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CN115241179A - Chip package structure - Google Patents

Chip package structure Download PDF

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Publication number
CN115241179A
CN115241179A CN202210931101.5A CN202210931101A CN115241179A CN 115241179 A CN115241179 A CN 115241179A CN 202210931101 A CN202210931101 A CN 202210931101A CN 115241179 A CN115241179 A CN 115241179A
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chip
connection side
flip
package structure
control
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雷永庆
冯军
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Mestar Microelectronics Shenzhen Co ltd
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Mestar Microelectronics Shenzhen Co ltd
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    • H10W90/00
    • H10W70/65
    • H10W72/071
    • H10W74/012
    • H10W74/114
    • H10W74/15
    • H10W90/701
    • H10W72/07261
    • H10W90/724

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Abstract

The application discloses chip packaging structure, it includes: a substrate having a connection side and a conductive side for electrically connecting the chip package structure with an external circuit; at least one chip set, the chip set including a control chip and a device chip; wherein the control chip and the device chip are flip-chip bonded, and the control chip or the device chip is flip-chip bonded to the connection side; or the control chip and the device chip are in flip-chip bonding with the connecting side without using wire bonding in the prior art, so that the whole thickness of the chip packaging structure is only determined by the thicknesses of the substrate, the control chip and the device chip, and the whole thickness of the chip packaging structure is reduced.

Description

芯片封装结构Chip package structure

技术领域technical field

本申请涉及芯片封装领域,特别涉及一种芯片封装结构。The present application relates to the field of chip packaging, and in particular, to a chip packaging structure.

背景技术Background technique

现有的芯片封装结构,是将芯片粘接于引线框架。芯片与引线框架皆有数量繁多的导电触点。芯片上的导电触点与引线框架上对应的导电触点引线键合,再通过引线框架上预设的电信号传递路径到芯片封装体的外侧,完成从芯片封装体外侧到芯片封装体内部晶粒直接的电信号传递。In the existing chip packaging structure, the chip is bonded to the lead frame. Both the chip and the lead frame have a large number of conductive contacts. The conductive contacts on the chip are wire-bonded with the corresponding conductive contacts on the lead frame, and then pass the electrical signal transmission path preset on the lead frame to the outside of the chip package to complete the process from the outside of the chip package to the inside of the chip package. direct electrical signal transmission.

引线键合是用金线(或者是铜线,铝线)将芯片的导电触点和引线框架连接起来。在打线时,先让金线在底端形成一个金球。接着将金球压到芯片的触点上,然后通过施压压力或者改变温度来焊接到触点上,这就会在触点上形成一个圆点,再然后将金线拉升,并且移动到引线框架上方完成键合。Wire bonding is to use gold wire (or copper wire, aluminum wire) to connect the conductive contacts of the chip and the lead frame. When hitting the wire, first let the gold wire form a gold ball at the bottom. Then the gold balls are pressed onto the contacts of the chip, and then soldered to the contacts by applying pressure or changing the temperature, which forms a dot on the contacts, and then the gold wire is pulled up and moved to the Bonding is done above the lead frame.

由于金线在芯片和引线框架之间呈弯折状态设置,并于芯片上方发生弯折,从而造成封装后芯片结构的厚度是引线框架的底面和金线最高点之间的距离,如此导致封装后的芯片厚度较厚,不利于芯片的轻薄化。Since the gold wire is arranged in a bent state between the chip and the lead frame, and is bent above the chip, the thickness of the chip structure after packaging is the distance between the bottom surface of the lead frame and the highest point of the gold wire, which leads to packaging The thickness of the latter chip is thicker, which is not conducive to the thinning of the chip.

发明内容SUMMARY OF THE INVENTION

本申请要解决的技术问题是提供一种芯片封装结构,能够使封装后的芯片厚度更小。The technical problem to be solved by the present application is to provide a chip packaging structure, which can make the thickness of the packaged chip smaller.

为解决上述技术问题,本申请采用的技术方案是:In order to solve the above-mentioned technical problems, the technical scheme adopted in this application is:

一种芯片封装结构,其包括:A chip packaging structure, comprising:

基板,其具有连接侧以及用于将所述芯片封装结构与外部电路电信号连接的导电侧;a substrate having a connection side and a conductive side for electrically connecting the chip package structure with an external circuit;

至少一芯片组,所述芯片组包括控制芯片和器件芯片;at least one chipset, the chipset includes a control chip and a device chip;

其中,所述控制芯片和所述器件芯片倒装焊接,所述控制芯片或所述器件芯片与所述连接侧倒装焊接;Wherein, the control chip and the device chip are flip-chip welded, and the control chip or the device chip is flip-chip welded to the connection side;

或者,所述控制芯片与所述器件芯片均与所述连接侧倒装焊接。Alternatively, both the control chip and the device chip are flip-chip welded to the connection side.

根据本申请一实施方式,所述连接侧凸设有与所述芯片组邻近的止挡凸部。According to an embodiment of the present application, a blocking protrusion adjacent to the chip set is protruded on the connection side.

根据本申请一实施方式,所述止挡凸部于所述连接侧对称设置,所述芯片组设置在所述止挡凸部之间,且所述止挡凸部与所述芯片组之间具有间隙。According to an embodiment of the present application, the blocking protrusions are symmetrically arranged on the connection side, the chip set is disposed between the blocking protrusions, and between the blocking protrusions and the chip set with gaps.

根据本申请一实施方式;所述止挡凸部被配置为将所述芯片组包围的边框。According to an embodiment of the present application, the blocking protrusion is configured as a frame surrounding the chip set.

根据本申请一实施方式,所述基板还包括与所述连接侧连接的侧端面,所述止挡凸部在远离所述芯片组的外侧面与所述侧端面平齐。According to an embodiment of the present application, the substrate further includes a side end surface connected to the connection side, and the stop protrusion is flush with the side end surface at an outer surface away from the chip set.

