CN115106300A - Chip detecting and sorting machine - Google Patents

Abstract

The invention discloses a chip detection and sorting machine, comprising a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of unloading tray conveying mechanisms, a tray turning manipulator, a sorting manipulator, and a first visual inspection device , the second visual inspection device and the third visual inspection device; the first feeding tray conveying mechanism is used for feeding the tray full of chips; the second feeding tray conveying mechanism is used for feeding the empty tray; unloading The tray conveying mechanism is used to unload the tray; the first visual inspection device and the second visual inspection device take pictures and detect the chips on the tray in turn; the tray turning robot is used to turn over and transfer the tray; the sorting robot is used to check the chips The bottom surface of the chip is photographed and detected, and the chips are sorted and transferred. The chip detection and sorting machine of the invention can automatically sort and unload the chips after visual detection of the front and back sides of the chips, and fully automate the test, thereby reducing the labor intensity of workers and improving production efficiency.

Description

Chip detection and sorting machine

technical field

The invention relates to a semiconductor detection and sorting machine, in particular to a chip detection and sorting machine for automatically sorting and blanking the front and back of a chip by visual inspection.

Background technique

Since there are individual differences in the production process of semiconductors or chips, the performance is high or low, the quality is good or bad, and the appearance is defective. Therefore, the chips need to be sorted in time during the production process, so as to provide a reference for subsequent production. However, in the prior art, the testing and sorting of semiconductors or chips often requires manual assistance. For example, a worker is required to put the chip into a testing machine and use the testing machine to detect it. After the test is completed, the worker needs to take out the chip, turn it over or put it on the tester. Insert a new chip and test again. After the test is completed, workers are required to manually classify the chips according to the measurement results. Therefore, the existing method has a low degree of automation, high work intensity of workers, and low production efficiency, which is not conducive to mass production.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a chip detection and sorting machine that automatically sorts and unloads the chips by visual inspection of the front and back sides, which can realize fully automatic detection, reduce labor intensity of workers, and improve production efficiency.

In order to achieve the above purpose, the chip detection and sorting machine provided by the present invention includes a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of unloading tray conveying mechanisms, a tray turning manipulator, a sorting manipulator, and a first feeding tray conveying mechanism. a visual inspection device, a second visual inspection device and a third visual inspection device; the first feeding tray conveying mechanism, the second feeding tray conveying mechanism and a plurality of the discharging tray conveying mechanisms are arranged side by side in sequence; The first feeding tray conveying mechanism is used for feeding a tray full of chips; the second feeding tray conveying mechanism is used for feeding an empty tray; the unloading tray conveying mechanism is used for unloading A tray fully loaded with sorting chips; the first visual inspection device and the second visual inspection device are sequentially arranged above the middle of the first feeding tray conveying mechanism along the conveying direction, so as to sequentially align the reverse sides of the chips on the tray Photo detection; the feeding tray turning manipulator straddles the ends of the first feeding tray conveying mechanism, the second feeding tray conveying mechanism and the plurality of unloading tray conveying mechanisms, so as to turn the first feeding tray conveying mechanism The feeding tray on the feeding tray conveying mechanism is turned over and transferred to the discharging tray conveying mechanism, or the empty tray of the second feeding tray conveying mechanism is transferred to the discharging tray conveying mechanism; the The third visual inspection device takes pictures and inspects the front of the flipped chip; the sorting manipulator straddles above the plurality of feeding tray conveying mechanisms; the sorting manipulator includes a sorting arm and a fourth visual inspection device , to take a picture of the front side of the chip for detection, and sort and transfer the chip among the multiple trays of the feeding tray conveying mechanism.

Compared with the prior art, in the present invention, a first feeding tray conveying mechanism is arranged to feed a tray full of chips, and then a first visual detection device and a second visual inspection device are arranged in the middle of the first feeding tray conveying mechanism. Two visual detection devices, the first visual detection device and the second visual detection device are used to visually detect the reverse side of the chips on the tray, so as to detect the difference of each chip. Then, by arranging a second feeding tray conveying mechanism and a plurality of feeding tray conveying mechanisms side by side, the second feeding tray conveying mechanism is used to empty the feeding tray, and the tray turning manipulator is used to flip the feeding tray full of chips and transfer it. On the conveying mechanism of the unloading tray, finally use the third visual inspection device and the fourth visual inspection device to detect the front side of the chip, and classify the chips by the sorting robot and transfer the chips of different categories to different ones. on the unloading tray conveying mechanism. Therefore, the chip detection and sorting machine of the present invention does not need manual detection and classification, and the entire process from the feeding tray, detection, sorting and unloading is automatically completed, and the degree of automation is extremely high, which greatly reduces labor intensity and improves production efficiency.

Preferably, the material tray turning manipulator includes a base frame, a lateral moving mechanism, a moving bracket, two vertical moving mechanisms, a tray-holding cylinder, a claw hand and a turning fixture, and the lateral moving mechanism is arranged on the base frame. And the output end is connected with the moving support to drive the moving support to move laterally; wherein one of the vertical moving mechanisms is arranged on the moving support and the output end is connected with the holding plate air plate to drive the The pan-holding cylinder moves vertically; the output end of the pan-holding cylinder is connected with the claw hand to drive the claw hand to grab or release the material tray; another vertical movement mechanism is arranged on the The output end of the moving bracket is connected with the turning jig, and the turning jig can drive the material tray to turn over. By arranging the holding plate cylinder and the claw hand, the empty material plate can be quickly clamped and placed on the overturning jig by using the holding plate cylinder to drive the claw hand, and then the empty material plate can be clamped by the overturning fixture. Turn over, so that the empty tray can be turned 180 degrees, and then use the holding cylinder and the claw to place the flipped empty tray on the tray loaded with chips, and then make the empty tray and the tray loaded with chips. At the same time, it is turned over again, so that the chips can be transferred from one tray to another, and the front and back sides can be flipped to achieve the purpose of automatic flipping. The degree of automation is high and the labor intensity is effectively reduced.

