CN115306947A

CN115306947A - Low-vibration vacuum valve

Info

Publication number: CN115306947A
Application number: CN202210902756.XA
Authority: CN
Inventors: 于洲; 郑文才; 冉从军; 魏琼林; 赵红斌
Original assignee: Chengdu Zhongke Wish Instruments Co ltd
Current assignee: Chengdu Zhongke Wish Instruments Co ltd
Priority date: 2022-07-29
Filing date: 2022-07-29
Publication date: 2022-11-08

Abstract

The invention discloses a low-vibration vacuum valve, which relates to the field of vacuum valves and solves the problem of high vibration noise of the existing vacuum valve switch valve, and comprises a valve body provided with a rotating part, wherein a bending limiting plate is arranged in the valve body, guide rails are respectively arranged on two sides of the bending limiting plate, a limiting sheet is arranged on each guide rail, each limiting sheet and each guide rail form a limiting groove, a base plate which is in contact with the limiting grooves through four bearings is arranged in the valve body, a vertical limiting part with a matching pin is arranged on each base plate, a valve plate support is arranged below each base plate, and a first bearing and a bevel groove for accommodating the matching pin are respectively arranged on vertical bending extensions on two sides of the valve plate support; in the invention, the base plate performs limiting rolling on the limiting sheet, the guide rail and the limiting groove through the first bearing, the third bearing and the fourth bearing, so that the base plate can run stably, the first bearing rolls on the limiting sheet and the limiting plate is bent to limit the support of the valve plate, and the matching pin can slide in the bevel groove, thereby replacing a spring and realizing the mute low-vibration switch of the valve.

Description

Low-vibration vacuum valve

Technical Field

The invention relates to the field of vacuum valves, in particular to the technical field of low-vibration vacuum valves.

Background

The vacuum valve refers to a vacuum system component used for changing the direction of air flow, adjusting the magnitude of air flow and cutting off or connecting a pipeline in a vacuum system. At present, the demand of the traditional vacuum industry for vacuum valves is increasingly reduced, the emerging new energy and semiconductor fields have a very wide vacuum valve market in China, and meanwhile, higher requirements, namely cleanness, silence, low vibration and stable operation, are also provided for the vacuum valves. At present, most of valves widely applied in the traditional vacuum field adopt a spring or a spring piece to be arranged in a valve core structure to assist the completion of the on-off of the valve, but the valve core structure adopting the spring or the spring piece has the disadvantage of large vibration noise when the valve is opened, so the valve core structure does not meet the application requirements of high-end markets such as semiconductors.

Therefore, in order to meet the application requirements of high-end markets such as semiconductors, a silent low-vibration vacuum valve is urgently needed.

Disclosure of Invention

The invention aims to: the invention provides a low-vibration vacuum valve, which aims to solve the technical problem of high vibration noise of a switching valve of the conventional vacuum valve.

The invention specifically adopts the following technical scheme for realizing the purpose:

the utility model provides a low vibration vacuum valve, including the valve body that is equipped with the rotating part, be equipped with the limiting plate of bending in the valve body, the limiting plate both sides of bending are equipped with the guide rail respectively, be equipped with spacing piece on the guide rail, spacing piece forms the spacing groove with the guide rail, be equipped with the base plate through bearing four and spacing groove contact in the valve body, be equipped with the vertical spacing portion that has the cooperation round pin on the base plate, the base plate below is equipped with the valve plate and supports, the valve plate supports and is equipped with bearing one on the perpendicular extension of bending of both sides respectively, the bevel connection groove of holding cooperation round pin, be equipped with on the base plate with rotating part sliding fit's bar hole, the base plate both sides are equipped with the bearing three with the guide rail contact respectively.

And four bearings are respectively arranged at four corners of the lower surface of the substrate.

The vertical limiting part comprises a mounting hole formed in the base plate, fixing blocks are arranged on two sides of the mounting hole respectively, and matching pins and a bearing II are arranged on the fixing blocks in a sequentially outward-diffused mode along the vertical center line of the fixing blocks.

And a tail end fixing part is arranged at one end of the guide rail, which is far away from the bending limiting plate.

The tail end fixing part is provided with an opening, and a guide rail is embedded in the opening.

The base plate is provided with a square hole, and a pressing block arranged on the valve plate support is arranged in the square hole.

