CN115326044B - Laser gyroscope and sealing method thereof - Google Patents
Laser gyroscope and sealing method thereof Download PDFInfo
- Publication number
- CN115326044B CN115326044B CN202211256276.7A CN202211256276A CN115326044B CN 115326044 B CN115326044 B CN 115326044B CN 202211256276 A CN202211256276 A CN 202211256276A CN 115326044 B CN115326044 B CN 115326044B
- Authority
- CN
- China
- Prior art keywords
- anode
- cathode
- cavity
- air
- laser gyroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/66—Ring laser gyrometers
- G01C19/661—Ring laser gyrometers details
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/40—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal all coatings being metal coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/25—Metals
- C03C2217/251—Al, Cu, Mg or noble metals
- C03C2217/254—Noble metals
- C03C2217/255—Au
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/25—Metals
- C03C2217/257—Refractory metals
- C03C2217/26—Cr, Mo, W
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Radar, Positioning & Navigation (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Remote Sensing (AREA)
- Geochemistry & Mineralogy (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Abstract
The invention provides a laser gyro and a sealing method thereof, belonging to the technical field of laser gyro manufacture, wherein the laser gyro comprises: the microcrystalline glass laser gyroscope comprises a cavity, an anode and a cathode; the side surface of the laser gyroscope is provided with a through hole communicated with the annular elongated hole to connect the anode and the cathode; the periphery of the through hole is provided with an airtight surface which is welded and sealed with the anode and the cathode through welding flux; the anode comprises a closed anode and an air-extracting anode; the air-extracting anode is provided with an air guide hole for air charging and exhausting. The anode and the cathode are both made of super invar alloy; the surface of the laser gyroscope cavity connected with the electrode hole is a plane airtight surface; an air exhaust through hole is reserved in the middle of the rod-shaped handle extending out of the center of the air exhaust anode; the cathode is in an omega shape, and the annular edge of the bottom surface forms a plane-shaped airtight surface; the surface of the airtight surface is plated with a gold layer of a predetermined thickness. By adopting the matching electrode, the connection strength is improved by at least 2 times, and the shearing strength reaches more than 30 MPa.
Description
Technical Field
The invention belongs to the technical field of laser gyroscope manufacturing, and particularly relates to a laser gyroscope and a sealing method thereof.
Background
The laser gyro is an inertia instrument with high precision, high reliability and long service life, and is widely applied to the fields of carrier rockets, satellite airships, missile warships, aviation airplanes, submarines and ships and the like. The main part is a resonant cavity made of zero-expansion glass ceramics, a high-precision elongated hole is processed in the whole piece of glass ceramics, four reflecting lenses, a cathode and two anodes are usually bonded, and the laser gyro resonant cavity is shown in figure 1.
With the increase of the requirement of the long service life of the laser gyroscope, the impurity gases such as water vapor adsorbed on the surface of the laser gyroscope are required to be removed fully in the ultrahigh vacuum exhaust process, so that the purity of the helium-neon working gas is improved, and the service life and the stability of the instrument are greatly improved. However, the conventional laser gyro adopts indium to seal and bond the electrodes, the melting point of the indium is only 156 ℃, in order to ensure that the temperature which the airtight gyro can endure is generally not more than 130 ℃, and the overtemperature can cause the airtight to fail and the instrument is scrapped. But impurities such as water vapor and the like adsorbed on the inner surface of the cavity are difficult to completely remove by vacuum treatment at 130 ℃. Research shows that the temperature is increased by more than ten degrees, and the exhaust rate is increased by one order of magnitude. Therefore, the key to improving the high temperature resistance of the laser gyroscope is to improve the service life.
The existing patents and documents relate to the technical measures in the aspect, glass powder is generally connected by adopting a fusing technology, and an indium connection technology is avoided, but the ultralow-expansion microcrystalline glass cannot be fused and airtight by adopting the glass powder, so the existing patent technology is not applicable.
