CN115284079A - Magnetorheological Polishing Calibration Method - Google Patents

Abstract

The invention provides a magnetorheological polishing calibration method, which comprises the following steps: s1, establishing a measurement coordinate system of a laser tracker based on the laser tracker and a tool coordinate system of processing equipment; s2, measuring the space coordinate of the measuring head in a measuring coordinate system based on the ball fitting function or the circle fitting function of the laser tracker, and measuring the space coordinate of the magnetorheological polishing wheel in the measuring coordinate system based on the ball fitting function of the laser tracker; and S3, the data processor obtains the spatial position conversion relation between the measuring head and the magnetorheological polishing wheel by obtaining and subtracting the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel. The invention accurately calibrates the spatial position relation between the magnetorheological polishing wheel and the measuring head in a non-contact mode, the calibration method does not depend on the processing precision and the assembling precision of hardware, does not need to assist calibration by a standard block, and can reduce the requirement of operation experience of an operator.

Description

Magnetorheological Polishing Calibration Method

technical field

The invention relates to the technical field of magnetorheological polishing calibration, in particular to a magnetorheological polishing calibration method.

Background technique

Magnetorheological polishing technology is a commonly used processing technology in the field of high-precision optical processing. This processing technology has the advantages of stable removal function, high processing certainty and fast convergence efficiency. Magneto-rheological polishing technology is usually combined with processing equipment. Based on the excellent motion performance and high trajectory accuracy of machine tools, magnetorheological polishing technology can achieve nanometer-level processing accuracy for large-diameter optical components with a diameter of more than 1m. A prerequisite for using magnetorheological polishing technology to achieve high-precision machining goals is to accurately calibrate the spatial position of the optical component relative to the machine tool. A commonly used calibration method is to use the probe positioning method to determine the spatial position and orientation of the optical component. The spatial conversion relationship between the head and the polishing wheel finally determines the spatial pose of the optical element relative to the machine tool. Therefore, whether an accurate spatial position conversion relationship can be established between the probe and the polishing wheel will directly affect the calibration accuracy of the optical element relative to the machine tool, and then affect the final machining accuracy.

At present, there are mainly two calibration methods for the spatial position conversion relationship between the probe and the polishing wheel: one is to rely on the design drawings of the equipment and the processing and assembly accuracy to calculate the spatial conversion matrix between the two, and this method depends on the processing of the hardware and assembly accuracy, increasing the overall cost of the equipment; the other is to obtain the spatial conversion relationship between the two based on the contact calibration method of the standard block. This method relies on the operator's operating experience, and the calibration accuracy is reduced due to operational errors. risks of.

Contents of the invention

The purpose of the present invention is to overcome the defects of the prior art, and propose a magneto-rheological polishing calibration method. Based on the advantages of high measurement accuracy of the laser tracker, the contact between the magnetorheological polishing wheel and the measuring head can be realized through a non-contact calibration method. Accurate calibration of the spatial transformation relationship between them. The method does not depend on the machining accuracy and assembly accuracy of the hardware, and reduces the need for operating experience of operators.

To achieve the above object, the present invention adopts the following specific technical solutions:

The magnetorheological polishing calibration method provided by the present invention is realized by a magnetorheological polishing calibration device. The magnetorheological polishing calibration device includes processing equipment, a magnetorheological polishing wheel, a measuring head, a laser tracker and a data processor. The polishing wheel and the measuring head are respectively installed on the processing equipment, and the magnetorheological polishing calibration method includes the following steps:

S1. Establish the measurement coordinate system of the laser tracker based on the tool coordinate system of the laser tracker and the processing equipment;

S2. Measure the spatial coordinates of the probe in the measurement coordinate system based on the ball fitting function or circle fitting function of the laser tracker, and measure the magnetorheological polishing wheel in the measurement coordinate system based on the ball fitting function of the laser tracker The spatial coordinates in;

S3. The data processor acquires the spatial position conversion relationship between the measuring head and the magnetorheological polishing wheel by obtaining the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel and subtracting them.

Preferably, the stylus includes a stylus bracket connected coaxially from top to bottom, a stylus body and a stylus ball, and the stylus body is fixedly connected to the processing equipment through the stylus bracket.

