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CN115307788A - Method for determining capacitance of non-contact type round conductive film variable capacitor - Google Patents

Method for determining capacitance of non-contact type round conductive film variable capacitor Download PDF

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CN115307788A
CN115307788A CN202210797640.4A CN202210797640A CN115307788A CN 115307788 A CN115307788 A CN 115307788A CN 202210797640 A CN202210797640 A CN 202210797640A CN 115307788 A CN115307788 A CN 115307788A
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conductive film
circular conductive
variable capacitor
electrode plate
pressure
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孙俊贻
颜志强
何晓婷
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Chongqing University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

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Abstract

The invention discloses a method for determining the capacitance of a non-contact circular conductive film variable capacitor, which comprises the following steps: a circular conductive film which is initially flat and is fixedly clamped at the periphery with the radius a, the thickness h, the Young modulus E and the Poisson ratio v is used as a movable electrode plate of the variable capacitor, a fixed electrode plate of the variable capacitor is parallel to the circular conductive film which is initially flat, an insulating layer with the thickness t is coated on the fixed electrode plate, a medium between the insulating layer and the circular conductive film which is initially flat is air, the distance is g, pressure q is applied to the circular conductive film, and the circular conductive film generates axisymmetric flexural deformation to one side of the fixed electrode plate but does not contact the insulating layer, so that the variable capacitor is changed from the initial parallel plate capacitor to a non-parallel plate capacitor after the pressure q is applied, and the capacitance C of the variable capacitor can be determined by using the measured value of the pressure q based on the static balance analysis of the axisymmetric flexural deformation.

Description

一种非接触式圆形导电薄膜可变电容器电容量的确定方法A Method for Determining the Capacitance of a Non-contact Circular Conductive Film Variable Capacitor

技术领域technical field

本发明涉及一种采用圆形导电薄膜作为移动电极板的非接触式可变电容器的电容量的确定方法。The invention relates to a method for determining the capacitance of a non-contact variable capacitor using a circular conductive film as a moving electrode plate.

背景技术Background technique

薄膜在许多工程技术领域都有着较为广泛的应用。许多薄膜具有良好的弹性变形能力，在横向荷载作用下可以呈现出较大的弹性挠度，这为设计和开发基于薄膜弹性挠度的器件提供了可能性。圆形非接触式电容压力传感器就是一种基于导电薄膜弹性挠度的压力传感器，其中的关键部件是一个采用圆形导电薄膜作为移动电极板的可变电容器。可变电容器的移动电极板是一块最初平坦且周边固定夹紧的圆形导电薄膜。可变电容器的固定电极板平行于最初平坦的圆形导电薄膜，从而使可变电容器最初为平行板电容器变。固定电极板上涂有一层绝缘层，绝缘层与最初平坦的圆形导电薄膜之间有一定间距、并且二者之间的介质是空气。在压力作用下，圆形导电薄膜，作为可变电容器的移动电极板，就会向固定电极板一侧产生轴对称的挠曲变形，从而使得可变电容器从施加压力之前的平行板电容器变成施加压力之后的非平行板电容器。控制所施加的压力的大小(即控制压力传感器的使用压力)，便可使圆形导电薄膜所产生的最大弹性挠度小于绝缘层与最初平坦的圆形导电薄膜之间的间距，从而形成了一种非接触式的电容量可变的非平行板电容器。这样，压力的变化引起圆形导电薄膜的弹性挠度的变化，而圆形导电薄膜的弹性挠度的变化又导致了可变电容器的电容量的变化。所以，压力、弹性挠度、电容量，三者之间是一一对应的解析关系。因此，只要有了这个解析关系，通过测量电容量就可以把压力确定下来，这就是圆形非接触式电容压力传感器的基本原理。Thin films are widely used in many engineering fields. Many thin films have good elastic deformation ability and can exhibit large elastic deflection under lateral load, which provides the possibility to design and develop devices based on thin film elastic deflection. A circular non-contact capacitive pressure sensor is a pressure sensor based on the elastic deflection of a conductive film, the key component of which is a variable capacitor that uses a circular conductive film as a moving electrode plate. The moving electrode plate of a variable capacitor is a circular conductive film that is initially flat and fixedly clamped around its perimeter. The fixed electrode plates of the variable capacitor are parallel to the initially flat circular conductive film, so that the variable capacitor is initially a parallel plate capacitor. A layer of insulating layer is coated on the fixed electrode plate, and there is a certain distance between the insulating layer and the initially flat circular conductive film, and the medium between the two is air. Under the action of pressure, the circular conductive film, as the moving electrode plate of the variable capacitor, will produce axisymmetric deflection deformation to the side of the fixed electrode plate, so that the variable capacitor changes from a parallel plate capacitor before the pressure is applied. A non-parallel plate capacitor after stress is applied. Controlling the magnitude of the applied pressure (that is, controlling the operating pressure of the pressure sensor) can make the maximum elastic deflection produced by the circular conductive film smaller than the distance between the insulating layer and the initially flat circular conductive film, thereby forming a A non-contact variable capacitance non-parallel plate capacitor. In this way, the change of the pressure causes the change of the elastic deflection of the circular conductive film, and the change of the elastic deflection of the circular conductive film leads to the change of the capacitance of the variable capacitor. Therefore, there is a one-to-one analytical relationship between pressure, elastic deflection, and capacitance. Therefore, as long as there is this analytical relationship, the pressure can be determined by measuring the capacitance, which is the basic principle of the circular non-contact capacitive pressure sensor.

