CN115185030B - A kind of preparation method of Rugate optical filter - Google Patents
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Abstract
Description
技术领域technical field
本发明实施例涉及滤光片技术领域，尤其是一种Rugate滤光片的制备方法。The embodiments of the present invention relate to the technical field of optical filters, in particular to a method for preparing a Rugate optical filter.
背景技术Background technique
皱褶(Rugate)滤光片是一种周期性的渐变折射率薄膜，其折射率呈现正弦或者余弦变化形式，具有较高的抗激光损伤阈值和较小的薄膜应力等潜在优势。Rugate filter is a periodic graded-refractive-index film, whose refractive index exhibits sinusoidal or cosineal changes, and has potential advantages such as high anti-laser damage threshold and small film stress.
利用传统设计方法制备的滤光片，在截止波段两侧会产生一系列高级次反射带，显著影响测量精度。而采用非均匀膜系结构设计出的Rugate滤光片，其渐变折射率结构克服了高、低折射率材料在膜层分界面之间的跃变，能够有效地降低高级次反射带，同时抑制在大折射率对比度设计中出现的二次谐波。Filters prepared by traditional design methods will produce a series of high-order reflection bands on both sides of the cut-off band, which will significantly affect the measurement accuracy. The Rugate filter designed with a non-uniform film structure, its graded refractive index structure overcomes the jump between high and low refractive index materials at the interface of the film layer, can effectively reduce the high-order reflection band, and at the same time suppress Second harmonics appearing in large index contrast designs.
然而，自然界中的材料在相同波段的折射率均不是连续变化的，导致Rugate滤光片的制备十分困难。目前常用于制备Rugate滤光片的共镀技术，是利用高低折射率材料混合蒸发或溅射获得一种折射率介于高、低折射率之间的混合材料，通过调整高、低折射率材料的比例，达到改变混合材料折射率的目的。但是由于高、低折射率材料的沉积速率难以精准监控，无法实现精确检测各层膜厚，导致批量制备Rugate滤光片的工艺重复性较差。目前Rugate薄膜在设计和制备方法上存在严重的局限性，包括设计方法不够完善、实验制备较为复杂，尤其在制备具有复杂函数分布的精细结构方面存在较大困难。这些问题极大地制约了Rugate薄膜的性能提高和功能发挥。However, the refractive index of materials in nature does not change continuously in the same wavelength band, which makes the preparation of Rugate filters very difficult. At present, the co-plating technology commonly used in the preparation of Rugate filters is to use the mixed evaporation or sputtering of high and low refractive index materials to obtain a mixed material with a refractive index between high and low refractive index. By adjusting the high and low refractive index materials To achieve the purpose of changing the refractive index of the mixed material. However, due to the difficulty in accurately monitoring the deposition rate of high and low refractive index materials, it is impossible to accurately detect the film thickness of each layer, resulting in poor repeatability of the process for batch production of Rugate filters. At present, there are serious limitations in the design and preparation methods of Rugate thin films, including incomplete design methods and complicated experimental preparation, especially in the preparation of fine structures with complex function distributions. These problems greatly restrict the performance improvement and function of Rugate thin films.
发明内容Contents of the invention
本发明实施例提供一种Rugate滤光片的制备方法，The embodiment of the present invention provides a kind of preparation method of Rugate optical filter,
获取待响应的目标响应，利用DLP重构算法重构出所述目标响应对应的Rugate薄膜的结构参数；Obtain the target response to be responded to, and use the DLP reconstruction algorithm to reconstruct the structural parameters of the Rugate film corresponding to the target response;
利用预设的采样函数对所述Rugate薄膜的结构参数进行设计得到采样结构的结构参数；Using a preset sampling function to design the structural parameters of the Rugate film to obtain the structural parameters of the sampling structure;
按照所述采样结构的结构参数在石英或玻璃表面进行镀膜得到Rugate滤光片。According to the structural parameters of the sampling structure, a Rugate optical filter is obtained by coating a quartz or glass surface.
