[go: up one dir, main page]

CN115373345A - Method and system for intelligent processing - Google Patents

Method and system for intelligent processing Download PDF

Info

Publication number
CN115373345A
CN115373345A CN202110556050.8A CN202110556050A CN115373345A CN 115373345 A CN115373345 A CN 115373345A CN 202110556050 A CN202110556050 A CN 202110556050A CN 115373345 A CN115373345 A CN 115373345A
Authority
CN
China
Prior art keywords
processing
information
parameter
image
processed object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110556050.8A
Other languages
Chinese (zh)
Inventor
陈文生
李彦志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SYNPOWER CO Ltd
Original Assignee
SYNPOWER CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SYNPOWER CO Ltd filed Critical SYNPOWER CO Ltd
Priority to CN202110556050.8A priority Critical patent/CN115373345A/en
Publication of CN115373345A publication Critical patent/CN115373345A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/04Architecture, e.g. interconnection topology
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Computing Systems (AREA)
  • Computational Linguistics (AREA)
  • Artificial Intelligence (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Image Processing (AREA)

Abstract

The present invention provides an intelligent processing method and system for integrating the on-line processing, detection and calibration of processing equipment. The system comprises a marking device, a rough judgment device, a fine judgment device, a processing information acquisition device and a measurement/parameter correction device. The marking device is used for marking the processing information on the processed object. The rough judgment device is an automatic vision detection device realized by an optical detection instrument, and can primarily screen the products with flaws. The precise determination device identifies the type of the defect through artificial intelligence. The processing information acquiring device is used for identifying the processing parameters of the processing information. The measuring/parameter correcting device can measure the size of the flaw and calculate the best result of adjusting the processing parameter according to the flaw size and the processing parameter.

Description

智能化加工之方法与系统Method and system for intelligent processing

技术领域technical field

本发明系关于一种自动化加工流程之优化,特别是一种智慧化加工之方法与系统。The present invention relates to the optimization of an automated processing flow, in particular to a method and system for intelligent processing.

背景技术Background technique

生产制程从加工、检测、校正加工机台等过程乃是环环相扣,任一步骤失误终将导致产品良率不足、产能下降等问题。而上述生产制程过去常会被切割成不同专责部门进行,在人工沟通或配合上亦容易浪费许多时间成本。例如:透过自动光学检测产品时,尽管可以取代人工执行普检,但发现瑕疵产品时,仍需要人工再进行复检,以量测以及辨识瑕疵,并再将瑕疵数据交予生产单位,生产单位再校正生产机台的参数。而上述流程不但不连贯且旷日废时,且大多数的情况是无法藉由一次性校正机台之参数,立刻获得理想的良率,实际上是需要多次的校正。The production process is closely linked from processing, testing, and calibration of processing machines. Any mistake in any step will eventually lead to problems such as insufficient product yield and reduced production capacity. In the past, the above-mentioned production process was often divided into different specialized departments, and it was easy to waste a lot of time and cost in manual communication or cooperation. For example, although automatic optical inspection of products can replace manual general inspection, when defective products are found, manual re-inspection is still required to measure and identify defects, and then hand over the defect data to the production unit for production The unit recalibrates the parameters of the production machine. The above-mentioned process is not only incoherent and time-consuming, but also in most cases, it is impossible to obtain the ideal yield immediately by calibrating the parameters of the machine once, and actually requires multiple calibrations.

随着技术的不断发展,「工业4.0」一词在2011年已被提出,主要精神为智慧化在自动化之生产流程,并可以主动排除生产时的问题。With the continuous development of technology, the term "Industry 4.0" was proposed in 2011. The main spirit is to automate the production process intelligently and actively eliminate production problems.

因此,为解决上述的问题,所属领域应开发符合「工业4.0」精神的加工方法与系统,以提升生产制程之效率,并不断提升产品的良率。Therefore, in order to solve the above problems, the field should develop processing methods and systems in line with the spirit of "Industry 4.0" to improve the efficiency of the production process and continuously improve the yield of products.

发明内容Contents of the invention

为解决上述问题,本发明之实施例发展出一种智能化加工之方法与系统,上述系统整合产品溯源、光学仪器初检、基于人工智能复检、虚拟量测、自动优化参数等技术。本发明申请人参考过去所申请之专利案,包括:TW109132726、TW109124011、TW110107077、TW109212512以及TW109136592,作为本发明技术之参考。In order to solve the above problems, the embodiment of the present invention develops a method and system for intelligent processing. The above system integrates technologies such as product traceability, optical instrument initial inspection, artificial intelligence-based re-inspection, virtual measurement, and automatic parameter optimization. The applicant of the present invention refers to the patents filed in the past, including: TW109132726, TW109124011, TW110107077, TW109212512 and TW109136592, as a reference for the technology of the present invention.

具体而言,本发明之实施例提供一种智能化加工系统,上述智能化加工系统应用于至少一个加工装置,上述加工装置根据加工参数对待加工物进行加工,并产生被加工物。上述智能化加工系统包括至少一个标示装置、粗判装置、精判装置、加工信息获取装置以及量测/参数校正装置。Specifically, an embodiment of the present invention provides an intelligent processing system, the above-mentioned intelligent processing system is applied to at least one processing device, and the above-mentioned processing device processes the object to be processed according to the processing parameters and generates the object to be processed. The above-mentioned intelligent processing system includes at least one marking device, a rough judgment device, a fine judgment device, a processing information acquisition device and a measurement/parameter correction device.

依据又一实施例,上述标示装置,于上述被加工物上标示加工信息,其中上述加工信息包括至少一个上述加工参数。上述标示装置之加工信息之记录方式包括文字、数字、符号以及图码,其中上述图码包括一维条形码以及二维条形码。上述标示装置之加工信息更包括制造批次、产品型号以及制造日期。According to yet another embodiment, the above-mentioned marking device marks processing information on the above-mentioned workpiece, wherein the above-mentioned processing information includes at least one of the above-mentioned processing parameters. The recording methods of the processing information of the above-mentioned marking device include characters, numbers, symbols and image codes, wherein the above-mentioned image codes include one-dimensional barcodes and two-dimensional barcodes. The processing information of the above-mentioned marking device further includes manufacturing batch, product model and manufacturing date.

依据又一实施例,上述粗判装置,系为初检上述被加工物是否具有至少一个瑕疵处,并产生至少一个被加工物影像,其中上述粗判装置系为自动视觉检测装置。上述自动视觉检测装置的初检方法包括轮廓比对、位置坐标比对、3D轮廓比对、色泽比对以及亮度比对。上述自动视觉检测装置组成包括至少一个取像单元、至少一个测距单元、计算单元以及数据库。上述测距单元,用以产生撷取该被加工物之一取像距离信息。上述数据库,系为储存复数个标准尺寸信息,每一个上述标准尺寸信息分别包括单位面积之分辨率、取像距离、对应之画素矩阵以及对应的实际尺寸与膜厚高度。上述计算单元根据上述被加工物影像之分辨率信息以及上述取像距离信息,比对上述数据库中之上述标准尺寸信息,计算产生具有实际尺寸信息之上述被加工物影像。上述数据库中之上述标准尺寸信息例如可为二维尺寸或三维尺寸,并进一步由上述计算单元计算出具有二维尺寸或三维尺寸之上述实际尺寸。上述被加工物影像可为2D或3D。According to yet another embodiment, the rough judging device is for initially checking whether the processed object has at least one defect and generating at least one image of the processed object, wherein the rough judging device is an automatic visual inspection device. The preliminary inspection method of the above-mentioned automatic visual inspection device includes contour comparison, position coordinate comparison, 3D contour comparison, color luster comparison and brightness comparison. The above-mentioned automatic visual inspection device comprises at least one imaging unit, at least one distance measuring unit, a computing unit and a database. The above distance measuring unit is used to generate information on the imaging distance for capturing the processed object. The above-mentioned database is for storing a plurality of standard size information, and each of the above-mentioned standard size information includes the resolution per unit area, the imaging distance, the corresponding pixel matrix, and the corresponding actual size and film thickness. The calculation unit compares the standard size information in the database according to the resolution information of the processed object image and the imaging distance information, and calculates and generates the processed object image with actual size information. The above-mentioned standard size information in the above-mentioned database can be, for example, a two-dimensional size or a three-dimensional size, and the above-mentioned actual size having a two-dimensional size or a three-dimensional size is further calculated by the above-mentioned calculation unit. The image of the workpiece can be 2D or 3D.

