CN115142040B - Diamond film with high welding strength and preparation method and application thereof - Google Patents
Diamond film with high welding strength and preparation method and application thereof Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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Abstract
本发明公开了一种焊接强度高的金刚石膜及其制备方法和应用。该金刚石膜包括金属碳化物颗粒、金刚石层和金刚石晶粒,其中所述金刚石层下表面布设有凸起的金属碳化物颗粒,所述金属碳化物颗粒部分嵌入于所述金刚石层中;所述金刚石层上表面布设有凸起的金刚石晶粒,所述金刚石晶粒与金刚石层一体生长而成。本发明采用热丝化学气相沉积法,可以简单的将碳化物嵌入金刚石层的下表面,同时在沉积后期通过施加偏压的改变,合理控制金刚石生长面的结构,得到与金刚石层一体生长的凸起的金刚石晶粒。该金刚石膜用于钎焊时,可形成有效的粘结,显著提高钎焊时的焊接强度,且制备方法简单,有利于工业化应用。The invention discloses a diamond film with high welding strength and its preparation method and application. The diamond film includes metal carbide particles, a diamond layer and diamond grains, wherein protruding metal carbide particles are arranged on the lower surface of the diamond layer, and the metal carbide particles are partially embedded in the diamond layer; Protruding diamond grains are arranged on the upper surface of the diamond layer, and the diamond grains grow integrally with the diamond layer. The present invention adopts the hot wire chemical vapor deposition method, which can simply embed carbide into the lower surface of the diamond layer. At the same time, by changing the applied bias voltage in the later stage of deposition, the structure of the diamond growth surface can be reasonably controlled to obtain a convex surface that grows integrally with the diamond layer. diamond grains. When the diamond film is used for brazing, it can form effective bonding, significantly improve the welding strength during brazing, and the preparation method is simple, which is conducive to industrial application.
Description
技术领域Technical field
本发明属于表面加工膜材料制备领域,具体涉及一种焊接强度高的金刚石膜及其制备方法和应用。The invention belongs to the field of surface processing film material preparation, and specifically relates to a diamond film with high welding strength and its preparation method and application.
背景技术Background technique
金刚石是一种特殊的单质碳,其晶体结构属等轴面心立方晶系。金刚石中碳原子间的连接键为杂化共价键具有很高的结合力、稳定性和方向性。独特的晶体结构使金刚石具有自然界物质中最高的硬度(莫氏硬度为10)、最高的弹性模量、最低的压缩系数以及优良的抗磨损、抗腐蚀性和化学稳定性。金刚石的断裂应力高达40*103MPa,且在断裂前不发生塑性流变。具有优异物理机械性能的金刚石是制作硬脆材料加工工具的理想材料,广泛应用于硬质合金、工程陶瓷、光学玻璃、半导体材料、花岗岩等硬脆材料的加工钻头、锯切工具、磨具、各式各样的磨削工具及其它重要的超硬耐磨表面。金刚石膜材料在此领域发挥着重要作用。Diamond is a special type of elemental carbon whose crystal structure belongs to the equiaxed face-centered cubic system. The connecting bonds between carbon atoms in diamond are hybrid covalent bonds with high binding force, stability and directionality. The unique crystal structure gives diamond the highest hardness among natural substances (Mohs hardness is 10), the highest elastic modulus, the lowest compression coefficient, and excellent wear resistance, corrosion resistance and chemical stability. The fracture stress of diamond is as high as 40*10 3 MPa, and plastic flow does not occur before fracture. Diamond with excellent physical and mechanical properties is an ideal material for making hard and brittle material processing tools. It is widely used in drill bits, sawing tools, abrasive tools, etc. for processing hard and brittle materials such as cemented carbide, engineering ceramics, optical glass, semiconductor materials, and granite. A wide range of grinding tools and other important super-hard wear-resistant surfaces. Diamond film materials play an important role in this field.
为方便金刚石膜材料的使用,通常需要利用钎焊技术将金刚石膜焊接在基体表面。然而,金刚石钎焊存在如下显著问题:一是对于金刚石厚膜而言,为保证金刚石的强度,要求生长的金刚石必须具有高致密性,因而钎料无法渗透进入金刚石结构中,因而难以实现对金刚石的包裹;二是钎料对金刚石的浸润性差,化学键难以形成,从而导致金刚石焊接强度显著不足,金刚石膜易从基体上剥离。因此,如何提高金刚石膜与基体之间的焊接强度,是亟待解决的问题。In order to facilitate the use of diamond film materials, it is usually necessary to use brazing technology to weld the diamond film to the surface of the substrate. However, diamond brazing has the following significant problems: First, for thick diamond films, in order to ensure the strength of diamond, the grown diamond must be highly dense, so the brazing material cannot penetrate into the diamond structure, making it difficult to achieve diamond brazing. The second is that the solder has poor wettability to diamond and it is difficult to form chemical bonds, resulting in a significant lack of diamond welding strength and the diamond film is easily peeled off from the substrate. Therefore, how to improve the welding strength between the diamond film and the substrate is an urgent problem to be solved.
发明内容Contents of the invention
针对现有金刚石与基体之间焊接强度不高的问题,本发明提供了一种焊接强度高的金刚石膜及其制备方法和应用。该金刚石膜的两个表面分别存在金属碳化钨凸起和金刚石凸起,与金属基体钎焊时均能形成有效的粘结,显著提高钎焊时的焊接强度,且制备方法简单,有利于工业化应用。Aiming at the existing problem of low welding strength between diamond and matrix, the present invention provides a diamond film with high welding strength and its preparation method and application. There are metal tungsten carbide protrusions and diamond protrusions on the two surfaces of the diamond film respectively, which can form an effective bond when brazing with the metal substrate, significantly improving the welding strength during brazing, and the preparation method is simple, which is conducive to industrialization application.
为了解决上述技术问题,本发明采用以下技术方案:In order to solve the above technical problems, the present invention adopts the following technical solutions:
提供一种焊接强度高的金刚石膜,包括金属碳化物颗粒、金刚石层和金刚石晶粒,其中所述金刚石层下表面布设有凸起的金属碳化物颗粒,所述金属碳化物颗粒部分嵌入于所述金刚石层中;所述金刚石层上表面布设有凸起的金刚石晶粒,所述金刚石晶粒与金刚石层一体生长而成。A diamond film with high welding strength is provided, including metal carbide particles, a diamond layer and diamond grains, wherein protruding metal carbide particles are arranged on the lower surface of the diamond layer, and the metal carbide particles are partially embedded in the diamond film. In the diamond layer, protruding diamond grains are arranged on the upper surface of the diamond layer, and the diamond grains and the diamond layer are grown integrally.
按上述方案,所述金属碳化物颗粒粒度为微米级。According to the above solution, the particle size of the metal carbide particles is micron level.
按上述方案,所述碳化物为碳化硅、碳化钨、碳化钛或碳化钽中的至少一种。碳化物种类的不同对金刚石生长及最终的钎焊以及后续使用性能没有区别。According to the above solution, the carbide is at least one of silicon carbide, tungsten carbide, titanium carbide or tantalum carbide. The difference in carbide type makes no difference in diamond growth and final brazing and subsequent use performance.
按上述方案,所述凸起的金刚石晶粒之间相互隔离,裸露晶面为(100)。According to the above solution, the convex diamond grains are isolated from each other, and the exposed crystal plane is (100).
按上述方案,所述凸起的金刚石晶粒表面还覆盖一层碳化硅或碳化钛。According to the above solution, the surface of the convex diamond grains is also covered with a layer of silicon carbide or titanium carbide.
