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CN115268232A - An Efficient Data Processing Method for DMD Oblique Scanning - Google Patents

An Efficient Data Processing Method for DMD Oblique Scanning Download PDF

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CN115268232A
CN115268232A CN202210952306.1A CN202210952306A CN115268232A CN 115268232 A CN115268232 A CN 115268232A CN 202210952306 A CN202210952306 A CN 202210952306A CN 115268232 A CN115268232 A CN 115268232A
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CN115268232B (en
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蔡文涛
龙洪秋
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Shenzhen Xinhao Automation Technology Co ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70508Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus

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Abstract

本发明涉及激光直写曝光技术领域,具体为一种DMD倾斜扫描的高效数据处理方法。本发明采用主机服务器、SPIE数据处理模块、高速传输模块和数据处理模块等组合完成对图像数据的高效处理,利用主机服务器矢量图同步计算优势完成图像的仿真变换、倾斜和多个DMD需要的条带切割,将多个条带矢量图发送到SPIE数据处理模块进行栅格化同步处理,栅格化后的数据进行轮廓压缩,由高速传输模块传到数据处理模块中,数据处理模块在接收数据时进行分时同步操作,实现数据补零、轮廓填充、抽点合并、突发存储补零、混插等,最后再做帧化处理,将数据在DMD上显示,实现高速倾斜扫描功能。本发明可以更快地处理图形数据,使得高解析与高产能匹配。

Figure 202210952306

The invention relates to the technical field of laser direct writing exposure, in particular to an efficient data processing method for DMD oblique scanning. The invention adopts the combination of host server, SPIE data processing module, high-speed transmission module and data processing module to complete the efficient processing of image data, and utilizes the advantages of the host server's vector diagram synchronous calculation to complete the image simulation transformation, inclination and the striping required by multiple DMDs. With cutting, multiple strip vector images are sent to SPIE data processing module for rasterization synchronization processing, the rasterized data is subjected to contour compression, and transmitted from the high-speed transmission module to the data processing module, and the data processing module receives the data. Time-sharing synchronization operation is carried out from time to time to realize data zero-filling, contour filling, snapshot merging, burst storage zero-filling, mixing and inserting, etc., and finally do frame processing, display the data on the DMD, and realize the high-speed oblique scanning function. The present invention can process graphic data faster, so that high resolution matches high productivity.

Figure 202210952306

Description

一种DMD倾斜扫描的高效数据处理方法An Efficient Data Processing Method for DMD Oblique Scanning

技术领域technical field

本发明涉及激光直写曝光技术领域,具体为一种DMD倾斜扫描的高效数据处理方法。The invention relates to the technical field of laser direct writing exposure, in particular to a high-efficiency data processing method for DMD oblique scanning.

背景技术Background technique

印刷电路板是目前电子产品之母,其制造工艺中最重要的制程之一是线路曝光,线路曝光决定了电路板的良率、线宽精度等。随着消费级电子产品越来越轻巧化,电路板线宽线距越来越细。尤其是在柔性电路板领域,传统曝光工艺中的菲林涨缩已严重制约了柔性线路板的品质,导致激光直接成像工艺快速获得认可。Printed circuit board is the mother of current electronic products. One of the most important processes in its manufacturing process is line exposure, which determines the yield rate and line width accuracy of the circuit board. As consumer electronics products become lighter and lighter, the line width and spacing of circuit boards become thinner and thinner. Especially in the field of flexible circuit boards, the film expansion and contraction in the traditional exposure process has seriously restricted the quality of flexible circuit boards, resulting in the rapid approval of the laser direct imaging process.

