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CN115343233A - A method and device for real-time measurement of trace gas concentration on an open path - Google Patents

A method and device for real-time measurement of trace gas concentration on an open path Download PDF

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CN115343233A
CN115343233A CN202210413559.1A CN202210413559A CN115343233A CN 115343233 A CN115343233 A CN 115343233A CN 202210413559 A CN202210413559 A CN 202210413559A CN 115343233 A CN115343233 A CN 115343233A
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曹章
周文彬
徐立军
段小艳
李心语
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Beihang University
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Abstract

The invention discloses a real-time measurement method and a real-time measurement device for the concentration of trace gas on an open path, wherein the used devices comprise a signal generator, two tunable diode lasers, two optical isolators, two optical power amplifiers, a wavelength division multiplexer, two optical fiber beam splitters, two collimating mirrors, a parabolic reflector, a pyramid prism, a dichroic mirror, a beam splitter, four photoelectric detectors, three narrow-band filters, a high-pass filter, a low-pass filter, a data acquisition card and the like; the beat frequency signals of the measuring light and the reference light are used for measuring the path distance, two absorption spectral lines which are easy to obtain are used for measuring the path average temperature, and the absorption spectral line of a single gas to be measured is used for measuring the absolute concentration, so that the dependence on the absorption spectral line of the gas to be measured is reduced; the invention can simultaneously measure the gas concentration, the path average temperature and the path distance on the open path, and can be applied to the long-term monitoring of the greenhouse gas content in the farmland, the livestock farm, the city and other areas.

Description

一种开放路径上痕量气体浓度的实时测量方法与装置A method and device for real-time measurement of trace gas concentration on an open path

(一)技术领域(1) Technical field

本发明提出一种开放路径上痕量气体浓度的实时测量方法与装置,属于可调谐二极管激光吸收光谱、温度测量和绝对距离测量三个技术领域。The invention proposes a real-time measurement method and device for trace gas concentration on an open path, belonging to three technical fields of tunable diode laser absorption spectrum, temperature measurement and absolute distance measurement.

(二)背景技术(2) Background technology

全球气温上升不仅对生态环境造成巨大影响,而且已经干扰了人类社会的正常运转。随着巴黎协定的生效,世界各国高度关注温室气体的排放问题,并且根据自身国情制定相应的减排措施。目前人类活动排放的温室气体主要有二氧化碳、甲烷、氧化亚氮、氢氟碳化合物、六氟化硫、氯氟烃化合物、臭氧等;其中,二氧化碳和甲烷对温室效应的贡献率超过90%。温室气体实时监测技术不仅可以识别温室气体排放的源头,还能为制定节能减排的政策提供准确的数据支持。Rising global temperatures not only have a huge impact on the ecological environment, but also have interfered with the normal functioning of human society. With the entry into force of the Paris Agreement, countries around the world are paying close attention to the issue of greenhouse gas emissions and formulating corresponding emission reduction measures according to their own national conditions. At present, the greenhouse gases emitted by human activities mainly include carbon dioxide, methane, nitrous oxide, hydrofluorocarbons, sulfur hexafluoride, chlorofluorocarbons, ozone, etc. Among them, carbon dioxide and methane contribute more than 90% to the greenhouse effect. Greenhouse gas real-time monitoring technology can not only identify the source of greenhouse gas emissions, but also provide accurate data support for formulating energy-saving and emission-reduction policies.

基于光谱技术的气体传感器具有非侵入、选择性高、精度高、灵敏度高、结构简单、体积小、成本低等优点,在环境监测、工业过程控制和医学诊断等工业及科研领域均得到广泛研究与应用。这些光学传感器中最常用的光谱技术有:衰荡腔光谱(Cavity Ring-downSpectroscopy,CRDS)、石英增强光声光谱(Quartz-enhanced PhotoacousticSpectroscopy,QEPAS)、啁啾激光色散光谱(Chirped Laser Dispersion Spectroscopy,CLaDS)和可调谐二极管激光吸收光谱(Tunable Diode Laser Absorption Spectroscopy,TDLAS)。Laura E.Mchale等人在2019年《光学快讯》第27卷,第14期20084-20097页的论文《移动监测天然气排放的开放式衰荡腔甲烷传感器》(Open-path cavity ring-downmethane sensor for mobile monitoring of natural gas emissions,Optics Express)中详细介绍了衰荡腔光谱技术,典型的衰荡腔测量装置采用一对高反射率的凹球面反射镜组成一个高精密的光学腔,将待测气体封装在光学腔中,光在两个镜面之间来回反射,记录下光在光学腔内的衰减率,再根据比尔朗伯定律确定待测气体浓度。Kaiyuan Zheng等人在2021年《光学快讯》第29卷,第4期5121-5127页的论文《基于石英增强型光声光热光谱技术的痕量气体传感》(Quartz-enhanced photoacoustic-photothermal spectroscopy fortrace gas sensing,Optics Express)中详细介绍了石英增强型光声光谱技术,该技术利用光声效应实现光谱检测,通常用音叉式石英晶振作为一个高Q因子的谐振子来探测痕量气体检测中的微弱声波,音叉式石英晶振是一个声学四极子,因此具有较强的环境噪声免疫能力。该技术对光束的质量要求比较高,要求激光束穿过音叉的振臂间隙时不能触碰音叉表面。由于衰荡腔光谱和石英增强光声光谱技术对测量装置的要求较高,所以这两种技术不适合开放路径上气体浓度测量。在测量气体浓度时,气体吸收信号与气体浓度和路径长度的乘积成正比。为了更加准确的测量气体浓度,需要获得更加精确的路径长度。传统的痕量气体浓度测量方法是采用测量尺或额外的激光测距仪事先测量吸收路径长度,然后再测量吸收信号。但是,在长时间测量过程中,由于结构形变或机械振动,路径长度可能会发生变化。因此,开发能同时测量路径长度和气体吸收的装置与方法是十分必要的。Gas sensors based on spectral technology have the advantages of non-invasiveness, high selectivity, high precision, high sensitivity, simple structure, small size, and low cost, and have been widely studied in industrial and scientific research fields such as environmental monitoring, industrial process control, and medical diagnosis. with application. The most commonly used spectroscopic techniques in these optical sensors are: ring-down cavity spectroscopy (Cavity Ring-down Spectroscopy, CRDS), quartz-enhanced photoacoustic spectroscopy (Quartz-enhanced Photoacoustic Spectroscopy, QEPAS), chirped laser dispersion spectroscopy (Chirped Laser Dispersion Spectroscopy, CLaDS) ) and Tunable Diode Laser Absorption Spectroscopy (TDLAS). Laura E.Mchale et al. in 2019 "Optics Express" Volume 27, Issue 14, 20084-20097, paper "Open-path cavity ring-downmethane sensor for mobile monitoring of natural gas emissions" The ring-down cavity spectroscopy technology is introduced in detail in mobile monitoring of natural gas emissions, Optics Express. A typical ring-down cavity measurement device uses a pair of high-reflectivity concave spherical mirrors to form a high-precision optical cavity, and the measured gas Packaged in an optical cavity, the light is reflected back and forth between two mirrors, and the attenuation rate of the light in the optical cavity is recorded, and then the concentration of the gas to be measured is determined according to Beer Lambert's law. Kaiyuan Zheng et al. "Quartz-enhanced photoacoustic-photothermal spectroscopy based on quartz-enhanced photoacoustic-photothermal spectroscopy" (Quartz-enhanced photoacoustic-photothermal spectroscopy) paper by Kaiyuan Zheng et al. Fortrace gas sensing, Optics Express) introduced in detail the quartz-enhanced photoacoustic spectroscopy technology, which uses the photoacoustic effect to achieve spectral detection, and usually uses a tuning-fork quartz crystal oscillator as a high-Q factor harmonic oscillator to detect trace gases. The weak sound wave, the tuning fork quartz crystal oscillator is an acoustic quadrupole, so it has strong immunity to environmental noise. This technology has relatively high requirements on the quality of the beam, and it is required that the laser beam cannot touch the surface of the tuning fork when it passes through the gap between the vibrating arms of the tuning fork. Because ring-down cavity spectroscopy and quartz-enhanced photoacoustic spectroscopy have high requirements on the measurement device, these two techniques are not suitable for gas concentration measurement on an open path. When measuring gas concentration, the gas absorption signal is proportional to the product of gas concentration and path length. In order to measure the gas concentration more accurately, it is necessary to obtain a more accurate path length. The traditional method for measuring trace gas concentration is to measure the absorption path length in advance with a measuring ruler or an additional laser rangefinder, and then measure the absorption signal. However, during long-term measurements, the path length may change due to structural deformation or mechanical vibration. Therefore, it is necessary to develop devices and methods that can simultaneously measure path length and gas absorption.