提供一种上述焊接强度高的金刚石膜的制备方法,具体包括以下步骤:A method for preparing the above-mentioned diamond film with high welding strength is provided, which specifically includes the following steps:
1)将碳化物颗粒均匀铺展在难熔金属板表面,然后利用热丝化学气相沉积法在其表面生长金刚石膜;1) Spread the carbide particles evenly on the surface of the refractory metal plate, and then use the hot wire chemical vapor deposition method to grow a diamond film on the surface;
2)在金刚石膜生长的后期,通过偏压的改变实现金刚石膜结构的改变,在偏压改变前,要确保在金属板上施加相对于热丝的正偏压4小时以上,使金刚石膜生长面上的裸露晶面以(111)为主;随后施加相对于热丝的负偏压,维持负偏压2-5小时,形成相互隔离的、裸露晶面为(100)的金刚石凸起晶粒;即得焊接强度高的金刚石膜。2) In the later stage of diamond film growth, the structure of the diamond film is changed by changing the bias voltage. Before changing the bias voltage, make sure that a positive bias voltage relative to the hot wire is applied to the metal plate for more than 4 hours to allow the diamond film to grow. The exposed crystal faces on the surface are mainly (111); then a negative bias voltage is applied relative to the hot wire, and the negative bias voltage is maintained for 2-5 hours to form isolated diamond convex crystals with exposed crystal faces (100). particles; that is, a diamond film with high welding strength is obtained.
本发明在沉积后期通过施加偏压的改变,合理控制金刚石生长面的结构:金刚石裸露面为(100)时,在初期易形成孤立的凸起晶粒,但当生长时间长时,晶粒之间会连成一体,凸起程度减小;而当裸露面为(111)时,由于孪晶的形成,晶粒相互紧密连接。施加正偏压,使金刚石膜生长面上的裸露晶面以(111)为主;然后施加负偏压,负偏压有利于(111)面快速生长,前一阶段正偏压条件下获得的大量裸露(111)晶面将迅速生长形成大量的相互隔离的、裸露晶面为(100)的金刚石凸起晶粒。The present invention rationally controls the structure of the diamond growth surface by changing the applied bias voltage in the later stage of deposition: when the exposed diamond surface is (100), isolated convex grains are easily formed in the early stage, but when the growth time is long, the distance between the grains They will be connected together and the degree of convexity will be reduced; when the exposed surface is (111), the grains will be closely connected to each other due to the formation of twins. Apply a positive bias voltage so that the exposed crystal face on the diamond film growth surface is dominated by (111); then apply a negative bias voltage, which is conducive to the rapid growth of the (111) face. The results obtained under positive bias conditions in the previous stage A large number of exposed (111) crystal faces will rapidly grow to form a large number of isolated diamond convex grains with exposed crystal faces (100).
按上述方案,所述步骤1)中,难熔金属板为钼板或钨板,材质对金刚石的生长无影响。According to the above solution, in step 1), the refractory metal plate is a molybdenum plate or a tungsten plate, and the material has no effect on the growth of diamond.
按上述方案,所述步骤1)中,将碳化物颗粒均匀铺展在难熔金属板表面,具体步骤为:According to the above scheme, in step 1), the carbide particles are evenly spread on the surface of the refractory metal plate. The specific steps are:
将纯净的碳化物颗粒超声分散于有机溶剂中,采用旋涂的方式均匀铺展在难熔金属板上,有机溶剂挥发即可。Pure carbide particles are ultrasonically dispersed in an organic solvent, and evenly spread on the refractory metal plate by spin coating, and the organic solvent is evaporated.
按上述方案,所述步骤1)中,热丝化学气相沉积法工艺参数为:碳氢比例1-5%,氩氢比例0-20%;腔体内压力1-8kPa;通过热丝功率的调节,使难熔金属板的温度保持在700-1150℃之间,沉积时间根据金刚石膜的厚度需要而定。According to the above scheme, in step 1), the process parameters of the hot wire chemical vapor deposition method are: the proportion of hydrocarbons is 1-5%, the proportion of argon and hydrogen is 0-20%; the pressure in the cavity is 1-8kPa; the hot wire power is adjusted , keep the temperature of the refractory metal plate between 700-1150°C, and the deposition time depends on the thickness of the diamond film.
按上述方案,所述步骤2)中,正偏压大小为30-250V;负偏压大小为30-200V。According to the above solution, in step 2), the positive bias voltage is 30-250V; the negative bias voltage is 30-200V.