当前激光直接成像设备主要使用TI公司的DLP方案,类似于传统投影仪,将需要的线路直接成像在目标面上,可实现与基板同步涨缩。为追求制程更高的解析,通常将DMD倾斜,使得单颗像素在扫描垂直方向呈部分重叠状态。倾斜扫描变相地减小网格精度(提升解析精度),然而会带来更大的数据量,影响激光直接成像曝光的效率,不利于该技术在电路板领域产业化。The current laser direct imaging equipment mainly uses TI's DLP solution, which is similar to a traditional projector, directly imaging the required lines on the target surface, and can realize simultaneous expansion and contraction with the substrate. In order to pursue a higher resolution of the process, the DMD is usually tilted so that a single pixel is partially overlapped in the scanning vertical direction. Oblique scanning reduces grid precision in a disguised form (improves analytical precision), but it will bring a larger amount of data, which affects the efficiency of laser direct imaging exposure, and is not conducive to the industrialization of this technology in the field of circuit boards.

发明内容Contents of the invention

本发明提出了一种DMD倾斜扫描的高效处理方法,利用主机多核芯片、SPIE扩展等优势,将数据尽量成同步处理模式,让底层驱动DMD的FPGA处理数据变得简单可靠,实现DMD高速扫描曝光的功能。The present invention proposes an efficient processing method for DMD oblique scanning, utilizes the advantages of the host multi-core chip and SPIE extension, and makes the data into a synchronous processing mode as much as possible, so that the underlying FPGA driving the DMD can process data simply and reliably, and realize DMD high-speed scanning exposure function.

为实现上述目的,本发明提供如下技术方案:一种DMD倾斜扫描的高效数据处理方法,包括主机服务器、SPIE数据处理模块、高速传输模块和数据处理模块,其特征在于:For achieving the above object, the present invention provides following technical scheme: a kind of efficient data processing method of DMD oblique scanning, comprises host server, SPIE data processing module, high-speed transmission module and data processing module, is characterized in that:

所述主机服务器将矢量图读至内存中,借用主机对浮点数操作的优势,对矢量图进行仿射变换、倾斜和条带分割的操作,所述仿射变换可以实现涨缩、旋转等操作,所述条带分割在于满足多个DMD同步扫描的需求;The host server reads the vector graphics into the memory, borrows the advantages of the host for floating-point operations, and performs affine transformation, tilting, and strip segmentation operations on the vector graphics. The affine transformation can realize operations such as expansion and contraction, rotation, etc. , the strip division is to meet the requirements of synchronous scanning of multiple DMDs;

所述SPIE数据处理模块插在主机服务器的SPIE插槽中,每个SPIE数据处理模块可携带多个DMD终端,由高速传输模块连接,SPIE数据处理模块将分割的条带进行子区域分割、栅格化处理、轮廓压缩、数据发送等操作,这些操作可以做到分时同步;Described SPIE data processing module is inserted in the SPIE slot of mainframe server, and each SPIE data processing module can carry a plurality of DMD terminals, is connected by high-speed transmission module, and SPIE data processing module carries out sub-area segmentation, grid Operations such as formatting, contour compression, and data transmission can be synchronized in time;

所述栅格化处理分扫描方向和步进方向解析,扫描方向的解析dpi由扫描轴运动反馈的最小分辨率倍数决定;步进方向的解析dpi由镜头倍率决定,同时又由细分因子n决定;The rasterization processing is divided into scanning direction and step direction analysis, and the analysis dpi of the scanning direction is determined by the minimum resolution multiple of the scanning axis motion feedback; the analysis dpi of the step direction is determined by the lens magnification, and at the same time by the subdivision factor n Decide;

所述数据处理模块收到轮廓压缩的数据后进行同步填充和双边补零,所述填充处理为每行数据都从0填充开始,轮廓压缩定义了翻转的位置信息,根据翻转位置信息可变换填0或1,紧接着进行抽点、混插、突发存储补零等操作,使得从数据栅格化到最后数据存入DDR中形成数据链的分时同步,满足现有倾斜扫描的数据量需求;The data processing module performs synchronous filling and double-sided zero padding after receiving the data compressed by the outline. The filling process is that each line of data starts from 0 filling, and the outline compression defines the flipped position information, which can be transformed according to the flipped position information. 0 or 1, followed by operations such as sampling, mixed insertion, burst storage and zero padding, so that the time-sharing synchronization of the data chain is formed from data rasterization to the final data storage in DDR, which meets the data volume of existing oblique scanning need;