Disclosure of Invention
In order to solve the above technical problem, a first aspect of the present invention provides a laser gyro, including: a laser gyroscope cavity, an anode and a cathode made of microcrystalline glass;
an annular elongated hole is formed in the cavity of the laser gyroscope and used for storing laser substances; a through hole communicated with the annular elongated hole is formed in the side face of the cavity of the laser gyroscope and is used for connecting the anode and the cathode;
an airtight surface is arranged on the side surface of the cavity of the laser gyroscope around the periphery of the through hole, and the airtight surface is used for being welded with the anode or the cathode through welding flux to form sealing;
the anode comprises: sealing the anode and the air-extracting anode; the air extraction anode is provided with an air guide hole for exhausting or inflating;
the surface of the airtight surface of the microcrystalline glass laser gyroscope cavity connected with the closed anode, the air-extracting anode or the cathode is coated with a film, and the surface coating is manufactured in a vacuum magnetron sputtering coating mode;
the surface coating film is divided into two layers; the first layer of coating film is a chromium coating layer, and the thickness of the chromium coating layer is 70-200 nanometers; and plating a gold plating layer with a preset thickness on the chromium plating layer.
According to the laser gyroscope of the first aspect of the invention, the closed anode, the pumped anode and the cathode are all made of super invar alloy; the shapes of the closed anode and the air extraction anode are inverted T shapes, and the centers of the closed anode and the air extraction anode extend outwards to form a rod-shaped structure; the connection surface of the closed anode and the air extraction anode with the cavity of the laser gyroscope is a plane-shaped airtight surface;
an air guide hole is arranged in the middle of the rod-shaped structure extending outwards from the center of the air extraction anode;
the cathode is in an omega shape, and the annular edge of the bottom surface forms a plane-shaped airtight surface;
and plating gold plating layers with preset thickness on the surfaces of the plane-shaped airtight surfaces of the closed anode, the air-extracting anode and the cathode.
According to the laser gyroscope of the first aspect of the present invention, the cathode is in an Ω shape, the inner discharge surface of the Ω -shaped cathode is vacuum magnetron sputtered with a layer of high purity aluminum, and the purity of the aluminum is: 99.99 percent.
According to the laser gyroscope of the first aspect of the invention, the gold-plating layer is plated in an electroplating or vacuum magnetron sputtering manner, and the thickness of the gold-plating layer with the preset thickness is 1-3 micrometers.
According to the laser gyroscope of the first aspect of the present invention, the sealed anode, the pumping anode and the cathode are respectively welded on the airtight surface arranged around the through hole serving as the electrode on the cavity of the glass-ceramic laser gyroscope by using the gold-tin solder.
According to the laser gyroscope of the first aspect of the present invention, the gold-tin solder is in the form of an annular preform sheet, the annular preform sheet is padded between an airtight surface arranged around the through hole of the cavity of the microcrystalline glass laser gyroscope and the airtight anode, the pumping anode or the cathode, the airtight anode, the pumping anode and the cathode are fixed on the cavity of the microcrystalline glass laser gyroscope by using a fixture, and then the cavity of the microcrystalline glass laser gyroscope is placed in a vacuum baking furnace to perform heat welding and sealing.
The second aspect of the present invention provides a laser gyro sealing method, including the steps of:
step 4, placing the cavity of the laser gyroscope, on which the sealed anode, the air-extracting anode and the cathode are fixed in the step 3, into a vacuum baking oven, heating to a preset temperature, and baking for a preset time length;
and 5, cooling and annealing the baked laser gyroscope cavity in the step 4 according to a preset cooling rate.
The method according to the second aspect of the present invention, wherein the predetermined temperature is: 300-400 ℃, and the baking preset time is as follows: 1-10 hours; the predetermined cool down rate is: 0.1-1 deg.c/min.
The method according to the second aspect of the present invention, wherein the baking temperature is 350 ℃, and the baking time is 2 hours; the predetermined cooling rate was 0.1 deg.c/min.
By adopting the scheme of the invention, the used equipment is not complex and is a mature and reliable standard product. The matching electrode adopts high-temperature gold-tin solder to weld the discharge electrode of the laser cavity, and compared with the common indium solder, the matching electrode has the advantages of high temperature resistance, long service life, welding strength which can be improved by at least 2 times, and shearing strength of the welding position which can reach more than 30 MPa; the invention has good adaptability to various laser gyros.
Drawings
FIG. 1 is a microcrystalline glass cavity of a conventional laser gyroscope;
FIG. 2 is a structural diagram of an anode structure and a plating layer of the present invention;
FIG. 3 is a drawing of the pumped anode structure and the shape of the plating of the present invention, wherein A is a cross-sectional view and B is a bottom view;
FIG. 4 is a sectional view of the cathode structure and the plating layer of the present invention, wherein A is a bottom view;
FIG. 5 is a shape diagram of the cavity plating layer of the microcrystalline glass of the laser gyro of the present invention, wherein A is a front view, B is a side view, and C is a top view;
FIG. 6 is a view of the shape of the gold-tin solder ring preform of the present invention, wherein A is a front view and B is a top view;
fig. 7 is an assembly schematic diagram of a microcrystalline glass cavity, two anodes and a cathode of the laser gyroscope of the invention.
