CN115261808B

CN115261808B - Multi-dimensional rotary workpiece frame and vacuum coating machine with same

Info

Publication number: CN115261808B
Application number: CN202210970803.4A
Authority: CN
Inventors: 吕明; 吴子敬; 刘旭; 苏艳波
Original assignee: Beijng Naura Vacuum Technology Co Ltd
Current assignee: Beijng Naura Vacuum Technology Co Ltd
Priority date: 2022-08-13
Filing date: 2022-08-13
Publication date: 2023-05-12
Anticipated expiration: 2042-08-13
Also published as: CN115261808A

Abstract

The application relates to the field of vacuum coating, in particular to a multi-dimensional rotary workpiece frame and a vacuum coating machine with the multi-dimensional rotary workpiece frame, and the technical scheme is characterized in that: the multi-dimensional rotating workpiece frame comprises a wheel train, a planetary gear, a supporting rod coaxially fixedly connected to the planetary gear, a workpiece fixing disc used for fixing a plated workpiece, and a first driving mechanism used for converting rotary power for driving the supporting rod to rotate into rotary power for driving the workpiece fixing disc to rotate around a horizontal shaft; the purpose of improving the uniformity of the film thickness of the surface of the plated workpiece is achieved.

Description

Multi-dimensional rotary workpiece frame and vacuum coating machine with same

Technical Field

The application relates to the field of vacuum coating, in particular to a multi-dimensional rotary workpiece frame and a vacuum coating machine with the same.

Background

Vacuum coating is a process in which a thin and stable coating layer is applied to the surface of a workpiece in a vacuum environment to improve various properties of the workpiece surface.

A vacuum coater described in the related art includes a vacuum chamber, a plurality of planetary gears, and a train wheel for driving the planetary gears to spin around their own axes and/or revolve around a certain axis; the gear train comprises a sun gear, the axis of which is vertically arranged in the vacuum chamber, a plurality of planetary gears are simultaneously meshed with the sun gear, and a gear ring coaxial with the sun gear is commonly meshed with the plurality of planetary gears; a supporting rod is coaxially and fixedly connected to the planetary gear and is used for installing a plated workpiece; thus, the operation modes of only rotating, only revolving or both revolving and rotating the planetary gears are realized, and the plating of the plated workpiece in various modes is facilitated.

Referring to fig. 1 and 2, in addition, the vacuum coating machine further includes a plurality of sputtering cathodes 20 spaced around the axis of the sun gear, for example, each sputtering cathode 20 includes a plurality of arc sources 201 spaced along the vertical direction, in order to prevent the situation that the workpiece to be coated is partially not coated with a film due to partial non-coverage of the arc sources 201, the sputtering ranges of two adjacent arc sources 201 are required to be partially overlapped, and assuming that the overlapping area of the sputtering ranges is an area a, it is easy to understand that the sputtering rate at the area a will be greater than the sputtering rate at the rest of the non-overlapping areas.

Defining a horizontal position line a on the plated workpiece, wherein the position line a can pass through the area A; taking a plated workpiece as a plate workpiece as an example, before plating, fixing the plated workpiece on a support rod, and driving the plated workpiece to revolve by the support rod until one side of the plated workpiece is completely plated; however, in the revolution process, the position line a only moves in a plane on a horizontal plane, and the range of the area A is not changed, so that only the position line a on the plated workpiece can pass through the area A; along with the film coating of a period of time, the film coating thickness in the position line a and the range nearby is larger, and the film coating thickness in the rest range of the workpiece to be coated is smaller, namely the film thickness difference of different points of the workpiece is larger, and the film thickness uniformity is an important index for measuring the quality of a film coating layer and the performance of a vacuum film coating machine, so that how to further improve the film thickness uniformity of the surface of the workpiece to be coated becomes a technical problem to be solved.

Disclosure of Invention

In order to improve the film thickness uniformity of the surface of a workpiece to be plated, the application provides a multi-dimensional rotary workpiece frame and a vacuum coating machine with the multi-dimensional rotary workpiece frame.