所述抽点合并、混插操作是指在细分因子n的决定下步进方向DMD单点被细分了n份,需要为每一个DMD单点进行抽点取值,将这些值组合在一起,方便后期帧化处理;Said sampling merging and mixing operation means that under the decision of the subdivision factor n, the DMD single point in the step direction is subdivided into n parts, and it is necessary to extract a value for each DMD single point, and combine these values in Together, it is convenient for post-framing processing;

所述突发存储补零是指每行数据的长度与DDR单次存储长度匹配,达到高速存储/读取的目的;The zero padding in the burst storage means that the length of each row of data matches the single storage length of DDR, so as to achieve the purpose of high-speed storage/reading;

所述帧化处理是指利用FPGA根据DMD需要的行数N对DDR进行连续性地址数据读取,该行数N必须是细分因子n的倍数,每行数据对应不同的DMD行号,需要不同的截取数据起始地址,该偏移量每隔n行变动1个位,所有行数据都截取出来形成一帧图形,传给DMD驱动芯片,帧化指令根据扫描轴的位置反馈决定,即每隔一个扫描方向栅格化精度的倍数距离开启一次帧化,完成整个高速扫描过程。Described framing processing refers to utilizing FPGA to carry out continuous address data reading to DDR according to the row number N that DMD needs, and this row number N must be the multiple of subdivision factor n, and each row of data corresponds to different DMD row numbers, needs For different starting addresses of intercepted data, the offset changes by 1 bit every n rows, and all rows of data are intercepted to form a frame of graphics, which is sent to the DMD driver chip, and the framing instruction is determined according to the position feedback of the scanning axis, that is Start framing every other multiple of the rasterization accuracy in the scanning direction to complete the entire high-speed scanning process.

所述高速传输模块可使用USB3.0、千兆电网或万兆光纤网口,取决于系统实际数据量和成本。The high-speed transmission module can use USB3.0, Gigabit power grid or 10 Gigabit optical fiber network port, depending on the actual data volume and cost of the system.

与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:

本发明提供了一种DMD倾斜扫描的高效数据处理方法采用主机服务器、SPIE数据处理模块、高速传输模块和数据处理模块等组合完成对图像数据的高效处理,利用主机服务器矢量图同步计算优势完成图像的仿真变换、倾斜和多个DMD需要的条带切割,将多个条带矢量图发送到SPIE数据处理模块进行栅格化同步处理。栅格化后的数据进行轮廓压缩,由高速传输模块传到数据处理模块中。数据处理模块在接收数据时进行分时同步操作,实现数据补零、轮廓填充、抽点合并、突发存储补零、混插等,最后再做帧化处理,将数据在DMD上显示,实现高速倾斜扫描功能。The invention provides a high-efficiency data processing method for DMD oblique scanning, which uses a combination of a host server, a SPIE data processing module, a high-speed transmission module, and a data processing module to complete the efficient processing of image data, and utilizes the advantages of the host server vector diagram synchronous calculation to complete the image The simulation transformation, tilt and strip cutting required by multiple DMDs, and the multiple strip vector graphics are sent to the SPIE data processing module for rasterization and synchronous processing. The rasterized data is subjected to contour compression, and is transmitted to the data processing module by the high-speed transmission module. The data processing module performs time-sharing synchronous operation when receiving data, realizes data zero padding, contour filling, snapshot merging, burst storage zero padding, mixed interpolation, etc., and finally performs frame processing to display the data on the DMD to realize High-speed tilt scan function.