The valve plate support comprises a support plate, a first bearing and a bevel groove for accommodating the matching pin, which are accommodated in the mounting hole, are respectively arranged on the vertical bending extension on the two sides of the support plate, a round hole is arranged on the support plate, a sealing plate is arranged in the round hole, and a sealing ring is arranged between the sealing plate and the round hole.

The rotating part is worn to be equipped with the rack of being connected with the driving source including set casing, driving source in the set casing, and the meshing has the gear on the rack, is equipped with the fixed axle in the gear, and the extension end of fixed axle is equipped with the swing arm, and the extension end of swing arm is equipped with the drive bearing with the contact of bar hole pore wall.

The fixed shell comprises a shell body, a fixed plate is arranged in the shell body, a supporting bearing is arranged on the fixed plate, and a fixed shaft is arranged in the supporting bearing.

The invention has the following beneficial effects:

1. in the invention, the base plate performs limiting rolling on the limiting sheet, the guide rail and the limiting groove through the first bearing, the third bearing and the fourth bearing, so that the base plate can run stably, the first bearing rolls on the limiting sheet and the limiting plate is bent to limit the support of the valve plate, and the matching pin can slide in the bevel groove, thereby replacing a spring and realizing the mute low-vibration switch of the valve.

2. According to the invention, the base plate can slide under the action of a driving force, the matching pin can slide in the bevel groove, and when the base plate drives the valve plate support to extend forwards until the valve plate support is contacted with the bending limiting plate, the matching pin can slide in the bevel groove, so that the valve plate support drives the sealing plate to extrude towards the sealing surface, and the valve closing is realized.

3. In the invention, the four bearings at the four corners of the lower surface of the base plate slide on the limiting frame to transversely limit the movement of the base plate, and the vertical limiting part slides on the non-sealing surface of the inner wall of the valve body to vertically limit the movement of the base plate, so that the base plate has only one degree of freedom in the front-back direction, and the vibration noise caused by the shaking of the base plate is effectively reduced.

4. In the invention, the second bearing between the two fixed blocks is in rolling contact with the non-sealing surface of the inner wall of the valve body, and the third bearings on the two sides of the base plate are in rolling contact with the guide rail, so that the second bearing and the third bearing can limit the base plate in the vertical direction.

5. In the invention, because the surface of the outer ring of the bearing is smooth, the bearing I, the bearing III and the bearing IV can ensure the stable sliding of the substrate and the valve plate support when rolling on the limiting sheet, the guide rail and the limiting groove, thereby realizing the smooth operation of the valve core.

6. In the invention, the rotating part is matched with the strip-shaped hole to realize the sliding of the base plate, and the matching pin on the base plate is arranged in the bevel groove, so that the base plate can drive the valve plate to support and slide while sliding, and the driving force of a valve switch is ensured.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the connection of the fixing plate to the support bearing;

FIG. 3 is a schematic connection diagram of the limiting plate, the substrate and the valve plate support;

FIG. 4 is a schematic view of the connection of the mating pin to the bezel slot;

FIG. 5 is a schematic view of a substrate;

FIG. 6 is a schematic structural view of a valve plate support;

FIG. 7 is a schematic view showing the connection of the support plate, the seal ring and the seal plate;

FIG. 8 is a schematic structural view of the support plate;

FIG. 9 is a schematic structural view of the stop frame;

fig. 10 is a schematic view of a structure of the rotating portion;

FIG. 11 is a perspective view of the present invention;

reference numerals: 11 valve body, 111 valve port, 12 bending limit plate, 121 guide rail, 122 limit sheet, 123 limit groove, 124 tail end fixing part, 1241 opening, 13 base plate, 131 fixing block, 1311 special-shaped groove, 132 bearing II, 133 bearing III, 134 bearing IV, 135 matching pin, 136 mounting hole, 137 square hole, 138 strip-shaped hole, 14 rotating part, 141 driving source, 142 fixing shell, 1421 shell, 1422 fixing plate, 1423 supporting bearing, 143 rack, 144 gear, 145 fixing shaft, 146 swing arm, 147 driving bearing, 15 valve plate support, 151 supporting plate, 1511 bevel groove, 1512 bearing I, 1513 round hole, 152 sealing plate, 153 pressing block, 154 sealing ring, 16 fixing column.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example 1

