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CN115248246A - High-sensitivity aerosol single-particle laser ionization device and mass spectrometer - Google Patents

High-sensitivity aerosol single-particle laser ionization device and mass spectrometer Download PDF

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CN115248246A
CN115248246A CN202110467036.0A CN202110467036A CN115248246A CN 115248246 A CN115248246 A CN 115248246A CN 202110467036 A CN202110467036 A CN 202110467036A CN 115248246 A CN115248246 A CN 115248246A
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朱星高
杜绪兵
卓泽铭
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Guangzhou Hexin Instrument Co Ltd
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Abstract

本发明公开了一种高灵敏度气溶胶单颗粒激光电离装置以及质谱仪。高灵敏度气溶胶单颗粒激光电离装置包括脉冲激光器、紫外激光反射镜片、聚焦透镜、再反射镜片以及凹面反射镜;脉冲激光器、紫外激光反射镜片、聚焦透镜、再反射镜片以及凹面反射镜沿着光路前进方向顺序分布,脉冲激光器用于产生脉冲激光电离气溶胶单颗粒,紫外激光反射镜片用于反射脉冲激光器产生的脉冲激光至聚焦透镜,聚焦透镜用于聚焦脉冲激光至气溶胶单颗粒的前表面,再反射镜片用于反射聚焦到气溶胶单颗粒后的重新放大后的放大激光反射到凹面反射镜,凹面反射镜用于将放大激光反射并重新聚焦到气溶胶单颗粒的后表面。高灵敏度气溶胶单颗粒激光电离装置能够提高电离灵敏度。

Figure 202110467036

The invention discloses a high-sensitivity aerosol single particle laser ionization device and a mass spectrometer. High-sensitivity aerosol single-particle laser ionization devices include pulsed lasers, UV laser mirrors, focusing lenses, re-reflective mirrors, and concave mirrors; pulsed lasers, UV laser mirrors, focusing lenses, re-reflective mirrors, and concave mirrors along the optical path The forward direction is distributed sequentially, the pulsed laser is used to generate pulsed laser ionized aerosol single particles, the ultraviolet laser mirror is used to reflect the pulsed laser generated by the pulsed laser to the focusing lens, and the focusing lens is used to focus the pulsed laser to the front surface of the aerosol single particle , the re-reflecting lens is used to reflect the re-amplified amplified laser light after focusing on the aerosol single particle to the concave reflector, and the concave reflector is used to reflect and re-focus the amplified laser light to the rear surface of the aerosol single particle. The high-sensitivity aerosol single-particle laser ionization device can improve the ionization sensitivity.

Figure 202110467036

Description

高灵敏度气溶胶单颗粒激光电离装置以及质谱仪High-sensitivity aerosol single-particle laser ionization device and mass spectrometer

技术领域technical field

本发明涉及质谱检测技术领域,特别是涉及一种高灵敏度气溶胶单颗粒激光电离装置以及质谱仪。The invention relates to the technical field of mass spectrometry detection, in particular to a high-sensitivity aerosol single-particle laser ionization device and a mass spectrometer.

背景技术Background technique

众所周知,大气气溶胶对环境以及人体健康有着巨大的影响,因此人们对其研究也越来越重视和深入。由于大气气溶胶的来源、演变较为复杂,深入研究其来源、理化性质以及演变的机理变的困难。单颗粒气溶胶质谱仪作为一种新型的气溶胶分析仪器,能够从单个颗粒层面上测量颗粒尺寸大小和化学组成,对于研究大气气溶胶中颗粒物的种类、混合状态、来源以及演变过程具有重要的作用。As we all know, atmospheric aerosols have a huge impact on the environment and human health, so people pay more and more attention to and in-depth research on them. Due to the complex origin and evolution of atmospheric aerosols, it is difficult to study the origin, physical and chemical properties and evolution mechanism of atmospheric aerosols in depth. As a new type of aerosol analysis instrument, the single particle aerosol mass spectrometer can measure the particle size and chemical composition from a single particle level. effect.

单颗粒气溶胶质谱仪由进样系统、真空系统、激光测径系统、电离系统、质量分析器、电控系统以及软件分析系统等组成。仪器正常工作时,待测样品首先经过进样系统,将样品中的气溶胶颗粒物汇聚成穿过空气动力学透镜中心的颗粒束,并且不同粒径大小的颗粒具有不同的速度,随着粒径的增大其速度越小。汇聚好的颗粒经过多级真空系统后,被激光测径系统检测,并通过计算得到颗粒物的粒径以及速度等信息,同时记录下颗粒物经过测径系统时产生脉冲触发信号的时刻T1。根据以上信息,计算得到电离激光器的触发出光的时刻T2,使离子飞到电离激光电离位置的同时电离系统运行,将颗粒物电离,电离后的带The single particle aerosol mass spectrometer consists of a sampling system, a vacuum system, a laser caliper system, an ionization system, a mass analyzer, an electronic control system, and a software analysis system. When the instrument is working normally, the sample to be tested first passes through the sampling system, and the aerosol particles in the sample are collected into a particle beam that passes through the center of the aerodynamic lens, and the particles of different particle sizes have different velocities. increases the smaller the speed. After the collected particles pass through the multi-stage vacuum system, they are detected by the laser caliper system, and information such as particle size and velocity of the particles is obtained by calculation, and the moment T1 when the pulse trigger signal is generated when the particles pass through the caliper system is recorded. According to the above information, the time T2 when the ionization laser is triggered to emit light is calculated, and the ionization system runs while the ions fly to the ionization position of the ionization laser, ionizes the particles, and the ionized band