进一步地，所述利用预设的采样函数对所述Rugate薄膜的结构参数进行设计得到采样结构的结构参数，包括：Further, the structural parameters of the Rugate film are designed using the preset sampling function to obtain the structural parameters of the sampling structure, including:
运用等效响应的方式通过+1级傅里叶级数信道等效实现所述目标响应，针对重构的目标响应对应的Rugate薄膜的结构参数进行采样结构设计，得到采样结构的结构参数。The target response is equivalently realized through the +1-order Fourier series channel by using the equivalent response method, and the sampling structure is designed for the structural parameters of the Rugate film corresponding to the reconstructed target response, and the structural parameters of the sampling structure are obtained.
进一步地，DLP重构算法的表达式为：Further, the expression of the DLP reconstruction algorithm is:
其中A+1(z)是+1级傅里叶级数信道的幅度切趾，φ+1(z)是+1级傅里叶级数信道的相位改变，为纳米量级精度，Λ+1(z)为+1级傅里叶级数信道的Rugate周期，为纳米量级精度，c.c表示共轭复数，j表示虚数单位。Wherein A +1 (z) is the amplitude apodization of the +1-level Fourier series channel, φ +1 (z) is the phase change of the +1-level Fourier series channel, and is nanometer-scale precision, Λ + 1 (z) is the Rugate period of the +1-level Fourier series channel, which is nanometer-level precision, cc represents a conjugate complex number, and j represents an imaginary number unit.
进一步地，采样结构设计的表达式为：Further, the expression of sampling structure design is:
其中，A(z)是+1级傅里叶级数信道的幅度切趾，Fm是傅里叶系数，f(z)是随膜厚z变化的采样函数，P是固定不变的采样周期大小，Λ为固定不变的均匀Rugate周期，Λ+1表示+1级傅里叶级数信道的Rugate周期。in, A(z) is the amplitude apodization of the +1-level Fourier series channel, F m is the Fourier coefficient, f(z) is the sampling function that changes with the film thickness z, and P is the fixed sampling period , Λ is a fixed uniform Rugate period, Λ +1 represents the Rugate period of +1-level Fourier series channel.
进一步地，所述按照所述采样结构的结构参数在Rugate薄膜表面进行镀膜得到Rugate滤光片，包括：Further, the Rugate filter is obtained by coating on the surface of the Rugate film according to the structural parameters of the sampling structure, including:
按照所述采样结构的结构参数采用物理成膜方法，运用双源快速交替沉积连续改变高低折射率靶材膜料的沉积速率，或同时改变两种高低折射率靶材膜料的沉积速率在石英或玻璃表面进行镀膜得到Rugate滤光片的褶皱区域。According to the structural parameters of the sampling structure, the physical film formation method is adopted, and the deposition rate of the high and low refractive index target film material is continuously changed by using dual-source rapid alternate deposition, or the deposition rate of the two high and low refractive index target film materials is changed simultaneously. Or the glass surface is coated to obtain the wrinkled area of the Rugate filter.
进一步地，还包括：Further, it also includes:
Rugate薄膜表面中折射率不变的部分通过只溅射低折射率材料制备采样结构的Rugate薄膜。The Rugate film with a sampling structure is prepared by sputtering only the low refractive index material on the surface of the Rugate film with a constant refractive index.
进一步地，高折射率材料选用HfO2或Al2O3中的至少一种。Further, at least one of HfO 2 or Al 2 O 3 is selected as the high refractive index material.
进一步地，还包括：Further, it also includes:
对于采样结构的Rugate薄膜，在基于均匀Rugate周期Λ情况下，啁啾的+1级傅里叶级数信道的目标响应的采样周期P(z)为：For a Rugate film with a sampling structure, in the case of a uniform Rugate period Λ, the sampling period P(z) of the target response of the chirped +1-order Fourier series channel is:
其中，Λ为Rugate周期，Λ+1(z)为+1级傅里叶级数信道的Rugate周期。Wherein, Λ is the Rugate period, Λ +1 (z) is the Rugate period of the +1-level Fourier series channel.
进一步地，目标响应为光谱和角谱。Further, the target response is spectrum and angular spectrum.
进一步地，采样结构的膜厚为亚微米量级精度。Further, the film thickness of the sampling structure is sub-micron level precision.
