CN1154420A - Sliding part and its manufacturing method - Google Patents
Sliding part and its manufacturing method Download PDFInfo
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- CN1154420A CN1154420A CN 96112101 CN96112101A CN1154420A CN 1154420 A CN1154420 A CN 1154420A CN 96112101 CN96112101 CN 96112101 CN 96112101 A CN96112101 A CN 96112101A CN 1154420 A CN1154420 A CN 1154420A
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- chromium
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- 238000004519 manufacturing process Methods 0.000 title abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 72
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000011651 chromium Substances 0.000 claims abstract description 49
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 37
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 27
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 20
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000002131 composite material Substances 0.000 claims abstract description 8
- 239000011159 matrix material Substances 0.000 claims description 24
- 239000012528 membrane Substances 0.000 claims description 8
- 238000005240 physical vapour deposition Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 6
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 2
- 238000007747 plating Methods 0.000 abstract description 11
- 239000000758 substrate Substances 0.000 abstract 2
- 239000007792 gaseous phase Substances 0.000 abstract 1
- 239000012071 phase Substances 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 48
- 230000000052 comparative effect Effects 0.000 description 30
- 239000000523 sample Substances 0.000 description 18
- 238000007733 ion plating Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000013068 control sample Substances 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 241000863032 Trieres Species 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000001143 conditioned effect Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- -1 nitrogen ion Chemical class 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002199 base oil Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910001430 chromium ion Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- YPHMISFOHDHNIV-FSZOTQKASA-N cycloheximide Chemical compound C1[C@@H](C)C[C@H](C)C(=O)[C@@H]1[C@H](O)CC1CC(=O)NC(=O)C1 YPHMISFOHDHNIV-FSZOTQKASA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007914 intraventricular administration Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010913 used oil Substances 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Sliding-Contact Bearings (AREA)
Abstract
本发明公开了一种耐磨并抗咬住的滑动部件，它具有主相或组分是CrN和Cr2N的氮化铬膜，以及制备该滑动部件的方法。通过用其中分散有金属铬组织的氮化铬复合膜镀覆基体而得到该滑动部件。制备该滑动部件的方法包括用PVD法将由铬和氮混合物组成的气相与基体接触。The present invention discloses a wear-resistant and seizing-resistant sliding part having a chromium nitride film whose main phase or components are CrN and Cr2N , and a method for producing the sliding part. The sliding part is obtained by plating a substrate with a chromium nitride composite film in which a metallic chromium structure is dispersed. The method of producing the sliding part involves bringing a gaseous phase consisting of a mixture of chromium and nitrogen into contact with the substrate by PVD.
Description
The present invention relates to a kind of slide unit and preparation method thereof, this slide unit has excellent abrasive and living property of anti-bite, and this slide unit has CrN and Cr
2N is as the chromium nitride film of major ingredient.
Having been found that the surface has the slide unit of the film with excellent sliding properties that is formed by surface treatment can be as the parts that mutually slide each other, for example automotive engine component and various mechanical part.Used up to now surface treatment method comprises nitriding, chromium plating and molybdenum flame plating.
At present, use the condition day of slide unit more abominable, this just requires parts to have the sliding properties of improvement.Situation about no longer can satisfy the demand with conventional surface treatment occurred, therefore, this just is starved of the film with remarkable wear resistance and living property of anti-bite.
In being devoted to address that need, proposed at present to be plated on the sliding surface of slide unit with metal nitride or the metallic carbide film of PVD (physical vapor deposition).
The PVD film, for example titanium nitride (TiN), titanium carbide (TiC) and chromium nitride (CrN) have excellent abrasive and living property of anti-bite.Wherein, in fact titanium nitride and chromium nitride have become the focus-of-attention as practical film, and this film has been used on some machinery and the engine parts.
Yet, use these component condition to become day by day harsh, the situation of prior art is even titanium nitride and chromium nitride also no longer have satisfied sliding capability.When sliding motion is followed vibratory drive perpendicular to this sliding surface, can cause contacted surface isolation to be held, perhaps, then can run into abominable especially sliding condition when in the sliding motion process during load change in vertical direction.Under this severe condition, the chromium nitride that is made by ion plating is that typical hard films can be broken fall or peels off, thereby has shortened the work-ing life of this slide unit.Even under strict lubricating condition, also can observe hard films similar brokenly fall and peel off, this is because temperature raises and the increase of contact load makes and is difficult in slipper formation lubricant film.Therefore, the slide unit that need cover with ceramic coating, this coating should have resistance to chipping and the antistripping that is better than the coating that obtains with conventional surface treatment.
