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CN115196977B - High-strength high-heat-conductivity quartz crucible with three-layer structure and preparation method thereof - Google Patents

High-strength high-heat-conductivity quartz crucible with three-layer structure and preparation method thereof Download PDF

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CN115196977B
CN115196977B CN202110382574.XA CN202110382574A CN115196977B CN 115196977 B CN115196977 B CN 115196977B CN 202110382574 A CN202110382574 A CN 202110382574A CN 115196977 B CN115196977 B CN 115196977B
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CN115196977A (en
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嵇亚明
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Xinyi Zhongxin Photoelectric Technology Co ltd
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/14Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silica
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    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10Crucibles or containers for supporting the melt
    • C30B15/12Double crucible methods
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6567Treatment time
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to the technical field of quartz crucibles, and discloses a preparation method of a quartz crucible with a high-strength high-heat-conductivity three-layer structure, which comprises the following steps: s1: raw material detection: sampling and detecting the raw materials according to the purchase requirements, wherein the detection items comprise the diameter, the purity and the humidity of the raw materials, then recording and analyzing according to the actual detection condition, and if the raw materials are unqualified, the raw materials are forbidden to be used; s2: stirring and evaporating: the invention also provides a high-strength high-heat-conduction quartz crucible with a three-layer structure, which comprises a chassis and a quartz layer, wherein the outer wall of one side of the quartz layer is provided with a graphite layer, and the outer wall of one side of the graphite layer is provided with a protective layer. The invention can not only avoid unqualified raw materials from being mixed into the raw materials, improve the production quality of products, increase the yield of the products, but also strengthen the strength of the products, increase the service capacity of the products, prolong the service life of the products, quickly heat the products and improve the heat conduction capacity of the products.