本发明实施例的有益效果是：本发明将采样技术应用于Rugate薄膜滤光片的设计。周期性的折射率调制(称为光栅)的众多方法中，采样技术具备很强的设计灵活性并且制备简单。该技术利用微米量级采样结构的方法等效实现纳米量级的复杂精细结构，不仅在实现复杂功能光纤光栅领域得到了广泛应用，还应用于平面波导光栅。采样周期大小通常数倍于Rugate单个周期，因此该方法只需要亚微米量级的控制精度就能等效实现传统纳米量级的复杂精细结构，从而大大简化了制作工艺，降低了制作成本，促进了光学薄膜滤光片制备技术的发展。The beneficial effect of the embodiment of the present invention is: the present invention applies the sampling technology to the design of Rugate thin film filter. Among the many methods for periodic refractive index modulation (called gratings), the sampling technique offers great design flexibility and is easy to fabricate. This technology uses the micron-scale sampling structure method to equivalently realize the nano-scale complex and fine structure, which is not only widely used in the field of realizing complex functional fiber gratings, but also applied to planar waveguide gratings. The size of the sampling period is usually several times that of Rugate's single period, so this method only needs sub-micron level control precision to equivalently realize the complex and fine structure of the traditional nanometer level, which greatly simplifies the manufacturing process, reduces the manufacturing cost, and promotes The development of optical thin film filter preparation technology.
附图说明Description of drawings
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can also be obtained based on these drawings without any creative effort.
图1为本发明的实施例提供的采样结构Rugate折射率调制示意图；Fig. 1 is a schematic diagram of sampling structure Rugate refractive index modulation provided by an embodiment of the present invention;
图2为本发明的实施例提供的重构算法与等效响应法相结合实现特定的目标响应图；Fig. 2 is the combination of the reconstruction algorithm provided by the embodiment of the present invention and the equivalent response method to realize a specific target response diagram;
图3为本发明的实施例提供的采样结构Rugate薄膜和传统Rugate薄膜制备方法的对比图；Fig. 3 is the comparative figure of the sampling structure Rugate thin film that the embodiment of the present invention provides and traditional Rugate thin film preparation method;
图4为本发明的实施例提供的采样等效相移Rugate折射率调制结构与传统真实相移Rugate折射率调制结构以及相应光谱的对比图。FIG. 4 is a comparison diagram of the sampling equivalent phase-shift Rugate refractive index modulation structure provided by the embodiment of the present invention and the traditional true phase-shift Rugate refractive index modulation structure and corresponding spectra.
具体实施方式Detailed ways
为了使本技术领域的人员更好地理解本发明方案，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention.
本发明实施例提供一种Rugate滤光片的制备方法，包括：The embodiment of the present invention provides a kind of preparation method of Rugate optical filter, comprising:
步骤一、获取待响应的目标响应，利用DLP重构算法重构出所述目标响应对应的Rugate薄膜的结构参数；Step 1. Obtain the target response to be responded, and use the DLP reconstruction algorithm to reconstruct the structural parameters of the Rugate film corresponding to the target response;
本发明实施例基于所需的Rugate薄膜性质分析出Rugate薄膜的物理结构，这种思想称之为重构。本发明采用分离剥层重构算法(Discrete Layer Peeling，DLP)来精确设计目标响应所需的Rugate结构，同时还利用DLP重构算法分析改进实际制备Rugate的性能。The embodiment of the present invention analyzes the physical structure of the Rugate thin film based on the required properties of the Rugate thin film, and this idea is called reconstruction. The present invention adopts Discrete Layer Peeling (DLP) to precisely design the Rugate structure required by the target response, and also utilizes the DLP reconstruction algorithm to analyze and improve the performance of actually preparing Rugate.
