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CN115213417B - A method for preparing Nb-Si-based alloy powders by hydrodehydrogenation - Google Patents

A method for preparing Nb-Si-based alloy powders by hydrodehydrogenation Download PDF

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CN115213417B
CN115213417B CN202210877949.4A CN202210877949A CN115213417B CN 115213417 B CN115213417 B CN 115213417B CN 202210877949 A CN202210877949 A CN 202210877949A CN 115213417 B CN115213417 B CN 115213417B
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沙江波
廖军华
魏振河
彭徽
郭洪波
逄淑杰
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Abstract

本发明公开了一种采用氢化脱氢制备Nb‑Si基合金粉末的方法,包括以下步骤:S1、配料,按照成分配比称取Nb、Si、Ti、Al、Cr、Hf、Sc纯金属原料;S2、熔炼,将称取好的原料放入熔炼炉内进行熔炼;S3、氢化,将Nb‑Si基合金铸锭放入氢化脱氢炉中,抽真空,将炉温升至氢化温度,向炉体内通入氢气至氢化压力,保温;得到氢化碎裂的Nb‑Si基合金;S4、破碎,将氢化后的Nb‑Si基合金进行破碎筛分,得到氢化合金粉末;S5、脱氢,将氢化合金粉末在氢化脱氢炉中进行真空高温脱氢,得到Nb‑Si基脱氢合金粉末。本发明采用氢化脱氢制备Nb‑Si基合金粉末的方法,能够解决现有的Nb‑Si基合金粉末生产成本高、生产周期长的问题。

The invention discloses a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation, comprising the following steps: S1, batching, weighing Nb, Si, Ti, Al, Cr, Hf, Sc pure metal raw materials according to the composition ratio S2, smelting, put the weighed raw materials into the smelting furnace for smelting; S3, hydrogenation, put the NbSi-based alloy ingot into the hydrogenation dehydrogenation furnace, vacuumize, raise the furnace temperature to the hydrogenation temperature, Introduce hydrogen into the furnace body to the hydrogenation pressure and keep it warm; obtain hydrogenated and fragmented Nb-Si-based alloys; S4, crush, crush and sieve the hydrogenated Nb-Si-based alloys to obtain hydrogenated alloy powders; S5, dehydrogenate , dehydrogenating the hydrogenated alloy powder in a hydrodehydrogenation furnace at high temperature in a vacuum to obtain Nb-Si-based dehydrogenated alloy powder. The invention adopts the method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation, which can solve the problems of high production cost and long production cycle of the existing Nb-Si-based alloy powder.

Description

一种采用氢化脱氢制备Nb-Si基合金粉末的方法A method for preparing Nb-Si-based alloy powders by hydrodehydrogenation

技术领域technical field

本发明涉及Nb-Si基合金粉末制备方法技术领域,尤其是涉及一种采用氢化脱氢制备Nb-Si基合金粉末的方法。The invention relates to the technical field of preparation methods of Nb-Si-based alloy powders, in particular to a method for preparing Nb-Si-based alloy powders by hydrogenation dehydrogenation.

背景技术Background technique

Nb-Si基合金具有高熔点、低密度以及优异的高温强度,是最具潜力替代现有镍基高温合金,承温能力达到1200~1400℃的超高温结构材料,在新一代高推比航空发动机和高比冲火箭发动机动力装备等超高温领域有广泛的应用前景。Nb-Si基合金的基本由Nb基固溶体(NbSS)和金属间化合物Nb5Si3相组成,前者提供室温延展性,后者提供1600~1800℃条件下的强度和蠕变抗性。为了使Nb-Si基合金在室温韧性、高温强度和抗氧化性方面达到平衡,还会加入Ti、Al、Cr、Hf等元素进行合金化,使得合金的综合性能得到了显著提高。Nb-Si-based alloy has high melting point, low density and excellent high-temperature strength. It is the ultra-high temperature structural material with the most potential to replace the existing nickel-based superalloy. The temperature bearing capacity can reach 1200-1400 ℃. Ultra-high temperature fields such as engines and high specific impulse rocket engine power equipment have broad application prospects. Nb-Si-based alloys are basically composed of Nb-based solid solution (Nb SS ) and intermetallic compound Nb 5 Si 3 phases . The former provides ductility at room temperature, and the latter provides strength and creep resistance at 1600-1800 °C. In order to balance the room temperature toughness, high temperature strength and oxidation resistance of Nb-Si based alloys, Ti, Al, Cr, Hf and other elements are also added for alloying, so that the overall performance of the alloy has been significantly improved.

制备工艺对材料的组织和性能有着重要影响。目前,Nb-Si基合金的制备方法主要有真空电弧熔炼、定向凝固和熔模铸造等。然而电弧熔炼法制备的合金中存在较为严重的元素偏析,且NbSS和Nb5Si3相组织粗大,使得合金的室温断裂韧性和高温抗氧化性能远低于目标值,极大地限制了Nb-Si基合金的工程化应用。此外,由于硅化物的本征脆性和加工硬化,很难通过机械加工制备具有复杂形状的Nb-Si基合金部件。近年来,粉末冶金方法和增材制造方法引起了越来越多研究者的关注。粉末冶金方法可以能更好的控制合金中相尺度、比例、形态和分布等,有望实现组织控制,获得优化组织,提高合金综合性能。增材制造方法可以在成形过程中通过调整成形参数来实现微观组织的定制化,制备具有优异性能的复杂形状构件。The preparation process has an important influence on the structure and properties of the material. At present, the preparation methods of Nb-Si-based alloys mainly include vacuum arc melting, directional solidification, and investment casting. However, there are serious element segregation in the alloy prepared by arc melting method, and the coarse structure of Nb SS and Nb 5 Si 3 phase makes the room temperature fracture toughness and high temperature oxidation resistance of the alloy far lower than the target value, which greatly limits the Nb- Engineering applications of Si-based alloys. In addition, due to the intrinsic brittleness and work hardening of silicides, it is difficult to fabricate Nb-Si-based alloy parts with complex shapes by machining. In recent years, powder metallurgy methods and additive manufacturing methods have attracted more and more researchers' attention. The powder metallurgy method can better control the phase scale, proportion, shape and distribution of the alloy, and is expected to achieve microstructure control, obtain optimized microstructure, and improve the overall performance of the alloy. The additive manufacturing method can customize the microstructure by adjusting the forming parameters during the forming process, and prepare components with complex shapes with excellent properties.