Therefore, the purpose of this invention is to provide the slide unit that a kind of plating has chromium nitride film, living property of anti-bite and wear resistance that this film has, wherein this plating film even can be not broken under abominable working conditions do not fall or peel off.
Another object of the present invention provides a kind of method for preparing this slide unit.
The inventor has carried out research completely, to address the above problem, and finished the present invention, find to contact with matrix to form composite membrane by the mixing gas phase that makes chromium and nitrogen at this matrix surface with the PVD method, can make slide unit with superior abrasion resistance and seizure resistance, and it is non-friable to fall or peels off, and the principal phase of this composite membrane is CrN and Cr
2N, wherein the disperse of organizing of chromium metal is a dispersive, and the size of dispersive chromium metal tissue is adjusted to 0.2-5 μ m simultaneously, and area is than being 1-20%, and this has shown that the chromium metal tissue accounts for the percentage ratio of the film total area.
Furthermore, the feature of slide unit of the present invention is to form the chromium nitride composite membrane, and the major ingredient of this film is CrN and Cr
2N, chromium metal tissue wherein is a dispersive, has determined the size and the area ratio of this chromium metal tissue when film forms.
Because be dispersed in the chromium nitride film to soft alloy chromium homogeneous microstructure, the film on the slide unit of the present invention has toughness, this only is better than the toughness of the film be made up of the high rigidity chromium nitride.
Be dispersed in film in the chromium nitride tissue in order to form chromium metal tissue wherein, use to have the ion electroplating method of multiple source with evaporated metal chromium.By the dividing potential drop of conditioned reaction gas and the distance between definite processed worker Ren and each chromium metal evaporation source, then the chromium of may command evaporation and the speed of response between reactant gases are to form needed film.Dividing potential drop by conditioned reaction nitrogen, chromium metal evaporation source and handle distance and arc current ratio between workpiece can be adjusted chromium metal and be organized in the quantity in the film and the composition of size and chromium nitride.
The size of chromium metal tissue is defined as 0.2-5 μ m, and its area ratio is defined as 1-20%.If the size of chromium metal tissue is less than 0.2 μ m, or area is than less than 1%, and then the effect of chromium metal tissue is not significantly and do not observe resistance to chipping and what improvement is antistripping have.Also have, if the size of chromium metal tissue greater than 5 μ m, then the chromium metal tissue can expose from the teeth outwards and its wearability only is inferior to the wearability of the tissue of being made up of chromium nitride partly.If area is than greater than 20%, then the hardness of film reduces, and become poorer than the tissue of only being made up of chromium nitride of wearability and wear resistance.
The total thickness of film is preferably 1-80 μ m, particularly 20-60 μ m.If thickness is less than 1 μ m, then the life-span of film is owing to wearing and tearing shorten.If the total thickness of film is greater than 60 μ m, then film peels off or is cracked, and the cohesiveness of reduction and matrix.For economic reasons, do not wish to make the thickness of film greater than necessary thickness.
According to concrete application, the matrix that has this film to apply selects iron material, aluminium or titanium material.The PVD method that describes in detail below is similar to the exemplary process of carrying out under the temperature that is lower than as the used temperature of CVD (chemical vapor deposition) method.Yet, be that inevitably therefore, if possible, preferred heat-stable iron or titanium material are as matrix because Evaporation Phenomenon makes heat absorption.
Foregoing relates to a kind of method that forms chromium nitride film on matrix, and this film has dispersive chromium metal tissue.Yet,, also allow between this film and matrix, to insert a metal bottom coating according to the present invention.In the above-mentioned membrane process of preparation,, then on matrix, form the chromium metal undercoat if before introducing nitrogen, carry out ion plating.Because the thermal expansivity of chromium metal bottom coating and matrix is approaching and insensitive to the influence of thermal stresses, thereby this undercoat has excellent cohesiveness and snappiness.Preferably, the thickness of this chromium metal undercoat is 0.1-2 μ m.If the thickness of undercoat then has few improvement to cohesiveness less than 0.1 μ m.Thickness is increased to greater than 2 μ m, also can obtain close-burning corresponding improvement, also also uneconomical.
Form between film and matrix by described mode and to have cohesiveness and flexible undercoat, have the effect that prevents that film from peeling off.
By being appreciated that other characteristics of the present invention and advantage below in conjunction with the description of the drawings, the same or similar parts in the accompanying drawing in the identical reference number presentation graphs.
