CN115388774B - Shape and position error measuring instrument with cross motion surface and inclined orthogonal measurement reference matched - Google Patents
Shape and position error measuring instrument with cross motion surface and inclined orthogonal measurement reference matchedInfo
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- CN115388774B CN115388774B CN202211004032.XA CN202211004032A CN115388774B CN 115388774 B CN115388774 B CN 115388774B CN 202211004032 A CN202211004032 A CN 202211004032A CN 115388774 B CN115388774 B CN 115388774B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The cross motion surface and oblique orthogonal measurement reference matched form-position error measuring instrument is a machine frame formed from main machine seat, vertical supporting column and shaft seat, on the main machine seat a cross motion surface with glass-ceramic sample stage can be longitudinally and transversely moved, and mounted on the motion seat a transverse and longitudinal movement driving mechanism formed from transverse air-floating shaft sleeve, longitudinal air-floating shaft sleeve, transverse connecting piece and longitudinal connecting piece is mounted, and can be used for driving cross motion surface to make high-accuracy movement in transverse and longitudinal direction, on the shaft seat a first laser interferometer, second laser interferometer, longitudinal laser interferometer and hanging frame of probe can be vertically moved by means of vertical shaft.
Description
Technical Field
The invention belongs to the technical field of precision measurement equipment, and particularly relates to a shape and position error measuring instrument matched with a cross motion surface and an inclined orthogonal measurement reference.
Background
In recent years, the progress of microelectronics has led to a revolution in miniaturization in many fields, and micro/nano technology for the purpose of micro processing, nano structure and system has been developed in this background, and various micro/nano-scale micro devices such as micro gears, micro holes, micro nozzles, micro steps and the like MEMS products have appeared.
When the traditional three-coordinate measuring machine faces to a measuring scene of micro-nano devices with the geometric dimension ranging from tens of micrometers to several millimeters and the dimension uncertainty ranging from tens of nanometers to hundreds of nanometers, the measuring precision and the measuring dimension cannot meet the three-dimensional precision measuring requirement of the devices. Meanwhile, the measuring range of Scanning Probe Microscopes (SPM) with resolution in nanometer and picometer levels, laser heterodyne interference technology and other methods is small, the probe is short, and the three-dimensional measuring requirement of micro-nanometer devices cannot be met. Therefore, the existing industry and academia are urgent to need a measuring device capable of measuring the dimension, shape and position errors and resolution of a three-dimensional device in the micro-nano level to reliably evaluate micro-nano level micro-devices with complex shapes.
The invention provides a small micro-nano three-coordinate measuring machine (publication number: CN104457563A, li Zhigang), which utilizes a nano positioning workbench, a CCD component and a measuring head to design the small micro-nano three-coordinate measuring machine, wherein the cost of the small micro-nano three-coordinate measuring machine is low, but the size and shape and position errors of parts with complex shapes cannot be measured.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide the shape and position error measuring instrument with the coordination of the cross motion surface and the inclined orthogonal measurement reference, which not only can adapt to and meet the micro-nano precision measurement of the size and the shape and position error of the part with complex shape, but also can realize the purposes of high measurement accuracy, good measurement repeatability, high measurement speed and high efficiency.
In order to achieve the above object, the present invention provides a technical solution as follows:
the shape and position error measuring instrument with crossed motion surface and inclined orthogonal measuring reference is characterized by that on the main machine seat, vertical supporting columns are respectively mounted on left and right sides;
the shaft seat is provided with a penetrating vertical connecting hole along the vertical direction, the inner wall of the vertical connecting hole is provided with a mounting groove, a vertical shaft is inserted in the vertical connecting hole in a vertically up-down moving manner, a hanging frame is arranged at the lower end part of the vertical shaft, a probe is arranged at the upper end of the hanging frame, fixing grooves are respectively arranged at two vertical sides of the vertical shaft and close to one end of the probe, a buffer cylinder is fixedly arranged on the inner wall of the vertical connecting hole through a cylinder fixing block, the telescopic end of the buffer cylinder is connected with the inner wall of the fixing groove, a vertical shaft nano motor is arranged in the mounting groove, and an output shaft of the vertical shaft nano motor moves along a straight line and can drive the vertical shaft to slide along the vertical direction.