The laser gyroscope comprises a laser gyroscope cavity 1, a slender inner hole 2, an anode through hole 3, a cathode through hole 4, a sealed anode 5, a planar airtight surface 6, an air extraction anode 7, an anode air guide hole 8, a cathode 9, a high-purity aluminum coating 10, an airtight surface on the laser gyroscope cavity 11, an annular prefabricated sheet cross section 12 and an annular prefabricated sheet 13.
Detailed Description
The invention provides a high-temperature-resistant laser gyroscope technology, solves the problem that the conventional electrode indium seal airtight technology cannot resist high temperature, can better prolong the service life of the laser gyroscope, and is suitable for large-scale batch production application of various laser gyroscopes.
The invention adopts 4J32 super invar alloy as a cathode and an anode, and gold is plated on the surface needing air tightness. The inner surface of the super invar alloy cathode discharge is plated with high-purity aluminum. And gold plating is carried out on the surface of the microcrystalline glass cavity which is in airtight connection with the electrode.
And solder or prefabricated pieces are coated, the electrodes are fixed at the corresponding positions of the cavities by adopting a special tool, and the high-vacuum sintering is carried out, so that the high-vacuum airtightness is realized, the connection strength is greatly improved, the reliability of the laser gyroscope in strong vibration and impact environments is ensured, the temperature endured by the gyroscope is improved to 250 ℃, the subsequent ultrahigh vacuum exhaust treatment is more sufficient, and the service life of the laser gyroscope is greatly prolonged.
The invention provides an ultralow-expansion gold-plated electrode and a microcrystalline glass airtight surface gold-plating technology, which solves the problem of expansion coefficient matching between the electrode and the microcrystalline glass and adopts high-temperature-resistant gold-tin solder for high-strength airtight connection.
The following detailed description of embodiments of the invention refers to the accompanying drawings.
As shown in fig. 1 and fig. 2, in a conventional laser gyro cavity 1, three lateral through holes on a side surface of the laser gyro cavity 1 are connected to a slender inner hole 2 on the laser gyro cavity 1, the lateral through holes are used for welding a sealed anode 5, an extraction anode 7 or a cathode 9, and the sealed anode 5, the extraction anode 7 and the cathode 9 are used for providing high-voltage electric excitation for a laser substance in the slender inner hole 2 on the laser gyro cavity 1.
A first aspect of the present invention provides a laser gyro, including: the laser gyroscope comprises a laser gyroscope cavity 1 made of microcrystalline glass, a closed anode 5, an air extraction anode 7 and a cathode 9;
an annular slender inner hole 2 is formed in the laser gyro cavity 1, and the annular slender inner hole 2 is used for storing laser substances; an anode through hole 3 and a cathode through hole 4 which are communicated with the annular slender inner hole 2 are arranged on the side surface of the cavity 1 of the laser gyroscope, and the anode through hole 3 and the cathode through hole 4 are used for connecting the closed anode 5, the air-extracting anode 7 and the cathode 9;
an airtight surface 11 on the laser gyroscope cavity is arranged on the side surface of the laser gyroscope cavity 1 and surrounds the anode through hole 3 and the cathode through hole 4, and the airtight surface 11 on the laser gyroscope cavity is used for being welded with the airtight anode 5, the air-extracting anode 7 or the cathode 9 through welding materials to form sealing;
the anode comprises: a closed anode 5 and an air-extracting anode 7; and an anode air guide hole 8 for exhausting or inflating is arranged on the air extraction anode 7.
According to the laser gyroscope of the first aspect of the invention, the closed anode 5, the pumping anode 7 and the cathode 9 are all made of super invar alloy; the shapes of the closed anode 5 and the air-extracting anode 7 are both inverted T shapes, and the centers of the closed anode 5 and the air-extracting anode 7 extend outwards to form a rod-shaped structure; the surfaces of the sealed anode 5 and the air-extracting anode 7 connected with the cavity of the laser gyroscope are planar airtight surfaces 6;
an anode air guide hole 8 is formed in the middle of the rod-shaped structure extending outwards from the center of the air extraction anode 7;
the cathode is in an omega shape, and the annular edge of the bottom surface forms a plane-shaped airtight surface 6;
and plating gold plating with a preset thickness on the surfaces of the plane-shaped airtight surface 6 of the closed anode 5, the air-extracting anode 7 and the cathode 9.