Fig. 1 is the synoptic diagram of the configuration of ion plating apparatus,
Fig. 2 is the side-view that part is cut open, and the ultra-high voltage wear testing machine is described,
Fig. 3 is the sectional view along A-A line among Fig. 2,
Fig. 4 is the skeleton view of roll-type protracted test machine major parts.
Particular of the present invention is described in detail in detail now.
According to the present invention, the chromium of gas phase is contacted with matrix with nitrogen mixture.This PVD method is a film forming class technology, can be divided into three kinds of methods usually, i.e. hydatogenesis, sputter and ion plating.
In the present invention, particularly preferred method is a reactive ion plating, and wherein chromium steam and nitrogen are reflected at formation of deposits chromium nitride film on the matrix.
Obtain chromium steam by the electron beam irradiation chromium of for example from the HCD rifle, drawing with evaporation chromium with high energy beam.Also can obtain chromium steam by exhale the chromium particle from negative electrode, for example cathode arc one plasma body ion plating or sputtering method carried out like that.
When producing the plasma body of vapour phase, wherein nitrogen with the chromium vapor mixing, chromium is ionized and forms bonding to produce chromium nitride with the nitrogen ion.As a result, on matrix surface, form chromium nitride film.Although the present invention describes as embodiment with ion electroplating method, the present invention is not limited to use ion electroplating method.
Fig. 1 has illustrated the example that is used for ion plating apparatus of the present invention.This device comprises the vacuum chamber 24 with nitrogen inlet 22 and venting port 23.First target 26 and second target 28 place vacuum chamber 24, and wherein first target 26 is connected with the negative pole of arc power 25, and second target 28 is connected with the negative pole of arc power 27.Chromium metal is placed on first and second targets in advance, and it is configured to processed workpiece 31 different distances is arranged.The universal stage 30 that links to each other with grid bias power supply 29 also places vacuum chamber 24.Workpiece 31 places on the universal stage 30.
The method for preparing film of the present invention with this ion plating apparatus on workpiece 31 is described now.
At first, cleaning workpiece 31 is put into this workpiece thorough drying the vacuum chamber of ion plating apparatus then to remove its surface contaminants.From venting port 23 vacuum chamber is vacuumized.Being evacuated to intraventricular pressure at vacuum chamber is 1.3 * 10
-3-5 * 10
-3After the Pa, with the well heater in the ion plating apparatus this vacuum chamber is heated, thereby make matrix emit its contained gas.The preferred 300-500 of Heating temperature ℃.
In vacuum chamber internal drop to 4 * 10
-3During Pa, the chromium target as negative electrode, and is produced arc discharge to produce the chromium missile in its surface.Add bias voltage this moment on workpiece 31, thereby bombard this matrix surface from the metal ion that emission of cathode goes out with high-energy.This method is called " bombardment cleaning ", removed the oxide compound on the matrix surface thus, and this surface is activated processing.This moment added bias voltage be preferably-700～-900V.
Afterwards, reduce bias voltage, make chromium ion be deposited on matrix surface, in this process, nitrogen is introduced vacuum chamber, and nitrogen is passed plasma body with the nitrogen ionization.This moment, to make the dividing potential drop of nitrogen be 1.3 * 10-1-13.3Pa, institute's biasing is 0～-100V, so that form ion film plating at matrix surface.
When film formed, because first target 26 is shorter with the distance of workpiece 31, the chromium particle of the evaporation of drawing from first target 26 collided with the nitrogen molecule of quite low probability and reactant gases; By the same token, nitrogen molecule is very short by the time of plasma body.As a result, be difficult for ionization takes place, and can make metal deposition on workpiece 31 by suitably selecting partial pressure and above-mentioned distance.Because the distance that second target 28 and workpiece are 31 is greater than the distance of 31 of first target 26 and workpiece, therefore, the chromium particle of the evaporation of drawing from second target 28 can form Cr
2The deposition of N, Cr
2The deposition of N and CrN blend films or the deposition of CrN, this depends on selected partial pressure and and the distance of 31 of workpiece.In other words, by suitably selecting partial pressure, first target 26 being placed the sedimentary distance of chromium metal and second target is placed the sedimentary distance of chromium nitride, then can form film with blending ingredients of forming by chromium metal and chromium nitride.
Also have,, can change the proportioning between chromium metal tissue and the chromium nitride tissue by setting flow through the arc current value of each independent target and the distance between target and workpiece suitably, and the size and the area ratio of the chromium metal tissue of may command dispersion.
Based on particular effect of the present invention and effect are described.
On the SUS440 specimen surface, form various chromium nitride composite membranes with aforesaid method with dispersive chromium metal tissue.
