CN115046999B - Measuring device and method for measuring adhesion force between interfaces - Google Patents
Measuring device and method for measuring adhesion force between interfaces Download PDFInfo
- Publication number
- CN115046999B CN115046999B CN202210713710.3A CN202210713710A CN115046999B CN 115046999 B CN115046999 B CN 115046999B CN 202210713710 A CN202210713710 A CN 202210713710A CN 115046999 B CN115046999 B CN 115046999B
- Authority
- CN
- China
- Prior art keywords
- sample
- cavity
- moving platform
- dimensional moving
- electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 230000008569 process Effects 0.000 claims abstract description 14
- 230000008859 change Effects 0.000 claims abstract description 11
- 230000005483 Hooke's law Effects 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims description 27
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000004891 communication Methods 0.000 claims description 18
- 238000005259 measurement Methods 0.000 claims description 9
- 235000014676 Phragmites communis Nutrition 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 239000010445 mica Substances 0.000 claims description 7
- 229910052618 mica group Inorganic materials 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 6
- 238000002474 experimental method Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 5
- 239000010963 304 stainless steel Substances 0.000 claims description 3
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 230000006399 behavior Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 238000011160 research Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a measuring device and a method for measuring adhesion force between interfaces, comprising the following steps: the device comprises a white light source, a cavity, an electric three-dimensional moving platform, a cantilever beam, a piezoelectric ceramic moving platform, a sample substrate, an objective lens, a spectroscope, a spectrometer device, a CCD camera and an sCMOS camera. Light beams emitted by the white light source vertically enter the cavity from bottom to top; the light beam passes through the sample substrate to generate multi-beam interference fringes, and is focused and imaged by the objective lens and then split into two parts by the spectroscope: one beam is transmitted to a CCD camera for observing newton rings, and one beam is reflected to a spectrometer device and finally received by an sCMOS camera. In the measuring process, along with the slow movement of the electric three-dimensional moving platform or the piezoelectric ceramic moving platform, the cantilever beam is deformed due to the adhesive force between experimental samples on the sample substrate. The change of the stripe position recorded by the sCMOS camera can reflect the deformation quantity of the cantilever beam, and the adhesion force between sample interfaces can be calculated through Hooke's law according to the rigidity and the deformation quantity of the cantilever beam.
Description
Technical Field
The invention belongs to the field of measuring equipment; in particular to a measuring device and a method for measuring the interfacial adhesion force, which utilize optical signals to be converted into mechanical signals, and calculate the interfacial adhesion force through the relation of the rigidity value, deformation and Hooke's law of a cantilever beam.
Background
The study of different interface behaviors is of great significance in a wide range of fields. By researching different interface behaviors, not only can the development of basic science be promoted, but also the improvement of the technological level can be greatly promoted. With the sustainable development of science and technology and the expansion of market demands, the ability to control different interface behaviors has become a future development trend and research hotspot.
The development of automation and informatization also makes it possible to dynamically control the different interface behaviors. Active control of different interface behaviors by voltage is one of the most widely used of various active control modes and is widely used in many fields. However, with further development of integration and miniaturization of control devices, different interface behaviors on a microscopic scale become more complex, and a great challenge is generated to stability and reliability of a system. Thus, intensive research on different interface behaviors at microscopic scale constitutes a hotspot and difficulty of current research.
Interfacial adhesion is the most dominant force at the interface, and dominates the interface behavior. Therefore, it is needed to develop a measuring device with convenient operation, wide application range and high measurement precision, which is used for accurately, quickly and conveniently measuring the adhesion force between different interfaces.