综合性能优异的粉末原料是Nb-Si基合金适用于粉末冶金方法和增材制造方法的先决条件。传统的合金粉末制备工艺主要涉及机械合金化和雾化技术,如氩气雾化法(Argon atomization,AA)是真空条件下将金属在坩埚中熔化,而后在气体保护的条件下,高压气流将金属液体雾化破碎成大量细小的液滴,液滴在飞行中凝固成球形或是近球形颗粒,但Nb-Si基合金因其高熔点和高活性使得成品粉末中容易出现非金属物夹杂。虽然等离子旋转电极雾化法(Plasma Rotating Electrode Atomization,PREA)制备的球形粉末适合粉末冶金和增材制造方法,但细粉产率低、成本高限制了其广泛应用,因此有必要开发更有效的低成本短流程Nb-Si基合金粉末生产方法。A powder raw material with excellent comprehensive properties is a prerequisite for Nb-Si-based alloys to be suitable for powder metallurgy methods and additive manufacturing methods. The traditional alloy powder preparation process mainly involves mechanical alloying and atomization technology, such as Argon atomization (Argon atomization, AA) is to melt the metal in the crucible under the condition of vacuum, and then under the condition of gas protection, the high-pressure gas flow will The metal liquid is atomized and broken into a large number of fine droplets, and the droplets solidify into spherical or nearly spherical particles in flight, but the Nb-Si based alloy is prone to non-metallic inclusions in the finished powder due to its high melting point and high activity. Although the spherical powder prepared by plasma rotating electrode atomization (Plasma Rotating Electrode Atomization, PREA) is suitable for powder metallurgy and additive manufacturing methods, but the low yield of fine powder and high cost limit its wide application, so it is necessary to develop more effective A low-cost short-process Nb-Si-based alloy powder production method.

发明内容Contents of the invention

本发明的目的是提供一种采用氢化脱氢制备Nb-Si基合金粉末的方法,解决现有的Nb-Si基合金粉末生产成本高、生产周期长的问题。The purpose of the present invention is to provide a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation, which solves the problems of high production cost and long production cycle of existing Nb-Si-based alloy powder.

为实现上述目的,本发明提供了一种采用氢化脱氢制备Nb-Si基合金粉末的方法,包括以下步骤:In order to achieve the above object, the invention provides a method for preparing Nb-Si based alloy powder by hydrodehydrogenation, comprising the following steps:

S1、配料,按照成分配比称取Nb、Si、Ti、Al、Cr、Hf、Sc纯金属原料;S1, batching, weigh Nb, Si, Ti, Al, Cr, Hf, Sc pure metal raw materials according to the composition ratio;

S2、熔炼,将称取好的原料放入熔炼炉内进行熔炼,得到成分均匀的Nb-Si基合金铸锭;S2, smelting, putting the weighed raw materials into a smelting furnace for smelting to obtain a Nb-Si-based alloy ingot with uniform composition;

S3、氢化,将Nb-Si基合金铸锭放入氢化脱氢炉中,抽真空,将炉温升至氢化温度,向炉体内通入氢气至氢化压力,保温;得到氢化碎裂的Nb-Si基合金;S3, hydrogenation, put the Nb-Si base alloy ingot into the hydrogenation dehydrogenation furnace, vacuumize, raise the temperature of the furnace to the hydrogenation temperature, feed hydrogen into the furnace body to the hydrogenation pressure, and keep it warm; obtain hydrogenated and fragmented Nb- Si-based alloy;

S4、破碎,将氢化后的Nb-Si基合金进行破碎筛分,得到氢化合金粉末;S4, crushing, crushing and screening the hydrogenated Nb-Si-based alloy to obtain hydrogenated alloy powder;

S5、脱氢,将氢化合金粉末在氢化脱氢炉中进行真空高温脱氢,得到Nb-Si基脱氢合金粉末。S5, dehydrogenation, dehydrogenating the hydrogenated alloy powder in a hydrogenation dehydrogenation furnace at high temperature in a vacuum to obtain Nb—Si-based dehydrogenated alloy powder.

优选的,所述S1中,Nb、Si、Ti、Al、Cr、Hf、Sc的原子数百分含量配比为Nb-16Si-24Ti-2Al-2Hf-2Cr-0.3Sc。Preferably, in the S1, the atomic percentage ratio of Nb, Si, Ti, Al, Cr, Hf, Sc is Nb-16Si-24Ti-2Al-2Hf-2Cr-0.3Sc.

优选的,所述S1中,对原料进行称取前将原料放入丙酮、无水乙醇中进行超声清洗。Preferably, in said S1, the raw materials are put into acetone and absolute ethanol for ultrasonic cleaning before weighing the raw materials.

优选的,所述S2中,原料放入真空非自耗电弧炉内进行熔炼,反复熔炼5-6次。Preferably, in said S2, the raw materials are put into a vacuum non-consumable electric arc furnace for smelting, and the smelting is repeated 5-6 times.

优选的,所述S3中,氢化脱氢炉抽真空至5×10-3Pa,氢化温度为200-300℃,升温速度为5℃/min-10℃/min。Preferably, in S3, the hydrodehydrogenation furnace is evacuated to 5×10 -3 Pa, the hydrogenation temperature is 200-300°C, and the heating rate is 5°C/min-10°C/min.

优选的,所述S3中,氢化压力为2.5-3.5MPa,保温时间为1-2h。Preferably, in said S3, the hydrogenation pressure is 2.5-3.5MPa, and the holding time is 1-2h.

优选的,所述S4中,氢化合金粉末的粒径为45-105μm。Preferably, in S4, the particle size of the hydrogenated alloy powder is 45-105 μm.