Specifically, the overturning fixture includes a base plate, a plate dividing cylinder, a lower plate, a lower plate cylinder, a pressing cylinder and a rotating device, the base plate has a frame structure with a hollow in the middle, and the plate dividing cylinder is arranged on the base plate On opposite sides of the surface, the lower plates are respectively arranged on opposite sides of the lower bottom surface of the base plate, and the lower plate cylinder is arranged between the lower plate and the base plate to drive the lower plate to approach or move away from The middle part of the base plate; the pressing cylinder is arranged between the base plate and the lower plate to drive the lower plate to approach or move away from the bottom surface of the base plate. By using the upper plate 472 to tighten the material tray, and then using the rotating device to turn over the empty material tray, the front and back sides of the empty material tray can be turned over. On the flipping jig, the two oppositely stacked trays can be positioned and pressed by the split cylinder and the pressing cylinder, so that the chips can be accurately transferred from one tray to the other tray. , to achieve automatic flip.

Specifically, the turning fixture further includes an upper plate and an upper plate cylinder, the upper plates are respectively arranged on opposite sides of the upper surface of the base plate, and the upper plate cylinders are arranged between the upper plate and the base plate to drive the upper plate closer to or away from the middle of the base plate.

Specifically, the lower plate is provided with a sliding block, the base plate is provided with a sliding rail, and the sliding block is slidably matched with the sliding rail; the sliding block is provided with a guide column, and the lower plate slides is arranged on the guide post, and an elastic member is arranged between the lower plate and the sliding block to provide an elastic force to keep the lower plate away from the sliding block. By arranging a guide column on the slider and an elastic member between the lower plate and the slider, the lower plate can be automatically moved away from the base plate and cooperate with the pressing cylinder, Then, the two material trays can be automatically pressed against each other or automatically released.

Specifically, the overturning fixture further includes a disc vibration cylinder, and the disc vibration cylinder is arranged on the base plate to vibrate the material disc. The vibration plate cylinder is provided, which can vibrate the plate during the process of flipping the chips from one plate to another, so as to prevent the chips from sticking to the plate and cannot be turned over, effectively improving the success of chip turnover Rate.

Specifically, a pressing plate is connected to the output end of the pressing cylinder, and the pressing plate extends to the bottom surfaces of the two lower plates, so as to push the lower plates to approach the base plate through the pressing plates during pressing. By being arranged on the pressing plate, one pressing cylinder can simultaneously press the two lower plates, thereby effectively reducing the number of the pressing cylinders and simplifying the structure.

Preferably, the first visual inspection device includes a first bracket, a first lateral drive mechanism, a first platform, a first vertical drive mechanism and a first camera, and the first lateral drive mechanism is arranged on the first on the bracket, and the output end is connected with the first platform to drive the first platform to drive the first camera to slide laterally; the first vertical drive mechanism is arranged on the first platform and the output end connected with the first camera to drive the first camera to approach or move away from the tray. In this way, the first camera can effectively detect each chip on the tray to avoid missed detection.

Preferably, the second visual inspection device includes a second bracket, a second lateral drive mechanism, a second platform, a second vertical drive mechanism and a second camera, and the second lateral drive mechanism is arranged on the second on the bracket, and the output end is connected with the second platform to drive the second platform to drive the second camera to slide laterally; the second vertical drive mechanism is arranged on the second platform and the output end connected with the second camera to drive the second camera close to or away from the material tray; the number of the second camera is at least two. In this way, the second camera can effectively detect each chip on the tray to avoid missed detection.

Preferably, the first feeding tray conveying mechanism, the second feeding tray conveying mechanism and the unloading tray conveying mechanism have the same structure; the first feeding tray conveying mechanism includes a rail groove, a tray stacking fixture. , Disk mechanism, chuck mechanism, chuck drive mechanism and lift mechanism, the chuck mechanism is slidably arranged in the track groove, the chuck drive mechanism is arranged in the track groove and drives the clamp The tray mechanism moves along the track slot; the tray stacking fixture is arranged above the input end of the track slot and can stack the trays, and the disc dividing mechanism is arranged on the track slot and located in the The bottom of the tray stacking fixture to separate a tray located at the lowest level in sequence; the lifting mechanism is arranged below the track groove and below the tray stacking fixture to drive the material The trays are transferred between the tray stacking fixture and the chuck mechanism. By setting the tray dividing mechanism, the tray at the lowest level in the tray stacking fixture can be separated from other trays, and then the tray can be lowered onto the chuck mechanism by the lifting mechanism. And by setting the chuck drive mechanism in the track groove, the chuck mechanism can move in the direction of the track groove. Therefore, by using the chuck mechanism to clamp the material plate, the material plate can be moved and output in a straight line, so that the energy The material trays are conveyed to the visual inspection device and the material tray manipulator in turn to achieve the purpose of automatic detection, automatic feeding of the material trays and automatic transfer of the material trays, with a high degree of automation.

Description of drawings

FIG. 1 is a perspective view of the chip detection and sorting machine of the present invention.