依据又一实施例,上述精判装置,讯号连接上述粗判装置,系为复检上述被加工物影像是否具有至少一个瑕疵处,并辨识上述被加工物影像中所含的瑕疵类型,并产生辨识结果。上述精判装置更包括分类模块,上述分类模块系为应用人工神经网络执行辨识上述瑕疵类型。上述分类模块之训练数据报括上述辨识结果以及人工复判结果。According to yet another embodiment, the above-mentioned fine judging device is connected to the above-mentioned rough judging device for re-checking whether the image of the processed object has at least one defect, and identifying the type of defect contained in the image of the processed object, and generating Identification result. The fine-judgment device further includes a classification module, and the classification module is used to identify the type of the defect by using an artificial neural network. The training data of the above-mentioned classification module includes the above-mentioned recognition results and manual re-judgment results.

依据又一实施例,上述加工信息获取装置,讯号连接上述精判装置,系为辨识上述被加工物影像之上述加工信息,并产生上述加工参数。According to yet another embodiment, the above-mentioned processing information acquisition device is connected to the above-mentioned precise judging device with a signal to identify the above-mentioned processing information of the above-mentioned processed object image, and generate the above-mentioned processing parameters.

依据又一实施例,上述量测/参数校正装置,讯号连接上述精判装置,系为量测上述被加工物影像之瑕疵处,并产生瑕疵尺寸,再根据上述瑕疵尺寸以及上述加工参数,计算上述加工参数之最佳结果,进而产生校正加工参数,并传输上述校正加工参数至上述加工装置。上述量测/参数校正装置更包括参数优化模块,上述参数优化模块系为应用算法计算上述加工参数之最佳结果。上述瑕疵尺寸例如可为二维尺寸或三维尺寸。According to yet another embodiment, the above-mentioned measurement/parameter correction device is connected to the above-mentioned fine-judgment device for measuring the defect of the image of the processed object, and generates the size of the defect, and then calculates according to the size of the defect and the above-mentioned processing parameters. The optimal result of the above-mentioned processing parameters, and then generate the corrected processing parameters, and transmit the above-mentioned corrected processing parameters to the above-mentioned processing device. The above-mentioned measurement/parameter correction device further includes a parameter optimization module, and the above-mentioned parameter optimization module is to calculate the best result of the above-mentioned processing parameters by applying an algorithm. The above-mentioned flaw size may be, for example, a two-dimensional size or a three-dimensional size.

依据又一实施例,上述量测/参数校正装置,系当上述被加工物具有设计图,可进一步将上述设计图与上述被加工物影像叠合,产生一叠合影像,以作为量测该瑕疵尺寸之依据。According to yet another embodiment, the above-mentioned measurement/parameter correction device, when the above-mentioned processed object has a design drawing, can further superimpose the above-mentioned design drawing and the above-mentioned processed object image to generate a superimposed image as a measure of the The basis for the size of the defect.

依据又一实施例,上述量测/参数校正装置更包括提供事先设定上述设计图中至少一处监测量测区域,并再对上述叠合影像之上述监测量测区域进行量测,并产生监测尺寸信息。而上述监测量测区域在图像处理上可视为一种感兴趣区域或重点区域(Region ofinterest;简称ROI)。According to yet another embodiment, the above measurement/parameter correction device further includes providing at least one monitoring measurement area in the above design drawing in advance, and then measuring the above monitoring measurement area of the above superimposed image, and generating Monitor size information. The above-mentioned monitoring measurement area can be regarded as a region of interest or a key region (Region of interest; ROI for short) in terms of image processing.

依据又一实施例,上述量测/参数校正装置,可进一步将上述监测尺寸信息经统计产生监测统计信息,且上述监测统计信息将作为计算上述加工参数之计算数据。上述监测尺寸信息例如可为二维尺寸或三维尺寸的信息。According to yet another embodiment, the measurement/parameter correction device can further generate monitoring statistical information through statistics of the monitoring size information, and the monitoring statistical information will be used as calculation data for calculating the processing parameters. The above-mentioned monitoring size information may be, for example, two-dimensional or three-dimensional information.

依据又一实施例,根据上述加工参数进行加工时,可透过上述精判装置所发现的瑕疵处的数量,进一步计算出上述加工参数所对应之生产良率。According to yet another embodiment, when processing according to the above-mentioned processing parameters, the production yield corresponding to the above-mentioned processing parameters can be further calculated through the number of defects found by the above-mentioned precise judging device.

依据又一实施例,上述生产良率的合格标准可依使用者需求调整,若上述加工参数所产生的良率已符合上述合格标准,上述加工参数可进一步作为执行虚拟量测(VirtualMetrology;简称VM)之参考参数。上述虚拟量测系指透过加工参数推估生产的结果(或质量),以达到全检的目的。According to yet another embodiment, the qualification standard of the above-mentioned production yield rate can be adjusted according to the needs of users. If the yield rate generated by the above-mentioned processing parameters meets the above-mentioned standard, the above-mentioned processing parameters can be further used as a virtual metrology (Virtual Metrology; VM for short) ) reference parameters. The above-mentioned virtual measurement refers to estimating the production result (or quality) through processing parameters to achieve the purpose of full inspection.

依据又一实施例,上述量测/参数校正装置,系当上述瑕疵尺寸超出预设的阈值时,上述量测/参数校正装置将停止自动更正上述加工参数,并产生警示通知。According to yet another embodiment, the measurement/parameter correction device is configured to stop automatically correcting the processing parameters and generate a warning notification when the size of the defect exceeds a preset threshold.

依据又一实施例,上述该精判装置接收到上述警示通知,将不会将上述警示通知所对应之辨识结果作为训练上述分类模块之上述训练数据。According to yet another embodiment, upon receiving the warning notification, the above-mentioned fine judgment device will not use the identification result corresponding to the warning notification as the training data for training the classification module.

依据又一实施例,上述警示通知,可透过简讯或邮件,实时通知系统管理人员。According to yet another embodiment, the above-mentioned warning notification can be notified to the system management personnel in real time through text messages or emails.

本发明之实施例更提供一种智能化加工方法,包括以下步骤。于加工装置默认加工参数;对待加工物进行加工,并产生被加工物;于上述被加工物上标示加工信息,上述加工信息包括上述加工参数;以粗判装置对上述被加工物进行初检,并撷取至少一个被加工物影像以及取像距离信息,其中该粗判装置系可为自动视觉检测装置;再透过上述粗判装置所载之多个标准尺寸信息,比对上述取像距离信息,产生上述被加工物影像之实际尺寸信息;以精判装置进行复检,并应用分类模块辨识上述被加工物影像中所含的瑕疵类型,并产生辨识结果,其中上述分类模块系应用人工神经网络执行上述辨识瑕疵类型;将上述被加工物的设计图与上述被加工物影像叠合,产生叠合影像,再对上述叠合影像执行量测瑕疵处,并产生瑕疵尺寸;辨识上述加工信息,产生上述加工参数;以量测/参数校正装置透过参数优化模块,根据上述瑕疵尺寸与上述加工参数,计算该加工参数之最佳结果,并产生校正加工参数,并传输至上述加工装置,其中上述参数优化模块系应用人工神经网络执行加工参数优化。An embodiment of the present invention further provides an intelligent processing method, including the following steps. Default processing parameters in the processing device; process the object to be processed and produce the processed object; mark the processing information on the above-mentioned processed object, the above-mentioned processing information includes the above-mentioned processing parameters; use the rough judgment device to perform a preliminary inspection on the above-mentioned processed object, And capture at least one processed object image and imaging distance information, wherein the rough judging device can be an automatic visual inspection device; then compare the above-mentioned imaging distance through the multiple standard size information carried by the rough judging device Information, to generate the actual size information of the image of the processed object; re-inspect with the precise judgment device, and use the classification module to identify the type of defects contained in the image of the processed object, and generate the identification result, wherein the above classification module is applied artificially The neural network performs the above-mentioned identification of defect types; superimposes the design drawing of the above-mentioned processed object with the above-mentioned image of the processed object to generate a superimposed image, and then performs measurement of the defect on the above-mentioned superimposed image to generate the size of the defect; identifies the above-mentioned processing information to generate the above-mentioned processing parameters; use the measurement/parameter correction device through the parameter optimization module to calculate the best result of the processing parameters based on the above-mentioned defect size and the above-mentioned processing parameters, and generate corrected processing parameters, and transmit them to the above-mentioned processing device , wherein the above-mentioned parameter optimization module uses an artificial neural network to perform processing parameter optimization.