具体地，利用DLP重构算法，重构出目标响应(光谱和角谱)所对应的Rugate折射率调制，即结构参数，假设重构得出的折射率调制表达式为Specifically, use the DLP reconstruction algorithm to reconstruct the Rugate refractive index modulation corresponding to the target response (spectrum and angular spectrum), that is, the structural parameters, assuming that the refractive index modulation expression obtained by the reconstruction is
其中A+1()是+1级傅里叶级数信道的幅度切趾，φ+1()是+1级傅里叶级数信道的相位改变，为纳米量级精度，Λ+1()为+1级傅里叶级数信道的Rugate周期，为纳米量级精度，c.c表示共轭复数，j表示虚数单位。Wherein A +1 () is the amplitude apodization of the +1-level Fourier series channel, phi +1 () is the phase change of the +1-level Fourier series channel, and is nanometer-scale precision, Λ +1 ( ) is the Rugate period of the +1-level Fourier series channel, with nanometer-level precision, cc represents a conjugate complex number, and j represents an imaginary number unit.
步骤二、利用预设的采样函数对所述Rugate薄膜的结构参数进行设计得到采样结构的结构参数；Step 2, using the preset sampling function to design the structural parameters of the Rugate film to obtain the structural parameters of the sampling structure;
需要说明的是，如图1所示为采样结构Rugate折射率调制，该方法实现周期性结构的特点在于引入采样光栅的结构，利用采样光栅的正负1级信道等效实现目标响应，而正负1级信道的频谱响应是由微米量级的采样函数决定，因此传统纳米量级精细结构才能实现的目标响应，可以通过微米量级的采样结构等效实现。通常，采样周期大小通常数倍于Rugate单个周期，因此只需要亚微米量级的控制精度就能等效实现传统纳米量级的复杂精细结构，从而大大简化了制作工艺，降低了制作成本。It should be noted that, as shown in Figure 1, the sampling structure Rugate refractive index modulation is shown. The feature of this method to realize the periodic structure is that the structure of the sampling grating is introduced, and the positive and negative channels of the sampling grating are used to achieve the target response equivalently. The spectral response of the minus-1 channel is determined by the sampling function of the micron scale, so the target response that can only be achieved by the traditional nanoscale fine structure can be equivalently achieved by the micron scale sampling structure. Usually, the size of the sampling cycle is several times larger than a single Rugate cycle, so only sub-micron level control precision is required to equivalently realize the complex and fine structure of the traditional nanometer level, which greatly simplifies the manufacturing process and reduces the manufacturing cost.
具体地，运用等效响应的方式通过+1级傅里叶级数信道等效实现所述目标响应，针对重构的目标响应对应的Rugate薄膜的结构参数进行采样结构设计，得到采样结构的结构参数，其中，采样结构Rugate的结构参数计算如下：Specifically, the target response is equivalently realized through the +1-order Fourier series channel by using the equivalent response method, and the sampling structure is designed for the structural parameters of the Rugate film corresponding to the reconstructed target response, and the structure of the sampling structure is obtained Parameters, where the structural parameters of the sampling structure Rugate are calculated as follows:
其中，A(z)是+1级傅里叶级数信道的幅度切趾，Fm是傅里叶系数，f(z)是随膜厚z变化的采样函数，亚微米量级精度，P是固定不变的采样周期大小，Λ为固定不变的均匀Rugate周期，Λ+1表示+1级傅里叶级数信道的Rugate周期。in, A(z) is the amplitude apodization of the +1-level Fourier series channel, Fm is the Fourier coefficient, f(z) is a sampling function that changes with the film thickness z, and the accuracy is submicron, and P is a fixed variable sampling period size, Λ is a fixed uniform Rugate period, Λ +1 represents the Rugate period of +1-level Fourier series channel.
其中，等效响应方式是通过科学设计易于实现的Rugate物理结构，使其产生的响应特性在感兴趣的范围内并达到与目标响应具有同样特征、具备同等处理能力。Among them, the equivalent response method is to scientifically design the Rugate physical structure that is easy to implement, so that the response characteristics generated by it are within the range of interest and have the same characteristics and processing capabilities as the target response.