Disclosure of Invention
It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
To achieve these objects and other advantages and in accordance with the purpose of the invention, there is provided a measuring apparatus for measuring interfacial adhesion, comprising:
a dustproof operation cabinet;
the horizontal base is arranged at the bottom in the dustproof operation cabinet;
the pitch angle adjusting platform is arranged on the horizontal base;
the white light source is connected with an optical fiber, the tail end of the optical fiber is externally connected with a collimating lens and an infrared filter, and the collimating lens is fixed on the pitch angle adjusting platform; the pitch angle adjusting platform can adjust the incidence angle of the light beam;
a manual three-dimensional moving platform arranged on the horizontal base;
The cavity is fixed on the manual three-dimensional moving platform; the cavity can move the position through a manual three-dimensional moving platform; a cavity upper cover is arranged above the cavity; the light beam adjusted by the collimating lens vertically enters the cavity from bottom to top;
The electric three-dimensional moving platform is vertically arranged on the right side of the upper cover of the cavity;
a cantilever beam comprising a fixed end, a double reed and a sample holder A; the cantilever beam is L-shaped, the fixed end of the cantilever beam is vertically connected to a moving platform of the electric three-dimensional moving platform, and the double reed and the sample holder A are parallel to the horizontal base;
the bottom of the piezoelectric ceramic moving table is fixed on the inner side of the cavity upper cover, and the bottom of the piezoelectric ceramic moving table is provided with a sample holder B; the piezoelectric ceramic mobile station is a central round hole type;
Two sample substrates disposed on the sample holders a and B, respectively; the experimental samples are modified on the sample substrate, and liquid medium is dripped between the experimental samples or fills the cavity; the sample substrate on the sample holder A can move through an electric three-dimensional moving platform; the sample substrate on the sample holder B can be moved by a piezoelectric ceramic moving table; each sample substrate comprises a plano-convex cylindrical lens, a semi-transparent semi-reflective film and a thin mica sheet; the convex surface of the plano-convex cylindrical lens is covered with a layer of semi-transparent semi-reflective film, and the semi-transparent semi-reflective film is covered with a layer of thin mica sheet;
A three-dimensional moving support frame which is arranged on the horizontal base;
The objective lens is vertically arranged on the three-dimensional movable supporting frame; the objective lens is positioned above the cavity, and the lens faces the cavity; the objective lens can move through the three-dimensional moving support frame to select different observation positions and focus;
a spectroscope disposed above the objective lens;
The support frame is arranged on the horizontal base;
a spectrometer device comprising an entrance slit S, a grating G, a quasi-mirror M1, mirrors M2, M3; after passing through the entrance slit S, the light beam irradiates the grating G through the quasi-mirror M1 and the reflector M2, and the light beam is scattered by the grating G and reaches the reflector M3, and then reaches the exit after being reflected by the reflector M3; the spectrometer device is arranged on the support frame;
The CCD camera is characterized in that a lens of the CCD camera is connected with a 532nm optical filter through threads and is fixed above the spectroscope, and the lens faces the cavity; the CCD is used for recording Newton rings generated between samples in the experiment;
an sCMOS camera disposed at the spectrometer device outlet;
The data control processing terminal is positioned outside the dustproof operation cabinet; the data control processing terminal is respectively connected with the electric three-dimensional moving platform, the piezoelectric ceramic moving platform, the spectrometer device, the CCD camera and the sCMOS camera in an electric communication mode.
As a preferable scheme of the invention, the wavelength of the white light source is 280-980 nm, and the power is 0.1-150W.
As a preferable scheme of the invention, the manual three-dimensional moving platform is made of metal; the cavity is made of 304 stainless steel.
As a preferable scheme of the invention, the electric three-dimensional moving platform is driven by a motor.
As a preferred embodiment of the present invention, the sample substrates provided on the sample holders a and B are identical in shape.
As a preferred embodiment of the present invention, the plane of the sample substrate is circular, and the radius of curvature of the convex surface is 2cm. The plano-convex lenses of the two sample substrates were crossed and opposed.
As a preferable scheme of the invention, the center points of the plane and the convex surface of the sample substrate are positioned on the optical axis of the optical path, and the plane and the convex surface are perpendicular to the optical axis.
As a preferred embodiment of the present invention, central axes of convex surfaces of the sample substrates provided on the sample holders a and B are perpendicular to each other; and the convex surfaces of the two sample substrates are arranged opposite to each other.