The application provides a multidimensional rotating work-piece frame adopts following technical scheme:

the multi-dimensional rotating workpiece frame comprises a gear train, a planetary gear, a supporting rod coaxially fixedly connected to the planetary gear, a workpiece fixing disc used for fixing a plated workpiece, a first driving mechanism used for driving the supporting rod to rotate, and a second driving mechanism used for converting the rotation power of the supporting rod into rotation power for driving the workpiece fixing disc to rotate around a horizontal axis.

By adopting the technical scheme, the workpiece to be plated is fixed on the workpiece fixing disc, the workpiece to be plated faces a certain sputtering cathode, when the planetary gear only rotates and does not revolve, the supporting rod rotates around the axis fixed shaft, in the process, the first driving mechanism transmits the rotary power of the supporting rod to the workpiece fixing disc, the workpiece to be plated rotates around the horizontal axis fixed shaft, the position line a on the workpiece to be plated is continuously replaced, so that more parts on the workpiece to be plated can pass through the A area, the parts of the workpiece to be plated after passing through the A area are rotated to the areas with lower sputtering rates, and thus, the film thickness difference on the surface of the workpiece to be plated is reduced, and the film thickness uniformity of the workpiece to be plated is improved.

Optionally, the planetary gear is rotatably connected to the revolution disc; the first driving mechanism comprises a positioning block fixed relative to the position of the revolution disc, a driven bevel gear rotationally connected with the positioning block, and a driving bevel gear coaxially and fixedly connected with the supporting rod, wherein the driven bevel gear is meshed with the driving bevel gear, the axis of the driven bevel gear coincides with the horizontal axis, and the workpiece fixing disc is fixed on the driven bevel gear.

By adopting the technical scheme, the support rod drives the driving bevel gear to rotate around the axis fixed shaft of the driving bevel gear, the driven bevel gear converts the rotation power into rotation power around the horizontal shaft, and the workpiece fixing disc is driven to rotate around the axis fixed shaft of the driving bevel gear.

Optionally, a plurality of installation bars are fixed on the revolution plate, one side of the positioning block is bolted with a clamping block, and the installation bars are clamped between the positioning block and the clamping block.

Through adopting above-mentioned technical scheme for the work piece fixed disk can adjust or dismantle according to actual need in the height on the bracing piece.

Optionally, the support rod is detachably connected with a fixed ring, and the support rod is sleeved with a rotation disc lapped on the fixed ring, and the rotation disc is used for installing a plurality of plated workpieces.

Through adopting above-mentioned technical scheme, when needs carry out the coating film to small-size work piece, adjust the position of work piece fixed disk or dismantle work piece fixed disk from the bracing piece for the rotation dish is installed on the bracing piece, and after the rotation dish revolved to one side of a certain sputtering cathode, only the rotation of carousel is driven through planetary gear and bracing piece, and then realizes carrying out the simultaneous coating film to all small-size work pieces on the carousel, is convenient for improve the efficiency of coating film.

Optionally, the planetary gear is coaxially and fixedly connected with a transmission shaft, and the support rod is detachably and coaxially fixedly connected with the transmission shaft.

By adopting the technical scheme, when a small workpiece such as a drill bit, a milling cutter or an artificial joint is coated, the coated workpiece can be directly clamped on the transmission shaft, so that the coating of a single coated workpiece is realized.

Optionally, the device further comprises a second driving mechanism and a revolution disc, wherein the planetary gear is rotationally connected to the revolution disc, a sun gear is rotationally connected to the revolution disc, a steering gear rotationally connected with the revolution disc is meshed with the sun gear, and the planetary gear is meshed with the steering gear; the revolution disc is rotationally connected with a main shaft coaxial with the revolution disc, the sun gear is fixedly connected with the main shaft, and the second driving mechanism is used for driving the main shaft to rotate around the axis of the main shaft in a fixed shaft mode.

Through adopting above-mentioned technical scheme, when needing to drive the planetary gear and fix the axis rotation around self axis, start second actuating mechanism in order to make the sun gear fix the axis rotation around self axis, the sun gear passes through steering gear with the moment of torsion and transmits the planetary gear, and then makes the planetary gear rotation.