该过程表明，根据所要求的目标响应谱(光谱和角谱)，运用先进的DLP重构算法得到目标Rugate的结构参数，然而该参数往往含有纳米量级的复杂精细结构(比如简单正弦、啁啾、切趾等)，如果直接依据目标Rugate的结构参数去制备实现目标Rugate结构，不仅对于制备工艺要求极为苛刻，而且性能难以保证。但是，如果根据采样结构Rugate的结构参数，在+1级傅里叶级数信道光谱上就可以等效实现目标响应特性。其优势在于：由于采样周期大小往往数倍于Rugate周期本身，因此只需要亚微米量级的精度就能够控制采样函数的精确实现。换言之，亚微米量级的大尺度操作能够等效实现传统纳米量级的复杂精细结构。具体过程可用图2所示。The process shows that according to the required target response spectrum (spectrum and angular spectrum), the structural parameters of the target Rugate are obtained by using the advanced DLP reconstruction algorithm. Chirp, apodization, etc.), if the target Rugate structure is directly prepared according to the structural parameters of the target Rugate, not only the preparation process is extremely demanding, but also the performance is difficult to guarantee. However, according to the structural parameters of the sampling structure Rugate, the target response characteristics can be equivalently realized on the +1-order Fourier series channel spectrum. Its advantage is that since the sampling period is often several times larger than the Rugate period itself, only sub-micron precision can be used to control the precise realization of the sampling function. In other words, large-scale operations at the submicron level can equivalently realize complex and fine structures at the traditional nanometer level. The specific process can be shown in Figure 2.
本发明的一个实施例，对于采样结构的Rugate薄膜，在基于均匀Rugate周期Λ情况下，具备不同参数，例如正弦、切趾、啁啾等，+1级傅里叶级数信道的目标响应，可以通过改变采样函数而得到。比如，啁啾化的Λ+1(z)为+1级傅里叶级数信道的Rugate周期，可通过如下设计采样周期P(z)来实现：In one embodiment of the present invention, for the Rugate thin film of sampling structure, under the situation based on uniform Rugate cycle Λ, possess different parameters, such as sine, apodization, chirp, etc., the target response of +1-order Fourier series channel, It can be obtained by changing the sampling function. For example, the chirped Λ +1 (z) is the Rugate period of the +1-level Fourier series channel, which can be realized by designing the sampling period P(z) as follows:
其中，Λ为Rugate周期，Λ+1(z)为+1级傅里叶级数信道的Rugate周期。Wherein, Λ is the Rugate period, Λ +1 (z) is the Rugate period of the +1-level Fourier series channel.
由于采样周期大小往往数倍于Rugate周期本身，这将有助于降低制备难度。采样函数变化空间大，可以通过设计不同的采样函数以实现多样化的目标响应。Since the size of the sampling period is often several times that of the Rugate period itself, this will help reduce the difficulty of preparation. The sampling function has a large variation space, and different target responses can be achieved by designing different sampling functions.
步骤三、按照所述采样结构的结构参数在Rugate薄膜表面进行镀膜得到Rugate滤光片。Step 3: coating the surface of the Rugate film according to the structural parameters of the sampling structure to obtain a Rugate filter.
具体地，按照所述采样结构的结构参数采用物理成膜方法，例如，磁控溅射，运用双源快速交替沉积连续改变两种高低折射率靶材膜料的沉积速率，或同时改变两种高低折射率靶材膜料的沉积速率在Rugate薄膜表面进行镀膜得到Rugate滤光片的褶皱区域。此外，Rugate薄膜表面中折射率不变的部分，即采样区域通过只溅射低折射率材料制备采样结构的Rugate薄膜。其中，高折射率材料选用HfO2或Al2O3中的至少一种。Specifically, according to the structural parameters of the sampling structure, a physical film-forming method, such as magnetron sputtering, is used to continuously change the deposition rates of two high- and low-refractive index target film materials by using dual-source rapid alternate deposition, or change the two deposition rates simultaneously. The deposition rate of high and low refractive index target material is coated on the surface of Rugate film to obtain the wrinkled area of Rugate filter. In addition, the portion of the surface of the Rugate film with a constant refractive index, that is, the sampling area, is prepared by sputtering only materials with a low refractive index to form a Rugate film with a sampling structure. Wherein, the high refractive index material is selected from at least one of HfO 2 or Al 2 O 3 .