依据又一实施例,根据上述方法更包括质量监测之步骤,系事先透过上述量测/参数校正装置中设定上述被加工物的设计图中至少一处监测量测区域,并再对上述叠合影像之上述监测量测区域进行量测,并产生监测尺寸信息。According to yet another embodiment, the above method further includes the step of quality monitoring, which is to set at least one monitoring measurement area in the design drawing of the above-mentioned processed object in the above-mentioned measurement/parameter correction device in advance, and then perform the above-mentioned The above-mentioned monitoring measurement area of the superimposed image is measured, and the monitoring size information is generated.

依据又一实施例,根据上述方法上述量测/参数校正装置,可进一步将上述监测尺寸信息经统计产生监测统计信息,且上述监测统计信息将作为计算上述加工参数之计算数据。According to yet another embodiment, according to the above-mentioned measurement/parameter correction device, the above-mentioned monitoring size information can be further calculated to generate monitoring statistical information, and the above-mentioned monitoring statistical information will be used as calculation data for calculating the above-mentioned processing parameters.

依据又一实施例,根据上述方法并可依上述加工参数进行加工时,透过上述精判装置所发现的瑕疵处的数量,进一步计算出上述加工参数所对应之生产良率。According to yet another embodiment, when processing according to the above-mentioned method and the above-mentioned processing parameters, the production yield corresponding to the above-mentioned processing parameters is further calculated through the number of defects found by the above-mentioned precise judging device.

依据又一实施例,根据上述方法上述生产良率的合格标准可依使用者需求调整,若上述加工参数所产生的良率已符合上述合格标准,上述加工参数可进一步作为执行虚拟量测(Virtual Metrology;简称VM)之参考参数。上述虚拟量测系指透过加工参数推估生产的结果(或质量),以达到全检的目的。According to yet another embodiment, according to the above-mentioned method, the qualification standard of the above-mentioned production yield rate can be adjusted according to the needs of users. If the yield rate produced by the above-mentioned processing parameters meets the above-mentioned standard, the above-mentioned processing parameters can be further used as a virtual measurement (Virtual Measurement) Metrology; referred to as VM) reference parameters. The above-mentioned virtual measurement refers to estimating the production result (or quality) through processing parameters to achieve the purpose of full inspection.

依据又一实施例,根据上述方法之上述分类模块之训练数据报括上述辨识结果以及人工复判结果。According to yet another embodiment, the training data of the above-mentioned classification module according to the above-mentioned method includes the above-mentioned recognition results and manual re-judgment results.

依据又一实施例,根据上述方法之上述瑕疵尺寸超出阈值时,上述量测/参数校正装置将停止自动更正该加工参数,并产生警示通知。According to yet another embodiment, when the defect size exceeds a threshold according to the above method, the measurement/parameter correction device will stop automatically correcting the processing parameters and generate a warning notification.

依据又一实施例,根据上述方法之上述精判装置接收到上述警示通知,将不会将上述警示通知所对应之辨识结果作为训练上述分类模块之上述训练数据。According to yet another embodiment, upon receiving the warning notification, the fine judgment device according to the above method will not use the identification result corresponding to the warning notification as the training data for training the classification module.

依据又一实施例,根据上述方法之上述粗判装置的初步检测方法包括3D轮廓比对、位置坐标比对、色泽比对以及亮度比对。According to yet another embodiment, the preliminary detection method of the rough judgment device according to the above method includes 3D contour comparison, position coordinate comparison, color luster comparison and brightness comparison.

依据又一实施例,根据上述方法之上述多个标准尺寸信息分别包括单位面积之分辨率、取像距离、对应之画素矩阵以及对应的实际尺寸与膜厚高度。According to yet another embodiment, the plurality of standard size information according to the above method respectively include resolution per unit area, imaging distance, corresponding pixel matrix, and corresponding actual size and film thickness.

依据又一实施例,根据上述方法之上述加工信息之记录方式包括文字、数字、符号以及图码,其中上述图码包括一维条形码以及二维条形码。According to yet another embodiment, the recording method of the processing information according to the above method includes characters, numbers, symbols and image codes, wherein the image codes include one-dimensional barcodes and two-dimensional barcodes.

综合上述实施例之技术特征,因此可具体主张以下功效。Based on the technical features of the above-mentioned embodiments, the following effects can be specifically claimed.

(1)本系统应用在加工制程上,达到智能化与全自动化的功效,并可同时串连数个加工站点的加工设备,以自动执行各站点之加工设备之被加工物的初判与复判检测。(1) This system is applied in the processing process to achieve the effect of intelligence and full automation. It can also connect processing equipment of several processing stations in series at the same time, so as to automatically perform the initial judgment and re-judgment of the processed objects of the processing equipment of each station. Judgment detection.

(2)透过本系统加工的产品,均可藉由产品上的加工信息,实时溯源各站点加工参数,可快速厘清造成产品良率不足的来自于哪些站点。(2) For products processed through this system, the processing information on the product can be used to trace the processing parameters of each site in real time, which can quickly clarify which sites cause the insufficient yield rate of the product.

(3)本系统根据上述初判与复判检测结果,并透过人工神经网络,可自动分类瑕疵种类以及对该瑕疵执行量测,并获得瑕疵尺寸的信息。(3) The system can automatically classify the type of defect and perform measurement on the defect based on the above-mentioned preliminary judgment and re-judgment detection results, and through the artificial neural network, and obtain information on the size of the defect.

(4)本系统在收集上述加工参数与瑕疵尺寸后,可进一步透过算法计算上述加工参数之最佳结果,并产生校正加工参数,再将该校正加工参数回传至上述加工设备,达到实时优化加工参数之功效。(4) After the system collects the above-mentioned processing parameters and defect sizes, it can further calculate the optimal result of the above-mentioned processing parameters through an algorithm, and generate corrected processing parameters, and then send the corrected processing parameters back to the above-mentioned processing equipment to achieve real-time The effect of optimizing processing parameters.

附图说明Description of drawings

为让本发明之上述和其他目的、特征、优点与实施例能更明显易懂,所附附图之说明如下:In order to make the above and other objects, features, advantages and embodiments of the present invention more comprehensible, the accompanying drawings are described as follows:

图1所绘为根据本发明之一实施例之一种智能化加工系统之装置示意图。FIG. 1 is a device schematic diagram of an intelligent processing system according to an embodiment of the present invention.

图2所绘为根据本发明之一实施例之一种智能化加工系统应用于多个加工设备之装置示意图。FIG. 2 is a schematic diagram of an intelligent processing system applied to multiple processing equipment according to an embodiment of the present invention.

图3所绘为根据本发明之一实施例之一种智能化加工系统之流程图。FIG. 3 is a flowchart of an intelligent processing system according to an embodiment of the present invention.

图4所绘为根据本发明之一实施例之一种智能化加工系统之质量监测流程图。FIG. 4 is a flowchart of quality monitoring of an intelligent processing system according to an embodiment of the present invention.

具体实施方式Detailed ways

为更具体说明本发明之各实施例,以下辅以附图进行说明。In order to describe various embodiments of the present invention in more detail, the following description is supplemented with accompanying drawings.

请参阅图1,图1所绘为根据本发明之一实施例之一种智能化加工系统之装置示意图。在图1中,依据一实施例,提供一种智能化加工系统100。上述智能化加工系统100应用于至少一个加工装置110,上述加工装置110根据加工参数对待加工物200进行加工,并产生被加工物220,上述系统100包括:标示装置120、粗判装置130、精判装置140、加工信息获取装置160以及量测/参数校正装置180。上述智能化加工系统100中的每个组件都可以是透过软件加上硬件来实现,或者透过纯硬件来实现,且本发明不以此为限制。Please refer to FIG. 1 . FIG. 1 is a device schematic diagram of an intelligent processing system according to an embodiment of the present invention. In FIG. 1 , an intelligent processing system 100 is provided according to an embodiment. The above-mentioned intelligent processing system 100 is applied to at least one processing device 110. The above-mentioned processing device 110 processes the object to be processed 200 according to the processing parameters, and produces the object to be processed 220. The above-mentioned system 100 includes: a marking device 120, a rough judgment device 130, a fine Judgment device 140, processing information acquisition device 160, and measurement/parameter correction device 180. Each component in the above-mentioned intelligent processing system 100 can be realized through software plus hardware, or through pure hardware, and the present invention is not limited thereto.