啁啾激光色散光谱利用分子色散效应实现光谱检测,它通过检测气体吸收峰附近折射率波动来测量气体的浓度。该方法不依赖于吸收效应而且不需要对接收到的光功率进行归一化处理,所以它不仅适用于高浓度气体检测而且适用于长光程气体遥感。NartS.Dsghestani等人在2014年《光学快讯》第22卷,第7期1731-1743页的论文《基于中红外开放路径啁啾激光色散光谱的大气甲烷监测的分析与论证》(Analysis and demonstrationof atmospheric methane monitoring by mid-infrared open-path chirped laserdispersion spectroscopy,Optics Express)中采用啁啾激光色散光谱技术对开放路径上大气甲烷浓度进行测量,在90米的路径上使用中心波长为7.7942μm的中红外激光连续测量2小时环境气体,实现100ppb的甲烷浓度检测下限。该方案使用中红外量子级联激光器,激光器的输出功率较小,仅为5.8mW,在开放路径下测量气体浓度时需要灵敏度高的探测器。此外,为了获得最佳的测量精度,激光光强的调制频率需要达到3.4GHz量级,这对探测器带宽的要求较高,当前中红外探测器还无法实现GHz以上带宽。Michal Nikodem等人在2015年《应用物理B》第119卷,3-9页的论文《基于啁啾激光色散光谱的大气甲烷开放路径传感器》(Open-path sensor for atmospheric methane based on chirped laser dispersionspectroscopy,Applied Physics B)中采用啁啾激光色散光谱技术在35米的开放路径上对大气甲烷浓度进行测量,选用1.653μm附近的甲烷谱线连续测量2.7小时环境气体,结果表明该系统可以达到1.3ppmv的甲烷检测下限,基本满足大气甲烷浓度测量要求。该方案需要带宽达到GHz量级的高灵敏度探测器,目前的光电探测器还不能同时兼顾高带宽和高灵敏度,这将不可避免地降低测量系统的检测灵敏度。此外,该系统在测量过程中需要引入参考气池来标定大气中待测气体浓度,参考气池中气体浓度值将直接影响待测气体浓度的准确性。Wuwen Ding等人在2016年《应用光学》第55卷,第31期8698-8704页的论文《基于相敏检测的双边带外差色散光谱》(Dual-sideband heterodyne of dispersion spectroscopybased on phase-sensitive detection,Applied Optics)中详细介绍了啁啾激光色散光谱技术测量气体浓度的原理,并在常温常压下对浓度为940.5ppm.m的甲烷气体进行测量,在30s的积分时间下,甲烷浓度的检测下限可以达到0.2ppb。尽管该方法可以实现高精度气体浓度测量,但是在测量前需要标定色散光谱峰峰值与气体浓度的关系。为了获得双边带色散光谱,激光光强的调制频率需要达到GHz量级,这对探测系统和采集系统的带宽要求较高。Yifeng Chen等人在2021年《光学通讯》第46卷,第13期3005-3008页的论文《基于开放路径孤立啁啾激光色散光谱法的瞬变甲烷的探测》(Fugitive methane detection usingopen-path stand-off chirped laser dispersion spectroscopy,Optics Letters)中将相敏式啁啾激光色散光谱技术和调频连续波测距技术结合,对大气中甲烷浓度进行测量,实验测得大气甲烷浓度为2.9ppm。该方案不能同时测量气体浓度和路径长度,需要手动切换两种参数的测量光路,测量系统相对复杂,而且在测量过程中还需引入参考气池进行实时标定。Andreas Hangauer等人在2021年《光学通讯》第46卷,第2期198-201页的论文《啁啾激光色散光谱用于光谱化学传感和距离探测》(Chirped laser dispersion spectroscopyfor spectroscopic chemical sensing with simultaneous range detection,OpticsLetters)中利用啁啾激光色散光谱技术同时测量了气体浓度和路径长度。气体浓度与调制信号的二次谐波峰峰值有关,需要提前标定两者的关系;路径长度与调制信号的基线频率偏移量有关,两者成线性关系,通过提取调制信号的基线频率偏移量便可获得路径长度。为了获得最佳的气体浓度测量精度,激光强度的调制频率需要控制在GHz量级,需要具有较高带宽的探测器。此外,受调制频率和调制频率变化率的影响,该方法目前只能实现0.1米量级的测距精度。Mingli Zou等人在2021年《光学快讯》第29卷,第8期11683-11692页的论文《基于色散光谱双边带外差相敏检测的气体吸收和路径长度的同时测量》(Simultaneousmeasurement of gas absorption and path length based on the dual-sidebandheterodyne phase-sensitive detection of dispersion spectroscopy,OpticsExpress)中利用相敏式啁啾激光散射光谱技术实现了气体浓度和路径长度的同时测量。该技术的测距范围与调制频率成反比,MHz量级的调制频率只能测量10米范围内的距离。但是,气体浓度测量却需要GHz以上的调制频率,为了平衡两个参数的测量要求,该方法只能在1米的范围内实现两个参数的同时测量。以上方案均采用啁啾激光色散光谱技术实现气体浓度测量,该技术在开放路径气体浓度测量中具有潜在的应用价值。但是,在实际使用中该技术需要调制频率在GHz以上的电光调制器以及相应带宽的探测器。由于受电光调制器、探测器等器件的限制,该方法目前主要在1-2μm近红外波段使用,在该波段范围内可选择的光谱线较少且谱线强度较弱。此外,气体浓度不能直接从色散光谱中获得,需要标定色散光谱峰峰值与浓度的关系,然后通过两者标定的关系推导被测气体浓度,气体浓度测量的准确性取决于标定的结果。Chirped laser dispersive spectroscopy uses the molecular dispersion effect to achieve spectral detection. It measures the gas concentration by detecting the fluctuation of the refractive index near the gas absorption peak. This method does not depend on the absorption effect and does not need to normalize the received optical power, so it is not only suitable for high-concentration gas detection but also for long optical path gas remote sensing. NartS.Dsghestani et al. in the paper "Analysis and demonstration of atmospheric methane monitoring based on mid-infrared open path chirped laser dispersion spectroscopy" (Analysis and demonstration of atmospheric methane) in Volume 22, Issue 7, pp. 1731-1743 of "Optics Express" in 2014 Methane monitoring by mid-infrared open-path chirped laser dispersion spectroscopy, Optics Express) uses chirped laser dispersion spectroscopy technology to measure the concentration of atmospheric methane on the open path, using a mid-infrared laser with a center wavelength of 7.7942 μm on a path of 90 meters Continuously measure ambient gas for 2 hours, and achieve a lower detection limit of 100ppb methane concentration. This solution uses a mid-infrared quantum cascade laser with a relatively small output power of only 5.8mW, which requires a highly sensitive detector when measuring the gas concentration in an open path. In addition, in order to obtain the best measurement accuracy, the modulation frequency of the laser light intensity needs to reach the order of 3.4 GHz, which requires a high bandwidth of the detector, and the current mid-infrared detector cannot achieve a bandwidth above GHz. Michal Nikodem et al. in the paper "Open-path sensor for atmospheric methane based on chirped laser dispersion spectroscopy" (Open-path sensor for atmospheric methane based on chirped laser dispersion spectroscopy, In Applied Physics B), chirped laser dispersive spectroscopy technology is used to measure the atmospheric methane concentration on an open path of 35 meters, and the methane spectral line near 1.653 μm is selected to continuously measure the ambient gas for 2.7 hours. The results show that the system can reach 1.3ppmv The lower detection limit of methane basically meets the requirements for the measurement of atmospheric methane concentration. This solution requires a high-sensitivity detector with a bandwidth of GHz order. The current photodetectors cannot take into account both high bandwidth and high sensitivity at the same time, which will inevitably reduce the detection sensitivity of the measurement system. In addition, the system needs to introduce a reference gas cell to calibrate the gas concentration to be measured in the atmosphere during the measurement process, and the gas concentration value in the reference gas cell will directly affect the accuracy of the gas concentration to be measured. Wuwen Ding et al. in the paper "Dual-sideband heterodyne of dispersion spectroscopy based on phase-sensitive detection" (Dual-sideband heterodyne of dispersion spectroscopy based on phase-sensitive detection) in Applied Optics, Volume 55, Issue 31, pp. 8698-8704 in 2016 , Applied Optics) introduced in detail the principle of chirped laser dispersion spectroscopy to measure gas concentration, and measured methane gas with a concentration of 940.5ppm.m under normal temperature and pressure. Under the integration time of 30s, the detection of methane concentration The lower limit can reach 0.2ppb. Although this method can achieve high-precision gas concentration measurement, it is necessary to calibrate the relationship between the peak-to-peak value of the dispersion spectrum and the gas concentration before measurement. In order to obtain double sided band dispersion spectrum, the modulation frequency of laser light intensity needs to reach GHz level, which requires high bandwidth of detection system and acquisition system. Yifeng Chen et al. "Optical Communications" Volume 46, Issue 13, pp. 3005-3008 in 2021, "Fugitive methane detection using open-path stand -off chirped laser dispersion spectroscopy, Optics Letters) combined phase-sensitive chirped laser dispersion spectroscopy technology with frequency-modulated continuous wave ranging technology to measure the concentration of methane in the atmosphere. The experimentally measured atmospheric methane concentration was 2.9ppm. This solution cannot measure gas concentration and path length at the same time, and the measurement optical path of the two parameters needs to be manually switched. The measurement system is relatively complicated, and a reference gas cell needs to be introduced for real-time calibration during the measurement process. Andreas Hangauer et al. "Chirped laser dispersion spectroscopy for spectroscopic chemical sensing with simultaneous" (Chirped laser dispersion spectroscopy for spectroscopic chemical sensing with simultaneous range detection, Optics Letters) using chirped laser dispersive spectroscopy to simultaneously measure gas concentration and path length. The gas concentration is related to the peak-to-peak value of the second harmonic of the modulation signal, and the relationship between the two needs to be calibrated in advance; the path length is related to the baseline frequency offset of the modulation signal, and the two are in a linear relationship. By extracting the baseline frequency offset of the modulation signal to obtain the path length. In order to obtain the best gas concentration measurement accuracy, the modulation frequency of the laser intensity needs to be controlled at the GHz level, and a detector with a higher bandwidth is required. In addition, due to the influence of the modulation frequency and the rate of change of the modulation frequency, this method can only achieve a ranging accuracy of the order of 0.1 meters. Mingli Zou et al. "Simultaneous measurement of gas absorption based on dispersive spectroscopy double-sided band heterodyne phase-sensitive detection based on simultaneous measurement of gas absorption and path length" in "Optics Express" Volume 29, Issue 8, pp. 11683-11692 in 2021 and path length based on the dual-sidebandheterodyne phase-sensitive detection of dispersion spectroscopy, OpticsExpress) using phase-sensitive chirped laser scattering spectroscopy to achieve simultaneous measurement of gas concentration and path length. The ranging range of this technology is inversely proportional to the modulation frequency, and the modulation frequency of MHz order can only measure the distance within 10 meters. However, the gas concentration measurement requires a modulation frequency above GHz. In order to balance the measurement requirements of the two parameters, this method can only realize the simultaneous measurement of the two parameters within the range of 1 meter. The above schemes all use chirped laser dispersion spectroscopy to measure gas concentration, which has potential application value in open path gas concentration measurement. However, in practical use, this technology requires an electro-optic modulator with a modulation frequency above GHz and a detector with a corresponding bandwidth. Due to the limitations of electro-optic modulators, detectors and other devices, this method is currently mainly used in the 1-2 μm near-infrared band, where there are fewer selectable spectral lines and the spectral line intensity is weaker. In addition, the gas concentration cannot be obtained directly from the dispersion spectrum. It is necessary to calibrate the relationship between the peak value of the dispersion spectrum and the concentration, and then deduce the measured gas concentration through the calibration relationship between the two. The accuracy of gas concentration measurement depends on the calibration results.