The method comprises the steps that a motion seat is assembled on the upper end face of a main machine seat and the inner sides of two vertical support columns, transverse air floatation shaft sleeves are assembled on the left side and the right side of the motion seat respectively, the transverse air floatation shaft sleeves are connected with the left side and the right side by using transverse connectors, longitudinal air floatation shaft sleeves are assembled on the front side and the rear side of the motion seat respectively, longitudinal air floatation shaft sleeves are connected with the front side and the rear side by using longitudinal connectors, air floatation shaft sleeve upper covers are installed at the upper ends of the transverse air floatation shaft sleeves and the longitudinal air floatation shaft sleeves so as to fix cross-shaped motion faces, sample table supporting faces are installed on the front side and the rear side on the cross-shaped motion faces respectively, a conical microcrystalline glass sample table is fixedly installed on the sample table supporting faces, the conical microcrystalline glass sample table is made of microcrystalline glass, and the three faces are respectively a first laser reflecting face, a second laser reflecting face and a longitudinal laser reflecting face, and the first laser reflecting face and the second laser reflecting face are mutually perpendicular;
The upper end of the sample fixing surface is positioned at the inner sides of the first laser reflecting surface, the second laser reflecting surface and the longitudinal laser reflecting surface and is provided with a rotating shaft;
The lower end part of the vertical shaft is provided with a hanging frame, the probe is arranged at the upper end part of the hanging frame, the hanging frame is provided with a first laser interferometer, a second laser interferometer and a longitudinal laser interferometer, laser rays emitted by the first laser interferometer, the second laser interferometer and the longitudinal laser interferometer are respectively perpendicular to a first laser reflecting surface, a second laser reflecting surface and a longitudinal laser reflecting surface correspondingly, and ranging function light beams in the three laser rays are orthogonally collected at the ball measuring center of the probe.
Preferably, the laser beams emitted by the first laser interferometer, the second laser interferometer and the longitudinal laser interferometer include a ranging function laser beam and an angle measuring function laser beam.
Preferably, in operation, the probe measuring head is positioned at the inner side of the first laser reflecting surface, the second laser reflecting surface and the longitudinal laser reflecting surface;
Preferably, the cross-shaped movement belt drives the conical glass ceramic sample stage to move transversely and longitudinally, and the vertical moving mechanism controls the vertical shaft to move the probe in the vertical direction;
The longitudinal laser interferometer obtains displacement as x '', obtains yaw angle as r y and obtains pitch angle as r z;
The second laser interferometer obtains displacement y' and obtains a rotation angle r x;
The first laser interferometer obtains the vertical axis displacement as z';
Calculating the transverse axis displacement x ', the longitudinal axis displacement y ' and the vertical axis displacement z ' of the sample piece after compensation according to a compensation formula;
The compensation formula is as follows:
Preferably, in the coordinate system of the to-be-detected piece, when the to-be-detected piece is measured, the cross-shaped movement belt drives the conical glass ceramic sample platform to move transversely and longitudinally, and the vertical moving mechanism controls the vertical shaft to move the probe in the vertical direction, so that the coordinate (a i′,bi′,ci') of the ith to-be-detected position point is obtained, i=1.
Coordinates (a i′,bi′,ci') of the i-th time to-be-detected position point, i=1, N needs to be converted into a standard coordinate system by a conversion formula to obtain coordinates (a i,bi,ci), i=1.
Wherein θ= -45 °
The rotary shaft drives the sample to be tested to rotate by an angleRotation angleAfterwards, the cross-shaped movement belt drives the conical glass ceramic sample stage to move in the transverse direction and the longitudinal direction, the vertical moving mechanism controls the vertical shaft to move the probe in the vertical direction, and coordinates (a 2 j,b2j,c2j) of a j-th position point to be detected are obtained under an instrument coordinate system, j=n+1, n+k, wherein N, K is an integer;
converting the surface coordinates (a 2 j,b2j,c2j) into the standard coordinate system through a conversion formula to obtain coordinates (a j,bj,cj), wherein the conversion formula is as follows:
and combining the coordinates (a j,bj,cj) of the position points to be detected and the coordinates (a i,bi,ci) of the position points to be detected to obtain a group of surface coordinate sets (a i,bi,ci) of the piece to be detected, wherein i=1.