根据本申请一实施方式,所述止挡凸部的厚度不小于所述芯片组中最小厚度的一半。According to an embodiment of the present application, the thickness of the blocking protrusion is not less than half of the minimum thickness in the chip set.

根据本申请一实施方式,所述基板还设有孔部,所述孔部被配置为开设于所述连接侧的盲孔,或者,所述孔部被配置为贯穿所述连接侧和所述导电侧的通孔。According to an embodiment of the present application, the substrate is further provided with a hole portion, and the hole portion is configured as a blind hole opened on the connection side, or the hole portion is configured to penetrate through the connection side and the connection side. Vias on the conductive side.

根据本申请一实施方式,每一所述芯片组中面向所述连接侧的所述控制芯片或所述器件芯片容置在所述孔部内。According to an embodiment of the present application, the control chip or the device chip facing the connection side in each of the chip sets is accommodated in the hole portion.

根据本申请一实施方式,所述控制芯片与所述连接侧倒装焊接,所述器件芯片倒装焊接在所述控制芯片面向所述连接侧的一侧,且所述器件芯片容置在所述孔部内。According to an embodiment of the present application, the control chip is flip-chip bonded to the connection side, the device chip is flip-chip bonded to the side of the control chip facing the connection side, and the device chip is accommodated at the connection side. inside the hole.

根据本申请一实施方式,所述控制芯片与所述连接侧倒装焊接,所述器件芯片倒装焊接在所述控制芯片远离所述连接侧的一侧。According to an embodiment of the present application, the control chip is flip-chip bonded to the connection side, and the device chip is flip-chip bonded to a side of the control chip away from the connection side.

本申请的有益效果是:本申请提供的芯片封装结构,芯片组中的控制芯片和器件芯片倒装焊接,控制芯片或器件芯片与连接侧倒装焊接;或者,控制芯片与器件芯片均与连接侧倒装焊接,而无需使用现有技术中的引线键合,从而可以取消现有技术中的引线,以使芯片封装结构的整体厚度仅由基板、控制芯片、器件芯片的厚度决定,从而压缩了芯片封装结构的整体厚度,以顺应芯片轻薄化的发展趋势。The beneficial effects of the present application are: the chip package structure provided by the present application, the control chip and the device chip in the chip set are flip-chip welded, and the control chip or the device chip is flip-chip welded with the connection side; or, both the control chip and the device chip are connected to Side flip-chip bonding without using wire bonding in the prior art, so that the wires in the prior art can be eliminated, so that the overall thickness of the chip package structure is only determined by the thickness of the substrate, the control chip, and the device chip, thereby compressing The overall thickness of the chip package structure is adjusted to comply with the development trend of thin and light chips.

附图说明Description of drawings

为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图,其中:In order to illustrate the technical solutions in the embodiments of the present application more clearly, the following briefly introduces the drawings that are used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, under the premise of no creative work, other drawings can also be obtained from these drawings, wherein:

图1是本申请提供的芯片封装结构的第一实施例的结构示意图;FIG. 1 is a schematic structural diagram of a first embodiment of a chip packaging structure provided by the present application;

图2是本申请提供的芯片封装结构的第二实施例的结构示意图;FIG. 2 is a schematic structural diagram of a second embodiment of the chip packaging structure provided by the present application;

图3是本申请提供的芯片封装结构的第三实施例的结构示意图;3 is a schematic structural diagram of a third embodiment of the chip packaging structure provided by the present application;

图4是本申请提供的芯片封装结构的第四实施例的结构示意图;4 is a schematic structural diagram of a fourth embodiment of the chip packaging structure provided by the present application;

图5是本申请提供的芯片封装结构的第五实施例的结构示意图;5 is a schematic structural diagram of a fifth embodiment of the chip packaging structure provided by the present application;

图6是图5芯片封装结构的仰视示意图。FIG. 6 is a schematic bottom view of the chip package structure of FIG. 5 .

具体实施方式Detailed ways

下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅是本申请的一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

在本文中提及“实施例”意味着,结合实施例描述的特定特征、结构或特性可以包含在本申请的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例,也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是,本文所描述的实施例可以与其它实施例相结合。Reference herein to an "embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor a separate or alternative embodiment that is mutually exclusive of other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

CMOS是Complementary Metal Oxide Semiconductor(互补金属氧化物半导体)的缩写,它是指制造大规模集成电路芯片用的一种技术或用这种技术制造出来的芯片。CMOS is the abbreviation of Complementary Metal Oxide Semiconductor (Complementary Metal Oxide Semiconductor), which refers to a technology used in the manufacture of large-scale integrated circuit chips or chips made by this technology.

MEMS是Micro-Electro-Mechanical System(微机电系统)的缩写,也叫做微电子机械系统、微系统、微机械等。MEMS is the abbreviation of Micro-Electro-Mechanical System (Micro-Electro-Mechanical System), also known as micro-electromechanical system, micro-system, micro-machine, etc.

请参阅图1至图4,图1是本申请提供的芯片封装结构的第一实施例的结构示意图;图2至图4是本申请提供的芯片封装结构的具体实施例。本申请的一方面,提供了一种芯片封装结构100,该芯片封装结构100包括基板10以及设置在基板10上的至少一芯片组11。芯片组11可为多个,可以根据实际需求进行选择。Please refer to FIGS. 1 to 4 . FIG. 1 is a schematic structural diagram of a first embodiment of the chip packaging structure provided by the present application; FIGS. 2 to 4 are specific embodiments of the chip packaging structure provided by the present application. In one aspect of the present application, a chip package structure 100 is provided. The chip package structure 100 includes a substrate 10 and at least one chip set 11 disposed on the substrate 10 . There may be multiple chipsets 11, which can be selected according to actual needs.

