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CN115256049A - Signal trigger stability measuring device and measuring method thereof - Google Patents

Signal trigger stability measuring device and measuring method thereof Download PDF

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CN115256049A
CN115256049A CN202210912284.6A CN202210912284A CN115256049A CN 115256049 A CN115256049 A CN 115256049A CN 202210912284 A CN202210912284 A CN 202210912284A CN 115256049 A CN115256049 A CN 115256049A
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signal
probe
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displacement sensor
support plate
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CN115256049B (en
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卢红
魏玉展
刘琪
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Wuhan University of Technology WUT
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

本发明提供一种信号触发稳定性测量装置及其测量方法,其中,信号触发稳定性测量装置用于检测接触式测头的信号,包括用于竖直固定接触式测头的固定机构,其还包括:支撑板和测量机构,所述支撑板设置于所述接触式测头下方且水平设置,所述测量机构包括簧片、调节台、PZT压电陶瓷和位移传感器,所述簧片通过柔性件连接于所述支撑板并相对所述接触式测头设置,所述簧片沿水平方向开设有容纳槽,所述调节台的一端连接于所述支撑板、另一端插设于所述容纳槽,所述PZT压电陶瓷设置于所述调节台的升降端并抵接于所述容纳槽的内壁。本发明的信号触发稳定性测量装置可以检测接触式测头不同方向的信号,以得出接触式测头的触发稳定性信号的合适角度。

Figure 202210912284

The present invention provides a signal-triggered stability measurement device and a measurement method thereof, wherein the signal-triggered stability measurement device is used to detect a signal of a contact probe, including a fixing mechanism for vertically fixing the contact probe, and furthermore It includes: a support plate and a measuring mechanism, the support plate is arranged below the contact probe and is horizontally arranged, the measuring mechanism includes a reed, an adjustment table, a PZT piezoelectric ceramic and a displacement sensor, and the reed passes through the flexible The reed is connected to the support plate and is arranged relative to the contact probe, the spring plate is provided with a receiving groove along the horizontal direction, one end of the adjustment table is connected to the support plate, and the other end is inserted into the receiving plate. A groove, the PZT piezoelectric ceramic is arranged on the lifting end of the adjustment table and abuts against the inner wall of the accommodating groove. The signal trigger stability measuring device of the present invention can detect signals from different directions of the touch probe, so as to obtain the appropriate angle of the trigger stability signal of the touch probe.

Figure 202210912284

Description

一种信号触发稳定性测量装置及其测量方法A signal trigger stability measuring device and its measuring method

技术领域technical field

本发明涉及接触式测头技术领域,尤其涉及一种信号触发稳定性测量装置及其测量方法。The invention relates to the technical field of touch probes, in particular to a signal-triggered stability measurement device and a measurement method thereof.

背景技术Background technique

接触式测头作为机床在位测量系统中的重要组成部分,用于测量工件的几何信息,其精度将直接影响在位测量的精度,也直接影响着精密量仪的测量精度、工作性能、使用效率和柔性程度,精密量仪能否满足现代测量要求也依赖于精密测头系统的不断创新与发展。As an important part of the on-site measurement system of the machine tool, the contact probe is used to measure the geometric information of the workpiece. Its accuracy will directly affect the accuracy of the on-site measurement, and also directly affect the measurement accuracy, working performance, and use of precision measuring instruments. Efficiency and flexibility, whether precision measuring instruments can meet modern measurement requirements also depends on the continuous innovation and development of precision measuring head systems.

例如,专利CN215035934U,提供了一种接触式单向测量装置,由支撑板、转接板、导轨、滑块、滑动体、气动驱动装置和接触式测头组成,支撑板通过转接板安装于机床Z轴的移动组件上,可在Z轴驱动装置作用下上下移动;导轨和气动驱动装置均安装于支撑板上;滑动体通过滑块作用于导轨上,可在气动驱动装置作用下沿导轨上下移动;接触式测头安装于滑动体的下端,可随滑动体一起上下移动;接触式测头通过信号线与机床控制装置相连接,将测量信号传输给机床数控系统。For example, the patent CN215035934U provides a contact-type one-way measuring device, which is composed of a support plate, an adapter plate, a guide rail, a slider, a sliding body, a pneumatic drive device, and a contact probe. The support plate is installed on the The moving component of the Z-axis of the machine tool can move up and down under the action of the Z-axis drive device; both the guide rail and the pneumatic drive device are installed on the support plate; the sliding body acts on the guide rail through the slider, and can move along the guide rail under the action of the pneumatic drive device. Move up and down; the touch probe is installed on the lower end of the sliding body, and can move up and down together with the sliding body; the touch probe is connected with the machine tool control device through the signal line, and transmits the measurement signal to the CNC system of the machine tool.