FIG. 2 is a top view of the chip detection and sorting machine of the present invention.

3 is a perspective view of the first feeding tray conveying mechanism of the chip detection and sorting machine of the present invention.

4 is a top view of the first feeding tray conveying mechanism of the chip detection and sorting machine of the present invention.

5 is a side view of the first feeding tray conveying mechanism of the chip detection and sorting machine of the present invention.

6 is a structural diagram of the chuck mechanism of the first feeding tray conveying mechanism of the present invention.

FIG. 7 is a structural diagram of the disc dividing mechanism of the first feeding tray conveying mechanism of the present invention.

FIG. 8 is a perspective view of the tray turning manipulator of the chip detection and sorting machine of the present invention.

FIG. 9 is a perspective view of the tray holding cylinder and the inversion jig of the tray inversion manipulator of the chip detection and sorting machine of the present invention.

FIG. 10 is a perspective view of a turning jig of a tray turning manipulator of the chip detection and sorting machine of the present invention.

FIG. 11 is a front view of the flipping fixture of the tray flipping manipulator of the chip detection and sorting machine of the present invention.

FIG. 12 is a side view of the turning fixture of the tray turning manipulator of the chip detection and sorting machine of the present invention.

FIG. 13 is an enlarged view of part A in FIG. 11 .

14 is a perspective view of the first visual inspection device and the second visual inspection device of the chip inspection and sorting machine of the present invention.

15 is a top view of the first visual inspection device and the second visual inspection device of the chip inspection and sorting machine of the present invention.

16 is a perspective view of the third visual inspection device and the sorting robot of the chip inspection and sorting machine of the present invention.

17 is another perspective view of the third visual inspection device and the sorting robot of the chip inspection and sorting machine of the present invention.

18 is a structural diagram of the sorting arm of the sorting robot of the chip detection and sorting machine of the present invention.

Detailed ways

In order to describe in detail the technical content, structural features, and achieved effects of the present invention, detailed descriptions are given below with reference to the embodiments and the accompanying drawings.

As shown in FIG. 1 , FIG. 2 and FIG. 16 , the chip detection and sorting machine 100 of the present invention includes a first feeding tray conveying mechanism 1 , a second feeding tray conveying mechanism 2 , a plurality of unloading tray conveying mechanisms 3 , Tray turning manipulator 4, sorting manipulator 5, first visual inspection device 6, second visual inspection device 7 and third visual inspection device 52; the first feeding tray conveying mechanism 1, the second feeding tray conveying The mechanism 2 and a plurality of the feeding tray conveying mechanisms 3 are arranged side by side in sequence; the first feeding tray conveying mechanism 1 is used for feeding a tray full of chips; the second feeding tray conveying mechanism 2 is used for feeding The unloading tray conveying mechanism 3 is used to unload the tray fully loaded with sorting chips; the first visual inspection device 6 and the second visual inspection device 7 are arranged in sequence along the conveying direction Above the middle of the first feeding tray conveying mechanism 1, the reverse side of the chips on the feeding tray is photographed and detected in sequence; the feeding tray turning manipulator 4 straddles the first feeding tray conveying mechanism 1, the second Above the ends of the feeding tray conveying mechanism 2 and a plurality of the feeding tray conveying mechanisms 3 , the feeding trays on the first feeding tray conveying mechanism 1 are turned over and transferred to the feeding tray conveying mechanism 3 or transfer the empty tray of the second feeding tray conveying mechanism 2 to the unloading tray conveying mechanism 3; the third visual inspection device 52 takes pictures and detects the front of the flipped chip; the The sorting manipulator 5 straddles the top of the plurality of said unloading tray conveying mechanisms 3; the sorting manipulator 5 includes a sorting arm 51 and a fourth visual inspection device 53 to take pictures of the front of the chip and detect it, and the chip Sorting and transferring among the multiple trays of the unloading tray conveying mechanism 3 .

Please refer to FIGS. 3 to 7 , the first feeding tray conveying mechanism 1 includes a rail groove 11 , a tray stacking fixture 12 , a tray dividing mechanism 13 , a chuck mechanism 14 , a chuck driving mechanism 15 and a jacking mechanism 16 . The chuck mechanism 14 is slidably disposed in the track groove 11, and the chuck drive mechanism 15 is disposed in the track groove 11 and drives the chuck mechanism 14 to move along the track groove 11; The disk drive mechanism 15 includes a servo motor 151 and a belt 152, the motor is arranged on the outer bottom of the track groove 11, the output end of the servo motor 151 is connected to the pulley, and the belt 152 surrounds the two pulleys, so that the The belt 152 is arranged in the track groove 11 and is driven by the servo motor 151 to run. The belt 152 is arranged along the extending direction of the track groove 11 . The tray stacking jig 12 is disposed above the input end of the track groove 11 and can stack trays. Specifically, the tray stacking fixture 12 has four right-angled limiting posts 121, the limiting posts 121 are right-angle steel, and the limiting posts 121 are distributed at four corners to form the shape of the tray. In the same square space, the trays can be stacked in sequence in the space enclosed by the limiting posts 121 . The disc separating mechanism 13 is disposed on the track groove 11 and located on both sides of the bottom of the tray stacking fixture 12, so as to separate a tray located at the lowest level in sequence. The disc dividing mechanism 13 includes a disc dividing cylinder 131 and a disc dividing inserting plate 132 . The output end of the disc dividing cylinder 131 is connected to the disc dividing inserting plate 132 to drive the disc dividing inserting plate 132 to expand and contract. The lifting mechanism 16 is disposed below the rail groove 11 and below the tray stacking fixture 12 to drive the tray between the tray stacking fixture 12 and the chuck mechanism 14 . transfer between. By setting the tray separating mechanism 13 , the tray at the lowest level in the tray stacking fixture 12 can be separated from other trays, and then the tray can be lowered to the chuck mechanism 14 by the lifting mechanism 16 . superior. Furthermore, by arranging the chuck drive mechanism 15 in the track groove 11, the chuck mechanism 14 can move in the direction of the track groove 11. Therefore, by using the chuck mechanism 14 to clamp the material plate, the material plate can be moved linearly. output, so that the tray can be transported to the visual inspection device and the tray turning manipulator 4 to achieve the purpose of automatic detection, automatic feeding and automatic transfer of the tray, and the degree of automation is high. The jacking mechanism 16 includes a jacking motor 161 and a jacking plate 162 , the jacking motor 161 is disposed below the track groove 11 and the output end faces upward, and the jacking plate 162 is connected to the jacking plate 162 . The output of the motor 161 . The jacking motor 161 is a stepping screw motor with a screw nut on the motor, which can drive the mechanical tillage lifting plate 162 to rise and fall by driving the screw nut.