Description

High-strength high-heat-conductivity quartz crucible with three-layer structure and preparation method thereof
Technical Field
The invention relates to the technical field of quartz crucibles, in particular to a high-strength high-heat-conductivity quartz crucible with a three-layer structure and a preparation method thereof.
Background
As is known well, the quartz crucible has the advantages of high purity, strong temperature resistance, large size, high precision, good heat preservation, energy conservation, stable quality and the like, is more and more widely applied, the detection work of the quartz crucible is an important link, and the detection of the quartz crucible is developed towards the field detection direction.
Meanwhile, the quartz crucible can be used below 1450 ℃, the quartz crucible is transparent and non-transparent, the semi-transparent quartz crucible manufactured by an arc method is a necessary basic material for drawing large-diameter monocrystalline silicon and developing large-scale integrated circuits, while the quartz crucible used in the market is mostly of a single-layer structure, and the strength and the thermal conductivity of the quartz crucible are not ideal, so that the quartz crucible with the high-strength high-thermal conductivity three-layer structure and the preparation method thereof are provided.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a high-strength high-heat-conductivity quartz crucible with a three-layer structure and a preparation method thereof, and mainly aims to solve the problem that the strength and the heat conductivity of the existing single-layer quartz crucible are not ideal enough.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme:
a preparation method of a quartz crucible with a high-strength and high-heat-conductivity three-layer structure comprises the following steps:
s1: raw material detection: sampling and detecting the raw materials according to the purchase requirements, wherein the detection items comprise the diameter, the purity and the humidity of the raw materials, then recording and analyzing according to the actual detection condition, and if the raw materials are unqualified, the raw materials are forbidden to be used;
s2: stirring and evaporating: adding qualified raw materials into a ball mill for ball milling, adding deionized water for ball milling, adding into a homogenizing box for evaporation and stirring to form slurry, and periodically performing sampling detection until the slurry sample is qualified for use;
s3: grouting and forming: injecting qualified slurry into a gypsum mold prepared in advance through a pouring tank, and simultaneously placing the mold in a constant-temperature and constant-humidity environment for waiting for slurry molding;
s4: demolding treatment: taking the molded product out of the mold core and the mold edge, and then carrying out primary drying treatment through hot air;
s5: curing and drying: transferring the product after primary treatment to a curing furnace for rapid curing, and then transferring to a drying oven or a drying furnace for drying to ensure that the dryness of the product reaches the operation standard;
s6: primary detection: preliminarily checking the dried product by using lamplight, judging whether the defective product is repaired or not, and if the defective product cannot be repaired, performing scrapping treatment;
s7: calcining a product: loading and calcining the qualified product in a kiln, and scrapping the unqualified calcined product;
s8: trimming: polishing and chamfering the calcined product through a lathe to enable the product to meet the flatness and use requirements;
s9: final inspection and packaging: and finally checking the product through light and color developing agent, and packaging and warehousing the product after the product is clean.
Further, the purity of the raw material in the S1 is 99.75-99.99%, and the humidity is 0.1-0.8%.
On the basis of the scheme, the stirring time in the S2 is 24-48 hours, and sampling is carried out at intervals of 45-65 minutes.
As a further scheme of the invention, the temperature for slip casting in S3 is 23-26 ℃ and the humidity is 40-60%, and the slip casting time is 6-9 hours.
Further, in the S5, the temperature of the drying furnace is 110-135 ℃, the drying time is 5-8 hours, and the water content of the product reaches 0.1-0.6%.
On the basis of the scheme, the temperature in the calcining kiln in the S7 is maintained between 1100 and 1300 ℃ for 18 to 24 hours, so that the calcining is successful.
The invention also provides a high-strength high-heat-conduction quartz crucible with a three-layer structure, which comprises a chassis and a quartz layer, wherein the outer wall of one side of the quartz layer is provided with a graphite layer, the outer wall of one side of the graphite layer is provided with a protective layer, the bottom of the quartz layer is integrally formed with a fixed disc, the fixed disc penetrates through the graphite layer and the protective layer, the bottom of the fixed disc is integrally formed with a plurality of insertion holes, the upper surface of the chassis is fixedly connected with a plurality of insertion rods, the insertion rods are movably connected with the insertion holes, and one side of each of the graphite layer and the protective layer is provided with a plurality of heat conduction holes.
Furthermore, a top cover is arranged at the top of the quartz layer, and a bulb and an exhaust hole are integrally formed in the top of the top cover.
On the basis of the scheme, a discharge hole is formed in one side of the quartz layer in an integrated mode and penetrates through the graphite layer and the protective layer.
As a further scheme of the invention, the bottom of the chassis is fixedly connected with a support frame, the bottom of the support frame is fixedly connected with a plurality of anti-slip mats, and one side of the protective layer is provided with a plurality of anti-slip lines.
(III) advantageous effects
Compared with the prior art, the invention provides the high-strength high-heat-conductivity quartz crucible with the three-layer structure and the preparation method thereof, and the quartz crucible has the following beneficial effects:
1. according to the preparation method of the high-strength high-heat-conductivity quartz crucible with the three-layer structure, the raw materials are subjected to the sampling detection step, so that unqualified products can be detected in advance, unqualified raw materials are prevented from being mixed, the product production quality is improved, and the product yield is increased.
2. According to the preparation method of the high-strength high-heat-conductivity quartz crucible with the three-layer structure, the product is preliminarily dried through the addition, so that the product can have certain hardness preliminarily, the semi-finished product is prevented from deforming during transfer, and the transfer capacity of the product is improved.
3. This high-strength high heat conduction three-layer construction quartz crucible through quartz layer, graphite layer and inoxidizing coating for the intensity of product can be strengthened, increases the service ability of product simultaneously, improves the life of product.
4. This high-strength high heat conduction three-layer structure quartz crucible through set up a plurality of heat conduction holes at graphite layer and inoxidizing coating for the product can be heated fast when using, reduces the loss of energy, improves the heat conductivility of product.
Drawings