上述标示装置120,于上述被加工物220上标示加工信息,其中上述加工信息包括至少一个上述加工参数。上述标示装置120之加工信息之记录方式包括文字、数字、符号以及图码,其中上述图码包括一维条形码以及二维条形码。上述标示装置120之加工信息更包括制造批次、产品型号以及制造日期。例如:于印刷电路板成品或半成品上印制二维图码,并可提供日后透过扫描或辨识该二维图码,即可产生历史加工参数纪录。The marking device 120 marks processing information on the workpiece 220, wherein the processing information includes at least one processing parameter. The recording methods of the processing information of the above-mentioned marking device 120 include characters, numbers, symbols and image codes, wherein the above-mentioned image codes include one-dimensional barcodes and two-dimensional barcodes. The processing information of the above-mentioned marking device 120 further includes manufacturing batch, product model and manufacturing date. For example: print a two-dimensional image code on the finished or semi-finished printed circuit board, and provide a record of historical processing parameters by scanning or identifying the two-dimensional image code in the future.

上述粗判装置130,系为初检上述被加工物220是否具有至少一个瑕疵处,并产生至少一个被加工物影像,其中上述粗判装置系为自动视觉检测装置。上述自动视觉检测装置的初检方法包括3D轮廓比对、位置坐标比对、色泽比对以及亮度比对。本系统之粗判装置130于初判标准通常较严谨,以避免忽略真正具有瑕疵的产品,但常会有误判的情形发生,例如印刷电路板中某处出现细微灰尘,即判定为瑕疵,如此虽可确保产品之良率,相对容易判别出假瑕疵。在过去将仅能再透过人工复判的方式排除上述的假瑕疵,而在本发明则可透过上述精判装置140进行瑕疵的复判与瑕疵分类,可大幅减少假瑕疵以及需人工复判的数量。The rough judging device 130 is for initially checking whether the processed object 220 has at least one flaw, and generates at least one image of the processed object, wherein the rough judging device is an automatic visual inspection device. The preliminary inspection method of the above-mentioned automatic visual inspection device includes 3D contour comparison, position coordinate comparison, color luster comparison and brightness comparison. The rough judging device 130 of this system is usually stricter in the initial judging criteria to avoid ignoring products that are really defective, but misjudgments often occur, for example, if there is fine dust somewhere in the printed circuit board, it is judged as a defect, so Although it can ensure the yield rate of the product, it is relatively easy to identify false defects. In the past, the above-mentioned false defects could only be eliminated through manual re-judgment, but in the present invention, the re-judgment and classification of defects can be carried out through the above-mentioned precise judgment device 140, which can greatly reduce false defects and the need for manual re-judgment number of judgments.

根据本发明之另一实施例,上述自动视觉检测装置组成包括至少一个取像单元、至少一个测距单元、计算单元以及数据库。上述测距单元,用以产生撷取该被加工物之一取像距离信息。上述数据库,系为储存复数个标准尺寸信息,每一个上述标准尺寸信息分别包括单位面积之分辨率、取像距离、对应之画素矩阵以及对应的实际尺寸与膜厚高度。上述计算单元根据上述被加工物220的影像之分辨率信息以及上述取像距离信息,比对上述数据库中之上述标准尺寸信息,计算产生具有实际尺寸信息之上述被加工物影像。上述粗判装置130例如可为配合影像辨识设备之计算器设备(具备CPU以及GPU)。According to another embodiment of the present invention, the above-mentioned automatic visual inspection device comprises at least one imaging unit, at least one distance measuring unit, a computing unit and a database. The above distance measuring unit is used to generate information on the imaging distance for capturing the processed object. The above-mentioned database is for storing a plurality of standard size information, and each of the above-mentioned standard size information includes the resolution per unit area, the imaging distance, the corresponding pixel matrix, and the corresponding actual size and film thickness. The calculation unit compares the standard size information in the database according to the resolution information of the image of the processed object 220 and the imaging distance information, and calculates and generates the image of the processed object with actual size information. The above-mentioned rough judgment device 130 can be, for example, a computer device (equipped with CPU and GPU) that cooperates with image recognition devices.

上述精判装置140,讯号连接上述粗判装置130,系为复检上述被加工物影像是否具有至少一个瑕疵处,并辨识上述被加工物影像中所含的瑕疵类型,并产生辨识结果。上述精判装置更包括分类模块142,上述分类模块142系为应用人工神经网络执行辨识上述瑕疵类型。上述分类模块142之训练数据报括上述辨识结果以及人工复判结果。上述分类模块142所应用之人工神经网络包括卷积神经网络模型(Convolutional Neural Network;简称CNN)。上述CNN模型更可选自包括R-CNN(Region-based Convolutional Neural Network)、Fast R-CNN、Faster R-CNN、RPN(Region Proposal Network)以及Mask R-CNN、FCN(FullyConvolutional Network)之一种进行瑕疵辨识与分类。另外,精判装置140除了可使用卷积神经网络模型来实现之外,其他对影像中部件分类的精密算法也可以拿来用于实现精判装置140,且本发明不以精判装置140的实现方式为限制。上述精判装置140可有效降低假瑕疵的数量以及需人工复判的数量,是否需要人工复判可藉由上述量测/参数校正装置180默认之阈值判定。上述假瑕疵以印刷电路板为例可包括:板边假点、细微板屑、灰尘以及待测子板与母板相异。上述精判装置140例如可为具有运算能力之计算器(具备CPU)。The fine judging device 140 is connected to the rough judging device 130 for rechecking whether the image of the processed object has at least one defect, identifying the type of defect contained in the image of the processed object, and generating a recognition result. The fine-judgment device further includes a classification module 142, and the classification module 142 is used to identify the above-mentioned defect types by using an artificial neural network. The training data of the above-mentioned classification module 142 includes the above-mentioned recognition results and manual re-judgment results. The artificial neural network applied by the classification module 142 includes a convolutional neural network model (Convolutional Neural Network; CNN for short). The above CNN model can be selected from one of R-CNN (Region-based Convolutional Neural Network), Fast R-CNN, Faster R-CNN, RPN (Region Proposal Network) and Mask R-CNN, FCN (Fully Convolutional Network) Identify and classify defects. In addition, besides the convolutional neural network model, other precise algorithms for classifying parts in images can also be used to realize the precise judgment device 140, and the present invention does not rely on the precise judgment device 140. The implementation is limited. The precise judgment device 140 can effectively reduce the number of false defects and the number of manual re-judgment. Whether manual re-judgment is required can be judged by the default threshold value of the measurement/parameter correction device 180 . Taking the printed circuit board as an example, the above-mentioned false defects may include: false spots on the edge of the board, fine board scraps, dust, and differences between the sub-board to be tested and the mother board. The above-mentioned fine judgment device 140 can be, for example, a calculator (equipped with a CPU) with computing power.

上述加工信息获取装置160,讯号连接上述精判装置140,系为辨识上述被加工物影像之上述加工信息,并产生上述加工参数。其辨识的方法可为文字辨识、图码辨识以及RFID等感应标签。上述加工信息获取装置160例如可为配合影像辨识设备之计算器设备(具备CPU以及GPU)。The processing information acquiring device 160 is connected to the fine judging device 140 with a signal to identify the processing information of the image of the processed object and generate the processing parameters. The identification methods can be text identification, image code identification, and induction tags such as RFID. The aforementioned processing information acquiring device 160 can be, for example, a computer device (equipped with a CPU and a GPU) that cooperates with an image recognition device.