可调谐二极管激光吸收光谱(Tunable Diode Laser Absorption Spectroscopy,TDLAS)技术目前有两种主要的实现方法:直接吸收光谱法(direct absorptionspectroscopy,DAS)和波长调制光谱法(wavelength modulation spectroscopy,WMS)。波长调制光谱技术将高频调制信号加载到激光器,对波长进行调制,通过检测谐波信号测量气体参数。该技术可以有效抑制系统的背景噪声,从而提高检测灵敏度,在痕量气体浓度测量中获得很多应用。Gregory B.Rieker等人在2009年《应用光学》第48卷,第29期5546-5560页的论文《用于恶劣环境中气体温度和浓度测量的免标定波长调制光谱法》(Calibration-free wavelength-modulation spectroscopy for measurements of gas temperatureand concentration in harsh environments,Applied Optics)中详细介绍了免标定波长调制光谱技术,该技术需要两条或多条待测气体的吸收谱线,采用比色法测量气体温度,进而得到气体浓度。在气体浓度测量时,需要提前确定路径长度,而路径长度在测量过程中可能发生改变,因此提前测量的路径长度并不能真实表征激光所走的路径。Liang Mei等人在2011年《光学快讯》第36卷,第16期3036-3038页的论文《基于波长调制连续波二极管激光器的散射介质中气体光谱和路径长度测量》(Gas spectroscopy and optical path-lengthassessment in scattering media using a frequency-modulated continuous-wavediode laser,Optics Express)中将波长调制光谱技术和调频连续波测距技术结合,实现了多孔介质内气体浓度的测量,该方案虽然可以实现气体浓度和路径长度的高精度测量,但是不能同时测量这两个参数,需要手动选取每次测量的参数,操作相对复杂。Jinbao Xia等人在2019年《光学与激光工程》第117卷,第4期21-28页的论文《基于长程开放路径波长调制光谱法的湍流大气中的温室气体探测》(Probing greenhouse gases in turbulentatmosphere by long-range open-path wavelength modulation spectroscopy,Opticsand Laser in Engineering)中采用波长调制光谱技术对湍流大气中甲烷和二氧化碳的浓度进行测量,在2.6千米的路径上连续测量10小时,甲烷和二氧化碳的检测下限可以分别达到2ppb和20ppm。该方法在测量过程中需要引入参考气体池,待测气体浓度的测量准确性与参考气体的浓度、参考光路的长度以及光源与反射体的距离有关,上述三个参数的测量精度都将直接影响待测气体浓度的准确性。Xinqian Guo等人在2019年《光学与激光工程》第115卷,第23期243-248页的论文《基于近红外激光吸收光谱法的便携式氨气原位测量传感器》(A portable sensor for in-situ measurement of ammonia based on near-infrared laser absorption spectroscopy,Optics and Laser in Engineering)中利用多次反射气池搭建了一套便携式氨气原位测量传感器,使用该传感器对30ppm的氨气进行1小时连续测量,氨气浓度检测下限可达到0.16ppm。该方案在测量氨气浓度前,需要将氨气充入气池中,不利于反映待测气体的实际状态。当温度低于415K时,氨气会吸附在气池内壁的玻璃上,导致测量的气体浓度不准确。Guishi Wang等人在2019年《光学快讯》第27卷,第4期4878-4885页的论文《用于敏感气体传感的波长调制光谱法中的激光频率锁定和强度归一化》(Laser frequency locking and intensity normalization in wavelengthmodulation spectroscopy for sensitive gas sensing,Optics Express)中采用波长调制光谱技术对常温常压下50ppm的甲烷进行测量,使用的多次反射气池的有效光程为26.4米,该传感器对甲烷浓度的检测下限为2.5ppbv。在实际使用时,该方案需要将环境气体采样后充入气池中,这将改变待测气体的实际状态。Mingli Zou等人在2020年《光学快讯》第28卷,第8期11573-11582页的论文《基于波长调制光谱的三排圆形多次反射气池的乙炔传感器》(Acetylene sensing system based on wavelength modulation spectroscopyusing a triple-row circular multi-pass cell,Optics Express)中搭建了一套基于波长调制光谱的三排圆形多次反射气池的乙炔传感器,有效光程可达21.9米,使用该传感器对100.6ppm的乙炔气体进行探测灵敏度测试,结果表明该传感器在340s的积分时间下的探测下限为76.75ppb。在测量环境气体时,该方法也需要对待测气体进行抽样,改变了待测气体的真实状态。Chenguang Yang等人在2020年《光学快讯》第28卷,第3期3289-3297页的论文《基于波长调制光谱中一次谐波相位角法的气体吸收和光程长度的同时测量》(Simultaneous measurement of gas absorption and path length by employing thefirst harmonic phase angle method in wavelength modulation spectroscopy,Optics Express)中利用波长调制光谱技术的一次谐波相位角来同时获得痕量气体浓度和路径长度。该方法的最大测量距离与波长调制光谱技术中正弦波的调制频率成反比,在远距离测量时需要降低激光器的调制频率。当正弦波的调制频率降低到kHz量级时,一次谐波相位角随距离的变化不明显,导致其空间分辨率较差。Hongbin Lu等人在2021年《传感器》第21卷,第7期2448-2462页的论文《基于TDLAS技术的氨泄漏监测遥感系统》(A RemoteSensor System Based on TDLAS Technique for Ammonia Leakage Monitoring,Sensors)中搭建了一套基于波长调制光谱技术的开放路径氨气监测传感器,使用该传感器对一个模拟氨气泄漏源进行测量,系统稳定性测试结果表明:该传感器可以实现16.6ppm的氨气浓度检测下限,可以用于氨泄漏源的监测。虽然该方案可以在开放路径上测量氨气浓度,但是氨气浓度的检测下限较高,还不能检测出大气中氨气浓度。以上方案均采用波长调制光谱技术对痕量气体浓度进行测量,在实际使用中该技术通常只能提取解调后的谐波分量,不能从谐波分量中直接获得气体浓度。为了将气体浓度与谐波分量联系起来,不仅需要确定激光器线性和非线性光强调制的幅值及其频率调制之间的相位差,还需要利用参考气体对谐波信号进行标定,通过谐波信号与气体浓度的关系推导被测气体浓度,气体浓度测量的准确性依赖于标定结果的准确性。此外,基于波长调制光谱技术的痕量气体检测方案不具备高精度的测距能力,无法准确获得激光所走的真实路径长度,这将影响气体浓度测量结果的准确性。Tunable Diode Laser Absorption Spectroscopy (TDLAS) technology currently has two main implementation methods: direct absorption spectroscopy (direct absorption spectroscopy, DAS) and wavelength modulation spectroscopy (wavelength modulation spectroscopy, WMS). Wavelength modulation spectroscopy technology loads a high-frequency modulation signal to the laser, modulates the wavelength, and measures gas parameters by detecting harmonic signals. This technology can effectively suppress the background noise of the system, thereby improving the detection sensitivity, and has been widely used in the measurement of trace gas concentration. Gregory B.Rieker et al. in the 2009 "Applied Optics" volume 48, the 29th issue 5546-5560 paper "Calibration-free wavelength modulation spectrometry for gas temperature and concentration measurement in harsh environments" (Calibration-free wavelength -modulation spectroscopy for measurements of gas temperature and concentration in harsh environments, Applied Optics) introduced in detail the calibration-free wavelength modulation spectroscopy technology, which requires two or more absorption lines of the gas to be measured, and uses colorimetry to measure the gas temperature , and then get the gas concentration. When measuring gas concentration, the path length needs to be determined in advance, and the path length may change during the measurement process, so the path length measured in advance cannot truly represent the path traveled by the laser. Liang Mei et al. in 2011 "Optics Express" Volume 36, Issue 16 3036-3038 paper "Gas Spectroscopy and Optical Path Length Measurement in Scattering Medium Based on Wavelength Modulated Continuous Wave Diode Laser" (Gas spectroscopy and optical path- lengthassessment in scattering media using a frequency-modulated continuous-wavediode laser, Optics Express) combines wavelength modulation spectroscopy technology and frequency modulation continuous wave ranging technology to realize the measurement of gas concentration in porous media. Although this scheme can realize gas concentration and High-precision measurement of path length, but these two parameters cannot be measured at the same time. It is necessary to manually select the parameters for each measurement, and the operation is relatively complicated. Jinbao Xia et al. in 2019, "Optics and Laser Engineering", Volume 117, Issue 4, pages 21-28, "Probing greenhouse gases in turbulent atmosphere based on long-range open path wavelength modulation spectroscopy" (Probing greenhouse gases in turbulent atmosphere) by long-range open-path wavelength modulation spectroscopy, Optics and Laser in Engineering) uses wavelength modulation spectroscopy to measure the concentration of methane and carbon dioxide in the turbulent atmosphere, and continuously measures 10 hours on a path of 2.6 kilometers. The concentration of methane and carbon dioxide The detection limit can reach 2ppb and 20ppm respectively. This method needs to introduce a reference gas cell during the measurement process. The measurement accuracy of the gas concentration to be measured is related to the concentration of the reference gas, the length of the reference optical path, and the distance between the light source and the reflector. The measurement accuracy of the above three parameters will directly affect The accuracy of the gas concentration to be measured. In 2019, "Optics and Laser Engineering", Volume 115, Issue 23, pages 243-248, paper "A portable sensor for in-situ measurement of ammonia based on near-infrared laser absorption spectroscopy" by Xinqian Guo et al. In situ measurement of ammonia based on near-infrared laser absorption spectroscopy, Optics and Laser in Engineering), a set of portable ammonia gas in-situ measurement sensor was built by using multiple reflection gas cell, and the sensor was used to measure 30ppm ammonia gas continuously for 1 hour Measurement, the detection limit of ammonia concentration can reach 0.16ppm. In this solution, before measuring the concentration of ammonia gas, ammonia gas needs to be filled into the gas cell, which is not conducive to reflecting the actual state of the gas to be measured. When the temperature is lower than 415K, ammonia gas will be adsorbed on the glass on the inner wall of the gas cell, resulting in inaccurate measured gas concentration. Guishi Wang et al. "Laser Frequency Locking and Intensity Normalization in Wavelength Modulation Spectroscopy for Sensitive Gas Sensing" (Laser frequency locking and intensity normalization in wavelength modulation spectroscopy for sensitive gas sensing, Optics Express) uses wavelength modulation spectroscopy to measure 50ppm methane at normal temperature and pressure, and the effective optical path of the multiple reflection gas cell used is 26.4 meters. The lower limit of detection for methane concentration is 2.5 ppbv. In actual use, this solution needs to sample the ambient gas and fill it into the gas cell, which will change the actual state of the gas to be measured. Mingli Zou et al. in the 2020 "Optics Express" Volume 28, Issue 8 11573-11582 paper "Acetylene sensing system based on wavelength modulation spectrum based on three rows of circular multiple reflection gas cells" Modulation spectroscopy using a triple-row circular multi-pass cell, Optics Express) built a set of acetylene sensors based on three rows of circular multiple-reflection gas cells based on wavelength modulation spectrum, the effective optical path can reach 21.9 meters, using this sensor for 100.6ppm The detection sensitivity test of acetylene gas shows that the lower detection limit of the sensor is 76.75ppb under the integration time of 340s. When measuring ambient gas, this method also needs to sample the gas to be measured, which changes the real state of the gas to be measured. Chenguang Yang et al. "Simultaneous measurement of gas absorption and optical path length based on the first harmonic phase angle method in wavelength modulation spectroscopy" (Simultaneous measurement of gas absorption and path length by employing the first harmonic phase angle method in wavelength modulation spectroscopy, Optics Express) uses the first harmonic phase angle of wavelength modulation spectroscopy to simultaneously obtain trace gas concentration and path length. The maximum measurement distance of this method is inversely proportional to the modulation frequency of the sine wave in the wavelength modulation spectroscopy technique, and the modulation frequency of the laser needs to be reduced for long-distance measurement. When the modulation frequency of the sine wave is reduced to the kHz level, the phase angle of the first harmonic does not change significantly with distance, resulting in poor spatial resolution. Hongbin Lu et al. in the paper "A RemoteSensor System Based on TDLAS Technique for Ammonia Leakage Monitoring, Sensors" (A RemoteSensor System Based on TDLAS Technique for Ammonia Leakage Monitoring, Sensors) in "Sensors" Volume 21, Issue 7, 2448-2462, 2021 A set of open-path ammonia monitoring sensors based on wavelength modulation spectroscopy technology was built. The sensor was used to measure a simulated ammonia leakage source. The system stability test results showed that the sensor can achieve a lower limit of ammonia concentration detection of 16.6ppm. It can be used to monitor the source of ammonia leakage. Although this scheme can measure the ammonia gas concentration on an open path, the lower limit of detection of the ammonia gas concentration is relatively high, and the ammonia gas concentration in the atmosphere cannot be detected yet. The above schemes all use wavelength modulation spectroscopy to measure the concentration of trace gases. In actual use, this technology usually can only extract the harmonic components after demodulation, and cannot directly obtain the gas concentration from the harmonic components. In order to relate the gas concentration to the harmonic component, it is not only necessary to determine the amplitude of the linear and nonlinear optical intensity modulation of the laser and the phase difference between its frequency modulation, but also to calibrate the harmonic signal using a reference gas. The relationship between the signal and the gas concentration is used to deduce the measured gas concentration, and the accuracy of the gas concentration measurement depends on the accuracy of the calibration results. In addition, the trace gas detection scheme based on wavelength modulation spectroscopy technology does not have high-precision ranging capabilities, and cannot accurately obtain the true path length traveled by the laser, which will affect the accuracy of gas concentration measurement results.

与波长调制光谱技术相比,直接吸收光谱技术可以从透射光强中直接提取吸收光谱,无需标准气体标定便可实现气体参数的绝对测量,这让直接吸收光谱技术在气体浓度测量中占据不可替代的地位。Chuantao Zheng等人在2016年《IEEE光子技术通讯》第28卷,第21期3036-3038页的论文《使用两种连续波带间级联激光器的红外双气体CH4/C2H6传感器》(Infrared Dual-Gas CH4/C2H6 Sensor Using Two Continuous-Wave InterbandCascade Lasers,IEEE Photonics Technology Letters)中使用直接吸收光谱技术对室温下压力为700Torr的空气中甲烷浓度进行测量,多次反射气池的有效光程为54.6米,测得空气中甲烷的平均浓度为2.7ppm。用Allen方差分析了甲烷浓度的检测下限,在平均时间为1s时,可实现2.7ppbv的甲烷浓度检测下限。虽然该方法可以实现较高的测量精度,但是需要对待测气体进行抽样,抽样气体的气压略小于1个标准大气压,这些都将影响气体参数测量的准确性。Lei Dong等人在2016年《应用物理快报》第108卷,第1期1106-1110页的论文《基于连续波、低功耗、室温带间级联激光器的紧凑型CH4传感器系统》(Compact CH4 sensorsystem based on a continuous-wave,low power consumption,room temperatureinterband cascade laser,Applied Physics Letters)中设计了一款紧凑型、低功耗痕量气体浓度测量装置,该装置以多次反射气池为核心元件,系统尺寸限制在32*20*17cm3的体积内,便于在移动设备上使用。该装置的有效光程为54.6米,在常温常压下可以实现1.4ppbv的甲烷浓度检测下限。该方法同样需要对待测气体进行抽样,而且激光器的输出功率只有1.5mW,测量信号的信噪比较低。Jingsong Li等人在2016年《传感器和执行器B:化学》第231卷,723-732页的论文《基于双光谱技术的单台量子级联激光传感器同时检测大气中CO、N2O和H2O》(Simultaneous atmospheric CO,N2O and H2O detection using asingle quantum cascade laser sensor based on dual-spectroscopy techniques,Sensors and Actuators B:Chemical)中采用直接吸收光谱技术对压强为100mbar、温度为300K的环境气体进行测量,多次反射气池的有效光程为76米,激光器的中心波长为4566nm,结果表明,该传感器在1s的积分时间内可实现1.64ppb的CO浓度检测下限和1.15ppb的N2O浓度检测下限。该方法不仅需要对待测气体进行抽样,而且抽样气体的气压要小于1个标准大气压。Fang Song等人在2017年《光学快讯》第25卷,第25期31876-31888页的论文《基于带间级联激光器和自适应滤波直接吸收光谱技术的中红外甲烷传感器》(Interband cascadelaser based mid-infrared methane sensor system using a novel electrical-domain self-adaptive direct laser absorption spectroscopy(SA-DLAS),OpticsExpress)中用有效光程为16米的多次反射气池对常温常压下空气中的甲烷浓度进行测量,结合自适应滤波技术对传感器的噪声进行抑制,解算滤波后的直接吸收光谱数据,测得空气中的甲烷浓度为1.876ppm。在平均时间为6s时,该方法可以实现43.9ppbv的甲烷浓度检测下限,但是该系统无法稳定气体池内的温度,温度波动将直接影响甲烷浓度的测量精度。Nicolas Sobanski等人在2021年《应用科学》第11卷,第3期1222-1243页的论文《量子级联激光吸收光谱法在高精度二氧化氮测量中的研究进展》(Advances in High-PrecisionNO2 Measurement by Quantum Cascade Laser Absorption Spectroscopy,appliedsciences)中采用直接吸收光谱技术对压强为80mbar、温度为300K、浓度为1ppbv的二氧化氮进行测量,多次反射气池的有效光程为110米,结果表明,该传感器在150s的积分时间内可以实现0.8ppbv的浓度检测下限。该方案同样需要对气体进行采样,破坏气体原有状态。以上技术均采用直接吸收光谱技术测量痕量气体浓度,虽然该技术具有适用性广,数据解释简单,能提取吸收光谱,无需标准气体标定等优点,但是由于系统背景噪声和激光功率波动的干扰,其检测灵敏度要略低于波长调制光谱技术。对于直接吸收光谱技术,可以通过增加路径长度来提高吸收光谱信号的信噪比,进而提高检测灵敏度。此外,上述方法以多次反射气池作为测量系统的核心元件进行痕量气体浓度检测,还未有文献报道使用直接吸收光谱技术在开放路径上进行环境气体浓度测量。Compared with wavelength modulation spectroscopy technology, direct absorption spectroscopy technology can directly extract absorption spectrum from transmitted light intensity, and can realize absolute measurement of gas parameters without standard gas calibration, which makes direct absorption spectroscopy technology irreplaceable in gas concentration measurement. status. Chuantao Zheng et al. in 2016 "IEEE Photonics Technology Communications" Volume 28, Issue 21 3036-3038 paper "Infrared Dual-Gas CH4/C2H6 Sensor Using Two Continuous-Wave Interband Cascaded Lasers" (Infrared Dual- Gas CH4/C2H6 Sensor Using Two Continuous-Wave InterbandCascade Lasers, IEEE Photonics Technology Letters) uses direct absorption spectroscopy to measure the methane concentration in the air with a pressure of 700 Torr at room temperature, and the effective optical path of the multiple reflection gas cell is 54.6 meters , The average concentration of methane in the air was measured to be 2.7ppm. The lower detection limit of methane concentration was analyzed by Allen variance. When the average time was 1s, the lower detection limit of methane concentration was 2.7ppbv. Although this method can achieve high measurement accuracy, it needs to sample the gas to be measured, and the pressure of the sampled gas is slightly less than 1 standard atmospheric pressure, which will affect the accuracy of gas parameter measurement. In 2016, "Applied Physics Letters", Volume 108, Issue 1, pages 1106-1110, "Compact CH4 sensor system based on continuous wave, low power consumption, room temperature interband cascaded lasers" (Compact CH4 sensorsystem based on a continuous-wave, low power consumption, room temperature interband cascade laser, Applied Physics Letters) designed a compact, low power consumption trace gas concentration measurement device, the device uses multiple reflection gas cell as the core component , the system size is limited to a volume of 32*20*17cm 3 , which is convenient for use on mobile devices. The device has an effective optical path of 54.6 meters, and can achieve a detection limit of 1.4 ppbv methane concentration at normal temperature and pressure. This method also needs to sample the gas to be measured, and the output power of the laser is only 1.5mW, so the signal-to-noise ratio of the measurement signal is low. Jingsong Li et al. "Single quantum cascade laser sensor based on dual-spectrum technology simultaneously detects CO, N 2 O and H in the atmosphere" in "Sensors and Actuators B: Chemistry" in 2016, Volume 231, pages 723-732 2 O" (Simultaneous atmospheric CO, N2O and H2O detection using asingle quantum cascade laser sensor based on dual-spectroscopy techniques, Sensors and Actuators B: Chemical) uses direct absorption spectroscopy to detect the ambient gas with a pressure of 100mbar and a temperature of 300K. The measurement shows that the effective optical path of the multiple reflection gas cell is 76 meters, and the central wavelength of the laser is 4566nm. The results show that the sensor can achieve a CO concentration detection lower limit of 1.64ppb and a N 2 O concentration of 1.15ppb within an integration time of 1s. Lower limit of detection. The method not only needs to sample the gas to be measured, but also the pressure of the sampled gas should be less than 1 standard atmospheric pressure. In 2017, "Optics Express", Volume 25, Issue 25, pages 31876-31888, paper "Interband cascadelaser based mid-infrared methane sensor based on interband cascade laser and adaptive filtering direct absorption spectroscopy" by Fang Song et al. -infrared methane sensor system using a novel electrical-domain self-adaptive direct laser absorption spectroscopy (SA-DLAS), OpticsExpress) using a multi-reflection gas cell with an effective optical path of 16 meters to measure the methane concentration in the air at normal temperature and pressure The measurement was carried out, and the noise of the sensor was suppressed with the adaptive filtering technology, and the filtered direct absorption spectrum data was calculated, and the measured methane concentration in the air was 1.876ppm. When the average time is 6s, this method can achieve the lower detection limit of methane concentration of 43.9ppbv, but the system cannot stabilize the temperature in the gas cell, and the temperature fluctuation will directly affect the measurement accuracy of methane concentration. Nicolas Sobanski et al. "Advances in High-Precision NO2 by Quantum Cascade Laser Absorption Spectroscopy in High-Precision Nitrogen Dioxide Measurement" in Applied Science, Volume 11, Issue 3, pp. 1222-1243 in 2021 Measurement by Quantum Cascade Laser Absorption Spectroscopy, appliedsciences) adopts direct absorption spectroscopy to measure nitrogen dioxide with a pressure of 80mbar, a temperature of 300K, and a concentration of 1ppbv. The effective optical path of the multiple reflection gas cell is 110 meters. The results show that , the sensor can achieve a concentration detection lower limit of 0.8ppbv within an integration time of 150s. This solution also needs to sample the gas to destroy the original state of the gas. The above technologies all use direct absorption spectroscopy to measure the concentration of trace gases. Although this technology has the advantages of wide applicability, simple data interpretation, extraction of absorption spectra, and no need for standard gas calibration, but due to the interference of system background noise and laser power fluctuations, Its detection sensitivity is slightly lower than that of wavelength modulation spectroscopy. For the direct absorption spectroscopy technique, the signal-to-noise ratio of the absorption spectroscopy signal can be improved by increasing the path length, thereby improving the detection sensitivity. In addition, the above method uses the multiple reflection gas cell as the core component of the measurement system to detect the concentration of trace gases, and there is no literature report on the use of direct absorption spectroscopy to measure the concentration of ambient gases in an open path.