As shown in FIG. 6 , the chuck mechanism 14 includes a base body 141 , a front chuck cylinder 142 and a rear chuck cylinder 143 . The base 141 is connected to the output end of the chuck drive mechanism 15 and is slidable. is arranged in the track groove 11 . The front chuck cylinder 142 is arranged at one end of the base body 141 and the output end extends upward from the base body 141 , and the rear chuck cylinder 143 is arranged at the other end of the base body 141 and the output end extends upward. The output end of the rear chuck cylinder 143 is also connected with a clamping block 1431, and the clamping block 1431 protrudes upward from the base body 141 to share with the output end of the front chuck cylinder 142. Hold the tray. By arranging the front chuck cylinder 142 and the rear chuck cylinder 143, the material tray can be stably and fixedly positioned on the base body 141, so as to ensure that the chuck mechanism 14 will not shift when moving the material tray, and improve the The accuracy of tray conveying and positioning.

In addition, as shown in FIGS. 3 and 4 , a sensing device (not shown in the figure) is provided on the side of the rail groove 11 facing the tray stacking fixture 12 to detect the tray stacking fixture 12 Whether there is a tray inside. The side of the track groove 11 facing the two visual detection devices is provided with a sensing device (not shown in the figure) to detect whether there is a material tray on the visual detection device. The track groove 11 is provided with a height limit detection device 8, and the height limit detection device 8 is a height limit fiber to detect whether the height of the chips on the tray exceeds a set value. The side of the track slot 11 away from the tray stacking fixture 12 is provided with an induction device to detect whether there is a tray at this end of the track slot 11 .

Referring again to FIGS. 3 to 5 , the structures of the first feeding tray conveying mechanism 1 , the second feeding tray conveying mechanism 2 and the unloading tray conveying mechanism 3 are basically the same. The difference is that the first feeding tray conveying mechanism 11 and the second feeding tray conveying mechanism 2 first stack the feeding trays on the feeding tray stacking fixture 12 , and then use the tray dividing mechanism 13 to separate the lower trays. Separation, and then use the jacking mechanism 16 to place the material tray on the chuck mechanism 14, and finally drive the chuck mechanism 14 to move through the chuck drive mechanism 15 to realize the feeding and output of the material tray. The action of the feeding tray conveying mechanism 3 is opposite to the above. After the chuck mechanism 14 receives the tray, the chuck mechanism 14 is driven to move by the chuck drive mechanism 15 , the tray is transferred to the bottom of the tray stacking fixture 12 , and then the tray is lifted by the jacking mechanism 16 . Lift to the bottom of the tray stacking fixture 12, so that the tray is stacked with other trays on the tray stacking fixture 12, and finally the tray is supported by the tray dividing mechanism 13, so that all the trays are supported. The lifting mechanism 16 can be separated, and then the trays are stacked on the tray stacking fixture 12 one by one. In this embodiment, the first feeding tray conveying mechanism 1 has two sets of chuck mechanisms 14 and chuck drive mechanisms 15, which are respectively disposed on opposite sides of the track groove 11, so that the clamping mechanism can be The tray mechanism 14 can convey the material trays in a staggered manner, thereby improving the conveying efficiency. In addition, the feeding tray conveying mechanism 1 further includes a buffer jacking mechanism 17 and a buffer supporting block 18, the buffer jacking mechanism 17 is located below the end of the track groove 11 away from the loading and unloading area, and the buffer supporting block 18 18 is arranged on the end of the track groove 11 away from the tray stacking fixture 12. The buffer support block 18 can be turned upward to avoid the tray after being pushed up by the tray. Afterwards, it can be turned down automatically to prevent the tray from falling. Therefore, when there are too many incoming materials from the trays and cannot be sorted, the buffer jacking mechanism 17 and the buffer support block 18 can receive these trays and stack these trays.