然而，由于薄膜大挠度问题存在较强的非线性，因而要想得到非接触式电容压力传感器的压力、弹性挠度、电容量三者之间的准确的解析关系，几乎是不可能的。本发明致力于圆形非接触式电容压力传感器的研究，得到了压力与弹性挠度、以及压力与电容量之间的较为精确的解析关系。从现有文献的查新结果来看，并未见到本发明的研究成果。However, due to the strong nonlinearity in the problem of large deflection of the membrane, it is almost impossible to obtain an accurate analytical relationship among the pressure, elastic deflection, and capacitance of the non-contact capacitive pressure sensor. The invention is dedicated to the research of the circular non-contact capacitive pressure sensor, and obtains the relatively accurate analytical relationship between the pressure and the elastic deflection, and the pressure and the capacitance. From the novelty search result of existing document, do not see research result of the present invention.

发明内容Contents of the invention

本发明致力于圆形非接触式电容压力传感器的研究，得到了其中有关非接触式可变电容器中的圆形导电薄膜轴对称挠曲变形的解析解，并在此基础上，给出了一种非接触式圆形导电薄膜可变电容器电容量的确定方法。The present invention is devoted to the research of the circular non-contact capacitive pressure sensor, has obtained the analytic solution of the axisymmetric deflection of the circular conductive film in the non-contact variable capacitor, and on this basis, has given a A method for determining the capacitance of a non-contact circular conductive film variable capacitor.

一种非接触式圆形导电薄膜可变电容器电容量的确定方法：采用一块最初平坦的半径为a、厚度为h、杨氏弹性模量为E、泊松比为ν的周边固定夹紧的圆形导电薄膜作为可变电容器的移动电极板，让可变电容器的固定电极板平行于最初平坦的圆形导电薄膜，在固定电极板上涂一层厚度为t的绝缘层，让绝缘层与最初平坦的圆形导电薄膜之间的介质为空气、间距为g，对圆形导电薄膜施加压力q、使其向固定电极板一侧产生轴对称的挠曲变形、但不会接触到固定电极板上的绝缘层，从而使得可变电容器从施加压力q之前的平行板电容器变成施加压力q之后的非平行板电容器，那么基于该圆形导电薄膜轴对称挠曲变形的静力平衡分析，就可以得到该非接触式圆形导电薄膜可变电容器的电容量C与所施加的压力q的解析关系为A method for determining the capacitance of a non-contact circular conductive thin-film variable capacitor: using an initially flat piece with a radius a, a thickness h, a Young’s modulus of elasticity of E, and a Poisson’s ratio of ν, which is fixed and clamped around the periphery The circular conductive film is used as the moving electrode plate of the variable capacitor, so that the fixed electrode plate of the variable capacitor is parallel to the original flat circular conductive film, and an insulating layer with a thickness of t is coated on the fixed electrode plate, so that the insulating layer and The medium between the initially flat circular conductive films is air, and the distance is g, and a pressure q is applied to the circular conductive film to produce an axisymmetric deflection deformation to the side of the fixed electrode plate, but it will not touch the fixed electrode The insulating layer on the plate, so that the variable capacitor changes from a parallel plate capacitor before applying pressure q to a non-parallel plate capacitor after applying pressure q, then based on the static force balance analysis of the axisymmetric deflection of the circular conductive film, The analytical relationship between the capacitance C of the non-contact circular conductive film variable capacitor and the applied pressure q can be obtained as