附图说明Description of drawings

图1为本发明的数据倾斜处理的整体流程图;Fig. 1 is the overall flowchart of the data skew processing of the present invention;

图2为本发明的倾斜扫描示意图;Fig. 2 is the schematic diagram of oblique scanning of the present invention;

图3为本发明的DMD倾斜与图像倾斜的关系图;Fig. 3 is the relation figure of DMD inclination and image inclination of the present invention;

图4为本发明的图形栅格化到存储的分时同步操作示意图;Fig. 4 is a schematic diagram of the time-sharing synchronization operation from graphic rasterization to storage in the present invention;

图5为本发明的并行重组排布示意图;Fig. 5 is a schematic diagram of parallel recombination arrangement of the present invention;

图6为本发明的帧化处理示意图;FIG. 6 is a schematic diagram of framing processing in the present invention;

具体实施方式Detailed ways

下文结合附图和具体实施例对本发明的技术方案做进一步说明。The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

本发明提出的一种DMD倾斜扫描的高效数据处理方法,为达到曝光的高精度,可将曝光图形分解为扫描方向和步进方向分辨率。扫描方向的分辨率由扫描轴运动反馈的最小分辨率倍数决定;步进方向的分辨率由DMD单点大小和镜头倍率决定,而倾斜扫描可将DMD单点细分,进一步提升步进方向的分辨率。所述倾斜扫描的倾斜角度A与细分因子n有关,即A=arctan(1/n)。A high-efficiency data processing method of DMD oblique scanning proposed by the present invention can decompose the exposure pattern into scanning direction and stepping direction resolution in order to achieve high precision of exposure. The resolution in the scanning direction is determined by the minimum resolution multiple of the motion feedback of the scanning axis; the resolution in the stepping direction is determined by the size of the DMD single point and the lens magnification, and the oblique scanning can subdivide the DMD single point to further improve the resolution in the stepping direction. resolution. The tilt angle A of the tilt scan is related to the subdivision factor n, that is, A=arctan(1/n).

本发明利用主机服务器矢量图同步计算优势完成图像的仿真变换、倾斜和多个DMD需要的条带切割,将多个条带矢量图发送到SPIE数据处理模块进行栅格化同步处理。栅格化后的数据进行轮廓压缩,由高速传输模块传到数据处理模块中。数据处理模块在接收数据时进行分时同步操作,实现数据补零、轮廓填充、抽点合并、突发存储补零、混插等,最后再做帧化处理,将数据在DMD上显示,实现高速倾斜扫描功能。The invention utilizes the advantage of synchronous calculation of the vector diagram of the host server to complete the simulation transformation and tilt of the image and the strip cutting required by multiple DMDs, and sends the multiple strip vector diagrams to the SPIE data processing module for rasterization synchronous processing. The rasterized data is subjected to contour compression, and is transmitted to the data processing module by the high-speed transmission module. The data processing module performs time-sharing synchronous operation when receiving data, realizes data zero padding, contour filling, snapshot merging, burst storage zero padding, mixed interpolation, etc., and finally performs frame processing to display the data on the DMD to realize High-speed tilt scan function.

示例中以n=4绘制。DMD倾斜后在步进方向会形成两边各一个三角区域,因为多个DMD曝光拼接的需要,所述三角区域需要不出光,即DMD在三角区域属于off状态(位图在该区域为0值)。为达到高效处理目的,此处补零操作全部下放到数据处理模块中执行。栅格化后的位图在细分因子影响下呈现4列一组的排布模式,按照DMD单点位置需要在位图中抽点取值。DMD单点可以理解成图中步进方向4各像素点的组合,因为倾斜作用在扫描方向可以等同所有点排列在一排。有效区域是2排点,三角区域是1排点,为达到曝光均匀性等要求,理应将三角区域不曝光,即4列补零操作。Plotted with n=4 in the example. After the DMD is tilted, a triangular area will be formed on each side of the stepping direction. Because of the need for multiple DMD exposure splicing, the triangular area needs to be out of light, that is, the DMD is in the off state in the triangular area (the bitmap is 0 in this area) . In order to achieve high-efficiency processing, all zero padding operations here are delegated to the data processing module for execution. Under the influence of the subdivision factor, the rasterized bitmap presents a 4-column arrangement mode. According to the DMD single point position, it is necessary to extract points in the bitmap to obtain values. DMD single point can be understood as the combination of 4 pixels in the stepping direction in the figure, because the tilt effect can be equivalent to all points arranged in a row in the scanning direction. The effective area is 2 rows of dots, and the triangular area is 1 row of dots. In order to meet the requirements of exposure uniformity, the triangular area should not be exposed, that is, 4 columns of zero padding operation.

