CN115424967B - A grain transfer device and a grain transfer process thereof - Google Patents
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Abstract
Description
技术领域Technical Field
本发明涉及半导体制造设备领域，特别指一种晶粒转移设备及其晶粒转移工艺。The present invention relates to the field of semiconductor manufacturing equipment, and in particular to a grain transfer equipment and a grain transfer process thereof.
背景技术Background Art
在显示技术领域，目前已经量产的微型显示技术包括基于水晶玻璃的HTPS TFTLCD、基于硅晶圆的DLP等。由于OLED技术有发光效率、操作温度范围以及寿命等限制缺陷，从长远来看，无机的Micro LED将是未来微型显示的技术主流。随着传统平面显示技术与应用逐渐进入成熟期，未来显示应用发展将迈向穿戴或虚拟实境与扩增实境等领域，因对比值、面板精度及省电等因素影响，基于晶圆制程的微型显示技术更加适用于新兴应用。在晶圆上制作Micro LED阵列技术上已成熟，因此采用该技术的微型显示器有望投入量产，但是将此类技术向一般平板显示应用扩展时，晶粒巨量转移效率成为最大的技术瓶颈。如何有效地将LED晶粒转移到玻璃或塑胶基板上成为Micro LED技术大规模发展推广的关键因素。In the field of display technology, the micro-display technologies that have been mass-produced include HTPS TFTLCD based on crystal glass and DLP based on silicon wafers. Since OLED technology has limitations such as luminous efficiency, operating temperature range and life span, in the long run, inorganic Micro LED will be the mainstream technology of future micro-displays. As traditional flat display technology and applications gradually enter the mature stage, the future development of display applications will move towards wearable or virtual reality and augmented reality. Due to factors such as contrast, panel accuracy and power saving, micro-display technology based on wafer process is more suitable for emerging applications. The technology of making Micro LED arrays on wafers is mature, so micro-displays using this technology are expected to be put into mass production. However, when expanding this technology to general flat panel display applications, the efficiency of mass transfer of grains becomes the biggest technical bottleneck. How to effectively transfer LED grains to glass or plastic substrates has become a key factor in the large-scale development and promotion of Micro LED technology.
在进行晶粒转移自动化设备产线研发过程中，需要通过载板装载晶粒以适应自动化生产过程中的物料搬移中转及上下料，通过单块载板承载多颗晶粒以保证上述生产过程中的效率。因此，在晶粒转移过程中需要解决载板的自动存储问题，载板存储与取放载板动作协同问题，以及载板存储过程中导向限位及固定问题，以便保证晶粒位置稳定性。During the research and development of the production line of die transfer automation equipment, it is necessary to load the die on a carrier to adapt to the material transfer and loading and unloading in the automated production process, and to carry multiple die on a single carrier to ensure the efficiency of the above production process. Therefore, during the die transfer process, it is necessary to solve the problem of automatic storage of the carrier, the coordination of carrier storage and carrier placement, and the problem of guide limit and fixation during carrier storage to ensure the stability of the die position.
另外，在生产过程中需要解决载板搬移中转及取放问题；同时由于存储部分与晶粒转移生产部分之间可能存在载板进出方向不一致的情况，因此需要解决载板不同工位之间转移时位置或角度调整问题；另外，由于载板上装载有多颗晶粒，在载板转移过程中还需要解决其位置稳定性及准确度问题。In addition, the problems of carrier movement, transfer and placement need to be solved during the production process; at the same time, since the carrier entry and exit directions may be inconsistent between the storage part and the grain transfer production part, it is necessary to solve the position or angle adjustment problem when the carrier is transferred between different workstations; in addition, since there are multiple grains loaded on the carrier, its position stability and accuracy problems also need to be solved during the carrier transfer process.
在进行晶粒转移自动化设备产线研发过程中，需要通过载板装载晶粒以适应自动化生产过程中的物料搬移中转及上下料，通过单块载板承载多颗晶粒以保证上述生产过程中的效率。在晶粒转移设备中核心工艺段为晶粒转移工艺，针对晶粒转移工艺需要解决以下技术问题：1、待转移的晶粒一般放置于中部水平夹持有蓝膜的载板上，晶粒需要转移至水平的玻璃或塑胶载板上，在晶粒转移过程中需要解决载板的自动承载问题，以及承载载板与载板取放动作之间的自动协同问题。2、晶粒转移工艺要求将蓝膜载板上的晶粒准确地转移至玻璃载板上，因此在晶粒转移前需要解决两载板相对位置或角度的自动调整，以保证晶粒转移准确性。3、对晶粒转移时，需要将蓝膜载板及玻璃载板相互贴紧，以减少晶粒在两载板之间转移的运动路径，提高位置精度，而玻璃载板为易损材质，因此需要解决两载板相互之间因接触而出现表面划伤或损坏问题。4、探针下探过程中易出现因过度顶推而导致晶粒、蓝膜或下部玻璃载板的损坏。5、由于待转移晶粒的蓝膜载体本身材质为柔性材质，具备一定的内部弹性，当探针抵推蓝膜上一个晶粒时，晶粒收到的探针作用力将传递给蓝膜，使得蓝膜沿着该晶粒部分从原始的平面状态向下凸起形变，该种情况将导致上述晶粒周围的其他晶粒位置发生偏移，或者因蓝膜形变后无法完全恢复至原有平面状态而出现的周围其他晶粒位置发生偏移或晶粒掉落的情况。6、基于以上情况，在探针下探过程中采用真空负压向上吸附蓝膜，需要解决活动的探针与吸附腔体之间协同问题。7、另外，由于探针高速多批次下探转移晶粒，探针经常需要更换，因此需要解决探针快捷拆装问题。During the research and development of the production line of automated equipment for grain transfer, it is necessary to load the grains through a carrier plate to adapt to the material movement, transfer, loading and unloading in the automated production process, and to carry multiple grains through a single carrier plate to ensure the efficiency of the above production process. The core process section in the grain transfer equipment is the grain transfer process. The following technical problems need to be solved for the grain transfer process: 1. The grains to be transferred are generally placed on a carrier plate with a blue film horizontally clamped in the middle. The grains need to be transferred to a horizontal glass or plastic carrier plate. During the grain transfer process, it is necessary to solve the problem of automatic loading of the carrier plate, as well as the problem of automatic coordination between the loading carrier plate and the loading and placing actions of the carrier plate. 2. The grain transfer process requires that the grains on the blue film carrier plate be accurately transferred to the glass carrier plate. Therefore, before the grain transfer, it is necessary to solve the automatic adjustment of the relative position or angle of the two carrier plates to ensure the accuracy of the grain transfer. 3. When transferring the crystal grains, the blue film carrier and the glass carrier need to be pressed against each other to reduce the movement path of the crystal grains between the two carriers and improve the position accuracy. The glass carrier is a fragile material, so it is necessary to solve the problem of surface scratches or damage caused by contact between the two carriers. 4. During the probe downward detection process, the crystal grains, blue film or the lower glass carrier are easily damaged due to excessive pushing. 5. Since the blue film carrier of the crystal grain to be transferred is made of flexible material and has a certain internal elasticity, when the probe pushes a crystal grain on the blue film, the probe force received by the crystal grain will be transmitted to the blue film, causing the blue film to bulge downward from the original plane state along the crystal grain part. This situation will cause the positions of other crystal grains around the above-mentioned crystal grain to shift, or the positions of other crystal grains around the crystal grain to shift or the crystal grains to fall because the blue film cannot be completely restored to the original plane state after deformation. 6. Based on the above situation, the blue film is adsorbed upward by vacuum negative pressure during the probe downward detection process, and the coordination problem between the active probe and the adsorption cavity needs to be solved. 7. In addition, since the probes transfer the grains in batches at high speed, the probes need to be replaced frequently, so the problem of quick disassembly and assembly of the probes needs to be solved.
发明内容Summary of the invention
本发明要解决的技术问题是针对上述现有技术的不足，提供一种实现载板多级多层大容量存储，载板滑入式取放承载及自动旋转中转及同步负压吸附固定，有效提升载板搬移中转稳定性，实现了探针转移顶刺极限限位及辅助吸附蓝膜，保证了晶粒转移过程中晶粒位置准确度及稳定性的晶粒转移设备及其晶粒转移工艺。The technical problem to be solved by the present invention is to provide a grain transfer device and a grain transfer process thereof that realizes multi-level and multi-layer large-capacity storage of carriers, slide-in pick-and-place loading and automatic rotation transfer, and synchronous negative pressure adsorption fixation of carriers, effectively improves the stability of carrier movement and transfer, realizes the probe transfer top puncture limit limitation and auxiliary adsorption of blue film, and ensures the accuracy and stability of grain position during grain transfer.
本发明采用的技术方案如下：一种晶粒转移设备，包括水平设置的机台及架设在机台上的支架，还包括储料部分、中转搬移部分、转移平台及晶粒转移部分，其中，The technical solution adopted by the present invention is as follows: a grain transfer device, including a horizontally arranged machine platform and a bracket mounted on the machine platform, and also including a material storage part, a transfer and moving part, a transfer platform and a grain transfer part, wherein:
上述支架为U型结构，其倒置架设在机台中部，将机台上部空间分隔为出料空间及回料空间，且其底部与机台表面之间形成间隙空间；The bracket is a U-shaped structure, which is inverted and installed in the middle of the machine table, dividing the upper space of the machine table into a discharge space and a return space, and a gap space is formed between its bottom and the surface of the machine table;
上述储料部分设置于机台侧部，储料部分包括出料储存部分及回料储存部分，出料储存部分及回料储存部分分别对应设置于上述出料空间及回料空间一侧；The material storage part is arranged on the side of the machine, and the material storage part includes a discharge material storage part and a return material storage part, and the discharge material storage part and the return material storage part are respectively arranged on one side of the discharge material space and the return material space;
上述转移平台包括至少两个，至少两个转移平台并列间隔设置在机台上，并位于上述间隙空间内；The transfer platforms include at least two, and the at least two transfer platforms are arranged side by side and spaced apart on the machine platform and are located in the gap space;
上述中转搬移部分包括出料搬移机构及回料搬移机构，出料搬移机构及回料搬移机构分别设置于出料空间及回料空间内；The above-mentioned transfer and moving part includes a material discharging and moving mechanism and a material returning and moving mechanism, and the material discharging and moving mechanism and the material returning and moving mechanism are respectively arranged in the material discharging space and the material returning space;
上述晶粒转移部分包括载板承载机构及晶粒转移机构，其中，上述载板承载机构倒挂在支架底部，并对应设置于转移平台上方；上述晶粒转移机构对应设置于载板承载机构上方。The above-mentioned grain transfer part includes a carrier plate bearing mechanism and a grain transfer mechanism, wherein the above-mentioned carrier plate bearing mechanism is upside down at the bottom of the bracket and is correspondingly arranged above the transfer platform; the above-mentioned grain transfer mechanism is correspondingly arranged above the carrier plate bearing mechanism.
优选的，所述出料储存部分及回料储存部分包括储料机构，储料机构包括两套，两套储料机构分别对应上述出料空间及回料空间设置于机台的侧部；上述储料机构包括储料直线模组、储料滑座及储料组件，其中，上述储料直线模组竖直设置；上述储料滑座沿竖直方向可活动地设置在储料直线模组上，并与储料直线模组的输出端连接；上述储料组件设置在储料滑座上。Preferably, the material discharging storage part and the material return storage part include a material storage mechanism, which includes two sets. The two sets of material storage mechanisms are respectively arranged on the side of the machine corresponding to the material discharging space and the material return space; the material storage mechanism includes a material storage linear module, a material storage slide and a material storage assembly, wherein the material storage linear module is vertically arranged; the material storage slide is movably arranged on the material storage linear module along the vertical direction and is connected to the output end of the material storage linear module; the material storage assembly is arranged on the material storage slide.
优选的，所述储料组件包括储料支架及储料箱，其中，上述储料支架连接于上述储料滑座的侧壁上，储料支架上沿竖直方向设有至少两个储存空间，储存空间靠近机台一侧为开放面；上述储料箱包括至少两个，储料箱对应设置于上述储存空间内，并经储存空间的开放面滑入或滑出；上述储料支架包括至少两组限位阻挡组件，至少两组限位阻挡组件对应设置于各储存空间内，储料箱在储存空间内滑动时经限位阻挡组件限位和阻挡。Preferably, the material storage assembly includes a material storage bracket and a material storage box, wherein the material storage bracket is connected to the side wall of the material storage slide, and at least two storage spaces are provided on the material storage bracket in the vertical direction, and the storage space is open on the side close to the machine; the material storage boxes include at least two, the material boxes are correspondingly arranged in the above-mentioned storage spaces, and slide in or out through the open surface of the storage space; the material storage bracket includes at least two groups of limit and blocking components, and at least two groups of limit and blocking components are correspondingly arranged in each storage space, and the material box is limited and blocked by the limit and blocking components when sliding in the storage space.
优选的，所述转移平台包括平台支板、平台滑轨、平台滑座、平台限位柱、载板顶块及平台吸孔，其中，上述平台支板水平设置在机台上；上述平台滑轨水平设置在平台支板上；上述平台滑座可滑动地嵌设在平台滑轨上，并经气缸或直线电机驱动而直线运动，平台滑座上设有载座，载座上开设有通槽，通槽上下贯通载座及平台滑座；上述载座内布设有气路，并通过设置于其侧部的气嘴与外部真空发生装置连接；上述平台限位柱包括至少两根，平台限位柱沿通槽侧边设置于载板上，并向上凸起，平台限位柱之间形成限位空间，以便限位放置于载座上的载板；上述平台吸孔包括至少两个，平台吸孔设置于载座上，并位于通槽内侧壁与平台限位柱之间，并与载座内部气路连通，以便吸附固定载座上放置的载板；上述载板顶块设置于载座上，凸起至载座上方，并通过弹簧与载座连接，以便晶粒转移完成后，利用弹簧弹力上顶载座。Preferably, the transfer platform includes a platform support plate, a platform slide rail, a platform slide seat, a platform limiting column, a carrier plate top block and a platform suction hole, wherein the platform support plate is horizontally arranged on the machine platform; the platform slide rail is horizontally arranged on the platform support plate; the platform slide seat is slidably embedded on the platform slide rail, and is driven by a cylinder or a linear motor to move linearly, a carrier seat is provided on the platform slide seat, a through groove is provided on the carrier seat, and the through groove passes through the carrier seat and the platform slide seat from top to bottom; an air path is arranged inside the carrier seat, and is connected to an external vacuum generating device through an air nozzle arranged on its side; The platform limiting posts include at least two, which are arranged on the carrier along the side of the through groove and protrude upward, and a limiting space is formed between the platform limiting posts so as to limit the carrier placed on the carrier; the platform suction holes include at least two, which are arranged on the carrier and are located between the inner wall of the through groove and the platform limiting posts, and are connected to the internal air path of the carrier so as to adsorb and fix the carrier placed on the carrier; the carrier top block is arranged on the carrier, protrudes above the carrier, and is connected to the carrier through a spring, so that after the grain transfer is completed, the spring elastic force is used to push up the carrier.