FIG. 1 is a schematic structural view of a high-strength high-thermal-conductivity quartz crucible in a three-layer structure according to the present invention;
FIG. 2 is a schematic diagram of a rear view structure of a high-strength high-thermal-conductivity quartz crucible according to the present invention;
FIG. 3 is a schematic cross-sectional view of a high-strength high-thermal-conductivity quartz crucible of a three-layer structure according to the present invention;
FIG. 4 is an enlarged schematic structural view of point A of a high-strength high-thermal-conductivity quartz crucible according to the present invention;
FIG. 5 is a schematic flow structure diagram of a method for manufacturing a quartz crucible with a high-strength and high-thermal-conductivity three-layer structure according to the present invention.
In the figure: 1. a chassis; 2. a support frame; 3. a non-slip mat; 4. a heat conduction hole; 5. anti-skid lines; 6. a ball head; 7. a top cover; 8. a discharge port; 9. a protective layer; 10. an exhaust hole; 11. a quartz layer; 12. a graphite layer; 13. a rod is inserted; 14. and (7) fixing the disc.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 5, a method for preparing a quartz crucible with a high-strength and high-thermal-conductivity three-layer structure comprises the following steps:
s1: raw material detection: sampling and detecting the raw materials according to the purchase requirements, wherein the detection items comprise the diameter, the purity and the humidity of the raw materials, then recording and analyzing according to the actual detection condition, and if the raw materials are unqualified, the raw materials are forbidden to be used;
s2: stirring and evaporating: adding qualified raw materials into a ball mill for ball milling, adding deionized water for ball milling at the same time, then adding into a homogenization box for evaporation and stirring to form slurry, and simultaneously periodically carrying out sampling detection until the slurry sample is qualified for use;
s3: grouting and forming: injecting qualified slurry into a gypsum mold prepared in advance through a pouring tank, and simultaneously placing the mold in a constant-temperature and constant-humidity environment for waiting for slurry molding;
s4: demolding treatment: taking the molded product out of the mold core and the mold edge, and then carrying out primary drying treatment through hot air;
s5: curing and drying: transferring the product after primary treatment to a curing furnace for rapid curing, and then transferring to a drying oven or a drying furnace for drying to ensure that the dryness of the product reaches the operation standard;
s6: primary detection: preliminarily checking the dried product by using lamplight, judging whether the defective product is repaired or not, and if the defective product cannot be repaired, performing scrapping treatment;
s7: calcining a product: loading and calcining the qualified product in a kiln, and scrapping the unqualified calcined product;
s8: trimming: polishing and chamfering the calcined product through a lathe to enable the product to meet the flatness and use requirements;
s9: final inspection and packaging: and finally checking the product through light and a color developing agent, and packaging and warehousing the product after the product is cleaned.
In the invention, it is noted that the purity of the raw material in S1 is 99.75-99.99%, the humidity is 0.1-0.8%, the stirring time in S2 is 24-48 hours, sampling is carried out at intervals of 45-65 minutes, the slip casting temperature in S3 is 23-26 ℃ and the humidity is 40-60%, the slip casting time is 6-9 hours, the temperature of the drying furnace in S5 is 110-135 ℃, the drying time is 5-8 hours, the water content of the product reaches 0.1-0.6%, the temperature in the calcining kiln in S7 is 1100-1300 ℃ and is kept for 18-24 hours, and then the calcination is successful.
The invention also provides a high-strength high-heat-conduction quartz crucible with a three-layer structure, which comprises a base plate 1 and a quartz layer 11, wherein the outer wall of one side of the quartz layer 11 is provided with a graphite layer 12, the outer wall of one side of the graphite layer 12 is provided with a protective layer 9, the protective layer 9 can reinforce the surface of a product, the strength of the product is improved, the service life of the product is prolonged, the bottom of the quartz layer 11 is integrally formed with a fixed plate 14, the fixed plate 14 penetrates through the graphite layer 12 and the protective layer 9, the fixed plate 14 can support the product, the bottom of the fixed plate 14 is integrally formed with a plurality of jacks, the upper surface of the base plate 1 is fixedly provided with a plurality of inserting rods 13 through bolts, the inserting rods 13 are inserted into the jacks, the product can be fixed on the base plate, the product can be reduced in contact with the product during transfer, the service life of the product is prolonged, the heat conduction holes 4 are formed in one sides of the graphite layer 12 and the protective layer 9, and can facilitate heat conduction, and the product can be rapidly heated.
According to the invention, the top cover 7 is arranged at the top of the quartz layer 11, the ball head 6 and the exhaust hole 10 are integrally formed at the top of the top cover 7, the ball head 6 can facilitate taking of the top cover 7, meanwhile, the exhaust hole 10 prevents unstable air pressure in a product, the discharge hole 8 is integrally formed at one side of the quartz layer 11, the discharge hole 8 penetrates through the graphite layer 12 and the protective layer 9, the discharge hole 8 facilitates pouring of a solution in the product, the support frame 2 is fixed at the bottom of the chassis 1 through bolts, the anti-slip pads 3 are bonded at the bottom of the support frame 2, and the anti-slip threads 5 are formed at one side of the protective layer 9.
The working principle of the embodiment is as follows: during the use, open top cap 7 through bulb 6, then put the raw materials that need processing to the product in, then put the product and heat in the heater, the heat passes through in the heat conduction hole 9 on graphite layer 12 and the inoxidizing coating 9 gets into the product simultaneously, heat the raw materials in the product, exhaust hole 10 carries out gas exchange to the product simultaneously, avoid the too high or low problem of the inside atmospheric pressure of product, take out the product through the gripper after the heating is accomplished, and open top cap 7 through bulb 6, then the raw materials that will melt passes through discharge gate 8 and discharges, when the product need not use chassis 1, directly take off the product from chassis 1, fixed disk 14 of quartz layer 11 bottom supports the product simultaneously, avoid the product to take place to rock when using.
The electrical components in the document are electrically connected with an external master controller and 220V mains supply, and the master controller can be a computer or other conventional known devices for playing a role in control.
In the description herein, it is to be noted that, unless expressly stated or limited otherwise, the terms "connected" and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; the connection may be mechanical or electrical, and may be direct or indirect via an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, it is noted that relational terms such as first and second, and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (3)