DMD有效行列为H×L,按照细分因子n倾斜后细分行列为TH×TL,TH=(H-1)×n+L,TL=(L-1)×n+H。三角区域无效的列数InL=H-n,根据总列数和无效列数即可确认单个DMD总需求列数,进而确认条带分割的宽度。The effective rank of DMD is H×L, and the subdivided rank is TH×TL after tilting according to the subdivision factor n, TH=(H-1)×n+L, TL=(L-1)×n+H. The number of invalid columns in the triangular area InL=H-n, the total required number of columns for a single DMD can be confirmed according to the total number of columns and the number of invalid columns, and then the width of the strip division can be confirmed.

倾斜在扫描方向产生,对于扫描曝光而言倾斜前后的位图可以等同,因此图形倾斜操作放置在数据量更少的矢量图中执行。根据对位获取的变换矩阵,在主机服务器中对矢量图进行仿射变换,然后根据各DMD有效列数宽度对矢量图进行条带分割,做好扫描方向倾斜角度A的操作。分割和倾斜好的条带矢量图发送至对应的SPIE数据处理模块中,专门进行栅格化处理。Tilting is generated in the scanning direction. For scanning exposure, the bitmaps before and after tilting can be equal, so the graphic tilting operation is placed in the vector map with less data. According to the transformation matrix acquired by alignment, affine transformation is performed on the vector diagram in the host server, and then the vector diagram is divided into strips according to the effective column width of each DMD, and the operation of the tilt angle A of the scanning direction is done well. Segmented and skewed strip vector graphics are sent to the corresponding SPIE data processing module for rasterization processing.

图形栅格化到存储入DDR的分时同步模型,即条带区域切割→栅格化→轮廓压缩→高速传输→解析分包→补零填充→抽点合并→混插→突发存储补零→存入DDR。每一步在第一次执行后都处于同步操作状态,即前一个区域位图在高速传输,后一个条带区域切割已经在执行。分时同步各步骤在时间规划上设计吻合,可实现所有栅格化结束到最后一个区域位图存入DDR时间控制在0.01s内,实现倾斜扫描高效处理的前端,如图5所示。The time-sharing synchronous model of graphics rasterization and storage into DDR, that is, strip area cutting→rasterization→contour compression→high-speed transmission→parsing and subpackaging→zero padding→snapshot merging→mixing and interpolation→burst storage zero padding → Store in DDR. Each step is in a synchronous operation state after the first execution, that is, the previous area bitmap is being transmitted at high speed, and the latter strip area cutting is already being executed. The design of each step of time-sharing synchronization is consistent in time planning, which can control the time from the end of all rasterization to the last area bitmap stored in DDR within 0.01s, and realize the front end of efficient processing of oblique scanning, as shown in Figure 5.

最后根据扫描轴的位置反馈脉冲,数据处理模块会进行帧化处理,即形成当下所需的一帧图形,传给DMD驱动芯片,如图6所示。读取数据的具体方式如下:Finally, according to the position feedback pulse of the scanning axis, the data processing module will perform frame processing, that is, form a frame of graphics required at the moment, and transmit it to the DMD driver chip, as shown in Figure 6. The specific way to read data is as follows:

1)第1帧的第1行初始地址为D0,截取长度为L1) The initial address of the first line of the first frame is D 0 , and the interception length is L

2)第1帧的第i行初始地址为D0+floor(i/4)-12) The initial address of row i of frame 1 is D 0 +floor(i/4)-1

……...