温度是气体浓度测量中的核心参数之一。当前气体浓度测量是通过温度计或热电偶等测温器件获得传感器附近的温度值,该温度仅仅反映出某一固定点的温度,并不能反映出开放路径上的温度信息。为了提供更加准确的温度值,使用路径平均温度替换固定点的温度可以更好的反映出温度在开放路径上的变化。根据比尔朗伯定律,两条谱线吸收强度之比是温度的单值函数,因此,使用同种物质的两条不同谱线吸收强度之比可以求解出吸收路径上的平均温度,该测温方法称之为比色法。在使用比色法测温时,首先需要选取某一气体的两个孤立的且没有其它气体干扰的吸收谱线,然后判断这两个吸收谱线的测温灵敏度是否满足要求。一般情况下,选出两个适合测温的吸收谱线是比较困难的。考虑到常用的光电探测器响应波段为1100nm-1700nm,以甲烷的吸收谱线为例,假设传感器的探测范围为100-200米,在常温常压下,谱线强度合适且吸收谱线孤立的有:1.6481μm、1.651μm和1.653μm。此外,再考虑到水分子的交叉干扰和比色法测温的灵敏度,没有满足测温要求的双谱线。根据比尔朗伯定律和比色法测温原理,单谱线是无法测量出路径平均温度的,而且气体浓度测量的先决条件是获得气体压强、路径平均温度和路径长度,所以仅仅依靠甲烷的吸收谱线是无法实现绝对浓度测量的。与之相比,水分子在1100nm-1700nm范围内吸收谱线分布广泛,且孤立谱线较多,容易选取出两个适合开放路径平均温度测量的吸收谱线。为了解决单谱线无法实现温度测量的问题,可以在水分子的吸收谱线中选择两个谱线强度合适的吸收谱线,通过共光路的方式获得与待测气体相同的路径平均温度,以便完成待测气体浓度测量。Temperature is one of the core parameters in gas concentration measurement. The current gas concentration measurement is to obtain the temperature value near the sensor through temperature measuring devices such as thermometers or thermocouples. The temperature only reflects the temperature at a certain fixed point, and cannot reflect the temperature information on the open path. In order to provide more accurate temperature values, the average temperature of the path is used instead of the temperature of the fixed point to better reflect the temperature change on the open path. According to Beer-Lambert's law, the ratio of the absorption intensities of two spectral lines is a single-valued function of temperature. Therefore, the average temperature on the absorption path can be calculated by using the ratio of the absorption intensities of two different spectral lines of the same substance. The method is called colorimetry. When using the colorimetric method to measure temperature, it is first necessary to select two isolated absorption lines of a certain gas without interference from other gases, and then judge whether the temperature measurement sensitivity of these two absorption lines meets the requirements. In general, it is difficult to select two absorption lines suitable for temperature measurement. Considering that the commonly used photodetector response band is 1100nm-1700nm, taking the absorption line of methane as an example, assuming that the detection range of the sensor is 100-200 meters, under normal temperature and pressure, the spectral line intensity is appropriate and the absorption line is isolated There are: 1.6481μm, 1.651μm and 1.653μm. In addition, considering the cross-interference of water molecules and the sensitivity of temperature measurement by colorimetry, there are no doublet lines that meet the temperature measurement requirements. According to Beer Lambert's law and the principle of colorimetric temperature measurement, the average temperature of the path cannot be measured by a single spectral line, and the prerequisite for gas concentration measurement is to obtain the gas pressure, average path temperature and path length, so only rely on the absorption of methane It is impossible to measure the absolute concentration of the spectral line. In contrast, water molecules have a wide distribution of absorption lines in the range of 1100nm-1700nm, and there are many isolated lines, so it is easy to select two absorption lines suitable for open path average temperature measurement. In order to solve the problem that a single spectral line cannot realize temperature measurement, two absorption spectral lines with appropriate spectral line intensity can be selected in the absorption spectral lines of water molecules, and the average temperature of the same path as that of the gas to be measured can be obtained through a common optical path, so that Complete the gas concentration measurement.

基于以上背景,本发明提出一种开放路径上痕量气体浓度的实时测量方法与装置,可以同时对开放路径上痕量气体浓度、路径平均温度和路径长度进行测量。该测量装置包括两个测量臂,其中一个臂用于待测气体探测,另外一个臂用于提供参考信号,两个臂的激光合束后,产生包含痕量气体浓度、路径平均温度和路径长度等信息的拍频信号。本发明将直接吸收光谱技术、调频连续波测距技术、比色法测温等技术结合在一起,发展了一种开放路径上痕量气体浓度测量的装置与方法。该方法使用调频连续波测距技术获得高精度距离信息,使用比色法测温技术获得待测气体的路径平均温度信息,使用直接吸收光谱技术获得待测气体的绝对浓度信息。为了降低对待测气体吸收谱线的依赖,本发明将采用两个易获取的气体分子吸收谱线进行路径平均温度测量,使用单个吸收谱线进行痕量气体浓度测量;采用共光路方式使两种气体测量的路径平均温度相同。本发明装置简单、便于携带、数据处理快,不仅适合监测加工企业的温室气体排放,而且还适合农田、畜牧场、城市等区域温室气体含量的长期监测。Based on the above background, the present invention proposes a real-time measurement method and device for trace gas concentration on an open path, which can simultaneously measure the trace gas concentration, path average temperature and path length on an open path. The measuring device includes two measuring arms, one of which is used to detect the gas to be measured, and the other is used to provide a reference signal. After the laser beams of the two arms are combined, the output contains trace gas concentration, path average temperature and path length. Beat frequency signal of other information. The invention combines direct absorption spectrum technology, frequency modulation continuous wave distance measurement technology, colorimetry temperature measurement and other technologies, and develops a device and method for measuring trace gas concentration on an open path. The method uses frequency modulation continuous wave ranging technology to obtain high-precision distance information, uses colorimetric temperature measurement technology to obtain the path average temperature information of the gas to be measured, and uses direct absorption spectroscopy technology to obtain the absolute concentration information of the gas to be measured. In order to reduce the dependence on the absorption spectrum of the gas to be measured, the present invention will use two easy-to-acquire gas molecule absorption lines to measure the path average temperature, and use a single absorption line to measure the trace gas concentration; The path average temperature of the gas measurement is the same. The device of the invention is simple, portable, and fast in data processing, and is not only suitable for monitoring greenhouse gas emissions of processing enterprises, but also suitable for long-term monitoring of greenhouse gas content in areas such as farmland, livestock farms, and cities.

(三)发明内容(3) Contents of the invention

本发明的目的是为了解决现有开放路径上痕量气体浓度检测技术中的不足之处,提供一种开放路径上痕量气体浓度、路径平均温度和路径长度的实时测量装置与方法,属于可调谐二极管激光吸收光谱、温度测量和绝对距离测量三个技术领域。所用元件包括一个信号发生器、两个可调谐二极管激光器、两个光隔离器、两个光功率放大器、一个波分复用器、两个光纤分束器、两个准直镜、一个抛物面反射镜、一个角锥棱镜、一个二向色镜、一个分束镜、四个光电探测器、三个窄带滤光片、一个高通滤波器、一个低通滤波器和一个数据采集卡等。The purpose of the present invention is to solve the deficiencies in the existing trace gas concentration detection technology on the open path, and to provide a real-time measurement device and method for trace gas concentration, path average temperature and path length on the open path. Three technical areas of tuned diode laser absorption spectroscopy, temperature measurement and absolute distance measurement. The components used include a signal generator, two tunable diode lasers, two optical isolators, two optical power amplifiers, a wavelength division multiplexer, two fiber beam splitters, two collimating mirrors, a parabolic reflector mirror, a corner cube, a dichroic mirror, a beam splitter, four photodetectors, three narrow-band filters, a high-pass filter, a low-pass filter and a data acquisition card, etc.

本发明采用的技术方案是:信号发生器与两个可调谐二极管激光器相连,通过调整激光器的注入电流,使两个激光器的激光频率线性变化,并使其中一个激光器输出的波长覆盖待测气体的一条吸收谱线,另外一个激光器输出的波长覆盖两条易获取气体分子的吸收谱线。两个激光器分别连接光隔离器,光隔离器出射的两束激光分别用光功率放大器放大激光功率,然后用一个波分复用器将两个波段的激光耦合在一起,实现两路激光共光路。经波分复用器共光路的激光入射到两个串联的光纤分束器进行分束,进而获得三束光,一束作测量光(90%),一束作调频连续波测距的参考光(5%),另一束作测量系统激光功率的监测光(5%)。测量光经准直镜准直后,依次经过中心带小孔的抛物面反射镜和待测气体,被角锥棱镜原路反射,再由抛物面反射镜接收。用一个二向色镜将测量光按波长分离,包含测温吸收谱线的扫频激光用一个光电探测器探测,包含待测气体吸收谱线的扫频激光与参考光被一个分束镜进行合束,用两个光电探测器探测合束后的激光。每个光电探测器前安装一个窄带滤光片用于滤除其它光的干扰。测量光和参考光合束后在光电探测器上发生拍频,这两个光电探测器分别连接一个高通滤波器和一个低通滤波器,高通滤波后的拍频信号用于路径长度的测量,低通滤波后的直流信号用于待测气体浓度的测量。所有光电探测器的信号被采集卡采集用于后续信号处理。具体实现过程如下:The technical solution adopted in the present invention is: the signal generator is connected with two tunable diode lasers, and by adjusting the injection current of the lasers, the laser frequency of the two lasers changes linearly, and the wavelength output by one of the lasers covers the wavelength of the gas to be measured. One absorption line, the other laser output wavelength covers the absorption lines of two easily accessible gas molecules. The two lasers are respectively connected to the optical isolator. The two laser beams emitted by the optical isolator are amplified by the optical power amplifier respectively, and then a wavelength division multiplexer is used to couple the lasers of the two bands together to realize the common optical path of the two lasers. . The laser light in the common optical path of the wavelength division multiplexer is incident on two fiber optic beam splitters in series for beam splitting, and then three beams of light are obtained, one beam is used as measurement beam (90%), and the other beam is used as reference for FM continuous wave distance measurement Light (5%), and another monitor light (5%) for measuring the laser power of the system. After the measuring light is collimated by the collimating mirror, it passes through the parabolic reflector with a small hole in the center and the gas to be measured in turn, is reflected by the corner cube prism, and then received by the parabolic reflector. A dichroic mirror is used to separate the measuring light by wavelength, the frequency-sweeping laser including the absorption line of the temperature measurement is detected by a photodetector, and the frequency-sweeping laser including the absorption line of the gas to be measured is separated from the reference light by a beam splitter The beams are combined, and the combined laser light is detected by two photodetectors. A narrow-band filter is installed in front of each photodetector to filter out the interference of other light. After the measurement light and the reference light are combined, a beat frequency occurs on the photodetector. The two photodetectors are respectively connected with a high-pass filter and a low-pass filter. The beat frequency signal after the high-pass filter is used for the measurement of the path length. The filtered DC signal is used to measure the concentration of the gas to be measured. The signals of all photodetectors are collected by the acquisition card for subsequent signal processing. The specific implementation process is as follows:

步骤一:信号发生器产生锯齿波信号调制激光器输出的波长,激光控制器通过改变注入电流,调节可调谐二极管激光器输出的激光频率;为了使激光频率线性变化,根据注入电流与激光频率之间的关系,不断修正锯齿波波形,直到激光器输出的激光频率线性变化,每个激光器产生的激光频率满足:Step 1: The signal generator generates a sawtooth wave signal to modulate the output wavelength of the laser, and the laser controller adjusts the laser frequency output by the tunable diode laser by changing the injection current; in order to make the laser frequency change linearly, according to the injection current and the laser frequency. Relationship, continuously modify the sawtooth waveform until the laser frequency output by the laser changes linearly, and the laser frequency generated by each laser satisfies:

v(t)=v0+at (1)其中,v0表示激光调频的起始频率,a=Ω/T表示激光频率的调制速率,T表示激光器调制的周期,Ω表示激光频率调制的带宽。v(t)=v 0 +at (1) Among them, v 0 represents the starting frequency of laser frequency modulation, a=Ω/T represents the modulation rate of laser frequency, T represents the period of laser modulation, and Ω represents the bandwidth of laser frequency modulation .