电粒子在质量分析器内被分析,得到颗粒的组成成分信息由仪器的工作原理可知,激光电离系统是单颗粒气溶胶质谱仪的一个重要组成部分,激光电离系统决定了颗粒物的电离效果。常用的气溶胶颗粒电离方式有化学电离、电子轰击、紫外光电离以及激光解析电离。而激光解析电离可以高效的电离不同化学成分的气溶胶颗粒,包括烟灰、灰尘、海盐等低挥发性的气溶胶颗粒,是仪器实现实时在线全方位检测的必要手段。然而,传统的激光电离方式是通过三维调节装置将激光出射的脉冲激光反射以及光学透镜聚焦到电离区中心电离,这种电离仅仅只能电离气溶胶颗粒的一面(靠近激光出射方向),电离效率不充分,电离灵敏度低,难以适应现有的检测要求。The electric particles are analyzed in the mass analyzer, and the composition information of the particles is obtained. From the working principle of the instrument, the laser ionization system is an important part of the single particle aerosol mass spectrometer, and the laser ionization system determines the particle ionization effect. Commonly used aerosol particle ionization methods include chemical ionization, electron bombardment, ultraviolet photoionization and laser desorption ionization. Laser desorption ionization can efficiently ionize aerosol particles of different chemical compositions, including low volatility aerosol particles such as soot, dust, sea salt, etc., which is a necessary means for the instrument to realize real-time online all-round detection. However, the traditional laser ionization method is to reflect the pulsed laser emitted by the laser and focus the optical lens to the center of the ionization zone through a three-dimensional adjustment device. This ionization can only ionize one side of the aerosol particles (close to the laser emission direction), and the ionization efficiency Insufficient, the ionization sensitivity is low, and it is difficult to adapt to the existing detection requirements.

发明内容SUMMARY OF THE INVENTION

基于此,有必要提供一种能够回收激光光斑重新反射聚焦到气溶胶颗粒上电离,提高电离灵敏度的高灵敏度气溶胶单颗粒激光电离装置。Based on this, it is necessary to provide a high-sensitivity aerosol single-particle laser ionization device that can recover the laser spot and re-reflect and focus it on the aerosol particles for ionization to improve the ionization sensitivity.

一种高灵敏度气溶胶单颗粒激光电离装置,包括脉冲激光器、紫外激光反射镜片、聚焦透镜、再反射镜片以及凹面反射镜;所述脉冲激光器、所述紫外激光反射镜片、所述聚焦透镜、所述再反射镜片以及所述凹面反射镜沿着光路前进方向依次顺序分布,所述脉冲激光器用于产生脉冲激光以用来电离气溶胶单颗粒,所述紫外激光反射镜片用于反射所述脉冲激光器产生的脉冲激光至所述聚焦透镜,所述聚焦透镜用于聚焦脉冲激光至气溶胶单颗粒的前表面,所述再反射镜片用于反射聚焦到气溶胶单颗粒后的重新放大后的放大激光反射到凹面反射镜,所述凹面反射镜用于将放大激光反射并重新聚焦到气溶胶单颗粒的后表面。A high-sensitivity aerosol single-particle laser ionization device includes a pulsed laser, an ultraviolet laser reflecting lens, a focusing lens, a re-reflecting lens and a concave reflecting mirror; the pulsed laser, the ultraviolet laser reflecting lens, the focusing lens, the The re-reflection mirror and the concave mirror are sequentially distributed along the advancing direction of the optical path, the pulsed laser is used to generate pulsed laser light to ionize a single aerosol particle, and the ultraviolet laser mirror is used to reflect the pulsed laser The generated pulsed laser light is directed to the focusing lens, which is used for focusing the pulsed laser light to the front surface of the aerosol single particle, and the re-reflection mirror is used to reflect the re-magnified amplified laser light after focusing on the aerosol single particle Reflection to a concave mirror used to reflect and refocus the amplified laser light onto the rear surface of the aerosol single particle.

在其中一个实施例中,所述再反射镜片与所述聚焦透镜所在的平面呈45°夹角,所述凹面反射镜与所述聚焦透镜所在的平面呈45°夹角,所述再反射镜片的反射面与所述凹面反射镜的反射面相向设置。In one embodiment, the re-reflection lens forms an angle of 45° with the plane where the focusing lens is located, the concave reflector forms an angle of 45° with the plane where the focusing lens is located, and the re-reflection lens forms an angle of 45°. The reflective surface of the concave mirror is arranged opposite to the reflective surface of the concave mirror.

在其中一个实施例中,所述高灵敏度气溶胶单颗粒激光电离装置还包括透镜调节组件,所述透镜调节组件连接于所述聚焦透镜,所述透镜调节组件用于调节所述聚焦透镜的位置。In one embodiment, the high-sensitivity aerosol single-particle laser ionization device further includes a lens adjustment component, the lens adjustment component is connected to the focusing lens, and the lens adjustment component is used to adjust the position of the focusing lens .

在其中一个实施例中,所述透镜调节组件能够驱动所述聚焦透镜在第一方向、第二方向以及第三方向上移动,其中,第一方向、第二方向以及第三方向相互垂直。In one embodiment, the lens adjustment assembly can drive the focusing lens to move in a first direction, a second direction and a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other.