上述量测/参数校正装置180,讯号连接上述精判装置140,系为量测上述被加工物影像之瑕疵处,并产生瑕疵尺寸,再根据上述瑕疵尺寸以及上述加工参数,计算上述加工参数之最佳结果,进而产生校正加工参数,并传输上述校正加工参数至上述加工装置110。上述量测/参数校正装置180更包括参数优化模块182,上述参数优化模块182系为应用算法计算上述加工参数之最佳结果。上述参数优化模块182所应用之算法可应用任何可计算或归纳上述加工参数之最佳结果的算法,该算法例如可为:梯度下降法、牛顿法、共轭梯度法、线性搜寻、置信域方法、神经网络、微粒群算法、模拟退火、支持向量机、蚁群算法、差分进化算法、K-近邻算法(K-nearest neighbor)。上述量测/参数校正装置180例如可为具有运算能力之计算器(具备CPU)。The measurement/parameter correction device 180 is connected to the precise judgment device 140 for the purpose of measuring the defect of the image of the processed object and generating the size of the defect, and then calculating the processing parameters based on the size of the defect and the processing parameters. For the best result, corrected processing parameters are then generated, and the corrected processing parameters are transmitted to the processing device 110 . The measurement/parameter correction device 180 further includes a parameter optimization module 182, and the parameter optimization module 182 calculates the best result of the above-mentioned processing parameters by applying an algorithm. The algorithm applied by the above-mentioned parameter optimization module 182 can apply any algorithm that can calculate or summarize the best result of the above-mentioned processing parameters, such algorithm can be: gradient descent method, Newton method, conjugate gradient method, linear search, confidence region method , neural network, particle swarm optimization, simulated annealing, support vector machine, ant colony algorithm, differential evolution algorithm, K-nearest neighbor algorithm (K-nearest neighbor). The measurement/parameter correction device 180 mentioned above can be, for example, a calculator (equipped with a CPU) with computing power.

根据本发明之另一实施例,上述量测/参数校正装置180,当上述被加工物220具有设计图,可进一步将上述设计图与上述被加工物220的影像叠合,系可作为量测上述瑕疵尺寸之依据。According to another embodiment of the present invention, the measurement/parameter correction device 180, when the workpiece 220 has a design drawing, can further superimpose the design drawing with the image of the workpiece 220, which can be used as a measurement The basis for the size of the above defects.

根据本发明之另一实施例,上述量测/参数校正装置180更具有执行质量监测之流程,系事先透过上述量测/参数校正装置中设定上述被加工物的设计图中至少一处监测量测区域,并再对上述叠合影像之上述监测量测区域进行量测,并产生监测尺寸信息。其中上述质量监测之流程可为普检或抽检的方式执行。其中以印刷电路板检测为例,上述监测量测区域可针对印刷电路板特定的焊接位置进行框选。According to another embodiment of the present invention, the above-mentioned measurement/parameter correction device 180 further has a process of performing quality monitoring, which is to set at least one place in the design diagram of the above-mentioned processed object in the above-mentioned measurement/parameter correction device in advance. The measurement area is monitored, and then the above-mentioned monitoring measurement area of the above-mentioned superimposed image is measured, and the monitoring size information is generated. The above-mentioned quality monitoring process can be carried out in the form of general inspection or random inspection. Taking the detection of printed circuit boards as an example, the above-mentioned monitoring and measurement area can be frame-selected for specific soldering positions of the printed circuit board.

根据本发明之另一实施例,上述监测尺寸信息可再透过上述量测/参数校正装置180,经统计产生监测统计信息。且上述监测统计信息将作为计算上述加工参数之计算的数据。According to another embodiment of the present invention, the above-mentioned monitoring size information can be passed through the above-mentioned measurement/parameter correction device 180 to generate monitoring statistical information through statistics. And the above-mentioned monitoring statistical information will be used as the calculation data for calculating the above-mentioned processing parameters.

根据本发明之另一实施例,上述瑕疵尺寸超出一阈值时,上述量测/参数校正装置180将停止自动更正上述加工参数,并产生警示通知。According to another embodiment of the present invention, when the size of the defect exceeds a threshold, the measurement/parameter correction device 180 will stop automatically correcting the processing parameters and generate a warning notification.

依据又一实施例,其中上述精判装置140接收到上述警示通知,将不会将上述警示通知所对应之辨识结果作为训练上述分类模块之上述训练数据。According to yet another embodiment, the above-mentioned fine judgment device 140 will not use the recognition result corresponding to the above-mentioned warning notification as the above-mentioned training data for training the above-mentioned classification module after receiving the above-mentioned warning notification.

依据又一实施例,上述警示通知,可透过简讯或邮件,实时通知系统管理人员,并提醒上述系统管理人员,上述警示通知所对应之辨识结果将需要人工复判。例如:发现印刷电路板上露镍的面积大于1.0cm2,如根据此瑕疵尺寸调整上述加工参数幅度可能会调整过多,将严重影响后续加工流程。因此不以此笔超过阈值之瑕疵尺寸作为调整上述加工参数与上述训练数据之数据源。According to yet another embodiment, the above-mentioned warning notification can notify the system management personnel in real time through text messages or emails, and remind the above-mentioned system management personnel that the identification results corresponding to the above-mentioned warning notification will need manual re-judgment. For example, if it is found that the exposed nickel area on the printed circuit board is greater than 1.0cm2, if the above-mentioned processing parameters are adjusted according to the defect size, the adjustment may be too much, which will seriously affect the subsequent processing process. Therefore, the defect size exceeding the threshold is not used as a data source for adjusting the above-mentioned processing parameters and the above-mentioned training data.

依据又一实施例,本发明可应用在各阶段的加工制程中,并请参阅图2,图2所绘为根据本发明之一实施例之一种智能化加工系统应用于多个加工设备之装置示意图。According to yet another embodiment, the present invention can be applied in various stages of the processing process, and please refer to FIG. 2, which shows an intelligent processing system applied to multiple processing equipment according to an embodiment of the present invention Schematic diagram of the device.

根据本发明的实施方式,请参阅图3,图3所绘为根据本发明之一实施例之一种智能化加工系统之流程图。According to the embodiment of the present invention, please refer to FIG. 3 , which is a flowchart of an intelligent processing system according to an embodiment of the present invention.

在图3中,步骤300为开始加工。In FIG. 3, step 300 is to start processing.

在步骤302中,设定加工装置110之加工参数。In step 302, the processing parameters of the processing device 110 are set.

在步骤304中,加工装置110执行加工作业,并产生被加工物220。In step 304 , the processing device 110 executes a processing operation and produces a processed object 220 .

在步骤306中,于被加工物220标示加工信息。上述加工信息之记录方式包括文字、数字、符号以及图码,其中该图码包括一维条形码以及二维条形码。In step 306 , mark the processing information on the workpiece 220 . The recording methods of the above-mentioned processing information include characters, numbers, symbols and image codes, wherein the image codes include one-dimensional barcodes and two-dimensional barcodes.

在步骤308中,被加工物220透过粗判装置130进行初判,如判别被加工物220具有至少一个瑕疵处,则撷取上述被加工物220之影像,产生至少一个被加工物影像。粗判装置130可进一步计算上述被加工物影像之实际尺寸信息,上述计算方法如前文所述,在此不再赘述。In step 308, the processed object 220 is initially judged by the rough judgment device 130, and if it is judged that the processed object 220 has at least one defect, the image of the processed object 220 is captured to generate at least one processed object image. The rough judging device 130 may further calculate the actual size information of the image of the processed object. The above calculation method is as described above, and will not be repeated here.

在步骤310中,经粗判装置130进行初判判定上述被加工物220至少具有一个瑕疵处,并判定为瑕疵物,则继续步骤312。若粗判装置130初判无发现瑕疵处,则跳至步骤322。In step 310 , it is determined that the processed object 220 has at least one flaw through the rough judgment device 130 , and it is judged to be a flaw, and then step 312 is continued. If the rough judging device 130 preliminarily judges that no defect is found, go to step 322 .

在步骤312中,上述被加工物影像透过精判装置140进行复判,并辨识瑕疵类型。In step 312, the image of the workpiece is re-judged by the precise judging device 140, and the type of defect is identified.

在步骤314中,经精判装置140进行复判判定上述被加工物影像确实具有至少一个瑕疵后,并进一步辨识该瑕疵的类型,上述辨识瑕疵的方法如前文所述,在此不再赘述。若精判装置140复判判定上述被加工物影像无瑕疵,则跳至步骤322,表示上述粗判装置130之判定之上述瑕疵处为假瑕疵。In step 314, after the fine judgment device 140 conducts a re-judgment to determine that the image of the workpiece does have at least one defect, the type of the defect is further identified. The method for identifying the defect is as described above and will not be repeated here. If the fine judging device 140 judges again that the image of the processed object is flawless, then skip to step 322, indicating that the above-mentioned flaw determined by the rough judging device 130 is a false flaw.

在步骤316a中,透过量测/参数校正装置180进行瑕疵处的量测,并产生瑕疵尺寸,上述量测的方法如前文所述,在此不再赘述。In step 316a, the measurement/parameter correction device 180 is used to measure the defect and generate the size of the defect. The method of the above measurement is as described above and will not be repeated here.

在步骤316b中,透过加工信息获取装置160,辨识上述加工信息,并产生上述加工参数,上述辨识加工信息的方法如前文所述,在此不再赘述。In step 316b, the processing information is identified through the processing information acquisition device 160, and the processing parameters are generated. The method for identifying the processing information is as described above, and will not be repeated here.

在步骤318中,透过量测/参数校正装置180之算法根据上述瑕疵尺寸以及上述加工参数,计算校正上述加工参数之最佳结果,产生校正加工参数,并传输上述校正加工参数至上述加工装置。In step 318, the algorithm of the measurement/parameter correction device 180 calculates the best result of correcting the above-mentioned processing parameters according to the above-mentioned flaw size and the above-mentioned processing parameters, generates the corrected processing parameters, and transmits the above-mentioned corrected processing parameters to the above-mentioned processing device .

在步骤320中,加工设备110根据上述校正加工参数,调整原加工参数,并跳回步骤304继续进行加工。In step 320, the processing equipment 110 adjusts the original processing parameters according to the above-mentioned corrected processing parameters, and jumps back to step 304 to continue processing.

在步骤322中,系在粗判装置130之初判或精判装置140之精判均无发现被加工品上220,至少具有一个瑕疵处,故持续加工。In step 322, it is found that there is at least one defect on the processed product 220 in the preliminary judgment of the rough judging device 130 or the fine judgment of the fine judging device 140, so the processing continues.

根据本发明另一实施方式,请参阅图4,图4所绘为根据本发明之一实施例之一种智能化加工系统之质量监测流程图。According to another embodiment of the present invention, please refer to FIG. 4 , which is a flow chart of quality monitoring of an intelligent processing system according to an embodiment of the present invention.

本发明图3之实施例的流程可配合图4之实施例的质量监测流程以增加计算上述校正加工参数的准确性,其中图3与图4实施例之流程可同步或分别执行。The process of the embodiment in FIG. 3 of the present invention can cooperate with the quality monitoring process in the embodiment of FIG. 4 to increase the accuracy of calculating the above-mentioned corrected processing parameters, wherein the processes in the embodiments of FIG. 3 and FIG. 4 can be executed simultaneously or separately.

在步骤402中,事先于量测/参数校正装置180中设定(或框选)被加工物220的设计图中欲监测的量测区域。In step 402 , the measurement area to be monitored in the design drawing of the workpiece 220 is set (or framed) in the measurement/parameter correction device 180 in advance.

在步骤404中,透过粗判装置130撷取被加工物220之影像。In step 404 , an image of the workpiece 220 is captured through the rough judgment device 130 .

在步骤406中,将被加工物220的设计图与加工后的影像叠合,产生叠合影像。In step 406 , the design drawing of the workpiece 220 is superimposed on the processed image to generate a superimposed image.

在步骤408中,于上述叠合影像上量测事先设定的监测量测区域之尺寸。In step 408 , measure the size of the preset monitoring measurement area on the superimposed image.

在步骤410中,根据量测结果产生监测尺寸信息,并进一步计算监测统计信息。In step 410, monitor dimension information is generated according to the measurement result, and monitor statistics information is further calculated.

在步骤412中,上述监测统计信息可作为上述量测/参数校正装置180计算校正加工参数之计算的数据。In step 412, the monitoring statistical information may be used as calculation data for the measurement/parameter calibration device 180 to calculate and correct processing parameters.

根据本发明另一实施方式,在步骤414中,透过上述步骤402-412所调整的加工参数,可同时对应上述步骤300-314所发现瑕疵物的数量,进一步计算上述加工参数所对应之生产良率。并可检视上述生产良率是否符合使用者订定合格标准(例如良率需达到95.0%)According to another embodiment of the present invention, in step 414, the processing parameters adjusted in the above steps 402-412 can correspond to the number of defects found in the above steps 300-314 at the same time, and the production corresponding to the above processing parameters can be further calculated. yield. It can also check whether the above-mentioned production yield rate meets the qualification standard set by the user (for example, the yield rate needs to reach 95.0%)

在步骤416中,可将上述加工参数进一步透过虚拟量测(Virtual Metrology;简称VM)以增加上述生产良率。例如:透过虚拟量测计算,在制作印刷电路板时于基板布建金属铜层流程中,将硫酸铜浴电镀之时间下调0.5秒,可使电路产生短路的发生机率降低1%。因此,透过虚拟量测调整生产参数,可再进一步增加生产良率。透过上述虚拟量测可不需再透过上述步骤402-412,对监测量测区域进行量测,取而代之的是由虚拟量测计算产品的良率,以达到全检的目的。In step 416 , the above-mentioned processing parameters can be further passed through virtual metrology (Virtual Metrology, VM for short) to increase the above-mentioned production yield. For example: through virtual measurement and calculation, in the process of laying out the metal copper layer on the substrate during the production of printed circuit boards, reducing the copper sulfate bath electroplating time by 0.5 seconds can reduce the probability of circuit short circuit by 1%. Therefore, adjusting production parameters through virtual measurement can further increase production yield. Through the above-mentioned virtual measurement, it is no longer necessary to measure the monitoring measurement area through the above-mentioned steps 402-412. Instead, the virtual measurement is used to calculate the yield rate of the product, so as to achieve the purpose of full inspection.

综合上述,本发明之实施例一种智慧化加工的方法与系统,具有实时处理产线之加工以及检测。并进一步以自动化执行溯源、瑕疵判定以及校正加工设备。To sum up the above, the embodiment of the present invention is a method and system for intelligent processing, which can process the processing and detection of the production line in real time. And further implement traceability, defect determination and calibration of processing equipment with automation.

本发明在本文中仅以较佳实施例揭露,然任何熟习本技术领域者应能理解的是,上述实施例仅用于描述本发明,并非用以限定本发明所主张之专利权利范围。举凡与上述实施例均等或等效之变化或置换,皆应解读为涵盖于本发明之精神或范畴内。因此,本发明之保护范围应以下述之申请专利范围所界定者为准。The present invention is only disclosed in preferred embodiments herein, but anyone skilled in the art should understand that the above embodiments are only used to describe the present invention, and are not intended to limit the scope of patent rights claimed by the present invention. All changes or substitutions that are equal or equivalent to the above-mentioned embodiments should be interpreted as falling within the spirit or scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the scope of the following patent application.

符号说明Symbol Description

100:智能化加工系统、110:加工装置、120:标示装置、130:粗判装置、140:精判装置、142:分类模块、160:加工信息获取装置、180:量测/参数校正装置、182:参数优化模块、200:待加工物、220:被加工物、300-322:步骤、402-416:步骤。100: Intelligent processing system, 110: Processing device, 120: Marking device, 130: Rough judgment device, 140: Fine judgment device, 142: Classification module, 160: Processing information acquisition device, 180: Measurement/parameter correction device, 182: parameter optimization module, 200: object to be processed, 220: object to be processed, 300-322: steps, 402-416: steps.

Claims (27)

1.一种智慧化加工的方法,该方法包括以下步骤:1. A method for intelligent processing, the method comprising the following steps: 于一加工装置默认一加工参数;Default a processing parameter in a processing device; 对一待加工物进行加工,并产生一被加工物;Processing an object to be processed and producing a processed object; 于该被加工物上标示一加工信息,该加工信息包括该加工参数;marking a piece of processing information on the object to be processed, the processing information including the processing parameters; 以一粗判装置对该被加工物进行初检,并撷取至少一被加工物影像以及一取像距离信息,其中该粗判装置系为自动视觉检测装置;Preliminarily inspect the processed object with a rough judgment device, and capture at least one image of the processed object and an image-taking distance information, wherein the rough judgment device is an automatic visual detection device; 再透过该粗判装置所载之复数个标准尺寸信息,比对该取像距离信息,产生该被加工物影像之实际尺寸信息;Then compare the imaging distance information with the plurality of standard size information contained in the rough judgment device to generate the actual size information of the processed object image; 以一精判装置进行复检,并应用一分类模块辨识该被加工物影像中所含的瑕疵类型,并产生一辨识结果,其中该分类模块系应用人工神经网络执行该辨识瑕疵类型;Perform re-inspection with an accurate judgment device, and use a classification module to identify the type of flaw contained in the image of the processed object, and generate an identification result, wherein the classification module uses an artificial neural network to perform the identification of the type of flaw; 将该被加工物的设计图与该被加工物影像叠合,产生一叠合影像,再对该叠合影像执行量测瑕疵处,并产生一瑕疵尺寸;superimposing the design drawing of the processed object with the image of the processed object to generate a superimposed image, and then measuring the defect on the superimposed image to generate a defect size; 辨识该加工信息,产生该加工参数;以及identifying the processing information to generate the processing parameters; and 以一量测/参数校正装置透过一参数优化模块,根据该瑕疵尺寸与该加工参数,计算该加工参数之最佳结果,并产生一校正加工参数,并传输至该加工装置,其中该参数优化模块系应用算法执行加工参数优化。Using a measurement/parameter correction device through a parameter optimization module, according to the defect size and the processing parameter, calculate the best result of the processing parameter, and generate a corrected processing parameter, and transmit it to the processing device, wherein the parameter The optimization module applies algorithms to perform machining parameter optimization. 2.如权利要求1所述之智慧化加工方法,其中该方法更包括质量监测之步骤,系透过该量测/参数校正装置中设定该被加工物的设计图中至少一监测量测区域,并再对该叠合影像之该监测量测区域进行量测,并产生至少一监测尺寸信息。2. The intelligent processing method as claimed in claim 1, wherein the method further includes the step of quality monitoring, which is to set at least one monitoring measurement in the design drawing of the processed object in the measurement/parameter calibration device area, and then measure the monitoring measurement area of the superimposed image, and generate at least one monitoring size information. 3.如权利要求1或权利要求2任一项所述之智能化加工方法,其中该量测/参数校正装置更包括将该监测尺寸信息经统计产生一监测统计信息,且该监测统计信息将作为计算该加工参数之计算数据。3. The intelligent processing method according to any one of claim 1 or claim 2, wherein the measurement/parameter correction device further includes generating a monitoring statistical information through statistics of the monitoring size information, and the monitoring statistical information will As the calculation data for calculating the processing parameters. 4.如权利要求3所述之智慧化加工方法,其中透过该监测统计信息所计算之该加工参数,该加工参数系作为一虚拟量测的参考参数,用以执行该虚拟量测。4. The intelligent processing method according to claim 3, wherein the processing parameter calculated through the monitoring statistics information is used as a reference parameter of a virtual measurement for performing the virtual measurement. 5.如权利要求1所述之智慧化加工方法,其中该分类模块之训练数据报括该辨识结果以及人工复判结果。5. The intelligent processing method according to claim 1, wherein the training data of the classification module includes the recognition result and the manual re-judgment result. 6.如权利要求1所述之智能化加工方法,其中该瑕疵尺寸超出一阈值时,该量测/参数校正装置将停止自动更正该加工参数,并产生一警示通知。6. The intelligent processing method as claimed in claim 1, wherein when the defect size exceeds a threshold value, the measurement/parameter correction device will stop automatically correcting the processing parameters and generate a warning notification. 7.如权利要求1或权利要求6任一项中所述之智能化加工方法,其中该精判装置接收到该警示通知,将不会将该警示通知所对应之辨识结果作为训练该分类模块之该训练数据。7. The intelligent processing method as claimed in any one of claim 1 or claim 6, wherein the fine judgment device receives the warning notification, and will not use the identification result corresponding to the warning notification as training the classification module of the training data. 8.如权利要求1所述之智能化加工方法,其中该粗判装置的初步检测方法包括3D轮廓比对、位置坐标比对、色泽比对以及亮度比对。8. The intelligent processing method according to claim 1, wherein the preliminary detection method of the rough judgment device includes 3D contour comparison, position coordinate comparison, color luster comparison and brightness comparison. 9.如权利要求1所述之智慧化加工方法,其中该些标准尺寸信息分别包括单位面积之分辨率、取像距离、对应之画素矩阵以及对应的实际尺寸与膜厚高度。9. The intelligent processing method according to claim 1, wherein the standard size information includes resolution per unit area, imaging distance, corresponding pixel matrix, and corresponding actual size and film thickness. 10.如权利要求1所述之智能化加工方法,其中该加工信息之记录方式包括文字、数字、符号以及图码,其中该图码包括一维条形码以及二维条形码。10. The intelligent processing method according to claim 1, wherein the recording method of the processing information includes characters, numbers, symbols and image codes, wherein the image codes include one-dimensional barcodes and two-dimensional barcodes. 11.一种智能化加工系统,该系统应用于至少一加工装置,该加工装置根据一加工参数对一待加工物进行加工,产生一被加工物,该系统包括:11. An intelligent processing system, the system is applied to at least one processing device, and the processing device processes an object to be processed according to a processing parameter to generate a processed object, the system comprising: 至少一标示装置,于该被加工物标示一加工信息,其中该加工信息包括至少一加工参数;at least one marking device, marking a processing information on the processed object, wherein the processing information includes at least one processing parameter; 一粗判装置,用以初检该被加工物是否具有至少一个瑕疵处,并产生至少一被加工物影像,其中该粗判装置系为自动视觉检测装置;A rough judgment device, which is used to initially check whether the processed object has at least one defect, and generate at least one processed object image, wherein the rough judgment device is an automatic visual inspection device; 一精判装置,讯号连接该粗判装置,用以复检该被加工物影像是否具有至少一个该瑕疵处,并辨识该被加工物影像中所含的瑕疵类型,产生一辨识结果;A fine judging device, connected to the rough judging device with a signal, for rechecking whether the image of the processed object has at least one defect, and identifying the type of the defect contained in the image of the processed object to generate a recognition result; 一加工信息获取装置,讯号连接该精判装置,用以辨识该被加工物影像之该加工信息,并产生该加工参数;以及A processing information acquisition device, connected to the fine judging device with a signal, to identify the processing information of the image of the processed object and generate the processing parameters; and 一量测/参数校正装置,讯号连接该精判装置,用以量测该被加工物影像之该瑕疵处,并产生一瑕疵尺寸,再根据该瑕疵尺寸以及该加工参数,计算该加工参数之最佳结果,产生一校正加工参数,并传输该校正加工参数至该加工装置。A measurement/parameter correction device, connected to the fine judgment device for measuring the defect of the image of the processed object, and generating a defect size, and then calculating the processing parameter according to the defect size and the processing parameter For optimal results, a corrected processing parameter is generated and transmitted to the processing device. 12.如权利要求11所述之智能化加工系统,其中该自动视觉检测装置的初检方法包括轮廓比对、位置坐标比对、色泽比对以及亮度比对。12. The intelligent processing system according to claim 11, wherein the initial inspection method of the automatic visual inspection device includes contour comparison, position coordinate comparison, color luster comparison and brightness comparison. 13.如权利要求11所述之智能化加工系统,其中该自动视觉检测装置组成包括至少一取像单元、至少一测距单元、一计算单元以及一数据库。13. The intelligent processing system according to claim 11, wherein the automatic visual inspection device comprises at least one imaging unit, at least one distance measuring unit, a calculation unit and a database. 14.如权利要求11所述之智能化加工系统,其中该测距单元,用以产生撷取该被加工物之一取像距离信息。14. The intelligent processing system according to claim 11, wherein the ranging unit is used to generate imaging distance information for capturing the processed object. 15.如权利要求11所述之智能化加工系统,其中该数据库,用以储存复数个标准尺寸信息,每一该些标准尺寸信息分别包括单位面积之分辨率、取像距离、对应之画素矩阵以及对应的实际尺寸与膜厚高度。15. The intelligent processing system as claimed in claim 11, wherein the database is used to store a plurality of standard size information, and each of the standard size information includes resolution per unit area, imaging distance, and corresponding pixel matrix And the corresponding actual size and film thickness height. 16.如权利要求11至15任一项中所述之智能化加工系统,其中该计算单元根据该被加工物影像之分辨率信息以及该取像距离信息,比对该数据库中之该标准尺寸信息,计算产生具有实际尺寸信息之该被加工物影像。16. The intelligent processing system according to any one of claims 11 to 15, wherein the calculation unit compares the standard size in the database according to the resolution information of the processed object image and the imaging distance information Information, calculate and generate the image of the processed object with actual size information. 17.如权利要求11所述之智能化加工系统,其中该量测/参数校正装置更包括一参数优化模块,该参数优化模块系为应用算法计算该加工参数之最佳结果。17. The intelligent processing system as claimed in claim 11, wherein the measurement/parameter calibration device further comprises a parameter optimization module, and the parameter optimization module calculates the best result of the processing parameters for the application algorithm. 18.如权利要求11所述之智能化加工系统,其中该量测/参数校正装置,当该被加工物具有一设计图,进一步将该设计图与该被加工物影像叠合,产生一叠合影像,用以作为量测该瑕疵尺寸之依据。18. The intelligent processing system according to claim 11, wherein the measurement/parameter correction device, when the processed object has a design drawing, further superimposes the design drawing and the image of the processed object to generate a stack of Combined images are used as the basis for measuring the size of the defect. 19.如权利要求11或权利要求18任一项所述之智能化加工系统,其中该量测/参数校正装置更包括提供事先设定该设计图中至少一监测量测区域,并再对该叠合影像之该监测量测区域进行量测,并产生至少一监测尺寸信息。19. The intelligent processing system as claimed in any one of claim 11 or claim 18, wherein the measurement/parameter correction device further includes providing at least one monitoring measurement area in the design diagram set in advance, and then The monitoring measurement area of the superimposed image is measured, and at least one monitoring size information is generated. 20.如权利要求19所述之智能化加工系统,其中该量测/参数校正装置更包括将该监测尺寸信息经统计产生一监测统计信息,且该监测统计信息将作为计算该加工参数之计算数据。20. The intelligent processing system as claimed in claim 19, wherein the measurement/parameter correction device further includes the monitoring dimensional information to generate a monitoring statistical information through statistics, and the monitoring statistical information will be used as the calculation for calculating the processing parameters data. 21.如权利要求20所述之智能化加工系统,其中透过该监测统计信息所计算之该加工参数,该加工参数系作为虚拟量测的参考参数,用以执行该虚拟量测。21. The intelligent processing system according to claim 20, wherein the processing parameters calculated through the monitoring statistical information are used as reference parameters for virtual measurement to perform the virtual measurement. 22.如权利要求11所述之智能化加工系统,其中该标示装置之加工信息之记录方式包括文字、数字、符号以及图码,其中该图码包括一维条形码以及二维条形码。22. The intelligent processing system according to claim 11, wherein the recording method of the processing information of the marking device includes characters, numbers, symbols and image codes, wherein the image codes include one-dimensional barcodes and two-dimensional barcodes. 23.如权利要求11所述之智能化加工系统,其中该标示装置之加工信息更包括制造批次、产品型号以及制造日期。23. The intelligent processing system according to claim 11, wherein the processing information of the marking device further includes manufacturing batch, product model and manufacturing date. 24.如权利要求11所述之智能化加工系统,其中该精判装置更包括一分类模块,该分类模块系为应用人工神经网络执行辨识该瑕疵类型。24. The intelligent processing system as claimed in claim 11, wherein the precise judging device further comprises a classification module, and the classification module is used to identify the defect type by using an artificial neural network. 25.如权利要求24所述之智能化加工系统,其中该分类模块之训练数据报括该辨识结果以及人工复判结果。25. The intelligent processing system according to claim 24, wherein the training data of the classification module includes the recognition result and the manual re-judgment result. 26.如权利要求11所述之智能化加工系统,其中该瑕疵尺寸超出一阈值时,该量测/参数校正装置将停止自动更正该加工参数,并产生一警示通知。26. The intelligent processing system as claimed in claim 11, wherein when the defect size exceeds a threshold value, the measurement/parameter correction device will stop automatically correcting the processing parameters and generate a warning notification. 27.如权利要求11或权利要求26任一项所述之智能化加工系统,其中该精判装置接收到该警示通知,将不会将该警示通知所对应之辨识结果作为训练该分类模块之该训练数据。27. The intelligent processing system according to any one of claim 11 or claim 26, wherein the fine judgment device receives the warning notification, and will not use the identification result corresponding to the warning notification as a training method for the classification module the training data.
CN202110556050.8A 2021-05-21 2021-05-21 Method and system for intelligent processing Pending CN115373345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110556050.8A CN115373345A (en) 2021-05-21 2021-05-21 Method and system for intelligent processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110556050.8A CN115373345A (en) 2021-05-21 2021-05-21 Method and system for intelligent processing

Publications (1)

Publication Number Publication Date
CN115373345A true CN115373345A (en) 2022-11-22

Family

ID=84058866

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110556050.8A Pending CN115373345A (en) 2021-05-21 2021-05-21 Method and system for intelligent processing

Country Status (1)

Country Link
CN (1) CN115373345A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07333197A (en) * 1994-06-09 1995-12-22 Nippon Steel Corp Automatic surface flaw detector
TWM550465U (en) * 2017-06-30 2017-10-11 中華大學 Semiconductor wafer analyzing system
CN108227664A (en) * 2018-02-05 2018-06-29 华侨大学 Control of product quality equipment and method of quality control based on sample data training
CN111208140A (en) * 2020-01-03 2020-05-29 武汉精立电子技术有限公司 Defect rechecking system and method
CN112577969A (en) * 2019-09-27 2021-03-30 南通深南电路有限公司 Defect detection method and defect detection system based on machine vision

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07333197A (en) * 1994-06-09 1995-12-22 Nippon Steel Corp Automatic surface flaw detector
TWM550465U (en) * 2017-06-30 2017-10-11 中華大學 Semiconductor wafer analyzing system
CN108227664A (en) * 2018-02-05 2018-06-29 华侨大学 Control of product quality equipment and method of quality control based on sample data training
CN112577969A (en) * 2019-09-27 2021-03-30 南通深南电路有限公司 Defect detection method and defect detection system based on machine vision
CN111208140A (en) * 2020-01-03 2020-05-29 武汉精立电子技术有限公司 Defect rechecking system and method

Similar Documents

Publication Publication Date Title
CN111537517B (en) An Unmanned Intelligent Stamping Defect Identification Method
CN101576508B (en) Chip appearance defect automatic detection device and detection method
EP3282248B1 (en) Inspection apparatus and quality control system for surface mounting line
CN106934800B (en) Metal plate strip surface defect detection method and device based on YOLO9000 network
CN104992449B (en) Information identification and surface defect online test method based on machine vision
CN109142383B (en) Character defect detection method based on morphology
CN108710876A (en) A kind of battery surface mark defect inspection method and system based on machine vision
CN107797517B (en) Method and system for realizing inspection of steel strip punching by machine vision
CN112200776A (en) Chip packaging defect detection method and detection device
CN118348023B (en) Electronic paper master AOI flaw detection system based on data analysis
CN117974629B (en) Online defect detection method and device for copper-clad plate production line, storage medium and product
CN113030123B (en) AOI detection feedback system based on Internet of things
CN118190959A (en) Engine part misplacement detection method based on visual detection
CN115993366B (en) Workpiece surface detection method and system based on sensing equipment
CN119658151B (en) Coding quality control method and system of laser vision coding machine
CN118330029A (en) Flaw detection system and flaw detection method for metal bar
CN119379701B (en) Shaving board quality detection method and system based on image recognition
CN117314829A (en) Industrial part quality inspection method and system based on computer vision
CN119574571B (en) Automobile body weld joint detection method and system based on machine vision
CN113793321B (en) Casting surface defect dynamic detection method and device based on machine vision
Wang et al. Circular saw core localization in the quenching process using machine vision
TWM619409U (en) Intelligent processing system
TWI782539B (en) Intelligent processing method and system
CN115373345A (en) Method and system for intelligent processing
CN117522876A (en) Defect detection method based on color and area

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination