CN115079075A - Test structure and method for detecting WAT test machine, and test system - Google Patents
Test structure and method for detecting WAT test machine, and test system Download PDFInfo
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- CN115079075A CN115079075A CN202210663522.4A CN202210663522A CN115079075A CN 115079075 A CN115079075 A CN 115079075A CN 202210663522 A CN202210663522 A CN 202210663522A CN 115079075 A CN115079075 A CN 115079075A
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Abstract
The test structure comprises a plurality of test pads and at least one standard electrical structure, wherein the at least one standard electrical structure is electrically connected with the plurality of test pads correspondingly, the standard electrical structure is provided with standard electrical performance parameters, the measured electrical performance parameters of the standard electrical structure are obtained by testing a test part of the WAT test machine, the deviation of the measured electrical performance parameters of the standard electrical structure and the standard electrical performance parameters is used for representing whether the test part of the WAT test machine is abnormal or not, the measured electrical performance parameters of the standard electrical structure in the test structure are obtained, and then whether the test part of the WAT test machine is abnormal or not is determined according to the deviation of the measured electrical performance parameters and the standard electrical performance parameters, so that the detection of the machine before testing a wafer and in the test process is realized, the waste of test production energy and the increase of test cost are avoided, and the incidence rate of test problems is reduced.
Description
Technical Field
The disclosure relates to the technical field of WAT testing, in particular to a testing structure, a testing method, a testing system and a testing device for testing a WAT testing machine.
Background
Wafer acceptance testing is an electrical test of the test structures of the streets after the end of the process to find possible problems in the process, so the electrical parameter values of the test are particularly important.
At present, whether the WAT testing machine is abnormal or not cannot be monitored before the WAT testing machine is adopted to carry out wafer acceptance testing.
Disclosure of Invention
The present disclosure provides a test structure, a method, a test system and a test apparatus for inspecting a WAT tester, which can monitor whether the WAT tester itself is abnormal before a wafer acceptance test is performed by the WAT tester.
According to one aspect of the disclosure, a test structure for inspecting a WAT test machine is provided, where the test structure includes a plurality of test pads and at least one standard electrical structure, the standard electrical structure is electrically connected to the test pads correspondingly, the standard electrical structure has standard electrical performance parameters, the measured electrical performance parameters of the standard electrical structure are obtained by testing a test component of the WAT test machine, and the deviation between the measured electrical performance parameters of the standard electrical structure and the standard electrical performance parameters is used to characterize whether the test component of the WAT test machine is abnormal.
For example, the resistor includes a linear metal wire having a first end electrically connected to one of the plurality of test pads and a second end electrically connected to another one of the plurality of test pads; the capacitor includes a positive plate and a negative plate, the positive plate of the capacitor being electrically connected to one of the plurality of test pads, the negative plate of the capacitor being electrically connected to one of the plurality of test pads; the oscillator comprises a first end and a second end, the first end of the oscillator is electrically connected with one of the plurality of test pads, and the second end of the oscillator is electrically connected with one of the plurality of test pads; the leakage detection structure comprises a first comb-shaped metal wire and a second comb-shaped metal wire which are mutually meshed and insulated, the first comb-shaped metal wire is electrically connected with one of the test pads, and the second comb-shaped metal wire is electrically connected with one of the test pads; the transistor includes a gate electrode, a source electrode, a drain electrode, and a bottom electrode electrically connected to four of the plurality of test pads, respectively.
According to another aspect of the present disclosure, there is provided a method for inspecting a WAT tester by using any one of the above-mentioned test structures, the method including: testing the measured electrical performance parameter of at least one standard electrical structure through a test terminal in contact with the test pad; determining a difference between the measured electrical performance parameter and a standard electrical performance parameter; and determining whether the test part of the WAT test machine is abnormal or not according to the difference.
For example, determining whether the test component of the WAT test machine is abnormal according to the difference value includes: determining that the test component is normal if the difference is within a predetermined range; determining that the test component is abnormal if the difference is not within the predetermined range.
For example, the at least one standard electrical structure comprises a resistor, the standard electrical performance parameter of the resistor comprises a standard resistance value, and testing the measured electrical performance parameter of the at least one standard electrical structure through the test terminal in contact with the test pad comprises: applying a voltage signal to the two test pads connected to the resistor through the test terminal to obtain a current signal flowing through the resistor; determining a measured resistance value of the resistor from the voltage signal and the current signal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: and determining whether the connecting board card and the source measuring unit of the WAT testing machine are abnormal or not according to the difference value between the measured resistance value of the resistor and the standard resistance value.
For example, the at least one standard electrical structure comprises a capacitor, the standard electrical performance parameters of the capacitor comprise a standard capacitance value, and the measuring electrical performance parameters of the at least one standard electrical structure by the test terminal in contact with the test pad comprise: testing the measured capacitance value of the capacitor through the test terminal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: and determining whether the capacitance measuring unit of the WAT testing machine is abnormal or not according to the difference value between the measured capacitance value of the capacitor and the standard capacitance value.