According to the laser gyroscope of the first aspect of the present invention, the cathode 9 is in an Ω shape, the inner discharge surface of the Ω -shaped cathode 9 is vacuum magnetron sputtered with a high purity aluminum plating layer 10, and the purity of aluminum is: 99.99 percent.
According to the laser gyroscope of the first aspect of the invention, the surface of the airtight surface 11 on the laser gyroscope cavity of the microcrystalline glass, which is connected with the sealed anode 5, the pumping anode 7 or the cathode 9, is coated, and the surface coating is made in a vacuum magnetron sputtering coating mode;
the surface coating is divided into two layers; the first layer of the coating film is a chromium coating layer, and the thickness of the chromium coating layer is 70-200 nanometers; and plating a gold plating layer with a preset thickness on the chromium plating layer.
According to the laser gyroscope of the first aspect of the invention, the gold plating layer is plated in an electroplating or vacuum magnetron sputtering manner, and the thickness of the gold plating layer with the predetermined thickness is as follows: 1-3 microns.
According to the laser gyroscope of the first aspect of the present invention, the sealed anode 5, the pumping anode 7 and the cathode 9 are respectively welded on the anode through hole 3 used as an electrode on the laser gyroscope cavity 1 of the microcrystalline glass and the airtight surface 11 on the laser gyroscope cavity arranged around the cathode through hole 4 by using gold-tin solder.
According to the laser gyroscope of the first aspect of the present invention, the gold-tin solder is in the form of the ring-shaped preform 13, the ring-shaped preform 13 is padded between the airtight surface 11 on the laser gyroscope cavity, which is arranged around the through hole of the microcrystalline glass laser gyroscope cavity, and the sealed anode 5, the pumping anode 7 or the cathode 9, the sealed anode 5, the pumping anode 7 and the cathode 9 are fixed on the microcrystalline glass laser gyroscope cavity 1 by using a fixture, and then the microcrystalline glass laser gyroscope cavity 1 is placed in a vacuum baking oven to perform heat welding sealing.
The second aspect of the present invention provides a laser gyro sealing method, including the steps of:
step 4, placing the laser gyroscope cavity 1 with the sealed anode 5, the air-extracting anode 7 and the cathode 9 fixed in the step 3 into a vacuum baking oven, heating to a preset temperature, and baking for a preset time length;
and 5, cooling and annealing the laser gyroscope cavity 1 baked in the step 4 according to a preset cooling rate.
The method according to the second aspect of the present invention, wherein the predetermined temperature is: 300-400 ℃, and the baking preset time is as follows: 1-10 hours; the predetermined cool down rate is: 0.1-1 deg.c/min.
The method according to the second aspect of the present invention, wherein the baking temperature is 350 ℃, and the baking time is 2 hours; the predetermined cooling rate was 0.1 deg.c/min.
Examples
As shown in figures 2 and 3, on the basis of the design of the closed anode 5 and the air-extracting anode 7, a layer of gold is electroplated on the airtight surface or plated in a vacuum magnetron sputtering way, and the thickness of the gold layer is 1 to 3 micrometers.
The structure of the cathode 9 and the gold-plated layer are shown in fig. 4, the cathode 9 body is in an omega shape, the bottom edge of the cathode is provided with a folded edge, the outer surface of the folded edge is in a plane shape and is used as a plane-shaped airtight surface 6 to be welded with a cathode through hole of a laser gyroscope cavity 1, the surface of the folded edge at the bottom edge of the cathode is electroplated with the gold-plated layer, and a discharge surface in the omega shape of the cathode is plated with a high-purity aluminum plating layer 10 with the purity of 99.99% through vacuum magnetron sputtering, and is used as a discharge surface.
Fig. 5 shows a front view and a side view of the laser gyro cavity 1, wherein the position of the side surface provided with the anode through hole 3 or the cathode through hole 4 is also designed to be an airtight surface 11 on the laser gyro cavity, and a gold plating layer is electroplated on the surface of the airtight surface 11 on the laser gyro cavity. The gold-plated layer and the gold-tin solder have good eutectic property, can form a tight welding seam and have good air tightness.