优选的,所述S5中,脱氢的真空度为5×10-3Pa,脱氢温度为600-800℃,脱氢时间为2h。Preferably, in the S5, the dehydrogenation vacuum degree is 5×10 -3 Pa, the dehydrogenation temperature is 600-800° C., and the dehydrogenation time is 2 hours.

本发明所述的一种采用氢化脱氢制备Nb-Si基合金粉末的方法的优点和积极效果是:The advantages and positive effects of a method for preparing Nb-Si-based alloy powders by hydrodehydrogenation according to the present invention are:

1、对Nb-Si基合金进行氢化处理,Nb-Si基合金中硅化物产生裂纹,并扩展,合金表面不断碎裂、剥离产生粉末,并且Nb-Si基合金中NbSS相膨胀,便于对Nb-Si基合金的粉碎。1. Hydrogenation treatment of Nb-Si-based alloy, the silicide in the Nb-Si-based alloy produces cracks and expands, the surface of the alloy is continuously broken and peeled off to produce powder, and the Nb SS phase in the Nb-Si-based alloy expands, which is convenient for processing Pulverization of Nb-Si based alloys.

2、Nb-Si基合金采用氢化脱氢炉进行生产,设备投入少,生产工艺参数易设定,有利于降低Nb-Si基合金粉末的成本,缩短生产周期。2. Nb-Si-based alloys are produced using a hydrogenation dehydrogenation furnace, with less equipment investment and easy setting of production process parameters, which is conducive to reducing the cost of Nb-Si-based alloy powders and shortening the production cycle.

3、采用粒径为45-105μm的氢化脱氢粉末为原料,利用激光熔覆增材制造方法制备了Nb-Si基合金块体,荧光分析表明块体内部无裂纹。3. Using hydrogenated dehydrogenation powder with a particle size of 45-105 μm as a raw material, a Nb-Si-based alloy block was prepared by laser cladding additive manufacturing method, and fluorescence analysis showed that there was no crack inside the block.

下面通过附图和实施例,对本发明的技术方案做进一步的详细描述。The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

附图说明Description of drawings

图1为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例一制备的Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc合金氢化前后宏观形貌和微观组织;Fig. 1 is the macroscopic morphology and microstructure of the Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc alloy prepared in Example 1 of the method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation according to the present invention before and after hydrogenation;

图2为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例1-9制备的Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc合金氢化后和氢化前铸态合金XRD图;Fig. 2 is the Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc alloy prepared by a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation in Example 1-9 of the present invention and the as-cast alloy before hydrogenation XRD pattern;

图3为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例1氢化合金横截面微观组织背散射图像和元素分布;Fig. 3 is a backscattering image and element distribution of hydrogenated alloy cross-sectional microstructure backscattering image of a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation according to the present invention;

图4为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例1-9Nb-Si基合金粉末氢氧含量柱状图;Fig. 4 is a kind of method embodiment 1-9 Nb-Si based alloy powder hydrogen oxygen content column diagram of adopting hydrogenation dehydrogenation to prepare Nb-Si based alloy powder of the present invention;

图5为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例10-12Nb-Si基脱氢合金粉末的XRD图;Fig. 5 is an XRD figure of a method embodiment 10-12 Nb-Si-based dehydrogenated alloy powder of the present invention using hydrodehydrogenation to prepare Nb-Si-based alloy powder;

图6为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例10-12Nb-Si基脱氢合金粉末氢氧元素含量柱状图;Fig. 6 is a histogram of hydrogen and oxygen element content of Nb-Si-based dehydrogenated alloy powder in Example 10-12 of a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation in the present invention;

图7本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例2Nb-Si基合金粉末脱氢前后形貌变化图;Figure 7 is a diagram of the morphology change before and after dehydrogenation of a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation in Example 2 of the present invention;

图8本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例11获得的Nb-Si基脱氢合金粉末激光熔覆增材制备的Nb-Si基合金块体宏观形貌;Fig. 8 is a macroscopic appearance of Nb-Si-based alloy block prepared by laser cladding and additive manufacturing of Nb-Si-based dehydrogenated alloy powder obtained in Example 11 of a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation;

图9为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例的氢化脱氢炉原理图。Fig. 9 is a schematic diagram of a hydrodehydrogenation furnace of an embodiment of a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation according to the present invention.

具体实施方式Detailed ways

以下通过附图和实施例对本发明的技术方案作进一步说明。The technical solutions of the present invention will be further described below through the accompanying drawings and embodiments.

一种采用氢化脱氢制备Nb-Si基合金粉末的方法,包括以下步骤:A method for preparing Nb-Si-based alloy powder by hydrodehydrogenation, comprising the following steps:

S1、配料,按照成分配比称取纯度为99.99%的Nb、纯度为99.999%的Si、纯度为99.995%的Ti、纯度为99.999%的Al、纯度为99.95%的Cr、纯度为99.95%的Hf、纯度为99.95%的Sc纯金属原料。Nb、Si、Ti、Al、Cr、Hf、Sc的原子数百分含量配比为Nb-16Si-24Ti-2Al-2Hf-2Cr-0.3Sc。对原料进行称取前将原料放入丙酮、无水乙醇中进行超声清洗。S1, batching, take the Nb that is 99.99% of purity, the Si of 99.999% of purity, the Ti of 99.995% of purity, the Al of 99.999% of purity, the Cr of 99.95% of purity, the Cr of 99.95% of purity according to the composition ratio Hf, Sc pure metal raw materials with a purity of 99.95%. The atomic percentage ratio of Nb, Si, Ti, Al, Cr, Hf, Sc is Nb-16Si-24Ti-2Al-2Hf-2Cr-0.3Sc. Before weighing the raw materials, put the raw materials into acetone and absolute ethanol for ultrasonic cleaning.

S2、熔炼,将称取好的150g的原料放入真空非自耗电弧炉内进行熔炼,反复熔炼5-6次,保证合金成分均匀,得到成分均匀的Nb-Si基合金铸锭。S2, smelting, putting 150g of the weighed raw material into a vacuum non-consumable electric arc furnace for smelting, and repeated smelting for 5-6 times to ensure that the alloy composition is uniform, and obtain a Nb-Si-based alloy ingot with uniform composition.