Preferably, in the process of measuring the spatial coordinates of the measuring head through the ball fitting function of the laser tracker, the target ball of the laser tracker is placed on different positions on the surface of the probe ball, and the target ball is measured by the laser tracker at Coordinates at different positions, using the ball fitting function of the laser tracker to determine the center point coordinates (x ₂ , y ₂ , z ₂ ) of the probe ball and the radius R ₂ of the probe ball, then the probe ball is at The spatial coordinates in the measurement coordinate system are (x ₂ , y ₂ , z ₂ −R ₂ ).

Preferably, in the process of measuring the spatial coordinates of the measuring head through the circle fitting function of the laser tracker, firstly, an object is placed in the working area of the processing equipment, and the processing equipment is driven to move slowly along the Z-axis direction of the tool coordinate system. Move down, when the ball of the probe just touches the upper surface of the object, stop the movement of the processing equipment and keep the current posture unchanged; secondly, place the target ball at different positions on the surface of the probe body, and measure the target through the laser tracker For the coordinates of the ball at different positions, use the circle fitting function of the laser tracker to determine the coordinates (x ₂ , y ₂ ) of the center point of the circle where the probe body is located; then, mark the position of the probe ball on the upper surface of the object and Move the probe away from the upper surface of the object, place the target ball at the marked position and use the laser tracker to measure the position coordinate z ₂ of the target ball at this time, then the spatial coordinates of the probe ball in the measurement coordinate system are (x ₂ , y ₂ , z ₂ -r), r is the radius value of the target ball.

Preferably, during the process of measuring the spatial coordinates of the magnetorheological polishing wheel through the ball fitting function of the laser tracker, when the processing equipment is in a static state, the target balls are placed on different positions on the surface of the magnetorheological polishing wheel, The coordinates of the target ball at different positions are measured by the laser tracker, and the center point coordinates (x ₁ , y ₁ , z ₁ ) of the magnetorheological polishing wheel and the radius R ₁ of the polishing wheel are determined by using the ball fitting function of the laser tracker. Thus, the spatial coordinates of the magnetorheological polishing wheel in the measurement coordinate system can be obtained as (x ₁ , y ₁ , z ₁ -R ₁ ).

Preferably, the spatial position conversion relationship between the measuring head and the magnetorheological polishing wheel is expressed as (x ₂ , y ₂ , z ₂ -R ₂ )-(x ₁ , y ₁ , z ₁ -R ₁ ) or expressed as (x ₂ , y ₂ , z ₂ -r)-(x ₁ , y ₁ , z ₁ -R ₁ ).

Preferably, the target ball of the laser tracker is placed on the processing equipment, and the processing equipment carries the target ball to move along the three coordinate axes of the tool coordinate system of the processing equipment, and the laser tracker is used to measure the target ball at different positions. Coordinates, based on the straight line fitting function of the laser tracker, determine the directions of the three coordinate axes of the measurement coordinate system of the laser tracker, so that the directions of the three coordinate axes of the measurement coordinate system are consistent with the directions of the three coordinate axes of the tool coordinate system unanimous.

The present invention can achieve the following technical effects: based on the geometric shape characteristics of the magneto-rheological polishing wheel and the measuring head, the space between the magneto-rheological polishing wheel and the measuring head can be accurately calibrated in a non-contact manner by utilizing the advantages of high measurement accuracy of the laser tracker Positional relationship, this calibration method does not depend on the processing accuracy and assembly accuracy of the hardware, does not need to use standard blocks to assist calibration, and can also reduce the need for operator experience. The entire calibration process has simple steps, short calibration time, and high calibration accuracy. High, meeting the calibration accuracy requirements of the magnetorheological processing equipment for the spatial position relationship between the magnetorheological polishing wheel and the measuring head.

Description of drawings

Fig. 1 is a schematic structural diagram of a magneto-rheological polishing calibration device provided according to an embodiment of the present invention;

Fig. 2 is a schematic flowchart of a calibration method for magnetorheological polishing provided according to an embodiment of the present invention.