With the distance setting between first target and workpiece is about 50mm, is proved in this distance metal refining chromium by the trial test result.The size that has also proved the chromium metal tissue is directly proportional with arc current.Can adjust the area ratio of chromium metal tissue by the ratio of setting two arc current values.
Also have, the distance setting between second target and workpiece is about 200mm.This composition changes according to nitrogen partial pressure.Especially, Cr
2N, Cr
2N+CrN blend films and CrN raise with nitrogen partial pressure and change.
With the composition of every kind of film of X-ray diffraction mensuration,, measure the hardness of film with micro Vickers with the size and the area ratio of EPMA mensuration chromium metal tissue.Table 1 has illustrated the condition of preparation sample of the present invention and the result of measurement.
Table 1
| Coated conditions | Embodiment 1 | Embodiment 2 | | | | Embodiment 6 | |
| Distance between first target and workpiece (mm) | ?50 | ??50 | ??50 | ??50 | ??50 | ??50 | |
| The arc current of second target (A) | 100 | ?100 | ?100 | ?90 | ?140 | ?140 | |
| Distance between second target and workpiece (mm) | 200 | ?200 | ?200 | ?200 | ?200 | ?200 | |
| The arc current of second target (A) | 200 | ?200 | ?200 | ?200 | ?200 | ?150 | |
| Nitrogen partial pressure (Pa) | 0.5 | ?0.7 | ?1.0 | ?1.0 | ?1.0 | ?1.0 | |
| The coating time (min) | 120 | ?120 | ?120 | ?120 | ?120 | ?120 | |
| Measuring result | Form | Cr，Cr 2N | ?Cr，Cr 2N，CrN | ?Cr，CrN | ?Cr，CrN | ?Cr，CrN | ?Cr，CrN |
| Hardness | 1400-1900 | ?1400-1900 | ?1400-1900 | ?1400-1900 | ?1400-1900 | ?1200-1700 | |
| Thickness μ m | ?30 | ?29 | ?27 | ?26 | ?28 | ?27 | |
| The mean diameter μ m of chromium metal tissue | ?1.0 | ?1.1 | ?1.1 | ?0.5 | ?2.1 | 2.3 | |
| The area of chromium metal tissue compares % | ?7.1 | ?6.8 | ?5.9 | ?2.8 | ?7.4 | ?8.6 | |
For making control sample, prepare chromium nitride film commonly known in the art, and measure its performance (Comparative Examples 1-3) with above-mentioned same way as.Also measure another group control sample (Comparative Examples 4-6), in this control sample, chromium metal organizes disperse in chromium nitride film but the size of chromium metal tissue and area ratio are inappropriate.Table 2 has been listed the preparation condition and the measuring result of these control sample.
Table 2
[living property of anti-bite]
| Coated conditions | Comparative Examples 1 | Comparative Examples 2 | Comparative Examples 3 | Comparative Examples 4 | Comparative Examples 5 | Comparative Examples 6 | |
| Distance between first target and workpiece (mm) | ????200 | ????200 | ????200 | ?????50 | ?????50 | ?????50 | |
| The arc current of second target (A) | ????200 | ????200 | ????200 | ?????70 | ?????90 | ????200 | |
| Distance between second target and workpiece (mm) | ????200 | ????200 | ????200 | ????200 | ????200 | ????200 | |
| The arc current of second target (A) | ????200 | ????200 | ????200 | ????200 | ????300 | ????100 | |
| Nitrogen partial pressure (pa) | ????0.5 | ????0.7 | ????1.0 | ????1.0 | ????1.0 | ????1.0 | |
| The coating time (min) | ????90 | ????90 | ????90 | ????120 | ????120 | ????120 | |
| Measuring result | Form | ????Cr 2N | ????Cr 2N，CrN | ????CrN | ????Cr，CrN | ????Cr，CrN | ????Cr.CrN |
| Hardness | ????1700-2000 | ????1700-2000 | ????1700-2000 | ????1500-1900 | ????1500-1900 | ????1100-1600 | |
| Thickness μ m | ????30 | ????28 | ????26 | ????26 | ????35 | ????29 | |
| The mean diameter μ m of chromium metal tissue | ????1.0 | ????0.1 | ????0.5 | ????5.7 | |||
| The area of chromium metal tissue compares % | ????7.1 | ????0.5 | ????0.7 | ????21.4 | |||
The living property of anti-bite of assessment material of the present invention.