基板10具有连接侧10a,及用于将芯片封装结构100于外部电路电信号连接的导电侧10b。导电侧10b与连接侧10a间隔相对设置,当然,导电侧10b与连接侧10a也可以相邻设置。其中,连接侧10a用于与芯片组11连接。可以理解的是,基板10可用于承载芯片组11,可以为PCB板,也可以为硅基板,在此不做具体的限定。The substrate 10 has a connection side 10a and a conductive side 10b for connecting the chip package structure 100 with an electrical signal to an external circuit. The conductive side 10b and the connection side 10a are arranged opposite to each other at an interval. Of course, the conductive side 10b and the connection side 10a can also be arranged adjacent to each other. The connection side 10a is used for connecting with the chipset 11 . It can be understood that the substrate 10 can be used to carry the chipset 11, and can be a PCB board or a silicon substrate, which is not specifically limited herein.

芯片组11包括控制芯片12(CMOS芯片)和器件芯片13(MEMS芯片),其中,控制芯片12和器件芯片13倒装焊接(Flip Chip),控制芯片12与连接侧10a倒装焊接。The chip set 11 includes a control chip 12 (CMOS chip) and a device chip 13 (MEMS chip), wherein the control chip 12 and the device chip 13 are flip-chip bonded, and the control chip 12 is flip-chip bonded to the connection side 10a.

需要说明的是,本申请提供的芯片封装结构100中,也可以是器件芯片13与连接侧10a倒装焊接;或者,控制芯片12与器件芯片13均与连接侧10a倒装焊接。而上述图2至图6仅给出了本申请提供的芯片封装结构100的部分实施例,具体地,仅仅是控制芯片12与连接侧10a倒装焊接的部分实施例,其目的是为了以控制芯片12与连接侧10a倒装焊接为例,以便直观讲述本申请提供的芯片封装结构100在该情况下的具体结构。这些附图不应该作为限制本申请保护的范围。It should be noted that, in the chip package structure 100 provided in the present application, the device chip 13 and the connection side 10a may also be flip-chip welded; or, the control chip 12 and the device chip 13 may be flip-chip welded to the connection side 10a. 2 to 6 only show some embodiments of the chip package structure 100 provided by the present application, specifically, only some embodiments of flip-chip welding of the control chip 12 and the connection side 10a, the purpose of which is to control the The chip 12 and the connection side 10a are flip-chip welded as an example, so as to intuitively describe the specific structure of the chip package structure 100 provided in this application in this case. These drawings should not be taken as limiting the scope of the protection of this application.

可以理解的是,当一芯片组11中包括多个器件芯片13和控制芯片12焊接时,在一个实施例中,可以是先分别将多个器件芯片13堆叠焊接成一体形成器件芯片组;多个控制芯片12堆叠焊接成一体形成控制芯片组;之后再将器件芯片组最外侧的器件芯片13和控制芯片组最外侧的控制芯片12倒装焊接。在另外的实施例中,也可以是将多个器件芯片13和控制芯片12平铺。It can be understood that when a chip set 11 includes a plurality of device chips 13 and a control chip 12 to be welded, in one embodiment, the plurality of device chips 13 may be stacked and welded to form an integrated device chip set; The control chips 12 are stacked and welded together to form a control chip group; then the outermost device chip 13 of the device chip group and the outermost control chip 12 of the control chip group are flip-chip welded. In another embodiment, a plurality of device chips 13 and control chips 12 may also be tiled.

由此,本申请的芯片封装结构100中的控制芯片12与器件芯片13倒装焊接,器件芯片13和/或控制芯片12与基板10之间也采用倒装焊接,从而使得器件芯片13和/或控制芯片12焊接在连接侧10a,并与基板10电信号连接。因此,通过基板10的导电侧10b与外部电路电信号连接,即可使得器件芯片13和/或控制芯片12与外部电路电信号连接。因此,本申请的芯片封装结构100中的器件芯片13和/或控制芯片12与基板10只需要进行倒装焊接即可,而无需使用现有技术中的引线键合,从而可以取消现有技术中的引线,以使芯片封装结构100的整体厚度仅由基板10、控制芯片12、器件芯片13的厚度决定,从而压缩了芯片封装结构100的整体厚度,以顺应芯片轻薄化的发展趋势。Therefore, the control chip 12 and the device chip 13 in the chip package structure 100 of the present application are flip-chip welded, and the device chip 13 and/or the control chip 12 and the substrate 10 are also flip-chip welded, so that the device chip 13 and/or the substrate 10 are also flip-chip welded. Or the control chip 12 is soldered on the connection side 10a and connected with the substrate 10 by electrical signals. Therefore, the device chip 13 and/or the control chip 12 can be electrically connected to the external circuit through the electrical signal connection between the conductive side 10b of the substrate 10 and the external circuit. Therefore, the device chip 13 and/or the control chip 12 and the substrate 10 in the chip package structure 100 of the present application only need to be flip-chip bonded without using wire bonding in the prior art, so that the prior art can be eliminated so that the overall thickness of the chip package structure 100 is only determined by the thicknesses of the substrate 10 , the control chip 12 , and the device chip 13 , thereby compressing the overall thickness of the chip package structure 100 to conform to the trend of thinning chips.

请参照图1,在第一实施例中,芯片封装结构100包括一组芯片组11,该芯片组11由一控制芯片12和一器件芯片13。控制芯片12与基板10的连接侧10a倒装焊接。器件芯片13与控制芯片12倒装焊接,并焊接在远离连接侧10a的一侧。倒装焊接可以通过焊点14连接实现连接件之间的电信号连接和机械连接。其中,控制芯片12的两侧分别是器件芯片13与基板10,可避免基板10对器件芯片13施加各种限制,降低了器件芯片13尺寸及结构的优化难度,提升了其优化空间。Referring to FIG. 1 , in the first embodiment, the chip package structure 100 includes a chip set 11 , and the chip set 11 includes a control chip 12 and a device chip 13 . The control chip 12 is flip-chip bonded to the connection side 10 a of the substrate 10 . The device chip 13 is flip-chip bonded to the control chip 12, and is bonded to the side away from the connection side 10a. Flip-chip bonding can realize electrical signal connection and mechanical connection between the connectors through the connection of the solder joints 14 . The two sides of the control chip 12 are the device chip 13 and the substrate 10 respectively, which can avoid the substrate 10 from imposing various restrictions on the device chip 13, reduce the difficulty of optimizing the size and structure of the device chip 13, and improve its optimization space.