As a preferable scheme of the invention, the electric three-dimensional mobile platform is in electric communication connection with the data control processing terminal through a mobile platform data output port; the piezoelectric ceramic mobile station is in electric communication connection with the data control processing terminal through a piezoelectric data output port; the spectrometer device is in electric communication connection with the data control processing terminal through a spectrometer data output port; the CCD camera is in electric communication connection with the data control processing terminal through an image data output port; the sCMOS camera is connected in electrical communication with the data control processing terminal through an image data output port.
The invention also discloses a method for measuring the interfacial adhesion by using the device, which comprises the following steps:
Step one, modifying an experimental sample on two sample substrates, wherein the two sample substrates are respectively arranged on a sample holder A and a sample holder B;
step two, dripping a liquid medium between two sample base experimental samples or filling the cavity;
Step three, adjusting the incidence angle of the white light beam, enabling the white light beam to vertically penetrate into the cavity from bottom to top, and adjusting the manual three-dimensional moving platform and the electric three-dimensional moving platform to enable the center point of the plane convex surface of the sample substrate to be located on the optical axis of the optical path;
step four, adjusting an objective lens and a spectroscope to enable light beams to vertically and clearly enter a slit of a spectrometer device, and recording an experimental process by using a CCD camera and an sCMOS camera; the sample substrate is made to relatively move until contacting according to the set speed of the electric three-dimensional moving platform; the sample substrate is subjected to separation movement according to the set speed of the piezoelectric ceramic moving table until the sample substrate is completely separated;
Step five, deriving the change condition of stripes recorded by the sCMOS camera in the whole experimental process through a data control processing terminal, and obtaining the change condition of the cantilever beam displacement along with time in the whole experimental process after processing;
And step six, calculating the adhesion force between sample interfaces according to the known rigidity and deformation of the cantilever beam through Hooke's law.
The invention at least comprises the following beneficial effects:
(1) The invention does not need expensive experimental equipment, has high measurement precision and wide applicability.
(2) The main body of the invention has simple light path and does not need a complicated light path alignment process.
(3) The invention can realize the measurement of various forces of different interfaces through simple adjustment, meets the liquid phase and gas phase test environment, and has the advantages of simple test method, strong operability, accurate experimental result and high repeatability of the experimental result.
(4) The invention has large upgradeable potential, and can realize the measurement of various signals between interfaces by coupling other optical, electrical and magnetic signals.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic diagram of the overall system structure of a measuring device for measuring interfacial adhesion according to the present invention.
Fig. 2 is a schematic view of a cavity structure according to the present invention.
Fig. 3 is a schematic view of a cantilever structure according to the present invention.
FIG. 4 is a schematic view of a sample substrate according to the present invention.
FIG. 5 is a schematic view of a sample substrate mounting location according to the present invention.
Fig. 6 is a schematic structural diagram of a spectrometer device according to the present invention.
Fig. 7 is a schematic diagram of the deformation of the cantilever beam according to the present invention.
Fig. 8 is a representative newton ring recorded by a CCD camera according to the present invention.
Fig. 9 is a typical interferogram recorded by an sCMOS camera according to the present invention.
FIG. 10 is a graph of cantilever beam displacement versus time in accordance with the present invention.
Fig. 11 is a schematic diagram of the results of the adhesion measurement experiment.
Detailed Description
The present invention is described in further detail below with reference to the drawings to enable those skilled in the art to practice the invention by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
The invention designs a measuring device for measuring the adhesion force between interfaces, and the measuring device is adopted to deform a cantilever beam along with the slow movement of an electric three-dimensional moving platform or a piezoelectric ceramic moving platform in the measuring process due to the adhesion force between experimental samples on a sample substrate. The change of the stripe position recorded by the sCMOS camera can reflect the deformation quantity of the cantilever beam, and the adhesion force between sample interfaces can be calculated through Hooke's law according to the rigidity and the deformation quantity of the cantilever beam. Meanwhile, according to the change of stripes recorded by the sCMOS camera connected with the spectrometer device, the dynamic change of the contact area and specific parameters can be intuitively displayed. The measuring device has the advantages of convenience in operation, wide application range, high measuring precision and the like, and can well meet the experimental requirements of measuring related parameters.