The test specimen 5 that preparation is made up of SKD61 (JIS, promptly Japanese standard, corresponding to ASTMH-13, USS).Shown in Fig. 2 and 3, test specimen 5 has three column-like projection blocks 10, and the long 5mm of each projection, wide 5mm, high 5mm, these three projections equidistantly are provided with on same circumference.By on the square end face of the 5mm of each projection 10, forming the thick film of the present invention of 20-30 μ m, make sample with this test specimen.Carry out anti-bite with the ultra-high voltage wear testing machine and live test.The film of this embodiment made from aforesaid method and the film of Comparative Examples are tested.
Also have, also similarly test with another sample, this sample is (Comparative Examples 7) that makes by the thick electroplating film of formation 100 μ m on the square end face of test specimen 5mm.
The configuration and the test conditions of this ultra-high voltage wear testing machine that is used for this test is as follows:
Fig. 2 and Fig. 3 illustrate testing apparatus, and wherein Fig. 3 is the sectional view along A-A line among Fig. 2.Mill 2 detachably is installed in the stator anchor clamps 1, and this mill is and the related part of sample friction contact that its diameter is 10mm for 80mm thickness.By lubrication channel 3 from a side relative, the center of lubricating oil being introduced this mill 2 with sample 5.Structure is such, promptly with predetermined pressure power P is applied on the stator anchor clamps 1 from the right side with the Vulcan gear (not shown).Rotor 4 is relative with mill 2, and is rotated at a predetermined velocity by the drive unit (not shown).Test specimen 5 is connected with rotor 4 by this way, the square end face of 5mm of projection 10 can be headed on as the mill 2 of sliding surface freely slide, and has formed the surface treatment coating on the end face of this projection 10.
Predetermined pressure P is applied on the stator anchor clamps 1, the column-like projection block 10 on the test specimen 5 is contacted with it with predetermined surface pressure, make stator 4 rotations, meanwhile, make sliding surface lubricated from lubrication channel 3 fuel feeding with predetermined lubricated speed.In Fixed Time Interval, increase the power that acts on the stator anchor clamps 1, the torque T that stator anchor clamps 1 are produced acts on the loadometer 7 by stainless sodium fiber 6, and this torque T is to cause owing to rotor 4 rotations cause producing between test specimen 5 and the mill 2 friction.Any variation of torque T all can come and with register 9 records by dynamic strain detector 8 is detected.If torque T increases suddenly, then think to detect and taken place to bite, judge based on the pressure of contact surface of this moment whether bite performance qualified.Mill 2 used materials are iron, particularly FC250 (JIS, promptly Japanese standard are equivalent to the ASTM No.4012 of USS).Test conditions is as follows:
Friction velocity: 8m/ mill second: FC250 pressure of contact surface: with 20kgf/cm
2After surface pressure carries out smoothly, with 10kgf/cm
2Increment
Pressure is increased, up to biting.Under each surface pressure numerical value, all protect
Held 3 minutes.Lubricant: #30 motor oil temperature: 80 ℃ of oil feed rate: 250cc/ minute measuring results are listed in the table 3.
Table 3
| Embodiment 1 | Embodiment 2 | | | | Embodiment 6 | Comparative Examples 3 | Comparative Examples 6 | Comparative Examples 7 | |
| Value (kgf/cm when biting 2) | ????283 | ????285 | ????289 | ????290 | ????284 | ????281 | ????290 | ????259 | ????253 |
The mill that contrast FC250 makes, sample of the present invention is at 281-290kgf/cm
2Biting appears in surface pressure.This is greater than the 253kgf/cm of the chromium plating sample of control sample
2Value, and suitable with the value of the film of only forming (Comparative Examples 3) by CrN, illustrate to have excellent living property of anti-bite.Though the chromium metal tissue is dispersed in the chromium nitride film, to organize thick and its area (Comparative Examples 6) when big when chromium metal, this effect is little.[wear resistance]
With KaKen type abrasion tester material of the present invention is carried out abrasion test.The test specimen of the body material that preparation is made up of SKD-6.The long 5mm of each test specimen, wide 5mm, high 20mm wears into the curved surface that radius R is 6mm with an end face of each test specimen.With the film of the foregoing description with the film of Comparative Examples the end face of these samples is coated to thickness 20-35 μ m.
Also have, also carry out similar test, make this sample (Comparative Examples 7) by the electroplating film that on the nose circle face of above-mentioned test specimen, forms 100 μ m thickness with another sample.