步骤二:调节激光器的工作温度,使其中一个激光器产生的激光波长覆盖待测气体的一条吸收谱线,另外一个激光器产生的激光频率覆盖测温的两条吸收谱线,以时分复用的方式驱动两个激光器;在激光器和波分复用器之间安装光隔离器用以保护激光器;光隔离器出射的两束激光分别用光功率放大器放大激光功率;波分复用器将两个激光器产生的激光耦合在一起,并实现两路激光共光路;两个光纤分束器串联,按90:5:5的比例将激光分成三路输出,比例为90%的一路作为测量光,光强记为Im,比例为5%的两路分别作调频连续波测距的参考光和测量系统激光功率的监测光,光强分别记为Ir和ImonitorStep 2: Adjust the working temperature of the laser so that the laser wavelength generated by one of the lasers covers one absorption line of the gas to be measured, and the laser frequency generated by the other laser covers two absorption lines of the temperature measurement, in a time-division multiplexed manner Drive two lasers; install an optical isolator between the laser and the wavelength division multiplexer to protect the laser; the two laser beams emitted by the optical isolator are respectively amplified by the optical power amplifier; the wavelength division multiplexer generates two lasers The lasers are coupled together to realize the common optical path of two lasers; two optical fiber beam splitters are connected in series, and the laser is divided into three outputs according to the ratio of 90:5:5, and the ratio of 90% is used as the measurement light, and the light intensity is recorded is I m , the ratio is 5%, and the two channels are respectively used as the reference light for frequency modulation continuous wave distance measurement and the monitoring light for measuring the laser power of the system, and the light intensities are recorded as I r and I monitor respectively.

步骤三:测量光经过准直镜准直后,依次经过中心带小孔的抛物面反射镜和待测气体,被角锥棱镜原路反射,再由抛物面反射镜接收;二向色镜按波长将测量光分离,包含测温吸收谱的扫频激光会被二向色镜反射,经窄带滤波片后,被一个光电探测器探测;测量待测气体吸收谱的扫频激光会被二向色镜透射,分束镜将透射光和不通过待测气体的参考光进行合束,合束光在通过窄带滤波片后,被两个光电探测器探测,两个光电探测器的探测信号分别经过一个高通滤波器和一个低通滤波器后上传至采集卡;测量系统激光功率的变化由第四个光电探测器记录;四个光电探测器上传至采集卡的信号分别表示为:Step 3: After the measuring light is collimated by the collimating mirror, it passes through the parabolic reflector with a small hole in the center and the gas to be measured in turn, is reflected by the corner cube prism, and then received by the parabolic reflector; the dichroic mirror will To measure light separation, the frequency-sweeping laser including the temperature measurement absorption spectrum will be reflected by a dichroic mirror, and then detected by a photodetector after passing through a narrow-band filter; Transmission, the beam splitter combines the transmitted light and the reference light that does not pass through the gas to be measured. After the combined beam passes through the narrow-band filter, it is detected by two photodetectors, and the detection signals of the two photodetectors pass through a A high-pass filter and a low-pass filter are uploaded to the acquisition card; the change of the laser power of the measurement system is recorded by the fourth photodetector; the signals uploaded to the acquisition card by the four photodetectors are expressed as:

I1(t)=Imexp(-αx(v(t))) (2)I 1 (t)=I m exp(-α x (v(t))) (2)

Figure BDA0003595278810000081
Figure BDA0003595278810000081

I3(t)=Ir+Imexp(-αtarget(v(t))) (4)I 3 (t)=I r +I m exp(-α target (v(t))) (4)

I4(t)=Imonitor (5)I 4 (t)=I monitor (5)

其中,I1(t)、I2(t)、I3(t)、I4(t)分别是采集卡采集到的4个光电探测器的信号;τ1、τ2分别是激光经过测量路与参考路时引入的时间延迟;τm是测量光和参考光到达光电探测器的时间差;αx(v(t))、αtarget(v(t))分别是测温吸收谱线处的吸收率和待测气体吸收谱线处的吸收率,αi(v),i=x,target可以表示成:Among them, I 1 (t), I 2 (t), I 3 (t), and I 4 (t) are the signals of the four photodetectors collected by the acquisition card; τ 1 and τ 2 are the measured τ m is the time difference between the measurement light and the reference light reaching the photodetector; α x (v(t)), α target (v(t)) are the temperature measurement absorption line and the absorption rate at the absorption line of the gas to be measured, α i (v), i=x, target can be expressed as:

Figure BDA0003595278810000082
Figure BDA0003595278810000082

其中,P是测量区域气体压强,L是路径长度,X(l)是待测气体的摩尔分数,T(l)是待测气体的温度,S[T(l)]是与温度有关的谱线强度,

Figure BDA0003595278810000083
是吸收光谱的线型函数,满足归一化条件,l是表示路径上的位置。Among them, P is the gas pressure in the measurement area, L is the path length, X(l) is the mole fraction of the gas to be measured, T(l) is the temperature of the gas to be measured, and S[T(l)] is the temperature-related spectrum line strength,
Figure BDA0003595278810000083
is the linear function of the absorption spectrum, which satisfies the normalization condition, and l is the position on the path.

步骤四:从拍频信号I2(t)中提取拍频频率,路径长度与拍频频率的关系可以表示成:Step 4: Extract the beat frequency from the beat signal I 2 (t), the relationship between the path length and the beat frequency can be expressed as:

Figure BDA0003595278810000084
Figure BDA0003595278810000084

其中,c表示空气中的光速,fIF=aτm是拍频信号的频率,对光电探测器采集的信号I2(t)做傅里叶变换得到频率谱,频率谱中最大的幅值点对应的频率即为所求频率fIFAmong them, c represents the speed of light in the air, f IF =aτ m is the frequency of the beat frequency signal, and the frequency spectrum is obtained by Fourier transforming the signal I 2 (t) collected by the photodetector, and the maximum amplitude point in the frequency spectrum is The corresponding frequency is the desired frequency f IF .

步骤五:由步骤三中公式(2)和(4)可知,测温吸收谱线处的吸收率和待测气体吸收谱线处的吸收率αi(ν),i=x,tar get分别表示成:Step 5: From formulas (2) and (4) in step 3, it can be seen that the absorptivity at the temperature measurement absorption line and the absorptivity at the absorption line of the gas to be measured are α i (ν), i=x, target respectively Expressed as:

Figure BDA0003595278810000091
Figure BDA0003595278810000091

Figure BDA0003595278810000092
Figure BDA0003595278810000092

其中,参考光Ir是按一定分光比获得的,它可以从监测光中按比例计算得到;测量光Im是通过基线拟合得到的,选取Imexp(-αi(v))中吸收区段两侧吸收极小的区段[t1,t2]和[t3,t4],通过数据拟合的方式,令这两段的Im的幅值逼近Imexp(-αi(v))的幅值,获得不包含exp(-αi(v))这一项的Im;吸收光谱可以由吸收率曲线αi(v)计算得到。Among them, the reference light I r is obtained according to a certain light splitting ratio, which can be calculated proportionally from the monitoring light; the measurement light I m is obtained by baseline fitting, and I m exp(-α i (v)) is selected as For the sections [t 1 ,t 2 ] and [t 3 ,t 4 ] with minimal absorption on both sides of the absorption section, by means of data fitting, the amplitude of Im of these two sections is approached to Im exp(- α i (v)), get I m excluding exp(-α i (v)); the absorption spectrum can be calculated from the absorbance curve α i (v).

步骤六:从测温吸收谱线的吸收率曲线αx(ν(t))处提取两条吸收谱线的积分吸收面积Ai,i=1或2,用比色法计算路径平均温度,积分吸收面积Ai满足:Step 6: Extract the integrated absorption area A i of the two absorption lines from the absorption rate curve α x (ν(t)) of the temperature measurement absorption line, i=1 or 2, and calculate the path average temperature by colorimetry, The integral absorption area A i satisfies:

Figure BDA0003595278810000093
Figure BDA0003595278810000093

由公式(10)可知,在两个吸收谱线处的积分吸收面积之比只与气体温度有关:It can be seen from formula (10) that the ratio of the integrated absorption area at the two absorption lines is only related to the gas temperature:

Figure BDA0003595278810000094
Figure BDA0003595278810000094

通过计算的积分吸收面积之比得到路径平均温度T;然后根据比尔朗伯定律,待测气体的浓度可以由下式计算获得:The average temperature T of the path can be obtained by calculating the ratio of the integrated absorption area; then according to Beer Lambert's law, the concentration of the gas to be measured can be calculated by the following formula:

Figure BDA0003595278810000095
Figure BDA0003595278810000095

本发明优点是:将易获取的测温吸收谱和待测气体吸收谱相结合,降低了对待测气体吸收谱线的需求,避免了因找不到两条合适的待测气体吸收谱线而无法实现待测气体浓度的测量。该方案可以同时实现开放路径上待测气体浓度、路径平均温度和路径长度的测量,不仅适合监测加工企业的温室气体排放,而且还适合农田、畜牧场、城市等区域温室气体含量的长期监测。The present invention has the advantages of combining the easily acquired temperature measurement absorption spectrum with the gas absorption spectrum to be measured, reducing the demand for the gas absorption spectrum line to be measured, and avoiding the failure of two suitable absorption spectrum lines of the gas to be measured. The measurement of the concentration of the gas to be measured cannot be realized. The solution can simultaneously realize the measurement of the gas concentration to be measured, the average temperature of the path and the length of the path on the open path. It is not only suitable for monitoring the greenhouse gas emissions of processing enterprises, but also suitable for the long-term monitoring of greenhouse gas content in farmland, livestock farms, cities and other areas.

(四)附图说明(4) Description of drawings

图1是测量装置结构图。Figure 1 is a structural diagram of the measuring device.

图2为激光器注入电流的调制信号。Figure 2 shows the modulation signal of the laser injection current.

(五)具体实施方式(5) Specific implementation methods

下面以水分子的双谱线进行路径平均温度测量、甲烷的单谱线进行浓度测量为例,并结合附图对本发明的技术方案作进一步的说明,本发明提供一种开放路径上痕量气体浓度的实时测量方法与装置,测量装置如图1所示,所述测量装置包括信号发生器1、可调谐二极管激光器2、可调谐二极管激光器3、光隔离器4、光隔离器5、光功率放大器6、光功率放大器7、波分复用器8、光纤分束器9、光纤分束器10、准直镜11、准直镜12、抛物面反射镜13、二向色镜14、分束镜15、窄带滤光片16、窄带滤光片17、窄带滤光片18、光电探测器19、光电探测器20、光电探测器21、光电探测器22、角锥棱镜23、数据采集卡24,其中:Taking the double spectrum line of water molecules to measure the average temperature of the path and the single spectrum line of methane to measure the concentration as examples, and in conjunction with the accompanying drawings, the technical solution of the present invention will be further described. The present invention provides a trace gas on an open path. The real-time measurement method and device of the concentration, the measuring device is as shown in Figure 1, and the measuring device comprises a signal generator 1, a tunable diode laser 2, a tunable diode laser 3, an optical isolator 4, an optical isolator 5, an optical power Amplifier 6, optical power amplifier 7, wavelength division multiplexer 8, optical fiber beam splitter 9, optical fiber beam splitter 10, collimator mirror 11, collimator mirror 12, parabolic mirror 13, dichroic mirror 14, beam splitter Mirror 15, narrowband filter 16, narrowband filter 17, narrowband filter 18, photodetector 19, photodetector 20, photodetector 21, photodetector 22, corner cube prism 23, data acquisition card 24 ,in:

所述信号发生器1与可调谐二极管激光器2和可调谐二极管激光器3相连,使用锯齿波波形对注入电流进行调整,通过修正锯齿波的形状,使可调谐二极管激光器2和可调谐二极管激光器3产生的激光频率线性变化,锯齿波波形如图2所示,并且使可调谐二极管激光器2输出的波长覆盖甲烷的一条吸收谱线,使可调谐二极管激光器3输出的波长覆盖水分子的两条吸收谱线。The signal generator 1 is connected to the tunable diode laser 2 and the tunable diode laser 3, and uses a sawtooth waveform to adjust the injection current. By modifying the shape of the sawtooth wave, the tunable diode laser 2 and the tunable diode laser 3 generate The laser frequency changes linearly, the sawtooth wave waveform is shown in Figure 2, and the wavelength output by the tunable diode laser 2 covers one absorption line of methane, and the wavelength output by the tunable diode laser 3 covers two absorption lines of water molecules Wire.