Fig. 1 shows a measuring apparatus for measuring interfacial adhesion according to the present invention, comprising:
A dustproof operation cabinet 1;
the horizontal base 2 is arranged at the bottom in the dustproof operation cabinet 1, and the horizontal base 2 is horizontally arranged;
A pitch angle adjustment platform 3 provided on the horizontal base 2;
The white light source 4 is connected with the optical fiber 5, the tail end of the optical fiber 5 is externally connected with the collimating lens 6 and the infrared filter 7, and the collimating lens 6 is fixed on the pitch angle adjusting platform 3; the pitch angle adjusting platform 3 can adjust the incidence angle of the light beam;
A manual three-dimensional moving platform 8 provided on the horizontal base 2;
A chamber 9 (the schematic structure of which is shown in fig. 2) fixed on the manual three-dimensional moving platform 8; the cavity 9 can be moved in position by a manual three-dimensional moving platform 8;
the electric three-dimensional moving platform 10 is vertically arranged on the right side of the upper cover of the cavity 9;
Cantilever beam 11 (schematic structure shown in FIG. 3) comprising fixed end 12, double reed 13 and sample holder A; the cantilever beam 11 is L-shaped, wherein the fixed end 12 is positioned at the vertical part of the L-shape, and the double reed 13 and the sample holder A are positioned at the horizontal part of the L-shape; the fixed end 12 is vertically connected to a movable platform of the electric movable platform 10, and the double reed 13 and the sample holder A are parallel to the horizontal base;
A piezoceramic movable stage 14, the bottom of which is fixed inside the upper cover of the cavity 9 and is connected with the sample holder B; the piezoelectric ceramic mobile station 14 is a central round hole type; the piezo-ceramic displacement stage 14 can be displaced in the vertical direction during the measurement.
Two sample substrates 15 (schematic structure shown in fig. 4) provided on the sample holders a and B, respectively (schematic mounting position shown in fig. 5); the experimental sample is modified on the sample substrate 15, and a liquid medium is dripped between the experimental samples on the sample substrate 15 arranged between the sample holder A and the sample holder B or fills the cavity; the sample substrate 15 can be moved by the electric three-dimensional moving platform 10 or the piezoelectric ceramic moving platform 14; each sample substrate 15 comprises a plano-convex cylindrical lens 16, a semi-transparent semi-reflective film 17 and a thin mica sheet 18; the sample substrate comprises a plano-convex cylindrical lens, a semi-transparent semi-reflective film and a thin mica sheet, wherein the convex surface of the plano-convex cylindrical lens is covered with a semi-transparent semi-reflective film, and the semi-transparent semi-reflective film is covered with a thin mica sheet;
A three-dimensional moving support 19 provided on the horizontal base 2;
An objective lens 20 vertically provided on the three-dimensional moving support 19; the objective lens 20 is positioned above the cavity 9, and the lens faces the cavity 9; the objective lens 20 can be moved by the three-dimensional moving support 19 to select different observation positions and focus;
a beam splitter 21 disposed above the objective lens 20;
A support 23 provided on the horizontal base;
A spectrometer device 22 (a schematic structure is shown in fig. 6) including an entrance slit S, a grating G, a quasi-mirror M1, and mirrors M2, M3; the spectrometer device 22 is arranged on a support 23;
A CCD camera 24, the lens of which is screwed with a 532nm optical filter 25 and fixed above the spectroscope 21 and the lens of which faces the cavity 9; the CCD camera 24 is used for recording Newton rings generated between samples in the experiment;
An sCMOS camera 26 disposed at the outlet of the spectrometer device 22;
A data control processing terminal 27 located outside the dust-proof operation cabinet 1; the data control processing terminal 27 is electrically connected in communication with the motorized three-dimensional moving platform 10, the piezoelectric ceramic moving platform 14, the spectrometer device 22, the CCD camera 24, and the sCMOS camera 26, respectively.