在其中一个实施例中,所述透镜调节组件包括透镜XY移动平台以及透镜Y轴升降平台,所述聚焦透镜连接于所述透镜XY移动平台,所述透镜XY移动平台安装于所述透镜Y轴升降平台上,所述透镜XY移动平台用于驱动所述聚焦透镜沿着X轴方向或者Y轴方向移动,所述透镜Y轴升降平台用于驱动所述透镜XY移动平台以及所述聚焦透镜沿着Y轴方向移动。In one embodiment, the lens adjustment assembly includes a lens XY moving platform and a lens Y-axis lifting platform, the focusing lens is connected to the lens XY moving platform, and the lens XY moving platform is mounted on the lens Y-axis On the lifting platform, the lens XY moving platform is used to drive the focusing lens to move along the X-axis direction or the Y-axis direction, and the lens Y-axis lifting platform is used to drive the lens XY moving platform and the focusing lens along the move in the Y-axis direction.

在其中一个实施例中,所述高灵敏度气溶胶单颗粒激光电离装置还包括支架组件,所述紫外激光反射镜片安装于所述支架组件。In one embodiment, the high-sensitivity aerosol single-particle laser ionization device further includes a bracket assembly, and the ultraviolet laser mirror is mounted on the bracket assembly.

在其中一个实施例中,所述紫外激光反射镜片在所述支架组件上的位置可调。In one embodiment, the position of the ultraviolet laser reflecting sheet on the bracket assembly is adjustable.

在其中一个实施例中,所述脉冲激光器为266nm紫外脉冲激光器。In one of the embodiments, the pulsed laser is a 266 nm ultraviolet pulsed laser.

在其中一个实施例中,所述紫外激光反射镜片分别与所述脉冲激光器的出射方向、所述聚焦透镜所在的平面呈45°角度,所述紫外激光反射镜片能够将所述脉冲激光器的产生的脉冲激光呈90°角度反射至所述聚焦透镜。In one embodiment, the ultraviolet laser reflective sheet is at an angle of 45° with the outgoing direction of the pulsed laser and the plane on which the focusing lens is located, and the ultraviolet laser reflective sheet can convert the light generated by the pulsed laser to an angle of 45°. The pulsed laser is reflected to the focusing lens at an angle of 90°.

本发明的另一目的还在于提供一种质谱仪。Another object of the present invention is to provide a mass spectrometer.

一种质谱仪,包括所述的高灵敏度气溶胶单颗粒激光电离装置。A mass spectrometer includes the high-sensitivity aerosol single-particle laser ionization device.

上述的高灵敏度气溶胶单颗粒激光电离装置能够回收激光光斑重新反射聚焦到气溶胶颗粒上电离,提高电离灵敏度的高灵敏度气溶胶单颗粒激光电离装置。传统的电离结构是266nm紫外脉冲激光器通过将发出的脉冲激光反射之后通过聚焦透镜聚焦到气溶胶单颗粒上,但这种结构只能将聚焦光斑聚焦在气溶胶单颗粒的单面,气溶胶单颗粒的背面是无法被激光电离,这就大大影响了单颗粒气溶胶的电离效率,进而影响了电离的灵敏度;而上述的高灵敏度气溶胶单颗粒激光电离装置增加一个再反射镜片以及凹面反射镜,由于凹面反射镜既有反射激光的作用,同时,还能将反射过来的光斑重新聚焦气溶胶单颗粒的背面,这样,在脉冲激光器发出的脉冲激光到达气溶胶单颗粒的前面的同时,气溶胶单颗粒的背面也被激光聚焦电离,这将大大提高气溶胶单颗粒的电离效率以及电离灵敏度。The above-mentioned high-sensitivity aerosol single-particle laser ionization device can recover the laser spot and re-reflect and focus it on the aerosol particles for ionization, thereby improving the ionization sensitivity of the high-sensitivity aerosol single-particle laser ionization device. The traditional ionization structure is that a 266nm ultraviolet pulsed laser reflects the emitted pulsed laser and then focuses it on a single aerosol particle through a focusing lens, but this structure can only focus the focused spot on one side of a single aerosol particle, and the aerosol single The backside of the particle cannot be ionized by the laser, which greatly affects the ionization efficiency of single-particle aerosol, which in turn affects the sensitivity of ionization; and the above-mentioned high-sensitivity aerosol single-particle laser ionization device adds a re-reflecting mirror and a concave mirror. , because the concave mirror not only reflects the laser light, but also refocuses the reflected light spot on the back of the single aerosol particle. In this way, when the pulsed laser emitted by the pulsed laser reaches the front of the single aerosol particle, the gas The backside of the aerosol single particle is also ionized by the laser focus, which will greatly improve the ionization efficiency and ionization sensitivity of the aerosol single particle.

上述的高灵敏度气溶胶单颗粒激光电离装置在使用时,脉冲激光器是产生脉冲激光用来电离气溶胶单颗粒;支架组件是为了固定紫外激光反射镜片;所述紫外激光反射镜片是为了反射脉冲激光器发出的激光到聚焦透镜上;所述透镜Y轴升降平台以及透镜XY移动平台是为了固定聚焦透镜并调节聚焦透镜在X轴方向、Y轴方向、Z轴方向上的移动;所述再反射镜片是为了将脉冲激光器发出的脉冲激光聚焦到气溶胶单颗粒之后重新放大之后的放大激光反射到凹面反射镜上;所述凹面反射镜是将通过再反射镜片反射过来之后的光斑反射并聚焦到气溶胶单颗粒上,上述的脉冲激光器、紫外激光反射镜片、聚焦透镜、再反射镜片以及凹面反射镜相互配合实现了对气溶胶单颗粒的前表面以及后表面公同时进行电离,提高了气溶胶单颗粒的电离效率以及电离灵敏度。When the above-mentioned high-sensitivity aerosol single-particle laser ionization device is in use, the pulsed laser is used to generate a pulsed laser to ionize a single aerosol particle; the bracket assembly is used to fix the ultraviolet laser reflecting lens; the ultraviolet laser reflecting lens is used to reflect the pulsed laser. The laser light is sent to the focusing lens; the lens Y-axis lifting platform and the lens XY moving platform are used to fix the focusing lens and adjust the movement of the focusing lens in the X-axis direction, the Y-axis direction, and the Z-axis direction; the re-reflection lens The purpose is to focus the pulsed laser light emitted by the pulsed laser to a single aerosol particle and then re-amplify the amplified laser light to reflect it on the concave mirror; On a single aerosol particle, the above-mentioned pulsed laser, ultraviolet laser reflecting lens, focusing lens, re-reflecting lens and concave reflecting mirror cooperate with each other to realize the ionization of the front surface and the rear surface of the single aerosol particle at the same time, which improves the aerosol single particle. Particle ionization efficiency and ionization sensitivity.