按上述方案,所述步骤2)中,还包括,在得到金刚石凸起晶粒后,引入硅源气体或是钛源气体,在金刚石表面形成与金刚石紧密结合的碳化硅或碳化钛。According to the above solution, step 2) also includes, after obtaining the diamond convex crystal grains, introducing silicon source gas or titanium source gas to form silicon carbide or titanium carbide that is closely combined with the diamond on the diamond surface.
优选地,硅源气体为SiH4或SiCl4,钛源气体为TiCl4。Preferably, the silicon source gas is SiH 4 or SiCl 4 and the titanium source gas is TiCl 4 .
优选地,硅源气体或是钛源气体的引入量为碳源引入量的1-10%。Preferably, the amount of silicon source gas or titanium source gas introduced is 1-10% of the amount of carbon source introduced.
优选地,引入硅源气体或是钛源气体后,继续沉积0.5-1小时。Preferably, after the silicon source gas or titanium source gas is introduced, deposition is continued for 0.5-1 hour.
提供一种上述焊接强度高的金刚石膜在钎焊中的应用。An application of the diamond film with high welding strength in brazing is provided.
本发明的有益效果如下:The beneficial effects of the present invention are as follows:
1.本发明提供了一种焊接强度高的金刚石膜,下表面的碳化物颗粒镶嵌于金刚石膜中,与金刚石紧密连接在一起,当钎焊时,碳化物与焊料之间浸润性好,能形成有效连接;同时金刚石生长面上的金刚石凸起晶粒之间存在空隙,钎焊时焊料能进入空隙部位,将金刚石凸起晶粒有效包裹,形成紧密连接;因此所得金刚石膜两个表面与金属基体钎焊时均能形成有效的粘结,提高钎焊时的焊接强度。1. The present invention provides a diamond film with high welding strength. The carbide particles on the lower surface are embedded in the diamond film and closely connected with the diamond. When brazing, the carbide and solder have good wettability and can Form an effective connection; at the same time, there are gaps between the diamond protruding grains on the diamond growth surface. During brazing, the solder can enter the gap and effectively wrap the diamond protruding grains to form a tight connection; therefore, the two surfaces of the obtained diamond film are The metal matrix can form an effective bond during brazing, thereby improving the welding strength during brazing.
2.本发明采用热丝化学气相沉积法,可以简单的将碳化物嵌入金刚石层的下表面,同时在沉积后期通过施加正偏压,使金刚石膜生长面上的裸露晶面以(111)为主,然后施加负偏压,加快金刚石膜的(111)面的生长速度,从而形成相互隔离的、裸露晶面为(100)的金刚石突起晶粒;该方法通过简单的改变热丝化学气相沉积法的工艺条件,即可实现金刚石层下表面金属碳化物颗粒凸起和上表面金刚石晶粒凸起,显著增强金刚石与焊接基体之间的结合强度。2. The present invention adopts the hot wire chemical vapor deposition method, which can simply embed carbide into the lower surface of the diamond layer. At the same time, by applying a positive bias voltage in the later stage of deposition, the exposed crystal plane on the growth surface of the diamond film is (111). Mainly, a negative bias voltage is then applied to accelerate the growth rate of the (111) face of the diamond film, thereby forming diamond protruding grains that are isolated from each other and have an exposed crystal face of (100); this method is achieved by simply changing the hot wire chemical vapor deposition According to the process conditions of the method, the metal carbide particles on the lower surface of the diamond layer and the diamond grains on the upper surface can be convex, which significantly enhances the bonding strength between diamond and welding matrix.
3.为进一步增强金刚石生长面与焊料之间的相互作用,也可在金刚石生长末期,在反应气体中引入少量含有钛、硅的物质,在金刚石表面形成碳化物,利用焊料对碳化物的高浸润性和对金刚石凸起的紧密包裹的共同作用,进一步提高焊接强度。3. In order to further enhance the interaction between the diamond growth surface and the solder, a small amount of titanium and silicon-containing substances can be introduced into the reaction gas at the end of the diamond growth to form carbides on the diamond surface, and the solder can enhance the carbides. The combination of wettability and tight wrapping of the diamond protrusions further increases weld strength.
附图说明Description of the drawings
图1为本发明实施例中所得金刚石膜的结构示意图。Figure 1 is a schematic structural diagram of a diamond film obtained in an embodiment of the present invention.