所述可调谐二极管激光器2与光隔离器4、光功率放大器6依次相连,可调谐二极管激光器3与光隔离器5、光功率放大器7依次相连,经光功率放大器6和光功率放大器7放大功率的扫频激光用波分复用器8耦合在一起,并实现两路激光共光路,共光路的激光入射到分光比为90:10的光纤分束器9进行分束,分光比为90%的一束作测量光,分光比为10%的一束用一个分光比为50:50的光纤分束器10再次进行分束,其中一束(5%)作调频连续波测距的参考光,另一束(5%)作测量系统激光功率的监测。The tunable diode laser 2 is connected to the optical isolator 4 and the optical power amplifier 6 in sequence, and the tunable diode laser 3 is connected to the optical isolator 5 and the optical power amplifier 7 in sequence, and the power is amplified by the optical power amplifier 6 and the optical power amplifier 7 The frequency-sweeping laser is coupled together with a wavelength division multiplexer 8, and realizes the common optical path of the two lasers, and the laser of the common optical path is incident on the optical fiber beam splitter 9 with a splitting ratio of 90:10 for beam splitting, and the splitting ratio is 90%. One beam is used as measuring light, and a beam splitting ratio of 10% is split again by an optical fiber beam splitter 10 with a beam splitting ratio of 50:50, wherein one beam (5%) is used as reference light for frequency modulation continuous wave distance measurement, The other beam (5%) is used to monitor the laser power of the measuring system.

所述测量光经过准直镜11准直后,依次经过中心带小孔的抛物面反射镜13和待测气体后,被角锥棱镜23原路反射,再由抛物面反射镜13接收。The measuring light is collimated by the collimating mirror 11 , passes through the parabolic reflector 13 with a small hole in the center and the gas to be measured in turn, is reflected by the corner cube prism 23 , and is received by the parabolic reflector 13 .

所述二向色镜14将可调谐二极管激光器2和可调谐二极管激光器3输出的扫频激光按波长分离,测量水分子吸收谱的扫频激光会被二向色镜14反射,经窄带滤波片16后,被光电探测器20探测,探测信号直接被数据采集卡24采集;测量甲烷吸收谱的扫频激光会被二向色镜14透射,分束镜15将透射光和不通过待测气体的参考光进行合束,合束光分别通过窄带滤波片17和窄带滤波片18后,被光电探测器19和光电探测器21探测,光电探测器19测得信号经低通滤波器滤波后被数据采集卡24采集,光电探测器21测得信号经高通滤波器滤波后被数据采集卡24采集;光电探测器22测得的信号不经处理直接被数据采集卡24采集。The dichroic mirror 14 separates the frequency-sweeping lasers output by the tunable diode laser 2 and the tunable diode laser 3 according to the wavelength, and the frequency-sweeping laser for measuring the absorption spectrum of water molecules will be reflected by the dichroic mirror 14 and passed through a narrow-band filter. After 16, it is detected by the photodetector 20, and the detection signal is directly collected by the data acquisition card 24; the frequency-sweeping laser for measuring the methane absorption spectrum will be transmitted by the dichroic mirror 14, and the beam splitter 15 will transmit light and not pass through the gas to be measured The reference light beams are combined, and the combined beams pass through the narrow-band filter 17 and the narrow-band filter 18 respectively, and are detected by the photodetector 19 and the photodetector 21, and the signal measured by the photodetector 19 is filtered by the low-pass filter The data acquisition card 24 collects, and the signal measured by the photoelectric detector 21 is collected by the data acquisition card 24 after being filtered by a high-pass filter; the signal measured by the photoelectric detector 22 is directly collected by the data acquisition card 24 without processing.

可调谐二极管激光器2依据路径长度选择两条合适的易获取的分子吸收光谱线,可调谐二极管激光器3依据待检测气体分子的种类而定。The tunable diode laser 2 selects two suitable and easy-to-obtain molecular absorption spectrum lines according to the path length, and the tunable diode laser 3 depends on the type of gas molecules to be detected.

一种开放路径上痕量气体浓度的实时测量方法,包括以下步骤:A method for real-time measurement of trace gas concentration on an open path, comprising the steps of:

步骤一:采用锯齿波波形对可调谐二极管激光器2和可调谐二极管激光器3的波长进行调制,利用注入电流与激光频率之间的关系,不断修正注入电流的波形,直到激光频率线性变化,修正后的锯齿波波形如图2所示;可调谐二极管激光器2和可调谐二极管激光器3产生的激光频率均满足:Step 1: Modulate the wavelengths of the tunable diode laser 2 and the tunable diode laser 3 with a sawtooth wave waveform, and use the relationship between the injection current and the laser frequency to continuously correct the waveform of the injection current until the laser frequency changes linearly. After correction The sawtooth wave waveform of is shown in Figure 2; the laser frequencies generated by tunable diode laser 2 and tunable diode laser 3 all satisfy:

v(t)=ν0+at (1)v(t)=ν 0 +at (1)

其中,v0表示激光调频的起始频率,a=Ω/T表示激光频率的调制速率,T表示激光器调制的周期,Ω表示激光频率调制的带宽。Among them, v 0 represents the starting frequency of laser frequency modulation, a=Ω/T represents the modulation rate of laser frequency, T represents the period of laser modulation, and Ω represents the bandwidth of laser frequency modulation.

步骤二:通过改变激光器的工作温度调整可调谐二极管激光器2和可调谐二极管激光器3输出的波长范围,使可调谐二极管激光器2输出的波长覆盖甲烷的一条吸收谱线,使可调谐二极管激光器3输出的波长覆盖水分子的两条吸收谱线,以时分复用的方式驱动两个激光器;在可调谐二极管激光器2后依次连接光隔离器4和光功率放大器6;在可调谐二极管激光器3后依次连接光隔离器5和光功率放大器7;光隔离器用以保护激光器的安全,光功率放大器使激光的功率放大,便于远距离开放路径测量;波分复用器8将两路放大激光功率的扫频激光耦合在一起,并实现两路激光共光路;共光路的激光入射到分光比为90:10的光纤分束器9进行分束,分光比为90%的一束作测量光,光强记为Im,分光比为10%的一束再用一个分光比为50:50的光纤分束器10进行分束,其中一束(5%)作调频连续波测距的参考光,另一束(5%)作测量系统激光功率的监测光,光强分别记为Ir和ImonitorStep 2: Adjust the output wavelength range of tunable diode laser 2 and tunable diode laser 3 by changing the operating temperature of the laser, so that the wavelength output by tunable diode laser 2 covers an absorption line of methane, so that tunable diode laser 3 outputs The wavelength covers the two absorption lines of water molecules, and drives the two lasers in a time-division multiplexing manner; after the tunable diode laser 2, connect the optical isolator 4 and the optical power amplifier 6 in sequence; Optical isolator 5 and optical power amplifier 7; the optical isolator is used to protect the safety of the laser, and the optical power amplifier amplifies the power of the laser, which is convenient for long-distance open path measurement; the wavelength division multiplexer 8 amplifies the frequency-sweeping laser of the two-way amplified laser power Coupling together, and realizing the common optical path of two lasers; The laser of common optical path is incident to the optical fiber beam splitter 9 that beam splitting ratio is 90:10 to carry out beam splitting, and the beam splitting ratio is 90% one bundle is used as measuring light, and light intensity is recorded as Im , a beam splitting ratio of 10% is split by an optical fiber beam splitter 10 with a splitting ratio of 50:50, wherein one beam (5%) is used as the reference light for frequency modulation continuous wave distance measurement, and the other beam (5%) is used as the monitor light for measuring the laser power of the system, and the light intensities are recorded as I r and I monitor respectively.

步骤三:测量光经过准直镜11准直后,依次经过中心带小孔的抛物面反射镜13和待测气体后,被角锥棱镜23原路反射,再由抛物面反射镜13接收;二向色镜14按波长将测量光分离,测量水分子吸收谱的扫频激光会被二向色镜14反射,经窄带滤波片16后,被光电探测器20探测;测量甲烷吸收谱的扫频激光会被二向色镜14透射,分束镜15将透射光和不通过待测气体的参考光进行合束,合束光分别通过窄带滤波片17和窄带滤波片18后,被光电探测器19和光电探测器21探测;测量系统激光功率的变化由光电探测器22记录;四个光电探测器上传至数据采集卡的探测信号分别表示为:Step 3: After the measuring light is collimated by the collimating mirror 11, it passes through the parabolic reflector 13 with a small hole in the center and the gas to be measured in turn, and is reflected by the corner cube prism 23 in the original way, and then received by the parabolic reflector 13; The chromatic mirror 14 separates the measurement light according to the wavelength, and the frequency-sweeping laser for measuring the absorption spectrum of water molecules will be reflected by the dichroic mirror 14, and will be detected by the photodetector 20 after passing through the narrow-band filter 16; the frequency-sweeping laser for measuring the absorption spectrum of methane It will be transmitted by the dichroic mirror 14, and the beam splitter 15 combines the transmitted light and the reference light that does not pass through the gas to be measured. and photodetector 21 detection; the change of measuring system laser power is recorded by photodetector 22; the detection signals uploaded to the data acquisition card by four photodetectors are respectively expressed as:

Figure BDA0003595278810000111
Figure BDA0003595278810000111

Figure BDA0003595278810000112
Figure BDA0003595278810000112

Figure BDA0003595278810000113
Figure BDA0003595278810000113

I4(t)=Imonitor (5)I 4 (t)=I monitor (5)

其中,I1(t)、I2(t)、I3(t)、I4(t)分别是光电探测器20、光电探测器21、光电探测器19和光电探测器22测量的激光光强;τ1、τ2分别是激光经过测量路与参考路时引入的时间延迟;τm是测量光和参考光到达光电探测器的时间差;

Figure BDA0003595278810000114
分别是水分子和甲烷在吸收谱线处的吸收率,αi(v),i=H2O,CH4可以表示成:Wherein, I 1 (t), I 2 (t), I 3 (t), and I 4 (t) are the laser light measured by the photodetector 20, the photodetector 21, the photodetector 19 and the photodetector 22, respectively. Strong; τ 1 and τ 2 are the time delay introduced when the laser passes through the measurement path and the reference path; τ m is the time difference between the measurement light and the reference light reaching the photodetector;
Figure BDA0003595278810000114
are the absorption rates of water molecules and methane at the absorption lines, respectively, α i (v), i=H 2 O, CH 4 can be expressed as:

Figure BDA0003595278810000115
Figure BDA0003595278810000115

其中,P是测量区域气体压强,L是路径长度,X(l)是待测气体的摩尔分数,T(l)是待测气体的温度,S[T(l)]是与温度有关的谱线强度,

Figure BDA0003595278810000116
是吸收光谱的线型函数,满足归一化条件,l是表示路径上的位置。Among them, P is the gas pressure in the measurement area, L is the path length, X(l) is the mole fraction of the gas to be measured, T(l) is the temperature of the gas to be measured, and S[T(l)] is the temperature-related spectrum line strength,
Figure BDA0003595278810000116
is the linear function of the absorption spectrum, which satisfies the normalization condition, and l is the position on the path.