S3、图9为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例的氢化脱氢炉原理图。如图9所示,氢化,将Nb-Si基合金铸锭放入氢化脱氢炉中,对设备进行抽真空处理,抽真空至5×10-3Pa。按照5℃/min-10℃/min的升温速度将炉温升至200-300℃的氢化温度;向炉体内通入氢气至氢化压力,氢化压力为2.5-3.5MPa,保温1-2h;冷却至室温得到氢化碎裂的合金粉末。氢气在进入氢化脱氢炉前会先经过气体净化炉,由炉中高纯海绵钛对氢气进行净化,以最大程度减小氢气中夹杂的碳、氮和氧杂质对氢化过程的影响。S3 and FIG. 9 are schematic diagrams of a hydrodehydrogenation furnace in an embodiment of a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation in the present invention. As shown in Figure 9, for hydrogenation, put the Nb-Si based alloy ingot into the hydrogenation dehydrogenation furnace, and vacuumize the equipment to 5×10 -3 Pa. Raise the furnace temperature to the hydrogenation temperature of 200-300°C according to the heating rate of 5°C/min-10°C/min; feed hydrogen into the furnace body to the hydrogenation pressure, the hydrogenation pressure is 2.5-3.5MPa, and keep it for 1-2h; cool to room temperature to obtain hydrogenation fragmentation alloy powder. Before entering the hydrogenation dehydrogenation furnace, the hydrogen will pass through the gas purification furnace, and the hydrogen will be purified by the high-purity sponge titanium in the furnace, so as to minimize the influence of carbon, nitrogen and oxygen impurities in the hydrogen on the hydrogenation process.

S4、破碎,将氢化后的Nb-Si基合金进行机械破碎筛分,得到氢化合金粉末;氢化合金粉末的粒径为45-105μm。S4, crushing, mechanically crushing and screening the hydrogenated Nb—Si-based alloy to obtain hydrogenated alloy powder; the particle size of the hydrogenated alloy powder is 45-105 μm.

S5、脱氢,将氢化合金粉末在氢化脱氢炉中进行真空高温脱氢,得到Nb-Si基脱氢合金粉末。脱氢的真空度为5×10-3Pa,脱氢温度为600-800℃,脱氢时间为2h。S5, dehydrogenation, dehydrogenating the hydrogenated alloy powder in a hydrogenation dehydrogenation furnace at high temperature in a vacuum to obtain Nb—Si-based dehydrogenated alloy powder. The vacuum degree of dehydrogenation is 5×10 -3 Pa, the dehydrogenation temperature is 600-800°C, and the dehydrogenation time is 2h.

氢化过程中的主要影响因素有氢化温度、压力和时间,通过正交试验研究不用氢化温度、压力和时间下的Nb-Si基合金的氢化破碎情况。实施例1-9氢化过程中工艺参数设置如表1所示。The main influencing factors in the hydrogenation process are hydrogenation temperature, pressure and time, and the hydrogenation fragmentation of Nb-Si based alloys without hydrogenation temperature, pressure and time is studied through orthogonal experiments. The process parameter settings in the hydrogenation process of Examples 1-9 are shown in Table 1.

表1实施例1-9氢化过程中工艺参数Process parameter in the hydrogenation process of table 1 embodiment 1-9

采用日本D/MAX-2500多功能X射线衍射仪(X-ray diffraction,XRD)对熔炼态Nb-Si基合金铸锭、氢化合金粉末和脱氢合金粉末进行物相组成分析。Nb-Si基合金铸锭用粒度2000的砂纸打磨平整,粉末材料置于载玻片中测量。XRD测试采用Cu Kα靶,λ=0.15405nm,工作电压40kV,电流200mA,扫描速度5°/min,扫描范围均为20-90°。测试完成后通过Jade 6软件对衍射峰进行标定分析。The phase composition analysis of smelted Nb-Si based alloy ingot, hydrogenated alloy powder and dehydrogenated alloy powder was carried out by Japan D/MAX-2500 multifunctional X-ray diffractometer (X-ray diffraction, XRD). The Nb-Si-based alloy ingot was polished with 2000-grit sandpaper, and the powder material was placed on a glass slide for measurement. XRD test adopts Cu Kα target, λ=0.15405nm, working voltage 40kV, current 200mA, scanning speed 5°/min, scanning range 20-90°. After the test was completed, the diffraction peaks were calibrated and analyzed by Jade 6 software.

使用日本清新株式会社制造的LMS-30激光粒度仪测试粉末的粒度D50值。使用北京钢研纳克ONH-3000型氧氮氢含量分析仪测定合金铸锭和粉末中氢、氧元素含量,氢、氧元素含量的测试原理分别为惰性气脉冲熔融热导法、脉冲加热惰气熔融-红外线吸收法。Use the LMS-30 laser particle size analyzer manufactured by Nippon Shinshin Co., Ltd. to test the particle size D50 value of the powder. The content of hydrogen and oxygen elements in alloy ingots and powders is determined by using the Beijing Iron and Steel Research Institute ONH-3000 Oxygen, Nitrogen and Hydrogen Content Analyzer. Gas fusion-infrared absorption method.

对Nb-Si基合金铸锭依次经过粒度为800-3000的磨砂纸打磨后,用SiO2抛光液进行机械抛光。使用ZEISSS UPRA55场发射扫描电镜的二次电子模式对粉末形貌进行表征,使用背散射模式对合金微观组织和粉末截面进行表征,利用电镜附带的能谱仪(EDS,EnergyDispersive Spectrometer)表征粉末截面元素分布。The Nb-Si based alloy ingots are polished sequentially by abrasive paper with a particle size of 800-3000, and then mechanically polished with SiO2 polishing solution. Use the secondary electron mode of the ZEISSS UPRA55 field emission scanning electron microscope to characterize the powder morphology, use the backscattering mode to characterize the alloy microstructure and powder cross section, and use the energy dispersive spectrometer (EDS, Energy Dispersive Spectrometer) attached to the electron microscope to characterize the powder cross section elements distributed.