The ring-shaped preform 13 of the Au-Sn solder used for the sealed anode 5, the pumped anode 7 and the cathode 9 is shown in FIG. 6, and the cross section 12 of the ring-shaped preform is circular. Before use, the annular prefabricated sheet 13 of the gold-tin solder needs to be subjected to ultrasonic cleaning by using ethanol and acetone for 3 minutes respectively, and then is subjected to drying treatment after cleaning.
After drying, the gold-plated laser gyro cavity 1, two anodes and one cathode are fixed on a hundred-grade purification bench by using a clamp as shown in fig. 7. And putting the mixture into a vacuum baking oven, heating the mixture to 350 ℃, wherein the typical baking temperature is 2 hours, and the baking time can be flexibly selected from 1 to 10 hours. The annealing rate in baking and cooling is a key parameter, the expansion coefficient of the microcrystalline glass is obviously influenced by an inappropriate annealing rate, the annealing rate can be usually selected from 0.1 to 1 ℃/minute, and the typical annealing rate is 0.1 ℃/minute. After the baking is finished, all parts can be firmly sealed.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the embodiments of the present invention and not for limiting, and although the embodiments of the present invention are described in detail with reference to the above preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions can be made on the technical solutions of the embodiments of the present invention without departing from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. A laser gyro, characterized in that the laser gyro comprises: a laser gyroscope cavity, an anode and a cathode made of microcrystalline glass;
an annular elongated hole is formed in the cavity of the laser gyroscope and used for storing laser substances; through holes communicated with the annular elongated holes are formed in the side face of the cavity of the laser gyroscope and are used for being connected with the anode and the cathode respectively;
an airtight surface is arranged on the side surface of the cavity of the laser gyroscope and surrounds the periphery of the through hole, and the airtight surface is used for being welded with the anode or the cathode through welding flux to form sealing;
the anode comprises: sealing the anode and the air-extracting anode; the air extraction anode is provided with an air guide hole for exhausting or inflating;
coating a film on the surface of an airtight surface of the laser gyroscope cavity connected with the closed anode, the air-extracting anode or the cathode, wherein the surface coating is manufactured in a vacuum magnetron sputtering coating mode;
the surface coating film is divided into two layers; the first layer of coating film is a chromium coating layer, and the thickness of the chromium coating layer is 70-200 nanometers; plating a gold plating layer with a preset thickness on the chromium plating layer;
the closed anode, the air-extracting anode and the cathode are all made of super invar alloy; and the closed anode, the air-extracting anode and the cathode are respectively welded on an airtight surface arranged at the periphery of the through hole serving as the electrode on the cavity of the laser gyroscope by using gold-tin solder.
2. The laser gyroscope of claim 1, wherein the closed anode and the pumped anode are both inverted T-shaped in shape, and a rod-shaped structure protrudes outwards from the center of the closed anode and the pumped anode; the connection surface of the closed anode and the air extraction anode with the cavity of the laser gyroscope is a plane-shaped airtight surface;
the middle of the rod-shaped structure extending outwards from the center of the air extraction anode is provided with an air guide hole;
the cathode is in an omega shape, and the annular edge of the bottom surface forms a plane-shaped airtight surface;
and plating gold plating layers with preset thickness on the surfaces of the plane-shaped airtight surfaces of the closed anode, the air-extracting anode and the cathode.
3. The laser gyroscope of claim 2, wherein the cathode is in an omega shape, the inner discharge surface of the omega-shaped cathode is vacuum magnetron sputtered with a layer of high-purity aluminum, and the purity of the aluminum is as follows: 99.99 percent.
4. The laser gyroscope of claim 2, wherein the gold-plating layer is plated by electroplating or vacuum magnetron sputtering, and the thickness of the gold-plating layer with the predetermined thickness is 1-3 microns.
5. The laser gyro of claim 1, wherein the gold-tin solder is in the form of an annular preform sheet, the annular preform sheet is padded between an airtight surface provided around the through hole of the laser gyro cavity and the airtight anode, the pumping anode or the cathode, the airtight anode, the pumping anode and the cathode are fixed on the laser gyro cavity by a clamp, and then the laser gyro cavity is placed in a vacuum baking oven to perform heat welding sealing.