In this technical scheme, the experimental sample is modified on a sample substrate, and the sample substrate is respectively arranged on a sample holder A and a sample holder B; dropping a liquid medium between the sample substrates arranged between the sample holders A and B or filling the cavity; the incidence angle of the white light beam is adjusted, so that the white light beam vertically enters the cavity from bottom to top, and the manual three-dimensional moving platform and the electric three-dimensional moving platform are adjusted, so that the center points of the plane convex surfaces of the sample substrates are all positioned on the optical axis of the optical path; the sample substrate is made to relatively move until contacting according to the set speed of the electric three-dimensional moving platform; adjusting the objective lens to enable the CCD camera and the sCMOS camera to record the experimental process; and (3) enabling the sample substrate to perform separation movement according to the set speed of the piezoelectric ceramic moving table until the sample substrate is completely separated. In the measurement process, along with the slow movement of the electric three-dimensional moving platform or the piezoelectric ceramic moving platform, the cantilever beam deforms due to the adhesion force between experimental samples on the sample substrate (the deformation schematic diagram is shown in fig. 7). The change of the stripe position recorded by the sCMOS camera can reflect the deformation quantity of the cantilever beam, and the adhesion force between sample interfaces can be calculated through Hooke's law according to the rigidity and the deformation quantity of the cantilever beam.
In the technical scheme, the wavelength of the white light source is 280-980 nm, and the power is 0.1-150W.
In the above technical scheme, the manual three-dimensional moving platform is made of metal.
In the technical scheme, the cavity is made of 304 stainless steel.
In the technical scheme, the electric three-dimensional moving platform is driven by a motor.
In the above-described technical solution, the sample substrates provided on the sample holders a and B are identical in shape.
In the above technical solution, the plane of the sample substrate is circular, and the radius of curvature of the convex surface is 2cm.
In the above technical solution, the center points of the plane and the convex surface of the sample substrate are both located on the optical axis of the optical path, and the plane and the convex surface are both perpendicular to the optical axis.
In the above-described technical solution, the central axes of the convex surfaces of the sample substrates provided on the sample holders a and B are perpendicular to each other; and the convex surfaces of the two sample substrates are arranged opposite to each other.
In the technical scheme, the electric three-dimensional mobile platform is in electric communication connection with the data control processing terminal through the mobile platform data output port; the piezoelectric ceramic mobile station is in electric communication connection with the data control processing terminal through a piezoelectric data output port; the spectrometer device is in electric communication connection with the data control processing terminal through a spectrometer data output port; the CCD camera is in electric communication connection with the data control processing terminal through an image data output port; the sCMOS camera is connected in electrical communication with the data control processing terminal through an image data output port.
The method for measuring the interfacial adhesion force comprises the following steps:
Step one, modifying an experimental sample on two sample substrates, wherein the two sample substrates are respectively arranged on a sample holder A and a sample holder B and clamped; the sample holder A and the sample holder B are positioned in the cavity;
Step two, dripping a liquid medium between experimental samples arranged on two sample substrates, or filling the cavity;
Step three, adjusting the incidence angle of the white light beam, enabling the white light beam to vertically enter the cavity from bottom to top, and adjusting the manual three-dimensional moving platform and the electric three-dimensional moving platform to enable the center points of the plane and the convex surface of the sample substrate to be located on the optical axis of the optical path;
step four, adjusting an objective lens and a spectroscope to enable a light beam to vertically and clearly enter a slit of a spectrometer device, and recording an experimental process by using a CCD camera (typical Newton rings are shown in FIG. 8) and an sCMOS camera (typical interferograms are shown in FIG. 9); the sample substrate is made to relatively move until contacting according to the set speed of the electric three-dimensional moving platform; the sample substrate is subjected to separation movement according to the set speed of the piezoelectric ceramic moving table until the sample substrate is completely separated;
Step five, deriving the change condition of stripes recorded by the sCMOS camera in the whole experimental process through a data control processing terminal, and obtaining the change condition of the cantilever beam displacement along with time in the whole experimental process after processing (a cantilever beam displacement and time relation diagram is shown in figure 10);
and step six, calculating the adhesion force between sample interfaces according to the known rigidity k and deformation x of the cantilever beam through Hooke's law F=kx.