优选的，所述出料搬移机构包括出料直线模组及搬移组件，其中，上述出料直线模组沿机台侧边方向设置于出料空间内；上述搬移组件可滑动地设置在出料直线模组上，并与出料直线模组的输出端连接；出料直线模组驱动搬移组件沿直线方向在出料储存部分与载板承载机构之间来回直线运动，搬移组件从出料储存部分内取出载板并将其搬移至载板承载机构内。Preferably, the material discharging and transporting mechanism includes a material discharging linear module and a transporting assembly, wherein the material discharging linear module is arranged in the material discharging space along the side direction of the machine table; the transporting assembly is slidably arranged on the material discharging linear module and connected to the output end of the material discharging linear module; the material discharging linear module drives the transporting assembly to move back and forth in a linear direction between the material discharging storage part and the carrier bearing mechanism, and the transporting assembly takes out the carrier from the material discharging storage part and moves it to the carrier bearing mechanism.
优选的，所述搬移组件包括旋转部件、搬移支座、载板限位支撑部件及夹板部件，其中，上述旋转部件水平设置，旋转部件的输出端朝上设置；上述搬移支座水平设置在旋转部件的输出端上，经旋转部件驱动而在水平面内旋转运动；上述载板限位支撑部件包括两套，两套载板限位支撑部件分别设置于搬移支座的两侧，载板限位支撑部件包括滑入槽，滑入槽的一端开口，另一端封合，载板经滑入槽一端水平滑入，经滑入槽限位支撑；上述夹板部件设置于两套载板限位支撑部件之间，并沿滑入槽方向来回直线运动，夹板部件移动至滑入槽一端外部后夹紧载板，并带动载板向滑入槽另一端方向运动，使载板水平滑入滑入槽内。Preferably, the moving assembly includes a rotating component, a moving support, a carrier plate limiting support component and a clamping plate component, wherein the rotating component is horizontally arranged and the output end of the rotating component is arranged upward; the moving support is horizontally arranged on the output end of the rotating component and is driven by the rotating component to rotate in a horizontal plane; the carrier plate limiting support component includes two sets, and the two sets of carrier plate limiting support components are respectively arranged on both sides of the moving support, and the carrier plate limiting support component includes a sliding groove, one end of the sliding groove is open, and the other end is sealed, and the carrier plate slides horizontally through one end of the sliding groove and is limited and supported by the sliding groove; the clamping plate component is arranged between the two sets of carrier plate limiting support components, and moves back and forth in a straight line along the direction of the sliding groove, and the clamping plate component moves to the outside of one end of the sliding groove to clamp the carrier plate, and drives the carrier plate to move in the direction of the other end of the sliding groove, so that the carrier plate slides horizontally into the sliding groove.
优选的，所述回料搬移机构包括载板搬臂及回料搬臂，其中，上述载板搬臂设置于回料空间内，并在转移平台上方沿直线方向延伸，以便将上一工位的空载板搬移至转移平台上；上述回料搬臂设置在转移平台与回料储存部分之间，转移平台上的载板装满晶粒后，载板搬臂将其搬移至回料搬臂上，回料搬臂将载板搬移至回料储存部分内；上述回料搬臂包括回料直线模组及搬移组件，其中上述回料直线模组沿机台侧边方向设置；上述搬移组件设置在回料直线模组的输出端上，经回料直线模组驱动而在转移平台与回料储存部分之间来回直线运动。Preferably, the return material moving mechanism includes a carrier plate moving arm and a return material moving arm, wherein the carrier plate moving arm is arranged in the return material space and extends in a straight direction above the transfer platform so as to move the empty carrier plate of the previous workstation to the transfer platform; the return material moving arm is arranged between the transfer platform and the return material storage part, after the carrier plate on the transfer platform is full of grains, the carrier plate moving arm moves it to the return material moving arm, and the return material moving arm moves the carrier plate to the return material storage part; the return material moving arm includes a return material linear module and a moving assembly, wherein the return material linear module is arranged along the side direction of the machine table; the moving assembly is arranged on the output end of the return material linear module, and is driven by the return material linear module to move linearly back and forth between the transfer platform and the return material storage part.
优选的，所述载板承载机构包括承载滑轨、纵向驱动组件、横向驱动组件及承载组件，其中，上述承载滑轨水平设置；上述包括至少两组，至少两组横向驱动组件可滑动地连接在承载滑轨上；上述纵向驱动组件的输出端与横向驱动组件连接，以便驱动横向驱动组件纵向直线运动；上述承载组件包括至少两组，至少两组承载组件沿横向方向可滑动地连接在横向驱动组件上，经横向驱动组件驱动而横向直线运动，并与转移平台上下对应设置；上述承载组件内设有承载空间，承载空间水平设置，位于转移平台上方，且靠近出料空间的一侧为开放槽口，装载有晶粒的载板经该开放槽口滑入承载空间。Preferably, the carrier plate bearing mechanism includes a bearing slide rail, a longitudinal drive component, a transverse drive component and a bearing component, wherein the above-mentioned bearing slide rail is horizontally arranged; the above-mentioned includes at least two groups, and at least two groups of transverse drive components are slidably connected to the bearing slide rail; the output end of the above-mentioned longitudinal drive component is connected to the transverse drive component so as to drive the transverse drive component to move longitudinally linearly; the above-mentioned bearing component includes at least two groups, and at least two groups of bearing components are slidably connected to the transverse drive component along the transverse direction, and are driven by the transverse drive component to move transversely linearly, and are arranged correspondingly to the upper and lower transfer platforms; a bearing space is provided in the above-mentioned bearing component, and the bearing space is horizontally arranged, located above the transfer platform, and the side close to the discharge space is an open slot, and the carrier plate loaded with grains slides into the bearing space through the open slot.
优选的，所述承载组件包括承载支撑部件、承载旋转部件、承载支板及承载部件，其中，上述承载支撑部件可滑动地连接于横向直线模组的输出端上；上述承载旋转部件设置于承载支撑部件下部，并在水平面内可旋转；上述承载支板水平设置在承载旋转部件下部，经承载旋转部件驱动而旋转运动；上述承载部件连接在承载支板下部，并与承载支板沿竖直方向柔性连接，承载空间设置于承载部件内。Preferably, the bearing assembly includes a bearing support component, a bearing rotating component, a bearing support plate and a bearing component, wherein the bearing support component can be slidably connected to the output end of the horizontal linear module; the bearing rotating component is arranged at the lower part of the bearing support component and can rotate in a horizontal plane; the bearing support plate is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the bearing component is connected to the lower part of the bearing support plate and is flexibly connected to the bearing support plate in a vertical direction, and the bearing space is arranged in the bearing component.
优选的，所述晶粒转移机构包括转移支板、转移升降电机及晶粒转移组件，其中，上述转移支板竖直连接在晶粒转移支架上；所述晶粒转移支架竖直设置在支架的顶部；上述转移升降电机设置在转移支板上，且输出端朝下设置；上述晶粒转移组件沿竖直方向可滑动地连接在转移支板上，并与转移升降电机的输出端连接。Preferably, the grain transfer mechanism includes a transfer support plate, a transfer lifting motor and a grain transfer assembly, wherein the transfer support plate is vertically connected to the grain transfer bracket; the grain transfer bracket is vertically arranged on the top of the bracket; the transfer lifting motor is arranged on the transfer support plate, and the output end is arranged downward; the grain transfer assembly is slidably connected to the transfer support plate in a vertical direction, and is connected to the output end of the transfer lifting motor.
一种晶粒转移设备的晶粒转移工艺，包括如下工艺步骤：A grain transfer process of a grain transfer device includes the following process steps:
S1、载板装载：装载有晶粒的蓝膜经中部开有圆形通孔的载板夹装，使得承载晶粒的蓝膜部分位于载板的圆形通孔位置，该载板逐个插入出料储存部分的储料箱内；S1. Carrier loading: The blue film loaded with crystal grains is clamped by a carrier with a circular through hole in the middle, so that the blue film portion carrying the crystal grains is located at the circular through hole position of the carrier, and the carrier is inserted into the storage box of the discharge storage part one by one;
S2、储料箱装载：步骤S1中的储料箱内装载满载板后，储料箱整体滑入出料储存部分的储料支架的储存空间内；S2, loading the material storage box: after the material storage box in step S1 is fully loaded with plates, the material storage box as a whole slides into the storage space of the material storage bracket of the material discharging storage part;
S3、载板出料：步骤S2中储存空间装载有储料箱后，出料储存部分的储料直线模组驱动储料支架整体升降运动，使得待出料的储料箱水平对准出料搬移机构，出料搬移机构的出料直线模组驱动其搬移组件靠近储料箱，搬移组件水平夹紧储料箱内的载板后，带动载板水平滑出储料箱；储料箱对应搬移组件高度位置的载板取出后，储料直线模组驱动储料支架升降运动，使储料箱另一层载板对准搬移组件；S3, discharging of carrier plates: after the storage space is loaded with a storage box in step S2, the storage linear module of the discharging storage part drives the storage bracket to move up and down as a whole, so that the storage box to be discharged is horizontally aligned with the discharging moving mechanism, and the discharging linear module of the discharging moving mechanism drives its moving component to approach the storage box, and after the moving component horizontally clamps the carrier plate in the storage box, it drives the carrier plate to slide horizontally out of the storage box; after the carrier plate at the height position of the storage box corresponding to the moving component is taken out, the storage linear module drives the storage bracket to move up and down, so that the carrier plate of another layer of the storage box is aligned with the moving component;
S4、载板出料搬移：步骤S3中的搬移组件从储料箱取出载板后，出料直线模组驱动搬移组件移动至载板承载机构的承载组件一侧，并将所夹持的载板旋转90°后，将载板水平插入承载组件的承载空间内；承载组件内载板上的晶粒完成转移后，搬移组件将空载板从外侧夹紧后拔出承载空间并搬移下载板；S4, unloading and moving the carrier: after the moving assembly in step S3 takes out the carrier from the storage box, the unloading linear module drives the moving assembly to move to the side of the carrier assembly of the carrier bearing mechanism, and after rotating the clamped carrier by 90°, the carrier is horizontally inserted into the bearing space of the bearing assembly; after the grains on the carrier in the bearing assembly are transferred, the moving assembly clamps the empty carrier from the outside, pulls it out of the bearing space, and moves the unloaded carrier;
S5、载板循环出料：重复上述步骤S1至S4，在出料空间内完成载板的循环装载、出料、搬移及下料；S5, cyclic discharging of carrier plates: repeating the above steps S1 to S4 to complete the cyclic loading, discharging, moving and unloading of carrier plates in the discharging space;
S6、载板检测及调整：步骤S4或S5中载板插入承载空间内后，设置于转移平台下方的检测机构向上拍摄检测载板位置，并将信息传输至工控机，工控机控制承载组件调整载板位置或角度；S6, carrier plate detection and adjustment: after the carrier plate is inserted into the carrying space in step S4 or S5, the detection mechanism disposed below the transfer platform takes an upward photograph to detect the position of the carrier plate, and transmits the information to the industrial computer, which controls the carrying assembly to adjust the position or angle of the carrier plate;
S7、空板上料：待承载晶粒的空玻璃载板经载板搬臂搬移并放置于转移平台上，转移平台限位卡紧空玻璃载板后利用真空负压力向下吸附固定空玻璃载板；固定后的空玻璃载板经转移平台直线驱动滑入至承载组件下方，使其与步骤S6中承载空间内的载板上下对应；S7, empty plate loading: the empty glass carrier to be loaded with crystal grains is moved by the carrier moving arm and placed on the transfer platform. The transfer platform limits and clamps the empty glass carrier, and then uses vacuum negative pressure to absorb and fix the empty glass carrier downward; the fixed empty glass carrier is linearly driven by the transfer platform to slide under the load-bearing assembly, so that it corresponds to the carrier in the load-bearing space in step S6;
S8、晶粒转移组件位置调整：步骤S6中的承载组件装载好待转移晶粒的载板，且步骤S7中的空玻璃载板对应移动至待转移晶粒的载板下方后，晶粒转移机构的晶粒转移组件从上部的安装工位穿过承载组件的通孔下降至工作工位；S8, position adjustment of the grain transfer assembly: after the bearing assembly in step S6 is loaded with the carrier plate of the grain to be transferred, and the empty glass carrier plate in step S7 is correspondingly moved below the carrier plate of the grain to be transferred, the grain transfer assembly of the grain transfer mechanism is lowered from the upper installation station through the through hole of the bearing assembly to the working station;
S9、晶粒点位置转移：步骤S8中晶粒转移组件的位置下降调整至工作工位处后，晶粒转移组件的探帽底部吸附平面抵住承载空间载板上固定晶粒的载体蓝膜后，通过探帽吸附平面上布设的辅助吸孔向上吸附，以边局部固定蓝膜；探针的锥形下探部向下穿过探帽中部的探孔将局部固定蓝膜中部位置的晶粒下顶至下方的空玻璃载板上；S9, transfer of the position of the grain point: after the position of the grain transfer assembly in step S8 is lowered and adjusted to the working position, the bottom adsorption plane of the probe cap of the grain transfer assembly abuts against the carrier blue film of the grain fixed on the carrier plate of the bearing space, and then adsorbs upward through the auxiliary suction holes arranged on the adsorption plane of the probe cap to partially fix the blue film; the conical downward probing part of the probe passes downward through the probe hole in the middle of the probe cap to push the grain in the middle of the locally fixed blue film down to the empty glass carrier plate below;
S10、晶粒平面位置转移：步骤S9中完成单点位置的晶粒转移后，承载组件及转移平台同步直线运动，使得探针在竖直方向上对准下一个待转移晶粒的点后，探针及探帽重复步骤S9，直至蓝膜表面的晶粒完全转移至下方的空玻璃载板上；S10, transfer of the crystal plane position: after the crystal transfer at the single point position is completed in step S9, the bearing assembly and the transfer platform move linearly synchronously, so that the probe is aligned with the point of the next crystal to be transferred in the vertical direction, and the probe and the probe cap repeat step S9 until the crystal on the surface of the blue film is completely transferred to the empty glass carrier below;
S11、载板回料：步骤S9中的空玻璃载板装满晶粒后，转移平台从承载组件下方向外直线滑出，转移平台上的真空负压停止吸附载板，载板经载板顶块向上顶起后被载板搬臂向上吸附固定后，搬移至回料搬臂处，回料搬臂的搬移组件夹紧载板后，经回料直线模组驱动至回料储存部分的储料机构处，回料搬臂的搬移组件将装载晶粒的载板水平推入储料机构的储料箱内；S11, carrier return: after the empty glass carrier in step S9 is filled with crystal grains, the transfer platform slides outward from the bottom of the bearing assembly in a straight line, and the vacuum negative pressure on the transfer platform stops adsorbing the carrier. After the carrier is lifted up by the carrier top block and adsorbed and fixed upward by the carrier moving arm, it is moved to the return material moving arm. After the moving assembly of the return material moving arm clamps the carrier, it is driven to the storage mechanism of the return material storage part through the return material linear module, and the moving assembly of the return material moving arm pushes the carrier loaded with crystal grains horizontally into the storage box of the storage mechanism;
S12、晶粒循环转移及回料：重复步骤S9至S11，持续不断地将晶粒转移至空玻璃载板上，并将装载晶粒的玻璃载板回料搬移至储料箱内，同时储料箱沿竖直方向升降运动，以使其不同高度层插入装满载板。S12, crystal grain circular transfer and return: repeat steps S9 to S11, continuously transfer crystal grains to empty glass carriers, and return the glass carriers loaded with crystal grains to the storage box, while the storage box is lifted and lowered in the vertical direction so that the loaded carriers are inserted into different height layers.