6. A laser gyro sealing method is characterized by comprising the following steps:
step 1, plating gold plating layers with preset thickness on an airtight surface on a cavity of the laser gyroscope and a plane-shaped airtight surface of the airtight anode, the air-extracting anode and the cathode, wherein the gold plating adopts an electroplating or vacuum magnetron sputtering plating mode; the closed anode, the air-extracting anode and the cathode are all made of super invar alloy;
step 2, respectively carrying out ultrasonic cleaning on the annular prefabricated sheet of the gold-tin solder by using ethanol and acetone, and drying the annular prefabricated sheet of the gold-tin solder subjected to ultrasonic cleaning;
step 3, fixing the laser gyroscope cavity after the gold plating treatment in the step 1 on a hundred-grade purification table with a closed anode, an air-extracting anode and a cathode by using clamps, and clamping the annular precast piece of the gold-tin solder dried in the step 2 between a gold-plating layer on an airtight surface on the laser gyroscope cavity and gold-plating layers on planar airtight surfaces of the closed anode, the air-extracting anode and the cathode;
step 4, placing the cavity of the laser gyroscope, on which the sealed anode, the air-extracting anode and the cathode are fixed in the step 3, into a vacuum baking oven, heating to a preset temperature, and baking for a preset time length;
and 5, cooling and annealing the laser gyroscope cavity baked in the step 4 according to a preset cooling rate.
7. The method of claim 6, wherein the predetermined temperature is: 300-400 ℃, and the baking preset time is as follows: 1-10 hours; the predetermined cool down rate is: 0.1-1 deg.c/min.
8. The method of claim 7, wherein the baking temperature is 350 ℃ and the baking time is 2 hours; the predetermined cooling rate was 0.1 deg.c/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211256276.7A CN115326044B (en) | 2022-10-14 | 2022-10-14 | Laser gyroscope and sealing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211256276.7A CN115326044B (en) | 2022-10-14 | 2022-10-14 | Laser gyroscope and sealing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115326044A CN115326044A (en) | 2022-11-11 |
| CN115326044B true CN115326044B (en) | 2023-01-20 |
Family
ID=83913845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211256276.7A Active CN115326044B (en) | 2022-10-14 | 2022-10-14 | Laser gyroscope and sealing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115326044B (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4460831A (en) * | 1981-11-30 | 1984-07-17 | Thermo Electron Corporation | Laser stimulated high current density photoelectron generator and method of manufacture |
| JPH0637403A (en) * | 1992-07-14 | 1994-02-10 | Mitsubishi Electric Corp | Semiconductor laser device |
| CN102169839A (en) * | 2010-12-01 | 2011-08-31 | 烟台睿创微纳技术有限公司 | Method for packaging preforming sheet by using Au-Sn solder and metal heating disk |
| CN202231297U (en) * | 2011-09-29 | 2012-05-23 | 中国航空工业第六一八研究所 | Novel glass cathode for laser gyroscope |
| CN103236634A (en) * | 2013-04-24 | 2013-08-07 | 中国船舶重工集团公司第七一七研究所 | Annular laser device with electrode group and manufacture method for electrode group |
| CN104810709A (en) * | 2015-05-15 | 2015-07-29 | 中国船舶重工集团公司第七一七研究所 | Ring laser |
| CN204854757U (en) * | 2014-12-19 | 2015-12-09 | 北京航天时代激光导航技术有限责任公司 | Highly reliable sealed laser gyro integration negative pole |
| CN108092125A (en) * | 2017-12-26 | 2018-05-29 | 华中光电技术研究所（中国船舶重工集团公司第七七研究所） | A kind of symmetric form ring laser and preparation method thereof |
| CN207625063U (en) * | 2017-12-27 | 2018-07-17 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | A kind of ring laser composite cathode |
| CN210245945U (en) * | 2019-08-16 | 2020-04-03 | 中国航空工业集团公司西安飞行自动控制研究所 | Gas laser resonant cavity processing device |
| CN111623801A (en) * | 2020-06-12 | 2020-09-04 | 湖南二零八先进科技有限公司 | Laser gyro electrode indium seal enhancement device and method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999026324A1 (en) * | 1997-11-14 | 1999-05-27 | Honeywell Inc. | Extending ring laser gyro (rlg) lifetime by using corrosive resistant electrodes |
| US6072580A (en) * | 1999-01-21 | 2000-06-06 | Honeywell Inc. | Method for anodically bonding an electrode to a ring laser gyro block |