For example, the at least one standard electrical structure comprises an oscillator, the standard electrical performance parameter of the oscillator comprises a standard frequency value, and testing the measured electrical performance parameter of the at least one standard electrical structure through the test terminal in contact with the test pad comprises: testing a measured frequency value of the oscillator through the test terminal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: and determining whether the spectrum analyzer of the WAT test machine is abnormal or not according to the difference value between the measurement frequency value of the oscillator and the standard frequency value.
For example, the at least one standard electrical structure comprises a leakage detection structure, the standard electrical performance parameter of the leakage detection structure comprises a standard leakage current value, and testing the measured electrical performance parameter of the at least one standard electrical structure through a test terminal in contact with the test pad comprises: applying voltage signals to the two test pads connected with the leakage detection structure through the test terminals to obtain a measured leakage current value flowing through the leakage detection structure; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: and determining whether the source measuring unit of the WAT testing machine is abnormal or not according to the difference value between the measured leakage current value and the standard leakage current value.
For example, the at least one standard electrical structure comprises a transistor, the standard electrical performance parameters of the transistor comprise standard charge pulses, and testing the measured electrical performance parameters of the at least one standard electrical structure through a test terminal in contact with the test pad comprises: testing the transistor through the test terminal for a measurement charge pulse; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: and determining whether a pulse signal unit of the WAT test machine is abnormal or not according to the difference value of the measurement charge pulse and the standard charge pulse.
According to another aspect of the present disclosure, there is provided a method for inspecting a WAT tester by using any one of the above-mentioned test structures, the method including: obtaining the measured electrical performance parameters of each standard electrical structure; comparing the measured electrical property parameter with the real electrical property parameter of the standard electrical structure to obtain a comparison result; and determining whether the test part of the WAT test machine is abnormal or not according to the comparison result.
For example, the standard electrical structures include at least one of resistors, capacitors, oscillators, leakage detection structures, and transistors, and the measured electrical performance parameters of each of the standard electrical structures are obtained and include at least one of: acquiring a measured resistance value of the resistor; obtaining a measured capacitance value of the capacitor; obtaining a measurement frequency value of the oscillator; obtaining a measured leakage current value of the leakage detection structure; a measured charge pulse of the transistor is acquired.
For example, determining whether the test component of the WAT test machine is abnormal according to the comparison result includes at least one of: acquiring an absolute value of a difference value between the measured resistance value of the resistor and a standard resistance value, determining that a connection board card and a source measurement unit of the WAT test machine are normal under the condition that the absolute value of the difference value is smaller than a first preset difference value, and otherwise, determining that at least one of the connection board card and the source measurement unit is abnormal; acquiring an absolute value of a difference value between the measured capacitance value of the capacitor and a standard capacitance value, determining that a capacitance measuring unit of the WAT testing machine is normal under the condition that the absolute value of the difference value is smaller than a second preset difference value, and otherwise, determining that the capacitance measuring unit is abnormal; acquiring an absolute value of a difference value between the measurement frequency value and a standard frequency value of an oscillator, determining that a spectrum analyzer of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a third preset difference value, and otherwise, determining that the spectrum analyzer is abnormal; acquiring an absolute value of a difference value between the measured leakage current value and a standard leakage current value of the leakage detection structure, determining that a source measurement unit of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a fourth preset difference value, and otherwise, determining that the source measurement unit is abnormal; and acquiring an absolute value of a difference value between the measured charge pulse and the standard charge pulse of the transistor, determining that a pulse signal unit of the WAT testing machine is normal under the condition that the absolute value of the difference value is smaller than a fifth preset difference value, and otherwise, determining that the pulse signal unit is abnormal.
According to another aspect of the present disclosure, a test system is provided, which includes any one of the above test structures and a WAT test machine.
According to another aspect of the present disclosure, there is provided a test apparatus comprising one or more processors, memory, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the one or more processors, the one or more programs including instructions for performing any one of the above methods of verifying a WAT test station.
By applying the technical scheme, whether the test part of the WAT test machine is abnormal is determined according to the deviation between the measured electrical performance parameter and the standard electrical performance parameter by acquiring the measured electrical performance parameter of the standard electrical structure in the test structure, so that the machine is detected before testing a wafer and in the test process, the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the monitoring of whether the WAT test machine is abnormal before the WAT test machine is adopted to perform wafer acceptance test is at least realized.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and are not to limit the disclosure. In the drawings:
FIG. 1 shows a schematic diagram of a test structure for inspecting a WAT test machine in accordance with an embodiment of the present disclosure;
FIG. 2 illustrates a flow chart of a method for a test structure to inspect a WAT test machine according to an embodiment of the present disclosure;
FIG. 3 shows a schematic diagram of a WAT test station according to an embodiment of the disclosure;
FIG. 4 is a flow chart illustrating another method for a test structure to inspect a WAT test machine according to an embodiment of the present disclosure;
fig. 5 shows a schematic diagram of a pulse signal unit according to an embodiment of the disclosure.