图1为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例一制备的Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc合金氢化前后宏观形貌和微观组织,(a)为电弧熔炼纽扣状合金铸锭宏观形貌,(a’)为扫描电镜背散射模式下观察到的合金微观组织,(b)为氢化后合金宏观形貌,(b’)为扫描电镜背散射模式下观察到的氢化后合金微观组织。如图所示,Nb-Si基合金铸锭中氧含量为0.021wt.%,氢含量为0.0012wt.%。铸态合金主要由NbSS(浅灰色衬度)、Nb3Si(深灰色衬度)和β-Nb5Si3(黑色衬度)组成,合金中存在大面积的NbSS+Nb3Si和NbSS+β-Nb5Si3共晶区,根据Nb-Si二元相图可知,NbSS+Nb3Si共晶为凝固过程中形成,NbSS+β-Nb5Si3共晶由凝固过程中发生Nb3Si→NbSS+β-Nb5Si3共析分解形成。在实施例1氢化温度200℃、氢化压力2.5MPa条件下氢化1h,合金铸锭碎裂成粉末,大部分粉末颗粒尺寸小于100μm,极少数粉末颗粒尺寸在200μm以上,经机械破碎筛分后可获得45-105μm氢化粉末。Fig. 1 is a kind of Nb-Si-24Ti-2Al-2Cr-2Hf-0.3Sc alloy macro-morphology and microstructure before and after hydrogenation of the Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc alloy prepared by the method embodiment one of the present invention, ( a) is the macroscopic morphology of the arc-melted button-shaped alloy ingot, (a') is the microstructure of the alloy observed under the backscattering mode of the scanning electron microscope, (b) is the macroscopic morphology of the alloy after hydrogenation, (b') is the scanning electron microscope Hydrogenated alloy microstructure observed in backscattering mode. As shown in the figure, the oxygen content in the Nb-Si based alloy ingot is 0.021 wt.%, and the hydrogen content is 0.0012 wt.%. The as-cast alloy is mainly composed of Nb SS (light gray contrast), Nb 3 Si (dark gray contrast) and β-Nb 5 Si 3 (black contrast), and there are large areas of Nb SS +Nb 3 Si and Nb SS + β-Nb 5 Si 3 eutectic region, according to the Nb-Si binary phase diagram, the Nb SS + Nb 3 Si eutectic is formed during solidification, and the Nb SS + β-Nb 5 Si 3 eutectic is formed by solidification The eutectoid decomposition of Nb 3 Si→Nb SS +β-Nb 5 Si 3 occurs during the process. In Example 1, the hydrogenation temperature was 200°C and the hydrogenation pressure was 2.5 MPa for 1 hour, and the alloy ingot was broken into powder, most of the powder particle size was less than 100 μm, and a very small number of powder particle size was more than 200 μm. A 45-105 μm hydrogenated powder was obtained.

实施例2-9氢化工艺均可得到类似的破碎效果。The hydrogenation processes of Examples 2-9 can all obtain similar crushing effects.

图2为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例1-9制备的Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc合金氢化后和氢化前铸态合金XRD图。如图所示,Nb-Si基铸态合金由NbSS、Nb3Si和β-Nb5Si3相组成,与图1(a’)背散射微观组织相一致。九种氢化粉末的相组成均为NbSS、Nb3Si、β-Nb5Si3、NbH2和NbO相,表明NbSS吸收氢原子发生化学反应生成氢化物,NbSS相并未消失表明合金与氢气反应后只有部分NbSS相生成了NbH2相,这也足够使得合金碎裂成小颗粒粉末,同时部分NbSS相吸收了氢气中的氧生成了NbO相。Fig. 2 is the Nb-16Si-24Ti-2Al-2Cr-2Hf-0.3Sc alloy prepared by a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation in Example 1-9 of the present invention and the as-cast alloy before hydrogenation XRD pattern. As shown, the Nb-Si based as-cast alloy consists of Nb SS , Nb 3 Si and β-Nb 5 Si 3 phases, consistent with the backscattering microstructure in Fig. 1(a'). The phase compositions of the nine hydrogenated powders are all Nb SS , Nb 3 Si, β-Nb 5 Si 3 , NbH 2 and NbO phases, indicating that Nb SS absorbs hydrogen atoms and undergoes chemical reactions to form hydrides. The Nb SS phase does not disappear, indicating that the alloy After reacting with hydrogen, only part of Nb SS phase forms NbH 2 phase, which is enough to break the alloy into small particle powder, while part of Nb SS phase absorbs oxygen in hydrogen to form NbO phase.

图3为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例1氢化合金横截面微观组织背散射图像和元素分布。如图所示,氢化粉末内部的裂纹主要集中硅化物相中,这是因为NbSS相在吸收大量氢原子生成NbH2相后体积膨胀,NbSS相的断裂韧性可达28MPa·m1/2,而硅化物相的断裂韧性仅为1-3MPa·m1/2,在NbSS相的膨胀过程中合金内部NbSS相和硅化物相互挤压,硅化物相因为低断裂韧性最先产生裂纹,并且裂纹沿着硅化物相在合金内部扩展,直至合金表面不断碎裂剥离产生粉末。3 is a backscattering image and element distribution of hydrogenated alloy cross-sectional microstructure in Example 1 of a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation in the present invention. As shown in the figure, the cracks inside the hydrogenated powder are mainly concentrated in the silicide phase. This is because the volume of the Nb SS phase expands after absorbing a large amount of hydrogen atoms to form the NbH 2 phase, and the fracture toughness of the Nb SS phase can reach 28MPa m 1/2 , while the fracture toughness of the silicide phase is only 1-3MPa·m 1/2 , during the expansion process of the Nb SS phase, the Nb SS phase and the silicide phase in the alloy are squeezed against each other, and the silicide phase is the first to generate cracks due to the low fracture toughness , and the cracks propagate along the silicide phase inside the alloy until the surface of the alloy is continuously fragmented and peeled off to produce powder.