图2为本发明实施例中所得金刚石膜的断面照片,其中金刚石凸起之间为空隙,凸起的裸露面为(100)晶面。Figure 2 is a cross-sectional photograph of the diamond film obtained in the embodiment of the present invention, in which there are gaps between the diamond protrusions, and the exposed surfaces of the protrusions are (100) crystal planes.
具体实施方式Detailed ways
下面通过具体实施例对本发明的技术方案做进一步的解释说明。The technical solution of the present invention will be further explained below through specific examples.
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛粉末加入到无水乙醇中,超声分散后,将其滴加在难熔金属板上,将碳化钛分散液均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。1) Add titanium carbide powder to absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate. Spin-coat the titanium carbide dispersion evenly on the refractory metal plate. After drying, put it into the hot wire chemical in vapor deposition equipment.
2)开启热丝化学气相沉积装置进行金刚石膜的制备,制备金刚石所采用的碳源为甲烷、乙烷等气体或丙酮、甲醇、乙醇等液体,载气为氢气,为加快金刚石膜的沉积速率,改善金刚石膜质量还可以同时通入一定量的氩气。金刚石沉积条件为:碳氢比例1-5%,氩氢比例0-20%;金刚石沉积时腔体内压力1-8kPa;通过热丝功率的调节,使难熔金属板的温度保持在700-1150℃之间,沉积时间根据金刚石膜的厚度需要而定;2) Turn on the hot wire chemical vapor deposition device to prepare the diamond film. The carbon sources used to prepare diamond are gases such as methane and ethane or liquids such as acetone, methanol, ethanol, etc., and the carrier gas is hydrogen to speed up the deposition rate of the diamond film. , to improve the quality of the diamond film, a certain amount of argon gas can also be introduced at the same time. The conditions for diamond deposition are: the proportion of carbon and hydrogen is 1-5%, and the proportion of argon and hydrogen is 0-20%; the pressure in the cavity during diamond deposition is 1-8kPa; the temperature of the refractory metal plate is maintained at 700-1150 by adjusting the power of the hot wire. ℃, the deposition time depends on the thickness of the diamond film;
3)在金刚石膜生长的后期,通过偏压的改变实现金刚石膜结构的改变,在偏压改变前,要确保在金属板上施加相对于热丝的正偏压4小时以上,偏压大小为30-250V;随后施加相对于热丝的负偏压,维持负偏压2-5小时,负偏压大小为30-200V。3) In the later stage of diamond film growth, the structure of the diamond film is changed by changing the bias voltage. Before changing the bias voltage, make sure that a positive bias voltage relative to the hot wire is applied to the metal plate for more than 4 hours. The bias voltage is 30-250V; then apply a negative bias voltage relative to the hot wire, maintain the negative bias voltage for 2-5 hours, and the negative bias voltage is 30-200V.
在需要通过在金刚石生长面形成碳化物进一步增强焊接强度时,可以在金刚石膜生长的最后0.5-1小时通入SiH4、TiCl4、SiCl4等,在金刚石表面生长与金刚石紧密结合的碳化硅或碳化钛,钛或硅的引入量约为碳引入量的1-10%,沉积工艺条件不变。When it is necessary to further enhance the welding strength by forming carbides on the diamond growth surface, SiH 4 , TiCl 4 , SiCl 4 , etc. can be introduced during the last 0.5-1 hour of diamond film growth to grow silicon carbide that is closely combined with diamond on the diamond surface. Or titanium carbide, the amount of titanium or silicon introduced is about 1-10% of the amount of carbon introduced, and the deposition process conditions remain unchanged.
实施例1:Example 1:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至8kPa,再通入100sccm氢气,3sccm的甲烷,10sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 8kPa, and then introduce 100 sccm of hydrogen, 3 sccm of methane, and 10 sccm of argon;
3)调节功率为8kW,保持温度稳定在700℃左右,持续生长150小时;3) Adjust the power to 8kW, keep the temperature stable at around 700°C, and continue growing for 150 hours;
4)在难熔金属板上施加30V的正偏压,持续8小时;4) Apply a positive bias voltage of 30V to the refractory metal plate for 8 hours;
5)再将偏压改为30V的负偏压以生长金刚石凸起晶粒,持续2小时,关闭装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 30V to grow diamond protruding grains, continue for 2 hours, close the device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为47MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为51MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为33MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 47MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 51MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 33MPa. .