The invention provides a shape and position error measuring instrument with a cross motion surface and an oblique orthogonal measurement reference matched, wherein a first laser interferometer, a second laser interferometer, a longitudinal laser interferometer, a first laser reflecting surface, a second laser reflecting surface and a longitudinal laser reflecting surface can be respectively driven to move in the moving process through a moving mechanism and a vertical shaft. The first laser interferometer, the second laser interferometer and the longitudinal laser interferometer generate laser rays which are respectively perpendicular to the first laser reflecting surface, the second laser reflecting surface and the longitudinal laser reflecting surface, and ranging laser beams in the laser rays are converged at the center of a measuring ball of the measuring head. Thus, the shape and position error measuring instrument matched with the cross motion surface and the oblique orthogonal measurement reference is formed.
The invention eliminates Abbe error in X, Y, Z measuring direction, improves measuring precision, uses laser interferometer to measure displacement, can obtain sub-nanometer measuring precision in XYZ three-axis direction, has the precision far higher than that of traditional dimension and shape error measuring instrument, and has the characteristics of unique and reasonable structure, strong applicability, wide application range, high measuring precision, high speed and good repeatability.
Specifically, the technical innovation and the good effect of the invention are as follows:
1) In the measuring structure provided by the invention, the probe displacement measurement and the probe contact point are positioned on the same straight line, and the structure eliminates first-order measurement errors and realizes high measurement accuracy.
2) According to the invention, the relative displacement and relative rotation between the probe and the piece to be measured are detected in real time by using the laser interferometer, the measurement error caused by the rotation between the probe and the piece to be measured is calibrated in real time, and the measurement precision is effectively improved.
3) The conical glass ceramic sample stage is designed integrally, is made of zero-expansion glass ceramic, eliminates the influence of main thermal expansion errors in ultra-precise measurement through structural innovation, is easy to assemble, and effectively improves the measurement accuracy of the whole machine.
4) The laser measurement reference and the measuring head are relatively static in the measurement process, the Abbe principle is dynamically met, the measurement error caused by the Abbe error in the dynamic measurement of the instrument is effectively eliminated, the measurement uncertainty of the instrument is effectively reduced, and the measurement repeatability of the instrument is improved.
In the sample motion mechanism, triaxial coplanar motion is realized through the combination of the air floatation guide rail, and the high motion precision and the large stroke are realized in a smaller volume by matching with the nanometer driving motor.
Drawings
FIG. 1 is a schematic diagram of a cross motion plane and oblique orthogonal measurement reference matched shape and position error measuring instrument;
FIG. 2 is a schematic diagram of the installation space structure of the probe and the laser interferometer of the shape and position error measuring instrument with the coordination of the cross motion surface and the inclined orthogonal measurement reference of FIG. 1;
FIG. 3 is an exploded view of a protruding moving mechanism in a form and position error measuring instrument with a cross motion surface and an oblique orthogonal measurement reference matched with each other;
FIG. 4 is a schematic diagram of a partial structure of a shape and position error measuring instrument with a cross motion surface and an oblique orthogonal measurement reference matched with each other;
Fig. 5 is a schematic diagram of a protruding driving structure in a shape and position error measuring instrument with a cross motion surface and an oblique orthogonal measurement reference matched with each other.