As shown in fig. 1 to 11, a low-vibration vacuum valve, including a valve body 11 provided with a rotating portion 14, a bending limiting plate 12 is provided in the valve body 11, guide rails 121 are provided on both sides of the bending limiting plate 12, a limiting piece 122 is provided on the guide rail 121, the limiting piece 122 and the guide rail 121 form a limiting groove 123, a base plate 13 contacting with the limiting groove 123 through four bearings 134 is provided in the valve body 11, a vertical limiting portion with a matching pin 135 is provided on the base plate 13, a valve plate support 15 is provided below the base plate 13, a first bearing 1512 and a bevel groove 1511 accommodating the matching pin 135 are provided on the vertical bending extension on both sides of the valve plate support 15, a strip hole 138 slidably matching with the rotating portion 14 is provided on the base plate 13, and a third bearing 133 contacting with the guide rail 121 is provided on both sides of the base plate 13.

In this embodiment, the substrate 13 performs the limiting rolling on the limiting sheet 122, the guide rail 121 and the limiting groove 123 through the first bearing 1512, the third bearing 133 and the fourth bearing 134, so that the substrate 13 can run stably, and the first bearing 1512 rolls on the limiting sheet 122 and bends the limiting sheet 12 to limit the valve plate support 15, so that the matching pin 135 can slide in the bevel groove 1511, thereby replacing a spring and realizing the mute low-vibration switch of the valve; when the valve is opened, the rotating part 14 rotates anticlockwise and drives the substrate 13 to move towards the rotating part 14, the movement of the substrate 13 can be limited horizontally due to the fact that the bearing four 134 slides on the limiting frame, and the movement of the substrate 13 can be limited vertically due to the fact that the vertical limiting part slides on the non-sealing surface of the inner wall of the valve body 11, so that the substrate 13 only has one degree of freedom in the front-back direction, and vibration noise caused by shaking of the substrate 13 is effectively reduced; when the base plate 13 moves, the matching pin 135 slides in the bevel groove 1511, at the same time, the bearing 1512 rolls on the limiting sheet 122, the valve plate support 15 is lifted upwards to be close to the base plate 13, the backward force of the base plate 13 drags the valve plate support 15 to move towards the direction of the rotating part 14, at the moment, the matching pin 135 slides to the lowest position of the bevel groove 1511, the valve core is in a withdrawing state, then the base plate 13 continues to move backwards, so that the valve plate support 15 is far away from the valve port 111, and the valve is opened.

When the valve is closed, the rotating part 14 rotates clockwise, the base plate 13 is driven to move towards the bending limit plate 12, at the moment, the base plate 13 and the valve plate support 15 slide forwards simultaneously until the valve plate support 15 contacts with the bending limit plate 12, the valve plate support 15 stops moving in the horizontal direction, at the moment, the base plate 13 continues moving forwards, the matching pin 135 slides to the highest position of the inclined opening groove 1511, meanwhile, the valve plate support 15 extrudes towards the valve port 111, the valve is closed, and at the moment, the first bearing 1512 leaves the limit sheet 122.

Because the first bearing 1512, the third bearing 133 and the fourth bearing 134 slide on the limiting sheet 122, the guide rail 121 and the limiting groove 123 in a limiting manner, the valve core can run stably when the valve is opened and closed; because the first bearing 1512 rolls on the limiting sheet 122 to determine the position of the matching pin 135 in the bevel groove 1511, and the bent limiting plate 12 limits the position of the valve plate support 15, a spring is replaced, and the mute low-vibration switch of the valve is realized.

Example 2

As shown in fig. 1 to 11, in embodiment 1, four bearings 134 are provided at four corners of the lower surface of the substrate 13.

The vertical limiting part comprises a mounting hole 136 formed in the base plate 13, fixing blocks 131 are respectively arranged on two sides of the mounting hole 136, and the fixing blocks 131 are respectively provided with a matching pin 135 and a second bearing 132 along the vertical central line of the fixing blocks 131 in a spreading mode.

The fixing block 131 is provided with a profile groove 1311 for accommodating the first bearing 1512.

The end of the guide rail 121 away from the bending limit plate 12 is provided with a tail end fixing portion 124.

The tail end fixing portion 124 is provided with an opening 1241, and the opening 1241 is embedded with the guide rail 121.

The base plate 13 is provided with a square hole 137, and a pressing block 153 arranged on the valve plate support 15 is arranged in the square hole 137.