接触式测头一般安装在机床上使用,其均类似于上述专利,实际使用中接触式测头的安装位置和方向不同时,其触发测头信号所需要移动的位移量也不同,对于一些高精度的加工机床,必须要保证接触式测头具有较高触发精度和稳定性,然而,因为测头触发信号的预行程十分微小,普通设备难以测量,现有的机床在安装完接触式测头后并未对测头的信号触发精度和稳定性进行测量。因此,需要一种能够测量测头的触发精度和触发稳定性的测量装置,以便选找出测头最佳的测量方向。The touch probe is generally installed on the machine tool, which is similar to the above-mentioned patents. In actual use, when the installation position and direction of the touch probe are different, the displacement required to trigger the probe signal is also different. For some high For high-precision processing machine tools, it is necessary to ensure that the contact probe has high trigger accuracy and stability. However, because the pre-travel of the trigger signal of the probe is very small, it is difficult to measure with ordinary equipment. After that, the signal trigger accuracy and stability of the probe were not measured. Therefore, there is a need for a measuring device capable of measuring the trigger accuracy and trigger stability of the probe, so as to select the best measuring direction for the probe.

发明内容Contents of the invention

有鉴于此,有必要提供一种信号触发稳定性测量装置及其测量方法,解决现有技术中的机床在安装完接触式测头后无法测试信号触发精度和稳定性的技术问题。In view of this, it is necessary to provide a signal trigger stability measurement device and its measurement method, which solves the technical problem that the machine tool in the prior art cannot test the signal trigger accuracy and stability after the touch probe is installed.

为达到上述技术目的,本发明的技术方案提供一种信号触发稳定性测量装置,用于检测接触式测头的信号,其包括:支撑板和测量机构,所述支撑板设置于所述接触式测头下方且水平设置,所述测量机构包括簧片、调节台、PZT压电陶瓷和位移传感器,所述簧片通过柔性件连接于所述支撑板并相对所述接触式测头设置,所述簧片沿水平方向开设有容纳槽,所述调节台的一端连接于所述支撑板、另一端插设于所述容纳槽,所述PZT压电陶瓷设置于所述调节台的升降端,以便所述调节台带动所述PZT压电陶瓷抵接于所述容纳槽的内壁,所述位移传感器通过调节件连接于所述支撑板并抵接于所述簧片的底部,经所述调节件可调节所述位移传感器的位置,以便所述位移传感器和所述接触式测头同轴设置;In order to achieve the above technical objectives, the technical solution of the present invention provides a signal-triggered stability measuring device for detecting the signal of a touch probe, which includes: a support plate and a measuring mechanism, the support plate is set on the touch probe Below the probe and set horizontally, the measuring mechanism includes a reed, an adjustment table, a PZT piezoelectric ceramic and a displacement sensor, and the reed is connected to the support plate through a flexible piece and arranged relative to the contact probe. The reed is provided with an accommodation groove along the horizontal direction, one end of the adjustment platform is connected to the support plate, and the other end is inserted into the accommodation groove, and the PZT piezoelectric ceramic is arranged at the lifting end of the adjustment platform. In order for the adjustment table to drive the PZT piezoelectric ceramics to abut against the inner wall of the accommodation tank, the displacement sensor is connected to the support plate through the adjustment member and abuts against the bottom of the reed, and after the adjustment parts can adjust the position of the displacement sensor, so that the displacement sensor and the touch probe are arranged coaxially;

通过所述PZT压电陶瓷可顶升所述簧片,直至所述接触式测头输出稳定信号,以便通过所述位移传感器得出所述接触式测头触发稳定信号所需的位移量。The reed can be lifted by the PZT piezoelectric ceramic until the touch probe outputs a stable signal, so that the displacement required by the touch probe to trigger the stable signal can be obtained through the displacement sensor.

进一步的,还包括升降机构,所述升降机构设置于所述支撑板和所述调节台之间,用于调节所述调节台的高度,所述升降机构包括升降架、横板和驱动端,所述升降架连接于所述支撑板,所述横板的一端连接于所述升降架、另一端连接于所述调节台,所述驱动端设置于所述支撑板并连接于所述升降架,用于驱动所述升降架带动所述横板和所述调节台升降。Further, it also includes a lifting mechanism, the lifting mechanism is arranged between the support plate and the adjustment platform, and is used to adjust the height of the adjustment platform, the lifting mechanism includes a lifting frame, a horizontal plate and a driving end, The lifting frame is connected to the support plate, one end of the horizontal plate is connected to the lifting frame, and the other end is connected to the adjustment platform, and the driving end is arranged on the support plate and connected to the lifting frame , used to drive the elevating frame to drive the horizontal plate and the adjusting platform up and down.

进一步的,所述调节台为微动测量台架。Further, the adjustment platform is a micro-movement measurement platform.

进一步的,还包括支撑柱,所述支撑柱竖直设置且位于所述柔性件和所述支撑板之间,用于支撑所述簧片并使所述簧片处于悬空状态。Further, it also includes a support column, the support column is arranged vertically and is located between the flexible member and the support plate, and is used to support the reed and keep the reed in a suspended state.

进一步的,所述柔性件为双圆弧柔性铰链,所述双圆弧柔性铰链的一端连接于所述支撑柱、另一端连接于所述簧片,用于带动所述簧片沿竖直方向移动。Further, the flexible member is a double-arc flexible hinge, one end of the double-arc flexible hinge is connected to the support column, and the other end is connected to the reed, which is used to drive the reed to move along the vertical direction. move.

进一步的,所述位移传感器为接触式数字传感器。Further, the displacement sensor is a contact digital sensor.

