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CN115295395B - Ionization source based on LIBS and SLRI - Google Patents

Ionization source based on LIBS and SLRI Download PDF

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CN115295395B
CN115295395B CN202210811555.9A CN202210811555A CN115295395B CN 115295395 B CN115295395 B CN 115295395B CN 202210811555 A CN202210811555 A CN 202210811555A CN 115295395 B CN115295395 B CN 115295395B
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slri
libs
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CN115295395A (en
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贾建军
万雄
王泓鹏
辛英健
马焕臻
方沛沛
段明康
刘重飞
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Shanghai Institute of Technical Physics of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/16Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/164Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes

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Abstract

本发明公开了一种基于LIBS和SLRI的电离源,该电离源由控制器、LIBS子系统、SLRI子系统、时序控制器、样品舱组成。本发明的有益效果是,电离源基于LIBS激光与二次激光共振电离SLRI,在实现LIBS一次电离时,可同步实现元素的组成和含量初步分析;基于第一次LIBS得出的元素对应的同位素原子能级先验知识,在二次共振电离时,可优先选择共振波长。四路SLRI的光路配置,实现紫外至红外的可调谐激光输出,可满足所有同位素位移和原子超精细结构的质谱测量要求。

The invention discloses an ionization source based on LIBS and SLRI. The ionization source consists of a controller, a LIBS subsystem, a SLRI subsystem, a timing controller and a sample cabin. The beneficial effect of the present invention is that the ionization source is based on the LIBS laser and the secondary laser resonance ionization SLRI. When realizing the primary ionization of LIBS, preliminary analysis of the composition and content of elements can be simultaneously realized; the isotopes corresponding to the elements obtained based on the first LIBS With prior knowledge of atomic energy levels, the resonance wavelength can be selected first during secondary resonance ionization. The four-channel SLRI optical path configuration enables tunable laser output from ultraviolet to infrared, which can meet the mass spectrometry measurement requirements of all isotope shifts and atomic ultra-fine structures.

Description

一种基于LIBS和SLRI的电离源An ionization source based on LIBS and SLRI

技术领域Technical field

本发明涉及一种质谱电离源,尤其涉及一种基于LIBS(激光诱导击穿光谱,Laser-induced breakdown spectroscopy)与二次激光共振电离SLRI的同位素质谱激光电离源,属于光电检测领域。The invention relates to a mass spectrometry ionization source, in particular to an isotope mass spectrometry laser ionization source based on LIBS (Laser-induced breakdown spectroscopy) and secondary laser resonance ionization SLRI, which belongs to the field of photoelectric detection.

背景技术Background technique

同位素质谱要求区别元素的同位素,需要极高的分辨率,是质谱领域的热点和至高点,属高端质谱领域。同位素质谱是伴随着核科学与核工业的发展而兴起的。至今,已出现了稳定同位素质谱、同位素比例质谱、加速器质谱、静态分析质谱、热电离质谱、二次离子质谱等同位素质谱分析手段。值得注意的是,激光技术的发展使得品种得到极大丰富,性能得到快速提升。合适的激光源是一种性能优异的质谱离子化源。将激光作为质谱解析及离子化手段的技术日益丰富,出现了基质辅助激光解析电离(Matrix assisted laserdesorption ionization)质谱、激光微探针(Laser microprobe)质谱、激光共振电离(Laser resonance ionization)质谱、激光剥离电感耦合等离子体质谱(LA-ICP-MS)等多种激光解析质谱技术。Isotope mass spectrometry requires distinguishing isotopes of elements and requires extremely high resolution. It is the hotspot and the highest point in the field of mass spectrometry and belongs to the field of high-end mass spectrometry. Isotope mass spectrometry emerged with the development of nuclear science and industry. So far, isotope mass spectrometry analysis methods such as stable isotope mass spectrometry, isotope ratio mass spectrometry, accelerator mass spectrometry, static analysis mass spectrometry, thermal ionization mass spectrometry, and secondary ion mass spectrometry have emerged. It is worth noting that the development of laser technology has greatly enriched the varieties and rapidly improved the performance. A suitable laser source is an excellent mass spectrometry ionization source. Technologies that use lasers as mass spectrometry analysis and ionization methods are becoming increasingly abundant. Matrix assisted laser desorption ionization (Matrix assisted laserdesorption ionization) mass spectrometry, laser microprobe (Laser microprobe) mass spectrometry, laser resonance ionization (Laser resonance ionization) mass spectrometry, laser Lift-off inductively coupled plasma mass spectrometry (LA-ICP-MS) and other laser desorption mass spectrometry technologies.

激光电离多次反射飞行时间质谱作为质谱技术中的一个热点领域,在原子光谱实验中,由于原子能级受激跃迁的选择性,受激电离采用激光激发既提高了电离效率又可采用特定波长电离特定元素或同位素,在核工业化工地质行业显示出巨大的发展前景。如核物理研究方面,包括原子质量的精确测定,测定原子核的结合能和敛集曲线,测定放射性同位素的半衰期。同位素丰度和原子量的精确测量,发现天然反应堆,核反应机理,核反应生成的短寿命粒子与质量关系。核科学与核工业方面,超低丰度同位素杂质的分析,燃耗及核燃料纯度分析(B,Pb,Sm,Y,Eu,Th)。当前,核科学与防护对放射性元素及同位素检测提出了更深层次的要求。Laser ionization multiple reflection time-of-flight mass spectrometry is a hot field in mass spectrometry technology. In atomic spectroscopy experiments, due to the selectivity of stimulated transitions of atomic energy levels, laser excitation for stimulated ionization not only improves the ionization efficiency, but also allows ionization at specific wavelengths. Specific elements or isotopes show great development prospects in the nuclear, chemical, and geological industries. For example, in nuclear physics research, it includes the accurate determination of atomic mass, determination of the binding energy and convergence curve of atomic nuclei, and determination of the half-life of radioactive isotopes. Precise measurement of isotope abundance and atomic weight, discovery of natural reactors, nuclear reaction mechanisms, and the relationship between short-lived particles generated by nuclear reactions and their mass. In nuclear science and industry, analysis of ultra-low abundance isotope impurities, burnup and nuclear fuel purity analysis (B, Pb, Sm, Y, Eu, Th). Currently, nuclear science and protection have put forward deeper requirements for the detection of radioactive elements and isotopes.