The valve plate support 15 comprises a support plate 151, a bearing 1512 and a bevel groove 1511 are respectively arranged on the vertical bending extension of two sides of the support plate 151, the bearing 1512 is arranged in the mounting hole 136, the bevel groove 1511 is arranged for accommodating the matching pin 135, a round hole 1513 is arranged on the support plate 151, a sealing plate 152 is arranged in the round hole 1513, and a sealing ring 154 is arranged between the sealing plate 152 and the round hole 1513.

In this embodiment, the rotating portion 14 drives the base plate 13 clockwise, anticlockwise rotation, thereby drive base plate 13 fore-and-aft movement, and when the valve is opened, the rotating portion 14 drives base plate 13 backward movement, four bearings 134 and spacing groove 123 rolling contact and backward movement of base plate 13 lower surface four corners, four bearings 134 of base plate 13 four corners play horizontal spacing effect to base plate 13, and three bearings 133 and guide rail 121 contact can play vertical spacing effect to base plate 13, two bearings 132 and the contact of 11 inner walls non-sealing surface of valve body can play vertical spacing effect to base plate 13, two guide rails 121 are inlayed and are established in opening 1241, can make two guide rails 121 be parallel to each other, thereby guarantee the even running of base plate 13.

During the movement of the base plate 13, the matching pin 135 slides in the bevel groove 1511, at the same time, the bearing 1512 rolls on the limiting piece 122, the supporting plate 151 and the sealing plate 152 are simultaneously lifted up and close to the base plate 13, the backward force of the base plate 13 drags the supporting plate 151 to move towards the rotating part 14, at this time, the matching pin 135 slides to the lowest position of the bevel groove 1511, the valve core is in a withdrawing state, then the base plate 13 continues to move backward, so that the sealing plate 152 is far away from the valve port 111, and the valve is opened; when the valve is opened, the first bearing 1512 is accommodated in the special-shaped groove 1311, so that the first bearing 1512 can smoothly contact with the limiting sheet 122 in a rolling manner, and the valve plate support 15 is lifted upwards, thereby realizing the valve opening, and the special-shaped groove 1311 plays a role in abdicating.

Specifically, the sealing plate 152 is fixed with the pressing block 153 and is connected with the supporting plate 151 through the pressing block 153, so that when the valve is opened or closed, the sealing plate 152 and the supporting plate 151 move simultaneously, and the sealing ring 154 can ensure the sealing property between the sealing plate 152 and the circular hole 1513; the square hole 137 may give way to the pressing block 153.

Specifically, the horizontal line of the surface of the limiting piece 122 is lower than the horizontal line of the surface of the guide rail 121, so that the three bearings 133, the four bearings 134 and the first bearing 1512 with different heights can be supported, and therefore smooth operation of the base plate 13 and the valve plate support 15 is guaranteed.

Example 3

As shown in fig. 1 to 11, in embodiment 2, two bearings 132 symmetrically arranged along the center line of the fixed block 131 are provided.

The fixing block 131 is provided with two fitting pins 135 symmetrically arranged along a center line of the fixing block.

Two bearings 133 symmetrically arranged along the center line of the base plate 13 are respectively arranged on two sides of the base plate.

The supporting plate 151 is provided with two bezel slots 1511 symmetrically disposed along its center line at the portion extending into the mounting hole 136.

Two pressing blocks 153 symmetrically arranged along the center line of the sealing plate 152 are arranged on the sealing plate 152.

The first bearing 1512, the second bearing 132, the third bearing 133 and the fourth bearing 134 are connected with other components through the fixing column 16.

In this embodiment, the two engagement pins 135 facilitate the substrate 13 to move the supporting plate 151; the two pressing pieces 153 may stably connect the sealing plate 152 to the supporting plate 151.

Example 4

As shown in fig. 1 to 11, in embodiment 2, the rotating portion 14 includes a fixed casing 142 and a driving source 141, a rack 143 connected to the driving source 141 is inserted into the fixed casing 142, a gear 144 is engaged with the rack 143, a fixed shaft 145 is disposed in the gear 144, a swing arm 146 is disposed at an extending end of the fixed shaft 145, and a driving bearing 147 contacting with a hole wall of the strip hole 138 is disposed at an extending end of the swing arm 146.

The fixing housing 142 includes a housing 1421, a fixing plate 1422 is disposed in the housing 1421, a supporting bearing 1423 is disposed on the fixing plate 1422, and a fixing shaft 145 is disposed in the supporting bearing 1423.