Optionally, the device further comprises a third driving mechanism, the main shaft is sleeved with a flange which is rotationally connected with the main shaft, the flange is coaxially and fixedly connected with the revolution disc, and the third driving mechanism is used for driving the flange to rotate around a fixed shaft of the self-set axis.

By adopting the technical scheme, when the planetary gear is required to be driven to only rotate in a revolution way but not rotate, the third driving mechanism and the second driving mechanism are started at the same time, and the revolution of the planetary gear is realized by coordinating the rotation speeds of the third driving mechanism and the second driving mechanism; when the planetary gears are required to be driven to revolve and rotate, the third driving mechanism is started and the second driving mechanism is braked, so that various coating modes of the coated workpiece can be realized conveniently.

Optionally, the vacuum chamber further comprises a rotating frame base used for being fixed inside the vacuum chamber, a thrust bearing is arranged on the rotating frame base, the thrust bearing is fixed on the rotating frame base, and the revolution disc is arranged on the thrust bearing.

Through adopting above-mentioned technical scheme, when realizing carrying out effective support to revolution dish and the part that is located on the revolution dish for the rotation of revolution dish is more smooth and easy.

The application provides a vacuum coating machine with above-mentioned multidimension rotation work piece frame adopts following technical scheme:

the utility model provides a vacuum coating machine, includes the vacuum chamber, and the rotatory work piece frame of multidimension sets up in the vacuum chamber inside, is provided with a plurality of sputtering cathodes that surround planetary gear's revolution axis interval distribution on the vacuum chamber, has seted up a plurality of sputtering windows that correspond with different sputtering cathodes one by one on the lateral wall of vacuum chamber.

In summary, the present application has the following technical effects:

1. the planetary gear, the support rod, the workpiece fixing disc and the first driving mechanism are arranged, so that the film thickness difference of the surface of the workpiece to be plated is reduced, and the film thickness uniformity of the workpiece to be plated is improved;

2. through setting up carousel, second actuating mechanism, sun gear, steering gear, flange and third actuating mechanism, realized that the planetary gear only rotates, only revolves and both revolves and revolves three mode of operation, be convenient for realize the multiple coating film mode of plated work piece.

Drawings

FIG. 1 is a schematic diagram of a vacuum coater of the related art, which is a side view of the vacuum coater;

FIG. 2 is a schematic diagram of a vacuum coater of the related art, which is a front view of the vacuum coater;

FIG. 3 is a schematic perspective view of a vacuum coater according to an embodiment of the present application;

FIG. 4 is a schematic perspective view of a multi-dimensional rotating workpiece holder in an embodiment of the application;

FIG. 5 is a schematic view of a semi-sectional structure at a second drive mechanism and a third drive mechanism in an embodiment of the present application;

FIG. 6 is a schematic perspective view of a multi-dimensional rotating workpiece holder in accordance with an embodiment of the present application at another perspective view, corresponding to the simultaneous coating of a plate-like part and a plurality of small parts;

FIG. 7 is a schematic illustration of a semi-sectional structure at a first drive mechanism in an embodiment of the present application;

fig. 8 is a schematic perspective view of a multi-dimensional rotating workpiece holder according to an embodiment of the present application, which corresponds to a case where a large number of small parts are coated at the same time.

In the figure, 1, a planetary gear; 2. a support rod; 3. a workpiece fixing plate; 4. a first driving mechanism; 41. a positioning block; 42. a driven bevel gear; 43. a drive bevel gear; 44. a clamping block; 5. a revolution plate; 6. a mounting rod; 7. a fixing ring; 8. a second driving mechanism; 81. a first drive gear; 82. a first transmission gear; 83. a first servo motor; 9. a third driving mechanism; 91. a second drive gear; 92. a second transmission gear; 93. a second servo motor; 10. a self-rotating disc; 11. a transmission shaft; 12. an adapter sleeve; 13. a sun gear; 14. a steering gear; 15. a main shaft; 16. a flange; 17. a turret base; 18. a thrust bearing; 19. a vacuum chamber; 20. sputtering a cathode; 201. an arc source; 21. and sputtering a window.