Wherein the figures include the following reference numerals:
10. the test structure is used for inspecting the WAT test machine; 1011. a first test pad; 1012. a second test pad; 1013. a third test pad; 1014. a fourth test pad; 1015. a fifth test pad; 1016. a sixth test pad; 1017. a seventh test pad; 1018. an eighth test pad; 102. a resistor; 103. a capacitor; 104. an oscillator; 105. a leakage detection structure; 106. a transistor; 21. a source measurement unit; 22. a capacitance measuring unit; 23. a spectrum analyzer; 24. a pulse signal unit; 31. connecting a board card; 32. a probe card.
Detailed Description
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. Also, in the specification and claims, when an element is described as being "connected" to another element, the element may be "directly connected" to the other element or "connected" to the other element through a third element.
For convenience of description, some terms or expressions referred to in the embodiments of the present disclosure are explained below:
WAT (wafer Acceptance test): wafer acceptance testing, WAT, aims to test the process condition of each wafer product by testing the electrical parameters of a specific test structure on the wafer, to evaluate the quality and stability of the semiconductor manufacturing process, and to determine whether the wafer product meets the electrical specification requirements of the process technology platform. The WAT data can be used as a quality certificate for delivery of wafer products, in addition, the WAT data can also reflect the actual production condition of a production line, the condition of the production line can be monitored by collecting and analyzing the WAT data, the trend of the production line change can also be judged, and early warning is carried out on the possible condition.
PGU (Pulse signal unit): for measuring the charge pulses.
CMU (Capacitance measurement unit): for measuring capacitance values.
SMU (Source measurement unit): for measuring the leakage current value.
SPA (Spectrum analyzer ): for measuring the frequency value.
At present, the WAT test machine cannot monitor whether the WAT test machine is abnormal or not before a wafer is tested by adopting the WAT test machine, the problem that whether the WAT test machine is abnormal or not cannot be monitored before the wafer is tested by adopting the WAT test machine can be solved by the WAT test machine, and a test structure, a method, a test system and a test device for inspecting the WAT test machine are provided by the disclosure.
The embodiment of the disclosure provides a test structure for inspecting a WAT test machine, the test structure comprises a plurality of test pads and at least one standard electrical structure, the standard electrical structure is electrically connected with the test pads correspondingly, the standard electrical structure has standard electrical performance parameters, the measured electrical performance parameters of the standard electrical structure are obtained by testing a test part of the WAT test machine, and the deviation between the measured electrical performance parameters of the standard electrical structure and the standard electrical performance parameters is used for representing whether the test part of the WAT test machine is abnormal or not. By acquiring the measured electrical performance parameter of the standard electrical structure in the test structure and then determining whether the test part of the WAT test machine is abnormal or not according to the deviation between the measured electrical performance parameter and the standard electrical performance parameter, the machine is detected before a wafer is tested and in the test process, the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the problem that whether the WAT test machine is abnormal or not cannot be monitored by adopting the WAT test machine before the wafer is tested is at least solved.
In some embodiments, to reduce the area of the test structure, the plurality of test pads are arranged in a predetermined direction, for example, the plurality of test pads are arranged in a row or a column.
In some embodiments, as shown in fig. 1, the at least one standard electrical structure comprises at least one of: resistor 102, capacitor 103, oscillator 104, leakage detection structure 105, transistor 106.
In some embodiments, as shown in fig. 1, the resistor 102 includes a linear metal wire (the linear metal wire may be a linear wire or a "bow" wire), a first end of the linear metal wire is electrically connected to one of the plurality of test pads, and a second end of the linear metal wire is electrically connected to another of the plurality of test pads; the capacitor 103 includes a positive electrode plate and a negative electrode plate, the positive electrode plate of the capacitor 103 is electrically connected to one of the plurality of test pads, and the negative electrode plate of the capacitor 103 is electrically connected to another one of the plurality of test pads; the oscillator 104 includes a first terminal and a second terminal, the first terminal of the oscillator 104 is electrically connected to one of the plurality of test pads, and the second terminal of the oscillator 104 is electrically connected to one of the plurality of test pads; the leakage detecting structure 105 includes a first comb-shaped metal line and a second comb-shaped metal line, which are engaged with each other and insulated from each other, the first comb-shaped metal line being electrically connected to one of the plurality of test pads, the second comb-shaped metal line being electrically connected to one of the plurality of test pads; the transistor 106 includes a gate electrode, a source electrode, a drain electrode, and a bottom electrode, and is electrically connected to four of the plurality of test pads, respectively.
The oscillator may be of a conventional oscillator configuration. Illustratively, the oscillator may include one or more inverters, and may further include a capacitor, a resistor, and other circuit structures. For example, the oscillator may be a ring oscillator, but is not limited thereto.