针对以上需求,本发明提出一种利用LIBS激光一次剥蚀电离、超快多频段OPO调谐二次共振电离的同位素质谱激光电离源和方法,满足高精度同位素质谱分析的需要。In response to the above needs, the present invention proposes an isotope mass spectrometry laser ionization source and method that utilizes LIBS laser primary ablation ionization and ultrafast multi-band OPO tuned secondary resonance ionization to meet the needs of high-precision isotope mass spectrometry analysis.

发明内容Contents of the invention

本发明的目的在于提供一种同位素质谱激光电离源和电离方法,实现对元素及其同位素的高效电离,并在电离的同时,利用LIBS光谱同步探测,初步获取待测物的元素构成和含量。The purpose of the present invention is to provide an isotope mass spectrometry laser ionization source and ionization method to achieve efficient ionization of elements and their isotopes, and during ionization, use LIBS spectrum for simultaneous detection to initially obtain the elemental composition and content of the object to be measured.

本发明是这样来实现的:The present invention is implemented as follows:

本发明提出的同位素质谱激光电离源用以实现同位素高精度分析所需的高效率离子共振激发,同时满足光质谱分析的需求;该电离源由控制器、LIBS子系统、SLRI子系统、时序控制器、样品舱组成。The isotope mass spectrometry laser ionization source proposed by the present invention is used to achieve high-efficiency ion resonance excitation required for high-precision isotope analysis, and at the same time meet the needs of optical mass spectrometry analysis; the ionization source is controlled by a controller, a LIBS subsystem, a SLRI subsystem, and a timing sequence. It is composed of instrument and sample cabin.

其中,LIBS子系统由LIBS激光器、光谱仪、光纤、LIBS聚焦镜、全反镜丙、光纤耦合镜组成,用以对样品进行初级电离激发的同量,初步获取样品的元素构成和含量。LIBS激光器为半导体泵浦固体激光器,其发射的LIBS激光沿发射光轴行进,经全反镜丙反射后,转向至折反轴,经LIBS聚焦镜穿过上窗口聚焦至样品舱内的样品上,产生的高温烧蚀剥离气化样品,并产生初级电离气团。初级电离气团中的等离子体冷却跃迁至低等级,辐射光沿主光轴向上透过上窗口,经光纤耦合镜聚焦耦合进光纤面,然后传输进入光谱仪,转化为LIBS光谱信号。Among them, the LIBS subsystem consists of a LIBS laser, a spectrometer, an optical fiber, a LIBS focusing mirror, a total reflection mirror, and a fiber coupling mirror. It is used to perform primary ionization excitation on the sample and initially obtain the elemental composition and content of the sample. The LIBS laser is a semiconductor-pumped solid-state laser. The LIBS laser it emits travels along the emission optical axis. After being reflected by the total reflection mirror, it turns to the reflex axis and is focused on the sample in the sample cabin through the upper window through the LIBS focusing mirror. , the high-temperature ablation produced strips off the gasified sample and generates primary ionized air masses. The plasma in the primary ionized air mass cools and transitions to a low level. The radiated light passes upward through the upper window along the main optical axis, is focused and coupled into the fiber surface through the fiber coupling mirror, and then transmitted into the spectrometer and converted into a LIBS spectrum signal.