本发明的有益效果在于：The beneficial effects of the present invention are:
本发明针对现有技术存在的缺陷和不足自主研发设计了一种实现载板多级多层大容量存储，载板滑入式取放承载及自动旋转中转及同步负压吸附固定，有效提升载板搬移中转稳定性，实现了探针转移顶刺极限限位及辅助吸附蓝膜，保证了晶粒转移过程中晶粒位置准确度及稳定性的晶粒转移设备及其晶粒转移工艺。本发明实现了自动化产线集成式晶粒转移，以机台为承载部件，机台上倒U型设置有大理石支架，支架与机台表面之间形成间隙空间，间隙空间内水平设有转移平台，转移平台包括多组，形成多转移工位，实现单机多工位晶粒转移，提升晶粒转移生产产能。支架内倒挂载板承载机构，载板承载机构对应转移平台上方设置，支架上部设有晶粒转移机构，晶粒转移机构上下对应载板承载机构设置。支架将机台上部的空间前后分隔为出料空间及回料空间，在机台的侧部对应出料空间和回料空间分别设有储料机构。在回料空间内，支架的侧壁上直线设置有载板搬臂。在出料空间及回料空间内对应储料机构分别设有出料搬移机构和回料搬臂，出料搬移机构和回料搬臂采用相同结构的搬移组件，两者区别在于在整机工序中实现的功能不一致。待转移的晶粒通过来料状态通过蓝膜承载后，蓝膜夹装固定于平面结构的载板上，载板通过水平滑入方式储存至具备多层载板储存空间的储料箱内后，储料箱通过水平滑入方式存放在具备多层储存空间的储料支架上；晶粒转移前，出料搬移机构驱动搬移组件移动至出料储存空间一侧的储料机构侧部，将储料箱内的载板夹住后水平拉出，并水平承载支撑拉出的载板，同时通过真空负压向下吸附固定载板后，带动载板移动至载板承载机构一侧，旋转90°后将载板水平插入载板承载机构内，上述取载板过程中，储料机构对应地驱动储料箱升降运动，以便使不同高度层的载板逐个取出。在回料空间内载板搬臂将上一工位导出的玻璃载板吸取后搬移至转移平台上，经转移平台限位固定并通过真空负压吸附固定后，转移平台移动至载板转移机构下方，使玻璃载板上下对齐蓝膜载板；晶粒转移机构向下延伸至载板转移机构内，通过探针探帽相结合的方式将蓝膜载板上的晶粒向下顶刺转移至下方的玻璃载板上；玻璃载板上装载完晶粒后，转移平台直线向外滑出至载板搬臂下方，载板搬臂将其搬移至回料搬臂上，回料搬臂通过搬移组件支撑承载载板并带动其移动至回料空间一侧的储料机构处，并将载板逐个推入此处储料机构的储料箱内。In view of the defects and deficiencies of the prior art, the present invention independently develops and designs a grain transfer device and a grain transfer process thereof that realizes multi-level and multi-layer large-capacity storage of carriers, slide-in pick-and-place loading and automatic rotation transfer, and synchronous negative pressure adsorption fixation of carriers, effectively improves the stability of carrier transfer and transfer, realizes the limit limit of probe transfer top puncture and auxiliary adsorption of blue film, and ensures the accuracy and stability of grain position during grain transfer. The present invention realizes the integrated grain transfer of the automated production line, with the machine as the bearing component, and an inverted U-shaped marble bracket is arranged on the machine, a gap space is formed between the bracket and the surface of the machine, and a transfer platform is arranged horizontally in the gap space, and the transfer platform includes multiple groups to form multiple transfer stations, so as to realize single-machine multi-station grain transfer and improve the production capacity of grain transfer. The carrier bearing mechanism is inverted in the bracket, and the carrier bearing mechanism is arranged above the transfer platform, and a grain transfer mechanism is arranged on the upper part of the bracket, and the grain transfer mechanism is arranged above and below the carrier bearing mechanism. The bracket divides the space on the upper part of the machine into a discharge space and a return space, and a storage mechanism is arranged on the side of the machine corresponding to the discharge space and the return space. In the return material space, a plate carrier arm is linearly arranged on the side wall of the bracket. In the discharge material space and the return material space, the corresponding storage mechanism is respectively provided with a discharge material moving mechanism and a return material moving arm. The discharge material moving mechanism and the return material moving arm adopt the same structure of moving components. The difference between the two is that the functions realized in the whole machine process are inconsistent. After the grains to be transferred pass through the blue film in the incoming state, the blue film is clamped and fixed on the carrier of the planar structure. After the carrier is stored in a storage box with a multi-layer carrier storage space by horizontal sliding, the storage box is stored on a storage bracket with a multi-layer storage space by horizontal sliding. Before the grains are transferred, the discharge and transfer mechanism drives the transfer assembly to move to the side of the storage mechanism on one side of the discharge and storage space, clamps the carrier in the storage box and pulls it out horizontally, and supports the pulled-out carrier horizontally, and at the same time, after the carrier is fixed downward by vacuum negative pressure, it drives the carrier to move to one side of the carrier bearing mechanism, rotates 90° and inserts the carrier horizontally into the carrier bearing mechanism. In the above-mentioned carrier removal process, the storage mechanism drives the storage box to lift and lower accordingly, so that carriers at different height layers can be taken out one by one. In the return material space, the carrier plate moving arm absorbs the glass carrier plate exported from the previous workstation and moves it to the transfer platform. After being fixed by the transfer platform and fixed by vacuum negative pressure adsorption, the transfer platform moves to the bottom of the carrier plate transfer mechanism to align the glass carrier plate up and down with the blue film carrier plate; the grain transfer mechanism extends downward into the carrier plate transfer mechanism, and the grains on the blue film carrier plate are transferred to the glass carrier plate below by a combination of probes and probe caps; after the grains are loaded on the glass carrier plate, the transfer platform slides outward in a straight line to the bottom of the carrier plate moving arm, and the carrier plate moving arm moves it to the return material moving arm, which supports the carrier plate through the moving assembly and drives it to the storage mechanism on one side of the return material space, and pushes the carrier plates one by one into the storage box of the storage mechanism here.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明的立体结构示意图之一。FIG. 1 is one of the three-dimensional structural schematic diagrams of the present invention.
图2为本发明的立体结构示意图之二。FIG. 2 is a second schematic diagram of the three-dimensional structure of the present invention.
图3为本发明的立体结构示意图之三。FIG. 3 is a third schematic diagram of the three-dimensional structure of the present invention.
图4为本发明的立体结构示意图之四。FIG. 4 is a fourth schematic diagram of the three-dimensional structure of the present invention.
图5为本发明本发明隐藏部件后的立体结构示意图之一。FIG. 5 is one of the three-dimensional structural schematic diagrams of the present invention after the components are hidden.
图6为本发明本发明隐藏部件后的立体结构示意图之二。FIG. 6 is a second schematic diagram of the three-dimensional structure of the present invention after the components are hidden.
图7为本发明储料机构的立体结构示意图之一。FIG. 7 is one of the three-dimensional structural schematic diagrams of the material storage mechanism of the present invention.
图8为本发明储料机构的立体结构示意图之二。FIG. 8 is a second schematic diagram of the three-dimensional structure of the material storage mechanism of the present invention.
图9为本发明储料组件的立体结构示意图之一。FIG. 9 is one of the three-dimensional structural schematic diagrams of the material storage assembly of the present invention.
图10为本发明储料组件的立体结构示意图之二。FIG. 10 is a second schematic diagram of the three-dimensional structure of the material storage assembly of the present invention.
图11为本发明储料组件隐藏部件后的立体结构示意图之一。FIG. 11 is one of the three-dimensional structural schematic diagrams of the material storage assembly of the present invention after the components are hidden.
图12为本发明储料组件隐藏部件后的立体结构示意图之二。FIG. 12 is a second schematic diagram of the three-dimensional structure of the material storage assembly of the present invention after the components are hidden.
图13为本发明储料组件隐藏部件后的立体结构示意图之三。FIG. 13 is a third schematic diagram of the three-dimensional structure of the material storage assembly of the present invention after the components are hidden.
图14为本发明出料搬移机构的立体结构示意图之一。FIG. 14 is one of the three-dimensional structural schematic diagrams of the material discharging and moving mechanism of the present invention.
图15为本发明出料搬移机构的立体结构示意图之二。FIG. 15 is a second schematic diagram of the three-dimensional structure of the material discharging and moving mechanism of the present invention.
图16为本发明搬移组件的立体结构示意图之一。FIG. 16 is one of the three-dimensional structural schematic diagrams of the moving assembly of the present invention.
图17为本发明搬移组件的立体结构示意图之二。FIG. 17 is a second schematic diagram of the three-dimensional structure of the moving assembly of the present invention.
图18为本发明搬移组件的立体结构示意图之三。FIG. 18 is a third schematic diagram of the three-dimensional structure of the moving assembly of the present invention.
图19为本发明搬移组件的立体结构示意图之四。FIG. 19 is a fourth schematic diagram of the three-dimensional structure of the moving assembly of the present invention.
图20为本发明搬移组件的立体结构示意图之五。FIG. 20 is a fifth schematic diagram of the three-dimensional structure of the moving assembly of the present invention.
图21为本发明转移平台的立体结构示意图之一。FIG. 21 is one of the three-dimensional structural schematic diagrams of the transfer platform of the present invention.
图22为本发明转移平台的立体结构示意图之二。FIG. 22 is a second schematic diagram of the three-dimensional structure of the transfer platform of the present invention.
图23为本发明晶粒转移部分的立体结构示意图之一。FIG. 23 is one of the three-dimensional structural schematic diagrams of the grain transfer part of the present invention.
图24为本发明晶粒转移部分的立体结构示意图之二。FIG. 24 is a second schematic diagram of the three-dimensional structure of the grain transfer part of the present invention.
图25为本发明晶粒转移部分的立体结构示意图之三。FIG. 25 is a third schematic diagram of the three-dimensional structure of the grain transfer part of the present invention.
图26为本发明载板承载机构的立体结构示意图之一。FIG. 26 is one of the three-dimensional structural schematic diagrams of the carrier plate bearing mechanism of the present invention.
图27为本发明载板承载机构的立体结构示意图之二。FIG. 27 is a second schematic diagram of the three-dimensional structure of the carrier plate bearing mechanism of the present invention.
图28为本发明承载组件的立体结构示意图之一。FIG. 28 is one of the three-dimensional structural schematic diagrams of the bearing assembly of the present invention.
图29为本发明承载组件的立体结构示意图之二。FIG. 29 is a second schematic diagram of the three-dimensional structure of the bearing assembly of the present invention.
图30为本发明承载部件的立体结构示意图之三。FIG. 30 is a third schematic diagram of the three-dimensional structure of the bearing component of the present invention.
图31为本发明承载组件隐藏部件后的立体结构示意图之一。FIG. 31 is one of the three-dimensional structural schematic diagrams of the load-bearing assembly of the present invention after the components are hidden.
图32为本发明承载组件隐藏部件后的立体结构示意图之二。FIG. 32 is a second schematic diagram of the three-dimensional structure of the load-bearing assembly of the present invention after the components are hidden.
图33为图31中I处放大结构示意图。Figure 33 is a schematic diagram of the enlarged structure of point I in Figure 31.
图34为本发明晶粒转移机构的立体结构示意图之一。FIG. 34 is one of the three-dimensional structural schematic diagrams of the grain transfer mechanism of the present invention.
图35为本发明晶粒转移机构的立体结构示意图之二。FIG. 35 is a second schematic diagram of the three-dimensional structure of the grain transfer mechanism of the present invention.
图36为本发明晶粒转移组件的立体结构示意图之一。FIG. 36 is one of the three-dimensional structural schematic diagrams of the grain transfer assembly of the present invention.
图37为本发明晶粒转移组件的立体结构示意图之二。FIG. 37 is a second schematic diagram of the three-dimensional structure of the die transfer assembly of the present invention.
图38为本发明晶粒转移组件的立体结构示意图之三。FIG. 38 is a third schematic diagram of the three-dimensional structure of the die transfer assembly of the present invention.
图39为本发明晶粒转移组件隐藏部件后的立体结构示意图之一。FIG. 39 is one of the three-dimensional structural schematic diagrams of the die transfer assembly of the present invention after the components are hidden.
图40为本发明晶粒转移组件隐藏部件后的立体结构示意图之二。FIG. 40 is a second schematic diagram of the three-dimensional structure of the die transfer assembly of the present invention behind hidden components.
图41为图40中II处放大结构示意图。Figure 41 is a schematic diagram of the enlarged structure of point II in Figure 40.
图42为本发明探针及探帽的立体结构示意图之一。FIG. 42 is one of the three-dimensional structural schematic diagrams of the probe and the probe cap of the present invention.
图43为本发明探针及探帽的立体结构示意图之二。FIG. 43 is a second schematic diagram of the three-dimensional structure of the probe and the probe cap of the present invention.
图44为图42中III处放大结构示意图。Figure 44 is a schematic diagram of the enlarged structure of point III in Figure 42.
图45为本发明载板搬臂的立体结构示意图之一。FIG. 45 is one of the three-dimensional structural schematic diagrams of the plate carrier lifting arm of the present invention.
图46为本发明载板搬臂的立体结构示意图之二。FIG. 46 is a second schematic diagram of the three-dimensional structure of the plate carrier arm of the present invention.
图47为本发明检测机构的立体结构示意图之一。FIG. 47 is one of the three-dimensional structural schematic diagrams of the detection mechanism of the present invention.