基板10还包括与连接侧10a连接的侧端面10c,侧端面10c用于限定连接侧10a的大小。为了对芯片进行更好的保护,芯片组11倒装焊接在基板10的连接侧10a时芯片组11的侧端不超过侧端面10c所在平面限定的空间,并且可进一步横向压缩芯片封装结构100的尺寸,提升了其优化空间。The substrate 10 further includes a side end face 10c connected to the connection side 10a, and the side end face 10c is used to define the size of the connection side 10a. In order to better protect the chip, when the chip set 11 is flip-chip welded on the connection side 10a of the substrate 10, the side end of the chip set 11 does not exceed the space defined by the plane where the side end face 10c is located, and can further compress the chip package structure 100 laterally. size, improving its optimization space.

需要说明的是,芯片组11的侧端不超过侧端面10c所在平面限定的空间,主要包括如下几种情况:It should be noted that the side end of the chipset 11 does not exceed the space defined by the plane where the side end face 10c is located, which mainly includes the following situations:

控制芯片12在器件芯片13上的投影覆盖器件芯片13,控制芯片12在连接侧10a上的投影在连接侧10a内。也即控制芯片12的四周小于等于连接侧10a的四周,器件芯片13的四周小于等于器件芯片13的四周。例如控制芯片12的四周宽于器件芯片13,并且控制芯片12与基板10的侧端面10c平齐。The projection of the control chip 12 on the device chip 13 covers the device chip 13, and the projection of the control chip 12 on the connection side 10a is in the connection side 10a. That is, the circumference of the control chip 12 is less than or equal to the circumference of the connection side 10 a , and the circumference of the device chip 13 is less than or equal to the circumference of the device chip 13 . For example, the periphery of the control chip 12 is wider than the device chip 13 , and the control chip 12 is flush with the side end surface 10 c of the substrate 10 .

控制芯片12在器件芯片13上的投影在器件芯片13内,器件芯片13在连接侧10a上的投影在连接侧10a内。也即器件芯片13的四周小于连接侧10a的四周,控制芯片12的四周小于控制芯片12的四周。The projection of the control chip 12 on the device chip 13 is in the device chip 13, and the projection of the device chip 13 on the connection side 10a is in the connection side 10a. That is, the circumference of the device chip 13 is smaller than the circumference of the connection side 10 a , and the circumference of the control chip 12 is smaller than the circumference of the control chip 12 .

可以理解的,在其它实施例中,本申请提供的芯片封装结构100,当器件芯片13与连接侧10a倒装焊接;或者,控制芯片12与器件芯片13均与连接侧10a倒装焊接时;芯片组11和基板10也存在上述的多种尺寸关系。It can be understood that, in other embodiments, the chip package structure 100 provided by the present application, when the device chip 13 is flip-chip welded to the connection side 10a; or, when the control chip 12 and the device chip 13 are both flip-chip welded to the connection side 10a; The chip set 11 and the substrate 10 also have various dimensional relationships as described above.

具体的,在一些具体的实施例中,如图1所示,基板10还设有孔部10d,更为具体的,孔部10d为通孔,也即孔部10d不仅贯穿连接侧10a,还贯穿了与连接侧10a相对设置的导电侧10b。孔部10d被配置为通孔,可起到对芯片组11进行散热之目的。Specifically, in some specific embodiments, as shown in FIG. 1 , the substrate 10 is further provided with a hole portion 10d. More specifically, the hole portion 10d is a through hole, that is, the hole portion 10d not only penetrates through the connection side 10a, but also A conductive side 10b arranged opposite to the connection side 10a is penetrated. The hole portion 10 d is configured as a through hole, and can serve the purpose of heat dissipation of the chip set 11 .

为了防止控制芯片12和/或器件芯片13在焊接到基板10时,焊料从孔部10d渗漏至导电侧10b而引发短路问题,孔部10d也可被配置为盲孔,也即,孔部10d贯穿连接侧10a并向导电侧10b延伸,但并未贯穿导电侧10b。优选的,孔部10d的设置位置与器件芯片13正对应,其孔部10d的设置不妨碍芯片与连接侧10a的倒装焊接。In order to prevent the leakage of the solder from the hole portion 10d to the conductive side 10b when the control chip 12 and/or the device chip 13 are soldered to the substrate 10 and cause a short circuit problem, the hole portion 10d can also be configured as a blind hole, that is, a hole portion 10d extends through the connection side 10a and toward the conductive side 10b, but does not penetrate the conductive side 10b. Preferably, the position of the hole portion 10d is directly corresponding to the device chip 13, and the arrangement of the hole portion 10d does not hinder the flip-chip bonding between the chip and the connection side 10a.

可以理解的,在其它实施例中,本申请提供的芯片封装结构100,当器件芯片13与连接侧10a倒装焊接;或者,控制芯片12与器件芯片13均与连接侧10a倒装焊接;或者,多个芯片组11倒装焊接在连接侧10a时;为了散热,基板10也可以设置上述相同结构的孔部10d与芯片对应。It can be understood that, in other embodiments, in the chip package structure 100 provided by the present application, when the device chip 13 is flip-chip welded to the connection side 10a; or, the control chip 12 and the device chip 13 are both flip-chip welded to the connection side 10a; or , when a plurality of chip sets 11 are flip-chip soldered on the connection side 10a; in order to dissipate heat, the substrate 10 may also be provided with holes 10d of the same structure as described above corresponding to the chips.