As shown in FIGS. 8 to 13 , the tray turning manipulator 4 includes a base frame 41 , a lateral moving mechanism 42 , a moving bracket 43 , two vertical moving mechanisms 44 and 48 , a holding cylinder 45 , a gripper 46 and a turning mechanism. Tool 47, the lateral movement mechanism 42 is disposed on the base frame 41 and the output end is connected with the moving bracket 43 to drive the moving bracket 43 to move laterally. One of the vertical moving mechanisms 44 is disposed on the moving bracket 43 and the output end is connected to the air plate for holding the plate, so as to drive the plate-holding cylinder 45 to move vertically. The output end of the pan-holding cylinder 45 is connected with the claw hands 46 on opposite sides to drive the claw hands 46 to grab or release the material pan. The other vertical moving mechanism 48 is disposed on the moving bracket 43 and the output end is connected with the turning jig 47 to drive the turning jig 47 up and down, and the turning jig 47 can drive the material tray to turn over. By arranging the holding plate cylinder 45 and the claw hand 46, using the holding plate cylinder 45 to drive the claw hand 46, the empty material plate can be quickly clamped and placed on the turning jig 47, and then the turning jig can be used again. 47 Turn the empty tray over, so that the empty tray can be turned 180 degrees, and then use the tray holding cylinder 45 and the gripper 46 to place the flipped empty tray on the tray loaded with chips, and then make the empty tray The tray and the tray carrying the chips are turned over again at the same time, so that the chips can be transferred from one tray to another tray and the front and back sides can be turned over to achieve the purpose of automatic flipping. The degree of automation is high and the labor intensity is effectively reduced.

Please refer to FIGS. 10 to 12 , the flip jig 47 includes a base plate 471 , an upper plate 472 , an upper plate cylinder 473 , a dividing cylinder 474 , a lower plate 475 , a lower plate cylinder 476 , a rotating device 478 and a pressing cylinder 479 . The base plate 471 has a hollow frame structure in the middle, the upper plate 472 is respectively disposed on opposite sides of the upper surface of the base plate 471 , and the upper plate cylinder 473 is disposed between the upper plate 472 and the base plate 471 , so as to drive the upper plate 472 to be close to or away from the middle of the base plate 471 ; The disc dividing cylinders 474 are distributed on opposite sides of the upper surface of the base plate 471 . The lower plates 475 are respectively disposed on opposite sides of the bottom surface of the base plate 471 , and the lower plate cylinders 476 are disposed between the lower plate 475 and the base plate 471 to drive the lower plate 475 to approach or move away from the middle of the base plate 471 . The pressing cylinder 479 is disposed between the base plate 471 and the lower plate 475 to drive the lower plate 475 to approach or move away from the bottom surface of the base plate 471 . By using the upper plate 472 and the lower plate 475 to clamp the material tray, and then using the rotating device 478 to turn over, so that the empty material tray can be turned between the front and back sides, and by setting the lower plate 475 and the lower plate cylinder 476, The two oppositely stacked material trays can be carried on the flip jig 47, and the two oppositely stacked material trays can be positioned and pressed by the pressing cylinder 479, so that the chips can be accurately transferred from one material tray. Transfer to another tray for automatic flipping.

Please refer to FIG. 10 to FIG. 12 again. Specifically, the upper plate 475 is provided with sliders at both ends of one side, and the base plate 471 is provided with sliding rails on the side facing the upper plate. Slide blocks 4751 are provided on one side and two ends, and slide rails 4711 are provided on one side and two ends of the base plate 471 facing the lower board 475 . The two lower plates 475 can move closer to the middle of the base plate 471 or away from the middle of the base plate 471 ; the slider 4751 is provided with a guide column 4752 , and the lower plate 475 is slidably disposed on the guide column 4752 , an elastic member 4753 is arranged between the lower plate 475 and the slider 4751 to provide an elastic force to keep the lower plate 475 away from the slider 4751 , and the elastic member 4753 is a compression spring. By arranging a guide post 4752 on the slider 4751 and an elastic member 4753 between the lower plate 475 and the slider 4751, the lower plate 475 can be automatically moved away from the base plate 471, and In cooperation with the pressing cylinder 479, the two material trays can be automatically pressed against each other or automatically released.

The overturning fixture 47 also includes a disc vibration cylinder (not shown in the figure), the disc vibration cylinder is arranged on the base plate 471, and the output end of the vibration disc cylinder protrudes toward the middle of the base plate 471, thereby Contact can be made with the tray to vibrate the tray. The vibration disc cylinder is provided, which can vibrate the feed disc during the process of flipping the chips from one feed disc to another feed disc, thereby preventing the chips from being stuck on the feed disc and unable to be turned over, effectively improving the success of chip turning Rate.

As shown in FIG. 13 , a pressing plate 4791 is connected to the output end of the pressing cylinder 479 , and the pressing plate 4791 extends to the bottom surfaces of the two lower plates 475 to push the lower plates 4791 during pressing. The plate 475 is adjacent to the base plate 471 . By being arranged on the pressing plate 4791, a pressing cylinder 479 can be used to press the two lower plates 475 at the same time, which effectively reduces the number of the pressing cylinders 479 and simplifies the structure.

Please refer to FIG. 14 and FIG. 15 , the first visual inspection device 6 includes a first bracket 61 , a first lateral drive mechanism 62 , a first platform 63 , a first vertical drive mechanism 64 and a first camera 65 . A lateral drive mechanism 62 is disposed on the first bracket 61, and the output end is connected to the first platform 63 to drive the first platform 63 to slide laterally; the first vertical drive mechanism 64 is disposed at The output end of the first platform 63 is connected to the first camera 65 to drive the first camera 65 to approach or move away from the tray. The first camera 65 is a 2D camera. In this way, the first camera 65 can effectively detect each chip on the tray to avoid missed detection.