进一步的,所述调节件包括固定杆和连接杆,所述固定杆竖直设置于所述支撑板,所述连接杆的一端设置有固定套、另一端设置有夹持部,所述连接杆的一端通过所述固定套转动连接于所述固定杆、另一端则通过所述夹持部可拆卸固定连接于所述接触式数字传感器,以便调节所述接触式数字传感器的位置和高度。Further, the adjustment member includes a fixed rod and a connecting rod, the fixed rod is vertically arranged on the support plate, one end of the connecting rod is provided with a fixing sleeve, and the other end is provided with a clamping part, and the connecting rod One end is rotatably connected to the fixed rod through the fixing sleeve, and the other end is detachably and fixedly connected to the touch digital sensor through the clamping part, so as to adjust the position and height of the touch digital sensor.

进一步的,所述固定杆为螺杆,所述固定套的内壁设置有与所述螺杆相对应的内螺纹,以便所述连接杆螺纹连接于所述螺杆。Further, the fixing rod is a screw rod, and the inner wall of the fixing sleeve is provided with an internal thread corresponding to the screw rod, so that the connecting rod is screwed to the screw rod.

本发明还包括一种信号触发稳定性测量方法,其包括上述的信号触发稳定性测量装置,还包括以下操作步骤:The present invention also includes a signal-triggered stability measurement method, which includes the above-mentioned signal-triggered stability measurement device, and also includes the following steps:

步骤一、调节接触式测头与位移传感器的位置,使得接触式测头的测球刚好接触到簧片且处在没有触发的状态,使得位移传感器接触到簧片的下表面并使位移传感器的测量方向和接触式测头的测球在同一轴线上;Step 1. Adjust the position of the contact probe and the displacement sensor so that the measuring ball of the contact probe just touches the reed and is in a non-triggered state, so that the displacement sensor touches the lower surface of the reed and the displacement sensor The measuring direction is on the same axis as the measuring ball of the touch probe;

步骤二、进行接触式测头信号触发测试,驱动PZT压电陶瓷和簧片上升与接触式测头的测球产生接触位移,实时观察接触式测头的信号触发情况,直至接触式测头触发信号稳定,记录触发时刻位移传感器的数据备用;Step 2. Carry out the signal trigger test of the contact probe, drive the PZT piezoelectric ceramic and the reed to rise and produce contact displacement with the ball of the contact probe, and observe the signal triggering situation of the contact probe in real time until the touch probe triggers The signal is stable, and the data of the displacement sensor at the trigger time is recorded for backup;

步骤三、调节接触式测头及其相应的位移传感器的位置,重复上述步骤一和步骤二的实验操作并记录数据;Step 3, adjust the position of the touch probe and its corresponding displacement sensor, repeat the experimental operation of the above step 1 and step 2 and record the data;

步骤四、测量数据分析与处理,通过数据分析不同角度下接触式测头触发的稳定性和测头触碰距离的稳定性,从而找到触发稳定性最佳的测量角度,并建议此方向作为测头检测时的安装方向。Step 4: Analysis and processing of measurement data. Through data analysis of the stability of the triggering of the touch probe and the stability of the touch distance of the probe at different angles, the measurement angle with the best trigger stability is found, and this direction is recommended as the measurement angle. The installation direction when the head is detected.

进一步的,步骤一中,可以根据阿贝误差原则设定位移传感器和接触式测头的相对位置。Further, in step 1, the relative positions of the displacement sensor and the touch probe can be set according to Abbe's error principle.

与现有技术相比,本发明的有益效果包括:本发明的测量装置可以用来检测接触式测头触发信号的稳定性,同时还能通过位移传感器检测出接触式测头触发稳定信号时所需要的位移量;Compared with the prior art, the beneficial effects of the present invention include: the measuring device of the present invention can be used to detect the stability of the trigger signal of the touch probe, and at the same time, the displacement sensor can detect when the touch probe triggers the stable signal. the amount of displacement required;

采用本发明提供的测量方法可以通过信号检测快速地判断接触式测头是否满足精度要求,以便快速地找出其精度最高的测量方向,利用接触式测头最优的测量角度工作,可以有效的提高机床在位测量系统的测量精度,提高加工的效率与产品质量。The measurement method provided by the present invention can quickly judge whether the contact probe meets the accuracy requirements through signal detection, so as to quickly find out the measurement direction with the highest precision, and use the optimal measurement angle of the contact probe to work effectively. Improve the measurement accuracy of the on-site measurement system of the machine tool, improve the efficiency of processing and product quality.

附图说明Description of drawings

图1是本发明提供的实施例-信号触发稳定性测量装置的装配示意图;Fig. 1 is the embodiment provided by the present invention-the assembly diagram of signal trigger stability measuring device;

图2是本发明提供的实施例-信号触发稳定性测量装置的结构示意图;Fig. 2 is an embodiment provided by the present invention - a schematic structural view of a signal trigger stability measurement device;

图3是本发明提供的实施例-信号触发稳定性测量装置中调节件的结构示意图;Fig. 3 is the embodiment provided by the present invention - the schematic structural view of the regulator in the signal trigger stability measurement device;

图4是本发明提供的信号触发稳定性测量方法的操作流程示意图。Fig. 4 is a schematic diagram of the operation flow of the signal trigger stability measurement method provided by the present invention.

具体实施方式Detailed ways

下面结合附图来具体描述本发明的优选实施例,其中,附图构成本申请一部分,并与本发明的实施例一起用于阐释本发明的原理,并非用于限定本发明的范围。Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the application and together with the embodiments of the present invention are used to explain the principle of the present invention and are not intended to limit the scope of the present invention.

参照图1,本发明提供了一种信号触发稳定性测量装置,用于检测接触式测头10的信号,其包括:支撑板1和测量机构2,所述支撑板1设置于所述接触式测头下方且水平设置,所述测量机构2包括簧片21、调节台22、PZT压电陶瓷23和位移传感器24,所述簧片21通过柔性件20连接于所述支撑板1并相对所述接触式测头10设置,所述簧片21沿水平方向开设有容纳槽211,所述调节台22的一端连接于所述支撑板1、另一端插设于所述容纳槽211,所述PZT压电陶瓷23设置于所述调节台22的升降端,以便所述调节台22带动所述PZT压电陶瓷23抵接于所述容纳槽211的内壁,所述位移传感器24通过调节件30连接于所述支撑板1并抵接于所述簧片21的底部,经所述调节件30可调节所述位移传感器24的位置,以便所述位移传感器24和所述接触式测头10同轴设置。其中,接触式测头10主要包括测头本体、测针和测球,测球固定在测针上,测针则连接至测头本体上,测头本体连接至外部信号接收端,测球接触工件时产生一定位移,接触式测头则会发出一段脉冲信号,该接触式测头为现有技术中常见的结构,此处不再赘述。With reference to Fig. 1, the present invention provides a kind of signal triggering stability measurement device, is used for detecting the signal of touch probe 10, and it comprises: support plate 1 and measuring mechanism 2, and described support plate 1 is arranged on described touch probe Below the measuring head and set horizontally, the measuring mechanism 2 includes a reed 21, an adjustment platform 22, a PZT piezoelectric ceramic 23 and a displacement sensor 24, and the reed 21 is connected to the support plate 1 through a flexible piece 20 and is opposite to the The touch probe 10 is provided, the reed 21 is provided with an accommodation groove 211 along the horizontal direction, one end of the adjustment platform 22 is connected to the support plate 1, and the other end is inserted into the accommodation groove 211, the The PZT piezoelectric ceramic 23 is arranged on the lifting end of the adjustment platform 22, so that the adjustment platform 22 drives the PZT piezoelectric ceramic 23 to abut against the inner wall of the accommodation groove 211, and the displacement sensor 24 passes through the adjustment member 30 Connected to the support plate 1 and abutted against the bottom of the reed 21, the position of the displacement sensor 24 can be adjusted through the adjustment member 30, so that the displacement sensor 24 and the touch probe 10 axis settings. Among them, the touch probe 10 mainly includes a probe body, a stylus and a measuring ball. The stylus is fixed on the stylus, and the stylus is connected to the stylus body. When the workpiece has a certain displacement, the touch probe will send out a pulse signal. The touch probe is a common structure in the prior art, and will not be repeated here.

接触式测头10可以通过三爪卡盘竖直固定,该测量装置则相对接触式测头10的测球设置,测量机构2安装在支撑板1上,通过PZT压电陶瓷可顶升簧片,直至接触式测头10输出稳定信号,则通过位移传感器24得出接触式测头10触发稳定信号所需的位移量,通过三爪卡盘调节测头的位置,测量机构中的位移传感器24则可以通过调节件30调整位置,使得位移传感器24保持和测头同轴设置,则可以通过多次不同角度的测量而找出接触式测头10精度最高的测量方向。The touch probe 10 can be fixed vertically by a three-jaw chuck, and the measuring device is set relative to the measuring ball of the touch probe 10. The measuring mechanism 2 is installed on the support plate 1, and the reed can be lifted by PZT piezoelectric ceramics , until the touch probe 10 outputs a stable signal, then the displacement required for the touch probe 10 to trigger the stable signal is obtained through the displacement sensor 24, and the position of the probe is adjusted through the three-jaw chuck, and the displacement sensor 24 in the measuring mechanism Then the position can be adjusted by the adjusting member 30 so that the displacement sensor 24 is coaxially arranged with the measuring head, and then the measuring direction with the highest precision of the touch measuring head 10 can be found through multiple measurements at different angles.

本发明提供的实施例中,所述位移传感器24为接触式数字传感器,用于测量簧片21的位移量。In the embodiment provided by the present invention, the displacement sensor 24 is a contact digital sensor for measuring the displacement of the reed 21 .