上述的高灵敏度气溶胶单颗粒激光电离装置通过设置透镜调节组件驱动聚焦透镜在第一方向、第二方向以及第三方向上移动,聚焦透镜可以根据实际需要在第一方向、第二方向以及第三方向上发生移动,以调整位置和角度。The above-mentioned high-sensitivity aerosol single-particle laser ionization device drives the focusing lens to move in the first direction, the second direction and the third direction by setting the lens adjustment component, and the focusing lens can move in the first direction, the second direction and the third direction according to actual needs. Move up to adjust position and angle.

上述的高灵敏度气溶胶单颗粒激光电离装置通过设置透镜XY移动平台以及透镜Y轴升降平台,实现了聚焦透镜在X轴方向、Y轴方向、Z轴方向上的移动,透镜XY移动平台以及透镜Y轴升降平台结构简单,易于设置,取材容易,成本低。The above-mentioned high-sensitivity aerosol single-particle laser ionization device realizes the movement of the focusing lens in the X-axis direction, the Y-axis direction and the Z-axis direction by setting the lens XY moving platform and the lens Y-axis lifting platform, the lens XY moving platform and the lens. The Y-axis lifting platform is simple in structure, easy to set up, easy to obtain materials, and low cost.

上述的高灵敏度气溶胶单颗粒激光电离装置通过设置支架组件用于安装紫外激光反射镜片,并且实现了所述紫外激光反射镜片在所述支架组件上的位置可调,可以根据实际需要进行紫外激光反射镜片角度和位置的调节,操作方便。The above-mentioned high-sensitivity aerosol single-particle laser ionization device is provided with a bracket assembly for installing the ultraviolet laser reflecting lens, and realizes that the position of the ultraviolet laser reflecting lens on the bracket assembly can be adjusted, and the ultraviolet laser can be carried out according to actual needs. The adjustment of the angle and position of the reflector is easy to operate.

使用上述的高灵敏度气溶胶单颗粒激光电离装置的质谱仪,能够大幅提高气溶胶单颗粒的电离效率以及电离灵敏度,也提高了质谱仪检测的效率以及灵敏度。The mass spectrometer using the above-mentioned high-sensitivity aerosol single particle laser ionization device can greatly improve the ionization efficiency and ionization sensitivity of aerosol single particles, and also improve the detection efficiency and sensitivity of the mass spectrometer.

附图说明Description of drawings

图1为本发明一实施例所述的高灵敏度气溶胶单颗粒激光电离装置示意图;1 is a schematic diagram of a high-sensitivity aerosol single-particle laser ionization device according to an embodiment of the present invention;

图2为本发明一实施例所述的高灵敏度气溶胶单颗粒激光电离装置结构示意示意图。FIG. 2 is a schematic structural diagram of a high-sensitivity aerosol single-particle laser ionization device according to an embodiment of the present invention.

附图标记说明Description of reference numerals

10、高灵敏度气溶胶单颗粒激光电离装置;100、脉冲激光器;200、紫外激光反射镜片;300、聚焦透镜;400、再反射镜片;500、凹面反射镜;600、透镜调节组件;610、透镜XY移动平台;620、透镜Y轴升降平台;700、支架组件;20、光路。10. High-sensitivity aerosol single-particle laser ionization device; 100, pulsed laser; 200, ultraviolet laser mirror; 300, focusing lens; 400, re-reflection mirror; 500, concave mirror; 600, lens adjustment component; 610, lens XY mobile platform; 620, lens Y-axis lifting platform; 700, bracket assembly; 20, optical path.

具体实施方式Detailed ways

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似改进,因此本发明不受下面公开的具体实施例的限制。In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " Back, Left, Right, Vertical, Horizontal, Top, Bottom, Inner, Outer, Clockwise, Counterclockwise, Axial , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the indicated device or Elements must have a particular orientation, be constructed and operate in a particular orientation and are therefore not to be construed as limitations of the invention.

此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中,“多个”的含义是至少两个,例如两个,三个等,除非另有明确具体的限定。In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise expressly and specifically defined.

在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系,除非另有明确的限定。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise expressly specified and limited, the terms "installed", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between the two elements, unless otherwise specified limit. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

在本发明中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise expressly specified and limited, a first feature "on" or "under" a second feature may be in direct contact between the first and second features, or the first and second features indirectly through an intermediary touch. Also, the first feature being "above", "over" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower level than the second feature.

需要说明的是,当元件被称为“固定于”或“设置于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or an intervening element may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for the purpose of illustration only and do not represent the only embodiment.

除非另有定义,本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本发明。本文所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terms used herein in the description of the present invention are for the purpose of describing specific embodiments only, and are not intended to limit the present invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

请参阅图1及图2所示,本发明一实施例提供了一种高灵敏度气溶胶单颗粒激光电离装置10。Referring to FIG. 1 and FIG. 2 , an embodiment of the present invention provides a high-sensitivity aerosol single-particle laser ionization device 10 .