如图3所示，为采样结构Rugate薄膜和传统Rugate薄膜制备方法的对比图。As shown in Figure 3, it is a comparison chart of the sample structure Rugate thin film and the traditional Rugate thin film preparation method.
本发明提出将采样结构引入到Rugate薄膜中，有可能解决传统Rugate薄膜滤光片在设计制备上存在的问题，并且进一步拓展思路实现复杂多样化的功能。这种方法实现周期性结构的优点在于引入采样结构，利用采样结构的正负1级傅里叶级数信道等效实现目标响应，而正负1级信道的频谱响应是由微米量级的采样函数决定的，因此传统纳米量级精细结构才能实现的目标响应就可以通过微米量级的采样结构来等效实现。采取重构算法可以精确设计出目标响应所需的Rugate结构。此外，重构技术可以根据已有的实验结果较好地还原出Rugate结构，对于分析、查找实验制作过程中存在的问题提供了直接数据，为进一步改进Rugate薄膜性能提供了反馈作用。DLP算法提供了一种设计方便、有效和具有直观物理意义的周期性光学结构重构方法，具有计算时间短和重构精度高的优点。如图4所示为通过改变采样周期得到的等效相移Rugate折射率调制结构及相应的光谱的示意图。正如图中所示，传统的真实相移结构需要纳米量级的控制精度，而本发明采用的采样结构仅需要亚微米量级的控制精度，并且两者实现的π相移光谱却是等效的。The invention proposes to introduce the sampling structure into the Rugate thin film, which may solve the problems existing in the design and manufacture of the traditional Rugate thin film filter, and further expand the thinking to realize complex and diverse functions. The advantage of this method to realize the periodic structure is that it introduces a sampling structure, and uses the positive and negative one-level Fourier series channels of the sampling structure to achieve the target response equivalently, and the spectral response of the positive and negative one-level channels is determined by the micron-scale sampling function, so the target response that can only be achieved by traditional nanometer-scale fine structures can be equivalently achieved by micron-scale sampling structures. The Rugate structure required by the target response can be precisely designed by adopting the reconstruction algorithm. In addition, the reconstruction technology can better restore the Rugate structure based on the existing experimental results, providing direct data for analyzing and finding problems in the experimental fabrication process, and providing feedback for further improving the performance of Rugate thin films. The DLP algorithm provides a periodic optical structure reconstruction method that is convenient to design, effective and has intuitive physical meaning, and has the advantages of short calculation time and high reconstruction accuracy. FIG. 4 is a schematic diagram of the equivalent phase-shifted Rugate refractive index modulation structure obtained by changing the sampling period and the corresponding spectrum. As shown in the figure, the traditional real phase shift structure requires nanometer-level control precision, while the sampling structure adopted in the present invention only requires sub-micron level control precision, and the π phase-shift spectra achieved by the two are equivalent of.
显然，上述实施例仅仅是为清楚地说明所作的举例，而并非对实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.
以上所述仅是本发明的部分实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。The above descriptions are only part of the embodiments of the present invention. It should be pointed out that those skilled in the art can make some improvements and modifications without departing from the principles of the present invention. It should be regarded as the protection scope of the present invention.