本发明提供的实施例中,该测量装置还包括升降机构3,所述升降机构3设置于所述支撑板1和所述调节台22之间,用于调节所述调节台22的高度,所述升降机构3包括升降架31、横板32和驱动端(图中未示出),所述升降架31连接于所述支撑板1,所述横板32的一端连接于所述升降架31、另一端连接于所述调节台22,所述驱动端设置于所述支撑板1并连接于所述升降架31,用于驱动所述升降架31带动所述横板32和所述调节台22升降,用于配合调节台22完成PZT压电陶瓷高度的初步调节(此为宏观意义上的高度调节),以便后续PZT压电陶瓷接通外部电源后完成高精度位移调节(此为微观意义上的高度调节)。其中,所述调节台22为微动测量台架,用于实现PZT压电陶瓷23竖直方向的高度调节,该微动测量台架为现有技术中常见的装置,此处不再赘述。In the embodiment provided by the present invention, the measuring device further includes a lifting mechanism 3, and the lifting mechanism 3 is arranged between the support plate 1 and the adjustment platform 22, and is used to adjust the height of the adjustment platform 22, so The lifting mechanism 3 includes a lifting frame 31, a horizontal plate 32 and a driving end (not shown in the figure), the lifting frame 31 is connected to the support plate 1, and one end of the horizontal plate 32 is connected to the lifting frame 31 , the other end is connected to the adjustment platform 22, the driving end is arranged on the support plate 1 and connected to the lifting frame 31, and is used to drive the lifting frame 31 to drive the horizontal plate 32 and the adjusting platform 22 lifting, used to cooperate with the adjustment platform 22 to complete the preliminary adjustment of the height of the PZT piezoelectric ceramics (this is the height adjustment in the macroscopic sense), so that the subsequent PZT piezoelectric ceramics can be connected to the external power supply to complete high-precision displacement adjustment (this is the microscopic sense) height adjustment above). Wherein, the adjustment table 22 is a micro-movement measuring bench, which is used to realize the height adjustment of the PZT piezoelectric ceramic 23 in the vertical direction. The micro-moving measuring bench is a common device in the prior art, and will not be repeated here.

本发明提供的实施例中,该测量装置还包括支撑柱4,所述支撑柱4竖直设置且位于所述柔性件20和所述支撑板1之间,用于支撑所述簧片21并使所述簧片21处于悬空状态。其中,所述柔性件20为双圆弧柔性铰链,双圆弧柔性铰链20的一端螺栓连接于所述支撑柱4、另一端通过销轴连接于所述簧片21,用于带动所述簧片21沿竖直方向移动。In the embodiment provided by the present invention, the measuring device further includes a support column 4, which is vertically arranged and located between the flexible member 20 and the support plate 1, for supporting the reed 21 and Make the reed 21 in a suspended state. Wherein, the flexible member 20 is a double-arc flexible hinge, one end of the double-arc flexible hinge 20 is bolted to the support column 4, and the other end is connected to the reed 21 through a pin, which is used to drive the spring. The sheet 21 moves in the vertical direction.

本发明提供的实施例中,所述调节件30包括固定杆301和连接杆302,所述固定杆301竖直设置于所述支撑板1,所述连接杆302的一端设置有固定套3021、另一端设置有夹持部3022,所述连接杆302的一端通过所述固定套转动连接于所述固定杆301、另一端则通过所述夹持部可拆卸固定连接于所述接触式数字传感器24,以便调节所述接触式数字传感器24的位置和高度。其中,固定套3021用于调节接触式数字传感器24在水平方向的位置,夹持部3022可以根据需要夹持固定接触式数字传感器24的不同位置,用于调节接触式数字传感器24在竖直方向上的位置,从而保持接触式数字传感器24的测量方向和接触式测头10的测球处于同一轴线。In the embodiment provided by the present invention, the adjustment member 30 includes a fixed rod 301 and a connecting rod 302, the fixed rod 301 is vertically arranged on the support plate 1, and one end of the connecting rod 302 is provided with a fixing sleeve 3021, The other end is provided with a clamping portion 3022, one end of the connecting rod 302 is rotatably connected to the fixed rod 301 through the fixing sleeve, and the other end is detachably and fixedly connected to the contact digital sensor through the clamping portion 24, in order to adjust the position and height of the touch digital sensor 24. Among them, the fixed sleeve 3021 is used to adjust the position of the touch-type digital sensor 24 in the horizontal direction, and the clamping part 3022 can clamp and fix different positions of the touch-type digital sensor 24 according to needs, and is used to adjust the position of the touch-type digital sensor 24 in the vertical direction. The upper position, so as to keep the measurement direction of the touch digital sensor 24 and the measuring ball of the touch probe 10 on the same axis.

本发明提供的实施例中,所述固定杆301为螺杆,所述固定套3021的内壁设置有与所述螺杆301相对应的内螺纹,以便所述连接杆302螺纹连接于所述螺杆301。In the embodiment provided by the present invention, the fixing rod 301 is a screw rod, and the inner wall of the fixing sleeve 3021 is provided with an internal thread corresponding to the screw rod 301 , so that the connecting rod 302 is screwed to the screw rod 301 .

本发明还包括一种信号触发稳定性测量方法,其包括上述的信号触发稳定性测量装置,还包括以下操作步骤:The present invention also includes a signal-triggered stability measurement method, which includes the above-mentioned signal-triggered stability measurement device, and also includes the following steps:

步骤一、调节接触式测头与位移传感器的位置,使得接触式测头的测球刚好接触到簧片且处在没有触发的状态,使得位移传感器接触到簧片的下表面并使位移传感器的测量方向和接触式测头的测球在同一轴线上;具体的,在实验开始前,先将接触式测头和测量装置依次安装固定,通过升降机构和微动测量台架配合调整簧片的位置,使得接触式测头的测球刚好接触到簧片且处在没有触发的状态,微动测量台架所需移动位移量为理论移动距离,然后调整位移传感器的位置,使得位移传感器接触到簧片的下表面并产生一定的位移数值,保证该位移数值大于接触式测头触发时所需的位移数值,其可以根据阿贝误差最小原则使位移传感器的测量方向和接触式测头的测球在同一轴线上。Step 1. Adjust the position of the contact probe and the displacement sensor so that the measuring ball of the contact probe just touches the reed and is in a non-triggered state, so that the displacement sensor touches the lower surface of the reed and the displacement sensor The measurement direction is on the same axis as the measuring ball of the touch probe; specifically, before the experiment starts, the touch probe and the measuring device are installed and fixed in sequence, and the lifting mechanism and the micro-motion measuring bench are used to adjust the position of the reed. position, so that the measuring ball of the contact probe just touches the reed and is in the state of no triggering, the movement displacement required by the micro-motion measuring bench is the theoretical movement distance, and then adjust the position of the displacement sensor so that the displacement sensor touches the The lower surface of the reed produces a certain displacement value, ensuring that the displacement value is greater than the displacement value required when the touch probe is triggered. It can make the measurement direction of the displacement sensor and the measurement direction of the touch probe according to the principle of the minimum Abbe error. The balls are on the same axis.

