate (41) to elastically support the sliding sleeve (52), and the wave spring (53) is elastically supported so that the sliding sleeve (52) is in the highest position on the positioning post (51).