In some embodiments, the at least one standard electrical structure includes a plurality of standard electrical structures, and the plurality of standard electrical structures share at least a portion of the test pad. The number of the test pads is reduced, the area of the test structure is further reduced, and the cost is saved.
In some embodiments, the test structure is located on a scribe line of the wafer. For example, the test structures arranged in a row or a column are disposed on the scribe lines of the wafer to save area.
The embodiment of the present disclosure further provides a method for inspecting a WAT test machine by using any one of the above test structures, as shown in fig. 2, the method includes the following steps:
step S201, testing at least one standard electrical structure measurement electrical performance parameter through a test terminal contacted with the test pad;
step S202, determining the difference value between the measured electrical performance parameter and the standard electrical performance parameter;
step S203, determining whether the test component of the WAT test machine is abnormal according to the difference.
In the above steps, whether the test part of the WAT test machine is abnormal is determined according to the difference between the measured electrical performance parameter and the standard electrical performance parameter, thereby avoiding the waste of test production energy and the increase of test cost, reducing the incidence of test problems, and solving the problem that whether the WAT test machine itself is abnormal can not be monitored before the wafer is tested by using the WAT test machine.
In some embodiments, determining whether the test component of the WAT test station is abnormal according to the difference comprises: determining that the test part is normal if the difference is within a predetermined range; and determining that the test component is abnormal in the case that the difference is not within the predetermined range. And determining whether the test part is normal by judging whether the difference value is within a preset range.
In some embodiments, the at least one standard electrical structure comprises a resistor, the standard electrical performance parameter of the resistor comprises a standard resistance value, and testing the measured electrical performance parameter of the at least one standard electrical structure through the test terminal in contact with the test pad comprises: applying a voltage signal to the two test pads connected to the resistor through the test terminal to obtain a current signal flowing through the resistor; determining a measured resistance value of the resistor based on the voltage signal and the current signal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: according to the difference between the measured resistance value of the resistor and the standard resistance value, it is determined whether the connection board 31 and the source measurement unit 21 of the WAT test machine shown in fig. 3 are abnormal. By determining whether the connecting board card and the source measuring unit of the WAT testing machine are abnormal or not, and further determining whether the testing part of the WAT testing machine is abnormal or not, the waste of testing production energy and the increase of testing cost are avoided, and the incidence rate of testing problems is reduced.
In some embodiments, the at least one standard electrical structure comprises a capacitor, the standard electrical performance parameter of the capacitor comprises a standard capacitance value, and testing the measured electrical performance parameter of the at least one standard electrical structure through the test terminal in contact with the test pad comprises: testing the measured capacitance value of the capacitor through the test terminal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: it is determined whether the capacitance measuring unit 22 (the capacitance measuring unit 22 refers to CMU) of the WAT testing machine in fig. 3 is abnormal according to the difference between the measured capacitance value of the capacitor and the standard capacitance value. Whether the capacitance measuring unit of the WAT testing machine is abnormal is determined according to the difference value between the measured capacitance value of the capacitor and the standard capacitance value, so that the aim of judging whether the testing part of the WAT testing machine is abnormal in many aspects is fulfilled.
In some embodiments, the at least one standard electrical structure comprises an oscillator, the standard electrical performance parameter of the oscillator comprises a standard frequency value, and testing the measured electrical performance parameter of the at least one standard electrical structure through the test terminal in contact with the test pad comprises: testing the measuring frequency value of the oscillator through the testing terminal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: based on the difference between the measured frequency value of the oscillator and the standard frequency value, it is determined whether the spectrum analyzer 23 (the spectrum analyzer 23 means SPA) of the WAT test machine shown in fig. 3 is abnormal. And determining whether the spectrum analyzer of the WAT test machine is abnormal or not according to the difference value between the measurement frequency value of the oscillator and the standard frequency value, thereby achieving the purpose of judging whether the test component of the WAT test machine is abnormal or not in various aspects.
In some embodiments, the at least one standard electrical structure comprises a leakage detection structure, the standard electrical performance parameter of the leakage detection structure comprises a standard leakage current value, and testing the measured electrical performance parameter of the at least one standard electrical structure through a test terminal in contact with the test pad comprises: applying a voltage signal to the two test pads connected to the leakage detection structure through the test terminal to obtain a measured leakage current value flowing through the leakage detection structure; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: according to the difference between the measured leakage current value and the standard leakage current value, it is determined whether the source measurement unit 21 (the source measurement unit 21 refers to SMU) of the WAT test machine in fig. 3 is abnormal. And determining whether the source measuring unit of the WAT testing machine is abnormal or not according to the difference value between the measured leakage current value and the standard leakage current value, thereby achieving the purpose of judging whether the testing part of the WAT testing machine is abnormal or not in various aspects.