Part number description in the drawings:
1-1, a shaft seat, 1-2, a vertical support column, 1-3, a main frame, 2-1, a hanging frame, 2-2, a probe, 2-3, a first laser interferometer, 2-4, a second laser interferometer, 2-5, a longitudinal laser interferometer, 3-1, a conical glass ceramic sample table, 3-1-1, a sample fixing surface, 3-1-2, a first laser reflecting surface, 3-1-3, a second laser reflecting surface, 3-1-4, a longitudinal laser reflecting surface, 3-2, a sample table supporting surface, 3-3, a transverse air bearing sleeve, 3-4, an air bearing sleeve upper cover, 3-5, a moving seat, 3-6, a cross-shaped moving surface, 3-7, a transverse connecting piece, 3-8, a longitudinal connecting piece, 3-9, a longitudinal air bearing sleeve, 3-10, a rotating shaft, 4, a vertical moving mechanism, 4-1, a vertical shaft motor, 4-3-4, a buffer cylinder, 4-4, a vertical cylinder, 4-5, a vertical connecting hole, a fixed slot and a fixed slot;
Detailed Description
The present invention will be further described with reference to the drawings and the specific embodiments in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
The invention provides a shape and position error measuring instrument with a cross motion surface and an inclined orthogonal measurement reference matched, which is characterized in that a vertical support column 1-2 is respectively arranged on the left side and the right side of a main machine seat 1-3;
The shaft seat 1-1 is provided with a penetrating vertical connecting hole 4-5 along the vertical direction, the inner wall of the vertical connecting hole 4-5 is provided with a mounting groove 4-6, a vertical shaft 4-1 is inserted on the vertical connecting hole 4-5 in a vertically up-down moving manner, a hanging frame 2-1 is mounted on the lower end part of the vertical shaft 4-1, a probe 2-2 is mounted at the upper end of the hanging frame 2-1, two vertical sides of the vertical shaft 4-1 are respectively provided with a fixing groove 4-7 at one end close to the probe 2-2, the buffer cylinder 4-3 is fixedly mounted on the inner wall of the vertical connecting hole 4-5 through a cylinder fixing block 4-4, the telescopic end of the buffer cylinder 4-3 is connected with the inner wall of the fixing groove 4-7, the vertical shaft nano motor 4-2 is mounted in the mounting groove 4-6, and the output shaft of the nano motor 4-2 moves along a straight line and can drive the vertical shaft 4-1 to slide along the vertical direction.
The method comprises the steps that a moving seat 3-5 is assembled on the upper end face of a main seat 1-3 and on the inner sides of two vertical supporting columns 1-2, a transverse air-float shaft sleeve 3-3 is assembled on the left side and the right side of the moving seat 3-5 respectively, the left side and the right side of the moving seat are connected with the transverse air-float shaft sleeve 3-3 through transverse connecting pieces 3-7, a longitudinal air-float shaft sleeve 3-9 is assembled on the front side and the rear side of the moving seat 3-5 respectively, the longitudinal connecting pieces 3-8 are connected with the front side and the rear side of the longitudinal air-float shaft sleeve 3-9 respectively, an air-float shaft sleeve upper cover 3-4 is arranged on the upper ends of the transverse air-float shaft sleeve 3-3 and the longitudinal air-float shaft sleeve 3-9 so as to fix a cross-shaped moving face 3-6, a sample table supporting face 3-2 is arranged on the front side and the rear side of the cross-shaped moving face 3-6 respectively, a conical microcrystalline glass sample table 3-1 is fixedly arranged on the sample table supporting face 3-2, the conical microcrystalline glass sample table 3-1 is made of microcrystalline glass, three faces of a first laser reflecting face 3-1-2, a second reflecting face 3-1, a second reflecting face 3-4, a first laser reflecting face and a second reflecting face 3-1-4 are perpendicular to a first laser reflecting face and a second reflecting face 1-4 laser reflecting face 1-4;
the upper end of the sample fixing and matching surface 3-1-1 is positioned at the inner sides of the first laser reflecting surface 3-1-2, the second laser reflecting surface 3-1-3 and the longitudinal laser reflecting surface 3-1-4 and is provided with a rotating shaft 3-10;
The lower end part of the vertical shaft 4-1 is provided with a hanging frame 2-1, the probe 2-2 is arranged at the upper end part of the hanging frame 2-1, the hanging frame 2-1 is provided with a first laser interferometer 2-3, a second laser interferometer 2-4 and a longitudinal laser interferometer 2-5, laser rays emitted by the first laser interferometer 2-3, the second laser interferometer 2-4 and the longitudinal laser interferometer 2-5 are respectively perpendicular to the first laser reflecting surface 3-1-2, the second laser reflecting surface 3-1-3 and the longitudinal laser reflecting surface 3-1-4, and ranging function beams in the three laser rays are orthogonally collected at the ball measuring center of the probe 2-2.
Further, the laser beams emitted by the first laser interferometer 2-3, the second laser interferometer 2-4 and the longitudinal laser interferometer 2-5 comprise a distance measuring function laser beam and an angle measuring function laser beam. Further, in operation, the probe 2-2 measuring head is positioned at the inner side of the first laser reflecting surface 3-1-2, the second laser reflecting surface 3-1-3 and the longitudinal laser reflecting surface 3-1-4;
the vertical shaft nano motor 4-2 mentioned above is in the prior art, and may be a linear motor in paper "a double-foot driving piezoelectric linear motor", or other driving motors capable of realizing linear movement, which is not limited herein.