In the adhesion force measurement experiment, an electric three-dimensional moving platform or a piezoelectric ceramic moving platform is used for driving. When the force acting between the surfaces is attractive, there is a certain period of force imbalance, and the surfaces jump into the state until the forces are balanced again. The two surfaces continue to approach each other until the distance between the two surfaces is no longer changed. Likewise, an imbalance condition may occur during separation of the two surfaces, resulting in a sudden jump of the two surfaces from contact, as shown in fig. 11. The measured distance of the surface jump can thus be used to calculate the adhesion.
Although embodiments of the present invention have been disclosed above, it is not limited to the details and embodiments shown and described, it is well suited to various fields of use for which the invention would be readily apparent to those skilled in the art, and accordingly, the invention is not limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (10)
1. A measurement device for measuring interfacial adhesion, comprising:
a dustproof operation cabinet;
the horizontal base is arranged at the bottom in the dustproof operation cabinet;
the pitch angle adjusting platform is arranged on the horizontal base;
the white light source is connected with an optical fiber, the tail end of the optical fiber is externally connected with a collimating lens and an infrared filter, and the collimating lens is fixed on the pitch angle adjusting platform; the pitch angle adjusting platform can adjust the incidence angle of the light beam;
a manual three-dimensional moving platform arranged on the horizontal base;
The cavity is fixed on the manual three-dimensional moving platform; the cavity can move the position through a manual three-dimensional moving platform; a cavity upper cover is arranged above the cavity; the light beam adjusted by the collimating lens vertically enters the cavity from bottom to top;
The electric three-dimensional moving platform is vertically arranged on the right side of the upper cover of the cavity;
a cantilever beam comprising a fixed end, a double reed and a sample holder A; the cantilever beam is L-shaped, the fixed end of the cantilever beam is vertically connected to a moving platform of the electric three-dimensional moving platform, and the double reed and the sample holder A are parallel to the horizontal base;
the bottom of the piezoelectric ceramic moving table is fixed on the inner side of the cavity upper cover, and the bottom of the piezoelectric ceramic moving table is provided with a sample holder B; the piezoelectric ceramic mobile station is a central round hole type;
Two sample substrates disposed on the sample holders a and B, respectively; the experimental samples are modified on the sample substrate, and liquid medium is dripped between the experimental samples or fills the cavity; the sample substrate on the sample holder A can move through an electric three-dimensional moving platform; the sample substrate on the sample holder B can be moved by a piezoelectric ceramic moving table; each sample substrate comprises a plano-convex cylindrical lens, a semi-transparent semi-reflective film and a thin mica sheet; the convex surface of the plano-convex cylindrical lens is covered with a layer of semi-transparent semi-reflective film, and the semi-transparent semi-reflective film is covered with a layer of thin mica sheet;
A three-dimensional moving support frame which is arranged on the horizontal base;
The objective lens is vertically arranged on the three-dimensional movable supporting frame; the objective lens is positioned above the cavity, and the lens faces the cavity; the objective lens can move through the three-dimensional moving support frame to select different observation positions and focus;
a spectroscope disposed above the objective lens;
The support frame is arranged on the horizontal base;
a spectrometer device comprising an entrance slit S, a grating G, a quasi-mirror M1, mirrors M2, M3; after passing through the entrance slit S, the light beam irradiates the grating G through the quasi-mirror M1 and the reflector M2, and the light beam is scattered by the grating G and reaches the reflector M3, and then reaches the exit after being reflected by the reflector M3; the spectrometer device is arranged on the support frame;
The CCD camera is characterized in that a lens of the CCD camera is connected with a 532nm optical filter through threads and is fixed above the spectroscope, and the lens faces the cavity; the CCD is used for recording Newton rings generated between samples in the experiment;
an sCMOS camera disposed at the spectrometer device outlet;
The data control processing terminal is positioned outside the dustproof operation cabinet; the data control processing terminal is respectively connected with the electric three-dimensional moving platform, the piezoelectric ceramic moving platform, the spectrometer device, the CCD camera and the sCMOS camera in an electric communication mode.