In some embodiments, the at least one standard electrical structure comprises a transistor, the standard electrical performance parameters of the transistor comprise standard charge pulses, and testing the measured electrical performance parameters of the at least one standard electrical structure through a test terminal in contact with the test pad comprises: testing the measured charge pulses of the transistor through the test terminal; determining whether the test part of the WAT test machine is abnormal according to the difference comprises the following steps: according to the difference between the measured charge pulse and the standard charge pulse, it is determined whether the pulse signal unit 24 (the pulse signal unit 24 is PGU) of the WAT test machine shown in fig. 3 is abnormal, and according to the difference between the measured charge pulse and the standard charge pulse, it is determined whether the pulse signal unit of the WAT test machine is abnormal, so as to achieve the purpose of determining whether the test component of the WAT test machine is abnormal in many ways.
Specifically, the source and the drain of the transistor are shorted, the excitation pulse signal is applied to the gate of the transistor, the response pulse signal is measured at the bottom electrode of the transistor, and the response pulse signal at the bottom electrode of the transistor is the measurement charge pulse.
The embodiment of the present disclosure further provides a method for inspecting a WAT test machine by using any one of the above test structures, as shown in fig. 4, the method includes the following steps:
step S401, obtaining the measured electrical property parameters of each standard electrical structure;
step S402, comparing the measured electrical property parameters with the real electrical property parameters of the standard electrical structure to obtain a comparison result;
step S403, determining whether the test component of the WAT test machine is abnormal according to the comparison result.
In the above steps, whether the test part of the WAT test machine is abnormal or not is determined by comparing the measured electrical performance parameter with the true electrical performance parameter of the standard electrical structure, thereby avoiding waste of test production energy and increase of test cost, reducing occurrence rate of test problems, and solving the problem that whether the WAT test machine itself is abnormal or not cannot be monitored by using the WAT test machine before testing the wafer.
In some embodiments, the standard electrical structure comprises at least one of a resistor, a capacitor, an oscillator, a leakage detection structure, and a transistor, and the obtaining of the measured electrical performance parameter of each of the standard electrical structures comprises at least one of: acquiring a measured resistance value of the resistor; obtaining a measured capacitance value of the capacitor; obtaining a measuring frequency value of the oscillator; obtaining a measured leakage current value of the leakage detection structure; a measured charge pulse of the transistor is acquired. Therefore, the purpose of judging whether the test part of the WAT test machine is abnormal or not in many aspects is achieved, and the accuracy of the judgment result is further improved.
In some embodiments, determining whether the test component of the WAT test machine is abnormal according to the comparison result includes at least one of: acquiring an absolute value of a difference value between the measured resistance value of the resistor and a standard resistance value, determining that a connection board card and a source measurement unit of the WAT test machine are normal under the condition that the absolute value of the difference value is smaller than a first preset difference value, and otherwise determining that at least one of the connection board card and the source measurement unit is abnormal; acquiring an absolute value of a difference value between the measured capacitance value and a standard capacitance value of a capacitor, determining that a capacitance measuring unit of the WAT testing machine is normal under the condition that the absolute value of the difference value is smaller than a second preset difference value, and otherwise, determining that the capacitance measuring unit is abnormal; acquiring the absolute value of the difference value between the measurement frequency value and the standard frequency value of the oscillator, determining that a spectrum analyzer of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a third preset difference value, and otherwise, determining that the spectrum analyzer is abnormal; acquiring an absolute value of a difference value between the measured leakage current value and a standard leakage current value of the leakage detection structure, determining that a source measurement unit of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a fourth preset difference value, and otherwise, determining that the source measurement unit is abnormal; and acquiring the absolute value of the difference value between the measured charge pulse and the standard charge pulse of the transistor, determining that the pulse signal unit of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a fifth preset difference value, and otherwise, determining that the pulse signal unit is abnormal. Therefore, the purpose of judging whether the test part of the WAT test machine is abnormal or not in many aspects is achieved, and the accuracy of the judgment result is further improved.
The embodiment of the present disclosure further provides a device for inspecting a WAT testing machine, as shown in fig. 5, the device for inspecting a WAT testing machine includes an obtaining unit 51, a comparing unit 52 and a processing unit 53, where the obtaining unit 51 is configured to obtain measured electrical performance parameters of each of the standard electrical structures; the comparing unit 52 is configured to compare the measured electrical property parameter with the actual electrical property parameter of the standard electrical structure to obtain a comparison result; the processing unit 53 is configured to determine whether the test component of the WAT test machine is abnormal according to the comparison result.
In the device for inspecting the WAT test machine, the comparison unit is used for comparing the measured electrical property parameters with the real electrical property parameters of the standard electrical structure, and the processing unit is used for determining whether the test part of the WAT test machine is abnormal or not, so that the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the problem that whether the WAT test machine is abnormal or not cannot be monitored before a wafer is tested by adopting the WAT test machine is solved.