In this test, the surface-treated nose circle face of sample is contacted with the excircle part of tubular associated member, its mode is: the curved surface of tubular associated member is that line contacts with the curved surface of sample, applies predetermined load, and rotates this tubular associated member at a predetermined velocity.The PH that drips fixed amount in contact part transfers to 2 aqueous sulfuric acid and produces lubricatedly, produces acid atmosphere thus.Test conditions:
Tube material: FC250
Friction velocity: 0.25m/ second
Fraction time: 6 hours
Contact load: 4kg
Atmosphere: with 1.5cc/ branch speed PH is transferred to 2 aqueous sulfuric acid and drip at slipper.
The film abrasion loss that records the results are shown in table 4.
Table 4
| Embodiment 1 | Embodiment 2 | | | | Embodiment 6 | Comparative Examples 3 | Comparative Examples 6 | Comparative Examples 7 | |
| Wear rate value | ????5.7 | ????5.5 | ????5.1 | ????4.6 | ????6.2 | ????6.7 | ????4.1 | ????22.0 | ???100 |
* the wearing and tearing value with the chromium plating sample is decided to be 100 relative value.
The result represents with relative value, and the attrition value of chromium plating film is decided to be 100.
The attrition value of sample of the present invention has been reduced to the 1/20-1/25 of the chromium plating sample attrition value of Comparative Examples.The abrasion loss of sample of the present invention is equivalent to the abrasion loss of the film (Comparative Examples 3) only be made up of CrN, and its wear resistance is given prominence to.Though the chromium metal tissue is dispersed in the chromium nitride film, to organize thick and its area (Comparative Examples 6) when big when chromium metal, its effect is little.[antistripping]
With the antistripping of roll-type protracted test machine (top ripple trier before and after the roll-type) assessment film coating piece of the present invention, the roll-type protracted test machine utilizes sliding type.The basic material of test specimen is the SCM420 (JIS, chromemolybdenum steel) of carburizing, and shape is a roll-type, and it is of a size of: diameter 26mm, long 28mm.The film of film of the present invention and Comparative Examples is plated on the outer round surface of this roller, and thickness is about 50 μ m.The thickness of the various films of chien shih is even during by the adjustment plating.
It is as follows that the configuration of this top, front and back ripple trier and this are tested used condition:
Fig. 4 illustrates this testing apparatus.This device comprises a test roller 11, is attached with test specimen 13 on this roller, and the diameter of test specimen 13 is 26mm, and length is 28mm, a load roller, this load roller and the 11 relative configurations of test roller.Apply predetermined pressure.To test roller 11 by the drive unit (not shown) rotates at a predetermined velocity.On the outer round surface of this test specimen 13, be formed with the surface-treated coating.The diameter of load roller 12 is 130mm, and length is 18mm, and it is 300mm that its excircle part is become diameter by rounding, and therefore, when using microscopic examination, this load roller 12 and test specimen 13 become and contact.Configuration makes and can apply big pressure like this.Also have, and then test roller 11 rotations, slide with respect to test roller 11 simultaneously by this load roller 12 of gear (illustrating).Represent slippage factor with (U13-U12)/U13, wherein U13 represents the peripheric velocity of test specimen 13, and U12 represents the peripheric velocity of load roller 12.Can at random select this slippage factor.Lubricating oil is introduced the contact part of load roller 12 and test specimen 13 by the lubrication channel (not shown).
Predetermined pressure is added on the test specimen 13, test specimen 13 is contacted with predetermined surface pressure with touch roll 12, make 12 rotations of load roller, make contact part lubricated with predetermined lubricated speed oiling simultaneously, make load roller 12 with predetermined slippage factor rotation.
In the process of the test, very carefully observe the test specimen surface, use, judge whether antistripping is qualified up to the total revolution when test specimen surface generation fragment type peels off.Load roller 12 as associated member is made by FC250.Test conditions is as follows: surface pressure [hertz (hertz) stress]: 160kgf/mm
2The limit week speed of test specimen: the flow velocity of 82m/s slippage factor: 20% used oil: #30 (base oil) oil: 1200cc/ divides the oil temperature: 80 ℃ of measuring results are listed in table 5.
Table 5
| Embodiment 1 | Embodiment 2 | | | | Embodiment 6 | Comparative Examples 1 | The time ratio 2 | Comparative Examples 3 | Comparative Examples 4 | Comparative Examples 5 | |
| Number of times when peeling off | 2 * 10 7Do not peel off after inferior | 2 * 10 7Do not peel off after inferior | 2 * 10 7Do not peel off after inferior | 2 * 10 7Do not peel off after inferior | 2 * 10 7Do not peel off after inferior | 2 * 10 7Do not peel off after inferior | 3.1×10 6Peel off after inferior | 3.2×10 6Peel off after inferior | 2.9×10 6Peel off after inferior | 4.6×10 6Peel off after inferior | 5.6×10 6Peel off after inferior |
The sample of the present invention preparation has the antistripping of the sample of the non-hard chromium nitride that is often better than Comparative Examples.Comparative Examples 4 and 5 explanations though the chromium metal tissue is dispersed in the chromium nitride film, if the size of this tissue is too little or surface ratio is too little, are also peeled off tendency.