Figure BDA0003736322120000021
Figure BDA0003736322120000021

其中，r为圆形导电薄膜上的一点到圆形导电薄膜的对称轴的距离，ε0为真空介电常数，ε1为固定电极板上的绝缘层的相对介电常数，ε2为空气的相对介电常数，π为圆周率，并且Wherein, r is the distance from a point on the circular conductive film to the axis of symmetry of the circular conductive film, ε 0 is the vacuum dielectric constant, ε 1 is the relative permittivity of the insulating layer on the fixed electrode plate, and ε 2 is the air The relative permittivity of , π is the circumference ratio, and

Figure BDA0003736322120000022
Figure BDA0003736322120000022

Figure BDA0003736322120000023
Figure BDA0003736322120000023

Figure BDA0003736322120000024
Figure BDA0003736322120000024

Figure BDA0003736322120000025
Figure BDA0003736322120000025

Figure BDA0003736322120000031
Figure BDA0003736322120000031

Figure BDA0003736322120000032
Figure BDA0003736322120000032

Figure BDA0003736322120000033
Figure BDA0003736322120000033

Figure BDA0003736322120000034
Figure BDA0003736322120000034

Figure BDA0003736322120000035
Figure BDA0003736322120000035

Figure BDA0003736322120000041
Figure BDA0003736322120000041

Figure BDA0003736322120000042
Figure BDA0003736322120000042

Figure BDA0003736322120000043
Figure BDA0003736322120000043

Figure BDA0003736322120000051
Figure BDA0003736322120000051

Figure BDA0003736322120000061
Figure BDA0003736322120000061

Figure BDA0003736322120000062
Figure BDA0003736322120000062

而b0的值由方程

Figure BDA0003736322120000063
while the value of b0 is given by the equation
Figure BDA0003736322120000063

Figure BDA0003736322120000064
Figure BDA0003736322120000064

Figure BDA0003736322120000065
Figure BDA0003736322120000065

Figure BDA0003736322120000066
Figure BDA0003736322120000066

Figure BDA0003736322120000071
Figure BDA0003736322120000071

Figure BDA0003736322120000081
Figure BDA0003736322120000081

Figure BDA0003736322120000091
Figure BDA0003736322120000091

Figure BDA0003736322120000101
Figure BDA0003736322120000101

Figure BDA0003736322120000102
Figure BDA0003736322120000102

Figure BDA0003736322120000103
Figure BDA0003736322120000103

Figure BDA0003736322120000104
Figure BDA0003736322120000104

Figure BDA0003736322120000111
Figure BDA0003736322120000111

Figure BDA0003736322120000112
Figure BDA0003736322120000112

Figure BDA0003736322120000113
Figure BDA0003736322120000113

Figure BDA0003736322120000114
Figure BDA0003736322120000114

Figure BDA0003736322120000115
确定。
Figure BDA0003736322120000115
Sure.

这样，只要测得压力q的值，就可以由方程In this way, as long as the value of pressure q is measured, the equation