When the conical glass-ceramic sample stage moves transversely or longitudinally or the vertical shaft moves vertically, three angle errors are generated, namely a pitch angle, a yaw angle and a rotation angle, wherein the pitch angle refers to an angle value r y generated by rotating the conical glass-ceramic sample stage around the axis direction of a laser beam emitted by the second laser interferometer, the rotation angle refers to an angle value r x generated by rotating the conical glass-ceramic sample stage around the axis direction of the laser beam emitted by the longitudinal laser interferometer, and the yaw angle refers to an angle value r z generated by rotating the conical glass-ceramic sample stage around the axis direction of the laser beam emitted by the first laser interferometer, wherein the displacement measurement errors caused by the pitch angle, the yaw angle and the rotation angle are required to be compensated in the measurement process of the instrument.
The compensation process comprises the steps that the cross-shaped moving surface 3-6 drives the conical glass ceramic sample stage 3-1 to move in the transverse direction and the longitudinal direction, the vertical moving mechanism 4 controls the vertical shaft 4-1 to move the probe 2-2 in the vertical direction, the longitudinal laser interferometer 2-5 obtains displacement x 'and yaw angle r y and pitch angle r z, the second laser interferometer 2-4 obtains displacement y' and rotation angle r x, the first laser interferometer 2-3 obtains vertical shaft displacement z ', calculates transverse shaft displacement x', longitudinal shaft displacement y 'and vertical shaft displacement z' after being compensated by a sample piece according to a compensation formula, and the compensation formula is as follows:
When the measured piece is measured, the cross-shaped moving surface 3-6 drives the conical glass ceramic sample stage 3-1 to move transversely and longitudinally in an instrument coordinate system, the vertical moving mechanism 4 controls the vertical shaft 4-1 to move the probe 2-2 in the vertical direction, when the probe 2-2 contacts with the measured piece, after the feedback of the probe 2-2 reaches a set threshold value, the contact position is a point of the position to be detected,
In an instrument coordinate system, when a probe 2-2 and a to-be-detected piece relatively move, the probe 2-2 is continuously moved to be in contact with the to-be-detected piece, when the probe 2-2 is in contact with the to-be-detected piece, the contact position is set to be an ith to-be-detected position point, according to displacement values compensated by a longitudinal laser interferometer 2-5, a first laser interferometer 2-3 and a second laser interferometer 2-4, in the instrument coordinate system, coordinates (a i′,bi′,ci ') of the ith to-be-detected position point, i=1, and N are obtained, and coordinates (a i′,bi′,ci') of the ith to-be-detected position point, i=1, and N are required to be converted into a standard coordinate system through a conversion formula (1), and coordinates (a i,bi,ci), i=1, and N are obtained
The conversion formula (1) is:
wherein θ= -45 °
If the rotating shaft 3-10 is matched for measurement, the rotating shaft 3-10 drives the sample to be measured to rotate by an angleRotation angleAfterwards, the cross-shaped moving surface 3-6 drives the conical glass ceramic sample stage 3-1 to move transversely and longitudinally, the vertical moving mechanism 4 controls the vertical shaft 4-1 to move the probe 2-2 in the vertical direction, and the coordinate (a 2 j,b2j,c2j) of a j-th position point to be detected is obtained under an instrument coordinate system, j=n+1, and n+k, wherein N, K is an integer;
The probe 2-2 is contacted with the sample to be detected, the contact position is set to be the ith position point to be detected when the probe 2-2 is contacted with the sample to be detected before rotation, so that a group of coordinate values (a i,bi,ci), i=1, N, after rotation, the contact position is set to be the jth position point to be detected when the probe 2-2 is contacted with the sample to be detected, so that a group of new coordinate values (a 2 j,b2j,c2j), j=n+1, the coordinate system where n+K is located is also changed, the group of new coordinate values (a 2 j,b2j,c2j), j=n+1, obtained after rotation, are processed by a conversion formula (2), and the surface coordinate (a 2 j,b2j,c2j) is converted into the standard coordinate system by the conversion formula, so that a coordinate (a j,bj,cj) is obtained;
Wherein, the conversion formula (2) is:
and combining the coordinates (a j,bj,cj) of the position points to be detected and the coordinates (a i,bi,ci) of the position points to be detected to obtain a group of surface coordinate sets (a i,bi,ci) of the piece to be detected, wherein i=1.