Nb-Si基合金铸锭在不同实施例中生成的氢化物均为NbH2,所以可以通过测量反应前后样品中氢元素的含量的变化来确定样品的氢化程度。通过极差分析法对各实施例参数下氢化粉末的氢元素质量百分比(wt.%)进行处理,可以对实验过程中各个因素影响的优先级进行排序。表2为实施例1-9氢含量变化极差分析结果。The hydride produced by the Nb-Si based alloy ingot in different embodiments is NbH 2 , so the degree of hydrogenation of the sample can be determined by measuring the change of hydrogen content in the sample before and after the reaction. The hydrogen element mass percentage (wt.%) of the hydrogenated powder under the parameters of each embodiment is processed by the range analysis method, and the priority of each factor in the experiment process can be sorted. Table 2 shows the results of the extreme difference analysis of the hydrogen content of Examples 1-9.

表2为实施例1-9氢含量变化极差分析结果Table 2 is the extreme difference analysis result of embodiment 1-9 hydrogen content change

其中,Ki(i=1,2,3)为氢元素质量百分比增量在各个因素水平(氢化温度、压力和时间)下的加和,Gi(i=1,2,3)为氢元素质量百分比增量在三个氢化工艺参数影响下加和的均值,R为同一因素在不同水平下平均增重的极差值(R=最大平均增量-最小平均增量),通过各个因素R值的大小可以判断不同因素对氢化过程的影响程度。一般来讲,R越大则该因素影响作用越明显。经计算可得,氢化温度的R值为0.4333,远大于氢化压力的0.07和氢化温度的0.06,存在R(氢化温度)>R(氢化压力)>R(氢化时间)的关系。因此,可以确定氢化温度对于氢化过程的影响程度最大,其次是氢化压力,氢化时间对氢化过程的影响最小。Among them, K i (i=1,2,3) is the sum of hydrogen mass percentage increments at various factor levels (hydrogenation temperature, pressure and time), G i (i=1,2,3) is hydrogen The average value of the sum of element mass percentage increments under the influence of three hydrogenation process parameters, R is the range value of the average weight gain of the same factor at different levels (R=maximum average increment-minimum average increment), through each factor The value of R can judge the degree of influence of different factors on the hydrogenation process. Generally speaking, the larger R is, the more obvious the effect of this factor is. It can be calculated that the R value of the hydrogenation temperature is 0.4333, which is much greater than 0.07 of the hydrogenation pressure and 0.06 of the hydrogenation temperature, and there is a relationship of R (hydrogenation temperature) > R (hydrogenation pressure) > R (hydrogenation time). Therefore, it can be determined that the hydrogenation temperature has the greatest influence on the hydrogenation process, followed by the hydrogenation pressure, and the hydrogenation time has the least influence on the hydrogenation process.

由于氢化过程在较高温度下进行,虽然对氢气进行了净化,但仍然会存在氧杂质,而粉末中氧含量会严重影响粉末冶金方法和增材制造方法制备的Nb-Si基合金的成形性和力学性能。因此有必要研究氢化过程中氢化工艺参数对氧含量变化的影响规律。表3为实施例1-9氧元素含量极差分析的结果。Since the hydrogenation process is carried out at a higher temperature, although the hydrogen is purified, there will still be oxygen impurities, and the oxygen content in the powder will seriously affect the formability of the Nb-Si-based alloy prepared by the powder metallurgy method and the additive manufacturing method and mechanical properties. Therefore, it is necessary to study the influence of hydrogenation process parameters on the change of oxygen content in the hydrogenation process. Table 3 is the result of the extreme difference analysis of the oxygen element content in Examples 1-9.

表3为实施例1-9氧元素含量极差分析的结果Table 3 is the result of embodiment 1-9 oxygen element content range analysis

其中,Ki(i=1,2,3)为氧元素质量百分比增量在三种氢化因素影响下的加和,Gi(i=1,2,3)为氧元素质量百分比增量在三种氢化因素影响下加和的均值,R为同一氢化因素在不同水平下均值的极差值(R=最大平均增量-最小平均增量),经计算可知,氢化时间的R值最大,为0.0627,氢化温度的R值与之相近,为0.0623,氢化压力的R值最小为0.0443,因此存在R(氢化时间)>R(氢化温度)>R(氢化压力)的关系。可以确定氢化时间对于氢化过程吸氧量的影响最大,氢化温度的影响略低于氢化时间,氢化压力的影响小。Among them, K i (i=1, 2, 3) is the sum of the mass percentage increment of oxygen element under the influence of three hydrogenation factors, G i (i=1, 2, 3) is the mass percentage increment of oxygen element in The average value of the sum under the influence of three hydrogenation factors, R is the range value of the same hydrogenation factor at different levels (R = maximum average increment-minimum average increment), it can be seen from calculation that the R value of the hydrogenation time is the largest, The R value of the hydrogenation temperature is 0.0627, which is close to 0.0623, and the R value of the hydrogenation pressure is at least 0.0443, so there is a relationship of R (hydrogenation time)>R (hydrogenation temperature)>R (hydrogenation pressure). It can be determined that the hydrogenation time has the greatest influence on the oxygen uptake in the hydrogenation process, the influence of the hydrogenation temperature is slightly lower than that of the hydrogenation time, and the influence of the hydrogenation pressure is small.