Figure BDA0003736322120000121
Figure BDA0003736322120000121

确定出该非接触式圆形导电薄膜可变电容器在圆形导电薄膜受到压力q作用时的电容量C，其中，C的单位为皮法(pF)，ε0的单位为皮法每毫米(pF/mm)，a、h、t、g、r的单位均为毫米(mm)，E、q的单位均为牛顿每平方毫米(N/mm2)，而v、b0、b2、b4、b6、b8、b10、b12、b14、c0、c2、c4、c6、c8、c10、c12、c14、Q、ε1、ε2、π均为无量纲的量。Determine the capacitance C of the non-contact circular conductive film variable capacitor when the circular conductive film is subjected to the pressure q , wherein the unit of C is picofarads (pF), and the unit of ε0 is picofarads per millimeter ( pF/mm), the units of a, h, t, g, r are millimeters (mm), the units of E, q are Newtons per square millimeter (N/mm 2 ), and v, b 0 , b 2 , b 4 , b 6 , b 8 , b 10 , b 12 , b 14 , c 0 , c 2 , c 4 , c 6 , c 8 , c 10 , c 12 , c 14 , Q, ε 1 , ε 2 , π is a dimensionless quantity.

附图说明Description of drawings

图1为非接触式圆形导电薄膜可变电容器在圆形导电薄膜受到压力q作用时产生轴对称挠曲变形的示意图，其中，1是轴对称挠曲变形后的圆形导电薄膜，2是可变电容器的固定电极板，3是固定电极板上的绝缘层，4是通空气的透气孔，5是最初平坦的圆形导电薄膜的外边缘固定夹紧装置，6是可变电容器的支座，7表示最初平坦的圆形导电薄膜的几何中面所在的平面，而a表示最初平坦的圆形导电薄膜的外半径及其外边缘固定夹紧装置的内半径，t表示固定电极板上的绝缘层的厚度，g表示绝缘层与最初平坦的圆形导电薄膜之间的间距，o是坐标原点(位于最初平坦的圆形导电薄膜的几何中面的形心)，r是径向坐标(用来表示变形前或者变形后的圆形导电薄膜上的一点到变形前或者变形后的圆形导电薄膜的对称轴的距离)，w是横向坐标(用来表示轴对称变形后的圆形导电薄膜的挠度)，q表示施加在圆形导电薄膜上的压力。Figure 1 is a schematic diagram of axisymmetric deflection of a non-contact circular conductive film variable capacitor when the circular conductive film is subjected to a pressure q, wherein, 1 is the circular conductive film after axisymmetric deflection, and 2 is The fixed electrode plate of the variable capacitor, 3 is the insulating layer on the fixed electrode plate, 4 is the vent hole for air ventilation, 5 is the outer edge fixing and clamping device of the initially flat circular conductive film, 6 is the support of the variable capacitor seat, 7 represents the plane where the geometric middle plane of the initially flat circular conductive film is located, and a represents the outer radius of the initially flat circular conductive film and the inner radius of the clamping device on its outer edge, and t represents the fixed electrode plate The thickness of the insulating layer, g represents the spacing between the insulating layer and the initially flat circular conductive film, o is the coordinate origin (located at the centroid of the geometric midplane of the initially flat circular conductive film), r is the radial coordinate (used to indicate the distance from a point on the circular conductive film before or after deformation to the symmetry axis of the circular conductive film before or after deformation), w is the transverse coordinate (used to represent the circular shape after axisymmetric deformation) The deflection of the conductive film), and q represents the pressure exerted on the circular conductive film.

具体实施方式Detailed ways

下面结合具体案例对本发明的技术方案作进一步的说明：The technical scheme of the present invention is further described below in conjunction with specific case:

如图1所示，采用一块最初平坦的半径a＝100mm、厚度h＝1mm、杨氏弹性模量E＝7.84N/mm2、泊松比ν＝0.47的周边固定夹紧的圆形导电薄膜作为可变电容器的移动电极板，让可变电容器的固定电极板平行于最初平坦的圆形导电薄膜，在固定电极板上涂一层厚度t＝0.1mm的绝缘层，让绝缘层与最初平坦的圆形导电薄膜之间的介质为空气、间距g＝41mm，对圆形导电薄膜施加压力q、使其向固定电极板一侧产生轴对称的挠曲变形、但不会接触到固定电极板上的绝缘层，从而使得可变电容器从施加压力q之前的平行板电容器变成施加压力q之后的非平行板电容器，测得压力q＝0.021225MPa，那么采用本发明所给出的方法，由方程As shown in Figure 1, an initially flat circular conductive film with radius a=100mm, thickness h=1mm, Young’s modulus of elasticity E=7.84N/mm 2 , and Poisson’s ratio ν=0.47 is used. As the moving electrode plate of the variable capacitor, let the fixed electrode plate of the variable capacitor be parallel to the initially flat circular conductive film, and coat a layer of insulating layer with a thickness of t=0.1mm on the fixed electrode plate, so that the insulating layer is flat with the original The medium between the circular conductive films is air, the distance g=41mm, and the pressure q is applied to the circular conductive film, so that it produces axisymmetric deflection to the side of the fixed electrode plate, but it will not touch the fixed electrode plate The insulating layer on the upper surface, so that the variable capacitor changes from the parallel plate capacitor before the pressure q to the non-parallel plate capacitor after the pressure q is applied, and the measured pressure q=0.021225MPa, then adopt the method provided by the present invention, by equation