图48为本发明检测机构的立体结构示意图之二。FIG. 48 is a second schematic diagram of the three-dimensional structure of the detection mechanism of the present invention.
具体实施方式DETAILED DESCRIPTION
下面将结合附图对本发明作进一步描述：The present invention will be further described below in conjunction with the accompanying drawings:
如图1至图48所示，本发明采取的技术方案如下：一种晶粒转移设备，包括水平设置的机台1及架设在机台1上的支架5，还包括储料部分、中转搬移部分、转移平台4及晶粒转移部分，其中，As shown in FIGS. 1 to 48 , the technical solution adopted by the present invention is as follows: a grain transfer device includes a horizontally arranged machine table 1 and a bracket 5 mounted on the machine table 1, and also includes a material storage part, a transfer and transport part, a transfer platform 4 and a grain transfer part, wherein:
上述支架5为U型结构，其倒置架设在机台1中部，将机台1上部空间分隔为出料空间及回料空间，且其底部与机台1表面之间形成间隙空间；The bracket 5 is a U-shaped structure, which is inverted and mounted in the middle of the machine 1, dividing the upper space of the machine 1 into a discharge space and a return space, and a gap space is formed between its bottom and the surface of the machine 1;
上述储料部分设置于机台1侧部，储料部分包括出料储存部分及回料储存部分，出料储存部分及回料储存部分分别对应设置于上述出料空间及回料空间一侧；出料储存部分存储装载有晶粒的载板，回料储存部分存储装载有晶粒的载板；The material storage part is arranged at the side of the machine 1, and the material storage part includes a discharge material storage part and a return material storage part, and the discharge material storage part and the return material storage part are respectively arranged at one side of the discharge material space and the return material space; the discharge material storage part stores the carrier plate loaded with crystal grains, and the return material storage part stores the carrier plate loaded with crystal grains;
上述转移平台4包括至少两个，至少两个转移平台4并列间隔设置在机台1上，并位于上述间隙空间内；The transfer platforms 4 include at least two, and the at least two transfer platforms 4 are arranged in parallel and spaced apart on the machine 1 and are located in the gap space;
上述中转搬移部分包括出料搬移机构及回料搬移机构，出料搬移机构及回料搬移机构分别设置于出料空间及回料空间内；The above-mentioned transfer and moving part includes a material discharging and moving mechanism and a material returning and moving mechanism, and the material discharging and moving mechanism and the material returning and moving mechanism are respectively arranged in the material discharging space and the material returning space;
上述晶粒转移部分6包括载板承载机构62及晶粒转移机构63，载板承载机构62及晶粒转移机构63包括至少两组，其中，上述载板承载机构倒挂在支架5底部，并对应设置于转移平台4上方；上述晶粒转移机构63对应设置于载板承载机构62上方；The die transfer part 6 includes a carrier plate bearing mechanism 62 and a die transfer mechanism 63, and the carrier plate bearing mechanism 62 and the die transfer mechanism 63 include at least two groups, wherein the carrier plate bearing mechanism is hung upside down at the bottom of the bracket 5 and is correspondingly arranged above the transfer platform 4; the die transfer mechanism 63 is correspondingly arranged above the carrier plate bearing mechanism 62;
上述出料搬移机构将出料存储部分内装载有晶粒的载板从出料存储存部分取出后搬移至载板承载机构62内，载板承载机构62悬空支撑该载板；The above-mentioned material discharging and moving mechanism takes out the carrier plate loaded with the grains in the material discharging and storing part from the material discharging and storing part and moves it to the carrier plate bearing mechanism 62, and the carrier plate bearing mechanism 62 supports the carrier plate in the air;
上述回料搬移机构将空载板搬移至转移平台4上；上述晶粒转移机构63通过探针下顶，将承载机构62内载板上的晶粒转移至空载板上；The above-mentioned material return transfer mechanism transfers the empty carrier plate to the transfer platform 4; the above-mentioned grain transfer mechanism 63 transfers the grains on the carrier plate in the bearing mechanism 62 to the empty carrier plate through the probe push-down;
上述回料搬移机构将装载晶粒的载板从转移平台4搬移至回料储存部分内。The return material transfer mechanism transfers the carrier plate loaded with the grains from the transfer platform 4 to the return material storage part.
如图1至图8所示，出料储存部分及回料储存部分包括储料机构2，储料机构2包括两套，两套储料机构2分别对应上述出料空间及回料空间设置于机台1的侧部；上述储料机构2包括储料直线模组21、储料滑座22及储料组件，其中，上述储料直线模组21竖直设置；上述储料滑座22沿竖直方向可活动地设置在储料直线模组21上，并与储料直线模组21的输出端连接；上述储料组件设置在储料滑座22上。As shown in Figures 1 to 8, the material discharging storage part and the material return storage part include a material storage mechanism 2, and the material storage mechanism 2 includes two sets. The two sets of material storage mechanisms 2 are respectively arranged on the side of the machine 1 corresponding to the above-mentioned material discharging space and the material return space; the above-mentioned material storage mechanism 2 includes a material storage linear module 21, a material storage slide 22 and a material storage assembly, wherein the above-mentioned material storage linear module 21 is vertically arranged; the above-mentioned material storage slide 22 is movably arranged on the material storage linear module 21 along the vertical direction, and is connected to the output end of the material storage linear module 21; the above-mentioned material storage assembly is arranged on the material storage slide 22.
如图9至图13所示，储料组件包括储料支架23及储料箱24，其中，上述储料支架23连接于上述储料滑座22的侧壁上，储料支架23上沿竖直方向设有至少两个储存空间，储存空间靠近机台1一侧为开放面；上述储料箱24包括至少两个，储料箱24对应设置于上述储存空间内，并经储存空间的开放面滑入或滑出；上述储料支架23包括至少两组限位阻挡组件，至少两组限位阻挡组件对应设置于各储存空间内，储料箱24在储存空间内滑动时经限位阻挡组件限位和阻挡。As shown in Figures 9 to 13, the material storage assembly includes a material storage bracket 23 and a material storage box 24, wherein the above-mentioned material storage bracket 23 is connected to the side wall of the above-mentioned material storage slide 22, and at least two storage spaces are provided on the material storage bracket 23 in the vertical direction, and the storage space is open on the side close to the machine 1; the above-mentioned material storage box 24 includes at least two, and the material storage boxes 24 are correspondingly arranged in the above-mentioned storage space, and slide in or out through the open surface of the storage space; the above-mentioned material storage bracket 23 includes at least two groups of limit and blocking components, and at least two groups of limit and blocking components are correspondingly arranged in each storage space, and the material storage box 24 is limited and blocked by the limit and blocking components when sliding in the storage space.
储料支架23还包括储料架体231及储料隔板232，其中，上述储料架体231为矩形架体结构，储料支架231靠近机台1的一侧及顶部为开放面；上述储料隔板232包括至少两块，至少两块储料隔板232沿竖直方向水平间隔地设置在储料架体231内，将储料架体231内空间分隔为至少两个储存空间；The material storage bracket 23 further includes a material storage frame 231 and a material storage partition 232, wherein the material storage frame 231 is a rectangular frame structure, and the side and top of the material storage bracket 231 close to the machine 1 are open surfaces; the material storage partition 232 includes at least two pieces, and at least two material storage partitions 232 are arranged in the material storage frame 231 at intervals along the vertical direction, so as to divide the space in the material storage frame 231 into at least two storage spaces;
上述限位阻挡组件包括限位导条234及阻挡座233，其中，上述限位导条234包括两条，分别设置于储存空间的两侧，限位导条234的横截面为L状结构，其顶部水平面与储料隔板232之间形成滑入空间A，储料箱24的两侧嵌入滑入空间A内，经限位导条234导向限位；上述阻挡座233包括两块，两阻挡座233对应限位导条234设置于远离机台1一侧，阻挡座233对应滑入空间A的侧壁上设有内凹的阻挡槽B，储料箱24滑入阻挡槽B内，经阻挡座233阻挡限位。The above-mentioned limit blocking assembly includes a limit guide bar 234 and a blocking seat 233, wherein the above-mentioned limit guide bar 234 includes two, which are respectively arranged on both sides of the storage space, and the cross-section of the limit guide bar 234 is an L-shaped structure, and a sliding space A is formed between its top horizontal surface and the storage partition 232, and the two sides of the storage box 24 are embedded in the sliding space A, and are guided and limited by the limit guide bar 234; the above-mentioned blocking seat 233 includes two pieces, and the two blocking seats 233 are arranged on the side away from the machine 1 corresponding to the limit guide bar 234, and the side wall of the blocking seat 233 corresponding to the sliding space A is provided with a concave blocking groove B, and the storage box 24 slides into the blocking groove B and is blocked and limited by the blocking seat 233.
储料箱24包括储料下支板241、储料侧板242、储料上支板243及限位柱244，其中，上述储料上支板243及储料下支板241沿竖直方向上下间隔设置；上述储料侧板242包括两块，两块储料侧板242分别竖直连接于储料上支板243与储料下支板241之间，使储料下支板241与储料上支板243之间形成两侧开放的载板储存空间；上述储料侧板242的内侧壁上沿竖直方向间隔设有至少两个安装条槽C，载板水插入两储料侧板242的安装条槽C内，并沿直线方向滑入或滑出；上述限位柱244包括至少两根，限位柱244竖直可活动地设置在储料下支板241与储料上支板243之间，并位于载板储存空间的开放面处，以便限位其内的载板。The material storage box 24 includes a lower material storage support plate 241, a material storage side plate 242, an upper material storage support plate 243 and a limiting column 244, wherein the upper material storage support plate 243 and the lower material storage support plate 241 are arranged vertically at intervals; the material storage side plate 242 includes two pieces, and the two material storage side plates 242 are respectively vertically connected between the upper material storage support plate 243 and the lower material storage support plate 241, so that the lower material storage support plate 241 and the upper material storage support plate 243 form two-side openings. The storage space for the carrier is provided; at least two mounting grooves C are arranged at intervals in the vertical direction on the inner side wall of the above-mentioned material storage side plate 242, and the carrier is inserted into the mounting grooves C of the two material storage side plates 242 and slides in or out in a straight direction; the above-mentioned limiting columns 244 include at least two, and the limiting columns 244 are vertically and movably arranged between the lower support plate 241 and the upper support plate 243 of the material storage, and are located at the open surface of the carrier storage space so as to limit the carrier therein.
如图21至图22所示，转移平台4包括平台支板41、平台滑轨42、平台滑座43、平台限位柱44、载板顶块45及平台吸孔46，其中，上述平台支板41水平设置在机台1上；上述平台滑轨42水平设置在平台支板41上；上述平台滑座43可滑动地嵌设在平台滑轨42上，并经气缸或直线电机驱动而直线运动，平台滑座43上设有载座，载座上开设有通槽E，通槽E上下贯通载座及平台滑座43；上述载座内布设有气路，并通过设置于其侧部的气嘴与外部真空发生装置连接；上述平台限位柱44包括至少两根，平台限位柱44沿通槽E侧边设置于载板上，并向上凸起，平台限位柱44之间形成限位空间，以便限位放置于载座上的载板；上述平台吸孔46包括至少两个，平台吸孔46设置于载座上，并位于通槽E内侧壁与平台限位柱44之间，并与载座内部气路连通，以便吸附固定载座上放置的载板；上述载板顶块45设置于载座上，凸起至载座上方，并通过弹簧与载座连接，以便晶粒转移完成后，利用弹簧弹力上顶载座。As shown in Figures 21 to 22, the transfer platform 4 includes a platform support plate 41, a platform slide rail 42, a platform slide seat 43, a platform limiting column 44, a carrier plate top block 45 and a platform suction hole 46, wherein the platform support plate 41 is horizontally arranged on the machine 1; the platform slide rail 42 is horizontally arranged on the platform support plate 41; the platform slide seat 43 is slidably embedded in the platform slide rail 42, and is driven by a cylinder or a linear motor to move linearly, a carrier is provided on the platform slide seat 43, and a through groove E is opened on the carrier seat, and the through groove E passes through the carrier seat and the platform slide seat 43 from top to bottom; an air path is arranged in the carrier seat, and is connected to an external vacuum pump through an air nozzle arranged on its side. The platform limiting posts 44 are provided on the carrier along the side of the through groove E and protrude upwards, and a limiting space is formed between the platform limiting posts 44 so as to limit the carrier placed on the carrier; the platform suction holes 46 are provided on the carrier and are located between the inner wall of the through groove E and the platform limiting posts 44, and are connected to the internal air path of the carrier so as to adsorb and fix the carrier placed on the carrier; the carrier top block 45 is provided on the carrier, protrudes above the carrier, and is connected to the carrier through a spring, so that after the grain transfer is completed, the carrier can be pushed up by the elastic force of the spring.
如图14至图15所示，出料搬移机构3包括出料直线模组31及搬移组件32，其中，上述出料直线模组31沿机台1侧边方向设置于出料空间内；上述搬移组件32可滑动地设置在出料直线模组31上，并与出料直线模组31的输出端连接；出料直线模组31驱动搬移组件32沿直线方向在出料储存部分与载板承载机构之间来回直线运动，搬移组件32从出料储存部分内取出载板并将其搬移至载板承载机构内。As shown in Figures 14 to 15, the material discharging and moving mechanism 3 includes a material discharging linear module 31 and a moving assembly 32, wherein the material discharging linear module 31 is arranged in the material discharging space along the side direction of the machine table 1; the moving assembly 32 is slidably arranged on the material discharging linear module 31 and connected to the output end of the material discharging linear module 31; the material discharging linear module 31 drives the moving assembly 32 to move back and forth in a linear direction between the material discharging storage part and the carrier bearing mechanism, and the moving assembly 32 takes out the carrier from the material discharging storage part and moves it to the carrier bearing mechanism.
如图16至图20所示，搬移组件32包括旋转部件、搬移支座324、载板限位支撑部件及夹板部件，其中，上述旋转部件水平设置，旋转部件的输出端朝上设置；上述搬移支座324水平设置在旋转部件的输出端上，经旋转部件驱动而在水平面内旋转运动；上述载板限位支撑部件包括两套，两套载板限位支撑部件分别设置于搬移支座324的两侧，载板限位支撑部件包括滑入槽D，滑入槽D的一端开口，另一端封合，载板经滑入槽D一端水平滑入，经滑入槽D限位支撑；上述夹板部件设置于两套载板限位支撑部件之间，并沿滑入槽D方向来回直线运动，夹板部件移动至滑入槽D一端外部后夹紧载板，并带动载板向滑入槽D另一端方向运动，使载板水平滑入滑入槽D内。As shown in Figures 16 to 20, the moving assembly 32 includes a rotating component, a moving support 324, a carrier plate limiting support component and a clamping plate component, wherein the rotating component is horizontally arranged, and the output end of the rotating component is arranged upward; the moving support 324 is horizontally arranged on the output end of the rotating component, and is driven by the rotating component to rotate in the horizontal plane; the carrier plate limiting support component includes two sets, and the two sets of carrier plate limiting support components are respectively arranged on both sides of the moving support 324, and the carrier plate limiting support component includes a sliding groove D, one end of the sliding groove D is open, and the other end is sealed, and the carrier plate slides horizontally through one end of the sliding groove D and is limited and supported by the sliding groove D; the clamping plate component is arranged between the two sets of carrier plate limiting support components, and moves back and forth in a straight line along the direction of the sliding groove D. After the clamping plate component moves to the outside of one end of the sliding groove D, it clamps the carrier plate and drives the carrier plate to move toward the other end of the sliding groove D, so that the carrier plate slides horizontally into the sliding groove D.