一种高灵敏度气溶胶单颗粒激光电离装置10,包括脉冲激光器100、紫外激光反射镜片200、聚焦透镜300、再反射镜片400以及凹面反射镜500。A high-sensitivity aerosol single-particle laser ionization device 10 includes a pulsed laser 100 , an ultraviolet laser reflecting lens 200 , a focusing lens 300 , a re-reflecting lens 400 and a concave reflecting mirror 500 .

请参阅图1所示,脉冲激光器100、紫外激光反射镜片200、聚焦透镜300、再反射镜片400以及凹面反射镜500沿着光路20前进方向依次顺序分布。Referring to FIG. 1 , the pulsed laser 100 , the ultraviolet laser mirror 200 , the focusing lens 300 , the re-reflection mirror 400 and the concave mirror 500 are sequentially distributed along the advancing direction of the optical path 20 .

脉冲激光器100用于产生脉冲激光以用来电离气溶胶单颗粒,紫外激光反射镜片200用于反射脉冲激光器100产生的脉冲激光至聚焦透镜300,聚焦透镜300用于聚焦脉冲激光至气溶胶单颗粒的前表面,再反射镜片400用于反射聚焦到气溶胶单颗粒后的重新放大后的放大激光反射到凹面反射镜500,凹面反射镜500用于将放大激光反射并重新聚焦到气溶胶单颗粒的后表面。The pulsed laser 100 is used to generate a pulsed laser to ionize a single aerosol particle, and the ultraviolet laser mirror 200 is used to reflect the pulsed laser generated by the pulsed laser 100 to a focusing lens 300, and the focusing lens 300 is used to focus the pulsed laser to a single aerosol particle On the front surface, the re-reflection mirror 400 is used to reflect the re-amplified amplified laser light after focusing on the aerosol single particle and reflected to the concave mirror 500, and the concave mirror 500 is used to reflect and re-focus the amplified laser light to the aerosol single particle the rear surface.

在其中一个实施例中,请参阅图1所示,再反射镜片400与聚焦透镜300所在的平面呈45°夹角,凹面反射镜500与聚焦透镜300所在的平面呈45°夹角,再反射镜片400的反射面与凹面反射镜500的反射面相向设置。In one embodiment, please refer to FIG. 1 , the re-reflection mirror 400 forms an angle of 45° with the plane where the focusing lens 300 is located, the concave mirror 500 forms an angle of 45° with the plane where the focusing lens 300 is located, and the re-reflection mirror 500 forms an angle of 45° with the plane where the focusing lens 300 is located. The reflective surface of the mirror 400 and the reflective surface of the concave mirror 500 are disposed opposite to each other.

在其中一个实施例中,请参阅图1所示,高灵敏度气溶胶单颗粒激光电离装置10还包括透镜调节组件600,透镜调节组件600连接于聚焦透镜300,透镜调节组件600用于调节聚焦透镜300的位置。In one embodiment, please refer to FIG. 1 , the high-sensitivity aerosol single-particle laser ionization device 10 further includes a lens adjustment assembly 600 , the lens adjustment assembly 600 is connected to the focusing lens 300 , and the lens adjustment assembly 600 is used to adjust the focusing lens 300 position.

在其中一个实施例中,透镜调节组件600能够驱动聚焦透镜300在第一方向、第二方向以及第三方向上移动,其中,第一方向、第二方向以及第三方向相互垂直。上述的高灵敏度气溶胶单颗粒激光电离装置10通过设置透镜调节组件600驱动聚焦透镜300在第一方向、第二方向以及第三方向上移动,聚焦透镜300可以根据实际需要在第一方向、第二方向以及第三方向上发生移动,以调整位置和角度。In one embodiment, the lens adjustment assembly 600 can drive the focusing lens 300 to move in a first direction, a second direction and a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other. The above-mentioned high-sensitivity aerosol single-particle laser ionization device 10 drives the focusing lens 300 to move in the first direction, the second direction and the third direction by setting the lens adjustment assembly 600. Orientation and third direction movements occur to adjust position and angle.

在其中一个实施例中,请参阅图1所示,透镜调节组件600包括透镜XY移动平台610以及透镜Y轴升降平台620。聚焦透镜300连接于透镜XY移动平台610,透镜XY移动平台610安装于透镜Y轴升降平台620上,透镜XY移动平台610用于驱动聚焦透镜300沿着X轴方向或者Y轴方向移动,透镜Y轴升降平台620用于驱动透镜XY移动平台610以及聚焦透镜300沿着Y轴方向移动。上述的高灵敏度气溶胶单颗粒激光电离装置10通过设置透镜XY移动平台610以及透镜Y轴升降平台620,实现了聚焦透镜300在X轴方向、Y轴方向、Z轴方向上的移动,透镜XY移动平台610以及透镜Y轴升降平台620结构简单,易于设置,取材容易,成本低。In one embodiment, please refer to FIG. 1 , the lens adjustment assembly 600 includes a lens XY moving platform 610 and a lens Y axis lifting platform 620 . The focusing lens 300 is connected to the lens XY moving platform 610, and the lens XY moving platform 610 is mounted on the lens Y-axis lifting platform 620. The lens XY moving platform 610 is used to drive the focusing lens 300 to move along the X-axis direction or the Y-axis direction, and the lens Y The axis lifting platform 620 is used to drive the lens XY moving platform 610 and the focusing lens 300 to move along the Y axis direction. The above-mentioned high-sensitivity aerosol single-particle laser ionization device 10 realizes the movement of the focusing lens 300 in the X-axis direction, the Y-axis direction, and the Z-axis direction by setting the lens XY moving platform 610 and the lens Y-axis lifting platform 620, and the lens XY direction. The moving platform 610 and the lens Y-axis lifting platform 620 are simple in structure, easy to set up, easy to obtain materials, and low cost.

在其中一个实施例中,请参阅图1所示,高灵敏度气溶胶单颗粒激光电离装置10还包括支架组件700,紫外激光反射镜片200安装于支架组件700。In one embodiment, please refer to FIG. 1 , the high-sensitivity aerosol single-particle laser ionization device 10 further includes a bracket assembly 700 , and the ultraviolet laser mirror 200 is mounted on the bracket assembly 700 .

在其中一个实施例中,紫外激光反射镜片200在支架组件700上的位置可调。上述的高灵敏度气溶胶单颗粒激光电离装置10通过设置支架组件700用于安装紫外激光反射镜片200,并且实现了紫外激光反射镜片200在支架组件700上的位置可调,可以根据实际需要进行紫外激光反射镜片200角度和位置的调节,操作方便。In one of the embodiments, the position of the ultraviolet laser mirror 200 on the bracket assembly 700 is adjustable. The above-mentioned high-sensitivity aerosol single-particle laser ionization device 10 is provided with a bracket assembly 700 for installing the ultraviolet laser reflecting lens 200, and the position of the ultraviolet laser reflecting lens 200 on the bracket assembly 700 can be adjusted, and the ultraviolet laser reflecting lens 200 can be adjusted according to actual needs. The adjustment of the angle and position of the laser mirror 200 is easy to operate.

在其中一个实施例中,脉冲激光器100为266nm紫外脉冲激光器100。可理解,在其他实施例中,脉冲激光器100不限于上面,脉冲激光器100还可以根据需要选择其他激光器。In one embodiment, the pulsed laser 100 is a 266 nm ultraviolet pulsed laser 100 . It can be understood that in other embodiments, the pulsed laser 100 is not limited to the above, and the pulsed laser 100 can also select other lasers as required.

在其中一个实施例中,请参阅图2所示,紫外激光反射镜片200分别与脉冲激光器100的出射方向、聚焦透镜300所在的平面呈45°角度,紫外激光反射镜片200能够将脉冲激光器100的产生的脉冲激光呈90°角度反射至聚焦透镜300。In one of the embodiments, as shown in FIG. 2 , the ultraviolet laser reflecting sheet 200 forms an angle of 45° with the output direction of the pulsed laser 100 and the plane where the focusing lens 300 is located. The generated pulsed laser light is reflected to the focusing lens 300 at an angle of 90°.

上述的高灵敏度气溶胶单颗粒激光电离装置10在使用时,脉冲激光器100是产生脉冲激光用来电离气溶胶单颗粒;支架组件700是为了固定紫外激光反射镜片200;紫外激光反射镜片200是为了反射脉冲激光器100发出的激光到聚焦透镜300上;透镜Y轴升降平台620以及透镜XY移动平台610是为了固定聚焦透镜300并调节聚焦透镜300在X轴方向、Y轴方向、Z轴方向上的移动;再反射镜片400是为了将脉冲激光器100发出的脉冲激光聚焦到气溶胶单颗粒之后重新放大之后的放大激光反射到凹面反射镜500上;凹面反射镜500是将通过再反射镜片400反射过来之后的光斑反射并聚焦到气溶胶单颗粒上,上述的脉冲激光器100、紫外激光反射镜片200、聚焦透镜300、再反射镜片400以及凹面反射镜500相互配合实现了对气溶胶单颗粒的前表面以及后表面公同时进行电离,提高了气溶胶单颗粒的电离效率以及电离灵敏度。When the above-mentioned high-sensitivity aerosol single-particle laser ionization device 10 is in use, the pulsed laser 100 is used to generate a pulsed laser to ionize a single aerosol particle; the bracket assembly 700 is for fixing the ultraviolet laser mirror 200; the ultraviolet laser mirror 200 is for The laser light emitted by the pulsed laser 100 is reflected to the focusing lens 300; the lens Y-axis lifting platform 620 and the lens XY moving platform 610 are used to fix the focusing lens 300 and adjust the focusing lens 300 in the X-axis direction, the Y-axis direction, and the Z-axis direction. Move; the re-reflecting mirror 400 is to focus the pulsed laser emitted by the pulsed laser 100 on the single aerosol particle and then reflect the magnified laser after re-amplification to the concave mirror 500; The subsequent light spot is reflected and focused on the single aerosol particle. The above-mentioned pulsed laser 100, ultraviolet laser reflecting lens 200, focusing lens 300, re-reflecting lens 400 and concave reflecting mirror 500 cooperate with each other to realize the front surface of the single aerosol particle. And the rear surface is ionized at the same time, which improves the ionization efficiency and ionization sensitivity of the aerosol single particle.

本实施例还提供了一种质谱仪。This embodiment also provides a mass spectrometer.

一种质谱仪,包括上述的高灵敏度气溶胶单颗粒激光电离装置10。使用上述的高灵敏度气溶胶单颗粒激光电离装置10的质谱仪,能够大幅提高气溶胶单颗粒的电离效率以及电离灵敏度,也提高了质谱仪检测的效率以及灵敏度。A mass spectrometer includes the above-mentioned high-sensitivity aerosol single-particle laser ionization device 10 . The mass spectrometer using the above-mentioned high-sensitivity aerosol single particle laser ionization device 10 can greatly improve the ionization efficiency and ionization sensitivity of aerosol single particles, and also improve the detection efficiency and sensitivity of the mass spectrometer.