Therefore, as mentioned above, form composite membrane at matrix surface by the PVD method, the invention provides a kind of slide unit, its wear resistance and living property of anti-bite are better than conventional used hard films, and are difficult for taking place brokenly falling and peeling off, wherein, the principal phase of this film or component are CrN and Cr
2N also contains dispersive chromium metal tissue.The present invention also provides a kind of method for preparing this slide unit.
Slide unit provided by the invention is very suitable for as sliding part, for example engine part such as piston ring and cam follower, and compressor components such as slide block dish (shoe disk).This slide unit also can be used for various cutting tools.
Because can make multiple visibly different embodiment under the spirit and scope of the present invention condition not breaking away from, thereby should be that except the definition of claims, the present invention does not limit these specific embodiments with understanding.
Claims (9)
1. slide unit, it comprises film with complex tissue and the matrix that is coated with this film, and the principal phase of this film or component are chromium metal and chromium nitride, and described chromium metal is dispersed in the described film and has the tissue of 0.2-5 μ m size.
2. the slide unit of claim 1, wherein the described chromium nitride in described film has and contains by CrN or Cr
2The chemical composition that N forms and the tissue of its mixture.
3. claim 1 or 2 slide unit are wherein got involved the undercoat that contains chromium between described film and described matrix.
4. any slide unit among the claim 1-3, wherein said slide unit is a piston ring.
5. slide unit, it is coated with the chromium nitride composite membrane, be dispersed with the chromium metal tissue in this chromium nitride composite membrane, wherein said dispersive chromium metal tissue has the area ratio of 1-20%, and described area is than having shown that described chromium metal tissue accounts for the per-cent of the described film total area.
6. the slide unit of claim 5, wherein the described chromium nitride in described film has and contains by CrN or Cr
2The chemical composition that N forms and the tissue of its mixture.
7. claim 5 or 6 slide unit are wherein got involved the undercoat that contains chromium between described film and described matrix.
8. any slide unit among the claim 5-7, wherein said slide unit is a piston ring.
9. method for preparing any slide unit among the claim 1-8, this method comprises the step that will be contacted with matrix by the gas phase that chromium and nitrogen mixture are formed with physical vapor deposition methods, forms described film thus on described matrix.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20853595A JPH0931628A (en) | 1995-07-25 | 1995-07-25 | Sliding member and its production |
| JP208535/1995 | 1995-07-25 | ||
| JP208535/95 | 1995-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1154420A true CN1154420A (en) | 1997-07-16 |
| CN1068638C CN1068638C (en) | 2001-07-18 |
Family
ID=16557801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96112101 Expired - Fee Related CN1068638C (en) | 1995-07-25 | 1996-07-25 | Sliding member and method of mfg. same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH0931628A (en) |
| CN (1) | CN1068638C (en) |
| DE (1) | DE19630149C2 (en) |
| GB (1) | GB2303640A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100453835C (en) * | 2003-06-11 | 2009-01-21 | 石川岛播磨重工业株式会社 | Rotating parts, housings, bearings, gearboxes, rotating machinery, shaft structures and surface treatment methods |
| CN103741105A (en) * | 2013-12-24 | 2014-04-23 | 中国印钞造币总公司 | Chrome-based coating film and preparation method thereof |
| CN104080941A (en) * | 2012-03-16 | 2014-10-01 | 帝伯爱尔株式会社 | Tough film and sliding member |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3766445B2 (en) * | 1994-12-27 | 2006-04-12 | 日本ピストンリング株式会社 | Piston ring for internal combustion engine |