In some embodiments, the standard electrical structure includes at least one of a resistor, a capacitor, an oscillator, a leakage detection structure, and a transistor, and the obtaining unit includes a first obtaining module, a second obtaining module, a third obtaining module, a fourth obtaining module, and a fifth obtaining module, where the first obtaining module is configured to obtain a measured resistance value of the resistor; the second acquisition module is used for acquiring the measured capacitance value of the capacitor; the third acquisition module is used for acquiring the measurement frequency value of the oscillator; the fourth acquisition module is used for acquiring the measured leakage current value of the leakage detection structure; and the fifth acquisition module is used for acquiring the measurement charge pulse of the transistor. Therefore, the purpose of judging whether the test part of the WAT test machine is abnormal or not in many aspects is achieved, and the accuracy of the judgment result is further improved.
In some embodiments, the processing unit includes a sixth obtaining module, a seventh obtaining module, an eighth obtaining module, a ninth obtaining module, and a tenth obtaining module, where the sixth obtaining module is configured to obtain an absolute value of a difference between the measured resistance value of the resistor and a standard resistance value, and determine that the connection board and the source measurement unit of the WAT test machine are normal if the absolute value of the difference is smaller than a first predetermined difference, otherwise, determine that at least one of the connection board and the source measurement unit is abnormal; the seventh obtaining module is configured to obtain an absolute value of a difference between the measured capacitance value of the capacitor and a standard capacitance value, determine that a capacitance measuring unit of the WAT testing machine is normal when the absolute value of the difference is smaller than a second predetermined difference, and otherwise determine that the capacitance measuring unit is abnormal; the eighth obtaining module is configured to obtain an absolute value of a difference between the measurement frequency value of the oscillator and a standard frequency value, and determine that a spectrum analyzer of the WAT test machine is normal if the absolute value of the difference is smaller than a third predetermined difference, otherwise, determine that the spectrum analyzer is abnormal; the ninth obtaining module is configured to obtain an absolute value of a difference between the measured leakage current value and a standard leakage current value of the leakage detection structure, determine that a source measurement unit of the WAT test machine is normal when the absolute value of the difference is smaller than a fourth predetermined difference, and otherwise determine that the source measurement unit is abnormal; the tenth acquiring module is configured to acquire an absolute value of a difference between the measured charge pulse and the standard charge pulse of the transistor, determine that a pulse signal unit of the WAT test machine is normal when the absolute value of the difference is smaller than a fifth predetermined difference, and otherwise determine that the pulse signal unit is abnormal. Therefore, the purpose of judging whether the test part of the WAT test machine is abnormal or not in many aspects is achieved, and the accuracy of the judgment result is further improved.
The embodiment of the disclosure further provides a test system, which includes any one of the above test structures and the WAT test machine. By acquiring the measured electrical performance parameter of the standard electrical structure in the test structure and then determining whether the test part of the WAT test machine is abnormal or not according to the deviation between the measured electrical performance parameter and the standard electrical performance parameter, the machine is detected before a wafer is tested and in the test process, the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the problem that whether the WAT test machine is abnormal or not cannot be monitored by adopting the WAT test machine before the wafer is tested is at least solved.
Embodiments of the present disclosure also provide a testing apparatus comprising one or more processors, a memory, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the one or more processors, and the one or more programs include instructions for performing any of the above-described methods of inspecting a WAT test station. By comparing the measured electrical performance parameters with the real electrical performance parameters of the standard electrical structure, whether the test part of the WAT test machine is abnormal or not is determined, the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the problem that whether the WAT test machine is abnormal or not cannot be monitored before wafers are tested by the WAT test machine is solved.
As shown in fig. 1 and 3, the WAT tester further includes a probe card 32, the connection board 31 is connected to the source measurement unit 21, the capacitance measurement unit 22, the spectrum analyzer 23, the pulse signal unit 24, and the probe card 32, and the probe card is electrically connected to a first test pad 1011, for example, 8 test pads 1011, of the test structure 10 for inspecting the WAT tester, and the test pads are respectively a first test pad 1011, a second test pad 1012, a third test pad 1013, a fourth test pad 1014, a fifth test pad 1015, a sixth test pad 1016, a seventh test pad 1017, and an eighth test pad 1018, and if a voltage is applied between the first test pad 1011 and the second test pad 1012 during testing, the test current can determine whether the connection board 31 and the source measurement unit 21 are abnormal. If the capacitance is detected between the second test pad 1012 and the third test pad 1013 at the time of the test, it is possible to determine whether the capacitance measuring unit 22 is abnormal. If the frequency value is detected between the third test pad 1013 and the fourth test pad 1014 at the time of the test, it is possible to determine whether the spectrum analyzer 23 is abnormal. If a voltage is applied between the fourth test pad 1014 and the fifth test pad 1015 at the time of test and a current is detected, it may be determined whether the source-measurement unit 21 is abnormal. The gate, source, and drain electrodes of the transistor 106 are connected to the fifth test pad 1015, the sixth test pad 1016, the seventh test pad 1017, and the eighth test pad 1018, respectively, and the excitation pulse signal is applied to the gate electrode of the transistor, the response pulse signal is measured at the bottom electrode of the transistor, and it is possible to determine whether the pulse signal unit 24 is abnormal or not based on the response pulse signal.