上述的质谱仪可以是常用的质谱仪,例如气相色谱-质谱联用仪、液相色谱-质谱联用仪、液相色谱-四器极质谱仪、液相色谱-离子阱质谱仪、液相色谱-飞行时间质谱仪、液相色谱-质谱-质谱联用仪、基质辅助激光解吸飞行时间质谱仪以及傅里叶变换质谱仪等。The above-mentioned mass spectrometer can be a commonly used mass spectrometer, such as gas chromatography-mass spectrometer, liquid chromatography-mass spectrometer, liquid chromatography-quadrupole mass spectrometer, liquid chromatography-ion trap mass spectrometer, liquid chromatography-ion trap mass spectrometer, Chromatography-time-of-flight mass spectrometer, liquid chromatography-mass spectrometry-mass spectrometer, matrix-assisted laser desorption time-of-flight mass spectrometer and Fourier transform mass spectrometer, etc.

上述的高灵敏度气溶胶单颗粒激光电离装置10能够回收激光光斑重新反射聚焦到气溶胶颗粒上电离,提高电离灵敏度的高灵敏度气溶胶单颗粒激光电离装置10。传统的电离结构是266nm紫外脉冲激光器100通过将发出的脉冲激光反射之后通过聚焦透镜300聚焦到气溶胶单颗粒上,但这种结构只能将聚焦光斑聚焦在气溶胶单颗粒的单面,气溶胶单颗粒的背面是无法被激光电离,这就大大影响了单颗粒气溶胶的电离效率,进而影响了电离的灵敏度;而上述的高灵敏度气溶胶单颗粒激光电离装置10增加一个再反射镜片400以及凹面反射镜500,由于凹面反射镜500既有反射激光的作用,同时,还能将反射过来的光斑重新聚焦气溶胶单颗粒的背面,这样,在脉冲激光器100发出的脉冲激光到达气溶胶单颗粒的前面的同时,气溶胶单颗粒的背面也被激光聚焦电离,这将大大提高气溶胶单颗粒的电离效率以及电离灵敏度。The above-mentioned high-sensitivity aerosol single-particle laser ionization device 10 is a high-sensitivity aerosol single-particle laser ionization device 10 that can recover the laser spot and re-reflect and focus it on the aerosol particles for ionization, thereby improving the ionization sensitivity. The traditional ionization structure is that the 266nm ultraviolet pulsed laser 100 reflects the emitted pulsed laser and then focuses it on the single aerosol particle through the focusing lens 300, but this structure can only focus the focusing spot on the single side of the aerosol single particle, and the gas The backside of a single sol particle cannot be ionized by the laser, which greatly affects the ionization efficiency of the single particle aerosol, which in turn affects the sensitivity of ionization; and the above-mentioned high-sensitivity aerosol single particle laser ionization device 10 adds a re-reflecting lens 400 And the concave mirror 500, because the concave mirror 500 not only has the function of reflecting the laser light, but also can refocus the reflected light spot on the back of the aerosol single particle, so that the pulse laser emitted by the pulse laser 100 reaches the aerosol single particle. At the same time as the front of the aerosol particle, the back of the aerosol single particle is also ionized by the laser focus, which will greatly improve the ionization efficiency and ionization sensitivity of the aerosol single particle.

以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity, all possible combinations of the technical features in the above-described embodiments are not described. However, as long as there is no contradiction between the combinations of these technical features, All should be regarded as the scope described in this specification.

以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对本发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only represent several embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as a limitation on the scope of the patent of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can also be made, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the appended claims.

Claims (10)