Figure BDA0003736322120000131
Figure BDA0003736322120000131

Figure BDA0003736322120000132
Figure BDA0003736322120000132

Figure BDA0003736322120000133
Figure BDA0003736322120000133

Figure BDA0003736322120000134
Figure BDA0003736322120000134

Figure BDA0003736322120000135
Figure BDA0003736322120000135

Figure BDA0003736322120000141
Figure BDA0003736322120000141

Figure BDA0003736322120000151
Figure BDA0003736322120000151

Figure BDA0003736322120000161
Figure BDA0003736322120000161

Figure BDA0003736322120000162
Figure BDA0003736322120000162

Figure BDA0003736322120000163
Figure BDA0003736322120000163

Figure BDA0003736322120000164
Figure BDA0003736322120000164

Figure BDA0003736322120000171
Figure BDA0003736322120000171

Figure BDA0003736322120000172
Figure BDA0003736322120000172

Figure BDA0003736322120000173
Figure BDA0003736322120000173

Figure BDA0003736322120000174
Figure BDA0003736322120000174

Figure BDA0003736322120000175
Figure BDA0003736322120000175

得到b0＝0.214308以及c2＝-0.315815、c4＝-0.047998、c6＝-1.650838×10-2、c8＝-7.352749×10-3、c10＝-3.731051×10-3、c12＝-2.050382×10-3、c14＝-1.189700×10-3，再由方程Obtain b 0 =0.214308 and c 2 =-0.315815, c 4 =-0.047998, c 6 =-1.650838×10 -2 , c 8 =-7.352749×10 -3 , c 10 =-3.731051×10 -3 , c 12 ＝-2.050382×10 -3 , c 14 ＝-1.189700×10 -3 , and then by the equation

Figure BDA0003736322120000181
Figure BDA0003736322120000181

得到c0＝0.396696，最后由方程Get c 0 =0.396696, and finally by the equation

Figure BDA0003736322120000182
Figure BDA0003736322120000182

得到该非接触式圆形导电薄膜可变电容器在圆形导电薄膜受到q＝0.021225MPa的压力作用时的电容量C＝26.59pF，其中，r为圆形导电薄膜上的一点到圆形导电薄膜的对称轴的距离，π为圆周率，真空介电常数ε0＝8.854×10-3pF/mm，固定电极板上的绝缘层的相对介电常数ε1＝2.5，空气的相对介电常数ε2＝1.00053。Obtain the capacitance C=26.59pF of this non-contact circular conductive film variable capacitor when the circular conductive film is subjected to the pressure of q=0.021225MPa, wherein, r is a point on the circular conductive film to the circular conductive film The distance of the symmetry axis, π is the circumference ratio, the vacuum permittivity ε 0 =8.854×10 -3 pF/mm, the relative permittivity of the insulating layer on the fixed electrode plate ε 1 =2.5, the relative permittivity of air ε 2 = 1.00053.

Claims (1)

1. A method for determining capacitance of a non-contact circular conductive film variable capacitor is characterized in that: the method comprises the steps of adopting a circular conductive film which is initially flat and is fixedly clamped at the periphery with the radius a, the thickness h, the Young modulus E and the Poisson ratio v as a movable electrode plate of the variable capacitor, enabling a fixed electrode plate of the variable capacitor to be parallel to the initially flat circular conductive film, coating an insulating layer with the thickness t on the fixed electrode plate, enabling a medium between the insulating layer and the initially flat circular conductive film to be air and enabling the space to be g, applying pressure q to the circular conductive film to enable the circular conductive film to generate axisymmetric flexural deformation to one side of the fixed electrode plate without contacting the insulating layer on the fixed electrode plate, and changing the variable capacitor from a parallel plate capacitor before applying the pressure q to a non-parallel plate capacitor after applying the pressure q
Figure FDA0003736322110000011
Figure FDA0003736322110000012
Figure FDA0003736322110000013
Figure FDA0003736322110000014
Figure FDA0003736322110000021
Figure FDA0003736322110000031
Figure FDA0003736322110000041
Figure FDA0003736322110000051
Figure FDA0003736322110000052
Figure FDA0003736322110000053
Figure FDA0003736322110000054
Figure FDA0003736322110000061
Figure FDA0003736322110000062
Figure FDA0003736322110000063
Figure FDA0003736322110000064
Figure FDA0003736322110000065
Determination of b 0 And b 2 、b 4 、b 6 、b 8 、b 10 、b 12 、b 14 、c 2 、c 4 、c 6 、c 8 、c 10 、c 12 、c 14 Then by the equation
Figure FDA0003736322110000066
Determination of c 0 Is finally given by the equation
Figure FDA0003736322110000071
Determining the capacitance C of the non-contact circular conductive film variable capacitor when the circular conductive film is subjected to pressure q, wherein r is the distance from one point on the circular conductive film to the symmetry axis of the circular conductive film, epsilon 0 Is a vacuum dielectric constant of ∈ 1 To fix the relative dielectric constant, epsilon, of the insulating layer on the electrode plate 2 Is the relative dielectric constant of air, pi is the circumference ratio, and the unit of C is picofarad (pF), epsilon 0 The units of (a) are picofarads per millimeter (pF/mm), the units of a, h, t, g, r are all millimeters (mm), and the units of E, q are all newtons per square millimeter (N/mm) 2 ) V, b 0 、b 2 、b 4 、b 6 、b 8 、b 10 、b 12 、b 14 、c 0 、c 2 、c 4 、c 6 、c 8 、c 10 、c 12 、c 14 、Q、ε 1 、ε 2 And pi are dimensionless quantities.
CN202210797640.4A 2022-07-08 2022-07-08 Method for determining capacitance of non-contact type round conductive film variable capacitor Pending CN115307788A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116625326A (en) * 2023-07-20 2023-08-22 湖南大学 A Highly Linear Depth Gauge Used in Bathymetric Surveying

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
WO2015051729A1 (en) * 2013-10-08 2015-04-16 无锡华润上华半导体有限公司 Capacitive type mems pressure sensor
CN112730071A (en) * 2020-12-09 2021-04-30 重庆大学 Method for determining elastic energy of circular prestressed film under gas pressure
CN112880950A (en) * 2021-01-18 2021-06-01 重庆大学 Method for determining deflection of circular prestressed film with limited maximum deflection under air pressure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
WO2015051729A1 (en) * 2013-10-08 2015-04-16 无锡华润上华半导体有限公司 Capacitive type mems pressure sensor
CN112730071A (en) * 2020-12-09 2021-04-30 重庆大学 Method for determining elastic energy of circular prestressed film under gas pressure
CN112880950A (en) * 2021-01-18 2021-06-01 重庆大学 Method for determining deflection of circular prestressed film with limited maximum deflection under air pressure

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ZHENG, ZL, ET AL.: "Nonlinear Free Vibration Analysis of Axisymmetric Polar Orthotropic Circular Membranes under the Fixed Boundary Condition", 《MATHEMATICAL PROBLEMS IN ENGINEERING》, 30 April 2014 (2014-04-30) *
何晓婷;吴建梁;郑周练;陈山林;: "均布荷载下受有预加张力圆薄膜的轴对称变形", 重庆大学学报, no. 01, 15 January 2010 (2010-01-15) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116625326A (en) * 2023-07-20 2023-08-22 湖南大学 A Highly Linear Depth Gauge Used in Bathymetric Surveying
CN116625326B (en) * 2023-07-20 2023-10-24 湖南大学 A highly linear depth gauge for deep sea surveying

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