1. The utility model provides a high thermal conductivity three layer construction quartz crucible of excelling in, includes chassis (1) and quartz capsule (11), its characterized in that: the anti-skid device is characterized in that a graphite layer (12) is arranged on the outer wall of one side of the quartz layer (11), a protective layer (9) is arranged on the outer wall of one side of the graphite layer (12), a fixed disc (14) is integrally formed at the bottom of the quartz layer (11), the fixed disc (14) penetrates through the graphite layer (12) and the protective layer (9), a plurality of jacks are integrally formed at the bottom of the fixed disc (14), a plurality of inserting rods (13) are fixedly connected to the upper surface of the chassis (1), the inserting rods (13) are movably connected with the jacks, a plurality of heat conduction holes (4) are formed in one sides of the graphite layer (12) and the protective layer (9), a top cover (7) is arranged at the top of the quartz layer (11), a ball head (6) and an exhaust hole (10) are integrally formed at the top of the top cover (7), a plurality of anti-skid pads (3) are fixedly connected to one side of the quartz layer (11), a plurality of anti-skid pads (5) are formed at one side of the anti-skid pads (9); the preparation method of the high-strength high-heat-conductivity quartz crucible with the three-layer structure comprises the following steps:
s1: raw material detection: sampling and detecting the raw materials according to the purchasing requirement, wherein the detection items comprise the diameter, the purity and the humidity of the raw materials, recording and analyzing according to the actual detection condition, and if the raw materials are unqualified, the raw materials are forbidden to be used, wherein the purity of the raw materials is 99.75-99.99%, and the humidity is 0.1-0.8%;
s2: stirring and evaporating: adding qualified raw materials into a ball mill for ball milling, adding deionized water for ball milling, adding into a homogenizing box for evaporation and stirring to form slurry, and periodically performing sampling detection until the slurry sample is qualified for use;
s3: grouting and forming: injecting qualified slurry into a gypsum mold prepared in advance through a pouring tank, and simultaneously placing the mold in a constant-temperature and constant-humidity environment for waiting for slurry molding;
s4: demolding treatment: taking the molded product out of the mold core and the mold edge, and then carrying out primary drying treatment through hot air;
s5: curing and drying: transferring the primarily treated product to a curing furnace for rapid curing, and then transferring the product to a drying oven or a drying furnace for drying so that the dryness of the product reaches the operation standard, the temperature of the drying oven is 110-135 ℃, and the drying time is 5-8 hours so that the water content of the product reaches 0.1-0.6%;
s6: primary detection: preliminarily checking the dried product by using lamplight, judging whether the defective product is repaired or not, and if the defective product cannot be repaired, performing scrapping treatment;
s7: calcining a product: loading qualified products into a kiln for calcination, scrapping unqualified products after calcination, keeping the temperature in the kiln at 1100-1300 ℃ for 18-24 hours to ensure that the calcination is successful;
s8: trimming: polishing and chamfering the calcined product through a lathe to enable the product to meet the flatness and use requirements;
s9: final inspection and packaging: and finally checking the product through light and color developing agent, and packaging and warehousing the product after the product is clean.
2. A high-strength high-thermal conductivity quartz crucible according to claim 1, wherein: and in the S2, stirring for 24-48 hours, and sampling at intervals of 45-65 minutes.
3. The quartz crucible with a three-layer structure, high strength and high thermal conductivity as claimed in claim 1, wherein: and the grouting forming temperature in the S3 is 23-26 ℃, the humidity is 40-60%, and the grouting forming time is 6-9 hours.
CN202110382574.XA 2021-04-09 2021-04-09 High-strength high-heat-conductivity quartz crucible with three-layer structure and preparation method thereof Active CN115196977B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090277377A1 (en) * 2008-05-07 2009-11-12 Covalent Materials Corporation Crucible for melting silicon and release agent used to the same
CN102320723A (en) * 2011-08-24 2012-01-18 陕西科技大学 Preparation method of quartz crucible
CN110302854A (en) * 2018-03-27 2019-10-08 连云港科拓信息科技有限公司 A kind of silica crucible that heat insulation effect is excellent
CN110451941A (en) * 2019-08-21 2019-11-15 大同新成新材料股份有限公司 A kind of preparation method of crucible used for polycrystalline silicon ingot casting

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090277377A1 (en) * 2008-05-07 2009-11-12 Covalent Materials Corporation Crucible for melting silicon and release agent used to the same
CN102320723A (en) * 2011-08-24 2012-01-18 陕西科技大学 Preparation method of quartz crucible
CN110302854A (en) * 2018-03-27 2019-10-08 连云港科拓信息科技有限公司 A kind of silica crucible that heat insulation effect is excellent
CN110451941A (en) * 2019-08-21 2019-11-15 大同新成新材料股份有限公司 A kind of preparation method of crucible used for polycrystalline silicon ingot casting

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