In this embodiment, the driving source 141 drives the rack 143 to make a linear motion, the rack 143 is engaged with the gear 144, so the swing arm 146 can be driven to make a clockwise motion and an anticlockwise motion, because the swing arm 146 is in rolling contact with the hole wall of the bar-shaped hole 138 through the driving bearing 147, when the swing arm 146 makes a clockwise motion, the driving bearing 147 drives the substrate 13 to move forward, meanwhile, the bearing four 134 extrudes to the limiting groove 123, and because the bearing four 134 is in rolling contact with the limiting groove 123, the bearing four 134 can perform a transverse limiting on the substrate 13 and push the substrate 13 forward, so that the valve element is opened, and the valve is in a closed state, when making an anticlockwise motion, the bearing four 134 can perform a transverse limiting on the substrate 13 and push the substrate 13 backward, so that the valve element is retracted, and the valve is in an open state; the support bearing 1423 may support the stationary shaft 145.

Specifically, the driving source 141 is optional but not limited to a direct push cylinder.

Claims

1. The utility model provides a low vibration vacuum valve, is including valve body (11) that are equipped with rotating part (14), its characterized in that, be equipped with the limiting plate (12) of bending in valve body (11), limiting plate (12) both sides of bending are equipped with guide rail (121) respectively, be equipped with spacing piece (122) on guide rail (121), spacing piece (122) and guide rail (121) form spacing groove (123), be equipped with base plate (13) through four (134) of bearing and spacing groove (123) contact in valve body (11), be equipped with the vertical spacing portion that has cooperation round pin (135) on base plate (13), base plate (13) below is equipped with valve plate support (15), oblique mouth groove (1511) that are equipped with bearing (1512), holding cooperation round pin (135) respectively on the perpendicular extension of bending of valve plate support (15) both sides, be equipped with rotating part (14) sliding fit's bar hole (138) on base plate (13), base plate (13) both sides are equipped with three (133) of bearing that contact with guide rail (121) respectively.

2. The low vibration vacuum valve according to claim 1, wherein four corners of the lower surface of the base plate (13) are respectively provided with a bearing four (134).

3. The low-vibration vacuum valve as claimed in claim 1, wherein the vertical limiting portion comprises a mounting hole (136) formed in the base plate (13), fixed blocks (131) are respectively disposed on two sides of the mounting hole (136), and the fixed blocks (131) are respectively provided with a fitting pin (135) and a second bearing (132) along a vertical central line of the fixed blocks (131) in sequence in an outward-spreading manner.

4. A low vibration vacuum valve as claimed in claim 1, wherein the end of the guide rail (121) away from the bending limiting plate (12) is provided with a tail end fixing part (124).

5. The low vibration vacuum valve according to claim 4, wherein the tail end fixing portion (124) is provided with an opening (1241), and the opening (1241) is embedded with a guide rail (121).

6. A low vibration vacuum valve as claimed in claim 1, wherein the base plate (13) is provided with a square hole (137), and a pressing block (153) provided on the valve plate support (15) is accommodated in the square hole (137).

7. The low-vibration vacuum valve according to claim 6, wherein the valve plate support (15) comprises a support plate (151), the vertical bending extension of the two sides of the support plate (151) is respectively provided with a first bearing (1512) accommodated in the mounting hole (136) and a bevel groove (1511) accommodating the matching pin (135), the support plate (151) is provided with a round hole (1513), a sealing plate (152) is arranged in the round hole (1513), and a sealing ring (154) is arranged between the sealing plate (152) and the round hole (1513).

8. The low vibration vacuum valve according to claim 1, wherein the rotating portion (14) comprises a fixed casing (142) and a driving source (141), a rack (143) connected with the driving source (141) penetrates through the fixed casing (142), a gear (144) is engaged with the rack (143), a fixed shaft (145) is arranged in the gear (144), a swing arm (146) is arranged at an extending end of the fixed shaft (145), and a driving bearing (147) in contact with a wall of the strip-shaped hole (138) is arranged at an extending end of the swing arm (146).

9. The vacuum valve of claim 8, wherein the fixed casing (142) comprises a housing (1421), a fixed plate (1422) is disposed in the housing (1421), a supporting bearing (1423) is disposed on the fixed plate (1422), and a fixed shaft (145) is disposed in the supporting bearing (1423).