3)第j帧的第1行初始地址为D0+(j-1)n·Na,Na为每行图形存入DDR时补零后的长度,截取长度为L3) The initial address of the first row of the jth frame is D 0 +(j-1)n·N a , where N a is the length of each row of graphics after zero padding when it is stored in the DDR, and the interception length is L

4)第j帧的第i行初始地址为D0+(j-1)n·Na+floor(i/4)-1。4) The initial address of row i of frame j is D 0 +(j-1)n·N a +floor(i/4)-1.

Claims (2)

1. A high-efficiency data processing method for DMD oblique scanning comprises a host server, an SPIE data processing module, a high-speed transmission module and a data processing module, and is characterized in that:
the host server reads the vector diagram into the memory, and performs affine transformation, inclination and stripe division on the vector diagram by using the advantages of the host on floating point operation, wherein the affine transformation can realize operations such as expansion and contraction, rotation and the like, and the stripe division meets the requirement of synchronous scanning of a plurality of DMDs;
the SPIE data processing module is inserted into an SPIE slot of a host server, each SPIE data processing module can carry a plurality of DMD terminals and is connected by a high-speed transmission module, the SPIE data processing module carries out operations such as sub-area division, rasterization, outline compression, data transmission and the like on the divided strips, and the operations can be time-sharing synchronization;
the rasterization processing is divided into a scanning direction and a stepping direction for analysis, and the analysis dpi in the scanning direction is determined by the minimum resolution multiple of the motion feedback of the scanning axis; the analytic dpi of the stepping direction is determined by the lens multiplying power and a subdivision factor n;
the data processing module carries out synchronous filling and bilateral zero padding after receiving data of outline compression, wherein the filling processing is started from 0 filling of each line of data, the outline compression defines overturning position information, the data can be filled in 0 or 1 in a convertible way according to the overturning position information, and operations such as point drawing, mixed insertion, burst storage zero padding and the like are carried out next, so that time-sharing synchronization of a data chain is formed from data rasterization to final data storage in a DDR, and the data volume requirement of the existing oblique scanning is met;
the snapshot merging and mixed insertion operation means that the DMD single points in the stepping direction are subdivided by n parts under the determination of a subdivision factor n, snapshot values need to be taken for each DMD single point, and the values are combined together to facilitate the subsequent framing processing;
the burst storage zero padding means that the length of each row of data is matched with the single DDR storage length, so that the aim of high-speed storage/reading is fulfilled;
the framing processing means that the FPGA is used for continuously reading the address data of the DDR according to the number N of lines required by the DMD, the number N of the lines must be multiple of a subdivision factor N, each line of data corresponds to different DMD line numbers, different initial addresses of intercepted data are required, the offset varies by 1 bit every N lines, all the lines of data are intercepted to form a frame of graph and transmitted to a DMD driving chip, a framing instruction is determined according to position feedback of a scanning axis, namely framing is started once every multiple distance of rasterization precision of one scanning direction, and the whole high-speed scanning process is completed.
2. The method for processing data of DMD in slant scan according to claim 1, wherein the step of: the high-speed transmission module can use USB3.0, gigabit power grid or ten-gigabit optical fiber network port, depending on the actual data volume and cost of the system.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109656101A (en) * 2018-12-07 2019-04-19 东莞市多普技术研发有限公司 A kind of data processing method of digital micro-mirror dip sweeping
CN114200784A (en) * 2021-12-24 2022-03-18 锡凡半导体无锡有限公司 Maskless laser direct-writing photoetching scanning method capable of improving resolution

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109656101A (en) * 2018-12-07 2019-04-19 东莞市多普技术研发有限公司 A kind of data processing method of digital micro-mirror dip sweeping
CN114200784A (en) * 2021-12-24 2022-03-18 锡凡半导体无锡有限公司 Maskless laser direct-writing photoetching scanning method capable of improving resolution

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