步骤四:从拍频信号I2(t)中提取拍频频率,路径长度与拍频频率的关系可以表示成:Step 4: Extract the beat frequency from the beat signal I 2 (t), the relationship between the path length and the beat frequency can be expressed as:

Figure BDA0003595278810000117
Figure BDA0003595278810000117

其中,c表示空气中的光速,fIF=aτm是拍频信号的频率,对光电探测器采集的信号I2(t)做傅里叶变换得到频率谱,频率谱中最大的幅值点对应的频率即为所求频率fIFAmong them, c represents the speed of light in the air, f IF =aτ m is the frequency of the beat frequency signal, and the frequency spectrum is obtained by Fourier transforming the signal I 2 (t) collected by the photodetector, and the maximum amplitude point in the frequency spectrum is The corresponding frequency is the desired frequency f IF .

步骤五:由步骤三中公式(2)和(4)可知,水分子和甲烷的吸收率曲线αi(v),i=h2o,CH4分别表示成:Step 5: From the formulas (2) and (4) in the step 3, it can be seen that the absorption rate curves of water molecules and methane α i (v), i=h 2 o, CH 4 are expressed as:

Figure BDA0003595278810000118
Figure BDA0003595278810000118

Figure BDA0003595278810000119
Figure BDA0003595278810000119

其中,参考光Ir是按一定分光比获得的,它可以从监测光中按比例计算得到;测量光Im是通过基线拟合得到的,选取Imexp(-αi(v))中吸收区段两侧吸收极小的区段[t1,t2]和[t3,t4],通过数据拟合的方式,令这两段的Im的幅值逼近Imexp(-αi(v))的幅值,获得不包含exp(-αi(v))这一项的Im;吸收光谱可以由吸收率曲线αi(v)计算得到。Among them, the reference light I r is obtained according to a certain light splitting ratio, which can be calculated proportionally from the monitoring light; the measurement light I m is obtained by baseline fitting, and I m exp(-α i (v)) is selected as For the sections [t 1 ,t 2 ] and [t 3 ,t 4 ] with minimal absorption on both sides of the absorption section, by means of data fitting, the amplitude of Im of these two sections is approached to Im exp(- α i (v)), get I m excluding exp(-α i (v)); the absorption spectrum can be calculated from the absorbance curve α i (v).

步骤六:从水分子吸收率曲线

Figure BDA0003595278810000121
处提取两条吸收谱线的积分吸收面积Ai,i=1或2,用比色法计算路径平均温度,积分吸收面积Ai满足:Step 6: Absorption Rate Curve from Water Molecules
Figure BDA0003595278810000121
Extract the integral absorption area A i of two absorption lines at , i=1 or 2, calculate the average temperature of the path by colorimetry, and the integral absorption area A i satisfies:

Figure BDA0003595278810000122
Figure BDA0003595278810000122

由公式(10)可知,水分子在两个吸收谱线处的积分吸收面积之比只与气体温度有关:It can be known from formula (10) that the ratio of the integrated absorption area of water molecules at the two absorption lines is only related to the gas temperature:

Figure BDA0003595278810000123
Figure BDA0003595278810000123

通过计算的积分吸收面积之比得到路径平均温度T;然后根据比尔朗伯定律,甲烷的浓度可以由下式计算获得:The average temperature T of the path is obtained by calculating the ratio of the integrated absorption area; then according to Beer Lambert's law, the concentration of methane can be calculated by the following formula:

Figure BDA0003595278810000124
Figure BDA0003595278810000124

以上对本发明及其实施方式的描述,并不局限于此,附图中所示仅是本发明的实施方式之一。在不脱离本发明创造宗旨的情况下,不经创造性地设计出与该技术方案类似的结构或实施例,均属本发明保护范围。The above description of the present invention and its embodiments is not limited thereto, and what is shown in the drawings is only one of the embodiments of the present invention. Without departing from the inventive concept of the present invention, any structure or embodiment similar to the technical solution without creative design shall belong to the protection scope of the present invention.

Claims (3)

1. A real-time measurement method and device for trace gas concentration on an open path are characterized in that a system comprises a signal generator, two tunable diode lasers, two optical isolators, two optical power amplifiers, a wavelength division multiplexer, two optical fiber beam splitters, two collimating mirrors, a parabolic reflector, a pyramid prism, a dichroic mirror, a beam splitter, four photoelectric detectors, three narrow-band filters, a high-pass filter, a low-pass filter, a data acquisition card and the like; wherein: the signal generator is connected with the two tunable diode lasers, the laser frequencies of the two lasers are linearly changed by adjusting the injection current of the lasers, the wavelength output by one of the lasers covers one absorption spectral line of the gas to be measured, and the wavelength output by the other laser covers two absorption spectral lines of gas molecules which are easy to obtain; the two lasers are respectively connected with an optical isolator, two beams of laser emitted by the optical isolator are respectively amplified by a light power amplifier, and then the lasers in two wave bands are coupled together by a wavelength division multiplexer, so that two paths of laser sharing light paths are realized; laser light passing through a common light path of the wavelength division multiplexer is incident to two serially connected optical fiber beam splitters for beam splitting, so that three beams of light are obtained, wherein the power proportion of one beam of light is about 90% and is used as measuring light, the power proportion of one beam of light is about 5% and is used as reference light for frequency modulation continuous wave distance measurement, and the power proportion of the other beam of light is about 5% and is used as monitoring light for measuring the laser power of a system; after being collimated by the collimating mirror, the measuring light sequentially passes through the parabolic reflector with the small hole at the center and the gas to be measured, is reflected by the original path of the pyramid prism, and is received by the parabolic reflector; the dichroic mirror separates the measuring light according to wavelength, and sweep-frequency laser containing temperature measurement absorption spectrum lines is reflected by the dichroic mirror, passes through the narrow-band filter and is detected by a photoelectric detector; the sweep frequency laser containing the absorption spectrum line of the gas to be detected can be transmitted by the dichroic mirror, the beam splitter combines the transmitted light with the reference light which does not pass through the gas to be detected, the combined light is detected by two photoelectric detectors after passing through the narrow-band filter, and signals of the two photoelectric detectors are filtered by a high-pass filter and a low-pass filter respectively before being uploaded to the acquisition card; the change of the laser power of the measuring system is recorded by a photoelectric detector; detection signals of the four photoelectric detectors are uploaded to a computer through an acquisition card to be processed in real time, and the average temperature of the path, the path length and the absolute concentration of the gas to be detected are inverted.
2. The method and the device for real-time measurement of the concentration of the trace gas on the open path according to claim 1, wherein the measurement method uses two easily obtained absorption lines to perform path average temperature measurement, and uses the absorption line of a single gas to be measured to perform absolute concentration measurement, so as to reduce the dependence on the absorption line of the gas to be measured, and comprises the following specific steps:
the method comprises the following steps: the acquisition of the signals uploaded to the four photodetectors of the acquisition card can be represented as:
I 1 (t)=I m exp(-α x (v(t))) (1)
Figure FDA0003595278800000011
I 3 (t)=I r +I m exp(-α target (v(t))) (3)
I 4 (t)=I monitor (4)
wherein, I 1 (t) is the measurement signal of the readily accessible absorption spectrum, I 2 (t) is the measured beat signal, I 3 (t) is the measurement signal of the absorption spectrum of the gas to be measured, I 4 (t) is a monitor signal for measuring the laser power of the system; tau. 1 、τ 2 Respectively, the time delay introduced when the laser passes through the measuring path and the reference path; tau. m Is the time difference between the arrival of the measurement light and the reference light at the photodetector; alpha is alpha x (v(t))、α target (v (t)) is the absorption rate at the temperature measurement absorption line and the absorption rate at the gas absorption line to be measured, respectively, alpha i (v) I = x, target can be expressed as:
Figure FDA0003595278800000012
where P is the measurement area gas pressure, L is the path length, X (L) is the mole fraction of the gas to be measured, T (L) is the temperature of the gas to be measured, S [ T (L)]Is the line intensity as a function of temperature,
Figure FDA0003595278800000013
is a linear function of the absorption spectrum, satisfying the normalization condition, l is the position on the representation path;
step two: from the beat signal I 2 (t) extracting beat frequency, wherein the relationship between the path length and the beat frequency can be expressed as follows:
Figure FDA0003595278800000021
wherein c represents the speed of light in air, f IF =aτ m Is the frequency of the beat signal, signal I acquired by the photodetector 2 (t) Fourier transform is carried out to obtain a frequency spectrum, and the frequency corresponding to the maximum amplitude point in the frequency spectrum is the solved frequency f IF
Step three: according to the formulas (1) and (3) in the step one, the measurement is carried outAbsorption rate at the temperature absorption line and absorption rate alpha at the absorption line of the gas to be measured i (v) I = x, target is expressed as:
Figure FDA0003595278800000022
Figure FDA0003595278800000023
the reference light Ir is obtained according to a certain splitting ratio and can be proportionally calculated from the monitoring light; measuring light I m Is obtained by fitting a base line, selecting I m exp(-α i (v) A section [ t ] with minimal absorption on both sides of the middle absorption section 1 ,t 2 ]And [ t 3 ,t 4 ]Enabling the I of the two segments to be matched in a data fitting mode m Is approximated by an amplitude value of m exp(-α i (v) Obtaining an amplitude value not containing exp (-alpha) i (v) I) of this term m (ii) a The absorption spectrum can be represented by the absorption curve a i (v) Calculating to obtain;
step four: absorption rate curve alpha from thermometric absorption line x (v (t)) the integrated absorption area A for extracting the two absorption lines i I =1 or 2, calculating the path average temperature by colorimetry, integrating the absorption area A i Satisfies the following conditions:
Figure FDA0003595278800000024
from equation (9), the ratio of the integrated absorption areas at the two absorption lines is related only to the gas temperature:
Figure FDA0003595278800000025
obtaining a path average temperature T through the calculated ratio of the integral absorption areas; then, according to beer's lambert law, the concentration of the gas to be measured can be calculated by the following formula:
Figure FDA0003595278800000026
3. the method and the device for measuring the concentration of the trace gas on the open path in real time according to claim 1, wherein the measuring device couples the swept laser beams of two wave bands together by using a wavelength division multiplexer to realize a common path of two laser beams with different wavelengths; separating the sweep-frequency laser containing the temperature measurement absorption spectrum line from the sweep-frequency laser containing the gas absorption spectrum line to be measured by using a dichroic mirror, wherein a signal containing the temperature measurement absorption spectrum is used for calculating the path average temperature; the sweep-frequency laser containing the absorption spectrum line of the gas to be measured and the reference light are combined by a beam splitter, a beat-frequency signal generated by the combined light is used for calculating the path length, and the direct-current component of the combined light is used for calculating the absolute concentration of the gas to be measured.
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