If the rotating shaft 3-10 is not used, according to the displacement values obtained by measuring according to the longitudinal laser interferometer 2-5, the first laser interferometer 2-3 and the second laser interferometer 2-4, after the probe judges one-time qualified contact, the coordinate of one measuring point on the surface of the piece to be measured can be obtained according to each displacement value after error compensation and data processing, and the shape and position errors of the piece to be measured with complex shape can be measured with high precision by a plurality of measuring points on the surface of the piece to be measured.
In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "front," "rear," and the like indicate an azimuth or a positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, but do not indicate or imply that the apparatus or elements to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected through an intermediary, or communicating between the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Embodiments of the invention and features of the embodiments may be combined with each other without conflict.
The foregoing examples merely illustrate embodiments of the invention and are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (5)
1. A shape and position error measuring instrument with a cross motion surface and an oblique orthogonal measurement reference matched is characterized in that a vertical support column (1-2) is respectively arranged on the left side and the right side of a main machine seat (1-3), and a shaft seat (1-1) is supported and assembled on the vertical support column (1-2);
The shaft seat (1-1) is provided with a penetrating vertical connecting hole (4-5) along the vertical direction, the inner wall of the vertical connecting hole (4-5) is provided with a mounting groove (4-6), a vertical shaft (4-1) is inserted on the vertical connecting hole (4-5) in a vertically up-down moving way, a hanging frame (2-1) is arranged at the lower end part of the vertical shaft (4-1), a probe (2-2) is arranged at the upper end of the hanging frame (2-1), two vertical sides of the vertical shaft (4-1) are respectively provided with a fixing groove (4-7) at one end close to the probe (2-2), a buffer cylinder (4-3) is fixedly arranged on the inner wall of the vertical connecting hole (4-5) through a buffer cylinder fixing block (4-4), the telescopic end of the buffer cylinder (4-3) is connected with the inner wall of the fixing groove (4-7), a nanometer motor (4-2) is arranged in the mounting groove (4-6), and the output shaft of the nanometer motor (4-2) moves along a straight line and can drive the vertical shaft (4-1) to slide along the vertical direction;
A motion seat (3-5) is assembled on the upper end face of the main machine seat (1-3) and the inner sides of two vertical support columns (1-2), transverse air floating shaft sleeves (3-3) are assembled on the left side and the right side of the motion seat (3-5) respectively, the transverse air floating shaft sleeves (3-3) on the left side and the right side are connected by utilizing a transverse connecting piece (3-7), longitudinal air floating shaft sleeves (3-9) are assembled on the front side and the rear side of the motion seat (3-5) respectively, longitudinal air floating shaft sleeves (3-9) on the front side and the rear side are connected by utilizing a longitudinal connecting piece (3-8), an air floating shaft sleeve upper cover (3-4) is arranged on the upper ends of the transverse air floating shaft sleeves (3-3) and the longitudinal air floating shaft sleeves (3-9) so as to fix a cross-shaped motion surface (3-6), sample table supporting surfaces (3-2) are respectively arranged on the front side and the rear side of the cross-shaped moving surface (3-6), a conical microcrystalline glass sample table (3-1) is fixedly arranged on the sample table supporting surface (3-2), the conical microcrystalline glass sample table (3-1) is made of microcrystalline glass, the three surfaces of the conical microcrystalline glass sample table are respectively a first laser reflecting surface (3-1-2), a second laser reflecting surface (3-1-3) and a longitudinal laser reflecting surface (3-1-4), and the first laser reflecting surface (3-1-2), the second laser reflecting surface (3-1-3) and the longitudinal laser reflecting surface (3-1-4) are mutually perpendicular;
The upper end of the sample fixing and matching surface (3-1-1) is positioned at the inner sides of the first laser reflecting surface (3-1-2), the second laser reflecting surface (3-1-3) and the longitudinal laser reflecting surface (3-1-4) and is provided with a rotating shaft (3-10);
A hanging frame (2-1) and a probe (2-2) are arranged at the lower end part of the vertical shaft (4-1), the upper end part of the hanging frame (2-1) is provided with a first laser interferometer (2-3), a second laser interferometer (2-4) and a longitudinal laser interferometer (2-5) on the hanging frame (2-1), laser rays emitted by the first laser interferometer (2-3), the second laser interferometer (2-4) and the longitudinal laser interferometer (2-5) are respectively perpendicular to the first laser reflecting surface (3-1-2), the second laser reflecting surface (3-1-3) and the longitudinal laser reflecting surface (3-1-4), and ranging function beams in three laser rays are orthogonally collected at a ball measuring center of the probe (2-2).