旋转部件包括搬移底座321、搬移旋转气缸322及搬移旋转支柱323，其中，上述搬移底座321水平设置；上述搬移旋转气缸322设置在搬移底座321上，且输出端朝上设置；上述搬移旋转支柱323竖直设置并与搬移旋转气缸322的输出端连接，经搬移旋转气缸322驱动而旋转运动；上述搬移支座324水平设置在搬移旋转支柱322上。The rotating component includes a moving base 321, a moving rotating cylinder 322 and a moving rotating pillar 323, wherein the moving base 321 is horizontally arranged; the moving rotating cylinder 322 is arranged on the moving base 321, and the output end is arranged upward; the moving rotating pillar 323 is vertically arranged and connected to the output end of the moving rotating cylinder 322, and is driven by the moving rotating cylinder 322 to rotate; the moving support 324 is horizontally arranged on the moving rotating pillar 322.
载板限位支撑部件包括载板支撑座325、载板限位板326、载板挡块327及真空接头328，其中，上述载板支撑座325沿搬移支座324的侧边方向竖直设置，并向上延伸，载板支撑座325的上部设有横截面为L状结构的支撑台阶面，支撑台阶面靠近搬移支座324内侧为开放面；上述载板限位板326水平设置在载板支撑座325上，载板限位板326从上方封合上述支撑台阶面，并与支撑台阶面之间形成内侧及两端开放的滑入槽D；上述滑入槽D的一端内壁设有向槽外方向延伸的过度斜面，以便载板滑入；上述载板挡块327设置于滑入槽D的另一端，以便将其端口封合；上述载板支撑座325内布设有气路，台阶支撑面上设有至少两个真空吸孔，真空吸孔与载板支撑座325内部气路连通；上述真空接头328设置在载板支撑座325上，真空接头328一端与载板支撑座325内部气路连接，另一端与外部真空发生装置连接，以便使滑入槽D底面上的真空吸孔产生负压向下吸附固定滑入槽D内的载板。The carrier plate limiting support component includes a carrier plate support seat 325, a carrier plate limiting plate 326, a carrier plate stopper 327 and a vacuum joint 328, wherein the carrier plate support seat 325 is vertically arranged along the side direction of the moving support 324 and extends upward, and the upper part of the carrier plate support seat 325 is provided with a support step surface with an L-shaped cross section, and the support step surface is an open surface close to the inner side of the moving support 324; the carrier plate limiting plate 326 is horizontally arranged on the carrier plate support seat 325, and the carrier plate limiting plate 326 seals the support step surface from the top, and forms a sliding groove D with the inner side and both ends open between the support step surface; the sliding groove D The inner wall at one end is provided with a transition slope extending toward the outside of the groove to facilitate the sliding of the carrier board; the above-mentioned carrier board stopper 327 is arranged at the other end of the sliding groove D to seal its port; an air circuit is arranged inside the above-mentioned carrier board support seat 325, and at least two vacuum suction holes are provided on the step support surface, and the vacuum suction holes are connected to the internal air circuit of the carrier board support seat 325; the above-mentioned vacuum connector 328 is arranged on the carrier board support seat 325, one end of the vacuum connector 328 is connected to the internal air circuit of the carrier board support seat 325, and the other end is connected to an external vacuum generating device, so that the vacuum suction holes on the bottom surface of the sliding groove D generate negative pressure to downwardly adsorb and fix the carrier board that slides into the groove D.
夹板部件包括夹板支座3210、夹板电机3211、夹板传动带3212、夹板滑座3213、夹板气缸3214及夹板爪3215，其中，上述夹板支座3210设置于两套载板限位支撑部件之间，并竖直向上延伸，其高度低于滑入槽D；上述夹板电机3211设置于夹板支座3210的一侧壁上，夹板电机3210的输出轴穿过夹板支座3210水平延伸至夹板支座3210的另一侧，并套设有一个同步轴；上述夹板传动带3212的一端套设在上述同步轴上，另一端套设在夹板支座3210另一侧壁上可转动设置的另一个同步轴；上述夹板滑座3213可滑动地设置在搬移支座324上的搬移滑轨329上，且通过连接块与上述夹板传动带3212连接，夹板传动带3212带动夹板滑座3213来回直线运动；上述夹板气缸3214水平设置于夹板滑座3213上；上述夹板爪3215水平连接在夹板气缸3214的输出端上。The splint components include a splint support 3210, a splint motor 3211, a splint transmission belt 3212, a splint slide 3213, a splint cylinder 3214 and a splint claw 3215, wherein the splint support 3210 is arranged between two sets of carrier plate limiting support components and extends vertically upward, and its height is lower than the sliding groove D; the splint motor 3211 is arranged on a side wall of the splint support 3210, and the output shaft of the splint motor 3210 passes through the splint support 3210 and extends horizontally to the other side of the splint support 3210, and is sleeved with a synchronization shaft; the splint One end of the plate transmission belt 3212 is sleeved on the above-mentioned synchronous shaft, and the other end is sleeved on another synchronous shaft rotatably arranged on the other side wall of the splint support 3210; the above-mentioned splint slide 3213 is slidably arranged on the moving slide rail 329 on the moving support 324, and is connected to the above-mentioned splint transmission belt 3212 through a connecting block, and the splint transmission belt 3212 drives the splint slide 3213 to move back and forth in a straight line; the above-mentioned splint cylinder 3214 is horizontally arranged on the splint slide 3213; the above-mentioned splint claw 3215 is horizontally connected to the output end of the splint cylinder 3214.
如图1至图6所示，回料搬移机构包括载板搬臂7及回料搬臂8，其中，上述载板搬臂7设置于回料空间内，并在转移平台4上方沿直线方向延伸，以便将上一工位的空载板搬移至转移平台4上；上述回料搬臂8设置在转移平台4与回料储存部分之间，转移平台4上的载板装满晶粒后，载板搬臂7将其搬移至回料搬臂8上，回料搬臂8将载板搬移至回料储存部分内；上述回料搬臂8包括回料直线模组及搬移组件32，其中上述回料直线模组沿机台1侧边方向设置；上述搬移组件32设置在回料直线模组的输出端上，经回料直线模组驱动而在转移平台4与回料储存部分之间来回直线运动。As shown in Figures 1 to 6, the return material moving mechanism includes a carrier plate moving arm 7 and a return material moving arm 8, wherein the carrier plate moving arm 7 is arranged in the return material space and extends in a straight line above the transfer platform 4 so as to move the empty carrier plate of the previous workstation to the transfer platform 4; the return material moving arm 8 is arranged between the transfer platform 4 and the return material storage part, and after the carrier plate on the transfer platform 4 is full of grains, the carrier plate moving arm 7 moves it to the return material moving arm 8, and the return material moving arm 8 moves the carrier plate to the return material storage part; the return material moving arm 8 includes a return material linear module and a moving component 32, wherein the return material linear module is arranged along the side direction of the machine table 1; the moving component 32 is arranged on the output end of the return material linear module, and is driven by the return material linear module to move back and forth between the transfer platform 4 and the return material storage part.
如图45至图46所示，载板搬臂7包括搬臂直线模组71、搬臂滑座72、搬臂升降气缸73、搬臂载座74及搬臂吸嘴75，其中，上述搬臂直线模组71沿机台1侧边方向设置在支架5的侧壁上，并位于转移平台4的上方；上述搬臂滑座72连接于搬臂直线模组71的输出端上，经搬臂直线模组71驱动而直线运动；上述搬臂升降气缸73设置在搬臂滑座72上，且输出端朝下设置；上述搬臂载座74连接在搬臂升降气缸73的输出端上，并与搬臂升降气缸73之间通过弹簧连接，以便在取放载板时通过弹簧提供缓冲力，搬臂载座74的下部形成支撑平面；上述搬臂吸嘴75包括至少两个，搬臂吸嘴75竖直设置在搬臂载座74上，且位于载板两侧，以便通过真空负压从载板外沿未放置晶粒部位吸附固定载板。As shown in Figures 45 to 46, the carrier arm 7 includes an arm linear module 71, an arm slide 72, an arm lifting cylinder 73, an arm carrier 74 and an arm suction nozzle 75, wherein the arm linear module 71 is arranged on the side wall of the bracket 5 along the side direction of the machine platform 1 and is located above the transfer platform 4; the arm slide 72 is connected to the output end of the arm linear module 71 and is driven by the arm linear module 71 to move linearly; the arm lifting cylinder 73 is arranged on the arm slide 72, and the output end is arranged downward; the above-mentioned arm carrier 74 is connected to the output end of the arm lifting cylinder 73, and is connected to the arm lifting cylinder 73 through a spring, so that the spring can provide a buffer force when taking and placing the carrier, and the lower part of the arm carrier 74 forms a supporting plane; the above-mentioned arm suction nozzle 75 includes at least two, the arm suction nozzle 75 is vertically arranged on the arm carrier 74, and is located on both sides of the carrier, so as to fix the carrier by sucking from the outer edge of the carrier where the grains are not placed through vacuum negative pressure.
如图26至图27所示，所述载板承载机构62包括承载滑轨621、纵向驱动组件、横向驱动组件及承载组件622，其中，上述承载滑轨621水平设置；上述包括至少两组，至少两组横向驱动组件可滑动地连接在承载滑轨621上；上述纵向驱动组件的输出端与横向驱动组件连接，以便驱动横向驱动组件纵向直线运动；上述承载组件622包括至少两组，至少两组承载组件622沿横向方向可滑动地连接在横向驱动组件上，经横向驱动组件驱动而横向直线运动，并与转移平台4上下对应设置；上述承载组件622内设有承载空间G，承载空间G水平设置，位于转移平台4上方，且靠近出料空间的一侧为开放槽口，装载有晶粒的载板0经该开放槽口滑入承载空间G。As shown in Figures 26 to 27, the carrier bearing mechanism 62 includes a bearing slide rail 621, a longitudinal drive component, a transverse drive component and a bearing component 622, wherein the above-mentioned bearing slide rail 621 is horizontally arranged; the above-mentioned includes at least two groups, and at least two groups of transverse drive components are slidably connected to the bearing slide rail 621; the output end of the above-mentioned longitudinal drive component is connected to the transverse drive component so as to drive the transverse drive component to move longitudinally in a straight line; the above-mentioned bearing component 622 includes at least two groups, and at least two groups of bearing components 622 are slidably connected to the transverse drive component in a transverse direction, and are driven by the transverse drive component to move transversely in a straight line, and are arranged corresponding to the transfer platform 4 up and down; the above-mentioned bearing component 622 is provided with a bearing space G, and the bearing space G is horizontally arranged, located above the transfer platform 4, and the side close to the discharge space is an open slot, and the carrier plate 0 loaded with grains slides into the bearing space G through the open slot.
如图28至图33所示，承载组件622包括承载支撑部件、承载旋转部件、承载支板629及承载部件，其中，上述承载支撑部件可滑动地连接于横向直线模组的输出端上；上述承载旋转部件设置于承载支撑部件下部，并在水平面内可旋转；上述承载支板629水平设置在承载旋转部件下部，经承载旋转部件驱动而旋转运动；上述承载部件连接在承载支板629下部，并与承载支板629沿竖直方向柔性连接，承载空间G设置于承载部件内。As shown in Figures 28 to 33, the bearing assembly 622 includes a bearing support component, a bearing rotating component, a bearing support plate 629 and a bearing component, wherein the above-mentioned bearing support component can be slidably connected to the output end of the horizontal linear module; the above-mentioned bearing rotating component is arranged at the lower part of the bearing support component and can rotate in a horizontal plane; the above-mentioned bearing support plate 629 is horizontally arranged at the lower part of the bearing rotating component and is driven by the bearing rotating component to rotate; the above-mentioned bearing component is connected to the lower part of the bearing support plate 629 and is flexibly connected to the bearing support plate 629 along the vertical direction, and the bearing space G is arranged in the bearing component.
承载支撑部件包括承载支座623及承载旋转座624，其中，上述承载支座623连接于横向直线模组的输出端上，承载支座623的中部开设有通孔F，通孔F上下贯通承载支座623，通孔F的上部设有向下凹陷的环状台阶面；上述承载旋转座624为圆筒状结构，承载旋转座624插设在通孔F内，承载旋转座624的顶部设有水平向外延伸的支撑环面，支撑环面的外径不大于上述环状台阶面的内径，支撑环面放置于环状台阶面上，经环状台阶面支撑；上述承载旋转座624延伸至承载支座623下方的外壁上设有同步齿628。The bearing support component includes a bearing support 623 and a bearing rotating seat 624, wherein the bearing support 623 is connected to the output end of the horizontal linear module, a through hole F is opened in the middle of the bearing support 623, the through hole F passes through the bearing support 623 up and down, and the upper part of the through hole F is provided with a downwardly recessed annular step surface; the bearing rotating seat 624 is a cylindrical structure, the bearing rotating seat 624 is inserted in the through hole F, and the top of the bearing rotating seat 624 is provided with a supporting annular surface extending horizontally outward, the outer diameter of the supporting annular surface is not larger than the inner diameter of the annular step surface, and the supporting annular surface is placed on the annular step surface and supported by the annular step surface; the outer wall of the bearing rotating seat 624 extending to the bottom of the bearing support 623 is provided with a synchronous tooth 628.
承载旋转部件包括承载旋转电机625、同步带626及张紧辊627，其中，上述承载旋转电机625设置于承载支座623一侧水平连接的支撑板上，且其输出轴朝下延伸至承载支座623下方，并套设有同步轮；上述张紧辊627可转动地设置在上述支撑板底部；上述同步带626套设在同步齿628及承载旋转电机625输出轴上的同步轮上，并通过张紧辊627张紧；承载旋转电机625通过同步带626驱动承载旋转座624旋转；上述承载支板629水平连接在承载旋转座624的下部。The bearing rotating component includes a bearing rotating motor 625, a synchronous belt 626 and a tensioning roller 627, wherein the bearing rotating motor 625 is arranged on a support plate horizontally connected to one side of the bearing support 623, and its output shaft extends downward to the bottom of the bearing support 623, and is sleeved with a synchronous wheel; the tensioning roller 627 is rotatably arranged at the bottom of the support plate; the synchronous belt 626 is sleeved on the synchronous teeth 628 and the synchronous wheel on the output shaft of the bearing rotating motor 625, and is tensioned by the tensioning roller 627; the bearing rotating motor 625 drives the bearing rotating seat 624 to rotate through the synchronous belt 626; the bearing support plate 629 is horizontally connected to the lower part of the bearing rotating seat 624.