14 and 15 again, the second visual inspection device 7 includes a second bracket 71 , a second lateral drive mechanism 72 , a second platform 73 , a second vertical drive mechanism 74 and a second camera 75 . The second lateral drive mechanism 72 is disposed on the second bracket 71, and the output end is connected to the second platform 73 to drive the second platform 73 to slide laterally; the second vertical drive mechanism 74 is provided The output end is connected to the second camera 75 on the second platform 73 to drive the second camera 75 to approach or move away from the tray; the second camera 75 is a 3D camera. The number of the second cameras 75 is at least two. In this way, the second camera 75 can effectively detect each chip on the tray to avoid missed detection. The first visual detection device 6 and the second visual detection device 7 of the present invention are arranged adjacent to each other, so the first bracket 61 and the second bracket 71 can form an integral structure.

As shown in FIG. 16 to FIG. 18 , the sorting arm 51 includes a third bracket 511 , a third lateral drive mechanism 512 , a third platform 513 , a third vertical drive mechanism 514 , a pitch change mechanism 515 , an air cylinder 516 and a suction The nozzle 517, the third lateral driving mechanism 512 is disposed on the third bracket 511 and drives the third platform 513 to move laterally. The third vertical driving mechanism 514 is disposed on the third platform 513 and drives the distance changing mechanism 515 to move vertically. The distance changing mechanism 515 can drive the cylinder 516 and the suction nozzle 517 to adjust the adjacent Spacing of suction nozzles 517. The air cylinder 516 is disposed at the output end of the pitch changing mechanism 515 and the output end is connected with the suction nozzle 517 . The fourth visual inspection device 53 is disposed on the third platform 513 to slide with the third platform 513 and can take pictures of the flipped chip for inspection. The fourth visual inspection device 53 is a 3D camera. The pitch-changing mechanism 515 includes a pitch-changing motor (not shown in the figure), a mounting frame, a drive plate and a mounting frame body. The mounting frame is connected to the output end of the third vertical drive mechanism 514. The motor is arranged on the mounting frame and the conveying end is connected with the driving plate, the driving plate is vertically slidably arranged on the mounting frame and a plurality of guide rails radiating outward are arranged on the side; the mounting frame The body is laterally slidably arranged on the mounting frame, and one end is slidably matched with the guide rail. The air cylinder is arranged on the mounting frame body. The variable-pitch motor drives the driving plate to move vertically, so that the mounting frame bodies move away from or close to each other. Since the arrangement pitches of chips on different types of trays may be different, the distance changing mechanism 515 can be used to clamp chips with different arrangement intervals, so that the sorting robot 5 can adapt to the various trays. Improve the convenience of use. The third visual detection device 52 is disposed at the other end of the third bracket 511, and the third visual detection device 52 is further provided with a fourth lateral drive mechanism 521, and the fourth lateral drive mechanism 521 is disposed at the The third bracket 511 can drive the third visual inspection device 52 to move laterally. The third visual inspection device 52 is a 2D camera.

Summarizing the above and in conjunction with the above-mentioned accompanying drawings, the working principle of turning the feeding tray by the feeding tray turning manipulator 4 is described below:

In the initial state, the shock plate cylinder, the lower plate cylinder 476, the sub-plate cylinder 474) are retracted, and the remaining cylinders are extended; the upper plate 472 is above. When the material tray needs to be turned over, first the vertical moving mechanism 44 drives the claw hand 46 to descend to the empty material tray, and the holding cylinder 45 drives the claw hand 46 to hold an empty material tray and then rises; at the same time, the upper plate cylinder 473 brings the upper plate 472 is closed; the dividing cylinder 474 is extended so that the tray is on the upper level. Then the disc dividing cylinder 474 drives the gripper 46 to open, and the vertical moving mechanism 44 rises; at the same time, the gripper 46 rises and leaves. At this time, the empty tray is clamped on the turning jig 47 . After that, the rotating device 478 drives the turning jig 47 to turn over, so that the empty material tray turns 180°. Then, the vertical movement mechanism 44 drives the claw hand 46 to descend, the claw hand 46 hugs the overturned empty material tray, and then the disc dividing cylinder 474 retracts, and the claw hand 46 drives the empty material tray to return to the original position of the empty material tray superior. Then, the vertical moving mechanism 44 is raised, and the rotating device 478 is reset. After that, the gripper 46 descends to grab the empty tray again and place it on the upper layer of the turning jig 47 . The lateral movement mechanism 42 drives the turning jig 47 to move to the top of the fully loaded tray. Then, the empty tray in the hand of the gripper 46 is placed on top of the fully loaded tray so that the two trays are stacked. After that, the gripper 46 descends to grab the two trays and rises (the top is the empty tray, and the bottom is the fully loaded tray); at this time, the lower plate cylinder 476 and the sub-plate cylinder 474 are extended, so that the lower plate 475 extends out of the tray Hold the lower material tray, the plate dividing cylinder 474 clamps the upper material tray, and at the same time, the pressing cylinder 479 drives the pressing plate 4791, so that the pressing plate 4791 presses against the lower plate 475, and finally the lower plate 475 presses the two material trays. Afterwards, the gripper 46 is released to ascend and avoid, and the rotating device 478 drives the fixture to turn over, so that the two material trays turn 180°. At this time, the fully loaded tray is at the top, and the empty tray is at the bottom. At the same time, the vibration plate cylinder vibrates and knocks the tray, so that the chips are flipped from the fully loaded tray above to the empty tray below (the bottom of the chip is down) , Finally, the gripper 46 descends and hugs the two material trays, the pressing cylinder 479 is released, and then the lower plate 475 is opened, and the gripper 46 drives the fully loaded material tray to descend and place it on the unloading tray conveying mechanism 3 .