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4837044A (en) * | 1987-01-23 | 1989-06-06 | Itt Research Institute | Rugate optical filter systems |
| FR2823563A1 (en) * | 2001-04-12 | 2002-10-18 | Get Enst | Tunable optical filter has a polarization separating extractor with transmission or reflection diffraction grating and reconfigurable Bragg unit |
| US7352931B1 (en) * | 2005-03-08 | 2008-04-01 | Teraxion Inc. | Method and phase mask for manufacturing a multi-channel optical grating |
| CN101750671A (en) * | 2009-12-23 | 2010-06-23 | 南京大学 | Planar waveguide Bragg grating and laser thereof based on reconstruction-equivalent chirp and equivalent apodization |
| CN102789005A (en) * | 2012-06-21 | 2012-11-21 | 上海交通大学 | Annular micro-fold optical lens and preparation method thereof |
| CN103698829A (en) * | 2013-11-22 | 2014-04-02 | 中国科学院上海光学精密机械研究所 | Combined multilayer dielectric film cut-off filter device |
| CN105207055A (en) * | 2015-10-08 | 2015-12-30 | 南京大学（苏州）高新技术研究院 | Half-edge apodized sampling grating based on reconstruction-equivalence chirp and DFB laser |
| CN106125348A (en) * | 2016-06-08 | 2016-11-16 | 哈尔滨工业大学 | A kind of fast tunable reconfigurable microwave photon filter based on electric light Fa-Po cavity |
| CN109881157A (en) * | 2019-03-19 | 2019-06-14 | 南京航空航天大学 | A method for periodic regulation of phase transition properties of vanadium dioxide thin films |
| CN111999788A (en) * | 2020-09-28 | 2020-11-27 | 浙江大学 | Broad Spectrally Encoded Full Color Filter Array |
| WO2021207722A1 (en) * | 2020-04-10 | 2021-10-14 | The Research Foundation For The States University Of New York | System and method for 3d image scanning |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7177497B2 (en) * | 2003-10-02 | 2007-02-13 | Trex Enterprises Corp. | Porous silicon filter for wavelength multiplexing or de-multiplexing |
| EP3557332A4 (en) * | 2016-12-15 | 2019-12-25 | Toppan Printing Co., Ltd. | CALCULATION METHOD, RECORDING METHOD, OPTICAL FILM AND PHASE MODULATION STRUCTURE |
| US20200301053A1 (en) * | 2019-03-20 | 2020-09-24 | Coherent AI LLC | Optical sensing device employing light intensity detectors integrated with nanostructures |
| DE102020118842A1 (en) * | 2020-07-16 | 2022-01-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Optical filter with nanostructured layers and spectral sensor with such layers |
| US12153235B2 (en) * | 2020-11-06 | 2024-11-26 | Purdue Research Foundation | Pearl-inspired hyperspectral filter arrays |
-
2022
- 2022-06-21 CN CN202210706712.XA patent/CN115185030B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4837044A (en) * | 1987-01-23 | 1989-06-06 | Itt Research Institute | Rugate optical filter systems |
| FR2823563A1 (en) * | 2001-04-12 | 2002-10-18 | Get Enst | Tunable optical filter has a polarization separating extractor with transmission or reflection diffraction grating and reconfigurable Bragg unit |
| US7352931B1 (en) * | 2005-03-08 | 2008-04-01 | Teraxion Inc. | Method and phase mask for manufacturing a multi-channel optical grating |
| CN101750671A (en) * | 2009-12-23 | 2010-06-23 | 南京大学 | Planar waveguide Bragg grating and laser thereof based on reconstruction-equivalent chirp and equivalent apodization |
| CN102789005A (en) * | 2012-06-21 | 2012-11-21 | 上海交通大学 | Annular micro-fold optical lens and preparation method thereof |
| CN103698829A (en) * | 2013-11-22 | 2014-04-02 | 中国科学院上海光学精密机械研究所 | Combined multilayer dielectric film cut-off filter device |
| CN105207055A (en) * | 2015-10-08 | 2015-12-30 | 南京大学（苏州）高新技术研究院 | Half-edge apodized sampling grating based on reconstruction-equivalence chirp and DFB laser |
| CN106125348A (en) * | 2016-06-08 | 2016-11-16 | 哈尔滨工业大学 | A kind of fast tunable reconfigurable microwave photon filter based on electric light Fa-Po cavity |
| CN109881157A (en) * | 2019-03-19 | 2019-06-14 | 南京航空航天大学 | A method for periodic regulation of phase transition properties of vanadium dioxide thin films |
| WO2021207722A1 (en) * | 2020-04-10 | 2021-10-14 | The Research Foundation For The States University Of New York | System and method for 3d image scanning |
| CN111999788A (en) * | 2020-09-28 | 2020-11-27 | 浙江大学 | Broad Spectrally Encoded Full Color Filter Array |
Non-Patent Citations (1)
| Title |
|---|
| 刘暾东 等.基于粒子群算法的多通道光纤布拉格光栅滤波器优化设计.《光学学报》.2014,第 34 卷(第 8 期 ),第90-95页. * |
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