承载部件包括承载座6210、承载板6211及弹簧柱6212，其中，上述承载座6210水平设置在承载支板629下方，并通过至少两根支杆与承载支板629连接，至少两根支杆与承载支板629沿竖直方向活动连接；上述弹簧柱6212包括至少两根，弹簧柱6212竖直连接在承载座6210与承载支板629之间；上述承载座6210的下部沿侧边方向设有向下凸起的支撑框体，该支撑框体靠近出料空间的一侧为开放结构；上述承载板6211水平设置在承载座6210下方，承载板6211与支撑框体之间形成承载空间G；上述通孔F由上而下贯通承载承载支板629、承载座6210及承载板6211；上述承载座6210及承载板6211上靠近出料空间一侧开设有取料槽口H，取料槽口H上下贯通承载座6210及承载板6211，以便夹取承载空间内的载板。The bearing component includes a bearing seat 6210, a bearing plate 6211 and a spring column 6212, wherein the bearing seat 6210 is horizontally arranged below the bearing support plate 629 and connected to the bearing support plate 629 through at least two support rods, and at least two support rods are movably connected to the bearing support plate 629 along the vertical direction; the spring column 6212 includes at least two spring columns 6212, which are vertically connected between the bearing seat 6210 and the bearing support plate 629; the lower part of the bearing seat 6210 is provided with a support frame protruding downward along the side direction, The side of the support frame close to the discharge space is an open structure; the above-mentioned bearing plate 6211 is horizontally arranged below the bearing seat 6210, and a bearing space G is formed between the bearing plate 6211 and the support frame; the above-mentioned through hole F passes through the bearing support plate 629, the bearing seat 6210 and the bearing plate 6211 from top to bottom; the bearing seat 6210 and the bearing plate 6211 are provided with a material extraction slot H on the side close to the discharge space, and the material extraction slot H passes through the bearing seat 6210 and the bearing plate 6211 from top to bottom to clamp the carrier in the bearing space.
如图23至图25所示，晶粒转移机构63间隔设置于晶粒转移支架61的侧壁上；所述晶粒转移支架61竖直设置在支架5的顶部；所述支架5顶面间隔开设有至少两个安装通孔；上述晶粒转移支架61位于安装通孔的一侧；上述晶粒转移支架61穿过安装通孔向下延伸并插入载板承载机构62内。As shown in Figures 23 to 25, the grain transfer mechanism 63 is arranged at intervals on the side wall of the grain transfer bracket 61; the grain transfer bracket 61 is vertically arranged on the top of the bracket 5; at least two mounting through holes are spaced apart on the top surface of the bracket 5; the grain transfer bracket 61 is located on one side of the mounting through hole; the grain transfer bracket 61 extends downward through the mounting through hole and is inserted into the carrier supporting mechanism 62.
如图34至图35所示，晶粒转移机构63包括转移支板631、转移升降电机632及晶粒转移组件，其中，上述转移支板631竖直连接在晶粒转移支架61上；上述转移升降电机632设置在转移支板631上，且输出端朝下设置；上述晶粒转移组件沿竖直方向可滑动地连接在转移支板631上，并与转移升降电机632的输出端连接。As shown in Figures 34 to 35, the grain transfer mechanism 63 includes a transfer support plate 631, a transfer lifting motor 632 and a grain transfer assembly, wherein the transfer support plate 631 is vertically connected to the grain transfer bracket 61; the transfer lifting motor 632 is arranged on the transfer support plate 631, and the output end is arranged downward; the grain transfer assembly is slidably connected to the transfer support plate 631 along the vertical direction, and is connected to the output end of the transfer lifting motor 632.
如图36至图44所示，晶粒转移组件包括转移支座633、驱动部件、吸附部件、探针6311及探帽638，其中，上述转移支座633沿竖直方向可滑动地设置在转移支板631上，并通过丝杆帽及丝杆与转移升降电机632的输出端连接，转移升降电机632通过驱动丝杆旋转带动丝杆帽升降运动，丝杆帽带动转移支座633升降运动；上述驱动部件设置于转移支座633上，并输出向下的动力；上述吸附部件设置在驱动部件下方，吸附部件内设有吸附腔体，吸附腔体与外部真空发送装置连接，吸附腔体的底部为开放面，驱动部件的输出端穿入吸附腔体向下延伸；上述探针6311连接在驱动部件输出端下部，探针下部设有锥形下探部6313；上述探帽638为上部开放的帽体结构，探帽638可拆卸地连接在吸附腔体的下部，封合吸附腔体的底部开放面；上述探帽638的底面为吸附平面6314，吸附平面6314的中部设有上下贯通的探孔6315，探孔6315内径不大于探针6311外径，探针6311的锥形下探部6313向下穿过探孔6315将晶粒下顶转移；上述探孔6315的周沿开设有至少两个辅助吸孔6316，辅助吸孔6316在探孔6315周沿部位产生负压吸附平面，以便吸附下探晶粒周围的晶粒载体。As shown in FIGS. 36 to 44 , the grain transfer assembly includes a transfer support 633, a driving component, an adsorption component, a probe 6311 and a probe cap 638, wherein the transfer support 633 is slidably arranged on the transfer support plate 631 in the vertical direction, and is connected to the output end of the transfer lifting motor 632 through a screw cap and a screw, and the transfer lifting motor 632 drives the screw cap to move up and down by driving the screw to rotate, and the screw cap drives the transfer support 633 to move up and down; the driving component is arranged on the transfer support 633 and outputs downward power; the adsorption component is arranged below the driving component, and an adsorption cavity is arranged in the adsorption component, and the adsorption cavity is connected to an external vacuum sending device, and the bottom of the adsorption cavity is an open surface, and the output end of the driving component penetrates into the adsorption cavity and extends downward; The probe 6311 is connected to the lower part of the output end of the driving component, and a conical downward probe portion 6313 is provided at the lower part of the probe; the probe cap 638 is a cap structure with an open upper part, and the probe cap 638 is detachably connected to the lower part of the adsorption cavity to seal the bottom open surface of the adsorption cavity; the bottom surface of the probe cap 638 is an adsorption plane 6314, and a probe hole 6315 is provided in the middle of the adsorption plane 6314, which passes through the upper and lower parts, and the inner diameter of the probe hole 6315 is not larger than the outer diameter of the probe 6311, and the conical downward probe portion 6313 of the probe 6311 passes through the probe hole 6315 downward to transfer the lower top of the grain; at least two auxiliary suction holes 6316 are provided around the periphery of the probe hole 6315, and the auxiliary suction holes 6316 generate a negative pressure adsorption plane around the probe hole 6315 to adsorb the grain carrier around the downward-probing grain.
驱动部件包括驱动电机634及驱动轴635，其中，上述驱动电机634竖直设置在转移支座633的侧壁上，且输出端朝下设置；上述驱动轴635竖直连接于驱动电机634的输出端上，并向下延伸。The driving component includes a driving motor 634 and a driving shaft 635, wherein the driving motor 634 is vertically arranged on the side wall of the transfer support 633, and the output end is arranged downward; the driving shaft 635 is vertically connected to the output end of the driving motor 634 and extends downward.
吸附部件包括连接座636及吸附座637，其中，上述连接座636设置于驱动电机634下方，并固定在转移支座633的侧壁上，连接座636内设有沿竖直方向上下贯通的插孔，插孔内径不小于驱动轴635的外径，驱动轴635由上而下穿过插孔；上述吸附座637连接于连接座636的底部，吸附座637内部设有吸附腔体，吸附腔体的上部与插孔连通，驱动轴635由上而下插入吸附腔体内，且通过密封圈密封与吸附座637的连接处；上述吸附座637的侧壁上开设有气孔639，气孔639处连接有真空接头，以便与外部真空发生装置连接。The adsorption component includes a connecting seat 636 and an adsorption seat 637, wherein the connecting seat 636 is arranged below the driving motor 634 and fixed on the side wall of the transfer support 633, and a plug hole is provided in the connecting seat 636 which passes through the vertical direction, and the inner diameter of the plug hole is not less than the outer diameter of the driving shaft 635, and the driving shaft 635 passes through the plug hole from top to bottom; the adsorption seat 637 is connected to the bottom of the connecting seat 636, and an adsorption cavity is provided inside the adsorption seat 637, and the upper part of the adsorption cavity is connected to the plug hole, and the driving shaft 635 is inserted into the adsorption cavity from top to bottom, and the connection with the adsorption seat 637 is sealed by a sealing ring; an air hole 639 is opened on the side wall of the adsorption seat 637, and a vacuum joint is connected to the air hole 639 so as to be connected to an external vacuum generating device.
驱动轴635的底部设有探针安装座6310；所述探针安装座6310的中部设有安装孔，探针安装座6310的侧壁上开设有分割槽，所述分割槽从探针安装座6310的外壁延伸至安装孔，将探针安装座6310沿圆周方向分隔为至少两块安装夹块，探针6311插入安装孔内后，通过从外部套上卡环，卡环向内的压力使按照夹块向内夹紧探针6311。A probe mounting seat 6310 is provided at the bottom of the driving shaft 635; a mounting hole is provided in the middle of the probe mounting seat 6310, and a dividing groove is opened on the side wall of the probe mounting seat 6310, and the dividing groove extends from the outer wall of the probe mounting seat 6310 to the mounting hole, dividing the probe mounting seat 6310 into at least two mounting clamping blocks along the circumferential direction. After the probe 6311 is inserted into the mounting hole, a retaining ring is put on from the outside, and the inward pressure of the retaining ring causes the probe 6311 to be clamped inwardly according to the clamping block.
还包括检测机构9，所述检测机构9包括至少两组，至少两组检测机构9对应设置于转移平台4的下方；上述检测机构9包括检测支座91、检测滑座92、CCD93及光源94，其中，上述检测支座91连接于机台1的底面，且其侧壁竖直向下延伸；上述检测滑座92沿竖直方向可滑动地连接在检测支座91的侧壁上，经动力部件驱动而升降运动；上述CCD93设置于检测滑座92上，且镜头方向朝上设置；上述光源94包括至少两个，至少两个光源94设置于检测支座91的侧壁上，并位于CCD93的上部侧方，光源94由下而上发出竖直和/或倾斜光源。It also includes a detection mechanism 9, which includes at least two groups, and at least two groups of detection mechanisms 9 are correspondingly arranged below the transfer platform 4; the above-mentioned detection mechanism 9 includes a detection support 91, a detection slide 92, a CCD93 and a light source 94, wherein the above-mentioned detection support 91 is connected to the bottom surface of the machine table 1, and its side wall extends vertically downward; the above-mentioned detection slide 92 is slidably connected to the side wall of the detection support 91 along the vertical direction, and is driven by a power component to move up and down; the above-mentioned CCD93 is arranged on the detection slide 92, and the lens direction is arranged upward; the above-mentioned light source 94 includes at least two, at least two light sources 94 are arranged on the side wall of the detection support 91, and are located on the upper side of the CCD93, and the light source 94 emits vertical and/or inclined light from bottom to top.