步骤二、进行接触式测头信号触发测试,通过PZT压电陶瓷驱动簧片上升与接触式测头的测球产生接触位移,实时观察接触式测头的信号触发情况,直至接触式测头触发信号稳定,记录触发时刻位移传感器的数据备用;具体的,通过微动测量台架驱动使簧片上升与测球产生接触位移,簧片通过双圆弧柔性铰链自身的微小形变实现上下表面的同步位移,簧片下表面上升,从而使位移传感器的位移数据慢慢减小,在PZT压电陶瓷驱动时实时观察接触式测头的信号触发情况,接触式测头信号触发时停止驱动并等待数秒后观察接触式测头触发信号是否稳定,若测头触发信号稳定则记录此时位移传感器数据并将宏动实验平台复位;若接触式测头触发信号不稳定则通过PZT压电陶瓷继续产生位移直至触发信号稳定,测头触发信号稳定时,记录触发时刻位移传感器的数据备用。Step 2. Carry out the signal trigger test of the contact probe. The PZT piezoelectric ceramic drives the reed to rise and generate contact displacement with the ball of the contact probe, and observe the signal triggering situation of the contact probe in real time until the contact probe is triggered. The signal is stable, and the data of the displacement sensor at the trigger time is recorded for backup; specifically, the reed is driven up by the micro-motion measurement bench to generate a contact displacement with the measuring ball, and the reed realizes the synchronization of the upper and lower surfaces through the small deformation of the double-arc flexible hinge itself Displacement, the lower surface of the reed rises, so that the displacement data of the displacement sensor decreases slowly. When the PZT piezoelectric ceramic is driven, observe the signal triggering of the contact probe in real time. When the signal of the contact probe is triggered, stop driving and wait for a few seconds. Finally, observe whether the trigger signal of the contact probe is stable. If the trigger signal of the probe is stable, record the displacement sensor data at this time and reset the macro-motion experimental platform; if the trigger signal of the contact probe is unstable, continue to generate displacement through the PZT piezoelectric ceramic Until the trigger signal is stable, when the probe trigger signal is stable, record the data of the displacement sensor at the trigger time for future use.

步骤三、调节接触式测头及其相应的位移传感器的位置,通过三爪卡盘夹紧和松开接触式测头,使得接触式测头可以实现水平方向的转动,接触式测头的每次转动角度为20°-40°,接触式测头每次转动后重复上述步骤一和步骤二的实验操作并记录数据。Step 3: Adjust the position of the touch probe and its corresponding displacement sensor, and clamp and loosen the touch probe through the three-jaw chuck, so that the touch probe can rotate in the horizontal direction. The primary rotation angle is 20°-40°. After each rotation of the touch probe, repeat the experimental operation of the above step 1 and step 2 and record the data.

步骤四、测量数据分析与处理,通过数据分析不同角度下接触式测头触发的稳定性和测头触碰距离的稳定性,从而找到触发稳定性最佳的测量角度,并建议此方向作为测头检测时的安装方向。具体的,记实验开始前位移传感器的数据为x1,接触式测头触发信号稳定时位移传感器的数据为x2,二者做差值(x1-x2)即为接触式测头信号稳定触发所需的位移,测头不同方向上测量的多次重复实验数据为一组,剔除数据异常值后对多次测量的数据通过公式(1)、(2)、(3)分别计算出本组数据的极差、方差和标准差。Step 4: Analysis and processing of measurement data. Through data analysis of the stability of the triggering of the touch probe and the stability of the touch distance of the probe at different angles, the measurement angle with the best trigger stability is found, and this direction is recommended as the measurement angle. The installation direction when the head is detected. Specifically, record the data of the displacement sensor before the experiment as x 1 , and the data of the displacement sensor when the trigger signal of the touch probe is stable is x 2 , and the difference between the two (x 1 -x 2 ) is the signal of the touch probe The displacement required for stable triggering, multiple repeated experimental data measured in different directions of the probe is a group, and the data of multiple measurements are calculated by formulas (1), (2) and (3) after removing data outliers The range, variance and standard deviation of the data in this group.