Detailed Description

In the description of the present application, it should be noted that the terms "vertical," "coaxial," "horizontal," "upper," "lower," and the like are based on the relative relationships shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the process or module referred to must have a specific orientation, state, and operation, and thus should not be construed as limiting the present invention.

The present application is described in further detail below with reference to the accompanying drawings.

Referring to fig. 3, the present application provides a vacuum coating machine, which includes a vacuum chamber 19 with a hollow interior and a multi-dimensional rotating workpiece rack disposed inside the vacuum chamber 19, wherein the multi-dimensional rotating workpiece rack is used for driving a coated workpiece to rotate around a vertical axis, rotate around a horizontal axis, or revolve around a vertical fixed axis; a plurality of sputtering windows 21 are formed in the side wall of the vacuum chamber 19, a plurality of sputtering cathodes 20 which are arranged in one-to-one correspondence with the sputtering windows 21 are arranged on the vacuum chamber 19, and each sputtering cathode 20 comprises a plurality of arc sources 201 which are distributed along the vertical interval; in the present embodiment, the sputtering windows 21 are opened with three.

Referring to fig. 4 and 5, in particular, the multi-dimensional rotating workpiece holder includes a rotating frame base 17 fixed at the bottom of a vacuum chamber 19, a revolution plate 5 capable of rotating around its own axis in a fixed shaft is provided above the rotating frame base 17, and a plurality of planetary gears 1 are rotatably connected to the revolution plate 5 and a gear train for driving the planetary gears 1 to rotate and/or revolve is provided; the gear train comprises a sun gear 13 coaxially arranged with the revolution disc 5, a main shaft 15 which is rotationally connected with the revolution disc 5 is coaxially fixedly connected on the sun gear 13, the main shaft 15 extends to the lower part of a rotating frame base 17, and a second driving mechanism 8 for driving the main shaft 15 to rotate around the axis of the main shaft is arranged below the rotating frame base 17; the sun gear 13 is meshed with a plurality of steering gears 14 which are rotatably connected with the revolution plate 5, and each planetary gear 1 is meshed with a corresponding steering gear 14 and is positioned on the side of the steering gear 14 facing away from the sun gear 13, and in this embodiment, the planetary gears 1 are provided with four.

Referring to fig. 5 and 6, in some embodiments, the second driving mechanism 8 includes a first transmission gear 82 key-coupled with the main shaft 15, a first driving gear 81 engaged with the first transmission gear 82, and a first servo motor 83 for driving the first driving gear 81 to rotate about its own axis in a fixed shaft, the first servo motor 83 being configured with an absolute value encoder and a brake to improve the accuracy of the first servo motor 83 and to provide a braking function, and a body of the first servo motor 83 is fixed at the bottom of the vacuum chamber 19.

In other embodiments, the second driving mechanism 8 comprises a driving wheel driven by the first servo motor 83, a driven wheel coaxially and fixedly connected with the main shaft 15, and a transmission belt/chain arranged between the driving wheel and the driven wheel to transmit power; of course, the second drive mechanism 8 may also be formed in other ways to enable a fixed rotation of the drive spindle 15.

Referring to fig. 5 and 6, a flange 16 is coaxially and spirally connected to the lower surface of the revolution disc 5, the flange 16 is sleeved on the main shaft 15 and extends to the lower part of the rotating frame base 17, and the flange 16 is rotatably connected with the main shaft 15 through a bearing; the multi-dimensional rotating work-piece carrier further comprises a third drive mechanism 9 for driving the flange 16 to rotate about its own axis in a fixed manner.

In some embodiments, the third driving mechanism 9 includes a second transmission gear 92 connected with the flange 16 in a key manner, a second driving gear 91 meshed with the second transmission gear 92, and a second servo motor 93 for driving the second driving gear 91 to rotate around its own axis in a fixed shaft manner, where the second servo motor 93 is also configured with an absolute value encoder and a brake to improve the accuracy of the second servo motor 93 and provide a braking function, and the body of the second servo motor 93 is fixed at the bottom of the vacuum chamber 19.