2. A device for measuring interfacial adhesion according to claim 1, wherein: the wavelength of the white light source is 280-980 nm, and the power is 0.1-150W.
3. A device for measuring interfacial adhesion according to claim 1, wherein: the manual three-dimensional moving platform is made of metal; the cavity is made of 304 stainless steel.
4. A device for measuring interfacial adhesion according to claim 1, wherein: the electric three-dimensional moving platform is driven by a motor.
5. A device for measuring interfacial adhesion according to claim 1, wherein: the sample substrates provided on the sample holders a and B were identical in shape.
6. A device for measuring interfacial adhesion according to claim 1, wherein: the plane of the sample substrate is circular, and the radius of curvature of the convex surface is 2cm.
7. A device for measuring interfacial adhesion according to claim 1, wherein: the center points of the plane and the convex surface of the sample substrate are positioned on the optical axis of the optical path, and the plane and the convex surface are perpendicular to the optical axis.
8. A device for measuring interfacial adhesion according to claim 1, wherein: central axes of convex surfaces of the sample substrates provided on the sample holders a and B are perpendicular to each other; and the convex surfaces of the two sample substrates are arranged opposite to each other.
9. A device for measuring interfacial adhesion according to claim 1, wherein:
The electric three-dimensional mobile platform is in electric communication connection with the data control processing terminal through a mobile platform data output port; the piezoelectric ceramic mobile station is in electric communication connection with the data control processing terminal through a piezoelectric data output port; the spectrometer device is in electric communication connection with the data control processing terminal through a spectrometer data output port; the CCD camera is in electric communication connection with the data control processing terminal through an image data output port; the sCMOS camera is connected in electrical communication with the data control processing terminal through an image data output port.
10. A method for measuring interfacial adhesion using the device of any one of claims 1-9, comprising the steps of:
Step one, modifying an experimental sample on two sample substrates, wherein the two sample substrates are respectively arranged on a sample holder A and a sample holder B; the sample holder A and the sample holder B are positioned in the cavity;
step two, dripping a liquid medium between two sample base experimental samples or filling the cavity;
Step three, adjusting the incidence angle of the white light beam, enabling the white light beam to vertically penetrate into the cavity from bottom to top, and adjusting the manual three-dimensional moving platform and the electric three-dimensional moving platform to enable the center point of the plane convex surface of the sample substrate to be located on the optical axis of the optical path;
step four, adjusting an objective lens and a spectroscope to enable light beams to vertically and clearly enter a slit of a spectrometer device, and recording an experimental process by using a CCD camera and an sCMOS camera; the sample substrate is made to relatively move until contacting according to the set speed of the electric three-dimensional moving platform; the sample substrate is subjected to separation movement according to the set speed of the piezoelectric ceramic moving table until the sample substrate is completely separated;
Step five, deriving the change condition of stripes recorded by the sCMOS camera in the whole experimental process through a data control processing terminal, and obtaining the change condition of the cantilever beam displacement along with time in the whole experimental process after processing;
And step six, calculating the adhesion force between sample interfaces according to the known rigidity and deformation of the cantilever beam through Hooke's law.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210713710.3A CN115046999B (en) | 2022-06-22 | 2022-06-22 | Measuring device and method for measuring adhesion force between interfaces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210713710.3A CN115046999B (en) | 2022-06-22 | 2022-06-22 | Measuring device and method for measuring adhesion force between interfaces |