The reference signs include: laser tracker 1, target ball 2, magnetorheological processing module 3, processing equipment 4, magnetorheological polishing wheel 5, transition plate 6, probe 7, probe bracket 7-1, measuring probe Head body 7-2 and probe ball 7-3.

Detailed ways

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same blocks are denoted by the same reference numerals. With the same reference numerals, their names and functions are also the same. Therefore, its detailed description will not be repeated.

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

An embodiment of the present invention provides a magneto-rheological polishing calibration method, which is implemented based on a magnetorheological polishing calibration device. Before describing the calibration method, the calibration device will be described.

Fig. 1 shows the structure of a magneto-rheological polishing calibration device provided according to an embodiment of the present invention.

As shown in Figure 1, the magnetorheological polishing calibration device provided by the embodiment of the present invention includes a laser tracker 1, a target ball 2, a magnetorheological processing module 3, a processing device 4 and a data processor, and the target ball 2 is placed on the magnetic The different positions of the rheological processing module 3 cooperate with the laser tracker 1 to complete the measurement work; the magnetorheological processing module 3 is installed on the processing equipment 4, and the processing equipment 4 drives the magnetorheological processing module 3 to move, and the processing equipment 4 can be precision Numerical control machine tool or six-degree-of-freedom industrial mechanical arm, the precision numerical control machine tool is used as the processing equipment 4 below to illustrate, and the six-degree-of-freedom industrial mechanical arm can be known in the same way.

The magnetorheological processing module 3 includes a magnetorheological polishing wheel 5, a transition plate 6 and a probe 7, the magnetorheological polishing wheel 5 is installed on the precision CNC machine tool 4 through the transition plate 6, and the probe 7 is also installed on the precision CNC machine tool 4 on one side of the magnetorheological polishing wheel 5.

The probe 7 includes a probe bracket 7-1 coaxial from top to bottom, a probe body 7-2 and a probe ball 7-3, the probe ball 7-3 is located at the lower end of the probe body 7-2, The probe bracket 7-1 fixes the probe body 7-2 on the precision numerical control machine tool 4.

Through the cooperation of the laser tracker 1 and the target ball 2, the spatial coordinate measurement of the measuring head 7 and the magnetorheological polishing wheel 5 is realized, and the data processor obtains the spatial coordinates of the measuring head 7 and the spatial coordinates of the magnetorheological polishing wheel 5 and combines them. By subtracting them, the spatial position conversion relationship between the measuring head 7 and the magnetorheological polishing wheel 5 is obtained.

Fig. 2 shows the flow of a calibration method for magneto-rheological polishing provided according to an embodiment of the present invention.

As shown in Figure 2, the magnetorheological polishing calibration method provided by the embodiment of the present invention includes the following steps:

S1. Establish the measurement coordinate system {M} of the laser tracker.

The measurement coordinate system {M} of the laser tracker 1 is established based on the tool coordinate system {F} of the precision CNC machine tool 4, so that the measurement coordinate system {M} is consistent with the tool coordinate system {F}.

More specifically, the target ball 2 is placed on the upper surface of the transition plate 6 and fixed. The tool coordinate system {F} makes it in the zero position, drives the precision CNC machine tool 4 to move along the X-axis, Y-axis and Z-axis directions of the tool coordinate system {F}, and uses the laser tracker 1 to measure the target ball 2 at For the coordinates at different positions, the number of measurement points on each axis is not less than 2. Through the straight line fitting function of the laser tracker 1, the X-axis, Y-axis and Z-axis directions of the measurement coordinate system {M} are determined, so that the measurement coordinate system The X-axis, Y-axis and Z-axis directions of {M} are consistent with the X-axis, Y-axis and Z-axis directions of the tool coordinate system {F}.

S2. Using a laser tracker to measure the spatial coordinates of the measuring head and the magnetorheological polishing wheel respectively.

Based on the ball fitting function or circle fitting function of the laser tracker, the spatial coordinates of the probe in the measurement coordinate system are measured.

The ball fitting function and circle fitting function of the laser tracker are existing technologies. For the spherical fitting function, please refer to the last paragraph of "Laser Tracking and Measurement System" in Baidu Encyclopedia. For the circle fitting function, please refer to "Robot Coordinate System and Laser Tracking The first and second pages of "Quick Transformation Method of Instrument Coordinate System".