实施例2:Example 2:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至5kPa,使用氢气为载气将丙酮吹入腔体中,丙酮的流入量为5sccm,氢气流量为100sccm,再通入20sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 5kPa, use hydrogen as the carrier gas to blow acetone into the cavity, the inflow volume of acetone is 5 sccm, the hydrogen flow rate is 100 sccm, and then 20 sccm argon gas is introduced;
3)调节功率,保持温度稳定在1150℃左右,持续生长100小时;3) Adjust the power to keep the temperature stable at around 1150°C and continue growing for 100 hours;
4)在难熔金属板上施加30V的正偏压,持续4小时;4) Apply a positive bias voltage of 30V to the refractory metal plate for 4 hours;
5)再将偏压改为30V的负偏压,持续3小时,关闭热丝装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 30V, continue for 3 hours, turn off the hot wire device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为45MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为55MPa;而生长面为未生长金刚石凸起晶粒时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为32MPa。When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 45MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 55MPa respectively; when the growth surface is made of diamond convex grains that have not grown, and Ag-Cu-Ti solder is used to weld the diamond film growth surface to cemented carbide, the average shear strength of the joints are respectively is 32MPa.
实施例3:Example 3:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至1kPa,再通入100sccm氢气,1sccm的乙烷,20sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 1kPa, and then introduce 100sccm of hydrogen, 1sccm of ethane, and 20sccm of argon;
3)调节功率保持温度稳定在900℃左右,并施加50V的正偏压,持续生长100小时;3) Adjust the power to keep the temperature stable at around 900°C, apply a positive bias voltage of 50V, and continue growing for 100 hours;
4)再将偏压改为60V的负偏压,持续2小时;4) Then change the bias voltage to a negative bias voltage of 60V for 2 hours;
5)在保持相同工艺的同时,通入10sccm硅烷气体,持续1小时,关闭装置,即得焊接强度高的金刚石膜。5) While maintaining the same process, pass in 10 sccm of silane gas for 1 hour, close the device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为49MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为58MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为31MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 49MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 58MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 31MPa. .
实施例4:Example 4:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至7kPa,再通入200sccm氢气,5sccm的甲烷;2) Turn on the hot wire chemical vapor deposition device, evacuate to 7kPa, and then introduce 200 sccm of hydrogen and 5 sccm of methane;
3)调节功率保持温度稳定在700℃左右,持续生长200小时;3) Adjust the power to keep the temperature stable at around 700°C and continue growing for 200 hours;
4)在难熔金属板上施加50V的正偏压,持续10小时;4) Apply a positive bias voltage of 50V to the refractory metal plate for 10 hours;
5)再将偏压改为50V的负偏压,持续2小时,关闭装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 50V, continue for 2 hours, close the device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为46MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为53MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为32MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 46MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 53MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 32MPa. .
实施例5:Example 5:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至4kPa,使用氢气为载气将冰浴的甲醇吹入腔体中,甲醇的输入量为4ml/min,氢气总流量为200sccm,再通入18sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 4kPa, use hydrogen as the carrier gas to blow the methanol in the ice bath into the cavity, the input volume of methanol is 4ml/min, the total flow rate of hydrogen is 200sccm, and then pass in 18sccm of argon;
3)调节功率保持温度稳定在1000℃左右,持续生长300小时;3) Adjust the power to keep the temperature stable at around 1000°C and continue growing for 300 hours;
4)在难熔金属板上施加80V的正偏压,持续4小时;4) Apply a positive bias voltage of 80V to the refractory metal plate for 4 hours;
5)再将偏压改为80V的负偏压,持续4小时,关闭热丝装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 80V, continue for 4 hours, turn off the hot wire device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为49MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为58MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为34MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 49MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 58MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 34MPa. .