R=xmax-xmin (1)R=x max -x min (1)

Figure BDA0003772970440000081
Figure BDA0003772970440000081

Figure BDA0003772970440000082
Figure BDA0003772970440000082

其中,x表示样本的平均数,n表示样本的数量,xi表示个体,测头测量的其他方向上的数据按同样方式进行处理得出极差,方差和标准差。通过对比不同方向上的数据,则可以找到测头最优的测量角度,并建议此方向作为测头检测时的安装方向。Among them, x represents the average number of samples, n represents the number of samples, xi represents the individual, and the data in other directions measured by the probe are processed in the same way to obtain the range, variance and standard deviation. By comparing the data in different directions, the optimal measurement angle of the probe can be found, and this direction is recommended as the installation direction of the probe during detection.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。The above is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of changes or modifications within the technical scope disclosed in the present invention. Replacement should be covered within the protection scope of the present invention.

Claims (10)

1.一种信号触发稳定性测量装置,用于检测接触式测头的信号,包括用于竖直固定接触式测头的固定机构,其特征在于,还包括:支撑板和测量机构,所述支撑板设置于所述接触式测头下方且水平设置,所述测量机构包括簧片、调节台、PZT压电陶瓷和位移传感器,所述簧片通过柔性件连接于所述支撑板并相对所述接触式测头设置,所述簧片沿水平方向开设有容纳槽,所述调节台的一端连接于所述支撑板、另一端插设于所述容纳槽,所述PZT压电陶瓷设置于所述调节台的升降端,以便所述调节台带动所述PZT压电陶瓷抵接于所述容纳槽的内壁,所述位移传感器通过调节件连接于所述支撑板并抵接于所述簧片的底部,经所述调节件可调节所述位移传感器的位置,以便所述位移传感器和所述接触式测头同轴设置;1. A signal-triggered stability measurement device, used to detect the signal of a touch probe, including a fixing mechanism for vertically fixing the touch probe, is characterized in that it also includes: a support plate and a measuring mechanism, the The support plate is arranged below the touch probe and arranged horizontally. The measuring mechanism includes a reed, an adjustment platform, a PZT piezoelectric ceramic and a displacement sensor. The reed is connected to the support plate through a flexible piece and is opposite to the The contact measuring head is set, the reed is provided with an accommodation groove along the horizontal direction, one end of the adjustment table is connected to the support plate, and the other end is inserted into the accommodation groove, and the PZT piezoelectric ceramic is arranged on the The lifting end of the adjustment platform, so that the adjustment platform drives the PZT piezoelectric ceramics to abut against the inner wall of the accommodating tank, and the displacement sensor is connected to the support plate through an adjustment piece and abuts against the spring The bottom of the sheet, the position of the displacement sensor can be adjusted through the adjustment member, so that the displacement sensor and the touch probe are arranged coaxially; 通过所述PZT压电陶瓷可顶升所述簧片,直至所述接触式测头输出稳定信号,以便通过所述位移传感器得出所述接触式测头触发稳定信号所需的位移量。The reed can be lifted by the PZT piezoelectric ceramic until the touch probe outputs a stable signal, so that the displacement required by the touch probe to trigger the stable signal can be obtained through the displacement sensor. 2.根据权利要求1所述的信号触发稳定性测量装置,其特征在于:还包括升降机构,所述升降机构设置于所述支撑板和所述调节台之间,用于调节所述调节台的高度,所述升降机构包括升降架、横板和驱动端,所述升降架连接于所述支撑板,所述横板的一端连接于所述升降架、另一端连接于所述调节台,所述驱动端设置于所述支撑板并连接于所述升降架,用于驱动所述升降架带动所述横板和所述调节台升降。2. The signal-triggered stability measurement device according to claim 1, characterized in that: it also includes a lifting mechanism, and the lifting mechanism is arranged between the support plate and the adjustment table for adjusting the adjustment table The height of the lifting mechanism includes a lifting frame, a horizontal plate and a driving end, the lifting frame is connected to the support plate, one end of the horizontal plate is connected to the lifting frame, and the other end is connected to the adjustment table, The driving end is arranged on the supporting plate and connected to the lifting frame, and is used to drive the lifting frame to drive the horizontal plate and the adjusting table to rise and fall. 3.根据权利要求2所述的信号触发稳定性测量装置,其特征在于:所述调节台为微动测量台架。3 . The signal-triggered stability measurement device according to claim 2 , wherein the adjustment platform is a micro-motion measurement platform. 4 . 4.根据权利要求1所述的信号触发稳定性测量装置,其特征在于:还包括支撑柱,所述支撑柱竖直设置且位于所述柔性件和所述支撑板之间,用于支撑所述簧片并使所述簧片处于悬空状态。4. The signal-triggered stability measurement device according to claim 1, characterized in that: it also includes a support column, the support column is vertically arranged and located between the flexible member and the support plate, for supporting the Described reed and make described reed be in suspended state. 5.根据权利要求4所述的信号触发稳定性测量装置,其特征在于:所述柔性件为双圆弧柔性铰链,所述双圆弧柔性铰链的一端连接于所述支撑柱、另一端连接于所述簧片,用于带动所述簧片沿竖直方向移动。5. The signal-triggered stability measurement device according to claim 4, characterized in that: the flexible member is a double-arc flexible hinge, one end of the double-arc flexible hinge is connected to the support column, and the other end is connected to The reed is used to drive the reed to move vertically. 6.