The embodiment of the present invention realizes the measurement of the spatial coordinates of the probe through two measurement methods. The first measurement method is to use the fitting ball function of the laser tracker 1 to directly measure the spatial coordinates of the probe ball 7-3; the second measurement The method is to first use the fitting circle function of the laser tracker 1 to determine the X-axis and Y-axis coordinates of the probe body 7-2, because the probe bracket 7-1, the probe body 7-2 and the probe ball 7-3 On the same center line, so the X-axis and Y-axis coordinates of the probe ball 7-3 are equal to the X-axis and Y-axis coordinates of the probe body 7-2, and then the probe is determined by a stable object with a flat upper surface The Z-axis coordinates of the ball portion 7-3 are used to measure the space coordinates of the probe ball portion 7-3.

For the first measurement method, the specific steps are as follows:

Place the target ball 2 at different positions on the outer surface of the probe ball portion 7-3, the number of positions is not less than 4, and use the laser tracker 1 to measure the coordinates of the target ball 2 at different positions, and use the laser tracker 1 The ball fitting function determines the center point coordinates (x ₂ , y ₂ , z ₂ ) of the probe ball 7-3 and R ₂ of the radius of the probe ball 7-3.

R ₂ = R ₂ `-r, R <sub>2</sub> ` is where the target ball 2 is located on the outer surface of the probe ball 7-3, with the target ball 2 as the center and the center point of the probe ball 7-3 as the radius The radius value of the ball, r is the radius value of the target ball 2, from which the spatial coordinates of the ball part 7-3 of the probe in the measurement coordinate system {M} can be obtained as (x ₂ , y ₂ , z ₂ -R ₂ ) =(x ₂ , y ₂ , z ₂ -R ₂ `+r).

This method can directly obtain the spatial position of the probe ball 7-3 in the measurement coordinate system {M}, but the position of the probe ball 7-3 is likely to move slightly when the target ball 2 is in contact with the probe ball 7-3 , the measurement accuracy has declined, so it is necessary to strictly control the force between the target ball 2 and the probe ball portion 7-3 during operation.

For the second measurement method, the specific steps are as follows:

(1) Place an object in the working area of the precision CNC machine tool 4. The size of the object in the height direction needs to be within the measurable range of the probe 7. After the object is placed, it does not move, and the upper surface of the object is visually flat and has no obvious inclination. There are no restrictions on dimensions in other directions and on the weight and material of the object.

(2) Drive the precision CNC machine tool 4 to slowly move downward along the Z-axis direction of the tool coordinate system {F}. When the ball part 7-3 of the probe just touches the upper surface of the object, stop the movement of the precision CNC machine tool 4, and Keep the current posture unchanged. Place the target ball 2 at different positions on the outer surface of the probe body 7-2, the number of positions is not less than 3, and use the laser tracker 1 to measure the coordinates of the target ball 2 at different positions, and use the circle of the laser tracker 1 to simulate The combined function determines the coordinates (x ₂ , y ₂ ) of the center point of the circle where the probe body 7-2 is located.

(3) Mark the position of the probe ball 7-3 on the upper surface of the object and remove the probe 7 from the upper surface of the object, place the target ball 2 at the marked position and use the laser tracker 1 to measure the position of the target ball 2 at this time Position coordinate z ₂ .

Since the probe ball 7-3, the probe body 7-2 and the probe bracket 7-1 are on the same center line, the spatial coordinates of the probe ball 7-3 in the measurement coordinate system {M} are (x ₂ , y ₂ , z ₂ -r).

This method requires the help of an object to assist in determining the spatial coordinates of the probe ball 7-3, but it can avoid the direct contact between the target ball 2 and the probe ball 7-3, resulting in a slight shift in the position of the probe ball 7-3, which is beneficial Reduce measurement errors.

Based on the ball fitting function of the laser tracker, the spatial coordinates of the magnetorheological polishing wheel in the measurement coordinate system are measured, and the specific steps are as follows:

When the precision CNC machine tool 4 is kept in a static state after the probe head 7-3 touches the upper surface of the object, the spatial coordinates of the magnetorheological polishing wheel 5 are measured.