In other embodiments, the third driving mechanism 9 includes a driving wheel driven by the second servo motor 93, a driven wheel coaxially fixed with the main shaft 15, and a transmission belt/chain disposed between the driving wheel and the driven wheel to transmit power; of course, the third drive means 9 may also consist of other forms, in order to be able to realize a fixed rotation of the drive flange 16.

Referring to fig. 5, in order to enable the revolution plate 5 to flexibly rotate on the turret base 17 while effectively supporting the revolution plate 5 and all the components located on the revolution plate 5, a thrust bearing 18 coaxially disposed with the flange 16 is disposed on the turret base 17, a lower end of the thrust bearing 18 is fixed on the turret base 17, and the revolution plate 5 is overlapped or fixed on an upper end of the thrust bearing 18.

Referring to fig. 4 and 6, a support rod 2 is coaxially and fixedly connected to a planetary gear 1, a fixing ring 7 detachably connected to the support rod 2 is sleeved on the support rod 2, a rotation disc 10 for placing or mounting small workpieces is lapped on the fixing ring 7, the rotation disc 10 is also sleeved on the support rod 2, and the number of the rotation discs 10 on a single support rod 2 is correspondingly increased or decreased according to the number of the plated workpieces; the support rod 2 is further provided with a first driving mechanism 4 and a workpiece fixing disc 3 capable of rotating around a horizontal shaft in a fixed axis manner, the first driving mechanism 4 can convert rotary power for driving the support rod 2 to rotate around a vertical shaft into rotary power around the horizontal shaft and transmit the rotary power to the workpiece fixing disc 3, and the workpiece fixing disc 3 is used for installing a large number of small workpieces or single large workpieces such as plate workpieces.

Referring to fig. 4 and 7, specifically, the revolution plate 5 is vertically fixed with the mounting bars 6 arranged in pairs, and the two mounting bars 6 in each pair are respectively located at both sides of the corresponding planetary gear 1; the first driving mechanism 4 comprises a positioning block 41 detachably fixedly connected to the mounting rod 6, in some embodiments, a driving bevel gear 43 is coaxially fixedly connected to the supporting rod 2, a driven bevel gear 42 meshed with the driving bevel gear 43 is rotatably connected to the positioning block 41, and the workpiece fixing disc 3 is coaxially fixedly connected with the driven bevel gear 42; in other embodiments, the support rod 2 is coaxially and fixedly connected with a worm, the positioning block 41 is rotatably connected with a worm wheel matched with the worm wheel, and the workpiece fixing disc 3 is coaxially and fixedly connected with the worm wheel. In addition, a clamping block 44 is screwed on one side of the positioning block 41, and the mounting rod 6 is clamped between the clamping block 44 and the positioning block 41, so that the position between the positioning block 41 and the mounting rod 6 is fixed.

The multidimensional rotary workpiece frame has the following three operation modes aiming at different working conditions:

referring to fig. 4 and 8, the first operation mode corresponds to the situation that different types of plating films need to be sputtered layer by layer on the workpiece to be plated, and three sputtering cathodes 20 need to be arranged in the first operation mode, namely magnetron sputtering cathode titanium plating, cathode arc carbon plating and magnetron sputtering cathode copper plating, and of course, other types of sputtering cathodes 20 can be adopted; in order to improve the coating efficiency, a plurality of self-rotating discs 10 are arranged on each supporting rod 2, a plurality of small-sized workpieces are arranged on each self-rotating disc 10, at the moment, a first servo motor 83 is started and a second servo motor 93 is braked, a main shaft 15 rotates and a flange 16 is fixed, under the action of a sun gear 13 and a steering gear 14, a planetary gear 1 drives the supporting rods 2 to rotate around the axis fixed shaft, and the supporting rods 2 further drive all the self-rotating discs 10 on the supporting rods 2 to rotate on one side of a corresponding sputtering cathode 20 until all the plated workpieces on the self-rotating discs 10 are sputtered with a layer of coating film; at this time, the second servo motor 93 is started to rotate the revolution disk 5, and thus the support rod 2 revolves around the axis of the revolution disk 5 until the support rod 2 drives the rotation disk 10 to rotate to one side of the next sputtering cathode 20, so as to finish the sputtering of the second layer of plating film.