图4为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例1-9Nb-Si基合金粉末氢氧含量柱状图。如图所示,实施例1-9所获得的粉末中氢含量呈递减趋势,而氧含量呈递增趋势。探究工艺参数对氢化过程的影响的目的是为了获得吸氢效率高且氧含量低的粉末,实施例1的氢化粉末有着最大氢含量,为1.4712wt.%,实施例2的氢化粉末氢含量略低于实施例1,为1.4312wt.%。氧含量方面,实施例4的氢化粉末有着最低的氧含量,为0.171wt.%;同时实施例2的氢化粉末氧含量为0.176wt.%。在氢氧含量和氢化破碎效果的综合考虑下,实施例2为最佳氢化工艺,即氢化温度200℃,氢化压力3MPa,氢化时间1.5h,并以实施例2为后续脱氢实验原料。Fig. 4 is a histogram of hydrogen and oxygen content of Nb-Si-based alloy powder in Example 1-9 of a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation in the present invention. As shown in the figure, the hydrogen content in the powders obtained in Examples 1-9 showed a decreasing trend, while the oxygen content showed an increasing trend. The purpose of exploring the influence of process parameters on the hydrogenation process is to obtain a powder with high hydrogen absorption efficiency and low oxygen content. The hydrogenated powder in Example 1 has the maximum hydrogen content, which is 1.4712wt.%. The hydrogenated powder in Example 2 has a hydrogen content of slightly Lower than Example 1, it is 1.4312wt.%. In terms of oxygen content, the hydrogenated powder of Example 4 has the lowest oxygen content, which is 0.171wt.%, while the oxygen content of the hydrogenated powder of Example 2 is 0.176wt.%. Under the comprehensive consideration of hydrogen and oxygen content and hydrogenation fragmentation effect, Example 2 is the best hydrogenation process, that is, hydrogenation temperature is 200°C, hydrogenation pressure is 3MPa, hydrogenation time is 1.5h, and Example 2 is used as the raw material for subsequent dehydrogenation experiments.

实施例10-12为不同工艺参数下脱氢过程的研究,实施例10-12的工艺参数如表4所示。Examples 10-12 are studies on the dehydrogenation process under different process parameters, and the process parameters of Examples 10-12 are shown in Table 4.

表4实施例10-12氢化脱氢过程工艺参数Table 4 embodiment 10-12 hydrodehydrogenation process technological parameters

样品编号Sample serial number 氢化温度(℃)Hydrogenation temperature (℃) 氢化压力(MPa)Hydrogenation pressure (MPa) 氢化时间(h)Hydrogenation time (h) 脱氢温度(℃)Dehydrogenation temperature (°C) 脱氢时间(h)Dehydrogenation time (h) 实施例10Example 10 200200 33 1.51.5 600600 22 实施例11Example 11 200200 33 1.51.5 700700 22 实施例12Example 12 200200 33 1.51.5 800800 22

图5为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例10-12Nb-Si基脱氢合金粉末的XRD图。如图所示,NbH2相消失,合金的相组成为NbSS、Nb3Si、β-Nb5Si3、和NbO相,表明在三种氢化温度条件下均可使氢化粉末较完全脱氢。随着脱氢温度的提高,扩散出粉末颗粒表面的氢原子越来越多,粉末开始慢慢地由NbH2转变为NbSSFig. 5 is an XRD pattern of Nb-Si-based dehydrogenated alloy powder of Example 10-12 of a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation in the present invention. As shown in the figure, the NbH 2 phase disappears, and the phase composition of the alloy is Nb SS , Nb 3 Si, β-Nb 5 Si 3 , and NbO phase, indicating that the hydrogenated powder can be completely dehydrogenated under the three hydrogenation temperature conditions . With the increase of dehydrogenation temperature, more and more hydrogen atoms diffused out of the surface of powder particles, and the powder began to slowly transform from NbH 2 to Nb SS .

图6为本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例10-12Nb-Si基脱氢合金粉末氢氧元素含量柱状图。如图所示,脱氢温度对脱氢后粉末氢氧含量有较大影响。经过脱氢后样品氢含量均低于0.05wt.%,氢含量随着脱氢温度的升高而逐渐下降,氧含量则相反。600℃时氢含量为0.046wt.%,氧含量为0.27wt.%;当温度为800℃时,氢含量降低为0.023wt.%,而氧含量增加到0.37wt.%;相比较而言,当脱氢温度为700℃时,粉末具有相对最优的氢氧含量,此时氢含量为0.025wt.%,氧含量为0.25wt.%。Fig. 6 is a bar graph of hydrogen and oxygen content in Nb-Si-based dehydrogenated alloy powder of Example 10-12 of a method for preparing Nb-Si-based alloy powder by hydrodehydrogenation in the present invention. As shown in the figure, the dehydrogenation temperature has a great influence on the hydrogen and oxygen content of the powder after dehydrogenation. After dehydrogenation, the hydrogen content of the samples was lower than 0.05wt.%, and the hydrogen content gradually decreased with the increase of the dehydrogenation temperature, while the oxygen content was opposite. At 600°C, the hydrogen content is 0.046wt.%, and the oxygen content is 0.27wt.%. When the temperature is 800°C, the hydrogen content decreases to 0.023wt.%, while the oxygen content increases to 0.37wt.%. In comparison, When the dehydrogenation temperature is 700°C, the powder has relatively optimal hydrogen and oxygen content, at this time, the hydrogen content is 0.025wt.%, and the oxygen content is 0.25wt.%.