From the above description, it can be seen that the above-described embodiments of the present disclosure achieve the following technical effects:
1) the application discloses a test structure for inspecting a WAT test machine, whether a test part of the WAT test machine is abnormal or not is determined according to the deviation between the measured electrical performance parameter and the standard electrical performance parameter by acquiring the measured electrical performance parameter of the standard electrical structure in the test structure, the machine is detected before a test wafer and in the test process, the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the problem that whether the WAT test machine is abnormal or not by adopting the WAT test machine before the test wafer is at least solved.
2) According to the method for testing the WAT test machine by the test structure, whether the test part of the WAT test machine is abnormal or not is determined according to the difference value between the measured electrical performance parameter and the standard electrical performance parameter, the waste of test production energy and the increase of test cost are avoided, the incidence rate of test problems is reduced, and the problem that whether the WAT test machine is abnormal or not cannot be monitored by the WAT test machine before a wafer is tested is solved.
The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.
Claims (17)
1. A test structure for inspecting a WAT test station, comprising:
a plurality of test pads;
and the standard electrical structure is correspondingly and electrically connected with the plurality of test pads, the standard electrical structure has standard electrical performance parameters, the measured electrical performance parameters of the standard electrical structure are obtained by testing the test parts of the WAT test machine, and the deviation between the measured electrical performance parameters and the standard electrical performance parameters of the standard electrical structure is used for representing whether the test parts of the WAT test machine are abnormal or not.
2. The test structure of claim 1, wherein the at least one standard electrical structure comprises at least one of: a resistor, a capacitor, an oscillator, a leakage detection structure, a transistor.
3. The test structure of claim 2,
the resistor includes a linear metal line, a first end of the linear metal line being electrically connected to one of the test pads, and a second end of the linear metal line being electrically connected to another one of the test pads;
the capacitor includes a positive plate and a negative plate, the positive plate of the capacitor being electrically connected to one of the plurality of test pads, the negative plate of the capacitor being electrically connected to another of the plurality of test pads;
the oscillator comprises a first end and a second end, the first end of the oscillator is electrically connected with one of the plurality of test pads, and the second end of the oscillator is electrically connected with one of the plurality of test pads;
the leakage detection structure comprises a first comb-shaped metal wire and a second comb-shaped metal wire which are mutually meshed and insulated, the first comb-shaped metal wire is electrically connected with one of the test pads, and the second comb-shaped metal wire is electrically connected with one of the test pads;
the transistor includes a gate electrode, a source electrode, a drain electrode, and a bottom electrode electrically connected to four of the plurality of test pads, respectively.
4. The test structure of any one of claims 1 to 3, wherein the at least one standard electrical structure comprises a plurality of standard electrical structures, the plurality of standard electrical structures sharing at least a portion of the test pads.
5. The test structure of any one of claims 1 to 3, wherein the test structure is located on a scribe line of a wafer.
6. A method of inspecting a WAT test machine using a test structure according to any of claims 1 to 5, comprising:
testing the measured electrical performance parameter of at least one standard electrical structure through a test terminal in contact with the test pad;
determining a difference between the measured electrical performance parameter and a standard electrical performance parameter;
and determining whether the test part of the WAT test machine is abnormal or not according to the difference.
7. The method of claim 6, wherein determining whether the test component of the WAT test machine is abnormal according to the difference comprises:
determining that the test component is normal if the difference is within a predetermined range;
in a case where the difference is not within the predetermined range, it is determined that the test component is abnormal.
8. The method of claim 6, wherein the at least one standard electrical structure comprises a resistor, wherein the standard electrical performance parameter of the resistor comprises a standard resistance value,
testing at least one standard electrical structure for a measured electrical performance parameter through a test terminal in contact with the test pad, comprising:
applying a voltage signal to the two test pads connected to the resistor through the test terminal to obtain a current signal flowing through the resistor;
determining a measured resistance value of the resistor from the voltage signal and the current signal;
determining whether the test part of the WAT test machine is abnormal according to the difference, including:
and determining whether the connection board card and the source measuring unit of the WAT testing machine are abnormal or not according to the difference value between the measured resistance value of the resistor and the standard resistance value.
9. The method of claim 6, wherein the at least one standard electrical structure comprises a capacitor, wherein the standard electrical performance parameter of the capacitor comprises a standard capacitance value,
testing at least one standard electrical structure for a measured electrical performance parameter through a test terminal in contact with the test pad, comprising:
testing the measured capacitance value of the capacitor through the test terminal;
determining whether the test part of the WAT test machine is abnormal according to the difference, including:
and determining whether the capacitance measuring unit of the WAT testing machine is abnormal or not according to the difference value between the measured capacitance value of the capacitor and the standard capacitance value.