SLRI子系统由第一路OPO、第一路超快泵浦激光器、第二路超快泵浦激光器、第二路OPO、固体激光器、比例分光片、孪生染料激光器甲、全反镜甲、孪生染料激光器乙、倍频模块、全反镜乙、双色片甲、双色片乙、双色片丙、SLRI聚集透镜组成;SLRI子系统采用多路激光将LIBS子系统电离样品得到的初级电离气团,进行选择性二次共振激发与电离。第一路超快泵浦激光器和第二路超快泵浦激光器为相同的固体激光器,它们发出的激光,分别沿第一电离光轴、第二电离光轴泵浦第一路OPO和第二路OPO。第一路OPO在受泵浦后,保留信号光部分,为第一路SLRI激光,经双色片丙反射后,沿主光轴向上行进;第二路OPO在受泵浦后,保留闲频光部分,为第二路SLRI激光,经双色片乙反射后,沿主光轴向上行进,再穿过双色片丙后,与第一路SLRI激光汇合。固体激光器发出的激光穿过比例分光片,沿第三电离光轴泵浦孪生染料激光器甲,产生波长可调谐的可见近红波段的激光,为第三路SLRI激光,经双色片甲反射后,沿主光轴向上行进,再穿过双色片乙与双色片丙后,与第一二路SLRI激光汇合;固体激光器发出的激光经比例分光片、全反镜甲反射后,沿第四电离光轴泵浦孪生染料激光器乙,产生的可调谐的可见近红外波段的激光经倍频模块倍频后,产生紫外段可调谐激光,为第四路SLRI激光,经全反镜乙反射后,沿主光轴向上行进,再穿过双色片甲、双色片乙与双色片丙后,与第一二三路SLRI激光汇合。四路SLRI的光路配置,实现紫外至红外的可调谐激光输出,可满足所有同位素位移和原子超精细结构的二次激光共振电离质谱测量。汇合后的四路SLRI激光经SLRI聚集透镜、下窗口后,聚焦于LIBS子系统电离样品得到的初级电离气团,进行选择性二次共振激发与电离。The SLRI subsystem consists of the first OPO, the first ultrafast pump laser, the second ultrafast pump laser, the second OPO, solid laser, proportional beam splitter, twin dye laser A, total reflective mirror A, twin It consists of a dye laser B, a frequency doubling module, a total mirror B, a two-color film A, a two-color film B, a two-color film C, and an SLRI focusing lens; the SLRI subsystem uses multiple lasers to ionize the primary ionized air mass obtained by ionizing the sample of the LIBS subsystem. Selective secondary resonance excitation and ionization. The first ultrafast pump laser and the second ultrafast pump laser are the same solid laser. The lasers they emit pump the first OPO and the second OPO along the first ionization optical axis and the second ionization optical axis respectively. Road OPO. After being pumped, the first OPO retains the signal light part, which is the first SLRI laser. After being reflected by the dichroic plate, it travels upward along the main optical axis; the second OPO retains the idle frequency after being pumped. The light part is the second SLRI laser. After being reflected by the dichromatic film B, it travels upward along the main optical axis, then passes through the dichromatic film C, and then merges with the first SLRI laser. The laser light emitted by the solid-state laser passes through the proportional beam splitter and pumps the twin dye laser A along the third ionization optical axis to produce a laser with a tunable wavelength in the visible near-red band, which is the third SLRI laser. After reflection by the two-color plate A, It travels upward along the main optical axis, then passes through the dichromatic film B and the dichromatic film C, and then merges with the first and second SLRI lasers; the laser emitted by the solid laser is reflected by the proportional beam splitter and the total reflection mirror A, and then ionizes along the fourth path. The optical axis-pumped twin dye laser B produces a tunable laser in the visible and near-infrared bands that is multiplied by the frequency doubling module to produce a tunable laser in the ultraviolet band, which is the fourth SLRI laser. After being reflected by the total reflective mirror B, It travels upward along the main optical axis, then passes through the two-color film A, two-color film B and two-color film C, and then merges with the first, second and third SLRI lasers. The four-channel SLRI optical path configuration achieves tunable laser output from ultraviolet to infrared, which can meet the secondary laser resonance ionization mass spectrometry measurement of all isotope shifts and atomic ultra-fine structures. After the merged four-channel SLRI laser passes through the SLRI focusing lens and the lower window, it focuses on the primary ionized air mass obtained by ionizing the sample in the LIBS subsystem, and performs selective secondary resonance excitation and ionization.

样品舱内有样品电极,在样品电极上装有样品。样品电极可以施加一定的直流偏压,与后端质谱系统进样电极之间形成直流电场,以吸引电离后的离子进入后端质谱系统分析。样品舱有下窗口和上窗口,方便LIBS子系统和SLRI子系统发射的电离激光进入,以及LIBS诱导等离子辐射光穿出。There is a sample electrode in the sample cabin, and the sample is installed on the sample electrode. The sample electrode can apply a certain DC bias voltage to form a DC electric field between the sample electrode of the back-end mass spectrometer system to attract the ionized ions into the back-end mass spectrometer system for analysis. The sample chamber has a lower window and an upper window to facilitate the entry of ionizing lasers emitted by the LIBS subsystem and SLRI subsystem, and the passage of LIBS-induced plasma radiation light.

时序控制器用于开启并控制LIBS激光器、光谱仪、第一路超快泵浦激光器、第二路超快泵浦激光器、固体激光器启动的时序关系。The timing controller is used to start and control the timing relationship between the LIBS laser, the spectrometer, the first ultrafast pump laser, the second ultrafast pump laser, and the solid-state laser.

控制器用于开启时序控制器,接收光谱仪的LIBS光谱数据进行分析。控制器还用于调谐第一路OPO、第二路OPO、孪生染料激光器甲、孪生染料激光器乙的四路SLRI输出波长。The controller is used to turn on the timing controller and receive the LIBS spectrum data of the spectrometer for analysis. The controller is also used to tune the four SLRI output wavelengths of the first OPO, the second OPO, twin dye laser A, and twin dye laser B.

本发明提出的同位素质谱激光电离方法包括以下步骤:The isotope mass spectrometry laser ionization method proposed by the present invention includes the following steps:

(1)LIBS初步元素分析(1)LIBS preliminary elemental analysis

控制器发出指令,启动时序控制器。时序控制器控制开启LIBS激光器,并在一定的延时后开启光谱仪光接收信号。LIBS激光器发射的LIBS激光聚焦至样品上,产生初级电离气团,同时产生LIBS辐射光。辐射光传输进入光谱仪,转化为LIBS光谱信号,为光谱仪所接收。光谱仪将LIBS光谱信号送至控制器,控制器根据该光谱信号分析样品的元素组成。The controller issues instructions to start the sequence controller. The timing controller controls to turn on the LIBS laser and turn on the spectrometer light receiving signal after a certain delay. The LIBS laser emitted by the LIBS laser is focused onto the sample, generating primary ionized air masses and simultaneously generating LIBS radiation. The radiated light is transmitted into the spectrometer and converted into a LIBS spectrum signal, which is received by the spectrometer. The spectrometer sends the LIBS spectrum signal to the controller, and the controller analyzes the elemental composition of the sample based on the spectrum signal.