图7本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例2Nb-Si基合金粉末脱氢前后形貌变化图;(a)和(a’)为合金在实施例2的工艺条件下处理后筛分获得的D50为86.3μm的粉末形貌和局部放大图,(b)和(b’)为脱氢后Nb-Si基脱氢合金粉末表面形貌。如图所示,氢化粉末呈不规则块状,粉体表面有明显的层片状结构,说明氢化过程中Nb-Si基合金以层片状剥离脱落。不同氢化工艺参数下Nb-Si基合金氢化粉末表面形貌类似,分别有以下两种形貌,其一是单层或多层的层状结构,其表面为光滑断面;其二是非层状块体,其表面分布大量粗糙断面,这是由于氢化粉末从不同的相之间断裂而产生的不同,当粉末从硅化物中间断裂破碎,则表面为光滑断面,当粉末从NbSS相中间断裂,则为粗糙断面。脱氢粉末的表面形貌同氢化粉末相似,均为不规则块状,同时,脱氢过程使粉末发生二次破碎后产生大量尺寸小于10μm细小颗粒,D50为28.4μm。Fig. 7 a kind of method embodiment 2 Nb-Si base alloy powder dehydrogenation of the present invention adopts hydrogenation dehydrogenation to prepare Nb-Si base alloy powder shape change diagram; (a) and (a') are alloy in embodiment 2 The powder morphology and partial enlarged view with a D50 of 86.3 μm obtained after treatment and sieving under the process conditions, (b) and (b') are the surface morphology of the Nb-Si-based dehydrogenation alloy powder after dehydrogenation. As shown in the figure, the hydrogenated powder is in the shape of irregular blocks, and the surface of the powder has an obvious lamellar structure, indicating that the Nb-Si-based alloy peels off in a lamellar shape during the hydrogenation process. The surface morphology of Nb-Si-based alloy hydrogenated powders under different hydrogenation process parameters is similar. body, a large number of rough sections are distributed on the surface, which is caused by the fracture of hydrogenated powder from different phases. When the powder breaks from the middle of the silicide, the surface is a smooth section. When the powder breaks from the middle of the Nb SS phase, is a rough section. The surface morphology of the dehydrogenated powder is similar to that of the hydrogenated powder, both of which are irregular blocks. At the same time, the dehydrogenation process causes the powder to undergo secondary crushing to produce a large number of fine particles with a size less than 10 μm, and the D50 is 28.4 μm.

图8本发明一种采用氢化脱氢制备Nb-Si基合金粉末的方法实施例11获得的Nb-Si基脱氢合金粉末激光熔覆增材制备的Nb-Si基合金块体宏观形貌,(a)为宏观形貌图,(b)为荧光分析图。如图所示,氢化脱氢粉末的粒径为45-105μm,在激光功率1000W、扫描速度600mm/s、扫描间距0.8mm条件下制备的Nb-Si基合金块体,荧光分析表明块体内部无裂纹。Fig. 8 is a macroscopic morphology of Nb-Si-based alloy block prepared by laser cladding and additive manufacturing of Nb-Si-based dehydrogenated alloy powder obtained in Example 11 of a method for preparing Nb-Si-based alloy powder by hydrogenation dehydrogenation, (a) is the macroscopic image, (b) is the fluorescence analysis image. As shown in the figure, the particle size of the hydrogenated dehydrogenation powder is 45-105 μm. The Nb-Si-based alloy block was prepared under the conditions of laser power 1000W, scanning speed 600mm/s, and scanning distance 0.8mm. Fluorescence analysis showed that the inside of the block No cracks.

因此,本发明采用氢化脱氢制备Nb-Si基合金粉末的方法,能够解决现有的Nb-Si基合金粉末生产成本高、生产周期长的问题。Therefore, the present invention adopts the method for preparing Nb-Si-based alloy powder by hydrodehydrogenation, which can solve the problems of high production cost and long production cycle of existing Nb-Si-based alloy powder.

最后应说明的是:以上实施例仅用以说明本发明的技术方案而非对其进行限制,尽管参照较佳实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对本发明的技术方案进行修改或者等同替换,而这些修改或者等同替换亦不能使修改后的技术方案脱离本发明技术方案的精神和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that: it still Modifications or equivalent replacements can be made to the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims (5)

1. A method for preparing Nb-Si based alloy powder by hydrogenation and dehydrogenation, comprising the steps of:
s1, proportioning, namely weighing Nb, si, ti, al, cr, hf, sc pure metal raw materials according to the proportion of the components;
s2, smelting, namely putting the weighed raw materials into a smelting furnace for smelting to obtain Nb-Si-based alloy ingots with uniform components;
s3, hydrogenation, namely placing the Nb-Si-based alloy cast ingot into a hydrogenation dehydrogenation furnace, vacuumizing, raising the furnace temperature to the hydrogenation temperature, introducing hydrogen into the furnace body to the hydrogenation pressure, and preserving heat; obtaining hydrogenated-cracked Nb-Si-based alloy;
s4, crushing, namely crushing and screening the hydrogenated Nb-Si-based alloy to obtain hydrogenated alloy powder;
s5, dehydrogenation, namely carrying out vacuum high-temperature dehydrogenation on the hydrogenated alloy powder in a hydrogenation and dehydrogenation furnace to obtain Nb-Si-based dehydrogenated alloy powder;
in the S1, the atomic percentage content ratio of Nb, si, ti, al, cr, hf, sc is Nb-16Si-24Ti-2Al-2Hf-2Cr-0.3Sc;
in the step S3, the hydrogenation and dehydrogenation furnace is vacuumized to 5 multiplied by 10 -3 Pa, the hydrogenation temperature is 200-300 ℃, and the heating rate is 5-10 ℃/min;
in the step S3, the hydrogenation pressure is 2.5-3.5MPa, and the heat preservation time is 1-2h.
2. A method for producing Nb-Si based alloy powder using hydrogenation and dehydrogenation according to claim 1, wherein: in the step S1, before the raw materials are weighed, the raw materials are placed into acetone and absolute ethyl alcohol for ultrasonic cleaning.
3. A method for producing Nb-Si based alloy powder using hydrogenation and dehydrogenation according to claim 1, wherein: in the step S2, the raw materials are put into a vacuum non-consumable electric arc furnace for smelting, and the smelting is repeated for 5-6 times.
4. A method for producing Nb-Si based alloy powder using hydrogenation and dehydrogenation according to claim 1, wherein: in S4, the particle size of the hydrogenated alloy powder is 45-105 mu m.
5. A method for producing Nb-Si based alloy powder using hydrogenation and dehydrogenation according to claim 1, wherein: in the step S5, the vacuum degree of dehydrogenation is 5 multiplied by 10 -3 Pa, dehydrogenation temperature is 600-800 ℃, and dehydrogenation time is 2h.
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Citations (2)

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Publication number Priority date Publication date Assignee Title
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US5338333A (en) * 1991-06-06 1994-08-16 Nisshin Steel Co., Ltd. Production of powdery intermetallic compound having very fine particle size
US5993732A (en) * 1997-07-11 1999-11-30 Mitsubishi Materials Corporation Method for manufacturing a rare earth magnetic powder having high magnetic anisotropy

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