10. The method of claim 6, wherein the at least one standard electrical structure comprises an oscillator, wherein a standard electrical performance parameter of the oscillator comprises a standard frequency value,
testing at least one standard electrical structure for a measured electrical performance parameter through a test terminal in contact with the test pad, comprising:
testing a measured frequency value of the oscillator through the test terminal;
determining whether the test part of the WAT test machine is abnormal according to the difference, including:
and determining whether the spectrum analyzer of the WAT test machine is abnormal or not according to the difference value between the measurement frequency value of the oscillator and the standard frequency value.
11. The method of claim 6, wherein the at least one standard electrical structure comprises a leakage detection structure, wherein the standard electrical performance parameter of the leakage detection structure comprises a standard leakage current value,
testing at least one standard electrical structure for a measured electrical performance parameter through a test terminal in contact with the test pad, comprising:
applying voltage signals to the two test pads connected with the leakage detection structure through the test terminals to obtain a measured leakage current value flowing through the leakage detection structure;
determining whether the test part of the WAT test machine is abnormal according to the difference, including:
and determining whether the source measuring unit of the WAT testing machine is abnormal or not according to the difference value between the measured leakage current value and the standard leakage current value.
12. The method of claim 6, wherein the at least one standard electrical structure comprises a transistor, wherein standard electrical performance parameters of the transistor comprise a standard charge pulse,
testing at least one standard electrical structure for a measured electrical performance parameter through a test terminal in contact with the test pad, comprising:
testing the transistor through the test terminal for a measurement charge pulse;
determining whether the test part of the WAT test machine is abnormal according to the difference, including:
and determining whether a pulse signal unit of the WAT test machine is abnormal or not according to the difference value of the measurement charge pulse and the standard charge pulse.
13. A method of inspecting a WAT test machine using a test structure according to any of claims 1 to 5, comprising:
obtaining the measured electrical performance parameters of each standard electrical structure;
comparing the measured electrical property parameter with the real electrical property parameter of the standard electrical structure to obtain a comparison result;
and determining whether the test part of the WAT test machine is abnormal or not according to the comparison result.
14. The method of claim 13, wherein the standard electrical structures comprise at least one of resistors, capacitors, oscillators, leakage detection structures, and transistors, and wherein obtaining a measured electrical performance parameter for each of the standard electrical structures comprises at least one of:
acquiring a measured resistance value of the resistor;
obtaining a measured capacitance value of the capacitor;
obtaining a measurement frequency value of the oscillator;
obtaining a measured leakage current value of the leakage detection structure;
a measured charge pulse of the transistor is acquired.
15. The method of claim 14, wherein determining whether the test component of the WAT test station is abnormal according to the comparison comprises at least one of:
acquiring an absolute value of a difference value between the measured resistance value of the resistor and a standard resistance value, determining that a connection board card and a source measurement unit of the WAT test machine are normal under the condition that the absolute value of the difference value is smaller than a first preset difference value, and otherwise, determining that at least one of the connection board card and the source measurement unit is abnormal;
acquiring an absolute value of a difference value between the measured capacitance value of the capacitor and a standard capacitance value, determining that a capacitance measuring unit of the WAT testing machine is normal under the condition that the absolute value of the difference value is smaller than a second preset difference value, and otherwise, determining that the capacitance measuring unit is abnormal;
acquiring an absolute value of a difference value between the measurement frequency value of the oscillator and a standard frequency value, determining that a spectrum analyzer of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a third preset difference value, and otherwise, determining that the spectrum analyzer is abnormal;
acquiring an absolute value of a difference value between the measured leakage current value and a standard leakage current value of the leakage detection structure, determining that a source measurement unit of the WAT test machine is normal under the condition that the absolute value of the difference value is smaller than a fourth preset difference value, and otherwise, determining that the source measurement unit is abnormal;
and acquiring an absolute value of a difference value between the measured charge pulse and the standard charge pulse of the transistor, determining that a pulse signal unit of the WAT testing machine is normal under the condition that the absolute value of the difference value is smaller than a fifth preset difference value, and otherwise, determining that the pulse signal unit is abnormal.
16. A test system comprising the test structure of any of claims 1 to 4 and a WAT test station.
17. A test apparatus, comprising: one or more processors, memory, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the one or more processors, the one or more programs comprising instructions for performing the method of inspecting a WAT test station of any of claims 13-15.
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| CN117405954A (en) * | 2023-12-14 | 2024-01-16 | 北京智芯微电子科技有限公司 | Method for removing oxide layer of probe card, cleaning and testing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117405954A (en) * | 2023-12-14 | 2024-01-16 | 北京智芯微电子科技有限公司 | Method for removing oxide layer of probe card, cleaning and testing system |
| CN117405954B (en) * | 2023-12-14 | 2024-04-16 | 北京智芯微电子科技有限公司 | Method for removing oxide layer of probe card, cleaning and testing system |
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