With reference to the above drawings, the working principle of the chip detection and sorting machine 100 of the present invention is described below, as follows:

First, manually place a tray full of chips (with the bottom side of the chips facing up) on the tray stacking fixture 12 of the first feeding tray conveying mechanism 1, and place an empty tray on the second feeding tray on the conveying mechanism 2. Afterwards, the lifting mechanism 16 lifts up and carries the material tray, and the disk separating mechanism 13 shrinks and separates from the material tray. Then, the jacking mechanism 16 moves down a distance of the height of a tray. At this time, the disc dividing cylinder 474 of the disc dividing mechanism 13 is extended, and the disc dividing insert is inserted between the lowermost layer and the upper layer of the material tray, so that the lowermost layer of the material tray and the upper layer of the material tray are inserted. Disk separation. At this time, the lifting mechanism 16 drives the lowermost material tray to descend and the material tray is carried on the seat body. Disc clamping and positioning. The chucking mechanism 15 can drive the chucking mechanism 14 to move to the other end along the track groove 11 . When moving to the bottom of the first visual detection device 6 and the second visual detection device 7 in sequence, the chuck drive mechanism 15 stops after the corresponding sensing device senses. At this time, the first visual detection device 6 The chips on the feeding tray are photographed and detected, and the second visual detection device 7 is photographed and detected on the chips on the feeding tray, and the results are recorded on the control system. After that, the chucking mechanism 15 drives the chucking mechanism 14 to move again, and reaches the other end of the track groove 11 after the height-limiting detection of the height-limiting optical fiber, and the chucking mechanism 14 releases the material tray , and then the buffer lifting mechanism 17 lifts the detected tray to the buffer support block 18 to receive the tray, and stacks the trays. At the same time, the second feeding tray conveying mechanism 2 conveys the empty tray to the other end thereof. At this time, the tray turning manipulator 4 transfers the empty trays to one of the unloading tray conveying mechanisms 3, and turns over the fully loaded trays on the first feeding tray conveying mechanism 1 and transfers them to On the other feeding tray conveying mechanisms 3 , both of the feeding tray conveying mechanisms 3 have a feeding tray full of chips, and the other feeding tray conveying mechanism 3 has an empty feeding tray. After that, each of the unloading tray conveying mechanisms 3 transports the respective trays to the lower part of the sorting robot 5 . At this time, the third visual detection device 52 and the fourth visual detection device 53 sequentially detect the chips, and then the sorting robot 5 sorts the chips. Specifically, the control system divides the chips into at least two types, such as qualified or unqualified, according to the results of the visual inspection, so as to control the sorting robot 5 to place the chips of the first type on one of the unloading trays for transportation. On the feeding tray on the mechanism 3, the chips of the second type are placed on the feeding tray on the other said unloading tray conveying mechanism 3, so that the same type of chips can be placed on the same feeding tray. When each feeding tray is full, the feeding tray conveying mechanism 3 corresponding to the feeding tray transports the feeding tray to the feeding end, and stacks the feeding tray on the feeding tray stacking jig, waiting to be taken out. When there is no tray on the unloading tray conveying mechanism 3 , the tray turning manipulator 4 transfers the fully loaded tray on the first feeding tray conveying mechanism 1 to the unloading tray conveying mechanism 3 ; or transfer the empty tray on the second feeding tray conveying mechanism 2 to the unloading tray conveying mechanism 3, so that the sorting can be carried out continuously.

Compared with the prior art, in the present invention, a first feeding tray conveying mechanism 1 is provided to feed a tray fully loaded with chips, and then a first visual detection device is set in the middle of the first feeding tray conveying mechanism 1 . 6 and the second visual detection device 7, the first visual detection device 6 and the second visual detection device 7 are used to visually detect the reverse side of the chips on the tray, so that the difference of each chip can be detected. Then, by arranging the second feeding tray conveying mechanism 2 and a plurality of feeding tray conveying mechanisms side by side, the second feeding tray conveying mechanism 2 is used to empty the feeding tray, and the tray turning manipulator 4 is used to turn the tray full of chips. After being turned over, it is transferred to the unloading tray conveying mechanism 3. Finally, the third visual detection device 52 and the fourth visual detection device 53 are used to detect the front side of the chip, and the sorting robot 5 is used to classify the chips and put them into place. Chips of different types are transferred to different unloading tray conveying mechanisms 3 . Therefore, the chip detection and sorting machine 100 of the present invention does not need manual detection and classification, and the entire process from feeding tray, detection, sorting and unloading is automatically completed, and the degree of automation is extremely high, which greatly reduces labor intensity and improves production efficiency.

The above disclosures are only preferred examples of the present invention, and of course, the scope of the rights of the present invention cannot be limited by this. Therefore, equivalent changes made according to the scope of the patent application of the present invention still belong to the scope covered by the present invention.