参阅图2,图2是本申请提供的芯片封装结构100的第二实施例的结构示意图。为了进一步保护倒装焊接在基板10的连接侧10a的芯片组11不受到撞击,本申请提供的芯片封装结构100,在第二实施例中除了包括上述第一实施例中的结构之外,还包括在基板10上设置的其它保护结构。Referring to FIG. 2 , FIG. 2 is a schematic structural diagram of a second embodiment of the chip packaging structure 100 provided by the present application. In order to further protect the chip set 11 flip-chip soldered on the connection side 10a of the substrate 10 from being impacted, the chip package structure 100 provided by the present application, in addition to the structure in the first embodiment, in the second embodiment, also Other protective structures provided on the substrate 10 are included.

具体地,基板10还包括凸设在连接侧10a的止挡凸部15,其中一种结构,止挡凸部15在连接侧10a上沿着对称位置设置,并将芯片组11环绕其中。止挡凸部15与芯片组11的侧端之间具有间隙以便于芯片组11与连接侧10a的连接。将芯片组11环绕的止挡凸部15可以防止其它部件对芯片的撞击,阻止有害材料从侧方进入。另外,在将芯片组11倒装焊接至基板10的连接侧10a时,焊料遇到止挡凸部15后会有所堆积,从而还可以避免虚焊的问题。Specifically, the substrate 10 further includes a stopper protrusion 15 protruding on the connection side 10a. In one structure, the stopper protrusion 15 is disposed along a symmetrical position on the connection side 10a, and surrounds the chipset 11 therein. There is a gap between the blocking protrusion 15 and the side end of the chip set 11 to facilitate the connection of the chip set 11 and the connection side 10a. The blocking protrusions 15 surrounding the chip set 11 can prevent other components from impacting the chip, and prevent harmful materials from entering from the side. In addition, when the chip set 11 is flip-chip soldered to the connection side 10 a of the substrate 10 , the solder will accumulate after encountering the stopper protrusion 15 , so that the problem of virtual soldering can also be avoided.

具体的,在一些具体的实施例中,止挡凸部15在连接侧10a上沿着对称位置设置,可以是设置一对对称的止挡凸部15,也可以是多对对称的止挡凸部15,多对止挡凸部15环绕连接侧10a的侧边。一对止挡凸部15和多对止挡凸部15均可间隔设置形成一个非封闭的环形结构。Specifically, in some specific embodiments, the stop protrusions 15 are provided along the symmetrical positions on the connection side 10a, which may be a pair of symmetrical stop protrusions 15, or multiple pairs of symmetrical stop protrusions. A plurality of pairs of stop protrusions 15 surround the side edge of the connecting side 10a. A pair of blocking protrusions 15 and a plurality of pairs of blocking protrusions 15 can be arranged at intervals to form a non-closed annular structure.

在另外一些具体的实施例中,止挡凸部15也可形成一个首尾连接的边框,边框环绕连接侧10a的侧边。止挡凸部15的设置具体可根据实际情况进行选择,边框可以是矩形、圆形、椭圆形等形状,在此不做具体的限定。In some other specific embodiments, the blocking protrusion 15 can also form a frame connected end to end, and the frame surrounds the side of the connecting side 10a. The setting of the blocking protrusions 15 can be specifically selected according to the actual situation, and the frame can be in the shape of a rectangle, a circle, an ellipse, etc., which is not specifically limited here.

在一些更为具体的实施例中,止挡凸部15在远离芯片组11件的外侧面与侧端面10c位于同一个平面上。也即止挡凸部15的外侧面与基板10的侧端面10c齐平。In some more specific embodiments, the outer surface of the blocking protrusion 15 and the side end surface 10c away from the chip set 11 are located on the same plane. That is, the outer side surface of the blocking protrusion 15 is flush with the side end surface 10 c of the base plate 10 .

如图2所示,控制芯片12与基板10的连接侧10a倒装焊接。器件芯片13与控制芯片12倒装焊接,并焊接在远离连接侧10a的一侧。倒装焊接可以通过焊点14连接实现连接件之间的电信号连接和机械连接。止挡凸部15被配置为一矩形边框,该止挡凸部15凸设于连接侧10a并将控制芯片12包围。控制芯片12的外侧面与止挡凸部15的内侧面之间留有间隙,以使得控制芯片12能够将热量散发。止挡凸部15的外侧面与基板10的侧端面10c齐平。As shown in FIG. 2 , the control chip 12 is flip-chip bonded to the connection side 10 a of the substrate 10 . The device chip 13 is flip-chip bonded to the control chip 12, and is bonded to the side away from the connection side 10a. Flip-chip bonding can realize electrical signal connection and mechanical connection between the connectors through the connection of the solder joints 14 . The blocking protrusion 15 is configured as a rectangular frame, and the blocking protrusion 15 is protruded from the connection side 10 a and surrounds the control chip 12 . A gap is left between the outer side surface of the control chip 12 and the inner side surface of the blocking protrusion 15 so that the control chip 12 can dissipate heat. The outer side surface of the stopper protrusion 15 is flush with the side end surface 10 c of the base plate 10 .

止挡凸部15对控制芯片12起到了保护的作用,阻止有害材料从侧方接触控制芯片12,或者有害材料对控制芯片12进行撞击。另外,在将控制芯片12焊接至基板10的连接侧10a时,焊料遇到止挡凸部15后会有所堆积,从而可避免虚焊的问题。The blocking protrusions 15 play a role in protecting the control chip 12 , preventing harmful materials from contacting the control chip 12 from the side, or the harmful materials colliding with the control chip 12 . In addition, when the control chip 12 is soldered to the connection side 10 a of the substrate 10 , the solder will accumulate after encountering the stopper protrusion 15 , so that the problem of virtual soldering can be avoided.