实施例6:Example 6:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至3kPa,再通入300sccm氢气,15sccm的甲烷,30sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 3kPa, and then introduce 300 sccm of hydrogen, 15 sccm of methane, and 30 sccm of argon;
3)调节功率为1.2KW,保持温度稳定在1100℃左右,持续生长8小时;3) Adjust the power to 1.2KW, keep the temperature stable at around 1100°C, and continue growing for 8 hours;
4)在难熔金属板上施加100V的正偏压,持续8小时;4) Apply a positive bias voltage of 100V to the refractory metal plate for 8 hours;
5)再将偏压改为200V的负偏压,持续4小时;5) Then change the bias voltage to a negative bias voltage of 200V for 4 hours;
6)通入30sccm TiCl4气体,持续0.5小时,关闭装置,即得焊接强度高的金刚石膜。6) Pour in 30 sccm TiCl 4 gas for 0.5 hours, close the device, and obtain a diamond film with high welding strength.
实施例7:Example 7:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至6kPa,再通入300sccm氢气,10sccm的甲烷,10sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 6kPa, and then introduce 300 sccm of hydrogen, 10 sccm of methane, and 10 sccm of argon;
3)调节功率为10kW,保持温度稳定在800℃左右,持续生长5小时;3) Adjust the power to 10kW, keep the temperature stable at around 800°C, and continue growing for 5 hours;
4)在难熔金属板上施加120V的正偏压,持续3小时;4) Apply a positive bias voltage of 120V to the refractory metal plate for 3 hours;
5)再将偏压改为120V的负偏压,持续3小时,关闭装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 120V, continue for 3 hours, close the device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为43MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为64MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为31MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 43MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 64MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 31MPa. .
实施例8:Example 8:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and put it into a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至7kPa,使用氢气为载气将冰浴的乙醇吹入腔体中,乙醇的流入量为4sccm,氢气流量为150sccm,再通入15sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 7kPa, use hydrogen as the carrier gas to blow the ethanol in the ice bath into the cavity, the inflow volume of ethanol is 4sccm, the hydrogen flow rate is 150sccm, and then 15sccm of argon gas is introduced ;
3)调节功率为1.1KW,保持温度稳定在1100℃左右,持续生长6小时;3) Adjust the power to 1.1KW, keep the temperature stable at around 1100°C, and continue growing for 6 hours;
4)在难熔金属板上施加50V的正偏压,持续4小时;4) Apply a positive bias voltage of 50V to the refractory metal plate for 4 hours;
5)再将偏压改为200V的负偏压,持续4小时,关闭热丝装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 200V, continue for 4 hours, turn off the hot wire device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为46MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为52MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为32MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 46MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 52MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 32MPa. .
实施例9:Example 9:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至4kPa,再通入250sccm氢气,10sccm的甲烷,20sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 4kPa, and then introduce 250 sccm of hydrogen, 10 sccm of methane, and 20 sccm of argon;
3)调节功率保持温度稳定在1000℃左右,持续生长100小时;3) Adjust the power to keep the temperature stable at around 1000°C and continue growing for 100 hours;
4)在难熔金属板上施加150V的正偏压,持续6小时;4) Apply a positive bias voltage of 150V to the refractory metal plate for 6 hours;
5)再将偏压改为150V的负偏压,持续5小时;5) Then change the bias voltage to a negative bias voltage of 150V for 5 hours;
6)通入15sccm SiCl4气体,持续0.8小时,关闭装置,即得焊接强度高的金刚石膜。6) Pour in 15 sccm SiCl 4 gas for 0.8 hours, close the device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为45MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为56MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为32MPa.When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 45MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 56MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 32MPa. .
实施例10:Example 10:
提供一种焊接强度高的金刚石膜的制备方法,包括以下步骤:A method for preparing a diamond film with high welding strength is provided, including the following steps:
1)将碳化钛均匀旋涂在难熔金属板上,干燥后放入热丝化学气相沉积装置中。旋涂的具体方法是:将1g碳化钛粉末加入到100ml无水乙醇中,超声分散后,将其滴加在难熔金属板上,在500rpm的转速下完成旋涂;1) Spin-coat titanium carbide evenly on the refractory metal plate, dry it and place it in a hot wire chemical vapor deposition device. The specific method of spin coating is: add 1g of titanium carbide powder to 100ml of absolute ethanol, and after ultrasonic dispersion, drop it on the refractory metal plate, and complete spin coating at a rotation speed of 500 rpm;
2)开启热丝化学气相沉积装置,抽真空至5kPa,再通入300sccm氢气,15sccm的甲烷,15sccm的氩气;2) Turn on the hot wire chemical vapor deposition device, evacuate to 5kPa, and then introduce 300 sccm of hydrogen, 15 sccm of methane, and 15 sccm of argon;
3)调节功率保持温度稳定在750℃左右,持续生长100小时;3) Adjust the power to keep the temperature stable at around 750°C and continue growing for 100 hours;
4)在难熔金属板上施加200V的正偏压,持续5小时;4) Apply a positive bias voltage of 200V to the refractory metal plate for 5 hours;
5)再将偏压改为200V的负偏压,持续2小时,关闭装置,即得焊接强度高的金刚石膜。5) Then change the bias voltage to a negative bias voltage of 200V, continue for 2 hours, close the device, and obtain a diamond film with high welding strength.
采用Ag-Cu-Ti焊料将该金刚石膜下表面与硬质合金焊接时,接头的平均抗剪强度分别为49MPa;采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为54MPa;而生长面为未生长金刚石凸起时,采用Ag-Cu-Ti焊料将该金刚石膜生长面与硬质合金焊接时,接头的平均抗剪强度分别为31MPa。When Ag-Cu-Ti solder is used to weld the lower surface of the diamond film to cemented carbide, the average shear strength of the joint is 49MPa; when Ag-Cu-Ti solder is used to weld the growth surface of the diamond film to cemented carbide, The average shear strength of the joints is 54MPa respectively; when the growth surface is a non-grown diamond protrusion, when the diamond film growth surface is welded to the cemented carbide using Ag-Cu-Ti solder, the average shear strength of the joints is 31MPa. .
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JPH04263075A (en) * | 1991-02-18 | 1992-09-18 | Sumitomo Electric Ind Ltd | Diamond or diamond-like carbon coated hard material |
JPH07273150A (en) * | 1994-03-31 | 1995-10-20 | Sumitomo Electric Ind Ltd | High-strength bonding tool and manufacturing method thereof |
CN106926148A (en) * | 2017-02-08 | 2017-07-07 | 上海交通大学 | The method that mono-layer diamond abrasive material tools are prepared using chemical vapor deposition |
CN108277475A (en) * | 2018-03-28 | 2018-07-13 | 武汉工程大学 | A kind of method of second nucleation in raising diamond growth process |
WO2018158221A1 (en) * | 2017-03-02 | 2018-09-07 | Hilti Aktiengesellschaft | Cutting insert and production method |
CN110249070A (en) * | 2017-01-31 | 2019-09-17 | 钴领两合公司 | The method for coating solid-state diamond |
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WO2013040381A2 (en) * | 2011-09-16 | 2013-03-21 | Baker Hughes Incorporated | Methods of attaching a polycrystalline diamond compact to a substrate and cutting elements formed using such methods |
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JPH04263075A (en) * | 1991-02-18 | 1992-09-18 | Sumitomo Electric Ind Ltd | Diamond or diamond-like carbon coated hard material |
JPH07273150A (en) * | 1994-03-31 | 1995-10-20 | Sumitomo Electric Ind Ltd | High-strength bonding tool and manufacturing method thereof |
CN110249070A (en) * | 2017-01-31 | 2019-09-17 | 钴领两合公司 | The method for coating solid-state diamond |
CN106926148A (en) * | 2017-02-08 | 2017-07-07 | 上海交通大学 | The method that mono-layer diamond abrasive material tools are prepared using chemical vapor deposition |
WO2018158221A1 (en) * | 2017-03-02 | 2018-09-07 | Hilti Aktiengesellschaft | Cutting insert and production method |
CN108277475A (en) * | 2018-03-28 | 2018-07-13 | 武汉工程大学 | A kind of method of second nucleation in raising diamond growth process |
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