一种晶粒转移设备的晶粒转移工艺，包括如下工艺步骤：A grain transfer process of a grain transfer device includes the following process steps:
S1、载板装载：装载有晶粒的蓝膜经中部开有圆形通孔的载板夹装，使得承载晶粒的蓝膜部分位于载板的圆形通孔位置，该载板逐个插入出料储存部分的储料箱内；S1. Carrier loading: The blue film loaded with crystal grains is clamped by a carrier with a circular through hole in the middle, so that the blue film portion carrying the crystal grains is located at the circular through hole position of the carrier, and the carrier is inserted into the storage box of the discharge storage part one by one;
S2、储料箱装载：步骤S1中的储料箱内装载满载板后，储料箱整体滑入出料储存部分的储料支架的储存空间内；S2, loading the material storage box: after the material storage box in step S1 is fully loaded with plates, the material storage box as a whole slides into the storage space of the material storage bracket of the material discharging storage part;
S3、载板出料：步骤S2中储存空间装载有储料箱后，出料储存部分的储料直线模组驱动储料支架整体升降运动，使得待出料的储料箱水平对准出料搬移机构，出料搬移机构的出料直线模组驱动其搬移组件靠近储料箱，搬移组件水平夹紧储料箱内的载板后，带动载板水平滑出储料箱；储料箱对应搬移组件高度位置的载板取出后，储料直线模组驱动储料支架升降运动，使储料箱另一层载板对准搬移组件；S3, discharging of carrier plates: after the storage space is loaded with a storage box in step S2, the storage linear module of the discharging storage part drives the storage bracket to move up and down as a whole, so that the storage box to be discharged is horizontally aligned with the discharging moving mechanism, and the discharging linear module of the discharging moving mechanism drives its moving component to approach the storage box, and after the moving component horizontally clamps the carrier plate in the storage box, it drives the carrier plate to slide horizontally out of the storage box; after the carrier plate at the height position of the storage box corresponding to the moving component is taken out, the storage linear module drives the storage bracket to move up and down, so that the carrier plate of another layer of the storage box is aligned with the moving component;
S4、载板出料搬移：步骤S3中的搬移组件从储料箱取出载板后，出料直线模组驱动搬移组件移动至载板承载机构的承载组件一侧，并将所夹持的载板旋转90°后，将载板水平插入承载组件的承载空间内；承载组件内载板上的晶粒完成转移后，搬移组件将空载板从外侧夹紧后拔出承载空间并搬移下载板；S4, unloading and moving the carrier: after the moving assembly in step S3 takes out the carrier from the storage box, the unloading linear module drives the moving assembly to move to the side of the carrier assembly of the carrier bearing mechanism, and after rotating the clamped carrier by 90°, the carrier is horizontally inserted into the bearing space of the bearing assembly; after the grains on the carrier in the bearing assembly are transferred, the moving assembly clamps the empty carrier from the outside, pulls it out of the bearing space, and moves the unloaded carrier;
S5、载板循环出料：重复上述步骤S1至S4，在出料空间内完成载板的循环装载、出料、搬移及下料；S5, cyclic discharging of carrier plates: repeating the above steps S1 to S4 to complete the cyclic loading, discharging, moving and unloading of carrier plates in the discharging space;
S6、载板检测及调整：步骤S4或S5中载板插入承载空间内后，设置于转移平台下方的检测机构向上拍摄检测载板位置，并将信息传输至工控机，工控机控制承载组件调整载板位置或角度；S6, carrier plate detection and adjustment: after the carrier plate is inserted into the carrying space in step S4 or S5, the detection mechanism disposed below the transfer platform takes an upward photograph to detect the position of the carrier plate, and transmits the information to the industrial computer, which controls the carrying assembly to adjust the position or angle of the carrier plate;
S7、空板上料：待承载晶粒的空玻璃载板经载板搬臂搬移并放置于转移平台上，转移平台限位卡紧空玻璃载板后利用真空负压力向下吸附固定空玻璃载板；固定后的空玻璃载板经转移平台直线驱动滑入至承载组件下方，使其与步骤S6中承载空间内的载板上下对应；S7, empty plate loading: the empty glass carrier to be loaded with crystal grains is moved by the carrier moving arm and placed on the transfer platform. The transfer platform limits and clamps the empty glass carrier, and then uses vacuum negative pressure to absorb and fix the empty glass carrier downward; the fixed empty glass carrier is linearly driven by the transfer platform to slide under the load-bearing assembly, so that it corresponds to the carrier in the load-bearing space in step S6;
S8、晶粒转移组件位置调整：步骤S6中的承载组件装载好待转移晶粒的载板，且步骤S7中的空玻璃载板对应移动至待转移晶粒的载板下方后，晶粒转移机构的晶粒转移组件从上部的安装工位穿过承载组件的通孔下降至工作工位；S8, position adjustment of the grain transfer assembly: after the bearing assembly in step S6 is loaded with the carrier plate of the grain to be transferred, and the empty glass carrier plate in step S7 is correspondingly moved below the carrier plate of the grain to be transferred, the grain transfer assembly of the grain transfer mechanism is lowered from the upper installation station through the through hole of the bearing assembly to the working station;
S9、晶粒点位置转移：步骤S8中晶粒转移组件的位置下降调整至工作工位处后，晶粒转移组件的探帽底部吸附平面抵住承载空间载板上固定晶粒的载体蓝膜后，通过探帽吸附平面上布设的辅助吸孔向上吸附，以边局部固定蓝膜；探针的锥形下探部向下穿过探帽中部的探孔将局部固定蓝膜中部位置的晶粒下顶至下方的空玻璃载板上；S9, transfer of the position of the grain point: after the position of the grain transfer assembly in step S8 is lowered and adjusted to the working position, the bottom adsorption plane of the probe cap of the grain transfer assembly abuts against the carrier blue film of the grain fixed on the carrier plate of the bearing space, and then adsorbs upward through the auxiliary suction holes arranged on the adsorption plane of the probe cap to partially fix the blue film; the conical downward probing part of the probe passes downward through the probe hole in the middle of the probe cap to push the grain in the middle of the locally fixed blue film down to the empty glass carrier plate below;
S10、晶粒平面位置转移：步骤S9中完成单点位置的晶粒转移后，承载组件及转移平台同步直线运动，使得探针在竖直方向上对准下一个待转移晶粒的点后，探针及探帽重复步骤S9，直至蓝膜表面的晶粒完全转移至下方的空玻璃载板上；S10, transfer of the crystal plane position: after the crystal transfer at the single point position is completed in step S9, the bearing assembly and the transfer platform move linearly synchronously, so that the probe is aligned with the point of the next crystal to be transferred in the vertical direction, and the probe and the probe cap repeat step S9 until the crystal on the surface of the blue film is completely transferred to the empty glass carrier below;
S11、载板回料：步骤S9中的空玻璃载板装满晶粒后，转移平台从承载组件下方向外直线滑出，转移平台上的真空负压停止吸附载板，载板经载板顶块向上顶起后被载板搬臂向上吸附固定后，搬移至回料搬臂处，回料搬臂的搬移组件夹紧载板后，经回料直线模组驱动至回料储存部分的储料机构处，回料搬臂的搬移组件将装载晶粒的载板水平推入储料机构的储料箱内；S11, carrier return: after the empty glass carrier in step S9 is filled with crystal grains, the transfer platform slides outward from the bottom of the bearing assembly in a straight line, and the vacuum negative pressure on the transfer platform stops adsorbing the carrier. After the carrier is lifted up by the carrier top block and adsorbed and fixed upward by the carrier moving arm, it is moved to the return material moving arm. After the moving assembly of the return material moving arm clamps the carrier, it is driven to the storage mechanism of the return material storage part through the return material linear module, and the moving assembly of the return material moving arm pushes the carrier loaded with crystal grains horizontally into the storage box of the storage mechanism;
S12、晶粒循环转移及回料：重复步骤S9至S11，持续不断地将晶粒转移至空玻璃载板上，并将装载晶粒的玻璃载板回料搬移至储料箱内，同时储料箱沿竖直方向升降运动，以使其不同高度层插入装满载板。S12, crystal grain circular transfer and return: repeat steps S9 to S11, continuously transfer crystal grains to empty glass carriers, and return the glass carriers loaded with crystal grains to the storage box, while the storage box is lifted and lowered in the vertical direction so that the loaded carriers are inserted into different height layers.
进一步，本发明的储料机构采用双极多层储存结构，极大地提升晶粒存储量，采用滑入式取放方式，且具备限位导向及阻挡定位功能，有效提升载板取放效率以及取放过程中位置准确度的适用于自动化生产。本发明储料机构适用于晶粒转移过程中载板的存储，可同时用于存放晶粒转移前的蓝膜载板及晶粒转移后的玻璃载板；同时，本发明所采用的技术方案也同样适用于自动化生产过程中板状物料或载具的存储。储料机构通过储料直线模组驱动储料组件沿竖直方向升降运动，以便协同载板取放动作，将储料组件升降至不同高度，以便于其内不同高度的储板空间取放载板。储料机构的储料组件包括储料支架和储料箱，储料支架用于储存多个储料箱，储料箱用于存储多块载板，载板用于装载多颗晶粒。储料机构的储料支架以顶部及一侧为开放面的储料架体作为承载结构，通过在储料架体内沿竖直方向间隔水平设置多块储料隔板，储料隔板将储料架体内部空间分隔为多个储存空间；储存空间的两侧设有横截面为L状结构的限位导条，限位导条的顶部水平面与储料隔板之间形成滑入空间，储料箱在储料隔板上自动取放时通过滑入空间从两侧及上方进行导向限位，从而保证取放过程中位置准确度；同时在滑入空间的端部还设有阻挡座，阻挡座的侧壁上对应滑入空间设有内凹的阻挡槽，储料箱滑入完成后，经阻挡槽阻挡卡紧，从而实现储料箱的自动取放及导向限位固定。储料机构的储料箱以上下间隔设置的储料上支板及储料下支板为载体，两者之间竖直连接有储料侧板，储料侧板与储料上支板及储料下支板的侧边之间留有间距，以便储料上支板及储料下支板两侧空闲位置插入上述滑入空间；储料侧板的内侧壁上沿竖直方向间隔开设有多条内凹的安装条槽，从而使储料箱内形成沿竖直方向多层储板结构，以便同时存储多块载板；同时，储料上支板及处理下支板上可拆卸地插设有限位柱，通过限位柱对储料箱内的载板进行限位。Furthermore, the material storage mechanism of the present invention adopts a bipolar multi-layer storage structure, which greatly improves the storage capacity of grains, adopts a sliding-in pick-and-place method, and has limit guide and blocking positioning functions, which effectively improves the efficiency of carrier pick-and-place and the position accuracy during the pick-and-place process, and is suitable for automated production. The material storage mechanism of the present invention is suitable for the storage of carriers during the grain transfer process, and can be used to store blue film carriers before grain transfer and glass carriers after grain transfer at the same time; at the same time, the technical solution adopted by the present invention is also suitable for the storage of plate-like materials or carriers during automated production. The material storage mechanism drives the material storage component to move up and down in the vertical direction through the material storage linear module, so as to coordinate the pick-and-place action of the carrier, and lift the material storage component to different heights, so as to facilitate the pick-and-place of the carrier in the storage board space at different heights. The material storage component of the material storage mechanism includes a material storage bracket and a material storage box, the material storage bracket is used to store multiple material storage boxes, the material storage box is used to store multiple carriers, and the carrier is used to load multiple grains. The storage bracket of the storage mechanism uses a storage rack body with an open top and one side as a bearing structure, and a plurality of storage partitions are horizontally arranged at intervals in the vertical direction in the storage rack body, so that the storage partitions divide the internal space of the storage rack body into a plurality of storage spaces; limiting guide strips with an L-shaped cross-section are arranged on both sides of the storage space, and a sliding-in space is formed between the top horizontal surface of the limiting guide strip and the storage partitions, and the storage box is guided and limited from both sides and above through the sliding-in space when automatically taking and placing the storage box on the storage partition, thereby ensuring the position accuracy during the taking and placing process; at the same time, a blocking seat is also provided at the end of the sliding-in space, and a concave blocking groove is provided on the side wall of the blocking seat corresponding to the sliding-in space. After the storage box slides in, it is blocked and clamped by the blocking groove, thereby realizing automatic taking and placing and guided limiting fixation of the storage box. The storage box of the storage mechanism uses an upper storage support plate and a lower storage support plate spaced apart in the upper and lower directions as carriers, with storage side plates vertically connected therebetween, and a spacing is left between the storage side plates and the side edges of the upper storage support plate and the lower storage support plate, so that the vacant positions on both sides of the upper storage support plate and the lower storage support plate can be inserted into the above-mentioned sliding space; a plurality of concave installation grooves are provided on the inner side walls of the storage side plates at intervals in the vertical direction, thereby forming a multi-layer storage plate structure in the vertical direction in the storage box, so as to store multiple carrier plates at the same time; at the same time, limit columns are detachably inserted on the upper storage support plate and the processing lower support plate, and the carrier plates in the storage box are limited by the limit columns.
本发明的出料搬移组件或回料搬臂同时集成有整体直线运动、自动旋转及直线驱动夹板功能，且具备载板搬移过程中的承载导向及吸附固定功能，有效地提升载板取放转移效率，且保证载板转移过程中位置稳定性和准确度。搬移组件适用于晶粒转移过程中对装载晶粒的载板的自动取放搬移中转，同时也适用于自动化生产过程中对于板状物料或载具的自动取放搬移。搬移组件以直线模组作为整体直线驱动动力输出部分，通过直线模组驱动搬移组件直线运动，完成搬移组件在不同工位之间的来回转移。搬移组件以搬移底座作为承载结构，通过搬移旋转气缸驱动上方的搬移支座旋转运动，实现了夹取后的载板的位置或角度变化控制。同时，在搬移支座的两侧设有竖直向上延伸的载板支撑座，两载板支撑座平行间隔设置；两载板支撑座的顶部分别设有横截面为L状结构的支撑台阶面，支撑台阶面靠近搬移支座内侧为开放面，支撑台阶面上水平设有载板限位板，载板限位板与支撑台阶面之间形成内侧及两端开放的滑入槽；滑入槽的一端内壁设有向槽外方向延伸的过度斜面，取放载板时，载板经该过度斜面水平滑入或滑出滑入槽，经滑入槽水平支撑以保证取放过程中位置稳定性，经滑入槽从两侧及上下导向限位保证载板位置准确度；同时，在滑入槽的端部通过载板挡块进行阻挡限位，避免过度滑出；载板滑入滑入槽后，通过滑入槽底面间隔设置的多个真空吸孔，利用真空负压向下吸附固定载板，避免载板转移过程中在滑入槽内自由滑动，从而有效的保证了载板在搬移过程中位置稳定性。搬移组件在两块载板支撑座之间的空间设有夹板支座及搬移滑轨，夹板支座的高度低于滑入槽，以避免载板滑入过程中的运动干涉，夹板支座用于安装夹板电机，搬移滑轨上可滑动地设置有夹板滑座，夹板滑座上设有夹板气缸及夹板爪；同时夹板滑座通过夹板传动带与夹板电机的输出端连接，夹板电机通过驱动夹板传动带带动夹板滑座直线滑动，以便使设置于夹板气缸上的夹板爪伸入或伸出工站内，靠近夹板储存位置或用板承载位置，实现载板自动夹持。The material discharging and moving assembly or the material returning moving arm of the present invention integrates overall linear motion, automatic rotation and linear drive clamping functions, and has the load-bearing guiding and adsorption fixing functions during the carrier moving process, which effectively improves the efficiency of the carrier pick-up and placement transfer, and ensures the position stability and accuracy during the carrier transfer process. The moving assembly is suitable for the automatic pick-up and placement transfer of the carrier loaded with grains during the grain transfer process, and is also suitable for the automatic pick-up and placement transfer of plate-like materials or carriers during the automated production process. The moving assembly uses a linear module as the overall linear drive power output part, and drives the moving assembly to move linearly through the linear module to complete the back-and-forth transfer of the moving assembly between different workstations. The moving assembly uses a moving base as the load-bearing structure, and drives the upper moving support to rotate through the moving rotary cylinder, thereby realizing the position or angle change control of the carrier after clamping. At the same time, a carrier support seat extending vertically upward is provided on both sides of the moving support, and the two carrier support seats are arranged in parallel and spaced apart; a supporting step surface with a L-shaped cross-section is respectively provided on the top of the two carrier support seats, and the supporting step surface is an open surface close to the inner side of the moving support, and a carrier limit plate is horizontally provided on the supporting step surface, and a sliding groove open on the inner side and both ends is formed between the carrier limit plate and the supporting step surface; a transition inclined surface extending toward the outside of the groove is provided on the inner wall of one end of the sliding groove, and when the carrier is taken and placed, the carrier slides horizontally through the transition inclined surface The carrier plate can slide into or out of the sliding slot, and is horizontally supported by the sliding slot to ensure the position stability during the picking and placing process. The sliding slot is guided and limited from both sides and up and down to ensure the accuracy of the carrier plate position. At the same time, the carrier plate stopper is used to block and limit the end of the sliding slot to avoid excessive sliding out. After the carrier plate slides into the sliding slot, a plurality of vacuum suction holes arranged at intervals on the bottom surface of the sliding slot are used to absorb and fix the carrier plate downward by using vacuum negative pressure, so as to avoid free sliding of the carrier plate in the sliding slot during the transfer process, thereby effectively ensuring the position stability of the carrier plate during the moving process. The moving assembly is provided with a plywood support and a moving slide rail in the space between the two carrier support seats. The height of the plywood support is lower than the sliding groove to avoid movement interference during the sliding of the carrier. The plywood support is used to install the plywood motor. A plywood slide is slidably provided on the moving slide rail, and a plywood cylinder and a plywood claw are provided on the plywood slide. At the same time, the plywood slide is connected to the output end of the plywood motor through a plywood transmission belt, and the plywood motor drives the plywood slide to slide linearly by driving the plywood transmission belt, so that the plywood claw provided on the plywood cylinder is extended into or out of the work station, close to the plywood storage position or the board carrying position, to realize automatic clamping of the carrier.
本发明的晶粒转移机构及载板承载机构具备位置及角度调整功能，实现晶粒转移前载板位置或角度调整以及转移过程中位置移动，采用一侧开口的水平腔体式承载空间用于支撑承载载板，并实现对载板上下及侧方位置限位，保证载板位置稳定性，同时采用柔性连接方式，实现柔性接触，有效减少载板损坏，采用锥形下探部与探孔相配合，利用探孔内径大于锥形下探部外径，且小于探针外径设计，通过探孔实现探针下探极限位置限定，同时通过探帽形成吸附腔体，并在探针周围布设辅助吸孔，通过探帽接触蓝膜后利用辅助吸孔形成的真空负压向上吸住蓝膜晶，防止下探部位周围蓝膜形变情况，有效保证晶粒位置稳定性避免掉落。The crystal grain transfer mechanism and carrier plate bearing mechanism of the present invention have position and angle adjustment functions, which can realize the position or angle adjustment of the carrier plate before crystal grain transfer and the position movement during the transfer process. A horizontal cavity-type bearing space with an opening on one side is used to support the carrier plate, and realize the upper and lower and lateral position limitation of the carrier plate to ensure the position stability of the carrier plate. At the same time, a flexible connection method is adopted to realize flexible contact, which effectively reduces the damage of the carrier plate. A conical downward probe part is matched with a probe hole, and the inner diameter of the probe hole is larger than the outer diameter of the conical downward probe part and smaller than the outer diameter of the probe. The probe hole is used to realize the limit position of the probe downward probe. At the same time, an adsorption cavity is formed by a probe cap, and auxiliary suction holes are arranged around the probe. After the probe cap contacts the blue film, the vacuum negative pressure formed by the auxiliary suction holes is used to suck the blue film crystal upward to prevent the blue film around the downward probe part from deforming, effectively ensuring the position stability of the crystal grain and preventing it from falling.
本发明的晶粒转移机构及载板承载机构用于执行晶粒转移工艺，设置于转移平台上方，转移平台上水平承载有待接收晶粒的玻璃载板；载板承载机构用于水平承载待转移出晶粒的蓝膜载板，并将蓝膜载板水平支撑后以柔性接触方式靠近下方的玻璃载板；晶粒转移机构竖直设置，并对应延伸至载板承载机构内，晶粒转移机构内的探针沿竖直方向运动将载板承载机构内承载的蓝膜上的晶粒顶推，使晶粒转移至玻璃载板上。The grain transfer mechanism and carrier plate bearing mechanism of the present invention are used to execute the grain transfer process, and are arranged above the transfer platform. The transfer platform horizontally bears a glass carrier plate to receive the grains; the carrier plate bearing mechanism is used to horizontally bear a blue film carrier plate from which the grains are to be transferred out, and after horizontally supporting the blue film carrier plate, it is brought close to the glass carrier plate below in a flexible contact manner; the grain transfer mechanism is vertically arranged and correspondingly extends into the carrier plate bearing mechanism, and the probe in the grain transfer mechanism moves in the vertical direction to push the grains on the blue film carried in the carrier plate bearing mechanism, so that the grains are transferred to the glass carrier plate.
针对晶粒转移工艺中待转移晶粒的载板承载及调整，本发明设计了载板承载机构，载板承载机构根据晶粒转移设备的具体工站设置包括多组承载组件，多组承载组件对应晶粒转移机构设置，以便在同一台设备上完成多工站同步晶粒转移，多组承载组件分别通过水平面内的纵向驱动部件及横向驱动部件驱动而直线运动，完成在水平面内位置的调整。载板承载机构的承载组件以水平设置的承载支座作为承载部件，承载支座的中部开设有圆形的通孔，通孔上下贯通承载支座，以便晶粒转移机构进入该通孔顶推转移晶粒。本发明利用晶粒转移工艺的顶推要求而设置通孔，同时利用通孔结构，在通孔的上部内侧设有向下凹陷的环状台阶面，在该环状台阶面内可滑动地嵌设有圆筒状的承载旋转座，承载旋转座的顶部设有水平向外延伸的支撑环面，支撑环面可活动的放置于环状台阶面上，从而同时承载旋转座的实现了倒挂设置以及旋转需求；承载旋转座延伸至承载支座下方的外壁上套设有同步轮，承载旋转座通过设置于承载支座一侧的承载旋转电机驱动同步带带动其上的同步轮而实现旋转运动，并带动水平设置于其底部的承载支板旋转运动，以实现对载板角度旋转控制，保证晶粒转移准确度。承载支板的下方通过竖直设置的多根弹簧柱连接有承载座，利用弹簧柱的弹性特性实现承载支板与承载座沿竖直方向上的柔性连接，当承载座竖直靠近下方放置玻璃载板的转移平台时，利用该种柔性特性有效避免了上下两载板相互接触时表面划伤或损坏。特别地，本发明在承载支板下部沿侧边方向设有向下凸起的支撑框体，该支撑框体的一侧为开放结构，同时在支撑框体的底面水平设有承载板，承载板与支撑框体之间形成水平设置且一侧为开放面的承载空间，待转移晶粒的载板水平插入承载空间内，在完成对载板水平承载的同时，通过该种单侧开放式的承载空间实现了载板插入过程中在两侧方向上的导向限位以及端部的阻挡定位，使得载板中部的蓝膜部分准确地对准通孔，以便晶粒转移机构穿过通孔向下抵推蓝膜上承载的晶粒使其转移至玻璃载板上。同时，本发明在承载空间开放面出开设有取料槽口，取料槽口为U型槽口结构，沿着承载空间开放侧向内凹陷，特别之处在于，取料槽口由外而内上下两内侧壁分别为倾斜平面，呈喇叭口结构，以便载板滑入，同时对应地在载板的尾侧部采用与取料槽口上下两内侧壁采用相同倾斜度的倾斜结构，当载板滑入承载空间时，载板倾斜结构逐步与取料槽口出卡紧，从而实现了对载板的卡紧固定，避免其位置偏移；同时取料槽口的设置形成避空空间，便于载板取放过程中外部的夹爪夹紧载板。In view of the carrying and adjustment of the carrier plate of the grains to be transferred in the grain transfer process, the present invention designs a carrier plate carrying mechanism. The carrier plate carrying mechanism includes multiple groups of carrying components according to the specific station settings of the grain transfer equipment. The multiple groups of carrying components are set corresponding to the grain transfer mechanism, so as to complete the synchronous grain transfer of multiple stations on the same equipment. The multiple groups of carrying components are driven by the longitudinal driving components and the transverse driving components in the horizontal plane to move linearly, so as to complete the adjustment of the position in the horizontal plane. The carrying component of the carrier plate carrying mechanism uses a horizontally arranged carrying support as a carrying component. A circular through hole is opened in the middle of the carrying support, and the through hole passes through the carrying support up and down, so that the grain transfer mechanism enters the through hole to push and transfer the grain. The present invention utilizes the pushing requirement of the grain transfer process to set a through hole, and utilizes the through hole structure at the same time, a downwardly recessed annular step surface is provided on the inner side of the upper part of the through hole, a cylindrical bearing rotating seat is slidably embedded in the annular step surface, a support annular surface extending horizontally outward is provided on the top of the bearing rotating seat, and the support annular surface is movably placed on the annular step surface, thereby realizing the inverted setting and rotation requirements of the bearing rotating seat at the same time; a synchronous wheel is sleeved on the outer wall of the bearing rotating seat extending to the bottom of the bearing support, and the bearing rotating seat realizes rotational movement by driving the synchronous wheel thereon through a bearing rotating motor arranged on one side of the bearing support, and drives the bearing support plate horizontally arranged at the bottom thereof to rotate, so as to realize the rotation control of the carrier plate angle and ensure the accuracy of grain transfer. The lower part of the bearing support plate is connected to a bearing seat through a plurality of vertically arranged spring columns, and the elastic characteristics of the spring columns are used to realize the flexible connection between the bearing support plate and the bearing seat in the vertical direction. When the bearing seat is vertically close to the transfer platform on which the glass carrier is placed below, the flexible characteristics are used to effectively avoid the surface scratches or damages when the upper and lower carriers contact each other. In particular, the present invention is provided with a downwardly protruding support frame along the side direction at the lower part of the bearing support plate, one side of the support frame is an open structure, and at the same time, a bearing plate is horizontally arranged on the bottom surface of the support frame, and a bearing space with a horizontal arrangement and an open surface on one side is formed between the bearing plate and the support frame. The carrier plate to be transferred is horizontally inserted into the bearing space. While completing the horizontal bearing of the carrier plate, the guiding limit in the two-side directions and the blocking positioning of the end are realized during the insertion of the carrier plate through the single-sided open bearing space, so that the blue film part in the middle of the carrier plate is accurately aligned with the through hole, so that the grain transfer mechanism passes through the through hole and pushes the grain carried on the blue film downward to transfer it to the glass carrier plate. At the same time, the present invention provides a material collection slot on the open surface of the bearing space, and the material collection slot is a U-shaped slot structure, which is recessed inward along the open side of the bearing space. The special feature is that the upper and lower inner walls of the material collection slot from the outside to the inside are inclined planes respectively, forming a trumpet-mouth structure, so that the carrier plate can slide in, and at the same time, an inclined structure with the same inclination as the upper and lower inner walls of the material collection slot is adopted on the rear side of the carrier plate. When the carrier plate slides into the bearing space, the inclined structure of the carrier plate is gradually clamped with the material collection slot, thereby realizing the clamping and fixation of the carrier plate and avoiding its position displacement; at the same time, the setting of the material collection slot forms an air avoidance space, which is convenient for the external clamping claws to clamp the carrier plate during the process of taking and placing the carrier plate.
针对晶粒转移执行工艺要求，本发明设计了晶粒转移机构，晶粒转移机构通过转移升降电机利用丝杆及丝杆帽驱动晶粒转移组件升降运动，使晶粒转移组件下降并靠近载板承载机构，晶粒转移组件以竖直设置的转移支座作为承载结构，在转移支板的侧壁上设有驱动电机，利用驱动电机驱动驱动轴升降运动，驱动轴向下穿过连接座插入吸附座内，其中连接座固定在转移支板的侧壁上，吸附座内部为空腔结构，其侧壁上设有气孔，以便连接外部的真空发生装载，吸附座底部为开放面，并可拆卸地连接有探针帽，驱动轴穿过吸附座伸入至探针帽内。特别地，本发明的吸附座底部设有探针安装座，探针安装座中部设有安装孔，探针安装座的侧壁上开设有分割槽，分割槽从探针安装座的外壁延伸至安装孔，将探针安装座沿圆周方向分割为至少两块安装夹块，探针插入安装孔内后，通过从外部套上卡环，卡环向内的压力使按照夹块向内夹紧探针，从而实现了探针的快速安装。另外，探帽的底面为平面结构的吸附平面，吸附平面的中部设有上下贯通的探孔；本发明的探针设置于探帽内部，并通过动力机构驱动而沿竖直方向升降运动。特别地，本发明的探针下部采用锥形结构，锥形下探部的外径小于探孔，以便穿过探孔抵推至下方蓝膜上的晶粒上，同时探孔的内径不大于探针的外径，探针下探过程中利用探孔对探针位置进行限定，避免其过度下探而刺穿蓝膜或损坏晶粒及玻璃载板。同时，在探孔的周围布设有辅助吸孔，利用探帽内部吸附腔体形成负压空间，通过辅助吸孔向上吸附固定蓝膜从而避免了探针下探过程中探针抵推晶粒而导致蓝膜发生形变，从而影响周围其他晶粒的位置或使其掉落的情况。In view of the process requirements for grain transfer, the present invention designs a grain transfer mechanism, which drives the grain transfer assembly to move up and down through a transfer lifting motor using a lead screw and a lead screw cap, so that the grain transfer assembly descends and approaches the carrier plate bearing mechanism, and the grain transfer assembly uses a vertically arranged transfer support as a bearing structure, and a driving motor is provided on the side wall of the transfer support plate. The driving motor is used to drive the driving shaft to move up and down, and the driving shaft passes downward through the connecting seat and is inserted into the adsorption seat, wherein the connecting seat is fixed on the side wall of the transfer support plate, and the interior of the adsorption seat is a cavity structure, and air holes are provided on the side wall thereof for connecting to an external vacuum generator for loading, and the bottom of the adsorption seat is an open surface, and is detachably connected to a probe cap, and the driving shaft passes through the adsorption seat and extends into the probe cap. In particular, the bottom of the adsorption seat of the present invention is provided with a probe mounting seat, the middle of the probe mounting seat is provided with a mounting hole, and the side wall of the probe mounting seat is provided with a dividing groove, which extends from the outer wall of the probe mounting seat to the mounting hole, and divides the probe mounting seat into at least two mounting clamping blocks along the circumferential direction. After the probe is inserted into the mounting hole, a clamping ring is put on from the outside, and the inward pressure of the clamping ring causes the probe to be clamped inward according to the clamping block, thereby realizing the rapid installation of the probe. In addition, the bottom surface of the probe cap is an adsorption plane of a planar structure, and a probe hole is provided in the middle of the adsorption plane that passes through the top and bottom; the probe of the present invention is arranged inside the probe cap, and is driven by a power mechanism to move up and down in the vertical direction. In particular, the lower part of the probe of the present invention adopts a conical structure, and the outer diameter of the conical lower probe part is smaller than the probe hole, so that it can pass through the probe hole and push onto the grain on the blue film below. At the same time, the inner diameter of the probe hole is not larger than the outer diameter of the probe. The probe position is limited by the probe hole during the probe downward process to prevent it from excessively probing and piercing the blue film or damaging the grain and the glass carrier. At the same time, auxiliary suction holes are arranged around the probe hole, and the adsorption cavity inside the probe cap is used to form a negative pressure space. The blue film is adsorbed and fixed upwards through the auxiliary suction holes, thereby avoiding the situation in which the probe pushes against the grains during the downward probing process and causes the blue film to deform, thereby affecting the position of other surrounding grains or causing them to fall.
本发明的实施例只是介绍其具体实施方式，不在于限制其保护范围。本行业的技术人员在本实施例的启发下可以作出某些修改，故凡依照本发明专利范围所做的等效变化或修饰，均属于本发明专利权利要求范围内。The embodiments of the present invention are only to introduce its specific implementation methods and are not intended to limit its protection scope. The technicians in this industry can make some modifications inspired by this embodiment, so any equivalent changes or modifications made according to the scope of the patent of the present invention are within the scope of the patent claims of the present invention.
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