可以理解的是,为了更好的达到止挡凸部15的保护作用,止挡凸部15在凸设方向上上需要具有一定的厚度,具体地,举例来说,止挡凸部15的厚度不小于芯片组11中最小厚度的二分之一,或不小于与连接侧10a倒装焊接的芯片的厚度的二分之一。例如,芯片组11包括一相互倒装焊接的控制芯片12和器件芯片13,控制芯片12倒装焊接在连接侧10a,优选的止挡凸部15的厚度与控制芯片12的厚度相等。It can be understood that, in order to better achieve the protective effect of the blocking protrusions 15 , the blocking protrusions 15 need to have a certain thickness in the protruding direction, specifically, for example, the thickness of the blocking protrusions 15 Not less than half of the minimum thickness in the chip set 11, or not less than half of the thickness of the chip flip-chip bonded to the connection side 10a. For example, the chip set 11 includes a control chip 12 and a device chip 13 that are flip-chip bonded to each other, and the control chip 12 is flip-chip bonded to the connection side 10 a .

可以理解的,在其它实施例中,本申请提供的芯片封装结构100,当器件芯片13与连接侧10a倒装焊接;或者,控制芯片12与器件芯片13均与连接侧10a倒装焊接时。此时,止挡凸部15在凸设方向上的厚度不小于器件芯片13的二分之一,优选的,与器件芯片13的厚度相等;或者止挡凸部15在凸设方向上的厚度至少不小于平铺的芯片的平均厚度,优选的等于平铺芯片的最大厚度。需要说明的是,在连接侧10a上设置有止挡凸部15时,与连接侧10a直接倒装焊接的芯片的外侧面与止挡凸部15之间具有一定的间隙,而叠设芯片的尺寸与止挡凸部15的厚度有关。例如在图2中,止挡凸部15与控制芯片12等厚,器件芯片13的四周可小于控制芯片12的四周,也可大于等于控制芯片12的四周。It can be understood that, in other embodiments, the chip package structure 100 provided by the present application is when the device chip 13 is flip-chip welded to the connection side 10a; or, the control chip 12 and the device chip 13 are both flip-chip welded to the connection side 10a. At this time, the thickness of the blocking protrusions 15 in the protruding direction is not less than half of the device chip 13, preferably, the thickness of the device chip 13 is equal to that of the device chip 13; or the thickness of the blocking protrusions 15 in the protruding direction At least not less than the average thickness of the tiled chips, preferably equal to the maximum thickness of the tiled chips. It should be noted that, when the connection side 10a is provided with the stopper protrusion 15, there is a certain gap between the outer side surface of the chip directly flip-chip welded with the connection side 10a and the stopper protrusion 15, and the stacking chip has a certain gap. The size is related to the thickness of the stopper projection 15 . For example, in FIG. 2 , the blocking protrusions 15 and the control chip 12 have the same thickness, and the circumference of the device chip 13 may be smaller than the circumference of the control chip 12 or greater than or equal to the circumference of the control chip 12 .

请结合参照图3-5,在第三实施例中,控制芯片12与连接侧10a倒装焊接,器件芯片13与控制芯片12倒装焊接,器件芯片13是倒装焊接在控制芯片12面向基板10的一侧。也即基板10与器件芯片13共同位于控制芯片12的同一侧。除此之外,本申请提供的第三实施例中的芯片封装结构100与上述在第一实施例中的芯片封装结构100相同。3-5, in the third embodiment, the control chip 12 is flip-chip welded to the connection side 10a, the device chip 13 is flip-chip welded to the control chip 12, and the device chip 13 is flip-chip welded to the control chip 12 facing the substrate 10 side. That is, the substrate 10 and the device chip 13 are co-located on the same side of the control chip 12 . Besides, the chip package structure 100 in the third embodiment provided by the present application is the same as the chip package structure 100 in the first embodiment described above.

为了使芯片封装结构100的厚度进一步减小。在第三实施例中,器件芯片13容置在孔部10d内。具体的,器件芯片13置于孔部10d内,器件芯片13的外侧面与孔部10d的内侧面留有间隙,且容置在孔部10d中的器件芯片13不超过导电侧10b限定的平面。In order to further reduce the thickness of the chip package structure 100 . In the third embodiment, the device chip 13 is accommodated in the hole portion 10d. Specifically, the device chip 13 is placed in the hole portion 10d, and there is a gap between the outer side surface of the device chip 13 and the inner side surface of the hole portion 10d, and the device chip 13 accommodated in the hole portion 10d does not exceed the plane defined by the conductive side 10b. .

由此,芯片封装结构100的整体厚度可仅由基板10的厚度和控制芯片12的厚度决定,也就是说,芯片封装结构100的整体厚度为基板10的厚度和控制芯片12的厚度之和,从而进一步压缩芯片封装结构100的整体厚度。另外,由于基板10与器件芯片13共同位于控制芯片12的同一侧,可在控制芯片12的一侧上进行倒装焊接,可有效降低控制芯片12的加工工艺难度,避免了对控制芯片12使用双面电导通的复杂工艺,同时降低了控制芯片12的制造成本。Therefore, the overall thickness of the chip package structure 100 can only be determined by the thickness of the substrate 10 and the thickness of the control chip 12 , that is, the overall thickness of the chip package structure 100 is the sum of the thickness of the substrate 10 and the thickness of the control chip 12 , Thus, the overall thickness of the chip package structure 100 is further compressed. In addition, since the substrate 10 and the device chip 13 are co-located on the same side of the control chip 12 , flip-chip welding can be performed on one side of the control chip 12 , which can effectively reduce the processing difficulty of the control chip 12 and avoid the use of the control chip 12 The complex process of double-sided electrical conduction reduces the manufacturing cost of the control chip 12 at the same time.

可以理解的,在其它实施例中,本申请提供的芯片封装结构100,当器件芯片13与连接侧10a倒装焊接;此时控制芯片12可容置于孔部10d中;或根据孔部10d的深度每一芯片组11可在孔部10d中容置多个芯片。也即每一芯片组11中的用于连接的芯片与连接侧10a连接后,设置在连接芯片并面向基板10一侧的控制芯片12和/或器件芯片13可以容置在孔部10d中,从而进一步减小芯片封装结构100的整体厚度。It can be understood that, in other embodiments, in the chip package structure 100 provided by the present application, when the device chip 13 is flip-chip welded with the connection side 10a; at this time, the control chip 12 can be accommodated in the hole 10d; or according to the hole 10d Each chip group 11 can accommodate a plurality of chips in the hole portion 10d with a depth of . That is, after the chip for connection in each chip set 11 is connected to the connection side 10a, the control chip 12 and/or the device chip 13 disposed on the side of the connection chip and facing the substrate 10 can be accommodated in the hole portion 10d, Thus, the overall thickness of the chip package structure 100 is further reduced.

请结合参照图4和图5,第四实施例,与第三实施例的区别在于在连接侧10a凸设有止挡凸部15。其中,止挡凸部15的设置与第二实施例相同。由此即可实现止挡凸部15对芯片组11中芯片的保护,又可达到孔部10d容置作用进一步减小芯片封装结构100的厚度,还可利用孔部10d进行散热。Please refer to FIG. 4 and FIG. 5 in combination. The difference between the fourth embodiment and the third embodiment is that a stop protrusion 15 is protruded on the connecting side 10a. The arrangement of the stop protrusion 15 is the same as that of the second embodiment. In this way, the protection of the chips in the chip set 11 by the blocking protrusions 15 can be achieved, and the accommodating function of the holes 10d can be achieved to further reduce the thickness of the chip package structure 100, and the holes 10d can be used for heat dissipation.

可以理解的是,在其它实施例中,本申请提供的芯片封装结构100,当器件芯片13与连接侧10a倒装焊接;或者,控制芯片12与器件芯片13均与连接侧10a倒装焊接;或者,多个芯片组11倒装焊接在连接侧10a时;基板10也可以设置上述相同结构与芯片对应,综合利用倒装焊接、止挡凸部15及孔部10d的特点及优点的来组合以对芯片封装结构100改进。It can be understood that, in other embodiments, in the chip package structure 100 provided by the present application, when the device chip 13 is flip-chip welded to the connection side 10a; or, the control chip 12 and the device chip 13 are both flip-chip welded to the connection side 10a; Alternatively, when a plurality of chip sets 11 are flip-chip welded on the connection side 10a; the substrate 10 can also be provided with the same structure as described above to correspond to the chips, and the features and advantages of flip-chip bonding, the stopper protrusion 15 and the hole 10d can be combined comprehensively. In order to improve the chip package structure 100 .

请结合参照图5,在第五实施例中,与第四实施例的区别在于孔部10d可被配置为开设在连接侧10a的盲孔,也即,孔部10d贯穿连接侧10a并向导电侧10b延伸,但并未贯穿导电侧10b。如此,孔部10d与导电侧10b之间存在隔离,可以有效避免控制芯片12和/或器件芯片13在焊接到基板10时,焊料从孔部10d渗漏至导电侧10b而引发短路问题。Please refer to FIG. 5 , in the fifth embodiment, the difference from the fourth embodiment is that the hole 10d can be configured as a blind hole opened on the connection side 10a, that is, the hole 10d penetrates through the connection side 10a and conducts electricity. Side 10b extends but does not penetrate conductive side 10b. In this way, there is isolation between the hole 10d and the conductive side 10b, which can effectively avoid the problem of short circuit caused by leakage of solder from the hole 10d to the conductive side 10b when the control chip 12 and/or the device chip 13 are soldered to the substrate 10 .

可以理解的是,在其它实施例中,本申请提供的芯片封装结构100,当器件芯片13与连接侧10a倒装焊接;或者,控制芯片12与器件芯片13均与连接侧10a倒装焊接;或者,多个芯片组11倒装焊接在连接侧10a时;基板10也可以设置上述相同结构与芯片对应。It can be understood that, in other embodiments, in the chip package structure 100 provided by the present application, when the device chip 13 is flip-chip welded to the connection side 10a; or, the control chip 12 and the device chip 13 are both flip-chip welded to the connection side 10a; Alternatively, when a plurality of chip sets 11 are flip-chip welded on the connection side 10a; the substrate 10 may also be provided with the same structure as described above to correspond to the chips.

参阅图6,在一些具体的实施例中,基板10被配置为硅基板,连接侧10a设置有第一接触部(图中未示),第一接触部通过倒装焊接的焊点14与芯片组11电连接。导电侧10b设置有第二接触部10e,第二接触部10e与外部电路进行电连接。第一接触部与第二接触部10e电信号连接。Referring to FIG. 6 , in some specific embodiments, the substrate 10 is configured as a silicon substrate, and the connection side 10a is provided with a first contact portion (not shown in the figure), and the first contact portion is connected to the chip through the flip-chip bonding pads 14 Group 11 is electrically connected. The conductive side 10b is provided with a second contact portion 10e, and the second contact portion 10e is electrically connected to an external circuit. The first contact portion is electrically signal-connected to the second contact portion 10e.

第一接触部与第二接触部10e电信号连接,可通过TSV(硅通孔技术ThroughSilicon Via,TSV)的方式实现。如此,第一接触部与第二接触部10e分别为TSV的两个连接端,从而缩短了基板10体外侧到芯片组11的电连接路程,降低封装电连接引入的额外的寄生电容及反馈电阻等电路特性,降低电路系统优化难度。The electrical signal connection between the first contact portion and the second contact portion 10e may be realized by means of TSV (Through Silicon Via, TSV). In this way, the first contact portion and the second contact portion 10e are respectively the two connection ends of the TSV, thereby shortening the electrical connection distance from the outside of the substrate 10 to the chip set 11 and reducing the extra parasitic capacitance and feedback resistance introduced by the electrical connection of the package. and other circuit characteristics, reducing the difficulty of circuit system optimization.