Claims (10)

1. A chip detecting and sorting machine, comprising: the automatic sorting machine comprises a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of discharging tray conveying mechanisms, a tray overturning mechanical arm, a sorting mechanical arm, a first visual detection device, a second visual detection device and a third visual detection device; the first feeding tray conveying mechanism, the second feeding tray conveying mechanism and the plurality of discharging tray conveying mechanisms are sequentially arranged side by side; the first feeding tray conveying mechanism is used for feeding a tray full of chips; the second feeding tray conveying mechanism is used for feeding unloaded trays; the blanking disc conveying mechanism is used for blanking a material disc fully loaded with sorting chips; the first visual detection device and the second visual detection device are sequentially arranged above the middle part of the first upper tray conveying mechanism along the conveying direction so as to sequentially photograph and detect the reverse side of the chip on the tray; the material tray overturning manipulator stretches over the first material tray feeding mechanism, the second material tray feeding mechanism and the end parts of the lower material tray feeding mechanisms so as to overturn and transfer material trays on the first material tray feeding mechanism onto the lower material tray feeding mechanism or transfer empty material trays of the second material tray feeding mechanism onto the lower material tray feeding mechanism; the third visual detection device is used for carrying out photographing detection on the front side of the turned chip; the sorting manipulator spans above the plurality of feeding disc conveying mechanisms; the sorting manipulator comprises a sorting arm and a fourth visual detection device, and is used for photographing and detecting the front surface of the chip and sorting and transferring the chip among the material trays of the feeding tray conveying mechanism.

2. The chip detecting and sorting machine according to claim 1, wherein: the tray overturning manipulator comprises a base frame, a transverse moving mechanism, a moving support, two vertical moving mechanisms, a tray holding cylinder, a claw and an overturning jig, wherein the transverse moving mechanism is arranged on the base frame, and the output end of the transverse moving mechanism is connected with the moving support so as to drive the moving support to transversely move; the vertical moving mechanism is arranged on the moving support, and the output end of the vertical moving mechanism is connected with the disc holding air disc so as to drive the disc holding air cylinder to vertically move; the output end of the tray holding cylinder is connected with the claw to drive the claw to grab or release the material tray; and the other vertical moving mechanism is arranged on the moving support, the output end of the vertical moving mechanism is connected with the overturning jig, and the overturning jig can drive the charging tray to overturn.

3. The chip inspection sorter of claim 2, wherein: the turnover jig comprises a substrate, a disc separating cylinder, a lower plate cylinder, a pressing cylinder and a rotating device, wherein the substrate is of a frame structure with a hollow middle part, the disc separating cylinder is arranged on two opposite sides of the upper surface of the substrate, the lower plate is respectively arranged on two opposite sides of the lower bottom surface of the substrate, and the lower plate cylinder is arranged between the lower plate and the substrate so as to drive the lower plate to be close to or far away from the middle part of the substrate; the pressing air cylinder is arranged between the substrate and the lower plate so as to drive the lower plate to be close to or far away from the bottom surface of the substrate.

4. The chip detecting and sorting machine according to claim 3, wherein: the overturning jig further comprises an upper plate and an upper plate air cylinder, wherein the upper plate is respectively arranged on two opposite sides of the upper surface of the substrate, and the upper plate air cylinder is arranged between the upper plate and the substrate to drive the upper plate to be close to or far away from the middle part of the substrate.

5. The chip detecting and sorting machine according to claim 3, wherein: the lower plate is provided with a sliding block, the substrate is provided with a sliding rail, and the sliding block is in sliding fit with the sliding rail; the slider is provided with a guide post, the lower plate is arranged on the guide post in a sliding manner, and an elastic part is arranged between the lower plate and the slider to provide elastic force for enabling the lower plate to be far away from the slider.

6. The chip detecting and sorting machine according to claim 3, wherein: the overturning jig further comprises a vibration disc cylinder, and the vibration disc cylinder is arranged on the base plate to enable the material disc to vibrate.

7. The chip detecting and sorting machine according to claim 6, wherein: the output end of the pressing cylinder is connected with a pressing plate, and the pressing plate extends to the bottom surfaces of the two lower plates so as to push the lower plates to be close to the substrate through the pressing plate during pressing.

8. The chip detecting and sorting machine according to claim 1, wherein: the first visual detection device comprises a first support, a first transverse driving mechanism, a first platform, a first vertical driving mechanism and a first camera, wherein the first transverse driving mechanism is arranged on the first support, and the output end of the first transverse driving mechanism is connected with the first platform so as to drive the first platform to drive the first camera to slide along the transverse direction; the first vertical driving mechanism is arranged on the first platform, and the output end of the first vertical driving mechanism is connected with the first camera so as to drive the first camera to be close to or far away from the material tray.

9. The chip detecting and sorting machine according to claim 1, wherein: the second visual detection device comprises a second support, a second transverse driving mechanism, a second platform, a second vertical driving mechanism and a second camera, wherein the second transverse driving mechanism is arranged on the second support, and the output end of the second transverse driving mechanism is connected with the second platform so as to drive the second platform to drive the second camera to slide along the transverse direction; the second vertical driving mechanism is arranged on the second platform, and the output end of the second vertical driving mechanism is connected with the second camera so as to drive the second camera to be close to or far away from the material tray; the number of the second cameras is at least two.

10. The chip detecting and sorting machine according to claim 1, wherein: the first upper tray conveying mechanism, the second upper tray conveying mechanism and the lower tray conveying mechanism have the same structure; the first feeding tray conveying mechanism comprises a track groove, a tray stacking clamp, a tray separating mechanism, a chuck driving mechanism and a jacking mechanism, wherein the chuck mechanism is slidably arranged in the track groove, and the chuck driving mechanism is arranged in the track groove and drives the chuck mechanism to move along the track groove; the tray stacking fixture is arranged above the input end of the track groove and can stack trays, and the tray separating mechanism is arranged on the track groove and positioned at the bottom of the tray stacking fixture so as to separate a tray which is positioned at the lowest layer in sequence; the jacking mechanism is arranged below the track groove and located below the tray stacking clamp so as to drive the tray to be in the tray stacking clamp and to be transferred between the chuck mechanisms.

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