When the precision numerical control machine tool 4 is in a static state, the target ball 2 is placed on different positions on the outer surface of the magnetorheological polishing wheel 5, the number of positions is not less than 4, and the laser tracker 1 is used to measure the target ball 2 at different positions The coordinates of the center point (x ₁ , y ₁ , z ₁ ) of the magnetorheological polishing wheel 5 and R _{1 of the radius of the magnetorheological polishing wheel 5 are determined by using the spherical fitting function of the laser tracker 1} .

R ₁ = R ₁ `-r, R <sub>1</sub> ` is the ball where the target ball 2 is located on the outer surface of the magneto-rheological polishing wheel 5 with the center of the target ball 2 and the center point of the probe ball 7-3 as the radius The radius value of the magnetorheological polishing wheel 5 can be obtained in the measurement coordinate system {M} as (x ₁ , y ₁ , z ₁ -R ₁ )= (x ₁ , y ₁ , z ₁ -R ₁ `+r).

S3. The data processor acquires the spatial position conversion relationship between the measuring head and the magnetorheological polishing wheel by obtaining the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel and subtracting them.

Since the probe 7 and the magneto-rheological polishing wheel 5 are in a translational state when the probe positioning method is used for positioning the optical components, the spatial position conversion relationship between the probe 7 and the magneto-rheological polishing wheel 5 can be expressed as T= (∆x, ∆y, ∆z)=(x ₂ , y ₂ , z ₂ -R ₂ )- (x ₁ , y ₁ , z ₁ -R ₁ )= (x ₂ -x ₁ , y ₂ -y ₁ , z ₂ -z ₁ +R ₁ `-R <sub>2</sub> `) or T=(∆x,∆y,∆z)=(x ₂ ,y ₂ ,z ₂ -r)-(x ₁ ,y ₁ , z ₁ −R ₁ )= (x ₂ −x ₁ , y ₂ −y ₁ , z ₂ −z ₁ +R ₁ `−2r).

In practical application, it is only necessary to use the probe 7 to confirm the coordinates (x _F , y _F , z _F ) of the optical element in the tool coordinate system {F}, and the coordinates of the working point of the optical element relative to the magnetorheological polishing wheel 5 can be determined As (x _F , y _F , z _F ) = (x _F , y _F , z _F )-T=(x _F -∆x, y _F -∆y, z _F -∆z).

Based on the geometric shape characteristics of the magnetorheological polishing wheel and the measuring head, the present invention utilizes the advantages of high measurement accuracy of the laser tracker, and accurately calibrates the spatial position relationship between the working point of the magnetorheological polishing wheel and the measuring head through a non-contact method , this method does not depend on the processing accuracy and assembly accuracy of the hardware, does not need to use standard blocks to assist calibration, and also reduces the need for operator experience. The entire calibration process has simple steps, short calibration time, and high calibration accuracy. The calibration accuracy requirements of the magnetorheological processing equipment for the spatial position relationship between the working point of the polishing wheel and the measuring head.

The invention is not only suitable for high-precision calibration of the spatial position relationship between the magnetorheological polishing wheel and the measuring head, but also suitable for high-precision calibration of the spatial positional relationship between the measuring head and small grinding heads, air bags and other processing tools with obvious geometric dimensions calibration.

In the description of this specification, descriptions with reference to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or feature is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, those skilled in the art can make the above-mentioned The embodiments are subject to changes, modifications, substitutions and variations.

The above specific implementation manners of the present invention do not constitute a limitation to the protection scope of the present invention. Any other corresponding changes and modifications made according to the technical concept of the present invention shall be included in the protection scope of the claims of the present invention.