可以理解的是,TSV结构根据实际情况的需求可对应设置为多个。如图6所示,设置4个呈阵列排布的TSV结构。It can be understood that, multiple TSV structures can be correspondingly set according to actual requirements. As shown in FIG. 6 , four TSV structures are arranged in an array.

在一些实施例中,上述器件芯片13可以具有MEMS谐振器以及用于从控制芯片12接收谐振器驱动信号的第一电极和用于向控制芯片12输出谐振器感测信号的第二电极。谐振器驱动信号用于驱动MEMS谐振器进行机械谐振运动,并且谐振器感测信号指示机械谐振运动。In some embodiments, the device chip 13 described above may have a MEMS resonator and a first electrode for receiving a resonator drive signal from the control chip 12 and a second electrode for outputting a resonator sensing signal to the control chip 12 . The resonator drive signal is used to drive the MEMS resonator into mechanical resonant motion, and the resonator sense signal is indicative of the mechanical resonant motion.

上述控制芯片12可包括电路,电路用于从器件芯片13接收谐振器感测信号,并且基于谐振器感测信号生成谐振器驱动信号。The control chip 12 described above may include a circuit for receiving the resonator sensing signal from the device chip 13 and generating the resonator driving signal based on the resonator sensing signal.

控制芯片12还可包括用于基于谐振器感测信号生成时钟信号并根据MEMS谐振器的温度灵敏度补偿时钟信号的电路。其中,根据所述MEMS谐振器的温度灵敏度补偿所述时钟信号的电路包括温度传感器。The control chip 12 may also include circuitry for generating a clock signal based on the resonator sensing signal and compensating the clock signal according to the temperature sensitivity of the MEMS resonator. Wherein, the circuit for compensating the clock signal according to the temperature sensitivity of the MEMS resonator includes a temperature sensor.

本申请的另一方面,提供一种电子产品,电子产品包括上述任一实施例的芯片封装结构100,对于芯片封装结构100在此不再赘述。In another aspect of the present application, an electronic product is provided. The electronic product includes the chip packaging structure 100 of any of the above embodiments, and the chip packaging structure 100 will not be repeated here.

本申请中的术语“第一”、“第二”、“第三”仅用于描述目的,而不能理解为指明所指示的技术特征的数量。由此,限定有“第一”、“第二”、“第三”的特征可以明示或者隐含地包括至少一个该特征。本申请实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等,如果该特定姿态发生改变时,则该方向性指示也相应地随之改变。此外,术语“包括”和“具有”以及它们任何变形,意图在于覆盖不排他的包含。如包含了一系列步骤或单元的过程、方法、系统、产品或设备没有限定于已列出的步骤或单元,而是可选地还包括没有列出的步骤或单元,或可选地还包括对于这些过程、方法、产品或设备固有的其它步骤或单元。The terms "first", "second" and "third" in this application are only used for descriptive purposes and should not be understood as indicating the number of indicated technical features. Thus, a feature defined as "first", "second", "third" may expressly or implicitly include at least one of that feature. All directional indications (such as up, down, left, right, front, rear...) in the embodiments of the present application are only used to explain the relative positional relationship between components under a certain posture (as shown in the accompanying drawings). , motion situation, etc., if the specific posture changes, the directional indication also changes accordingly. Furthermore, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally also includes unlisted steps or units, or optionally also includes For other steps or units inherent to these processes, methods, products or devices.

以上所述仅为本申请的实施例,并非因此限制本申请的专利范围,凡是利用本申请说明书及附图内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本申请的专利保护范围内。The above are only the embodiments of the present application, and are not intended to limit the scope of the patent of the present application. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present application, or directly or indirectly applied to other related technologies Fields are similarly included within the scope of patent protection of this application.

Claims (10)

1. A chip package structure, comprising:
a substrate having a connection side and a conductive side for electrically connecting the chip package structure with an external circuit;
at least one chipset comprising a control chip and a device chip;
wherein the control chip and the device chip are flip-chip bonded, and the control chip or the device chip is flip-chip bonded to the connection side;
or the control chip and the device chip are in flip chip bonding with the connecting side.
2. The chip package structure according to claim 1, wherein the connection side is provided with a stopper protrusion adjacent to the chip set.
3. The chip package structure according to claim 2, wherein the stop protrusions are symmetrically disposed on the connection side, the chip set is disposed between the stop protrusions, and a gap is formed between the stop protrusions and the chip set.
4. The chip packaging structure according to claim 2, wherein; the stop protrusion is configured as a bezel that surrounds the chip set.
5. The chip package structure according to claim 2, wherein the substrate further includes a side end surface connected to the connection side, and the stopper projection is flush with the side end surface at an outer side surface away from the chip group.
6. The chip package structure according to claim 2, wherein the thickness of the stop protrusion is not less than half of the minimum thickness of the chip set.
7. Chip package according to any one of claims 1 to 6, characterized in that the substrate is further provided with a hole portion configured as a blind hole opening at the connection side or as a through hole passing through the connection side and the electrically conductive side.
8. The chip package structure according to claim 7, wherein the control chip or the device chip facing the connection side in each of the chip groups is accommodated in the hole portion.
9. The chip package structure according to claim 7, wherein the control chip is flip-chip bonded to the connection side, the device chip is flip-chip bonded to a side of the control chip facing the connection side, and the device chip is received in the hole portion.
10. The chip package structure according to any one of claims 1 to 6, wherein the control chip is flip-chip bonded to the connection side, and the device chip is flip-chip bonded to a side of the control chip away from the connection side.
CN202210931101.5A 2022-08-03 2022-08-03 Chip package structure Pending CN115241179A (en)

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