Referring to fig. 6, in the second operation mode, in response to the need for single-sided coating of a workpiece to be coated, particularly a plate workpiece, the plate workpiece may be mounted on the workpiece holding pan 3 with the coated surface of the plate workpiece facing the sputtering cathode 20; simultaneously, the first servo motor 83 and the second servo motor 93 are started, and the rotation speeds of the first servo motor 83 and the second servo motor 93 are coordinated to enable the planetary gear 1 and the support rod 2 to only rotate around the axis of the revolution disc 5 but not rotate, so that the plate workpiece only revolves along with the rotation speed of the planetary gear and the support rod and cannot rotate around the horizontal axis; thus, although the uniformity of the plated workpiece in the horizontal direction is improved, namely the thickness of the plated film on each horizontal line of the plated workpiece is the same, the film thickness uniformity of the plated workpiece in the vertical direction cannot be improved under the working condition.

For this purpose, a third operating mode is present, which further improves the film thickness uniformity of the plated workpiece compared to the second operating mode; specifically, in the third operation mode, the first servo motor 83 is required to be braked and the second servo motor 93 is required to be started, and all sputtering cathodes 20 are identical, at this time, the planetary gear 1 rotates and revolves, and under the action of the first driving mechanism 4, the workpiece fixing disc 3 drives the plate workpiece to rotate around the horizontal axis, so that the position line a on the workpiece to be plated is continuously replaced, more parts on the workpiece to be plated can pass through the area A, and the parts of the workpiece to be plated after passing through the area A are rotated to other areas with lower sputtering rates, so that the film thickness difference on the surface of the workpiece to be plated is reduced, the film thickness uniformity of the workpiece to be plated is improved, and the film thickness uniformity of the workpiece to be plated in all directions is improved.

Referring to fig. 6, a plurality of small-sized workpieces may be further fixed to the workpiece fixing plate 3 in this mode and spaced apart in a vertical plane to improve film thickness uniformity between the respective small-sized workpieces; of course, the self-rotating disc 10 can be sleeved on the supporting rod 2 at the same time, so that the simultaneous coating of plate workpieces and large-batch small-sized workpieces can be realized, and the coating efficiency is improved; when the two coating modes are required to be performed simultaneously, the height of the positioning block 41 or the distance between the rotation plates 10 is adjusted so that the self-rotating plate 10 and the workpiece fixing plate 3 are arranged on the support rod 2 simultaneously.

Defining a line segment on a plated workpiece as a position line b, wherein the transmission ratio between all two gears meshed with each other is i, and in order to increase the time interval of the position line b passing through the area A twice, so as to further improve the uniformity of the film thickness, the transmission ratio i is a non-integer, for example, the transmission ratio i is 16:15; thus, the time interval that a certain small-sized workpiece is in the state closest to the same sputtering cathode 20 can be prolonged, and the uniformity of the coating film among the small-sized workpieces can be improved.

Referring to fig. 5, in order to facilitate switching between various operation modes or to facilitate replacement of the self-rotating disk 10 and the workpiece fixing disk 3 according to different plated workpieces, a transmission shaft 11 is coaxially and fixedly connected to the planetary gear 1, and an adapter sleeve 12 for fixing the support rod 2 is sleeved on the transmission shaft 11, so that detachable connection between the transmission shaft 11 and the support rod 2 is realized; thus, when it is necessary to coat a certain or a small number of small-sized workpieces such as drills, milling cutters, artificial joints, or the like in various modes, the coated workpieces are directly clamped on the drive shaft 11.

The present embodiment is merely illustrative of the present application and is not intended to be limiting, and those skilled in the art, after having read the present specification, may make modifications to the present embodiment without creative contribution as required, but is protected by patent laws within the scope of the claims of the present application.

Claims

1. The utility model provides a multidimension rotation work piece frame, includes train, planetary gear (1) and coaxial rigid coupling bracing piece (2) on planetary gear (1), its characterized in that: the support rod (2) is provided with a workpiece fixing disc (3) for fixing a plated workpiece, and the multidimensional rotary workpiece frame further comprises a first driving mechanism (4) for converting rotary power for driving the support rod (2) to rotate into rotary power for driving the workpiece fixing disc (3) to rotate around a horizontal shaft;

the planetary gear (1) is rotatably connected to the revolution disc (5); the first driving mechanism (4) comprises a positioning block (41) fixed relative to the position of the revolution disc (5), a driven bevel gear (42) rotationally connected with the positioning block (41), and a driving bevel gear (43) coaxially and fixedly connected with the supporting rod (2), wherein the driven bevel gear (42) is meshed with the driving bevel gear (43), the axis of the driven bevel gear (42) coincides with the horizontal axis, and the workpiece fixing disc (3) is fixed on the driven bevel gear (42).

2. The multi-dimensional rotating work piece holder of claim 1, wherein: a plurality of mounting rods (6) are fixed on the revolution disc (5), one side of the positioning block (41) is bolted with a clamping block (44), and the mounting rods (6) are clamped between the positioning block (41) and the clamping block (44).

3. The multi-dimensional rotating work piece holder of claim 1, wherein: the support rod (2) is detachably connected with at least one fixed ring (7), each fixed ring (7) is lapped with a self-rotating disc (10), the self-rotating disc (10) is sleeved on the support rod (2), and the self-rotating disc (10) is used for installing a plurality of plated workpieces.

4. The multi-dimensional rotating work piece holder of claim 1, wherein: the planetary gear (1) is coaxially and fixedly connected with a transmission shaft (11), and the supporting rod (2) and the transmission shaft (11) are coaxially arranged and detachably connected.

5. The multi-dimensional rotating work piece holder of claim 1, wherein: the planetary gear (1) is rotatably connected to the revolution disc (5); the gear train comprises a sun gear (13) rotationally connected with the revolution disc (5), a steering gear (14) rotationally connected with the revolution disc (5) is meshed on the sun gear (13), and the planetary gear (1) is meshed with the steering gear (14); the revolution disc (5) is rotationally connected with a main shaft (15) coaxial with the revolution disc (5), the sun gear (13) is fixedly connected with the main shaft (15), and the second driving mechanism (8) is used for driving the main shaft (15) to rotate around the axis of the main shaft.

6. The multi-dimensional rotating work-piece holder of claim 5, wherein: the second driving mechanism (8) comprises a first transmission gear (82) coaxially fixedly connected with the main shaft (15), a first driving gear (81) is meshed on the first transmission gear (82), and the second driving mechanism (8) further comprises a first servo motor (83) for driving the first driving gear (81) to rotate around the axis of the first servo motor in a fixed shaft mode.

7. The multi-dimensional rotating work-piece holder of claim 5, wherein: the device also comprises a third driving mechanism (9), a flange (16) rotationally connected with the main shaft (15) is sleeved on the main shaft (15), the flange (16) is coaxially fixedly connected with the revolution disc (5), and the third driving mechanism (9) is used for driving the flange (16) to rotate around a self-set axis fixed shaft.

8. The multi-dimensional rotating work-piece holder of claim 7, wherein: the rotary table further comprises a rotary table base (17) used for fixing, a thrust bearing (18) is arranged on the rotary table base (17), the thrust bearing (18) is fixed on the rotary table base (17), and the revolution disc (5) is arranged on the thrust bearing (18).

9. A vacuum coater having a multi-dimensional rotating work holder according to any one of claims 1-8, wherein: the multi-dimensional rotating workpiece rack comprises a vacuum chamber (19), wherein the multi-dimensional rotating workpiece rack is arranged inside the vacuum chamber (19), a plurality of sputtering cathodes (20) which are distributed around the revolution axis of the planetary gear (1) at intervals are arranged on the vacuum chamber (19), and a plurality of sputtering windows (21) which are in one-to-one correspondence with different sputtering cathodes (20) are formed in the side wall of the vacuum chamber (19).