1.一种高灵敏度气溶胶单颗粒激光电离装置,其特征在于,包括脉冲激光器、紫外激光反射镜片、聚焦透镜、再反射镜片以及凹面反射镜;所述脉冲激光器、所述紫外激光反射镜片、所述聚焦透镜、所述再反射镜片以及所述凹面反射镜沿着光路前进方向依次顺序分布,所述脉冲激光器用于产生脉冲激光以用来电离气溶胶单颗粒,所述紫外激光反射镜片用于反射所述脉冲激光器产生的脉冲激光至所述聚焦透镜,所述聚焦透镜用于聚焦脉冲激光至气溶胶单颗粒的前表面,所述再反射镜片用于反射聚焦到气溶胶单颗粒后的重新放大后的放大激光反射到凹面反射镜,所述凹面反射镜用于将放大激光反射并重新聚焦到气溶胶单颗粒的后表面。1. a high-sensitivity aerosol single-particle laser ionization device, is characterized in that, comprises pulsed laser, ultraviolet laser reflecting lens, focusing lens, re-reflecting lens and concave reflecting mirror; Described pulse laser, described ultraviolet laser reflecting lens, The focusing lens, the re-reflection lens and the concave reflector are sequentially distributed along the advancing direction of the optical path. The pulsed laser is used to generate a pulsed laser to ionize single aerosol particles. In order to reflect the pulsed laser generated by the pulsed laser to the focusing lens, the focusing lens is used to focus the pulsed laser to the front surface of the aerosol single particle, and the re-reflecting mirror is used to reflect the aerosol single particle after focusing on the aerosol single particle. The re-amplified, amplified laser light is reflected to a concave mirror that is used to reflect and refocus the amplified laser light onto the rear surface of the aerosol single particle. 2.根据权利要求1所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述再反射镜片与所述聚焦透镜所在的平面呈45°夹角,所述凹面反射镜与所述聚焦透镜所在的平面呈45°夹角,所述再反射镜片的反射面与所述凹面反射镜的反射面相向设置。2 . The high-sensitivity aerosol single-particle laser ionization device according to claim 1 , wherein the re-reflection mirror and the plane where the focusing lens is located are at an angle of 45°, and the concave mirror and the The plane where the focusing lens is located is at an included angle of 45°, and the reflective surface of the re-reflection lens and the reflective surface of the concave reflector are arranged opposite to each other. 3.根据权利要求1所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述高灵敏度气溶胶单颗粒激光电离装置还包括透镜调节组件,所述透镜调节组件连接于所述聚焦透镜,所述透镜调节组件用于调节所述聚焦透镜的位置。3 . The high-sensitivity aerosol single-particle laser ionization device according to claim 1 , wherein the high-sensitivity aerosol single-particle laser ionization device further comprises a lens adjustment component, and the lens adjustment component is connected to the focusing device. 4 . a lens, and the lens adjustment assembly is used to adjust the position of the focusing lens. 4.根据权利要求3所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述透镜调节组件能够驱动所述聚焦透镜在第一方向、第二方向以及第三方向上移动,其中,第一方向、第二方向以及第三方向相互垂直。4 . The high-sensitivity aerosol single-particle laser ionization device according to claim 3 , wherein the lens adjustment assembly can drive the focusing lens to move in a first direction, a second direction and a third direction, wherein, 5 . The first direction, the second direction and the third direction are perpendicular to each other. 5.根据权利要求3所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述透镜调节组件包括透镜XY移动平台以及透镜Y轴升降平台,所述聚焦透镜连接于所述透镜XY移动平台,所述透镜XY移动平台安装于所述透镜Y轴升降平台上,所述透镜XY移动平台用于驱动所述聚焦透镜沿着X轴方向或者Y轴方向移动,所述透镜Y轴升降平台用于驱动所述透镜XY移动平台以及所述聚焦透镜沿着Y轴方向移动。5 . The high-sensitivity aerosol single-particle laser ionization device according to claim 3 , wherein the lens adjustment assembly comprises a lens XY moving platform and a lens Y-axis lifting platform, and the focusing lens is connected to the lens XY 5 . A moving platform, the lens XY moving platform is installed on the lens Y-axis lifting platform, and the lens XY moving platform is used to drive the focusing lens to move along the X-axis direction or the Y-axis direction, and the lens Y-axis lifting and lowering The stage is used to drive the XY moving stage of the lens and the focusing lens to move along the Y-axis direction. 6.根据权利要求1-5任意一项所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述高灵敏度气溶胶单颗粒激光电离装置还包括支架组件,所述紫外激光反射镜片安装于所述支架组件。6. The high-sensitivity aerosol single-particle laser ionization device according to any one of claims 1-5, wherein the high-sensitivity aerosol single-particle laser ionization device further comprises a bracket assembly, and the ultraviolet laser reflecting lens mounted on the bracket assembly. 7.根据权利要求6所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述紫外激光反射镜片在所述支架组件上的位置可调。7 . The high-sensitivity aerosol single-particle laser ionization device according to claim 6 , wherein the position of the ultraviolet laser reflecting lens on the bracket assembly is adjustable. 8 . 8.根据权利要求1-5、7任意一项所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述脉冲激光器为266nm紫外脉冲激光器。8 . The high-sensitivity aerosol single-particle laser ionization device according to claim 1 , wherein the pulsed laser is a 266 nm ultraviolet pulsed laser. 9 . 9.根据权利要求1-5、7任意一项所述的高灵敏度气溶胶单颗粒激光电离装置,其特征在于,所述紫外激光反射镜片分别与所述脉冲激光器的出射方向、所述聚焦透镜所在的平面呈45°角度,所述紫外激光反射镜片能够将所述脉冲激光器的产生的脉冲激光呈90°角度反射至所述聚焦透镜。9 . The high-sensitivity aerosol single-particle laser ionization device according to any one of claims 1 to 5 and 7, characterized in that, the ultraviolet laser reflecting sheet is respectively related to the outgoing direction of the pulsed laser, the focusing lens The plane where it is located is at an angle of 45°, and the ultraviolet laser reflecting sheet can reflect the pulsed laser light generated by the pulsed laser to the focusing lens at an angle of 90°. 10.一种质谱仪,其特征在于,包括权利要求1-9任意一项所述的高灵敏度气溶胶单颗粒激光电离装置。10. A mass spectrometer, comprising the high-sensitivity aerosol single-particle laser ionization device according to any one of claims 1-9.
CN202110467036.0A 2021-04-28 2021-04-28 High-sensitivity aerosol single-particle laser ionization device and mass spectrometer Pending CN115248246A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115629118A (en) * 2022-11-01 2023-01-20 广东省麦思科学仪器创新研究院 Mass spectrometry device and mass spectrometry method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105957795A (en) * 2016-06-08 2016-09-21 浙江富春江环保科技研究有限公司 Apparatus for realizing beam combination and linear focusing of two laser beams
CN212542353U (en) * 2020-08-28 2021-02-12 广州禾信康源医疗科技有限公司 Laser mass spectrometer and laser optical component

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105957795A (en) * 2016-06-08 2016-09-21 浙江富春江环保科技研究有限公司 Apparatus for realizing beam combination and linear focusing of two laser beams
CN212542353U (en) * 2020-08-28 2021-02-12 广州禾信康源医疗科技有限公司 Laser mass spectrometer and laser optical component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115629118A (en) * 2022-11-01 2023-01-20 广东省麦思科学仪器创新研究院 Mass spectrometry device and mass spectrometry method
CN115629118B (en) * 2022-11-01 2024-05-14 广东省麦思科学仪器创新研究院 Mass spectrometry apparatus and mass spectrometry method

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