Publications (2)
Publication Number | Publication Date |
---|---|
CN115046999A CN115046999A (en) | 2022-09-13 |
CN115046999B true CN115046999B (en) | 2024-07-02 |
Family
ID=83163787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210713710.3A Active CN115046999B (en) | 2022-06-22 | 2022-06-22 | Measuring device and method for measuring adhesion force between interfaces |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN115046999B (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108226032A (en) * | 2018-01-11 | 2018-06-29 | 天津大学 | A kind of adhesion characteristics measuring method being applied between film and transparent substrates |
CN109269978A (en) * | 2018-11-16 | 2019-01-25 | 西南科技大学 | Measure the measuring device and measuring method of adhesion strength between solid liquid interface under electric field |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6621578B1 (en) * | 1999-11-26 | 2003-09-16 | Olympus Optical Co, Ltd. | Elliposometer, sample positioning mechanism, and polarization angular adjusting mechanism, used in the elliposometer |
CA2957677C (en) * | 2014-08-12 | 2023-05-16 | Hans-Christian LUEDEMANN | Interferometric measurement of liquid volumes |
CN109916903A (en) * | 2019-04-08 | 2019-06-21 | 浙江大学 | Test characterization and transfer automation platform for scalable and flexible integrated device transfer technology |
-
2022
- 2022-06-22 CN CN202210713710.3A patent/CN115046999B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108226032A (en) * | 2018-01-11 | 2018-06-29 | 天津大学 | A kind of adhesion characteristics measuring method being applied between film and transparent substrates |
CN109269978A (en) * | 2018-11-16 | 2019-01-25 | 西南科技大学 | Measure the measuring device and measuring method of adhesion strength between solid liquid interface under electric field |
Also Published As
Publication number | Publication date |
---|---|
CN115046999A (en) | 2022-09-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11169366B2 (en) | Compact microscope | |
EP0406413B1 (en) | Scanning type tunnel microscope | |
US5552716A (en) | Method of positioning an electrooptic probe of an apparatus for the measurement of voltage | |
CN116884872B (en) | Wafer surface curvature radius detection device and method and film stress detection method | |
CN114112322A (en) | A Differential Confocal-Based Microscope Focus Offset Measurement Method | |
JPH11160018A (en) | Non-contact measuring apparatus | |
CN115046999B (en) | Measuring device and method for measuring adhesion force between interfaces | |
US7145659B2 (en) | Light interference measurement method using computer-generated hologram, and interferometer using this method | |
JP4699714B2 (en) | Eccentricity measuring apparatus and eccentricity measuring method | |
CN116989673A (en) | Astronomical telescope reference optical fiber position scanning measurement device and method | |
CN117629592A (en) | Chip optical characteristic test equipment | |
CN114593690B (en) | Novel white light interferometer structure | |
US7630085B2 (en) | Interferometers of high resolutions | |
JP2008268054A (en) | Device for measuring focal position | |
CN105241393B (en) | High-accuracy portable optical surface three-dimensional appearance on-line detector | |
WO1985005674A1 (en) | Shape evaluating apparatus | |
CN104266583A (en) | Multi-degree-of-freedom measuring system | |
JP2791121B2 (en) | Micro surface shape measuring device | |
JP2001174217A (en) | Alignment method for optical inspection equipment and mechanism for the same | |
CN116519179A (en) | Novel reflective surface force instrument and measuring method thereof | |
US20060232784A1 (en) | Interferometers of high resolutions | |
JPH08110212A (en) | Three-dimensional measuring apparatus for electronic part | |
JP3250788B2 (en) | Scanning probe microscope | |
CN117870559A (en) | Method and device for measuring thickness and interval of optical element | |
JPH1054834A (en) | Measuring method of scan probe microscope |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant |