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CN115415886B - Method for calculating polishing path of optical surface of inner wall - Google Patents

Method for calculating polishing path of optical surface of inner wall Download PDF

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CN115415886B
CN115415886B CN202211056314.4A CN202211056314A CN115415886B CN 115415886 B CN115415886 B CN 115415886B CN 202211056314 A CN202211056314 A CN 202211056314A CN 115415886 B CN115415886 B CN 115415886B
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polishing path
path point
coordinate system
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CN115415886A (en
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李泽骁
张效栋
张昊
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Tianjin University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/10Geometric CAD
    • G06F30/17Mechanical parametric or variational design
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/20Design optimisation, verification or simulation

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

本发明涉及机械加工领域,尤其涉及一种内壁光学表面抛光路径计算方法,包括:利用待抛光工件坐标系建立与待抛光工件坐标系平行的机械臂坐标系;利用所述机械臂坐标系获取抛光路径基础矢量;利用所述抛光路径基础矢量得到内壁光学表面抛光路径,可对分布在侧壁的内壁光学表面进行抛光,且抛光方法能够实现表面加工纹理去除的效果,提升表面质量,解决内壁光学表面加工纹理去除中的空间小,位置灵活,且需要通过人工手抛进行纹理去除的费时费力,工艺不可控的难题。

The invention relates to the field of mechanical processing, and in particular to a method for calculating the polishing path of an inner wall optical surface, which includes: using the coordinate system of the workpiece to be polished to establish a robot arm coordinate system parallel to the coordinate system of the workpiece to be polished; using the robot arm coordinate system to obtain the polishing Path basic vector; using the polishing path basic vector to obtain the inner wall optical surface polishing path, the inner wall optical surface distributed on the side wall can be polished, and the polishing method can achieve the effect of surface processing texture removal, improve surface quality, and solve the inner wall optical surface problem. The space required for surface processing texture removal is small, the location is flexible, and the texture removal requires manual hand polishing, which is time-consuming and labor-intensive, and the process is uncontrollable.

Description

一种内壁光学表面抛光路径计算方法A method for calculating the polishing path of inner wall optical surfaces

技术领域Technical field

本发明涉及机械加工领域,具体涉及一种内壁光学表面抛光路径计算方法。The invention relates to the field of mechanical processing, and in particular to a method for calculating the polishing path of an inner wall optical surface.

背景技术Background technique

精密和超精密抛光是一种有效的加工切削纹理去除的后处理方法,广泛应用于光学表面以及具有超高表面质量的加工后处理。传统方法只适合针对开放空间的端面表面进行抛光加工,对于内壁光学表面这样具有空间狭小限制和光学表面朝向灵活的加工纹理抛光去除无法适用。以往的抛光方法,主要用于去除在端面基底的光学表面的加工纹理。而不是用于内壁光学表面的加工去除。内壁光学表面加工纹理的去除面临着表面朝向灵活不定的特性,因此需要一种切实可行的内壁抛光路径计算方法。Precision and ultra-precision polishing is an effective post-processing method for machining cutting texture removal and is widely used in optical surfaces and post-machining treatments with ultra-high surface quality. The traditional method is only suitable for polishing the end surface of the open space. It is not suitable for polishing and removing the processing texture of the inner wall optical surface, which has narrow space restrictions and flexible optical surface orientation. Previous polishing methods were mainly used to remove the processing texture on the optical surface of the end-face substrate. It is not used for processing and removing the optical surface of the inner wall. The removal of optical surface processing texture of the inner wall faces the flexible and uncertain characteristics of the surface orientation, so a practical method for calculating the inner wall polishing path is needed.

发明内容Contents of the invention

针对现有技术的不足,本发明提供了一种内壁光学表面抛光路径计算方法,通过双重坐标系并建立对应关系后,基于表面法向矢量计算抛光路径,计算精度高输出路径误差小。In view of the shortcomings of the existing technology, the present invention provides a method for calculating the polishing path of the inner wall optical surface. After establishing the corresponding relationship through dual coordinate systems, the polishing path is calculated based on the surface normal vector, and the calculation accuracy is high and the output path error is small.

为实现上述目的,本发明提供了一种内壁光学表面抛光路径计算方法,包括:In order to achieve the above objectives, the present invention provides a method for calculating the polishing path of the inner wall optical surface, which includes:

S1、利用待抛光工件坐标系建立与待抛光工件坐标系平行的机械臂坐标系;S1. Use the coordinate system of the workpiece to be polished to establish a robot arm coordinate system parallel to the coordinate system of the workpiece to be polished;

S2、利用所述机械臂坐标系获取抛光路径基础矢量;S2. Use the robot arm coordinate system to obtain the basic vector of the polishing path;

S3、利用所述抛光路径基础矢量得到内壁光学表面抛光路径。S3. Use the basic vector of the polishing path to obtain the polishing path of the inner wall optical surface.

优选的,所述利用待抛光工件坐标系建立与待抛光工件坐标系平行的机械臂坐标系包括:Preferably, using the coordinate system of the workpiece to be polished to establish a robot arm coordinate system parallel to the coordinate system of the workpiece to be polished includes:

根据待抛光工件坐标系的X、Y轴确定与待抛光工件坐标系X、Y轴平行的初始机械臂坐标系X、Y轴;Determine the X and Y axes of the initial robot arm coordinate system parallel to the X and Y axes of the workpiece coordinate system to be polished based on the X and Y axes of the workpiece coordinate system to be polished;

根据抛光工具指向确定初始机械臂坐标系Z轴方向;Determine the Z-axis direction of the initial robot arm coordinate system according to the polishing tool pointing;

利用所述初始机械臂坐标系X、Y、Z轴建立机械臂坐标系。The robot arm coordinate system is established using the X, Y, and Z axes of the initial robot arm coordinate system.

优选的,利用所述机械臂坐标系获取抛光路径基础矢量包括:Preferably, using the robot coordinate system to obtain the basic vector of the polishing path includes:

利用所述机械臂坐标系的原点与待抛光工件坐标系的原点获取机械臂坐标系与待抛光工件坐标的原点向量;Using the origin of the robot arm coordinate system and the origin of the workpiece coordinate system to be polished to obtain the origin vectors of the robot arm coordinate system and the workpiece coordinates to be polished;

利用所述机械臂坐标系与待抛光工件坐标的原点向量作为抛光路径基础矢量。The origin vector of the robot arm coordinate system and the coordinates of the workpiece to be polished is used as the basic vector of the polishing path.

优选的,利用所述抛光路径基础矢量得到内壁光学表面抛光路径包括:Preferably, using the polishing path basic vector to obtain the inner wall optical surface polishing path includes:

利用待抛光工件获取与待抛光工件的初始抛光路径点集合;Use the workpiece to be polished to obtain the initial polishing path point set of the workpiece to be polished;

利用待抛光工件坐标系计算所述抛光路径点集合中各抛光路径点的单位法向矢量;Calculate the unit normal vector of each polishing path point in the polishing path point set using the coordinate system of the workpiece to be polished;

利用所述抛光路径点集合中各抛光路径点的单位法向矢量计算抛光路径点集合中各初始抛光路径点;Calculating each initial polishing path point in the polishing path point set using the unit normal vector of each polishing path point in the polishing path point set;

利用所述抛光路径点集合中各初始抛光路径点得到试运行抛光路径点集合;Using each initial polishing path point in the polishing path point set to obtain a trial run polishing path point set;

利用所述试运行抛光路径点集合进行空间干涉检查得到待抛光工件的抛光路径点集合;Use the trial run polishing path point set to perform spatial interference inspection to obtain the polishing path point set of the workpiece to be polished;

利用所述待抛光工件的抛光路径点集合作为内壁光学表面抛光路径。The set of polishing path points of the workpiece to be polished is used as the inner wall optical surface polishing path.

进一步的,所述利用待抛光工件坐标系计算所述抛光路径点集合中各抛光路径点的单位法向矢量的计算式如下:Further, the calculation formula for calculating the unit normal vector of each polishing path point in the polishing path point set using the coordinate system of the workpiece to be polished is as follows:

F=(x,y,z)=0F=(x,y,z)=0

其中,F=(x,y,z)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的表面方程解析表达式,N=(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量。Among them, F = (x, y, z) is the analytical expression of the surface equation of each polishing path point in the set of polishing path points based on the coordinate system of the workpiece to be polished, and N = (u, v, w) is the analytical expression of the surface equation based on the coordinate system of the workpiece to be polished. The unit normal vector of each polishing path point in the polishing path point set of the system.

进一步的,利用所述抛光路径点集合中各抛光路径点的单位法向矢量计算抛光路径点集合中各初始抛光路径点的计算式如下:Further, the calculation formula for calculating each initial polishing path point in the polishing path point set using the unit normal vector of each polishing path point in the polishing path point set is as follows:

其中,(X,Y,Z)为初始抛光路径点,(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量,(xp,yp,zp)为抛光路径点,(a,b,c)为抛光路径基础矢量。Among them, (X, Y, Z) is the initial polishing path point, (u, v, w) is the unit normal vector of each polishing path point in the polishing path point set based on the coordinate system of the workpiece to be polished, (x p , y p , z p ) are the polishing path points, (a, b, c) are the polishing path basic vectors.

进一步的,利用所述抛光路径点集合中各初始抛光路径点得到试运行抛光路径点集合包括:Further, using each initial polishing path point in the polishing path point set to obtain the trial run polishing path point set includes:

当抛光工具指向与机械臂坐标系Z轴相同时,利用所述抛光路径点集合中各初始抛光路径点计算与初始抛光路径点对应的各试运行抛光路径点;When the polishing tool points in the same direction as the Z-axis of the robot arm coordinate system, each initial polishing path point in the polishing path point set is used to calculate each trial run polishing path point corresponding to the initial polishing path point;

利用所述各试运行抛光路径点得到试运行抛光路径点集合。A set of trial run polishing path points is obtained using each of the trial run polishing path points.

进一步的,利用所述抛光路径点集合中各初始抛光路径点计算与初始抛光路径点对应的各试运行抛光路径点的计算式如下:Further, the calculation formula for calculating each trial run polishing path point corresponding to the initial polishing path point using each initial polishing path point in the polishing path point set is as follows:

β=arccos w,γ=0 β=arccos w,γ=0

(X,Y,Z)=(xp,yp,zp)+(a,0,c)-(c sinθ,0,c cosθ)-(a cosθ,0,a sinθ)(X,Y,Z)=(x p ,y p ,z p )+(a,0,c)-(c sinθ,0,c cosθ)-(a cosθ,0,a sinθ)

α=0, α=0,

其中,(X,Y,Z,α,β,γ)为初始抛光路径点对应的各试运行抛光路径点,(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量。Among them, (X, Y, Z, α, β, γ) are the trial run polishing path points corresponding to the initial polishing path point, (u, v, w) are the polishing path points in the set based on the workpiece coordinate system to be polished. The unit normal vector of the polished path point.

进一步的,利用所述试运行抛光路径点集合进行空间干涉检查得到待抛光工件的抛光路径点集合包括:Further, using the trial run polishing path point set to perform spatial interference inspection to obtain the polishing path point set of the workpiece to be polished includes:

利用试运行抛光路径点集合进行可视化仿真后,判断试运行抛光路径点集合中任一点是否与待抛光工件存在空间干涉,若是,则对试运行抛光路径点集合进行空间干涉优先处理,否则,输出试运行抛光路径点集合作为待抛光工件的抛光路径点集合。After visual simulation using the trial run polishing path point set, determine whether any point in the trial run polishing path point set has spatial interference with the workpiece to be polished. If so, perform spatial interference priority processing on the trial run polishing path point set. Otherwise, output Trial run the polishing path point set as the polishing path point set of the workpiece to be polished.

进一步的,所述对试运行抛光路径点集合进行空间干涉优先处理包括:Further, the spatial interference priority processing of the trial run polishing path point set includes:

对所述试运行抛光路径点集合中各试运行抛光路径点的β值基于空间干涉角度阈值进行调整得到试运行抛光路径点处理集合;Adjust the β value of each trial polishing path point in the trial polishing path point set based on the spatial interference angle threshold to obtain a trial polishing path point processing set;

利用所述试运行抛光路径点处理集合进行可视化仿真后,判断试运行抛光路径点处理集合中任一点是否与待抛光工件存在空间干涉,若是,则返回步骤S1,否则,输出试运行抛光路径点处理集合作为待抛光工件的抛光路径点集合;After visual simulation is performed using the trial run polishing path point processing set, it is determined whether any point in the trial run polishing path point processing set has spatial interference with the workpiece to be polished. If so, return to step S1. Otherwise, output the trial run polishing path point. The processing set is used as a set of polishing path points for the workpiece to be polished;

其中,空间干涉角度为抛光工具与基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量的夹角,空间干涉角度阈值为不大于20度。Among them, the spatial interference angle is the angle between the polishing tool and the unit normal vector of each polishing path point in the polishing path point set based on the coordinate system of the workpiece to be polished, and the spatial interference angle threshold is no more than 20 degrees.

与最接近的现有技术相比,本发明具有的有益效果:Compared with the closest existing technology, the present invention has the following beneficial effects:

通过建立双重坐标系计算抛光路径,保证了抛光工具始终正对待抛光工件表面,使得抛光过程效率高,同时基于可视化仿真进行复检确保路径的计算输出准确,在实际操作的过程中不会对待抛光工件造成损伤。By establishing a dual coordinate system to calculate the polishing path, it is ensured that the polishing tool is always facing the surface of the workpiece to be polished, making the polishing process highly efficient. At the same time, rechecking based on visual simulation ensures that the calculation output of the path is accurate and will not be polished during the actual operation. Damage to the workpiece.

附图说明Description of the drawings

图1是本发明提供的一种内壁光学表面抛光路径计算方法流程图;Figure 1 is a flow chart of a method for calculating the polishing path of an inner wall optical surface provided by the present invention;

图2是本发明提供的一种内壁光学表面抛光路径计算实际应用方法抛光路径轨迹类型图;Figure 2 is a polishing path trajectory type diagram of a practical application method for calculating the polishing path of an inner wall optical surface provided by the present invention;

图3是本发明提供的一种内壁光学表面抛光路径计算实际应用方法抛光工具状态示意图;Figure 3 is a schematic diagram of the polishing tool state of a practical application method for calculating the polishing path of an inner wall optical surface provided by the present invention;

图4是本发明提供的一种内壁光学表面抛光路径计算实际应用方法抛光路径轨迹图。Figure 4 is a polishing path trajectory diagram of a practical application method for calculating the polishing path of an inner wall optical surface provided by the present invention.

具体实施方式Detailed ways

下面结合附图对本发明的具体实施方式作进一步的详细说明。The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

实施例1:Example 1:

本发明提供了一种内壁光学表面抛光路径计算方法,如图1所示,包括:The invention provides a method for calculating the polishing path of the inner wall optical surface, as shown in Figure 1, including:

S1、利用待抛光工件坐标系建立与待抛光工件坐标系平行的机械臂坐标系;S1. Use the coordinate system of the workpiece to be polished to establish a robot arm coordinate system parallel to the coordinate system of the workpiece to be polished;

S2、利用所述机械臂坐标系获取抛光路径基础矢量;S2. Use the robot arm coordinate system to obtain the basic vector of the polishing path;

S3、利用所述抛光路径基础矢量得到内壁光学表面抛光路径。S3. Use the basic vector of the polishing path to obtain the polishing path of the inner wall optical surface.

步骤S1具体包括:Step S1 specifically includes:

S1-1、根据待抛光工件坐标系的X、Y轴确定与待抛光工件坐标系X、Y轴平行的初始机械臂坐标系X、Y轴;S1-1. Determine the X and Y axes of the initial robot arm coordinate system parallel to the X and Y axes of the workpiece coordinate system to be polished based on the X and Y axes of the workpiece coordinate system to be polished;

S1-2、根据抛光工具指向确定初始机械臂坐标系Z轴方向;S1-2. Determine the Z-axis direction of the initial robot arm coordinate system based on the polishing tool pointing;

S1-3、利用所述初始机械臂坐标系X、Y、Z轴建立机械臂坐标系。S1-3. Establish a robot arm coordinate system using the X, Y, and Z axes of the initial robot arm coordinate system.

步骤S2具体包括:Step S2 specifically includes:

S2-1、利用所述机械臂坐标系的原点与待抛光工件坐标系的原点获取机械臂坐标系与待抛光工件坐标的原点向量;S2-1. Use the origin of the robot arm coordinate system and the origin of the workpiece coordinate system to be polished to obtain the origin vectors of the robot arm coordinate system and the workpiece coordinates to be polished;

S2-2、利用所述机械臂坐标系与待抛光工件坐标的原点向量作为抛光路径基础矢量。S2-2. Use the origin vector of the robot arm coordinate system and the coordinates of the workpiece to be polished as the basic vector of the polishing path.

步骤S3具体包括:Step S3 specifically includes:

S3-1、利用待抛光工件获取与待抛光工件的初始抛光路径点集合;S3-1. Use the workpiece to be polished to obtain the initial polishing path point set of the workpiece to be polished;

S3-2、利用待抛光工件坐标系计算所述抛光路径点集合中各抛光路径点的单位法向矢量;S3-2. Calculate the unit normal vector of each polishing path point in the polishing path point set using the coordinate system of the workpiece to be polished;

S3-3、利用所述抛光路径点集合中各抛光路径点的单位法向矢量计算抛光路径点集合中各初始抛光路径点;S3-3. Calculate each initial polishing path point in the polishing path point set using the unit normal vector of each polishing path point in the polishing path point set;

S3-4、利用所述抛光路径点集合中各初始抛光路径点得到试运行抛光路径点集合;S3-4. Use each initial polishing path point in the polishing path point set to obtain a trial run polishing path point set;

S3-5、利用所述试运行抛光路径点集合进行空间干涉检查得到待抛光工件的抛光路径点集合;S3-5. Use the trial run polishing path point set to perform spatial interference inspection to obtain the polishing path point set of the workpiece to be polished;

S3-6、利用所述待抛光工件的抛光路径点集合作为内壁光学表面抛光路径。S3-6. Use the set of polishing path points of the workpiece to be polished as the polishing path of the inner wall optical surface.

步骤S3-2的计算式如下:The calculation formula of step S3-2 is as follows:

F=(x,y,z)=0F=(x,y,z)=0

其中,F=(x,y,z)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的表面方程解析表达式,N=(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量。Among them, F = (x, y, z) is the analytical expression of the surface equation of each polishing path point in the set of polishing path points based on the coordinate system of the workpiece to be polished, and N = (u, v, w) is the analytical expression of the surface equation based on the coordinate system of the workpiece to be polished. The unit normal vector of each polishing path point in the polishing path point set of the system.

步骤S3-3的计算式如下:The calculation formula of step S3-3 is as follows:

其中,(X,Y,Z)为初始抛光路径点,(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量,(xp,yp,zp)为抛光路径点,(a,b,c)为抛光路径基础矢量。Among them, (X, Y, Z) is the initial polishing path point, (u, v, w) is the unit normal vector of each polishing path point in the polishing path point set based on the coordinate system of the workpiece to be polished, (x p , y p , z p ) are the polishing path points, (a, b, c) are the polishing path basic vectors.

步骤S3-4具体包括:Step S3-4 specifically includes:

S3-4-1、当抛光工具指向与机械臂坐标系Z轴相同时,利用所述抛光路径点集合中各初始抛光路径点计算与初始抛光路径点对应的各试运行抛光路径点;S3-4-1. When the polishing tool points to the same Z-axis as the robot arm coordinate system, use each initial polishing path point in the polishing path point set to calculate each trial run polishing path point corresponding to the initial polishing path point;

S3-4-2、利用所述各试运行抛光路径点得到试运行抛光路径点集合。S3-4-2. Use each of the trial operation polishing path points to obtain a set of trial operation polishing path points.

步骤S3-4-1的计算式如下:The calculation formula of step S3-4-1 is as follows:

β=arccos w,γ=0 β=arccos w,γ=0

(X,Y,Z)=(xp,yp,zp)+(a,0,c)-(c sinθ,0,c cosθ)-(a cosθ,0,a sinθ)(X,Y,Z)=(x p ,y p ,z p )+(a,0,c)-(c sinθ,0,c cosθ)-(a cosθ,0,a sinθ)

α=0, α=0,

其中,(X,Y,Z,α,β,γ)为初始抛光路径点对应的各试运行抛光路径点,(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量。Among them, (X, Y, Z, α, β, γ) are the trial run polishing path points corresponding to the initial polishing path point, (u, v, w) are the polishing path points in the set based on the workpiece coordinate system to be polished. The unit normal vector of the polished path point.

步骤S3-5具体包括:Step S3-5 specifically includes:

S3-5-1、利用试运行抛光路径点集合进行可视化仿真后,判断试运行抛光路径点集合中任一点是否与待抛光工件存在空间干涉,若是,则对试运行抛光路径点集合进行空间干涉优先处理,否则,输出试运行抛光路径点集合作为待抛光工件的抛光路径点集合。S3-5-1. After visual simulation using the trial run polishing path point set, determine whether any point in the trial run polishing path point set has spatial interference with the workpiece to be polished. If so, perform spatial interference on the trial run polishing path point set. Prioritize processing, otherwise, output the trial run polishing path point set as the polishing path point set of the workpiece to be polished.

步骤S3-5-1具体包括:Step S3-5-1 specifically includes:

S3-5-1-1、对所述试运行抛光路径点集合中各试运行抛光路径点的β值基于空间干涉角度阈值进行调整得到试运行抛光路径点处理集合;S3-5-1-1. Adjust the β value of each trial polishing path point in the trial polishing path point set based on the spatial interference angle threshold to obtain a trial polishing path point processing set;

S3-5-1-2、利用所述试运行抛光路径点处理集合进行可视化仿真后,判断试运行抛光路径点处理集合中任一点是否与待抛光工件存在空间干涉,若是,则返回步骤S1,否则,输出试运行抛光路径点处理集合作为待抛光工件的抛光路径点集合;S3-5-1-2. After using the trial run polishing path point processing set to perform visual simulation, determine whether any point in the trial run polishing path point processing set has spatial interference with the workpiece to be polished. If so, return to step S1. Otherwise, output the trial run polishing path point processing set as the polishing path point set of the workpiece to be polished;

其中,空间干涉角度为抛光工具与基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量的夹角,空间干涉角度阈值为不大于20度。Among them, the spatial interference angle is the angle between the polishing tool and the unit normal vector of each polishing path point in the polishing path point set based on the coordinate system of the workpiece to be polished, and the spatial interference angle threshold is no more than 20 degrees.

实施例2:Example 2:

本发明提供了一种内壁光学表面内壁光学表面抛光路径计算实际应用方法,包括:The invention provides a practical application method for calculating the polishing path of the inner wall optical surface, which includes:

S1:定义机械臂运动坐标系,机械臂运动坐标系包括但不限于使用机械臂各个轴作为运动坐标系或以机械臂的末端的运动作为坐标系,本发明所述的坐标系选用机械臂的末端的运动构建坐标系,记为(XM,YM,ZM),工件的坐标系设为(XW,YW,ZW),调整机械臂的运动轴,致使机械臂末端坐标系与工件坐标系的各轴平行,且抛光工具指向的方向与ZM(或ZW)方向重合,设定该状态下的机械臂末端坐标系原点OM以及工件坐标系的原点OW,矢量OMOW的矢量在机械臂的末端坐标系下可表示为S1: Define the robot arm motion coordinate system. The robot arm motion coordinate system includes but is not limited to using each axis of the robot arm as the motion coordinate system or using the motion of the end of the robot arm as the coordinate system. The coordinate system of the present invention selects the axis of the robot arm. The movement of the end constructs a coordinate system, recorded as (XM, YM, ZM), and the coordinate system of the workpiece is set to (XW, YW, ZW). Adjust the motion axis of the manipulator so that the coordinate system of the end of the manipulator and the workpiece coordinate system are The axes are parallel, and the direction pointed by the polishing tool coincides with the ZM (or ZW) direction. Set the origin OM of the end coordinate system of the robot arm and the origin OW of the workpiece coordinate system in this state. The vector of the vector OMOW is in the end coordinate system of the robot arm. The following can be expressed as

OMOW=(a,b,c)O M O W =(a,b,c)

其中,a为抛光工具与机械臂末端法兰中心至抛光头在XM(或XW)方向的距离,b为抛光工具与机械臂末端法兰中心至抛光头在YM(或YW)方向的距离,c为抛光工具与机械臂末端法兰中心至抛光头在ZM(或ZW)方向的距离;其正负由(XM,YM,ZM)或(XW,YW,ZW)的坐标轴的正负方向而定。Among them, a is the distance between the polishing tool and the center of the flange at the end of the robot arm and the polishing head in the XM (or XW) direction, b is the distance between the polishing tool and the center of the flange at the end of the robot arm and the polishing head in the YM (or YW) direction. c is the distance between the polishing tool and the center of the flange at the end of the robot arm to the polishing head in the ZM (or ZW) direction; its positive and negative are determined by the positive and negative directions of the coordinate axes of (XM, YM, ZM) or (XW, YW, ZW) Depends.

S2:在待加工工件表面进行路径点设置,形成抛光头末端在待加工工件表面的加工轨迹(xm,ym,zm),该加工轨迹包括但不限于栅格线,螺旋线,弓字形及其他随机轨迹。S2: Set path points on the surface of the workpiece to be processed to form a processing trajectory (x m , y m , z m ) of the end of the polishing head on the surface of the workpiece to be processed. The processing trajectory includes but is not limited to grid lines, spiral lines, and bows. Glyphs and other random trajectories.

本实施例中,一种内壁光学表面内壁光学表面抛光路径计算实际应用方法,采样点轨迹,如图2所示,采用弓字形轨迹。In this embodiment, a practical application method for calculating the polishing path of the inner wall optical surface of the inner wall optical surface, the sampling point trajectory, as shown in Figure 2, adopts an arcuate trajectory.

S3:为确保抛光工具正对待加工工件表面,对于在工件坐标系坐标为(xp,yp,zp)的点而言,计算加工轨迹点所对应的表面法矢N,其计算方式可采用但不限于利用表面方程求偏导的解析几何方式或利用三维软件建模导出,计算得单位法矢N=(u,v,w);S3: In order to ensure that the polishing tool is facing the surface of the workpiece to be processed, for the point in the workpiece coordinate system with coordinates (x p , y p , z p ), calculate the surface normal vector N corresponding to the processing trajectory point. The calculation method can be Using but not limited to the analytical geometry method of using surface equations to obtain partial derivatives or using three-dimensional software modeling and derivation, the unit normal vector N = (u, v, w) is calculated;

S4:根据加工轨迹点生成机械臂末端所需要运动的坐标指令(X,Y,Z,α,β,γ)。由于本实施例中的抛光工具长度较长,因此为了确保曝光过程中抛光工具与待加工工件不发生空间干涉,此时只考虑表面法矢在XWZW平面的投影,可确保抛光工具正对待加工表面法矢,如图3所示。对于在工件坐标系坐标为(xp,yp,zp)的点而言,其坐标指令的计算方式为S4: Generate the coordinate instructions (X, Y, Z, α, β, γ) required for the movement of the end of the robot arm based on the processing trajectory points. Since the length of the polishing tool in this embodiment is long, in order to ensure that there is no spatial interference between the polishing tool and the workpiece to be processed during the exposure process, only the projection of the surface normal vector on the X W Z W plane is considered at this time to ensure that the polishing tool is in the correct position. The normal vector of the surface to be processed is shown in Figure 3. For a point with coordinates (x p ,y p ,z p ) in the workpiece coordinate system, the calculation method of its coordinate command is:

(X,Y,Z)=(xp,yp,zp)+(a,0,c)-(c sinθ,0,c cosθ)-(a cosθ,0,a sinθ)(X,Y,Z)=(x p ,y p ,z p )+(a,0,c)-(c sinθ,0,c cosθ)-(a cosθ,0,a sinθ)

β=θ,α=γ=0β=θ,α=γ=0

其中,θ=arctan(u/w)由待加工工件表面在(xp,yp,zp)处的法矢决定。Among them, θ = arctan (u/w) is determined by the normal vector of the workpiece surface to be processed at (x p , y p , z p ).

S5:将含有轨迹坐标点(X,Y,Z,α,β,γ)通过程序指令输入至机械臂控制器,由控制器控制机械臂进行运动,判断抛光工具与待加工工件是否有空间干涉,如无空间干涉,则进行下一步,如有空间干涉的处理步骤如下:S5: Input the trajectory coordinate points (X, Y, Z, α, β, γ) to the robot arm controller through program instructions. The controller controls the movement of the robot arm to determine whether there is spatial interference between the polishing tool and the workpiece to be processed. , if there is no spatial interference, proceed to the next step. If there is spatial interference, the processing steps are as follows:

(1)抛光工具在运动过程中与待加工工件接触,此时可先进入S4,修改β值达到不干涉效果,但需要保证此时的抛光头方向与待加工工件表面法矢N的夹角小于一定阈值,该阈值在实施例中可以是20°。(1) The polishing tool comes into contact with the workpiece to be processed during movement. At this time, you can enter S4 first and modify the β value to achieve a non-interference effect. However, you need to ensure that the angle between the direction of the polishing head at this time and the normal vector N of the surface of the workpiece to be processed is ensured. Less than a certain threshold, which may be 20° in an embodiment.

(2)在S4始终不满足的情况下,返回S1修改抛光工具的几何尺寸,并进行重新计算,致使满足空间不干涉要求。(2) If S4 is still not satisfied, return to S1 to modify the geometric dimensions of the polishing tool and recalculate it so that the spatial non-interference requirements are met.

本实施例中,一种内壁光学表面内壁光学表面抛光路径计算实际应用方法,待抛光零件的内壁表面加工的各个位置运动坐标轨迹,如图4所示。In this embodiment, a practical application method for calculating the polishing path of the inner wall optical surface of the inner wall optical surface, the movement coordinate trajectory of each position of the inner wall surface processing of the part to be polished is shown in Figure 4.

本领域内的技术人员应明白,本发明的实施例可提供为方法、系统、或计算机程序产品。因此,本发明可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且,本发明可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。Those skilled in the art will appreciate that embodiments of the present invention may be provided as methods, systems, or computer program products. Thus, the invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.

本发明是参照根据本申请实施例的方法、设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器,使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each process and/or block in the flowchart illustrations and/or block diagrams, and combinations of processes and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing device to produce a machine, such that the instructions executed by the processor of the computer or other programmable data processing device produce a use A device for realizing the functions specified in one process or multiple processes of the flowchart and/or one block or multiple blocks of the block diagram.

这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中,使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品,该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。These computer program instructions may also be stored in a computer-readable memory that causes a computer or other programmable data processing apparatus to operate in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including the instruction means, the instructions The device implements the functions specified in a process or processes of the flowchart and/or a block or blocks of the block diagram.

这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上,使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理,从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。These computer program instructions may also be loaded onto a computer or other programmable data processing device, causing a series of operating steps to be performed on the computer or other programmable device to produce computer-implemented processing, thereby executing on the computer or other programmable device. Instructions provide steps for implementing the functions specified in a process or processes of a flowchart diagram and/or a block or blocks of a block diagram.

最后应当说明的是:以上实施例仅用以说明本发明的技术方案而非对其限制,尽管参照上述实施例对本发明进行了详细的说明,所属领域的普通技术人员应当理解:依然可以对本发明的具体实施方式进行修改或者等同替换,而未脱离本发明精神和范围的任何修改或者等同替换,其均应涵盖在本发明的权利要求保护范围之内。Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that the present invention can still be modified. Modifications or equivalent substitutions may be made to the specific embodiments, and any modifications or equivalent substitutions that do not depart from the spirit and scope of the invention shall be covered by the scope of the claims of the invention.

Claims (8)

1.一种内壁光学表面抛光路径计算方法,其特征在于,包括:1. A method for calculating the polishing path of the inner wall optical surface, which is characterized by including: S1、利用待抛光工件坐标系建立与待抛光工件坐标系平行的机械臂坐标系;S1. Use the coordinate system of the workpiece to be polished to establish a robot arm coordinate system parallel to the coordinate system of the workpiece to be polished; S2、利用所述机械臂坐标系获取抛光路径基础矢量;S2. Use the robot arm coordinate system to obtain the basic vector of the polishing path; S3、利用所述抛光路径基础矢量得到内壁光学表面抛光路径;S3. Use the basic vector of the polishing path to obtain the polishing path of the inner wall optical surface; S3-1、利用待抛光工件获取与待抛光工件的初始抛光路径点集合;S3-1. Use the workpiece to be polished to obtain the initial polishing path point set of the workpiece to be polished; S3-2、利用待抛光工件坐标系计算所述抛光路径点集合中各抛光路径点的单位法向矢量;S3-2. Calculate the unit normal vector of each polishing path point in the polishing path point set using the coordinate system of the workpiece to be polished; S3-3、利用所述抛光路径点集合中各抛光路径点的单位法向矢量计算抛光路径点集合中各初始抛光路径点;S3-3. Calculate each initial polishing path point in the polishing path point set using the unit normal vector of each polishing path point in the polishing path point set; S3-3的计算式如下:The calculation formula of S3-3 is as follows: 其中,(X,Y,Z)为初始抛光路径点,(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量,(xp,yp,zp)为抛光路径点,(a,b,c)为抛光路径基础矢量;Among them, (X, Y, Z) is the initial polishing path point, (u, v, w) is the unit normal vector of each polishing path point in the polishing path point set based on the coordinate system of the workpiece to be polished, (x p , y p , z p ) are the polishing path points, (a, b, c) are the polishing path basic vectors; S3-4、利用所述抛光路径点集合中各初始抛光路径点得到试运行抛光路径点集合;S3-4. Use each initial polishing path point in the polishing path point set to obtain a trial run polishing path point set; S3-5、利用所述试运行抛光路径点集合进行空间干涉检查得到待抛光工件的抛光路径点集合;S3-5. Use the trial run polishing path point set to perform spatial interference inspection to obtain the polishing path point set of the workpiece to be polished; S3-6、利用所述待抛光工件的抛光路径点集合作为内壁光学表面抛光路径。S3-6. Use the set of polishing path points of the workpiece to be polished as the polishing path of the inner wall optical surface. 2.如权利要求1所述的一种内壁光学表面抛光路径计算方法,其特征在于,所述利用待抛光工件坐标系建立与待抛光工件坐标系平行的机械臂坐标系包括:2. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 1, wherein the use of the workpiece coordinate system to be polished to establish a robot arm coordinate system parallel to the workpiece coordinate system to be polished includes: 根据待抛光工件坐标系的X、Y轴确定与待抛光工件坐标系X、Y轴平行的初始机械臂坐标系X、Y轴;Determine the X and Y axes of the initial robot arm coordinate system parallel to the X and Y axes of the workpiece coordinate system to be polished based on the X and Y axes of the workpiece coordinate system to be polished; 根据抛光工具指向确定初始机械臂坐标系Z轴方向;Determine the Z-axis direction of the initial robot arm coordinate system according to the polishing tool pointing; 利用所述初始机械臂坐标系X、Y、Z轴建立机械臂坐标系。The robot arm coordinate system is established using the X, Y, and Z axes of the initial robot arm coordinate system. 3.如权利要求1所述的一种内壁光学表面抛光路径计算方法,其特征在于,利用所述机械臂坐标系获取抛光路径基础矢量包括:3. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 1, characterized in that using the robot arm coordinate system to obtain the polishing path basic vector includes: 利用所述机械臂坐标系的原点与待抛光工件坐标系的原点获取机械臂坐标系与待抛光工件坐标的原点向量;Using the origin of the robot arm coordinate system and the origin of the workpiece coordinate system to be polished to obtain the origin vectors of the robot arm coordinate system and the workpiece coordinates to be polished; 利用所述机械臂坐标系与待抛光工件坐标的原点向量作为抛光路径基础矢量。The origin vector of the robot arm coordinate system and the coordinates of the workpiece to be polished is used as the basic vector of the polishing path. 4.如权利要求1所述的一种内壁光学表面抛光路径计算方法,其特征在于,所述利用待抛光工件坐标系计算所述抛光路径点集合中各抛光路径点的单位法向矢量的计算式如下:4. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 1, wherein the unit normal vector of each polishing path point in the polishing path point set is calculated using the workpiece coordinate system to be polished. The formula is as follows: F=(x,y,z)=0F=(x,y,z)=0 其中,F=(x,y,z)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的表面方程解析表达式,N=(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量。Among them, F = (x, y, z) is the analytical expression of the surface equation of each polishing path point in the set of polishing path points based on the coordinate system of the workpiece to be polished, and N = (u, v, w) is the analytical expression of the surface equation based on the coordinate system of the workpiece to be polished. The unit normal vector of each polishing path point in the polishing path point set of the system. 5.如权利要求1所述的一种内壁光学表面抛光路径计算方法,其特征在于,利用所述抛光路径点集合中各初始抛光路径点得到试运行抛光路径点集合包括:5. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 1, characterized in that, using each initial polishing path point in the polishing path point set to obtain the trial run polishing path point set includes: 当抛光工具指向与机械臂坐标系Z轴相同时,利用所述抛光路径点集合中各初始抛光路径点计算与初始抛光路径点对应的各试运行抛光路径点;When the polishing tool points in the same direction as the Z-axis of the robot arm coordinate system, each initial polishing path point in the polishing path point set is used to calculate each trial run polishing path point corresponding to the initial polishing path point; 利用所述各试运行抛光路径点得到试运行抛光路径点集合。A set of trial run polishing path points is obtained using each of the trial run polishing path points. 6.如权利要求5所述的一种内壁光学表面抛光路径计算方法,其特征在于,利用所述抛光路径点集合中各初始抛光路径点计算与初始抛光路径点对应的各试运行抛光路径点的计算式如下:6. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 5, characterized in that each initial polishing path point in the polishing path point set is used to calculate each trial run polishing path point corresponding to the initial polishing path point. The calculation formula is as follows: β=arccosw,γ=0 β=arccosw,γ=0 (X,Y,Z)=(xp,yp,zp)+(a,0,c)-(csinθ,0,ccosθ)-(acosθ,0,asinθ)(X,Y,Z)=(x p ,y p ,z p )+(a,0,c)-(csinθ,0,ccosθ)-(acosθ,0,asinθ) α=0,γ=0α=0, γ=0 其中,(X,Y,Z,α,β,γ)为初始抛光路径点对应的各试运行抛光路径点,(u,v,w)为基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量。Among them, (X, Y, Z, α, β, γ) are the trial run polishing path points corresponding to the initial polishing path point, (u, v, w) are the polishing path points in the set based on the workpiece coordinate system to be polished. The unit normal vector of the polished path point. 7.如权利要求1所述的一种内壁光学表面抛光路径计算方法,其特征在于,利用所述试运行抛光路径点集合进行空间干涉检查得到待抛光工件的抛光路径点集合包括:7. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 1, wherein the set of polishing path points of the workpiece to be polished is obtained by performing spatial interference inspection using the trial run polishing path point set: 利用试运行抛光路径点集合进行可视化仿真后,判断试运行抛光路径点集合中任一点是否与待抛光工件存在空间干涉,若是,则对试运行抛光路径点集合进行空间干涉优先处理,否则,输出试运行抛光路径点集合作为待抛光工件的抛光路径点集合。After visual simulation using the trial run polishing path point set, determine whether any point in the trial run polishing path point set has spatial interference with the workpiece to be polished. If so, perform spatial interference priority processing on the trial run polishing path point set. Otherwise, output Trial run the polishing path point set as the polishing path point set of the workpiece to be polished. 8.如权利要求7所述的一种内壁光学表面抛光路径计算方法,其特征在于,所述对试运行抛光路径点集合进行空间干涉优先处理包括:8. A method for calculating the polishing path of an inner wall optical surface as claimed in claim 7, wherein the spatial interference priority processing of the trial run polishing path point set includes: 对所述试运行抛光路径点集合中各试运行抛光路径点的β值基于空间干涉角度阈值进行调整得到试运行抛光路径点处理集合;Adjust the β value of each trial polishing path point in the trial polishing path point set based on the spatial interference angle threshold to obtain a trial polishing path point processing set; 利用所述试运行抛光路径点处理集合进行可视化仿真后,判断试运行抛光路径点处理集合中任一点是否与待抛光工件存在空间干涉,若是,则返回步骤S1,否则,输出试运行抛光路径点处理集合作为待抛光工件的抛光路径点集合;After visual simulation is performed using the trial run polishing path point processing set, it is determined whether any point in the trial run polishing path point processing set has spatial interference with the workpiece to be polished. If so, return to step S1. Otherwise, output the trial run polishing path point. The processing set is used as a set of polishing path points for the workpiece to be polished; 其中,空间干涉角度为抛光工具与基于待抛光工件坐标系的抛光路径点集合中各抛光路径点的单位法向矢量的夹角,空间干涉角度阈值为不大于20度。Among them, the spatial interference angle is the angle between the polishing tool and the unit normal vector of each polishing path point in the polishing path point set based on the coordinate system of the workpiece to be polished, and the spatial interference angle threshold is no more than 20 degrees.
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