| JP2010163694A (en) * | 1997-11-06 | 2010-07-29 | Dowa Holdings Co Ltd | NITROGEN-CONTAINING Cr FILM, AND MACHINE MEMBER HAVING THE FILM |
| JP3910373B2 (en) | 2001-03-13 | 2007-04-25 | オーエスジー株式会社 | Hard multilayer coating for rotary cutting tool and hard multilayer coating coated rotary cutting tool |
| DE10256063A1 (en) | 2002-11-30 | 2004-06-17 | Mahle Gmbh | Process for coating piston rings for internal combustion engines |
| JPWO2004113748A1 (en) * | 2003-06-11 | 2006-08-03 | 石川島播磨重工業株式会社 | Rotating member, casing, bearing, gear box, rotating machine, shaft structure, and surface treatment method |
| DE102004028486A1 (en) * | 2004-06-11 | 2005-12-29 | Mahle Gmbh | sliding |
| DE102004043550B4 (en) * | 2004-09-09 | 2012-02-16 | Schaeffler Technologies Gmbh & Co. Kg | Wear resistant coating, its use and method of making the same |
| DE102007020413B4 (en) * | 2007-04-27 | 2014-12-24 | Schunk Ingenieurkeramik Gmbh | Sliding body for bearing or sealing arrangements |
| DE102008017583C5 (en) | 2008-04-07 | 2016-01-21 | Federal-Mogul Burscheid Gmbh | piston ring |
| DE102013209863A1 (en) * | 2013-05-28 | 2014-12-04 | Schaeffler Technologies Gmbh & Co. Kg | Coated component |
| DE102021110359A1 (en) | 2021-04-22 | 2022-10-27 | Miba Gleitlager Austria Gmbh | Bearing part for a plain bearing, bearing shell, plain bearing, machine, method for producing a bearing part for a plain bearing |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0625597B2 (en) * | 1985-11-20 | 1994-04-06 | 株式会社リケン | piston ring |
| JPH0765543B2 (en) * | 1986-03-29 | 1995-07-19 | 株式会社リケン | piston ring |
| JPH089964B2 (en) * | 1989-12-01 | 1996-01-31 | 株式会社リケン | Valve lifter for valve train of internal combustion engine |
| JPH04368A (en) * | 1990-04-17 | 1992-01-06 | Riken Corp | Wear resistant coating film and production thereof |
| EP0484699B1 (en) * | 1990-11-05 | 1993-08-18 | Detlev Dr. Repenning | Friction pairing and its method of manufacture |
| JPH05231543A (en) * | 1992-02-18 | 1993-09-07 | Hino Motors Ltd | Piston ring |
| FR2696760B1 (en) * | 1992-10-09 | 1994-11-04 | Alsthom Gec | Coating for rubbing parts by rotation of a piece of matensitic steel. |
| JP2968907B2 (en) * | 1993-05-12 | 1999-11-02 | 株式会社リケン | Wear resistant coating |
| JPH07109561A (en) * | 1993-10-07 | 1995-04-25 | Nissin Electric Co Ltd | Chromium nitride film coated substrate |
| US5587227A (en) * | 1994-10-27 | 1996-12-24 | Kabushiki Kaisha Riken | Coating of chromium and nitrogen having good wear resistance properties |
| US5601293A (en) * | 1994-12-22 | 1997-02-11 | Teikoku Piston Ring Co., Ltd. | Sliding member with hard ternery film |
| JP3766445B2 (en) * | 1994-12-27 | 2006-04-12 | 日本ピストンリング株式会社 | Piston ring for internal combustion engine |
-
1995
- 1995-07-25 JP JP20853595A patent/JPH0931628A/en active Pending
-
1996
- 1996-07-24 GB GB9615539A patent/GB2303640A/en not_active Withdrawn
- 1996-07-25 DE DE19630149A patent/DE19630149C2/en not_active Expired - Lifetime
- 1996-07-25 CN CN 96112101 patent/CN1068638C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100453835C (en) * | 2003-06-11 | 2009-01-21 | 石川岛播磨重工业株式会社 | Rotating parts, housings, bearings, gearboxes, rotating machinery, shaft structures and surface treatment methods |
| CN104080941A (en) * | 2012-03-16 | 2014-10-01 | 帝伯爱尔株式会社 | Tough film and sliding member |
| CN104080941B (en) * | 2012-03-16 | 2016-01-06 | 帝伯爱尔株式会社 | High tenacity film and slide unit |
| CN103741105A (en) * | 2013-12-24 | 2014-04-23 | 中国印钞造币总公司 | Chrome-based coating film and preparation method thereof |
| CN103741105B (en) * | 2013-12-24 | 2015-10-21 | 中国印钞造币总公司 | A kind of chromium based plating film and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19630149C2 (en) | 2001-11-29 |
| DE19630149A1 (en) | 1997-01-30 |
| GB9615539D0 (en) | 1996-09-04 |
| CN1068638C (en) | 2001-07-18 |
| JPH0931628A (en) | 1997-02-04 |
| GB2303640A (en) | 1997-02-26 |
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