根据权利要求1所述的信号触发稳定性测量装置,其特征在于:所述位移传感器为接触式数字传感器。6. The signal-triggered stability measuring device according to claim 1, wherein the displacement sensor is a contact digital sensor. 7.根据权利要求1所述的信号触发稳定性测量装置,其特征在于:所述调节件包括固定杆和连接杆,所述固定杆竖直设置于所述支撑板,所述连接杆的一端设置有固定套、另一端设置有夹持部,所述连接杆的一端通过所述固定套转动连接于所述固定杆、另一端则通过所述夹持部可拆卸固定连接于所述接触式数字传感器,以便调节所述接触式数字传感器的位置和高度。7. The signal-triggered stability measurement device according to claim 1, characterized in that: the adjustment member includes a fixed rod and a connecting rod, the fixed rod is vertically arranged on the support plate, and one end of the connecting rod A fixed sleeve is provided, and the other end is provided with a clamping part. One end of the connecting rod is rotatably connected to the fixed rod through the fixed sleeve, and the other end is detachably fixedly connected to the contact type through the clamping part. digital sensor to adjust the position and height of the touch digital sensor. 8.根据权利要求7所述的信号触发稳定性测量装置,其特征在于:所述固定杆为螺杆,所述固定套的内壁设置有与所述螺杆相对应的内螺纹,以便所述连接杆螺纹连接于所述螺杆。8. The signal-triggered stability measurement device according to claim 7, characterized in that: the fixed rod is a screw, and the inner wall of the fixed sleeve is provided with an internal thread corresponding to the screw, so that the connecting rod threadedly connected to the screw. 9.一种信号触发稳定性测量方法,包括权利要求1-8所述的信号触发稳定性测量装置,其特征在于:9. A signal trigger stability measurement method, comprising the signal trigger stability measurement device according to claim 1-8, characterized in that: 包括以下操作步骤:Including the following steps: 步骤一、调节接触式测头与位移传感器的位置,使得接触式测头的测球刚好接触到簧片且处在没有触发的状态,使得位移传感器接触到簧片的下表面并使位移传感器的测量方向和接触式测头的测球在同一轴线上;Step 1. Adjust the position of the contact probe and the displacement sensor so that the measuring ball of the contact probe just touches the reed and is in a non-triggered state, so that the displacement sensor touches the lower surface of the reed and the displacement sensor The measuring direction is on the same axis as the measuring ball of the touch probe; 步骤二、进行接触式测头信号触发测试,驱动PZT压电陶瓷和簧片上升与接触式测头的测球产生接触位移,实时观察接触式测头的信号触发情况,直至接触式测头触发信号稳定,记录触发时刻位移传感器的数据备用;Step 2. Carry out the signal trigger test of the contact probe, drive the PZT piezoelectric ceramic and the reed to rise and produce contact displacement with the ball of the contact probe, and observe the signal triggering situation of the contact probe in real time until the touch probe triggers The signal is stable, and the data of the displacement sensor at the trigger time is recorded for backup; 步骤三、调节接触式测头及其相应的位移传感器的位置,重复上述步骤一和步骤二的实验操作并记录数据;Step 3, adjust the position of the touch probe and its corresponding displacement sensor, repeat the experimental operation of the above step 1 and step 2 and record the data; 步骤四、测量数据分析与处理,通过数据分析不同角度下接触式测头触发的稳定性和测头触碰距离的稳定性,从而找到触发稳定性最佳的测量角度,并建议此方向作为测头检测时的安装方向。Step 4: Analysis and processing of measurement data. Through data analysis of the stability of the triggering of the touch probe and the stability of the touch distance of the probe at different angles, the measurement angle with the best trigger stability is found, and this direction is recommended as the measurement angle. The installation direction when the head is detected. 10.根据权利要求9所述的信号触发稳定性测量方法,其特征在于:步骤一中,可以根据阿贝误差原则设定位移传感器和接触式测头的相对位置。10 . The signal-triggered stability measurement method according to claim 9 , wherein in step 1, the relative positions of the displacement sensor and the touch probe can be set according to the Abbe error principle. 11 .
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189399A (en) * 2005-01-07 2006-07-20 Mitsutoyo Corp Contact type measuring apparatus
CN102814707A (en) * 2012-08-14 2012-12-12 西安理工大学 Device and method for determining trigger stroke of trigger sensor
CN103344197A (en) * 2013-07-16 2013-10-09 北京工业大学 Contact-type three-dimensional scanning measuring head
CN110487155A (en) * 2019-08-02 2019-11-22 西安工业大学 The acquisition methods of linear array gauge head and contact straight spur gear flank of tooth point cloud
CN112296368A (en) * 2020-11-13 2021-02-02 哈尔滨工业大学 A height-adjusting tool holder for macro-micro composite diamond turning tools based on piezoelectric ceramics

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006189399A (en) * 2005-01-07 2006-07-20 Mitsutoyo Corp Contact type measuring apparatus
CN102814707A (en) * 2012-08-14 2012-12-12 西安理工大学 Device and method for determining trigger stroke of trigger sensor
CN103344197A (en) * 2013-07-16 2013-10-09 北京工业大学 Contact-type three-dimensional scanning measuring head
CN110487155A (en) * 2019-08-02 2019-11-22 西安工业大学 The acquisition methods of linear array gauge head and contact straight spur gear flank of tooth point cloud
CN112296368A (en) * 2020-11-13 2021-02-02 哈尔滨工业大学 A height-adjusting tool holder for macro-micro composite diamond turning tools based on piezoelectric ceramics

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