2. The shape and position error measuring instrument with the cross motion surface and the inclined orthogonal measurement reference matched according to claim 1, wherein the laser rays emitted by the first laser interferometer (2-3), the second laser interferometer (2-4) and the longitudinal laser interferometer (2-5) comprise a distance measuring function laser beam and an angle measuring function laser beam.
3. The shape and position error measuring instrument with the cross motion surface and the oblique orthogonal measurement reference matched is characterized in that when the instrument works, a probe (2-2) measuring head is positioned at the inner side of the first laser reflection surface (3-1-2), the second laser reflection surface (3-1-3) and the longitudinal laser reflection surface (3-1-4).
4. The form and position error measuring instrument with the cross motion surface and the oblique orthogonal measurement reference matched according to claim 1, wherein:
The cross-shaped movement surface (3-6) drives the conical glass ceramic sample table (3-1) to move transversely and longitudinally, and the vertical movement mechanism (4) controls the vertical shaft (4-1) to move the probe (2-2) in the vertical direction;
The longitudinal laser interferometer (2-5) obtains displacement as x '', obtains yaw angle as r y and obtains pitch angle as r z;
the second laser interferometer (2-4) obtains displacement y '' and obtains a rotation angle r x;
the first laser interferometer (2-3) obtains the vertical axis displacement as z';
Calculating the transverse axis displacement x ', the longitudinal axis displacement y ' and the vertical axis displacement z ' of the sample piece after compensation according to a compensation formula;
The compensation formula is as follows:
5. the form and position error measuring instrument with the cross motion surface and the oblique orthogonal measurement reference matched according to claim 1, wherein:
In a coordinate system of a piece to be measured, when the piece to be measured is measured, the cross-shaped moving surface (3-6) drives the conical glass ceramic sample stage (3-1) to move transversely and longitudinally, the vertical moving mechanism (4) controls the vertical shaft (4-1) to move the probe (2-2) in the vertical direction, and the coordinate (a i′,bi′,ci') of an ith position point to be detected is obtained, i=1,.,.
Coordinates (a i′,bi′,ci') of the i-th time to-be-detected position point, i=1, N needs to be converted into a standard coordinate system by a conversion formula (1) to obtain coordinates (a i,bi,ci), i=1
The conversion formula (1) is:
wherein θ= -45 °
The rotary shaft (3-10) drives the sample to be tested to rotate by an angleRotation angleThen, the cross-shaped moving surface (3-6) drives the conical glass ceramic sample stage (3-1) to move transversely and longitudinally, the vertical moving mechanism (4) controls the vertical shaft (4-1) to move the probe (2-2) in the vertical direction, and the coordinate (a 2 j,b2j,c2j) of a j-th position point to be detected is obtained under an instrument coordinate system, j=n+1, and n+k, wherein N, K is an integer;
Converting the surface coordinates (a 2 j,b2j,c2j) into the standard coordinate system through a conversion formula to obtain coordinates (a j,bj,cj), wherein the conversion formula (2) is as follows:
and combining the coordinates (a j,bj,cj) of the position points to be detected and the coordinates (a i,bi,ci) of the position points to be detected to obtain a group of surface coordinate sets (a i,bi,ci) of the piece to be detected, wherein i=1.
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| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
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| CN106352823A (en) * | 2016-08-26 | 2017-01-25 | 中国航空工业集团公司北京长城计量测试技术研究所 | System for measuring composite coordinate based on multi-aiming device |
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