(2)SLRI激光波长选择(2)SLRI laser wavelength selection

控制器根据第一步得到样品的元素组成,根据同位素原子光谱参数计算这些元素的同位素所对应的最佳共振激发波长集。然后,控制器调谐四路SLRI输出波长,输出波长包括最佳激发波长集中的所有波长。时序控制器控制同时开启第一路超快泵浦激光器、第二路超快泵浦激光器、固体激光器。The controller obtains the elemental composition of the sample based on the first step, and calculates the optimal set of resonance excitation wavelengths corresponding to the isotopes of these elements based on the isotope atomic spectral parameters. Then, the controller tunes the four SLRI output wavelengths, which include all wavelengths in the optimal excitation wavelength set. The timing controller controls to simultaneously turn on the first ultrafast pump laser, the second ultrafast pump laser, and the solid laser.

(3)SLRI二次电离(3)SLRI secondary ionization

四路SLRI激光汇合后,经SLRI聚集透镜、下窗口后,聚焦于LIBS子系统电离样品得到的初级电离气团,进行选择性二次共振激发,使得第一次电离不充分的粒子,尤其是同位素,得到第二次充分电离,然后,在样品电极与后端质谱系统进样电极之间直流电场的加速下,沿进样轴进入后端质谱系统分析。After the four SLRI lasers are merged, through the SLRI focusing lens and the lower window, they focus on the primary ionized air mass obtained by ionizing the sample in the LIBS subsystem, and perform selective secondary resonance excitation to make particles that are not fully ionized for the first time, especially isotopes. , obtain the second full ionization, and then, under the acceleration of the DC electric field between the sample electrode and the back-end mass spectrometry system injection electrode, enter the back-end mass spectrometry system for analysis along the injection axis.

本发明的有益效果是,电离源基于LIBS激光与二次激光共振电离SLRI,在实现LIBS一次电离时,可同步实现元素的组成和含量初步分析;基于第一次LIBS得出的元素对应的同位素原子能级先验知识,在二次共振电离时,可优先选择共振波长。四路SLRI的光路配置,实现紫外至红外的可调谐激光输出,可满足所有同位素位移和原子超精细结构的质谱测量要求。The beneficial effect of the present invention is that the ionization source is based on the LIBS laser and the secondary laser resonance ionization SLRI. When realizing the primary ionization of LIBS, preliminary analysis of the composition and content of elements can be simultaneously realized; the isotopes corresponding to the elements obtained based on the first LIBS With prior knowledge of atomic energy levels, the resonance wavelength can be selected first during secondary resonance ionization. The four-channel SLRI optical path configuration enables tunable laser output from ultraviolet to infrared, which can meet the mass spectrometry measurement requirements of all isotope shifts and atomic ultra-fine structures.

附图说明Description of drawings

图1为本发明系统结构示意图,图中:1——控制器;2——LIBS激光器;3——样品电极;4——时序控制器;5——第一路OPO;6——第一路超快泵浦激光器;7——第一电离光轴;8——第二路超快泵浦激光器;9——第二电离光轴;10——第二路OPO;11——第三电离光轴;12——固体激光器;13——第四电离光轴;14——比例分光片;15——孪生染料激光器甲;16——全反镜甲;17——孪生染料激光器乙;18——倍频模块;19——全反镜乙;20——双色片甲;21——双色片乙;22——双色片丙;23——SLRI聚集透镜;24——下窗口;25——样品舱;26——样品;27——进样轴;28——初级电离气团;29——上窗口;30——折反轴;31——LIBS聚焦镜;32——发射光轴;33——全反镜丙;34——LIBS子系统;35——光纤耦合镜;36——光谱仪;37——主光轴;38——光纤;39——SLRI子系统。Figure 1 is a schematic structural diagram of the system of the present invention. In the figure: 1 - controller; 2 - LIBS laser; 3 - sample electrode; 4 - timing controller; 5 - first OPO; 6 - first Ultrafast pump laser; 7—the first ionization optical axis; 8—the second ultrafast pump laser; 9—the second ionization optical axis; 10—the second OPO; 11—the third Ionization optical axis; 12 - solid laser; 13 - fourth ionization optical axis; 14 - proportional beam splitter; 15 - twin dye laser A; 16 - total reflection mirror A; 17 - twin dye laser B; 18——Frequency doubling module; 19——Total reflective mirror B; 20——Double-color film A; 21-Double-color film B; 22-Double-color film C; 23—SLRI focusing lens; 24—Lower window; 25 ——sample cabin; 26——sample; 27——sampling axis; 28——primary ionized air mass; 29——upper window; 30——reflection axis; 31——LIBS focusing mirror; 32——emission optical axis ; 33 - Total reflective mirror C; 34 - LIBS subsystem; 35 - Fiber coupling mirror; 36 - Spectrometer; 37 - Main optical axis; 38 - Optical fiber; 39 - SLRI subsystem.

注:OPO,光学参量振荡器;SLRI,二次激光共振电离,Secondary laser resonanceionization,简称SLRI。Note: OPO, optical parametric oscillator; SLRI, Secondary laser resonance ionization, referred to as SLRI.

具体实施方式Detailed ways

本发明具体实施方式如图1所示。The specific implementation mode of the present invention is shown in Figure 1.

本发明提出的同位素质谱激光电离源用以实现同位素高精度分析所需的高效率离子共振激发,同时满足光质谱分析的需求;该电离源由控制器1、LIBS子系统34、SLRI子系统39、时序控制器4、样品舱25组成。The isotope mass spectrometry laser ionization source proposed by the present invention is used to achieve high-efficiency ion resonance excitation required for high-precision isotope analysis, and at the same time meet the needs of optical mass spectrometry analysis; the ionization source is composed of a controller 1, a LIBS subsystem 34, and an SLRI subsystem 39 , timing controller 4, and sample cabin 25.

其中,LIBS子系统34由LIBS激光器2、光谱仪36、光纤38、LIBS聚焦镜31、全反镜丙33、光纤耦合镜35组成,用以对样品26进行初级电离激发的同量,初步获取样品26的元素构成和含量。LIBS激光器2为半导体泵浦固体激光器,其发射的LIBS激光(本实施例发射波长1064nm、重频300Hz、脉宽为400ps)沿发射光轴32行进,经全反镜丙33反射后,转向至折反轴30,经LIBS聚焦镜31穿过上窗口29聚焦至样品舱25内的样品26上,产生的高温烧蚀剥离气化样品,并产生初级电离气团28。初级电离气团28中的等离子体冷却跃迁至低等级,辐射光沿主光轴37向上透过上窗口29,经光纤耦合镜35聚焦耦合进光纤38端面,然后传输进入光谱仪36,转化为LIBS光谱信号。Among them, the LIBS subsystem 34 is composed of a LIBS laser 2, a spectrometer 36, an optical fiber 38, a LIBS focusing mirror 31, a total reflective mirror 33, and a fiber coupling mirror 35. It is used to perform primary ionization excitation on the sample 26 and initially obtain the sample. The elemental composition and content of 26. The LIBS laser 2 is a semiconductor pumped solid laser. The LIBS laser it emits (in this embodiment, the emission wavelength is 1064 nm, the repetition frequency is 300 Hz, and the pulse width is 400 ps) travels along the emission optical axis 32 and is reflected by the total reflective mirror 33 before turning to The reflection axis 30 is focused on the sample 26 in the sample chamber 25 through the upper window 29 through the LIBS focusing mirror 31, and the generated high-temperature ablation peels off the gasified sample and generates primary ionized air mass 28. The plasma in the primary ionized air mass 28 cools and transitions to a low level. The radiated light passes upward through the upper window 29 along the main optical axis 37, is focused and coupled into the end face of the optical fiber 38 through the fiber coupling mirror 35, and is then transmitted into the spectrometer 36 and converted into a LIBS spectrum. Signal.

SLRI子系统39由第一路OPO5、第一路超快泵浦激光器6、第二路超快泵浦激光器8、第二路OPO10、固体激光器12、比例分光片14、孪生染料激光器甲15、全反镜甲16、孪生染料激光器乙17、倍频模块18、全反镜乙19、双色片甲20、双色片乙21、双色片丙22、SLRI聚集透镜23组成;SLRI子系统39采用多路激光将LIBS子系统34电离样品26得到的初级电离气团28,进行选择性二次共振激发与电离。第一路超快泵浦激光器6和第二路超快泵浦激光器8为相同的固体激光器,它们发出的激光(本实施例波长1064nm、重频80MHz、脉宽为15ps),分别沿第一电离光轴7、第二电离光轴9泵浦第一路OPO5和第二路OPO10。第一路OPO5在受泵浦后,保留信号光部分(本实施例其可调谐波长范围为1400至2000nm,脉宽为15ps),为第一路SLRI激光,经双色片丙22反射后,沿主光轴37向上行进;第二路OPO10在受泵浦后,保留闲频光部分(本实施例其可调谐波长范围为2200至4200nm,脉宽为20ps),为第二路SLRI激光,经双色片乙21反射后,沿主光轴37向上行进,再穿过双色片丙22后,与第一路SLRI激光汇合。固体激光器12发出的激光(本实施例为波长532nm、重频20kHz、脉宽为50ps)穿过比例分光片14,沿第三电离光轴11泵浦孪生染料激光器甲15,产生波长可调谐的可见近红波段的激光(本实施例波长范围450-850nm),为第三路SLRI激光,经双色片甲20反射后,沿主光轴37向上行进,再穿过双色片乙21与双色片丙22后,与第一二路SLRI激光汇合;固体激光器12发出的激光经比例分光片14、全反镜甲16反射后,沿第四电离光轴13泵浦孪生染料激光器乙17(孪生染料激光器甲15与泵浦孪生染料激光器乙17为相同参数的染料激光器),产生的可调谐的可见近红外波段的激光经倍频模块18倍频后,产生紫外段(本实施例波长范围225-425nm)可调谐激光,为第四路SLRI激光,经全反镜乙19反射后,沿主光轴37向上行进,再穿过双色片甲20、双色片乙21与双色片丙22后,与第一二三路SLRI激光汇合。四路SLRI的光路配置,实现紫外至红外(本实施例波长范围225-4200nm)的可调谐激光输出,可满足所有同位素位移和原子超精细结构的二次激光共振电离质谱测量。汇合后的四路SLRI激光经SLRI聚集透镜23、下窗口24后,聚焦于LIBS子系统34电离样品26得到的初级电离气团28,进行选择性二次共振激发与电离。SLRI subsystem 39 consists of the first OPO5, the first ultrafast pump laser 6, the second ultrafast pump laser 8, the second OPO10, the solid laser 12, the proportional beam splitter 14, the twin dye laser A 15, It consists of total mirror A 16, twin dye laser B 17, frequency doubling module 18, total mirror B 19, dichromatic film A 20, dichromatic film B 21, dichromatic film C 22, and SLRI focusing lens 23; the SLRI subsystem 39 adopts a multi-color film The laser ionizes the primary ionized air mass 28 obtained by ionizing the sample 26 by the LIBS subsystem 34 for selective secondary resonance excitation and ionization. The first ultrafast pump laser 6 and the second ultrafast pump laser 8 are the same solid laser, and the laser they emit (in this embodiment, the wavelength is 1064nm, the repetition frequency is 80MHz, and the pulse width is 15ps), respectively along the first The ionization optical axis 7 and the second ionization optical axis 9 pump the first OPO5 and the second OPO10. After being pumped, the first OPO5 retains the signal light part (the tunable wavelength range of this embodiment is 1400 to 2000nm, and the pulse width is 15ps), which is the first SLRI laser. After being reflected by the dichromatic film C22, The main optical axis 37 travels upward; after being pumped, the second OPO10 retains the idler frequency light part (the tunable wavelength range of this embodiment is 2200 to 4200nm, and the pulse width is 20ps), which is the second SLRI laser. After being reflected by the dichromatic piece B 21, it travels upward along the main optical axis 37, passes through the dichromatic piece C 22, and then merges with the first SLRI laser. The laser light emitted by the solid laser 12 (in this embodiment has a wavelength of 532 nm, a repetition frequency of 20 kHz, and a pulse width of 50 ps) passes through the proportional beam splitter 14 and pumps the twin dye laser A 15 along the third ionization optical axis 11 to generate a tunable wavelength It can be seen that the laser in the near-red band (the wavelength range of this embodiment is 450-850nm) is the third SLRI laser. After being reflected by the two-color film A 20, it travels upward along the main optical axis 37, and then passes through the two-color film B 21 and the two-color film A. After C 22, it merges with the first and second SLRI lasers; after the laser emitted by the solid laser 12 is reflected by the proportional beam splitter 14 and the total reflective mirror A 16, it pumps the twin dye laser B 17 (twin dye) along the fourth ionization optical axis 13 Laser A 15 and pump twin dye laser B 17 are dye lasers with the same parameters), and the generated tunable laser in the visible and near-infrared band is multiplied by the frequency doubling module 18 to produce an ultraviolet band (the wavelength range of this embodiment is 225-225 425nm) tunable laser, which is the fourth SLRI laser. After being reflected by the total mirror B 19, it travels upward along the main optical axis 37, and then passes through the bicolor film A 20, the bicolor film B 21 and the bicolor film C 22, and then The first, second and third SLRI laser paths converge. The four-channel SLRI optical path configuration realizes tunable laser output from ultraviolet to infrared (wavelength range 225-4200 nm in this embodiment), which can meet the secondary laser resonance ionization mass spectrometry measurement of all isotope shifts and atomic ultra-fine structures. After the merged four-channel SLRI laser passes through the SLRI focusing lens 23 and the lower window 24, it is focused on the primary ionized air mass 28 obtained by ionizing the sample 26 in the LIBS subsystem 34, and performs selective secondary resonance excitation and ionization.

样品舱25内有样品电极3,在样品电极3上装有样品26。样品电极3可以施加一定的直流偏压,与后端质谱系统进样电极之间形成直流电场,以吸引电离后的离子进入后端质谱系统分析。样品舱25有下窗口24和上窗口29,方便LIBS子系统34和SLRI子系统39发射的电离激光进入,以及LIBS诱导等离子辐射光穿出。There is a sample electrode 3 in the sample compartment 25, and a sample 26 is installed on the sample electrode 3. A certain DC bias voltage can be applied to the sample electrode 3 to form a DC electric field between the sample electrode 3 and the injection electrode of the back-end mass spectrometry system to attract the ionized ions into the back-end mass spectrometry system for analysis. The sample cabin 25 has a lower window 24 and an upper window 29 to facilitate the entry of the ionizing laser emitted by the LIBS subsystem 34 and the SLRI subsystem 39 and the passage of the LIBS-induced plasma radiation light.

时序控制器4用于开启并控制LIBS激光器2、光谱仪36、第一路超快泵浦激光器6、第二路超快泵浦激光器8、固体激光器12启动的时序关系。The timing controller 4 is used to start and control the timing relationship between the LIBS laser 2, the spectrometer 36, the first ultrafast pump laser 6, the second ultrafast pump laser 8, and the solid-state laser 12.

控制器1用于开启时序控制器4,接收光谱仪36的LIBS光谱数据进行分析。控制器1还用于调谐第一路OPO5、第二路OPO10、孪生染料激光器甲15、孪生染料激光器乙17的四路SLRI输出波长。The controller 1 is used to turn on the timing controller 4 and receive the LIBS spectrum data of the spectrometer 36 for analysis. The controller 1 is also used to tune the four SLRI output wavelengths of the first OPO5, the second OPO10, twin dye laser A 15, and twin dye laser B 17.

本发明提出的同位素质谱激光电离方法包括以下步骤:The isotope mass spectrometry laser ionization method proposed by the present invention includes the following steps:

(1)LIBS初步元素分析(1)LIBS preliminary elemental analysis

控制器1发出指令,启动时序控制器4。时序控制器4控制开启LIBS激光器2,并在一定的延时后(本实施例为10微秒)开启光谱仪36曝光接收信号。LIBS激光器2发射的LIBS激光聚焦至样品26上,产生初级电离气团28,同时产生LIBS辐射光。辐射光传输进入光谱仪36,转化为LIBS光谱信号,为光谱仪36所接收。光谱仪36将LIBS光谱信号送至控制器1,控制器1根据该光谱信号分析样品26的元素组成。Controller 1 issues an instruction to start sequence controller 4. The timing controller 4 controls to turn on the LIBS laser 2, and after a certain delay (10 microseconds in this embodiment), turns on the spectrometer 36 to expose and receive signals. The LIBS laser emitted by the LIBS laser 2 is focused on the sample 26 to generate primary ionized air mass 28 and at the same time generate LIBS radiation. The radiated light is transmitted into the spectrometer 36 and converted into a LIBS spectrum signal, which is received by the spectrometer 36 . The spectrometer 36 sends the LIBS spectrum signal to the controller 1, and the controller 1 analyzes the elemental composition of the sample 26 based on the spectrum signal.

(2)SLRI激光波长选择(2)SLRI laser wavelength selection

控制器1根据第一步得到样品26的元素组成,根据同位素原子光谱参数计算这些元素的同位素所对应的最佳共振激发波长集。然后,控制器1调谐四路SLRI输出波长,输出波长包括最佳激发波长集中的所有波长。时序控制器4控制同时开启第一路超快泵浦激光器6、第二路超快泵浦激光器8、固体激光器12。The controller 1 obtains the elemental composition of the sample 26 according to the first step, and calculates the optimal set of resonance excitation wavelengths corresponding to the isotopes of these elements based on the isotope atomic spectrum parameters. Then, controller 1 tunes four SLRI output wavelengths, and the output wavelengths include all wavelengths in the optimal excitation wavelength set. The timing controller 4 controls the first ultrafast pump laser 6, the second ultrafast pump laser 8, and the solid-state laser 12 to be turned on at the same time.

(3)SLRI二次电离(3)SLRI secondary ionization

四路SLRI激光汇合后,经SLRI聚集透镜23、下窗口24后,聚焦于LIBS子系统34电离样品26得到的初级电离气团28,进行选择性二次共振激发,使得第一次电离不充分的粒子,尤其是同位素,得到第二次充分电离,然后,在样品电极3与后端质谱系统进样电极之间直流电场的加速下,沿进样轴27进入后端质谱系统分析。After the four SLRI lasers are merged, they are focused on the primary ionized air mass 28 obtained by ionizing the sample 26 by the LIBS subsystem 34 through the SLRI focusing lens 23 and the lower window 24, and perform selective secondary resonance excitation, so that the first ionization is insufficient. The particles, especially the isotopes, are fully ionized for the second time, and then, under the acceleration of the DC electric field between the sample electrode 3 and the injection electrode of the back-end mass spectrometry system, they enter the back-end mass spectrometry system for analysis along the injection axis 27.

Claims (1)

1.一种基于LIBS和SLRI的电离源,由控制器(1)、LIBS子系统(34)、SLRI子系统(39)、时序控制器(4)、样品舱(25)组成;其特征在于:1. An ionization source based on LIBS and SLRI, consisting of a controller (1), a LIBS subsystem (34), a SLRI subsystem (39), a timing controller (4), and a sample cabin (25); characterized by: : LIBS子系统(34)由LIBS激光器(2)、光谱仪(36)、光纤(38)、LIBS聚焦镜(31)、全反镜丙(33)、光纤耦合镜(35)组成,用以对样品(26)进行初级电离激发的同量,初步获取样品(26)的元素构成和含量;LIBS激光器(2)为半导体泵浦固体激光器,其发射的LIBS激光沿发射光轴(32)行进,经全反镜丙(33)反射后,转向至折反轴(30),经LIBS聚焦镜(31)穿过上窗口(29)聚焦至样品舱(25)内的样品(26)上,产生的高温烧蚀剥离气化样品,并产生初级电离气团(28);初级电离气团(28)中的等离子体冷却跃迁至低等级,辐射光沿主光轴(37)向上透过上窗口(29),经光纤耦合镜(35)聚焦耦合进光纤(38)端面,然后传输进入光谱仪(36),转化为LIBS光谱信号;The LIBS subsystem (34) consists of a LIBS laser (2), a spectrometer (36), an optical fiber (38), a LIBS focusing mirror (31), a total reflective mirror (33), and a fiber coupling mirror (35). (26) performs the same amount of primary ionization excitation to initially obtain the elemental composition and content of the sample (26); the LIBS laser (2) is a semiconductor pumped solid laser, and the LIBS laser it emits travels along the emission optical axis (32). After reflection by the total mirror C (33), it turns to the reflection axis (30), passes through the upper window (29) through the LIBS focusing mirror (31) and focuses on the sample (26) in the sample cabin (25), resulting in High-temperature ablation strips off the gasified sample and generates a primary ionized air mass (28); the plasma in the primary ionized air mass (28) cools and transitions to a low level, and the radiated light passes upward along the main optical axis (37) through the upper window (29) , is focused and coupled into the end face of the optical fiber (38) through the fiber coupling mirror (35), and then transmitted into the spectrometer (36) and converted into a LIBS spectrum signal; SLRI子系统(39)由第一路OPO(5)、第一路超快泵浦激光器(6)、第二路超快泵浦激光器(8)、第二路OPO(10)、固体激光器(12)、比例分光片(14)、孪生染料激光器甲(15)、全反镜甲(16)、孪生染料激光器乙(17)、倍频模块(18)、全反镜乙(19)、双色片甲(20)、双色片乙(21)、双色片丙(22)、SLRI聚集透镜(23)组成;SLRI子系统(39)采用多路激光将LIBS子系统(34)电离样品(26)得到的初级电离气团(28),进行选择性二次共振激发与电离;第一路超快泵浦激光器(6)和第二路超快泵浦激光器(8)为相同的固体激光器,它们发出的激光,分别沿第一电离光轴(7)、第二电离光轴(9)泵浦第一路OPO(5)和第二路OPO(10);第一路OPO(5)在受泵浦后,保留信号光部分,为第一路SLRI激光,经双色片丙(22)反射后,沿主光轴(37)向上行进;第二路OPO(10)在受泵浦后,保留闲频光部分,为第二路SLRI激光,经双色片乙(21)反射后,沿主光轴(37)向上行进,再穿过双色片丙(22)后,与第一路SLRI激光汇合;固体激光器(12)发出的激光穿过比例分光片(14),沿第三电离光轴(11)泵浦孪生染料激光器甲(15),产生波长可调谐的可见近红波段的激光,为第三路SLRI激光,经双色片甲(20)反射后,沿主光轴(37)向上行进,再穿过双色片乙(21)与双色片丙(22)后,与第一二路SLRI激光汇合;固体激光器(12)发出的激光经比例分光片(14)、全反镜甲(16)反射后,沿第四电离光轴(13)泵浦孪生染料激光器乙(17),产生的可调谐的可见近红外波段的激光经倍频模块(18)倍频后,产生紫外段可调谐激光,为第四路SLRI激光,经全反镜乙(19)反射后,沿主光轴(37)向上行进,再穿过双色片甲(20)、双色片乙(21)与双色片丙(22)后,与第一二三路SLRI激光汇合;四路SLRI的光路配置,实现紫外至红外的可调谐激光输出,可满足所有同位素位移和原子超精细结构的二次激光共振电离质谱测量;汇合后的四路SLRI激光经SLRI聚集透镜(23)、下窗口(24)后,聚焦于LIBS子系统(34)电离样品(26)得到的初级电离气团(28),进行选择性二次共振激发与电离;The SLRI subsystem (39) consists of the first OPO (5), the first ultrafast pump laser (6), the second ultrafast pump laser (8), the second OPO (10), the solid laser ( 12), proportional beam splitter (14), twin dye laser A (15), total reflective mirror A (16), twin dye laser B (17), frequency doubling module (18), total reflective mirror B (19), two-color It consists of chip A (20), two-color chip B (21), two-color chip C (22), and an SLRI focusing lens (23); the SLRI subsystem (39) uses multiple lasers to ionize the LIBS subsystem (34) to the sample (26) The obtained primary ionized air mass (28) is subjected to selective secondary resonance excitation and ionization; the first ultrafast pump laser (6) and the second ultrafast pump laser (8) are the same solid laser, and they emit The laser pumps the first OPO (5) and the second OPO (10) along the first ionization optical axis (7) and the second ionization optical axis (9) respectively; the first OPO (5) is pumped After pumping, the signal light part is retained, which is the first SLRI laser. After being reflected by the dichroic plate C (22), it travels upward along the main optical axis (37); the second OPO (10) retains the free signal after being pumped. The frequency light part is the second SLRI laser. After being reflected by the double-color piece B (21), it travels upward along the main optical axis (37), then passes through the double-color piece C (22), and then merges with the first SLRI laser; The laser light emitted by the solid laser (12) passes through the proportional beam splitter (14), pumps the twin dye laser A (15) along the third ionization optical axis (11), and generates laser light with a tunable wavelength in the visible near-red band, which is the third The three-channel SLRI laser, after being reflected by the two-color piece A (20), travels upward along the main optical axis (37), and then passes through the two-color piece B (21) and the two-color piece C (22), and then connects with the first and second-line SLRI lasers. Convergence; after the laser light emitted by the solid laser (12) is reflected by the proportional beam splitter (14) and the total reflection mirror A (16), the twin dye laser B (17) is pumped along the fourth ionization optical axis (13), and the resulting After the tuned laser in the visible and near-infrared bands is doubled by the frequency doubling module (18), a tunable laser in the ultraviolet segment is generated, which is the fourth SLRI laser. After being reflected by the total reflective mirror B (19), it is reflected along the main optical axis (37 ) travels upward, and then passes through the two-color plate A (20), the two-color plate B (21) and the two-color plate C (22), and then merges with the first, second and third SLRI lasers; the optical path configuration of the four-way SLRI realizes ultraviolet to infrared The tunable laser output can meet the secondary laser resonance ionization mass spectrometry measurement of all isotope shifts and atomic ultra-fine structures; the combined four SLRI lasers are focused on LIBS after passing through the SLRI focusing lens (23) and the lower window (24) The primary ionized air mass (28) obtained by the subsystem (34) ionizing the sample (26) performs selective secondary resonance excitation and ionization; 样品舱(25)内有样品电极(3),在样品电极(3)上装有样品(26),样品电极(3)可以施加一定的直流偏压,与后端质谱系统进样电极之间形成直流电场,以吸引电离后的离子进入后端质谱系统分析;样品舱(25)有下窗口(24)和上窗口(29),方便LIBS子系统(34)和SLRI子系统(39)发射的电离激光进入,以及LIBS诱导等离子辐射光穿出;There is a sample electrode (3) in the sample cabin (25), and a sample (26) is installed on the sample electrode (3). A certain DC bias voltage can be applied to the sample electrode (3) to form a gap between the sample electrode (3) and the injection electrode of the back-end mass spectrometer system. DC electric field to attract ionized ions into the back-end mass spectrometer system for analysis; the sample cabin (25) has a lower window (24) and an upper window (29) to facilitate the emission of the LIBS subsystem (34) and the SLRI subsystem (39) The ionizing laser enters, and the LIBS-induced plasma radiation light passes out; 时序控制器(4)用于开启并控制LIBS激光器(2)、光谱仪(36)、第一路超快泵浦激光器(6)、第二路超快泵浦激光器(8)、固体激光器(12)启动的时序关系;The timing controller (4) is used to turn on and control the LIBS laser (2), the spectrometer (36), the first ultrafast pump laser (6), the second ultrafast pump laser (8), and the solid-state laser (12 ) timing relationship of startup; 控制器(1)用于开启时序控制器(4),接收光谱仪(36)的LIBS光谱数据进行分析;控制器(1)还用于调谐第一路OPO(5)、第二路OPO(10)、孪生染料激光器甲(15)、孪生染料激光器乙(17)的四路SLRI输出波长。The controller (1) is used to turn on the timing controller (4) and receive the LIBS spectrum data of the spectrometer (36) for analysis; the controller (1) is also used to tune the first OPO (5) and the second OPO (10 ), the four-channel SLRI output wavelengths of twin dye laser A (15) and twin dye laser B (17).
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