Claims (7)

1. A magneto-rheological polishing calibration method is realized by using a magneto-rheological polishing calibration device, and the magneto-rheological polishing calibration device comprises processing equipment, a magnetorheological polishing wheel, a measuring head, a laser tracker and a data processor, and the The magnetorheological polishing wheel and the measuring head are respectively installed on the processing equipment, and it is characterized in that the magnetorheological polishing calibration method includes the following steps: S1. Establish a measurement coordinate system of the laser tracker based on the tool coordinate system of the laser tracker and the processing equipment; S2. Measure the spatial coordinates of the probe in the measurement coordinate system based on the ball fitting function or the circle fitting function of the laser tracker, and measure the space coordinates of the probe based on the ball fitting function of the laser tracker. The spatial coordinates of the magnetorheological polishing wheel in the measurement coordinate system; S3. The data processor obtains the spatial position conversion between the measuring head and the magnetorheological polishing wheel by acquiring the spatial coordinates of the measuring head and the spatial coordinates of the magnetorheological polishing wheel and subtracting them relation. 2. The magneto-rheological polishing calibration method as claimed in claim 1, wherein the measuring head comprises a measuring head support, a measuring head body and a measuring head ball which are coaxially connected from top to bottom, and the measuring head is passed through the measuring head The head support fixedly connects the measuring head body with the processing equipment. 3. magneto-rheological polishing calibration method as claimed in claim 2, is characterized in that, in the process of measuring the spatial coordinates of the measuring head by the ball fitting function of the laser tracker, the laser tracking The target ball of the instrument is placed at different positions on the surface of the probe ball, the coordinates of the target ball at different positions are measured by the laser tracker, and the measurement is determined by the ball fitting function of the laser tracker. The center point coordinates (x ₂ , y ₂ , z ₂ ) of the probe ball and the radius R ₂ of the probe ball, then the space coordinates of the probe ball in the measurement coordinate system are (x ₂ , y ₂ , z ₂ −R ₂ ). 4. magneto-rheological polishing calibration method as claimed in claim 2, is characterized in that, in the process of measuring the spatial coordinates of the measuring head by the circle fitting function of the laser tracker, First, an object is placed in the working area of the processing equipment, and the processing equipment is driven to slowly move downward along the Z-axis direction of the tool coordinate system. When the surface is on the surface, stop the movement of the processing equipment and keep the current posture unchanged; Secondly, the target ball is placed at different positions on the surface of the probe body, the coordinates of the target ball at different positions are measured by the laser tracker, and the circle fitting function of the laser tracker is used to determine the position of the target ball. The coordinates of the center point of the circle where the probe body is located (x ₂ , y ₂ ); Then, mark the position of the probe ball on the upper surface of the object and move the probe away from the upper surface of the object, place the target ball at the marked position and measure with the laser tracker At this time, the position coordinate z ₂ of the target ball, then the space coordinate of the probe ball in the measurement coordinate system is (x ₂ , y ₂ , z ₂ -r), r is the target ball’s Radius value. 5. the magnetorheological polishing calibration method as claimed in claim 3 or 4, is characterized in that, in the process of measuring the spatial coordinates of the magnetorheological polishing wheel by the ball fitting function of the laser tracker, When the processing equipment is in a static state, the target ball is placed at different positions on the surface of the magneto-rheological polishing wheel, and the coordinates of the target ball at different positions are measured by the laser tracker, and the The ball fitting function of the laser tracker determines the center point coordinates (x ₁ , y ₁ , z ₁ ) of the magnetorheological polishing wheel and the radius R ₁ of the polishing wheel, so that the The spatial coordinates in the measurement coordinate system are (x ₁ , y ₁ , z ₁ -R ₁ ). 6. magneto-rheological polishing calibration method as claimed in claim 5, is characterized in that, the spatial position transformation relation between described measuring head and described magnetorheological polishing wheel is expressed as (x ₂ , y ₂ , z ₂ -R ₂ )-(x ₁ , y ₁ , z ₁ -R ₁ ) or expressed as (x ₂ , y ₂ , z ₂ -r)-(x ₁ , y ₁ , z ₁ -R ₁ ). 7. The magnetorheological polishing calibration method according to claim 1, wherein the target ball of the laser tracker is placed on the processing equipment, and the processing equipment carries the target ball along the The three coordinate axes of the tool coordinate system of the processing equipment are moved, and the coordinates of the target ball at different positions are measured by the laser tracker, and the laser tracker is determined based on the straight line fitting function of the laser tracker. The directions of the three coordinate axes of the measurement coordinate system, so that the directions of the three coordinate axes of the measurement coordinate system are consistent with the directions of the three coordinate axes of the tool coordinate system.

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