| US6516018B2 (en) * | 1999-05-04 | 2003-02-04 | Honeywell International Inc. | Corrosive resistant plated electrode for a RLG |
-
2022
- 2022-10-14 CN CN202211256276.7A patent/CN115326044B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4460831A (en) * | 1981-11-30 | 1984-07-17 | Thermo Electron Corporation | Laser stimulated high current density photoelectron generator and method of manufacture |
| JPH0637403A (en) * | 1992-07-14 | 1994-02-10 | Mitsubishi Electric Corp | Semiconductor laser device |
| CN102169839A (en) * | 2010-12-01 | 2011-08-31 | 烟台睿创微纳技术有限公司 | Method for packaging preforming sheet by using Au-Sn solder and metal heating disk |
| CN202231297U (en) * | 2011-09-29 | 2012-05-23 | 中国航空工业第六一八研究所 | Novel glass cathode for laser gyroscope |
| CN103236634A (en) * | 2013-04-24 | 2013-08-07 | 中国船舶重工集团公司第七一七研究所 | Annular laser device with electrode group and manufacture method for electrode group |
| CN204854757U (en) * | 2014-12-19 | 2015-12-09 | 北京航天时代激光导航技术有限责任公司 | Highly reliable sealed laser gyro integration negative pole |
| CN104810709A (en) * | 2015-05-15 | 2015-07-29 | 中国船舶重工集团公司第七一七研究所 | Ring laser |
| CN108092125A (en) * | 2017-12-26 | 2018-05-29 | 华中光电技术研究所（中国船舶重工集团公司第七七研究所） | A kind of symmetric form ring laser and preparation method thereof |
| CN207625063U (en) * | 2017-12-27 | 2018-07-17 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | A kind of ring laser composite cathode |
| CN210245945U (en) * | 2019-08-16 | 2020-04-03 | 中国航空工业集团公司西安飞行自动控制研究所 | Gas laser resonant cavity processing device |
| CN111623801A (en) * | 2020-06-12 | 2020-09-04 | 湖南二零八先进科技有限公司 | Laser gyro electrode indium seal enhancement device and method |
Non-Patent Citations (1)
| Title |
|---|
| 激光陀螺谐振腔密封焊的研究;吴绪会;《2013中国高端SMT学术会议》;20131231;第498- 403页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115326044A (en) | 2022-11-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10991616B2 (en) | High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same | |
| US3531853A (en) | Method of making a ceramic-to-metal seal | |
| KR102689408B1 (en) | Semiconductor processing equipment with highly heat-resistant nickel alloy joints and method for manufacturing the same | |
| CN109986160B (en) | Method for manufacturing high-purity niobium pipe-stainless steel pipe through vacuum brazing | |
| US4612647A (en) | High performance laser and method of making same | |
| JP2018518060A (en) | Method for repairing equipment parts used in semiconductor processing | |
| CN115326044B (en) | Laser gyroscope and sealing method thereof | |
| US5529858A (en) | Hermetically sealed thermocompression feedthrough and peripheral seal for high temperature lithium based battery applications | |
| US3055465A (en) | Metal-to-ceramic joint and method of forming | |
| EP3394875B1 (en) | Electron beam gun with kinematic coupling for high power rf vacuum devices | |
| CN101706323A (en) | Installation structure of getter in infrared detector Dewar and implement method | |
| CN206271657U (en) | Ceramic materials and metal brazed components for X-ray tubes | |
| CN105869683B (en) | A kind of forming method of ceramic lead device and the device | |
| CN115355899A (en) | Connection method for miniature laser gyro reflector | |
| CN207625063U (en) | A kind of ring laser composite cathode | |
| CN115479596A (en) | Laser gyro electrode and manufacturing method | |
| JPS6236773B2 (en) | ||
| CN106145991B (en) | A kind of forming method of trilaminate material seal configuration and the structure | |
| KR102558926B1 (en) | Semiconductor substrate support with multiple electrodes and method for manufacturing same | |
| JP2945466B2 (en) | Airtight joint structure between ceramic tube and metal | |
| RU2220832C2 (en) | Method for making and heat treatment of parts of alumina ceramics and precision alloys for electric thrusters | |
| CN201555661U (en) | A structure for installing getter in Dewar | |
| CN115255606B (en) | Diffusion connection method for copper and graphite of aluminum-containing intermediate layer | |
| CN222146522U (en) | Electrode terminal, battery cover plate assembly, battery and electric equipment | |
| US9105896B2 (en) | Metal rings for active brazing in sodium-based thermal batteries |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |